JP2012110981A - Vacuum suction pad - Google Patents

Abstract

PROBLEM TO BE SOLVED: To solve such a problem that it is too difficult to block gaps even with sealing materials of low-hardness elastic body and eventually prevent vacuum leakage in a case where there are plunge steps with an acute angle at concavo-convex switching parts on uneven surfaces.SOLUTION: In a vacuum suction pad, a peripheral vacuum seal wall that forms a vacuum chamber is formed with an inner seal wall and an outer seal wall that externally abuts on the inner seal wall, thus achieving a dual structure formed with double seal walls. An additional structure is provided for continuously supplying liquid between the inner seal wall and outer seal wall, so that a function that forms liquid seal walls is provided.

Description

  The present invention relates to a vacuum suction pad that adsorbs to an uneven surface.

In the suction to the uneven surface of the vacuum suction pad, since the contact surface seal of the suction pad cannot completely follow the uneven surface of the suction surface, a gap is easily formed between the suction surface and the contact surface seal, There existed a subject that the attraction | suction force in a to-be-adsorbed surface fell by a vacuum leak. For this reason, measures have been taken such as forming the contact surface sealing material with a low hardness elastic body and increasing the flow rate of vacuum suction.
However, in the uneven surface having an acute drop in the uneven surface switching portion of the attracted surface, the vacuum leakage at the time of adsorption is large, and it is difficult to prevent the vacuum leak and maintain the attracting force on the attracted surface. For this reason, various improvements and inventions have been attempted, such as changes in contact surface sealing material and shape as disclosed in the following patent publications.
Still, there is no vacuum suction pad with a contact seal structure that closes the sharp gap of the unevenness switching part and maintains the vacuum suction force even at a small vacuum flow rate of several liters to several tens of liters, and it works with power saving There was a problem that the advent of a vacuum suction pad with excellent suction performance was awaited.

As the invention of the contact seal of the vacuum suction pad when the surface to be adsorbed is uneven, Japanese Patent No. 3236698 (Japanese Patent Laid-Open No. Hei 3) discloses an invention characterized by switching the hardness between the contact seal portion and the holding portion for holding it. No. 06-307200) and JP 2010-201536 PR are disclosed, and JP-A-10-299757 and JP-A-2008-238306 are disclosed in the invention characterized by using a low-hardness contact surface sealing material. Japanese Laid-Open Patent Publication No. 05-263817 and Japanese Laid-Open Patent Publication No. 2004-034195 are disclosed in the invention characterized by the shape and structure of the contact seal wall.

In Japanese Patent No. 3236698 (Japanese Patent Laid-Open No. 06-307200), a disk-shaped support plate, a substantially cylindrical ring-shaped wall portion formed on the lower surface of the support plate and having an adsorption space therein, In a suction pad structure provided with a suction pipe that is attached to the center of the support plate and communicates with the suction space, approximately two-thirds of the ring-shaped wall portion on the support plate side is a soft elastic member having a Shore C hardness of 35 to 25. In addition, approximately one third of the ground plane side is formed by a soft elastic member having a Shore C hardness of 15 to 10, and the wall is formed thicker toward the support plate so that the adsorption space has a mortar shape. .
In JP 2010-201536 A, the base portion to which a pipe from a vacuum device that evacuates the inside of the skirt portion is hermetically provided at one end portion of the bellows-like skirt portion. The large-diameter portion is provided with a disk-shaped fixing plate in which at least one or more through holes are formed, and is in contact with the other end portion of the large-diameter portion of the bellows-like skirt portion. A disc-shaped edge holder made of soft rubber in which at least one through hole is formed, and the edge holder and the fixed plate are integrally formed; An annular edge portion that is formed of a soft rubber softer than the holder and is in contact with the plate surface of the workpiece on a plane is airtightly provided.
The invention of the above disclosure adopts a two-layer structure in which an elastic body with increased hardness is stacked in order to urge the contact surface portion while ensuring the flexibility of the contact surface portion of the contact surface sealing material, Since the sealing material for the contact surface adsorbed on the surface to be adsorbed has a low hardness and an acute end structure, durability is an issue. Further, there is a problem that the production of the two-layer structure integrated seal wall is expensive.

In JP-A-10-299757, a cushioning material that is attached to a skirt portion of a support member having a suction hole with a negative pressure between the corrugated plate to be adsorbed and is in contact with the corrugated plate is made of a silicone-based elastic foam. The hardness of the C-type hardness meter when the compression rate is 50% is 1 to 20, and the surface layer of the silicone-based elastic foam has a closed cell structure or a structure in which a closed cell structure and an open cell structure are mixed. The
Further, in Japanese Patent Application Laid-Open No. 2008-238306, in the vacuum suction pad, the seal member is formed of a polymer gel and is tapered toward the tip of the suction surface side. It was an acute angle, and the tip was positioned outside the center in the width direction of the seal member fixing portion fixed to the pad substrate.
In the invention of the above disclosure as well, the sealing material has a low hardness and has problems in durability and weather resistance.

In JP-A-2004-034195, a large-diameter pad and a small-diameter pad are provided concentrically on the outer peripheral side and the inner peripheral side of the suction surface of the suction pad, and the material of the suction part of one pad is made of sponge rubber containing closed cells. And the other suction part is a bellows type, each being sucked by a separate vacuum system, and further, the distance between the suction surface of the plate-like workpiece and the suction surface of the bellows type pad 4 is determined from the sponge foam-containing sponge rubber It was made smaller than the space | interval to the adsorption surface of the sponge pad which becomes.
The invention of the above disclosure is a structure in which one suction pad of two suction pads each having a vacuum communication means is provided inside the other suction pad, and when the suction surface is uneven, the bellows type seal portion Has a problem that the vacuum leak is large and only the sponge pad part contributes to the adsorption on the uneven surface.

Japanese Patent No. 3236698 (Publication No. 06-307200)

JP 2010-201536 PR

JP-A-10-299757

JP 05-263817 A

Japanese Laid-Open Patent Publication No. 2004-034195

JP 2008-238306 PR

As described above, the low-hardness elastic contact surface sealing material is easy to make a shape along the unevenness at the time of adsorption, and there is little vacuum leakage, but the durability of the contact surface sealing material has been a problem.
Further, if the hardness of the contact seal is increased in order to increase the durability, there is a problem that the unevenness on the surface to be attracted cannot be closed at the time of contact, and there are many vacuum leaks.
Furthermore, when there is a sharp drop in the uneven switching portion on the uneven surface, there is a problem that it is difficult to prevent the vacuum leakage by closing the gap even with the sealing material of the low hardness elastic body.

The present invention manufactures a vacuum suction pad at a low cost that closes a sharp drop in the unevenness switching part of the suction surface and prevents vacuum leakage even at a low vacuum flow rate of several liters to several tens of liters. The purpose was to be able to.

The invention according to claim 1 includes a vacuum drawing hole communicating with a vacuum source on the inner side of the pad substrate, and a seal wall provided for forming a vacuum chamber in the peripheral portion of the substrate, and the surface to be attracted when contacting the surface. In the adsorbing pad, the seal wall surrounds the inner seal wall of the soft elastic body having a low hardness of about 5 to 30 degrees and the inner seal wall. The wall height is 0.5 to 2.5 mm low, and a double seal wall structure is provided with an outer seal wall of a soft elastic body having a medium hardness of about 35 to 50 degrees with a flat contact surface portion. And

The invention according to claim 2 is characterized in that the inner seal wall is provided so as to spread in an umbrella shape in the direction of the suction surface at a predetermined height from the suction pad substrate.

According to a third aspect of the present invention, the flat portion on the contact surface side of the outer seal wall is provided in contact with the back surface of the peripheral surface of the inner seal wall that spreads in the shape of an umbrella, and the outer seal wall is adsorbed on the contact surface. The contact surface flat portion presses the back surface of the contact surface peripheral edge portion that spreads in an umbrella shape of the inner seal wall and biases it toward the attracted surface side.

In the invention according to claim 4, the outer diameter of the outer seal wall that circumscribes the side surface of the inner seal wall is a predetermined length larger than the outer diameter of the peripheral surface of the inner seal wall that is widened. The contact surface flat part of the outer seal wall pushes the back surface of the peripheral surface of the contact surface that spreads in an umbrella shape of the inner seal wall and biases it toward the attracted surface side, and the contact surface flat part of the outer seal wall itself is also covered. It is characterized in that it is formed in a structure that is biased to the adsorption surface.

In the invention according to claim 5, a part of the outer seal wall with which the open portion of the umbrella of the inner seal wall abuts is cut out, and the remaining contact surface portion of the outer seal wall is provided flat. It is characterized by.

In the invention according to claim 6, a ring-shaped water retaining elastic body provided between the inner seal wall and the outer seal wall so as to surround the inner seal wall is held, and the water retaining elastic body is contracted by the contact surface adsorption. The liquid discharged from the liquid forms a third seal wall made of liquid between the inner seal wall and the outer seal wall.

In the invention according to claim 7, the water-retaining elastic body is provided with a liquid supply means, which absorbs the liquid by the contracting action of the elastic body at the contact surface and the expanding action of the elastic body at the separation surface. It is characterized by having a continuous operation function of forming a liquid seal wall by holding it in the water-retaining elastic body and discharging it to the contact surface side by contraction.

According to the first aspect of the present invention, the inner seal wall having a high wall height in adsorption contacts the surface to be adsorbed before the outer seal wall, and the inner seal wall has low hardness and low resilience. It can be easily adsorbed on the surface. Due to the suction of the inner seal wall, the outer seal wall of medium hardness having a high repulsive force urged from the suction pad substrate behind can also be attracted to the uneven surface. The outer seal wall is compressed and retracted between the suction surface and the suction pad substrate. However, since the repulsive force is high at medium hardness, the outer sealing wall balances with the compressive force at a predetermined height and stops the contraction. When the suction pad substrate that receives the contact surface biasing force stops at a predetermined height from the surface to be suctioned, an excessive force applied to the inner seal wall that is low in hardness and soft but inferior in durability can be prevented. The outer seal wall is adjacent to the outside of the inner seal wall and is provided in a ring shape so as to surround the inner seal wall, thereby protecting the inner seal wall of low hardness from the outside.
A soft material having a low hardness of the inner seal wall can block a gap between the concave and convex surfaces at an acute depression of the convex and concave switching portion of the concave and convex surfaces.
In addition, since the contact surface portion of the outer seal wall is flat and elastic, the urging force is averaged by the surface at the time of contact, and the durability of the outer seal wall is increased, and the contact surface portion makes the surface uneven. It is possible to prevent vacuum leakage by closing the gap.
Adjacent double seal structures with different properties and structures each play a good role, while the inner seal wall is protected by the outer seal wall, and the inner seal wall also closes the sharp gap at the unevenness switching part. Double vacuum leakage can be prevented.

According to the second aspect of the invention, the inner seal wall is provided with a peripheral edge portion of the inner seal wall extending in an umbrella shape. The seal wall is not caught inside and can be adsorbed in a stable shape.
A stable contact surface posture can increase the adsorption force on the contact surface.

According to the invention of claim 3, since the flat surface of the outer seal wall contacts the outer peripheral surface of the inner seal wall, the surface of the inner seal wall is soft and low in hardness. The outer peripheral portion is urged to the concavo-convex surface by the flat contact surface portion of the outer seal wall, and the gap of the sharply depressed portion of the concavo-convex switching portion of the surface can be closed by the soft inner seal wall to prevent vacuum leakage.

According to the fourth aspect of the present invention, the flat contact surface portion of the outer seal wall is in contact with the peripheral edge portion of the inner seal wall and urges the outer peripheral portion of the contact surface in the surface direction to adhere to the uneven surface. In addition to enhancing the properties, the flat surface itself of the outer seal wall is also urged by the uneven surface.
The seal wall has a two-layer structure in which the inner seal wall and the outer seal wall overlap each other on the vacuum chamber side, and a double-structured seal wall having the outer seal wall in contact with the inner seal wall in the outer direction. The role of the inner seal wall provided to close the gap between the sharp depressions of the surface unevenness switching portion and the double structure that contacts the surface and closes the gap between the uneven surface can prevent vacuum leakage.

According to the fifth aspect of the present invention, a part of the outer seal wall with which the open peripheral edge of the inner seal wall abuts is cut out, and the remaining contact surface portion of the outer seal wall is provided flat. It is characterized by having. The height of the outer seal wall that urges the inner seal wall can be adjusted by this notch, and by changing the urging force to the inner seal wall, the adhesion to the uneven surface and the durability of the inner seal wall are improved. Sex can be adjusted.

According to the invention which concerns on Claim 6, the 3rd seal wall which touches the to-be-adsorbed surface which consists of fluid liquids, such as water, between the said outer seal wall and the said inner seal wall can be formed. The liquid seal wall can close a sharp gap in the uneven switching portion of the uneven surface that cannot be completely closed by the continuous elastic body by adhering the liquid, thereby preventing vacuum leakage.

According to the seventh aspect of the present invention, since the liquid forming the liquid seal wall is continuously supplied by the liquid supply means, the liquid seal wall can be formed continuously.

FIG. 1 is an external view of an example of the structure of the vacuum suction pad. FIG. 2 is a cross-sectional view for explaining the first aspect. Example 1 FIG. 3 is a cross-sectional view for explaining the first aspect. (Example 2) FIG. 4 is a cross-sectional view for explaining the second to fourth aspects. (Example 3) FIG. 5 is a sectional view for explaining the second to fourth aspects. Example 4 FIG. 6 is a cross-sectional view for explaining the second to fourth aspects. (Example 5) FIG. 7 is a cross-sectional view for explaining the fifth or sixth aspect. (Example 6) FIG. 8 is a cross-sectional view for explaining the fifth or sixth aspect. (Example 7)

Examples will be described in the order of the claims.
FIG. 1 is a side external view of a vacuum suction pad example illustrated for explaining the claims of the present invention. 2 to 8 are side cross-sectional views at a substantially central portion of FIG.
The vacuum suction pad illustrated in FIG. 1 includes a vacuum joint 1 communicating with a vacuum generation source, a substrate support rod 2 on which the vacuum joint is screwed, a substrate 2-1, and a seal wall provided at the peripheral edge of the substrate. 3 and 4. In general, the vacuum joint 1 is provided by being screwed to the substrate 2-1.

FIG. 2 explains Example 1 of Claim 1.
In FIG. 2, the periphery of the substrate 2-1 fixed to the vacuum communication hole 2-2 formed in the substrate support rod 2 surrounds the vacuum chamber 8, and the seal holders 6, 7 and the substrate 2. The inner seal wall 4 is attached to the -1. The inner seal wall 4 is a soft elastic body having a low hardness of about 5 to 30 degrees, and the outer seal wall 3 provided surrounding the inner seal wall 4 is a soft elastic body having a medium hardness of about 35 to 50 degrees.
Further, as shown in FIG. 2, the wall height of the inner seal wall 4 is set higher by about 0.5 to 2.5 mm than the wall height of the outer seal wall 3. Due to the evacuation from the vacuum communication hole 2-2, the inner seal wall 4 that is in contact with the surface can be easily vacuum-adsorbed to the uneven surface because the contact surface reaction force is low. The substrate 2-1 formed with the vacuum chamber 8 by the suction of the inner seal wall 4 and urged in the contact surface direction acts to urge the outer seal wall 3 from the back surface to the concavo-convex surface for adsorption. The seal wall 4 and the outer seal wall 3 are compressed by vacuum suction, and the substrate 2-1 sinks to a predetermined height of the stopper 7 where the suction force and the reaction force are balanced to maintain the suction posture.
The medium-hard outer seal wall 3 protects the low-hard inner seal wall 4 from the outer peripheral side, and prevents an excessive compressive force from being applied to the inner seal wall 4 together with the stopper 7, The entire surface of the flat portion is in contact with the concavo-convex surface to prevent vacuum leakage. The inner seal wall 4 that is soft and easily along the unevenness and the tough outer seal wall 3 are closely adjacent to each other, and are provided in a configuration that makes use of their respective characteristics.

In the first embodiment, the second embodiment illustrated in FIG. 3 is provided with a rounded peripheral edge section at the tip of the contact surface of the inner seal wall 4. According to the hardness of the inner seal wall, a rounded seal wall can be used as shown in FIG.

FIG. 4 shows an embodiment according to claims 2 to 4.
In FIG. 4, it is provided in the same structure as Example 1 except that the contact-surface peripheral part of the said inner seal wall 4 is extended outside in the shape of an umbrella. Since the inner seal wall 4 is provided with the peripheral edge portion of the inner seal wall spreading in an umbrella shape, the peripheral edge portion of the inner seal wall 4 is located on the inner side even when the inner seal wall 4 is inclined and not parallel to the attracted surface. And can be adsorbed in a stable shape.
Further, the flat part of the contact surface of the outer seal wall 3 is provided in contact with the back surface of the contact surface peripheral edge of the inner seal wall 4 which spreads in the shape of an umbrella. The flat portion of the contact surface of the outer seal wall 3 is provided so as to urge the peripheral surface of the contact surface of the inner seal wall 4 from the back surface to enhance the adhesion on the uneven surface.
Further, since the outer diameter of the outer seal wall 3 circumscribing the side surface of the inner seal wall 4 is larger than the outer diameter of the widened peripheral portion of the inner seal wall 4, the outer seal wall 3 is The structure is such that the umbrella-shaped peripheral edge spreading toward the contact surface side of the inner seal wall 4 is urged against the contact surface, and the flat surface of the contact surface is also urged against the surface.
If the tip of the peripheral edge of the inner seal wall 4 that opens in an umbrella shape has an acute angle, even if the inflowing air flow is caused by a minute gap of about 0.5 mm or less, the tip of the peripheral edge of the inner seal wall 4 The acute cornea is sucked and urged by the inflowing air flow, can close the gap of the sharp depression of the uneven surface switching portion of the uneven surface, and can increase the adsorption force.

FIG. 5 is also an embodiment according to claims 2 to 4 and is a view showing that the peripheral section of the inner seal wall 4 spreading in an umbrella shape in the direction of the contact surface in FIG. 4 is not limited to an acute angle. As in the third embodiment, the inner seal wall 4 is provided such that the peripheral edge portion of the inner seal wall extends in an umbrella shape. Therefore, even when the inner seal wall 4 is inclined and not parallel to the attracted surface, the inner seal wall 4 is provided. The peripheral edge of the contact surface 4 is not caught inside and can be adsorbed in a stable shape.
Further, the flat part of the contact surface of the outer seal wall 3 is provided in contact with the back surface of the inner seal wall 4 in the direction opposite to the contact surface opened in an umbrella shape. The flat surface of the contact surface is provided so as to urge the peripheral surface of the contact surface of the inner seal wall 4 from the back surface to improve the adhesion on the uneven surface.
Further, since the outer diameter of the outer seal wall 3 circumscribing the side surface of the inner seal wall 4 is larger than the outer diameter of the peripheral surface of the inner seal wall 4 where the inner seal wall 4 spreads, the outer seal wall 3 is provided in a structure in which an umbrella-shaped peripheral edge that spreads toward the contact surface side of the inner seal wall 4 is contact-biased, and the flat surface of its own contact surface is also contact-biased.
With this structure, it is possible to close the gap of the sharp depression of the uneven surface switching portion of the uneven surface and increase the attracting force.

FIG. 6 shows an embodiment according to claim 5, in which a part of the flat portion of the outer seal wall 3 that is in contact with the peripheral edge portion of the inner seal wall 4 that spreads in an umbrella shape is cut out.
This notch changes the height in the direction of the substrate 2-1 to urge the peripheral edge of the contact surface where the flat portion of the outer seal wall 3 spreads in an umbrella shape when the contact surface is adsorbed. The contact surface pressing force to be adjusted can be adjusted.
By adjusting the urging force, the durability of the inner seal wall 4 can be enhanced while maintaining the adhesion at the time of contact.
Further, if the tip of the peripheral edge of the inner seal wall 4 spread like an umbrella is an acute angle, even if the inflowing air flow is caused by a minute gap of about 0.5 mm or less, the tip of the peripheral edge of the inner seal wall 4 The acute cornea can be sucked and urged by the inflowing air flow to close the gap.

FIG. 7 shows an embodiment according to claims 6 and 7.
A water retaining elastic body 5 capable of containing a fluid such as water having a predetermined width and a predetermined height is wound around the inner surface of the inner sealing wall 4 in a ring shape, and the outer sealing wall 3 is disposed on the outer side surface of the water retaining elastic body 5. It is provided in a ring shape.
Further, a groove having a predetermined height and a predetermined width is provided on the inner side of the ring-shaped side surface of the outer seal wall 3 or on the outer side of the ring-shaped side surface of the inner seal wall 4, and the water retaining elastic body 5 is fitted into the groove. You may wear it. Alternatively, a groove having a predetermined height and a predetermined width is provided on the outer side of the ring-shaped side surface of the inner seal wall 4 and the inner side of the ring-shaped side surface of the outer seal wall 3, and the water retaining elastic body 5 is fitted into the groove. It may be provided.
Further, in a situation where the outer side surface of the inner seal wall 4 and the inner side surface of the outer seal wall 3 are not in close contact with each other, a gap with a predetermined width is provided, and the water retaining elastic body 5 and the pad substrate 2-1 are reached. This ring-shaped gap is provided as the liquid inflow groove 5-2, and the ring-shaped gap extending from the water retaining elastic body 5 to the flat portion of the contact surface between the outer seal wall 3 is provided as the liquid outflow hole 5-3.
In addition, a predetermined number of liquid supply holes 5-1 are provided at positions where the liquid inflow grooves 5-2 provided as means for supplying liquid and the liquid inflow grooves 5-2 of the pad substrate 2-1 come into contact with each other. Is provided with a perforated structure.
The inner seal wall 4 and the outer seal wall 3 are liquid-impermeable elastic bodies, and the water-retaining elastic body 5 is a water-permeable and water-retaining elastic material that is injected from the liquid supply hole 5-1. The liquid that has flowed flows through the liquid inflow groove 5-2 and is absorbed and retained by the water retaining elastic body 5.

At the time of adsorbing the contact surface of the suction pad, the water retaining elastic body 5 contracts as the inner seal wall 4 and the outer seal wall 3 are compressed, and the contained liquid is discharged into the liquid outflow groove 5-3.
The discharged liquid travels through the liquid outflow groove 5-3 and reaches the suction surface in contact with the inner seal wall 4 and the outer seal wall 3 to form a seal wall made of liquid that blocks vacuum leakage.
Since the liquid vacuum seal wall has a discontinuous uneven shape on the uneven surface, the liquid vacuum seal wall has a fine gap of about 0.5 mm or less with an acute drop of the uneven switching portion where the seal wall of the elastic body cannot be blocked. It can block and prevent vacuum leakage.

When the suction pad is separated from the surface, the water retaining elastic body 5 expands as the inner seal wall 4 and the outer seal wall 3 expand, and the liquid inflow groove 5-2 recovers the pressure reduced by drainage. Can absorb and retain water.

The action of contraction and expansion of the inner seal wall 4 and the outer seal wall 3 at the time of adsorbing and separating the contact surface of the suction pad is caused by the water retention elasticity held between the inner seal wall 4 and the outer seal wall 3. The body 5 is contracted and expanded to perform the water absorption and drainage functions of the water retaining elastic body 5.
The action of continuous water supply and drainage utilizing the pressure drop and capillary action due to the expansion of the water retaining elastic body 5 after contraction functions as a function of continuously forming a liquid seal wall.

A drainage check valve made of a thin film may be provided in the liquid outflow groove 5-3.

FIG. 8 shows an embodiment according to claims 6 and 7.
In FIG. 8, the inner seal wall 4 is provided in the same structure as that of the sixth embodiment except that the inner seal wall 4 is provided in an umbrella shape so as to spread outward.
Since the inner seal wall 4 is provided with an umbrella-shaped peripheral surface of the inner seal wall 4, the peripheral surface of the inner seal wall 4 is not parallel to the attracted surface but is inclined and contacted. It can be adsorbed in a stable shape without being caught inside and without generating a gap with the surface to be adsorbed.
In addition, the liquid seal that has passed through the upper part of the wall film opened in an umbrella shape at the peripheral edge of the inner seal wall 4 at the time of adsorbing the contact surface enters into a minute gap of about 0.5 mm or less on the uneven surface by the inflowing air flow, A minute gap of about 0.5 mm or less can be closed to prevent vacuum leakage.
Further, if the tip of the peripheral edge of the inner seal wall 4 opened in an umbrella shape is an acute angle, even if the inflowing air flow is caused by a minute gap of about 0.5 mm or less, the tip of the peripheral edge of the inner seal wall 4 The acute cornea can be sucked and urged by the inflowing air flow to close the gap.
In the embodiment of FIG. 8, a fine gap of about 0.5 mm or less can be blocked by the two types of vacuum leakage shielding actions, ie, the shielding action of the acute cornea at the peripheral edge and the shielding action of the liquid seal. And the vacuum adsorption power can be increased.

Vacuum suction pad that acts on the surface of concrete and tiles that are extremely uneven.

DESCRIPTION OF SYMBOLS 1 Vacuum coupling 2 Board support rod 2-1 Pad board 2-2 Vacuum communication hole 3 Outer seal wall 3-1 Outer seal notch 4 Inner seal wall 5 Water retention elastic body 5-1 Liquid supply hole 5-2 Liquid inflow groove 5 -3 Liquid outflow hole 6 Seal holder 7 Seal holding and height control stopper

Claims (7)

In the suction pad, which is provided with a vacuum suction hole communicating with a vacuum source inside the pad substrate and a seal wall provided for forming a vacuum chamber at the peripheral edge of the pad substrate, The inner wall of the soft elastic body having a low hardness and the inner wall of the seal wall, the outer wall being in contact with the inner wall and the outer wall being 0.5 to 2.5 mm lower than the inner wall; A vacuum suction pad comprising a double seal wall structure with an outer seal wall of a soft elastic medium-hardness having a flat contact surface portion. 2. The vacuum suction pad according to claim 1, wherein the inner seal wall is provided so as to spread in an umbrella shape in the direction of the suction surface at a predetermined height from the substrate. The flat portion on the contact surface side of the outer seal wall is provided in contact with the back surface of the peripheral edge portion of the inner seal wall that spreads in an umbrella shape. 3. The vacuum suction pad according to claim 2, wherein the back surface of the peripheral edge of the contact surface that spreads in an umbrella shape on the inner seal wall is pressed and biased toward the suction target surface. The outer diameter of the outer seal wall circumscribing the side surface of the inner seal wall is a predetermined length larger than the widened outer diameter of the peripheral edge of the contact surface of the inner seal wall. Has a structure in which the back surface of the peripheral edge portion of the inner seal wall spread in an umbrella shape is pushed and urged toward the attracted surface side, and the flat surface itself of the outer seal wall is also urged toward the attracted surface. The vacuum suction pad according to claim 3, wherein the vacuum suction pad is formed. 3. A part of the outer seal wall with which an open portion of the umbrella of the inner seal wall abuts is cut out, and the remaining contact surface portion of the outer seal wall is provided flat. 5. The vacuum suction pad according to any one of 4 above. A ring-shaped water retaining elastic body is provided between the inner seal wall and the outer seal wall so as to surround the inner seal wall, and the liquid discharged from the water retaining elastic body due to contraction during contact surface adsorption The vacuum suction pad according to any one of claims 1 to 5, wherein a third seal wall is formed between the seal wall and the outer seal wall so as to be in contact with the surface to be sucked made of liquid. The water retention elastic body is provided with a liquid supply means, and absorbs liquid and holds it in the water retention elastic body by the contraction action of the elastic body at the contact surface and the expansion action of the elastic body at the separation surface, The vacuum suction pad according to claim 6, wherein the vacuum suction pad is provided with a continuous operation function of forming a liquid seal wall by discharging to the contact surface side by contraction.