JP2012037609A - Manufacturing method and device of pellicle - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a manufacturing method of a pellicle for lithography capable of effectively preventing attachment of foreign material including dirt, etc. to a photomask and improving an yield of the pellicle for lithography by coating an internal surface of a pellicle frame with a thin adhesive layer.SOLUTION: In a manufacturing method of a pellicle for lithography in the present invention, a spray nozzle set 10 having a first spray nozzle 11 and a second spray nozzle 12 arranged at a predetermined interval is used. Firstly, an adhesive solution is sprayed on an internal surface 1 of a pellicle frame 20 from the first spray nozzle 11. Then, a solvent of the adhesive solution is sprayed from the second spray nozzle 12 before adhesive concentration in the adhesive solution drops to a level equal to or less than a predetermined concentration due to volatilization of the solvent.

Description

  The present invention relates to a method and apparatus for manufacturing a pellicle for lithography, and more specifically, by coating a thin adhesive layer on the inner wall surface of a pellicle frame, a photomask, a reticle, etc. Are collectively referred to as a “photomask”), and it is possible to effectively prevent foreign substances such as dust from adhering to the lithographic pellicle, which can effectively improve the yield of the pellicle. It relates to a method and a device.

  In manufacturing a semiconductor device such as LSI or VLSI or a liquid crystal display (collectively referred to as “semiconductor device” in this specification), a photoresist film applied to a semiconductor wafer or a liquid crystal original plate is applied to a photoresist film. Light for exposure is irradiated through a photomask that is an exposure master, the pattern of the photomask is transferred, and the pattern of the semiconductor device is formed.

  Therefore, in this case, if foreign matter such as dust adheres to the photomask, the exposure light is reflected or absorbed by foreign matter such as dust attached to the surface of the photomask. Alternatively, the pattern transferred to the liquid crystal master plate may be deformed or the edge of the pattern may be unclear, and the substrate may be black and dirty, losing dimensions, quality, appearance, etc. As described above, there is a problem that the pattern of the photomask cannot be transferred, the performance of the semiconductor device or the liquid crystal display is lowered, and the yield is deteriorated.

  In order to prevent such a problem, the exposure of the semiconductor wafer or the liquid crystal master plate is performed in a clean room, but it is still difficult to completely prevent foreign matter from adhering to the surface of the photomask. Is configured such that a dust-proof cover called a pellicle having a high transmittance with respect to light for exposure is attached to the surface of a photomask to expose a semiconductor wafer or a liquid crystal master.

  In general, a pellicle is made of a pellicle film made of a cellulose resin such as nitrocellulose or cellulose acetate or a fluororesin having a high transmittance with respect to light for exposure. Apply a good solvent for the pellicle film material to one side of the frame, and air-dry the pellicle film for adhesion, or adhere using an adhesive such as acrylic resin, epoxy resin, or fluororesin. The adhesive layer is made of polybutene resin, polyvinyl acetate resin, acrylic resin, silicone resin, etc. on the surface, and an adhesive layer for adhering to the photomask is formed. Further, on the adhesive layer, a release layer for protecting the adhesive layer or It is produced by providing a separator (Patent Documents 1, 2, 3, and 4).

  When a pellicle configured in this way is attached to the surface of a photomask and a semiconductor wafer or liquid crystal master is exposed, foreign substances such as dust adhere to the surface of the pellicle and directly adhere to the surface of the photomask. Therefore, if the exposure light is irradiated so that the focal point is positioned on the pattern formed on the photomask, the influence of foreign matters such as dust can be removed.

  In many cases, a thin adhesive layer is coated on the inner wall surface of the pellicle frame of the pellicle facing the photomask.

  This is because foreign substances such as dust are captured by the thin adhesive layer formed on the inner wall surface of the pellicle frame when foreign objects such as dust are present in the sealed space between the pellicle and the photomask. In order to prevent foreign matters such as dust from adhering to the pattern surface of the photomask (Patent Document 5).

  Another object of coating the inner wall surface of the pellicle frame with a thin adhesive layer is to prevent foreign matter such as dust from being generated from the pellicle frame itself formed of aluminum, stainless steel, polyethylene or the like. It is done. The pellicle frame is precision-cleaned before the manufacture of the pellicle, and a clean pellicle frame is used. However, a commonly used aluminum pellicle frame has an anodized coating on the surface with an uneven surface for matting ( Shot blast marks) and fine cracks, etc., and foreign matters such as dust held in these irregularities and fine cracks may adhere to the surface of the photomask. An agent layer is formed to prevent foreign matters such as dust held in the unevenness and fine cracks of the pellicle frame from adhering to the surface of the photomask.

  As a method of forming a thin adhesive layer by applying an adhesive to the inner wall surface of the pellicle frame, the dip coating method, bar coating method, roller coating method, brush coating method, spray coating method, etc. have been used conventionally. It has been.

  Among these coating methods, the spray coating method is not only easy to form a uniform coating layer, but also coats the surface to be coated with a coating solution without contacting a part of the coating apparatus. Since there is an advantage that foreign matter such as dust does not adhere to the coating layer on the inner wall surface of the pellicle frame due to a part of the coating apparatus coming into contact with the surface to be coated. Widely used as a coating method for inner wall surfaces.

JP 58-219033 US Pat. No. 4,861,402 Japanese Patent Publication No. 63-27707 JP-A-7-168345 Japanese Patent Publication No. 63-777

  In recent years, semiconductor devices have been increasingly integrated and miniaturized, and accordingly, the photomask pattern size has also been miniaturized, and the pellicle to be attached on the photomask is required to have a very high dustproof capability. It has become.

  Since the pellicle is intended to prevent foreign matter such as dust from adhering to the photomask surface, it is carefully manufactured so that foreign matter such as dust does not adhere, but during the manufacturing process of the pellicle, In particular, it is extremely difficult to completely prevent foreign matter such as fine dust from adhering to the surface of the pellicle frame. Therefore, an adhesive layer is formed on the inner wall surface of the pellicle frame, so In order to improve the yield when manufacturing the pellicle, it is important to capture the foreign matter and prevent it from falling on the photomask.

  As described above, the spray coating method is the best method for forming the adhesive layer on the inner wall surface of the pellicle frame. However, in the spray coating method, a part of the coating device contacts the inner wall surface of the pellicle frame. The solvent in the adhesive solution sprayed from the nozzle volatilizes between the nozzle and the pellicle frame, and the adhesive concentration is high. In this state, since the adhesive solution is coated on the inner wall surface of the pellicle frame, the solid content in the adhesive solution is semi-dried and adheres to the inner wall surface of the pellicle frame, as shown in FIG. When an uneven pattern is formed on the inner wall surface 1 of the pellicle frame by blasting, the inner wall surface 1 of the pellicle frame The adhesive layer 2 formed in the recess, there is that air bubbles 3 are involved.

  As described above, when the bubbles 3 are involved in the pressure-sensitive adhesive layer 2, in general, the inspection of the inner wall surface of the pellicle frame is often performed using a condenser lamp in a dark room. Often, it appears to have adhered to the inner wall surface 1 and it is difficult to discriminate it from foreign matter such as dust. Therefore, the manufactured pellicle is judged to be defective, which causes a reduction in the yield of the pellicle and reduces costs. It was an obstacle in the above.

  Therefore, the present invention can effectively prevent foreign substances such as dust from adhering to the photomask by coating a thin adhesive layer on the inner wall surface of the pellicle frame, and the yield of the pellicle for lithography can be reduced. It is an object of the present invention to provide a method for manufacturing a pellicle for lithography that can be improved.

  Another object of the present invention is to effectively prevent foreign matter such as dust from adhering to the photomask by coating a thin adhesive layer on the inner wall surface of the pellicle frame. An object of the present invention is to provide a lithography pellicle manufacturing apparatus capable of improving the yield of the lithography pellicle.

  An object of the present invention is to provide a spray nozzle set including a first spray nozzle for injecting an adhesive solution and a second spray nozzle for injecting a solvent for the adhesive solution or a solvent for dissolving the adhesive. A lithography pellicle characterized in that at least one set is used to spray the adhesive solution and the solvent toward the inner wall surface of the pellicle frame to form an adhesive layer on the inner wall surface of the pellicle frame. This is achieved by the manufacturing method.

  According to the present invention, the solvent of the adhesive solution sprayed from the first spray nozzle volatilizes until the inner wall surface of the pellicle frame is coated, and the concentration of the adhesive in the adhesive solution increases, Since the solvent of the pressure-sensitive adhesive solution or the solvent that dissolves the pressure-sensitive adhesive is sprayed from the second spray nozzle, the pressure-sensitive adhesive concentration in the pressure-sensitive adhesive layer formed on the inner wall surface of the pellicle frame can be reduced. It is possible to effectively prevent the increase in height, and it is possible to dissolve bubbles entrained in the pressure-sensitive adhesive layer, thereby improving the yield of the lithography pellicle.

  In the present invention, the pressure-sensitive adhesive is not particularly limited, and may be any pressure-sensitive adhesive that can be diluted to a sprayable concentration by a spray coating apparatus. For example, a silicone pressure-sensitive adhesive or an acrylic pressure-sensitive adhesive is used. be able to.

  In a preferred embodiment of the present invention, the first spray nozzle and the second spray nozzle included in the at least one set of spray nozzles are spaced apart along a direction in which the adhesive layer is formed. Is arranged in.

  In a further preferred aspect of the present invention, the second spray is applied within a predetermined time after the adhesive solution is sprayed from the first spray nozzle toward the inner wall surface of the pellicle frame. A solvent for the adhesive solution or a solvent for dissolving the adhesive is jetted from the nozzle toward the inner wall surface of the pellicle frame.

  In a further preferred embodiment of the present invention, the first spray nozzle and the second spray nozzle included in the at least one set of spray nozzles reciprocate along the direction of formation of the adhesive layer. It is configured to be.

  In a further preferred embodiment of the present invention, the adhesive solution spray from the first spray nozzle and the solvent spray from the second spray nozzle are alternately executed. Yes.

  The object of the present invention is also to dissolve the solvent of the adhesive solution or the adhesive toward the inner wall surface of the pellicle frame, and a first spray nozzle that sprays the adhesive solution toward the inner wall surface of the pellicle frame. At least one spray nozzle set including a second spray nozzle for injecting a solvent is provided, and the first spray nozzle and the second spray nozzle included in the at least one spray nozzle set are reciprocated. This is achieved by an apparatus for manufacturing a pellicle for lithography, characterized in that it comprises means for causing the above.

  According to the present invention, by coating the inner wall surface of the pellicle frame with a thin adhesive layer, it is possible to effectively prevent foreign substances such as dust from adhering to the photomask, and to improve the yield of the pellicle for lithography. It is possible to provide a method for manufacturing a pellicle for lithography that can be improved.

  Furthermore, according to the present invention, by coating a thin pressure-sensitive adhesive layer on the inner wall surface of the pellicle frame, it is possible to effectively prevent foreign substances such as dust from adhering to the photomask. A pellicle manufacturing apparatus for lithography that can improve the yield can be provided.

FIG. 1 is a schematic cross-sectional view of the vicinity of an inner wall surface of a pellicle frame coated with an adhesive layer by a conventional method. FIG. 2 is a schematic plan view of a spray coating apparatus used in a method for manufacturing a pellicle according to a preferred embodiment of the present invention. FIG. 3 is a schematic side view of a spray coating apparatus used in a method for manufacturing a pellicle according to a preferred embodiment of the present invention. FIG. 4 is a process diagram showing a step of forming an adhesive layer on the inner wall surface of one side of the pellicle frame. FIG. 5 is a process diagram showing a step of forming an adhesive layer on the inner wall surface of one side of the pellicle frame. FIG. 6 is a process diagram showing a step of forming an adhesive layer on the inner wall surface of one side of the pellicle frame.

  FIG. 2 is a schematic plan view of a spray coating apparatus used in a method for manufacturing a pellicle according to a preferred embodiment of the present invention.

  As shown in FIG. 2, the spray coating apparatus used in the method for manufacturing a pellicle according to this embodiment includes a spray nozzle set 10 including a first spray nozzle 11 and a second spray nozzle 12.

  The first spray nozzle 11 of the spray nozzle set 10 is configured to spray an adhesive solution to be coated on the inner wall surface 1 of the pellicle frame 20 toward the inner wall surface 1 of the pellicle frame 20. The second spray nozzle 12 is configured to inject the solvent of the adhesive solution to be coated on the inner wall surface 1 of the pellicle frame 20 toward the inner wall surface 1 of the pellicle frame 20.

  The pressure-sensitive adhesive solution sprayed from the first spray nozzle 11 of the spray nozzle set 10 has a concentration that does not sag from the inner wall surface 1 of the pellicle frame 20 when coated on the inner wall surface 1 of the pellicle frame 20. In contrast, the amount of solvent sprayed from the second spray nozzle 12 of the spray nozzle set 10 is such that the concentration of the adhesive solution coated on the inner wall surface 1 of the pellicle frame 20 is a predetermined concentration. Selected as

  The spray nozzle set 10 including the first spray nozzle 11 and the second spray nozzle 12 can reciprocate at a predetermined speed V (mm / sec) in a direction indicated by an arrow A or an arrow B in FIG. The linear stage 15 is attached with a predetermined distance D (mm). Here, the predetermined interval D and the predetermined speed V are formed on the inner wall surface 1 of the pellicle frame 20 by spraying the adhesive solution from the first spray nozzle 11 toward the inner wall surface 1 of the pellicle frame 20. The solvent of the adhesive solution is sprayed from the second spray nozzle 12 onto the inner wall surface 1 of the pellicle frame 20 before the concentration of the adhesive in the adhesive layer exceeds a predetermined concentration due to volatilization of the solvent. It is set, and within a few seconds after the adhesive solution is sprayed from the first spray nozzle 11 toward the inner wall surface 1 of the pellicle frame 20, the second spray nozzle 12 and the inside of the pellicle frame 20 It is preferable that the predetermined interval D and the predetermined speed V are set so that the solvent of the adhesive solution is jetted toward the adhesive layer coated on the wall surface 1.

  FIG. 3 is a schematic side view of the spray coating apparatus according to this embodiment.

  As shown in FIG. 3, the spray nozzle set 10 including the first spray nozzle 11 and the second spray nozzle 12 is positioned above the pellicle frame 20 and forms an angle θ with respect to the horizontal plane. positioned. Here, θ is an angle in the range of 0 to 90 degrees.

  In the spray coating apparatus according to this embodiment, the linear stage 15 is configured to reciprocate in the direction indicated by the arrow A or the arrow B in FIG. 2, and therefore, the inner wall surface 1 on one side of the pellicle frame 20. The first spray nozzle 11 is ejected along the one side of the pellicle frame 20 while the adhesive solution is ejected from the first spray nozzle 11 and the solvent of the adhesive solution is ejected from the second spray nozzle 12. The spray nozzle set 10 including the second spray nozzle 12 is configured to reciprocate.

  The spray coating apparatus configured as described above sprays the pressure-sensitive adhesive solution and the solvent of the pressure-sensitive adhesive solution toward the inner wall surface 1 of the pellicle frame 20 as described below, and thereby the inner wall surface 1 of the pellicle frame 20. The pressure-sensitive adhesive layer 2 is formed thereon.

  4 to 6 are process diagrams showing steps of forming an adhesive layer on the inner wall surface 1 on one side of the pellicle frame 20.

  FIG. 4 shows a state in which the spray nozzle set 10 is located at the initial position. First, as shown in FIG. 4, the first spray nozzle 11 has a pellicle frame 20 to be coated with the adhesive solution. The spray nozzle set 10 including the first spray nozzle 11 and the second spray nozzle 12 is positioned so as to face one end of the inner wall surface 1 of the inner wall 1, and then the adhesive from the first spray nozzle 11 Solution injection is started.

  At the same time, the movement of the linear stage 15 in the direction indicated by the arrow A in FIGS. 4 to 6 is started. At this time, the solvent of the adhesive solution is not sprayed from the second spray nozzle 12.

  The linear stage 15 is moved at a predetermined speed V (mm / sec) in the direction indicated by the arrow A, and the spraying of the adhesive solution from the first spray nozzle 11 is started for a predetermined time D / V. When the second elapses, that is, when the second spray nozzle 12 reaches a position facing one end of the inner wall surface 1 of the pellicle frame 20, the solvent of the adhesive solution is ejected from the second spray nozzle 12. Be started.

  FIG. 5 shows a state in which the linear stage 15 is moving in the direction indicated by the arrow A along one side of the pellicle frame 20.

  As shown in FIG. 5, an adhesive solution is first sprayed from the first spray nozzle 11 on the inner wall surface 1 of one side of the pellicle frame 20 to form an adhesive layer 2, and the D / V second Later, the solvent of the adhesive solution is jetted from the second spray nozzle 12.

  Therefore, even if the solvent contained in the adhesive layer 2 formed by the adhesive solution sprayed from the first spray nozzle 11 volatilizes, before the adhesive concentration in the adhesive layer 2 reaches a predetermined concentration, Since the solvent of the pressure-sensitive adhesive solution is sprayed from the second spray nozzle 12 toward the pressure-sensitive adhesive layer 2 and the increase in the concentration of the pressure-sensitive adhesive contained in the pressure-sensitive adhesive layer 2 is prevented, an uneven pattern is formed by blasting. Even when the pressure-sensitive adhesive layer 2 is formed on the inner wall surface 1 of the formed pellicle frame 20, it is possible to effectively prevent bubbles from being caught in the pressure-sensitive adhesive layer 2. Even when air bubbles are involved, the air bubbles are dissolved by the solvent of the adhesive solution sprayed from the second spray nozzle 12, and therefore the yield of the pellicle for lithography can be improved. It becomes ability.

  In FIG. 6, the linear stage 15 is moved in the direction indicated by the arrow A in FIG. 6, the adhesive layer 2 is formed on the inner wall surface 1 on one side of the pellicle frame 20, and the second spray nozzle 12 is moved to the pellicle frame. It is drawing which shows the state just before reaching the position which opposes the other edge part of the inner wall surface 1 of 20. FIG.

  At this time, the first spray nozzle 11 passes through the other end of the inner wall surface 1 of the pellicle frame 20, does not face the inner wall surface 1 of the pellicle frame 20, and adheres from the first spray nozzle 11. The spray of the agent solution is stopped, and only the solvent of the adhesive solution is sprayed from the second spray nozzle 12 onto the inner wall surface 1 of the pellicle frame 20.

  Thus, when the linear stage 15 further moves in the direction indicated by the arrow A and the second spray nozzle 12 reaches a position facing the other end of the inner wall surface 1 of the pellicle frame 20, the linear stage 15 stops. At the same time, the injection of the solvent of the adhesive solution from the second spray nozzle 12 is stopped.

  In this state, the pressure-sensitive adhesive layer 2 is formed on the inner wall surface 1 of the pellicle frame 20, and when the formed pressure-sensitive adhesive layer 2 has a desired thickness, the first spray nozzle 11 The injection of the adhesive solution and the injection of the solvent of the adhesive solution from the second spray nozzle 12 are completed.

  On the other hand, the pressure-sensitive adhesive layer 2 is formed on the inner wall surface 1 of the pellicle frame 20, but when the thickness is less than the desired thickness, the linear stage 15 is shown in FIG. And the spray nozzle set 10 returns to the initial position shown in FIG.

  Next, the adhesive layer 2 is formed on the inner wall surface 1 of the pellicle frame 20 in the same manner as described above.

  In this way, the linear stage 15 is reciprocated until the pressure-sensitive adhesive layer 2 having a predetermined thickness is formed on the inner wall surface 1 of the pellicle frame 20, and the pressure-sensitive adhesive is placed on the inner wall surface 1 on one side of the pellicle frame 20. Layer 2 is formed.

  The pressure-sensitive adhesive layer 2 is also formed on the inner wall surfaces 1 on the other three sides of the pellicle frame 20 in the same manner.

  According to this embodiment, after the adhesive layer 2 is formed on the inner wall surface 1 of the pellicle frame 20 by the adhesive solution sprayed from the first spray nozzle 11, the solvent in the adhesive layer 2 is volatilized. As a result, the pressure-sensitive adhesive concentration in the pressure-sensitive adhesive layer 2 is increased, but before the pressure-sensitive adhesive concentration in the pressure-sensitive adhesive layer 2 reaches a predetermined concentration, the solvent of the pressure-sensitive adhesive solution is adhered to the pressure-sensitive adhesive solution from the second spray nozzle 12. Since it is sprayed toward the adhesive layer 2 and the adhesive concentration in the adhesive layer 2 is reduced, the adhesive layer 2 is applied to the inner wall surface 1 of the pellicle frame 20 on which an uneven pattern is formed by blasting. Even in the case of forming, it is possible to effectively prevent bubbles from being caught in the pressure-sensitive adhesive layer 2, and even when bubbles are caught in the pressure-sensitive adhesive layer 2, the second spray nozzle 12 sprays them. Adhesive solution solvent Accordingly, since the bubbles are dissolved, the adhesive layer 2 can be formed on the inner wall surface 1 of the pellicle frame 20 as desired, and effectively prevent foreign matters such as dust from adhering to the photomask. It becomes possible to improve the yield of the pellicle for lithography.

  Here, in the case of a pellicle for a semiconductor device, since the pellicle size is around 150 mm, the pressure-sensitive adhesive solution is prevented from being sprayed unnecessarily, and the cost is prevented. The distance D between the first spray nozzle 11 and the second spray nozzle 12 is within several centimeters in order to prevent the product from being scattered and contaminating the product itself or creating a defect in the product. It is preferable to set to.

  Hereinafter, in order to clarify the effects of the present invention, examples and comparative examples will be given.

Example 1
A black alumite treatment was added to a 150 mm × 124 mm aluminum alloy A7075 frame to produce a pellicle frame.

  The pellicle frame thus obtained was washed in ultrapure water, dried, and then set on a sub-holder that holds the outer surface of the pellicle frame.

  Next, two spray nozzles for precision coating were attached to a single-axis robot with an interval of 50 mm, and connected to an air source with an original pressure of 0.3 MPa via a 0.1 μm air filter and a clean regulator. An air brush “HP-BC1P” (trade name) manufactured by Anest Iwata Co., Ltd. was used as the spray nozzle.

  As the adhesive coating solution, a toluene solution of a silicone adhesive having a concentration of 0.1% was prepared. Moreover, the same toluene as the solvent of the adhesive coating solution was prepared as a solvent. As the silicone adhesive, “KR3700” (trade name) manufactured by Shin-Etsu Chemical Co., Ltd. was used.

  The toluene solution of the silicone adhesive was filled into the solution cartridge, and toluene was filled into the solvent cartridge, and set in the first spray nozzle and the second spray nozzle, respectively.

  In parallel with the single-axis robot, a sub-holder to which the pellicle frame is attached is arranged, and using a masking cover having the same size as the inner dimension of the pellicle frame, a toluene solution of silicone adhesive sprayed from the first spray nozzle and After covering the toluene sprayed from the second spray nozzle so that it does not scatter to the part other than the inner wall surface of the pellicle frame, the toluene solution of the silicone adhesive is sprayed from the first spray nozzle, and the toluene is sprayed from the second spray nozzle. The single-axis robot was reciprocated five times along one side of the pellicle frame at a speed of 10 cm / second to form a silicone adhesive layer on the inner wall surface of one side of the pellicle frame.

  Further, a silicone pressure-sensitive adhesive layer was formed on the inner wall surfaces of the other three sides of the pellicle frame in the same manner.

  Thus, when the inner wall surface of the pellicle frame on which the silicone adhesive layer was formed was inspected in a dark room using a condensing lamp, no silicone adhesive layer was found to be a foreign substance. The agent layer could be coated.

  The same test was performed on 50 samples, but no silicone adhesive layer was considered to be a foreign substance.

Comparative Example A black alumite treatment was added to a frame made of aluminum alloy A7075 of 150 mm × 124 mm to produce a pellicle frame.

  The pellicle frame thus obtained was washed in ultrapure water, dried, and then set on a sub-holder that holds the outer surface of the pellicle frame.

  Next, a spray nozzle for precision coating was attached to a single-axis robot with an interval of 50 mm, and connected to an air source with an original pressure of 0.3 MPa via a 0.1 μm air filter and a lean regulator. An air brush “HP-BC1P” (trade name) manufactured by Anest Iwata Co., Ltd. was used as the spray nozzle.

  As the adhesive coating solution, a toluene solution of a silicone adhesive having a concentration of 0.1% was prepared. As the silicone adhesive, “KR3700” (trade name) manufactured by Shin-Etsu Chemical Co., Ltd. was used.

  The cartridge was filled with a toluene solution of silicone adhesive and set in a spray nozzle.

  A sub-holder with a pellicle frame attached is placed in parallel with the single-axis robot, and using a masking cover of the same size as the inner size of the pellicle frame, the toluene solution of silicone adhesive sprayed from the spray nozzle is attached to the pellicle frame. After covering so as not to scatter on the part other than the inner wall surface, the single-axis robot is moved along the side of the pellicle frame 5 times at a speed of 10 cm / second while spraying the toluene solution of the silicone adhesive from the spray nozzle. The silicone pressure-sensitive adhesive layer was formed on the inner wall surface of one side of the pellicle frame.

  Further, a silicone pressure-sensitive adhesive layer was formed on the inner wall surfaces of the other three sides of the pellicle frame in the same manner.

  Thus, when the inner wall surface of the pellicle frame on which the silicone pressure-sensitive adhesive layer was formed was inspected in a dark room using a condensing lamp, it was found that the silicone pressure-sensitive adhesive layer had one that appeared to be a foreign object. .

  Furthermore, when what was considered to be a foreign substance was observed with an optical microscope, it was found that minute bubbles were attached to the uneven portions of the inner wall surface of the pellicle frame.

  When the same test was performed on 50 samples, adhesion of bubbles to the silicone pressure-sensitive adhesive layer was observed in 6 samples.

  Furthermore, the same test was performed on 50 samples, respectively, with different spray nozzle spacings and reciprocating speeds of the single axis robot.

  The test results are shown in Table 1.

表１から、ペリクルフレームの内壁面に向けて、シリコーン粘着剤のトルエン溶液を噴射してから、ペリクルフレームの内壁面の同じ部分にシリコーン粘着剤のトルエン溶液を噴射するまでの時間が０．８秒以上のときに、粘着剤層に気泡が混入することがわかった。これは、ペリクルフレームの内壁面に向けて、シリコーン粘着剤のトルエン溶液を噴射してから、ペリクルフレームの内壁面の同じ部分にシリコーン粘着剤のトルエン溶液を噴射するまでの時間が０．８秒以上になると、次に、シリコーン粘着剤のトルエン溶液が噴射されるまでに、粘着剤溶液の溶媒であるトルエンが揮発し、シリコーン粘着剤の濃度が高くなったためと推測される。

From Table 1, the time from spraying the silicone adhesive toluene solution toward the inner wall surface of the pellicle frame to spraying the silicone adhesive toluene solution onto the same portion of the inner wall surface of the pellicle frame is 0.8. It was found that bubbles were mixed into the pressure-sensitive adhesive layer when it was longer than 2 seconds. This is the time from spraying the silicone adhesive toluene solution toward the inner wall of the pellicle frame to spraying the silicone adhesive toluene solution onto the same part of the inner wall of the pellicle frame is 0.8 seconds. Then, it is presumed that the concentration of the silicone adhesive increased because the toluene solvent of the adhesive solution was volatilized before the toluene solution of the silicone adhesive was jetted.

  The present invention is not limited to the above-described embodiments, and various modifications are possible within the scope of the invention described in the claims, and these are also included in the scope of the present invention. Needless to say.

  For example, in the embodiment shown in FIGS. 1 to 7, the adhesive solution solvent is ejected from the second spray nozzle 12. It is not always necessary to inject the solvent, and instead of the solvent of the adhesive solution, the second spray nozzle 12 may be configured to inject a solvent that dissolves the adhesive.

  Furthermore, in the said embodiment and Example, although the spray coating apparatus is provided with one set of the spray nozzle set 10 which consists of the 1st spray nozzle 11 and the 2nd spray nozzle 12, each is a 1st spray nozzle. Two or more sets of spray nozzles 10 including the nozzle 11 and the second spray nozzle 12 may be provided.

  Moreover, in the said embodiment, one set of the spray nozzle set 10 which consists of the 1st spray nozzle 11 and the 2nd spray nozzle 12 is attached to the linear stage 15, and is reciprocated by the linear stage 15, The said Example The first spray nozzle 11 and the second spray nozzle are attached to a single-axis robot and reciprocated by the single-axis robot using the linear stage 15 or the single-axis robot. It is not always necessary to reciprocate the one set of spray nozzles 10 consisting of 12, and the first spray nozzle 11 and the second spray nozzle 12 may be reciprocated by other mechanical means. May be manually reciprocated.

  Furthermore, in the said Example, although the 1st spray nozzle 11 and the 2nd spray nozzle 12 are reciprocatingly moved, moving the 1st spray nozzle 11 and the 2nd spray nozzle 12 to one direction, When the adhesive layer 2 having a desired thickness is formed as a result of spraying the adhesive solution toward the inner wall surface 1 of the pellicle frame 20, the first spray nozzle 11 and the second spray nozzle 12 are formed. It is not necessary to reciprocate.

DESCRIPTION OF SYMBOLS 1 Inner wall surface of pellicle frame 2 Adhesive layer 3 Bubble 10 Spray nozzle set 11 First spray nozzle 12 Second spray nozzle 15 Linear stage 20 Pellicle frame

Claims (6)

A pellicle using at least one spray nozzle set comprising a first spray nozzle for injecting an adhesive solution and a second spray nozzle for injecting a solvent for the adhesive solution or a solvent for dissolving the adhesive A method for producing a pellicle for lithography, comprising jetting the adhesive solution and the solvent toward an inner wall surface of a frame to form an adhesive layer on the inner wall surface of the pellicle frame. The first spray nozzle and the second spray nozzle included in the at least one set of spray nozzles are arranged at a predetermined interval along the formation direction of the adhesive layer. A method for manufacturing a pellicle for lithography according to claim 1. After the adhesive solution is sprayed from the first spray nozzle toward the inner wall surface of the pellicle frame, the solvent of the adhesive solution or 3. The method for producing a pellicle for lithography according to claim 1, wherein a solvent that dissolves the adhesive is sprayed toward the inner wall surface of the pellicle frame. The first spray nozzle and the second spray nozzle included in the at least one set of spray nozzles are reciprocated along a direction in which the adhesive layer is formed. 4. A method for producing a pellicle for lithography according to any one of 3 above. 5. The spraying of the adhesive solution from the first spray nozzle and the spraying of the solvent from the second spray nozzle are alternately performed. A manufacturing method of the pellicle for lithography described in 1. A first spray nozzle for injecting an adhesive solution toward the inner wall surface of the pellicle frame; and a second spray for injecting a solvent for the adhesive solution or a solvent for dissolving the adhesive toward the inner wall surface of the pellicle frame. At least one set of spray nozzles including nozzles, and means for reciprocating the first spray nozzle and the second spray nozzle included in the at least one set of spray nozzles. An apparatus for manufacturing a pellicle for lithography.

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