JP2011253584A - Method for manufacturing magnetic recording medium and device for manufacturing magnetic recording medium - Google Patents

Abstract

PROBLEM TO BE SOLVED: To suppress the occurrence of a scratch when a pattern formation body is brought into contact with a magnetic recording medium.SOLUTION: A magnetic transfer part includes: a fixed side tilt adjustment part 70 for adjusting the tilt of a master information recording body 200 held by a fixed holder 30; a movable side tilt adjustment part 80 for adjusting the tilt of a master information recording body 200 held by a movable holder 40; a movable holder driving part for performing driving that makes the movable holder 40 close to a fixed holder 30 side to insert a magnetic recording medium 1 between the master information recording body 200 of the fixed holder 30 side and the master information recording body 200 of the movable holder 40 side; and a fixed side magnet member 50 and a movable side magnet member 60 arranged by interposing the master information recording body 200 and the magnetic recording body 1 which are sandwiched between the fixed holder 30 and the movable holder 40.

Description

  The present invention relates to a magnetic recording medium manufacturing method and a magnetic recording medium manufacturing apparatus.

In a magnetic recording apparatus typified by a hard disk drive or the like, data is written to and read from a rotating magnetic recording medium using a magnetic head.
In this type of magnetic recording apparatus, the magnetic head is positioned in order to move the magnetic head to a target position on the magnetic recording medium and to write and read data at that position. For this reason, positioning data that is read by the magnetic head and used for positioning the magnetic head is recorded on the magnetic recording medium in advance.

As a prior art described in the publication, it has been proposed to record positioning data and the like on a magnetic recording medium by a so-called magnetic transfer system (see Patent Document 1). In magnetic transfer, a magnetic force is applied in one direction across the pattern forming body and the magnetic recording medium with the magnetic recording medium superimposed on the pattern forming body on which the pattern corresponding to the data to be recorded is formed. Then, the pattern is magnetically transferred to the magnetic recording medium.
In Patent Document 1, the pattern forming body is supported by an elastic body having a high and low distribution, and when the magnetic recording medium is sandwiched by the pattern forming body, the magnetic recording medium starts to come into contact with a specific portion of the pattern forming body. It is described to do.

JP 2006-252703 A

However, in the case of adopting a configuration in which the magnetic recording medium is started to contact from a specific portion of the pattern forming body, the specific portion of the pattern forming body is rubbed by the magnetic recording medium, and as a result, the pattern forming body and the magnetic recording medium Could be damaged.
An object of the present invention is to suppress the occurrence of scratches when a pattern forming body and a magnetic recording medium come into contact with each other.

  The method of manufacturing a magnetic recording medium according to the present invention includes forming each first pattern with respect to a first holding body that holds a plurality of first pattern forming bodies each having a first pattern formed side by side in the plane direction. The step of adjusting the slope of the first pattern forming surface of the body for each first pattern forming body, and holding a plurality of second pattern forming bodies each having the second pattern formed side by side in the surface direction Adjusting the inclination of the pattern formation surface of each second pattern formation body with respect to the second holding body to be performed for each second pattern formation body, and forming a plurality of first patterns with adjusted inclinations The first holding body that holds the body and the second holding body that holds the plurality of second pattern forming bodies whose inclinations are adjusted are relatively moved to be held by the first holding body. A plurality of first pattern forming bodies and second holding bodies; A step of sandwiching a plurality of magnetic recording media for recording magnetic information between the plurality of second pattern forming bodies held; a plurality of first pattern forming bodies held by the first holding body; A step of magnetically transferring the first pattern and the second pattern to the plurality of magnetic recording media sandwiched between the plurality of second pattern forming bodies held by the second holding body. Contains.

In this magnetic recording medium manufacturing method, in the step of adjusting for each first pattern forming body, the first pattern forming surface approaches a state parallel to the facing surface of the supplied magnetic recording medium. In the step of adjusting the position of each first pattern formation body and adjusting each second pattern formation body, the formation surface of the second pattern is the surface of the magnetic recording medium held by the first pattern formation body. The position of each second pattern forming body may be adjusted so as to approach a state parallel to the opposing surface.
Further, in the step of adjusting the inclination of the formation surface of the first pattern, a plurality of first patterns that support a plurality of first pattern formation bodies on a first holding body at a plurality of locations and that can be individually expanded and contracted. In the step of adjusting the amount of expansion / contraction of each expansion / contraction member and adjusting the inclination of the formation surface of the second pattern, a plurality of second pattern formation bodies are supported on a plurality of locations on the second holding body, and The amount of expansion / contraction of each of the plurality of second expansion / contraction members that can be individually expanded / contracted is adjusted.

  From another point of view, the magnetic recording medium manufacturing apparatus of the present invention aligns the orientation of the first pattern forming surface with a plurality of first pattern forming bodies each having the first pattern formed thereon. A first holding body that is arranged and held in the surface direction in a state where the first pattern forming body is inclined, and an inclination of a first pattern forming surface of each first pattern forming body with respect to the first holding body is adjusted for each first pattern forming body And a second adjustment unit configured to hold a plurality of second pattern forming bodies each having a second pattern formed thereon, in a state in which the directions of the formation surfaces of the second patterns are aligned. A holding body, a second adjustment unit for adjusting the inclination of the second pattern forming surface of each second pattern forming body with respect to the second holding body for each second pattern forming body, and a first holding By relatively moving the body and the second holding body, the first A plurality of magnetic information is recorded between a plurality of first pattern forming bodies whose inclination is adjusted by the adjusting section and a plurality of second pattern forming bodies whose inclination is adjusted by the second adjusting section. A drive unit that performs driving for sandwiching the magnetic recording medium, and a plurality of first pattern forming bodies and a plurality of first pattern sandwiched between the first holding body and the second holding body as driven by the driving unit. And a magnet member disposed so as to sandwich the plurality of magnetic recording media.

In this magnetic recording medium manufacturing apparatus, the first adjusting unit and the second adjusting unit are a pair of first pattern forming body and second pattern forming body configured to sandwich one magnetic recording medium. On the other hand, the first pattern formation surface of the first pattern formation body and the second pattern formation surface of the second pattern formation body are close to parallel when the magnetic recording medium is sandwiched. The respective adjustments can be performed.
In addition, the first adjustment unit is configured by a plurality of first expansion members that support a plurality of first pattern formation bodies on a first holding body at a plurality of locations, each of which can be individually expanded and contracted. The second adjustment unit is configured to support a plurality of second pattern forming bodies on a second holding body at a plurality of locations, and each of the two adjustment sections is configured by a plurality of second expansion and contraction members that can be individually expanded and contracted. can do.
Furthermore, the plurality of first elastic members and the plurality of second elastic members may be formed of piezoelectric elements.

  Further, from another viewpoint, the magnetic recording medium manufacturing apparatus of the present invention includes a first pattern forming body on which a first pattern is formed and a second pattern forming body on which a second pattern is formed. A second adjustment unit that adjusts the inclination of the second pattern formation surface of the second pattern formation body, and the second adjustment unit that has been adjusted in inclination by the first pattern formation body and the second adjustment unit. By relatively moving the pattern formation body, magnetic information is transferred between the first pattern formation surface of the first pattern formation body and the second pattern formation surface of the second pattern formation body. A drive unit that performs driving for sandwiching the magnetic recording medium to be recorded, and a first pattern forming body and a second pattern forming body that sandwich the magnetic recording medium in accordance with driving by the driving unit. And a magnet member.

  According to the present invention, it is possible to suppress the occurrence of scratches when the pattern forming body and the magnetic recording medium come into contact with each other.

It is the figure which showed an example of the structure of the magnetic recording / reproducing apparatus provided with the magnetic recording medium with which this Embodiment is applied. It is a figure which shows an example of the cross-sectional structure of a magnetic recording medium. It is a top view of a magnetic recording medium. 3 is a flowchart showing an example of a method for manufacturing a magnetic recording medium in the present embodiment. It is a top view of a surface inspection / magnetic transfer apparatus for performing surface inspection and magnetic transfer. It is sectional drawing which shows an example of a structure of the magnetic transfer part used at a magnetic transfer process. It is a front view which shows an example of a structure of the fixed holder in a magnetic transfer part. It is a front view which shows an example of a structure of the movable holder in a magnetic transfer part. It is a perspective view which shows an example of a structure of the 1st transfer part in a magnetic transfer part. It is a figure which shows an example of a structure of the master information recording body used with a magnetic transfer part. It is a figure which shows an example of a structure of the inclination adjustment part provided in the magnetic transfer part. It is a figure which shows an example of the control block in a surface inspection and a magnetic transfer apparatus. It is the flowchart which showed an example of the inclination adjustment procedure of each master information recording body in a magnetic transfer part.

Embodiments of the present invention will be described below in detail with reference to the accompanying drawings.
FIG. 1 is a diagram showing an example of the configuration of a magnetic recording / reproducing apparatus including a magnetic recording medium 1 to which the present embodiment is applied.
This magnetic recording / reproducing apparatus includes a magnetic recording medium 1 that magnetically records data as magnetic information, a rotation drive unit 2 that rotationally drives the magnetic recording medium 1, and data is written to the magnetic recording medium 1 and the magnetic recording medium 1. A magnetic head 3 for reading data recorded on the head, a carriage 4 on which the magnetic head 3 is mounted, a head drive unit 5 for moving the magnetic head 3 relative to the magnetic recording medium 1 via the carriage 4, and an external input A signal processing unit 6 that outputs a recording signal obtained by processing the processed information to the magnetic head 3 and outputs information obtained by processing a reproduction signal from the magnetic head 3 to the outside.
Here, in the present embodiment, the magnetic recording medium 1 has a disk shape, and recording layers for recording data are formed on both sides thereof as will be described later. In the example shown in FIG. 1, a plurality (three in this case) of magnetic recording media 1 are attached to one magnetic recording / reproducing apparatus.

FIG. 2 is a diagram showing an example of a cross-sectional configuration of the magnetic recording medium 1 shown in FIG. In addition, although there are an in-plane recording method and a perpendicular recording method as a data recording method for the magnetic recording medium 1, in this embodiment, the magnetic recording medium 1 used in the perpendicular recording method will be described.
The magnetic recording medium 1 is formed on a substrate 100, an adhesion layer 110 formed on the substrate 100, a soft magnetic underlayer 120 formed on the adhesion layer 110, and a soft magnetic underlayer 120. The orientation control layer 130, the nonmagnetic underlayer 140 formed on the orientation control layer 130, the perpendicular recording layer 150 formed on the nonmagnetic underlayer 140, and the perpendicular recording layer 150 are formed. The protective layer 160 and the lubricating layer 170 formed on the protective layer 160 are provided. In this embodiment, the adhesion layer 110, the soft magnetic underlayer 120, the orientation control layer 130, the nonmagnetic underlayer 140, the perpendicular recording layer 150, the protective layer 160, and the lubricating layer 170 are formed on both surfaces of the substrate 100, respectively. Is to be formed. In the following description, a laminate substrate in which the adhesive layer 110 to the protective layer 160 are laminated on both surfaces of the substrate 100 as necessary, in other words, a laminate substrate other than the lubrication layer 170 is formed. Sometimes referred to as 180.

  In this embodiment, a non-magnetic material is used as the substrate 100, and a metal substrate made of a metal material such as aluminum or an aluminum alloy may be used. For example, glass, ceramic, silicon, silicon carbide, carbon, etc. You may use the nonmetallic board | substrate which consists of these nonmetallic materials. In addition, it is also possible to use a substrate in which a NiP layer or a NiP alloy layer is formed on the surface of the metal substrate or nonmetal substrate by using, for example, a plating method or a sputtering method.

  Among these, as a glass substrate, normal glass, crystallized glass, etc. can be used, for example, General-purpose soda-lime glass, aluminosilicate glass, etc. can be used as normal glass, for example. In addition, as the crystallized glass, for example, lithium-based crystallized glass can be used. As the ceramic substrate, for example, a general-purpose aluminum oxide, a sintered body mainly composed of aluminum nitride, silicon nitride, or the like, or a fiber reinforced material thereof can be used.

  Further, as described later, when the substrate 100 is in contact with the soft magnetic underlayer 120 containing Co or Fe as a main component, corrosion can proceed due to surface adsorption gas, influence of moisture, diffusion of substrate components, and the like. There is sex. For this reason, it is preferable to provide the adhesion layer 110 between the substrate 100 and the soft magnetic underlayer 120. In addition, as a material of the adhesion layer 110, for example, Cr, Cr alloy, Ti, Ti alloy, or the like can be appropriately selected. The thickness of the adhesion layer 110 is preferably 2 nm (20 mm) or more.

The soft magnetic underlayer 120 is provided in order to reduce noise during recording and reproduction when the perpendicular recording method is employed.
In the present embodiment, the soft magnetic underlayer 120 includes a first soft magnetic layer 121 formed on the adhesion layer 110, a spacer layer 122 formed on the first soft magnetic layer 121, and a spacer layer 122. And a second soft magnetic layer 123 formed thereon. That is, the soft magnetic underlayer 120 has a configuration in which the spacer layer 122 is sandwiched between the first soft magnetic layer 121 and the second soft magnetic layer 123.
Of these, the first soft magnetic layer 121 and the second soft magnetic layer 123 are preferably made of a material containing Fe: Co in the range of 40:60 to 70:30 (atomic ratio). In order to enhance the corrosion resistance, it is preferable to contain any one selected from the group consisting of Ta, Nb, Zr, and Cr in the range of 1 atomic% to 8 atomic%.
As the spacer layer 122, Ru, Re, Cu, or the like can be used. Among these, it is particularly preferable to use Ru.

The orientation control layer 130 is provided in order to refine the crystal grains of the perpendicular recording layer 150 laminated thereon via the nonmagnetic underlayer 140 to improve the recording / reproducing characteristics.
The material constituting the orientation control layer 130 is not particularly limited, but a material having an hcp structure, an fcc structure, or an amorphous structure is preferable. In particular, a Ru-based alloy, a Ni-based alloy, a Co-based alloy, a Pt-based alloy, and a Cu-based alloy are preferable, and those obtained by multilayering these alloys may be used. For example, it is preferable to adopt a multilayer structure of Ni-based alloy and Ru-based alloy, a multilayer structure of Co-based alloy and Ru-based alloy, or a multilayer structure of Pt-based alloy and Ru-based alloy from the substrate 100 side.

The nonmagnetic underlayer 140 is provided in order to suppress disorder of crystal growth in the initial layered portion of the perpendicular recording layer 150 stacked thereon, and to suppress generation of noise during recording and reproduction. However, the nonmagnetic underlayer 140 is not necessarily provided.
In the present embodiment, the nonmagnetic underlayer 140 is preferably made of a material containing an oxide in addition to a metal containing Co as a main component. The Cr content in the nonmagnetic underlayer 140 is preferably 25 atomic% to 50 atomic%. As the oxide in the nonmagnetic underlayer 140, for example, an oxide such as Cr, Si, Ta, Al, Ti, Mg, and Co is preferably used, and among them, TiO ₂ , Cr ₂ O ₃ , SiO _{2 and the} like are particularly preferable. Can be suitably used. The content of the oxide in the nonmagnetic underlayer 140 is 3 mol% or more and 18 mol% or less with respect to the total mol of the magnetic particles, for example, an alloy such as Co, Cr, and Pt calculated as one compound. It is preferable.

  In the present embodiment, the perpendicular recording layer 150 includes a first magnetic layer 151 formed on the nonmagnetic underlayer 140, a first nonmagnetic layer 152 formed on the first magnetic layer 151, and a first A second magnetic layer 153 formed on the nonmagnetic layer 152, a second nonmagnetic layer 154 formed on the second magnetic layer 153, and a third formed on the second nonmagnetic layer 154 And a magnetic layer 155. That is, in the perpendicular recording layer 150, the first nonmagnetic layer 152 is sandwiched between the first magnetic layer 151 and the second magnetic layer 153, and the second nonmagnetic layer 154 is formed between the second magnetic layer 153 and the third magnetic layer 155. It has a sandwiched configuration.

Among these, the first magnetic layer 151, the second magnetic layer 153, and the third magnetic layer 155 reverse the magnetization direction in the thickness direction of the perpendicular recording layer 150 by the magnetic energy supplied from the magnetic head 3, and Provided for storing data by maintaining state.
The first magnetic layer 151, the second magnetic layer 153, and the third magnetic layer 155 include magnetic particles made of a metal containing Co as a main component and a nonmagnetic oxide, and the magnetic particles are surrounded by an oxide. Those having a mold structure are preferably used.

Here, as the oxide constituting the first magnetic layer 151, the second magnetic layer 153, and the third magnetic layer 155, for example, an oxide such as Cr, Si, Ta, Al, Ti, Mg, Co is used. preferable. Among _{them, TiO 2, Cr 2 O 3} , SiO ₂ or the like can be suitably used. Further, the first magnetic layer 151 which is the lowest layer in the perpendicular recording layer 150 preferably contains a composite oxide composed of two or more kinds of oxides. Among these, in particular, compositions such as Cr ₂ O ₃ —SiO ₂ , Cr ₂ O ₃ —TiO ₂ , Cr ₂ O ₃ —SiO ₂ —TiO ₂ can be suitably used.

In addition, as a material suitable for the magnetic particles constituting the first magnetic layer 151, the second magnetic layer 153, and the third magnetic layer 155, for example, 90 (Co14Cr18Pt) -10 (SiO ₂ ) {Cr content 14 atomic% , Pt content of 18 atomic%, the molar concentration calculated as a single compound of magnetic particles composed of the remaining Co is 90 mol%, the oxide composition composed of SiO ₂ is 10 mol%}, 92 (Co 10 Cr 16 Pt) -8 (SiO ₂ ), other _{94 (Co8Cr14Pt4Nb) -6 (Cr 2} O 3), (CoCrPt) - (Ta 2 O 5), (CoCrPt) - (Cr 2 O 3) - (TiO 2), (CoCrPt) - (Cr 2 O _{3) - (SiO 2),} (CoCrPt) - (Cr 2 O 3) - (SiO 2) - (TiO 2), (CoCrPtMo) - (Ti _{), (CoCrPtW) - (TiO} 2), (CoCrPtB) - (Al 2 O 3), (CoCrPtTaNd) - (MgO), (CoCrPtBCu) - (Y 2 O 3), (CoCrPtRu) - (SiO 2) , etc. Can be mentioned.

Further, the first nonmagnetic layer 152 and the second nonmagnetic layer 154 facilitate the magnetization reversal of the first magnetic layer 151, the second magnetic layer 153, and the third magnetic layer 155 constituting the perpendicular recording layer 150. It is provided to reduce noise by reducing dispersion of magnetization reversal in the entire magnetic particles.
In the present embodiment, it is preferable that the first nonmagnetic layer 152 and the second nonmagnetic layer 154 include, for example, Ru and Co.

  In this example, the magnetic layers constituting the perpendicular recording layer 150 are three layers (the first magnetic layer 151, the second magnetic layer 153, and the third magnetic layer 155). However, the present invention is not limited to this. It is also possible to have a configuration including more than one magnetic layer. In this example, the nonmagnetic layer (the first nonmagnetic layer 152 and the first magnetic layer 152) is interposed between the magnetic layers (the first magnetic layer 151, the second magnetic layer 153, and the third magnetic layer 155) constituting the perpendicular recording layer 150. However, the present invention is not limited to this. For example, two magnetic layers having different compositions may be arranged in an overlapping manner.

The protective layer 160 is provided to suppress corrosion of the perpendicular recording layer 150 and to prevent and protect the surface of the magnetic recording medium 1 from being damaged when the magnetic head 3 comes into contact with the magnetic recording medium 1.
As the protective layer 160, a conventionally known material can be used. For example, a material containing C, SiO ₂ , or ZrO ₂ can be used. The thickness of the protective layer 160 is preferably 1 to 10 nm because the distance between the magnetic head 3 and the magnetic recording medium 1 can be reduced in the magnetic recording / reproducing apparatus shown in FIG.

The lubricating layer 170 is provided to suppress wear of the surfaces of the magnetic head 3 and the magnetic recording medium 1 when the magnetic head 3 comes into contact with the magnetic recording medium 1.
As the lubricating layer 170, a conventionally known material can be used. For example, it is preferable to use a lubricant such as perfluoropolyether, fluorinated alcohol, or fluorinated carboxylic acid. The thickness of the lubrication layer 170 is preferably 1 to 2 nm because the distance between the magnetic head 3 and the magnetic recording medium 1 can be reduced in the magnetic recording / reproducing apparatus shown in FIG.

FIG. 3 is a top view of the magnetic recording medium 1 shown in FIG. FIG. 3 schematically shows a plurality of data areas provided on the surface of the magnetic recording medium 1.
The magnetic recording medium 1 in the present embodiment has a disk shape as described above, and a circular hole penetrating the front and back of the magnetic recording medium 1 is formed at the center thereof. In the following description, the edge of the circular hole in the magnetic recording medium 1 is referred to as an inner end 1a, and the outer peripheral edge in the magnetic recording medium 1 is referred to as an outer end 1b.

  On the surface of the magnetic recording medium 1 shown in FIG. 3, a read / write data storage area A1 for reading and writing data (magnetic information) using the magnetic head 3 (see FIG. 1), and data of the data using the magnetic head 3 are stored. A positioning data storage area A2 for storing data used for positioning of the magnetic head 3 in reading and writing (referred to as positioning data) is provided. In this example, a plurality of positioning data storage areas A <b> 2 are provided radially on the surface of the magnetic recording medium 1. A plurality of tracks T are provided concentrically on the surface of the magnetic recording medium 1. Although not shown, a read / write data storage area A1 and a positioning data storage area A2 are similarly provided on the back surface of the magnetic recording medium 1 shown in FIG. However, the positioning data storage areas A2 provided on the front and back surfaces of the magnetic recording medium 1 may not be aligned on the front and back surfaces.

  In the positioning data storage area A2 of the magnetic recording medium 1, as positioning data, for example, an AGC (Auto Gain Control) pattern used for gain adjustment of a detection signal at the time of reading by the magnetic head 3, a detection used for detection of a servo signal Pattern, address pattern used for detecting cylinder information or sector information of servo track, and moving the magnetic head 3 to the target track T and then making the magnetic head 3 follow the track T Servo patterns including burst patterns (none of which are shown) are stored. The servo pattern is configured by appropriately reversing the magnetization direction in the thickness direction of the perpendicular recording layer 150 provided on the magnetic recording medium 1 in accordance with the positioning data.

  FIG. 4 is a flowchart showing an example of a method for manufacturing the magnetic recording medium 1 in the present embodiment. In the present embodiment, in the manufacturing process of the magnetic recording medium 1, the servo pattern is written in the positioning data storage area A2 described above, more specifically, a master information recording body 200 (FIG. 10) described later. The servo pattern is magnetically transferred to the magnetic recording medium 1 using the reference

  Prior to the manufacture of the magnetic recording medium 1, a substrate 100 is prepared which is previously formed in a disc shape and has a circular hole penetrating the front and back at the center, and after pre-cleaning, the substrate 100 is polished. (Step 101). The polishing of the substrate 100 in step 101 is desirably performed by, for example, mechanical polishing using diamond slurry.

  The polished substrate 100 has an average surface roughness (Ra) of 1 nm (10 mm) or less, preferably 0.5 nm or less, and the magnetic head 3 (see FIG. 1) has a low flying height. This is preferable because it is suitable for density recording. Further, the fine waviness (Wa) on the surface of the substrate 100 after polishing is 0.3 nm or less (more preferably 0.25 nm or less), which is suitable for high recording density recording with the magnetic head 3 flying low. This is preferable. In addition, a surface average roughness (Ra) of at least one of the chamfered portion of the chamfer portion on the end surface of the substrate 100 after polishing and the side surface portion should be 10 nm or less (more preferably 9.5 nm or less). Is preferable for the flight stability of the magnetic head 3. In addition, microwaviness (Wa) can be measured as surface average roughness in a measuring range of 80 μm, for example, using a surface roughness measuring device P-12 (manufactured by KLM-Tencor).

  Next, pre-cleaning is performed on the polished substrate 100 (step 102). It is preferable to perform the pre-cleaning of the substrate 100 in step 102 while immersing the polished substrate 100 in pure water or ultrapure water and applying ultrasonic vibration. The substrate 100 that has been pre-cleaned is preferably quickly dried by a spin method or the like.

  Subsequently, a film forming process in which the adhesion layer 110, the soft magnetic underlayer 120, the orientation control layer 130, the nonmagnetic underlayer 140, the perpendicular recording layer 150, and the protective layer 160 are sequentially stacked on the substrate 100 that has been pre-cleaned. (Step 103). Here, from the viewpoint of improving productivity, the formation of each layer in step 103 is preferably performed, for example, with an in-line film forming apparatus in which a plurality of chambers each having a film forming function are connected in series. Also, from the viewpoint of improving productivity, it is desirable to form each layer formed in the film formation step by a sputtering method. However, from the viewpoint of reducing the thickness of the protective layer 160 while ensuring the strength, it is preferable that the adhesive layer 110 to the perpendicular recording layer 150 are formed by sputtering, while the protective layer 160 is formed by CVD. . In this manner, by performing the film forming process on the substrate 100 that has been subjected to the pre-cleaning, the laminated substrate 180 (see FIG. 2) is obtained.

  Then, post-cleaning is performed on the laminated substrate 180 obtained by the film forming process (step 104). The post-cleaning of the laminated substrate 180 in step 104 is preferably performed using hydrogen water in order to prevent corrosion of the metal elements contained in the recording layer. Here, hydrogen water is water in which high-purity hydrogen gas is dissolved in pure water or ultrapure water, which reduces the corrosion of metal elements and reduces the cluster of water to increase the cleaning ability. It is.

  The post-cleaning process of the present embodiment is performed for the purpose of removing contaminants on the surface of the laminated substrate 180 that cannot be removed by the wiping process (step 107) and the burnishing process (step 108) described later. These contaminants may be difficult to wash and remove with hydrogen water after the lubricant application step (step 105) described later, the wiping step, and the burnishing step. The reason for this is speculated that if the contaminants are covered with the lubricating layer 170, the water repellency makes it difficult to remove the contaminants, and the contaminants are applied to the surface of the laminated substrate 180 after the wiping process and the burnishing process. It may be difficult to remove. Note that although it is possible to remove powdery substances such as sputter dust to some extent also by a post-cleaning process using hydrogen water, the surface of the multilayer substrate 180 is scrubbed as in the wiping process and the burnishing process, Since the effect of wiping or shaving is low, it is difficult to remove the powdery substance that is firmly attached to the surface of the multilayer substrate 180. Therefore, the post-cleaning step using hydrogen water is preferably used in combination with the wiping step or the burnishing step.

  Next, a lubricant is applied to the laminated substrate 180 that has been post-cleaned (step 105), and the lubricating layer 170 is formed on the laminated substrate 180. Subsequently, the laminated substrate 180 coated with the lubricating layer 170 is baked by heating at about 100 ° C. for several minutes (step 106). Thereby, moisture contained in the lubricating layer 170 is volatilized, and adhesion between the protective layer 160 provided on the outermost surface side of the laminated substrate 180 and the lubricating layer 170 in contact with the protective layer 160 is increased. Thus, the magnetic recording medium 1 is obtained.

  Next, the surface of the baked magnetic recording medium 1 is wiped (step 107). The wiping process is performed in order to wipe off spatter dust and the like adhering to the surface of the magnetic recording medium 1. As described above, this is because the post-cleaning process in step 104 is performed by immersing in hydrogen water, and it is difficult to remove the powdery substance firmly attached to the surface of the magnetic recording medium 1 by itself. Because.

  The wiping step is performed using, for example, a cloth wiping tape, and the surface of the wiping tape is moved on the surface of the magnetic recording medium 1 by a rubber contact roll or pad while the wiping tape is moved relative to the surface of the magnetic recording medium 1. The surface of the magnetic recording medium 1 is lightly wiped by being pressed against the surface. By performing such processing, sputter dust and the like adhering to the surface of the magnetic recording medium 1 are removed. As a result, when the obtained magnetic recording medium 1 is incorporated in the magnetic recording / reproducing apparatus shown in FIG. 1, the flying height of the magnetic head 3 with respect to the magnetic recording medium 1 can be further reduced.

  Here, as the wiping tape used in the wiping step, a wiping tape obtained by slitting a cloth made of ultrafine fibers into a strip shape, a woven or knitted fabric of ultrafine fiber multifilament yarn, or the like is used.

  Moreover, the wiping method of the magnetic recording medium 1 using such a wiping tape is specifically the surface of the wiping tape (on the magnetic layer side of the magnetic recording medium 1 while rotating the magnetic recording medium 1). This is done by pressing the wiping surface. Thereby, the sputter dust etc. on the surface of the magnetic recording medium 1 are wiped off, and the surface is cleaned. Here, the wiping tape is stretched between the supply reel and the take-up reel, is sequentially supplied from the supply reel, and is taken up by the take-up reel. In the middle of running from the supply reel side to the take-up reel side, the wiping tape is pressed against the wiping surface (back surface) by a backing roll such as rubber or felt, and the wiping surface is magnetically recorded. It is pressed against the surface of the medium 1.

Then, the wiping is performed on the surface of the magnetic recording medium 1 (step 108).
The burnishing step is a step of polishing the surface using a polishing tape in order to remove protrusions formed or attached to the surface of the magnetic recording medium 1. By performing such processing, the flying height of the magnetic head 3 with respect to the magnetic recording medium 1 can be further reduced when the obtained magnetic recording medium 1 is incorporated in the magnetic recording / reproducing apparatus shown in FIG. Further, in the magnetic transfer process described later, a gap is generated between the magnetic recording medium 1 and the master information recording body 200, the transfer pattern becomes unclear, and the master information recording body 200 can be prevented from being damaged.

  The burnishing process is performed using a polishing tape or the like coated with alumina abrasive grains, and the surface of the magnetic recording medium 1 is lightened by pressing the polishing tape against the surface of the magnetic recording medium 1 with a rubber contact roll. This is done by polishing. By performing such processing, abnormal protrusions and the like on the surface of the magnetic recording medium 1 are removed.

  As a polishing tape (burnish tape) used in the burnishing process, a tape formed by forming an abrasive layer on a polyester base film is usually used. Then, when this abrasive layer slides in contact with the magnetic layer side surface of the magnetic recording medium 1, minute dust adhering to the surface of the magnetic recording medium 1 is removed and exists on the surface. Abnormal protrusions and the like are polished and removed, and the surface is smoothed. As an abrasive, chromium oxide, α-alumina, silicon carbide, nonmagnetic iron oxide, diamond, γ-alumina, α, γ-alumina, fused alumina, corundum, artificial, having an average particle size of about 0.05 μm to 50 μm Diamond or the like is used.

  Further, the burnishing of the magnetic recording medium 1 using such a polishing tape is specifically performed by rotating the magnetic recording medium 1 and grinding the polishing tape on the surface of the magnetic recording medium 1 on the magnetic layer side. This is done by pressing the grain surface. Thereby, the protrusions on the surface of the magnetic recording medium 1 are removed by polishing and smoothed. Here, the polishing tape is stretched between the supply reel and the take-up reel, is sequentially supplied from the supply reel, and is taken up by the take-up reel. In the course of running from the supply reel side to the take-up reel side, the polishing tape has its surface (back surface) opposite to the abrasive grain surface pressed by a backing roll such as rubber or felt, and the polishing surface of the polishing tape. Is pressed against the surface of the magnetic recording medium 1.

  Next, initial magnetization is performed on the burnished magnetic recording medium 1 (step 109). In this example, since the target is the magnetic recording medium 1 used in the perpendicular recording method, the initial magnetization step is performed by applying an initial DC magnetic field in one direction perpendicular to the surface of the magnetic recording medium 1. The initial DC magnetic field applied at that time can be generated by a permanent magnet or an electromagnet, and is preferably generated by using a NdFeB-based sintered magnet having a more stable and strong magnetic force. Further, it is preferable that the initial magnetization process is performed in a non-contact state between the magnetic recording medium 1 and the magnet in order to maintain the cleanliness of the surface of the magnetic recording medium 1.

  Here, the coercive force Hc of the perpendicular recording layer 150 (the first magnetic layer 151, the second magnetic layer 153, and the third magnetic layer 155) in the magnetic recording medium 1 of the present embodiment is typically 320 kA / m (about 4000 Oe). ) That's it. Therefore, in the initial magnetization process, it is preferable to use a magnet capable of direct current magnetization of each magnetic layer of the perpendicular recording layer 150.

Thereafter, a surface inspection is performed on the magnetic recording medium 1 on which the initial magnetization has been performed (step 110). In the surface inspection step, the presence or absence of dust adhesion or abnormal protrusion on the surface of the magnetic recording medium 1 after the initial magnetization is examined.
Then, magnetic transfer is performed on the magnetic recording medium 1 whose surface inspection has been completed (step 111), and a positioning data storage area A2 (see FIG. 3) in which the servo pattern is stored in the magnetic recording medium 1 is provided.
The surface inspection process in step 110 and the magnetic transfer process in step 111 are performed as a series of operations, and details thereof will be described later.

  Subsequently, a glide inspection is performed on the magnetic recording medium 1 on which the magnetic transfer has been performed (step 112). In the glide inspection process, the head is actually lifted and inspected for any protrusions on the surface of the magnetic recording medium 1 that has been magnetically transferred. When writing (recording) and reading (reproducing) data on the magnetic recording medium 1 using the magnetic head 3, the flying height (the distance between the magnetic recording medium 1 and the magnetic head 3) or more is increased on the surface of the magnetic recording medium 1. If there is a protrusion having a height, the magnetic head 3 may collide with the protrusion and damage the magnetic head 3 or cause a defect in the magnetic recording medium 1. For this reason, in the glide inspection, the presence or absence of such a high protrusion is inspected.

Next, a certification test is performed on the magnetic recording medium 1 that has passed the glide test (step 113). In the certification inspection step, as in a normal magnetic recording / reproducing apparatus, after a predetermined signal is recorded on the magnetic recording medium 1 by the magnetic head 3, the recorded signal is reproduced, and the obtained reproduced signal is used for magnetic recording. The recording failure of the recording medium 1 is detected, and the quality of the magnetic recording medium 1 such as the electrical characteristics of the magnetic recording medium 1 and the presence or absence of defects is confirmed. Since the servo pattern has already been written on the magnetic recording medium 1 manufactured by the above-described method, it is difficult to perform a certifying test by a conventional method that does not use servo information. For this reason, in the present embodiment, the magnetic head 3 is positioned at a specific location using a servo pattern (positioning data) magnetically transferred to the magnetic recording medium 1, and a test for reading and writing data is performed.
Then, the magnetic recording medium 1 that has passed the certification inspection is shipped as a product.

Now, the surface inspection process in step 110 and the magnetic transfer process in step 111 will be described in more detail.
FIG. 5 is a top view of the surface inspection / magnetic transfer apparatus 10 for performing surface inspection and magnetic transfer. In the following description, in FIG. 5, the direction from the left side to the right side in the figure is the X direction, the direction from the lower side to the upper side in the figure is the Y direction, and the direction from the back side to the near side in the figure is the Z direction. I do.

  The surface inspection / magnetic transfer apparatus 10 includes a rectangular base 11 whose long side is in the X direction with respect to the Y direction, and a pre-transfer medium that accommodates the magnetic recording medium 1 subjected to the initial magnetization shown in Step 109. The servo pattern is magnetically applied to the storage unit 12, the surface inspection unit 13 that performs surface inspection shown in Step 110 on the magnetic recording medium 1 taken out from the pre-transfer medium storage unit 12, and the magnetic recording medium 1 subjected to surface inspection. Magnetic transfer unit 14 for transfer, transferred medium storage unit 15 for storing the magnetic recording medium 1 on which servo pattern magnetic transfer has been performed, and magnetic recording medium for which the result of surface inspection by the surface inspection unit 13 has failed 1 and a defective product storage section 16 for storing 1. Further, the surface inspection / magnetic transfer device 10 is a vertical articulated robot that transfers the magnetic recording medium 1 among the pre-transfer medium storage unit 12, the surface inspection unit 13, the transferred medium storage unit 15, and the defective product storage unit 16. 18 is further provided. Further, the surface inspection / magnetic transfer apparatus 10 includes a position detection unit 19 used for positioning the magnetic recording medium 1 held by the vertical articulated robot 18 with respect to the magnetic transfer unit 14, and a magnet with positioning with respect to the magnetic transfer unit 14. It further includes a vibration detection unit 20 used for vibration detection of the recording medium 1.

  In the surface inspection / magnetic transfer apparatus 10, the pre-transfer medium storage unit 12, the surface inspection unit 13, the magnetic transfer unit 14, the transferred medium storage unit 15, the defective product storage unit 16, the vertical articulated robot 18, the position detection unit 19, and The vibration detection unit 20 is disposed on the upper side of the base 11. On the other hand, the drive systems for the surface inspection unit 13, the magnetic transfer unit 14, the vertical articulated robot 18, the position detection unit 19, and the vibration detection unit 20 are arranged on the lower side of the base 11. Further, the surface inspection / magnetic transfer apparatus 10 according to the present embodiment is disposed in a clean room that employs a downflow method. The surface inspection / magnetic transfer apparatus 10 includes a surface inspection / magnetic transfer apparatus 10 from above to below (-Z direction in FIG. 5). ) Air is flowing.

  In the following description, the magnetic recording medium 1 before the execution of the magnetic transfer process supplied to the magnetic transfer unit 14 or the defective product storage unit 16 from the pre-transfer medium storage unit 12 via the surface inspection unit 13 is described as “ This is referred to as “media before transfer”. In the following description, the magnetic recording medium 1 that has been supplied from the magnetic transfer unit 14 to the transferred medium storage unit 15 and has been subjected to the magnetic transfer process is referred to as a “transferred medium”.

  The pre-transfer medium storage unit 12 has a storage container 12a that can store a plurality of pre-transfer media in a standing state. The transferred medium storage unit 15 has a storage container 15a that can store a plurality of pre-transferred media in a standing state. The defective product storage unit 16 includes a storage container 16a that can store a plurality of pre-transfer media (defective products) in a standing state. Here, as the storage containers 12a, 15a, and 16a, those having a common structure are used. When the pre-transfer medium is empty in the pre-transfer medium container 12, the transferred medium container 15 is full of the transferred medium, and the defective product container 16 is pre-transfer. When the medium (defective product) is full, each is replaced with a new one.

  The surface inspection unit 13 performs surface inspection on both surfaces of the pre-transfer medium carried from the pre-transfer medium storage unit 12 by the vertical articulated robot 18. As a surface inspection method in the surface inspection unit 13, for example, a method of scanning both surfaces of a pre-transfer medium using a laser light source (not shown) and detecting the presence or absence of abnormalities (protrusions or the like) on the surface based on the reflected light. It is done.

  The magnetic transfer unit 14 performs magnetic transfer of servo patterns on both surfaces of the pre-transfer medium that has been carried from the surface inspection unit 13 by the vertical articulated robot 18. The magnetic transfer unit 14 is configured to be able to perform magnetic transfer on a plurality of pre-transfer media (three in this example) at a time. The first magnetic transfer is performed on one pre-transfer medium. The image forming apparatus includes a transfer unit 14a, a second transfer unit 14b that performs magnetic transfer to another one pre-transfer medium, and a third transfer unit 14c that performs magnetic transfer to another one pre-transfer medium. Here, the first transfer unit 14a, the second transfer unit 14b, and the third transfer unit 14c are arranged so as to have a positional relationship in which each of them is an apex of an equilateral triangle in the XY plane orthogonal to the Z direction. Yes. Details of the configuration of the magnetic transfer unit 14 will be described later.

  The vertical articulated robot 18 includes a base portion 18a mounted on the base 11 and an arm portion 18b attached to the upper portion of the base portion 18a and allowed to move in three-dimensional directions (X direction, Y direction, and Z direction). I have. A chuck part (not shown) for holding the magnetic recording medium 1 (both the pre-transfer medium and the transferred medium) is attached to the free end of the arm part 18b.

  The position detection unit 19 includes, for example, a light source including a laser and a light receiving unit including a CCD (Charge Coupled Device) image sensor. The position detection unit 19 detects the position of the pre-transfer medium held by the arm unit 18 b of the vertical articulated robot 18 in the vicinity of the magnetic transfer unit 14.

  The vibration detection unit 20 includes, for example, a light source including a laser and a light receiving unit including a CCD image sensor. The vibration detection unit 20 detects the vibration of the pre-transfer medium held by the arm unit 18 b of the vertical articulated robot 18 in the vicinity of the magnetic transfer unit 14.

Next, details of the configuration of the magnetic transfer unit 14 will be described.
FIG. 6 is a cross-sectional view showing an example of the configuration of the magnetic transfer unit 14 used in the magnetic transfer process. FIG. 7 is a front view showing an example of the configuration of the fixed holder 30 in the magnetic transfer unit 14, and FIG. 8 is a front view showing an example of the configuration of the movable holder 40 in the magnetic transfer unit 14. FIG. 9 is a perspective view showing an example of the configuration of the first transfer unit 14a in the magnetic transfer unit 14, and FIG. 10 is a diagram showing an example of the configuration of the master information recording body 200 used in the magnetic transfer unit 14. . Here, FIG. 10A shows a top view of the master information recording body 200, and FIG. 10B shows an XB-XB sectional view of FIG. 10A. 6 corresponds to the VI-VI cross section shown in FIG. 5, FIG. 7 and FIG.

  As shown in FIGS. 6 to 8, the magnetic transfer unit 14 is mounted in a state of being fixed to the base 11 (see FIG. 5), and each of the three masters on which servo patterns are magnetically recorded in advance. A fixed holder 30 that holds the information recording body 200 in a state of being fixed upward, and is disposed on the upper side (Z direction side) of the information recording body 200 so as to face the fixed holder 30 and approaches the fixed holder 30 (- Three master information recording bodies 200, which are arranged so as to be movable to the Z direction side) and the side away from the fixed holder 30 (Z direction side), each having a servo pattern magnetically recorded in advance, are fixed downward. And a movable holder 40 held in a state. The three master information recording bodies 200 attached to the fixed holder 30 and the three master information recording bodies 200 attached to the movable holder 40 are arranged in a state of facing each other in a one-to-one relationship. .

  In the present embodiment, the three master information recording bodies 200 held on the movable holder 40 side are used as the first pattern forming body as the three master information recording bodies 200 held on the fixed holder 30 side. Each functions as a second pattern forming body. In the present embodiment, the fixed holder 30 functions as a first holding body, and the movable holder 40 functions as a second holding body.

  Here, the three master information recording bodies 200 on the fixed holder 30 side are attached to the fixed holder 30 via a fixed-side inclination adjusting unit 70 provided to adjust the inclination of the upper surface (exposed surface) in each. It has been. On the other hand, the three master information recording bodies 200 on the movable holder 40 side are attached to the movable holder 40 via a movable-side inclination adjusting unit 80 provided to adjust the inclination of the lower surface (exposed surface) in each. ing. The details of the fixed side tilt adjusting unit 70 and the movable side tilt adjusting unit 80 will be described later. In the present embodiment, the fixed side tilt adjustment unit 70 functions as a first adjustment unit, and the movable side tilt adjustment unit 80 functions as a second adjustment unit.

  Further, below the three master information recording bodies 200 attached to the fixed holder 30, fixed-side magnet members 50 each including a fixed-side magnet 51 are arranged with the fixed holder 30 interposed therebetween. Each fixed-side magnet member 50 includes a fixed-side magnet 51 disposed opposite to the fixed holder 30, a fixed-side magnet holding portion 52 that holds the fixed-side magnet 51, and a fixed side that extends downward from the back side of the fixed-side magnet 51. And a magnet support portion 53. The fixed-side magnet support portion 53 is supported in a fixed state in the Z direction (vertical direction), and is rotatably supported in the arrow direction shown in FIG. Thereby, the fixed side magnet 51 held by the fixed side magnet holding part 52 rotates with the rotation of the fixed side magnet support part 53.

  On the other hand, above the three master information recording bodies 200 attached to the movable holder 40, movable side magnet members 60 each including a movable side magnet 61 are disposed with the movable holder 40 interposed therebetween. Each movable-side magnet member 60 includes a movable-side magnet 61 opposed to the movable holder 40, a movable-side magnet holding portion 62 that holds the movable-side magnet 61, and a movable side that extends upward from the back side of the movable-side magnet 61. And a magnet support portion 63. The movable magnet support portion 63 is supported so as to be able to advance and retreat in the Z direction (vertical direction), and is supported so as to be rotatable in the arrow direction shown in FIG. As a result, the movable side magnet 61 held by the movable side magnet holding part 62 advances and retreats as the movable side magnet support part 63 advances and retreats, and the movable side magnet holding part 62 moves as the movable side magnet support part 63 rotates. The movable side magnet 61 held by the motor rotates.

In the fixed-side magnet member 50, the fixed-side magnet 51 is attached to the fixed-side magnet holding portion 52 along the diameter direction passing through the rotation center of the fixed-side magnet support portion 53. The fixed-side magnet 51 is held by the fixed-side magnet holding unit 52 so that the side facing the fixed holder 30 is a magnetic pole of one polarity (for example, N pole).
On the other hand, in the movable side magnet member 60, the movable side magnet 61 is attached to the movable side magnet holding portion 62 along the diameter direction passing through the rotation center of the movable side magnet support portion 63. And the movable side magnet 61 is hold | maintained at the movable side magnet holding | maintenance part 62 so that the side facing the movable holder 40 may become the magnetic pole (for example, S pole) of the other polarity.
In the present embodiment, the fixed side magnet member 50 and the movable side magnet member 60 function as magnet members.

  In the present embodiment, as shown in FIG. 9, the first transfer unit 14 a constituting the magnetic transfer unit 14 includes two master information recording bodies 200 and two master information recording bodies 200 that are arranged to face each other. Is composed of a fixed-side magnet member 50 and a movable-side magnet member 60 that are arranged so as to be sandwiched from above and below. Although not shown in FIG. 9, the fixed-side inclination adjusting unit 70 and the movable-side inclination adjusting unit 80 shown in FIG. 6 also constitute the first transfer unit 14a. Although not described in detail, the other second transfer unit 14b and third transfer unit 14c have the same configuration as the first transfer unit 14a.

  In this embodiment, the fixed side magnet 51 and the movable side magnet 61 sandwich the fixed holder 30 and the movable holder 40 in each of the first transfer unit 14a, the second transfer unit 14b, and the third transfer unit 14c. Arranged so as to face each other. In each of the first transfer unit 14a, the second transfer unit 14b, and the third transfer unit 14c, the fixed-side magnet member 50 and the movable-side magnet member 60 make the fixed-side magnet 51 and the movable-side magnet 61 face each other. It is configured to rotate together while maintaining the state.

  A master information recording body 200 shown in FIG. 10 has a disk shape whose diameter is larger than that of the magnetic recording medium 1. Also, a servo pattern formation region SP in which fine irregularities corresponding to the servo pattern are formed is provided on one surface of the master information recording body 200. In this example, a plurality of servo pattern formation regions SP are provided radially on one surface of the master information recording body 200 except for the central portion and the outer edge portion. When the master information recording body 200 is attached to the fixed holder 30 shown in FIG. 7 or the movable holder 40 shown in FIG. 8, the surface (pattern forming surface) provided with the servo pattern forming region SP is exposed. It will be in the state.

  In addition, a first through hole 200a and a second through hole 200b penetrating the front and back are provided in the central portion of the master information recording body 200 attached to the fixed holder 30. The first through hole 200a and the second through hole 200b are provided on the inner side (center side) of the servo pattern formation region SP in the master information recording body 200. Note that the first through hole 200 a and the second through hole 200 b are not necessary for the master information recording body 200 attached to the movable holder 40. The reason for this will be described later.

  In the present embodiment, the master information recording body 200 attached to the fixed holder 30 side functions as the first pattern forming body. At that time, the servo recorded on the master information recording body 200 is used. The pattern is the first pattern, and the servo pattern formation surface of the master information recording body 200 is the first pattern formation surface. In the present embodiment, the master information recording body 200 attached to the movable holder 40 side functions as the second pattern forming body. At this time, the servo recorded on the master information recording body 200 The pattern is the second pattern, and the servo pattern formation surface of the master information recording body 200 is the second pattern formation surface.

  Next, the structure of the master information recording body 200 will be described. The master information recording body 200 includes a disk-shaped base 201, a master magnetic layer 202 formed on one surface of the base 201, and a master magnetic layer 202. And a master protective layer 203 formed thereon. Here, FIG. 10B shows a cross-sectional configuration of the master information recording body 200 in the servo pattern formation region SP, and there are convex portions 204 and concave portions 205 corresponding to the servo pattern at this portion. ing. Of the one surface of the master information recording body 200, an area other than the servo pattern formation area SP is a recess in the servo pattern formation area SP in order to prevent the master information recording body 200 and the magnetic recording medium 1 from being attracted. It is the same height as 205.

  The master information recording body 200 can be manufactured by a known method. For example, the following manufacturing method can be listed. First, an electron beam resist is applied to the surface of a silicon wafer by a spin coat method. After coating, the resist is exposed by irradiating the resist with an electron beam modulated in accordance with the servo pattern using an electron beam exposure apparatus. Thereafter, the resist is developed, unexposed portions are removed, and a resist pattern is formed on the silicon wafer.

  Next, using this resist pattern as a mask, a reactive etching process is performed on the silicon wafer to dig up portions not masked with the resist. After this etching process, the resist remaining on the silicon wafer is removed by washing with a solvent. Thereafter, the silicon wafer is dried to obtain a master for producing the master information recording body 200.

  On this master, a conductive layer made of Ni is formed to a thickness of about 10 nm by sputtering. Thereafter, a Ni layer having a thickness of several μm is formed on the master by electroforming using the master on which the conductive layer is formed as a mother die. Thereafter, the Ni layer is removed from the master, and this Ni layer is washed to obtain the base body 201 having the convex portions on the surface.

Next, a master magnetic layer 202 is formed on the surface of the substrate 201. As the master magnetic layer 202, the same magnetic layer (first magnetic layer 151 and the like) used in the magnetic recording medium 1 can be used. A master protective layer 203 is formed on the master magnetic layer 202 in the same manner as the magnetic recording medium 1. The master protective layer 203 increases the abrasion resistance of the master information recording body 200, that is, the transfer durability of the master information recording body 200, and a hard carbon film having a thickness of about several nm can be used. The master information recording body 200 can be obtained by the above manufacturing process.
The master information recording body 200 thus obtained is repeatedly used for manufacturing (magnetic transfer) of, for example, 100,000 or more magnetic recording media 1.

  Further, as shown in FIGS. 6 and 7, the fixed holder 30 penetrates the holding surface of the master information recording body 200 and the facing surface of the fixed-side magnet member 50, and on the holding surface of the master information recording body 200. The two first suction paths 31 provided with openings at the center of the attachment position of each master information recording body 200 (a total of six) are opposed to the holding surface of the master information recording body 200 and the fixed-side magnet member 50. And three second suction paths 32 having openings provided outside the attachment position of the master information recording body 200 on the holding surface of the master information recording body 200. Further, the fixed holder 30 includes an O-ring 33 attached along the circumferential direction on the holding surface of the master information recording body 200 outside the opening of the second suction path 32. In addition, when the master information recording body 200 is attached to the fixed holder 30, the master information recording body 200 is attached to one set (two) openings of the first suction path 31 on the holding surface of the master information recording body 200 of the fixed holder 30. The first through hole 200a and the second through hole 200b on the recording body 200 side are overlapped.

  On the other hand, the movable holder 40 holds the three master information recording bodies 200 on the surface facing the fixed holder 30, and the recording body holding portion provided with the movable side magnet member 60 on the back side thereof. 40a and a cylindrical body 40b provided so as to cover the periphery of the recording body holding portion 40a. The movable holder 40 further includes an O-ring 41 that is attached to the inner peripheral surface of the cylindrical body 40b along the circumferential direction and contacts the outer peripheral surface of the recording body holding portion 40a in the circumferential direction. Here, the recording body holding portion 40a and the cylindrical body 40b constituting the movable holder 40 are attached to the fixed holder 30 so as to be able to advance and retreat independently of each other, and the cylindrical body 40b serves as a coarse motion mechanism and a recording body. The holding portion 40a is used as a fine movement mechanism. Further, the end of the cylindrical body 40b on the side facing the fixed holder 30 faces and contacts the O-ring 33 provided on the fixed holder 30 over one circumference. Note that the recording member holding portion 40 a of the movable holder 40 is not provided with a suction path like the fixed holder 30. For this reason, it is not necessary to provide the first through hole 200a and the second through hole 200b in the master information recording body 200 attached to the recording body holding portion 40a.

Now, the fixed-side tilt adjusting unit 70 and the movable-side tilt adjusting unit 80 used for positioning (tilting adjustment) of each master information recording body 200 in the magnetic transfer unit 14 will be described in more detail.
FIG. 11 is a diagram illustrating an example of the configuration of the fixed side inclination adjusting unit 70 and the movable side inclination adjusting unit 80. More specifically, FIG. 11A is a view of the fixed-side inclination adjusting unit 70 in the first transfer unit 14a as viewed from above in FIG. 6, and FIG. 11B is a fixed-side inclination adjusting unit 70. It is the figure seen from the IXB direction shown to Fig.11 (a). On the other hand, FIG. 11C is a diagram of the movable side inclination adjusting unit 80 in the first transfer unit 14a as viewed from below in FIG. 6, and FIG. 11D is a diagram illustrating the movable side inclination adjusting unit 80 in FIG. It is the figure seen from the IXD direction shown in FIG. In addition, in FIG. 11 (a), (b), description of the 1st through-hole 200a and the 2nd through-hole 200b is abbreviate | omitted.

First, the fixed-side inclination adjusting unit 70 will be described with reference to FIGS. 11 (a) and 11 (b).
The fixed-side inclination adjusting unit 70 of the present embodiment includes three piezoelectric elements, that is, a fixed-side first piezoelectric element 71, a fixed-side second piezoelectric element 72, and a fixed-side third piezoelectric element 73. The fixed-side first piezoelectric element 71, the fixed-side second piezoelectric element 72, and the fixed-side third piezoelectric element 73 are fixed to the fixed holder 30 at their respective ends on the −Z direction side, and the respective ends on the Z direction side are fixed. The portion is fixed to the other surface of the master information recording body 200 (surface not provided with the servo pattern formation region SP). The fixed first piezoelectric element 71, the fixed second piezoelectric element 72, and the fixed third piezoelectric element 73 are arranged at the vertices of an equilateral triangle centered on the center of the disk-shaped master information recording body 200. ing. In the present embodiment, each of the fixed-side first piezoelectric element 71, the fixed-side second piezoelectric element 72, and the fixed-side third piezoelectric element 73 functions as a first elastic member.

  In the present embodiment, as described above, the diameter of the master information recording body 200 is set to be larger than the diameter of the magnetic recording medium 1 superimposed thereon. The fixed-side first piezoelectric element 71, the fixed-side second piezoelectric element 72, and the fixed-side third piezoelectric element 73 that constitute the fixed-side inclination adjusting unit 70 are arranged so that the master information recording body 200 faces the magnetic recording medium 1. It is supported on the outer side (outside the outer end 1b (see FIG. 3)). In the following description, the surface of the magnetic recording medium 1 that is in contact with the surface on which the servo pattern forming region SP of the master information recording body 200 held by the fixed holder 30 is provided is referred to as the first surface 1A. Called. In addition, when the first surface 1A is divided into three parts in a fan shape with the center of the magnetic recording medium 1 as an axis, a region on the fixed side first piezoelectric element 71 side is referred to as a first surface first region 1Aa. The region on the second piezoelectric element 72 side is called a first surface second region 1Ab, and the region on the fixed third piezoelectric element 73 side is called a first surface third region 1Ac.

Next, the movable side inclination adjusting unit 80 will be described with reference to FIGS. 11 (c) and 11 (d).
The movable-side inclination adjusting unit 80 of the present embodiment includes three piezoelectric elements, that is, a movable-side first piezoelectric element 81, a movable-side second piezoelectric element 82, and a movable-side third piezoelectric element 83. The movable side first piezoelectric element 81, the movable side second piezoelectric element 82, and the movable side third piezoelectric element 83 have a movable holder 40 (actually, a recording body holding portion shown in FIG. 40a), and the respective ends on the −Z direction side are fixed to the other surface of the master information recording body 200 (the surface on which the servo pattern formation region SP is not provided). Further, the movable first piezoelectric element 81, the movable second piezoelectric element 82, and the movable third piezoelectric element 83 are arranged at the vertices of an equilateral triangle having the center of gravity of the center of the disk-shaped master information recording body 200. ing. In the present embodiment, each of the movable side first piezoelectric element 81, the movable side second piezoelectric element 82, and the movable side third piezoelectric element 83 functions as a second elastic member.

  In the present embodiment, as described above, the diameter of the master information recording body 200 is set to be larger than the diameter of the magnetic recording medium 1 superimposed thereon. The movable-side first piezoelectric element 81, the movable-side second piezoelectric element 82, and the movable-side third piezoelectric element 83 that constitute the movable-side inclination adjusting unit 80 are arranged so that the master information recording body 200 faces the magnetic recording medium 1. It is supported on the outer side (outside the outer end 1b (see FIG. 3)). In the following description, the surface of the magnetic recording medium 1 that is in contact with the surface on which the servo pattern formation region SP of the master information recording body 200 held by the movable holder 40 is provided is referred to as the second surface 1B. Called. In addition, when the second surface 1B is divided into three equal parts in a fan shape with the center of the magnetic recording medium 1 as an axis, a region on the movable side first piezoelectric element 81 side is referred to as a second surface first region 1Ba. A region on the second piezoelectric element 82 side is called a second surface second region 1Bb, and a region on the movable third piezoelectric element 83 side is called a second surface third region 1Bc.

  In the present embodiment, the fixed-side first piezoelectric element 71, the movable-side first piezoelectric element 81, the fixed-side second piezoelectric element 72, and the movable-side second piezoelectric element are sandwiched between the two master information recording bodies 200. 82, the fixed third piezoelectric element 73 and the movable third piezoelectric element 83 are arranged to face each other. Accordingly, in one magnetic recording medium 1, the first surface first region 1Aa, the second surface first region 1Ba, the first surface second region 1Ab, the second surface second region 1Bb, and the first surface third region. 1Ac and 2nd surface 3rd area | region 1Bc have the relationship used as the front and back, respectively.

  Here, the fixed-side first piezoelectric element 71, the fixed-side second piezoelectric element 72 and the fixed-side third piezoelectric element 73 that constitute the fixed-side inclination adjusting unit 70, and the movable-side first piezoelectric element 71 that constitutes the movable-side inclination adjusting unit 80. Each of the first piezoelectric element 81, the movable second piezoelectric element 82, and the movable third piezoelectric element 83 has a function of expanding and contracting in the Z direction according to the magnitude of the supply voltage due to the inverse piezoelectric effect. And the magnitude | size of the electric power feeding voltage with respect to each piezoelectric element can be set separately so that it may mention later.

FIG. 12 is a diagram showing an example of a control block in the surface inspection / magnetic transfer apparatus 10 shown in FIG.
The surface inspection / magnetic transfer apparatus 10 includes a controller 90 for controlling the operation of the entire apparatus. The controller 90 is input with the surface inspection result of the medium before transfer by the surface inspection unit 13, the position detection result of the medium before transfer by the position detection unit 19, and the vibration detection result of the medium before transfer by the vibration detection unit 20. It has become. The controller 90 includes a surface inspection unit 13, a position detection unit 19, a vibration detection unit 20, a robot drive unit 91 that drives the vertical articulated robot 18, and a movable holder 40 (recording body holding unit) provided in the magnetic transfer unit 14. 40a, a movable holder driving unit 92 as an example of a driving unit that drives the cylindrical body 40b), and a suction mechanism (not shown) connected to the first suction path 31 and the second suction path 32 of the fixed holder 30 are driven. The piezoelectric element that drives each of the piezoelectric elements constituting the suction drive unit 93, the magnet drive unit 94 that drives the fixed-side magnet member 50 and the movable-side magnet member 60, and the fixed-side tilt adjustment unit 70 and the movable-side tilt adjustment unit 80 A control signal is output to each drive unit 95.

  Now, a surface inspection process and a magnetic transfer process performed by the surface inspection / magnetic transfer apparatus 10 will be described with reference to FIGS. The operations described below are controlled by the controller 90. In the initial state, as shown in FIG. 6, the magnetic transfer unit 14 is in a state where the movable holder 40 is retracted in the Z direction, that is, upward with respect to the fixed holder 30, and an open space is formed between the two. It is assumed that Further, in the initial state, the piezoelectric elements constituting the three fixed-side tilt adjusting units 70 and the three movable-side tilt adjusting units 80 include the first transfer unit 14a, the second transfer unit 14b, and the third transfer unit 14c. A voltage is supplied at a predetermined set value so that the servo pattern forming surfaces of the two master information recording bodies 200 provided in each are parallel to each other. A method for determining these set values will be described later.

  As the operation starts, the arm 18 b of the vertical articulated robot 18 chucks and removes one pre-transfer medium stored in the pre-transfer medium storage unit 12, and directs the chucked pre-transfer medium toward the surface inspection unit 13. Transport. Subsequently, when the transferred pre-transfer medium is held by a chuck mechanism (not shown) provided in the surface inspection unit 13, the arm 18 b releases the pre-transfer medium chuck and retracts from the surface inspection unit 13.

  Next, the surface inspection unit 13 performs surface inspection on both sides of the held pre-transfer medium. When the inspection by the surface inspection unit 13 is completed, the arm unit 18b of the vertical articulated robot 18 moves to the surface inspection unit 13 side, and after the arm unit 18b chucks the pre-transfer medium held by the surface inspection unit 13, The inspection unit 13 releases the chuck of the pre-transfer medium.

Here, when the controller 90 determines that at least one of the surface inspection results is unacceptable, the arm unit 18b transfers the chucked pre-transfer medium toward the defective product storage unit 16. After the chuck is released and stored in the defective product storage unit 16, the chuck is retracted from the defective product storage unit 16.
On the other hand, when the controller 90 determines that both surfaces are acceptable as a result of the surface inspection, the arm unit 18 b conveys the chucked pre-transfer medium toward the magnetic transfer unit 14. The arm portion 18 b moves so that the pre-transfer medium held by the arm portion 18 b is sandwiched between the fixed holder 30 and the movable holder 40 in the magnetic transfer portion 14.

  During this time, the position detection unit 19 detects whether or not the pre-transfer medium held by the arm unit 18b has reached a position facing the two master information recording bodies 200 provided in the magnetic transfer unit 14. Yes. Based on the detection result of this position, the controller 90 moves the arm when the pre-transfer medium held by the arm portion 18b reaches a position facing the two master information recording bodies 200 provided in the magnetic transfer portion 14. The drive of the part 18b is stopped.

  Here, when the first pre-transfer medium is supplied to the magnetic transfer unit 14, the arm unit 18 b faces the two master information recording bodies 200 constituting the first transfer unit 14 a of the magnetic transfer unit 14. Until the pre-transfer medium is moved. Further, when the second pre-transfer medium is supplied to the magnetic transfer unit 14, the arm unit 18 b reaches a position facing the two master information recording bodies 200 constituting the second transfer unit 14 b of the magnetic transfer unit 14. The pre-transfer medium is moved. Further, when the third pre-transfer medium is supplied to the magnetic transfer unit 14, the arm unit 18 b reaches a position facing the two master information recording bodies 200 constituting the third transfer unit 14 c of the magnetic transfer unit 14. The pre-transfer medium is moved.

  The required accuracy for positioning the center of the pre-transfer medium with respect to the center of the master information recording body 200 is sufficient if it is within a range of ± 7.5 μm, more preferably ± 5.0 μm. This is because even if the servo pattern magnetically transferred to the pre-transfer medium is decentered with respect to the center of the pre-transfer medium, the magnetic head 3 follows the track T using the servo pattern after the magnetic transfer. This is because data can be read from and written to the magnetic recording medium 1.

  Further, the vibration detection unit 20 detects the magnitude of vibration of the pre-transfer medium attached to the arm unit 18b that has stopped along with the positioning. In the controller 90, the magnitude of the vibration detected by the vibration detection unit 20 is ± 1.0 μm or less in the direction parallel to the data surface of the magnetic recording medium 1, that is, the surface including the X axis and the Y axis. After that, by starting suction through the corresponding first suction path 31 (for example, in the case of the first pre-transfer medium, the first suction path 31 provided in the first transfer portion 14a), the pre-transfer is started. The pre-transfer medium is chucked on the fixed holder 30 side positioned below the medium, and the first surface 1A of the pre-transfer medium is brought into contact with the master information recording body 200 attached to the fixed holder 30. Then, after the pre-transfer medium is chucked to the fixed holder 30 side, the arm unit 18 b releases the pre-transfer medium chuck and retracts from the magnetic transfer unit 14.

  The above operation is repeated until three pre-transfer media are supplied to the magnetic transfer unit 14. As a result, the pre-transfer medium is attached to each of the first transfer unit 14a, the second transfer unit 14b, and the third transfer unit 14c constituting the magnetic transfer unit 14.

  Subsequently, in the magnetic transfer unit 14, the movable holder 40 (recording body holding unit 40 a, cylindrical body 40 b) and the movable side magnet member 60 start moving in a direction (−Z direction) approaching the fixed holder 30 side. Along with this, first, the peripheral end surface of the cylindrical body 40 b stops after abutting against the O-ring 33 provided in the fixed holder 30. Further, the recording body holding portion 40a and the movable side magnet member 60 continue to move in the direction approaching the fixed holder 30 side (−Z direction) even after the cylindrical body 40b stops, and 3 provided on the fixed holder 30. The three master information recording bodies 200 and the three master information recording bodies 200 provided in the recording body holding portion 40a of the movable holder 40 are stopped after sandwiching three pre-transfer media. At this time, the three master information recording bodies 200 attached to the fixed holder 30 are in contact with the first surface 1A of each pre-transfer medium, while the three master information recording bodies 200 attached to the movable holder 40 are in contact. The second surface 1B of each pre-transfer medium comes into contact. The stop position of the recording body holding unit 40a is determined in advance, and as a result, in each of the first transfer unit 14a, the second transfer unit 14b, and the third transfer unit 14c, the two master information recording bodies 200 and A preset light load is applied to one pre-transfer medium. At this time, an O-ring 33 provided on the fixed holder 30 and an O-ring 41 provided on the cylindrical body 40b are used between the fixed holder 30, the recording body holding portion 40a, and the cylindrical body 40b. Thus, a closed space is formed. Subsequently, by starting suction through the three second suction paths 32, two sheets existing in the closed space in each of the first transfer unit 14a, the second transfer unit 14b, and the third transfer unit 14c are displayed. A gap existing between the master information recording body 200 and one pre-transfer medium is evacuated, and the formation surface of each servo pattern formation area SP of the two master information recording bodies 200 due to the differential pressure inside and outside the closed space. And both surfaces of one pre-transfer medium are in close contact with each other. This interval corresponds to the “clipping step”.

  Next, in each of the first transfer unit 14a, the second transfer unit 14b, and the third transfer unit 14c, the fixed-side magnet member 50 and the movable-side magnet member 60 are connected to the fixed-side magnet support unit 53 and the movable-side magnet support unit 63, respectively. And at least a half rotation while maintaining the state where the fixed magnet 51 and the movable magnet 61 are opposed to each other with the two master information recording bodies 200 and one pre-transfer medium interposed therebetween. This operation is performed synchronously in each of the first transfer unit 14a, the second transfer unit 14b, and the third transfer unit 14c.

  In each of the first transfer unit 14a, the second transfer unit 14b, and the third transfer unit 14c, before the transfer is sandwiched between the two master information recording bodies 200 while the fixed-side magnet 51 and the movable-side magnet 61 are half-rotated. In the medium, a DC magnetic field opposite to the initial magnetization step is sequentially applied in the circumferential direction by the fixed magnet 51 and the movable magnet 61. That is, a magnetic field is formed in a direction perpendicular to the surface provided with the servo pattern formation region SP of the two master information recording bodies 200 sandwiching each pre-transfer medium. Then, in the pre-transfer medium, on the first surface 1A side in contact with the master information recording body 200 on the fixed holder 30 side, the magnetization direction of the magnetic layer at the portion facing the recess 205 of the master information recording body 200 is the initial magnetization. Although the state after the process is maintained, the magnetization direction of the magnetic layer at the portion in contact with the convex portion 204 is reversed. In addition, on the second surface 1B side of the pre-transfer medium that is in contact with the master information recording body 200 on the movable holder 40 side, the magnetization direction of the magnetic layer at the portion facing the recess 205 of the master information recording body 200 is initial. Although the state after the magnetization process is maintained, the magnetization direction of the magnetic layer at the portion in contact with the convex portion 204 is reversed. In this way, the servo patterns made up of the concave / convex arrangement provided on the master information recording body 200 are transferred onto both surfaces of the pre-transfer medium as servo patterns made up of the magnetization orientation arrays. As a result, the three pre-transfer media attached to the magnetic transfer unit 14 are transferred media in which servo patterns are stored in the positioning data storage area A2. This period corresponds to the “magnetic transfer process”.

  When the magnetic transfer is completed in this way, first, the suction through the second suction path 32 is stopped to make the inside of the closed space atmospheric pressure, and then the movable holder 40 (recording body holding portion 40a, cylindrical body 40b). And the movable side magnet member 60 starts to retract to the original position. As a result, the three transferred media held by the fixed holder 30 are exposed to the outside.

  Next, the arm unit 18 b of the vertical articulated robot 18 sequentially transports the three transferred media held on the fixed holder 30 of the magnetic transfer unit 14 to the transferred medium storage unit 15. When transporting the transferred medium to the transferred medium storage unit 15, the vertical articulated robot 18 first takes out the transferred medium supplied to the first transfer unit 14a, and then supplies it to the second transfer unit 14b. The transferred medium that has been transferred is taken out. Finally, the transferred medium that has been supplied to the third transfer unit 14c is taken out. During this time, in the first transfer unit 14a, the second transfer unit 14b, and the third transfer unit 14c, the pre-transfer medium attracted to the master information recording body 200 attached to the fixed holder 30 was chucked by the arm 18b. Thereafter, the suction through the first suction path 31 is stopped to cancel the suction.

  Thereafter, by repeating the above-described procedure, removal of the pre-transfer medium, surface inspection of the pre-transfer medium, batch transfer of servo patterns to a plurality of pre-transfer media, and a plurality of transferred media on which the servo patterns are transferred Are collected in sequence.

Now, a method for determining the set value of the voltage supplied to each piezoelectric element provided in the magnetic transfer unit 14 will be described.
FIG. 13 is a flowchart showing an example of the tilt adjustment procedure of each master information recording body 200 in the magnetic transfer unit 14. Note that the tilt adjustment of the master information recording body 200 described below is performed, for example, when the master information recording body 200 attached to the magnetic transfer unit 14 is replaced, or a read signal obtained by reading a servo pattern on the transferred medium. This is executed when the S / N ratio is reduced. In the initial state, in each of the first transfer unit 14a, the second transfer unit 14b, and the third transfer unit 14c, the fixed-side first piezoelectric element 71 and the fixed-side second piezoelectric element constituting the fixed-side inclination adjusting unit 70. The applied voltage to the element 72, the fixed third piezoelectric element 73, and the movable first piezoelectric element 81, the movable second piezoelectric element 82, and the movable third piezoelectric element 83 constituting the movable tilt adjusting unit 80 are as follows. Assume that each is set to an initial value (for example, 0 V).

  First, according to the above-described procedure, one pre-transfer medium is supplied to each of the first transfer unit 14a, the second transfer unit 14b, and the third transfer unit 14c constituting the magnetic transfer unit 14, and the pre-transfer medium is servoed. The pattern is transferred collectively (step 201), and the three transferred media obtained are removed from the magnetic transfer unit 14. In the following description, the magnetic recording medium 1 magnetically transferred by the first transfer unit 14a is referred to as a first transferred medium, and the magnetic recording medium 1 magnetically transferred by the second transfer unit 14b is a second. The magnetic recording medium 1 on which the magnetic transfer has been performed by the third transfer unit 14c is referred to as a third transferred medium. Further, at this time, on each surface of the three transferred media removed, the first surface first region 1Aa, the first surface second region 1Ab, the first surface third region 1Ac, and the second surface, respectively. Assume that the surface first region 1Ba, the second surface second region 1Bb, and the second surface third region 1Bc are associated with each other.

  Next, the servo pattern of the first surface 1A in the first transferred medium obtained in step 201 is read, and the first surface first region 1Aa, first surface second region 1Ab, and first surface third region 1Ac are read. The S / N ratio (hereinafter referred to as the first medium first surface characteristic) of each read signal is acquired (step 202). Further, the servo pattern of the second surface 1B on the first transferred medium is read, and the SN of the read signal in each of the second surface first region 1Ba, the second surface second region 1Bb, and the second surface third region 1Bc is read. The ratio (hereinafter referred to as the first medium second surface characteristic) is acquired (step 203).

  Next, the servo pattern of the first surface 1A in the second transferred medium obtained in step 201 is read, and each of the first surface first region 1Aa, the first surface second region 1Ab, and the first surface third region 1Ac. The signal-to-noise ratio of the read signal (hereinafter referred to as the second medium first surface characteristic) is acquired (step 204). Further, the servo pattern of the second surface 1B in the second transferred medium is read, and the SN of the read signal in each of the second surface first region 1Ba, the second surface second region 1Bb, and the second surface third region 1Bc is read. A ratio (hereinafter referred to as second medium second surface characteristic) is acquired (step 205).

  Further, the servo pattern of the first surface 1A in the third transferred medium obtained in step 201 is read, and each of the first surface first region 1Aa, the first surface second region 1Ab, and the first surface third region 1Ac. The signal-to-noise ratio of the read signal (hereinafter referred to as the third medium first surface characteristic) is acquired (step 206). Further, the servo pattern of the second surface 1B in the third transferred medium is read, and the SN of the read signal in each of the second surface first region 1Ba, the second surface second region 1Bb, and the second surface third region 1Bc is read. The ratio (hereinafter referred to as the third medium second surface characteristic) is acquired (step 207).

  Subsequently, based on the first medium first surface characteristics obtained in step 202, a fixed-side first piezoelectric element 71 and a fixed-side second piezoelectric element provided in the fixed-side inclination adjusting unit 70 of the first transfer unit 14a. 72 and the fixed voltage of the third piezoelectric element 73 are determined (step 208). In addition, based on the first medium second surface characteristics obtained in step 203, the movable side first piezoelectric element 81 and the movable side second piezoelectric element 82 provided in the movable side inclination adjusting unit 80 of the first transfer unit 14a. Then, a voltage setting value for each of the movable third piezoelectric elements 83 is determined (step 209).

  Next, based on the second medium first surface characteristics obtained in step 204, a fixed-side first piezoelectric element 71 and a fixed-side second piezoelectric element provided in the fixed-side inclination adjusting unit 70 of the second transfer unit 14b. 72 and the fixed voltage of the third piezoelectric element 73 are determined (step 210). In addition, based on the second medium second surface characteristics obtained in step 205, the movable first piezoelectric element 81 and the movable second piezoelectric element 82 provided in the movable tilt adjusting section 80 of the second transfer section 14b. And the setting value of the voltage with respect to each of the movable side 3rd piezoelectric element 83 is determined (step 211).

  Furthermore, based on the third medium first surface characteristics obtained in step 206, the fixed-side first piezoelectric element 71 and the fixed-side second piezoelectric element 72 provided in the fixed-side inclination adjusting unit 70 of the third transfer unit 14c. And the setting value of the voltage with respect to each of the fixed side 3rd piezoelectric element 73 is determined (step 212). In addition, based on the second surface characteristics of the third medium obtained in step 207, the movable side first piezoelectric element 81 and the movable side second piezoelectric element 82 provided in the movable side inclination adjusting unit 80 of the third transfer unit 14c. And the setting value of the voltage with respect to each of the movable side 3rd piezoelectric element 83 is determined (step 213). Thus, the determination of the voltage setting value for each piezoelectric element is completed.

  In the subsequent magnetic transfer process, voltage is supplied to each piezoelectric element at the set values determined in steps 208 to 213. In this example, Step 201 to Step 213 described above correspond to the “step for adjusting for each first pattern forming body” and the “step for adjusting for each second pattern forming body”. .

  Here, the tilt adjustment of each master information recording body 200 in the magnetic transfer unit 14 will be described with an example. In the following description, the first transfer unit 14a is described as an example, but the other second transfer unit 14b and the third transfer unit 14c are individually adjusted in the same procedure.

  Further, in the following description, regarding the first medium first surface characteristic acquired in step 202, the SN ratio in the first surface first region 1Aa is referred to as a first surface first SN ratio CAa, and the first surface second region 1Ab. The SN ratio in the first surface is referred to as a second surface SN ratio CAb, and the SN ratio in the first surface third region 1Ac is referred to as a first surface third SN ratio CAc. Furthermore, regarding the first medium second surface characteristics, the SN ratio in the second surface first region 1Ba is called a second surface first SN ratio CBa, and the SN ratio in the second surface second region 1Bb is the second surface second SN ratio CBb. The SN ratio in the second surface third region 1Bc is referred to as a second surface third SN ratio CBc. In this example, it is assumed that CAa> CAb> CAc and CBa> CBb> CBc are obtained.

  In step 208, based on the first surface first SN ratio CAa corresponding to the first surface first region 1Aa, the set value of the fixed first piezoelectric element 71 corresponding to the first surface first region 1Aa is determined, and The set value of the fixed second piezoelectric element 72 corresponding to the first surface second region 1Ab is determined based on the first surface second SN ratio CAb corresponding to the first surface second region 1Ab. Based on the first surface third SN ratio CAc corresponding to the surface third region 1Ac, the set value of the fixed third piezoelectric element 73 corresponding to the first surface third region 1Ac is determined.

  Here, the set value of the voltage of the fixed first piezoelectric element 71 is the first surface first set value VAa, and the set value of the voltage of the fixed second piezoelectric element 72 is the first surface second set value VAb. The set value of the voltage of the side third piezoelectric element 73 is defined as a first surface third set value VAc. As described above, when the relationship of CAa> CAb> CAc is obtained, in step 208, each set value is determined so as to have a relationship of VAa <VAb <VAc. This reason will be described later.

  On the other hand, in step 209, the set value of the movable first piezoelectric element 81 corresponding to the second surface first region 1Ba is determined based on the second surface first SN ratio CBa corresponding to the second surface first region 1Ba. Further, based on the second surface second SN ratio CBb corresponding to the second surface second region 1Bb, the set value of the movable second piezoelectric element 82 corresponding to the second surface second region 1Bb is determined, Based on the second surface third SN ratio CBc corresponding to the second surface third region 1Bc, the set value of the movable third piezoelectric element 83 corresponding to the second surface third region 1Bc is determined.

  Here, the set value of the voltage of the movable first piezoelectric element 81 is the second surface first set value VBa, and the set value of the voltage of the movable second piezoelectric element 82 is the second surface second set value VBb. The set value of the voltage of the side third piezoelectric element 83 is set as the second surface third set value VBc. As described above, when the relationship of CBa> CBb> CBc is obtained, in step 209, each set value is determined so as to have a relationship of VBc <VBb <VBa. This reason will be described later.

  In the subsequent magnetic transfer process, the fixed first piezoelectric element 71 has the first surface first set value VAa, the fixed second piezoelectric element 72 has the first surface second set value VAb, and the fixed side third set value VAb. The piezoelectric element 73 is supplied with the first surface third set value VAc. When each set value has a relationship of VAa <VAb <VAc, the extension of each piezoelectric element in the Z direction is the largest in the fixed third piezoelectric element 73, the fixed second piezoelectric element 72, and the fixed side. The first piezoelectric element 71 decreases in order. Along with this, the pattern forming surface of the master information recording body 200 on the fixed holder 30 side supported by these piezoelectric elements is inclined from the initial state according to the extension of each piezoelectric element. . In this example, the opposing portion of the master information recording body 200 on the fixed holder 30 side is magnetic recording with respect to the first surface third region 1Ac where the SN ratio is the lowest on the first surface 1A of the first transferred medium. The medium 1 is fixed in a state of moving to the side closer to the first surface 1A (the side away from the fixing holder 30).

  The movable-side first piezoelectric element 81 has the second surface first set value VBa, the movable-side second piezoelectric element 82 has the second-surface second set value VBb, and the movable-side third piezoelectric element 83 has The second surface third set value VBc is supplied. When each set value has a relationship of VBc <VBb <VBa, the movable side first piezoelectric element 81 has the largest elongation in the Z direction of each piezoelectric element, the movable side second piezoelectric element 82, the movable side The third piezoelectric element 83 decreases in order. Along with this, the pattern formation surface of the master information recording body 200 on the movable holder 40 side supported by these piezoelectric elements is inclined from the initial state according to the extension of each piezoelectric element. . In this example, the opposing portion of the master information recording body 200 on the movable holder 40 side is magnetic recording with respect to the second surface first area 1Ba where the SN ratio is the lowest on the second surface 1B of the first transferred medium. The medium 1 is fixed in a state of moving to the side closer to the second surface 1B (the side moving away from the movable holder 40).

  Then, in the first transfer section 14a, in the state immediately before the pre-transfer medium is sandwiched between the master information recording body 200 attached to the fixed holder 30 side and the master information recording body 200 attached to the movable holder 40 side, 2 The opposing surfaces of the master information recording bodies 200 (servo pattern formation surfaces) can be brought closer to a parallel state. As a result, when the pre-transfer medium starts to come into contact with each master information recording body 200, the master information recording body 200 is damaged as a part of the pre-transfer medium locally hits the master information recording body 200. Can be suppressed. As a result, local transfer defects in the transferred medium can also be suppressed. Here, “parallel” does not indicate complete parallelism, and the gap between the servo pattern formation surfaces of the two master information recording bodies 200 arranged opposite to each other is within a range of 100 nm in the plane. It is a concept that includes what fits.

  Further, in the other second transfer portion 14b and the third transfer portion 14c, it is possible to suppress damage to the master information recording body 200 and local transfer failure in the transferred medium for the same reason. In the present embodiment, three master information recording bodies 200 are attached to each of the fixed holder 30 and the movable holder 40 to perform magnetic transfer on the three magnetic recording media 1 at a time. Only by attaching three master information recording bodies 200 to each of the holder 30 and the movable holder 40, it becomes difficult to ensure the parallelism of the two master information recording bodies 200 constituting each transfer section. ing. Therefore, in the present embodiment, by adjusting the parallelism of the two master information recording bodies 200 for each transfer unit in advance, the defects in each transfer unit and the transferred medium obtained in each transfer unit are adjusted. The occurrence of problems is avoided.

  In this embodiment, in each transfer unit, the fixed side first piezoelectric element 71 to the fixed side third piezoelectric element 73 constituting the fixed side inclination adjusting unit 70 and the movable side constituting the movable side inclination adjusting unit 80 are arranged. By arranging the first side piezoelectric element 81 to the third movable piezoelectric element 83 on the outer side of the outer end 1b of the magnetic recording medium 1, these use the fixed side magnet member 50 and the movable side magnet member 60. In the formation of the magnetic field for the magnetic recording medium 1, it does not get in the way.

  Further, in the above-described magnetic transfer process, foreign substances such as dust are likely to move along with the movement of the movable part (for example, the movable holder 40) of the magnetic transfer unit 14. When such a foreign matter adheres to the magnetic recording medium 1 supplied to the magnetic transfer unit 14, the master image recording medium 200 and one pre-transfer medium are transferred in the magnetic transfer unit 14. There is a concern that a servo pattern transfer failure in the magnetic recording medium 1 or a mechanical damage due to scratching of the master information recording body 200 and a shortened life may occur.

  Here, assuming that the amount of dust generated as a result of one movement of the movable holder 40 is the same, a plurality of (three in this example) magnetic recording media at a time as in this embodiment. When the magnetic transfer is performed collectively in one, the probability of dust adhering to one magnetic recording medium 1 is higher than in the conventional case where the magnetic transfer is performed on one magnetic recording medium 1 at a time. Can be lowered. For this reason, the foreign matter scattered by the movable part of the magnetic transfer unit 14 adheres to the pre-transfer medium, and between the two master information recording bodies 200 and one pre-transfer medium in the magnetic transfer unit 14. It is possible to suppress the occurrence of a situation of being caught between the two. Therefore, it is possible to suppress a servo pattern transfer failure in the magnetic recording medium 1, mechanical damage due to scratches on the master information recording body 200, and a reduction in lifetime.

  In the present embodiment, since magnetic transfer is performed collectively on a plurality of (three in this example) magnetic recording media 1, for example, compared with a case where magnetic transfer is performed one by one, 1 The productivity (for example, the number of output sheets per unit time) in the magnetic transfer process can be improved by the amount that it is not necessary to open and close the fixed holder 30 and the movable holder 40 for each magnetic recording medium 1.

  Furthermore, in the present embodiment, in the magnetic transfer step, each data surface of the pre-transfer medium is directed vertically and magnetic transfer is performed with the two master information recording bodies 200 sandwiching the pre-transfer medium from above and below. ing. Thus, by sandwiching the pre-transfer medium between the two master information recording bodies 200 along the direction of gravity, the pressurization to the pre-transfer medium in magnetic transfer is stabilized, in other words, transfer in magnetic transfer. Uneven distribution of pressure in the previous medium can be suppressed. Accordingly, in the present embodiment, it is possible to suppress in-plane unevenness of the magnetization intensity in the magnetically transferred servo pattern.

  Furthermore, in this embodiment, since the pre-transfer medium is supplied to the fixed holder 30 disposed below the movable holder 40, the pre-transfer medium is stably placed on the fixed holder 30 using gravity. Can be arranged. In this embodiment, since the pre-transfer medium is sucked and fixed on the fixed holder 30 side arranged below the movable holder 40, the fixed pre-transfer medium is held in a stable state. Is possible.

  In this embodiment, since the servo pattern forming surface of the master information recording body 200 attached to the movable holder 40 is directed vertically downward, dust or the like is less likely to adhere to this surface. Yes. On the other hand, in the present embodiment, the servo pattern forming surface of the master information recording body 200 attached to the fixed holder 30 faces vertically upward. Since the transfer device 10 (magnetic transfer unit 14) is arranged, even if dust or the like has fallen on this surface, the adhesion of dust to this surface is suppressed by the downflow, that is, the flow of air from above to below. It becomes possible to do.

  Further, in the magnetic transfer process described above, when the pre-transfer medium that remains in a largely vibrated state is brought into contact with the master information recording body 200, the contact surface of the master information recording body 200 is damaged by the pre-transfer medium. As a result, the life of the master information recording body 200 (the number of times it can be used for transfer) may be shortened. In particular, in the present embodiment, since the servo pattern is formed on the master information recording body 200 by unevenness, if the unevenness is missing or deformed when contacting the pre-transfer medium, the subsequent magnetic transfer In this case, transfer failure occurs. In contrast, in the present embodiment, after the supplied pre-transfer medium is positioned and stopped with respect to the master information recording body 200 provided in the magnetic transfer unit 14, the vibration of the pre-transfer medium is attenuated. In this state, the master information recording body 200 is brought into contact. Thereby, the mechanical damage of the master information recording body 200 resulting from contact with the medium before transfer and the master information recording body 200 and lifetime reduction can be suppressed.

  In the present embodiment, the fixed holder 30 is arranged below the movable holder 40 in the magnetic transfer unit 14, but the present invention is not limited to this. That is, the upper limit relationship between them may be exchanged, and the fixed holder 30 may be disposed above the movable holder 40. In the present embodiment, the pre-transfer medium is attracted to the fixed holder 30 side in the magnetic transfer unit 14, but the present invention is not limited to this, and the pre-transfer medium is attracted to the movable holder 40 side. It doesn't matter if you do. Further, in the present embodiment, the case where the magnetic transfer unit 14 performs the magnetic transfer of the servo pattern collectively to the three magnetic recording media 1 has been described. However, the present invention is not limited to this. What is necessary is just two or more sheets. Furthermore, in the present embodiment, the magnetic recording medium 1 is supplied to the magnetic transfer unit 14 and the magnetic recording medium 1 is taken out from the magnetic transfer unit 14 using the vertical articulated robot 18 one by one. However, the present invention is not limited to this, and multiple sheets may be performed together.

In this embodiment, the example in which the servo pattern is magnetically transferred to a plurality of pre-transfer media at the same time has been described. However, the present invention is not limited to this. For example, only the first transfer portion 14a is provided. The same applies to the case where the servo pattern is magnetically transferred to one pre-transfer medium.
However, in this case, it is not necessary to adjust the inclination of the two master information recording bodies 200 constituting the first transfer portion 14a, and the inclination of either one of the master information recording bodies 200 can be adjusted. If there is. More specifically, for example, the movable side tilt adjusting unit 80 is provided on the master information recording body 200 on the movable holder 40 side, while the fixed holder 30 side is directly provided with the master on the fixed holder 30 without providing the fixed side tilt adjusting unit 70. The information recording body 200 may be attached. Conversely, for example, the master information recording body 200 on the fixed holder 30 side is provided with the fixed-side tilt adjusting unit 70, while the movable holder 40 side is not provided with the movable-side tilt adjusting unit 80, and the master information recording is directly performed on the movable holder 40. The body 200 may be attached.

  In the present embodiment, the case where the two master information recording bodies 200 constituting each transfer unit are arranged up and down has been described as an example. However, the present invention is not limited to this, and each transfer unit is configured. It is also possible to apply to a mode in which the two master information recording bodies 200 are arranged in the horizontal direction.

DESCRIPTION OF SYMBOLS 1 ... Magnetic recording medium, 1A ... 1st surface, 1B ... 2nd surface, 10 ... Surface inspection and magnetic transfer apparatus, 14a ... 1st transfer part, 14b ... 2nd transfer part, 14c ... 3rd transfer part, 30 ... Fixed holder, 40 ... movable holder, 40a ... recording body holding part, 40b ... cylindrical body, 50 ... fixed side magnet member, 60 ... movable side magnet member, 70 ... fixed side tilt adjusting part, 71 ... fixed side first piezoelectric element Element: 72... Fixed side second piezoelectric element. 73... Fixed side third piezoelectric element. 80... Movable side tilt adjusting unit. 81. Third piezoelectric element, 90 ... controller, 91 ... robot driving unit, 92 ... movable holder driving unit, 93 ... suction driving unit, 94 ... magnet driving unit, 95 ... piezoelectric element driving unit, 200 ... master information recording body

Claims (8)

The first pattern forming surface of each first pattern forming body with respect to the first holding body that holds the plurality of first pattern forming bodies each having the first pattern formed thereon in the surface direction. Adjusting the inclination of each of the first pattern forming bodies,
The inclination of the pattern formation surface of each second pattern formation body with respect to the second holding body that holds the plurality of second pattern formation bodies each having the second pattern formed thereon in the surface direction. Adjusting each second pattern forming body;
The first holding body that holds the plurality of first pattern forming bodies whose inclinations are adjusted, and the second holding body that holds the plurality of second pattern forming bodies whose inclinations are adjusted. The relative movement between the plurality of first pattern forming bodies held by the first holding body and the plurality of second pattern forming bodies held by the second holding body. A step of sandwiching a plurality of magnetic recording media for recording magnetic information,
A plurality of the magnets sandwiched between a plurality of the first pattern forming bodies held by the first holding body and a plurality of the second pattern forming bodies held by the second holding body. And a step of magnetically transferring the first pattern and the second pattern to the recording medium. In the step of adjusting for each first pattern forming body, each of the first pattern forming surfaces approaches the state parallel to the facing surface of the supplied magnetic recording medium. Adjust the position of the pattern forming body,
In the step of adjusting for each second pattern formation body, the formation surface of the second pattern approaches a state parallel to the facing surface of the magnetic recording medium held by the first pattern formation body. 2. The method of manufacturing a magnetic recording medium according to claim 1, wherein the position of each second pattern forming body is adjusted. In the step of adjusting the tilt of the formation surface of the first pattern, a plurality of first pattern formation bodies are supported on the first holding body at a plurality of locations, and each of the plurality of first pattern formation bodies can be individually expanded and contracted. Adjust the amount of expansion / contraction of the elastic member 1
In the step of adjusting the inclination of the second pattern forming surface, a plurality of second pattern forming bodies are supported on the second holding body at a plurality of locations, and each of the second pattern forming bodies can be individually expanded and contracted. 3. The method of manufacturing a magnetic recording medium according to claim 1, wherein the expansion / contraction amount of each of the two expansion / contraction members is adjusted. A first holding body for holding a plurality of first pattern forming bodies each having a first pattern formed thereon, arranged in a plane direction in a state in which the orientation of the formation surface of the first pattern is aligned;
A first adjustment unit that adjusts an inclination of a formation surface of the first pattern of each of the first pattern formation bodies with respect to the first holding body for each first pattern formation body;
A second holding body that holds a plurality of second pattern forming bodies each having a second pattern formed thereon, arranged in a plane direction in a state in which the orientation of the formation surface of the second pattern is aligned;
A second adjustment unit that adjusts, for each second pattern formation body, the inclination of the second pattern formation surface of each of the second pattern formation bodies with respect to the second holding body;
By moving the first holding body and the second holding body relative to each other, the plurality of first pattern forming bodies and the second adjustment whose inclination is adjusted by the first adjusting unit A drive unit that performs driving for sandwiching a plurality of magnetic recording media that record magnetic information between the plurality of second pattern forming bodies that have been tilt-adjusted in a unit;
A plurality of first pattern forming bodies, a plurality of second pattern forming bodies, and a plurality of magnetic recording media sandwiched between the first holding body and the second holding body are sandwiched with the driving by the driving unit. A magnetic recording medium manufacturing apparatus including a magnet member arranged in this manner.   The first adjusting unit and the second adjusting unit are configured to apply a pair of the first pattern forming body and the second pattern forming body configured to sandwich one magnetic recording medium to the second pattern forming body. The formation surface of the first pattern in the first pattern formation body and the formation surface of the second pattern in the second pattern formation body are close to being parallel when the magnetic recording medium is sandwiched. 5. The apparatus for manufacturing a magnetic recording medium according to claim 4, wherein each adjustment is performed. The first adjustment unit includes a plurality of first elastic members that support the plurality of first pattern forming bodies on the first holding body at a plurality of locations, each of which can be individually expanded and contracted,
The second adjustment unit is configured by a plurality of second stretchable members that support the plurality of second pattern forming bodies on the second holding body at a plurality of locations, each of which can be individually stretched. 6. The apparatus for manufacturing a magnetic recording medium according to claim 4, wherein the apparatus is a magnetic recording medium.   The apparatus for manufacturing a magnetic recording medium according to claim 6, wherein the plurality of first elastic members and the plurality of second elastic members are formed of piezoelectric elements. A first pattern forming body on which a first pattern is formed;
A second pattern forming body on which a second pattern is formed;
A second adjustment unit that adjusts an inclination of a formation surface of the second pattern of the second pattern formation body;
By relatively moving the first pattern forming body and the second pattern forming body whose inclination is adjusted by the second adjusting unit, the first pattern forming body of the first pattern forming body A drive unit for driving to sandwich a magnetic recording medium for recording magnetic information between a pattern formation surface and the second pattern formation surface of the second pattern formation body;
A magnetic recording medium manufacturing apparatus including the first pattern forming body that sandwiches the magnetic recording medium and a magnet member that is disposed so as to sandwich the second pattern forming body as driven by the driving unit.

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