JP2012152103A - Multihead type coreless linear motor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To realize a device configuration which can accommodate a difference in required thrust between plural workpieces mounted on linear motor needles.SOLUTION: A multihead type coreless linear motor comprises a permanent magnetic field having P pieces of permanent magnet 6 which are arranged in a way that their magnetic poles differ alternately and an armature having M pieces of armature coil 3 which are intensively wound and connected in three phases, and is constructed in such a way that the armature and the permanent magnet 6 are composed as a needle 1 and a stator 4, and a plurality of needles 1 are arranged in a row on the same stator 4, allowing the plurality of needles 1 to be driven separately from each other. The plurality of needles 1 are each configured with a small thrust needle 12a provided with one set and a large thrust needle 11a provided with two sets, one set consisting of a combination where a ratio of the number of poles of the permanent magnet, P, to the number of armature coils 3, M, in the armature coil 3 and the permanent magnet 6 facing each other conforms to a prescribed value.

Description

  INDUSTRIAL APPLICABILITY The present invention is used in a table feeder such as a glass substrate transfer device, a semiconductor manufacturing device, or a machine tool, and in particular, drives a linear motor to freely move a plurality of movers that are moving bodies relative to a stator. The present invention relates to a multi-head coreless linear motor.

2. Description of the Related Art Conventionally, a coreless linear motor has been proposed that has a multi-head specification in which a plurality of movers of the same size are arranged side by side on the same stator and the plurality of movers are driven separately (for example, Patent Documents). 1).
FIG. 13 is a prior art coreless linear motor, in which (a) is a side view thereof and (b) is a front view of (a). In FIG. 13, reference numeral 1 denotes a mover constituting an armature, and the mover 1 is composed of a plurality of armature coils 3 wound in a concentrated manner on a mover base 2 and connected in three phases. Reference numeral 4 denotes a stator that forms a permanent magnet field, and is arranged to face the armature via a magnetic gap. The stator 4 includes a field yoke 5 and a plurality of permanent magnets 6 provided so that magnetic poles are alternately different in the longitudinal direction of the field yoke 5, that is, in a so-called linear direction.
In such a linear motor, a plurality of movers 1 having the same physique are arranged on the same stator 4, and separate works (not shown) mounted on the mover 1 can be moved.

Japanese Patent Laid-Open No. 2001-21630 (Specification, page 3, FIG. 1)

  However, with the conventional arrangement of the mover of the linear motor, there is a problem that, for example, when a user requests that the required thrust differs among a plurality of movers, this cannot be handled.

  The present invention has been made in view of such problems, and even when there is a difference in necessary thrusts of a plurality of workpieces mounted on a linear motor movable element, a multi-head coreless that can cope with this difference. An object is to provide a linear motor.

In order to solve the above problems, the present invention is configured as follows.
According to the first aspect of the present invention, a permanent magnet field having P permanent magnets arranged so that magnetic poles are alternately different in a linear direction, and the permanent magnet field are opposed to each other through a magnetic gap. And an armature having M armature coils which are wound in a concentrated manner and connected in three phases, and the armature is used as a mover and the permanent magnet field is used as a stator. In addition, in the multi-head coreless linear motor in which the plurality of movers are separately driven with respect to the stator by arranging a plurality of the movers on the same stator, The plurality of movers are set in a predetermined set, with a combination of the armature coil and the permanent magnet facing each other in which the ratio between the number of magnetic poles of the permanent magnet and the number of the armature coils is a predetermined value. It is characterized and the small-thrust moving part provided with a large-thrust moving part provided with a large number of sets than the predetermined set number, in that they are composed of.
According to a second aspect of the present invention, in the multi-head coreless linear motor according to the first aspect, the combination in which the ratio of the number of magnetic poles of the permanent magnet to the number of the armature coils is 4: 3 is 1 The set is characterized in that the number of sets of the large thrust movers is larger than the number of sets of the small thrust movers.
According to a third aspect of the present invention, in the multi-head coreless linear motor of the second aspect, when the pole pitch is τp, the length of the large thrust mover is 4τp × N (N is (8/3) τp by arranging the V-phase coil provided on the small thrust mover with an electrical angle of 360 ° shifted from the mover length of the small thrust mover. It is characterized by that.
According to a fourth aspect of the present invention, in the multi-head coreless linear motor according to the first aspect, the combination in which the ratio of the number of magnetic poles of the permanent magnet to the number of the armature coils is 5: 3 is one. The set is characterized in that the number of sets of the large thrust movers is larger than the number of sets of the small thrust movers.
According to a fifth aspect of the present invention, in the multi-head coreless linear motor according to the fourth aspect of the present invention, when the pole pitch is τp, the length of the large thrust mover is 5τp × N (N is (10/3) τp by arranging the W-phase coil of the small thrust mover with an electrical angle of 360 ° shifted from that of the small thrust mover. It is characterized by that.

  According to the invention of the multi-head type coreless linear motor according to the first to fifth aspects, it is possible to realize an apparatus configuration that can cope with a difference in required thrusts of a plurality of workpieces.

It is a multihead type coreless linear motor which shows a 1st comparative example, Comprising: (a) is the side view, (b) is a front view of (a). It is a multihead type coreless linear motor which shows a 2nd comparative example, Comprising: (a) is the side view, (b) is a front view of (a). FIG. 3 is an enlarged plan sectional view of the arrangement of a small thrust mover and a stator in FIG. 2. It is a multi-head type coreless linear motor which shows 1st Embodiment, Comprising: (a) is the side view, (b) is a front view of (a). FIG. 5 is an enlarged plan sectional view of the arrangement of the small thrust mover and the stator in FIG. 4. It is a multi-head type coreless linear motor which shows a 3rd comparative example, Comprising: (a) is the side view, (b) is a front view of (a). It is the plane sectional view which expanded arrangement of the small thrust mover of FIG. 6, and a stator. It is a multi-head type coreless linear motor which shows a 4th comparative example, Comprising: (a) is the side view, (b) is a front view of (a). It is a multi-head type coreless linear motor which shows a 5th comparative example, Comprising: (a) is the side view, (b) is a front view of (a). It is a multi-head type coreless linear motor which shows a 6th comparative example, Comprising: (a) is the side view, (b) is a front view of (a). It is a multi-head type coreless linear motor which shows 2nd Embodiment, Comprising: (a) is the side view, (b) is a front view of (a). The motor characteristic of each needle | mover of the workpiece | work mounting object common to each embodiment and a comparative example, and the comparison table of the required required thrust calculated based on it are shown. It is a multihead type coreless linear motor of a prior art, (a) is the side view, (b) is the front view of (a). It is the multi-head type coreless linear motor of basic embodiment, Comprising: (a) is the side view, (b) is the front view of (a).

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
[Basic embodiment]
FIG. 14 shows a coreless linear motor according to a basic embodiment, in which (a) is a side view and (b) is a front view of (a). The linear motor shown in the figure will be described in which the mover is an armature and the stator is a field.
In FIG. 14, 11a is a large thrust armature, 12a is a small thrust armature, 31a is a large thrust armature coil, and 32a is a small thrust armature coil.
In this linear motor, the combination of the number P of the permanent magnet field P and the number M of the armature coils is a combination of P = 4 and M = 3. In FIG. Is composed of one set consisting of a small thrust mover 12a and two sets consisting of a large thrust mover 11a corresponding to the length of two small thrust movers 12a. The length of the mover having the same combination can be determined.
In this way, in the multi-head specification linear motor of this embodiment shown in FIG. 14, the combination of the minimum number of magnetic poles and the number of coils is one set, and the number of sets of movers is set according to the required thrust of each mover. (One set of small thrust movers 12a and two sets of large thrust movers 11a). Thereby, even when there is a request from the user such that the required thrust differs depending on the plurality of movers, this can be dealt with.

[Comparative Example 1]
FIG. 1 is a multi-head coreless linear motor showing a first comparative example, in which (a) is a side view thereof and (b) is a front view of (a). Note that the same reference numerals are given to the same components in the comparative example as in the above-described conventional technology and the above-described basic embodiment, the description thereof is omitted, and different points will be described. Further, the linear motor shown in the figure will be described with a mover as an armature and a stator as a field.
In FIG. 1, 11a is a large thrust mover, 12b is a small thrust mover, 31a is a large thrust coil, and 32b is a small thrust coil.
The first comparative example is different from the basic embodiment described above in that the relationship (combination) is determined by the number of magnetic poles P of the permanent magnet field constituting the stator and the number M of the armature coils constituting the mover. The movable element 1 is composed of a plurality of different large thrust movable elements 11 a and small thrust movable elements 12 b arranged on the same stator 4.
Specifically, in FIG. 1, the large thrust mover 11a is composed of a combination of the number of magnetic poles P = 4 and the number of armature coils M = 3 of the permanent magnet field, and when the pole pitch is τp, the mover The length is 4τp × N (N: 1, 2, 3,...). The small thrust mover 12b is composed of a combination of the number of magnetic poles P = 2 of the permanent magnet field and the number of armature coils M = 3, and the length of the mover is 2τp.

Next, the concept of the required thrust of the large thrust mover and the small thrust mover having different mover physiques of the linear slider in the first comparative example will be described with reference to FIG. FIG. 12 shows a comparison table of motor characteristics of each mover to be mounted on a workpiece common to this comparative example and required required thrust calculated based on the motor characteristics.
In general, if the size of a work (load) mounted on each mover differs depending on the application of the linear slider, a difference in required thrust required for each mover to be mounted with the work occurs.
That is, in the first comparative example, when there is a large difference in the required thrusts of the mounted workpieces mounted on the large thrust mover 11a and the small thrust mover 12b shown in FIG. 1, they are arranged on the same stator. The relationship between the number P of permanent magnet field poles and the number M of armature coils in the large thrust mover 11a and the small thrust mover 12b is P: M = 4: 3 and P: M = 2: 3, respectively. First, by changing the lengths of the large thrust mover 11a and the small thrust mover 12b to 4τp × N (N is an integer equal to or greater than 1) and 2τp, respectively, first, the winding coefficient in the armature coil of each mover ( Since the ratio is 100% / 67%) and the number of winding turns (ratio is 100% / 48%), the induced voltage constant (ratio of thrust constant is 100% / 32%) is different. Next, since the winding space in the armature coil of each mover is different, the winding resistance (ratio is 100% / 44%) is different, and if the induced voltage constant and winding resistance of each mover are different, the motor Because the constants (ratio is 100% / 48%) are different, the thrust ratio of each mover is calculated from the square ratio of the motor constant of each mover. / 23%) is obtained. As a result, the length of the mover, which is the physique of the large thrust mover 11a and the small thrust mover 12b, is set to the size of the work (load) mounted on each mover (difference in required thrust required for each mover). Accordingly, it can be designed to an optimal dimension as appropriate.

  Therefore, in the first comparative example, as described above, a plurality of large thrust movers and small thrust movers having different combinations of the number of magnetic poles and the number of coils are arranged on the same stator. Even when there is a large difference in the required thrust, the motor size can be reduced to the minimum.

[Comparative Example 2]
2 is a multi-head coreless linear motor showing a second comparative example, in which (a) is a side view thereof, (b) is a front view of (a), and FIG. 3 is a small thrust of FIG. It is the plane sectional view which expanded arrangement of a mover and a stator.
2 and 3, 11a is a large thrust mover, 12c is a small thrust mover, 31a is a large thrust coil, and 32c is a small thrust coil. In FIG. 3, the small thrust coil 32c includes a U-phase coil 32u, a V-phase coil 32v, and a W-phase coil 32w ′.
In the second comparative example, as shown in FIGS. 2 and 3, the large thrust mover 11a is composed of a combination of the number of magnetic poles P = 4 of the permanent magnet field and the number of armature coils M = 3, and the pole pitch is τp. In this case, the length of the mover is 4τp × N (N: 1, 2, 3,...). The small thrust mover 12c is composed of a combination of the number of magnetic poles P = 2 of the permanent magnet field and the number of armature coils M = 3, and the W-phase coil is shifted by an electrical angle of 180 ° to reverse the winding direction of the coil. By arranging, the length of the mover is (4/3) τp.

Next, in the second comparative example, the concept of the required thrust of the large thrust mover and the small thrust mover having different mover physiques of the linear slider will be described with reference to FIG.
That is, the large thrust arranged on the same stator when there is a large difference in the necessary thrust of the mounted work mounted on each of the large thrust movable element 11a and the small thrust movable element 12c shown in FIGS. The relationship between the number of magnetic poles P of the permanent magnet field and the number of armature coils M in the mover 11a and the small thrust mover 12c is P: M = 4: 3 and P: M = 2: 3, respectively, and the small thrust The electrical angle of the W-phase coil of the mover 12c is shifted by 180 degrees, and the lengths of the large thrust mover 11a and the small thrust mover 12c are 4τp × N (N is an integer of 1 or more), respectively. By changing to (4/3) τp, first, the winding coefficient (ratio is 100% / 67%) and the number of winding turns (ratio is 100% / 48%) in the armature coil of each mover are different. Therefore, the induced voltage constant (the ratio of the thrust constant is 1 0% / 32%) is different. Next, since the winding space in the armature coil of each mover is different, the winding resistance (ratio is 100% / 88%) is different, and when the induced voltage constant and the winding resistance of each mover are different, the motor Because the constants (ratio is 100% / 34%) are different, after all, if the ratio of the thrust of each mover is calculated from the square ratio of the motor constant of each mover, the required thrust (ratio is 100%) / 12%) is obtained. As a result, the length of the mover, which is the physique of the large thrust mover 11a and the small thrust mover 12c, is set to the size of the work (load) mounted on each mover (difference in required thrust required for each mover). Accordingly, it can be designed to an optimal dimension as appropriate.

  Therefore, in the second comparative example, as described above, a plurality of large thrust movers and small thrust movers having different combinations of the number of magnetic poles and the number of coils are arranged on the same stator. Even when there is a large difference in the required thrust, the motor size can be reduced to the minimum.

FIG. 4 is a multi-head type coreless linear motor showing the first embodiment, wherein (a) is a side view thereof, (b) is a front view of (a), and FIG. 5 is a small thrust of FIG. It is the plane sectional view which expanded arrangement of a mover and a stator.
4 and 5, 11a is a large thrust movable element, 12d is a small thrust movable element, 31a is a large thrust coil, and 32d is a small thrust coil. In FIG. 5, the small thrust coil 32d includes a U-phase coil 32u, a V-phase coil 32v, and a W-phase coil 32w.
In the first embodiment, as shown in FIGS. 4 and 5, the combination of the number of magnetic poles P = 4 and the number of armature coils M = 3 of the permanent magnet field in the large thrust movable element 11a and the small thrust movable element 12d. When the pole pitch is τp, the mover length of the large thrust mover 11a is 4τp × N (N: 1, 2, 3,...), And the V-phase coil 32v is electrically connected to the small thrust mover 12d. By arranging the angle shifted by 360 °, the length of the mover is (8/3) τp.
As in the basic embodiment of FIG. 14 described above, this linear motor is a combination of the ratio of the number of magnetic poles P of the permanent magnet field and the number M of armature coils of P = 4 and M = 3. It is configured as a set. In this embodiment, the small thrust mover 12a having one set of this combination and the large thrust mover 11a having two sets of the above combinations have the same combination in accordance with workpieces having different required thrusts. The length of the mover can be determined.

Next, in the first embodiment, the concept of the required thrust of the large thrust mover and the small thrust mover having different mover physiques of the linear slider will be described with reference to FIG.
That is, when there is a difference in the required thrust of the mounted work mounted on each of the large thrust movable element 11a and the small thrust movable element 12d shown in FIGS. 4 and 5, the large thrust movable element arranged on the same stator is used. The relationship between the number P of permanent magnet field poles and the number M of armature coils in the child 11a and the small thrust mover 12d is P: M = 4: 3, and the V-phase coil of the small thrust mover 12d The electrical angle is shifted by 360 degrees, and the lengths of the large thrust mover 11a and the small thrust mover 12d are 4τp × N (N is an integer of 1 or more) and (8/3) τp, respectively. If changed, the ratio of the winding coefficient and the number of turns in the armature coil of each mover is the same, so the induced voltage constant does not change, but the winding space in the armature coil of each mover is different. , Winding resistance (ratio is 1 0% / 200%) and the winding resistance is different, the motor constant (ratio is 100% / 71%) is different. If the ratio of the thrust of the child is calculated, the necessary thrust of both is obtained (ratio is 100% / 50%).

  In the first embodiment, as described above, the combination of the minimum number of magnetic poles and the number of coils is set as one set, and the set number of movers is changed according to the necessary thrust of each mover (small thrust mover 12d 1 set, 2 sets of large thrust mover 11a). Thereby, even when there is a request from the user such that the required thrust differs depending on the plurality of movers, this can be dealt with.

[Comparative Example 3]
6 is a multi-head type coreless linear motor showing a third comparative example, where (a) is a side view thereof, (b) is a front view of (a), and FIG. 7 is a small thrust of FIG. It is the plane sectional view which expanded arrangement of a mover and a stator.
6 and 7, 11a is a large thrust mover, 12e is a small thrust mover, 31a is a large thrust coil, and 32e is a small thrust coil.
In the third comparative example, as shown in FIGS. 6 and 7, the large thrust mover 11a is composed of a combination of the number of magnetic poles P = 4 of the permanent magnet field and the number of armature coils M = 3, and the pole pitch is τp. In this case, the length of the mover is 4τp × N (N: 1, 2, 3,...). The small thrust mover 12e is composed of a combination of the number of magnetic poles P = 5 of the permanent magnet field and the number of armature coils M = 3, and the mover is arranged by shifting the W-phase coil by an electrical angle of 360 °. The length is (10/3) τp.

Next, in the third comparative example, the concept of required thrust of the large thrust mover and the small thrust mover having different mover physiques of the linear slider will be described with reference to FIG.
That is, the large thrust arranged on the same stator when there is a large difference in the required thrust of the mounted work mounted on each of the large thrust movable element 11a and the small thrust movable element 12e shown in FIGS. The relationship between the number of magnetic poles P of the permanent magnet field and the number of armature coils M in the mover 11a and the small thrust mover 12e is P: M = 4: 3 and P: M = 5: 3, respectively, and the small thrust The electrical angle of the W-phase coil of the mover 12e is shifted by 360 degrees, and the lengths of the large thrust mover 11a and the small thrust mover 12e are 4τp × N (N is an integer of 1 or more), respectively. , (10/3) τp, the winding coefficient (ratio is 100% / 98%) and the number of winding turns (ratio is 100% / 127%) in the armature coil of each mover are different. Therefore, induced voltage constant (ratio of thrust constant) 100% / 124%) is different. Next, since the winding space in the armature coil of each mover is different, the winding resistance (ratio is 100% / 263%) is different, and if the induced voltage constant and the winding resistance of each mover are different, the motor Because the constants (ratio is 100% / 77%) are different, after all, if the ratio of the thrust of each mover is calculated from the square ratio of the motor constant of each mover, the required thrust (ratio is 100%) / 59%) is obtained. As a result, the length of the mover, which is the physique of the large thrust mover 11a and the small thrust mover 12e, is set to the size of the work (load) mounted on each mover (the difference in required thrust required for each mover). Accordingly, it can be designed to an optimal dimension as appropriate.

  Therefore, in the third comparative example, as described above, a plurality of large thrust movers and small thrust movers having different combinations of the number of magnetic poles and the number of coils are arranged on the same stator. Even when there is a large difference in the required thrust, the motor size can be reduced to the minimum.

[Comparative Example 4]
FIG. 8 shows a multi-head coreless linear motor according to a fourth comparative example, in which (a) is a side view thereof and (b) is a front view of (a).
In FIG. 8, 11b is a large thrust mover, 12b is a small thrust mover, 31b is a large thrust coil, and 32b is a small thrust coil.
In the fourth comparative example, as shown in FIG. 8, the large thrust mover 11b is composed of a combination of the number of magnetic poles P = 5 of the permanent magnet field and the number of armature coils M = 3, and the pole pitch is τp. The length of the mover is 5τp × N (N: 1, 2, 3,...). The small thrust mover 12b is composed of a combination of the number of magnetic poles P = 2 of the permanent magnet field and the number of armature coils M = 3, and the length of the mover is 2τp.

Next, in the fourth comparative example, the concept of the required thrust of the large thrust mover and the small thrust mover having different linear slider mover physiques will be described with reference to FIG.
That is, when there is a large difference in the required thrusts of the mounted workpieces mounted on the large thrust movable element 11b and the small thrust movable element 12b shown in FIG. 8, the large thrust movable element 11b arranged on the same stator. The relationship between the number of magnetic poles P of the permanent magnet field and the number of armature coils M in the small thrust mover 12b is P: M = 5: 3 and P: M = 2: 3, respectively, and the large thrust mover 11b. And by changing the length of the small thrust mover 12b to 5τp × N (N is an integer of 1 or more) and 2τp, respectively, first, the winding coefficient (ratio is 100% / 68) in the armature coil of each mover. %) And the number of winding turns (ratio is 100% / 38%), the induced voltage constant (ratio of thrust constant is 100% / 26%) is different. Next, since the winding space in the armature coil of each mover is different, the winding resistance (ratio is 100% / 34%) is different, and if the induced voltage constant and winding resistance of each mover are different, the motor Because the constants (ratio is 100% / 44%) are different, after all, if the ratio of the thrust of each mover is calculated from the square ratio of the motor constant of each mover, the required thrust (ratio is 100%) / 20%) is obtained. As a result, the length of the mover, which is the physique of the large thrust mover 11b and the small thrust mover 12b, is set to the size of the work (load) mounted on each mover (difference in required thrust required for each mover). Accordingly, it can be designed to an optimal dimension as appropriate.

  Accordingly, in the fourth comparative example, as described above, a plurality of large thrust movers and small thrust movers having different combinations of the number of magnetic poles and the number of coils are arranged on the same stator. Even when there is a large difference in the required thrust, the motor size can be reduced to the minimum.

[Comparative Example 5]
FIG. 9 is a multi-head coreless linear motor showing a fifth comparative example, in which (a) is a side view thereof and (b) is a front view of (a). In addition, the plane sectional view which expanded arrangement | positioning of the small thrust movable element and stator of FIG. 9 here is common in FIG.
9 and 3, 11b is a large thrust movable element, 12c is a small thrust movable element, 31b is a large thrust coil, and 32c is a small thrust coil.
In the fifth comparative example, as shown in FIGS. 9 and 3, the large thrust mover 11b is composed of a combination of the number of permanent magnet field poles P = 5 and the number of armature coils M = 3, and the pole pitch is τp. In this case, the length of the mover is 5τp × N (N: 1, 2, 3,...). The small thrust mover 12c is composed of a combination of the number of magnetic poles P = 2 of the permanent magnet field and the number of armature coils M = 3, and the W-phase coil is shifted by an electrical angle of 180 ° to reverse the winding direction of the coil. By arranging, the length of the mover is (4/3) τp.

Next, in the fifth comparative example, the concept of the required thrust of the large thrust mover and the small thrust mover having different linear slider mover physiques will be described with reference to FIG.
That is, the large thrust arranged on the same stator when there is a large difference in the required thrust of the mounted work mounted on each of the large thrust movable element 11b and the small thrust movable element 12c shown in FIGS. The relationship between the number of magnetic poles P of the permanent magnet field and the number of armature coils M in the mover 11b and the small thrust mover 12c is P: M = 5: 3 and P: M = 2: 3, respectively, and the small thrust The electric angle of the W-phase coil of the mover 12c is shifted by 180 degrees, and the lengths of the large thrust mover 11b and the small thrust mover 12c are each 5τp × N (N is an integer of 1 or more). By changing to (4/3) τp, first, the winding coefficient (ratio is 100% / 68%) and the number of winding turns (ratio is 100% / 38%) in the armature coil of each mover are different. Therefore, the induced voltage constant (the ratio of the thrust constant is 1 0% / 26%) is different. Next, since the winding space in the armature coil of each mover is different, the winding resistance (ratio is 100% / 67%) is different, and if the induced voltage constant and winding resistance of each mover are different, the motor Because the constants (ratio is 100% / 31%) are different, after all, if the ratio of the thrust of each mover is calculated from the square ratio of the motor constant of each mover, the required thrust (ratio is 100%) / 10%) is obtained. As a result, the length of the mover, which is the physique of the large thrust mover 11b and the small thrust mover 12c, is set to the size of the work (load) mounted on each mover (difference in required thrust required for each mover). Accordingly, it can be designed to an optimal dimension as appropriate.

  Therefore, in the fifth comparative example, as described above, a plurality of large thrust movers and small thrust movers having different combinations of the number of magnetic poles and the number of coils are arranged on the same stator. Even when there is a large difference in the required thrust, the motor size can be reduced to the minimum.

[Comparative Example 6]
FIG. 10 is a multi-head coreless linear motor showing a sixth comparative example, in which (a) is a side view thereof and (b) is a front view of (a). In addition, the plane sectional view which expanded arrangement | positioning of the small thrust movable element and stator of FIG. 10 here is common in FIG.
10 and 5, 11b is a large thrust mover, 12d is a small thrust mover, 31b is a large thrust coil, and 32d is a small thrust coil.
In the sixth comparative example, as shown in FIGS. 10 and 5, the large thrust mover 11b is composed of a combination of the number of magnetic poles P = 5 of the permanent magnet field and the number of armature coils M = 3, and the pole pitch is τp. In this case, the length of the mover is 5τp × N (N: 1, 2, 3,...). The small thrust mover 12d is composed of a combination of the number of magnetic poles P = 2 of the permanent magnet field and the number of armature coils M = 3, and the mover is arranged by shifting the V-phase coil by an electrical angle of 360 °. The length is (8/3) τp.

Next, in the sixth comparative example, the concept of the required thrust of the large thrust mover and the small thrust mover having different linear slider mover sizes will be described with reference to FIG.
That is, when there is a large difference in the required thrust of the mounted work mounted on each of the large thrust movable element 11b and the small thrust movable element 12d shown in FIGS. 10 and 5, the large thrust disposed on the same stator. The relationship between the number of magnetic poles P of the permanent magnet field and the number of armature coils M in the mover 11b and the small thrust mover 12d is P: M = 5: 3 and P: M = 2: 3, respectively, and the small thrust The electrical angle of the V-phase coil of the mover 12d is shifted by 360 degrees, and the lengths of the large thrust mover 11b and the small thrust mover 12d are each 5τp × N (N is an integer of 1 or more). , (8/3) τp, first, the winding coefficient (ratio is 100% / 102%) and the number of winding turns (ratio is 100% / 79%) in the armature coil of each mover are different. Therefore, induced voltage constant (ratio of thrust constant) 100% / 80%) is different. Next, since the winding space in the armature coil of each mover is different, the winding resistance (ratio is 100% / 152%) is different, and when the induced voltage constant and the winding resistance of each mover are different, the motor Because the constants (ratio is 100% / 65%) are different, after all, if the ratio of the thrust of each mover is calculated from the square ratio of the motor constant of each mover, the required thrust (ratio is 100%) / 43%) is obtained. As a result, the mover length, which is the physique of the large thrust mover 11b and the small thrust mover 12d, is set to the size of the work (load) mounted on each mover (difference in required thrust required for each mover). Accordingly, it can be designed to an optimal dimension as appropriate.

  Accordingly, in the sixth comparative example, as described above, a plurality of large thrust movers and small thrust movers having different combinations of the number of magnetic poles and the number of coils are arranged on the same stator. Even when there is a large difference in the required thrust, the motor size can be reduced to the minimum.

FIG. 11 is a multi-head type coreless linear motor showing the second embodiment, wherein (a) is a side view thereof, and (b) is a front view of (a), where the small thrust of FIG. An enlarged plan sectional view of the arrangement of the mover and the stator is the same as FIG.
11 and 7, 11b is a large thrust movable element, 12e is a small thrust movable element, 31b is a large thrust coil, and 32e is a small thrust coil.
In the second embodiment, as shown in FIGS. 11 and 7, the combination of the number of magnetic poles P = 5 and the number of armature coils M = 3 of the permanent magnet field in the large thrust movable element 11b and the small thrust movable element 12e. When the pole pitch is τp, the mover length of the large thrust mover 11b is 5τp × N (N: 1, 2, 3,...), And for the small thrust mover 12e, the W-phase coil is an electrical angle. By arranging them by shifting 360 °, the length of the mover is (10/3) τp.
In this linear motor, the combination of the number of magnetic poles P of the permanent magnet field and the number M of armature coils is a combination of P = 5 and M = 3. In the present embodiment, the same combination is made according to workpieces having different required thrusts by configuring the small thrust mover 12e provided with one set of this combination and the large thrust mover 11b provided with two sets of the above combinations. The length of the mover can be determined.

Next, in the second embodiment, the concept of the necessary thrust of the large thrust mover and the small thrust mover having different mover physiques of the linear slider will be described with reference to FIG.
That is, when there is a difference in the required thrust of the mounted work mounted on each of the large thrust movable element 11b and the small thrust movable element 12e shown in FIGS. 11 and 7, the large thrust movable element disposed on the same stator. The relationship between the number P of permanent magnet field poles and the number M of armature coils in the child 11b and the small thrust mover 12e is P: M = 5: 3, and the W-phase coil of the small thrust mover 12e The electrical angle is shifted by 360 degrees, and the lengths of the large thrust mover 11b and the small thrust mover 12e are set to 5τp × N (N is an integer of 1 or more) and (10/3) τp, respectively. If changed, the ratio of the winding coefficient and the number of turns in the armature coil of each mover is the same, so the induced voltage constant does not change, but the winding space in the armature coil of each mover is different. , Winding resistance (ratio (100% / 200%) is different, and winding resistance is different, the motor constant (ratio is 100% / 71%) is different. If the ratio of the thrust of the child is calculated, the necessary thrust of both is obtained (ratio is 100% / 50%).

  In the second embodiment, as described above, the combination of the minimum number of magnetic poles and the number of coils is set as one set, and the set number of movers is changed according to the required thrust of each mover (small thrust mover 12e 1 set, 2 sets of large thrust mover 11b). Thereby, even when there is a request from the user such that the required thrust differs depending on the plurality of movers, this can be dealt with.

  Corresponding to multiple workpieces with different required thrusts by arranging multiple movers with the same number of permanent magnet field and armature coil combinations and different number of sets on the same stator For example, all applications including liquid crystal manufacturing equipment in which the main work such as a glass substrate is handled by a large thrust mover and the small work such as a cable is carried by a small thrust mover. Applicable to

1 Mover (armature)
11a, 11b Large thrust mover 12a, 12b, 12c, 12d, 12e Small thrust mover 2 Movable base 3 Armature coil 31a, 31b Large thrust coil 32a, 32b, 32c, 32d, 32e Small thrust coil 32u U-phase coil 32v V-phase coil 32w W-phase coil 32w'-W-phase coil 4 Stator (permanent magnet field)
5 Field yoke 6 Permanent magnet

Claims (5)

A permanent magnet field having P permanent magnets arranged so that the magnetic poles are alternately different in the linear direction;
An armature having M armature coils arranged in a concentrated manner and connected in a three-phase manner, opposite to the permanent magnet field via a magnetic gap;
With
The armature is configured as a mover, the permanent magnet field is configured as a stator, and the plurality of movers are arranged side by side on the same stator, whereby the plurality of movers are configured as the stator. On the other hand, in a multi-head coreless linear motor that is driven separately,
The plurality of movers are:
A combination in which the ratio between the number of magnetic poles of the permanent magnet and the number of the armature coils in the armature coil and the permanent magnet facing each other is a predetermined value,
A small thrust mover with a predetermined number of sets;
A large thrust movable element having a set number greater than the predetermined set number;
A multi-head coreless linear motor characterized by comprising: The combination in which the ratio of the number of magnetic poles of the permanent magnet and the number of the armature coils is 4: 3 is set as one set.
2. The multi-head coreless linear motor according to claim 1, wherein the number of sets of the large thrust movers is larger than the number of sets of the small thrust movers. When the pole pitch is τp,
The length of the mover of the large thrust mover is 4τp × N (N is an integer of 1 or more),
The mover length of the small thrust mover is set to (8/3) τp by disposing the V-phase coil provided in the small thrust mover with an electrical angle of 360 °. 2. A multi-head coreless linear motor according to 2. The combination in which the ratio between the number of magnetic poles of the permanent magnet and the number of the armature coils is 5: 3 is set as one set.
2. The multi-head coreless linear motor according to claim 1, wherein the number of sets of the large thrust movers is larger than the number of sets of the small thrust movers. When the pole pitch is τp,
The movable element length of the large thrust movable element is 5τp × N (N is an integer of 1 or more),
The mover length of the small thrust mover is set to (10/3) τp by disposing a W-phase coil provided on the small thrust mover with an electrical angle of 360 °. 4. A multi-head coreless linear motor according to item 4.

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