JP2012097892A5 - - Google Patents

Download PDF

Info

Publication number
JP2012097892A5
JP2012097892A5 JP2011032991A JP2011032991A JP2012097892A5 JP 2012097892 A5 JP2012097892 A5 JP 2012097892A5 JP 2011032991 A JP2011032991 A JP 2011032991A JP 2011032991 A JP2011032991 A JP 2011032991A JP 2012097892 A5 JP2012097892 A5 JP 2012097892A5
Authority
JP
Japan
Prior art keywords
halogen
containing gas
gas supply
shock wave
external device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2011032991A
Other languages
English (en)
Japanese (ja)
Other versions
JP2012097892A (ja
JP5724438B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from JP2011032991A external-priority patent/JP5724438B2/ja
Priority to JP2011032991A priority Critical patent/JP5724438B2/ja
Priority to PCT/JP2011/070336 priority patent/WO2012046533A1/ja
Priority to EP11830466.6A priority patent/EP2626615A4/en
Priority to KR1020137010336A priority patent/KR20130079553A/ko
Priority to US13/878,292 priority patent/US20130221024A1/en
Priority to TW100136314A priority patent/TWI441998B/zh
Publication of JP2012097892A publication Critical patent/JP2012097892A/ja
Publication of JP2012097892A5 publication Critical patent/JP2012097892A5/ja
Publication of JP5724438B2 publication Critical patent/JP5724438B2/ja
Application granted granted Critical
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2011032991A 2010-10-08 2011-02-18 ハロゲン含有ガス供給装置及びハロゲン含有ガス供給方法 Active JP5724438B2 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2011032991A JP5724438B2 (ja) 2010-10-08 2011-02-18 ハロゲン含有ガス供給装置及びハロゲン含有ガス供給方法
US13/878,292 US20130221024A1 (en) 2010-10-08 2011-09-07 Halogen-containing gas supply apparatus and halogen-containing gas supply method
EP11830466.6A EP2626615A4 (en) 2010-10-08 2011-09-07 DEVICE FOR SUPPLYING HALOGEN-CONTAINING GAS AND METHOD FOR SUPPLYING HALOGEN-CONTAINING GAS
KR1020137010336A KR20130079553A (ko) 2010-10-08 2011-09-07 할로겐 함유 가스 공급장치 및 할로겐 함유 가스 공급방법
PCT/JP2011/070336 WO2012046533A1 (ja) 2010-10-08 2011-09-07 ハロゲン含有ガス供給装置及びハロゲン含有ガス供給方法
TW100136314A TWI441998B (zh) 2010-10-08 2011-10-06 A halogen-containing gas supply device and a halogen-containing gas supply method

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2010228275 2010-10-08
JP2010228275 2010-10-08
JP2011032991A JP5724438B2 (ja) 2010-10-08 2011-02-18 ハロゲン含有ガス供給装置及びハロゲン含有ガス供給方法

Publications (3)

Publication Number Publication Date
JP2012097892A JP2012097892A (ja) 2012-05-24
JP2012097892A5 true JP2012097892A5 (enExample) 2014-04-03
JP5724438B2 JP5724438B2 (ja) 2015-05-27

Family

ID=46390018

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011032991A Active JP5724438B2 (ja) 2010-10-08 2011-02-18 ハロゲン含有ガス供給装置及びハロゲン含有ガス供給方法

Country Status (1)

Country Link
JP (1) JP5724438B2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5899883B2 (ja) * 2011-01-26 2016-04-06 セントラル硝子株式会社 高圧ガスの供給方法、衝撃波減衰機構を有する機器及び高圧ガスの供給装置
US20200203127A1 (en) * 2018-12-20 2020-06-25 L'Air Liquide, Société Anonyme pour I'Etude et I'Exploitation des Procédés Georges Claude Systems and methods for storage and supply of f3no-free fno gases and f3no-free fno gas mixtures for semiconductor processes

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3424503C2 (de) * 1984-07-04 1986-05-07 Drägerwerk AG, 2400 Lübeck Druckstoß-Dämpfer in Druckgasleitungen
DE19531505B4 (de) * 1995-08-26 2006-07-06 Air Liquide Deutschland Gmbh Dosiervorrichtung zur Entnahme von Gasen aus einem Druckbehälter
US6257000B1 (en) * 2000-03-22 2001-07-10 Luping Wang Fluid storage and dispensing system featuring interiorly disposed and exteriorly adjustable regulator for high flow dispensing of gas
US20080000532A1 (en) * 2006-06-30 2008-01-03 Matthew Lincoln Wagner Low release rate cylinder package

Similar Documents

Publication Publication Date Title
ES2623776T3 (es) Sistema de soldadura y procedimiento de comunicación para un sistema de soldadura
EA201171101A1 (ru) Устройство для хранения газа под давлением
BR112014015291A2 (pt) método de suprimento de gás e aparelho de suprimento de gás
MX392456B (es) Soplete de plasma.
WO2013083662A3 (en) Ultra-high operating pressure vessel
GB202006172D0 (en) Liquid fuel production system having parallel gas generation
HK1198590A1 (en) Processes and compositions for organic rankine cycles for generating mechanical energy from heat
EP3762645A4 (en) GAS SUPPLY CONTAINER
SG168480A1 (en) Fire suppressor cylinders with enhanced bubble production
EP3733592A4 (en) HYDROGEN GAS GENERATOR BODY
MX2016005527A (es) Sistema de reduccion de oxigeno y metodo para operar un sistema de reduccion de oxigeno.
PL3504432T3 (pl) Wysokociśnieniowa pompa paliwa gazowego
EA201491122A1 (ru) Многослойный работающий под высоким давлением резервуар
EA033142B1 (ru) Резервуар типа 4 для хранения сжатого природного газа
JP2012097892A5 (enExample)
EA201591084A1 (ru) Сосуд высокого давления, имеющий композиционную втулку со свариваемой металлической сопрягаемой деталью
SA518391902B1 (ar) عنصر وعاء ضغط بنائي مزدوج
IN2014CN02766A (enExample)
JP2013130205A5 (enExample)
JP2016223589A5 (enExample)
FR3041367B1 (fr) Dispositif de confinement d'une nappe de gaz naturel liquefie deversee accidentellement a la surface de l'eau
FR3016957B1 (fr) Corps d’absorption pour capsule contenant un materiau a changement de phase
WO2011028191A3 (en) Mechanical earthquake valve with orifice shut off
JP2015510572A5 (enExample)
PH12017500199A1 (en) Recording apparatus