JP2012040645A5 - Processing method and processing apparatus - Google Patents

Description

The present invention relates to a processing method and a processing apparatus that perform shape processing and the like with high processing accuracy.

An object of the present invention is to provide a processing method and a processing apparatus capable of precisely processing a mold or the like of an optical component.

The machining method of the present invention detects a posture error of each of the plurality of movable stages in the machining method of driving the plurality of movable stages and causing the machining tool to scan the workpiece to process the workpiece. The displacement amount of the machining point is obtained from the relative position of the machining point on the workpiece with respect to the reference point of each moving stage obtained from the target position data of the stage and the coordinate data of the machining point, and the posture error. , Correcting the target position data of the stage based on the displacement amount of the processing point, and driving the plurality of moving stages based on the corrected target position data of the stage to process the workpiece. And
The processing apparatus of the present invention is a processing apparatus for processing a workpiece by scanning a workpiece with a plurality of moving stages, a stage driving means for driving each of the plurality of moving stages, and the plurality of moving stages. Me each a stage position error detecting means for detecting an attitude error of the coordinate data of the target position data and the processing point of the stage, the relative position of the machining point on the workpiece relative to the reference point of the movable stages determined, Means for calculating a displacement amount of the machining point from the obtained relative position and the attitude error, and the stage drive means corrects the target of the moving stage corrected based on the displacement amount of the machining point The plurality of moving stages are driven based on position data .

The processing point coordinates as well as the target position of the moving stage as processing data of the processing apparatus are given in advance to the numerical arithmetic unit, and the displacement amount with respect to the posture error is obtained from the posture error when the moving stage is moved and the coordinates of the processing point. At this time, the calculation load is reduced by calculating only the displacement in the three orthogonal directions generated by the change in the posture of the moving stage with respect to the coordinates of the machining points registered in advance, and in real time on the numerical calculation device. It becomes possible to calculate. A plurality of moving stages are calculated based on the target position data of the moving stage which is calculated based on the displacement amount of the three orthogonal axes only, and corrected based on the calculated moving amount of the processing point. By driving , machining accuracy can be improved.

Claims (10)

  In a machining method of driving a plurality of moving stages and machining the workpiece by causing a machining tool to scan the workpiece,
  Detecting each posture error of the plurality of moving stages;
  From the relative position of the machining point on the workpiece relative to the reference point of each moving stage obtained from the target position data of the stage and the coordinate data of the machining point, and the attitude error, the displacement amount of the machining point is obtained,
  The target position data of the stage is corrected based on the displacement amount of the processing point, and the workpiece is processed by driving the plurality of moving stages based on the corrected target position data of the stage. Processing method to do.   2. The machining method according to claim 1, wherein the target position data of the stage and the coordinate data of the machining point are created before machining.   The processing method according to claim 2, wherein the corrected target position data of the stage is obtained in advance.   The processing method according to claim 1, wherein the reference point of each moving stage is a position of the center of gravity of each moving stage.   The processing method according to claim 4, further comprising detecting a moving amount of the center of gravity of each moving stage and further correcting the target position data of the stage based on the moving amount.   The processing method according to claim 1, wherein the processing tool has a disk shape. In a processing apparatus that scans and processes a processing tool with respect to a workpiece by a plurality of moving stages,
Stage driving means for driving each of the plurality of moving stages;
Stage posture error detecting means for detecting posture errors of each of the plurality of moving stages;
From the coordinate data of the target position data and the processing point of the stage, the workpiece on the machining point of the relative positions determined Me respect to the reference point of the movable stages, the working point from the obtained relative position and the orientation error Means for calculating the amount of displacement,
The processing apparatus, wherein the stage driving unit drives the plurality of moving stages based on target position data of the moving stage corrected based on a displacement amount of the processing point.   The processing apparatus according to claim 7, wherein the reference point of each moving stage is the position of the center of gravity of each moving stage.   9. The processing apparatus according to claim 8, further comprising a parallel translation error detecting means for detecting a movement amount of the center of gravity position of each of the moving stages.   The processing apparatus according to claim 7, wherein the processing tool has a disk shape.