JP2012037774A5 - - Google Patents
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- JP2012037774A5 JP2012037774A5 JP2010178986A JP2010178986A JP2012037774A5 JP 2012037774 A5 JP2012037774 A5 JP 2012037774A5 JP 2010178986 A JP2010178986 A JP 2010178986A JP 2010178986 A JP2010178986 A JP 2010178986A JP 2012037774 A5 JP2012037774 A5 JP 2012037774A5
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- Japan
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010178986A JP5516212B2 (ja) | 2010-08-09 | 2010-08-09 | 感放射線性樹脂組成物及び重合体 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010178986A JP5516212B2 (ja) | 2010-08-09 | 2010-08-09 | 感放射線性樹脂組成物及び重合体 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2012037774A JP2012037774A (ja) | 2012-02-23 |
| JP2012037774A5 true JP2012037774A5 (https=) | 2014-04-03 |
| JP5516212B2 JP5516212B2 (ja) | 2014-06-11 |
Family
ID=45849813
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2010178986A Active JP5516212B2 (ja) | 2010-08-09 | 2010-08-09 | 感放射線性樹脂組成物及び重合体 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5516212B2 (https=) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10345700B2 (en) * | 2014-09-08 | 2019-07-09 | International Business Machines Corporation | Negative-tone resist compositions and multifunctional polymers therein |
| JP7085835B2 (ja) | 2017-12-28 | 2022-06-17 | 東京応化工業株式会社 | レジスト組成物及びレジストパターン形成方法 |
| JP7376433B2 (ja) | 2020-07-07 | 2023-11-08 | 東京応化工業株式会社 | レジスト組成物及びレジストパターン形成方法 |
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2010
- 2010-08-09 JP JP2010178986A patent/JP5516212B2/ja active Active