CN103425821A - Method for designing free-form surface grayscale mask - Google Patents
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- CN103425821A CN103425821A CN2013103030593A CN201310303059A CN103425821A CN 103425821 A CN103425821 A CN 103425821A CN 2013103030593 A CN2013103030593 A CN 2013103030593A CN 201310303059 A CN201310303059 A CN 201310303059A CN 103425821 A CN103425821 A CN 103425821A
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Abstract
The invention discloses a method for designing a free-form surface grayscale mask, and belongs to the technical field of micro manufacturing. The method is characterized by comprising the steps of indirectly controlling grayscale unit transmissivity of the grayscale mask by utilizing the process that a target surface model is built through computer-aided design software, utilizing knife road simulation in computer-aided manufacturing for conducting surface discrete of the target surface model, utilizing the knife road simulation in the computer-aided manufacturing for indirectly controlling the arrangement mode of grayscale units in a grayscale mask image, utilizing an improved paving method for conducting longitudinal paving along fixed paving nodes so as to successively generate the grayscale units, using the C++ language and an Auto CAD secondary development tool Object ARX for conducting secondary development on the Auto CAD under the Visual Studio development environment, and conducting free-form surface grayscale mask designing. The method has the advantages of combining correlation theories of the computer-aided product style design, the computer-aided manufacturing and grayscale coding, and achieving the digital design of the free-form surface grayscale mask for the first time.
Description
Technical field
The invention belongs to the micro-fabrication technology field, relate to three-dimensional microstructures and manufacture class, specially refer to a kind of method for designing of free form surface gray scale mask.
Background technology
The gray scale photoetching is the effective ways that a kind of three-dimensional microstructures mass is made, and one of its gordian technique is the design of gray scale mask figure.The gray-level light lithography just can complete the batch making of three-dimensional microstructures by single exposure, simplifying preparation technology aspect the three-dimensional microstructures making, reduce cost of manufacture, has broad application prospects, and receives gradually scientific research personnel's concern.The people such as C.M.Waits utilize the gray scale mask version of gray-scale value gradual change along its length at first to produce the wedge shape photoresist structure, then the plastic structure obtained of usining has been made the silicon wedged microstructures as the masking layer of silicon deep reaction ion etching, and utilize the gray-level light lithography successfully the micro-compressor of tradition to be carried out to structure optimization (list of references [1]: C.M.Waits, B.Morgan, M.Kastantin, R.Ghodssi.Microfabrication of3D silicon MEMS structures using gray-scale lithography and deep reactive ion etching[J] .Sensors and Actuators A119 (2005): 245-253).The people such as Brian Morgan utilize gray-level light lithography and deep reaction ion etching technology to make the fresnel diffraction lens on silicon base, the gray scale mask plate profile that it adopts is for circular, the gray-scale value of the mask plate therefrom peripheral oscillatory type of mind-set changes, on the circumference of same diameter, gray-scale value equates (list of references [2]: Brian Morgan, Christopher M.Waits Development of a Deep Silicon Phase Fresnel Lens Using Gray-Scale Lithography and Deep Reactive Ion Etching.Journal Of Microelectromechanical Systems, 2004, 13(1): 113-120).The people such as Zhang Xinyu have discussed the application prospect of gray-level light lithography in the integrated optics camera lens of near field, the lenticule gray scale mask that to have provided contour shape be circular and rectangle designs, its gray-scale value is from mask plate center gradual change to the periphery (list of references [3]: Zhang Xinyu, Pei Xiandeng, thank long-living. for the technique of gray-scale mask [J] of integrated near field optical head lenticule device. optical technology, 2002,28 (4): 291-295).In the research of gray-level light lithography, the design of mask artwork all just rests on the level on elementary analytic surface (as sphere, anchor ring, plane) at present, could not realize the design of free form surface gray scale mask, so it is the three-dimensional microstructures of elementary analytic surface that the gray-level light lithography can only process surface, its range of application has been subject to certain limitation.One width free form surface gray scale mask figure comprises tens thousand of to hundreds thousand of gray shade unit, the difficult point of its design is how to realize the control of different gray shade unit gray-scale values on the gray scale mask, and existing gray scale mask method for designing can't realize the design of free form surface gray scale mask always.
In the MEMS (micro electro mechanical system) field, urgent need realizes the making of the three-dimensional microstructures of free form surface, to widen the range of application of three-dimensional micro device at present.
Summary of the invention
A kind of method that the purpose of this invention is to provide free form surface gray scale mask design, the mask plate design problem while solving the three-dimensional microstructures of making complex free curved surface.
Technical scheme of the present invention is: utilize computer-aided design (CAD) (CAD) to set up the transmissivity that the target surface model is controlled zones of different gray shade unit on the gray scale mask indirectly; Utilize cutter rail analogy method in computer-aided manufacturing (CAM) target surface model surface to be carried out discrete to obtain orderly curved surface features point; Utilize the indirect arrangement mode of controlling gray shade unit in gray scale mask figure of cutter track simulation in computer-aided manufacturing; Utilize the method for paving the way after improving vertically to pave the way and successively generate gray shade unit along the node of fixedly paving the way; Then using Visual Studio2008(VS2008) as development environment, call the secondary development tool ObjectARX of AutoCAD development platform under the VS2008 development environment, with the C++ programming language, AutoCAD is carried out to the design that secondary development realizes the free form surface gray scale mask.The gray scale mask figure that the present invention obtains designs program and can directly embed in AutoCAD and move, and can call core function and the access AutoCAD database of AutoCAD, has stronger versatility.
The method based on computer-aided design (CAD), computer-aided manufacturing and AutoCAD secondary development design free form surface gray scale mask that the present invention proposes, concrete steps are:
Step 1, according to the technical requirement of device to be processed, set up the target surface model;
Step 2, determine the basic design parameters of gray scale mask figure: gray shade unit pave the way step-length, gray shade unit transmissivity computing formula, node optimization coefficient, minimum pave the way step-length, whirl coating height value and convergent-divergent multiple M;
Step 3, Discrete Surfaces are to obtain the orderly unique point of target curved surface;
Bite rail three-dimensional coordinate point in step 4, extraction cutter rail file;
Step 5, unique point error are checked;
Step 6, configuration AutoCAD secondary development environment;
Step 7, coding, set up ObjectArx type project file, selects ObjectARX/DBX/OMF Project template, then log-in command.
Step 8, generate the node of fixedly paving the way;
Step 9, generation gray shade unit transmissivity chained list;
The method of paving the way after step 10, utilization improve generates gray shade unit and is submitted to the gray shade unit chained list;
Step 11, program compiler, the AutoCAD program can start automatically, loads the file that compiling obtains suffix arx by name, inputs order the operation of above-mentioned registration, obtains gray scale mask figure, finally again its equal proportion convergent-divergent M is doubly obtained to gray scale mask figure.
The detailed process of described step 1 is: utilize 3 d modeling software (as UG, Pro/E etc.) to carry out curved surface modeling, its characteristic dimension is suitably amplified some orders of magnitude so that modeling (as amplified three orders of magnitude).
In described step 2, the concrete of each parameter determines that method is as follows:
1. the gray shade unit step-length of paving the way is determined method
The size P that paves the way of unit of paving the way must meet P
MAX<R
C, P wherein
MAXFor the desirable maximal value of size P of paving the way.Litho machine resolution R
CComputing formula is shown below:
In formula, λ is that litho machine optical source wavelength, σ are the numerical aperture that partial coherence factor, NA are the optical patterning system.
2. gray shade unit transmissivity computing formula is determined method
List of references [2], adopt the demarcation mask plate to carry out engineer testing to a certain photoresist and determine gray shade unit transmissivity computing formula.Embodiment is: at first utilize the AutoCAD Software on Drawing to demarcate mask plate, on mask plate, the gray shade unit transmission ranges is set to (0.2-0.8), the transmissivity value increases with increment 0.1 successively from minimum value, the gray shade unit of transmissivity of the same race take 10 * 10 as one group, forms independently square area; Then utilize the demarcation mask plate to carry out engineer testing to a certain photoresist, obtain photoresist height value corresponding under different transmissivities; Carry out curve fitting, obtain the curvilinear equation between photoresist height and transmissivity, finally obtain the transmissivity computing formula under this process conditions.
3. node optimization coefficient and the minimum step-length of paving the way is determined method
The minimum feature that the node optimization coefficient mainly can be processed by mask manufacturer, mask plate are made price and the technical requirement decision of the three-dimensional microstructures that will make, generally get (0.4-0.6);
Minimum step-length=the step-length of the paving the way * node optimization coefficient of paving the way.
4. the whirl coating height value is determined method
The whirl coating height value is comprehensively determined by technical requirement, the actual process condition of three-dimensional microstructures to be processed.
5. convergent-divergent multiple M determines method
Amplified multiple M while supposing modeling, the convergent-divergent multiple is exactly M. so
The detailed process of described step 3 is: utilize CAM software to carry out tool path simulation to set up curved surface, select the stationary shaft profile to mill, cutter adopts ball head knife, cutting way is unidirectional, stride value and the gray shade unit step-length of paving the way equates, the step-length of paving the way that maximum stride value is gray shade unit, the movement output of Machine-Tool Control is linear, and bite rail and non-bite rail are set as to different colours; After emulation completes, preserve cutter rail file, the tool path simulation schematic diagram as shown in Figure 1.
The detailed process of described step 4 is: as shown in Figure 1, the cutter rail of curved surface is the bite rail, and the outer cutter rail of curved surface is non-bite rail; By being set to different colours, then utilize its color difference to write code, extract the three-dimensional coordinate point of bite rail, these points are the unique point of curved surface, and it is saved as to the text document file.
The detailed process of described step 5 is: surface model and curved surface features point are imported to reverse engineering software, utilize the some cloud to the distance of curved surface function, obtain the error between a cloud and curved surface, error result of calculation schematic diagram as shown in Figure 3.
The detailed process of described step 6 is: check the version number of AutoCAD, the AutoCAD ObjectArx kit of respective version is installed in Visual Studio, and the inc catalogue of ObjectARX and the interpolation of lib catalogue are comprised.
The detailed process of described step 8 is: the text of the three-dimensional coordinate point obtained in read step four, by its write-in characteristic node chained list; Internodal spacing and the minimum step-length of paving the way, maximum are paved the way to the magnitude relationship of step-length as the foundation of optimizing, and concrete optimization method as shown in Figure 4; Optimizing process is as shown in Figure 5: in Fig. 5 (a), because N2-N3 is less than the minimum step-length of paving the way, and N2-N4 paves the way between step-length between pave the way step-length and maximum of minimum, and according to Fig. 4, node N3 is rejected, and the node of having optimized is shown in Fig. 5 (b); In Fig. 5 (c), the distance between N2-N4 is greater than the maximum step-length of paving the way, and according to Fig. 4, gives up origin node N3, gets N2, and the mid point of N4 is as new N3 node; The newly-built node chained list of fixedly paving the way, copy to the characteristic node chained list after optimizing in the newly-built node chained list of fixedly paving the way all Z coordinate figures zero setting of the node chained list of finally paving the way.
The detailed process of described step 9 is: read the characteristic node chained list after optimization, calculate transmissivity according to Z coordinate figure and the transmissivity computing formula of each coordinate points in chained list, and deposit in successively in newly-built transmissivity chained list.
The detailed process of described step 10 is: read at first in order two nodes of fixedly paving the way (as shown in N1, N2 in Fig. 6) in the chained list of fixedly paving the way, then along the X-direction positive dirction, the N1 point of take is starting point, generate at P place of distance N1 the 3rd of the unit node M 1 of paving the way, as shown in M1 in Fig. 6, but invocation point M2 in like manner; Link N1, N2, M1, tetra-nodes of M2 can form the unit of paving the way; Determine the center point coordinate of the unit of paving the way, can obtain the center point coordinate of gray shade unit; Calculate the ratio of similitude of the two according to the transmissivity size of the area of the unit of paving the way and this Nodes gray shade unit, according to ratio of similitude, can calculate the gray shade unit node coordinate, as shown in n2, n1, m1, m2 in Fig. 6 (c); Then fill and can obtain gray shade unit, as shown in Fig. 6 (d); The gray shade unit of generation is submitted to newly-built gray shade unit chained list, then reads N2, two nodes of N3, repeat above-mentioned steps, generate new gray shade unit and be submitted to chained list; Paved the way when program determines a certain row, started to continue to pave the way from secondary series, as shown in Figure 6 (e); Gray shade unit is deleted all auxiliary some line elements after all generating, and the gray scale mask figure finally obtained is as shown in Fig. 6 (f).
Effect of the present invention and benefit are: the present invention combines computer assistant product modeling design, computer-aided manufacturing and AutoCAD secondary development, has realized first the Design of digital of free form surface gray scale mask; The modulation of gray scale mask optical amplitude encoding is combined with computer-aided manufacturing cathetus interpolation cutter orbit making principle, make gray shade unit change and realize adaptive refinement according to the target curvature of curved surface, reduce the quantity of gray shade unit in gray scale mask figure under equal the requirement, saved sequential operation time and mask plate manufacturing cost.
The accompanying drawing explanation
Accompanying drawing 1 is the tool path simulation result schematic diagram.
Accompanying drawing 2 is FREEFORM SURFACE MODEL schematic diagram.
Accompanying drawing 3 is error result of calculation schematic diagram.
Accompanying drawing 4 is node optimization method flow diagrams.
Accompanying drawing 5 is node optimization process schematic diagram, and wherein Fig. 5 (a) and Fig. 5 (c) are for optimizing the front nodal point schematic diagram, and Fig. 5 (b) and Fig. 5 (d) are for optimizing the posterior nodal point schematic diagram.
Accompanying drawing 6 is the process schematic diagram of paving the way of the method for paving the way after improving, wherein Fig. 6 (a) is the node schematic diagram of fixedly paving the way, Fig. 6 (b) is the unit generative process schematic diagram of paving the way, Fig. 6 (c) is gray shade unit node generative process schematic diagram, Fig. 6 (d) fills schematic diagram for gray shade unit, Fig. 6 (e) is other gray shade unit generative process schematic diagram, and Fig. 6 (f) is the last gray scale mask figure schematic diagram generated.
Accompanying drawing 7 is free form surface gray scale mask example schematic diagram.
Embodiment
Describe the specific embodiment of the present invention in detail below in conjunction with technical scheme and accompanying drawing.
The complex free curved surface gray scale mask design concrete steps that the Mickey types of facial makeup in Beijing operas model of take is example are as follows:
Step 1, utilize the reverse modeling software of Imageware to set up FREEFORM SURFACE MODEL Mickey, as shown in Figure 2, its characteristic dimension is long 781.6mm, wide 697.4mm, high 50mm, and characteristic dimension has been amplified 1000 times.
Step 2, according to the technical requirement of device to be processed and the definite minimum of the actual process condition step-length of paving the way, be 2.8 μ m, node optimization coefficient 0.4, whirl coating height 66 μ m, zoom factor 0.001, the transmissivity computing formula is shown below:
H
PIt is target photoresist height value after developing.
Step 3, utilize UG/CAM software Discrete Surfaces
1. open UG software, open surface model Mickey, enter cooked mode;
2. create job sequence, select face profile to mill type;
3. create cutter, select ball head knife, tool diameter is 1.0mm, length 15mm, 0 ° of cone angle, edge length 10mm, blade several 2;
4. driving method is selected area milling, and cutting mode is unidirectional, and stride value is permanent in pave the way step value and stride value are applied on plane, and cutter axis orientation is positive Z axis;
5. the movement output of Machine-Tool Control is chosen as " only linear ";
6. maximum step-length is set in arranging is 2.8mm to the cutter rail, and surplus is set to 0, and component tolerance and marginal tolerances are set to 0.15mm;
7. the bite rail is arranged to separately light bluely, is distinguished mutually with other cutter rails;
8. Tool-path Generation, list the cutter rail, then saves as " Mickey cutter rail .txt " text.
Step 4, extract the bite rail three-dimensional coordinate point in cutter rail file: with python script coding, read line by line cutter rail text, using light blue corresponding code in cutter rail file as the distinguishing mark of bite rail, and then extract the three-dimensional coordinate point of bite rail, save as " Mickey curved surface discrete point .txt " file.
Step 5, unique point error are checked: open surface model Mickey with UG software, save as " Mickey.igs " file; Open ImageWare software, at first import " Mickey.igs " file and " Mickey curved surface discrete point .txt " file, then select successively Surface-Surface to cloud difference, error result of calculation as shown in Figure 3; The profile height average error that calculates the curved surface discrete point after 1000 times of error equal proportion convergent-divergents is 0.0374 μ m, and standard deviation is 0.0260 μ m.
Step 6, configuration development environment: select AutoCAD ObjectARX2010 kit, and coordinate VS2008 to use.Kit is installed in VS2008, is then configured as follows: instrument-option-project and solution-VC++ catalogue, select " comprising catalogue ", add the inc catalogue of ObjectARX; In like manner, in " library file ", add the lib catalogue of ObjectARX.
Step 7, new construction file: newly-built ObjectARX type project file in VS2008, select ObjectARX/DBX/OMF Project template, registration newer command Spring.Property pages at the new construction file is selected attribute configuration-debugging-order, adds the startup file of AutoCAD2010.
Step 8, generate the node of fixedly paving the way: " the Mickey curved surface discrete point .txt " file obtained read step 4), it is write to chained list List_3D, and according to the pave the way magnitude relationship of step-length of internodal spacing and the minimum step-length of paving the way, maximum, List_3D is optimized, concrete optimization method as shown in Figure 4, deposits the chained list after optimizing in newly-built chained list List_3D_OPT; The newly-built node chained list List_2D that fixedly paves the way, copy to the chained list List_3D_OPT after optimizing in the newly-built node chained list List_2D that paves the way all Z coordinate figures zero setting of the node chained list List_2D that finally will pave the way.
Step 9, generate gray shade unit transmissivity chained list: read the chained list List_3D_OPT after optimization, calculate transmissivity according to Z coordinate figure and the transmissivity computing formula (1) of each coordinate points in chained list, and deposit in successively in newly-built transmissivity chained list List_TSL.
Step 10, generate gray shade unit and be submitted to the gray shade unit chained list: read at first in order two nodes of fixedly paving the way in chained list List_2D, then generate two other node of unit of paving the way, four nodes form the unit of paving the way; Open transmissivity chained list List_TSL, read the transmittance values of first Nodes, calculate gray shade unit and the ratio of similitude of the unit of paving the way, take the central point that the unit center point is gray shade unit of paving the way, generate the gray shade unit node in conjunction with pave the way cell node coordinate figure and ratio of similitude, then fill the unit of paving the way and can obtain gray shade unit; The gray shade unit of generation is submitted to newly-built filling chained list, then reads second, third two nodes, repeat above-mentioned steps, generate new gray shade unit and be submitted to chained list; Paved the way when program determines a certain row, started to continue to pave the way from secondary series; Gray shade unit is deleted all auxiliary some line elements after all generating.
Step 11, program compiler, start the AutoCAD program, then loads the arx file that compiling obtains, input mentioned order " spring " working procedure, the gray scale mask figure that obtains, according to 1000 times of equal proportion convergent-divergents, is finally obtained to Mickey free form surface gray scale mask figure, as shown in Figure 7; The Mickey free form surface gray scale mask figure transmission ranges generated is (0.3-0.867), comprises altogether 39637 gray shade unit, and the mask file size is 3.02MB, and program runtime is 525s, and graphics area is 0.31mm
2, profile height average error is 0.0374 μ m, standard deviation is 0.0260 μ m.
The gray scale mask design method that the present invention proposes, realized the design of free form surface gray scale mask, and design error is less, and consuming time shorter, the gray scale mask figure of generation is the AutoCAD file format, and the post-production of being convenient to mask is made.The gray scale mask program designed possesses very strong versatility, and for different target curved surface and processing requests, the parameter such as the transmissivity formula in need only the change program, the step-length of paving the way, node optimization coefficient can realize the design of gray scale mask.
Claims (5)
1. a free form surface gray scale mask design method, its feature comprises five parts:
First: the process of utilizing computer aided design software to set up the target surface model is controlled the transmissivity of zones of different gray shade unit on the gray scale mask indirectly;
Second portion: utilize the simulation of cutter track in computer-aided manufacturing to carry out curved surface to the target surface model discrete;
Third part: utilize the indirect arrangement mode of controlling gray shade unit in gray scale mask figure of cutter track simulation in computer-aided manufacturing;
The 4th part: utilize the method for paving the way after improving vertically to pave the way and successively generate gray shade unit along the node of fixedly paving the way;
The 5th part: use C Plus Plus, AutoCAD secondary development tool ObjectARX under Visual Studio development environment, AutoCAD is carried out to secondary development, carry out the design of free form surface gray scale mask.
2. a kind of free form surface gray scale mask design method according to claim 1, is characterized in that, is from three-dimensional stereo model to two dimensional gray mask figure.
3. a kind of free form surface gray scale mask design method according to claim 1, is characterized in that, the modulation of gray scale mask optical amplitude encoding is combined with CAM cathetus interpolation cutter orbit making principle.
4. a kind of free form surface gray scale mask design method according to claim 1, is characterized in that, the design program selection of developing instrument of gray scale mask figure.
5. a kind of free form surface gray scale mask design method according to claim 1, is characterized in that, gray scale mask figure designs program and directly embeds in AutoCAD and move.
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Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| JP2012159756A (en) * | 2011-02-02 | 2012-08-23 | Nikon Corp | Gray scale mask |
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| JP2012159756A (en) * | 2011-02-02 | 2012-08-23 | Nikon Corp | Gray scale mask |
Non-Patent Citations (4)
| Title |
|---|
| BRIAN MORGAN.ETC: "Development of a Deep Silicon Phase Fresnel Lens", 《JOURNAL OF MICROELECTROMECHANICAL SYSTEM》, vol. 13, no. 1, 31 December 2004 (2004-12-31) * |
| CHRISTOPHER M WAITS.ETC: "Investigation of gray-scale technology for large area 3D silicon MEMS structures", 《JOURNAL OF MICROMECHANICS AND MICROENGINEERING》, 31 December 2003 (2003-12-31) * |
| 冼宗明: "灰度掩膜图的设计系统研究", 《中国优秀硕士学位论文全文数据库 工程科技Ⅱ辑 》, no. 10, 15 October 2012 (2012-10-15) * |
| 段茜: "数字光刻及其制作微光学元件的模拟研究", 《中国优秀硕士学位论文全文数据库 信息科技辑 》, no. 3, 15 March 2007 (2007-03-15) * |
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