JP2012041582A - Whole roll, manufacturing method of whole roll and processing method of base material - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a whole roll, a manufacturing method of a whole roll and a processing method of a base material using the whole roll, which prevents a surface of the base material and a face processing applied thereto from being damaged and improves productivity.SOLUTION: A surface to be processed of a long sheet-like base material is abutted to be laminated. The whole roll is conveyed and separated in the longitudinal direction using the whole roll formed by winding and processing is applied to each base material. Consequently, the problem is solved.

Description

  The present invention relates to an original roll obtained by winding a long base material, a method for producing the original roll, and a method for treating a base using the original roll.

Packaging used for packaging parts, parts, food, clothing, electronic parts, etc. that require moisture resistance in various devices such as optical devices, display devices such as liquid crystal displays and organic EL displays, semiconductor devices, thin film solar cells, etc. As a material, a gas barrier film formed by forming a gas barrier film (water vapor barrier film) on a base material is used.
As gas barrier films, films made of various inorganic compounds such as silicon nitride, silicon oxide, silicon oxynitride, and aluminum oxide are known. Further, these gas barrier films are formed by a vacuum film forming method such as plasma CVD, sputtering, or vacuum deposition.

Not only the production of such a gas barrier film, but also a film (hereinafter referred to as “functional layer” for convenience) that expresses a desired function such as light reflection, light reflection prevention, and surface protection on the surface of the substrate. Functional films formed by film formation are used for various applications.
Moreover, in the production of such a functional film, as a method that enables production with high productivity and production efficiency, a long base material (substrate) is fed out from a base material roll that is wound into a roll shape. The film is formed by so-called roll-to-roll (hereinafter also referred to as RtoR), in which a gas barrier film or the like is formed while being conveyed in the longitudinal direction, and the film-formed substrate is wound into a roll. Devices for performing are known.
This RtoR apparatus can be used not only for film formation on a base material, but also for substrate surface treatment such as treatment of substrate surface activation and surface roughening treatment using plasma or the like.

By the way, in manufacturing such a functional film, in order to manufacture a high-quality product, it is important that the surface (surface to be processed) of the base material on which the functional layer is formed is not damaged.
Similarly, in order to manufacture a high-quality product, it is important that the surface of the formed film (surface of the processing surface) is not damaged.

However, the RtoR apparatus requires a pass roller (guide roller) for transporting the base material before film formation (processing) and the base material on which the film has been formed through a predetermined transport path. There is a problem that the surface of the base material (deposition surface) and the surface of the film formed are damaged by the contact.
Further, when the formed substrate is wound up, the formed film and the back surface (non-deposited surface of the substrate) come into contact with each other, and this contact damages the surface of the formed film. There is also.

In order to solve such a problem, in the film forming apparatus using RtoR, the surface of the base material is protected with a protective film.
For example, in Patent Document 1, in the production of a polycarbonate film with a hard coat layer by RtoR, a substrate roll formed by laminating a protective film on the surface of a substrate and winding it into a roll is used, and the substrate is elongated. Before applying the hard coat layer, the protective film is peeled off to expose the surface, and then the hard coat layer is applied, dried and irradiated with ultraviolet rays, and then the hard coat layer is cured. It is described that it is wound into a shape.

  Further, in Patent Document 2, in a continuous film forming apparatus using RtoR, similarly, a protective film (protective material) is laminated on the surface of a base material and a base material roll wound in a roll shape is used, and the substrate is elongated. The film is transported in the direction and the protective film is peeled off before film formation, and the surface of the base material is exposed to form a film. Then, another film is laminated in contact with the formed film. It is described that the laminated body of a used base material and a protective film is again wound into a roll shape.

JP 2002-121306 A JP 2008-189957 A

According to the method and apparatus described in Patent Document 1 and Patent Document 2, film formation can be performed on a substrate surface in an appropriate state without damaging the surface of the substrate before film formation.
In particular, according to the continuous film forming apparatus described in Patent Document 2, a protective film is laminated not only on the surface of the base material but also on the surface of the base material after film formation (the surface of the formed film). Therefore, film damage caused by contact between the deposited film and the pass roller and film damage caused by contact between the deposited film and the back surface due to winding can be suitably prevented. Can be manufactured stably.

However, in an apparatus using such a protective film, since the protective film is disposable, there is a problem that an increase in manufacturing cost cannot be avoided.
In particular, as in Patent Document 2, in order to laminate the protective film even after film formation, two protective films are required, and the manufacturing cost is increased accordingly.

  An object of the present invention is to solve the problems of the prior art, and it is possible to protect the treated surface of the substrate and the treated surface without using a protective film, and at low cost. In addition, an original roll that enables efficient base film processing such as film formation and roughening treatment, a method for producing the original roll, and a substrate processing method using the original roll It is to provide.

  In order to achieve the above object, the raw roll of the present invention is formed by superposing two long sheet-like base materials in contact with the surface to be processed and winding the roll into a roll shape. Providing a featured laminated fabric roll.

  In such a raw roll according to the present invention, at least one of the two substrates is formed by forming a film on the surface of the support, and the surface of the film is a surface to be processed. Preferably, at least one of the two substrates is a surface to be treated, and at least one of the two substrates is a surface to be treated. It is preferable that at least one of the surface roughness and the surface hardness is different between the opposite surface of the surface to be processed.

  Moreover, the manufacturing method of the original fabric roll of this invention draws out the said base material from two base material rolls formed by winding a long sheet-like base material in roll shape, and conveys two base materials. However, the production of an original fabric roll characterized in that two substrates are overlapped in a state where the surfaces to be treated are in contact with each other, and the two substrates are overlapped and wound into a roll shape Provide a method.

  In such a method for manufacturing a raw fabric roll of the present invention, during the period from when the base material is pulled out from the base material roll and the two base materials are overlapped, a film is formed on one surface of at least one base material, It is preferable that the surface of the formed film is a surface to be treated, and the surface to be treated of at least one of the substrates is drawn from the substrate roll until the two substrates are overlapped. In addition, it is preferable to perform a surface treatment. Further, during the period from when the base material is pulled out from the base material roll and the two base materials are superposed, at least one surface of the base material is superposed. Pretreatment is preferably performed.

  Furthermore, in the substrate processing method of the present invention, a laminate of two base materials is pulled out from the raw roll of the present invention and conveyed in the longitudinal direction, and separated into individual base materials. Provided is a substrate processing method characterized by processing a surface to be processed.

In such a substrate processing method of the present invention, after the processing is performed on the surface to be processed of each base material, the processed surfaces are brought into contact with each other, the two base materials are overlapped, and the roll shape is again formed. In this case, when the two substrates are overlapped, it is preferable that the relative position in the transport direction of each substrate coincides with the state of the original roll. Alternatively, when the two base materials are superposed, the relative position in the transport direction of each base material is preferably different from the state of the original roll, and the surface to be processed of the base material is processed. And before the two substrates are overlaid by contacting the treated surfaces, a pretreatment for superposition is performed on the treated surface of at least one of the substrates. In this case, from the position where the processing surface of the base material is processed, the overlapping is performed. Carrying distance to the position at which is different from each other in two substrates, at least the conveying distance is longer substrate is preferably subjected to a pretreatment for the overlay.
Or after performing the said process to the to-be-processed surface of each base material, it is preferable to wind each base material separately in roll shape.
Furthermore, it is preferable that the treatment applied to the surface of the substrate is at least one of film formation and surface treatment.

  The present invention uses a raw roll obtained by winding a laminate in which two long base materials are laminated in contact with a surface to be processed into a roll shape, and the base laminate is formed from the raw roll. Sending out and separating the base material into two base materials while conveying the base material in the longitudinal direction, and performing processing such as film formation, preferably, the surface of the treated surface of the two base materials Are brought into contact with each other and laminated, and again wound into a roll.

Therefore, according to the present invention, the surface to be processed of the substrate and the pass roller do not come into contact with each other. Can produce quality products. In addition, it is possible to avoid contact between the surface to be treated and the treated surface and the back roller (non-treated surface of the base material) when wound in a roll shape. Can also be prevented.
Furthermore, according to the present invention, since two substrates can be processed at the same time, productivity can also be improved.
Therefore, according to the present invention, it is possible to manufacture a high-quality product free from damage to the base material, the formed film, etc. at low cost and with high productivity.

(A) is an example of a laminate that is a raw roll of the present invention, (B) is an example of a raw roll of the present invention, and (C) is a laminate that is a raw roll of the present invention. It is a figure which shows another example each conceptually. It is a figure which shows notionally an example of the manufacturing apparatus which enforces the manufacturing method of the original fabric roll of this invention. It is a figure which shows notionally an example of the processing apparatus which enforces the base-material processing method of this invention. It is a figure which shows notionally another example of the processing apparatus which enforces the base-material processing method of this invention. It is a figure which shows notionally another example of the processing apparatus which enforces the base-material processing method of this invention.

Hereinafter, the raw fabric roll, the production method of the raw fabric roll, and the substrate processing method of the present invention will be described in detail based on preferred embodiments shown in the accompanying drawings.

In FIG. 1, an example of the original fabric roll of this invention is shown notionally.
The raw fabric roll of the present invention is formed by laminating two long base materials (substrates) S1 and S2 in a state in which the surfaces to be processed (hereinafter referred to as surfaces) used for film formation and surface treatment are combined. The laminate is wound into a roll.
Specifically, as shown in FIG. 1 (A), two long substrates S1 and S2, and a surface S1-f of the substrate S1 and a surface S2-f of the substrate S2 As shown in FIG. 1 (B), the laminated body 10 (in order to clarify the configuration, the contact surface is indicated by a dotted line) is wound into a roll shape. is there.
In other words, the original fabric roll of the present invention is formed by creating a combined original fabric in which the surfaces of two long base materials (original fabrics) are combined, and winding the combined original fabric into a roll shape. .

In the raw fabric roll of the present invention, the base materials S1 and S2 are not particularly limited, and various long sheet-like materials (web-like materials) can be suitably used.
Specifically, plastic (resin) films made of organic substances such as polyethylene terephthalate (PET), polyethylene naphthalate, polyethylene, polypropylene, polystyrene, polyamide, polyvinyl chloride, polycarbonate, polyacrylonitrile, polyimide, polyacrylate, polymethacrylate, Metal webs such as aluminum and stainless steel can be suitably used as the substrate Z.

In the present invention, a long sheet-like material such as a plastic film is used as the support 14, and a protective layer, an adhesive layer, an adhesion layer, a light reflecting layer, as shown in FIG. A long layer on which a functional layer (functional layer) 16 for obtaining various functions such as a light shielding layer, a surface flattening layer, a buffer layer, a stress relaxation layer, a gas barrier film, an antireflection film, and a transparent conductive layer is formed. A sheet-like material may be used as the base material (S3 and S4).
That is, in the raw fabric roll of the present invention, the base material may be a functional film (functional sheet) on which various functional layers 16 are formed.

These functional layers 16 are all known functional films such as a gas barrier film, an antireflection film, a protective film, and a substrate film for various displays, and are formed into functional layers (to obtain a desired function). The film may be made of a known material used as a film.
Further, the functional layer 16 may be composed of one layer or a plurality of layers, and the base material S3 and / or the base material S4 may have a plurality of functional layers 16.

  When the base materials S3 and S4 formed by forming the functional layer 16 on the support 14 are used, the surface of the functional layer 16 is usually the surface to be processed, and as shown in FIG. Then, a laminated body 12 in which the surface S3-f of the base material S3 and the surface S4-f of the base material S4 are brought into contact with each other and laminated is produced, and the laminated body 12 is wound into a roll shape. And

In the raw roll of the present invention, the two long substrates S1 and S2 (S3 and S4) may be the same or different.
Therefore, the raw fabric roll of the present invention is not limited to those shown in FIGS. 1 (A) and 1 (C), and any one of the substrates has the functional layer 16 as in the substrate S1. Alternatively, the other may have the functional layer 16 like the base material S3.

Furthermore, it is preferable that at least one of the two long substrates S1 and S2 (S3 and S4) has a surface treated.
As will be described in detail later, the present invention is laminated with the surfaces of the two substrates in contact with each other, and the laminate is wound into a roll to obtain a protective film (protective film / protective sheet) or the like. The surface of the base material is protected without being used. When at least one of the base materials is subjected to a surface treatment, surface deterioration due to contact with a pass roller or the like is likely to occur. That is, by using such a base material, the effect of the present invention is achieved. Is preferable in that it can be expressed more suitably.

In the present invention, the surface treatment applied to the surface of the substrate is not particularly limited, and examples thereof include activation treatment, roughening treatment, adhesion improving treatment, etching, and the like.
For the surface treatment of these substrates, for example, plasma irradiation is used for roughening treatment or etching, and ion irradiation or plasma irradiation is used for activation treatment, depending on the type of substrate. Then, it may be performed by various known methods that are performed in the surface treatment of the sheet-like material.

  It is preferable that at least one of the surface roughness and the hardness of the base materials S1 and S2 is different between the front surface and the back surface (surface to be processed and reverse surface (non-processed surface)). Specifically, it is preferable that the surface has a lower surface roughness than the back surface and / or the back surface is harder than the surface.

In a normal base material roll formed by winding a base material in a roll shape, the base material is wound in a state where the front surface and the back surface of the base material are in contact with each other. Therefore, it often happens that the surface is damaged by contact with the back surface. In particular, when the back surface has a larger surface roughness than the front surface, or when the back surface is harder than the front surface, the surface is greatly damaged by contact with the back surface.
As described above, the present invention protects the surface of the base material without using a protective film by winding the laminate in contact with the surfaces of the two base materials in a roll shape. In the case where base materials having different surface roughness and hardness are used on the front surface and the back surface, the effects of the present invention are preferable in that the effect can be expressed more suitably.

Here, the raw roll of the present invention is a raw roll, that is, two long base materials that are raw materials for some functional film are laminated with their surfaces in contact with each other, and wound into a roll shape. It will be.
Therefore, the base roll of the present invention is always in contact with the base material of the stacking partner by peeling the base material S1 and the base material S2 at least once or the base material S3 and the base material S4. The surface (surface to be treated) is subjected to some kind of treatment such as film formation or surface treatment, and is supplied to the next process in a peeled state, or supplied as a product in a peeled state, or the surface again The material roll is abutted and wound to form the original roll of the present invention.

Moreover, since the base material which comprises the original fabric roll of this invention is an original fabric to the last, in the state which base material S1 and base material S2 were laminated | stacked, base material S3 and base material S4 were laminated | stacked In the state, it is not used as a final product (functional film).
That is, in the raw fabric roll of the present invention, finally, the base material S1 and the base material S2 are peeled, and the base material S3 and the base material S4 are peeled off. It is used as various known functional films such as antireflection films, protective films, and substrate films for various displays.

In FIG. 2, the conceptual diagram of an example of the manufacturing apparatus which manufactures the said original fabric roll of this invention with the manufacturing method of this invention is shown.
As an example, the manufacturing apparatus 20 shown in FIG. 2 produces the base materials S3 and S4 formed by forming the functional layer 16 on the surface of the support 14 shown in FIG. It is an apparatus for manufacturing a raw roll obtained by laminating S4 in contact with the surface and winding it into a roll. In the illustrated example, the manufacturing apparatus 20 includes a supply unit 24, a processing unit 26, a stacking roller 28, and a winding shaft 30.

In the manufacturing apparatus 20, the support 14 that is a long sheet is loaded (supported) on the rotation shaft 34 of the supply unit 24 as a supply roll 32 wound in a roll.
When the supply roll 32 is loaded on the rotary shaft 34, the support 14 is pulled out from both supply rolls 32, guided by the pass roller p, and conveyed to the processing unit 26. The pass roller p is a known pass roller (guide roller) for transporting a long sheet-like material along a predetermined transport path.

The processing unit 26 is a part where the functional layer 16 is formed on the surface of the support 14, and includes two drums 38 a and 38 b corresponding to each support 14 and a processing unit 40.
The drums 38a and 38b have a cylindrical shape that conveys the support 14 wound around the circumferential surface. One of the supports 14 is wound around a predetermined region of the peripheral surface of the drum 38a and the other is the drum 38b, and is conveyed in the longitudinal direction while being held at a predetermined processing position. A film is formed.

The processing means 40 is a known film forming means for forming the functional layer 16 on the surface of the support 14.
For example, if the processing means 40 forms the functional layer 16 by ICP-CVD (inductively coupled plasma CVD), the processing means 40 may be used for an induction coil for forming an induction magnetic field or a film formation region. It has gas supply means for supplying the source gas.
If the processing means 40 forms the functional layer 16 by CCP-CVD (capacitive coupling type plasma CVD), the processing means 40 is hollow and has a large number of small holes as an electrode and a source gas supply section. It has a shower electrode that operates, a high-frequency power source that supplies plasma excitation power, a source gas supply means, and the like.
If the processing unit 40 forms the functional layer 16 by sputtering, the processing unit 40 includes a target holding unit, a high-frequency electrode, a sputtering gas supply unit, and the like. If the processing means 40 forms a film by reactive sputtering, the processing means 40 further includes a reaction gas supply means.
If the processing means 40 is for depositing the functional layer 16 in the film forming chamber by vacuum deposition, the processing means 40 is a heating means for film forming materials such as an evaporation source (crucible), an electron gun, and a resistance heating power source. It is comprised.
If the processing unit 40 forms the functional layer 16 by coating, the processing unit 40 may be a coating unit, a drying unit, an ultraviolet ray source, an electron beam source, or the like, which is a functional layer 16 such as a roll coat or a gravure coat. It has a curing means such as.
Further, if the processing means 40 forms the functional layer 16 by flash vapor deposition, the spraying means for spraying a liquid containing a film forming material such as an organic compound monomer (oligomer) or the spraying means sprayed under reduced pressure. A heating means for heating and evaporating the fine liquid to adhere to the support 14, a drying means, a curing means such as an ultraviolet ray source and an electron beam source, and the like are included.

In the example of illustration, the two supply rolls 32 send out the support body 14 so that the surface of each other may face. The drums 38 a and 38 b are both in contact with the back surface of the support 14 to transport the support 14 and sandwich the processing means 40 in a direction perpendicular to the transport direction of the support 14. Be placed.
Therefore, the processing means 40 is arranged to face the surfaces of both supports 14 and can form the functional layer 16 on the surfaces of both supports 14 conveyed to the drums 38a and 38b. The processing means 40 may form a different film on the support 14 or may form a film on only one side.

The two supports on which the functional layer 16 is formed by the processing means 40 while being transported by the drums 38a and 38b, that is, the base material S3 and the base material S4 are transported along a predetermined transport path by the pass roller p, It is conveyed to the lamination roller 28.
The laminating roller 28 is a known roller that stacks two long sheets while conveying them. As shown in FIG. 2, since the base material S3 and the base material S4 face each other's functional layer 16, the laminating roller 28 superimposes both the base material S3 and the base material 14 by superimposing the two supports 14 conveyed. The functional layer 16 of the material S4 is brought into contact, that is, as shown in FIG. 1C, the surface (surface to be processed) S3-f and the surface S4-f are brought into contact with each other to be laminated to form the laminated body 12. .

  The laminated body 12 laminated by the laminating roller 28 is conveyed to the take-up shaft 42 by the pass roller p, wound in a roll shape by the take-up shaft 42, and used as an original fabric roll 46.

Note that the processing means 40 may perform surface treatment of the surface of the support 14 (at least one) instead of performing film formation. Alternatively, the selected one of surface treatment and film formation may be performed.
In the case where only the surface treatment is performed on the support 14, the support 14 subjected to the surface treatment becomes the base material S <b> 1 and the base material S <b> 2, and the surfaces (surfaces subjected to the surface treatment) are brought into contact with each other and laminated The laminated body 10 is wound into a roll shape by the take-up shaft 30 to be a raw roll.

The surface treatment means of the support 14 is not particularly limited, and various known means according to the treatment to be performed can be used.
For example, if the processing means 40 performs an activation process, a roughening process, an etching process or the like on the surface of the support 14 by plasma, the processing means is a shower as in the CCP-CVD film forming means. It has an electrode, a high frequency power source, a gas supply means, and the like.

Moreover, in the manufacturing method of the raw fabric roll of this invention, it is not limited to performing such a film-forming and surface treatment to the support body 14, The support body 14 is shown in FIG. 1 (A) as it is. As base material S1 and base material S2, surface S1-f and surface S2-f are contacted, both base materials are laminated, and this laminated body 10 is wound, and it is good also as an original fabric roll.
Further, an apparatus for manufacturing a raw fabric roll without performing film formation or surface treatment may not have the processing unit 26.
Alternatively, a plurality of processing units 26 may be provided, and both film formation and surface treatment may be performed on a single support 14, or a plurality of functional layers 16 may be formed.

As is clear from the above description, the raw fabric roll 46 of the present invention is formed by laminating the base material S3 and the base material S4 (base material S1 and base material S2) and contacting the surface (surface to be processed). And it is set as the laminated body 12 (laminated body 10), and this laminated body 12 is wound in roll shape. Therefore, in a state wound in a roll shape, the front surface and the back surface do not come into contact with each other, and the surface can be prevented from being damaged by the back surface.
In addition, since the surfaces of the base material S3 and the base material S4 do not come into contact with the pass roller p after forming the laminated body 12, damage to the base material surface by the pass roller p can be greatly reduced.
In addition, since the present invention protects the surface of the substrate without using a protective film (protective film / protective sheet), the product cost can be greatly reduced.

In FIG. 3, the conceptual diagram of an example of the processing apparatus which implements the base-material processing method of this invention using such an original fabric roll 46 is shown.
This processing apparatus 50 forms a predetermined film (performs surface treatment) on the surface of each of the base material S3 and base material S4 of the raw fabric roll 46, and applies the formed film (processed surface). In contact with each other, two substrates are laminated and wound again into a roll.
In the illustrated example, the processing device 50 includes a rotation shaft 52, a separation roller 54, a processing unit 56, a stacking roller 58, and a winding shaft 60.

In FIG. 3, the base material treatment of the present invention is exemplified by a raw fabric roll 46 formed by winding the laminate 12 of the base material S3 and the base material S4 formed by forming the functional layer 16 on the support 14. Although the method will be described, the operation and the like are performed even when a raw roll formed by winding the laminate 10 in which the surface S1-f of the substrate S1 and the surface S2-f of the substrate S2 are in contact is used. The same is true.
In this regard, the example shown in FIG. 4 and the example shown in FIG. 5 are the same.

An original fabric roll 46 formed by winding the laminated body 12 (laminated body 10) of the base material S3 and the base material S4 is loaded (supported) on the rotary shaft 52.
When the original roll 46 is loaded on the rotating shaft 52, the laminate 12 is pulled out, guided by the pass roller p, and conveyed to the separation roller 54. The separation roller 54 is a known roller that separates (peels) a laminate of two long sheet-like materials while being conveyed.
The laminated body 12 is separated into the base material S3 and the base material S4 (base material S1 and base material S2) by the separation roller 54, and is conveyed to the processing unit 56.

The processing unit 56 forms predetermined films on the surface S3-f of the base material S3 and the surface S4-f of the base material S4 (the surface S1-f of the base material S1 and the surface S2-f of the base material S2). It is a part and has two drums 64 a and 64 b and a processing means 68.
The drums 64a and 64b are the same as the drum 38, the drum 64a is wound around the base material S3, and the drum 64b is wound around the base surface S4 at a predetermined position and held at the predetermined position. While conveying in the longitudinal direction. Further, the processing means 68 is the same as the processing means 40, and performs film formation by plasma CVD, sputtering or the like on the surface of the substrate conveyed by the drums 64a and 64b.
Accordingly, the film formed by the processing unit 68 is exemplified by the various functional films 16 as an example.

As described above, the original fabric roller 46 is formed by laminating and winding the base material S3 and the base material S4 with their surfaces in contact with each other.
In the illustrated example, the drum 64a contacts the back surface of the substrate S3 separated by the separation roller 54, and the drum 64b contacts the back surface of the substrate S4 separated by the separation roller 54, so The drum 64a and the drum 64b are to be transported and are disposed so as to sandwich the processing means 68 in a direction orthogonal to the transport direction of the base material.
Accordingly, the processing means 68 can be deposited on the surfaces of the base material S3 and the base material S4 which are arranged so as to face the surfaces of the base material S3 and the base material S4.

In the processing apparatus 50, the processing unit 56 is not limited to forming a film on both the base material S3 and the base material S4. There is no need to do this.
Further, the processing unit 56 may perform a surface treatment of the base material instead of forming a film, or may perform a selected process of film formation and surface treatment. In this case, the processing unit performs the surface treatment on only one of the base materials, and does not need to perform anything on the other. Also, one of the base materials performs the surface treatment and the other forms a film. You may go. Examples of the surface treatment applied by the processing means 68 include various surface treatments applied to the support 14.
Further, a plurality of processing units 56 may be provided, and both the film formation and the surface treatment may be performed on the surface of a single substrate, or a plurality of layers may be formed.

The base material S3 and the base material S4 on which film formation has been performed in the processing unit 56 are guided by the pass roller p and conveyed to the lamination roller 58.
The laminating roller 58 is a roller for laminating two long sheet-like materials while conveying the same as the laminating roller 28 described above. As shown in FIG. 3, since the base material S3 and the base material S4 face each other film formed, the laminating roller 58 overlaps the both base materials to form the film formed (that The base material S3 and the base material S4 are laminated.
In addition, you may apply | coat an adhesive material and an adhesive material to at least one of base material S3 and base material S4 before lamination | stacking as needed.

The laminate of the base material S3 and the base material S4 laminated by the lamination roller 58 is guided by the pass roller p, wound in a roll shape by the take-up shaft 60, and supplied to the next process or the like.
In the present invention, the roll wound by the winding shaft 60 is used as an original roll, and again by the processing apparatus 50 (the processing apparatus 74 and the processing apparatus 80 described later) for carrying out the substrate processing method of the present invention. Processing such as film formation may be performed.

As is clear from the above description, according to the processing apparatus 50 for performing the base material processing method of the present invention using the raw fabric roll of the present invention, the base material S3 and the base material S4 (base material S1 and base material S2). ) Is supplied in a stacked state in which the surface to be processed is in contact with each other, so that the pass roller p and the surface to be processed of the base material do not come into contact with each other until the separation roller 54 separates them. Damage to the surface to be processed can be greatly reduced.
Further, the base material S3 and the base material S4 (the base material S1 and the base material S2) are laminated by contacting the formed film (treated surface), and the laminate is wound in a roll shape. Therefore, the formed film does not come into contact with the back surface of the substrate, and the film can be prevented from being damaged by the back surface. Furthermore, since the deposited film does not come into contact with the pass roller p after lamination, damage to the film surface by the pass roller p can be greatly reduced.
Moreover, since the present invention can protect the substrate surface and the film without using a protective film, the product cost can be greatly reduced.

  In addition, according to the present invention, the processed substrate is wound once from one processing by RtoR, that is, the feeding of the substrate from the raw roll, so that two substrates are simultaneously formed. Since the film can be formed, productivity can be improved.

  That is, according to the invention, it is possible to manufacture a high-quality product that is free from damage to the base material, the formed film, and the like at low cost and with high productivity.

In the base material treatment method of the present invention, after performing processing such as film formation on the base material and before laminating the two base materials by the laminating roller 58, at least one base material, A pretreatment for overlaying may be performed on the surface of the formed film (the surface of the surface subjected to the treatment) for good and reliable lamination.
This pretreatment for superimposing can be suitably used even before the base material is laminated in the manufacturing apparatus 20 for producing the raw fabric roll 46.

  The pretreatment for superimposing is, for example, a process for improving the adhesion between the surfaces of two substrates, and various processes that do not adversely affect the substrates can be used. As an example, surface activation by plasma irradiation, surface activation by ion irradiation, charging treatment of the substrate surface, and the like are exemplified. Further, in order to eliminate the need for post-processing, the pre-processing for superposition is preferably a dry process.

Here, in the base material processing method of the present invention, the two base materials S3 and S4 separated by the separation roller 54 are subjected to processing such as film formation, and then the two base materials are laminated again. In this case, the relative positions in the transport direction of both base materials may coincide with the state of the original fabric roll 46 or may be different.
That is, the conveyance distance of the base material from the separation position at the separation roller 54 to the lamination position at the lamination roller 58 may be the same or different between the base material S3 and the base material S4.

As described above, when the transport distance of the base material from the separation position to the stacking position differs between the two base materials, it is preferable to perform a pretreatment for superimposing at least the base material having a long transport distance.
The conceptual diagram of the example is shown in FIG. 4 is composed of substantially the same members as the processing apparatus 50 shown in FIG. 3 described above, the following description will mainly focus on differences.

As with the previous processing apparatus 50, when the original fabric roll 46 is loaded on the rotating shaft 52, the laminate 12 is pulled out and conveyed to the separation roller 54 and separated into the base material S 3 and the base material S 4.
The separated base material S3 is transported downward in the figure, wound around the drum 64a, transported, and subjected to processing such as film formation by the processing means 68a corresponding to the base material S3, and transported to the laminating roller 58. Is done.

On the other hand, the separated base material S4 is transported upward in the drawing and is subjected to processing such as film formation by the processing means 68b corresponding to the base material S4 while being wound around the drum 64b and transported. The processed base material S4 is transported to the lamination roller 58 via a transport path longer than the base material S3, which is provided to enclose the raw fabric roll 46 and make one turn.
Here, in the conveyance path of the base material S4 from the drum 64 to the stacking roller 58, the pre-processing means 76 for performing the above-described pre-processing for superposition is arranged. The substrate S4 is conveyed in the longitudinal direction, and is subjected to a pretreatment for superposition such as surface activation by plasma irradiation by the pretreatment means 76 and then conveyed to the lamination roller 58.

The base material S3 and the base material S4 conveyed to the laminating roller 58 are laminated by abutting the treated surfaces of the formed film and the like to form a laminated body, and this laminated body is then taken up by the take-up roller 60. Is wound into a roll.
Here, in the processing apparatus 74 of the illustrated example, the base material S4 is pre-processed for superposition by the pre-processing means 76, so that the two base materials are laminated more reliably and suitably. be able to.

In the above example, the base material that has been subjected to processing such as film formation is laminated by contacting the surface that has been subjected to the processing, and this laminated body is wound in a roll shape, but the present invention is not limited thereto. The treated substrate may be separately wound into a roll.
For example, like the processing apparatus 80 conceptually shown in FIG. 5, the base material S3 and the base material S4 that are pulled out from the raw fabric roll 46, separated, and processed in the processing unit 56 are not stacked. The take-up shaft 82 may be wound, and the substrate S4 may be taken up by another take-up shaft 84.

  As mentioned above, although the raw fabric roll of this invention, the manufacturing method of the raw fabric roll, and the base-material processing method were demonstrated in detail, this invention is not limited to the above-mentioned example, The range which does not deviate from the summary of this invention Of course, various improvements and changes may be made.

  It can be suitably used for the production of gas barrier films, various optical films, substrate films for various displays, and the like.

DESCRIPTION OF SYMBOLS 10,12 Laminated body 14 Support body 16 Functional layer 20 Manufacturing apparatus 24 Supply part 26,56 Processing part 28,58 Laminated roller 30,60,82,84 Winding shaft 32 Support body roll 34,52 Rotating shaft 38a, 38b, 64a, 64b Drum 40, 68 (68a, 68b) Processing means 46 Original fabric roll 50, 74, 80 Processing device 54 Separating roller 76 Preprocessing means

Claims (16)

  A laminated original fabric roll comprising two long sheet-like base materials which are overlapped with a surface to be processed in contact with each other and wound into a roll shape.   The raw fabric roll according to claim 1, wherein at least one of the two substrates is formed by forming a film on the surface of a support, and the surface of the film is a surface to be treated.   The raw roll according to claim 1 or 2, wherein at least one of the two substrates is a surface to be treated.   The raw material according to any one of claims 1 to 3, wherein at least one of the two substrates is a surface to be processed and a surface opposite to the surface to be processed, and at least one of surface roughness and surface hardness is different. Anti-roll.   A state in which the substrate is pulled out from two substrate rolls formed by winding a long sheet-like substrate into a roll shape, and the surfaces to be processed are in contact with each other while the two substrates are being conveyed. A method for producing a raw roll, characterized in that the two substrates are overlapped and wound into a roll shape while the two substrates are overlapped.   A method of forming a film on one surface of at least one of the substrates until the substrate is pulled out from the substrate roll and overlapping the two substrates, and the surface of the formed film is a surface to be processed. The manufacturing method of the raw fabric roll of 5.   The raw fabric roll according to claim 5 or 6, wherein a surface treatment is performed on at least one of the surfaces to be treated until the substrate is pulled out from the substrate roll and the two substrates are overlapped. Production method.   Any one of claims 5 to 7, wherein a pretreatment for superimposing is performed on a surface to be treated of at least one base material until the base material is pulled out from the base material roll and the two base materials are superposed. The manufacturing method of the fabric roll as described in 2.   A laminate of two base materials is pulled out from the raw roll according to any one of claims 1 to 4, and separated into individual base materials while being conveyed in the longitudinal direction, and the surface to be processed of each base material The base-material processing method characterized by performing processing to.   The base according to claim 9, wherein the surface to be processed of each base material is subjected to the processing, and then the processed surfaces are brought into contact with each other so that the two base materials are superposed and wound into a roll shape again. Material processing method.   The base material processing method according to claim 10, wherein when the two base materials are superposed, a relative position in a transport direction of each base material coincides with a state of the raw roll.   The base material processing method according to claim 10, wherein when the two base materials are overlapped, a relative position in a transport direction of each base material is different from a state of the raw roll.   After the treatment of the surface to be treated of the base material, and before the two surfaces of the two base materials are brought into contact with each other, the surface of the at least one base material subjected to the treatment, The substrate processing method according to any one of claims 9 to 12, wherein a pretreatment for superposition is performed.   The transport distance from the position where the surface to be treated of the base material is processed to the superposition position is different between the two base materials, and at least the base material with the longer transport distance is The substrate processing method of Claim 13 which performs a process.   The base material processing method according to claim 9, wherein the base material is separately wound into a roll after the surface is subjected to the treatment.   The substrate processing method according to claim 9, wherein the treatment applied to the surface of the substrate is at least one of film formation and surface treatment.

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