JP2012154777A - Thermal radiation light source - Google Patents
Thermal radiation light source Download PDFInfo
- Publication number
- JP2012154777A JP2012154777A JP2011013815A JP2011013815A JP2012154777A JP 2012154777 A JP2012154777 A JP 2012154777A JP 2011013815 A JP2011013815 A JP 2011013815A JP 2011013815 A JP2011013815 A JP 2011013815A JP 2012154777 A JP2012154777 A JP 2012154777A
- Authority
- JP
- Japan
- Prior art keywords
- black body
- temperature
- plate
- body surface
- calibration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000005855 radiation Effects 0.000 title claims abstract description 59
- 238000001931 thermography Methods 0.000 claims abstract description 24
- 238000010438 heat treatment Methods 0.000 claims abstract description 15
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 14
- 238000009826 distribution Methods 0.000 claims abstract description 12
- 229910002804 graphite Inorganic materials 0.000 claims abstract description 7
- 239000010439 graphite Substances 0.000 claims abstract description 7
- 239000003575 carbonaceous material Substances 0.000 claims abstract description 6
- 229910021397 glassy carbon Inorganic materials 0.000 claims abstract description 6
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 claims abstract description 4
- 239000002717 carbon nanostructure Substances 0.000 claims abstract description 3
- 230000000052 comparative effect Effects 0.000 claims description 8
- 239000003990 capacitor Substances 0.000 claims description 3
- 239000011809 glassy carbon fiber Substances 0.000 claims description 2
- 229920000049 Carbon (fiber) Polymers 0.000 abstract description 3
- 239000004917 carbon fiber Substances 0.000 abstract description 3
- 239000002131 composite material Substances 0.000 abstract description 3
- 238000002791 soaking Methods 0.000 abstract description 3
- 239000003779 heat-resistant material Substances 0.000 abstract description 2
- 230000005457 Black-body radiation Effects 0.000 description 12
- 238000000034 method Methods 0.000 description 8
- 239000003973 paint Substances 0.000 description 7
- 238000012360 testing method Methods 0.000 description 6
- 238000005259 measurement Methods 0.000 description 5
- 229910052799 carbon Inorganic materials 0.000 description 4
- 239000002041 carbon nanotube Substances 0.000 description 4
- 229910021393 carbon nanotube Inorganic materials 0.000 description 4
- 239000011261 inert gas Substances 0.000 description 4
- 230000003287 optical effect Effects 0.000 description 4
- 230000003647 oxidation Effects 0.000 description 4
- 238000007254 oxidation reaction Methods 0.000 description 4
- 239000011810 insulating material Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 239000002086 nanomaterial Substances 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 239000000523 sample Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 238000005033 Fourier transform infrared spectroscopy Methods 0.000 description 1
- 239000006096 absorbing agent Substances 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000031700 light absorption Effects 0.000 description 1
- 238000011056 performance test Methods 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000005469 synchrotron radiation Effects 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/52—Radiation pyrometry, e.g. infrared or optical thermometry using comparison with reference sources, e.g. disappearing-filament pyrometer
- G01J5/53—Reference sources, e.g. standard lamps; Black bodies
- G01J5/532—Reference sources, e.g. standard lamps; Black bodies using a reference heater of the emissive surface type, e.g. for selectively absorbing materials
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/52—Radiation pyrometry, e.g. infrared or optical thermometry using comparison with reference sources, e.g. disappearing-filament pyrometer
- G01J5/53—Reference sources, e.g. standard lamps; Black bodies
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Radiation Pyrometers (AREA)
Abstract
Description
本発明は、放射温度計やサーモグラフィの校正・試験に用いられる黒体炉を代表とする熱放射光源に関する。 The present invention relates to a thermal radiation light source typified by a black body furnace used for calibration and testing of radiation thermometers and thermography.
広い波長範囲の白色光を発する熱放射光源は、様々な光学特性試験装置の校正・試験に必須の装置であると共にFTIR等の光学特性試験装置のプローブ光源として利用されている。校正・試験用の光源としては、放射温度計やその一種であるサーモグラフィの校正・試験に使用される各種の黒体炉がある。黒体炉は、黒体空洞と平面黒体を用いる型に2分される。黒体空洞を用いた黒体炉は最も一般的であり、その構造やそれを用いた放射温度計の校正方法については日本工業規格JIS C1612(非特許文献1)に詳細が記載されている。黒体空洞を利用した空洞黒体炉は、容易に理想的な黒体放射を実現できる利点があるが、黒体空洞全体を均一な温度に保つためにヒーターや断熱材等を多量に用いた大型な炉体を必要とする問題がある。2000℃超の温度における黒体放射光を得る場合には、黒体空洞を加熱する際のエネルギー効率を上げるため、黒鉛製の黒体空洞に電流を流して黒体空洞を直接通電加熱することもある。
サーモグラフィのような広い領域の温度分布を測定する装置を校正する際には、一般的な黒体空洞の開口径は小さいために視野欠けが生じる問題がある。視野欠けの問題を避けるため、サーモグラフィや標的サイズが大きい放射温度計の校正には温度制御された平板表面に黒化塗料を塗布した擬似的な黒体面を利用する平面黒体炉が用いられる。一般的な平面黒体炉は、熱伝導率が高い材質の板の片面に黒化塗料を塗布した面(黒体面)の裏面にヒーターやペルチェ素子を設置して温度を所望の値に制御して、その温度での黒体放射を得ている。黒体面を作製する方法としては、上記の黒化塗料を板に塗布する方法の他に特許文献1に記載があるように表面に剣山のような構造を作製することで実効的な光の吸収率すなわち放射率を向上させた平面黒体が使われることがある。
A thermal radiation light source that emits white light in a wide wavelength range is an indispensable device for calibration and testing of various optical property test apparatuses and is used as a probe light source for optical property test apparatuses such as FTIR. As a light source for calibration / testing, there are various blackbody furnaces used for calibration / testing of radiation thermometers and thermography which is a kind thereof. The blackbody furnace is divided into two types using a blackbody cavity and a flat blackbody. A black body furnace using a black body cavity is the most common, and details of its structure and a calibration method of a radiation thermometer using the black body furnace are described in Japanese Industrial Standard JIS C1612 (Non-patent Document 1). A hollow blackbody furnace using a blackbody cavity has the advantage that it can easily achieve ideal blackbody radiation, but a large amount of heaters and heat insulating materials are used to keep the entire blackbody cavity at a uniform temperature. There is a problem that requires a large furnace body. When obtaining blackbody synchrotron radiation at temperatures above 2000 ° C, in order to increase the energy efficiency when heating the blackbody cavity, current is passed through the blackbody cavity made of graphite and the blackbody cavity is directly energized and heated. There is also.
When calibrating a device for measuring a temperature distribution over a wide area, such as thermography, there is a problem that a lack of field of view occurs because the opening diameter of a general black body cavity is small. In order to avoid the problem of lack of field of view, a flat black body furnace using a pseudo black body surface in which blackening paint is applied to a temperature-controlled flat plate surface is used for thermography and calibration of a radiation thermometer having a large target size. In a typical flat black body furnace, a heater or Peltier element is installed on the back side of the surface (black body surface) where blackened paint is applied to one side of a plate with high thermal conductivity to control the temperature to a desired value. The black body radiation at that temperature is obtained. As a method for producing a black body surface, in addition to the above-described method for applying the blackening paint to the plate, effective light absorption can be achieved by producing a sword-like structure on the surface as described in Patent Document 1. Planar black bodies with improved rate or emissivity may be used.
近年、サーモグラフィが使用される機会が増えており、校正に必要な平面黒体炉の性能向上が求められている。平面黒体炉は、空洞黒体炉と比較すると常温の外界に開けた大きな黒体面を有する。そのため、空洞黒体炉と比較して平面黒体炉の熱放射損失は大きくなるため、必要な入力熱量も大きくなると共に黒体面全域の温度均一性を保持する事が困難になる。また、従来の平面黒体炉は裏面からの間接的な加熱方法により黒体面の温度が維持されているため、黒体面の厚さ方向に温度差が生じることを避ける事ができない。そのため、黒体面の温度を正確に測定するためには黒体面上に熱電対や白金抵抗温度計を接触させる必要があるが、接触させた温度計への伝導熱損失により黒体面の温度分布の均一性が悪化してしまう問題がある。また、黒体面の面内方向に温度分布を生じさせないためには黒体面の周囲に断熱材や均熱材を設置する必要があり、製作コストや装置の大きさが増えてしまう難点がある。
また、黒体の材料として使われることが多い黒鉛等の炭素材料は、大気中では500℃〜600℃以上の温度になると酸化が急速に進行してしまう。黒体の酸化による破壊を防ぐためには、黒体表面に不活性ガスを絶えず供給するか真空槽に黒体を保持するといった対策が取られる。しかし、不活性ガスの供給や真空槽の設置に伴うコストの増加や真空槽に設置した窓越しに黒体放射を測定することに起因する誤差の問題が生じる。それゆえ、市販されている平面黒体炉の使用可能な温度の上限はせいぜい600℃となっており、より高温の黒体放射を実現できる平面黒体炉が求められている。
放射温度計を校正する際には、ある温度に保持された黒体炉からの熱放射を校正しようとする放射温度計(被校正放射温度計)と既に校正済みの放射温度計(標準放射温度計)の両者で測定し、相互の測定値を比較することで被校正放射温度計の温度目盛を決定する比較校正が一般に用いられている。比較校正では、被校正放射温度計と標準放射温度計が黒体の同一部分からの熱放射を同一の光学的条件下、すなわち、放射温度計とその測定点とを結んで得られる光軸の距離と角度が同一の条件で同時に測定することが理想である。しかし、従来の平面黒体炉を用いて比較校正を行う際には、被校正放射温度計と標準放射温度計を交互に黒体面に正対させて測定を行う手法が一般的に採用され、測定の同時性の欠如に伴う誤差が生じることや2台の放射温度計を交互に黒体面に光軸合わせするために必要な微動機構の導入に要するコストや校正時間の増加が問題であった。
In recent years, the use of thermography has increased, and there is a demand for improvement in the performance of a flat blackbody furnace necessary for calibration. A planar blackbody furnace has a large blackbody surface opened to the outside at room temperature as compared with a hollow blackbody furnace. Therefore, the heat radiation loss of the flat black body furnace is larger than that of the hollow black body furnace, so that the required input heat amount is increased and it is difficult to maintain temperature uniformity across the entire black body surface. Moreover, since the temperature of the black body surface is maintained by the indirect heating method from the back surface in the conventional flat black body furnace, it is inevitable that a temperature difference occurs in the thickness direction of the black body surface. Therefore, in order to accurately measure the temperature of the black body surface, it is necessary to contact a thermocouple or a platinum resistance thermometer on the black body surface, but due to the loss of conduction heat to the contacted thermometer, the temperature distribution of the black body surface There is a problem that uniformity is deteriorated. Further, in order to prevent the temperature distribution from occurring in the in-plane direction of the black body surface, it is necessary to install a heat insulating material or a soaking material around the black body surface, which increases the production cost and the size of the apparatus.
In addition, a carbon material such as graphite, which is often used as a black body material, rapidly oxidizes at a temperature of 500 ° C. to 600 ° C. or higher in the atmosphere. In order to prevent destruction of the black body due to oxidation, measures are taken such as continuously supplying an inert gas to the surface of the black body or holding the black body in a vacuum chamber. However, there are problems of increased costs due to the supply of inert gas and the installation of the vacuum chamber, and errors due to the measurement of black body radiation through a window installed in the vacuum chamber. Therefore, the upper limit of the usable temperature of a commercially available flat black body furnace is 600 ° C. at most, and there is a demand for a flat black body furnace capable of realizing higher temperature black body radiation.
When calibrating a radiation thermometer, a radiation thermometer (calibrated radiation thermometer) that tries to calibrate thermal radiation from a black body furnace held at a certain temperature and a radiation thermometer that has already been calibrated (standard radiation temperature) In general, a comparative calibration is used in which a temperature scale of a radiation thermometer to be calibrated is determined by measuring both of them and comparing the measured values. In comparative calibration, the radiation thermometer to be calibrated and the standard radiation thermometer radiate heat radiation from the same part of the black body under the same optical conditions, that is, the optical axis obtained by connecting the radiation thermometer and its measurement point. Ideally, the distance and angle should be measured simultaneously under the same conditions. However, when performing comparative calibration using a conventional planar blackbody furnace, a technique is generally adopted in which measurement is performed with the calibrated radiation thermometer and the standard radiation thermometer facing the blackbody surface alternately, There were problems due to errors due to lack of simultaneity of measurement and increased cost and calibration time required to introduce the fine movement mechanism necessary to optically align the two radiation thermometers with the black body surface. .
上記課題を解決するために、本発明の熱放射光源は、等方性黒鉛、ガラス状炭素、炭素繊維複合材等の炭素材料からなる均質かつ厚さが均一な板の全表面にカーボンナノチューブに代表される炭素のナノ構造体を構築することで表面の放射率を高めた板に、電流を流して直接通電加熱を行い板全体の温度を均一に所望の温度に保持することにより、板の複数の平面を所望の温度における黒体面として使用し、複数の放射温度計もしくはサーモグラフィを表裏に位置する黒体面にそれぞれ正対させることで比較校正や複数台の装置の校正を容易かつ効率的にできることを特徴とする。
また、本発明は、上記熱放射光源において、黒体面として用いる板に直列に接続したバッテリー又はコンデンサーから大電流を流して黒体面を高速自己通電加熱することにより室温から所望の温度に瞬時に到達させ、その後、電流の高速フィードバック制御により黒体面の温度を一定に保持し、黒体面の温度分布が伝導熱損失により悪化する前の数秒程度は黒体面全体が均一に所望な温度に保持される特徴を利用して、その間に得られる各黒体面からの熱放射を放射温度計やサーモグラフィ等の校正に利用することを特徴とする。
また、本発明は、上記熱放射光源を2つ以上用い、2枚以上の黒体面を並置して個別に異なる温度に温度制御することで温度が異なる2枚以上の黒体面を隣接させ、異なる温度にある2枚以上の黒体面を同時に一台のサーモグラフィで観測させることにより、当該サーモグラフィの温度分布測定能力を評価できることを特徴とする。
In order to solve the above-mentioned problems, the thermal radiation light source of the present invention has carbon nanotubes on the entire surface of a uniform and uniform plate made of a carbon material such as isotropic graphite, glassy carbon, and carbon fiber composite material. By constructing a representative carbon nanostructure, a plate with increased surface emissivity is subjected to direct current heating by passing an electric current to maintain the temperature of the entire plate uniformly at a desired temperature. By using multiple planes as black body surfaces at the desired temperature, and multiple radiation thermometers or thermography directly facing the black body surfaces located on the front and back, comparative calibration and calibration of multiple devices can be performed easily and efficiently. It is possible to do.
Further, in the present invention, in the above-described heat radiation light source, a desired current is instantaneously reached from room temperature by flowing a large current from a battery or a capacitor connected in series to a plate used as a black body surface and heating the black body surface by high-speed self-energization. After that, the black body surface temperature is kept constant by high-speed feedback control of the current, and the entire black body surface is uniformly held at a desired temperature for a few seconds before the temperature distribution of the black body surface deteriorates due to conduction heat loss. Using the feature, the thermal radiation from each black body surface obtained in the meantime is used for calibration of a radiation thermometer, thermography or the like.
Further, the present invention uses two or more of the above-mentioned heat radiation light sources, and two or more black body surfaces are juxtaposed and temperature-controlled individually to different temperatures so that two or more black body surfaces having different temperatures are adjacent and different. It is characterized in that the temperature distribution measuring ability of the thermography can be evaluated by simultaneously observing two or more black body surfaces at a temperature with one thermography.
本発明による熱放射光源は、一切、均熱板や耐熱材等を使用せず、均一な断面積を持つ導電性物質は、均一に加熱されるという物理的な原理を活用することで黒体面の温度分布を一定にする利点がある。また、黒体面を高速で直接通電加熱するため加熱に要するエネルギー効率が高いと共に黒体面を高温に保持する時間は数秒程度と非常に短いことから、高温に保持する際にも空洞黒体炉に比べても必要な電力は少なくて済む。黒体面を所望の温度に一定にする時間を数秒以下と短くすることにより、高温時に黒体面の酸化を防ぐために黒体面に流す不活性ガスの量を大幅に少なくする事ができる。また、表裏に位置する黒体面それぞれに被校正放射温度計と標準放射温度計を正対させて比較校正を容易に行える。これらの利点から、コストと装置の大きさを大幅に低減できると共に容易に600℃以上の温度での黒体放射を得ることができる。また、温度が異なる2枚以上の黒体面を隣接させ、異なる温度にある2枚以上の黒体面を同時に一台のサーモグラフィで観測させることにより、当該サーモグラフィの温度分布測定能力を評価できる。 The heat radiation light source according to the present invention does not use a soaking plate or a heat-resistant material at all, and a black body surface by utilizing a physical principle that a conductive substance having a uniform cross-sectional area is heated uniformly. This has the advantage of making the temperature distribution constant. In addition, since the black body surface is directly energized and heated at high speed, the energy efficiency required for heating is high and the time for maintaining the black body surface at a high temperature is as short as a few seconds. Compared to this, less power is required. By shortening the time for which the black body surface is kept at a desired temperature to a few seconds or less, the amount of inert gas that flows to the black body surface in order to prevent oxidation of the black body surface at a high temperature can be greatly reduced. Moreover, the calibration calibration thermometer and the standard radiation thermometer can be directly opposed to the black body surfaces located on the front and back sides, so that comparative calibration can be easily performed. From these advantages, the cost and the size of the apparatus can be greatly reduced, and black body radiation at a temperature of 600 ° C. or more can be easily obtained. Moreover, the temperature distribution measurement capability of the thermography can be evaluated by making two or more black body surfaces having different temperatures adjacent to each other and observing two or more black body surfaces at different temperatures simultaneously with one thermography.
本発明による熱放射光源は、黒化塗料をほぼ全表面に均一に塗布した厚さと幅が均一な導電性の板に電流を流して直接通電加熱し、板全面の熱放射を黒体放射とする事に特徴がある。断面積の形状が一定で表面の放射率が均一な板を直接通電加熱する場合、板から周囲への伝導熱損失が輻射による熱損失と比較して無視できる状況では原理的に板表面の温度分布が均一になる特徴がある。伝導熱損失は板を加熱する電流を供給するためのホルダー電極を介して生じるため、ホルダー電極と板との接触面積に対する板の全表面積の比を大きくすれば容易に伝導熱損失の相対的な大きさを減じることができる。
上記の熱放射光源により板全面から黒体放射が得られる事により、板の表裏2面(もしくは側端面を含めた4面)を同時にサーモグラフィもしくは放射温度計の校正に用いる黒体放射光源として用いることができる。この際、どれか1面からの黒体放射光を標準放射温度計で測定し、その他の面からの黒体放射光を被校正放射温度計で測定する事により効率的に比較校正を実施できる利点がある。
上記の熱放射光源において、黒体面の基板として等方性黒鉛、ガラス状炭素、炭素繊維複合材を用い、黒化塗料として垂直配向成長させたカーボンナノチューブの集合体を用いる事により、炭素の持つ高融点の利点を活かして2000℃超の高温における黒体放射を得ることができる。
The thermal radiation light source according to the present invention directly heats the plate by applying a current to a conductive plate having a uniform thickness and width with a black paint applied uniformly over almost the entire surface. There is a feature in doing. When a plate with a uniform cross-sectional area and a uniform surface emissivity is heated directly by energization, the temperature of the plate surface is in principle in a situation where conduction heat loss from the plate to the surroundings can be ignored compared to heat loss due to radiation. The distribution is uniform. Since conduction heat loss occurs through the holder electrode for supplying current to heat the plate, increasing the ratio of the total surface area of the plate to the contact area between the holder electrode and the plate makes it easy to obtain the relative conduction heat loss. The size can be reduced.
Since black body radiation is obtained from the entire surface of the plate by the thermal radiation light source, the front and back surfaces (or four surfaces including the side end surfaces) of the plate are simultaneously used as a black body radiation light source used for thermography or calibration of a radiation thermometer. be able to. At this time, the black body radiation from one of the surfaces can be measured with a standard radiation thermometer, and the black body radiation from the other surface can be measured with a radiation thermometer to be calibrated for efficient comparative calibration. There are advantages.
In the above thermal radiation light source, carbon is obtained by using isotropic graphite, glassy carbon, carbon fiber composite material as a black body surface substrate, and an aggregate of carbon nanotubes grown vertically aligned as blackening paint. Taking advantage of the high melting point, black body radiation at a high temperature exceeding 2000 ° C. can be obtained.
上記の熱放射光源において、大電流を流して急速通電加熱により1秒以内の短時間で平面黒体の温度を室温から所望の高温に到達させた後に、電流の高速フィードバック制御により温度を一定に保持する加熱制御方法を採用することで数秒程度の短時間ではあるが2000℃以上の高温でも板全面の温度を均一に保持することが容易に可能となる。最近のサーモグラフィは温度分布を測定するために要する時間が数10msと短時間になっているため、上記のような方法で得られる短時間の黒体放射で容易に校正が可能となる。また、短時間で急速加熱をすることで黒体周囲の温度上昇を抑える事ができるため、断熱材や冷却設備を用いずに被校正放射温度計を黒体面の近傍に設置できる。サーモグラフィは観測対象との距離が小さくなるにつれて観測範囲が狭まるため、黒体平面近傍にサーモグラフィを設置する事で必要な黒体面の大きさを小さくする事ができ、小型すなわち製造コストが安価でエネルギー消費が少ない平面黒体炉でも十分に校正が可能となる利点を持つ。また、黒体が高温に晒される時間が非常に短時間であるため、黒体の素材として黒鉛等の炭素材料が使われている場合に黒体の酸化を防止するために供給する不活性ガスの量を大幅に低減できる。黒体の酸化を防止するために真空槽に黒体を設置した場合には、上記の校正済の標準放射温度計を介した比較校正を行える配置にすることで真空槽の窓の透過率に起因する誤差を廃した校正が可能である。 In the above heat radiation light source, after a large current is passed and the temperature of the flat black body is reached from room temperature to a desired high temperature within a short time by rapid energization heating, the temperature is kept constant by high-speed feedback control of the current. By adopting the heating control method for holding, it is possible to easily keep the temperature of the entire surface of the plate uniformly even at a high temperature of 2000 ° C. or more although it is a short time of about several seconds. In recent thermography, the time required for measuring the temperature distribution is as short as several tens of ms, and therefore, calibration can be easily performed with the short-time black body radiation obtained by the above method. Moreover, since the temperature rise around the black body can be suppressed by rapid heating in a short time, the calibrated radiation thermometer can be installed near the black body surface without using a heat insulating material or a cooling facility. Since the observation range of the thermography becomes narrower as the distance to the observation object becomes smaller, the size of the necessary blackbody surface can be reduced by installing the thermography near the blackbody plane. It has the advantage that it can be calibrated even in a flat blackbody furnace with low consumption. Also, because the black body is exposed to a high temperature for a very short time, an inert gas supplied to prevent black body oxidation when carbon materials such as graphite are used as the black body material. Can be greatly reduced. When a black body is installed in the vacuum chamber to prevent oxidation of the black body, the transmittance of the vacuum chamber window can be improved by arranging for the comparative calibration via the calibrated standard radiation thermometer. Calibration that eliminates the error is possible.
上記の熱放射光源を2枚以上用い、2枚以上の黒体面を並置して各黒体面を異なる温度に制御することで、サーモグラフィ等の校正において求められている空間的に明確かつ既知の温度差を有する平面黒体炉として用いることができる。 By using two or more of the above-mentioned thermal radiation light sources and juxtaposing two or more black body surfaces and controlling each black body surface to a different temperature, the spatially clear and known temperature required in calibration of thermography etc. It can be used as a flat blackbody furnace having a difference.
本発明の熱放射光源を実施するための1例を図1に示す。寸法50(長さ)×20(幅)×0.1(厚み)mm3のガラス状炭素板の50×20の両面に黒化塗料を塗布する事で作製した黒体面を電池と電流制御素子から構成される通電加熱回路に接続する。ここで、黒化塗料として炭素製の基板から垂直配向成長させたカーボンナノチューブ等のナノ構造体を構築すれば、炭素の持つ高融点の利点を活かして2000℃超の高温における黒体放射を得ることができる。ナノ構造体として本出願人が先に出願した公開済特許技術「電磁波放射体・電磁波吸収体」(特開2010−192581号公報参照)に記載されたカーボンナノチューブ配向集合体がある。電流を供給するための端子は20×0.1の対向する2面にそれぞれ接続し、50×0.1の面に線径0.1mm以下の熱電対を炭素材料用の高温接着剤で接着する。熱電対を接着する場所は、面の中心と電流供給端子を結ぶ直線の中点辺りとする。50×20の2面の中心に校正済の標準放射温度計と被校正対象の放射温度計やサーモグラフィをそれぞれ正対させて設置する。所望の温度に黒体面を保持するため、校正済の標準放射温度計を用いて加熱中の黒体面のガラス状炭素板温度を連続測定し、所望の温度に到達したあとにガラス状炭素板の温度が短時間一定に保持されるように加熱電流をフィードバック制御する。 An example for implementing the thermal radiation light source of the present invention is shown in FIG. A black body surface produced by applying blackening paint on both sides of 50 × 20 of a glassy carbon plate having dimensions 50 (length) × 20 (width) × 0.1 (thickness) mm 3 and a current control element Connected to an energizing heating circuit. Here, if a nanostructure such as carbon nanotubes grown vertically aligned from a carbon substrate is constructed as a blackening paint, black body radiation at a temperature higher than 2000 ° C. is obtained by taking advantage of the high melting point of carbon. be able to. As a nanostructure, there is an aligned carbon nanotube assembly described in published patent technology “electromagnetic wave emitter / electromagnetic wave absorber” (see JP 2010-192581 A) previously filed by the present applicant. Terminals for supplying current are connected to two opposing faces of 20 x 0.1, and a thermocouple with a wire diameter of 0.1 mm or less is bonded to a 50 x 0.1 face with a high-temperature adhesive for carbon materials To do. The location where the thermocouple is bonded is around the midpoint of a straight line connecting the center of the surface and the current supply terminal. A calibrated standard radiation thermometer, a radiation thermometer to be calibrated, and a thermography are installed in the center of two 50 × 20 surfaces. In order to maintain the black body surface at the desired temperature, the glassy carbon plate temperature of the black body surface being heated is continuously measured using a calibrated standard radiation thermometer, and after reaching the desired temperature, The heating current is feedback controlled so that the temperature is kept constant for a short time.
黒体面の温度制御に関しては、例えば、本出願人が先に出願した公開済特許技術「物体加熱方法及び装置」(特開2008−116285号公報参照)に準じて行った。すなわち、黒体面に直列に接続した電池(コンデンサーでも良い。)から大電流を流して黒体面を高速自己通電加熱することにより室温から所望の温度に瞬時に到達させ、校正済み標準温度計で黒体面が所望の温度に到達したことを検知したら、その後、黒体面の温度が所望の温度に一定保持されるように電流制御素子のゲート電圧をフィードバック制御して、電流の高速フィードバック制御により黒体面の温度を一定に保持するものである。 The temperature control of the black body surface was performed in accordance with, for example, a published patent technique “object heating method and apparatus” (see JP 2008-116285 A) previously filed by the present applicant. That is, a large current is passed from a battery (capacitor may be connected) in series with the black body surface, and the black body surface is instantaneously reached from room temperature to the desired temperature by high-speed self-energization heating. When it is detected that the body surface has reached the desired temperature, the gate voltage of the current control element is then feedback controlled so that the temperature of the black body surface is kept constant at the desired temperature, and the black body surface is subjected to high-speed current feedback control. The temperature is kept constant.
熱電対については、試料に電流を流している間は、熱電対接点にも電流が流れるため測定される熱電対起電力には電流による電圧降下が誤差として加わってしまう。そこで、輝度温度が一定になり約1秒経過後に電流を停止し、その直後の熱電対起電力から黒体面の真温度を決定する。 Regarding the thermocouple, while a current is flowing through the sample, a current also flows through the thermocouple contact, so that a voltage drop due to the current is added to the measured thermocouple electromotive force as an error. Therefore, the luminance temperature becomes constant and the current is stopped after about 1 second, and the true temperature of the black body surface is determined from the thermocouple electromotive force immediately after that.
上記の熱放射光源を2つ以上用いて、2枚以上の黒体面を並置して個別に異なる温度に温度制御することで温度が異なる2枚以上の黒体面を隣接させ、異なる温度にある黒体面を同時に一台のサーモグラフィで観測させることにより、当該サーモグラフィの温度分布測定能力を評価することができる。 Two or more black body surfaces are juxtaposed using two or more of the above-mentioned heat radiation light sources, and two or more black body surfaces having different temperatures are made adjacent to each other by controlling the temperature separately to different temperatures. By observing the body surface with one thermography at the same time, the temperature distribution measuring ability of the thermography can be evaluated.
Claims (3)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011013815A JP5633071B2 (en) | 2011-01-26 | 2011-01-26 | Calibration method of radiation thermometer using thermal radiation source |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011013815A JP5633071B2 (en) | 2011-01-26 | 2011-01-26 | Calibration method of radiation thermometer using thermal radiation source |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2012154777A true JP2012154777A (en) | 2012-08-16 |
JP5633071B2 JP5633071B2 (en) | 2014-12-03 |
Family
ID=46836651
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011013815A Expired - Fee Related JP5633071B2 (en) | 2011-01-26 | 2011-01-26 | Calibration method of radiation thermometer using thermal radiation source |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP5633071B2 (en) |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2014186026A1 (en) | 2013-05-15 | 2014-11-20 | Raytheon Company | Carbon nanotube blackbody film for compact, lightweight, and on-demand infrared calibration |
JP2015203589A (en) * | 2014-04-11 | 2015-11-16 | 国立研究開発法人産業技術総合研究所 | Carbon nano-tube standard blackbody furnace apparatus |
KR20170086578A (en) * | 2014-11-19 | 2017-07-26 | 레이던 컴퍼니 | Multi-layer advanced carbon nanotube blackbody for compact, lightweight, and on-demand infrared calibration |
US10139287B2 (en) | 2015-10-15 | 2018-11-27 | Raytheon Company | In-situ thin film based temperature sensing for high temperature uniformity and high rate of temperature change thermal reference sources |
CN111006773A (en) * | 2019-11-26 | 2020-04-14 | 北京振兴计量测试研究所 | MEMS infrared radiation surface uniformity improving system in space environment |
CN112033543A (en) * | 2020-07-21 | 2020-12-04 | 深圳市优必选科技股份有限公司 | Blackbody alignment method and device, robot and computer readable storage medium |
CN113670445A (en) * | 2021-07-30 | 2021-11-19 | 合肥工业大学 | Calibration method for imaging heterogeneity of thermal infrared imager |
CN114264374A (en) * | 2021-12-27 | 2022-04-01 | 西南交通大学 | Temperature measurement calibration method for metal wire rapid heating equipment |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005249427A (en) * | 2004-03-01 | 2005-09-15 | National Institute Of Advanced Industrial & Technology | Thermophysical property measuring method and device |
JP2007516018A (en) * | 2003-05-27 | 2007-06-21 | カーディオウエーブ インコーポレーテッド | Apparatus and method for technology for remotely and non-invasively detecting the core body temperature of a subject by infrared image |
JP2008116285A (en) * | 2006-11-02 | 2008-05-22 | National Institute Of Advanced Industrial & Technology | Method and device for heating article |
JP2010192581A (en) * | 2009-02-17 | 2010-09-02 | National Institute Of Advanced Industrial Science & Technology | Electromagnetic wave radiator and electromagnetic wave absorber |
-
2011
- 2011-01-26 JP JP2011013815A patent/JP5633071B2/en not_active Expired - Fee Related
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007516018A (en) * | 2003-05-27 | 2007-06-21 | カーディオウエーブ インコーポレーテッド | Apparatus and method for technology for remotely and non-invasively detecting the core body temperature of a subject by infrared image |
JP2005249427A (en) * | 2004-03-01 | 2005-09-15 | National Institute Of Advanced Industrial & Technology | Thermophysical property measuring method and device |
JP2008116285A (en) * | 2006-11-02 | 2008-05-22 | National Institute Of Advanced Industrial & Technology | Method and device for heating article |
JP2010192581A (en) * | 2009-02-17 | 2010-09-02 | National Institute Of Advanced Industrial Science & Technology | Electromagnetic wave radiator and electromagnetic wave absorber |
Cited By (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2014186026A1 (en) | 2013-05-15 | 2014-11-20 | Raytheon Company | Carbon nanotube blackbody film for compact, lightweight, and on-demand infrared calibration |
CN105210191A (en) * | 2013-05-15 | 2015-12-30 | 雷神公司 | Carbon nanotube blackbody film for compact, lightweight, and on-demand infrared calibration |
EP2997599A4 (en) * | 2013-05-15 | 2017-05-17 | Raytheon Company | Carbon nanotube blackbody film for compact, lightweight, and on-demand infrared calibration |
JP2015203589A (en) * | 2014-04-11 | 2015-11-16 | 国立研究開発法人産業技術総合研究所 | Carbon nano-tube standard blackbody furnace apparatus |
KR102007588B1 (en) | 2014-11-19 | 2019-08-05 | 레이던 컴퍼니 | Apparatus and method for producing blackbody spectrum and film for generating blackbody radiation spectrum |
TWI684002B (en) * | 2014-11-19 | 2020-02-01 | 美商瑞西恩公司 | Apparatus, film and method for producing a blackbody spectrum |
JP2018501469A (en) * | 2014-11-19 | 2018-01-18 | レイセオン カンパニー | Multi-walled carbon nanotube blackbody for small, lightweight on-demand infrared calibration |
CN107076617A (en) * | 2014-11-19 | 2017-08-18 | 雷神公司 | For compact, the light weight and on demand advanced CNT black matrix of multilayer of infrared calibration |
KR20170086578A (en) * | 2014-11-19 | 2017-07-26 | 레이던 컴퍼니 | Multi-layer advanced carbon nanotube blackbody for compact, lightweight, and on-demand infrared calibration |
US10527499B2 (en) | 2015-10-15 | 2020-01-07 | Raytheon Company | In-situ thin film based temperature sensing for high temperature uniformity and high rate of temperature change thermal reference sources |
US10527500B2 (en) | 2015-10-15 | 2020-01-07 | Raytheon Company | In-situ thin film based temperature sensing for high temperature uniformity and high rate of temperature change thermal reference sources |
US10139287B2 (en) | 2015-10-15 | 2018-11-27 | Raytheon Company | In-situ thin film based temperature sensing for high temperature uniformity and high rate of temperature change thermal reference sources |
CN111006773A (en) * | 2019-11-26 | 2020-04-14 | 北京振兴计量测试研究所 | MEMS infrared radiation surface uniformity improving system in space environment |
CN112033543A (en) * | 2020-07-21 | 2020-12-04 | 深圳市优必选科技股份有限公司 | Blackbody alignment method and device, robot and computer readable storage medium |
CN113670445A (en) * | 2021-07-30 | 2021-11-19 | 合肥工业大学 | Calibration method for imaging heterogeneity of thermal infrared imager |
CN113670445B (en) * | 2021-07-30 | 2022-10-18 | 合肥工业大学 | Method for calibrating imaging heterogeneity of thermal infrared imager |
CN114264374A (en) * | 2021-12-27 | 2022-04-01 | 西南交通大学 | Temperature measurement calibration method for metal wire rapid heating equipment |
CN114264374B (en) * | 2021-12-27 | 2023-08-25 | 西南交通大学 | Temperature measurement and calibration method for metal wire rapid heating equipment |
Also Published As
Publication number | Publication date |
---|---|
JP5633071B2 (en) | 2014-12-03 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5633071B2 (en) | Calibration method of radiation thermometer using thermal radiation source | |
Zhu et al. | Realizing high conversion efficiency of Mg3Sb2-based thermoelectric materials | |
Zeng et al. | Thermally conductive reduced graphene oxide thin films for extreme temperature sensors | |
JP5459907B2 (en) | Evaluation apparatus for substrate mounting apparatus, evaluation method therefor, and evaluation substrate used therefor | |
KR102007588B1 (en) | Apparatus and method for producing blackbody spectrum and film for generating blackbody radiation spectrum | |
JP6388784B2 (en) | Carbon nanotube standard blackbody furnace equipment | |
KR101102414B1 (en) | Thermoelectric device characteristics measuring apparatus and measuring method of the same | |
JP2005249427A (en) | Thermophysical property measuring method and device | |
WO2010116809A1 (en) | Heating apparatus for x-ray inspection | |
US20140314118A1 (en) | Blackbody function | |
KR20150007686A (en) | Thermoelectric property measurement system | |
US9459154B2 (en) | Multi-layer advanced carbon nanotube blackbody for compact, lightweight, and on-demand infrared calibration | |
KR20170090351A (en) | High temperature structure for measuring of properties of curved thermoelectric device, system for measuring of properties of curved thermoelectric device using the same and method thereof | |
CN105157436A (en) | Rapid-heating heat treatment furnace | |
JP2020134237A (en) | Device and method for measuring seebeck coefficient | |
Papanastasiou et al. | Stable Flexible Transparent Electrodes for Localized Heating of Lab‐on‐a‐Chip Devices | |
Zhao et al. | Graphene microheater chips for in situ TEM | |
CN109613054B (en) | Direct-electrifying longitudinal heat conductivity coefficient testing method | |
CN103163117B (en) | High-temperature optical constant measuring method for metal oxide layer | |
RU2510491C2 (en) | Method of measuring emissivity factor | |
CN109781309B (en) | High-precision calibration device and method for film type heat flow meter | |
JPWO2017164104A1 (en) | Thermoelectric module power generation evaluation device | |
Webb et al. | Near-field radiative heat transfer measurements between parallel plates | |
JP4959844B2 (en) | X-ray inspection heating device | |
JP2014095640A (en) | X-ray inspection heating device and planar heater |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20130904 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20140221 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20140311 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20140430 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20140708 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20140826 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20140924 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20140925 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 5633071 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
S533 | Written request for registration of change of name |
Free format text: JAPANESE INTERMEDIATE CODE: R313533 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
LAPS | Cancellation because of no payment of annual fees |