JP2012078389A - Optical scanner, and image projector equipped with the optical scanner - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an optical scanner for reducing a required driving voltage for a prescribed mirror deflection angle.SOLUTION: The optical scanner 100 is fixed to a fixing member 200 to be installed. The optical scanner 100 comprises: a structure 110 including a mirror part 111, beam parts 112A and 112B, and a body part 113; a driving part 120; and a pedestal 130 including a supporting part 132 having a supporting face 132F supporting the structure 110 and extending in a direction being away from the mirror part 111 in a third direction Z, and a base part 133 connected to the supporting part 132 and extending on a face including a first direction X and parallel to a second direction Y. In a region where the deformation amount of the base part 133 in the third direction Z is smaller than the deformation amount of the supporting face 132F in the third direction Z, the fixing member 200 and, of the two faces confronting in the third direction Z of the base part 133, a face 133F on the opposite side to the structure 110 side are fixed to each other.

Description

  The present invention relates to an optical scanner that scans incident laser light in a predetermined direction and an image projection apparatus including the optical scanner. More specifically, the present invention relates to a required drive voltage per predetermined mirror deflection angle of the optical scanner. The present invention relates to an optical scanner that can be made small, and an image projection apparatus including the optical scanner.

  An optical scanner is a device that scans laser light in a predetermined direction by swinging a mirror on which the laser light is incident. The optical scanner is used in a laser printer, a barcode reader, a laser projector, a retinal scanning display, or the like.

  A drive voltage of a predetermined magnitude is applied to the optical scanner in order to swing the mirror at a desired swing angle. Generally, in order to increase the mirror deflection angle of the optical scanner, it is necessary to increase the drive voltage applied to the optical scanner. For this reason, in order to reduce the power consumption of the optical scanner, it is required to reduce the required drive voltage per predetermined mirror deflection angle.

  An example of an optical scanner that swings a mirror by applying a driving voltage is disclosed in Patent Document 1. In an optical scanning device as an optical scanner disclosed in Patent Document 1, a substrate as a structure is supported in a cantilever manner on a support member as a base. This pedestal is fixed to a fixed part suitable for scanning the mirror in a predetermined direction.

JP 2006-293116 A

  Regarding the above-described optical scanner, the present inventor has obtained the knowledge that the required drive voltage varies depending on the fixing position between the base and the fixing component through various experiments. That is, there is a problem that the required driving voltage increases depending on the fixing position between the base and the fixing component.

  The present invention has been made in view of the above-described problems, and an object thereof is to provide an optical scanner that can reduce a required drive voltage per predetermined mirror deflection angle.

In order to achieve the above object, the optical scanner according to claim 1 is an optical scanner that is fixedly installed to a fixed component, the optical scanner including a mirror unit that reflects incident laser light, and the optical scanner. A beam portion extending in a first direction along the swing axis of the mirror portion and connected to both ends of the mirror portion; and a main body portion supporting the beam portion and extending in a second direction away from the mirror portion. The main body portion is formed on one of the two surfaces facing each other in the third direction orthogonal to the first direction and the second direction of the main body portion, and by applying a driving voltage. And a drive unit that oscillates the mirror unit at a predetermined resonance frequency about an oscillation axis through the main body unit and the beam unit, and the optical scanner includes the structural body. The third direction has a support surface for cantilever support A pedestal comprising: a support portion extending in a direction away from the mirror portion; and a pedestal portion connected to the support portion and extending on a plane parallel to the second direction; and a third direction of the pedestal portion In a region where the amount of deformation is smaller than the amount of deformation in the third direction of the support surface, the surface on the opposite side to the side where the structure is located, of the two surfaces of the base portion facing in the third direction, and the surface The fixed part is fixed.

  The optical scanner according to claim 2, wherein the base portion is fixed to a fixing component in a region where the shortest distance between the support surface and the base portion is farther than a shortest distance between the support surface and the mirror portion. It is characterized by that.

  The optical scanner according to claim 3, wherein the base portion has opposite ends in the second direction, and at both side regions extending in the first direction at one end far from the support surface. It is fixed to a fixed part.

  The optical scanner according to claim 4, wherein the platform has opposite ends in the second direction, and a center region of a region extending in the first direction at one end close to the support surface of the both ends. It is characterized by being fixed to a fixed part.

  The optical scanner according to claim 5, wherein the base portion has opposite ends in the second direction, and a center region of a region extending in the first direction at one end close to the support surface among the both ends. It is characterized by being fixed to a fixed part.

  The optical scanner according to claim 6, wherein the base portion has opposite ends in the second direction, and both side regions of a region extending in the first direction at one end far from the support surface among the both ends. The center region is narrower than the both side regions.

  The image projection apparatus according to claim 7, wherein a light emitting unit that emits a laser beam corresponding to an image signal, and the laser beam emitted from the light emitting unit is reflected by the mirror unit and scanned in a predetermined direction. Item 7. The optical scanner according to any one of Items 1 to 6, a second optical scanner that scans laser light scanned in the predetermined direction by the optical scanner in a direction substantially perpendicular to the predetermined direction, and the second light A projection unit that projects the laser beam scanned in the orthogonal direction onto the projection target by a scanner.

  According to the optical scanner of the first aspect, the pedestal is fixed to the fixed component in a region where the amount of deformation of the pedestal in the third direction is smaller than the amount of deformation of the support surface in the third direction. Compared to the case where the base part is fixed to the fixed component in the region where the deformation amount is small in the third direction, and is fixed to the fixed component in the region where the deformation amount is larger than the deformation amount in the third direction of the support surface. The vibration force applied to the main body by the drive unit is less likely to diverge to the fixed component through the pedestal. For this reason, the required drive voltage of the optical scanner can be reduced as compared with the case where the fixing part is fixed in a region where the deformation amount is larger than the deformation amount in the third direction of the support surface.

  According to the optical scanner of the second aspect, the pedestal is fixed to the fixed component in a region where the shortest distance between the support surface and the base is farther than the shortest distance between the support surface and the mirror. The base part far from the support surface is far from the driving part that applies vibration force to the structure and the base. For this reason, a base part far from a support surface has a small deformation amount compared with a base part close to the support surface. As a result, the vibration force is unlikely to diverge to the fixed part through the base. For this reason, the required drive voltage of the optical scanner can be reduced.

According to the optical scanner of the third aspect, the pedestal is fixed to the fixed component in both side regions in the first direction at one end far from the support surface among the opposite ends in the second direction. In one end far from the support surface, the central region in the first direction becomes a vibration antinode. For this reason, the central region in the first direction has a larger deformation amount than the both side regions. For this reason, if the said center area | region and fixing components are fixed, the required drive voltage of an optical scanner will become large. On the other hand, the both side regions serve as vibration nodes. For this reason, the deformation amount of the both side regions is relatively small in one end far from the support surface. For this reason, the required drive voltage of an optical scanner can be made small by fixing the said both sides area | region of a base part, and a fixing component.

  According to the optical scanner of the fourth aspect, the pedestal has a pair of honey portions, and the pair of honey portions is fixed to the fixing component in a region near the support surface. A region farther from the support surface in the pair of honey portions becomes an antinode of vibration. For this reason, the region far from the support surface has a large amount of deformation, and the required drive voltage of the optical scanner increases. On the other hand, the region of the pair of honey portions closer to the support surface of each honey portion becomes a vibration node. For this reason, the deformation | transformation amount is small compared with the side far from the said support surface in the area | region near the said support surface. For this reason, the required drive voltage of the optical scanner can be reduced by fixing the region closer to the support surface and the fixed component. Further, by fixing the region close to the support surface and the fixed component, the bonding force between the fixed component and the pedestal is strengthened. As a result, it is possible to prevent the fixed component and the base from being separated due to an excessive impact applied to the optical scanner. In addition, a connection component that connects the drive unit and a control circuit for controlling the drive unit is placed on each of the pair of honey portions, and the drive unit and the connection component are electrically connected by wire bonding or the like. Thus, the drive voltage can be easily applied to the drive unit.

  According to the optical scanner of the fifth aspect, the pedestal is fixed to the fixed component in the central region in the first direction at one end close to the support surface among the opposite ends in the second direction. In one end close to the support surface, both side regions in the first direction become vibration antinodes. For this reason, the deformation amount is large in both side regions in the first direction, and the required driving voltage of the optical scanner is increased. On the other hand, the central region in the first direction is slightly a vibration node. For this reason, the amount of deformation of the central region in the first direction is smaller than the amount of deformation of the side regions in the first direction. For this reason, when the central region and the fixed component are fixed, the required driving voltage of the optical scanner can be reduced as compared with the case where the both side regions and the fixed component are fixed. In addition, when one end far from the support surface is fixed among the opposing ends in the second direction of the base, the central region in the first direction at one end near the support surface and the one end far from the support surface are They are fixed on opposite sides in the two directions. For this reason, the vibration of the optical scanner is stabilized as compared with the case of being fixed on the same side in the second direction. Moreover, by fixing in the said center area | region, compared with the case where it fixes to the same side in a 2nd direction, the bias | inclination with respect to the whole surface of the said opposite side of a base part is lose | eliminated. As a result, the bonding force between the fixed component and the base is enhanced. And it can prevent that a fixed component and a base part isolate | separate by applying an excessive impact to an optical scanner.

  According to the optical scanner of the sixth aspect, the central region at one end close to the support surface is narrower than the both side regions at one end far from the support surface. In general, the larger the fixed region, the more easily the vibration caused by the drive unit is distributed to the fixed components, and as a result, the required drive voltage increases. In addition, of both ends of the base portion in the second direction, one end close to the support surface has a larger amount of deformation than one end far from the support surface. For this reason, the required drive voltage of the optical scanner can be further reduced by making the central region smaller than the both side regions.

2 is a plan view of the optical scanner 100. FIG. The top view of the structure 110 and the piezoelectric drive part 120 in one Embodiment of this invention. (A) The top view of the base 130, (B) Sectional drawing in alignment with the AA of the base 130, (C) The bottom view of the base 130. FIG. (A) The side view which shows the base 130 and the fixed component 200, (B) The bottom view which shows the adhesion area | region of the base 130 and the fixed component 200. FIG. The figure which shows the area | region with a small deformation amount in a Z direction in the base 130 seen from the Z direction at the time of an optical scanner drive. (A) The graph which shows the mirror deflection angle change by the difference in the adhesion | attachment area | region of a fixed component and a base. (B) The graph which shows the mirror deflection angle change rate by the difference in the adhesion area | region of a base with a fixing component. The top view which shows the base 130B. The figure which shows the area | region where the deformation amount in a Z direction is small in the base 130B seen from the Z direction at the time of an optical scanner drive.

  Embodiments reflecting one aspect of the present invention will be described below in detail with reference to the drawings. One aspect of the present invention is not limited to the configuration described below, and various configurations can be employed in the same technical idea. For example, in each configuration described below, a predetermined configuration may be omitted or replaced with another configuration. Moreover, you may make it include another structure.

[Configuration of Optical Scanner 100]
The optical scanner 100 will be described with reference to FIG. FIG. 1 is a plan view of the optical scanner 100. As shown in FIG. 1, the optical scanner 100 includes a structure 110, a piezoelectric drive unit 120, and a pedestal 130. In the optical scanner 100, the piezoelectric drive unit 120 periodically expands and contracts at the resonance frequency of the structure 110, thereby exciting plate wave vibration in the structure 110. The plate-wave vibration is transmitted to the main body 113 of the structure 110, and the mirror 111 of the structure 110 is swung to drive the optical scanner 100.

[Configuration of Structure 110]
The structure of the structure 110 and the piezoelectric drive part 120 is demonstrated using FIG. FIG. 2 is a plan view of the structure 110 and the piezoelectric drive unit 120. The structure 110 includes a mirror part 111, torsion beam parts 112A and 112B, and a main body part 113. The structure 110 is manufactured by forming each of the above-described structures on a stainless metal plate having a thickness of several tens to several hundreds of μm using press working.

  Define the direction. The thickness direction of the structure 110 is defined as the Z direction, the direction parallel to the swing axis L1 of the mirror portion 111 is defined as the X direction, and the direction in which the main body 113 extends from the ends of the torsion beam portions 112A and 112B is defined as the Y direction. The Hereinafter, each configuration included in the structure 110 will be described.

  The mirror unit 111 swings at a resonance frequency of tens of thousands of Hz around the swing axis L1. The mirror unit 111 is formed in a circular shape when viewed from the Z direction. The surface on the negative side in the Z direction of the mirror unit 111 is mirror-polished so as to reflect incident light.

  The torsion beam portions 112A and 112B are connected to both sides of the mirror portion 111 and extend parallel to the swing axis L1. The torsion beam part 112A extends from the mirror part 111 to the X direction positive side. The torsion beam portion 112B extends from the mirror portion 111 to the X direction negative side.

The main body 113 includes ear portions 113A1 and 113A2, a central portion 113B, and a connection portion 113C. The ear portion 113A1 is connected to the end portion on the positive side in the X direction of the torsion beam portion 112A. The ear portion 113A2 is connected to the end portion on the X direction negative side of the torsion beam portion 112B. The ear portions 113A1 and 113A2 extend to the Y direction negative side from the position where the torsion beam portions 112A and 112B of the ear portions 113A1 and 113A2 are connected. The ear portion 113A1 is connected to the end portion on the X direction positive side of the center portion 113B on the Y direction positive side of the center portion 113B. The ear portion 113A2 is connected to the X-direction negative side end portion of the center portion 113B on the Y-direction positive side of the center portion 113B. The central portion 113B is located at the central portion of the structure 110. The central portion 113B includes a central body portion 113B1 having a quadrangular shape when viewed from the positive side in the Z direction, and a central tapered portion 113B2 that is narrowly tapered from the side on the negative side in the Y direction of the central body portion 113B1 to the negative side in the Y direction. . The piezoelectric drive unit 120 is bonded to the surface on the positive side in the Z direction of the central body 113B1. The side on the Y direction negative side of the center taper portion 113B2 is connected to the connection portion 113C. The connection portion 113C has a quadrangular shape when viewed from the Z direction. The center in the X direction of one end on the Y direction positive side of the connection portion 113C is connected to the one end on the Y direction negative side of the center taper portion 113B2. The connection portion 113C is fixed to the pedestal 130.

  The piezoelectric drive unit 120 is provided on the surface on the positive side in the Z direction of the central main body 113B1. The piezoelectric driving unit 120 is formed by laminating gold or platinum as an electrode layer on both surfaces of a lead zirconate titanate that is a piezoelectric material, for example, formed into a flat plate having a thickness of 30 μm to 100 μm. Is formed. The piezoelectric drive unit 120 and the central body 113B1 are bonded with a conductive adhesive. The conductive adhesive is, for example, a disc-shaped metal filler made of silver dispersed in an epoxy synthetic resin base.

[Configuration of Pedestal 130]
The pedestal 130 will be described with reference to FIG. FIG. 3A is a plan view of the pedestal 130. FIG. 3B is a cross-sectional view of the pedestal 130 shown in FIG. 3A cut along the line AA. FIG. 3C is a bottom view of the pedestal 130. As shown in FIG. 3A, the pedestal 130 is formed in a cross shape when viewed from the positive side in the Z direction. The pedestal 130 is made of stainless steel. As shown in FIGS. 3A and 3B, the pedestal 130 includes a pedestal part 133, a support part 132, and a pair of honey parts 131A and 131B.

  As shown in FIG. 3A, the base 133 is formed in a quadrangular shape when viewed from the Z direction. As shown in FIG. 3B, the base 133 includes a protruding portion 133A that protrudes several μm to the Z direction negative side as compared to the Z direction negative side surface of the pair of honey portions 131A and 131B. A surface 133F around the protruding portion 133A on the Z direction negative side of the base portion 133 is bonded to a fixing component 200 described later. As shown in FIG. 3C, the base 133 is provided with an elliptical through hole HL1 viewed from the Z direction and a rectangular through hole HL2 viewed from the Z direction. The through hole HL <b> 1 is located on the negative side in the Z direction of the mirror part 111 of the structure 110. Laser light emitted from a light emitting device (not shown) passes through the through-hole HL1, is incident on the surface on the negative side in the Z direction of the mirror portion 111 that is mirror-polished, and is reflected in the horizontal direction. The through hole HL2 is located on the Z direction negative side of the central taper portion 113B2. The through hole HL2 is used in the manufacturing process of the optical scanner 100.

  As shown in FIG. 3A, the support part 132 extends from the edge of the base part 133 to the positive side in the Z direction in a square shape. The surface 132F on the Y direction negative side of the support portion 132 on the Z direction positive side and the surface on the Z direction negative side of the connection portion 113C of the structure 110 are connected.

  As shown in FIG. 3A, the pair of honey portions 131A and 131B protrudes from the center in the Y direction on both sides of the base portion 133 in the X direction in a direction away from the mirror portion 111 and extends in the Y direction. Provided. As shown in FIG. 3B, one end on the negative side in the X direction of the honeycomb portion 131A is formed to protrude to the positive side in the Z direction. One end on the positive side in the X direction of the honeycomb portion 131B is formed to protrude to the positive side in the Z direction.

[Adhesion Area between Fixed Part 200 and Pedestal 130]
The adhesion area | region of the fixing component 200 and the base 130 is demonstrated using FIG. FIG. 4A is a side view of the fixed component 200 and the pedestal 130. FIG. 4B is a plan view showing an adhesion region between the fixed component 200 and the pedestal 130. As shown in FIG. 4A, the fixing component 200 is fixed using an adhesive and a surface 133F around the protrusion 133A on the Z direction negative side of the base 133. The adhesive is made of an acrylic resin. As shown in FIG. 4B, the fixed component 200 and the pedestal 130 are bonded to each other at predetermined bonding regions FF1, FF2, FF3, FF4, and FF5. The adhesion region FF1 is a region on the negative side in the X direction among both sides in the X direction of one end of the base portion 133 on the positive side in the Y direction. The adhesion region FF2 is a region on the X direction positive side among both sides in the X direction of one end on the Y direction positive side of the base portion 133. The adhesion region FF3 is a region on the Y direction negative side among both sides in the Y direction of the honeycomb portion 131B of the base 130. The adhesion region FF4 is a region on the negative side in the Y direction among both sides in the Y direction of the portion 131A of the base 130. The adhesion region FF5 is a central region in a region extending in the X direction at one end of the base 133 on the Y direction negative side.

[Deformation amount when driving optical scanner 100]
The difference in the amount of deformation in the Z direction of the pedestal 130 when the optical scanner 100 is driven will be described with reference to FIG. FIG. 5 is a diagram illustrating a state of the amount of deformation in the Z direction of the pedestal 130 when the optical scanner 100 is driven. The magnitude of the deformation amount in the Z direction in FIG. 5 is a result of an experiment using Intelli Sweet. Regions BF1 and BF2 (vertical line portions) illustrated in FIG. 5 are regions in which the deformation amount in the Z direction is smaller than the average deformation amount of the pedestal 130 in the Z direction. The region BF1 is a region extending substantially in a strip shape from the X-direction negative side to the Y-direction negative side of the splash portion 131A among both sides in the X direction of one end of the base portion 133 on the Y direction positive side. The region BF2 is a region extending substantially in a strip shape from the X-direction positive side to the Y-direction negative side of the honeycomb portion 131B among both sides in the X direction of one end of the base portion 133 on the Y direction positive side. As shown in FIG. 5, the areas corresponding to the adhesion areas FF1, FF2, FF3, and FF4 are in the areas BF1 and BF2. The areas BF1 and BF2 have a smaller deformation amount in the Z direction when the optical scanner 100 is driven than the other areas of the pedestal 130. In the region where the deformation amount is small, the vibration force applied to the structure 110 by the piezoelectric driving unit 120 is less likely to diverge to the fixed component via the pedestal 130 as compared to the region where the deformation amount is large. Therefore, a region with a small amount of deformation has a larger mirror deflection angle when a predetermined drive voltage is applied while being fixed to a fixed component, compared to a region with a large amount of deformation.

  The change in the deflection angle of the mirror unit 111 due to the difference in the adhesion area between the fixed component and the pedestal will be described with reference to FIG. FIG. 6A is a graph showing a change in deflection angle due to a difference in the adhesion region between the fixed component and the pedestal. FIG. 6B is a graph showing the rate of change of the deflection angle due to the difference in the adhesion region between the fixed component and the pedestal. In the experiment, the deflection angle with respect to a fixed driving voltage was measured using an evaluation apparatus capable of measuring a predetermined deflection angle. In addition, Intelli Sweet was used for the numerical calculation. The experiment was performed three times with three patterns of initial, only the mirror side, and only the welding side. The initial is an experimental result when the base 130 and the fixed component 200 are fixed with a jig without bonding. Only the mirror side is a case where the fixed component 200 and the pedestal 130 are fixed only by the adhesion regions FF1 and FF2 close to the mirror part 111. The term “welded side only” refers to the case where the fixed component 200 and the pedestal 130 are fixed only in the regions on both sides in the X direction at one end on the Y direction negative side of the pedestal 130. Looking at FIG. 6A, the deflection angle in the case of the initial is about 27 ° on the average, whereas the deflection angle only on the mirror side is about 30 ° on the average. Looking at FIG. 6B, the deflection angle change rate only on the mirror side is about 10% higher on average than the initial deflection angle change rate. On the other hand, as shown in FIG. 6A, the deflection angle only on the welding side corresponding to the opposite side in the Y direction only on the mirror side is around 23 ° on average. Looking at FIG. 6B, the deflection angle change rate only on the welding side is about 20% lower on average than the initial deflection angle change rate. Thus, the optical scanner 100 when only the mirror side is bonded has a larger deflection angle with respect to the required drive voltage than the optical scanner when only the welding side is bonded. In other words, the optical scanner 100 when only the mirror side is bonded has a smaller driving voltage required to obtain a predetermined mirror deflection angle than the optical scanner when only the welding side is bonded. From FIG. 6, the optical scanner is compared with the case where the fixed component 200 is bonded to the region having a large amount of deformation in the Z direction by bonding the regions FF <b> 1 and FF <b> 2 having a small amount of deformation in the Z direction and the fixed component 200. Obviously, the required drive voltage becomes smaller.

〔Example of use〕
The optical scanner 100 of this embodiment is used by being incorporated in a head mounted unit of a retinal scanning display described in, for example, Japanese Patent Application Laid-Open No. 2010-79104. The optical scanner 100 is
It is used as an optical scanning element that performs high-speed horizontal scanning of laser light emitted from an optical fiber of a retinal scanning display. The retinal scanning display includes a light emitting unit that emits laser light according to an image signal, an optical scanner 100 that scans the laser beam emitted from the light emitting unit to the mirror unit 111 and scans in the horizontal direction, and the optical scanner 100. A second optical scanner that scans the laser beam scanned in the horizontal direction in a vertical direction orthogonal to the horizontal direction, a projection unit that projects the laser light scanned in the vertical direction by the second optical scanner onto the pupil of the user, and Is provided. The light emitting unit generates laser light corresponding to the image signal and emits the laser light. The laser beam emitted from the light emitting unit is reflected by the mirror unit 111 of the optical scanner 100 and scanned in the horizontal direction. The laser beam scanned in the horizontal direction by the optical scanner 100 is reflected by the second mirror portion of the second optical scanner and scanned in the vertical direction orthogonal to the horizontal direction. The laser beam scanned in the vertical direction orthogonal to the horizontal direction is emitted to the projection unit, and is projected onto the user's pupil by the projection unit. Thereby, the user can visually recognize the laser beam modulated by the image signal. The retinal scanning display, the light emitting unit, the second light scanner, and the projection unit in the present embodiment are examples of the image projection device, the light emitting unit, the second light scanner, and the projection unit in this order. The user's pupil in this embodiment is an example of a projection target in the present invention. The horizontal direction and the vertical direction in the present embodiment are examples of a predetermined direction in the present invention and a direction substantially orthogonal to the predetermined direction in order.

[Modification]
A pedestal 130B different from the pedestal 130 of this embodiment will be described with reference to FIG. FIG. 7 is a bottom view of the base 130B. The pedestal 130 </ b> B has a shape excluding the splash portions 131 </ b> A and 131 </ b> B of the pedestal 130. FIG. 8 is a diagram showing a region with a small amount of deformation in the Z direction when the optical scanner of the base 130B is driven. The deformation amount in the Z direction of predetermined regions BB1, BB2, and BB3 (vertical line portions) in FIG. 8 is smaller than the average deformation amount in the Z direction. The region BB1 is a region extending substantially in a band shape from the X direction negative side region at one end on the Y direction positive side to the center in the Y direction on the X direction negative side of the through hole HL1. The region BB2 is a region extending substantially in a band shape from the X-direction positive side region at one end on the Y-direction positive side to the center in the Y-direction on the X-direction positive side of the through hole HL1. The region BB3 is a central region in the X direction at one end on the Y direction negative side. Adhesion regions FF6, FF7, and FF8 with the fixed component 200 are in the regions BB1, BB2, and BB3, respectively. The adhesion region FF6 is a region on the negative side in the X direction among both side regions in the X direction at one end on the positive side in the Y direction on the surface 133F of the base 133. The adhesion region FF7 is a region on the positive side in the X direction among both side regions in the X direction at one end on the positive side in the Y direction on the surface 133F of the base 133. The adhesion region FF8 is a central region in the X direction at one end on the negative side in the Y direction on the surface 133F of the base portion 133. The required drive voltage can be reduced by bonding the regions FF6 and FF7 having a small deformation amount in the Z direction and the fixed component 200. By bonding the region FF8 on the opposite side of the regions FF6 and FF7 in the Y direction and the fixed component 200, the vibration of the structure 110 and the base 130B is stabilized. Further, it is possible to prevent the base 130B and the fixed component 200 from being peeled off and the base 130B and the fixed component 200 from being separated. In the pedestal 130 </ b> B, similarly to the pedestal 130, the region where the deformation amount in the Z direction is relatively small and the fixed component 200 are bonded, so the region where the deformation amount in the Z direction is large and the fixed component 200 are bonded. Compared to the above, the required drive voltage can be reduced.

In the present embodiment, the structure is formed by pressing, but the structure may be formed by other removal processing such as etching. In the present embodiment, the structure is stainless steel, but the structure may be formed of a non-metallic material such as a silicon wafer. In this case, when a conductive layer such as a metal thin film is provided on the surface of the non-metallic material structure, the driving voltage can be easily transmitted to the piezoelectric driving unit. In this embodiment, the piezoelectric drive unit is lead zirconate titanate, but any piezoelectric material may be used. In the present embodiment, the pedestal is made of stainless steel, but the pedestal may be made of a metal having elasticity such as titanium. In the present embodiment, the mirror unit 111 is formed in a circular shape, but the mirror unit 111 may be, for example, an ellipse or a polygon. In the present embodiment, the adhesive that bonds the fixed component 200 and the pedestal 130 is made of an acrylic resin, but may be a synthetic resin such as an epoxy resin or a silicon resin. In the present embodiment, the conductive adhesive that bonds the piezoelectric driving unit 120 and the structure 110 is a metal filler made of silver dispersed in a base made of silicon resin. The resin may be a synthetic resin such as an epoxy resin or an acrylic resin, and the filler may be a metal such as gold or copper.

  The X direction, the Y direction, and the Z direction in the present embodiment are examples of the first direction, the second direction, and the third direction in the present invention in order. The fixed component 200, the optical scanner 100, the structure 110, the piezoelectric drive unit 120, and the pedestal 130 in this embodiment are examples of the fixed component, the optical scanner, the structure, the drive unit, and the pedestal in the present invention in order. The mirror part 111 and the main body part 113 in this embodiment are examples of the mirror part and the main body part in the present invention in order. The torsion beam portions 112A and 112B in the present embodiment are examples of the beam portions in the present invention. The support part 132 and the base part 133 in this embodiment are examples of the support part and the base part in the present invention. The pair of honey portions 131A and 131B in the present embodiment is an example of a pair of honey portions in the present invention. The surface 132F on the Z direction positive side on the Y direction negative side of the support portion 132 in the present embodiment is an example of a support surface in the present invention. The surrounding surface 133F in the present embodiment is an example of the opposite surface in the present invention. The swing axis L1 in the present embodiment is an example of the swing axis in the present invention. The adhesion regions FF1 and FF2 in the present embodiment are examples of both side regions extending in the first direction at one end far from the support surface in the present invention. The adhesion regions FF1 and FF2 in the present embodiment are examples of regions where the shortest distance between the support surface and the base is far. The adhesion regions FF3 and FF4 in the present embodiment are an example of a region on the side close to the support surface in both side regions in the second direction in the present invention. The adhesion region FF5 in the present embodiment is an example of the central region of the region extending in the first direction at one end close to the support surface in the present invention. The adhesion regions FF6 and FF7 in the present embodiment are examples of both side regions extending in the first direction at one end far from the support surface in the present invention. The adhesion region FF8 in the present embodiment is an example of the central region of the region extending in the first direction in the present invention. The adhesion regions FF1, FF2, FF3, FF4, FF5, FF6, FF7, and FF8 in the present embodiment are examples of regions in which the deformation amount in the third direction of the base portion is smaller than the deformation amount in the third direction of the support surface. The base 130B in the present embodiment is an example of a base in the present invention. The surface on the positive side in the Z direction of the center main body 113B1 in the present embodiment is an example of one surface in the present invention.

DESCRIPTION OF SYMBOLS 100 Optical scanner 110 Structure 111 Mirror part 112A, 112B Torsion beam part 113 Main body part 120 Piezoelectric drive part 130, 130B Base 131A, 131B One pair of honey part 132 Support part 132F Support surface 133 Base part 200 Fixed part L1 Swing axis

Claims (7)

An optical scanner installed fixedly with a fixed part,
The optical scanner is
A mirror part for reflecting the incident laser beam;
A beam portion extending in a first direction along the swing axis of the mirror portion and connected to both ends of the mirror portion;
A main body that supports the beam and extends in a second direction away from the mirror;
A structure having
The main body is formed on one of the two surfaces facing each other in the first direction and the third direction orthogonal to the second direction, and by applying a driving voltage, the main body is vibrated, A drive unit that oscillates the mirror unit at a predetermined resonance frequency about the oscillation axis through the main body unit and the beam unit,
The optical scanner is
A support portion that cantilever-supports the structure, and a support portion extending in a direction away from the mirror portion in the third direction;
A base connected to the support and extending on a plane parallel to the second direction;
Further equipped with a pedestal,
In a region where the amount of deformation in the third direction of the base portion is smaller than the amount of deformation in the third direction of the support surface, the side where the structure is located among two surfaces of the base portion facing in the third direction; The optical scanner is characterized in that the opposite surface and the fixed part are fixed. The platform is
The optical scanner according to claim 1, wherein the optical scanner is fixed to a fixed component in a region where the shortest distance between the support surface and the base portion is farther than the shortest distance between the support surface and the mirror portion. The platform is
Having opposite ends in the second direction,
3. The optical scanner according to claim 2, wherein the optical scanner is fixed to a fixed component at both end regions extending in the first direction at one end far from the support surface. The pedestal is
A pair of honey portions projecting from both sides of the base portion in the first direction;
The pair of honey portions is
The optical scanner according to any one of claims 1 to 3, wherein the optical scanner is fixed to a fixed component in a region closer to the support surface in both side regions in the second direction. The platform is
Having opposite ends in the second direction,
5. The optical scanner according to claim 1, wherein the optical scanner is fixed to a fixed component in a central region of a region extending in the first direction at one end near the support surface among both ends thereof. The platform is
Having opposite ends in the second direction,
Of the both ends, fixed to the fixing component in both side regions of the region extending in the first direction at one end far from the support surface,
The optical scanner according to claim 5, wherein the central region is narrower than the both side regions. A light emitting section for emitting laser light according to the image signal;
The optical scanner according to claim 1, wherein the laser beam emitted from the light emitting unit is reflected on the mirror unit and scanned in a predetermined direction.
A second optical scanner that scans laser light scanned in the predetermined direction by the optical scanner in a direction substantially perpendicular to the predetermined direction;
A projection unit that projects the laser beam scanned in the orthogonal direction by the second optical scanner onto a projection target;
An image projection apparatus comprising:

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