JP2012071301A5 - - Google Patents

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JP2012071301A5
JP2012071301A5 JP2011192410A JP2011192410A JP2012071301A5 JP 2012071301 A5 JP2012071301 A5 JP 2012071301A5 JP 2011192410 A JP2011192410 A JP 2011192410A JP 2011192410 A JP2011192410 A JP 2011192410A JP 2012071301 A5 JP2012071301 A5 JP 2012071301A5
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Japan
Prior art keywords
oxide film
filtration filter
micropores
porous body
mist
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JP2011192410A
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Japanese (ja)
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JP2012071301A (en
JP5810445B2 (en
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Publication of JP2012071301A5 publication Critical patent/JP2012071301A5/ja
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Claims (10)

複数の微細孔を有する多孔質構造において、酸化膜により、前記微細孔の開口形状および面内分布を維持しながら、前記微細孔の径が一様に小さくなっていることを特徴とする多孔質構造。A porous structure characterized in that, in a porous structure having a plurality of micropores, the diameter of the micropores is uniformly reduced while maintaining the opening shape and in-plane distribution of the micropores by an oxide film Construction. 複数の微細孔を有する多孔質体と、酸化膜とを備えた濾過フィルタであって、前記酸化膜により、前記微細孔の開口形状および面内分布を維持しながら、前記微細孔の径が一様に小さくなっていることを特徴とする濾過フィルタ。A filtration filter comprising a porous body having a plurality of micropores and an oxide film, wherein the oxide film maintains a shape of the micropores and an in-plane distribution while maintaining a uniform diameter of the micropores. A filtration filter characterized by being small in size. 前記酸化膜が、チタン、ガリウム、鉄、クロム、アルミニウム、マグネシウム、ジルコニウム、インジウム、スズ、バナジウムまたはシリコンの単一組成酸化膜またはこれらの混晶酸化膜であることを特徴とする請求項２記載の濾過フィルタ。 3. The oxide film is a single composition oxide film of titanium, gallium, iron, chromium, aluminum, magnesium, zirconium, indium, tin, vanadium or silicon or a mixed crystal oxide film thereof. Filtration filter. 前記酸化膜が、ミストＣＶＤ法で成膜されたものであることを特徴とする請求項２または３に記載の濾過フィルタ。 The filtration filter according to claim 2 or 3 , wherein the oxide film is formed by a mist CVD method. 前記多孔質体が、軸方向に貫通する少なくとも１つの中空空間を有する円柱状フィルタであることを特徴とする請求項２〜４のいずれかに記載の濾過フィルタ。 The porous body, the filtration filter according to any one of claims 2-4, characterized in that Ru cylindrical filter der having at least one hollow space extending in the axial direction. 前記多孔質体が、厚さ方向に貫通する前記微細孔が面内に配列されたメソポーラス基板であることを特徴とする請求項２〜４のいずれかに記載の濾過フィルタ。 The porous body, the filtration filter according to any one of claims 2-4, wherein the fine pores, wherein the Ru mesoporous substrate der arranged in a plane extending through the thickness direction. 複数の微細孔を有する多孔質体が配置された成膜室を昇温する昇温工程と、
溶液を振動させてミストを発生させるミスト発生工程と、
前記ミストを昇温後の前記成膜室内に導入し、前記多孔質体においてＣＶＤ反応を起こさせ、前記多孔質体に酸化膜を成膜する成膜工程と、
を含むことを特徴とする濾過フィルタの製造方法。 A temperature raising step for raising the temperature of a film forming chamber in which a porous body having a plurality of micropores is disposed;
A mist generating step of generating mist by vibrating the solution;
A film forming step of introducing the mist into the deposition chamber after heated, to cause a Oite CVD reaction on the porous body, an oxide film before Symbol porous body,
The manufacturing method of the filtration filter characterized by including. 前記酸化膜が、チタン、ガリウム、鉄、クロム、アルミニウム、マグネシウム、ジルコニウム、インジウム、スズ、バナジウムまたはシリコンの単一組成酸化膜またはこれらの混晶酸化膜であることを特徴とする請求項７に記載の製造方法。   8. The oxide film according to claim 7, wherein the oxide film is a single composition oxide film of titanium, gallium, iron, chromium, aluminum, magnesium, zirconium, indium, tin, vanadium or silicon, or a mixed crystal oxide film thereof. The manufacturing method as described. 前記多孔質体が、軸方向に貫通する少なくとも１つの中空空間を有する円柱状フィルタであることを特徴とする請求項７または８に記載の製造方法。 The porous body production method according to claim 7 or 8, characterized in that a cylindrical filter having at least one hollow space extending in the axial direction. 請求項２〜６のいずれかに記載の濾過フィルタと、
前記濾過フィルタの少なくとも前記酸化膜が成膜された面に光を照射する光照射手段と、
を備えたことを特徴とする濾過装置。
The filtration filter according to any one of claims 2 to 6,
A light irradiating means for irradiating at least a surface of the filtration filter on which the oxide film is formed;
A filtration apparatus comprising:
JP2011192410A 2010-09-03 2011-09-05 Method for producing porous body and filtration filter Active JP5810445B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2011192410A JP5810445B2 (en) 2010-09-03 2011-09-05 Method for producing porous body and filtration filter

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2010197442 2010-09-03
JP2010197442 2010-09-03
JP2011192410A JP5810445B2 (en) 2010-09-03 2011-09-05 Method for producing porous body and filtration filter

Publications (3)

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JP2012071301A JP2012071301A (en) 2012-04-12
JP2012071301A5 true JP2012071301A5 (en) 2014-10-23
JP5810445B2 JP5810445B2 (en) 2015-11-11

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Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5397794B1 (en) 2013-06-04 2014-01-22 Ｒｏｃａ株式会社 Method for producing oxide crystal thin film
JP6233959B2 (en) * 2013-10-10 2017-11-22 株式会社Flosfia Method for producing oxide crystal thin film
JP6587800B2 (en) 2014-12-26 2019-10-09 Ｊｆｅスチール株式会社 Manufacturing method of laminated iron core
JP7011119B2 (en) * 2017-02-21 2022-02-10 株式会社 京都モノテック A monolith filter, a solid separation device using it, and a method for manufacturing the monolith filter.

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59102403A (en) * 1982-12-01 1984-06-13 Mitsubishi Heavy Ind Ltd Production of porous diaphragm
JP2002066278A (en) * 2000-08-31 2002-03-05 Japan Science & Technology Corp Titanium dioxide porous film, and method and apparatus for treating water using the same
JP2007203241A (en) * 2006-02-03 2007-08-16 Tottori Univ Separation membrane, its manufacturing method and substance separation method
JP4371427B2 (en) * 2007-03-29 2009-11-25 株式会社ノリタケカンパニーリミテド Method for producing hydrogen gas separator
US20090107330A1 (en) * 2007-10-30 2009-04-30 Yunfeng Gu Amorphous silica hybrid membrane structure

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