JP2012033705A5 - - Google Patents

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Publication number
JP2012033705A5
JP2012033705A5 JP2010171933A JP2010171933A JP2012033705A5 JP 2012033705 A5 JP2012033705 A5 JP 2012033705A5 JP 2010171933 A JP2010171933 A JP 2010171933A JP 2010171933 A JP2010171933 A JP 2010171933A JP 2012033705 A5 JP2012033705 A5 JP 2012033705A5
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Japan
Prior art keywords
photonic crystal
layer
dimensional photonic
laser according
crystal laser
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JP2010171933A
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Japanese (ja)
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JP5854417B2 (en
JP2012033705A (en
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Priority to JP2010171933A priority Critical patent/JP5854417B2/en
Priority claimed from JP2010171933A external-priority patent/JP5854417B2/en
Priority to US13/192,852 priority patent/US9130348B2/en
Priority to CN2011102164055A priority patent/CN102347591A/en
Publication of JP2012033705A publication Critical patent/JP2012033705A/en
Publication of JP2012033705A5 publication Critical patent/JP2012033705A5/ja
Priority to US14/807,504 priority patent/US20150372452A1/en
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Description

上記課題を解決するために成された本発明に係る2次元フォトニック結晶レーザは、
AlαGa1-αAs(0<α<1)又は(AlβGa1-β)γIn1-γP(0≦β<1, 0<γ<1)を母材とする母材層内に異屈折率領域が周期的に設けられた2次元フォトニック結晶層と、
前記2次元フォトニック結晶層の上にエピタキシャル法によって作製されるエピタキシャル成長層と、
を有することを特徴とする。
A two-dimensional photonic crystal laser according to the present invention, which has been made to solve the above problems,
Al α Ga 1-α As ( 0 <α <1) or (Al β Ga 1-β) γ In 1-γ P (0 ≦ β <1, 0 <γ <1) the base material layer to the base material A two-dimensional photonic crystal layer in which different refractive index regions are periodically provided,
An epitaxial growth layer formed by an epitaxial method on the two-dimensional photonic crystal layer;
It is characterized by having.

Claims (8)

AlαGa1-αAs(0<α<1)又は(AlβGa1-β)γIn1-γP(0≦β<1, 0<γ<1)を母材とする母材層内に異屈折率領域が周期的に設けられた2次元フォトニック結晶層と、
前記2次元フォトニック結晶層の上にエピタキシャル法によって作製されるエピタキシャル成長層と、
を有することを特徴とする2次元フォトニック結晶レーザ。
Al α Ga 1-α As ( 0 <α <1) or (Al β Ga 1-β) γ In 1-γ P (0 ≦ β <1, 0 <γ <1) the base material layer to the base material A two-dimensional photonic crystal layer in which different refractive index regions are periodically provided,
An epitaxial growth layer formed by an epitaxial method on the two-dimensional photonic crystal layer;
A two-dimensional photonic crystal laser.
前記母材層が、組成の異なる複数の層を積層させた構造を有していることを特徴とする
請求項1に記載の2次元フォトニック結晶レーザ。
The two-dimensional photonic crystal laser according to claim 1, wherein the base material layer has a structure in which a plurality of layers having different compositions are laminated.
前記母材層を構成する複数の層のうち、前記エピタキシャル層に最近接する層におけるAlの含有率が0.1以下であることを特徴とする請求項2に記載の2次元フォトニック結晶レーザ。   3. The two-dimensional photonic crystal laser according to claim 2, wherein among the plurality of layers constituting the base material layer, an Al content in a layer closest to the epitaxial layer is 0.1 or less. 前記母材層がGaAsから成る層を有していることを特徴とする請求項2又は3に記載の2次元フォトニック結晶レーザ。   4. The two-dimensional photonic crystal laser according to claim 2, wherein the base material layer has a layer made of GaAs. 前記エピタキシャル成長層の材料がAlxGa1-xAs(0<x<1)であることを特徴とする請求項1〜4のいずれかに記載の2次元フォトニック結晶レーザ。 5. The two-dimensional photonic crystal laser according to claim 1, wherein a material of the epitaxial growth layer is Al x Ga 1-x As (0 <x <1). 前記異屈折率領域が空孔であることを特徴とする請求項1〜5のいずれかに記載の2次元フォトニック結晶レーザ。   6. The two-dimensional photonic crystal laser according to claim 1, wherein the different refractive index region is a hole. 前記異屈折率領域が、AlxGa1-xAs(0<x<1)をエピタキシャル成長させたものであることを特徴とする請求項1〜5のいずれかに記載の2次元フォトニック結晶レーザ。 The two-dimensional photonic crystal laser according to claim 1, wherein the different refractive index region is obtained by epitaxially growing Al x Ga 1-x As (0 <x <1). . 前記エピタキシャル成長層の上に、p型又はn型のクラッド層が積層されていることを特徴とする請求項1〜7のいずれかに記載の2次元フォトニック結晶レーザ。   The two-dimensional photonic crystal laser according to claim 1, wherein a p-type or n-type cladding layer is laminated on the epitaxial growth layer.
JP2010171933A 2010-07-30 2010-07-30 Two-dimensional photonic crystal laser Active JP5854417B2 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2010171933A JP5854417B2 (en) 2010-07-30 2010-07-30 Two-dimensional photonic crystal laser
US13/192,852 US9130348B2 (en) 2010-07-30 2011-07-28 Two-dimensional photonic crystal laser
CN2011102164055A CN102347591A (en) 2010-07-30 2011-07-29 Two-dimensional photonic crystal laser and manufacturing method
US14/807,504 US20150372452A1 (en) 2010-07-30 2015-07-23 Two-dimensional photonic crystal laser and method of producing the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010171933A JP5854417B2 (en) 2010-07-30 2010-07-30 Two-dimensional photonic crystal laser

Publications (3)

Publication Number Publication Date
JP2012033705A JP2012033705A (en) 2012-02-16
JP2012033705A5 true JP2012033705A5 (en) 2013-09-12
JP5854417B2 JP5854417B2 (en) 2016-02-09

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3588704B1 (en) * 2017-02-27 2022-07-13 Kyoto University Surface-emitting laser and method for manufacturing surface-emitting laser
CN115398761A (en) 2020-03-31 2022-11-25 国立大学法人京都大学 Two-dimensional photonic crystal laser

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* Cited by examiner, † Cited by third party
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JP3982940B2 (en) * 1999-03-26 2007-09-26 三井化学株式会社 Method for manufacturing optical semiconductor element
JP2002033549A (en) * 2000-07-14 2002-01-31 Canon Inc Semiconductor ring laser and its manufacturing method as well as method for driving
JP4594814B2 (en) * 2004-10-25 2010-12-08 株式会社リコー Photonic crystal laser, photonic crystal laser manufacturing method, surface emitting laser array, optical transmission system, and writing system
KR101131380B1 (en) * 2004-12-08 2012-04-04 스미토모덴키고교가부시키가이샤 Semiconductor laser device and method for manufacturing same
JP4347369B2 (en) * 2007-07-31 2009-10-21 キヤノン株式会社 Manufacturing method of surface emitting laser
JP4350774B2 (en) * 2007-07-31 2009-10-21 キヤノン株式会社 Surface emitting laser
JP2010109223A (en) * 2008-10-31 2010-05-13 Canon Inc Surface-emitting laser
JP5376360B2 (en) * 2008-11-10 2013-12-25 住友電気工業株式会社 Method for manufacturing photonic crystal surface emitting laser

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