JP2012085527A - Linear/rotary actuator and system - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a linear/rotary actuator that can increase torque and thrust.SOLUTION: A linear/rotary actuator that has a movable element having a permanent magnet or iron core teeth forming a field, and a stator having a θ armature winding generating a rotating field having a pole pitch λ in a rotary θ direction and an X armature winding generating a progressive field having a pole pitch γ in a linear X direction, and that applies a current to the θ armature winding and X armature winding to generate a torque in the θ direction and a thrust in the X direction, which provide rotary and linear actions of the movable element, includes in the field of the movable element a double N pole cylindrical part 211a having a plurality of N poles on magnetic surfaces, and a double S pole cylindrical part 211b having a plurality of S poles on magnetic surfaces. The double N pole cylindrical part and the double S pole cylindrical part are arranged such that the N poles of the double N pole cylindrical part and the S poles of the double S pole cylindrical part have pole intervals of γ in the X direction and λ in the θ direction, and the permanent magnet is arranged between the double N pole cylindrical part and the double S pole cylindrical part to provide a magnetization direction in the X direction.

Description

  The present invention relates to a direct-acting rotary actuator and system for precisely performing two motions of rotation and movement with one actuator.

As a conventional linear motion rotary actuator, there are the following three configurations.
(1) Torque is generated on the rotary shaft by the rotary motor, and thrust is generated on the linear drive shaft by the linear motion mechanism that is a combination of the rotary motor and the ball screw. A rotary shaft and a linear motion shaft are connected by a bearing, and a rotational motion and a linear motion motion are performed using either the rotational shaft or the linear motion shaft as an output shaft. Two rotary motors for rotation and linear motion are arranged side by side in the linear motion direction. (For example, Patent Document 1 and Patent Document 2)
(2) A linear motor is coupled to the rotary shaft of the rotary motor, and a rotary motion and a linear motion operation are performed using a linear motion shaft that generates thrust of the linear motor as an output shaft. Since the linear motor is attached to the inside of the rotary motor, the motors are not arranged side by side in the linear motion direction, and the size can be reduced as compared with (1). (For example, Patent Document 3)
(3) The armature windings of the rotary motor and the linear motor are concentrically overlapped to generate torque and thrust directly on the output shaft to perform rotation operation and linear motion operation. Since there is no complicated mechanism in which the bearings are coupled as in (1) and (2), the size can be further reduced and assembly can be facilitated. (For example, Patent Document 4 and Patent Document 5)
Hereinafter, the details of the prior art will be described by taking the configuration (3) which is most characteristically excellent as an example.

  FIG. 15 is a cross-sectional view seen from the side of a linear motion rotary actuator showing the prior art. FIG. 16 is a sectional view of the field portion of the mover as viewed from the side and a sectional view as viewed from the X direction. Note that the cross-sectional view seen from the X direction is a cross-sectional view taken along A and B of the cross-sectional view seen from the side. Moreover, the arrow (→) in the figure represents the magnetization direction of the permanent magnet, and the polarity is S → N. In the stator 100, a cylindrical motor frame 101, an armature core 102, a θ armature winding 103, and an X armature winding 104 are provided concentrically. Further, a motor terminal 105 for supplying electric power to the θ armature winding 103 and the X armature winding 104 from the outside is provided on the upper part of the motor frame 101. An L bracket 107 and a right end are provided on the left end of the motor frame 101. Is attached with an anti-L bracket 108. A slide rotary bush 106 is attached to each of the L bracket 107 and the non-L side bracket 108. On the other hand, the mover 200 includes an output shaft 201 and a field part 202. The field portion 202 is provided with a plurality of block-shaped permanent magnets (hereinafter referred to as block magnets) 250 a and 250 b on the outer periphery of a cylindrical field yoke 203. The block magnet 250a is magnetized to the outer peripheral side N pole and the inner peripheral side S pole, and the block magnet 250b is magnetized on the contrary. The block magnets 250a and 250b are opposed to the X armature winding 104 through a gap. The output shaft 201 is supported by the slide rotary bush 106 and is movable with respect to the stator 100 in the rotation θ direction and the linear motion X direction. Further, a load (not shown) can be attached to the output shaft 201, and the load can be freely moved in the θ direction and the X direction.

  FIG. 17 is a developed view showing the arrangement relationship between the armature winding and the permanent magnet in FIG. Each of the block magnets 250a and 250b is composed of six pieces. The block magnets 250a are arranged every 2λ in the θ direction (λ is the θ direction pole pitch = 180 degrees electrical angle), and the block magnets 250b are also arranged every 2λ in the θ direction. Further, the block magnets 250a and 250b are arranged so as to be shifted by λ in the θ direction and γ in the X direction (γ is the X-direction pole pitch = electrical angle 180 degrees). Therefore, the number of magnetic field poles is 12 in the θ direction and 2 in the X direction. The θ armature winding 103 and the X armature winding 104 are arranged as schematically shown by the thick black lines through the block magnets 250a and 250b and the air gap. The θ armature winding 103 is composed of 12 concentrated winding coils (hereinafter referred to as saddle-shaped coils 103a) having a coil end portion having an arc shape, each including three U, V, and W phases. ing. The interval at which the saddle coils 103a are arranged in the θ direction is λ × 4/3 (electrical angle 240 degrees). Since the interval between the in-phase saddle coils 103a is 720 degrees in electrical angle, the three in-phase saddle coils 103a are connected so that all three currents have the same direction. On the other hand, the X armature winding 104 is composed of a total of 12 ring coils 104a concentrated in a cylindrical shape, each having four U, V, and W phases. The interval of the ring-shaped coil 104a arranged in the X direction is γ / 3 (electrical angle 60 degrees), and the entire length of the X armature winding 104 in the X direction is 4γ (= γ / 3 × 12). is there. Since the interval between the ring coils 104a of the in-phase is γ (electrical angle 180 degrees), the four in-phase ring coils 104a are wired so that the direction of the current is normal, reverse, normal, and reverse. Has been.

  The linear motion rotary actuator configured as described above generates torque in the mover 200 by the action of the magnetic field generated by the block magnets 250a and 250b by passing a current through the θ armature winding 103, and the X armature. By causing a current to flow through the winding 104, a thrust is generated in the mover 200 by the action of the magnetic field generated by the block magnets 250a and 250b. FIG. 16 is a diagram in which a current is supplied to the θ armature winding 103 and the X armature winding 104 at a phase where the U phase is maximum, and a Lorentz force is generated by the current flowing in the direction indicated by the arrow. The mover 200 generates torque in the θ + direction and thrust in the X + direction. In this manner, the mover 200 realizes both rotational and linear motions.

Japanese Patent No. 3360023 (page 6, FIG. 1) Japanese Unexamined Patent Publication No. 2003-111351 (page 5, FIG. 1) JP 2004-364348 A (page 3, FIG. 1) JP 2004-343903 A (page 4, FIG. 1) Japanese Patent Laying-Open No. 2005-20885 (page 3, FIG. 1)

The conventional linear motion rotary actuators (1) to (3) have the following problems.
(1) Since the rotary shaft and linear motion shaft are coupled by a bearing, and the rotary shaft and linear motion shaft are used as output shafts for rotational and linear motion operations, the mechanism becomes complicated and assembly is difficult. It was difficult. Further, since the two rotary motors for rotation and linear motion are arranged side by side in the linear motion direction, the size of the linear motion rotary actuator has increased.
(2) Since the linear motor is mounted inside the rotary motor, the size can be reduced as compared with (1), but there is no substitute for the mechanism that couples the rotary shaft and the linear motion shaft with a bearing. 1) Similarly, the mechanism was complicated and assembly was difficult.
(3) Since it is not a complicated mechanism for coupling the bearings as in (1) and (2), assembly can be facilitated. However, this also had the following problems.
・ Each block magnet with the same polarity is arranged every 2λ with a large gap, and another block magnet with a different polarity is shifted by λ, so the gap magnetic flux density that appears on the magnetic pole surface is small, and a large torque and thrust are obtained. I couldn't.
・ Generally, block magnets are attached by bonding. However, in the case of high-speed rotation, the centrifugal force generated in the block magnet overcomes the adhesive force, and the block magnet may be scattered.
-Although the block magnets are bonded and fixed to the surface of the cylindrical field yoke, they are misaligned due to their large number. As a result, thrust ripple and torque ripple occurred.
Since the detector for detecting the angle θ and the position X of the mover is not provided, driving by speed and position feedback control using the values of the actual angle θ and the position X cannot be performed. In order to obtain the actual angle θ and position X, a detector that can be detected within the operating range of the θ direction and the X direction is required. However, conventional θ-direction detectors and X-direction detectors have a very narrow detectable range for operation in a direction different from the detection direction. For this reason, in a configuration in which a detector in the θ direction and a detector in the X direction are simply combined, the angle θ and the position X cannot be detected simultaneously within a wide operating range in the θ direction and the X direction. As a result, it was not possible to realize precise rotation and linear motion of the mover.

  The present invention has been made to solve the above problems, and an object thereof is to provide a linear motion rotary actuator capable of increasing torque and thrust.

In order to solve the above problem, the present invention is configured as follows.
A linear motion rotary actuator according to an aspect of the present invention includes a mover having a permanent magnet or iron core teeth as a field, a θ armature winding that generates a rotating magnetic field with a pole pitch λ in the rotation θ direction, and a linear motion A stator having an X armature winding that generates a traveling magnetic field with a pole pitch γ in the X direction, and a current is passed through the θ armature winding and the X armature winding, A linear motion rotary actuator that generates torque and thrust in the X direction to perform rotational and linear motion operations of the mover, and has a plurality of N poles on the surface of the magnetic pole. A pole cylinder part and a double S pole cylinder part having a plurality of S poles on the magnetic pole surface, and a magnetic pole interval between the N pole of the double N pole cylinder part and the S pole of the double S pole cylinder part is γ in the X direction; The double N pole cylindrical portion and the double S pole cylindrical portion are arranged so as to be λ in the θ direction, and the double N pole circle is arranged. Part and the X direction between the double S-pole cylindrical portion is obtained by placing a permanent magnet with magnetization directions.
For example, permanent magnets may be arranged on the surfaces of the double N pole cylindrical portion and the double S pole cylindrical portion.
Further, an iron core made of a soft magnetic material may be provided on the surfaces of the double N pole cylindrical portion and the double S pole cylindrical portion, and a permanent magnet may be embedded in the iron core. Thereby, even in the case of high-speed rotation, scattering of the permanent magnet can be prevented. In addition, since the magnetic pole position is accurately determined by the iron core shape and the multipolar magnetization of the permanent magnet, it is possible to suppress the occurrence of thrust ripples and torque ripples due to the positional deviation of the conventional block magnet.
Further, a linear motion rotary actuator according to another aspect of the present invention includes a mover having a permanent magnet or iron core teeth as a field, and a θ armature winding that generates a rotating magnetic field with a pole pitch λ in the rotation θ direction. And a stator having an X armature winding that generates a traveling magnetic field with a pole pitch γ in the linear X direction, and a current is passed through the θ armature winding and the X armature winding. , A linear motion rotary actuator that generates torque in the θ direction and thrust in the X direction to perform the rotation and linear motion of the mover, and has only the N pole on the surface of the magnetic pole in the field of the mover A single N pole cylindrical portion, a cylindrical portion having only the S pole on the magnetic pole surface, and a single S pole cylindrical portion having both the N pole and the S pole on the magnetic pole surface, the N pole of the single N pole cylindrical portion and the The multi-pole circle is arranged so that the magnetic pole interval of the S pole of the single S pole cylindrical portion is γ in the X direction. The magnetic pole interval between N pole and S pole parts is obtained by a λ in the θ direction.
For example, a permanent magnet having the X direction as the magnetization direction may be disposed between the single N pole cylindrical portion and the single S pole cylindrical portion.
Moreover, you may arrange | position a permanent magnet on the surface of the said single N pole cylindrical part, the said single S pole cylindrical part, and the said multipolar cylindrical part.
Further, an iron core made of a soft magnetic material may be provided on the surfaces of the single N pole cylindrical portion, the single S pole cylindrical portion, and the multipolar cylindrical portion, and a permanent magnet may be embedded in the iron core. Thereby, even in the case of high-speed rotation, scattering of the permanent magnet can be prevented. In addition, since the magnetic pole position is accurately determined by the iron core shape and the multipolar magnetization of the permanent magnet, it is possible to suppress the occurrence of thrust ripples and torque ripples due to the positional deviation of the conventional block magnet.
Further, at least one end of the mover or the stator, a cylindrical linear motion rotary scale having a rotary scale and a linear motion scale provided at regular intervals in the rotational direction and the linear motion direction, and the stator or A linear motion rotation detector that detects a rotation angle and a movement position of the mover from the rotary scale and the linear motion scale may be provided at one end of the movable body so as to face each other. Thereby, even if the mover rotates or moves, the rotation angle and the moving position can be detected.
And a controller that controls the rotational position and the moving position of the mover based on the rotational angle and the moving position detected by the linear motion detector. It may be a system. As a result, precise rotation and movement of the mover can be realized with a simple mechanism by speed and position feedback control using values of the actual rotation angle and movement position.
Further, the linear motion rotation scale has a relationship between the linear motion direction length L _θ of the rotary scale and the linear motion direction operating range L _S of the mover L _θ ≧ L _S
age,
The case of direct acting rotation direction opening angle of the graduation beta _theta and the relationship between the rotational direction operating range beta _S of the mover beta _S <360 _{(degrees), β S ≦ β θ <} 360 ( degrees)
When β _S ≧ 360 (degrees), β _θ = 360 (degrees)
It may be what. Thereby, even if the mover rotates or moves, the rotation angle and the moving position can be detected.
Further, the linear motion rotation scale may be a grid in which the rotation scale and the linear motion scale are formed. Thereby, since the θ scale and the X scale cross each other in a lattice shape, the dimension of the θX scale can be shortened, and the linear motion rotary actuator can be miniaturized.
Further, the linear motion rotation detector may be an optical detector. Thereby, even if the mover rotates or moves, the rotation angle and the moving position can be detected.
Further, the rotary scale and the linear motion scale may be formed by an uneven shape or a light and dark print pattern, and an optical detection means may be provided in the linear motion rotation detector. As a result, since the optically detecting means is used for the finely engraved scale, the highly accurate angle and position can be detected.
Further, the rotary scale and the linear motion scale may be formed by a permanent magnet having N and S poles magnetized at a constant interval, and the linear motion rotation detector may be provided with magnetic detection means. Good. Thereby, since the detection means is a magnetic type or a resolver, it can be used even in applications where the ambient temperature is high.
In addition, the rotary scale and the linear motion scale are formed of a soft magnetic material having an uneven shape or a smooth mountain-valley shape, and the linear motion rotation detector is provided with means for detecting an inductance change. May be. Thereby, since the detection means is a magnetic type or a resolver, it can be used even in applications where the ambient temperature is high.
Further, the rotary scale and the linear motion scale may be formed over the entire circumference of the linear motion rotary scale in the rotational direction, and the rotational scale and the linear motion scale may be arranged in series in the linear motion direction. Thereby, since the rotation scale and the linear motion scale are given over the whole outer periphery of a cylinder, the operation | movement of multiple rotation is realizable.
Further, the rotary scale and the linear motion scale may be formed in the rotational direction half of the linear motion rotary scale, and the rotational scale and the linear motion scale may be arranged in parallel in the linear motion direction. As a result, the rotary scale is provided on the half circumference of the cylinder, and the linear scale is provided on the other half of the circumference. The dynamic rotary actuator can be miniaturized.

  According to the present invention, the gap magnetic flux density on the magnetic pole surface is increased, and as a result, the torque and the thrust can be increased.

Sectional drawing of the linear motion rotary actuator which shows Example 1 of this invention Sectional drawing of the field part which shows Example 1 of this invention The expanded view which shows the arrangement | positioning relationship of the armature winding and permanent magnet in Example 1 of this invention Sectional drawing of the field part which shows Example 2 of this invention Sectional drawing of the field part which shows Example 3 of this invention Sectional drawing of the field part which shows Example 4 of this invention Sectional drawing of the field part which shows Example 5 of this invention The expanded view which shows the arrangement | positioning relationship of the armature winding and permanent magnet in Example 5 of this invention Sectional drawing of the field part which shows Example 6 of this invention The perspective view of the linear motion rotation detector and linear motion rotation scale of Example 7 of this invention. The perspective view of the linear motion rotation detector and linear motion rotation scale of Example 8 of this invention. The perspective view of the linear motion rotation detector and linear motion rotation scale of Example 9 of this invention. The perspective view of the linear motion rotation detector and linear motion rotation scale of Example 10 of this invention. The perspective view of the linear motion rotation detector and linear motion rotation scale of Example 11 of this invention. Cross section of linear motion rotary actuator showing conventional technology Sectional view of the field part showing the prior art Development view showing the arrangement of armature windings and permanent magnets in the prior art

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

<Example 1>
FIG. 1 is a cross-sectional view of a linear motion rotary actuator showing Embodiment 1 of the present invention as seen from the side. Constituent elements of the present invention that are the same as those of the prior art will be described with the same reference numerals. On the motor side of the stator 100, a cylindrical motor frame 101, an armature core 102, a θ armature winding 103, and an X armature winding 104 are provided concentrically. Further, a motor terminal 105 for supplying electric power to the θ armature winding 103 and the X armature winding 104 from the outside is provided on the upper part of the motor frame 101. An L bracket 107 and a right end are provided on the left end of the motor frame 101. Is attached with an anti-L bracket 108. A slide rotary bush 106 is attached to each of the L bracket 107 and the non-L side bracket 108. The detector side of the stator 100 is composed of a detector frame 133 and a linear rotation detector 130. Further, a detector terminal 134 for supplying power from the outside to the linear motion rotation detector 130 and outputting detection signals of the angle θ and the position X is provided on the upper portion of the detector frame 133. The detector frame 133 is attached to the anti-L bracket 108 so that the motor side and the detector side are integrated.
On the other hand, the mover 200 includes an output shaft 201 and a field part 202. The output shaft 201 integrated with the field part 202 is supported by the slide rotary bush 106 and is movable in the θ direction and the X direction with respect to the stator 100. Further, on the opposite side of the output shaft 201, a linear rotation scale 230 formed in a cylindrical shape is attached. A load (not shown) is attached to the output shaft, and the load can be freely moved in the θ direction and the X direction. The operation range of the mover 200 is the same as that of the prior art, the rotation operation range is β _S = 360 (degrees), and the movement operation range is L _S = 2γ.

In such a configuration, the present invention is different from the prior art in that the structure of the field magnet portion 202 is improved and a linear motion rotation detector 130 and a linear motion rotation scale 230 are provided.
In addition, a field part is demonstrated in Examples 1-6, and a linear motion rotation detector and a linear motion rotation scale are demonstrated in Examples 7-11.

  FIG. 2 is a cross-sectional view of the field portion of the mover of the first embodiment viewed from the side and a cross-sectional view viewed from the X direction. In addition, the cross-sectional view seen from the X direction is a cross-sectional view taken along A, B, and C of the cross-sectional view seen from the side. Moreover, the arrow (→) in the figure represents the magnetization direction of the permanent magnet, and the polarity is S → N. The field part 202 includes a cylindrical part (multi-N pole cylindrical part 211a) that forms a plurality of N poles, a cylindrical part (multi-S pole cylindrical part 211b) that forms a plurality of S poles, and the X direction is the magnetization direction. It is composed of a permanent magnet (hereinafter referred to as X magnet 251c). The multi-N pole cylindrical portion 211a and the multi-S pole cylindrical portion 211b are configured by arranging a plurality of block magnets 251a and 251b on the outer periphery of a cylindrical field yoke 203 as in the conventional example.

  FIG. 3 is a development view showing an arrangement relationship between the armature winding and the permanent magnet in FIG. Each of the block magnets 251a and 251b is composed of six pieces. The block magnet 251a is magnetized to the outer peripheral side N pole and the inner peripheral side S pole, and the block magnet 251b is magnetized on the contrary. The block magnets 251a are arranged every 2λ in the θ direction (λ is the θ direction pole pitch = 180 degrees electrical angle), and the block magnets 251b are also arranged every 2λ in the θ direction. Further, the block magnets 251a and 251b are arranged so as to be shifted by λ in the θ direction and γ in the X direction (γ is an X-direction pole pitch = electrical angle 180 degrees). Between the block magnets 251a and 251b, an X magnet 251c having an N pole on the block magnet 251a side and an S pole on the 251b side is disposed. The X magnet 251c is formed in a cylindrical shape so as to have the same outer shape as the double N pole cylindrical portion 211a and the double S pole cylindrical portion 211b. Here, the X of the block magnets 251a, 251b, and the X magnet 251c is such that the magnetic pole spacing between the N pole appearing on the double N pole cylindrical portion 211a and the S pole appearing on the double S pole cylindrical portion 211b is shifted by γ in the X direction. The direction length has been adjusted. Further, the block magnets 251a and 251b are thicker than the conventional example, and the thickness of the field yoke 203 is smaller. Here, the θ armature winding 103 and the X armature winding 104 are arranged as schematically shown by the thick black lines via the block magnets 251a and 251b and the X magnet 251c and a gap. As in the conventional example, the number of magnetic poles in the field is 12 poles in the θ direction and 2 poles in the X direction. Since the configuration of the θ armature winding 103 and the X armature winding 104 is the same as that of the conventional example, description of the armature winding is omitted.

  Next, the operation principle will be described. As in the conventional example, the principle of force generation in the first embodiment is that the magnetic force generated by the block magnets 251a and 251b and the X magnet 251c causes torque to be generated in the mover 200 by passing a current through the θ armature winding 103. When a current is passed through the X armature winding 104, thrust is generated in the mover 200. FIG. 3 is a diagram in which current is supplied to the θ armature winding 103 and the X armature winding 104 at a phase where the U phase is maximum, and a Lorentz force is generated by the current flowing in the direction of the arrow shown in the figure. The mover 200 generates torque in the θ + direction and thrust in the X + direction. In this manner, the mover 200 realizes both rotational and linear motions.

  The linear motion rotary actuator configured as described above has a different magnetic flux flow from the conventional example. That is, the magnet magnetic flux of the first embodiment enters from the outer peripheral S pole of the block magnet 251b, enters the S pole of the cylindrical magnet 251c through the inside of the block magnet 251b, and blocks from the N pole of the cylindrical magnet 251c to the block magnet 251a. And exits from the outer peripheral north pole. Since most of the magnet magnetic flux passes through the inside of the magnet, the thickness of the permanent magnet is equivalently increased and the field magnetomotive force is increased. Therefore, the gap magnetic flux density appearing on the magnetic pole surfaces of the double N pole cylindrical portion 211a and the double S pole cylindrical portion 211b can be increased, and the torque and thrust can be increased. Further, since the magnetic flux hardly passes through the field yoke 203, the field yoke 203 can be made thinner, and the block magnets 251a and 251b and the X magnet 251c can be made thicker accordingly. That is, the field magnetomotive force can be further increased, and the torque and thrust can be greatly increased.

<Example 2>
Next, a second embodiment will be described. FIG. 4 is a cross-sectional view of the field portion of the mover according to the second embodiment viewed from the side and a cross-sectional view viewed from the X direction. The difference from the first embodiment is that an iron core is provided in the double N pole cylindrical portion and the double S pole cylindrical portion, and a permanent magnet is embedded in the iron core. The double N-pole cylindrical portion 212a and the double S-pole cylindrical portion 212b are composed of cylindrical cores 262a and 262b made of soft magnetic material and block magnets 252a and 252b. Six block magnets 252a and 252b are embedded in the cylindrical iron cores 262a and 262b, respectively. Since the block magnet 252a is embedded on the outer peripheral side so as to have an N pole, and the 252b is embedded on the outer peripheral side so as to have an S pole, six N poles are provided on the outer peripheral surface of the cylindrical core 262a, and the S pole is provided on the outer peripheral surface of the cylindrical core 262b. Six magnetic poles appear. Further, between the cylindrical cores 262a and 262b, there is provided an X magnet 252c magnetized in the X direction in which the cylindrical core 262a side is an N pole and the 262b side is an S pole. The X magnet 252c is formed in a cylindrical shape so as to have the same outer shape as the cylindrical iron cores 261a and 262b. By arranging the multi-N pole cylindrical portion 212a and the double S-pole cylindrical portion 212b that are configured in this manner while being shifted by λ in the θ direction, the outer peripheral surfaces of the multi-N pole cylindrical portion 212a and the multi-S pole cylindrical portion 212b Thus, the same magnetic pole as in Example 1 is formed. That is, the arrangement relationship between the armature winding and the magnetic pole is the same as in FIG.

  Like the first embodiment, the linear motion actuator configured in this manner has a large field magnetomotive force due to the X magnet 252c, and the gap magnetic flux density appearing on the magnetic pole surfaces of the double N pole cylindrical portion 212a and the double S pole cylindrical portion 212b. Becomes larger. As a result, torque and thrust can be increased. Further, since the block magnet is embedded in the cylindrical iron core, unlike the first embodiment, the block magnet can be prevented from scattering due to centrifugal force. Furthermore, since the magnetic pole structure has a block magnet embedded in a square hole provided in the cylindrical iron core, the magnetic pole position is determined with high accuracy, and the generation of thrust ripples and torque ripples can be suppressed.

<Example 3>
Next, a third embodiment will be described. FIG. 5 is a cross-sectional view of the field portion of the mover according to the third embodiment viewed from the side and a cross-sectional view viewed from the X direction. The third embodiment is different from the second embodiment in that the cylindrical iron core is changed to an iron core having iron core teeth that form magnetic poles (hereinafter referred to as a claw pole iron core), and the block magnet is omitted. The multi-N pole cylindrical part 213a and the double S-pole cylindrical part 213b of the field part 202 are composed of soft magnetic claw pole iron cores 263a and 263b. The claw pole iron core 263a is formed with a total of six iron core teeth having N poles on the outer periphery of the claw pole iron core 263a, and is integrated with the disk-shaped iron core at the end face in the X direction. The claw pole iron core 263b is formed with a total of six iron core teeth that form S poles on the outer periphery of the claw pole iron core 263b every 2λ, and is also integrated with the disk-shaped iron core at the end face in the X direction. Further, the claw pole iron cores 263a and 263b are arranged so as to face each other so that the tip ends of the iron core teeth are opposed to each other by λ in the circumferential direction. Inside the claw pole iron cores 263a and 263b, an X magnet 253 magnetized with the claw pole iron core 263a side as an N pole and the 263b side as an S pole is disposed. The X magnet 253 has a cylindrical shape along the inner circumference of the iron core teeth of the claw pole iron cores 263a and 263b. In the field portion 202 configured in this manner, magnetic poles similar to those shown in FIG. 3 of the first embodiment appear on the surface of the iron core teeth of the claw pole iron cores 263a and 263b.

  In the linear motion rotary actuator configured as described above, since the integral cylindrical permanent magnet is embedded in the claw pole iron core, it is possible to prevent the permanent magnet from scattering due to centrifugal force. Furthermore, the magnetic pole position is accurately determined by the magnetic pole teeth provided on the claw pole iron core, and the generation of thrust ripple and torque ripple can be suppressed.

<Example 4>
Next, a fourth embodiment will be described. FIG. 6 is a cross-sectional view of the field portion of the mover according to the fourth embodiment viewed from the side and a cross-sectional view viewed from the X direction. The fourth embodiment differs from the third embodiment in that a cylindrical permanent magnet that further increases the field magnetomotive force is provided inside the claw pole iron core. The double N-pole cylindrical portion 214a and the double S-pole cylindrical portion 214b include a claw pole iron core 264a, 264b made of a soft magnetic material, and a cylindrical permanent magnet (hereinafter referred to as a single pole) whose outer periphery is a single pole N or S pole. 254a and 254b). A single pole cylindrical magnet 254a having an outer peripheral N pole is disposed inside the claw pole iron core 264a, and a single pole cylindrical magnet 254b having an outer peripheral S pole is disposed inside the claw pole iron core 264b. Further, an X magnet 254c magnetized in the X direction is arranged in the center so that the single-pole cylindrical magnet 254a side is an N pole and the 254b side is an S pole. In addition, the thickness of the iron core on the side surface corresponding to the end face in the linear motion direction of the claw pole iron cores 264a, 264b is thinner than that of the third embodiment, and the single pole cylindrical magnets 254a and 254b, X The width of the magnet 254c is widened. In the field portion 202 configured in this manner, magnetic poles similar to those shown in FIG. 3 of the first embodiment appear on the surface of the iron core teeth of the claw pole iron cores 264a and 264b.

  As in the third embodiment, the linear motion actuator configured in this way can prevent the permanent magnets from being scattered due to centrifugal force, thrust ripple, and torque ripple. Further, as in the first embodiment, most of the magnetic flux passes through the inside of the magnet, so that the field magnetomotive force increases, and the magnetic flux emitted from the monopolar cylindrical magnet enters the core teeth of the claw pole iron core as it leaks. There is little magnetic flux. That is, torque and thrust can be further increased as compared with the third embodiment.

<Example 5>
Next, a fifth embodiment will be described. FIG. 7 is a cross-sectional view of the field portion of the mover according to the fifth embodiment viewed from the side and a cross-sectional view viewed from the X direction. The fifth embodiment is different from the first to fourth embodiments in that it is not composed of a multi-N pole cylindrical portion or a multi-S pole cylindrical portion but a single pole cylindrical portion or a multi-polar cylindrical portion. The field part 202 has a single N pole cylindrical part 215a and a single S pole cylindrical part 215b whose entire outer periphery is a single pole of N and S poles, and a multi pole whose outer periphery is a multipole of N and S poles. It is comprised from the cylindrical part 215c. The single N pole cylindrical portion 215a is a single pole cylindrical magnet 255a whose entire outer periphery is magnetized to N pole, the single S pole cylindrical portion 215b is a single pole cylindrical magnet 255b whose entire outer periphery is magnetized to S pole, and the multipolar cylindrical portion 215c is It is composed of a multipolar cylindrical magnet 255c in which N and S poles are alternately magnetized in the rotation direction. In addition, these cylindrical permanent magnets are formed by magnetizing ones integrally formed in a cylindrical shape in respective magnetization directions. A cylindrical field yoke 203 is disposed on the inner peripheral side of the single pole cylindrical magnets 255a and 255b and the multipolar cylindrical magnet 255c. The single-pole cylindrical magnet 255a having the outer peripheral N pole and the single-pole cylindrical magnet 255b having the outer peripheral S pole are arranged so as to be shifted by γ in the X direction. Further, the multipolar cylindrical magnet 255c is magnetized so that an N pole and an S pole appear for each λ in the θ direction.

  FIG. 8 is a development view showing the arrangement relationship between the armature winding and the permanent magnet in FIG. Since the configuration of the θ armature winding 103 and the X armature winding 104 is the same as that of the conventional example, description thereof is omitted. The θ armature winding 103 and the X armature winding 104 are arranged as schematically shown by the thick black lines through the single-pole cylindrical magnets 255a and 255b and the multi-pole cylindrical magnet 255c and the air gap. The arrangement of the magnetic poles of the single pole cylindrical magnets 255a and 255b is parallel to the X armature winding, and the arrangement of the magnetic poles of the multipolar cylindrical magnet 255c is parallel to the θ armature winding.

  Next, the operation principle will be described. The principle of force generation in the fifth embodiment is the action of the magnetic field generated by the single-pole cylindrical magnets 255a, 255b and the multi-pole cylindrical magnet 255c. When a current is supplied to the X armature winding 104, a thrust is generated in the mover 200. The difference from the first to fourth embodiments is that the single N pole cylindrical portion 215a and the single S pole cylindrical portion 215b generate only thrust, and the multipolar cylindrical portion 215c generates only torque. FIG. 8 is a diagram in which current is supplied to the θ armature winding 103 and the X armature winding 104 at a phase where the U phase is maximum, and a Lorentz force is generated by the current flowing in the direction of the arrow shown in the figure. The mover 200 generates torque in the θ + direction and thrust in the X + direction. In this manner, the mover 200 realizes both rotational and linear motions.

  Unlike the first to fourth embodiments, the direct acting rotary actuator configured as described above is a field in which the single N pole cylindrical portion and the single S pole cylindrical portion generate only thrust and the multipolar cylindrical portion generates only torque. Since the structure is such that there is no large gap between the magnetic poles and the permanent magnets are effectively arranged, the gap magnetic flux density on the surface of the magnetic pole can be improved, and the torque and thrust can be further increased. Furthermore, since single-pole cylindrical magnets and multi-pole cylindrical magnets are integrally molded in a cylindrical shape and are accurately magnetized in the respective magnetization directions, it is possible to prevent the permanent magnets from being scattered due to centrifugal force and to prevent magnetic pole displacement. It is possible to suppress the generation of thrust ripples and torque ripples.

<Example 6>
Next, a sixth embodiment will be described. FIG. 9 is a cross-sectional view of the field portion of the mover according to the sixth embodiment viewed from the side and a cross-sectional view viewed from the X direction. The sixth embodiment is different from the fifth embodiment in that an X magnet 256d having the X direction as a magnetization direction is added between a single pole cylindrical magnet 256a having an outer peripheral N pole and a single pole cylindrical magnet 256b having an outer peripheral S pole. This is the point that the cylindrical magnet is constituted by a multipolar cylindrical magnet 256c magnetized in polar anisotropy. Further, as compared with the fifth embodiment, the thickness of these permanent magnets is large, and the thickness of the field yoke 203 is small.

  The linear motion rotary actuator thus configured has a larger field magnetomotive force than that of the fifth embodiment, and all of the single N pole cylindrical portion 216a, the single S pole cylindrical portion 216b, and further the multipolar cylindrical portion 216c. The gap magnetic flux density is improved on the magnetic pole surface, and the torque and thrust can be increased.

<Example 7>
FIG. 10 is a perspective view of a linear motion rotation detector and a linear motion rotation scale showing a seventh embodiment. The linear motion rotary scale 230a includes a rotary scale 231a and a linear motion scale 232a. The linear motion rotation detector 130a has a configuration in which a rotation detector 131a is disposed facing the rotation scale 231a via a gap, and a linear motion detector 132a is disposed facing the linear motion scale 232a. The rotation scale 231a and the linear motion scale 232a are arranged in series in the X direction, and the rotation detection unit 131a and the linear motion detection unit 132a are also arranged in accordance therewith. The rotary scale 231a and the linear motion scale 232a are composed of concave and convex scales with minute intervals manufactured by etching or the like, and the scales are provided over the entire circumference. On the other hand, the rotation detection unit 131a and the linear motion detection unit 132a are irradiated with laser light on the linear motion rotation scale 230a, and the laser beam reflected through the uneven scale is detected to read the angle θ and the position X. Optical detection means is provided. Here, when the linear motion rotation scale 230a rotates and linearly moves in accordance with the mover, the linear motion rotation detector 130a can obtain the angle θ and the position X.
In such a configuration, the mobile operating range L _S in the X direction length L _theta and the movable element 200 of the theta scale 231 in the present invention is the relationship of the formula 1.
L _θ ≧ L _S (1)
Further, the θ-direction opening angle β _{θ of} the X scale 232 and the rotational movement range β _S of the mover 200 have the relationship of Expression 2 and Expression 3.
When β _S <360 (degrees), β _S ≦ β _θ <360 (degrees) (2)
When β _S ≧ 360 (degrees), β _θ = 360 (degrees) (3)
It is said. Since the operation range in the first embodiment is the same as that shown in the prior art, the rotation operation range is β _S = 360 degrees, and the movement operation range is L _S = 2γ. Accordingly, the X-direction length L _{θ of} the θ scale 231 and the θ-direction opening angle β _θ of the X scale 232 are set in Expressions 4 and 5.
L _θ ≧ 2γ (4)
β _θ = 360 (degrees) (5)
Next, the detection principle of the rotation angle and movement position of the θX detector will be described. The θ scale 231 and the X scale 232 of the θX scale 230 are configured by slits carved on the surface of a stainless steel cylinder. On the other hand, the θ detector 131 and the X detector 132 arranged in the detector frame 133 are optical detectors that irradiate laser light and read reflected light. The difference between the presence / absence of the θ direction slit and the X direction slit of the θX scale 230 appears as a difference in reflected light, and the θ detection unit 131 and the X detection unit 132 detect the difference as a rotation angle and a movement position.

  The linear motion rotary actuator configured as described above has an angle θ and a position X, even if the mover rotates or linearly moves by a linear motion rotary scale in which a rotary scale and a linear motion scale are formed in a cylindrical shape. Can be detected. As a result, the rotational operation and the linear motion operation of the mover can be realized with a simple mechanism by speed and position feedback control using the values of the actual angle θ and the position X. Further, since the rotary scale and the linear scale are provided over the entire circumference of the cylindrical linear rotary scale, it is possible to detect multiple rotations of the mover. In addition, since the scale of unevenness carved precisely is detected by optical means, it is possible to detect a highly accurate angle and position, and the actual rotation angle and moving position values are input to a controller (not shown), Speed and position feedback control is performed, and precise rotation and movement of the mover can be realized with a simple mechanism.

<Example 8>
Next, an eighth embodiment will be described. FIG. 11 is a perspective view of a linear motion rotation detector and a linear motion rotation scale showing an eighth embodiment. The eighth embodiment differs from the seventh embodiment in that the linear motion rotation scale 230b is composed of a permanent magnet in which the north and south poles are magnetized at a predetermined interval, and the linear motion rotation detector 130b is provided with magnetic detection means. Is a point. On the surface of the permanent magnet of the rotary scale 231b, N poles and S poles are magnetized at a constant interval in the θ direction, and on the surface of the permanent magnet of the linear scale 232b, there are N poles and S poles in the X direction. The magnetic poles are magnetized at regular intervals. The strength and polarity of the magnetic pole are detected by a magnetic detection means.

  The linear motion rotary actuator configured as described above can detect the angle θ and the position X even if the mover rotates or linearly moves, as in the seventh embodiment. As a result, the rotational operation and the linear motion operation of the mover can be realized with a simple mechanism by speed and position feedback control using the values of the actual angle θ and the position X. Further, since the rotary scale and the linear scale are provided over the entire circumference of the cylindrical linear rotary scale, it is possible to detect multiple rotations of the mover. Furthermore, since the magnetic detection means having higher heat resistance than the optical type is used, it can be used even in applications where the ambient temperature is high.

<Example 9>
Next, a ninth embodiment will be described. FIG. 12 is a perspective view of a linear motion rotation detector and a linear motion rotation scale showing the ninth embodiment. The ninth embodiment differs from the seventh and eighth embodiments in that the linear motion rotation scale 230c is made of a soft magnetic material shaped like an uneven surface, and a so-called resolver having an excitation winding and a detection winding in the linear motion rotation detector 130c. It is the point which provided the means to detect by the principle of. The surface of the rotary scale 231c is provided with irregularities in the θ direction at regular intervals, and the surface of the linear motion scale 232c is provided with irregularities in the X direction at regular intervals. A change in the gap length caused by the unevenness is detected as an inductance change.

  The linear motion rotary actuator configured as described above can detect the angle θ and the position X even if the mover rotates or linearly moves, as in the seventh and eighth embodiments. As a result, precise rotation and linear motion of the mover can be realized with a simple mechanism by speed and position feedback control using the values of the actual angle θ and position X. Further, since the rotary scale and the linear scale are provided over the entire circumference of the cylindrical linear rotary scale, it is possible to detect multiple rotations of the mover. Furthermore, since the detection means is a resolver type having higher heat resistance than the optical type, it can be used even in applications where the ambient temperature is high.

<Example 10>
Next, a tenth embodiment will be described. FIG. 13 is a perspective view of the linear motion rotation detector and the linear motion rotation scale showing the tenth embodiment. The tenth embodiment differs from the seventh to ninth embodiments in that the rotary scale 231d and the linear scale 232d of the linear motion rotary scale 230d are provided in the half circumference, and the rotary scale 231d and the linear motion scale 232d are arranged in parallel in the linear motion direction. This is the point

  Unlike the seventh to ninth embodiments, the direct-acting rotary actuator configured as described above can shorten the direct-acting rotary scale and reduce the size of the direct-acting rotary actuator in applications where the rotational operation is restricted within a half circumference.

<Example 11>
Next, Example 11 of the present invention will be described. FIG. 14 is a perspective view of the θX detector and the θX scale of Example 11. Example 11 differs from Examples 7 to 10 in that the θ scale 231e and the X scale 232e are crossed in a grid pattern. Further, the θ detector 131e and the X detector 132e are arranged so as to be shifted in the θ direction in accordance with the positions of the intersecting θ scale 231e and X scale 232e.
Next, the detection principle of the rotation angle and movement position of the θX detector will be described. The θ scale 231e and the X scale 232e of the θX scale 230e are configured by slits carved in a lattice shape on the surface of a stainless steel cylinder. On the other hand, the θ detector 131e and the X detector 132e arranged in the detector frame 133e are optical detectors that read the reflected light by irradiating laser light, but can detect slits that intersect in a lattice pattern. In this case, a diffraction interference phenomenon such as a triangular grating optical system is used. The difference between the presence or absence of the θ-direction slit and the X-direction slit of the θX scale 230e appears as a difference in reflected light, and the difference is detected by the θ detection unit 131e and the X detection unit 132e as the rotation angle and the movement position.

  With such a configuration, as described in the seventh embodiment, the actual rotation angle and the value of the movement position are input to a controller (not shown), speed and position feedback control is performed, and a precise rotation operation of the mover is performed. The moving operation can be realized with a simple mechanism. Further, since the θX scale has a configuration in which the θ scale and the X scale are integrated, the length of the θX scale can be shortened, and the linear motion rotary actuator can be miniaturized.

  In the first to sixth embodiments, the number of magnetic poles in the X direction is set to 2, but a similar field structure may be arranged in the linear motion direction so as to be configured with two or more magnetic poles. Further, in Examples 5 and 6, the magnetic pole surface is configured to be a permanent magnet. However, in the same manner as in Examples 2 to 4, a structure in which an iron core is provided and a permanent magnet is embedded therein, or between the iron cores is permanent. It is good also as a structure which pinches | interposes a magnet. Moreover, although the cylindrical magnet, the monopolar cylindrical magnet, and the multipolar cylindrical magnet have been described as the integrally formed permanent magnet, they may be configured by connecting block magnets. In addition, although the description has been made using the permanent magnet to form the magnetic pole, the magnetic pole may be formed of iron core teeth. Moreover, in Examples 7-11, although the field and the linear motion rotation scale were shown by the structure which arrange | positions a needle | mover and an armature winding and a linear motion rotation detector in a stator, the reverse may be sufficient.

  The present invention can provide a linear motion rotary actuator that generates a large torque and thrust with a single actuator and realizes a precise rotational motion and linear motion. Therefore, the present invention can be applied to uses such as a mounter head of a chip mounter device and inspection heads of various inspection devices that require two-degree-of-freedom operation of linear motion and rotation.

100 Stator 101 Motor frame 102 Armature core 103, 104 θ armature winding, X armature winding 103a, 104a Saddle coil, ring coil 105 Motor terminal 106 Slide rotary bush 107, 108 L side bracket, anti-L Side bracket 130, 130a, 130b, 130c, 130d Linear motion rotation detector 131, 131a, 131b, 131c, 131d, 131e Rotation detector 132, 132a, 132b, 132c, 132d, 132e Linear motion detector 133 Detector frame 134 Detector terminal 200 Movable element 201 Output shaft 202 Field magnet portion 203 Field yokes 230, 230a, 230b, 230c, 230d, 230e Linear motion rotation scales 231a, 231b, 231c, 231d, 231e Rotary scales 232a, 232b, 32c, 232d, 232e Linear motion scales 211a, 212a, 213a, 214a Double N pole cylinders 211b, 212b, 213b, 214b Double S pole cylinders 215a, 216a Single N pole cylinders 215b, 216b Single S pole cylinders 215c, 216c Multipolar cylindrical portion 250a, 250b, 251a, 251b, 252a, 252b Block magnet 251c, 252c, 253c, 254c, 256d X magnet 254a, 254b, 255a, 255b, 256a, 256b Monopolar cylindrical magnet 255c, 256c Multipolar cylinder Magnets 262a, 262b Cylindrical iron cores 263a, 263b, 264a, 264b Claw pole iron cores

Claims (9)

A mover having a permanent magnet or iron core teeth as a magnetic field, a θ armature winding that generates a rotating magnetic field with a pole pitch λ in the rotation θ direction, and a traveling magnetic field with a pole pitch γ in the linear motion X direction It is composed of a stator having an armature winding, and a current is passed through the θ armature winding and the X armature winding to generate torque in the θ direction and thrust in the X direction to move the movable armature winding. A direct-acting rotary actuator that performs rotational and linear motions of the child,
The field of the mover includes a double N pole cylindrical portion having a plurality of N poles on the magnetic pole surface, and a double S pole cylindrical portion having a plurality of S poles on the magnetic pole surface,
The double N pole cylindrical portion and the double S pole cylindrical portion are arranged so that the magnetic pole spacing between the N pole of the double N pole cylindrical portion and the S pole of the double S pole cylindrical portion is γ in the X direction and λ in the θ direction. And a permanent magnet having a magnetization direction in the X direction between the double N pole cylindrical portion and the double S pole cylindrical portion.   The linear motion rotary actuator according to claim 1, wherein permanent magnets are arranged on the surfaces of the double N pole cylindrical portion and the double S pole cylindrical portion.   2. The linear motion rotary actuator according to claim 1, wherein an iron core made of a soft magnetic material is provided on the surfaces of the double N pole cylindrical portion and the double S pole cylindrical portion, and a permanent magnet is embedded in the iron core. A mover having a permanent magnet or iron core teeth as a magnetic field, a θ armature winding that generates a rotating magnetic field with a pole pitch λ in the rotation θ direction, and a traveling magnetic field with a pole pitch γ in the linear motion X direction It is composed of a stator having an armature winding, and a current is passed through the θ armature winding and the X armature winding to generate torque in the θ direction and thrust in the X direction to move the movable armature winding. A direct-acting rotary actuator that performs rotational and linear motions of the child,
A single N pole cylindrical portion having only the N pole on the magnetic pole surface, a cylindrical portion having only the S pole on the magnetic pole surface, and a single S pole having both the N pole and the S pole on the magnetic pole surface. With a cylindrical part,
The magnetic pole spacing between the N pole of the single N pole cylindrical portion and the S pole of the single S pole cylindrical portion is γ in the X direction, and the magnetic pole spacing between the N pole and S pole of the multipolar cylindrical portion is A linear motion rotary actuator characterized in that λ is set in the θ direction.   The linear motion rotary actuator according to claim 4, wherein a permanent magnet having the X direction as a magnetization direction is disposed between the single N pole cylindrical portion and the single S pole cylindrical portion.   6. The linear motion rotary actuator according to claim 4, wherein permanent magnets are arranged on the surfaces of the single N pole cylindrical portion, the single S pole cylindrical portion, and the multipolar cylindrical portion.   6. The iron core of a soft magnetic material is provided on the surface of the single N pole cylindrical portion, the single S pole cylindrical portion, and the multipolar cylindrical portion, and a permanent magnet is embedded in the iron core. Direct acting rotary actuator.   A cylindrical linear motion rotary scale having a rotary scale and a linear motion scale provided at fixed intervals in the rotational direction and the linear motion direction at one end of at least one of the movable body or the stator, and the stator or the movable The linear rotation detector which detects the rotation angle and movement position of the said needle | mover from the said rotation scale and the said linear movement scale is provided in either one end of the child so that it may oppose. 8. The linear motion rotary actuator according to any one of 7 above. A linear motion rotary actuator according to claim 8,
A linear motion rotation actuator system comprising: a controller that controls the rotation position and the movement position of the mover based on the rotation angle and the movement position detected by the linear motion rotation detector.

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