JP2012137352A - Viscometer - Google Patents
Viscometer Download PDFInfo
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- JP2012137352A JP2012137352A JP2010289256A JP2010289256A JP2012137352A JP 2012137352 A JP2012137352 A JP 2012137352A JP 2010289256 A JP2010289256 A JP 2010289256A JP 2010289256 A JP2010289256 A JP 2010289256A JP 2012137352 A JP2012137352 A JP 2012137352A
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- 238000006073 displacement reaction Methods 0.000 claims abstract description 28
- 238000000034 method Methods 0.000 claims description 6
- 230000008878 coupling Effects 0.000 claims description 4
- 238000010168 coupling process Methods 0.000 claims description 4
- 238000005859 coupling reaction Methods 0.000 claims description 4
- 239000012086 standard solution Substances 0.000 claims description 3
- 238000005259 measurement Methods 0.000 abstract description 8
- 238000005352 clarification Methods 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
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- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
Abstract
Description
本発明は、粘度計に関するもので、特に、振動粘度計の測定理論と、振動子の形態に関する。 The present invention relates to a viscometer, and more particularly to a measurement theory of a vibration viscometer and a form of a vibrator.
従来、振動式粘度計の振動体の形状としては、平板を面に平行な方向に振動させるもの、円柱を軸周りに回転振動させるもの、カンチレバー状の平板を面に垂直な方向に振動させるものなどが知られている。 Conventionally, the vibrating body of a vibratory viscometer has a shape of vibrating a flat plate in a direction parallel to the surface, rotating a cylinder around its axis, or vibrating a cantilever-shaped flat plate in a direction perpendicular to the surface. Etc. are known.
上記の粘度計の測定理論は、振動体の周りに十分広い液体空間が存在すると仮定して導かれている。そのため、測定される量は粘度と密度の積となり、粘度を単独で測定できないことが知られている。
また、上記の粘度計は、振動させる物体にアクチュエータと、変位センサの両方が取り付けられており、測定理論上、アクチュエータが発生した力を必要とするが、アクチュエータに発生した力は、周辺のばね構造やダンパー構造などの影響を受けるため、必ずしも明確にしがたく、誤差を発生させる要因となっていた。
本発明は、粘度のみが単独で測定でき、しかもアクチュエータが発生する力を明確にする必要がなく、誤差の少ない振動式粘度計を実現することを課題とする。
The above viscometer measurement theory is derived on the assumption that a sufficiently large liquid space exists around the vibrating body. Therefore, the amount to be measured is the product of viscosity and density, and it is known that the viscosity cannot be measured alone.
The above viscometer has both an actuator and a displacement sensor attached to the object to be vibrated, and requires the force generated by the actuator in terms of measurement theory. Since it is affected by the structure and the damper structure, it is not always clear and causes an error.
An object of the present invention is to realize a vibratory viscometer that can measure only the viscosity alone and that does not require the force generated by the actuator to be clarified and that has few errors.
本発明の粘度計は、強制振動体と、強制振動体とわずかな間隙を介して設置された感力板と、振動体をアクチュエータに結合させるための構造と、強制振動体を駆動するためのアクチュエータと、強制振動体の変位を検出するための変位センサと、感力板をバネに結合させるための構造と、感力板に変位を起こさせるばね構造と、感力板の変位を検出するための変位計と、前記ばね構造、アクチュエータ、及び、変位計を固定するための支持体とを備えることを特徴とする。 The viscometer of the present invention includes a forced vibration body, a force-sensitive plate installed through a slight gap with the forced vibration body, a structure for coupling the vibration body to an actuator, and a drive for driving the forced vibration body. An actuator, a displacement sensor for detecting the displacement of the forced vibration body, a structure for coupling the force sensing plate to the spring, a spring structure for causing the force sensing plate to be displaced, and detecting the displacement of the force sensing plate And a support for fixing the spring structure, the actuator, and the displacement meter.
本発明は、単に振動体と、感力板の変位を測定するだけで、粘度を単独で測定できる振動粘度計を実現する。このような振動粘度計は、誤差が少なく、コスト面で優れている。そのため、産業上のさまざまな場面での粘度測定のための設備コストを低減し、粘度をより簡便に、かつ高精度に測定することが可能になる。
また、感力板と振動体を二重渦巻き構造とすることによりコンパクト化が図れ、さらに、ＭＥＭＳ加工技術を用いて作製すればより一層のコンパクト化が図れる。
The present invention realizes a vibration viscometer that can measure the viscosity independently by simply measuring the displacement of the vibrating body and the force plate. Such a vibration viscometer has few errors and is excellent in cost. Therefore, the equipment cost for viscosity measurement in various industrial scenes can be reduced, and the viscosity can be measured more easily and with high accuracy.
In addition, a compact structure can be achieved by using a double spiral structure for the sensitive plate and the vibrator, and further compactness can be achieved by using the MEMS processing technique.
図１は、本発明による感力板を用いた粘度測定の原理を説明するための説明図である。
図において、強制振動体をアクチュエータ（例えばピエゾなど）で振動させると、強制振動体と感力板の間の液体が動かされ、粘性応力が発生する。この粘性応力によって感力板が振動を始める。感力板の振動の運動方程式は、感力板の質量をｍ、粘性力をη、感力板の表面のうち粘性応力を受ける部分の面積をＳ、感力板と強制振動体のギャップの間隔をｄ、ばね定数をｋ１、感力体の変位をｘ１、振動体の変位をｘ２、時間をｔとすると、
FIG. 1 is an explanatory diagram for explaining the principle of viscosity measurement using a power plate according to the present invention.
In the figure, when the forced vibration body is vibrated by an actuator (for example, a piezo), the liquid between the forced vibration body and the force sensitive plate is moved, and a viscous stress is generated. The pressure sensitive plate starts to vibrate due to this viscous stress. The equation of motion of the vibration of the power plate is as follows: m is the mass of the power plate, η is the viscous force, S is the area of the surface of the power plate that is subjected to viscous stress, and the gap between the force plate and the forced vibration body is If the interval is d, the spring constant is k 1 , the displacement of the sensitive body is x 1 , the displacement of the vibrating body is x 2 , and the time is t,
である。強制振動体に、振幅Ａ２、振動角周波数ωの正弦波状の変位、 It is. The forced vibration body has a sinusoidal displacement of amplitude A 2 and vibration angular frequency ω,
を与えると、感力板は If you give
のように振動する。共通のパラメータをまとめると、 It vibrates like. To summarize the common parameters:
と表される。
この感力板の振動は、粘度に比例するパラメータΓと、固有角周波数ω０によって記述されている。強制振動体を様々な周波数ωで振動させて、そのときの強制振動体の変位と、感力板の変位を測定し、理論とカーブフィットすることで、パラメータΓと固有角周波数ω０を求める。パラメータΓの粘度以外の部分は、強制振動体と感力板の構造が決まれば、一定値となるため、あらかじめ粘度の分かった校正用標準液などでキャリブレーションしておく。この装置定数を用いて、測定されたΓの値から、粘度を算出できる。
あるいは、図２に示すように、固有角周波数よりも１０分の１以下程度の周波数では、感力板の振幅が粘度にほぼ比例するため、振幅と粘度の関係のグラフをあらかじめ校正用標準液などでキャリブレーションしておけば、実際の測定では、単一の周波数で振幅を調べるだけで、粘度を算出できる。
It is expressed.
The vibration of the power plate is described by a parameter Γ proportional to viscosity and a natural angular frequency ω 0 . By oscillating the forced vibration body at various frequencies ω, the displacement of the forced vibration body and the displacement of the sensitive plate at that time are measured, and the parameter Γ and the natural angular frequency ω 0 are obtained by curve fitting with the theory. . The parts other than the viscosity of the parameter Γ are constant values if the structures of the forced vibration body and the force sensitive plate are determined. Therefore, calibration is performed using a calibration standard solution whose viscosity is known in advance. Using this apparatus constant, the viscosity can be calculated from the measured value of Γ.
Alternatively, as shown in FIG. 2, the amplitude of the power plate is approximately proportional to the viscosity at a frequency of about one tenth or less than the natural angular frequency. If it is calibrated, the viscosity can be calculated in the actual measurement simply by examining the amplitude at a single frequency.
図３は、本発明の一実施例として円筒形状の強制振動体と、リング形状の感力板を有する粘度計の模式図である。この装置の寸法は数十ｃｍ角程度で、テーブルトップである。実際には、より小型の場合も実現可能である。 FIG. 3 is a schematic diagram of a viscometer having a cylindrical forced vibrating body and a ring-shaped force plate as an embodiment of the present invention. The size of this apparatus is about several tens of cm square, which is a table top. Actually, a smaller size can be realized.
上記図３の実施例では円筒形状の強制振動体及びリング形状の感力板を用いたが、他の形状でもよく、例えば、強制振動体と感力板を二重渦巻き構造にすれば、コンパクト化が図れ、また、ＭＥＭＳ加工技術を用いて強制振動体及び感力板を作製すれば一層のコンパクト化が図れる。
図４に、強制振動体と感力板を二重渦巻き構造にして、ＭＥＭＳ加工技術を用いて、シリコンウェーハ上に実現した本発明の他の実施例を示す。ここで、二重渦巻き構造の強制振動体と感力板は、渦巻きの中心軸と平行な方向に振動変位する。
In the embodiment shown in FIG. 3, a cylindrical forced vibration body and a ring-shaped power sensing plate are used. However, other shapes may be used. For example, if the forced vibration body and the power sensing plate have a double spiral structure, the structure is compact. In addition, if a forced vibration body and a force-sensitive plate are produced using MEMS processing technology, further downsizing can be achieved.
FIG. 4 shows another embodiment of the present invention realized on a silicon wafer by using a MEMS processing technique with a forced vibrating body and a force sensitive plate having a double spiral structure. Here, the forced vibrating body and the force sensitive plate having a double spiral structure are oscillated and displaced in a direction parallel to the central axis of the spiral.
本発明は振動粘度計をより簡便に実現する方法を提供可能にし、低コストかつ高精度な振動粘度計として利用可能である。また、ＭＥＭＳ加工技術を用いて粘性センサを実現する目的にも、簡便な方法を提供できるため、粘性センサの実現性を高める。粘性センサとして利用されれば、インプロセスの粘度測定、内蔵型の粘度モニターなどとして利用可能である。 The present invention can provide a method for realizing a vibration viscometer more easily, and can be used as a low-cost and high-accuracy vibration viscometer. Moreover, since the simple method can be provided also for the objective of implement | achieving a viscosity sensor using MEMS processing technology, the feasibility of a viscosity sensor is improved. If used as a viscosity sensor, it can be used for in-process viscosity measurement, built-in viscosity monitor, and the like.
Claims (5)
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| JP2010289256A JP5483113B2 (en) | 2010-12-27 | 2010-12-27 | Viscometer |
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| JP2010289256A JP5483113B2 (en) | 2010-12-27 | 2010-12-27 | Viscometer |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPWO2021124713A1 (en) * | 2019-12-18 | 2021-06-24 |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03220441A (en) * | 1990-01-24 | 1991-09-27 | Kobe Steel Ltd | Vibrating viscosimeter |
| JP2001038198A (en) * | 1999-08-03 | 2001-02-13 | Akio Takaku | Fluid flow separation device |
| JP2001318040A (en) * | 2000-05-09 | 2001-11-16 | Yamaichi Electronics Co Ltd | Method for measuring viscosity of liquid, and method and instrument for measuring visco-elasticity of liquid |
| JP2009058340A (en) * | 2007-08-31 | 2009-03-19 | National Institute Of Advanced Industrial & Technology | Viscometer |
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- 2010-12-27 JP JP2010289256A patent/JP5483113B2/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03220441A (en) * | 1990-01-24 | 1991-09-27 | Kobe Steel Ltd | Vibrating viscosimeter |
| JP2001038198A (en) * | 1999-08-03 | 2001-02-13 | Akio Takaku | Fluid flow separation device |
| JP2001318040A (en) * | 2000-05-09 | 2001-11-16 | Yamaichi Electronics Co Ltd | Method for measuring viscosity of liquid, and method and instrument for measuring visco-elasticity of liquid |
| JP2009058340A (en) * | 2007-08-31 | 2009-03-19 | National Institute Of Advanced Industrial & Technology | Viscometer |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPWO2021124713A1 (en) * | 2019-12-18 | 2021-06-24 | ||
| WO2021124713A1 (en) * | 2019-12-18 | 2021-06-24 | 国立大学法人東北大学 | Viscometer and method for measuring viscosity |
| JP7154660B2 (en) | 2019-12-18 | 2022-10-18 | 国立大学法人東北大学 | Viscometer and viscosity measurement method |
| US11761872B2 (en) | 2019-12-18 | 2023-09-19 | Tohoku University | Viscometer and method for measuring viscosity |
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