JP2012119043A - Manufacturing method for magnetic recording medium and manufacturing device for magnetic recording medium - Google Patents

Abstract

PROBLEM TO BE SOLVED: To detect foreign matter sticking on a pattern formation body supported on a holding body to perform magnetic transfer.SOLUTION: A servo pattern formation surface of a first master held by a first holder is imaged by irradiating the servo pattern formation surface of the first master with light and receiving diffuse-reflected light, and a servo pattern formation surface of a second master held by a second holder is imaged by irradiating the servo pattern formation surface of the second master with light and receiving diffuse-reflected light. When it is not recognized from imaging results of the first master and second master that foreign matter sticks on the first master and second master, the magnetic recording medium is sandwiched between the first master held by the first holder and the second master held by the second holder to magnetically transfer a first pattern formed on the first master and a second pattern formed on the second master.

Description

  The present invention relates to a magnetic recording medium manufacturing method and a magnetic recording medium manufacturing apparatus.

In a magnetic recording apparatus typified by a hard disk drive or the like, data is written to and read from a rotating magnetic recording medium using a magnetic head.
In this type of magnetic recording apparatus, the magnetic head is positioned in order to move the magnetic head to a target position on the magnetic recording medium and to write and read data at that position. For this reason, positioning data that is read by the magnetic head and used for positioning the magnetic head is recorded on the magnetic recording medium in advance.

  As a prior art described in the publication, it has been proposed to record positioning data and the like on a magnetic recording medium by a so-called magnetic transfer system (see Patent Document 1). In Patent Document 1, in a state where a magnetic recording medium is sandwiched between two pattern forming bodies on which a pattern corresponding to data to be recorded is formed, the two pattern forming bodies and the magnetic recording medium are sandwiched in one direction. A magnetic transfer of the pattern to the magnetic recording medium is performed by applying a heading magnetic force.

JP 2002-324314 A

In the manufacture of magnetic recording media using the magnetic transfer method, if foreign matter adheres to the pattern formation surface of the pattern formation body, the foreign matter is sandwiched between the pattern formation body and the magnetic recording medium during magnetic transfer. As a result, defects due to foreign matter may occur in each of the pattern formed body and the magnetic recording medium after magnetic transfer.
An object of the present invention is to make it possible to detect foreign matter adhering to a pattern forming body attached for performing magnetic transfer.

According to the present invention, the inventions according to the following [1] to [16] are provided.
[1] The pattern forming body held by the holding body and formed with the pattern is irradiated with light so that the angle formed with the pattern forming surface on which the pattern is formed is greater than 0 ° and less than 45 °. Receiving a light diffusely reflected from the pattern forming surface, imaging the pattern forming surface;
Determining the adhesion of foreign matter to the pattern formation surface based on the imaging result of the pattern formation surface;
When no foreign matter adheres to the pattern forming surface in the determining step, the recording surface of the magnetic recording medium is brought into contact with the pattern forming surface of the pattern forming member held by the holding member, and the magnetic contact with the pattern forming member And a magnetic recording medium manufacturing method including a step of magnetically transferring a pattern to the recording medium.
[2] In the magnetic transfer step, a pressing member provided so as to be able to advance and retreat relative to the pattern forming surface of the pattern forming body held by the holding body is used, and the pattern is passed through the back surface of the recording surface of the magnetic recording medium. Press the magnetic recording medium against the formed body,
In the imaging step, pressing is performed by irradiating light so that the angle between the pressing member and the pressing surface of the magnetic recording medium exceeds 0 ° and less than 45 °, and receiving light diffusely reflected from the pressing surface. Image the surface,
In the determining step, determine the adhesion of foreign matter to the pressing surface based on the imaging result of the pressing surface,
The method for manufacturing a magnetic recording medium according to [1], wherein a magnetic transfer step is executed when no foreign matter adheres to the pressing surface in the determining step.
[3] The method for manufacturing a magnetic recording medium according to [1] or [2], wherein the pattern is configured by unevenness on a pattern forming surface.

[4] With respect to the first pattern forming body held by the first holding body and formed with the first pattern, the angle formed with the first forming surface on which the first pattern is formed is more than 0 ° and less than 45 °. Irradiating the light so as to be received and receiving the light diffusely reflected from the first forming surface, thereby imaging the first forming surface;
With respect to the second pattern forming body held by the second holding body and formed with the second pattern, the angle formed with the second forming surface on which the second pattern is formed is greater than 0 ° and less than 45 °. Irradiating light and receiving light diffusely reflected from the second forming surface to image the second forming surface;
Determining the adhesion of foreign matter to the first formation surface based on the imaging result of the first formation surface and the adhesion of foreign matter to the second formation surface based on the imaging result of the second formation surface;
The first pattern forming body can be moved by relatively moving the first holding body and the second holding body when adhesion of foreign matter is not recognized on both the first forming surface and the second forming surface in the determining step. A magnetic recording medium for recording magnetic information is sandwiched between the first formation surface of the second pattern formation body and the second formation surface of the second pattern formation body, and the first pattern and the second pattern are magnetized with respect to the sandwiched magnetic recording medium. And a step of transferring the magnetic recording medium.
[5] The magnetism according to [4], wherein execution of the magnetic transfer step is prohibited when foreign matter adheres to both the first forming surface and the second forming surface in the determining step. A method for manufacturing a recording medium.
[6] The first holding body and the second holding body are arranged so that the first formation surface in the first pattern formation body and the second formation surface in the second pattern formation body face each other.
The method for manufacturing a magnetic recording medium according to [4] or [5], wherein the step of imaging the first formation surface and the step of imaging the second formation surface are executed in parallel.
[7] In the determining step,
First reference data obtained by previously imaging the first formation surface of the first pattern formation body after being attached to the first holding body and before being used in magnetic transfer, and imaging the first formation surface Determining the presence or absence of foreign matter adhering to the first forming surface based on the comparison with the first imaging data obtained in the step of
Second reference data obtained by imaging in advance the second formation surface of the second pattern formation body after being attached to the second holding body and before being used for magnetic transfer, and imaging the second formation surface The magnetic recording medium according to any one of [4] to [6], wherein the presence or absence of foreign matter on the second forming surface is determined based on a comparison with the second imaging data obtained in the step of Manufacturing method.
[8] The first pattern is formed by unevenness on the first forming surface,
The method for manufacturing a magnetic recording medium according to any one of [4] to [7], wherein the second pattern is formed by unevenness on the second formation surface.

[9] A holding body for holding a pattern forming body in which a pattern is formed on the pattern forming surface;
A light irradiating means for irradiating the pattern forming body held by the holding body with light so that an angle formed with the pattern forming surface exceeds 0 ° and less than 45 °;
Imaging means for imaging the pattern formation surface by receiving light irradiated by the light irradiation means and diffusely reflected by the pattern formation surface;
A magnetic recording medium including a magnetic transfer means for magnetically transferring a pattern to a magnetic recording medium in contact with the pattern forming surface of the magnetic recording medium in contact with the pattern forming surface of the holding body that holds the pattern forming body Manufacturing equipment.
[10] Judgment means for judging whether foreign matter is attached to the pattern formation surface based on imaging data obtained by imaging the pattern formation surface;
[9] The magnetic field according to [9], further comprising permission means for permitting magnetic transfer to the magnetic recording medium by the magnetic transfer means when adhesion of foreign matter to the pattern forming surface is not recognized by the judging means. Recording medium manufacturing equipment.
[11] A pressing member that is provided so as to be capable of moving forward and backward relative to the pattern forming surface of the pattern forming body held by the holding body, and that presses the magnetic recording medium against the pattern forming body via the back surface of the recording surface of the magnetic recording medium. Further including
The light irradiating means irradiates light so that an angle formed by the pressing surface of the recording medium in the pressing member is greater than 0 ° and less than 45 °,
The apparatus for manufacturing a magnetic recording medium according to [9] or [10], wherein the imaging unit receives the light irradiated by the light irradiation unit and diffusely reflected by the pressing surface to capture the pressing surface. .
[12] Judgment means for judging whether foreign matter is attached to the pressing surface based on imaging data obtained by imaging the pressing surface;
The magnetic recording according to [11], further comprising permission means for permitting magnetic transfer to the magnetic recording medium by the magnetic transfer means when adhesion of foreign matter to the pressing surface is not recognized by the judging means. Medium production equipment.

[13] A first holding body for holding a first pattern forming body in which the first pattern is formed on the first forming surface;
A second holding body for holding a second pattern forming body in which the second pattern is formed on the second forming surface;
The first pattern forming body held by the first holding body is irradiated with light so that the angle formed with the first forming surface exceeds 0 ° and less than 45 °, and is held by the second holding body. A light irradiating means for irradiating the second pattern forming body with light so that an angle formed with the second forming surface is greater than 0 ° and less than 45 °;
The first formation surface is picked up by receiving light irradiated by the light irradiation means and diffusely reflected by the first formation surface, and irradiated by the light irradiation means and diffusely reflected by the second formation surface. Imaging means for imaging the second formation surface by receiving light;
The first formation surface and the second pattern formation in the first pattern formation body by relatively moving the first holding body holding the first pattern formation body and the second holding body holding the second pattern formation body. Magnetic recording medium including a magnetic recording medium for recording magnetic information between the second formation surface of the body and magnetic transfer means for magnetically transferring the first pattern and the second pattern to the sandwiched magnetic recording medium Medium production equipment.
[14] Obtained by determining whether foreign matter has adhered to the first formation surface based on the first imaging data obtained by imaging the first formation surface, and imaging the second formation surface Judging means for judging whether or not foreign matter is attached to the second forming surface based on the second imaging data;
And a permission unit that permits magnetic transfer to the magnetic recording medium by the magnetic transfer unit when the determination unit does not recognize the attachment of the foreign matter to both the first formation surface and the second formation surface. [13] The apparatus for manufacturing a magnetic recording medium according to [13].
[15] The imaging means
A housing,
A moving mechanism for moving the housing between an area sandwiched between the first holder and the second holder and an area not sandwiched between the first holder and the second holder;
A first imaging unit that is attached to the housing and images the first formation surface by being disposed opposite to the first formation surface of the first pattern formation body held by the first holding body as the movement mechanism moves. When,
A second imaging unit that is attached to the housing and images the second forming surface by being disposed opposite to the second forming surface of the second pattern forming body held by the second holding body as the moving mechanism moves. The apparatus for manufacturing a magnetic recording medium according to [13] or [14], wherein:
[16] First reference data obtained by imaging the first forming surface of the first pattern forming body after being attached to the first holding body and before being used for magnetic transfer, and second holding Storage means for storing second reference data obtained by imaging in advance a second forming surface of the second pattern forming body after being attached to the body and before being used for magnetic transfer;
The determining means determines whether or not foreign matter has adhered to the first forming surface based on a comparison between the first reference data read from the storage means and the first imaging data obtained by imaging the first forming surface, and [13] to [13] characterized in that the presence or absence of foreign matter adhering to the second formation surface is determined based on a comparison between the second reference data and the second imaging data obtained by imaging the second formation surface. [15] The apparatus for manufacturing a magnetic recording medium according to any one of [15].

  According to the present invention, it is possible to detect a foreign matter adhering to a pattern forming body attached for performing magnetic transfer.

It is the figure which showed an example of the structure of the magnetic recording / reproducing apparatus provided with the magnetic recording medium with which this Embodiment is applied. It is a figure which shows an example of the cross-sectional structure of a magnetic recording medium. It is a top view of one side of the magnetic recording medium. 3 is a flowchart showing an example of a method for manufacturing a magnetic recording medium in the present embodiment. It is a top view of the magnetic transfer apparatus used at a magnetic transfer process. FIG. 6 is a cross-sectional view of the magnetic transfer apparatus shown in FIG. FIG. 7 is a VII-VII cross section shown in FIG. It is a figure which shows an example of a structure of the master information recording body used with a magnetic transfer apparatus. It is a figure which shows an example of the control block in a magnetic transfer apparatus. It is a flowchart which shows an example of a magnetic transfer process. It is a figure for demonstrating a mode that the light irradiated by the 1st light source reflects in a 1st master, and is received in a 1st light-receiving part.

Embodiments of the present invention will be described below in detail with reference to the accompanying drawings.
FIG. 1 is a diagram showing an example of the configuration of a magnetic recording / reproducing apparatus including a magnetic recording medium 1 to which the present embodiment is applied.
This magnetic recording / reproducing apparatus includes a magnetic recording medium 1 that magnetically records data as magnetic information, a rotation drive unit 2 that rotationally drives the magnetic recording medium 1, and data is written to the magnetic recording medium 1 and the magnetic recording medium 1. A magnetic head 3 for reading data recorded on the head, a carriage 4 on which the magnetic head 3 is mounted, a head drive unit 5 for moving the magnetic head 3 relative to the magnetic recording medium 1 via the carriage 4, and an external input A signal processing unit 6 that outputs a recording signal obtained by processing the processed information to the magnetic head 3 and outputs information obtained by processing a reproduction signal from the magnetic head 3 to the outside.
Here, in the present embodiment, the magnetic recording medium 1 has a disk shape, and recording layers for recording data are formed on both sides thereof as will be described later. In the example shown in FIG. 1, a plurality (three in this case) of magnetic recording media 1 are attached to one magnetic recording / reproducing apparatus.

FIG. 2 is a diagram showing an example of a cross-sectional configuration of the magnetic recording medium 1 shown in FIG. In addition, although there are an in-plane recording method and a perpendicular recording method as a data recording method for the magnetic recording medium 1, in this embodiment, the magnetic recording medium 1 used in the perpendicular recording method will be described.
The magnetic recording medium 1 includes a disk-shaped substrate 100, an adhesion layer 110 formed on both surfaces of the disk-shaped substrate 100, a soft magnetic underlayer 120 formed on the adhesion layer 110, and a soft magnetic underlayer. An orientation control layer 130 formed on the ground layer 120, a nonmagnetic underlayer 140 formed on the orientation control layer 130, a perpendicular recording layer 150 formed on the nonmagnetic underlayer 140, and perpendicular recording The protective layer 160 formed on the layer 150 and the lubricating layer 170 formed on the protective layer 160 are provided. In this embodiment, the adhesion layer 110, the soft magnetic underlayer 120, the orientation control layer 130, the nonmagnetic underlayer 140, the perpendicular recording layer 150, the protective layer 160, and the lubricating layer 170 are formed on both surfaces of the substrate 100, respectively. Is to be formed. In the following description, a laminate substrate in which the adhesive layer 110 to the protective layer 160 are laminated on both surfaces of the substrate 100 as necessary, in other words, a laminate substrate other than the lubrication layer 170 is formed. Sometimes referred to as 180.

FIG. 3 is a top view of one side of the magnetic recording medium 1. FIG. 3 schematically shows a plurality of data areas provided on the surface of the magnetic recording medium 1.
The magnetic recording medium 1 in the present embodiment has a disk shape as described above, and a circular hole penetrating the front and back of the magnetic recording medium 1 is formed at the center thereof. In the following description, the edge of the circular hole in the magnetic recording medium 1 is referred to as an inner end 1a, and the outer peripheral edge in the magnetic recording medium 1 is referred to as an outer end 1b.

  On the surface of the magnetic recording medium 1 shown in FIG. 3, a read / write data storage area A1 for reading and writing data using the magnetic head 3 (see FIG. 1), and a magnetic head for reading and writing data using the magnetic head 3 And a positioning data storage area A2 for storing data used for positioning (referred to as positioning data). In this example, a plurality of positioning data storage areas A <b> 2 are provided radially on the surface of the magnetic recording medium 1. A plurality of tracks T are provided concentrically on the surface of the magnetic recording medium 1. Although not shown, a read / write data storage area A1 and a positioning data storage area A2 are similarly provided on the back surface of the magnetic recording medium 1 shown in FIG. However, the positioning data storage areas A2 provided on the front and back surfaces of the magnetic recording medium 1 may not be aligned on the front and back surfaces.

  In the positioning data storage area A2 of the magnetic recording medium 1, as positioning data, for example, an AGC (Auto Gain Control) pattern used for gain adjustment of a detection signal at the time of reading by a magnetic head, a detection pattern used for detection of a servo signal , An address pattern used for detecting cylinder information or sector information of a servo track, and a burst pattern used for causing the magnetic head to follow the track T after moving the magnetic head to the target track T Servo patterns including (not shown) and the like are magnetically recorded on the perpendicular recording layer 150 provided on the magnetic recording medium 1.

  The pattern transferred to the magnetic recording medium 1 includes a pre-servo pattern in addition to the servo pattern described above. A pre-servo pattern is a pattern used by a hard disk drive to generate a servo pattern, and is also called a self-servo pattern. The servo pattern is formed on both sides of the magnetic recording medium 1, whereas the pre-servo pattern may be formed only on one side of the magnetic recording medium 1.

FIG. 4 is a flowchart showing an example of a method for manufacturing the magnetic recording medium 1 in the present embodiment.
Prior to the manufacture of the magnetic recording medium 1, a substrate 100 is prepared which is previously formed in a disc shape and has a circular hole penetrating the front and back at the center, and after pre-cleaning, the substrate 100 is polished. (Step 101). The polishing of the substrate 100 in step 101 is desirably performed by, for example, mechanical polishing using diamond slurry.

  Next, pre-cleaning is performed on the polished substrate 100 (step 102). It is preferable to perform the pre-cleaning of the substrate 100 in step 102 while immersing the polished substrate 100 in pure water or ultrapure water and applying ultrasonic vibration. The substrate 100 that has been pre-cleaned is preferably quickly dried by a spin method or the like.

  Subsequently, an adhesion layer 110, a soft magnetic underlayer 120, an orientation control layer 130, a nonmagnetic underlayer 140, a perpendicular recording layer 150, and a protective layer 160 are sequentially laminated on both surfaces of the substrate 100 that has been subjected to pre-cleaning. A film process is performed (step 103). Here, from the viewpoint of improving productivity, the formation of each layer in step 103 is preferably performed, for example, with an in-line film forming apparatus in which a plurality of chambers each having a film forming function are connected in series. Also, from the viewpoint of improving productivity, it is desirable to form each layer formed in the film formation step by a sputtering method. However, from the viewpoint of reducing the thickness of the protective layer 160 while ensuring the strength, it is preferable that the adhesive layer 110 to the perpendicular recording layer 150 are formed by sputtering, while the protective layer 160 is formed by CVD. . In this manner, by performing the film forming process on the substrate 100 that has been subjected to the pre-cleaning, the laminated substrate 180 (see FIG. 2) is obtained.

Then, post-cleaning is performed on the laminated substrate 180 obtained by the film forming process (step 104).
Next, a lubricant is applied to the laminated substrate 180 that has been post-cleaned (step 105), and the lubricating layer 170 is formed on the laminated substrate 180. Subsequently, the laminated substrate 180 coated with the lubricating layer 170 is baked by heating at about 100 ° C. for several minutes (step 106). Thereby, moisture contained in the lubricating layer 170 is volatilized, and adhesion between the protective layer 160 provided on the outermost surface side of the laminated substrate 180 and the lubricating layer 170 in contact with the protective layer 160 is increased. Thus, the magnetic recording medium 1 is obtained.

Next, both surfaces of the baked magnetic recording medium 1 are wiped (step 107). The wiping process is performed in order to wipe off spatter dust and the like adhering to both surfaces of the magnetic recording medium 1.
Then, burnishing is performed on both surfaces of the magnetic recording medium 1 that has been subjected to wiping (step 108).

  Next, initial magnetization is performed on the burnished magnetic recording medium 1 (step 109). In this example, since the target is the magnetic recording medium 1 used in the perpendicular recording method, the initial magnetization step is performed by applying an initial DC magnetic field in one direction perpendicular to the surface of the magnetic recording medium 1. The initial DC magnetic field applied at that time can be generated by a permanent magnet or an electromagnet, and is preferably generated by using a NdFeB-based sintered magnet having a more stable and strong magnetic force. Further, it is preferable that the initial magnetization process is performed in a non-contact state between the magnetic recording medium 1 and the magnet in order to maintain the cleanliness of the surface of the magnetic recording medium 1.

  Here, the coercive force Hc of the perpendicular recording layer 150 (the first magnetic layer 151, the second magnetic layer 153, and the third magnetic layer 155) in the magnetic recording medium 1 of the present embodiment is typically 320 kA / m (about 4000 Oe). ) That's it. Therefore, in the initial magnetization process, it is preferable to use a magnet capable of direct current magnetization of each magnetic layer of the perpendicular recording layer 150.

Thereafter, a surface inspection is performed on the magnetic recording medium 1 on which the initial magnetization has been performed (step 110). In the surface inspection step, the presence or absence of dust adhesion or abnormal protrusions on the front and back surfaces of the magnetic recording medium 1 after the initial magnetization is inspected.
Then, magnetic transfer is performed on the magnetic recording medium 1 whose surface inspection has been completed (step 111), and positioning data storage areas A2 (see FIG. 3) are provided on both sides or one side of the magnetic recording medium 1.

  Subsequently, a glide inspection is performed on the magnetic recording medium 1 on which the magnetic transfer has been performed (step 112). In the glide inspection process, the magnetic head is actually inspected by flying to check if there are any protrusions on the surface of the magnetic recording medium 1 that has been magnetically transferred. When writing (recording) and reading (reproducing) data on the magnetic recording medium 1 using the magnetic head, the flying height (interval between the magnetic recording medium 1 and the magnetic head) is greater than the surface of the magnetic recording medium 1. If there is a protrusion having a height, the magnetic head may collide with the protrusion and damage the magnetic head or cause a defect in the magnetic recording medium 1. For this reason, in the glide inspection, the presence or absence of such a high protrusion is inspected.

Next, a certification test is performed on the magnetic recording medium 1 that has passed the glide test (step 113). In the certification inspection process, as in a normal magnetic recording / reproducing apparatus, after a predetermined signal is recorded on the magnetic recording medium 1 by a magnetic head, the recorded signal is reproduced, and magnetic recording is performed using the obtained reproduced signal. The recording failure of the medium 1 is detected, and the quality of the magnetic recording medium 1 such as the electrical characteristics of the magnetic recording medium 1 and the presence or absence of defects is confirmed. Since the servo pattern or the pre-servo pattern has already been written on the magnetic recording medium 1 manufactured by the above-described method, it is difficult to perform a certify inspection by a conventional method that does not use servo information. . For this reason, in the present embodiment, the magnetic head is positioned at a specific location using a servo pattern or pre-servo pattern (positioning data) magnetically transferred to the magnetic recording medium 1 and data is read and written. I do.
Then, the magnetic recording medium 1 that has passed the certification inspection is shipped as a product.

  Now, the magnetic transfer process of step 111 will be described in more detail. In the magnetic transfer process in the present embodiment, magnetic transfer using the master information recording body 200 (see FIG. 8) on both surfaces of the magnetic recording medium 1 and surface inspection of the master information recording body 200 used in the magnetic transfer are performed. It is characterized by being executed alternately.

  FIG. 5 shows a top view of the magnetic transfer apparatus 10 used in the magnetic transfer process, and FIG. 6 shows a VI-VI cross-sectional view of the magnetic transfer apparatus 10 shown in FIG. 5 and 6 illustrate a magnetic transfer apparatus 10 that can magnetically transfer servo patterns onto both sides of the magnetic recording medium 1. In the following, in FIG. 5, the direction from the upper side to the lower side in the figure is the X direction, the direction from the right side to the left side in the figure is the Y direction, and the direction from the back side to the near side in the figure is the Z direction. Do.

  The magnetic transfer apparatus 10 according to the present embodiment includes a magnetic transfer unit 20 for magnetic transfer of a servo pattern to the magnetic recording medium 1, and a magnetic transfer unit 20 for magnetic transfer of the servo pattern to the magnetic recording medium 1. And a master inspection unit 70 that inspects the surface state of the master information recording body 200 used.

  Among these, the magnetic transfer unit 20 as an example of the magnetic transfer unit is mounted in a fixed state on a base (not shown), and holds a master information recording body 200 on which a servo pattern is recorded in a fixed state. A first holder 30 and a second holder 40 which is arranged so as to be movable in a Y direction and a −Y direction with respect to a base (not shown), and holds a master information recording body 200 on which a servo pattern is recorded in advance. Is provided. The master information recording body 200 attached to the first holder 30 and the master information recording body 200 attached to the second holder 40 are arranged with the servo pattern recording surfaces facing each other. In the following description, the master information recording body 200 attached to the first holder 30 may be referred to as the first master, and the master information recording body 200 attached to the second holder 40 is referred to as the second master. May be called. In the present embodiment, the first holder 30 functions as a first holding body, and the second holder 40 functions as a second holding body.

  Moreover, the 1st magnet member 50 provided with the 1st magnet which is not shown in figure is arrange | positioned at the back side of the 1st holder 30 holding the master information recording body 200 (1st master). The first magnet member 50 includes a first magnet holding portion 51 that holds a first magnet that is disposed to face the first holder 30, and a first magnet that extends along the Y direction from the back side of the first magnet holding portion 51. And a support portion 52. The first magnet support portion 52 is supported in a state fixed in the Y direction with respect to a base (not shown), and is supported so as to be rotatable about the Y direction. Thereby, the 1st magnet hold | maintained at the 1st magnet holding | maintenance part 51 rotates with the rotation of the 1st magnet support part 52. As shown in FIG.

  On the other hand, on the back side of the second holder 40 holding the other master information recording body 200 (second master), a second magnet member 60 having a second magnet (not shown) is disposed. The second magnet member 60 includes a second magnet holding portion 61 that holds a second magnet disposed to face the second holder 40, and a second magnet support portion that extends along the Y direction from the back side of the second magnet member 61. 62. The second magnet support portion 62 is supported so as to be able to advance and retreat in the Y direction and the −Y direction with respect to a base (not shown), and is supported so as to be rotatable about the Y direction. As a result, the second magnet held by the second magnet holding part 61 advances and retreats as the second magnet support part 62 advances and retreats, and the second magnet holding part 61 moves to the second magnet holding part 61 as the second magnet support part 62 rotates. The held second magnet rotates.

  In the present embodiment, the first magnet provided in the first magnet member 50 and the second magnet provided in the second magnet member 60 face each other with the first holder 30 and the second holder 40 interposed therebetween. Are arranged as follows. Moreover, the 1st magnet member 50 and the 2nd magnet member 60 are comprised so that it may rotate together, maintaining the state which made the 1st magnet and the 2nd magnet oppose.

  Further, the first holder 30 penetrates the holding surface of the first master and the facing surface of the first magnet member 50, and an opening is provided at the center of the first master mounting position on the holding surface of the first master. The two first suction paths 31, the first master holding surface and the opposing surface of the first magnet member 50 pass through, and an opening is provided outside the first master mounting position on the first master holding surface. And two second suction paths 32. The first holder 30 includes an O-ring 33 attached along the circumferential direction outside the opening of the second suction path 32 on the holding surface of the first master. Note that the two openings of the first suction path 31 on the holding surface of the first master of the first holder 30 are provided on the first master side when the first master is attached to the first holder 30. A first through hole 200a and a second through hole 200b (both refer to FIG. 8A described later) are overlapped.

  On the other hand, the second holder 40 holds the second master on the surface facing the first holder 30, and the recording body holding portion 40a provided with the second magnet member 60 on the back side thereof, And a cylindrical body 40b provided so as to cover the periphery of the recording body holding portion 40a. The second holder 40 further includes an O-ring 41 that is attached along the circumferential direction to the inner circumferential surface of the cylindrical body 40b and that contacts the outer circumferential surface of the recording body holding portion 40a over the circumferential direction. Here, the recording body holding portion 40a and the cylindrical body 40b constituting the second holder 40 are attached to the first holder 30 so as to be able to advance and retract independently of each other. In addition, the end of the cylindrical body 40b on the side facing the first holder 30 is opposed to and in contact with the O-ring 33 provided on the first holder 30 over the entire circumference. Note that the recording member holding portion 40 a of the second holder 40 is not provided with a suction path like the first holder 30. Therefore, it is not necessary to provide the first through hole 200a and the second through hole 200b (both refer to FIG. 8A described later) in the master information recording body 200 attached to the recording body holding portion 40a.

  On the other hand, the master inspection unit 70 irradiates light to the first master attached to the first holder 30 and second light source 72 to irradiate light to the second master attached to the second holder 40. A light receiving unit 73 for receiving the reflected light irradiated by the first light source 71 and reflected by the first master and receiving the reflected light irradiated by the second light source 72 and reflected by the second master, and a light receiving unit And a guide rail 74 for guiding 73 in the Y direction and the -Y direction.

  Here, the first light source 71 and the second light source 72 as an example of the light irradiation means are fixedly attached to the −X direction side as viewed from the magnetic transfer unit 20, and the first light source 71 is from the second holder 40. Also, the second light source 72 is located closer to the first holder 30 and closer to the second holder 40 than the first holder 30. Each of the first light source 71 and the second light source 72 includes a laser generator, a halogen lamp, and a rod-shaped light guide that extends in the Z direction, and is a rod illumination device that emits light in the X direction. Can be configured.

  In addition, the guide rail 74 is attached to a base (not shown) between the first holder 30 and the second holder 40, and the light receiving unit 73 as an example of the imaging unit is not inspected. By retracting in the −X direction from between the first holder 30 and the second holder 40, it is arranged between the first light source 71 and the second light source 72. In the following description, the position of the light receiving unit 73 shown in FIG. 6 is referred to as a retracted position.

FIG. 7 shows an example of the VII-VII cross section shown in FIG. 5, that is, the YZ cross section of the light receiving unit 73.
The light receiving unit 73 has a rectangular parallelepiped outer shape and a frame 80 as an example of a housing extending in the Z direction, and a first light receiving unit 81 attached to the −Y direction side of the frame 80 and extending in the Z direction. And a second light receiving portion 82 attached to the frame body 80 on the Y direction side and extending in the Z direction. Here, the first light receiving unit 81 as an example of the first imaging unit extends along the Z direction on the Y-direction side of the first rod lens array 81a and the first rod lens array 81a along the Z direction. And a first light receiving element array 81b. In addition, the second light receiving unit 82 as an example of the second imaging unit extends along the Z direction on the −Y direction side of the second rod lens array 82a and the second rod lens array 82a. And a second light receiving element array 82b. Here, each of the first rod lens array 81a and the second rod lens array 82a is configured by arranging a plurality of rod lenses along the Z direction. Each of the first light receiving element array 81b and the second light receiving element array 82b includes a one-dimensional line sensor in which a plurality of light receiving elements such as a CCD image sensor and a CMOS sensor are arranged along the Z direction. .

  As the light receiving unit 73 moves in the X direction, the first light receiving unit 81 faces the first master (master information recording body 200) attached to the first holder 30, and the second light receiving unit 82 It faces the second master (master information recording body 200) attached to the second holder 40.

  FIG. 8 is a diagram showing an example of the configuration of a master information recording body 200 (first master, second master) used in the magnetic transfer apparatus 10. Here, FIG. 8A shows a top view of the master information recording body 200, and FIG. 8B shows a sectional view taken along line VIIIB-VIIIB in FIG. 8A.

  The master information recording body 200 has a disk shape whose diameter is larger than that of the magnetic recording medium 1. Also, a servo pattern formation region SP in which fine irregularities corresponding to the servo pattern are formed is provided on one surface of the master information recording body 200. In this example, a plurality of servo pattern formation regions SP are provided radially on one surface of the master information recording body 200 except for the central portion and the outer edge portion. When the master information recording body 200 is attached to the first holder 30 or the second holder 40 shown in FIG. 6 or the like, the surfaces provided with the servo pattern formation regions SP face each other in an exposed state. Become.

  Moreover, the central part of the master information recording body 200 (first master) attached to the first holder 30 is provided with the first through hole 200a and the second through hole 200b penetrating the front and back for the reason described above. ing. The first through hole 200a and the second through hole 200b are provided on the inner side (center side) of the servo pattern formation region SP in the master information recording body 200. For the reason described above, the first through hole 200a and the second through hole 200b are not necessary for the master information recording body 200 (second master) attached to the second holder 40. Here, in the present embodiment, the master information recording body 200 used as the first master is used as the first pattern forming body, the servo pattern forming area SP in the first master is used as the first pattern, and the servo information in the first master is used. The formation surface of the pattern region SP functions as a first formation surface. On the other hand, in the present embodiment, the master information recording body 200 used as the second master is the second pattern forming body, the servo pattern SP in the second master is the second pattern, and the servo pattern forming area in the second master. The SP formation surface functions as a second formation surface.

  Next, the structure will be described. The master information recording body 200 includes a disc-shaped base 201, a master magnetic layer 202 formed on one surface of the base 201, and a master formed on the master magnetic layer 202. And a protective layer 203. Here, FIG. 8B shows a cross-sectional configuration of the master information recording body 200 in the servo pattern formation region SP, and a convex portion 204 and a concave portion 205 corresponding to the servo pattern exist in this portion. ing. Of the one surface of the master information recording body 200, an area other than the servo pattern formation area SP is a recess in the servo pattern formation area SP in order to prevent the master information recording body 200 and the magnetic recording medium 1 from being attracted. It is the same height as 205.

  The master information recording body 200 can be manufactured by a known method. For example, the following manufacturing method can be listed. First, an electron beam resist is applied to the surface of a silicon wafer by a spin coat method. After coating, the resist is exposed by irradiating the resist with an electron beam modulated in accordance with the servo pattern using an electron beam exposure apparatus. Thereafter, the resist is developed, unexposed portions are removed, and a resist pattern is formed on the silicon wafer.

  Next, using this resist pattern as a mask, a reactive etching process is performed on the silicon wafer to dig up portions not masked with the resist. After this etching process, the resist remaining on the silicon wafer is removed by washing with a solvent. Thereafter, the silicon wafer is dried to obtain a master for producing the master information recording body 200.

  On this master, a conductive layer made of Ni is formed to a thickness of about 10 nm by sputtering. Thereafter, a Ni layer having a thickness of several μm is formed on the master by electroforming using the master on which the conductive layer is formed as a mother die. Thereafter, the Ni layer is removed from the master, and this Ni layer is washed to obtain the base body 201 having the convex portions on the surface.

Next, a master magnetic layer 202 is formed on the surface of the substrate 201. As the master magnetic layer 202, the same magnetic layer (first magnetic layer 151 and the like) used in the magnetic recording medium 1 can be used. A master protective layer 203 is formed on the master magnetic layer 202 in the same manner as the magnetic recording medium 1. The master protective layer 203 increases the abrasion resistance of the master information recording body 200, that is, the transfer durability of the master information recording body 200, and a hard carbon film having a thickness of about several nm can be used. The master information recording body 200 can be obtained by the above manufacturing process.
The master information recording body 200 thus obtained is repeatedly used for manufacturing (magnetic transfer) of, for example, 100,000 or more magnetic recording media 1.

FIG. 9 is a diagram illustrating an example of a control block in the magnetic transfer apparatus 10 illustrated in FIG. 5 and the like.
The magnetic transfer apparatus 10 includes a controller 300 for controlling the operation of the entire apparatus. The controller 300 includes a holder driving unit 301 for moving the second holder 40 back and forth in the Y direction, a light receiving unit driving unit 302 for moving the light receiving unit 73 back and forth in the X direction, and a first light source 71 that turns on / off the first light source 71. A light source driving unit 303, a second light source driving unit 304 for turning on / off the second light source 72, a first light receiving element column driving unit 305 for driving the first light receiving element column 81b, and a second for driving the second light receiving element column 82b. The light receiving element array driving unit 306, the medium conveying unit 307 that carries the magnetic recording medium 1 into and out of the magnetic transfer unit 20, and the first suction path 31 and the second suction path 32 provided in the first holder 30 are connected. Control signals are output to the suction drive unit 308 that drives a suction mechanism (not shown), the magnet drive unit 309 that drives the first magnet member 50, and the second magnet member 60, respectively. You have me. Here, in the present embodiment, the light receiving unit driving section 302 and the guide rail 74 (see FIG. 5) function as a moving mechanism. In the present embodiment, the controller 300 functions as a determination unit and a permission unit.
The controller 300 is connected to a reference data storage unit 310 as an example of storage means for storing reference data used for pass / fail judgment in the surface inspection of the first master and the second master. Is connected. The contents of the reference data stored in the reference data storage unit 310 will be described later.

  5 to 9 and the flowchart shown in FIG. 10, the magnetic transfer process (magnetic transfer to the magnetic recording medium 1 and each master information recording body in step 111 (see FIG. 4)) by the magnetic transfer apparatus 10 will be described. 200 (surface inspection of the first master and the second master)) will be described. In the initial state, each part constituting the magnetic transfer apparatus 10 is arranged at the positions shown in FIGS. However, it is assumed that the magnetic recording medium 1 is not attached to the magnetic transfer unit 20 in the initial state.

  With the start of the operation, the controller 300 uses the master inspection unit 70 to transfer the first master attached to the first holder 30 and the second master attached to the second holder 40 prior to the servo pattern transfer. (Step 201). Here, step 201 corresponds to a step of imaging the first formation surface and a step of imaging the second formation surface.

  Next, the controller 300 performs image processing on the imaging data of the first master obtained in step 201 using the first master reference data read from the reference data storage unit 310, and is obtained in step 201. The image processing of the second master image data is performed using the second master reference data read from the reference data storage unit 100 (step 202). Subsequently, the controller 300 determines the first master (more specifically, the servo pattern forming surface in the first master) based on the image processing result (hereinafter referred to as first processing data) related to the imaging data of the first master. It is determined whether or not an abnormality has occurred (step 203). If it is determined in step 203 that there is no abnormality in the first master, the controller 300 next performs the first processing based on the image processing result relating to the imaging data of the second master (hereinafter referred to as second processing data). It is determined whether or not an abnormality has occurred in the two masters (more specifically, the servo pattern forming surface in the second master) (step 204). Here, in step 203 and step 204, adhesion of the foreign matter to the first formation surface based on the imaging result of the first formation surface and adhesion of the foreign matter to the second formation surface based on the imaging result of the second formation surface are performed. Corresponds to the step of judging.

  If it is determined in step 204 that there is no abnormality in the second master, that is, if it is determined that there is no abnormality in both the first master and the second master, the controller 300 causes the magnetic transfer unit 20 (first The servo pattern is magnetically transferred onto both surfaces of the magnetic recording medium 1 using the master and the second master (step 205). Here, step 205 corresponds to a step of magnetically transferring the first pattern and the second pattern to the sandwiched magnetic recording medium.

  Then, the controller 300 further determines whether or not there is a magnetic recording medium 1 to be subjected to the next magnetic transfer (step 206). If it is determined in step 206 that the next magnetic recording medium 1 is present, the controller 300 returns to step 201 to execute the surface inspection of the first master and the second master again. On the other hand, when it is determined in step 206 that the next magnetic recording medium 1 does not exist, the controller 300 completes a series of operations.

  On the other hand, if it is determined in step 203 that an abnormality has occurred in the first master, and if it is determined in step 204 that an abnormality has occurred in the second master, the controller 300 sends a control signal to the display unit 311. (Message) is output (step 207), and a message corresponding to the abnormality that has occurred (such as "An error has occurred in the first master" or "Replace the first master") is displayed on the display unit 311. . In this case, the controller 300 interrupts a series of operations without causing a new magnetic transfer to the magnetic recording medium 1. After the message is displayed in step 207, the above-described process is repeatedly performed after the master information recording body 200 that has caused the abnormality is cleaned.

Subsequently, the operation of the magnetic transfer apparatus 10 in each step will be described.
First, in step 201, the first light source driving unit 303 shifts the first light source 71 from the off state to the lighting state, and the second light source driving unit 304 shifts the second light source 72 from the off state to the lighting state. Next, the light receiving unit driving unit 302 moves the light receiving unit 73 in the retracted position along the guide rail 74 in the X direction at a constant speed. Accordingly, the first light receiving unit 81 attached to the light receiving unit 73 sequentially passes the area facing the first master attached to the first holder 30 along the X direction, and is attached to the light receiving unit 73 at the same time. The second light receiving unit 82 thus passed sequentially passes through the region facing the second master attached to the second holder 40 along the X direction. During this time, the light received by the first light source 71 and reflected by the servo pattern forming surface of the first master sequentially enters the first light receiving unit 81, and the second light source 72 receives the light by the second light source 72. Irradiated light reflected by the servo pattern forming surface of the second master sequentially enters.

  More specifically, in the first light receiving unit 81, the reflected light from the first master passes through the first rod lens array 81a and is condensed on the first light receiving element array 81b. At this time, the first light receiving element array driving unit 305 outputs the light reception result by the first light receiving element array 81b to the controller 300 at an interval determined in advance according to the moving speed of the light receiving unit 73 in the X direction. Accordingly, the first light receiving unit 81 sequentially outputs the imaging data for one line with the Z direction as the main scanning direction, with the X direction as the sub scanning direction.

On the other hand, in the second light receiving unit 82, the reflected light from the second master passes through the second rod lens array 82a and is condensed on the second light receiving element array 82b. At this time, the second light receiving element array driving unit 306 outputs the light reception result by the second light receiving element array 82b to the controller 300 at a predetermined interval according to the moving speed of the light receiving unit 73 in the X direction. Accordingly, the second light receiving unit 82 sequentially outputs the imaging data for one line with the Z direction as the main scanning direction, with the X direction as the sub scanning direction.
In the present embodiment, the light receiving / output operation by the first light receiving unit 81 and the light receiving / output operation by the second light receiving unit 82 are performed in parallel and simultaneously.

  Thereafter, when the light receiving unit 73 moving in the X direction passes through an area sandwiched between the first master and the second master, imaging of the first master and the second master is completed. Then, the light receiving unit driving unit 302 moves the light receiving unit 73 that has completed the imaging in the −X direction along the guide rail 74, and again stops at the retracted position. Note that the moving speed of the light receiving unit 73 at this time is desirably higher than the moving speed of the light receiving unit 73 during imaging. In addition, after the imaging by the light receiving unit 73 is completed, the first light source driving unit 303 shifts the first light source 71 from the lighting state to the unlighting state, and the second light source driving unit 304 moves the second light source 72 from the lighting state. Transition to the off state.

  Next, in step 202, the controller 300 sequentially arranges the imaging data of the first master input for each line in the main scanning direction from the first light receiving unit 81 in the sub-scanning direction. Image data for one sheet (hereinafter referred to as first image data) is created. Further, the controller 300 sequentially arranges the imaging data of the second master input from the second light receiving unit 82 for each line in the main scanning direction in the sub-scanning direction, and the imaging data for one second master. (Referred to as second imaging data in the following description).

  Further, the controller 300 reads the first master reference data (referred to as first reference data in the following description) stored in the reference data storage unit 310. Here, the first reference data refers to the master inspection unit 70 (more specifically, in an initial state after the currently used first master is attached to the first holder 30 and before actually being used for magnetic transfer. Specifically, it refers to imaging data of the first master acquired using the first light source 71 and the first light receiving unit 81). Then, the controller 300 uses the first reference data and the first imaging data, and obtains first processing data by executing image processing for obtaining a difference for each pixel.

  On the other hand, the controller 300 reads the second master reference data (referred to as second reference data in the following description) stored in the reference data storage unit 310. Here, the second reference data refers to the master inspection unit 70 (more specifically, in the initial state after the currently used second master is attached to the second holder 40 and before actually being used for magnetic transfer. Specifically, it refers to the imaging data of the second master acquired using the second light source 72 and the second light receiving unit 82). Then, the controller 300 uses the second reference data and the second imaging data, and obtains second processing data by executing image processing for obtaining a difference for each pixel.

  Here, FIG. 11 shows a state in which the light emitted from the first light source 71 (see FIG. 6) is reflected by the first master (master information recording body 200) and received by the first light receiving unit 81. It is a figure for demonstrating. 11A and 11B exemplify a case where foreign matter D such as dust is not attached to the servo pattern forming surface of the first master, and FIG. 11A illustrates YZ in FIG. FIG. 11B is a cross-sectional view of the first master viewed from the first light receiving unit 81 side in FIG. 11A. FIGS. 11C and 11D illustrate a case where foreign matter D such as dust is attached to the servo pattern forming surface of the first master, and FIG. 11C is a view of YZ in FIG. FIG. 11D is a cross-sectional view of the first master viewed from the first light receiving unit 81 side in FIG. 11C.

  In the present embodiment, the light from the first light source 71 is irradiated at a shallow angle substantially parallel to the servo pattern forming surface of the first master. On the other hand, the first light receiving unit 81 is arranged such that the light receiving surface of the first rod lens array 81a (see FIG. 7) is substantially perpendicular to the servo pattern forming surface of the first master. For this reason, the first light receiving unit 81 receives diffusely reflected light out of the light irradiated by the first light source 71 and reflected by the servo pattern forming surface of the first master. The angle formed between the servo pattern forming surface of the first master and the light emitted from the first light source 71 can be selected from a range of more than 0 ° and less than 45 °. In order to detect a smaller foreign object, it is desirable to approach 0 °.

  As described above, the first master of the present embodiment has irregularities corresponding to the servo pattern formed on the surface thereof. For this reason, for example, as shown in FIGS. 11A and 11B, the convex portion 204 of the concave portion 205 is caused by light incident obliquely from the first light source 71 even when the foreign matter D is not attached. A first shadow S1 corresponding to the convex portion 204 is formed in the region behind the. On the other hand, for example, as shown in FIGS. 11C and 11D, when the foreign matter D is attached to the recess 205, the recess 205 receives the light incident obliquely from the first light source 71. In addition to the first shadow S1 caused by the convex portion 204, a second shadow S2 caused by the foreign matter D is also formed.

  Here, it is known that the foreign matter D is likely to adhere when the first master contacts the magnetic recording medium 1 by using the first master for magnetic transfer. In particular, when the second holder 40 moves with the magnetic transfer or the first magnet support portion 52 and the second magnet support portion 62 rotate, dust or the like adhering to these members becomes the first foreign matter. A situation may occur in which the first master and the second master are likely to adhere. Therefore, conversely, in the initial state immediately after the replacement, it can be said that the foreign matter D does not easily adhere to the servo pattern forming surface of the first master. For this reason, in the present embodiment, the first reference data is acquired in advance in the initial state after the first master replacement, and is used as a reference for detecting the adhesion of the foreign matter D to the first master. . Note that the first reference data obtained at this time has light and shade according to the presence of the convex portion 204.

  Further, when the foreign matter D does not adhere to the first master, in the imaging in step 201, the first master is caused by the convex portion 204 as shown in FIGS. 11 (a) and 11 (b). While the first shadow S1 is generated, the second shadow S2 due to the foreign matter D is not generated. For this reason, the obtained first imaging data has the light and shade according to the presence of the convex portion 204, similarly to the first reference data. Therefore, when the foreign matter D is not attached to the first master, the first processing data obtained by calculating the difference for each pixel using the first reference data and the first imaging data is the first master data. It becomes almost constant over the entire area.

  On the other hand, when the foreign matter D adheres to the first master, in the imaging in step 201, the first master has the convex portion 204 as shown in FIGS. 11 (c) and 11 (d). In addition to the resulting first shadow S1, a second shadow S2 resulting from the foreign matter D also occurs. For this reason, unlike the first reference data, the obtained first imaging data has a density corresponding to the presence of the convex portion 204 and the foreign matter D. Therefore, when the foreign matter D adheres to the first master, the first processing data obtained by obtaining the difference for each pixel using the first reference data and the first imaging data is the second shadow data. Except for the region where S2 exists, it becomes almost constant. In other words, the difference in the existence area of the second shadow S2 protrudes from the other areas.

For this reason, by setting the threshold value of the difference to an appropriate value in advance, it becomes possible to determine in step 203 whether there is an abnormality in the first master, that is, whether or not the foreign matter D adheres to the first master.
In this example, since the light from the first light source 71 is incident on the first master at a shallow angle exceeding 0 ° and less than 45 °, the second master formed in the concave portion 205 by the foreign matter D is used. The length of the shadow S2 can be made larger than the actual height of the foreign matter D. For this reason, it is possible to detect the foreign matter D having an actual diameter smaller than the resolution of the first light receiving element array 81b by using the first light receiving unit 81.
Here, the case where the first master is inspected using the first light source 71 and the first light receiving unit 81 has been described as an example, but the second light source 72 and the second light receiving unit 82 are also used for the second master. Thus, the inspection can be performed using the same method. At this time, the angle formed between the servo pattern forming surface of the second master and the light emitted from the second light source 72 can be selected from a range of more than 0 ° and less than 45 °. It is desirable to approach.
In the above description, the wavelength of the light output from the first light source 71 and the second light source 72 is not particularly mentioned, but for example, by using light having a shorter wavelength such as blue light or ultraviolet light. Further, the detection resolution of the foreign matter D can be further increased.

  In Step 205, first, the medium transport unit 307 holds the magnetic recording medium 1 before magnetic transfer, and more specifically, between the first holder 30 and the second holder 40, more specifically, the first holder 30. To the position facing the first master attached to the. Next, the suction drive unit 308 causes the magnetic recording medium 1 to be attracted to the first holder 30 side by starting suction via the first suction path 31, and the servo of the first master attached to the first holder 30. -One surface of the magnetic recording medium 1 is brought into contact with the pattern forming surface. Then, after attracting the magnetic recording medium 1 to the first holder 30 side, the holding of the magnetic recording medium 1 is released, and the magnetic recording medium 1 is retracted from the facing region of the first holder 30 and the second holder 40.

  Subsequently, in the magnetic transfer unit 20, the second holder 40 (recording body holding unit 40 a, cylindrical body 40 b) and the second magnet member 60 start moving in a direction approaching the first holder 30 side. Along with this, first, the peripheral end surface of the cylindrical body 40 b stops after abutting against the O-ring 33 provided in the first holder 30. In addition, the recording body holding portion 40a and the second magnet member 60 continue to move toward the first holder 30 side after the cylindrical body 40b stops, and the first master provided in the first holder 30 The magnetic recording medium 1 is sandwiched between the second master provided in the recording body holding part 40a of the movable holder 40 and then stopped. The stop position of the recording body holding unit 40a is determined in advance, and as a result, a preset light load is applied to the first master, the second master, and one magnetic recording medium 1. At this time, an O-ring 33 provided on the first holder 30 and an O-ring 41 provided on the cylindrical body 40b are provided between the first holder 30, the recording body holding portion 40a, and the cylindrical body 40b. Is used to form a closed space. Subsequently, by starting suction through the second suction path 32, the gaps existing between the first master and the second master existing in the closed space and the single magnetic recording medium 1 are evacuated. The servo pattern forming surfaces of the first master and the second master and both surfaces of one magnetic recording medium 1 are brought into close contact with each other due to the differential pressure inside and outside the closed space.

Next, the first magnet member 50 and the second magnet member 60 have the first magnet support portion 52 and the second magnet support portion 62 as axes, and the first master, the second master, and the single magnetic recording medium 1. At least one rotation is performed while maintaining the state where the first magnet and the second magnet are opposed to each other.
While the first magnet and the second magnet make one rotation, in the magnetic recording medium 1 sandwiched between the first master and the second master, a direct-current magnetic field opposite to the initial magnetization process is generated by the first magnet and the second magnet. Sequentially applied in the circumferential direction. Then, on the side of the magnetic recording medium 1 that is in contact with the first master on the first holder 30 side, the magnetization direction of the magnetic layer at the portion facing the recess 205 of the first master maintains the state after the initial magnetization step. However, the magnetization direction of the magnetic layer at the portion in contact with the convex portion 204 is reversed. Further, on the side of the magnetic recording medium 1 that is in contact with the second master on the second holder 40 side, the magnetization direction of the magnetic layer at the portion facing the concave portion 205 of the second master is the state after the initial magnetization step. Although maintained, the magnetization direction of the magnetic layer at the portion in contact with the convex portion 204 is reversed. In this way, the servo patterns made up of the concave and convex arrays provided on the first master and the second master are transferred to both surfaces of the pre-transfer medium as servo patterns made up of the magnetization orientations, respectively. . As a result, the servo pattern is stored in the positioning data storage area A2 of the magnetic recording medium 1.

  When the magnetic transfer is completed in this way, first, the suction through the second suction path 32 is stopped to make the inside of the closed space atmospheric pressure, and then the second holder 40 (recording body holding portion 40a, cylindrical body 40b). ) And the second magnet member 60 starts to retract to the original position. As a result, the transferred medium held by the fixed holder 30 is exposed to the outside.

  Then, the medium transport unit 307 moves to a position between the first holder 30 and the second holder 40, more specifically to a position facing the first master attached to the first holder 30, and stops. The transferred magnetic recording medium 1 is held. Subsequently, the suction drive unit 308 terminates the suction through the first suction path 31 to release the adsorption of the magnetic recording medium 1 to the first holder 30 side. Thereafter, the medium transport unit 307 retreats from the facing region of the first holder 30 and the second holder 40 while holding the magnetic recording medium 1 that has been magnetically transferred.

In this embodiment, each of the first master and the second master is imaged using a one-dimensional line sensor. However, the present invention is not limited to this. For example, a two-dimensional area sensor is used. May be.
In the present embodiment, the imaging of the first master and the imaging of the second master are performed in parallel. However, the present invention is not limited to this, and the imaging of the first master and the imaging of the second master are performed. May be sequentially performed.
Further, in the present embodiment, the first master and the second master are inspected every time the magnetic transfer is performed on one magnetic recording medium 1, but the present invention is not limited to this. For example, the first master and the second master may be inspected every time magnetic transfer is performed on 10 magnetic recording media 1.

  In the present embodiment, a magnetic information is recorded between the master information recording body 200 (first master) held by the first holder 30 and the master information recording body 200 (second master) held by the second holder 40. An example in which a servo pattern (including a preservo pattern) or the like is magnetically transferred to both surfaces of the magnetic recording medium 1 by sandwiching the recording medium 1 has been described. However, the present invention is not limited to this. For example, one side of the magnetic recording medium 1 is brought into contact with the master information recording body 200 held by the first holder 30, and a servo pattern or the like is magnetically transferred only to one side of the magnetic recording medium 1. It is good also as composition to do. In this case, the magnetic recording medium 1 may be brought into contact with the master information recording body 200 by, for example, adsorption via the second suction path 32 or the like. However, from the viewpoint of improving the adhesion of the magnetic recording medium 1 to the master information recording body 200, a flat plate that can be moved back and forth with respect to the first holder 30 instead of the second holder 40 that holds the master information recording body 200. It is desirable to provide a pressing member in a shape and press the magnetic recording medium 1 against the master information recording body 200 held by the first holder 30 using the pressing member.

  Here, for example, in the case of adopting a configuration without the former pressing member, it is not necessary to provide the second light source 72 and the second light receiving unit 82 in the master inspection unit 70, and the first light source 71 and the first light receiving unit 82. Is used to determine the presence or absence of foreign matter D adhering to the master information recording body 200 based on the result of imaging the surface (servo pattern forming surface) of the master information recording body 200, and to perform magnetic transfer on the magnetic recording medium 1. What is necessary is just to decide whether execution is possible.

  On the other hand, for example, when a configuration having the latter pressing member is employed, a foreign object with respect to the master information recording body 200 based on the result of imaging the master information recording body 200 using the first light source 71 and the first light receiving unit 81. And the foreign matter D on the pressing member based on the result of imaging the pressing surface of the pressing member (contact surface with the magnetic recording medium 1) using the second light source 72 and the second light receiving unit 82. It may be determined whether or not magnetic transfer is performed on the magnetic recording medium 1.

DESCRIPTION OF SYMBOLS 1 ... Magnetic recording medium, 10 ... Magnetic transfer apparatus, 20 ... Magnetic transfer part, 30 ... 1st holder, 40 ... 2nd holder, 70 ... Master test | inspection part, 71 ... 1st light source, 72 ... 2nd light source, 73 ... Light receiving unit, 81 ... first light receiving portion, 82 ... second light receiving portion, 200 ... master information recording body, 201 ... base, 202 ... master magnetic layer, 203 ... master protective layer, 204 ... convex portion, 205 ... concave portion, 300 …controller

Claims (16)

The pattern forming body held by the holding body and formed with the pattern is irradiated with light so that the angle formed with the pattern forming surface on which the pattern is formed is greater than 0 ° and less than 45 °. A step of imaging the pattern formation surface by receiving light diffusely reflected from the formation surface;
Determining the adhesion of foreign matter to the pattern forming surface based on the imaging result of the pattern forming surface;
When no foreign matter adheres to the pattern forming surface in the determining step, the recording surface of the magnetic recording medium is brought into contact with the pattern forming surface of the pattern forming member held by the holding member, and the pattern And a step of magnetically transferring the pattern to the magnetic recording medium in contact with the formed body. In the magnetic transfer step, a pressing member provided so as to be able to advance and retreat relative to the pattern forming surface of the pattern forming body held by the holding body is used, and the back surface of the recording surface of the magnetic recording medium is interposed therebetween. Pressing the magnetic recording medium against the pattern forming body,
In the imaging step, light is irradiated so that an angle between the pressing member and the pressing surface of the magnetic recording medium is greater than 0 ° and less than 45 °, and light diffusely reflected from the pressing surface is received. By taking an image of the pressing surface,
In the step of determining, the adhesion of foreign matter to the pressing surface is determined based on the imaging result of the pressing surface,
2. The method of manufacturing a magnetic recording medium according to claim 1, wherein the magnetic transfer step is executed when no foreign matter adheres to the pressing surface in the determining step.   The method of manufacturing a magnetic recording medium according to claim 1, wherein the pattern is configured by unevenness on the pattern forming surface. With respect to the first pattern forming body held by the first holding body and having the first pattern formed, the angle formed with the first forming surface on which the first pattern is formed is more than 0 ° and less than 45 °. Irradiating light and receiving light diffusely reflected from the first formation surface to image the first formation surface;
With respect to the second pattern forming body held by the second holding body and formed with the second pattern, the angle formed with the second forming surface on which the second pattern is formed is more than 0 ° and less than 45 °. Irradiating light and receiving light diffusely reflected from the second forming surface to image the second forming surface;
Determining the adhesion of foreign matter to the first formation surface based on the imaging result of the first formation surface and the adhesion of foreign matter to the second formation surface based on the imaging result of the second formation surface;
In the step of determining, when adhesion of foreign matter to both the first forming surface and the second forming surface is not recognized, by relatively moving the first holding body and the second holding body, A magnetic recording medium for recording magnetic information is sandwiched between the first forming surface of the first pattern forming body and the second forming surface of the second pattern forming body, and the sandwiched magnetic recording medium And a step of magnetically transferring the first pattern and the second pattern.   5. The execution of the magnetic transfer step is prohibited when adhesion of foreign matter to both the first forming surface and the second forming surface is recognized in the determining step. A method of manufacturing a magnetic recording medium. The first holding body and the second holding body are arranged so that the first forming surface of the first pattern forming body and the second forming surface of the second pattern forming body face each other;
6. The method of manufacturing a magnetic recording medium according to claim 4, wherein the step of imaging the first formation surface and the step of imaging the second formation surface are executed in parallel. In the determining step,
First reference data obtained by previously imaging the first formation surface of the first pattern forming body after being attached to the first holding body and before being used in the magnetic transfer, and the first Determining the presence or absence of foreign matter adhering to the first formation surface based on comparison with the first imaging data obtained in the step of imaging one formation surface;
Second reference data obtained by imaging in advance the second forming surface of the second pattern forming body after being attached to the second holding body and before being used in the magnetic transfer; 2. The presence or absence of adhesion of foreign matter to the second formation surface is determined based on comparison with the second imaging data obtained in the step of imaging the two formation surface. A method for producing the magnetic recording medium according to claim. The first pattern is formed by unevenness on the first formation surface,
The method of manufacturing a magnetic recording medium according to claim 4, wherein the second pattern is formed by unevenness on the second formation surface. A holding body for holding a pattern forming body in which a pattern is formed on the pattern forming surface;
Light irradiating means for irradiating the pattern forming body held by the holding body with light so that an angle formed with the pattern forming surface is more than 0 ° and less than 45 °;
An imaging unit that images the pattern forming surface by receiving the light irradiated by the light irradiation unit and diffusely reflected by the pattern forming surface;
A magnetic transfer means for bringing the pattern forming surface of the holder holding the pattern forming body into contact with the recording surface of the magnetic recording medium and magnetically transferring the pattern to the magnetic recording medium in contact with the pattern forming body; Manufacturing apparatus for magnetic recording media including Judging means for judging whether foreign matter is attached to the pattern forming surface based on imaging data obtained by imaging the pattern forming surface;
The apparatus further comprises permission means for permitting magnetic transfer to the magnetic recording medium by the magnetic transfer means when adhesion of foreign matter to the pattern forming surface is not recognized by the determination means. 9. A manufacturing apparatus of a magnetic recording medium according to 9. The magnetic recording medium is provided to the pattern forming body via the back surface of the recording surface of the magnetic recording medium, which is provided so as to be capable of moving forward and backward relative to the pattern forming surface of the pattern forming body held by the holding body. A pressing member for pressing
The light irradiation means irradiates light so that an angle formed between the pressing member and a pressing surface of the recording medium is greater than 0 ° and less than 45 °,
11. The magnetic recording medium according to claim 9, wherein the imaging unit captures the pressing surface by receiving light irradiated by the light irradiation unit and diffusely reflected by the pressing surface. Manufacturing equipment. Determining means for determining whether foreign matter is attached to the pressing surface based on imaging data obtained by imaging the pressing surface;
12. The apparatus according to claim 11, further comprising permission means for permitting magnetic transfer to the magnetic recording medium by the magnetic transfer means when adhesion of foreign matter to the pressing surface is not recognized by the determination means. The manufacturing apparatus of a magnetic recording medium as described. A first holding body for holding a first pattern forming body in which the first pattern is formed on the first forming surface;
A second holding body for holding a second pattern forming body in which the second pattern is formed on the second forming surface;
The first pattern forming body held by the first holding body is irradiated with light so that an angle formed with the first forming surface is greater than 0 ° and less than 45 °, and the second holding A light irradiation means for irradiating the second pattern forming body held by the body with light so that an angle formed with the second formation surface is greater than 0 ° and less than 45 °;
The first forming surface is imaged by receiving light irradiated by the light irradiating means and diffusely reflected by the first forming surface, and the second forming surface is irradiated by the light irradiating means. Imaging means for imaging the second formation surface by receiving the light diffusely reflected by
The first formation in the first pattern forming body is performed by relatively moving the first holding body holding the first pattern forming body and the second holding body holding the second pattern forming body. A magnetic recording medium for recording magnetic information is sandwiched between a surface and the second formation surface of the second pattern forming body, and the first pattern and the second pattern are applied to the sandwiched magnetic recording medium. A magnetic recording medium manufacturing apparatus including magnetic transfer means for magnetic transfer. Based on the first imaging data obtained by imaging the first formation surface, it is determined whether or not foreign matter is attached to the first formation surface, and obtained by imaging the second formation surface. Determining means for determining whether or not foreign matter is attached to the second forming surface based on the second imaging data;
Permission means for permitting magnetic transfer to the magnetic recording medium by the magnetic transfer means when the judgment means does not recognize foreign matter adhering to both the first formation surface and the second formation surface. The apparatus for manufacturing a magnetic recording medium according to claim 13, further comprising: The imaging means includes
A housing,
A moving mechanism for moving the housing between a region sandwiched between the first holder and the second holder and a region not sandwiched between the first holder and the second holder;
The first forming surface is attached to the casing and disposed opposite to the first forming surface of the first pattern forming body held by the first holding body as the moving mechanism moves. A first imaging unit for imaging;
The second forming surface is attached to the housing and disposed opposite to the second forming surface of the second pattern forming body held by the second holding body as the moving mechanism moves. The apparatus for manufacturing a magnetic recording medium according to claim 13, further comprising: a second imaging unit that captures an image. First reference data obtained by previously imaging the first formation surface of the first pattern forming body after being attached to the first holding body and before being used in the magnetic transfer, and the first Storage means for storing second reference data obtained by previously imaging the second formation surface of the second pattern formation body after being attached to the two holders and before being used in the magnetic transfer Further comprising
The determination means is based on a comparison between the first reference data read from the storage means and the first imaging data obtained by imaging the first formation surface, and whether foreign matter has adhered to the first formation surface And determining whether foreign matter has adhered to the second formation surface based on a comparison between the second reference data and the second imaging data obtained by imaging the second formation surface. 16. The apparatus for manufacturing a magnetic recording medium according to claim 13, wherein the apparatus is a magnetic recording medium.

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