JP2012064803A5 - - Google Patents

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Publication number
JP2012064803A5
JP2012064803A5 JP2010208375A JP2010208375A JP2012064803A5 JP 2012064803 A5 JP2012064803 A5 JP 2012064803A5 JP 2010208375 A JP2010208375 A JP 2010208375A JP 2010208375 A JP2010208375 A JP 2010208375A JP 2012064803 A5 JP2012064803 A5 JP 2012064803A5
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JP
Japan
Prior art keywords
fluid
outlet
target surface
inflow port
detection target
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2010208375A
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English (en)
Japanese (ja)
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JP2012064803A (ja
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Publication date
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Priority to JP2010208375A priority Critical patent/JP2012064803A/ja
Priority claimed from JP2010208375A external-priority patent/JP2012064803A/ja
Publication of JP2012064803A publication Critical patent/JP2012064803A/ja
Publication of JP2012064803A5 publication Critical patent/JP2012064803A5/ja
Pending legal-status Critical Current

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JP2010208375A 2010-09-16 2010-09-16 表面検出装置、露光装置、表面検出方法、露光方法、及びデバイス製造方法 Pending JP2012064803A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2010208375A JP2012064803A (ja) 2010-09-16 2010-09-16 表面検出装置、露光装置、表面検出方法、露光方法、及びデバイス製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010208375A JP2012064803A (ja) 2010-09-16 2010-09-16 表面検出装置、露光装置、表面検出方法、露光方法、及びデバイス製造方法

Publications (2)

Publication Number Publication Date
JP2012064803A JP2012064803A (ja) 2012-03-29
JP2012064803A5 true JP2012064803A5 (enExample) 2013-10-31

Family

ID=46060193

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010208375A Pending JP2012064803A (ja) 2010-09-16 2010-09-16 表面検出装置、露光装置、表面検出方法、露光方法、及びデバイス製造方法

Country Status (1)

Country Link
JP (1) JP2012064803A (enExample)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05280962A (ja) * 1991-07-12 1993-10-29 Fukae Kosakusho:Kk 板材厚み測定装置
JPH09280846A (ja) * 1996-04-17 1997-10-31 Hiroshi Akashi 変位センサー
JP2004053299A (ja) * 2002-07-17 2004-02-19 Tokyo Seimitsu Co Ltd 板状材ワークの厚さ測定機
SG107157A1 (en) * 2002-12-19 2004-11-29 Asml Holding Nv Liquid flow proximity sensor for use in immersion lithography

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