JP2012096959A - Sf6 gas recovery equipment and method of liquefied sf6 gas - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide SF6 gas recovery equipment and an SF6 gas recovering method which enable easy and rapid purification of a mixture SF6 in a gas recovery tank.SOLUTION: The gas recovery equipment 50 includes a purity estimation device 100 including an input means 1 of inputting measured weight data 11, measured temperature data 12 and gas-phase purity data 13 on SF6 stored in an SF6 recovery tank; database 2 storing a linear correlation 23 acquired with the preliminarily measured gas-phase purity data 21 and liquid-phase purity data 22 as coordinate axes when the SF6 stored in the SF6 recovery tank is a mixture 56; and a calculation processing means 3 of calculating weights of the gas phase and the liquid phase SF6 (56A, 56B) from the measured weight data 11 and the measured temperature data 12, estimating the purity 26 of the liquid phase SF6 from the gas-phase purity data 13 by using the linear correlation 23 stored for the mixture 56 and calculating the purity 27 of the mixture 56 from the estimated purity 26 of the liquid phase SF6 and the measured weight data 11.

Description

  The present invention relates to an SF6 gas recovery facility for liquefied SF6 gas and an SF6 gas recovery method thereof.

  2. Description of the Related Art Conventionally, a gas-insulated electrical device such as a gas circuit breaker used in a receiving / transforming facility having a high voltage has a configuration in which an insulating gas having an electrical insulating effect is enclosed in the device in order to reduce the size.

  As this insulating gas, sulfur hexafluoride gas (hereinafter abbreviated as SF6 gas) that is easy to handle and has excellent insulating performance is used, and a gas circuit breaker used in a power receiving / transforming facility, Used in electrical equipment such as transformers and accelerators. Hereinafter, an apparatus using such SF6 gas is referred to as an SF6 gas using apparatus.

  Although this SF6 gas has excellent electrical insulation, it has a global warming potential equivalent to 23,900 times that of carbon dioxide gas. When released into the atmosphere, it contributes to global warming. As a main purpose, at the time of inspection or removal of the SF6 gas using equipment, the used SF6 gas is collected or the collected used SF6 gas is re-encapsulated and the SF6 gas using equipment is used.

  At this time, the collected used SF6 gas is required to have a purity that satisfies the insulation performance in order to re-enclose it in the SF6 gas-using device. As for the purity, generally, the volume percent concentration is 97 vol% or more (“Electricity Joint Research Society“ SF6 Gas Handling Standards for Electricity ”, Electricity Joint Research No.54, No.3, hereinafter referred to as the standard”). ) It is defined as a control value, and the volume percentage concentration of the recovered SF6 gas is appropriately controlled so as to maintain the control value or more. Hereinafter, the volume percentage concentration of SF6 gas is abbreviated as purity (%) of SF6 gas, and the specified value of purity of SF6 gas is referred to as management specified value.

  The above-described SF6 gas recovery facility has conventionally been constituted by an SF6 gas recovery device that recovers used SF6 gas from an SF6 gas use device and an SF6 gas recovery tank such as a cylinder that stores the recovered SF6 gas.

  In addition, the SF6 gas recovery device was mixed from outside air during the vacuum recovery of SF6 gas purification equipment and SF6 gas purification equipment such as SO2, HF, etc. generated by deterioration of the internal SF6 gas and SF6 gas use equipment. A gas purification device for removing and purifying moisture is connected.

  The SF6 gas recovery device has a function of extracting the used SF6 gas from the SF6 gas use device and storing it in the SF6 gas recovery tank, and a function of extracting the SF6 gas from the SF6 gas recovery tank and resealing it in the SF6 gas use device. Have both.

  The purity of the SF6 gas stored in the SF6 gas recovery tank is measured by a measuring device (not shown) connected to the SF6 gas recovery tank to determine whether it has reached 97 vol% or more of the management specified value.

  At this time, the stored SF6 gas is re-enclosed in the SF6 gas use device when the purity reaches 97 vol% or more, but when the purity does not reach 97 vol% or more, the equipment described above is used. It is purified or destroyed by a dedicated gas purifier for high purity other than the above. After the destruction, 97 vol% or more of SF6 gas is newly re-enclosed from the outside into the gas recovery tank or the SF6 gas using device.

  By the way, in the above-mentioned SF6 gas recovery equipment, the used SF6 gas extracted from the SF6 gas use equipment to the gas recovery equipment is recovered in the SF6 gas recovery tank as SF6 gas recovery equipment and gas recovery equipment. The liquefied SF6 gas recovery equipment is used in the case of recovering to the SF6 gas recovery tank after being liquefied by the above.

  Among these, liquefied SF6 gas (hereinafter abbreviated as liquefied SF6 gas) is reduced in volume to about 1/150 compared with the gas state when recovered in the tank, and the SF6 gas recovery tank. Since the volume itself can be reduced, in recent years, when the SF6 gas to be used becomes a heavy object, a liquefied SF6 gas recovery facility has been applied. Thereby, the effect which can reduce the magnitude | size of the whole liquefied SF6 gas recovery equipment can be show | played.

  When the SF6 gas liquefied using the above-described liquefied SF6 gas recovery equipment is recovered in the SF6 gas recovery tank, the SF6 gas in the gas recovery tank is generally stored in a state of a mixture of a gas phase and a liquid phase. The Hereinafter, SF6 in a gas phase or a liquid phase in the gas recovery tank is referred to as a gas phase SF6 or a liquid phase SF6, respectively.

  In the recovery of SF6, the recovery rate of SF6 with a capacity of 97% or more of the enclosed SF6 gas is defined by the above standards. In order to recover 97 vol% or more of the encapsulated SF6 gas, the inside of the SF6 enclosing facility is evacuated and vacuumed. In the SF6 enclosure / recovery facility, the negative pressure particularly causes a slight amount of air in the atmosphere to be mixed into the SF6, which causes a decrease in the purity of the recovered SF6 gas.

  For this reason, the purity of the gas phase SF6 and the liquid phase SF6 is different because the contents of impurities such as air contained in the gas phase SF6 and the liquid phase SF6 in the gas recovery tank are different. In order to manage the purity of the SF6 gas, it is necessary to measure and manage the purity of each of the gas phase SF6 and the liquid phase SF6.

  At this time, the purity of the gas phase SF6 can be easily measured, whereas the purity measurement of the liquid phase SF6 becomes difficult due to the complicated relationship such as the liquid density due to the temperature change, and no measuring means has been established. The purity of the liquid phase SF6 must be measured after vaporization.

However, such purity measurement of the liquid phase SF6 requires sampling of the measurement SF6 gas, a vaporization method, temperature control of the vaporized gas, and the like, so that a lot of time and advanced measurement techniques are required for the measurement and cannot be practically used. Therefore, the purity measurement of the liquid phase SF6 recovered in the gas recovery tank at the SF6 gas recovery work site is difficult and problematic.

  Further, in the case of a liquefied gas in which gas phase SF6 and liquid phase SF6 are mixed, calculating the total amount of liquefied gas complicates the relationship between vapor pressure, gas density, and liquid density, and the gas phase purity and liquid phase purity of SF6 are complicated. However, the gas amounts of the liquid phase SF6 and the liquid phase SF6 cannot be determined, and it has been difficult to measure the gas phase, liquid phase, purity and mass at the time of mixing in the gas recovery tank.

  Further, in the re-encapsulation of the recovered liquefied SF6 gas, there is a possibility that low-purity SF6 gas is encapsulated. For this reason, establishment of a means capable of easily and economically estimating the purity of the liquid phase SF6 in the SF6 gas recovery tank has been demanded.

  An object of the present invention is to provide an economical SF6 gas recovery facility for liquefied SF6 gas that can quickly purify the liquid phase SF6 recovered in the gas recovery tank with a simple configuration, and that can downsize the entire SF6 gas recovery facility. There is.

  Another object of the present invention is to provide a method for recovering SF6 gas of liquefied SF6 gas, which is a liquefied SF6 gas, which can purify the mixture SF6 recovered in the gas recovery tank easily, economically and quickly. is there.

  The SF6 gas recovery facility for liquefied SF6 gas according to the present invention includes an SF6 gas recovery device that recovers or recovers used SF6 gas from SF6 gas-using equipment that uses SF6 gas, and a recovered or recovered liquefied SF6 gas recovery device. An SF6 recovery tank composed of a container for storing SF6 gas as storage SF6, and a container for injecting SF6, which is a mixture of a gas phase SF6 and a liquid phase SF6, having a purity within a predetermined management regulation value, from the outside, In an SF6 gas recovery facility comprising an upper end side connected to the SF6 gas recovery device and a lower end side connected to another SF6 recovery tank connected to the lower end side of the SF6 recovery tank, the SF6 gas recovery facility is the SF6 recovery tank or other SF6 recovery tank storage SF6 measurement weight data, SF6 recovery tank measurement temperature data and Input means for inputting the measured gas phase purity data in the SF6 recovery tank of the in-recovery tank storage SF6 containing at least air as a product, and when the SF6 recovery tank storage SF6 is a mixture of the gas phase SF6 and the liquid phase SF6 , A database for storing a correlation between the gas-phase purity data in the SF6 recovery tank measured and acquired in advance and the linear correlation acquired using the liquid-phase purity data in the SF6 recovery tank as coordinate axes, and the storage SF6 in the SF6 recovery tank The gas phase in the SF6 recovery tank and the liquid phase SF6 weight are calculated from the measured weight data and the temperature data, and the gas phase in the SF6 recovery tank stored for the SF6 mixture in the SF6 recovery tank is stored for the liquid phase SF6 stored. Using the linear correlation between the purity data and the liquid phase purity data, the liquid phase SF can be calculated from the input gas phase SF6 purity data. The purity of the SF6 mixture in the SF6 recovery tank is calculated from the calculated purity of the liquid phase SF6 and the stored SF6 measurement weight data in the SF6 recovery tank, and the purity of the SF6 mixture in the SF6 recovery tank is calculated. A purity estimation device comprising: an arithmetic processing unit that determines whether the purity of the SF6 mixture is within a predetermined management regulation value, and the SF6 gas recovery device calculates the SF6 recovery calculated by the arithmetic processing unit. When it is determined that the purity of the in-tank SF6 mixture is not within a predetermined management regulation value, the gas phase SF6 of the in-SF6 collection tank mixture SF6 is liquefied and injected into a new SF6 gas recovery tank, etc. The liquid phase SF6 or the gas phase SF6 and the liquid phase SF6 of the SF6 recovery tank mixture SF6 are injected into the SF6 recovery tank.

  The SF6 gas recovery facility for liquefied SF6 gas according to the present invention also includes an SF6 gas recovery device that recovers or recovers used SF6 gas from SF6 gas-using equipment that uses SF6 gas, and recovers or recovers and liquefies. An SF6 recovery tank comprising a container for storing used SF6 gas as a storage SF6, and a container for injecting SF6, which is a mixture of a gas phase SF6 and a liquid phase SF6, having a purity within a predetermined management regulation value, from the outside. In the SF6 gas recovery facility, the upper end side is connected to the SF6 gas recovery device and the lower end side is connected to the other SF6 recovery tank connected to the lower end side of the SF6 recovery tank. SF6 measurement tank storage SF6 measurement weight data, SF6 recovery tank measurement temperature data of other SF6 recovery tanks When the SF6 recovery tank storage SF6 is a mixture of the gas phase SF6 and the liquid phase SF6, and input means for inputting the measured gas phase purity data in the SF6 recovery tank of the storage tank storage SF6 containing at least air as impurities. In addition, a database storing the correlation between the gas-phase purity data in the SF6 recovery tank and the liquid-phase purity data in the SF6 recovery tank, which are measured and acquired in advance, and the storage SF6 in the SF6 recovery tank is stored. The gas-phase and liquid-phase SF6 weights in the SF6 recovery tank are calculated from the measured weight data and temperature data, and the SF6 recovery-tank air stored for the SF6 mixture in the SF6 recovery tank is stored for the liquid-phase SF6 stored. Using the linear correlation between the phase purity data and the liquid phase purity data, the liquid phase SF6 purity data is The purity of SF6 is estimated, and the purity of the SF6 mixture in the SF6 recovery tank is calculated from the estimated purity of the liquid phase SF6 and the stored SF6 measured weight data in the SF6 recovery tank, and the SF6 recovery tank is calculated. A purity estimation device comprising: an arithmetic processing unit that determines whether the purity of the internal liquid phase SF6 is within a predetermined specified value, and the SF6 gas recovery device calculates the SF6 recovery calculated by the arithmetic processing unit. When it is determined that the purity of the liquid phase SF6 in the tank is not within the predetermined specified value, the gas phase SF6 of the SF6 recovery tank mixture SF6 is liquefied and injected into another SF6 recovery tank. The liquid phase SF6 or the gas phase SF6 and the liquid phase SF6 of the SF6 recovery tank mixture SF6 are injected into the SF6 recovery tank.

  The SF6 gas recovery facility for liquefied SF6 gas according to the present invention is characterized in that the other SF6 recovery tank includes SF6 gas purification means for purifying the gas phase SF6 in the other SF6 recovery tank.

  The SF6 gas recovery facility for liquefied SF6 gas according to the present invention is characterized in that the SF6 recovery tank and the other SF6 recovery tank are composed of a cardle made up of a plurality of connected containers.

  The SF6 gas recovery method for liquefied SF6 gas according to the present invention includes an SF6 gas recovery device that recovers or recovers used SF6 gas from an SF6 gas use device that uses SF6 gas, and a recovered or recovered liquefied used SF6 gas recovery device. An SF6 recovery tank composed of a container for storing SF6 gas as storage SF6, and a container for injecting SF6, which is a mixture of a gas phase SF6 and a liquid phase SF6, having a purity within a predetermined management regulation value, from the outside, In the SF6 gas recovery method in the SF6 gas recovery facility, the upper end side is connected to the SF6 gas recovery device and the lower end side is connected to another SF6 recovery tank connected to the lower end side of the SF6 recovery tank. SF of the SF6 recovery tank in which the means recovers and stores the used SF6 gas from the SF6 gas using equipment that uses SF6 gas Storage tank storage SF6 measurement weight data, SF6 recovery tank measurement temperature data and SF6 recovery tank measurement gas phase purity data of SF6 storage tank SF6 containing at least air as impurities, and the database is in the SF6 recovery tank When the storage SF6 is a mixture of the gas phase SF6 and the liquid phase SF6, the gas phase purity data in the SF6 recovery tank and the liquid phase purity data in the SF6 recovery tank that are measured and acquired in advance are acquired as coordinate axes. The calculation processing means calculates the gas phase and liquid phase SF6 weight in the SF6 recovery tank from the measured weight data and temperature data of the SF6 recovery tank storage SF6, and stores the liquid phase. For SF6, the gas phase purity data in the SF6 recovery tank and the liquid phase stored for the SF6 mixture in the SF6 recovery tank The purity of the liquid phase SF6 is estimated from the input gas phase SF6 purity data using the linear correlation of the degree data, and the estimated purity of the liquid phase SF6 and the input inside the SF6 recovery tank There is a purity estimation method for calculating the purity of the SF6 mixture in the SF6 recovery tank from the stored SF6 measurement weight data, or for determining whether the purity of the SF6 mixture in the SF6 recovery tank is within a predetermined management regulation value. When the SF6 gas recovery device determines that the purity of the SF6 mixture in the SF6 recovery tank calculated by the arithmetic processing means is not within a predetermined management regulation value, the SF6 gas recovery tank mixing is performed. The gas phase SF6 of the body SF6 is liquefied and injected into a new SF6 gas recovery tank, and the other SF6 recovery tank is the liquid phase SF6 of the other SF6 recovery tank mixture SF6 or The gas phase SF6 and the liquid phase SF6 are injected into the SF6 recovery tank.

  The SF6 gas recovery method for liquefied SF6 gas according to the present invention also includes an SF6 gas recovery device that recovers or recovers used SF6 gas from an SF6 gas-using device that uses SF6 gas, and recovers or recovers and liquefies it. An SF6 recovery tank comprising a container for storing used SF6 gas as a storage SF6, and a container for injecting SF6, which is a mixture of a gas phase SF6 and a liquid phase SF6, having a purity within a predetermined management regulation value, from the outside. In the SF6 gas recovery method in the SF6 gas recovery facility, the upper end side is connected to the SF6 gas recovery device and the lower end side is connected to another SF6 recovery tank connected to the lower end side of the SF6 recovery tank. , SF6 recovery tank in which the input means recovers and stores the used SF6 gas from the SF6 gas using equipment that uses SF6 gas SF6 recovery tank storage SF6 measurement weight data, SF6 recovery tank measurement temperature data, SF6 recovery tank measurement gas phase purity data of the SF6 recovery tank storage SF6 containing at least air as impurities, and the database is the SF6 recovery tank When the internal storage SF6 is a mixture of the gas phase SF6 and the liquid phase SF6, the diagram is obtained by using the gas phase purity data in the SF6 recovery tank and the liquid phase purity data in the SF6 recovery tank that are measured and acquired in advance as coordinate axes. The calculation processing means calculates the gas phase and liquid phase SF6 weight in the SF6 recovery tank from the measured weight data and the temperature data of the SF6 recovery tank storage SF6, and the stored liquid. Gas phase purity data in SF6 recovery tank stored for SF6 mixture in SF6 recovery tank for phase SF6 Using the linear correlation of the liquid phase purity data, the purity of the liquid phase SF6 is estimated from the input gas phase SF6 purity data, and the purity of the liquid phase SF6 estimated and the SF6 recovery tank input. Purity estimation method for calculating the purity of the SF6 mixture in the SF6 recovery tank from the stored SF6 measurement weight data in the inside, or determining whether the purity of the SF6 mixture in the SF6 recovery tank is within a predetermined management regulation value And the SF6 gas recovery device determines that the purity of the SF6 mixture in the SF6 recovery tank calculated by the arithmetic processing means is not within a predetermined management regulation value. The gas phase SF6 of the inner mixture SF6 is liquefied and injected into a new SF6 gas recovery tank, and the other SF6 recovery tank is the liquid phase SF6 of the other SF6 recovery tank mixture SF6. Alternatively, the gas phase SF6 and the liquid phase SF6 are injected into the SF6 recovery tank.

  The SF6 gas recovery method for liquefied SF6 gas according to the present invention is characterized in that the SF6 gas purification means provided with the other SF6 recovery tank purifies the gas phase SF6 in the other SF6 recovery tank.

  The SF6 gas recovery method for liquefied SF6 gas according to the present invention is characterized in that the SF6 recovery tank and the other SF6 recovery tank are a cardle formed of a plurality of connected containers.

  Since the SF6 gas recovery facility of the present invention includes the purity estimation device as described above, the liquefied SF6 gas recovered in the collection tank can be purified, and the entire facility can be miniaturized with a simple configuration.

  In addition, since the SF6 gas recovery method of the present invention includes the purity estimation method as described above, the purity of the liquid phase SF6 gas recovered in the gas recovery tank is estimated easily and quickly, and SF6 in the SF6 recovery tank is obtained. The mixture can be purified.

It is a figure which shows the outline of the SF6 gas recovery equipment which is an Example of this invention. It is a figure which shows the structure of the purity estimation apparatus of FIG. 1 with a block. It is a figure which shows the relationship between the temperature data and vapor pressure data of vapor phase SF6 in a tank used for the calculation by the purity estimation apparatus of FIG. It is the figure which represented the correlation of each purity data stored in the database of the purity estimation apparatus of FIG. 2 with the graph. It is a figure which shows the relationship between the temperature data and molar volume data of gas phase SF6 in a tank used for the calculation by the purity estimation apparatus of FIG. It is a figure which shows the example of the estimation of a liquid phase in a tank performed using the purity estimation apparatus of FIG. 2, and the purity of a mixture, or a calculation result. It is a figure which shows the example of the estimation of the purity of another liquid phase in a tank and the purity performed using the purity estimation apparatus of FIG. 2, or a calculation result. It is a figure which shows the purity estimation method of the purity of liquefied SF6 gas by the purity estimation apparatus of FIG. 2 with a flowchart. It is a figure which shows the outline in the case of forming the measurement data used with a purity estimation apparatus with a block. It is a figure which shows the detailed structure of the collection | recovery tank which stores SF6 which the SF6 gas collection | recovery installation of FIG. 1 refine | purifies. It is a figure which shows the detailed structure of the other SF6 collection | recovery tank of FIG.

  Embodiments of the present invention will be described below with reference to the drawings. In addition, the gas phase purity data in the SF6 recovery tank and the liquid phase purity data in the SF6 recovery tank stored in a database, which will be described later, are obtained by measuring a plurality of each in advance, and the correlation between these purity data is obtained. Explain that it is. Further, in the following mathematical formulas, the same components are described with the same symbols. In addition, the same components will be described below with the same reference numerals.

  As shown in FIG. 1, the gas recovery facility 50 of the present embodiment includes a purity estimation device 100 using a calculation device such as a personal computer.

  The SF6 recovery facility 50 recovers and stores the SF6 gas recovery device 53 that recovers the used SF6 gas 52 from the SF6 gas use device 51 such as a gas circuit breaker and the SF6 (54) from the SF6 gas recovery device 53. The SF6 recovery tank 55 is a container such as a cylinder.

  SF6 stored in the SF6 recovery tank 55 is stored in the gas phase SF6 (56A) only as shown in FIG. 1 (a), that is, only in the gas state, and in the SF6 gas as shown in FIG. 1 (b). SF6 liquefied by the recovery device 53 may be stored in a mixture 56 of gas phase SF6 (56A) and liquid phase SF6 (56B).

  In the purity estimation apparatus 100 of the present embodiment, SF6 liquefied by the SF6 gas recovery apparatus 53 shown in FIG. 1B is stored as a mixture 56 of gas phase SF6 (56A) and liquid phase SF6 (56B). However, the present invention can also be applied to the case where only the gas phase SF6 (56A) shown in FIG.

  As shown in FIG. 1 (b), the SF6 gas recovery facility 50 includes an SF6 gas recovery device 53 that recovers the used SF6 gas 52 from the SF6 gas use device 51 such as a gas circuit breaker. A part is liquefied and collected in the SF6 collection tank 55. At this time, the SF6 recovered in the SF6 recovery tank 55 of the SF6 recovery facility 50 is stored in the state of the mixture 56 composed of the gas phase SF6 (56A) and the liquid phase SF6 (56B).

  Actually, it is assumed that the gas phase and the liquid phase state of SF6 in the recovery tank 55 are not known at the time of each measurement by a measuring instrument to be described later, and the SF6 gas 56 of the SF6 storage tank SF6 is measured as described later. It is determined after the measurement whether the phase is only the gas SF6 gas or the mixture 56 composed of the gas phase SF6 (56A) and the liquid phase SF6 (56B).

  Therefore, here, SF6 before measurement is referred to as recovery tank storage SF6, and when the measurement reveals that it is a mixture 56 of gas phase SF6 and liquid phase SF6, the mixture of gas phase SF6 and liquid phase SF6 Called.

  Moreover, air is mixed as an impurity in the collection tank storage SF6, and the mixing amount must be specified. In addition, it is known that the in-recovery tank storage SF6 contains moisture as an impurity, but the moisture can be removed by a moisture removing device conventionally.

  In any case, it is required that the recovery tank storage SF6 containing these impurities as a whole or the purity of the liquid phase SF6 be accurately estimated for reuse.

  Regarding the gas phase SF6 of the recovery tank storage SF6, it has been conventionally known that the purity can be easily measured, but the purity of the liquid phase SF6 is not directly measured because it is difficult to directly measure the purity. It was out.

  Each measuring device (not shown) is connected to the SF6 recovery tank 55. From each of these measuring instruments, there are three measurement weight data 11 and measurement temperature data 12 of the SF6 recovery tank storage SF6, and measurement gas phase purity data 13 of the SF6 recovery tank storage SF6 gas 56 containing at least air as an impurity. Measurement data 10 is measured. From these measurements, it is determined whether the SF6 recovery tank storage SF6 is only the gas phase SF6 (56A) or the mixture 56 described above, as will be described later.

  Hereinafter, the purity estimation apparatus 100 provided in the gas recovery facility 50 of the present embodiment will be described in detail with reference to FIG.

  The purity estimation apparatus 100 according to the present embodiment includes an input unit 1 that inputs measurement data 10 including the measurement data 11, 12, and 13 described above. The purity estimation apparatus 100 further includes a database 2, an arithmetic processing unit 3, and an output unit 4.

  The database 2 stores the correlation 23 in the form of a diagram obtained by using the gas phase purity data 21 in the SF6 recovery tank and the liquid phase purity data 22 in the SF6 recovery tank that have been measured and acquired in advance as coordinate axes. .

  The arithmetic processing means 3 calculates the weight of the gas phase and liquid phase SF6 (56A, 56B) in the SF6 recovery tank from the measured weight data 11 and the temperature data 12 of the storage SF6 in the SF6 recovery tank, and this liquid phase SF6 ( 56B) is stored using the diagrammatic correlation 23 of the gas phase purity data 21 in the SF6 recovery tank and the liquid phase purity data 22 stored for the SF6 mixture 56 in the SF6 recovery tank. The purity 22 of the liquid phase SF6 is estimated from the gas phase SF6 purity data 21, and the calculated purity 22 of the liquid phase SF6 and the SF6 measurement weight data 11 stored in the SF6 recovery tank and the SF6 mixing in the SF6 recovery tank are input. The purity 27 of the body 56 is calculated, or it is determined whether the purity 27 of the SF6 mixture 56 in the SF6 recovery tank is within a predetermined management regulation value.

  The output means 4 outputs the estimation result of the purity 22 of the liquid phase SF6, the calculation result of the purity 27 of the SF6 mixture 56 in the SF6 recovery tank, and the determination result of the purity 27 of the mixture 56, and displays those data on the screen. To do. Next, calculation means and calculation methods for the weight (or volume) of the gas phase and liquid phase SF 6 of the collection tank storage SF 6 in the mixed form will be described. In many cases, it is known from experience that SF6 recovered in the SF6 recovery tank 55 is recovered in the form of a mixture of a gas phase and a liquid phase by a tank with a liquid level gauge for visualizing.

  The arithmetic processing means 3 calculates the volume ratio of the gas phase SF6 (56A) and the liquid phase (56B) from the measured weight data 11 and the temperature data 12 of the storage SF6 in the SF6 recovery tank, the gas phase and the liquid phase in the SF6 recovery tank. The SF6 (56A, 56B) weight can be calculated, and it can be determined that the mixture 56 is stored in the SF6 recovery tank.

  When the SF6 recovery tank storage SF6 (56) is the mixture 56, the measured weight data of the SF6 recovery tank SF6 is easily derived by measuring the mass or volume of the recovery tank storage SF6 (56). The

  Further, the measured temperature data 12 of the recovery tank storage SF6 (56) is obtained by measuring the vapor pressure in the recovery tank, and measuring the vapor measured in the relational expression between the SF6 vapor pressure in the recovery tank and the SF6 temperature derived in advance. It is easily derived by using pressure. This relational expression is an approximate quadratic function expression obtained by expressing the relation between the SF6 vapor pressure and the SF6 temperature in the recovery tank shown in Table 1 on a graph as shown in FIG. Further, the relational expression between the SF6 vapor pressure of the temperature derived in advance and the SF6 temperature and the corresponding temperature and the measured vapor pressure data can be stored in the database 2 and can be used as data for calculation of the calculation processing means 3. .

  The measured gas phase purity data 13 in the SF6 recovery tank of the SF6 mixture 56 is easily measured by a measuring instrument such as an analytical instrument. The SF6 mixture 56 contains air (not shown) as impurities in addition to the gas phase SF6 (56A) and the liquid phase SF6 (56B). As other impurities of air, a trace amount of carbon dioxide gas or the like may be contained.

  The purity estimation apparatus 100 of the present embodiment also acquires the gas phase purity data 21 in the SF6 recovery tank and the liquid phase purity data 22 in the SF6 recovery tank 55 that are measured and acquired in advance, and the purity data 21 and 22 are acquired as coordinate axes. A database 2 for storing the correlation 23 in the form of a diagram. Hereinafter, the database 2 will be described in detail.

  The gas phase purity data 21 of the recovery SF6 acquired and stored in the database 2 in advance is easily acquired by measuring the purity of the gas phase SF6 (56A) in the recovery tank 55 using a measuring device such as an analytical device. The Further, the liquid phase purity data 22 stored in advance in the database 2 once vaporizes the liquid phase SF6 (56B) in the recovery tank 55 in a state where the gas phase SF6 (56A) is discharged, and the gas phase SF6 (56A). Similarly, it is obtained by measuring with a measuring device.

  By the above method, a plurality of gas phase purity data 21 and liquid phase purity data 22 for SF6 in the SF6 recovery tank are acquired in advance and stored in the database 2. Needless to say, it is preferable to have a large number of corresponding gas phase purity data 21 and liquid phase purity data 22 stored in advance.

  At this time, it was found that the plurality of gas phase purity data 21 and liquid phase purity data 22 can be represented by a graph as shown in FIG. And it turned out that the diagram-like correlation 23 is derived | led-out from this graph. The correlation 23 between the gas phase purity data 21 and the liquid phase purity data 22 is a line derived from the plurality of gas phase purity data 21 and the liquid phase purity data 22 and approximated by a straight line 24 having an inclination. It turned out to be represented in a figure.

  More specifically, the above-mentioned diagrammatic correlation 23 indicates that the liquid phase purity is obtained when the coordinates of the gas phase purity data and the gas phase purity data are 100 vol%. The data is represented by a straight line connecting the coordinates at which 100 vol%. For the estimation of the purity of the actual liquid phase SF6 (56B), as the correlation 23, an approximate expression 24 represented by a straight line 24 as shown in FIG. 4 is derived and used. In FIG. 4, the correlation 23 is illustrated as one straight line 24, but may be a band-like range 25.

  In FIG. 4, at present, a purity of 97 vol% is adopted as the management specified value of the recycled SF 6 that can be recycled and reused. When the liquid phase SF6 is used as the regeneration SF6, the purity of the liquid phase SF6 is adopted as the management prescribed value. When the gas phase SF6 is used in addition to the liquid phase SF6, the liquid phase is referred to by referring to the volume ratio of both. Purity and gas phase purity are determined and adopted.

  The correlation 23 shown in FIG. 4 is established without depending on the weight of SF6 in the SF6 recovery tank 55, and the liquid phase purity is 97 vol% even when the gas phase purity is 75 vol%, for example. Become. In consideration of the liquid-phase and gas-phase SF6 weights, the liquid-phase prescribed value can be set from the management prescribed value.

  The purity estimation apparatus 100 of the present embodiment confirms that liquid-phase SF6 exists as a mixture as described above, and stores SF6 (56) measured weight data 11 and temperature data 12 in the SF6 recovery tank from the SF6. The gas phase and liquid phase SF6 (56A, 56B) weight in the recovery tank 55 is calculated (31), and the SF6 mixture 56 in the SF6 recovery tank 55 is stored when the liquid phase SF6 (56B) is stored. The purity 26 of the liquid phase SF6 is estimated from the input gas phase SF6 purity data 21 using the linear correlation 23 between the gas phase purity data 21 in the SF6 recovery tank 55 and the liquid phase purity data 22 (32). From the estimated purity 26 of the liquid phase SF6 and the stored SF6 (56) measured weight data 11 in the SF6 recovery tank 55, the SF6 mixture in the SF6 recovery tank is mixed. 56 calculates the purity 27 (33), or determines whether the predetermined in the management specified value purity of SF6 recovery tank SF6 mixture 56 (34) comprises processing means 3. Of course, it may be used for the determination by calculating the purity.

  The weight of the gas phase SF6 (56A) in the SF6 recovery tank 55 in the purity estimation apparatus 100 of the present embodiment is calculated from the stored SF6 (56) measured weight data 11 and the temperature data 12 in the SF6 recovery tank 55. The details of the calculation will be described in detail below.

  First, the molar volume and density of the gas phase SF6 (56A) in the gas recovery tank 55 are calculated. The molar volume is determined by the Beattie-Bridgeman equation expressed by Equation 1. Here, the vapor volume data measured as described above is used for P, and the temperature volume 12 obtained using the vapor pressure data is used for the approximate expression obtained from Table 1 for T, whereby the molar volume V is obtained. .

  In the present embodiment, as described above, the molar volume V of the gas phase SF6 (56A) is obtained in advance for each predetermined temperature, and is derived from the relationship between the temperature and the molar volume in the gas phase 56A as shown in Table 2. The molar volume of the gas phase 56A is calculated by the approximate quadratic function equation. In addition, the molar volume V and approximate quadratic function formula for each predetermined temperature of the gas phase SF6 (56A) obtained in advance can be stored in the database 2 and can be used as calculation data of the calculation processing means 3.

  Next, the density of the gas phase SF6 (56A) is obtained using the molar volume V of the gas phase SF6 (56A) calculated and calculated as described above. The density of the gas phase SF6 (56A) can be calculated by dividing the known molecular weight of SF6 (146.05 g) by the molar volume V.

  Next, the density of the liquid phase 56B is calculated. As the density 56B of the liquid phase, since the relational expression 2 is derived in advance between the density and the temperature, the density of the liquid phase 56B is calculated from this relational expression. For this relational expression, the temperature T is the approximate expression obtained from Table 1, using temperature data 12 obtained by using the vapor pressure data, n = 4, A0 = 0.725, A1 =, 1.472, A2 = −. Values of 0.283, A3 = 1.303, and A4 = −0.628 are used. The density d of the liquid phase 56B is calculated using the above values. This relational expression can be stored in the database 2 and can be used as calculation data of the calculation processing means 3.

  Further, the gas recovery tank is determined based on the density of the gas phase SF6 (56A) and the liquid phase SF6 (56B) in the gas recovery tank 55 obtained as described above and the weight data 11 of the SF6 mixture 56 in the gas recovery tank 55. The volumes of the gas phase SF6 (56A) and the liquid phase SF6 (56B) in 55 are calculated. Specifically, calculation is performed by simultaneous equations according to Equation 3, Equation 4 and Equation 3 and Equation 5 derived from (mass) = (density) × (volume), and the gas phase SF6 (56A) and the liquid phase SF6 (56B) are calculated. ) Are respectively calculated. The volumes of the gas phase SF6 (56A) and the liquid phase SF6 (56B) are calculated assuming that the purity is 100%.

  The vapor phase SF6 (56A) and the liquid phase SF6 (56B) in the gas recovery tank 55 are multiplied by the volume and density of the gas phase SF6 (56A) and the liquid phase SF6 (56B) calculated as described above, respectively. The mass of can be calculated.

  At this time, since the gas phase SF6 (56A) actually contains the mass of air, the true mass of the gas phase SF6 (56A) is calculated after removing the volume of air contained in the gas phase 56A. calculate. The true mass of the gas phase SF6 (56A) is obtained by multiplying the measured gas phase purity data 13 by the volume of the gas phase SF6 (56A) calculated above to calculate the true volume of the gas phase SF6 (56A). Further, it can be obtained by multiplying this by the calculated density.

  At this time, the volume of air contained in the gas phase SF6 (56A) can also be calculated by taking the difference between the volume of the gas phase SF6 (56A) and the true volume of the gas phase SF6 (56A). Then, the mass of air contained in the gas phase SF6 (56A) is calculated by multiplying the calculated volume of air by the density of air calculated by Equation 6 derived from the equation of state PV = nRT of dry air. be able to. Here, as the pressure P of Equation 6, the above measured vapor pressure data is used.

  The weight of the liquid phase SF6 (56B) in the purity estimation apparatus 100 of the present embodiment is calculated from the mass of the liquid phase SF6 (56B) calculated as described above.

  The estimation of the purity 26 of the liquid phase SF6 in the purity estimation apparatus 100 of the present embodiment is a diagram obtained from the gas phase purity data 21 and the liquid phase purity data 22 stored in the database 2 as shown in FIG. It is estimated by using the measured gas phase purity data 13 by the state correlation 23.

  The purity 27 of the SF6 mixture in the SF6 recovery tank 55 in the purity estimation apparatus 100 of the present embodiment is calculated by Equation 7 and calculated. Here, the calculated purity data 13 of the gas phase SF6 (56A), the purity 26 of the estimated liquid phase SF6 (56B), that is, the purity data 26 of the liquid phase 56B, and the masses of the gas phase 56A and the liquid phase 56B are calculated. To do. FIG. 6 shows an example of calculation results of the purity of the liquid phase SF6 (56B) in the gas recovery tank 55 and the purity of the mixture 56 actually performed as described above. FIG. 7 shows an example of the result of calculation in the same manner. Table 3 shows measured weight data 11, measured temperature data 12, and measured gas phase purity data 13 used in the examples of FIGS.

  The purity of the liquid phase SF6 (56B) in the gas recovery tank and the purity of the mixture 56 calculated and calculated as described above are obtained by the arithmetic processing means 3 as shown in FIG. A determination is made as to whether it is within the defined management regulation value (34).

  At this time, according to the determination result of the purity of the SF6 mixture 56, if the purity of the SF6 mixture 56 is within the control value regulation, the liquefied SF6 recovery facility 50 transfers the SF6 mixture 56 to the SF6 gas using device 51 as it is. However, if the purity of the SF6 mixture 56 is not within the control regulations, the SF6 mixture 56 is sent to the above-mentioned gas purification device (not shown) and purified or destroyed and newly managed. SF6 gas having a purity within the specified value is injected from the outside into the gas recovery tank 55 and re-enclosed in the SF6 gas use device 51.

  The purity estimation apparatus 100 of the present embodiment further calculates the purity 26 of the liquid phase SF6 (56B) estimated by the processing means 3 and the purity 27 of the SF6 mixture 56 in the SF6 recovery tank 55 and the SF6 mixture. An output means 4 such as a monitor display for displaying a result of determination as to whether or not the purity 27 of 56 is within the management regulation table is provided. Note that the numerical values and tables of the correlations 23 stored in the measurement data 11, 12, 13 and the database can be appropriately displayed on the screen by the output means 4.

  Hereinafter, the procedure for calculating the purity of the recovered liquid phase SF6 gas and calculating the purity of the SF6 gas mixture in the recovered liquefied SF6 gas recovery apparatus in the present embodiment will be described with reference to FIG.

  First, the measured weight data of the in-tank storage SF6 measured by a measuring device (not shown) connected to the gas recovery tank 55 of the SF6 gas recovery facility 50, the measured temperature data in the SF6 recovery tank, and SF6 containing at least air as impurities. The measured gas phase purity data in the SF6 recovery tank of the mixture is input to the input means 1 (41, 42, 43).

  At this time, it is determined from these measurement data 10 whether the SF6 gas in the recovery tank 55 is only a gas or a mixture of a gas phase and a liquid phase. When the SF6 gas in the recovery tank 55 is a mixture, the measured measured weight data of the storage SF6 in the tank 55 and the measured temperature data in the SF6 recovery tank are handled as data of the SF6 mixture in the SF6 recovery tank.

  Next, by using the measured weight data and temperature data of the SF6 mixture in the tank 55, the gas phase and liquid phase SF6 masses are calculated by the calculation processing means 3 (44).

  Next, the gas phase purity measured by the linear correlation obtained by using the gas phase purity data in the SF6 recovery tank and the liquid phase purity data in the SF6 recovery tank that are measured and stored in the database 2 in advance as coordinate axes. Data for estimating liquid phase purity data corresponding to the measurement conditions of the data is constructed (45), that is, an approximate linear equation is set, and the measured gas phase purity data is used by using the set approximate linear equation. Used to estimate the purity of the liquid phase SF6 (46).

  Then, the purity of the SF6 mixture is calculated by using the mass of each phase with SF6, the estimated purity of the liquefied SF6, and the measured gas phase SF6 purity data (47). Finally, it is determined whether the calculated purity of the SF6 mixture is within a predetermined management regulation value (48).

  As described above, the purity estimation method for the recovered liquefied SF6 gas according to the present invention includes three measurement weight data, measurement temperature data of the SF6 mixture in the gas recovery tank, and measured gas phase purity data of the SF6 mixture in the tank. Since the purity of the liquid phase SF6 can be estimated from only the measurement data, the purity of the liquid phase SF6 can be easily and economically estimated by using this purity estimation method for the recovery equipment.

  In the purity estimation apparatus 100 of the present embodiment, the measured weight data 11 and measured temperature data 12 described above include mass data and vapor pressure data of the SF6 gas mixture 56 in the gas recovery tank, respectively.

  By including the mass data and the vapor pressure data, since the mass data and the vapor pressure data can be used quickly in the calculation by the calculation processing means, it is possible to provide a purity estimation apparatus capable of increasing the calculation speed. .

  As shown in FIG. 9, the purity estimation apparatus 100 of the present embodiment has a dehydrating means 6 interposed between the gas recovery device 53 and the gas recovery tank 55 so that the moisture of the liquefied SF6 gas 54 is dehydrated. The measurement data 17, 18, and 19 may be measured.

  This is to prevent the measurement data 17, 18 and 19 from containing moisture due to the moisture contained in the SF6 gas, thereby reducing the calculation accuracy of the purity estimation apparatus. By providing the dehydrating means 6, it is possible to provide a purity estimation apparatus with high calculation accuracy by removing moisture from the liquefied SF6 gas 54. In addition, the purity estimation apparatus of a present Example can provide the purity estimation apparatus with sufficient high calculation precision, without providing the said dehydrating means 6. FIG.

  The SF6 gas recovery facility of the present embodiment uses the above-described purity estimation device 100, so that even if the in-recovery tank storage SF6 is a mixture, the liquid phase can be easily obtained using the measurement data 11, 12, and 13 described above. Since the purity of SF6 can be estimated and the purity of the mixture can be calculated quickly, the purity of the mixture SF6 in the recovery tank can be managed, and the mixture SF6 in the recovery tank can be appropriately controlled according to the purity management status. And can be purified.

  Hereinafter, a purification means and a purification method of the gas recovery tank mixture SF6 using the purity estimation apparatus 100 described above in the SF6 gas recovery facility of the present embodiment will be described.

  As shown in FIG. 10, the gas recovery facility 50 of the present embodiment further includes an SF6 recovery tank 55 and another SF6 recovery tank 57.

  The gas recovery facility 50 according to the present embodiment is configured such that the gas phase SF6 is circulated between the SF6 gas recovery device 53 and the recovery tank 55 via a dehydrating means (not shown) and connected by a gas phase SF6 pipe 60. You can also.

  This dehydrating means is configured in the same manner as the above-described dehydrating means 6, and the vapor phase SF 6 passing through the vapor phase SF 6 pipe connected between the SF 6 gas recovery device 53 and the recovery tank 55 is dehydrated and the recovery tank 55. However, the gas recovery facility 50 of the present embodiment can sufficiently purify the mixture SF6 in the gas recovery tank, which will be described later, even if the dehydrating means is not provided. .

  The other SF6 recovery tank 57 is connected to the upper end side of the other SF6 recovery tank 57 and the SF6 gas recovery device via the gas phase SF6 pipe 60, and to the lower end side of the other SF6 recovery tank 57 and the SF6 recovery. The lower end side of the tank is connected by a liquid phase SF6 pipe 61 through which the liquid phase SF6 flows. The other SF6 recovery tank 57 has a structure having a purity within a predetermined management regulation value and SF6 that is a mixture of the gas phase SF6 and the liquid phase SF6 is injected from the outside.

  In addition, open / close valves 55A, 57A, 55B, and 57B for controlling the flow rates of the respective phases SF6 in the gas phase SF6 pipe 60 and the liquid phase SF6 pipe 61 are disposed at the upper and lower ends of the SF6 recovery tanks 55 and 57, respectively. Similarly, the gas-phase SF6 pipe 60 and the liquid-phase SF6 pipe 61 on the SF6 recovery tank side are also provided with on-off valves 62, 63, 64, and 65, respectively.

  The SF6 gas recovery facility of the present embodiment has the above-described configuration, and the gas phase SF6 and the liquid phase SF6 forming the mixture SF6 in the recovery tank 55 recovered from the SF6 gas use device via the SF6 gas recovery device 53 are converted into a gas phase. The SF6 pipe 60 and the liquid phase SF6 pipe 61 can be used for recovery to another SF6 recovery tank, or the gas phase SF6 and liquid phase SF6 of the new SF6 mixture can be recovered from the other SF6 recovery tank 57 into the recovery tank 55. .

  Further, since the SF6 collection tank 55 and the other SF6 collection tank 57 have a limit in the amount of SF6 mixture that can be collected in a single container, as shown in FIG. 10 according to the amount of SF6 mixture to be collected, It is desirable that the plurality of containers 55C and 57C be connected and integrated to form the curls 55 and 57.

  The plurality of containers 55C and 57C have opening / closing valves 55A and 55B, respectively, so that the inflow or outflow amount of the inside SF6 of the container can be controlled, and the difference in internal pressure between the containers 55C and 57C can be complemented. It is configured.

  When the purity of the SF6 recovery tank mixture SF6 described above does not fall within a predetermined management regulation value, the SF6 gas recovery facility of the present embodiment is configured to purify the mixture SF6 through another SF6 recovery tank. It is configured. Hereinafter, the purification procedure will be described with reference to FIG.

  First, when it is determined that the purity 27 of the SF6 collection tank SF6 mixture SF6 (56) calculated by the calculation processing means 3 of the purity estimation apparatus 100 is not within a predetermined management regulation value, each on-off valve 55A. , 57A, 62, 63 are opened, and the gas phase SF6 in the recovery tank 55 is liquefied by the gas recovery device 53 via the dehydrating means 6, and flows into the other SF6 recovery tank 57 through the gas phase SF6 pipe 60. Injected.

  At this time, since the inside of the gas recovery device 53 is set to a pressure higher than the liquefied vapor pressure of SF6, the gas phase SF6 from the SF6 recovery tank 55 is liquefied by the pushing pressure based on this high pressure, and the other SF6 recovery tanks are liquefied. 57 will be injected.

  Thereby, the impurities contained in the liquid phase SF6 in the SF6 recovery tank 55 are vaporized for a while, and the purity of the liquid phase SF6 in the SF6 recovery tank 55 is increased. Further, since the low-purity gas phase SF6 in the SF6 recovery tank 55 is recovered to another SF6 recovery tank 57, the purity of the gas phase SF6 in the SF6 recovery tank 55 also increases.

  Next, each on-off valve 55B, 57B, 64, 65 is opened, and the liquid phase SF6 with high purity in the other SF6 recovery tank is liquid phase SF6 piping by the pushing pressure based on the high pressure of the gas recovery device 53 described above. It is injected into the SF 6 recovery tank 55 through 61.

  Further, as described above, when the liquid phase SF6 from another SF6 recovery tank 57 is injected into the SF6 recovery tank 55, the liquid level in the recovery tank 55 rises and the vapor pressure in the tank 55 decreases. . Thereby, the gas phase SF6 in the SF6 recovery tank is easily condensed to become the liquid phase SF6, and the low purity SF6 in the recovery tank 55 also becomes the liquid phase SF6 with high purity, so that the purity of the mixture 56 in the recovery tank Can be raised. As a result, the purity of the liquid phase SF6 in the SF6 recovery tank 55 further increases, and the purity of the SF6 recovery tank mixture SF6 is improved.

  The SF6 collection tank mixture SF6 (56) is purified by the above procedure. At this time, the purity of the mixture SF6 (56) is appropriately calculated by the purity estimation apparatus 100, and the purity 27 of the SF6 mixture SF6 (56) calculated by the calculation processing means 3 is within a predetermined management regulation value. The above purification is performed.

  As shown in FIG. 10B, the SF6 gas recovery facility of the present embodiment also liquefies the gas phase SF6 in the recovery tank 55, circulates through the gas phase SF6 pipe 60, and others through the SF6 gas recovery device 53. Is injected into the SF6 recovery tank 57, and the gas phase SF6 in the other SF6 recovery tank is circulated through the gas phase SF6 pipe 60 by the gas recovery device 53 and injected into the SF6 recovery tank 55. The liquid phase SF6 may be injected into the SF6 recovery tank 55 through the liquid phase SF6 pipe 61.

  This configuration is to inject a high-purity gas phase SF6 into the recovery tank 55 in addition to the high-purity liquid phase SF6 in the other recovery tank 57, and this also causes the above-described FIG. Similarly, the purity of the SF6 collection tank mixture SF6 can be improved.

  In addition, the SF6 gas recovery facility of this example was calculated, for example, according to the determination status of the purity 27 of the SF6 mixture SF6 (56) in the SF6 recovery tank calculated by the calculation processing means 3 of the purity estimation apparatus 100. Depending on the difference between the purity of the mixture SF6 (56) and a predetermined management regulation value, the purification method for the mixture SF6 in the SF6 collection tank 55 described above is changed to another SF6 collection tank 57 shown in FIG. Or a method of injecting the liquid phase SF6 and the liquid phase SF6 from the other SF6 recovery tank 57 shown in FIG. 10 (b) into the SF6 recovery tank 55. Can be selected.

In the SF6 gas recovery facility of this embodiment, the purity of the liquid phase SF6 is higher than the purity of the gas phase SF6 as described above. Whether or not the purity of the phase SF6 is within a predetermined specified value is determined, and when it is determined that the purity of the liquid phase SF6 in the SF6 recovery tank is not within the predetermined specified value, the above-described SF6 recovery is performed. The in-tank mixture 56 may be purified. If the SF6 gas recovery equipment of this embodiment is configured as described above, the procedure for obtaining the purity of the mixture is not required, and therefore the SF6 recovery tank mixture SF6 can be purified more rapidly.
The purity estimation apparatus 100 of the SF6 gas recovery facility of this embodiment estimates or calculates the purity of the liquid phase SF6 in the other SF6 recovery tank and the mixture SF6 as well as the mixture SF6 (56) SF6 in the gas recovery tank 55. Can do.

  Further, as shown in FIG. 11, the SF6 gas recovery device 53 is connected to another SF6 recovery tank, and the gas phase portion of the other SF6 recovery tank is extracted, whereby another SF6 recovery tank mixture SF6 (56). The purity of can be improved. The low-purity SF6 extracted by the SF6 gas recovery device 53 is filled in the SF6 container 70. The gas filled in the SF6 container 70 is purified by a decomposition process or an external purification device (not shown). For this reason, the purity of the gas phase SF6 in the SF6 recovery tank is improved, and as a result, the purity of the other SF6 recovery tank mixture SF6 is improved.

  Thus, the purity of the other SF6 recovery tank SF6 is appropriately controlled by the purity estimation apparatus 100, and the purity of the other SF6 recovery tank gas phase SF6 is purified according to the calculation purity result of the mixture SF6. Therefore, the purity of the other SF6 collection tank mixture SF6 can always be kept high. Therefore, it is possible to provide a gas recovery facility capable of purifying the in-recovery tank mixture SF6 always and promptly.

  The SF6 gas recovery facility of the present embodiment is also configured such that a dehydrating means is interposed between the gas recovery device and the gas recovery tank or other gas recovery tank to dehydrate the moisture contained in the gas phase SF6. Also good.

  In addition, the SF6 gas recovery facility of the present embodiment is as described above even when the purity of the other SF6 recovery tank mixture SF6 mixture is not within the control specified value from the start of use of the SF6 gas recovery facility. In addition, since the purity of the other SF6 recovery tank mixture SF6 can always be kept high, the recovery tank mixture SF6 can be purified in the same manner as described above.

  Since the SF6 gas recovery facility of the present embodiment constitutes a purity estimation device as described in the above-described embodiments, the mixture SF6 gas recovered in the gas recovery tank can be purified economically with a simple configuration, Moreover, the entire SF6 recovery facility can be reduced in size.

  Moreover, since the SF6 gas recovery method of this embodiment is equipped with a purity estimation method and calculates the purity of the SF6 mixture in the SF6 recovery tank as described in the above embodiment, the gas recovery is easily and quickly performed. The liquid phase SF6 gas recovered in the tank can be purified.

  DESCRIPTION OF SYMBOLS 1 ... Input means, 2 ... Database, 3 ... Operation processing means, 4 ... Output means, 6 ... Dehydration means, 10, 16 ... Measurement data, 11, 17 ... Measurement weight data, 12, 18 ... Measurement temperature data, 13, 19 ... Measured gas phase purity data, 21 ... Stored gas phase purity data, 22 ... Stored liquid phase purity data, 23 ... Correlation between gas phase purity data and liquid phase purity data, 24 ... Approximate linear equation, 25 ... Zone range , 26 ... estimated purity of liquid phase SF6, 27 ... calculated purity of mixture, 31 ... calculation of gas phase and liquid phase SF6 mass, 32 ... estimation of purity of liquid phase SF6, 33 ... of SF6 mixture in recovery tank Purity estimation, 34 ... Determination of purity of the mixture, 41 ... Weight measurement, 42 ... Temperature measurement, 43 ... Gas phase purity measurement, 44 ... Gas phase and liquid phase SF6 mass calculation, 45 ... Data construction, 46 ... Liquid phase SF6 Purity estimation, 47 ... SF6 mixture 48 ... SF6 mixture purity determination, 50 ... SF6 recovery equipment, 51 ... SF6 gas use equipment, 52 ... Used SF6 gas, 53 ... SF6 gas recovery device, 54 ... Liquefied SF6, 55, 57 ... SF6 recovery tank 55A, 57A ... Open / close valve, 55B, 57B ... Open / close valve, 55C, 57C ... Liquefied SF6 container, 56 ... Mixture SF6, 56A ... Gas phase SF6, 56B ... Liquid phase SF6, 60 ... Gas phase SF6 piping, 61 ... Liquid phase SF6 piping, 62, 63, 64, 65 ... Open / close valve, 70 ... SF6 container, 100 ... Purity estimation device.

Claims (8)

SF6 recovery comprising an SF6 gas recovery device that recovers or recovers used SF6 gas from SF6 gas using equipment that uses SF6 gas, and a container that stores the recovered SF6 gas recovered or recovered and liquefied as storage SF6 A tank and a container for injecting SF6 that is a purity within a predetermined management regulation value and is a mixture of a gas phase SF6 and a liquid phase SF6 from the outside, the upper end side being connected to the SF6 gas recovery device, and the lower end side being SF6 In the SF6 gas recovery facility consisting of another SF6 recovery tank connected to the lower end side of the recovery tank,
The SF6 gas recovery facility includes SF6 measurement weight data stored in the SF6 recovery tank of the SF6 recovery tank or other SF6 recovery tank, SF6 recovery tank measured temperature data, and SF6 of the recovery tank storage SF6 containing at least air as impurities. The input means for inputting the gas phase purity data measured in the recovery tank, and the gas phase purity in the SF6 recovery tank obtained by measuring in advance when the SF6 recovery tank storage SF6 is a mixture of the gas phase SF6 and the liquid phase SF6. The gas in the SF6 recovery tank is calculated from the database storing the correlation between the data and the liquid phase purity data in the SF6 recovery tank as a coordinate axis, and the measured weight data and temperature data of the storage SF6 in the SF6 recovery tank. Calculate the phase and liquid phase SF6 weight, and for the liquid phase SF6 stored, SF6 times Using the linear correlation between the gas phase purity data in the SF6 recovery tank and the liquid phase purity data stored for the SF6 mixture in the tank, the purity of the liquid phase SF6 is estimated from the input gas phase SF6 purity data, The purity of the SF6 mixture in the SF6 recovery tank is calculated from the estimated purity of the liquid phase SF6 and the stored SF6 measurement weight data in the SF6 recovery tank, and the purity of the SF6 mixture in the SF6 recovery tank is calculated. Having a purity estimation device comprising arithmetic processing means for determining whether the value is within a predetermined management regulation value;
When the SF6 gas recovery apparatus determines that the purity of the SF6 collection tank SF6 mixture calculated by the calculation processing means is not within a predetermined management regulation value, the SF6 collection tank mixture SF6. The gas phase SF6 is liquefied and injected into a new SF6 gas recovery tank, and the liquid phase SF6 of the other SF6 recovery tank mixture SF6 or the gas phase SF6 and the liquid phase SF6 are injected into the SF6 recovery tank. SF6 gas recovery equipment. SF6 recovery comprising an SF6 gas recovery device that recovers or recovers used SF6 gas from SF6 gas using equipment that uses SF6 gas, and a container that stores the recovered SF6 gas recovered or recovered and liquefied as storage SF6 A tank and a container for injecting SF6 that is a purity within a predetermined management regulation value and is a mixture of a gas phase SF6 and a liquid phase SF6 from the outside, the upper end side being connected to the SF6 gas recovery device, and the lower end side being SF6 In the SF6 gas recovery facility consisting of another SF6 recovery tank connected to the lower end side of the recovery tank,
The SF6 gas recovery facility includes SF6 measurement weight data stored in the SF6 recovery tank of the SF6 recovery tank or other SF6 recovery tank, SF6 recovery tank measured temperature data, and SF6 of the recovery tank storage SF6 containing at least air as impurities. The input means for inputting the gas phase purity data measured in the recovery tank, and the gas phase purity in the SF6 recovery tank obtained by measuring in advance when the SF6 recovery tank storage SF6 is a mixture of the gas phase SF6 and the liquid phase SF6. The gas in the SF6 recovery tank is calculated from the database storing the correlation between the data and the liquid phase purity data in the SF6 recovery tank as a coordinate axis, and the measured weight data and temperature data of the storage SF6 in the SF6 recovery tank. Calculate the phase and liquid phase SF6 weight, and for the liquid phase SF6 stored, SF6 times Using the linear correlation between the gas phase purity data in the SF6 recovery tank and the liquid phase purity data stored for the SF6 mixture in the tank, the purity of the liquid phase SF6 is estimated from the input gas phase SF6 purity data, The purity of the SF6 mixture in the SF6 recovery tank is calculated from the estimated purity of the liquid phase SF6 and the stored SF6 measured weight data in the SF6 recovery tank, and the purity of the liquid phase SF6 in the SF6 recovery tank is calculated. Having a purity estimation device comprising arithmetic processing means for determining whether the value is within a predetermined value,
When the SF6 gas recovery device determines that the purity of the liquid phase SF6 in the SF6 recovery tank calculated by the arithmetic processing means is not within a predetermined specified value, the SF6 recovery tank mixture SF6 The gas phase SF6 is liquefied and injected into another SF6 recovery tank, and the liquid phase SF6 of the other SF6 recovery tank mixture SF6 or the gas phase SF6 and the liquid phase SF6 are injected into the SF6 recovery tank. SF6 gas recovery facility.   3. The SF6 gas recovery facility according to claim 1 or 2, wherein the other SF6 recovery tank includes SF6 gas purification means for purifying the gas phase SF6 in the other SF6 recovery tank.   4. The SF6 gas recovery facility according to claim 1, wherein the SF6 recovery tank and the other SF6 recovery tank are constituted by a cardle composed of a plurality of connected containers. SF6 recovery comprising an SF6 gas recovery device that recovers or recovers used SF6 gas from SF6 gas using equipment that uses SF6 gas, and a container that stores the recovered SF6 gas recovered or recovered and liquefied as storage SF6 A tank and a container for injecting SF6 that is a purity within a predetermined management regulation value and is a mixture of a gas phase SF6 and a liquid phase SF6 from the outside, the upper end side being connected to the SF6 gas recovery device, and the lower end side being SF6 In the SF6 gas recovery method in the SF6 gas recovery facility consisting of another SF6 recovery tank connected to the lower end side of the recovery tank,
In the SF6 gas recovery method, the SF6 recovery tank storage SF6 measurement weight data and the SF6 recovery tank measurement temperature of the SF6 recovery tank in which the input means recovers and stores the used SF6 gas from the SF6 gas use device that uses SF6 gas. Data and measured gas phase purity data in SF6 recovery tank of recovery tank storage SF6 containing at least air as impurities are input, and the database is SF6 recovery tank storage SF6 is a mixture of gas phase SF6 and liquid phase SF6 Sometimes the pre-measured and acquired gas phase purity data in the SF6 recovery tank and the liquid phase purity data in the SF6 recovery tank are stored as a diagrammatic correlation, and the arithmetic processing means stores the SF6 recovery tank. Gas phase and liquid phase SF6 weight in SF6 recovery tank from measured weight data and temperature data of internal storage SF6 The calculated and stored liquid phase SF6 was input using the linear correlation between the gas phase purity data in the SF6 recovery tank and the liquid phase purity data stored for the SF6 mixture in the SF6 recovery tank. The purity of the liquid phase SF6 is estimated from the gas phase SF6 purity data, and the purity of the SF6 mixture in the SF6 recovery tank is calculated from the estimated purity of the liquid phase SF6 and the stored SF6 measurement weight data in the SF6 recovery tank. Or a purity estimation method for determining whether the purity of the SF6 mixture in the SF6 recovery tank is within a predetermined management regulation value,
The SF6 gas recovery tank mixture SF6 when the SF6 gas recovery device determines that the purity of the SF6 recovery tank SF6 mixture calculated by the arithmetic processing means is not within a predetermined management regulation value. The gas phase SF6 is liquefied and injected into a new SF6 gas recovery tank, and the other SF6 recovery tank is the liquid phase SF6 of the other SF6 recovery tank mixture SF6 or the gas phase SF6 and the liquid phase SF6 in the SF6 recovery tank. An SF6 gas recovery method for an SF6 gas recovery facility, wherein SF6 recovery comprising an SF6 gas recovery device that recovers or recovers used SF6 gas from SF6 gas using equipment that uses SF6 gas, and a container that stores the recovered SF6 gas recovered or recovered and liquefied as storage SF6 A tank and a container for injecting SF6 that is a purity within a predetermined management regulation value and is a mixture of a gas phase SF6 and a liquid phase SF6 from the outside, the upper end side being connected to the SF6 gas recovery device, and the lower end side being SF6 In the SF6 gas recovery method in the SF6 gas recovery facility consisting of another SF6 recovery tank connected to the lower end side of the recovery tank,
In the SF6 gas recovery method, the SF6 recovery tank storage SF6 measurement weight data and the SF6 recovery tank measurement temperature of the SF6 recovery tank in which the input means recovers and stores the used SF6 gas from the SF6 gas use device that uses SF6 gas. Data and measured gas phase purity data in SF6 recovery tank of recovery tank storage SF6 containing at least air as impurities are input, and the database is SF6 recovery tank storage SF6 is a mixture of gas phase SF6 and liquid phase SF6 Sometimes the pre-measured and acquired gas phase purity data in the SF6 recovery tank and the liquid phase purity data in the SF6 recovery tank are stored as a diagrammatic correlation, and the arithmetic processing means stores the SF6 recovery tank. Gas phase and liquid phase SF6 weight in SF6 recovery tank from measured weight data and temperature data of internal storage SF6 The calculated and stored liquid phase SF6 was input using the linear correlation between the gas phase purity data in the SF6 recovery tank and the liquid phase purity data stored for the SF6 mixture in the SF6 recovery tank. The purity of the liquid phase SF6 is estimated from the gas phase SF6 purity data, and the purity of the SF6 mixture in the SF6 recovery tank is calculated from the estimated purity of the liquid phase SF6 and the stored SF6 measurement weight data in the SF6 recovery tank. Or a purity estimation method for determining whether the purity of the SF6 mixture in the SF6 recovery tank is within a predetermined management regulation value,
The SF6 gas recovery tank mixture SF6 when the SF6 gas recovery device determines that the purity of the SF6 recovery tank SF6 mixture calculated by the arithmetic processing means is not within a predetermined management regulation value. The gas phase SF6 is liquefied and injected into a new SF6 gas recovery tank, and the other SF6 recovery tank is the liquid phase SF6 of the other SF6 recovery tank mixture SF6 or the gas phase SF6 and the liquid phase SF6 in the SF6 recovery tank. An SF6 gas recovery method for an SF6 gas recovery facility, wherein   The SF6 gas recovery method according to claim 5 or 6, wherein the SF6 gas purification means provided with the other SF6 recovery tank purifies the gas phase SF6 in the other SF6 recovery tank.   8. The SF6 gas recovery method according to claim 5, wherein the SF6 recovery tank and the other SF6 recovery tank are curdles composed of a plurality of connected containers.

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