JP2012123087A - Method for manufacturing optical scanner and optical scanner - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a method for manufacturing an optical scanner, when a structure constituting the optical scanner is fixed to a pedestal by welding, capable of preventing the adhesion of stain on a mirror surface of a mirror section, thereby preventing the deterioration of the function of the optical scanner, and to provide the optical scanner.SOLUTION: The optical scanner includes: the structure comprising the mirror section having the mirror surface for reflecting light, and a drive section for swinging the mirror section; and the pedestal to which the structure is fixed. A method for manufacturing the optical scanner includes: a structure forming step for forming the flat plate-like structure from a metal plate material; a drive section forming step for forming the drive section on the structure formed by the structure forming step; and a welding step for welding, to the pedestal, the structure formed with the drive section by the drive section forming step, from the surface side opposite to the mirror surface.

Description

  The present invention relates to an optical scanning device manufacturing method and an optical scanning device.

  2. Description of the Related Art Conventionally, an optical scanning device that scans a light beam such as a laser beam is used as an optical device such as a barcode reader, a laser printer, or a head-mounted display, or a light input device of an input device such as an infrared camera. As such an optical scanning device, for example, there is an optical scanning device in which a piezoelectric body is arranged on a substrate having a torsion beam portion that supports a mirror portion, and torsional vibration is generated in the mirror portion (see, for example, Patent Document 1). .

JP 2006-293116 A

  By the way, the substrate constituting such an optical scanning device is used by being fixed to a pedestal. When the substrate is formed from a metal plate, the substrate is fixed to the pedestal by welding. However, if the mirror surface of the mirror part is contaminated by scattered objects such as metal powder generated during welding, the optical scanning device Function may be degraded.

  In the present invention, when the structure constituting the optical scanning device is welded and fixed to the pedestal, dirt such as metal powder generated by welding adheres to the mirror surface of the mirror portion, and the function of the optical scanning device is deteriorated. An object of the present invention is to provide an optical scanning device manufacturing method and an optical scanning device that can be prevented.

  In order to achieve the above object, a method for manufacturing an optical scanning device according to a first aspect of the present invention includes a structure including a mirror portion having a mirror surface that reflects light, and a drive portion that swings the mirror portion, and the structure. And a structure forming step of forming the plate-like structure from a metal plate, and the structure formed in the structure forming step. A driving unit forming step of forming the driving unit, and a welding step of welding the structure on which the driving unit is formed by the driving unit forming step to the pedestal from a surface opposite to the mirror surface. It is characterized by that.

  In addition to the structure of the first invention, the method for manufacturing an optical scanning device of the second invention includes a mirror surface forming step of forming the mirror surface by polishing the surface of the metal plate material, and the structure forming step Is characterized in that the structure is formed from the plate material on which the mirror surface is formed by the mirror surface forming step.

  According to a third aspect of the present invention, there is provided a method for manufacturing an optical scanning device, wherein, in addition to the configuration of the first aspect, the structure in which the driving unit is formed by the driving unit forming step has a mirror surface on the surface of the mirror unit. A mirror surface pasting step of forming the mirror surface by pasting a thin piece member, the welding step from the surface side opposite to the mirror surface pasted by the mirror surface pasting step, the structure to the pedestal It is characterized by welding.

  According to a fourth aspect of the present invention, there is provided the method for manufacturing an optical scanning device according to any one of the first to third aspects, wherein the mirror portion is provided on one side of the structure relative to the drive portion. The fixing part is provided on the other side of the structure with respect to the driving part.

  An optical scanning device according to a fifth aspect of the present invention is an optical scanning device having a structure including a mirror part having a mirror surface that reflects light, a drive unit that swings the mirror part, and a pedestal that fixes the structure. The structure is a metal plate-like plate member, and has a fixing part that welds and fixes the structure to the pedestal from the side opposite to the surface on which the mirror surface is formed. And

  In addition to the fifth invention, the optical scanning device according to a sixth aspect of the invention is characterized in that the mirror portion is provided on one side of the structure relative to the drive portion, and the fixed portion is located on the structure relative to the drive portion. It is provided in the other side.

  According to a seventh aspect of the present invention, there is provided an optical scanning apparatus including a mirror body having a mirror surface for reflecting light and a drive section for swinging the mirror section, and a structure made of a metal plate. An optical scanning device having a pedestal fixed by welding, wherein the mirror surface and the pedestal are arranged on the same surface side with respect to the structure when the structure is fixed to the pedestal. And

  According to the method of manufacturing the optical scanning device of the first aspect of the invention, there is a welding step of welding the structure in which the driving portion is formed by the driving portion forming step to the pedestal from the surface side opposite to the mirror surface of the mirror portion. Further, it is possible to prevent the scattered materials such as metal powder generated by welding from adhering to the mirror surface of the mirror portion and deteriorating the function of the optical scanning device.

  According to the method for manufacturing an optical scanning device of the second invention, in addition to the effect of the first invention, when the mirror surface of the mirror portion has a mirror surface forming step formed by polishing, the metal generated by welding on the mirror surface of the mirror portion It is possible to reliably prevent the scattering function of the optical scanning device from being deteriorated due to scattered matter such as powder.

  According to the method for manufacturing an optical scanning device of the third invention, in addition to the first invention, when there is a mirror surface pasting step for pasting a thin piece member having a mirror surface to the mirror part, the scattered matter generated by welding on the mirror surface of the mirror part It is possible to reliably prevent the function of the optical scanning device from being deteriorated due to adhesion. Moreover, since the thin piece member is affixed after the drive part forming step, it is possible to prevent the thin piece member attached to the mirror part from being peeled off due to the influence of forming the drive part.

  According to the method for manufacturing an optical scanning device of the fourth invention, in addition to any one of the first to third inventions, the mirror part is provided on one side of the structure with respect to the drive part, and the fixed part is provided on the drive part. On the other hand, since it is provided on the other side of the structure, the mirror part and the fixed part are separated from each other. Therefore, it is possible to more reliably prevent the scattered matter generated by welding from adhering to the mirror surface of the mirror portion and deteriorating the function of the optical scanning device.

  According to the optical scanning device of the fifth aspect of the present invention, since the structure has the fixing portion that welds and fixes the structure to the pedestal from the side opposite to the surface on which the mirror surface of the mirror portion is formed, the mirror surface of the mirror portion is generated by welding. Therefore, it is possible to prevent the function of the optical scanning device from being deteriorated due to the contamination.

  According to the optical scanning device of the sixth invention, in addition to the fifth invention, the mirror part is provided on one side of the structure with respect to the drive part, and the fixed part is provided on the other side of the structure with respect to the drive part. Therefore, the mirror part and the fixed part are separated. Thereby, it can prevent more reliably that the stain | pollution | contamination produced | generated by welding adheres to the mirror surface of a mirror part, and the function of an optical scanning device falls.

  According to the optical scanning device of the seventh aspect of the invention, when the structure is fixed to the pedestal, the mirror surface and the pedestal are arranged on the same surface side with respect to the structure. It is possible to prevent the function of the optical scanning device from being deteriorated due to adhesion.

It is the one surface side top view of the optical scanning device of an embodiment. It is the other surface side top view of the optical scanning device of an embodiment. It is sectional drawing which cut | disconnected the optical scanning device of FIG. 2 by the 3-3 line. It is a flowchart which shows the manufacturing process of the optical scanning device of embodiment. It is the one surface side top view of the optical scanning device of a modification. It is the other surface side top view of the optical scanning device of a modification. It is sectional drawing which cut | disconnected the optical scanning device of FIG. 6 by 7-7 lines. It is a flowchart which shows the manufacturing process of the optical scanning device of a modification.

(About optical scanning device)
A preferred embodiment of an optical scanning device of the present invention will be described below with reference to FIGS. 1 to 3 with reference to the drawings. As shown in FIGS. 1 and 2, the optical scanning device 10 of the present invention includes a structure 11 and a pedestal 30 that are substantially rectangular. The structure 11 is fixed to the pedestal 30 by performing laser welding on the fixing portion 15. Hereinafter, each component constituting the optical scanning device 10 will be described.

  The structure 11 is formed from a metal plate such as stainless steel or titanium. The structure 11 has a substantially rectangular flat plate shape that is long in the X-axis direction of FIG. The thickness of the structure 11 is about 30 to 500 μm. In the structure 11, a plate portion 19, a mirror portion 12, a beam portion 13, and openings 16 and 16 are formed by removing a metal plate material by etching or pressing. Two rectangular openings 16, 16 are formed symmetrically with respect to the beam portion 13 in the central portion of the structure 11.

  The mirror unit 12 has a mirror surface 121 (described later) that reflects light such as laser light (see FIGS. 2 and 3). Further, the mirror portion 12 is supported by the beam portion 13 formed in the Y-axis direction in FIGS. 1 and 2 and is disposed at the center of the openings 16 and 16. The mirror portion 12 is provided so as to be line-symmetric with respect to the swing axis L1 which is the central axis when swinging. Although the mirror part 12 is formed in a rectangular shape in the present embodiment, the shape is not particularly limited, and may be a circle, an ellipse, a rhombus, a polygon, or the like.

  Moreover, the mirror part 12 is arrange | positioned in FIG. 3 on the opposite side to the fixing | fixed part 15 on both sides of the below-mentioned 1st drive part 20A and 2nd drive part 20B. Specifically, the mirror unit 12 is disposed on the X axis positive side (right side in FIG. 3) with respect to the first drive unit 20A, and the fixed unit 15 is on the X axis negative side (with respect to the first drive unit 20A). It is arranged on the left side of FIG. The mirror unit 12 is disposed on the X axis negative side (left side in FIG. 3) with respect to the second drive unit 20B, and the fixing unit 15 is on the X axis positive side (in FIG. 3) with respect to the second drive unit 20B. On the right).

  Thus, when the fixed part 15 is formed by welding, the mirror part 12 and the fixed part 15 are arranged on the opposite side and separated from the first drive part 20A and the second drive part 20B. Dirt such as metallic scattered matter generated on the mirror surface 121 becomes difficult to adhere to the mirror surface 121. Therefore, it is possible to prevent the function of the optical scanning device 10 from being lowered.

  As shown in FIG. 3, the mirror surface 121 is formed on the other surface side 18 (Z-axis negative side) opposite to the one surface side 17 (Z-axis positive side) of the structure 11 in which the fixing portion 15 is formed. The mirror surface 121 may be formed by bonding a transparent dielectric 125 provided with a metal thin film such as aluminum or silver having a mirror surface on the surface to the negative surface in the Z direction of the mirror portion 12 by thermosetting or the like. Examples of the transparent dielectric 125 include diamond and sapphire. The transparent dielectric 125 having a mirror surface on the surface is the thin piece member of the present invention.

  In addition, the mirror surface 121 is formed on the other surface side 18 of the structure 11 by polishing the surface of the metal plate material and then processing the plate material to form the structure 11 as in a modification described later. May be formed. In addition, a metal thin film such as aluminum or silver may be coated on the surface of the mirror portion 12 by sputtering or vapor deposition.

  As shown in FIGS. 1 and 2, the beam portion 13 is formed so as to extend from both ends in the Y-axis direction of the mirror portion 12 and includes the swing axis L <b> 1 of the mirror portion 12.

  As shown in FIGS. 2 and 3, the first drive unit 20 </ b> A and the second drive unit 20 </ b> B are provided one by one symmetrically with respect to the mirror unit 12 on the other surface side 18 of the plate unit 19 of the structure 11. In the present embodiment, the structure 11 is provided with the first drive unit 20A and the second drive unit 20B. However, only one drive unit may be formed as in a modification example described later. In addition, although the 1st drive part 20A and the 2nd drive part 20B are distinguished for description, since it is the same structure as a structure, below, the 1st drive part 20A is demonstrated.

  The first drive unit 20A is composed of a piezoelectric element, and is bonded to the structure 11 with a conductive conductive adhesive having conductivity formed of a synthetic resin material such as thermosetting epoxy, acrylic, or silicon. The

  An upper electrode and a lower electrode (not shown) are formed on the upper and lower surfaces of the first drive unit 20A by laminating gold, platinum, or the like over the entire surface. By applying an alternating voltage between the upper electrode and the lower electrode of the first drive unit 20A, a standing wave with the swing axis L1 as an axis is generated in the structure 11, and the mirror unit 12 is swung. It can be swung around the axis L1.

  As shown in FIG. 1, the fixing portions 15 are formed at four corners on the one surface side 17 of the structure 11 in order to fix the structure 11 to the pedestal 30. In the present embodiment, as will be described later, the fixing portion 15 is formed by laser welding, and the structure 11 is fixed to the pedestal 30 by the fixing portion 15. When the structure 11 is fixed to the pedestal 30, as shown in FIG. 3, the mirror surface 121 and the pedestal 30 are arranged on the same surface side (other surface side 18) on the negative side of the Z axis with respect to the structure 11, Laser welding is performed from the opposite side (one side 17) of the mirror surface 121. By arranging in this way, dirt such as metal scattered matter generated by laser welding when forming the fixing portion 15 is less likely to adhere to the mirror surface 121, and prevents the optical scanning device from deteriorating in function. it can.

(Method for manufacturing optical scanning device)
Next, a method for manufacturing the optical scanning device of this embodiment will be described with reference to FIG.

  In step S101, the structure 11 is formed. Specifically, first, the metal plate material is divided into a size equal to the outer shape of the structure 10. Then, a resist film for masking is formed at positions corresponding to the mirror part 12, the beam part 13, and the plate part 19. After the structure 11 is formed by wet etching, the resist film is removed. The plurality of structures 11 may be divided into a plurality of individual structures 11 after the outer shapes of the plurality of structures 11 are formed on a plate material sufficiently larger than the outer shape of the structures 11.

  In step S <b> 102, an adhesive for bonding the first drive unit 20 </ b> A and the second drive unit 20 </ b> B to the structure 11 is applied to the structure 11. Specifically, the adhesive is applied to the surface of the other side 18 of FIG. 2 of the structure 11 placed horizontally by a dispenser or the like at two positions corresponding to the first drive unit 20A and the second drive unit 20B. Applied. As the adhesive, for example, a conductive adhesive containing a conductive material such as a silver filler in a synthetic resin material such as epoxy, acrylic, or silicon is used. Step S103 is performed after application of the conductive adhesive.

  Next, in step S103, the first drive unit 20A and the second drive unit 20B are installed on the conductive adhesive applied in step S102. As the first driving unit 20A and the second driving unit 20B, a bulk piezoelectric material having electrode layers on both surfaces of the piezoelectric element in advance is used. First, the first drive unit 20A is sucked by a suction head having a plurality of air suction holes on a flat plate. Then, the adsorbed first driving unit 20A is placed on the conductive adhesive so that the center position 21 of the piezoelectric material is positioned on the straight line L2 in FIG. The other second driving unit 20B is also bonded to the structure 11 in the same manner.

  In step S104, the conductive adhesive that bonds the first driving unit 20A and the second driving unit 20B to the structure 11 is cured. Specifically, the structure 11 in which the first drive unit 20A and the second drive unit 20B are installed is placed in a heating furnace maintained in an atmosphere of 100 to 200 ° C. for 30 to 60 minutes. Thereby, the conductive adhesive is thermally cured. Step S105 is performed after hardening of a conductive adhesive.

  Step S105 is a surface of the mirror part 12 formed in step S101, and a transparent dielectric 125 having a mirror surface is attached to the other surface side 18 of the structure 11. A mirror surface is formed on the transparent dielectric 125 in advance by attaching a metal thin film such as aluminum or silver with an adhesive.

  In step S106, signal lines are connected to the first drive unit 20A, the second drive unit 20B, and the structure 11 by wire bonding. This signal line is connected to an AC power source (not shown). Since the structure 11, the first drive unit 20A, and the second drive unit 20B are bonded by a conductive adhesive, the first drive unit 20A, the second drive unit 20B, and the structure 11 are connected via the signal line. When a voltage is applied between the first driving unit 20A and the second driving unit 20B, a potential difference is generated in the Z direction.

  In step S107, both end sides of the structure 11 are placed on the pedestal 30 and fixed by laser welding from the one surface side 17 in FIG. That is, in the direction of arrow A in FIG. 3, from the side (one surface side 17) opposite to the side (the other surface side 18) where the mirror surface 121 is attached to the mirror portion 12, the structure 11 Laser welding is performed at the four corners. In the present embodiment, fixing portions 15 are formed at the four corners of the structure 11 and are fixed to the pedestal 30 (see FIGS. 1 and 3). The structure 11 may be fixed to the pedestal 30 by spot welding or the like. Thus, the manufacturing process of the optical scanning device 10 is completed.

  According to the manufacturing method of the optical scanning device of the present embodiment described above, laser welding is performed from the side opposite to the side (other surface side 18) on which the mirror surface 121 is attached to the mirror portion 12 in the welding fixing step of step S107. Do. For this reason, even if the metal scattered material by welding is dispersed in the air, the mirror surface 121 is provided on the side (the other surface side 18) opposite to the side to be welded (the one surface side 17). It is possible to prevent the scattered matter from adhering. That is, it is possible to prevent the function of the optical scanning device 10 from deteriorating due to dirt such as metallic scattered matter generated by laser welding adhering to the mirror surface 121.

  Moreover, in this embodiment, the mirror surface sticking process of step S105 is performed after the process of thermosetting the drive unit 20 of step S104. If the mirror surface 121 is affixed to the mirror part 12 before thermosetting, there is a risk that the structure 11 is distorted by applying heat in step S104. Due to this influence, the mirror surface 121 affixed to the mirror part 12 is It can be prevented from peeling off.

  In the manufacturing method of the optical scanning device 10 described above, the step of etching the metal plate material in step S101 corresponds to the structure forming step of the present invention, and the step of applying the adhesive in step S102 to the structure 11; The step of installing a piezoelectric element on the structure 11 in step S103 and the step of thermally curing the adhesive in step S104 correspond to the drive unit forming step of the present invention. In step S105, a transparent dielectric having a mirror surface is formed. The process of affixing to the mirror part 12 corresponds to the mirror surface application process of the present invention, and the process of fixing the structure 11 to the pedestal 30 by laser welding in step S107 corresponds to the welding process of the present invention.

(Modification of optical scanning device)
Next, a modified example of the optical scanning device 10A according to the present invention will be described with reference to FIGS. Note that the configurations with the same reference numerals as those in FIGS. 1 to 3 indicate the same configurations, and the description thereof is omitted.

  Similar to the above-described structure 11, the structure 11 </ b> A has a plate portion 19, a mirror portion 12 </ b> A, a beam portion 13, and openings 16, 16 by removing a metal plate material such as etching or pressing. It is formed. In the structure 11A, openings 16 and 16, a mirror portion 12A, and a beam portion 13 are formed on the negative side in the X-axis direction of FIG. The plate portion 19 is provided only on the X-axis positive side of FIG. 5 in the structure 11A, and the length of the structure 11A in the X-axis direction is shorter than that of the structure 11 described above.

  In FIG. 7, the mirror part 12A is arranged on the opposite side of the X-axis direction from the fixed part 15 with respect to the first drive part 20A, and the mirror part 12A and the fixed part 15 are separated from each other as in the above-described embodiment. Be placed. Specifically, the mirror unit 12A is arranged on the X axis negative side (left side in FIG. 7) with respect to the first drive unit 20A, and the fixed unit 15 is on the X axis positive side with respect to the first drive unit 20A. (Right side of FIG. 7).

  Further, the mirror part 12A is different from the above-described mirror part 12 in that the mirror part 12A has a mirror surface 121A of FIG. After polishing the surface of the metal plate material to form a mirror surface, the plate material is processed to produce the structure 11A, whereby a mirror surface is formed on the other surface side 18 of the structure 11A. That is, the mirror surface 121A is formed on the other surface side 18 of the mirror portion 12A supported by the beam portion 13 formed in the Y-axis direction in FIG.

  As shown in FIG. 6, the first drive unit 20A is provided on the other surface side 18 of the plate part 19 of the structure 11A on the X axis direction positive side (right side in FIG. 6) with respect to the mirror part 12A. Unlike the above-described embodiment, the structure body 11A includes one first drive unit 20A.

  As shown in FIGS. 5 and 7, there are four fixing portions 15 at the X-axis positive end of the one surface side 17 of the structure 11 </ b> A in order to fix the structure 11 </ b> A to the pedestal 30. It is formed by laser welding from the direction. In FIG. 5, four fixing portions 15 are formed at the X-axis positive side end of the structure 11A, but the number and position of the fixing portions 15 are not particularly limited, and the structure 11A is fixed to the pedestal 30 by laser welding. I can do it. In other words, in the above-described embodiment, the structure 11 </ b> A is supported on the pedestal 30 by the fixing portion 15, but in the present modification, the structure 11 </ b> A is cantilevered on the pedestal 30 by the fixing portion 15.

(Manufacturing method of optical scanning device of modification)
Next, a manufacturing method of the optical scanning device 10A according to the modification will be described with reference to FIG. Note that the steps denoted by the same reference numerals as those in FIG. FIG. 8 differs from FIG. 4 in that the surface polishing process in step S100 is added and the mirror surface pasting process in step S105 is omitted.

  In step S100, the surface on one side of the metal plate is polished to form a mirror surface. Further, a mirror surface is formed by plating or the like.

  In step S101, the structure 11A is formed by etching the metal plate as described above. At this time, a mirror surface is formed on the other surface side 18 which is one surface of the structure 11A including the mirror portion 12A.

  In step S102, an adhesive for adhering the first driving unit 20A to the structure 11A is applied to the structure 11A. At this time, an adhesive is applied to the surface side on which the mirror surface of the structure 11A is formed. Here, the surface side to which the adhesive is applied is the other surface side 18 of FIG. After the adhesive is applied to the surface of the plate portion 19 on the other surface side 18 of the structure 11A, the processes after step S103 are executed.

  In step S107, the X-axis positive side end portion of the structure 11A in FIG. 5 is placed on the pedestal 30, and is fixed by laser welding from the one surface side 17 in FIG. That is, laser welding is performed from the one surface side 17 in the direction of arrow A in FIG. 7 on the side opposite to the other surface side 18 where the mirror surface 121A of the mirror portion 12A is formed. Thus, the manufacturing process of the optical scanning device 10A according to this modification is completed.

  According to the manufacturing method of the optical scanning device 10A of the modified example described above, from the one surface side 17 opposite to the other surface side 18 that is the side on which the mirror surface 121A of the mirror portion 12A is formed in the welding fixing step of Step S107. Perform laser welding. For this reason, even if dirt such as metal scattered matter generated by welding is scattered in the air, it is possible to prevent the dirt from adhering to the mirror surface 121A. That is, it is possible to prevent the function of the optical scanning device 10A from deteriorating due to the dirt generated by laser welding adhering to the mirror surface 121A.

  In the manufacturing method of the optical scanning device 10A described above, the step of polishing the surface of the metal plate material in step S100 corresponds to the mirror surface forming step of the present invention.

  In addition, this invention is not limited to embodiment mentioned above, You may add a various change in the range which does not deviate from the summary of this invention.

DESCRIPTION OF SYMBOLS 10,10A Optical scanning device 11,11A structure 12,12A Mirror part 15 Fixing part 17 One side 18 Other side 20A, 20B First drive part, 2nd drive part 30 Base 121, 121A Mirror surface 125 Thin piece member

Claims (7)

A method of manufacturing an optical scanning device, comprising: a structure having a mirror part having a mirror surface that reflects light; a drive unit that swings the mirror part; and a pedestal that fixes the structure.
A structure forming step of forming the flat plate-like structure from a metal plate;
A drive unit forming step of forming the drive unit on the structure formed in the structure forming step;
A method of manufacturing an optical scanning device, comprising: a welding step of welding the structure on which the driving portion is formed by the driving portion forming step to the pedestal from a surface side opposite to the mirror surface. Comprising a mirror surface forming step of forming the mirror surface by polishing the surface of the metal plate;
2. The method of manufacturing an optical scanning device according to claim 1, wherein in the structure forming step, the structure is formed from the plate material on which the mirror surface is formed in the mirror surface forming step. In the structure in which the driving unit is formed by the driving unit forming step, the mirror unit includes a mirror surface pasting step of forming the mirror surface by pasting a thin piece member having a mirror surface on the surface of the mirror unit,
2. The manufacturing of the optical scanning device according to claim 1, wherein in the welding step, the structure is welded to the pedestal from a surface side opposite to the mirror surface pasted in the mirror surface pasting step. Method.   The said mirror part is provided in the one side of the said structure with respect to the said drive part, and the said fixing | fixed part is provided in the other side of the said structure with respect to the said drive part. The manufacturing method of the optical scanning device in any one. An optical scanning device comprising: a structure having a mirror part having a mirror surface for reflecting light; a drive part for swinging the mirror part; and a pedestal for fixing the structure.
The structure is a metal flat plate member, and has a fixing portion that welds and fixes the structure to the pedestal from the surface opposite to the surface on which the mirror surface is formed. Scanning device.   The said mirror part is provided in the one side of the said structure with respect to the said drive part, and the said fixing | fixed part is provided in the other side of the said structure with respect to the said drive part. Optical scanning device. A structure that includes a mirror part having a mirror surface that reflects light and a drive part that swings the mirror part, and is made of a metal plate-like plate material;
An optical scanning device having a base for fixing the structure by welding,
When the structure is fixed to the pedestal, the mirror surface and the pedestal are arranged on the same surface side with respect to the structure.

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