JP2012118392A - Optical scanner - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an optical scanner able to improve accuracy in light scan and widen the range of light scan.SOLUTION: The optical scanner comprises: a housing with an aperture; a movable mirror accommodated in the housing so as to be able to swing and configured to carry out scanning by reflecting light emitted from a light source; and a light transmission part sealing the aperture of the housing and transmitting the scanning light, subjected to scanning by the movable mirror, to the outside of the housing. The housing side face of the light transmission part is a concave face, and the area of the light transmission area through which the scanning light transmits is composed of a high refractive material. In the overall movable range of the movable mirror, both ends of the movable mirror face the area of part of the concave face or the area of the part of the inside face of the housing, which area continues to the area of the part of the concave face. In the area of the part of the concave face, the distance between both the ends of the movable mirror and the concave face has a fixed value. In the area of the part of the inside face of the housing, the distance between both the ends of the movable mirror and the inside face of the housing is equal to the fixed value or greater.

Description

  The present invention relates to an optical scanning apparatus that reflects and scans light emitted from a light source.

  2. Description of the Related Art Conventionally, there has been known an optical scanning device that has a movable mirror unit and scans light emitted from a light source by moving the mirror unit. Specifically, for example, an optical reflection element having a mirror part and a drive part for vibrating the mirror part, a package containing the optical reflection element and having an opening above the mirror part, and an opening of the package A light-transmitting part having a curved shape that covers the part and has a convex shape on the upper side. The package has a protruding part that protrudes upward from the periphery of the opening, and the light-transmitting part is outside the protruding part. There is known an optical scanning device in which a sealing material is inserted in a gap between a light transmission portion and a projection portion.

  In this optical scanning device, the front surface and the back surface of the light transmission part are constituted by a part of a spherical surface having a center point at the center of the mirror part. That is, it is equidistant from the center of the mirror part to arbitrary points on the front and back surfaces of the light transmission part. In addition, the light transmitting portion has no lens function, and light incident on the light transmitting portion travels straight without being refracted in the light transmitting portion (see, for example, Patent Document 1).

JP 2010-1222412 A

  However, in the optical scanning device disclosed in Patent Document 1, for example, the distance from the center of the mirror part to the back surface of the light transmission part is defined, but the distance from both ends of the mirror part to the back surface of the light transmission part is Not specified. When the inside of the optical scanning device is at atmospheric pressure, if the distance between the mirror portion and the back surface of the light transmitting portion becomes narrow, the mirror portion receives air resistance during driving, and thus the light scanning accuracy may be lowered. In addition, it is difficult to widen the light scanning range in a configuration in which the light incident on the light transmitting portion is made to travel straight.

  The present invention has been made in view of the above points, and an object of the present invention is to provide an optical scanning device capable of improving the scanning accuracy of light and widening the scanning range of light.

  The optical scanning device includes a housing having an opening, a movable mirror that is housed in a swingable manner in the housing, reflects and scans light emitted from a light source, and an opening in the housing. A light transmission part that seals and transmits the scanning light scanned by the movable mirror to the outside of the housing, and the surface of the light transmission part on the housing side is a concave curved surface, and the light A region of the transmission part through which the scanning light is transmitted is made of a high refractive material, and in the entire movable range of the movable mirror, both end portions of the movable mirror are part of the concave curved surface or the concave curved surface. The distance between both end portions of the movable mirror and the concave curved surface is constant in a partial region of the concave curved surface facing a partial region of the inner surface of the housing that is continuous with the partial region of the casing. Value and is movable in a part of the inner surface of the housing. Is required for the distance of the opposite ends of the color and the housing inner surface of is the predetermined value or more.

  ADVANTAGE OF THE INVENTION According to this invention, while improving the scanning accuracy of light, the optical scanning device which can widen the scanning range of light can be provided.

1 is a cross-sectional view illustrating an optical scanning device according to a first embodiment. It is a schematic diagram which illustrates a mode that a movable mirror rock | fluctuates. It is a perspective view which illustrates the state which looked at the light transmission part from the movable mirror side. It is sectional drawing which illustrates the optical scanning device which concerns on 2nd Embodiment. It is sectional drawing which illustrates the optical scanning device which concerns on 3rd Embodiment. It is sectional drawing which illustrates the optical scanning device which concerns on 4th Embodiment. FIG. 10 is a cross-sectional view illustrating an optical scanning device according to a fifth embodiment. It is sectional drawing which illustrates the optical scanning device which concerns on 6th Embodiment. It is sectional drawing which illustrates the optical scanning device which concerns on 7th Embodiment. It is sectional drawing which illustrates the optical scanning device which concerns on 8th Embodiment.

  Hereinafter, embodiments for carrying out the invention will be described with reference to the drawings. In addition, in each drawing, the same code | symbol is attached | subjected to the same component and the overlapping description may be abbreviate | omitted.

<First Embodiment>
FIG. 1 is a cross-sectional view illustrating an optical scanning device according to the first embodiment. Referring to FIG. 1, the optical scanning device 10 includes a housing 11, a movable mirror 12, and a light transmission unit 13. The housing 11 is, for example, a box-shaped member having a rectangular planar shape, and an opening is provided on one side. A movable mirror 12 is accommodated in the housing 11. The housing 11 can be formed of, for example, ceramic, metal, resin, or the like. In the present embodiment, the horizontal direction of the housing 11 is the X direction, the vertical direction is the Y direction, and the height direction (thickness direction) is the Z direction. The external dimensions of the housing 11 can be, for example, approximately 20 mm in the vertical direction (Y direction) × 20 mm in the horizontal direction (X direction) × 10 mm in the height (Z direction).

  The movable mirror 12 is a mirror that can swing with respect to the inner bottom surface 11a of the housing 11, and has a function of reflecting and scanning light emitted from a scanning light source (not shown). In the present embodiment, as an example, the movable mirror 12 is a plate member having a rectangular shape in plan view. Further, the movable mirror 12 is, for example, held horizontally with respect to the inner bottom surface 11a of the housing 11 in the initial state, with the longitudinal direction facing the X direction and the lateral direction facing the Y direction.

  The movable mirror 12 is configured to be swingable with respect to a first axis parallel to the XZ plane that bisects the movable mirror 12 in the longitudinal direction in plan view and bisects in the thickness direction in sectional view. In FIG. 1, broken lines (three lines) passing through the center of the movable mirror 12 are the first axis. The movable mirror 12 can swing with respect to a second axis (not shown) parallel to the YZ plane that bisects the movable mirror 12 in the short direction in plan view and bisects in the thickness direction in sectional view. It is configured. The first axis and the second axis are orthogonal to each other, and the intersection of the first axis and the second axis is the center of rotation of the movable mirror 12. FIG. 1 shows a state in which the movable mirror 12 is swung from a solid line position to a broken line position with respect to a second axis (not shown).

  FIG. 2 is a schematic view illustrating how the movable mirror swings. The movable mirror 12 swings with respect to a first axis (not shown) and a second axis (not shown) as shown in FIG. 2, for example, according to a drive signal from a drive unit (not shown). The drive unit (not shown) can be realized by a drive method using, for example, electrostatic, electromagnetic, piezoelectric, heat, or the like.

  FIG. 3 is a perspective view illustrating a state where the light transmission portion is viewed from the movable mirror side. That is, in FIG. 3, the light transmission part 13 is drawn upside down from FIG. As shown in FIG.1 and FIG.3, the light transmissive part 13 is a member whose planar shape is a rectangular shape, for example, and the recessed part is provided in one side. The light transmission unit 13 is fixed to the opening of the housing 11 with an adhesive or the like, seals the opening of the housing 11, and transmits the scanning light scanned by the movable mirror 12 to the outside of the housing 11. In the light transmission portion 13, the first surface 13a is a flat surface, the second surface 13b is a concave curved surface, and the light transmission portion 13 functions as a lens. In the present embodiment, the second surface 13b is a part of a spherical surface. That is, the radius of curvature of the second surface 13b is constant.

  The light transmission unit 13 transmits light emitted from a scanning light source (not shown) provided outside the optical scanning device 10 to the inside of the housing 11 and emits light emitted from the scanning light source (not shown). Is made of a material that transmits the scanning light reflected and scanned by the movable mirror 12 to the outside of the housing 11. For example, glass or plastic having a refractive index n = 1.43 to 2.14 can be used as the material of the light transmitting portion 13, but it is preferable to use a high refractive material. In the present application, a material having a refractive index n ≧ 2 is a high refractive material. As an example of the high refractive material, a ceramic lens having a refractive index n = 2.0 can be cited.

  In FIG. 1, A indicates a region facing both ends of the movable mirror 12 on the second surface 13b of the light transmitting portion 13 when the movable mirror 12 is swung within the entire movable range (hereinafter, referred to as “A”). , Region A). B indicates a region facing both ends of the movable mirror 12 on the inner surface 11b of the housing 11 when the movable mirror 12 swings within the entire movable range (hereinafter referred to as region B). The region A and the region B are continuous, and the region A and the region B are the entire movable range of the movable mirror 12. Note that a portion other than the region A of the second surface 13b of the light transmitting portion 13 can be a scanning region that transmits the scanning light scanned by the optical scanning device 10 to the outside.

  C indicates the distance between both end portions of the movable mirror 12 and the second surface 13b or the inner surface 11b of the housing 11 (hereinafter referred to as clearance C). Here, both end portions of the movable mirror 12 are points on the first axis that are farthest from the center of rotation in the movable mirror 12. The center of curvature of the second surface 13b of the light transmitting portion 13 is the same as the center of rotation of the movable mirror 12 (intersection of the first axis and the second axis), and the radius of curvature of the second surface 13b of the light transmitting portion 13 is. Is the sum of the radius of rotation of the movable mirror 12 and the clearance C in the region A. That is, the clearance C in the region A is a constant value. The clearance C in the region A can be set to about 0.5 mm, for example. The clearance C in the region B is larger than the clearance C in the region A. That is, in the areas A and B, the clearance C is a certain value or more (for example, 0.5 mm or more).

  In the optical scanning device 10, the light emitted from the scanning light source provided outside the optical scanning device 10 passes through the light transmission unit 13 and enters the movable mirror 12. The movable mirror 12 swings in a predetermined direction in accordance with a drive signal from a drive unit (not shown), and reflects and scans light incident from the scanning light source. The scanning light scanned by the movable mirror 12 passes through the light transmission unit 13 again and reaches the outside of the optical scanning device 10.

  At this time, in the areas A and B, by setting the clearance C to a certain value or more (for example, 0.5 mm or more), it becomes possible to reduce the influence of the air resistance when the movable mirror 12 is swung. The scanning accuracy of the mirror 12 can be stabilized.

  In addition, since a highly refracting material is used for the light transmitting portion 13, the light reflected by the movable mirror 12 is refracted outward when passing through the second surface 13b of the light transmitting portion 13, so that the light scanning range. Can be spread. Alternatively, when the optical scanning range is the same as the conventional one, the movable range of the movable mirror 12 can be narrowed, and the driving speed of the movable mirror 12 can be reduced. Therefore, the stress received by the movable mirror 12 during driving is reduced, and the driving reliability of the movable mirror 12 can be improved. 1 schematically shows that the scanning light scanned by the movable mirror 12 is refracted to the outside when passing through the light transmitting portion 13 and the optical scanning range is widened.

  Further, by providing a concave portion on the movable mirror 12 side of the light transmission portion 13 (by making the second surface 13b of the light transmission portion 13 a concave curved surface), the optical scanning device 10 can be reduced in size.

<Second Embodiment>
In the first embodiment, the second surface of the light transmission part is a part of a spherical surface. That is, the radius of curvature of the second surface of the light transmission part was constant. In the second embodiment, an example is shown in which the radius of curvature of the second surface of the light transmission portion is not constant but is partially different. In the second embodiment, the description of the same components as those of the already described embodiments is omitted.

  FIG. 4 is a cross-sectional view illustrating an optical scanning device according to the second embodiment. Referring to FIG. 4, the optical scanning device 20 is different from the optical scanning device 10 (see FIG. 1) in that the light transmission unit 13 is replaced with a light transmission unit 23. In the light transmission portion 23, the first surface 23a is a flat surface, the second surface 23b is a concave curved surface, and the light transmission portion 23 functions as a lens. However, unlike the second surface 13b of the light transmission part 13, the radius of curvature of the second surface 23b of the light transmission part 23 is not constant. Specifically, the radius of curvature of the region A of the second surface 23b of the light transmitting portion 23 is the same as the radius of curvature of the second surface 13b of the light transmitting portion 13, but the second surface of the light transmitting portion 23. The radius of curvature of the region other than the region A of 23b is larger than the radius of curvature of the region A.

  As in the case of the optical scanning device 10, the center of curvature of the region A of the second surface 23 b of the light transmission unit 23 is the same as the rotation center of the movable mirror 12, and the second surface 23 b of the light transmission unit 23. The radius of curvature of the region A is the sum of the radius of rotation of the movable mirror 12 and the clearance C in the region A. That is, the clearance C in the region A is a constant value. The clearance C in the region A can be set to about 0.5 mm, for example. The clearance C in the region B is larger than the clearance C in the region A. That is, in the areas A and B, the clearance C is a certain value or more (for example, 0.5 mm or more). The material and refractive index of the light transmitting portion 23 can be the same as the material and refractive index of the light transmitting portion 13.

  The optical scanning speed of the movable mirror 12 can be made constant by adjusting the radius of curvature of the region other than the region A of the second surface 23b of the light transmitting portion 23 and the refractive index of the light transmitting portion 23. The refractive index can be adjusted by appropriately selecting the material of the light transmission part 23.

  As described above, according to the second embodiment, the same effects as those of the first embodiment can be obtained, but the following effects can be further obtained. That is, the optical scanning speed of the movable mirror 12 can be made constant by adjusting the curvature radius of the region other than the region A of the second surface 23b of the light transmission unit 23 and the refractive index of the light transmission unit 23.

  Further, the optical scanning device 20 can be further downsized (thinned) than the optical scanning device 10 according to the first embodiment.

<Third Embodiment>
In the second embodiment, an example is shown in which the radius of curvature of the second surface of the light transmission portion is not constant but is partially different. In the third embodiment, an example will be described in which the first surface of the light transmission portion that is a flat surface in the second embodiment is a curved surface. In the third embodiment, the description of the same components as those of the already described embodiments is omitted.

  FIG. 5 is a cross-sectional view illustrating an optical scanning device according to the third embodiment. Referring to FIG. 5, the optical scanning device 30 is different from the optical scanning device 20 (see FIG. 4) in that the light transmission unit 23 is replaced with a light transmission unit 33. In the light transmission portion 33, the first surface 33a is a convex curved surface, the second surface 33b is a concave curved surface, and the light transmission portion 33 functions as a lens. In the light transmission part 33, the radius of curvature of the first surface 33a is smaller than the radius of curvature of the second surface 33b. The material and refractive index of the light transmitting portion 33 can be the same as the material and refractive index of the light transmitting portion 13.

  As described above, according to the third embodiment, the same effects as in the second embodiment can be obtained, but the following effects can be further obtained. That is, by making the first surface 33 a of the light transmission portion 33 a convex curved surface, the scanning light scanned by the movable mirror 12 passes through the light transmission portion 33 and the first surface 33 a and the second surface 33 a. Since the light is refracted outward at the surface 33b, the optical scanning range can be further expanded as compared with the second embodiment. Alternatively, when the optical scanning range is the same as the conventional one, the movable range of the movable mirror 12 can be made narrower than that of the second embodiment, and the drive speed of the movable mirror 12 is set to the second embodiment. Can be even slower. Therefore, the stress received by the movable mirror 12 during driving is reduced, and the driving reliability of the movable mirror 12 can be further improved as compared with the second embodiment.

<Fourth embodiment>
In the fourth embodiment, an example in which the second light transmission part is provided on the first surface side of the light transmission part of the second embodiment will be described. Note that in the fourth embodiment, descriptions of the same components as those of the already described embodiments are omitted.

  FIG. 6 is a cross-sectional view illustrating an optical scanning device according to the fourth embodiment. Referring to FIG. 6, the optical scanning device 40 is different from the optical scanning device 20 (see FIG. 4) in that a second light transmission portion 43 is provided on the first surface 23 a side of the light transmission portion 23. In the second light transmission portion 43, the first surface 43a and the second surface 43b are both convex curved surfaces, and the second light transmission portion 43 functions as a lens. In the second light transmission portion 43, the curvature radius of the first surface 43a and the curvature radius of the second surface 43b are smaller than the curvature radius of the second surface 23b of the light transmission portion 23. The material and refractive index of the second light transmission portion 43 can be the same as the material and refractive index of the light transmission portion 23, but may be set differently.

  As described above, according to the fourth embodiment, the same effects as those of the second embodiment are obtained, but the following effects are further obtained. That is, by providing the second light transmission part 43 on the first surface 23 a side of the light transmission part 23, the light transmitted through the light transmission part 23 is transmitted through the second light transmission part 43. Since the surface 43a and the second surface 43b are further refracted outward, the optical scanning range can be further expanded as compared with the second embodiment. Alternatively, when the optical scanning range is the same as the conventional one, the movable range of the movable mirror 12 can be made narrower than that of the second embodiment, and the drive speed of the movable mirror 12 is set to the second embodiment. Can be even slower. Therefore, the stress received by the movable mirror 12 during driving is reduced, and the driving reliability of the movable mirror 12 can be further improved as compared with the second embodiment.

<Fifth embodiment>
In 3rd Embodiment, the example which makes the 1st surface of a light transmissive part a curved surface was shown. In the fifth embodiment, an example in which the second light transmission part is provided on the first surface side of the light transmission part of the third embodiment will be described. Note that in the fifth embodiment, description of the same components as those of the above-described embodiment is omitted.

  FIG. 7 is a cross-sectional view illustrating an optical scanning device according to the fifth embodiment. Referring to FIG. 7, the optical scanning device 50 is different from the optical scanning device 30 (see FIG. 5) in that a second light transmission portion 43 is provided on the first surface 33a side of the light transmission portion 33. The second light transmission part 43 is as described in the fourth embodiment.

  As described above, according to the fifth embodiment, the same effects as those of the third embodiment are obtained, but the following effects are further obtained. That is, by providing the second light transmission part 43 on the first surface 33 a side of the light transmission part 33, the light transmitted through the light transmission part 33 is transmitted through the second light transmission part 43 when the first light transmission part 33 is transmitted. Since the surface 43a and the second surface 43b are refracted further outward, the optical scanning range can be further expanded as compared with the third embodiment. Alternatively, when the optical scanning range is the same as the conventional one, the movable range of the movable mirror 12 can be made narrower than that of the third embodiment, and the driving speed of the movable mirror 12 is set to the third embodiment. Can be even slower. Therefore, the stress received by the movable mirror 12 during driving is reduced, and the driving reliability of the movable mirror 12 can be further improved as compared with the third embodiment.

<Sixth embodiment>
In the sixth embodiment, an example in which a scanning light source is provided inside the housing of the optical scanning device according to the second embodiment will be described. Note that in the sixth embodiment, description of the same components as those of the above-described embodiment is omitted.

  FIG. 8 is a cross-sectional view illustrating an optical scanning device according to the sixth embodiment. Referring to FIG. 8, the optical scanning device 60 is different from the optical scanning device 20 (see FIG. 4) in that a scanning light source 61 is provided inside the optical scanning device 60. As the scanning light source 61, a laser, a light emitting diode, or the like can be used. In FIG. 8, J indicates light emitted from the scanning light source 61 in the direction of the movable mirror 12.

  As described above, according to the fifth embodiment, even if the scanning light source 61 is provided inside the optical scanning device 60, the same effects as those of the second embodiment can be obtained.

<Seventh embodiment>
In the second embodiment, the clearance C in the region A is a constant value, and the clearance C in the region B is larger than the clearance C in the region A. In the seventh embodiment, an example is shown in which the clearance C is a constant value in the entire movable range of the movable mirror. Note that in the seventh embodiment, description of the same components as those of the above-described embodiment is omitted.

  FIG. 9 is a cross-sectional view illustrating an optical scanning device according to the seventh embodiment. Referring to FIG. 9, the optical scanning device 70 is different from the optical scanning device 20 (see FIG. 4) in that a member 71 is provided on the inner bottom surface 11 a side of the inner side surface 11 b of the housing 11. The member 71 is fixed in the housing 11 with, for example, an adhesive. In the member 71, the surface 71a is a concave curved surface. In the present embodiment, the surface 71a is a part of a spherical surface. That is, the radius of curvature of the surface 71a is constant. Since the member 71 is not a portion through which light is transmitted, the member 71 may be formed of any material such as resin. The member 71 may be formed integrally with the housing 11.

  In FIG. 9, D indicates a region facing both ends of the movable mirror 12 on the surface 71a of the member 71 when the movable mirror 12 swings within the entire movable range (hereinafter referred to as region D). ). The region A and the region D are continuous, and the region A and the region D are the entire movable range of the movable mirror 12.

  The clearance C indicates the distance between both end portions of the movable mirror 12 and the second surface 23 b or the surface 71 a of the member 71. The clearance C in the region A and the clearance C in the region D are the same. The center of curvature of the second surface 23b of the light transmitting portion 23 is the same as the center of rotation of the movable mirror 12, and the radius of curvature of the second surface 23b of the light transmitting portion 23 is the clearance radius of the movable mirror 12 and the region A. It is the sum with C. The center of curvature of the surface 71a of the member 71 is the same as the center of rotation of the movable mirror 12, and the radius of curvature of the surface 71a of the member 71 is equal to the rotation radius of the movable mirror 12 and the clearance C in the region D (= clearance C in the region A). ) And the sum. Thus, the second surface 23b of the light transmission part 23 and the surface 71a of the member 71 have the same center of curvature and the same radius of curvature, and the clearance C in the region A and the clearance C in the region D are the same. That is, the area A and the area D are part of the same spherical surface, and the clearance C is a constant value in the entire movable range of the movable mirror 12. The clearance C can be set to about 0.5 mm, for example.

  As described above, according to the seventh embodiment, the same effects as those of the second embodiment are obtained, but the following effects are further obtained. That is, by making the clearance C constant in the entire movable range of the movable mirror 12, the variation in air resistance when the movable mirror 12 swings in the regions A and D is further reduced than in the second embodiment. Thus, the scanning accuracy of the movable mirror 12 can be further stabilized as compared with the second embodiment.

<Eighth embodiment>
In the second embodiment, the light transmission part is formed from a single material. In the eighth embodiment, an example in which the light transmission part is formed by a combination of a plurality of materials is shown. Note that in the eighth embodiment, description of the same components as those in the already described embodiments is omitted.

  FIG. 10 is a cross-sectional view illustrating an optical scanning device according to the eighth embodiment. Referring to FIG. 10, the optical scanning device 80 is different from the optical scanning device 20 (see FIG. 4) in that the light transmission unit 23 is replaced with a first light transmission unit 83 and a second light transmission unit 84. To do. The light transmission unit of the optical scanning device 80 includes a first light transmission unit 83 and a second light transmission unit 84, and the first light transmission unit 83 and the second light transmission unit 84 function as a lens. To do. The first surface 83a of the first light transmission part 83 and the first surface 84a of the second light transmission part 84 form one continuous plane.

  The second surface 83b of the first light transmission part 83 and the second surface 84b of the second light transmission part 84 form a continuous concave curved surface. The radius of curvature of the second surface 84b (= region A) of the second light transmitting portion 84 is the same as the radius of curvature of the region A of the second surface 23b of the light transmitting portion 23 of the second embodiment. . Further, the radius of curvature of the second surface 83b of the first light transmitting portion 83 is the same as the radius of curvature of the region other than the region A of the second surface 23b of the light transmitting portion 23 of the second embodiment. .

  Since the first light transmission portion 84 is not a scanning region that transmits the scanning light scanned by the optical scanning device 80 to the outside, it is not necessary to use a special material. As a material of the first light transmission portion 83, for example, glass or plastic having a refractive index n = 1.43 to 2.14 can be used, but when a high refractive material having a refractive index n ≧ 2 is used. Is preferred. That is, a high refractive material having a refractive index n ≧ 2 is used as the material of the first light transmitting portion 83, and the refractive index of the second light transmitting portion 84, which is an area outside the scanning region, is higher than that of the high refractive material. A low material may be used. In this way, one light transmitting portion can be formed by combining two members having different radii of curvature (the first light transmitting portion 83 and the second light transmitting portion 84).

  As described above, according to the eighth embodiment, even if two members having different radii of curvature (the first light transmission portion 83 and the second light transmission portion 84) are combined, the second embodiment and The same effect is produced.

  The preferred embodiment of the present invention has been described in detail above. However, the present invention is not limited to the above-described embodiment, and various modifications can be made to the above-described embodiment without departing from the scope of the present invention. And substitutions can be added.

  For example, in the third to eighth embodiments, the example in which the second embodiment is modified has been described. However, the first embodiment may be modified.

  Moreover, you may add a deformation | transformation like 8th Embodiment to 1st, 3rd-7th Embodiment.

  Moreover, you may add a deformation | transformation like 7th Embodiment to 1st, 3rd-6th, and 8th Embodiment.

  Moreover, you may add a deformation | transformation like 6th Embodiment to 1st, 3rd-5th, 7th, and 8th Embodiment.

  In addition, when the movable mirror is configured to be able to swing only about one axis, the concave portion of the light transmission portion can be a substantially semi-cylindrical shape, not a substantially hemispherical shape.

10, 20, 30, 40, 50, 60, 70 Optical scanning device 11 Housing 11a Inner bottom surface of housing 11b Inner side surface of housing 12 Movable mirror 13, 23, 33 Light transmitting portion 13a, 23a, 33a Light transmitting portion First surface 13b, 23b, 33b Second surface of light transmitting portion 43, 84 Second light transmitting portion 43a, 84a First surface of second light transmitting portion 43b, 84b Second light transmitting portion Second surface 61 Scanning light source 71 Member 71a Concave curved surface 83 First light transmitting portion 83a First surface of first light transmitting portion 83b Second surface of first light transmitting portion A, B, D Area C Clearance H, I Scanning light J Light emitted from the scanning light source

Claims (7)

A housing having an opening;
A movable mirror that is housed in a swingable state in the housing and reflects and scans the light emitted from the light source;
A light transmitting portion that seals the opening of the housing and transmits the scanning light scanned by the movable mirror to the outside of the housing;
The surface of the light transmission part on the housing side is a concave curved surface, and the region of the light transmission part through which the scanning light is transmitted is made of a high refractive material,
In the entire movable range of the movable mirror, both ends of the movable mirror are part of the concave curved surface, or part of the inner surface of the casing that is continuous with the partial region of the concave curved surface. Facing the area,
In a partial area of the concave curved surface, a distance between both end portions of the movable mirror and the concave curved surface is a constant value, and both end portions of the movable mirror are in a partial region of the inner side surface of the housing. An optical scanning device in which the distance between the housing and the inner surface of the housing is equal to or greater than the predetermined value.   2. The optical scanning device according to claim 1, wherein, in the concave curved surface, a curvature radius of a region excluding the partial region is larger than a curvature radius of the partial region.   A partial area on the inner surface of the casing is a concave curved surface, and a distance between both end portions of the movable mirror and the concave curved surface of a partial area on the inner surface of the casing is the constant value. The optical scanning device according to claim 1 or 2.   4. The optical scanning device according to claim 1, wherein a region outside the region through which the scanning light is transmitted of the light transmitting portion is made of a material having a refractive index lower than that of the high refractive material.   5. The optical scanning device according to claim 1, wherein an outer surface of the casing of the light transmission portion is a convex curved surface.   6. The second light transmitting portion according to claim 1, wherein a second light transmitting portion in which both surfaces through which the scanning light passes is a convex curved surface is provided on the outer surface side of the housing of the light transmitting portion. The optical scanning device described.   The optical scanning device according to claim 1, wherein the light source is provided inside the housing.

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