JP2012027009A - Surface shape measurement method by interference fringe model adaptation and device therefor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To accurately measure the surface shape and surface height of a measurement object.SOLUTION: The heights of respective points are obtained by using the single color light (B, G, R) of a plurality of wavelengths and performing adaptation to an interference fringe model from interference images obtained from a measurement object surface and a reference surface indicated by luminance of each wavelength number with an average luminance, an interference modulation degree and the height of the point as unknown parameters.

Description

In the present invention, the surface shape and surface height of a measurement object having a slight height change, such as a semiconductor wafer, a liquid crystal panel, a plasma display panel, a magnetic film, a glass substrate, and a metal film, are obtained by optical interference with different wavelengths. The present invention relates to a three-dimensional surface measurement method and apparatus for measuring.

  Conventionally, as a method for measuring the surface shape and the surface height, monochromatic light is irradiated to the measurement target surface and the reference surface via the light source branching means, reflected from both the measurement target surface and the reference surface, and returned to the same optical path. There has been a carrier fringe introduction method for obtaining the surface shape and surface height of the surface to be measured based on the intensity value of interference fringes generated by reflected light.

  In the above method, as shown in FIG. 16, an inclined reference surface is provided on the measurement optical system, interference fringes with a substantially constant period are introduced, and the interference image is analyzed to obtain the height (for example, patents). Reference 1). In addition, there is a method of expanding the measurement range using a plurality of wavelengths of the light source (see, for example, Patent Document 2).

WO2007 / 088789A1 JP 2008-209404 A

Japan Society for Precision Engineering, Vol. 75, No2, pp. 273-277, 2009 VIEW 2008 Workshop on practical use of vision technology, pp. 5-10 Proc. Of the Japan Society for Precision Engineering 2008 Autumn Conference, pp. 179-180, 2008/9

  In the carrier fringe introduction method described in the background art, an interference fringe having a substantially constant period formed by tilting the reference surface of the measurement optical system is introduced, and the height is obtained by analyzing the interference image. However, the background art has the following problems.

  For example, if the introduced interference fringes are dense with respect to the surface shape and height of the surface to be measured and there is a steep uneven slope region that is difficult to observe, the height of that region cannot be measured correctly. That is, the measurable inclination angle of the surface shape and surface height unevenness of the measurement object is limited by the period of interference fringes (carrier fringes) formed and introduced by the inclination angle of the reference surface.

  In addition, since the luminance information of the inclined area of the measurement point on the measurement target surface is used to determine the surface shape and surface height, the horizontal resolution is reduced, and a correct measurement value is obtained near the step of the surface shape. I can't. Accordingly, the fine unevenness information of the surface shape and surface height of the measurement target surface is lost.

  In addition, when introducing interference fringes formed by tilting the reference surface of the measurement optical system and analyzing the interference fringe image to obtain the height, interference of the part exceeding the depth of focus range due to the tilt of the reference surface The stripes are blurred and accurate measurement cannot be performed.

  Furthermore, in the case of multiple wavelengths having a plurality of measurement data, complicated calculation processing such as accurate interference fringe frequency estimation and multiple wavelength unwrapping is required. And so on.

  The present invention is not a measurement using introduction of carrier fringes as described above, but a three-dimensional shape measurement method and apparatus different from the background art in that it is a collective measurement method that eliminates the need for introduction of carrier fringes. It is about. Means for solving the above problems will be described below using the present invention.

According to the first invention of the present application, “from the interference image obtained by irradiating the measurement target surface and the reference surface with monochromatic light having a plurality of wavelengths consisting of two wavelengths or more than three wavelengths and interference of reflected light from both surfaces, two wavelengths In the case of 4 or more different from each other in the image, 3 or more points are selected in the case of 3 wavelengths or more, and the wavelength of the wavelength number j is λ (j) and the wavelength number j Assuming that the average luminance is a (j), the degree of interference modulation is b (j), and the height of point i is z (i)
The luminance g (i, j) of wavelength number j at point i is
g (i, j) = a (j) [1 + b (j) * cos {4πz (i) / λ (j)}]
The height z (i) of each point i, the average luminance a (j) of each wavelength number j number j, and the degree of interference modulation b (j) are obtained by fitting the interference fringe model represented by A surface shape measurement method and an apparatus using the method.

  That is, unlike the conventional carrier fringe introduction method described in the background art, from an interference image captured using two or more types of wavelengths from the interference image, when there are two types of wavelengths, four or more points, When there are three or more types of wavelengths, select an interference luminance signal for each of three or more points, and fit the interference fringe model to the interference luminance signal with a least-squares fit (fitting) to collectively set the height of each point. It is invention regarding the method which calculates | requires by this, and the apparatus which can be measured using this method.

According to a second aspect of the present invention, “the height of the location point k other than the selected point is determined by using the average luminance a (j) and the degree of interference modulation b (j) of the wavelength number j, which are the obtained parameters. , The phase φ (k, j) of the wavelength number j at the point k from the luminance signal g (k, j) of each wavelength number is expressed as φ (k, j) = cos ⁻¹ [{g (k, j) / a ( j) -1} / b (j)]
Sought by
A surface shape measurement method characterized in that the height z (k) of each point k is obtained from a plurality of obtained phases for each wavelength number j, and an apparatus using the method.

  That is, as the “least square fit” shown in the first invention, an unknown parameter that minimizes the error between the interference fringe model and the interference luminance signal obtained from the interference image is obtained, and the surface of each point of the interference image is obtained. The present invention relates to a method for obtaining a shape and a surface height, and an apparatus using the method.

  Further, when determining the surface shape and surface height of the measurement object, the method and apparatus for determining the surface shape and surface height of the measurement object are used using the first and second inventions of the present application. Thus, the height of each point on the measurement target surface can be measured efficiently.

  According to the method of the present invention and the apparatus using the method, since carrier fringes are not introduced, the range in which the unevenness on the measurement target surface can be measured is not limited by the inclination angle of the reference surface.

  Also, unknown parameters such as the height, brightness, and interferometric modulation degree of each measurement point on the measurement target surface are obtained from the interference fringe model by least squares fitting. I do not receive it.

  In the present application, the brightness of each point to be measured on the measurement target surface and the degree of interference modulation are used as unknown parameters, and the height of each point is obtained using least squares fitting from the interference fringe model represented. For example, the height can be obtained by other methods such as a robust estimation method.

  Furthermore, in the method of the present application and the apparatus using the method, it is not necessary to incline the reference surface, and the surface shape measurement can be performed while avoiding the phenomenon that the fringes in the portion exceeding the range of the focal depth are blurred. Further, even if there is a steep difference in height between the surface shape and surface height of the surface to be measured, the surface shape can be measured.

  In addition, according to the method of the present invention and the apparatus using the same, complicated calculation processing such as frequency estimation and multi-wavelength unwrapping is not required, and the surface shape of the measurement object or There is an advantage that the surface height can be measured accurately.

The figure which shows schematic structure of the surface shape measuring apparatus which concerns on this invention. The flowchart of the calculation procedure of this invention. FIG. 3 is a measurement target model for surface shape measurement of Example 1. FIG. The interference image of each of the three wavelengths in Example 1. FIG. 3 is a height graph showing a result of three-wavelength three-point matching in Example 1. 6 is a graph showing the observed value, the initial value, and the luminance of the estimated value at each point of wavelength B in Example 1. 6 is a graph showing observed values, initial values, and estimated values of brightness at each point of wavelength G in Example 1. FIG. 6 is a graph showing the observed value, initial value, and estimated value of brightness at each point of wavelength R in Example 1. FIG. The graph which shows the luminance of the observed value of the point P1 of Example 1, an initial value, and an estimated value. The graph which shows the brightness | luminance of the observed value of the point P2 of Example 1, an initial value, and an estimated value. The graph which shows the brightness | luminance of the observed value of the point P3 of Example 1, an initial value, and an estimated value. The flowchart of the height calculation procedure of points other than the selection point of this invention. 10 is a graph showing the luminance at each of the 50 points in Example 3. 10 is a graph showing the phase at each of 50 positions in Example 3. The graph which shows the height of each position of 50 points | pieces of Example 3. FIG. The apparatus outline figure of the collective interference measurement optical system by the introduction of the conventional carrier fringe.

  Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a diagram showing a schematic configuration of a surface shape measuring apparatus according to an embodiment of the present invention. The surface shape measuring apparatus of the present application applies monochromatic light in a plurality of specific wavelength bands to a measurement object 30 having fine irregularities on the surface of a semiconductor wafer, a liquid crystal panel, a plasma display panel, a magnetic film, a glass substrate or a metal film. The optical system unit 1 which irradiates and images, the control system unit 2 which controls the optical system unit 1, and the holding table 40 which mounts and holds the measurement object 30 are provided.

  The optical system unit 1 includes an illumination device 10 that outputs monochromatic light having a plurality of different wavelengths as illumination light toward the measurement target surface 30 </ b> A and the reference surface 15, a collimator lens 11 that collimates each monochromatic light, and illumination light. Is reflected through the half mirror 13 in the direction of the measurement object 30 and allows the reflected light from the direction of the measurement object 30 to pass through, and the monochromatic light reflected by the half mirror 13 and passing through the objective lens 14. A beam splitter 17 that branches to the measurement target surface 30A and the reference surface 15, an imaging lens 18 that forms an interference generated by combining the reference light and the measurement light, and an imaging device (CCD) 19 that captures the interference image. And.

  The lighting device 10 of the present embodiment uses, for example, an LED (Light Emitting Diode) that can output monochromatic light of two or more different wavelengths, and outputs monochromatic light of the following types of wavelengths, for example. The light source wavelength number 1 is the wavelength λB = 470 nm, which is “blue” monochromatic light, the light source wavelength number 2 is the wavelength λG = 560 nm, which is the monochromatic light of “green”, and the light source wavelength number 3 is the monochromatic light of “red”. The wavelength λR is 600 nm.

  The half mirror 13 reflects the parallel light from the collimating lens 11 toward the measurement object 30 and allows the reflected light returned from the measurement object 30 and the reference surface 15 to pass therethrough. The objective lens 14 is a lens for condensing incident light on the measurement target surface 30 </ b> A and the reference surface 15.

  The beam splitter 17 divides the illumination light into reference light reflected by the reference surface 15 and measurement light reflected by the measurement target surface 30A. Further, the reference light and the measurement light that are reflected from each surface and return on the same optical path cause interference.

  The reference surface 15 has a mirror-finished surface and is attached at right angles to the traveling direction of the reference light. The reference light reflected by the reference surface 15 is reflected by the beam splitter 17. In addition, the measurement light that has passed through the beam splitter 17 is collected toward the focal point on the measurement target surface 30A and reflected by the measurement target surface 30A. The reflected measurement light passes through the beam splitter 17.

  The reference beam and the measurement beam are combined again by the beam splitter 17. At this time, an optical path difference is caused by the difference between the distance L1 between the reference surface 15 and the beam splitter 17 and the distance L2 between the beam splitter 17 and the measurement target surface 30A. Interference occurs according to the optical path difference.

  The imaging device 19 captures a spatial variation in luminance due to interference as an image. The captured image data is stored in the memory 21 of the control system unit 2.

  The imaging device 19 in the present embodiment may be configured to be able to individually detect the two-dimensional luminance of a plurality of monochromatic lights having different wavelengths. For example, a CCD solid-state imaging device including a color filter, a MOS image sensor, and a CMOS An image sensor or the like is used.

  The control system unit 2 stores the overall control of the entire surface shape measuring apparatus and a CPU 20 for performing predetermined arithmetic processing, and various data and programs such as image data and arithmetic results sequentially collected by the CPU 20. And an input unit 22 including a mouse and a keyboard for inputting other setting information such as a sampling timing and an imaging area, and a monitor 23 for displaying an image of the measurement target surface 30A.

  The CPU 20 is a so-called central processing unit, and performs arithmetic processing for obtaining the surface height of the measurement target surface 30A based on the image data of the interference light imaged by the imaging device 19. Further, the CPU 20 is provided with a monitor 23 and an input unit 22 such as a keyboard and a mouse, and inputs various setting information. Further, on the monitor 23, a surface observation image, a concavo-convex shape or the like of the measurement target surface 30A is displayed as a numerical value or an image.

  Hereinafter, the processing of the present invention performed using the surface shape measuring apparatus of FIG. 1 which is a characteristic part of the present embodiment will be described with reference to the flowchart shown in FIG.

  First, the measurement target surface 30A is provided with a number for each wavelength using two or more types of wavelengths, and an interference image captured for each wavelength number is acquired. Subsequently, from each of the interference images, when there are two types of wavelengths, four or more points are selected, and when there are three types of wavelengths, three or more points are selected as the luminance signals. By fitting the interference fringe model to the least squares (fitting), the height of each point is calculated at once. Note that the least square fit described here means obtaining an unknown parameter that minimizes the error between the interference fringe model and the observed value. That is, each parameter is determined so as to minimize the error square sum f expressed by the following equation (3).

The above interference fringe model is
g (i, j) = a (j) [1 + b (j) * cos {4πz (i) / λ (j)}] (2)
Where g (i, j) = luminance of wavelength number j at point i. a (j) = average luminance of wavelength number j. b (j) = interference modulation degree of wavelength number j. z (i) = height of point i. λ (j) = wavelength with wavelength number j.

  In the interference fringe model, it is assumed that the two parameters of the average luminance a (j) and the degree of interference modulation b (j) of the wavelength number j do not change at each point and depend only on the wavelength number j. This assumption is almost valid if the material of the measurement target surface 30A is constant.

  Further, the error sum of squares is defined as f, and is defined by Expression (3).

f = ΣΣ [g (i, j) −gij] ² (3)
However, g (i, j) = interference fringe model function value shown by Formula (2). g ij = observation luminance value ΣΣ is the sum of the wavelength number j and the observation point i.

If the number of wavelengths is m and the number of points is n, the number of unknown parameters is (2m + n) when a (j) and b (j) are m and g (i, j) is n, respectively. It becomes. Since m luminance signals can be obtained from one point, the condition for obtaining an unknown parameter by least squares fit is as follows:
m * n ≧ 2m + n (4)
Therefore, the number of necessary n points is n ≧ 2 m / (m−1) points. That is, as a necessary condition, when m = 2, n ≧ 4, and when m = 3, n ≧ 3 holds.

  Here, when the equal sign of the above equation (4) holds, that is, when m = 2, n = 4 or m = 3, n = 3, strictly speaking, it is not a least square problem, and (2m + n) element It becomes a nonlinear simultaneous equation. Further, when the equal sign is not established, a nonlinear least square problem is caused.

  As described above, the least squares fit is a nonlinear simultaneous equation or a nonlinear least squares problem. This solution includes the steepest descent method, which uses software built into many commercial software packages. Can be solved. For example, Excel (registered trademark) manufactured by Microsoft Corporation has software named Solver (registered trademark), and this software is also used in the present application.

  In the above least squares fit, the calculation load increases as the number of unknown parameters increases. Therefore, it is practical to select effective points from the imaging screen of the measurement target surface and limit the n points used for least squares fitting from several to several tens. Therefore, when actually selecting effective points, the number of n points used for least squares fit should be limited to several to several tens. Further, when selecting an effective point, it is essential to select a point having a different luminance. In addition, when the measurement target surface 30A is flat and the change in luminance in the captured image is small, it is preferable that the reference surface 15 or the measurement target surface 30A is tilted to increase the luminance change.

  Next, a case where the heights of points (k points) other than the n points (i = 1, 2,... N) used for least squares fitting will be described. When obtaining the heights of points other than the n point used for the least-squares fit, the average luminance a (j) at the wavelength number j, which is a parameter of the interference fringe model obtained by the least-squares fit, and the interference modulation degree b Using (j), it is possible to obtain the phase φ from the luminance and perform multi-wavelength unwrapping.

A specific calculation method is described below.
The parentheses in the second term on the right side of the equation (2) represent the phase φ (i, j) of the wavelength number j at the point i,
φ (i, j) = 4πz (i) / λ (j) (5) Substituting equation (5) into equation (2), equation (6) ).

g (i, j) = a (j) [1 + b (j) * cos {φ (i, j)}] (6) From equation (6),
φ (i, j) = cos ⁻¹ [{g (i, j) / a (j) −1} / b (j)] (7) where the inverse cosine function cos− of the equation (7) The range of 1 is [0, π].
Therefore, the height candidate z (i, j) obtained from the luminance of the wavelength number j at the point i is expressed by the general solution expression of the equation (5) and the inverse cosine function equation:
z (i, j) = [± φ (i, j) / 4π + N (i, j) / 2] * λ (j) (8) where N (i, j) is the fringe order (integer) is there.

The fringe order N (i, j) is determined from the height candidates obtained above by a technique called “matching method”, and the height candidates z (i, j) of the respective wavelengths are obtained. The final height is obtained (see, for example, Non-Patent Document 2 and Non-Patent Document 3).
That is,
z (i) = Σz (i, j) / m
However, (SIGMA) is the sum total regarding wavelength number j = 1-m, and a right side is equivalent to the average value of a height candidate value.

  Further, when the surface shape and surface height of another measurement target surface 30A made of the same material are further measured, the method described in the present application is applied to the first interference image, and the obtained interference fringe model parameters are obtained. The height can be obtained by applying the average luminance a (j) and the interference modulation degree b (j) at the wavelength number j to the second and subsequent interference images. As a result, the speed of the height measurement can be increased.

Next, the setting of the initial value in the case of least squares fit is described. In the case of least squares fit, there are a large number of local minimum values (hereinafter referred to as local minimums), so the initial value must be set appropriately. Regarding the setting of the average luminance a (j) and the interferometric modulation factor b (j) at the wavelength number j as the parameter, the following method was used in the examples described in the present application.
That is, the average luminance a (j) is an average of the luminance values, and the interferometric modulation degree b (j) is obtained by dividing the difference between the maximum and minimum luminance values by 2a (j) as the initial value. did. For the height of each point, the expected height of each point was set as the “initial value”.

  When the initial value of the set expected height is far from the true value, a phenomenon occurs in which a correct height cannot be obtained due to a so-called local minimum. As countermeasures against this phenomenon, a plurality of initial height values were prepared and least squares fitting was performed, and the value with the least error of least square fitting was adopted as an estimated value from these results.

  Hereinafter, processing performed by the entire surface shape measuring apparatus which is a characteristic part of the present embodiment will be described with reference to a flowchart shown in FIG. In Examples 1 to 3 of the present application, as common conditions, the wavelength was adjusted to three kinds of wavelengths composed of RGB of the three primary colors of light. That is, generally used blue wavelength B = 470 nm, green wavelength G = 560 nm, and red wavelength R = 600 nm were used. Further, height measurement was performed by standardizing the average luminance a = 100 and the interference modulation degree b = 1 as interference signal parameters.

[Example 1]
<Step S1> As the multi-wavelength image acquisition example 1, a plurality of wavelengths, in the case of this example, three types of wavelengths (470, 560, 600 nm) suitable for three types of colors (blue, green, red) are used. Three points were selected as measurement points and fitted to the theoretical data. The estimation target model of the measurement target surface 30A of the measurement target 30 is as shown in FIG.

Curvature radius: 1 mm, Pixel size: 50 × 50 pixels, Pixel size: 1 μm, Projection size: 4 μm × 4 μm, Projection height: 50 nm

A spherical surface with protrusions was used.

  The interference images of three types of wavelengths were picked up by the image pickup device 19 of the optical system unit 1, sent to the CPU 20 of the control system unit 2, and stored in the memory 21. The interference images of the three types of wavelengths are shown in FIG.

表１

＜ステップＳ３＞ 初期値設定
次に、各点（この場合３点）の高さに初期値を設定する。ただ、初期値が真値から離れている場合、ローカルミニマムに陥って、正しい高さが得られなくなる恐れがある。従い、初期値設定においては、予め予想される高さを持って想定し設定する。例えば、当該実施例で測定しようとしている対象モデルの測定対称面３０Ａについては、真値から約５％低く推定された場合を想定し、下記表２ａの様に設定した。 <Step S2> Usage Data Selection For the interference images of the three types of wavelengths shown in FIG. 4, the coordinates are P1 (X1, Y1) = (5, with the vertical axis of the interference image as the Y axis and the horizontal axis as the X axis. 25), P2 (X2, Y2) = (15,25) and P3 (X3, Y3) = (25,25) were selected. The observed values of the selected points P1 to P3 were extracted from the memory 21 from the interference fringe images of each type of wavelength. Table 1 shows the true height and the observed value (brightness) of each selected point. Further, it is assumed that the interference signal parameter of the estimation target model of the surface shape measurement target does not change at each point and depends only on the wavelength, and the average luminance a = 100 and the interference modulation degree b = 1, respectively.

Table 1

<Step S3> Initial value setting Next, an initial value is set to the height of each point (three points in this case). However, if the initial value is far from the true value, it may fall into a local minimum and the correct height may not be obtained. Therefore, in the initial value setting, it is assumed and set with an expected height. For example, the measurement symmetry plane 30A of the target model to be measured in this example is set as shown in Table 2a below, assuming a case where it is estimated about 5% lower than the true value.

表２ａ

表２ｂ

＜ステップＳ４＞ 適合計算
次ステップとして、設定した初期値の値を制御系ユニット２の入力部２２から入力し、ＣＰＵ２０にて、前出の様にマイクロソフト社製エクセル（登録商標）のソルバー（登録商標）なるソフトウエアを用いて適合計算をおこなうことにより、本願実施例の干渉縞の図４から、干渉縞パラメータと高さを推定値として取得する。 Further, regarding the initial value setting of the average luminance a (j) and the interference modulation degree b (j) at each wavelength number j, the average luminance a (j) is the average of the observed luminance values, and the interference modulation degree b ( j) is the value obtained by dividing the difference between the maximum and minimum observed luminance values by 2 × a (j), and is set as shown in Table 2b.

Table 2a

Table 2b

<Step S4> As the next step of the adaptation calculation, the set initial value is input from the input unit 22 of the control system unit 2, and the CPU 20 solves the Excel (registered trademark) solver (registered trademark) as described above. By performing the adaptation calculation using software (trademark), the interference fringe parameters and the height are obtained as estimated values from FIG. 4 of the interference fringes of the present embodiment.

<Step S5> Height calculation for each point As shown in FIG. 5, the estimated values obtained by starting from the initial values of the selected points P1 to P3 match the true values, respectively. A result of zero was obtained.

  Moreover, when the brightness | luminance estimation result for every position of 3 points | pieces when adapting to the said 3 types of wavelengths and 3 observation values is shown with a graph, it became FIG.6, FIG.7 and FIG.8. FIG. 6 shows the case of the wavelength B (470 nm). When the initial values are set to 50, 88, and 56 for the three points P1, P2, and P3, the estimated values after adaptation are 47, 57, and 110, respectively. The result was consistent with the observed value and the error was zero.

  FIG. 7 shows the case of the wavelength G (560 nm). When the initial values are set to 69, 109, and 108 with respect to the three points P1, P2, and P3, the estimated value after the matching and the observed value match. As a result, the error was zero as well. FIG. 8 shows the case of the wavelength R (600 nm). When the initial values are 113, 109, and 110 for the three points P1, P2, and P3, the result of matching the estimated value after the match with the observed value. Similarly, the error is zero.

  Based on the results after the fitting calculation, the obtained heights are the three points P1, P2 and P3, respectively. With the initial values set, the estimated values after the fitting calculation are 371, 518 and 618, respectively. For each point, Z (P1) = 390, Z (P2) = 545, and Z (P3) = 650, and as shown in FIG. Met.

  Next, based on the above-described results, the luminance for each type of each of the three wavelengths is shown as a graph in FIG. 9, FIG. 10, and FIG. FIG. 9 shows the luminance for each of the three types of wavelengths at the point P1, and even in this case, it can be seen that the observed value and the estimated value after the matching calculation match. FIG. 10 is a graph showing the luminance of each wavelength type at the point P2, and it can be seen that the observed value and the estimated value after the calculation of matching are also in this case. Further, FIG. 11 is a graph showing the luminance for each type of wavelength at the point P3. Even in this case, it can be seen that the observed value and the estimated value after the matching calculation match.

<Step S6> Completion of Height Calculation of All Points When the heights z (i) of all the selected points are obtained, the surface shape measurement is completed.

[Example 2]
Next, in order to obtain the height of a point (point k) other than the point selected for the fitting trial calculation, the wavelength number j that is a parameter of the interference fringe model obtained by the least square fitting in the first embodiment is used. Using the average luminance a (j) and the interferometric modulation factor b (j), the height is obtained using the phase obtained from the measured luminance at other points.

  As an example, the phase is obtained using the average luminance a (j) and the interference modulation degree b (j) at the wavelength number j, which are parameters of the interference fringe model obtained by fitting, and the “matching method” is used. An example of calculating the height from the luminance calculation will be described with reference to the flowchart shown in FIG. In this case, steps S1 to S4 in FIG. 12 are as described in the first embodiment. Hereinafter, it demonstrates from step S55.

<Step S55> Extraction of points other than selected points From the same interference image as in Example 1, the heights of points other than the selected points were obtained. Here, as a point other than the point selected in the first embodiment, a point P4 (1, 25) is selected and illustrated as shown in FIG.

表３
＜ステップＳ７７＞ アンラッピング
さらに、上記各波長ごとに得られた位相の値から、前記式（８）および式（９）を用いて高さ計算をおこなう。この時、前記計算結果の位相から干渉次数を変えた高さ候補値を選択する。干渉次数を変えた高さ候補値の一覧を求める、この場合の次数の計算範囲は、予想高さに基づき決定する。この場合、高さ範囲が０〜７００ｎｍと仮定した。上記からの干渉次数を変えた高さ候補値計算結果を表４に示す。

表４

＜ステップＳ８８＞ 高さの選定
次に、干渉次数を変えた高さ候補値計算結果から、最近傍の波長間の合致誤差が最も小さい組み合わせを探索する。この場合、［（最大値）−（最小値）］を用いて、値が最小にある干渉次数を選択した。表４によれば、干渉次数＝＋１の場合、合致誤差が「０」であるので、この時の高さ３００ｎｍを採用した。結果として、この値は、真値に一致する。以上が、「合致法」に基づく適合に使用した点以外の高さとしての当初選択したｎ点以外の点（ｋ点）Ｐ４（１，２５）の高さを求めた事例である。 <Step S66> Phase calculation The phase (unit: radians) corresponding to each wavelength at the point P4 (X4, Y4) = (1, 25) is obtained by the above equation (7). The results are shown in Table 3.

Table 3
<Step S77> Unwrapping Further, the height calculation is performed from the phase value obtained for each wavelength using the equations (8) and (9). At this time, a height candidate value is selected by changing the interference order from the phase of the calculation result. A list of height candidate values with different interference orders is obtained, and the calculation range of the orders in this case is determined based on the expected height. In this case, the height range was assumed to be 0 to 700 nm. Table 4 shows the height candidate value calculation results obtained by changing the interference order from the above.

Table 4

<Step S88> Selection of Height Next, a combination with the smallest matching error between the nearest wavelengths is searched from the calculation result of the height candidate value with the interference order changed. In this case, using [(maximum value) − (minimum value)], the interference order having the minimum value was selected. According to Table 4, when the interference order is +1, since the matching error is “0”, the height of 300 nm at this time is adopted. As a result, this value matches the true value. The above is an example in which the height of the point (k point) P4 (1, 25) other than the n point initially selected as the height other than the point used for the matching based on the “matching method” is obtained.

[Example 3]
Next, in the same manner, an example in which there are 50 reference luminance signals using the same least squares fit result and an example of the result in the case of 50 points will be shown. Similarly to the case where the height of the point (k point) P4 (X4, Y4) = (1,25) newly selected in Example 2 is obtained, the coordinates (x = 1 to 50, y = 25) The height was determined using the “match method” for 50 points.

  FIG. 13 shows the luminance data for each type of wavelength at each point, FIG. 14 shows the phase data for each wavelength at each point, and FIG. 15 shows the height of each point. In this case as well, correct estimation is made at all points. In particular, the step of the steep protrusion at the edge of the spherical apex (the center of the horizontal axis in the figure) is measured without dullness, but this is an improvement that was not possible with the conventional carrier fringe introduction method. Is a measured result.

  By adapting the interference fringe model of the present invention, the surface shape and the surface height measurement that collectively calculate the height of each point have many advantages over the conventional carrier fringe introduction method. First, since carrier fringes are not introduced, the surface shape and the surface height can be measured without being restricted by the inclination angle of the reference surface as in the conventional method even when a protrusion on the object to be measured is included.

  In particular, even when there is a steep slope area such as a protrusion on the surface to be measured where the introduced interference fringes disappear, it is limited to the tilt angle of the reference surface as in the conventional method. The surface shape and surface height can be measured.

  Since the height of each point is determined as an unknown parameter by least square fitting, there is no influence between adjacent points and there is no reduction in resolution in the horizontal direction. Therefore, the correct measured value can be obtained even near the step.

  Complex calculation processing such as frequency estimation and multi-wavelength unwrapping is not required, and the surface shape and surface height of the measurement object can be measured only by performing least squares fitting together.

DESCRIPTION OF SYMBOLS 1 ... Optical system unit 30 ... Object to be measured 30A Measurement surface 2 ... Control system unit 40 ... Holding table 15 ... Reference surface 10 ... Illuminating device 11 ... Collimating lens 13 ... Half mirror 14. Objective lens 17 Beam splitter 18 Imaging lens 19 Imaging device 10 Light source 20 CPU
21..Memory 22..Input unit 23..Monitor L1..Distance 1
L2 ... Distance 2

Claims (8)

From the interference image obtained by irradiating the measurement target surface and the reference surface with monochromatic light having a plurality of wavelengths consisting of two wavelengths or three or more wavelengths and interference of reflected light from both surfaces, in the case of two wavelengths, they are different from each other in the image. If there are 4 points or more and 3 wavelengths or more, select 3 points or more, and the interference luminance signal at each point is λ (j) as the wavelength of wavelength number j, a (j) as the average luminance of wavelength number j, and interference The modulation degree is b (j) and the height of the point i is z (i).
The luminance g (i, j) of wavelength number j at point i is
g (i, j) = a (j) [1 + b (j) * cos {4πz (i) / λ (j)}]
By fitting an interference fringe model expressed by: height z (i) of each point i,
A surface shape measuring method, wherein an average luminance a (j) and an interference modulation degree b (j) of each wavelength number j are obtained. Using the average luminance a (j) and the degree of interference modulation b (j) of the wavelength number j, which are the obtained parameters, the height of the location point k other than the selected point, the luminance signal of each wavelength number The phase φ (k, j) of wavelength number j at point k from g (k, j) is changed to φ (k, j) = cos ⁻¹ [{g (k, j) / a (j) −1} / b (J)]
Sought by
2. The surface shape measuring method according to claim 1, wherein the height z (k) of each point k is obtained from a plurality of phases obtained for each wavelength number j. From the interference image obtained by irradiating the measurement target surface and the reference surface with monochromatic light having a plurality of wavelengths consisting of two wavelengths or three or more wavelengths using the imaging optical means and interference of reflected light from both surfaces, If there are four or more different points in the image and three or more wavelengths, select three or more points, and use the control unit to set the wavelength of wavelength number j to λ (j) and the wavelength number to the interference luminance signal at each point. The average luminance of j is a (j), the degree of interference modulation is b (j), the height of point i is z (i), and the luminance g (i, j) of wavelength number j at point i is
g (i, j) = a (j) [1 + b (j) * cos {4πz (i) / λ (j)}]
The height z (i) of each point i, the average luminance a (j) and the degree of interference modulation b (j) of each wavelength number j are obtained by adapting the interference fringe model expressed by Surface shape measuring device. Using the height of the point k other than the selected point, the average brightness of the obtained parameter wavelength number j as a (j) and the degree of interference modulation as b (j), the brightness of each wavelength The phase φ (k, j) of the wavelength number j at the point k from the signal g (k, j) is changed to φ (k, j) = cos ⁻¹ [{g (k, j) / a (j) −1} / b (j)]
The surface shape measuring device according to claim 3, wherein the height z (k) of each point k is obtained from a plurality of phases obtained for each wavelength number j. From the interference image obtained from the reflected light from the measurement object surface and the reference surface, monochromatic light having a plurality of wavelengths consisting of two to three wavelengths or more, four points or more, three wavelengths or more overlapping each other in the image in the case of two wavelengths In this case, three or more points are selected, and the wavelength of wavelength number j of the interference luminance signal at each point is λ (j), and the unknown parameter is the average luminance a (j) of wavelength number j and interference modulation. Degree b (j) and the height z (i) of point i,
The luminance g (i, j) of wavelength number j at point i is
g (i, j) = a (j) [1 + b (j) * cos {4πz (i) / λ (j)}]
The height z (i) of each point i, the average luminance a (j) of each wavelength number j, and the degree of interference modulation b (j) are obtained from i × j equations that fit the interference fringe model expressed by A surface shape measuring method characterized by the above. When the height of the location point k other than the selected point is defined as the average luminance a (j) and the interferometric modulation factor b (j) of the wavelength number j that are the obtained parameters, for each wavelength number, From the luminance, the phase φ (k, j) of the wavelength number j at the point k is
φ (k, j) = cos ⁻¹ [{g (k, j) / a (j) −1} / b (j)]
When expressed
A height z (k) of each point k, an average luminance a (j) and an interference modulation degree b (j) of each wavelength number j are obtained from a plurality of phases obtained for each wavelength number j. The surface shape measuring method according to claim 5. In the case of two wavelengths, interference images obtained by using imaging optical means to obtain monochromatic light having a plurality of wavelengths of two wavelengths or three or more wavelengths from the measurement target surface and the reference surface are four or more overlapping points in the image. If the wavelength is greater than or equal to the wavelength, select three or more points, and the wavelength of wavelength number j of the interference luminance signal at each point using the control system unit is λ (j), and the unknown parameter is the average of wavelength number j When the luminance a (j), the interferometric modulation degree b (j), and the height z (i) of the point i are given,
The luminance g (i, j) of wavelength number j at point i is
g (i, j) = a (j) [1 + b (j) * cos {4πz (i) / λ (j)}]
The height z (i) of each point i, the average luminance a (j) of each wavelength number j, and the degree of interference modulation b (j) are obtained from i × j equations that fit the interference fringe model expressed by A surface shape measuring device characterized by being obtained. When the height of the location point k other than the selected point is defined as the average luminance a (j) and the interferometric modulation factor b (j) of the wavelength number j as the obtained parameters, the luminance for each wavelength. To the phase k of the wavelength number j at point k is
φ (k, j) = cos ⁻¹ [{g (k, j) / a (j) −1} / b (j)]
When expressed
A height z (k) of each point k, an average luminance a (j) and an interference modulation degree b (j) of each wavelength number j are obtained from a plurality of phases obtained for each wavelength number j. The surface shape measuring apparatus according to claim 7.

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