JP2012136388A5 - - Google Patents

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Publication number
JP2012136388A5
JP2012136388A5 JP2010289972A JP2010289972A JP2012136388A5 JP 2012136388 A5 JP2012136388 A5 JP 2012136388A5 JP 2010289972 A JP2010289972 A JP 2010289972A JP 2010289972 A JP2010289972 A JP 2010289972A JP 2012136388 A5 JP2012136388 A5 JP 2012136388A5
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JP
Japan
Prior art keywords
flow velocity
average flow
idb
furthermore
idt
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JP2010289972A
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Japanese (ja)
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JP2012136388A (en
JP5439353B2 (en
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[シミュレーション結果]
算出された平均流速を表3に示す。「IDB/IDT」欄には、内径IDTに対する内径IDBの比を示す。さらに、図11は、表3中の「IDB/IDT」と「平均流速(mm/s)との関係を示す図である。図11中の横軸は、「IDB/IDT」を示す。表3中の縦軸は、「平均流速(mm/s)」を示す。
表3及び図3を参照して、各設定条件ともに、平均流速はプラスであり、いずれの設定条件においても上昇流F1が形成された。さらに、IDB/IDT値が0.25〜0.65の場合、上昇流F1の平均流速が10mm/s以上であった。さらに、IDB/IDT値が0.30〜0.60の場合、それ以外の場合と比較して、平均流速が顕著に高くなり、20mm/sを超えた。
[simulation result]
The calculated average flow velocity is shown in Table 3. The “ ID B / ID T” column shows the ratio of the inner diameter IDB to the inner diameter IDT. Furthermore, Fig. 11 is a diagram showing the relationship between " ID B / ID T" and "average flow velocity (mm / s)" in Table 3. The horizontal axis in Fig. 11 is " ID B / ID T". Indicates The vertical axis in Table 3 indicates "average flow velocity (mm / s)".
With reference to Table 3 and FIG. 3, the average flow velocity was positive in all the set conditions, and the upflow F1 was formed under any of the set conditions. Furthermore, when the IDB / IDT value was 0.25 to 0.65, the average flow velocity of the upflow F1 was 10 mm / s or more. Furthermore, when the IDB / IDT value was 0.30 to 0.60, the average flow velocity was significantly higher than in the other cases, exceeding 20 mm / s.

JP2010289972A 2010-12-27 2010-12-27 SiC single crystal manufacturing apparatus and crucible used therefor Active JP5439353B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2010289972A JP5439353B2 (en) 2010-12-27 2010-12-27 SiC single crystal manufacturing apparatus and crucible used therefor

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JP2010289972A JP5439353B2 (en) 2010-12-27 2010-12-27 SiC single crystal manufacturing apparatus and crucible used therefor

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JP2012136388A JP2012136388A (en) 2012-07-19
JP2012136388A5 true JP2012136388A5 (en) 2012-08-30
JP5439353B2 JP5439353B2 (en) 2014-03-12

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Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014017648A1 (en) * 2012-07-27 2014-01-30 京セラ株式会社 Crucible, device for crystal growth, and method for crystal growth
WO2014038172A1 (en) * 2012-09-04 2014-03-13 新日鐵住金株式会社 APPARATUS AND METHOD FOR MANUFACTURING SiC SINGLE CRYSTAL
JP6231375B2 (en) * 2013-12-25 2017-11-15 京セラ株式会社 Crucible, crystal manufacturing apparatus and crystal manufacturing method
JP6279930B2 (en) * 2014-02-27 2018-02-14 京セラ株式会社 Crystal manufacturing apparatus and crystal manufacturing method
JPWO2016059790A1 (en) * 2014-10-17 2017-06-29 新日鐵住金株式会社 SiC single crystal production apparatus by solution growth method and crucible used therefor
JP6354615B2 (en) * 2015-02-18 2018-07-11 トヨタ自動車株式会社 Method for producing SiC single crystal
KR102122739B1 (en) * 2017-12-19 2020-06-16 한국세라믹기술원 A crucible designed with protrusion for crystal growth using solution
KR102166452B1 (en) * 2018-10-26 2020-10-15 한국세라믹기술원 Apparatus of solution growth for single crystal and method of solution growth for single crystal

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH085736B2 (en) * 1987-06-01 1996-01-24 三菱マテリアル株式会社 Method and apparatus for growing silicon single crystal
JP4265269B2 (en) * 2003-04-21 2009-05-20 トヨタ自動車株式会社 SiC single crystal manufacturing furnace
JP4196791B2 (en) * 2003-09-08 2008-12-17 トヨタ自動車株式会社 Method for producing SiC single crystal
JP4475091B2 (en) * 2004-10-19 2010-06-09 住友金属工業株式会社 Method for producing silicon carbide single crystal
JP4830496B2 (en) * 2006-01-12 2011-12-07 トヨタ自動車株式会社 Method for producing SiC single crystal
JP2007197231A (en) * 2006-01-24 2007-08-09 Toyota Motor Corp METHOD FOR MANUFACTURING SiC SINGLE CRYSTAL
JP2008100854A (en) * 2006-10-17 2008-05-01 Toyota Motor Corp Apparatus and method of manufacturing sic single crystal
JP2008105896A (en) * 2006-10-25 2008-05-08 Toyota Motor Corp METHOD FOR PRODUCING SiC SINGLE CRYSTAL

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