JP2012015033A - Magnification observation apparatus and method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To maintain visual-field variation caused by rotation constant irrespective of the position of a sample table, thereby facilitating grasp of the variation.SOLUTION: A magnification observation apparatus includes: a middle portion constituting a pressure-reducible sample chamber having a hollow space therein; a cover portion that freely openably blocks an opening end of the middle portion and can keep the sample chamber airtight; electron beam imaging means for acquiring an electron microscope image of the inside of the sample chamber; rotation means for rotating the middle portion; a sample table 33 that is disposed in the sample chamber and has a sample mount face for mounting an observing-object sample; an XY moving mechanism 75 for linearly moving the sample table 33 in an XY direction; and an R-axis rotation mechanism 76 for rotating the sample table 33 around an R axis perpendicular to the XY plane. The R-axis rotation mechanism 76 has an R-axis maintaining mechanism 77 for setting the R-axis, which is the rotational center, as a predetermined position within a visual field of observation of the electron beam imaging means irrespective of a position of the sample table 33, the position that is set by the XY moving mechanism 75.

Description

  The present invention relates to an enlargement observation apparatus in which an optical imaging device capable of acquiring an optical image by an observation means of an optical system such as an optical microscope is added to an electron microscope such as an SEM, and an enlargement observation method using the apparatus.

  As a charged particle beam apparatus that obtains an observation image by detecting a signal obtained by irradiating a sample to be observed with a charged particle beam, for example, there are a transmission electron microscope and a scanning electron microscope using an electron beam. For example, an electron microscope freely refracts the traveling direction of electrons, and an imaging system such as an optical microscope is designed electro-optically. The electron microscope includes a transmission type that forms an image of electrons that have passed through a sample or specimen using an electron lens, a reflection type that forms an image of electrons reflected on the sample surface, and a focused electron beam that is scanned on the sample surface. There are a scanning electron microscope that forms an image using secondary electrons from each scanning point, a surface emission type (field ion microscope) that forms an image of electrons emitted from a sample by heating or ion irradiation (for example, Patent Document 1). ).

  As an example of an electron microscope (SEM), a scanning electron microscope (SEM) scans secondary electrons and reflected electrons generated when a sample to be observed is irradiated with a thin electron beam (electron probe). This is an apparatus that is taken out by using respective detectors such as a secondary electron detector and a backscattered electron detector and displayed on a display screen such as a CRT or LCD to mainly observe the surface form of the sample. On the other hand, a transmission electron microscope (TEM) transmits an electron beam through a thin film sample, and at that time, electrons scattered and diffracted by atoms in the sample are obtained as an electron diffraction pattern or a transmission electron microscope image. Can mainly observe the internal structure of the substance.

  When an electron beam is irradiated onto a solid sample, it is transmitted through the solid by the energy of the electrons. At that time, due to the interaction with the nuclei and electrons that make up the sample, elastic collision, elastic scattering, and energy loss occur. Causes elastic scattering. By inelastic scattering, electrons in the shell of the sample element are excited, X-rays are excited, secondary electrons are emitted, and the corresponding energy is lost. The amount of secondary electrons emitted varies depending on the angle of collision. On the other hand, the reflected electrons scattered back by elastic scattering and emitted again from the sample are emitted in an amount specific to the atomic number. The SEM uses these secondary electrons and reflected electrons. The SEM irradiates a sample with electrons and detects emitted secondary electrons and reflected electrons to form an observation image. Further, as a kind of scanning electron microscope, there is a scanning transmission electron microscope (STEM) that receives a sample transmission light on a detector.

  Although electron microscopes such as SEM, TEM, and STEM are effective for observation at a high magnification, they are not good at displaying at a low magnification. In general, the magnification of an electron microscope can be displayed up to several tens of thousands to several hundred thousand times or several million times, while the minimum magnification is several times to several tens of times. For example, the lowest magnification that can be observed by SEM is generally about 5 to 50 times. In this way, observation with an electron microscope or the like suddenly becomes a display at a high magnification from the start, and the observation field of view becomes a very narrow range. For this reason, it is difficult to find a visual field, which is an operation for finding a place to be finally observed on the specimen. The search for the visual field is preferably a procedure in which the visual field is gradually specified from the state in which the visual field is widened, that is, the state in which the visual field is displayed at a low magnification, to gradually narrow the field of view.

  In order to facilitate the search for the field of view of such an electron microscope, a method using an optical observation device (optical imaging means) such as an optical microscope or an optical camera using light of visible wavelength or infrared wavelength is known. (For example, patent document 1). The observation with the optical system imaging means can generally display at a low magnification such as a magnification of 1 or less. In view of this, a sample sample is observed at a low magnification using an optical system imaging means, and after searching for an approximate visual field, the process proceeds to observation with an electron microscope. In order to realize this, an observation optical system capable of displaying at a lower magnification is used in combination with an electron microscope. A field of view is searched based on low magnification display in an observation optical system such as a C-MOS camera, and then switched to electron beam imaging means such as SEM to perform observation at high magnification.

JP-A-9-97585 Japanese Patent Laid-Open No. 5-41194 Japanese Patent Laid-Open No. 10-214583

  In many cases, the sample stage installed in the vacuum chamber can be horizontally moved in the X and Y directions to change the visual field and is provided with a mechanism for rotating in the horizontal plane (around the Z axis). When such a rotation mechanism is used, since the rotation center position is generally a fixed position, the position to be observed by rotation may suddenly disappear from the visual field. In particular, the farther the observation visual field is from the rotation axis, the larger the amount of visual field change due to rotation. For this reason, the amount of change in rotation differs depending on the position of the XY stage, and there is a problem that adjustment work by the user becomes difficult.

  The present invention has been made in order to solve the conventional problems as described above, and its main object is to provide a magnification observation apparatus in which the change of the visual field due to rotation is made constant regardless of the position of the sample stage. There is.

Means for Solving the Problems and Effects of the Invention

  In order to achieve the above object, according to the magnifying observation apparatus according to the first aspect of the present invention, the magnifying observation apparatus includes a plurality of observation means, and includes a sample chamber that can be decompressed with a hollow internal space. A body part to be configured; a lid part capable of opening and closing the opening end of the body part so as to be openable and closable; and an electron beam imaging means for acquiring an electron microscope image in the sample room; Rotating means for rotating the body, a sample stage installed in the sample chamber and having a sample placement surface for placing a sample to be observed, and linear movement of the sample stage in the XY direction An XY moving mechanism for rotating the sample stage, and an R axis rotating mechanism for rotating the sample stage about an R axis perpendicular to the XY plane. The R axis rotating mechanism includes the sample by the XY moving mechanism. Regardless of the position of the base, the R axis that is the center of rotation is It may comprise a R-axis maintaining mechanism to a predetermined position in the observation field by sagittal imaging means. As a result, the amount of change in the field of view during the rotational movement by the R-axis rotation mechanism can be made constant regardless of the position of the sample stage, so that it is possible to realize an environment that is easy to operate during the field of view adjustment operation. In addition, since the sample stage always rotates around the viewpoint, there is no behavior in which the field of view deviates from XY due to the rotation of the point to be viewed. In addition, since the conventional rotation mechanism does not use a universal joint or spline, the entire apparatus can be downsized. In particular, these universal joints and spline worm gears are expensive, and cost can be reduced by omitting them.

  Further, according to the magnification observation apparatus according to the second aspect, the R-axis maintaining mechanism is in an unconnected state in which the connection with the sample stage is released while the sample stage is linearly moved by the XY movement mechanism. When the sample stage is rotated and moved by the R-axis maintaining mechanism, it can be configured to be connected to the sample stage. This makes it possible to achieve eucentric rotational movement while linearly moving one sample stage.

  Further, according to the magnifying observation device according to the third aspect, the XY movement mechanism is connected to the sample stage while moving the sample stage linearly, and the sample is rotated while moving the sample stage. Can be disconnected from the base. As a result, the R-axis maintaining mechanism places the sample stage in connection with the XY movement mechanism during linear movement, while releasing the connection state with the XY movement mechanism during rotation movement, and connects the R-axis rotation mechanism with the sample stage. Thus, a eucentric rotational movement can be realized while connecting to an appropriate movement mechanism for each movement.

  Furthermore, according to the magnification observation apparatus according to the fourth aspect, the R-axis rotation mechanism includes a rotation transmission shaft serving as a rotation center, and the R-axis maintenance mechanism is connected to the sample stage, This can be done with a rotation transmission shaft. Thereby, the connection with the sample stage and the rotation of the sample stage can be shared by the rotation transmission shaft.

  Furthermore, according to the magnifying observation device according to the fifth aspect, the rotation transmission shaft can be expanded and contracted toward the back side which is the opposite surface of the sample mounting surface of the sample stage, and the sample in the connected state. It protrudes toward the back side of the table and supports it to make the sample table rotatable, and in a non-connected state, it can be a lifting shaft that descends away from the back side of the sample table. As a result, the lifting / lowering shaft protrudes from the lower side to the back of the sample table to support the sample table, thereby creating a connected state in which rotation is possible. Can be configured to allow.

  Furthermore, according to the magnifying observation apparatus according to the sixth aspect of the present invention, on the back surface side of the sample table, an elevating hole that is opened substantially at the center of the sample table for inserting the upper end of the elevating shaft, An XY mounting surface for mounting on the upper surface of the XY moving mechanism can be formed around the hole. Thereby, stable support and rotation of the sample table can be realized by supporting the sample table from the lifting hole with the lifting shaft.

  Furthermore, according to the magnifying observation apparatus according to the seventh aspect, the R axis rotation mechanism includes a sample stage rotation mechanism for rotating the sample stage in the R axis direction, and the sample stage and the sample stage rotation mechanism. And a rotating mechanism connecting means that can be switched between a connected state and a disconnected state in which the connection is released. When the sample stage is moved in the XY direction by the XY moving mechanism, the rotating mechanism is connected. By connecting the sample stage and the sample stage rotation mechanism by means, the rotation of the sample stage is prohibited, and the sample stage is rotated in the R-axis direction by the sample stage rotation mechanism. In this case, the rotation of the sample stage in the XY directions can be prohibited by connecting the sample stage and the sample stage rotation mechanism by the rotation mechanism connecting means. This separates the movement of the sample stage in the XY direction and the rotation in the R-axis direction, so that regardless of the position of the sample stage in the XY direction, the centric is always centered on the point of interest. Can be realized.

  Furthermore, according to the magnifying observation device according to the eighth aspect, the rotation mechanism connecting means is a vertical movement mechanism for moving up and down the lifting plate positioned on the back side of the sample mounting surface of the sample stage. The sample stage rotation mechanism includes a rotation mechanism for rotating the lifting plate in the R-axis direction in a state where the back surface of the sample table is pushed up by the lifting mechanism by the lifting plate. Can do. As a result, the sample table can be rotated while the sample table is pushed up by the elevating plate, and eucentric rotation of the sample table centered on the point of interest is realized.

  Furthermore, according to the magnifying observation device according to the ninth aspect, a common operation means for operating the vertical movement mechanism and the rotation mechanism is further provided, and the lifting plate is operated by the operation of the common operation means. The vertical movement and rotational movement of the sample stage can be linked to each other so that the R-axis rotation of the sample stage can be operated. Accordingly, it is possible to rotate the sample table in a eucentric manner around the point of interest by interlocking the vertical movement and rotational movement of the lifting plate with the operation of the common operation means.

  Furthermore, according to the magnifying observation device according to the tenth aspect, the R-axis operating means for operating the rotational movement mechanism, and the vertical movement for operating the vertical movement mechanism provided separately from the R-axis operating means. And an operation unit. This makes it possible to separate the vertical movement and the rotational movement of the lifting plate with a simpler and more straightforward configuration, and to enable the centric rotation operation regardless of the position of the sample stage in the XY direction.

  Furthermore, according to the magnifying observation device according to the eleventh aspect, the lifting plate, the sample table, and the sample stage are in the unconnected position where the lifting plate is lowered by the vertical movement mechanism by the operation of the vertical movement operation unit. When the R-axis operating means is operated, the sample table is not rotated by the rotation mechanism, while the sample table is allowed to move in the XY direction by the XY movement mechanism, At the connecting position where the elevating plate is raised by the vertical movement mechanism, the sample stage is pushed up by the elevating plate to be connected, and the R axis operation means is operated to rotate the sample stage by the rotary mechanism. However, the movement of the sample stage in the XY direction by the XY moving mechanism can be released. As a result, it is possible to separate the XY movement and the rotational movement of the sample stage by operating the vertical movement operation unit, and the XY movement and the rotational movement of the sample stage are not performed at the same time. Independent centric rotation is reliably realized.

  Furthermore, according to the magnifying observation device according to the twelfth aspect, the R-axis maintaining mechanism can further position the R-axis substantially at the center of the observation field. Thereby, it can always rotate at the center of the observation visual field, and the change in the visual field due to the rotation can be minimized and the state change can be best understood.

It is the schematic which shows the outline | summary of a magnification observation system. It is an external appearance perspective view which shows a magnification observation apparatus. It is the external appearance perspective view which looked at the magnification observation apparatus concerning a modification from the left side. It is the external appearance perspective view which looked at the magnification observation apparatus of FIG. 2B from the right side. It is front sectional drawing which shows the sample chamber of a magnification observation apparatus. It is side surface sectional drawing seen from the IV-IV line of FIG. It is sectional drawing in the VV line of FIG. It is the partial cross section perspective view seen from the right diagonal front for demonstrating the horizontal surface moving mechanism of a sample stand. It is the partial cross section top view which looked at FIG. 6 from the top. It is the partial cross section perspective view which looked at FIG. 6 from diagonally right rear. It is a schematic diagram which shows a mode that an optical system imaging means is switched and connected to SEM or a stand. It is a block diagram which shows the apparatus provided with the conventional electron microscope and optical microscope. It is a perspective view which shows the apparatus which switches the other conventional electron microscope and optical microscope. It is a block diagram which shows the apparatus provided with the other conventional electron microscope and optical microscope. It is a model front view which shows the distance of each observation means and a sample stand. It is a model side view which shows the division of a rotation part and a fixed part. It is a model side sectional view of a sample room which provided a lid part in a fixed part. It is a schematic side cross-sectional view showing a state in which the lid of the sample chamber in which the lid is integrated with the sample stage is closed. FIG. 16B is a schematic side cross-sectional view showing a state in which the lid of the sample chamber in FIG. 16A is opened. It is a model perspective view which shows the example of the sample chamber which rotates only the one side of a trunk | drum. It is a model perspective view which shows the example of the sample chamber which rotates only the intermediate part of a trunk | drum. It is a schematic cross section which shows the structure which arrange | positions an O-ring to a rotation means. It is a schematic cross section which shows the structure which arrange | positions the conventional O-ring. It is a schematic diagram which shows the state which provides the opening-and-closing mechanism of a lid | cover in the sample chamber side, and rotates it. It is a schematic diagram which shows the state which rotated the sample chamber from the state of FIG. 21A. It is a schematic cross section which shows the structural example which made the lid | cover drawer type from a sample chamber. It is a schematic cross section which shows the locked state of the cover rotating shaft in an open position. It is a schematic cross section which shows the lock release state of the cover rotating shaft in the obstruction | occlusion position. It is a partial cross section perspective view which shows the opening / closing direction of a closure board. It is a model side sectional view of the sample room which constituted the body part in the shape of a semicircle. FIG. 26A is a schematic diagram conceptually showing a range in which the optical system imaging unit and the electron beam imaging unit can rotate, and FIG. 26A is a diagram illustrating an overlapping rotational range of the electron beam imaging unit and the optical system imaging unit. 26 (b) shows the rotatable range of the electron beam imaging means, and FIG. 26 (c) shows the rotatable range of the optical imaging means. It is a block diagram which shows the structure of an electron beam imaging means. It is a block diagram which shows the structure of the electronic lens system of an electrostatic lens. It is a block diagram which shows the structure of the electronic lens system of an electromagnetic lens. It is a perspective view which shows the example which implement | achieves a eucentric rotation mechanism with a mechanism of a universal joint and a worm system. It is a perspective view which shows the state which moved the sample stand from the position of FIG. 30A to XY direction. It is a schematic diagram which shows the example of an expansion-contraction type universal joint. It is sectional drawing which shows a horizontal surface moving mechanism. It is sectional drawing which shows a mode that a sample stand is moved inside a sample chamber. It is the partial cross section perspective view which looked at the horizontal surface moving mechanism from diagonally upward. It is the partial cross section perspective view which looked at the horizontal surface moving mechanism of FIG. 34 from the side surface. It is the partial cross section perspective view which looked at the horizontal surface moving mechanism of FIG. 34 from diagonally downward. It is a bottom view which shows the structural example of a distribution mechanism. It is a bottom view showing a vertical movement mechanism. It is the partial cross section perspective view which looked at the up-and-down moving mechanism from the front left diagonal upper part. It is a bottom view which shows a rotation mechanism. It is the partial cross section perspective view which looked at the rotation mechanism from the side right diagonally upward. It is a block diagram which shows the structure of the optical lens system of an optical system imaging means. It is a block diagram which shows the optical imaging system which controls an optical system imaging means with an information processing means. It is a schematic cross section which shows a mode that the positioning of a sample is performed in the open state of an obstruction board. It is a schematic cross section which shows the relative movement of the sample stand and observation means in a sample chamber. FIG. 44B is a schematic cross-sectional view showing a state where the observation means is rotated in the sample chamber of FIG. 44A. It is a schematic cross section which shows the movement of the sample stand by the conventional eucentric structure. FIG. 45B is a schematic cross-sectional view showing a state in which the sample stage is inclined in the sample chamber of FIG. 45A. It is a schematic cross section of a sample chamber showing a state in which a sample stage is lowered so that a sample mounting surface or an observation surface coincides with a rotation axis. It is a model side view which shows the positional relationship of the focus position of an electronic lens, and a rotating shaft. It is a model side view which shows the positional relationship of the focus position of an optical lens, and a rotating shaft. It is a schematic diagram which shows the visual field range and display range of an electron beam imaging means. It is a schematic diagram which shows the visual field range and display range of an optical system imaging means. It is a block diagram of a magnification observation device provided with a magnification conversion function. It is sectional drawing which shows an optical magnification reading means. It is an image figure which shows the example of a display of a magnification range display means. It is an image figure which shows the example of the electron microscope image used as the origin of image composition. It is an image figure which shows the example of the optical image used as the origin of image composition. FIG. 57 is an image diagram showing an example of a combined image obtained by combining information of each pixel in FIGS. 54 and 56. It is an image figure which shows the example of a display of the display means which provided the electron microscope image display area and the optical image display area. It is an image figure which shows the example of a display of the display means which provided the plan magnification display means. It is a block diagram of the magnification observation apparatus provided with a display switching means. It is a schematic cross section which shows the structure of a sample chamber provided with a rotational movement mechanism. It is a schematic cross section which shows the sample chamber which enabled switching to the swivel type of an observation means. It is a schematic cross section which shows the sample chamber which enabled switching to the parallel displacement type of the observation means. It is a schematic cross-sectional view showing a sample chamber in which the observation stage can be switched by moving the sample stage in parallel. It is a schematic cross section which shows the sample chamber which made the sample stand inclined and made the observation means switchable. It is a schematic cross-sectional view showing a sample chamber that can be switched by selecting the optical axis of the observation means with a half mirror. It is a schematic diagram which shows the expansion observation apparatus which controls a separate optical microscope and an electron microscope with a common controller. It is a schematic cross section which shows the state which made the up-down movement operation part of the magnification observation apparatus which concerns on a 2nd Example into the non-connecting position. FIG. 68 is a schematic cross-sectional view showing a state where the vertical movement operation unit of the magnification observation apparatus of FIG. FIG. 68 is a schematic diagram illustrating a configuration of a vertical movement mechanism and a rotary movement mechanism of the magnification observation apparatus of FIG. 67.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. However, the embodiment described below exemplifies a magnification observation apparatus and a magnification observation method for embodying the technical idea of the present invention, and the present invention includes the magnification observation apparatus and the magnification observation method as follows. Not specified. Further, the present specification by no means specifies the members shown in the claims to the members of the embodiments. In particular, the dimensions, materials, shapes, relative arrangements, and the like of the component parts described in the embodiments are not intended to limit the scope of the present invention unless otherwise specified, and are merely explanations. It is just an example. Note that the size, positional relationship, and the like of the members shown in each drawing may be exaggerated for clarity of explanation. Furthermore, in the following description, the same name and symbol indicate the same or the same members, and detailed description thereof will be omitted as appropriate. Furthermore, each element constituting the present invention may be configured such that a plurality of elements are constituted by the same member and the plurality of elements are shared by one member, and conversely, the function of one member is constituted by a plurality of members. It can also be realized by sharing.

  In this specification, the magnification observation apparatus is connected to a computer, a printer, an external storage device, and other peripheral devices for operation, control, input / output, display, and other processing connected thereto, for example, IEEE1394, RS- 232x, RS-422, RS-423, RS-485, serial connection such as USB, parallel connection, or electrically connected via a network such as 10BASE-T, 100BASE-TX, 1000BASE-T . The connection is not limited to a physical connection using a wire, but may be a wireless connection using a wireless LAN such as IEEE802.1x, radio waves such as Bluetooth (registered trademark), infrared light, optical communication, or the like. Further, a memory card, a magnetic disk, an optical disk, a magneto-optical disk, a semiconductor memory, or the like can be used as a recording medium for storing observation image data or setting data.

  In the present specification, an electron microscope image refers to a monochrome image that is displayed with shading, mainly including luminance information of an observation target, which is captured by an electron beam imaging means such as an electron microscope. The optical image refers to a color image mainly including color information, which is imaged by an optical imaging means using visible light, ultraviolet light, or the like. In addition to the visible light observation image obtained by the visible light camera, an infrared observation image obtained by the infrared camera can be used as the optical image. Further, as will be described later, the electron microscope image can be colored based on the color information of the optical image. Furthermore, the acquisition of an image by the electron beam imaging unit or the optical system imaging unit generally means that the image is captured by these members, but it is a concept that includes capturing an image captured by another member into an electron microscope. Yes, it is called image acquisition in a sense that encompasses such concepts.

  In the following embodiments, an example will be described in which an SEM that is one of electron microscopes is adopted as an example of a magnification observation apparatus that embodies the present invention. However, the present invention can also be used in TEM, STEM, and other charged particle beam devices. In this case, the electron beam imaging unit can be replaced with a charged particle beam imaging unit. It can also be applied to a near-field microscope, an atomic force microscope, an electrostatic force microscope, and the like. Furthermore, the optical imaging means can be applied to an optical microscope, a laser microscope, a digital microscope, and the like.

1 to 8 show a magnification observation apparatus according to an embodiment of the present invention. In these drawings, FIG. 1 is a schematic diagram showing an outline of a magnification observation system, FIG. 2A is an external perspective view of a magnification observation device, FIG. 2B is an external perspective view of a magnification observation device according to a modification, and FIG. FIG. 3 is a front sectional view showing the sample chamber of the magnifying observation apparatus, FIG. 4 is a side sectional view taken along line IV-IV in FIG. 3, and FIG. FIG. 6 is a partial cross-sectional perspective view as seen from the right front side for explaining the horizontal plane moving mechanism of the sample stage, and FIG. 7 is a partial cross-sectional plan view as seen from the top of FIG. FIG. 8 is a partial cross-sectional perspective view of FIG.
(Magnification observation system)

A magnification observation system 1000 shown in FIG. 1 includes a magnification observation device 100, a decompression pump VP, a power supply unit PU, and a display unit 2. The magnification observation apparatus 100 includes a chamber unit 14 that holds a sample in an airtight manner, and a decompression unit 15 that decompresses the inside of the sample chamber 21. The chamber unit 14 is equipped with two observation means 10, an electron beam imaging means 11 and an optical imaging means 12. The decompression unit 15 is connected to an external decompression pump VP, and constitutes an exhaust system pump 70 that decompresses the sample chamber 21 to a predetermined degree of vacuum such as high vacuum or low vacuum. Each observation means 10 is connected to the display means 2 and sends the acquired image data to the display means 2. The display unit 2 includes a display, and can display an electron microscope image captured by the electron beam imaging unit 11 and an optical image captured by the optical system imaging unit 12 on the display.
(Power supply unit PU)

The controller 1, the magnification observation device 100, and the decompression pump VP are connected to the power supply unit PU. The power supply unit PU is connected to an external commercial power source (not shown) and supplies power to the magnification observation apparatus 100 and the like. In this example, the power supply unit PU supplies a predetermined voltage to the magnification observation apparatus 100 based on an instruction from the controller 1, controls the operation of the magnification observation apparatus 100 with the controller 1, and displays the acquired image on the display unit 2. To do.
(Controller 1)

As the controller 1, in addition to a dedicated device, a general-purpose computer in which a magnification observation apparatus operation program is installed can be used. If necessary, an external console CS for operating the controller 1 and the display means 2 and a high acceleration voltage unit HU for applying a high acceleration voltage to the electron gun 47 of the electron beam imaging means 11 are added. You can also Further, in the example of FIG. 1, the controller 1 controls the magnification observation apparatus 100 and the like via the power supply unit PU. However, the power supply unit can be integrated with the controller and directly controlled.
(Display means 2)

  In the example of FIG. 1, the controller 1 includes a display unit 2. The display unit 2 includes a display unit 102 that displays an electron microscope image and an optical image. These images can be displayed on one screen at the same time or can be switched and displayed. The display is switched manually from the console CS. A monitor such as a CRT, LCD, or organic EL can be used as the display means 2. In the example of FIG. 1, the display unit 2 and the controller 1 are integrated together, but they can be configured as separate members. The console CS may also be incorporated in the controller 1 or the display means 2. For example, touch panel display means can be used. Furthermore, the connection example of each member shown in FIG. 1 is an example, and it is also possible to use different connection forms and wirings. Needless to say, wireless connection is possible as required.

  A magnification observation system 1000 shown in FIG. 1 is a combination of magnification observation using an optical lens such as a digital microscope and electron microscope observation using an electron microscope such as SEM. That is, the optical imaging means 12 is added in the sample chamber 21 of the electron microscope. The optical imaging unit 12 captures an optical image with visible light, infrared light, or the like as a first observation unit. For example, an optical microscope or an optical camera that uses light having a visible wavelength or infrared wavelength can be used. The captured optical image can be used arbitrarily by the user. For example, it can be used as a wide-area image for searching a visual field during observation of an electron microscope image such as an SEM image, or can be used as an auxiliary for electron beam observation such as confirmation of a sample to be observed. Used for purposes. A plurality of imaging systems, that is, observation means 10 including an electron beam imaging means 11 for imaging using charged particles such as these electron beams and an optical imaging means 12 for imaging using visible light or the like are configured to be switchable. Yes.

  Of the observation means 10, as shown in FIG. 9, the optical system imaging means 12 is removed from the magnification observation apparatus 100 constituting the SEM and connected to a digital microscope stand ST. The placed sample can also be observed. From the viewpoint of a magnification observation system such as a digital microscope using an optical lens, this configuration can also be regarded as being capable of connecting an electron beam imaging means 11 such as an SEM as an interchangeable head unit. That is, in the conventional digital microscope, only the optical observation means can be connected as the camera unit or the lens unit as in the stand type camera unit shown in FIG. Such an electron beam imaging unit 11 can be connected, and the optical system imaging unit 12 can be used as a camera unit for imaging an optical image in the sample chamber 21 provided with the electron beam imaging unit 11. In this case, the magnifying observation apparatus 100 itself provided with the electron beam imaging means 11 in FIG. 9 is one of the interchangeable head parts of the magnifying observation system. As a result, as an interchangeable camera or lens used in the magnification observation system, a head part such as an SEM or an optical lens is selectively mounted, and observation is performed by connecting an appropriate observation means according to a desired application. This makes it possible to extend the range of use of magnification observation not only to an optical system but also to an electron microscope system and the like, thereby realizing various magnification observations.

On the other hand, if the magnification observation apparatus provided with the electron beam imaging means 11 is mainly viewed, it can be considered that a digital microscope is added thereto. In any case, there is an advantage that an optical image and an electron microscope image can be taken with respect to the same sample. In particular, the ability to compare these images acquired by different observation means with the same magnification in the same field of view enables observation from various viewpoints that take advantage of each observation image, and is obtained through magnified observation. The amount of information that can be obtained can be dramatically increased.
(Observation means 10)

This magnification observation apparatus includes a plurality of observation means 10 for observing the sample in the sample chamber 21. In the magnifying observation apparatus 100 shown in FIG. 2A, an electron beam imaging unit 11 that can capture an electron microscope image as a first observation unit, and an optical system imaging unit 12 that can capture an optical image as a second observation unit, respectively. The posture is fixed to project from the body portion 24. Each imaging unit is configured to be switched by a display switching unit 36, which will be described later. In the example of FIG. 2A, a push button is provided as the display switching means 36 on the cylindrical side surface of the trunk portion 24. Further, the image pickup means may be configured to be used simultaneously or alternately. Further, in the example of FIG. 2A, the optical system imaging unit 12 is arranged on the right side of the electron beam imaging unit 11, but it goes without saying that the same effect can be obtained even if these arrangements are replaced.
(Magnification adjustment means)

Each observation unit 10 includes a magnification adjustment unit for adjusting each magnification. Specifically, the electron beam imaging unit 11 includes an electron microscope magnification adjusting unit 68 for adjusting the electron microscope magnification, while the optical system imaging unit 12 includes an optical magnification adjusting unit 95 for adjusting the optical magnification. Prepare. For example, as shown in FIG. 2A, each magnification adjusting unit adjusts the magnification by rotating a ring rotatably provided on the outer periphery of each lens barrel. In particular, the electron microscope magnification adjustment means 68 is configured in a ring shape that rotates around the lens barrel, like the optical magnification adjustment means 95, thereby unifying the operational feeling of magnification adjustment of each observation means and providing an excellent user interface. Is done. Moreover, it is preferable to provide anti-slip processing on the surface of each ring. The magnification range that can be adjusted by the electron microscope magnification adjusting means 68 is, for example, 20 times to 10000 times. The magnification range that can be adjusted by the optical magnification adjusting means 95 is, for example, 50 to 500 times. Further, by using a digital zoom together with an optical zoom, an image with a higher magnification can be obtained.
(Focus adjustment means)

  Further, each observation unit 10 may include a focus adjustment unit for adjusting the focal length along each optical axis. For example, the electron beam imaging means 11 is a microscope focus adjustment means 37 for adjusting the focal length along the optical axis, and the optical system imaging means 12 is an optical focus for adjusting the focal length along the optical axis. Each adjustment means 38 can be provided. The optical focus adjusting means 38 adjusts the focal position by mechanically moving the optical lens itself up and down in the optical axis direction. In the example of FIG. 2A, as the focus adjusting means, dial type knobs are provided in the vicinity of each observation means, and the focal position can be adjusted by the rotation amount of the knob. In addition, in this specification, the axis | shaft which irradiates an electron beam from an electron gun at the time of imaging an electron microscope image with the electron beam imaging means 11 is called an "optical axis."

By using the optical imaging unit 12 together with the electron beam imaging unit 11, an optical image of a color image including color information can be acquired with respect to an electron microscope image centered on a monochrome image without color information. In addition to the visible light observation image using visible light, ultraviolet light, or the like, the optical imaging means 12 can also use an infrared observation image by an infrared camera. It is also possible to color the electron microscope image based on the color information of the optical image. For example, an optical image can be combined with an electron microscope image to obtain a color image with high magnification and high accuracy (details will be described later).
(Magnification observation apparatus 100)

  Next, an outline of the magnification observation apparatus 100 will be described. As shown in FIGS. 2A to 4 and the like, the external appearance of the magnification observation apparatus 100 is a shape in which a box-shaped decompression unit 15 is connected to a cylindrical chamber unit 14. As shown in FIG. 4, the chamber unit 14 is placed on a base portion 22 constituting a flat horizontal plate. A fixing plate 23 is fixed to the upper surface of the base portion 22 so as to protrude in a vertical posture. The fixing plate 23 functions as an end face plate that closes one open end of the body portion 24. Further, the back surface of the fixed plate 23 is fixed to the decompression unit 15. Further, on the front surface of the fixed plate 23, a rotating means 30 for rotating the trunk portion 24 is provided. In the configuration of FIG. 4, the fixing plate 23 hermetically closes one end face of the barrel portion 24 via the rotating means 30, and maintains the reduced pressure state of the sample chamber 21, while simultaneously rotating the barrel portion 24. It is said. In order to allow rotation of the body part 24, the fixing plate 23 is separated so as to float on the base part 22 while holding the body part 24 on the base part 22 in a cantilever manner. There is a gap between the two. Further, the opening edge of the body part 24 is also not in contact with the fixing plate 23 and is provided with a gap so as not to hinder the rotation of the body part 24. In addition, such a cantilevered support structure allows one end surface of the body portion 24 to be freely opened and closed by the lid portion 27 and the other end surface to be connected to the fixing plate 23 via a rotating means, so that the sample chamber 21 Both opening and closing and rotation can be achieved.

The chamber unit 14 includes a body portion 24 and a pair of end face plates, and serves as a main body portion of the magnification observation apparatus 100. The body 24 has a substantially cylindrical outer shape. The internal space of the body portion 24 is hermetically closed by two end plates, and constitutes a sample chamber 21 that can be decompressed. One end face plate serves as an openable / closable lid portion 27, and the other serves as a fixing plate 23 fixed to the body portion 24 to airtightly close the sample chamber 21. As shown in the cross-sectional view of FIG. 5, the fixing plate 23 has a suction port 25 for sucking air in the sample chamber 21 into the decompression unit 15. Further, the fixed plate 23 is provided with a secondary electron detector 61, a sample chamber observation means 13, and the like which will be described later.
(Decompression unit 15)

The sample chamber 21 is connected to the decompression unit 15 via the suction port 25. The decompression unit 15 constitutes an exhaust system, and realizes a decompression environment so that the electron beam of accelerated electrons reaches the sample without losing energy as much as possible while passing the gas component. As the decompression unit 15, a rotary pump, an oil diffusion pump, a turbo-molecular pump (TPM) or the like can be used, and a desired degree of vacuum can be adjusted from high vacuum to low vacuum exhaust. The adjustable range of the degree of vacuum is, for example, 10 ⁻⁶ Torr to ^{10 −10} Torr. The decompression unit 15 is airtightly connected to the back surface of the chamber unit 14. The suction port 25 is preferably provided on the fixed plate 23 which is a fixed portion, but it goes without saying that the suction port 25 may be formed on the rotating portion side described later.
(Decompression unit operation panel 16)

The decompression unit 15 is provided with a decompression unit operation panel 16 for operating the operation of the decompression unit. In the example of FIG. 2A, a decompression unit operation panel 16 is provided on the side of the body 24, and a vacuum operation or start of air introduction is operated by a button operation. In addition, the decompression unit operation panel 16 is provided with an indicator for indicating the completion of the vacuuming operation or the operation. In this example, two LEDs are provided as indicators, and the state of the sample chamber 21 is divided into four states, that is, an atmospheric state, a vacuuming state, a vacuum state, and an air introduction state by a combination of lighting patterns.
(Leg 26)

Further, the magnification observation apparatus 100 has leg portions 26 protruding from the four corners of the bottom surface of the base portion 22. The magnifying observation device 100 is placed horizontally on the ground surface via the legs 26. For this reason, it is preferable that the leg part 26 is provided with the adjustment means which can adjust each height. As a result, there is an advantage in that the specimen stage 33 is maintained in a horizontal posture regardless of the inclination of the ground contact surface, and the enlarged observation can be stably performed. As the adjusting means, for example, a known configuration such as a mechanism capable of adjusting the protruding amount by the progress of a screw can be used as appropriate. In the example shown in the side view of FIG. 4, the leg portion 26 is provided on the base portion 22 on the chamber unit 14 side. However, the decompression unit 15 may be provided with legs.
(Torso 24)

  The body portion 24 has a hollow cylindrical shape, and both end surfaces thereof are sealed with end face plates to form an airtight sample chamber 21. At least one of the end face plates is a lid part 27 that can be freely opened and closed. The optical system imaging unit 12 and the electron beam imaging unit 11 are mounted on the cylindrical side surface of the body portion 24. Specifically, the electron beam imaging unit 11 is mounted at the first position 41, and the optical system imaging unit 12 is mounted at the second position 42 separated from the first position 41.

The optical system imaging unit 12 and the electron beam imaging unit 11 are each configured in a cylindrical shape with a built-in lens. The optical imaging unit 12 has a plurality of optical lenses incorporated in a cylindrical optical lens barrel. Similarly, the electron beam imaging means 11 has an electron lens incorporated in the electron lens barrel. As shown in the sectional view of FIG. 3, the optical system imaging unit 12 and the electron beam imaging unit 11 are disposed on the outer surface of the body portion 24 in a posture protruding radially from the central axis of the sample chamber 21 having a cylindrical interior. It is fixed. In other words, the electron lens barrel and the optical lens barrel of each observation unit 10 are fixed in a posture toward the center of rotation, and the optical axis of the electron gun 47 of the electron beam imaging unit 11 and the light of the optical system imaging unit 12 are fixed. The shaft extends radially in the radial direction about the rotation axis of the rotating means 30.
(Cover 27)

  One end face plate is a lid 27 that can be freely opened and closed. The lid portion 27 includes a closing plate 28 that closes the opening end of the body portion 24, lid opening / closing means for switching the closing plate 28 to the open position and the closing position, and the closing plate 28 supported rotatably on the lid opening / closing means. A lid rotating shaft 142 for covering and a holding mechanism 140 for holding the closing plate 28 so as to be aligned are provided. In the example of the side view of FIG. 4, the lid portion 27 includes a disk-like closing plate 28 that closes the end surface of the body portion 24, and a lid opening / closing arm 29 that supports the rotation of the closing plate 28 as lid opening / closing means. In FIG. 4, the left side is the front side. As shown in FIG. 4, the lower end of the lid opening / closing arm 29 is pivotally supported by the hinge portion 138 at the distal end of the base portion 22. Thus, the closing plate 28 is opened downward, the lid opening / closing arm 29 is erected, and the closing plate 28 is positioned on the end face of the trunk portion 24 and closed. With the closing plate 28 opened, the user can place the sample on the sample stage 33 provided in the sample chamber 21. In the example shown in FIG. 6, a lid opening / closing arm 29 that pivotally supports the center of the closing plate 28 is fixed to the tip of the base portion 22 by a hinge portion 138 so as to be bent. As a result, the lid opening / closing arm 29 can be tilted forward to bring the closing plate 28 into the open position. According to this structure, the hinge plate 138 is fixed below the closing plate 28 while rotating the closing plate 28 in close contact with the body portion 24, so that the opening / closing direction of the closing plate 28 is set to the rotational position of the body portion 24. Regardless, it can be constant so as to be downward.

  Furthermore, by making the end surface of the trunk portion 24 openable and closable by the lid portion 27, the inside of the sample chamber 21 can be greatly opened, and an advantage that even a large sample can be easily set is obtained. In particular, in combination with the configuration in which the sample stage 33 is not inclined, the sample only needs to be placed on the sample stage 33, and it is not necessary to fix the sample so as not to slide on the sample stage 33. An excellent advantage is obtained that the installation work can be extremely simplified.

In addition, in order to facilitate placement on the sample stage, it may be configured as a slide type in which the sample stage 33 is pulled out toward the front side with the lid part opened (see, for example, FIGS. 16A and 16B described later), This facilitates user access to the sample stage 33, but requires a pull-out structure, and also requires a space for sliding the lid on the front surface of the lid. The end face plate and the trunk portion 24 including the lid portion 27 are formed of members having sufficient resistance to maintain a high vacuum.
(Fixed part)

The body portion 24 is configured such that at least a part of the cylindrical side surface can be rotated by the rotation means 30. For this reason, the trunk | drum 24 and an end surface board are divided into the rotation part which rotates with the rotational motion of the trunk | drum 24, and the fixed part which does not rotate but remains stationary. In other words, the rotating means 30 separates the fixed portion and the rotating portion. For example, the horizontal movement mechanism 74 and the height adjustment mechanism 80, which are the sample stage drive means 34 for driving the sample stage 33, the lid part 27, the sample chamber observation means 13, the base part 22, the fixing plate 23, and the like are fixed parts. Become. On the other hand, each observation means 10 and the light source port 97 of the illumination unit accompanying or cooperating therewith are provided on the rotating portion side.
(Rotating means 30)

  Further, the body 24 includes a rotation unit 30 as a moving unit that can move each observation unit so that the direction of the optical axis of one observation unit substantially coincides with the direction of the optical axis of the other observation unit. The rotation means 30 rotates the side surface to which the observation means 10 is fixed along the circumference, with the central axis of the cylindrical body 24 as the rotation axis. Such a rotation means 30 is a system in which, for example, a bearing or a gear provided in the direction of the rotation axis of the body portion 24 is rotated by meshing with a base portion 22 which is a fixed side or a gear which is provided on the decompression unit 15 side. Available. In addition, the external force necessary for rotating the rotation means 30, that is, the resistance force of rotation, is set so that the user can manually rotate, while rotating the body 24 so that the observation means 10 is at a desired position. When the hand is released, it is preferable to provide a resistance that can maintain the posture. The amount of oil in the bearing, the weight of the gear, and the like are adjusted so that the rotational resistance force or friction force can be maintained. With this configuration, the plurality of observation means 10 can be easily switched to the same position, and the visual field is not changed. Further, since the observation means 10 can be tilted by rotation, there is an advantage that tilt observation at a high magnification can be easily performed with a multi-angle mechanism.

  Further, as described above, the rotation surface for rotating the electron beam imaging means 11 and the rotation surface for rotating the optical imaging means 12 are substantially matched. As a result, the optical axes of the respective imaging means intersect with each other. Therefore, by simply rotating one imaging means to the position of the other imaging means, an observation image with the same visual field can be acquired, and visual field alignment by position switching is performed. There is an advantage that the user's operation for switching to a different imaging means to perform imaging in the same field of view, such as adjustment of focus and focus, can be extremely easily performed.

  Further, the sample stage 33 is fixed to the fixed portion side in order to keep the sample in a fixed posture while rotating the observation unit 10 by the rotating unit 30. In the example of FIG. 4, the horizontal plane moving mechanism 74 and the height adjusting mechanism 80 which are the sample stage driving means 34 for driving the sample stage 33 are fixed through an end face plate on the back surface of the trunk portion 24.

  Conventionally, in order to switch the observation means for the same sample, a mechanism for translating the observation means 10X or the sample stage 33X as shown in FIGS. In order to perform tilt observation with this configuration, the sample stage 33X side is rotated or tilted. Therefore, when changing the viewpoint, it is not easy for the user to grasp the positional relationship between the observation means 10X and the sample SAx, and the moving direction. There were not a few cases that caused confusion. On the other hand, in this embodiment, since the observation method is a natural method in which the observation target is fixed and the viewpoint on the viewing side is changed, it is easy to grasp the positional relationship physically. There are advantages such that misunderstanding and confusion are less likely to occur in adjustment work when moving or changing, and that even beginners can easily understand.

  The optical imaging unit 12 and the electron beam imaging unit 11 as the observation unit 10 can be moved simultaneously by the rotation of the side surface of the body 24. By sharing the movement mechanism of the optical imaging unit 12 and the electron beam imaging unit 11 with the single rotation unit 30, an advantage that the mechanism for movement of the two observation units 10 can be simplified can be obtained. Further, each observation means 10 can be easily switched to the same position by rotation, and the visual field is not changed by stopping the sample at the position of the rotation axis. Further, as shown in the schematic front view showing the distance between each observation means 10 and the sample stage 33 in FIG. 13, each observation means 10 of the optical system imaging means 12 and the electron beam imaging means 11 is rotated about its rotational axis. Since the distance to the sample located at can be maintained almost constant, once the focal length is adjusted, the focus is always maintained even if the position is changed, so that only the rotation angle, that is, the viewpoint can be changed. An environment suitable for tilt observation in a focused state is realized.

Preferably, the lid portion 27 is fixed to the fixed portion side so as to be freely opened and closed. For example, as shown in the side view of FIG. 4, while attaching the closing plate 28 of the lid portion 27 to the open end of the body portion 24 detachably, the rotation axis of the closing plate 28 is supported by the lid opening / closing arm 29, The lower end of the lid opening / closing arm 29 is fixed to the tip of the base portion 22 so as to be bent. As a result, the direction of opening and closing the lid 27 can be maintained constant regardless of the rotational position of the body 24 as described above. In this case, the lid part 27 closes the front side of the end face of the body part 24, and the end face plate on the back surface is fixed integrally with the body part 24 and the sample stage drive for driving the sample stage 33 so as to penetrate a part thereof. The means 34 is fixed to the decompression unit 15 which is a fixed part. That is, in this example, the closing plate 28 of the lid portion 27 is integrated with the rotating portion when the body portion 24 is closed, and the lid opening / closing arm 29 is fixed to the fixed portion.
(Tension spring 135)

  In addition, a tension spring 135 is provided in the vicinity of the hinge portion 138 that is a bent portion between the lid opening / closing arm 29 and the base portion 22. The tension spring 135 biases the hinge portion 138 in a direction that facilitates bending. That is, the lid opening / closing arm 29 is easily set upright from the open horizontal position to the closed vertical position. Further, the tension spring 135 urges the lid opening / closing arm 29 toward the body portion 24 as a lock release mechanism that releases the locked state of the holding mechanism 140 described later even after the vertical posture.

  If the lid part 27 is fixed to the rotating part side, the opening / closing direction of the lid part 27 changes depending on the rotational position of the body part 24, and the user has to check the opening / closing direction each time. Further, when the lid 27 is made of a heavy metal having high rigidity, it may be difficult for the user to manually open and close depending on the direction of the lid 27, or the load on the hinge that supports the opening and closing may be increased. Therefore, in order to avoid such a change in the opening / closing posture, it is effective to set the fixing position of the lid portion 27 to the fixing portion side. In addition, by always setting the opening / closing direction of the lid portion 27 to be a constant direction, there is an advantage that the opening / closing structure of the lid portion 27 can be simplified.

  However, this embodiment does not limit the opening and closing direction of the lid, and the lid can be opened and closed laterally, or the lid can be opened and closed when sufficient strength is maintained. I do not disturb. Or it can also be set as the slide type which moves a cover part to the outward of an apparatus in the rotating shaft direction. In this case, the lid portion is pulled forward while maintaining a state parallel to the bottom surface of the trunk portion. Further, in this configuration, the sample stage can be pulled out simultaneously with the lid, and the advantage that the access to the sample stage can be easily obtained as described above. In addition, the sample stage may be independently pulled out of the sample chamber regardless of the lid opening / closing method. The configuration for pulling out the sample stage can be realized, for example, by allowing the sample stage and the arm of the sample stage driving means for driving the sample stage to protrude freely.

As will be described later, the sample stage can be moved and rotated in a plane while maintaining a horizontal posture so that it does not tilt or swing. “Fixed” is used in the sense that the sample stage is not rocked or inclined with respect to the body around the rotation axis. That is, sliding the sample stage in the axial direction of the rotating shaft is included in the concept of “fixed”.
(Modified example of rotating means)

  FIG. 14 is a schematic side view showing the configuration of FIG. 4 described above mainly by dividing the rotating portion and the fixed portion. In this configuration, the entire body portion 24 rotates with respect to one end face plate (the back side located on the right side in FIG. 14), and the body portion 24 is rotated between the end face plate and the body portion 24. Rotating means 30 is configured for this purpose. However, the configuration examples of the rotating portion and the fixed portion such as the lid portion and the trunk portion are not limited to such a configuration, and various forms can be used. FIGS. 15 to 16B show examples of rotating means according to the modification. In these drawings, FIG. 15 is a schematic side sectional view of a sample chamber 21B provided with a lid portion 27B at a fixed portion, and FIG. 16A is a diagram illustrating a case where the lid portion 27C is closed by a sample chamber 21C in which the lid portion 27C is integrated with the sample stage 33C. FIG. 16B shows a state where the lid 27C is opened. In these drawings, the illustration of the decompression unit and the like is omitted for the sake of explanation.

  In the example of FIG. 15, the front side (left side in the figure) of the body part 24 is closed with an end face plate, and an openable / closable lid part 27B is provided on the back side (right side in the figure). In this configuration, the lid portion 27 </ b> B is a fixed portion that does not rotate due to the rotation of the body portion 24. Further, in the example of FIGS. 16A and 16B, the sample stage 33C is integrally fixed to the lid portion 27C provided in the fixed portion. In this configuration, preferably, as shown in FIGS. 16A and 16B, the sample stage 33C is fixed to the lid portion 27C, and the lid portion 27C is pulled out from the back of the apparatus, thereby opening the lid portion 27C and the lid portion 27C. The sample stage 33C fixed to the sample chamber 21C is also pulled out of the sample chamber 21C. With this configuration, the sample table 33C can be easily accessed, and the sample can be placed, taken out, and replaced easily.

  Further, in the example of FIGS. 14 and 15, the entire body portion is rotated, but a structure in which only a part of the body portion is rotated may be employed. For example, as shown in the perspective view of FIG. 17, the body 24D is divided into two parts, and one side of the end plate (the back side on the right side in the figure) is a fixed part (shown by hatching in the figure), and the other (front side) side As a rotating part, a part of the cylindrical side surface (front side) is rotated. In the example of the perspective view of FIG. 18, the body 24E is divided into three parts, both end surfaces are fixed portions (indicated by hatching in the figure), and only a part of the side surface intermediate portion where the observation means 10 is fixed is slid. It is configured to move. Thereby, the end face plate and the lid portion 27E can be provided on the fixed portion side, and in particular, an advantage that the opening / closing structure of the lid portion 27E can be easily obtained.

  In such a configuration, when a fixed portion is provided on a part of the end face plate or the body portion 24, the sample table driving means 34 for driving the sample table 33 is supported by the fixed portion. Specifically, as shown in FIG. 4 and the like, an opening is provided in the end face plate, and a sample stage driving means 34 for driving the sample stage 33 on the fixed plate 23 inside the opening is provided. That is, the arm of the sample stage driving means 34 is inserted into the sample chamber 21 from the opening which is a fixed portion, and the sample stage 33 is supported at the tip of the arm so as to be driven in the X, Y, and Z directions. In the example of FIG. 18, the sample stage driving means 34 may be provided on an end plate on the front side that is another fixed portion. Alternatively, the body portion 24 and the both end face plates may be supported so as to be rotatable around the rotation axis on the base portion 22 that supports them. In this case, the sample stage 33 can be supported by only a part of the end face plate.

In any configuration, there is a demand for a structure that can be rotated while maintaining hermeticity so that the reduced pressure state in the sample chamber 21 can be maintained even when the rotating means rotates. In particular, the body portion 24 is provided with a plurality of observation means 10 and has a considerable weight and is rotated in a cantilever posture by the fixing plate 23, so that sufficient mechanical strength is also required. Therefore, in the example shown in FIG. 4, a cross roller bearing 31 having high rotational accuracy and excellent load load resistance is used as a bearing on the rotational surface between the fixed plate 23 and the body portion 24 constituting the end face plate. . Further, an O-ring 32 is interposed in order to maintain airtightness on the rotating surface. Thereby, a stable rotation mechanism can be realized while maintaining the airtightness of the sample chamber 21 inside the trunk portion 24.
(Airtight sealing mechanism of the rotating means)

  On the other hand, when the inside of the sample chamber 21 is depressurized by using the closing plate 28 as the closing position, the closing plate 28 is sucked and pulled toward the body due to the pressure difference between the inside and outside of the sample chamber 21 due to the reduced pressure. As a result, as shown in FIG. 19, the O-ring 32 disposed at the airtightly sealing interface of the rotating means is deformed by the tapered wall surface 137 of the insertion groove 136, and the airtightness of this portion is achieved, while the rotation is achieved. The frictional force of the rotating surface by the moving means can be suppressed.

  In the conventional structure, in order to arrange the O-ring, a concave insertion groove 136x having a wall surface perpendicular to the interface to be hermetically sealed is formed as shown in FIG. In this structure, the vacuum sealing O-ring 32x arranged in the insertion groove 136 is crushed by sandwiching it in the vertical direction, so that the contact area increases, and a corresponding frictional force is generated, which is caused by the rotating means. There was a problem that the resistance force of rotation became large.

Therefore, the O-ring is not physically held and deformed at the sealing interface in this way, but the O-ring is deformed by using suction by decompression to reduce the frictional resistance. Specifically, as shown in FIG. 19, the side surface of the insertion groove 136 is a tapered wall surface 137 that is inclined so as to follow the outer shape of the O-ring 32. Further, the mechanical holding of the O-ring 32 is not performed at the sealing interface, or it is stopped by a relatively weak force, and is elastically deformed so that the O-ring 32 is brought into close contact with the tapered wall surface 137 by a suction force generated at the time of decompression. To demonstrate airtightness. The sealing member can be replaced with another elastic member such as a lip packing instead of the O-ring.
(Rotating shaft support structure of the lid)

  Further, the closing plate 28 of the lid portion 27 is required to have a structure that rotates together with the body portion 24 while closing the sample chamber 21 in an airtight manner. That is, a mechanism for supporting the closing plate 28 during rotation of the trunk portion 24 is required, but it is not easy to make the rotation axis of the lid portion 27 coincide with the rotation axis of the trunk portion 24 at the same time. That is, in order for the closing plate 28 and the body portion 24 to rotate together, the rotation axis of the body portion 24 and the rotation axis of the closing plate 28 must coincide with each other. Need to be kept accurate. On the other hand, if the holding force is too strong, the rotation of the closing plate 28 of the lid portion is hindered. In particular, if the closing plate 28 cannot be synchronized so as to rotate in accordance with the rotation of the body portion 24, a tingling sensation will occur and the rotational movement will deteriorate. In other words, a contradictory characteristic is required in which the closing plate 28 is held at an accurate position, but rotation at that position is allowed.

  On the other hand, if the closing plate opening / closing mechanism is provided on the rotating portion side, such a problem does not occur, but the opening / closing direction of the lid 28x varies depending on the rotation position of the vacuum chamber 24x as shown in FIGS. 21A and 21B. There was a problem. If the lid 28x is always opened and closed in a certain direction with this configuration, it is necessary to open and close the lid 28x in a state where the vacuum chamber 24x is always returned to a predetermined rotational position, which deteriorates usability. In particular, in the conventional configuration in which the sample stage side is tilted and the tilt observation is performed, such a rotating operation of the body itself is not necessary. The impression of worsening becomes stronger. On the other hand, in the configuration in which the sample stage is maintained in a horizontal position without being inclined, the sample stage is always in a horizontal position regardless of the rotation position of the body part. The necessity to return to) is low. On the other hand, if the body is provided with an opening / closing mechanism for the closing plate, the weight of the closing plate becomes unstable when the closing plate is opened, and the body cannot be rotated carelessly. There is also a problem that it is difficult to adjust the placement position while confirming the visual field confirmation of the tilt observation with the display means.

  Furthermore, a configuration is also conceivable in which the closing plate is opened and closed in a pull-out manner. However, in this configuration, as shown in FIG. In this case, since the sample stage 33y is fixed to the back surface of the lid 28y, the sample stage 33y is also moved forward when the lid 28y is opened. As a result, the sample cannot be observed by the optical imaging means, There is a problem that the mounting position cannot be adjusted while confirming with the optical imaging means.

  Therefore, in order to maintain the opening / closing direction of the closing plate constantly regardless of the rotational position of the body without causing such disadvantages, the opening / closing mechanism of the closing plate is provided not on the rotating portion but on the fixed portion side. There is a need. However, when this structure is adopted, as described above, there is a problem that it is difficult to achieve both rotation alignment and ease of rotation at the support portion of the rotation shaft.

Therefore, in the present embodiment, by providing the holding mechanism 140 that holds and opens the lid rotation shaft 142 of the lid portion, the contradictory characteristics of such positioning and holding and reduction of the rotational resistance force are compatible. Hereinafter, details of the lid rotation shaft 142 and the holding mechanism 140 will be described with reference to FIGS. 23A and 23B. In these drawings, FIG. 23A shows the locked state of the lid rotating shaft 142 in the open position, and FIG. 23B shows the unlocked state of the lid rotating shaft 142 in the closed position.
(Cover rotation shaft 142)

The lid rotation shaft 142 is the center of rotation of the closing plate 28 in a state where the opening end of the body portion 24 is closed while the closing plate 28 is supported by the lid opening / closing means. That is, it is a member that is interposed between the lid opening / closing arm 29 that is a fixed portion and the closing plate 28 that is a rotating portion, and connects them.
(Holding mechanism 140)

  The holding mechanism 140 is a member that switches between the locked state and the released state of the lid rotating shaft 142 according to the position of the closing plate 28. That is, when the closing plate 28 is in the open position, a locked state is maintained in which the closing plate 28 is held in a predetermined posture. The predetermined posture is a posture in which the shaft is aligned or aligned so that the rotation axis thereof substantially coincides with the rotation axis of the body portion 24 when the closing plate 28 is set to the closing position. That is, the holding mechanism 140 holds the closing plate 28 in a state in which the rotation axis is aligned when the closing plate 28 is moved from the open position to the closed position. Further, when the closing plate 28 is switched from the open position to the closed position, the holding mechanism 140 releases this locked state. As a result, the closing plate 28 is rotated integrally with the body portion 24.

  In the example of FIGS. 23A and 23B showing specific examples of the lid rotation shaft 142 and the holding mechanism 140, the lid rotation shaft 142 is protruded from the tip of the lid opening / closing arm 29 toward the closing plate 28. Further, the closing plate 28 is formed with a bearing recess 143 for supporting it at a portion facing the lid rotating shaft 142. The bearing concave portion 143 is substantially concave, and the inner diameter of the opening is larger than that of the lid rotating shaft 142. In this way, by providing a gap between the lid rotation shaft 142 and the bearing recess 143 and using this as a play, the lid rotation shaft 142 does not hinder the rotation of the closing plate 28 after being fixed to the body portion 24, Smooth rotation can be realized.

  In addition, an inclined surface 144 is formed in the opening portion of the bearing recess 143 by narrowing the inner diameter on the opening end side and inclining toward the bottom side of the bearing recess 143. In the example of FIGS. 23A and 23B, a stopper 145 is fixed to the opening end portion of the bearing recess 143 so as to cover the opening end leaving the center. The stopper 145 has a flat surface facing the lid opening / closing arm 29 so that it can easily support a coil spring 146, which will be described later, and a back surface inside the bearing recess 143 is formed as an inclined surface 144 formed narrow toward the opening edge. Yes.

  On the other hand, at one end of the lid rotating shaft 142, the outer shape on the opening edge side is narrowed so as to be inclined along the inclined surface 144 in a state of being inserted into the bearing recessed portion 143, and the outer shape toward the bottom surface of the bearing recessed portion 143. A tapered surface 147 is formed with a larger diameter. The tapered surface 147 and the inclined surface 144 are designed so that the rotation axes of the closing plate 28 and the trunk portion 24 are aligned with each other in contact with each other. Preferably, the tapered surface 147 is formed so that the inclination of the tapered surface 147 is gentler than that of the inclined surface 144, so that a frictional force can be reliably generated on these contact surfaces to create a locked state.

  Furthermore, the holding mechanism 140 includes an elastic member that is biased so that the lid rotation shaft 142 and the closing plate 28 come into contact with each other. For example, a coil spring 146 can be used as the elastic member. The coil spring 146 functions as a first urging unit that urges the inclined surface 144 to contact the tapered surface 147 with the closing plate 28 in the open position. By placing the lid rotation shaft 142 through the coil spring 146 and pressing the surface of the stopper 145, the inclined surface 144 and the taper surface 147 of the lid rotation shaft 142 abut on the inner surface of the stopper 145. Let me. Thereby, the holding state of the lid rotating shaft 142 and the closing plate 28 can be created by the frictional force. That is, when the closing plate 28 is not in the closed state, the holding mechanism 140 urges the inclined surface 144 to contact the tapered surface 147 to create a holding state. In the holding state, as described above, the lid rotation shaft 142 and the closing plate 28 are aligned and maintained in a positioned state. For this reason, when the closing plate 28 is set to the closing position, the opening portion of the body portion 24 is accurately closed, both the rotation shafts are accurately positioned, and deterioration of the airtightness due to the position shift can be avoided. Further, when the inside of the sample chamber 21 is depressurized with the obstruction plate 28 as the obstruction position, the obstruction plate 28 is sucked toward the body portion 24 due to the pressure difference between the inside and outside of the sample chamber 21 due to the depressurization, and the O-ring 32 at the open end is crushed and brought into close contact. An airtight state is achieved.

  Furthermore, by setting the closed position, the tension spring 135 provided on the hinge portion 138 that is a bent portion of the lid opening / closing arm 29 and the base portion 22 pulls the lid opening / closing arm 29 toward the trunk portion 24 side. The tension spring 135 functions as a second urging unit that applies a stress opposite to the urging force of the first urging unit in a posture in which the closing plate 28 is in the closing position. The tension force by the tension spring 135 is selected to be stronger than the pushing force by the coil spring 146. As a result, the lid opening / closing arm 29 is pulled toward the trunk portion 24 against the repulsive force of the coil spring 146, and the lid rotating shaft 142 fixed to the lid opening / closing arm 29 is also pushed out to the trunk portion 24 side. As a result, as shown in FIG. 23B, the contact between the tapered surface 147 of the lid rotating shaft 142 and the inclined surface 144 of the closing plate 28 is released, a gap is formed at this interface, or friction at this interface is reduced, In any case, the holding state of the holding mechanism 140 is released. For this reason, the frictional force at the lid rotating shaft 142 can be reduced, and the closing plate 28 can be rotated even with a weak force.

  In this way, when the closing plate 28 is not in the closing position, the closing plate 28 is held and aligned by the holding mechanism 140 so that the rotation axis of the closing plate 28 substantially coincides with the rotation axis of the body portion 24, thereby closing the closing plate 28. The shaft alignment and the achievement of the airtight state when switching to the position are ensured. Further, once the closing plate 28 is closed, the holding state is released, so that the holding mechanism 140 does not hinder the smooth rotation of the body portion 24. Thus, it is possible to reduce the resistance to rotation and to obtain an excellent advantage that both reliability and operability can be achieved.

  In other words, the holding mechanism 140 holds the closing plate 28 in the aligned position when the sample chamber 21 is open, and is configured to deliver the closing plate 28 to the body portion 24 side in the reduced pressure state, so that the lid rotation shaft 142 is provided. The structure which can reduce the frictional resistance and can rotate the trunk | drum 24 smoothly is implement | achieved.

  Further, the holding mechanism is not limited to the above-described configuration, and a structure that can open the closing plate in the closed state and can hold the closing plate can be used as appropriate. For example, a structure in which a spherical member is provided in the hole and a catcher for capturing the spherical member on the lid opening / closing arm side can be used.

  As described above, the lid portion 27 is constituted by the disc-shaped closing plate 28 that is rotatable on the lid rotation shaft 142 at the tip of the lid opening / closing arm 29, and the lid opening / closing arm 29 is provided on the base portion 22 that is a fixed portion. Thus, the opening / closing direction of the closing plate 28 is always constant regardless of the rotational position of the body portion 24. In the example shown in FIG. 24, the pivot of the lid opening / closing arm 29 is located below the opening end, and the user can smoothly perform the opening / closing operation with the opening / closing direction of the closing plate 28 being constant.

Further, in this specification, the rotation or rotation does not necessarily need to be a complete circular motion, and includes an arcuate movement locus. For example, as shown in the schematic side sectional view of FIG. 25, the body 24F is formed in a semicircular shape, and the electron beam imaging means 11 and the optical imaging means 12 are moved along the curved side surface to move inside the sample chamber 21F. Examples that enable tilt observation are also included. Similarly, the cylindrical side surface of the body portion is used to include not only a complete cylinder but also a partial cylinder, for example, a section whose cross section is a semicircle or an arc.
(Handle 35)

The body portion 24 can also be provided with a handle 35 so as to be easily rotated manually. The handle 35 shown in FIG. 2A is a chamber tilt knob that is fixed in a posture protruding from the cylindrical side surface of the trunk portion 24, similar to the observation means 10. A grip portion is provided at the front end of the handle 35 so that the user can easily hold it by hand. The user can grip the grip portion of the handle 35 and rotate the body portion 24 in a desired direction. Two handles 35 are provided apart from each other so that they can be grasped with both hands. Preferably, two handles 35 are provided outside the position where the electron beam imaging means 11 and the optical system imaging means 12 which are two observation means protruding from the side surface of the body portion 24 are provided, from both sides of the two observation means. Arrange them so that they are pinched. In this way, by locating the two observation means between the handles 35, the end of the observation means protruding in the circumferential direction comes into contact with an external member at the time of rotation and is damaged. An effect of protection by the handle 35 arranged outside the observation means is also obtained. Further, by making the protruding length of the handle 35 longer than the electron beam imaging means 11 and the optical system imaging means 12, the protective effect of these observation means can be further enhanced. In addition, as in the modification shown in FIGS. 2B and 2C, the grip portion provided at the tip of the handle 35B is bent outward so that the user can easily grip the grip. Further, the shape of the handle 35 may be a rod shape, or may be formed in an L shape, a U shape, a semicircular shape, or the like. Alternatively, only one handle may be provided. Alternatively, when the observation means is fixed to the trunk with sufficient strength, the observation means can also be used as a handle.
(Display switching means 36)

  The magnifying observation apparatus further includes a display switching unit 36 that switches an imaging unit to be used. As an example of the display switching means 36, a hardware-type changeover switch can be used. In the example of FIG. 2A, push buttons are provided on the cylindrical side surface of the body 24 as the display switching unit 36 and before the electron beam imaging unit 11 and the optical system imaging unit 12. In addition, an indicator lamp 17 such as an LED lamp is provided in front of each button. When one of the push buttons is pressed, the display switching means 36 selects the observation means on the back of the push button, and the moving image display displayed in real time on the display means is automatically displayed on the image acquired by the observation means. At the same time, the corresponding indicator lamp 17 is turned on to indicate that the observation means is being selected. In this way, the mechanical switching operation of pressing the push button makes the user perceive the switching operation, and the current selection state is visually determined by pressing the push button and turning on / off the indicator lamp 17. Can be grasped. In the example of FIG. 2A, any one of the push buttons can be alternatively selected, and the non-selected push buttons are automatically switched off. In other words, one of the observation means is selected by the display switching means 36 and only the selected observation means is operated, and the two observation means cannot be used simultaneously. However, in addition to the configuration in which the observation means are alternately used as described above, the observation unit may be configured to be usable at the same time.

  In addition, the switching of the observation means by the display switching means 36 may employ software switching in addition to the hardware operation of operating the changeover switch provided in each observation means. For example, the selection state of the observation means may be automatically switched when a window displaying the observation of the observation means to be selected is selected and activated on the screen of the display means.

In addition to the hardware configuration, the display switching unit 36 may be configured to send a switching instruction electronically or in software such as operating an operation program of the magnification observation apparatus 100. Alternatively, a changeover switch by hardware and a changeover switch by software such as an operation program may be combined. For example, when the body 24 is rotated by the rotation unit 30, it is possible to prompt the user to automatically switch the observation unit 10. A changeover switch can also be provided on the handle 35 for the turning operation. In particular, since the switching operation of the observation unit 10 is often performed at a timing when the observation unit 10 is physically moved, that is, the rotation unit 30 is operated, the display of the observation unit 10 is displayed on the handle 35 held at the time of rotation. By providing the switching means 36, this switching operation can be executed almost simultaneously with the rotation operation, and the operability can be improved. For example, a push button switch is provided on the end face or side surface of the handle portion 35b of the handle 35 at a position where the user can easily press the handle portion 35b with the thumb or index finger while holding the handle portion 35b. The push button switch may be provided with a dedicated button for switching to each observation unit in addition to switching between the electron beam imaging unit and the optical system imaging unit in a toggle manner. For example, the right handle 35 is arranged on the right side of the observation means, for example, the optical image pickup means has a changeover switch to the optical image pickup means, and the left handle 35 is arranged on the left side, for example, The electron beam imaging means can be provided with a switch to the electron beam imaging means.
(Sample chamber 21)

The sample chamber 21 has a sealed structure that can maintain a reduced pressure state. A port for arranging or connecting various members is opened on the inner wall of the sample chamber 21. Each port is hermetically sealed so that the inside of the sample chamber 21 can be maintained in a reduced pressure state. In order to realize such hermetic sealing, a packing such as an O-ring is used at the joint location.
(First position 41 and second position 42)

  Among the observation means 10, the electron beam imaging means 11 constituting the first observation means is fixed at a first position 41 on the cylindrical side surface of the body 24, and an optical system constituting the second observation means. The imaging means 12 is also fixed to a second position 42 close to the first position 41 on the cylindrical side surface of the body 24. In the example of FIG. 3, the distance between the first position 41 where the electron beam imaging means 11 is fixed and the second position 42 where the optical system imaging means 12 is fixed is a fixed value. That is, when the cylindrical body 24 is rotated, the optical system imaging unit 12 and the electron beam imaging unit 11 are rotated together. Thereby, the moving mechanism of each observation means 10 can be made common and simplified.

  The second position 42 is a position where the tip of the optical imaging unit 12 does not interfere with the optical axis of the electron gun 47 of the electron beam imaging unit 11. Preferably, the position is set as close as possible while non-interfering. Thereby, as shown in FIG. 3, the optical system imaging unit 12 can be brought close to the electron beam imaging unit 11, and as a result, the amount of rotation for rotating to the position of both observation units 10 is minimized, The switching operation of the imaging position can be performed smoothly and quickly. Further, by bringing the position of the observation means 10 closer, as shown in FIGS. 26A to 26C, there is an advantage that the overlapping range (the overlapping rotation range to be described later) of the range in which both can be rotated can be increased. can get.

  For this reason, the smaller the offset angle formed by the first position 41 and the second position 42 with respect to the rotation center, the more preferable it is in the range of 30 ° to 50 °. In the example of FIG. 3, each is fixed to the body portion 24 so that the optical axis of the optical system imaging unit 12 and the optical axis of the electron beam imaging unit 11 have an angle difference of 40 °. Further, the rotating means 30 can be rotated within a range equal to or larger than the offset angle, whereby one observation means can be rotated to the position of the other observation means. The range that can be rotated by the rotation means 30 is the maximum rotation range that is restricted by the rotation restriction means. Further, by releasing the rotation restricting means, it is possible to rotate to a wider range of rotation range restriction values.

In this example, the electron beam imaging means 11 is fixed to the trunk portion 24 in a non-replaceable state, while the optical system imaging means 12 is fixed detachably. As a result, the optical imaging means 12 can be removed from the magnifying observation apparatus 100 as shown in FIG. 9 and replaced with the digital microscope stand ST. In order to realize this detachable structure, an optical imaging means mounting portion is provided at the second position 42.
(Optical imaging means mounting part)

  On the cylindrical side surface of the body portion 24, an optical system imaging means mounting portion for detachably mounting the optical system imaging means 12 at the second position 42 is provided. The optical image pickup means mounting portion has a port opened so that an optical lens barrel of the optical system image pickup means 12 can be inserted, and a mount 39 for mounting the optical system image pickup means 12 is provided in the port portion. It is done. As shown in FIG. 3, the mount 39 has a bottomed cylindrical shape, and the inner diameter thereof is designed to be slightly larger than the outer shape of the optical system imaging unit 12 so that the optical system imaging unit 12 can be mounted. Further, a structure for inserting and fixing the optical imaging means 12 such as a screw groove is provided on the cylindrical inner surface of the mount 39.

  Further, an opening window is provided on the bottom surface of the mount 39, and a translucent window is fitted so as not to obstruct the optical lens of the mounted optical system imaging means 12. Further, the mount 39 is sealed through an O-ring so that it can be mounted while maintaining the airtightness in the sample chamber 21. O-rings are provided on the joint surface between the mount 39 and the body portion 24 and the joint surface between the mount 39 and the translucent window, respectively. In the example of FIG. 3, the optical system imaging means mounting portion is vacuum-sealed with four parts, a first O-ring, a port, a second O-ring, and a translucent window.

  Thus, by making the optical system imaging means 12 freely mountable on the mount 39 that is airtightly provided on the cylindrical side surface of the body portion 24, optical observation can be performed while maintaining airtightness. Furthermore, since the optical imaging means 12 mounted on the mount 39 can be easily replaced, the degree of freedom of optical observation is dramatically increased. In particular, in conventional electron microscopes such as SEMs, there are those equipped with optical lenses that can be optically observed, but there are strong auxiliary meanings that are assumed to be used for searching the field of view of electron microscopes, etc. Those with optical lenses were rarely used. On the other hand, in the present embodiment, since the optical lens can be exchanged, there is an advantage that the options for the optical observation combined with the electron microscope can be expanded and the freedom of observation can be greatly expanded.

  That is, conventionally, the field of view search is performed by the optical system imaging unit 12 and the subsequent detailed observation is merely performed by the electron beam imaging unit 11. Also, if the optical image and the electron microscope image of the same field of view are displayed at the same magnification, and they are used together for comparison and switching, it is very troublesome to align the two so that they have the same field of view. there were. On the other hand, in the present embodiment, the optical image pickup means 12 and the magnification of the electron microscope are overlapped and moved in a rotating manner, and the sample is arranged on the rotation axis thereof, so that an optical image can be obtained in the same visual field range. And acquisition of electron microscope images has become much easier.

  As shown in FIG. 3, the first position 41 and the second position 42 are fixed so as to be close to each other so that the optical system imaging unit 12 and the electron beam imaging unit 11 do not interfere with each other. Specifically, the tip portion of the observation means 10 may physically interfere inside the sample chamber 21, and one optical axis may be blocked by the other lens barrel. In particular, as shown in FIG. 3, the electron beam imaging means 11 protrudes to the inside of the sample chamber 21, while the optical system imaging means 12 is relatively fixed to the mount 39 so that the amount of penetration into the sample chamber 21 is relatively large. The optical axis may be obstructed by the tip of the electron beam imaging means 11. For this reason, it is necessary to separate them so that such physical and optical interference does not occur.

  On the other hand, if they are separated too much, the moving distance when the body 24 is rotated and moved to each other becomes longer, and the trajectories overlap each other, that is, the observation means 10 can be located together. There is a disadvantage that the rotation range becomes narrow. Therefore, by arranging them as close as possible so that they do not interfere with each other, the amount of movement when moving the other observation means 10 to one observation position is minimized, eliminating unnecessary movement amounts and switching quickly. You can enjoy the benefits of

  The fixed positions of the optical imaging unit 12 and the electron beam imaging unit 11 are on substantially the same plane that is substantially orthogonal to the rotation axis of the cylindrical body 24. As a result, the rotated optical system imaging unit 12 and the electron beam imaging unit 11 always move on the same circumference, so that their trajectories coincide and it is possible to obtain an observation image of the same field of view. . In particular, since the rotation surface for rotating the electron beam imaging means 11 and the rotation surface for rotating the optical imaging means 12 are substantially matched, the movement ranges of the optical axes of the observation means 10 are matched. Only by rotating one observation means 10 to the position of the other observation means 10, an observation image of the same field of view can be acquired, and different in order to perform imaging in the same field of view, such as visual field alignment and focus adjustment by position switching. There is an advantage that the user's operation for switching to the observation means 10 can be very easily performed.

  Further, by fixing the optical system imaging unit 12 and the electron beam imaging unit 11 on the same plane, the length of the body portion 24 can be shortened, the apparatus can be made compact in the direction of the rotation axis, and the outer shape of the magnification observation apparatus The advantage that can be reduced in size is also obtained. With such a structure in which the sample stage 33 side is fixed and the observation means 10 side is tilted, tilt observation at different tilt angles (observation angles) can be easily performed, and multi-angle tilt observation with high magnification becomes possible.

  In addition, since the first position 41 for fixing the electron beam imaging means 11 and the second position 42 for fixing the optical system imaging means 12 are different positions, the inclination angle at which each observation means 10 images the sample is also different. The first position 41 and the second position 42 are different. As a result, the electron microscope image and the optical image that can be captured simultaneously are obtained at different inclination angles, but can be easily moved to each other position by rotating the body portion 24. That is, moving the electron beam imaging unit 11 to the position where the optical system imaging unit 12 is located, or conversely moving the optical system imaging unit 12 to the position of the electron beam imaging unit 11 rotates the body 24. This is a very simple operation that can be performed quickly and accurately. This is a great advantage compared to the conventional electron microscope.

  According to the present embodiment, if an observation image at the same inclination angle is to be obtained by the electron beam imaging unit 11 and the optical system imaging unit 12, one observation unit (for example, the optical system imaging unit 12) once. After imaging an observation image (for example, an optical image), the cylindrical body 24 is rotated, and the other observation unit (for example, the electron beam imaging unit 11) is rotated to the position imaged by the one observation unit. Since the rotation is a circular locus along the central axis of the rotational motion, that is, the rotational axis, the optical axis of the observation means is always maintained in a posture toward the rotational axis at any position. Therefore, once the focal length is adjusted, the focal length is essentially maintained even by the rotation, so that the operation for focusing is very easy.

  In other words, when an observation image is first picked up by one observation means, if the other observation means is adjusted to the in-focus position, the in-focus state is maintained before and after the rotation. Observation images can be acquired. As described above, according to the present embodiment, it is possible to obtain an extremely excellent feature that an observation image at the same position can be acquired quickly and easily using two different observation means 10.

  26 and 60, the body 24 is rotated in order to observe the same field of view from the same direction (inclination angle). In addition, as a means for recognizing that the other observation means is located at the position where one observation means was originally installed, a rotation position detection means such as a rotary encoder or an angle sensor is installed on the body, A method of electrically knowing the rotation angle, or a method of knowing the rotation angle visually by attaching a scale and a mark to the body and the fixed side, respectively, can be used.

  Note that the two observation means are fixed to the body portion 24 so as to have an optical axis passing through the rotation center of the rotation means 30 at any rotation position that can be provided by the rotation means 30. . Then, by using the rotating means 30, the position of one observation means (for example, the electron beam imaging means 11) is rotated and fixed to the position desired by the observer, so that it can be applied to the sample stage from a specific viewing direction. A magnified observation of a specific part of the placed sample is possible.

  Here, “substantially the same observation position” as used in the present embodiment refers to an image of a specific portion of the sample placed on the sample stage by one observation means positioned by the method described above. After the acquisition, the other observation means (for example, the optical system imaging means 12) is rotated and fixed to the rotation position where the one observation means was located, so that the sample stage can be viewed from substantially the same specific viewing direction. This means the position where one and the other observation means are positioned in the case of performing magnified observation of a specific part of the sample placed on the surface.

  In addition, in the case where the two observation units are provided with substantially the same observation position as described above and the two observation units acquire images at substantially the same magnification, the premise is that the position of the sample stage and the sample stage are assumed. Since the position of the sample placed on the sample stage is substantially the same, the magnification of the image acquired by each observation means and the image of a specific part of the sample can be obtained. Needless to say, comparative observation is better.

In other words, the observation field range of the sample when the sample is observed from one specific observation direction at a specific magnification, and the other observation means allows the sample to be observed from the same direction as the specific visual field direction. In addition, after the body 24 is rotated by the rotation means 30, the observation field range of the sample when the sample is observed from the same direction as the specific visual field direction at the specific magnification and the same magnification by the other observation means is substantially the same. Means the same. Needless to say, the substantially identical observation position mentioned here may not be completely the same observation position due to the mechanical error of the rotating means 30.
(Pivotable range)

The range in which the optical system imaging unit 12 and the electron beam imaging unit 11 can rotate is configured such that at least a part thereof overlaps, that is, the mutual observation units 10 can move to each other position. FIGS. 26A to 26C are schematic diagrams conceptually showing ranges in which the optical system imaging unit 12 and the electron beam imaging unit 11 can rotate, respectively. FIG. 26A is an electron beam imaging unit 11. 26 (b) shows the rotatable range of the electron beam imaging means 11, and FIG. 26 (c) shows the rotatable range of the optical system imaging means 12, respectively. Show. In each figure, the solid line indicates the rotatable range of the electron beam imaging means 11, and the broken line indicates the rotatable range of the optical imaging means 12. As described above, since the optical system imaging unit 12 and the electron beam imaging unit 11 are rotated together by the rotation of the body part 24, the rotatable range in which each observation unit 10 can be rotated is that of the body part 24. Depends on the rotatable range.
(Overlapping rotation range)

  More precisely, the angle obtained by subtracting the angle difference between the first position 41 and the second position 42, that is, the offset angle, from the rotatable range of the body 24 is the optical system imaging unit 12 and the electron beam imaging unit 11. Are overlapping rotation ranges. For example, when the rotatable range of the body portion 24 is 150 ° and the offset angle is 40 °, 150 ° −40 ° = 110 ° is the overlapping rotation range. A wider overlapping rotation range is preferable because both an electron microscope image and an optical image can be taken at various inclination angles. Ideally, the overlapping rotation range is set to 0 ° to 180 ° that can cover the entire upper surface of the sample stage 33. In this case, an electron microscope image and an optical image can be acquired at almost all inclination angles. However, since each observation means 10 protruding from the body portion 24 is prevented from rotating when it comes into contact with the mounting surface of the magnification observation device, the length of each observation means 10 protruding from the body portion 24 or the magnification observation device is set to the floor. Physical restrictions are imposed by the height of the leg portion 26 for mounting on the surface. For this reason, the overlapping rotation range is about 60 ° to 180 °. Preferably, the projection length of each observation means 10 and the length of the leg portion 26 are set so that an overlapping rotation range of 180 ° or close thereto can be realized. In the present specification, the tilt angle is calculated by assuming that the state in which the electron beam imaging means 11 is in a vertical posture is 0 °. For example, in the example of FIG. 26B, the rotatable range of the electron beam imaging means 11 is 90 ° to the left and 60 ° to the right from the vertical posture, and 150 ° in total. Further, since the rotatable range of the optical system imaging means 12 is fixed at an angle of 40 ° to the right from the electron beam imaging means 11, the rotatable range is vertical as shown in FIG. From the posture, it is 50 ° to the left, 100 ° to the right, and 150 ° in total.

As described above, each observation means 10 (optical system imaging means 12 and electron beam imaging means 11) can maintain a substantially constant distance to the sample located on the rotation axis by rotational movement (rotation). Once the focal length is adjusted, an excellent advantage is obtained that only the rotation angle, that is, the viewpoint can be changed in a state where the focus is always adjusted even if the position is changed.
(Outline of electron beam imaging means 11)

Next, an outline of the electron beam imaging means 11 will be described based on FIG. FIG. 27 is a block diagram showing a system configuration of the electron beam imaging means 11, and here, an SEM using an electrostatic type electrostatic lens is used. This SEM is generally an electron lens system for generating an electron beam of accelerated electrons to reach the sample SA, a sample chamber 21 (chamber) in which the sample SA is disposed, and an exhaust system for evacuating the sample chamber 21. And an operation system for image observation. Further, the electron beam imaging means 11 of FIG. 27 controls each member by the electron microscope control unit 40 in order to observe an electron microscope image that is an electron beam observation image by a charged particle beam. Further, the operation program for the electron microscope executed by the controller 1 in FIG. 27 sets the image observation conditions and various operations of the electron microscope, and displays them on the display means 2 for displaying the observation image.
(Electronic lens system)

The electron lens system includes an electron gun 47 that generates an electron beam EB of accelerated electrons, an electron lens system that narrows and narrows the bundle of accelerated electrons, and a detector that detects secondary electrons and reflected electrons generated from the sample SA. Prepare. The electron beam imaging means 11 shown in FIG. 27 corrects an electron gun 47 that irradiates an electron beam EB as an electron lens system and the electron beam EB irradiated from the electron gun 47 so as to pass through the center of the electron lens system. A gun aligner 49 as an axis adjuster, a condenser lens that is a focusing lens 52 that narrows the spot size of the electron beam EB, and an electron beam deflection scanning unit that scans the electron beam EB focused by the focusing lens 52 on the sample SA. 58, a secondary electron detector 61 that detects secondary electrons emitted from the sample SA in accordance with scanning, and a reflected electron detector 62 that detects reflected electrons.
(Exhaust system)

The sample chamber 21 is provided with a sample stage 33, a sample introduction device, a spectrometer for X-ray detection, and the like. The sample stage 33 (stage) is controlled by the sample stage control unit 34 and includes a function of moving and rotating (R axis) the sample stage 33 in the X, Y, and Z (height) directions. These four shafts can be electrically driven, and some or all of them can be driven manually. The exhaust system includes the above-described decompression unit 15.
(Operation system)

The operation system displays and observes secondary electron images, backscattered electron images, X-ray images, etc., and performs adjustment of irradiation current, focusing, and the like. If the output of the secondary electron image, etc., is an analog signal, film shooting with a photographic machine was common, but in recent years it has become possible to output an image converted into a digital signal, such as data storage, image processing, printing, etc. A wide variety of processes are possible. The SEM of FIG. 27 includes a display unit 2 that displays an observation image such as a secondary electron image and a reflected electron image, and a printer 69 for printing. The operation system also includes setting guidance means for guiding (guidance) a setting procedure for setting items necessary for setting at least an acceleration voltage or a spot size (diameter of incident electron beam bundle) as an image observation condition.
(Details of electron beam imaging means 11)

Next, details of the electron beam imaging means 11 will be described with reference to FIG. 27 is connected to the controller 1 and the display means, operates the electron beam imaging means 11 with the controller 1, displays the result on the display means, and stores image observation conditions and image data as necessary. Or perform image processing and calculations. A central processing unit 60 composed of a CPU, LSI, etc. shown in FIG. 27 controls each block constituting the electron beam imaging means 11. By controlling the electron gun high-voltage power supply 43, an electron beam EB is generated from an electron gun 47 comprising a filament 44, a Wehnelt 45, and an anode 46. The electron beam EB generated from the electron gun 47 does not necessarily pass through the center of the electron lens system, but is corrected to pass through the center of the electron lens system by controlling the gun aligner 49 with the optical axis adjuster 50. I do. Next, the electron beam EB is narrowed down by a condenser lens which is a focusing lens 52 controlled by the focusing lens control unit 51. The focused electron beam EB passes through an astigmatism corrector 57 that deflects the electron beam EB, an electron beam deflection scanning unit 58, an objective lens 59, and an objective aperture 53 that determines the beam opening angle of the electron beam EB, It reaches the sample SA. The astigmatism corrector 57 is controlled by the astigmatism corrector controller 54 and controls the scanning speed and the like. Similarly, the electron beam deflection scanning unit 58 is controlled by the electron beam deflection scanning unit control unit 55 and the objective lens 59 is controlled by the objective lens control unit 56, and the sample SA is scanned by these operations. By scanning the sample SA with the electron beam EB, information signals such as secondary electrons and reflected electrons are generated from the sample SA, and these information signals are detected by the secondary electron detector 61 and the reflected electron detector 62, respectively. The The detected secondary electron information signal passes through the secondary electron detection amplification unit 63, and the reflected electron information signal is detected by the reflected electron detector 62 and then through the reflected electron detection amplification unit 64, respectively, and A / D converted. A / D conversion is performed by the devices 65 and 66, sent to the image data generation unit 67, configured as image data, and held in the first storage unit 131. The image data held in the first storage unit 131 is sent to the controller 1, displayed on the display unit 2 such as a monitor connected to the controller 1, and printed by the printer 69 as necessary. The exhaust system pump 70 evacuates the sample chamber 21. An exhaust control unit 72 connected to the exhaust system pump 70 adjusts the degree of vacuum, and controls from high vacuum to low vacuum according to the sample SA and observation purpose.
(Electron gun 47)

The electron gun 47 is a source that generates accelerated electrons having a certain energy. In addition to a thermal electron gun that emits electrons by heating W (tungsten) filaments or LaB ₆ filaments, a W-shaped W is formed. There is a field emission electron gun that emits electrons by applying a strong electric field to the tip. On the other hand, the electron lens system is controlled by the electron microscope magnification adjusting means 68 to adjust the electron microscope magnification. In the electron lens system, a focusing lens 52, an objective lens 59, an objective aperture 53, an electron beam deflection scanning means 58, an astigmatism corrector 57, and the like are mounted. The focusing lens further converges and narrows the electron beam EB generated by the electron gun 47. The objective lens 59 is a lens for finally focusing the electron probe on the sample SA. The objective aperture 53 is used to reduce aberrations. The detector includes a secondary electron detector 61 that detects secondary electrons and a reflected electron detector 62 that detects reflected electrons. Since secondary electrons have low energy, they are captured by the collector, converted into photoelectrons by a scintillator, and signal amplified by a photomultiplier tube. On the other hand, a scintillator or a semiconductor type is used for detection of reflected electrons. Note that the present invention is not limited to signal detection of secondary electrons and reflected electrons, and signal detectors such as Auger electrons, transmitted electrons, internal electromotive force, cathode luminescence, X-rays, and absorbed electrons can also be applied. Alternatively, the backscattered electron detector may be omitted.
(Electronic lens system)
(Electrostatic lens)

The SEM that is the electron beam imaging means 11 employs an electrostatic lens that is an electrostatic electron lens as an electron lens. Since the electrostatic SEM is lightweight, it is suitable for the inclined structure as in this embodiment. An outline of the electrostatic lens is shown in the block diagram of FIG. As shown in this figure, the electrostatic lens has a structure in which each electronic lens in the electronic lens barrel is electrically controlled by the electrostatic lens control unit 40A. In the electron lens barrel, an electron gun 47A, a first condenser lens 52A, a second condenser lens 57A, a scanning electrode 58A for scanning the electron beam EB1 as the electron beam deflection scanning means 58, and an objective lens 59A. The electron gun 47A includes a filament 44A that is an electron beam source, a Wehnelt 45A that is a cylindrical electrode for focusing the electron beam, and an anode 46A. The electrostatic lens control unit 40A controls the filament 44A and the Wehnelt 45A to generate an electron beam EB1 from the electron gun 47A, and a first lens control unit 51A that controls the first condenser lens 52A. A second lens control unit 54A for controlling the second condenser lens 57A, a scan electrode control unit 55A for controlling the scan electrode 58A, and an objective lens control unit 56A for controlling the objective lens 59A. Thus, the electrostatic lens combines a plurality of electrodes, irradiates the electron beam EB1 toward the sample SA using the focusing action of the positive electric field on the electron beam EB1, and emits secondary electrons SE1 emitted from the sample SA. Is detected by the secondary electron detector 61A. Although the electrostatic lens having this structure has large aberrations, the structure can be simplified and the electron beam imaging means 11 can be reduced in weight, whereby the observation means 10 can be stably rotated and the reliability can be improved. Benefits are gained. In the example of FIG. 28, the electron beam deflection scanning unit 58 is configured by one stage of scanning electrodes 58A, but may be configured by a plurality of stages of electrodes.
(Electromagnetic lens)

  However, the present invention does not limit the electron beam imaging means 11 to an electrostatic lens, and other electronic lenses can be appropriately employed. For example, as long as sufficient mechanical strength can be maintained, an electromagnetic lens that is a magnetic type electron lens may be used as the electron lens. An electromagnetic lens is advantageous in that it is advantageous for high magnification. An outline of the electromagnetic lens is shown in FIG. The electromagnetic lens shown in this figure also has a structure in which each electronic lens in the electronic lens barrel is electrically controlled by the electromagnetic lens control unit 40B. In the electron lens barrel, an electron gun 47B, a first condenser lens 52B, a second condenser lens 57B, a scanning coil 58B for scanning the electron beam EB2, and an objective lens 59B are provided. The electron gun 47B includes a filament 44B that is an electron beam source, a Wehnelt 45B that is a cylindrical electrode for focusing the electron beam, and an anode 46B. The electromagnetic lens controller 40B controls the filament 44B and the Wehnelt 45B to generate an electron beam EB2 from the electron gun 47B, a first lens controller 51B that controls the first condenser lens 52B, A second lens control unit 54B that controls the second condenser lens 57B, a scanning coil control unit 55B that controls the scanning coil 58B, and an objective lens control unit 56B that controls the objective lens 59B are provided. Thus, the electromagnetic lens irradiates the sample SA2 with the electron beam EB2, and detects the secondary electrons SE2 emitted from the sample SA2 by the secondary electron detector 61B. The above-described electrostatic lens uses an electric field, whereas the electromagnetic lens irradiates the electron beam EB2 using a magnetic field generated by an electromagnet.

In general, an electromagnetic lens using an electromagnet is used as a magnetic field type electron lens. However, by using a permanent magnet instead of an electromagnet as a magnetic field generating means, the lens structure can be simplified, reduced in size, reduced in weight, and the like. it can. However, in this case, since the magnetic force cannot be adjusted unlike an electromagnet, the focal length becomes a fixed value. In this specification, for convenience, such a lens is also referred to as an electromagnetic lens.
(Detector)

In the example shown in FIG. 3, a secondary electron detector (SED) 61 is used as the detector. However, as described above, other detectors can be used instead of or in addition to this. In addition, the secondary electron detector 61 is provided in the fixed part in the example of FIG. Preferably, it is provided on the end face plate located on the back side. Thereby, since both the sample stage 33 and the secondary electron detector 61 are in the fixed portion, the positional relationship is unchanged, and stable secondary electrons can be detected. In particular, in tilt observation where the sample stage is tilted, there is an advantage that secondary electrons can be reliably captured without being shaded by the sample stage. That is, in the configuration in which the conventional sample stage side is inclined and the electron gun and the secondary electron detector are fixed, the sample surface may become a shadow of the sample stage when viewed from the secondary electron detector, As a result, there is a problem that the detection sensitivity of secondary electrons is lowered. On the other hand, in the configuration in which the sample stage side is fixed and the electron gun side is tilted as described above, since the sample stage does not tilt even in tilt observation, such a shadowing problem does not occur. The advantage that a stable observation result can be obtained is obtained. However, the present invention is not limited to this configuration, and the detector may be provided on the rotating portion side.
(Sample stage 33)

  Further, as shown in FIGS. 6 to 8, a sample stage 33 for placing a sample to be observed is placed in the sample chamber 21. The sample stage 33 has a flat circular table on the upper surface. In the examples of the partial cross-sectional perspective views of FIGS. 6 to 8, the sample stage 33 is notched in a semicircular shape for explanation. The sample stage 33 is disposed at a position that substantially coincides with the central axis of the cylindrical sample chamber 21. Strictly speaking, since the sample stage 33 can be moved up and down while maintaining the horizontal posture, the sample placement surface of the sample stage 33 can be made to coincide with the intersection of the optical axes of the two observation means 10. The moving mechanism is adjusted.

As a result, the sample is arranged at substantially the center of the rotation axis, and each observation means 10 is held in a posture toward the center axis to observe the sample. Therefore, even if each observation means 10 is rotated along the rotation axis, In addition, it is always easy to catch the sample in the field of view with the tip of the optical axis as the sample, and once the focal length (working distance: WD) is adjusted, a constant working distance is maintained even if the observation means 10 is rotated. Therefore, observation from different angles can be performed while maintaining the in-focus state substantially. That is, since the loss of the visual field due to the movement of the observation means 10 can be reduced, an excellent advantage that even a novice user who is not familiar with the operation can easily operate is obtained.
(Sample stage drive means 34)

The observation position is positioned by physically moving the sample stage 33 on which the sample SA is placed. The sample SA is moved by a horizontal plane moving mechanism 74 and a height adjusting mechanism 80 constituting the sample table driving means 34 for driving the sample table 33. These sample stage drive means 34 are controlled by the sample stage control unit 34. The sample stage 33 can be moved and adjusted in various directions so that the observation position of the sample SA can be adjusted. Specifically, a horizontal plane moving mechanism 74 for moving the sample stage 33 in the horizontal plane is provided. The horizontal plane moving mechanism 74 includes an XY moving mechanism 75 that performs movement and fine adjustment in the X-axis and Y-axis directions, which are the plane directions of the sample stage 33. Further, an R-axis rotation mechanism 76 that can rotate in the R-axis direction, that is, rotate around the Z-axis orthogonal to the XY plane can be added to the horizontal plane moving mechanism 74. The amount of rotation of the R-axis rotation mechanism 76 is adjusted by the rotation adjusting means. In order to distinguish from rotational movement in the R-axis direction, in this specification, movement in the XY direction is referred to as linear movement. The sample stage drive unit 34 functions as an observation positioning unit that positions the observation position with respect to the sample.
(Horizontal plane moving mechanism 74)

As shown in FIGS. 6 to 7, the XY movement mechanism 75 of the horizontal plane movement mechanism 74 is an X-axis operation knob 74X for manually adjusting the amount of movement for moving the sample stage 33 in the X-axis direction and the Y-axis direction. The Y-axis operation knob 74Y is provided on the right side of the body portion 24 so as to protrude to the near side. Further, the R-axis rotation mechanism 76 includes an R-axis operation knob 74R, which is a rotation adjusting means for manually adjusting the amount of movement for moving the sample stage 33 in the R-axis direction, an X-axis operation knob 74X, and a Y-axis operation knob 74Y. Are arranged so as to protrude to the front side on the right side of the body portion 24. As shown in these figures, the movement of the sample stage 33 in the X-axis direction, the Y-axis direction, and the R-axis direction is performed by a belt drive and a gear drive of an endless track stretched at the rear end of the operation knob. A rotational force is transmitted according to the rotation amount of the operation knob, and the sample stage 33 moves by a predetermined amount.
(Operation knob)

Further, the height adjusting mechanism 80 is provided with a Z-axis operation knob 80Z for adjusting the amount of movement for moving the sample stage 33 in the Z-axis direction so as to protrude upward from the back surface of the fixed plate 23. Thus, by unifying the operation knobs in a rotary manner, the user can adjust the movement of the sample stage 33 with a unified operation feeling. 6 to 7 and the like, the X-axis operation knob 74X, the Y-axis operation knob 74Y, and the R-axis operation knob 74R are all provided in a posture protruding from the vertical surface on the right side of the trunk portion 24. . However, it is needless to say that the present invention is not limited to such an arrangement and position, and can be provided in an arbitrary arrangement at an arbitrary position of the magnification observation apparatus. For example, in the magnification observation apparatus according to the modification shown in FIGS. 2B and 2C, the X-axis operation knob 74X, the Y-axis operation knob 74Y, and the R-axis operation knob 74R are arranged in a horizontal plane. In addition, each knob may be provided with a protrusion that is easily picked up with a finger during rotation to facilitate continuous rotation. Further, the Z-axis operation knob 80Z is fixed in such a way that the rotation axis protrudes from the side surface so that the knob part is in the vertical attitude, so that the user can sensuously adjust the height direction. And can be easily distinguished from other knobs.
(Non-tilting)

  The sample stage 33 can only move within a horizontal plane, and eliminates the adjustment of the tilt angle (T-axis direction) that was possible with the conventional sample stage. In other words, the sample stage drive means 34 does not have a tilting means for tilting the sample stage 33. In this way, by fixing the sample stage 33 in a horizontal posture in a non-tilt state where the tilting operation of the sample stage 33 is prohibited, it is possible to avoid a situation in which the sample placed on the upper surface of the sample stage 33 moves or slides down due to the tilt. . In addition, it is possible to obtain an excellent advantage that the work of fixing the sample to the sample stage with a double-sided tape or the like, which has been necessary in the past, can be avoided, and the situation where the sample is damaged due to the sticking and peeling of the adhesive material can be avoided.

Further, instead of tilting the sample stage 33, the observation means side is tilted, that is, rotated, so that an advantage that the user can easily grasp the change in the visual field in tilted observation can be obtained. In other words, since the observation means side such as an electron gun was fixed and the sample side was tilted in the past, changes in the field of view appeared as changes in the observation object, and what kind of posture the sample was in and what direction it was viewed from It is not easy to know which axis should be adjusted in which direction in order to obtain a desired visual field, and fine adjustment operation requires skill. On the other hand, in the configuration in which the sample is fixed and the observation means side is moved (rotated), the observation means is physically tilted by the user's own hand, and the position of the sample is fixed. The relationship can be easily grasped. In other words, similar to general observation, the configuration is similar to the operation of moving the user's own viewpoint with respect to a fixed sample, and therefore, the user himself / herself manually adjusts the observation means, and thus the relative The positional relationship becomes very clear. In addition, since the relative position of the sample and the observation means can be grasped when changing the field of view, it is easy to understand which axis can be adjusted to the desired field of view, and users who are not skilled in operation However, there is a merit that can be grasped intuitively.
(Rotation movement)

  Further, the R-axis rotating mechanism 76 that rotates and moves the sample stage 33 in the R-axis direction includes an E-centric R-axis maintaining mechanism 77 that rotates around the point of interest. In general, in an electron microscope, particularly an SEM that hermetically closes a decompression chamber, there are the following problems with respect to the rotation axis in the horizontal plane, that is, the rotation transmission axis, of the moving direction of the sample stage 33. First, since the rotation transmission shaft of the conventional rotation mechanism is fixed with respect to the XY direction of the sample stage, it does not become a eucentric, that is, a movement method centered on the point of interest. For this reason, when the sample stage is rotated, the amount of movement varies greatly depending on the position of the sample stage in the XY direction. Specifically, as the distance from the rotation transmission shaft increases, the amount of movement increases, and a situation occurs in which an object to be viewed moves away from the screen. For this reason, the center of the point of observation that rotates with the center in the observation field as the rotation transmission axis, so-called eucentric rotational movement, is required. is there. However, if a configuration using a normal mechanical mechanism is used to achieve both linear movement and eucentric rotational movement, the drive transmission mechanism for linear movement of the XY stage and the drive transmission mechanism for rotational movement can be compatible. In some cases, the drive shaft is not fixed, and as a result of random movement, there is a problem that appropriate drive transmission cannot be performed.

  On the other hand, it is conceivable to construct a eucentric rotation mechanism with a universal joint. FIG. 30A and FIG. 30B show an example in which a eucentric rotation mechanism is realized by such a universal joint and worm system mechanism. FIG. 30B shows a state in which the sample stage is moved by a predetermined amount in the XY direction from the position of FIG. In these figures, the sample stage is not shown to show the rotation mechanism. In this sample stage, the worm gear is driven by an expansion / contraction (spline) type universal joint UJ as shown in FIG. 31 so that the sample stage can be rotated and moved in any position of FIGS. 30A and 30B. Let However, in this configuration, as shown in FIGS. 30A to 30B, the universal joint UJ needs to be configured to rotate even if it bends. However, the universal joint UJ as shown in FIG. Considering the limit of the degree of bending of the function that rotates even if it bends, there is a problem that it is necessary to lengthen the overall length to some extent and the mechanism becomes large. Further, such a telescopic universal joint / worm system mechanical component has a problem of high cost.

  Therefore, in order to solve such a problem, the horizontal plane moving mechanism 74 shown in FIGS. 32 and 33 does not move as the rotation transmission shaft of the sample stage 33 moves in the XY direction by the XY moving mechanism 75. Although the sample stage 33 that rotates at the same time moves in synchronism with an XY substage 78 to be described later, it includes an R-axis maintaining mechanism 77 that contacts the rotary stage on the XY substage 78 only when it is desired to rotate. Yes. This realizes the center of interest rotation in which the visual field does not move greatly when the sample stage 33 is rotated. That is, since the rotating sample stage 33 always rotates around the viewpoint, the behavior that the field of view is largely lost by the rotation of the point to be viewed does not occur. In addition, the universal joint and the spline mechanism can be eliminated to reduce the cost and downsize the entire apparatus.

  Here, it is conceivable that the R-axis maintaining mechanism is a merry-go-round operation that simultaneously performs vertical movement and rotation when the user rotates the rotation adjusting means. This configuration has an advantage that the operation of the rotation adjusting means by the user can be integrated into one operation and simplified because there is no need to separately operate the vertical movement and rotation. On the other hand, if the driven member is lifted and moved while rotating, a part of the parts will come into contact microscopically quickly, resulting in a rotational force being applied before the sample table is lifted reliably, causing it to slide sideways. Behaves in an unfavorable manner and may hinder accurate movement.

  On the other hand, an operation method divided into two operations in which the sample stage is once completely lifted and then rotated is also conceivable. However, in this configuration, when the user performs an operation, it is necessary to turn another knob for rotation while pressing the operation button for lifting the sample stage, and there is a problem that the operation becomes troublesome or difficult.

  In view of this, the R-axis maintaining mechanism 77 is provided with a distribution mechanism 79, which splits the original drive of the rotation adjusting means operated by the user into two to convert the rotation movement of the prime mover into “vertical movement” and “rotational movement”, respectively. These are driven synchronously. Further, one of the branched drives is an intermittent operation, and the rotation is transmitted only at the timing when the other is raised. That is, the rotation transmission shaft is not brought into contact with the sample stage 33 during linear movement in the XY direction. As a result, accurate movement in the XY direction is possible without hindering movement in the XY direction by the rotation drive member. On the other hand, when rotating, the sample stage 33 is brought into contact with the sample table 33 and rotated.

  Hereinafter, a specific structure of the R-axis rotating mechanism 76 including the R-axis maintaining mechanism 77 will be described with reference to FIGS. 34, FIG. 35 and FIG. 36 are partially sectional perspective views showing a configuration example of the horizontal plane moving mechanism 74. FIG. 34 shows the horizontal plane moving mechanism 74 obliquely from above, FIG. It is a partial cross section perspective view which shows the state seen from diagonally downward. The horizontal plane moving mechanism 74 includes an XY moving mechanism 75 and an R-axis rotating mechanism 76. The R-axis rotation mechanism 76 includes a vertical movement mechanism for moving the sample stage 33 up and down, and a rotation movement mechanism for rotating in the R-axis direction. Further, the R-axis rotation mechanism 76 converts the transmission force by the rotation adjusting means into the vertical movement transmission force converted into the vertical movement of the sample table 33 by the vertical movement mechanism and the rotation transmission force converted into the rotation in the R-axis direction by the rotation mechanism. And a distribution mechanism 79 for distributing to each other. The distribution mechanism 79 is realized by the first idle gear 154 in the examples of FIGS.

  The horizontal plane moving mechanism 74 includes an R-axis operation knob 74R as a rotation adjusting means for adjusting the rotation amount of the R-axis rotating mechanism 76, a horizontal bevel gear 151 fixed coaxially with the rotation adjusting means, A vertical bevel gear 152, a first gear 153 extending downward from the vertical bevel gear 152 and rotating coaxially, a first idle gear 154 adjacent to mesh with the first gear 153, and a first idle gear 154 A second idle gear 155 that is adjacent to mesh with the second idle gear 155, a lift plate 156 that is coaxially fixed to the second idle gear 155, and a lift that is supported on the upper surface of the lift plate 156 so as to be vertically movable while maintaining a vertical posture. A shaft 157, a lifting cylinder 158 into which the lifting shaft 157 is inserted, a sphere 159 rotatably attached to the lower end of the lifting shaft 157, and an upper end of the lifting shaft 157 are fixed. A lifting plate 160 which is provided with a sample stage 33.

  In the example of FIG. 32, the XY moving mechanism 75 has an XY substage 78 fixed on the upper surface thereof, and as shown in FIGS. 33 and 34, the XY substage 78 is moved to an X axis operation knob 74X and a Y axis operation knob 74Y. Is moved linearly in the XY direction. By placing the sample stage 33 on the upper surface of the XY substage 78, the sample stage 33 is linearly moved by the XY moving mechanism 75 via the XY substage 78. Further, when rotating, the sample stage 33 is rotated after being separated from the XY substage 78. As a result, eucentric rotation of the sample stage 33 is realized while achieving both movement in the XY direction and rotation around the R axis. In order to separate the sample stage 33 from the XY sub-stage 78, the R-axis maintaining mechanism 77 has a lifting shaft 157 projecting freely on the back side of the sample stage 33 as shown in FIG.

Further, on the back side of the sample stage 33, an elevating hole 161 for inserting the upper end of the elevating shaft 157 is opened substantially at the center, and the sample stage 33 is placed on the upper surface of the XY substage 78 in the periphery thereof. For this purpose, an XY placement surface 162 is formed. In the example of FIG. 32, the internal space 163 is formed from the lifting hole 161 to the inside of the XY placement surface 162 so that the cross section of the sample stage 33 is folded back from both sides. Here, another member is fixed to the lower surface of the sample stage 33 in order to form the elevating hole 161. Further, the lifting plate 160 fixed to the upper end of the lifting shaft 157 is formed in a dish shape larger than the lifting hole 161. For this reason, the elevating plate 160 is inserted into the internal space 163 of the sample stage 33 through the elevating hole 161 and connected so as not to come off. At this time, the vertical movement distance of the lift shaft 157 and the sample stage are set so that the lift plate 160 does not come into contact with the XY placement surface 162 at the lowered position of the lift shaft 157 so that the linear movement by the XY movement mechanism 75 is not hindered. The thickness of the internal space 163 of 33, the upper surface height of the XY substage 78, or the like is set. Thus, the lifting shaft 157 that transmits the rotational motion is moved up and down so as not to contact the sample stage 33 during linear movement but to contact during the rotational movement.
(Vertical movement mechanism)

  Hereinafter, details of the vertical movement mechanism will be described with reference to FIGS. 38 and 39. FIG. 38 is a bottom view of the vertical movement mechanism, and FIG. 39 is a partial cross-sectional perspective view as seen from the diagonally upper left side of the front side. In these drawings, for the sake of explanation, illustration of members relating to the rotary mechanism is omitted, and only members relating to the vertical mechanism are shown. The vertical movement mechanism shown in these drawings includes a first gear 153, a first idle gear 154, a second idle gear 155, a lift plate 156, a sphere 159, a lifting cylinder 158, a lifting shaft 157, a lifting and lowering mechanism. The plate 160 and the sample stage 33 are included.

  As shown in FIG. 38, the first gear 153 is rotatable about a central first gear shaft 153A as a rotation axis. The first gear shaft 153A extends the rotating shaft in the vertical direction and fixes the horizontal bevel gear 151. As described above, the first gear 153 lowers the rotation of the R-axis operation knob 74R protruding from the side surface in the vertical direction through the engagement between the horizontal bevel gear 151 and the vertical bevel gear 152, and below the sample stage 33. The rotation motion is on a horizontal plane and transmitted to the adjacent first idle gear 154.

  The first idle gear 154 is rotatable about the first idle gear shaft 154A as a rotation axis. The first idle gear 154 transmits rotational force to the adjacent second idle gear 155. Further, as shown in FIG. 41 described later, the first idle gear 154 press-fits the geneva pin 154B at a symmetrical position with respect to the first idle gear shaft 154A, and the first idle gear shaft 154A is coaxial with the first idle gear 154 and the rotation shaft The inner ring plate 164 that rotates integrally is fixed. These geneva pins 154B and the inner ring plate 164 constitute a geneva mechanism with a geneva gear 165 described later.

  The second idle gear 155 is rotatable about the second idle gear shaft 155A as a rotation axis. A lift plate 156 is fixed on the upper surface, and the lift plate 156 rotates with the second idle gear 155 about the second idle gear shaft 155A as a rotation axis. With this configuration, the rotation of the first gear 153 is transmitted to the lift plate 156 via the first idle gear 154. In the example of FIG. 38, the first gear 153, the first idle gear 154, and the second idle gear 155 are preferably the same type of gear, so that the cost can be reduced.

  As shown in FIG. 39, the lift plate 156 has a flat bottom surface, left and right belt-like regions sandwiching the second idle gear shaft 155A on the top surface being a flat surface 156A, and the left and right regions are continuous from the flat surface 156A. The slope step-like inclined surface 156B is inclined as described above. In the example of FIG. 39, each inclined surface 156B is also formed in a band shape, and a second flat surface 156C is provided at the circumferential edge. The lift plate 156 is formed in a corrugated plate shape so that the thickness, that is, the height of the inclined surface 156B is partially changed along the circumferential direction. Here, the thickness change is axisymmetric with respect to the radius so that when the lift plate 156 is rotated 1/2 turn, the lifting shaft 157 placed on the upper surface thereof is moved up and down by one cycle.

  On the upper surface of the lift plate 156, an elevating shaft 157 is arranged to be movable up and down. The lifting shaft 157 is formed in a rod shape and is inserted into a cylindrical lifting cylinder 158. The lifting cylinder 158 is fixed to the center of a stage rotation gear 170 (FIGS. 34 to 36), which will be described later, and the lifting shaft 157 moves up and down within the fixed lifting cylinder 158 (in the example of FIG. 39). The stage rotation gear 170 is not shown for illustration). A bearing 166 is provided so that the lifting shaft 157 can be smoothly moved up and down and rotated on the inner surface of the lifting cylinder 158. The elevating shaft 157 reciprocates between the most elevated position and the most lowered position. The elevating cylinder 158 is held in a vertical posture with respect to the lift plate 156, and the lower end of the elevating shaft 157 is pushed up by the upper surface of the lift plate 156 to rise. A sphere 159 is attached to the lower end of the elevating shaft 157 via a presser wheel 167. The presser wheel 167 supports the sphere 159 rotatably at the tip of the lifting shaft 157. The spherical body 159 is formed in a perfect spherical shape so that it can smoothly rotate on the lift plate 156 when the elevating shaft 157 is in the raised position. Thereby, the elevating shaft 157 can be moved up and down along the inclined surface while reducing the frictional resistance with the upper surface of the lift plate 156 that is the rotating surface. Further, the lifting shaft 157 also serves as a rotation transmission shaft for rotating the sample stage 33 by a rotation mechanism as will be described later.

  Further, a lifting plate 160 is fixed to the upper end of the lifting shaft 157. The elevating plate 160 is inserted into an elevating hole 161 opened on the back surface of the sample stage 33 to lift the sample stage 33 from the lower surface. Further, it is preferable that the contact surface between the lift plate 160 and the lift hole 161 is processed so as to increase the frictional resistance so that the lift plate 160 and the lift hole 161 can be rotated in a lifted state. For example, in the example of FIG. 32, an elastic sheet such as rubber is pasted around the upper surface of the lifting plate 160.

This vertical movement mechanism moves the sample stage 33 up and down as follows. First, when the user rotates the R-axis operation knob 74R as the rotation adjusting means, the horizontal gear 151 and the vertical bevel gear 152 are used to convert the horizontal shaft to the vertical shaft, and the first gear 153 is rotated. . The rotation of the first gear 153 is transmitted to the adjacent first idle gear 154 as shown in FIG. The rotation of the first idle gear 154 is further transmitted to the adjacent second idle gear 155. As shown in FIG. 39, the rotation of the second idle gear 155 is the rotation of the lift plate 156 that is coaxially fixed to the upper surface of the second idle gear 155, and is fixed to the lower end of the elevating shaft 157 placed on the upper surface. Push the sphere 159 upward. As a result, the elevating shaft 157 is raised and lowered along the inclined surface 156B, and the sample stage 33 is periodically moved up and down via the elevating plate 160 fixed to the upper surface of the elevating shaft 157. Further, the rotary driving force is transmitted only while the rotating sample stage 33 is reliably supported and lifted by the vertical movement of the lifting shaft 157 by the lift plate 156.
(Rotation mechanism)

  Next, details of the rotation mechanism will be described with reference to FIGS. 40 and 41. FIG. 40 is a bottom view of the rotation mechanism, and FIG. 41 is a partial cross-sectional perspective view seen from the upper right side. For this reason, in FIG. 40 and FIG. 41, the arrangement of each gear is displayed upside down. In these drawings, for the sake of explanation, illustration of members related to the vertical movement mechanism is omitted, and only members related to the rotational movement mechanism are shown. The rotation mechanism shown in these drawings includes a first gear 153, a first idle gear 154, a geneva gear 165, a third idle gear 168, a fourth idle gear 169, and a stage rotation gear 170. Here, the third idle gear 168 and the stage rotation gear 170 can also be manufactured at a reduced cost if the same gears of the first gear 153 and the second idle gear 155 are used.

  The first gear 153 and the first idle gear 154 are common to the above-described vertical movement mechanism. The first idle gear 154 constitutes a geneva mechanism with the geneva gear 165. The Geneva mechanism is a mechanism that converts continuous rotational motion into intermittent rotation, and here, the continuous rotational motion of the first idle gear 154 that is the driving vehicle is converted into intermittent rotational motion of the Geneva gear 165 that is the driven vehicle. Therefore, two Geneva pins 154B are fixed on the upper surface of the first idle gear 154 so as to protrude at positions symmetrical to the first idle gear shaft 154A as shown in FIG. Further, an inner ring plate 164 is fixed coaxially with the first idle gear shaft 154A. Thus, the first idle gear 154 realizes the distribution mechanism 79 that distributes the transmission force by the rotation adjusting means to the vertical movement transmission force and the rotation transmission force for rotation in the R-axis direction.

  The Geneva gear 165 is rotatable about a Geneva gear shaft 165A, and has eight slots 165B for receiving Geneva pins 154B of the first idle gear 154 on the side surface. Further, the side surface of the geneva gear 165 forms a contact surface 165C that contacts the inner ring plate 164 between the slots 165B. Further, a small-diameter first reduction gear 171 fixed coaxially by a geneva gear shaft 165A is provided on the upper surface of the geneva gear 165. In this manner, the Geneva gear 165 is a multi-stage gear, and the rotation of the first idle gear 154 is intermittently transmitted by the Geneva mechanism and transmitted to the third idle gear 168 via the first reduction gear 171 at a reduced rotational speed.

  The inner ring plate 164 has a rectangular shape in which a portion that contacts the contact surface 165C is an arcuate surface 164B along the curved surface of the contact surface 165C, and other portions are cut out. This geneva mechanism is intermittent by rotating the geneva gear 165 by 45 ° when the geneva pin 154B is guided to the slot 165B and stopping the rotation while the next geneva pin 154B is guided from the slot 165B. Rotation is realized. Further, while the geneva gear 165 stops rotating, the arcuate surface 164B of the inner ring plate 164 abuts against the abutment surface 165C, and the rotation of the geneva gear 165 is stopped until the next geneva pin 154B is guided. It is stabilized. For this reason, the inner ring plate 164 slides the arcuate surface 164B along the contact surface 165C during the stop period of the geneva gear 165, and the notch portion faces the geneva gear 165 during the rotation period of the geneva gear 165. The notch portion of the plate 164 and the slot 165B of the geneva gear 165 are aligned to set the rotational position. In the example of FIG. 41, the notch portion of the inner ring plate 164 is on the side facing the position where the geneva pin 154B is provided on the first idle gear 154. The first idle gear 154 and the inner ring plate 164 are line symmetric in the diametrical direction. Further, the geneva gear 165 also has the slots 165B and the contact surface 165C formed symmetrically. Thereby, intermittent rotation is continued irrespective of the rotation direction.

  The third idle gear 168 is rotatable around the third idle gear shaft 168A. The third idle gear 168 is also a multistage gear, and a small-diameter second reduction gear 172 is integrally provided on the upper surface thereof coaxially with the third idle gear shaft 168A.

  Further, the second reduction gear 172 is meshed with the adjacent fourth idle gear 169. The fourth idle gear 169 also meshes with the adjacent stage rotation gear 170. As shown in FIGS. 34 and 36, the stage rotation gear 170 has a lifting cylinder 158 fixed at its center. A lifting shaft 157 is slidably inserted inside the lifting shaft 157, and the lifting shaft 157 moves up and down via the lifting cylinder 158. That is, the stage rotation gear 170 and the lifting cylinder 158 fixed thereto do not move up and down, and only the lifting shaft 157 inserted through the inside moves up and down. Further, the lifting shaft 157 is configured to rotate as the lifting cylinder 158 rotates. The lifting shaft 157 is urged downward by the spring 173, that is, toward the lift plate 156. Since the elevating shaft 157 descends due to gravity, the elevating shaft 157 functions even without a spring. In order to avoid a situation where the elevating shaft does not descend due to catching or the like, the elevating shaft 157 is biased downward by the spring 173.

  When the R-axis operation knob 74R, which is a rotation adjusting means, is rotated, this rotational movement mechanism has a rotational transmission force of a horizontal bevel gear 151, a vertical bevel gear 152, a first gear 153, as shown in FIGS. The first idle gear 154, the geneva gear 165, the first reduction gear 171, the third idle gear 168, the second reduction gear 172, and the fourth idle gear 169 are transmitted to the stage rotation gear 170. When the stage rotation gear 170 is rotated about the lifting cylinder 158 as the rotation axis, the lifting shaft 157 is rotated accordingly, and the sample stage 33 is rotated via the lifting plate 160 fixed to the upper end of the lifting shaft 157. When the lifting plate 160 rotates, the lifting shaft 157 is lifted to the raised position by the lift plate 156. Thereafter, when the lift plate 156 is lowered, the XY placement surface 162 of the sample stage 33 is placed on the XY substage 78 to separate the rotation mechanism, and the rotation of the geneva gear 165 is stopped by the geneva mechanism. The rotation of the sample stage 33 is stopped. If the rotation adjusting means is continuously rotated in this state, the elevating shaft 157 is raised again, the connection with the sample stage 33 is recovered, and the rotation of the sample stage 33 is resumed. As described above, when the rotation adjusting means is continuously rotated, the sample stage 33 is not continuously rotated but is rotated intermittently.

  Further, when the sample stage 33 is rotated, since the sample stage 33 is slightly lifted, the working distance between the sample and the observation means is changed, and the focus of the observation image is reduced, but the visual field is rotated. If you update the video with, there will be blurring and afterimages. When the sample stage 33 is stationary, the sample stage 33 is placed on the XY substage 78 and returned to the original working distance. For this reason, when rotating the rotation adjusting means, the user manually adjusts the rotational position of the R-axis operation knob 74R so that the lifting shaft 157 is in the lowered position when the adjustment is completed. In order to automate this work, it is also preferable to provide a mechanism that does not stop the R-axis operation knob 74R when the elevating shaft 157 is in the raised position. For example, the R-axis operation knob is stopped only at a predetermined rotation position by a repulsive force by a permanent magnet, and the R-axis operation knob cannot be stopped at a rotation angle corresponding to the lift position of the lifting shaft.

  In this way, the R-axis maintaining mechanism 77 switches the connection state between each moving mechanism and the sample stage 33, that is, the connection of the rotation transmission shaft, during linear movement or rotational movement. Furthermore, by using the member for switching the connection state also as the lifting type lifting shaft 157, such switching and rotation of the connection can be realized with one member, and an advantage that the configuration can be simplified can be obtained. Here, the lift shaft 157 intermittently rotated by the geneva mechanism is set such that the lift shaft 157 is in the raised position during rotational movement. In other words, the rotation position of the geneva gear 165 and the rotation position of the inclined surface of the lift plate are linked so that they are not rotated when the lift shaft 157 is in the lowered position, or when moving up and down. . As a result, the sample stage 33 is rotated only while the sample stage 33 is reliably lifted by the elevating plate 160, and the displacement and slippage due to the rotation in the incomplete support state is prevented, thereby ensuring reliable and accurate. Rotating motion can be realized and microscopic operation is ensured.

  As described above, the R-axis maintaining mechanism 77 realizes vertical movement and rotational movement by a single operation using the rotation adjusting means. In this example, the lift plate 156 that generates the vertical motion transmission force of the vertical motion is continuously rotated while the rotational motion is an intermittent operation, but the flat surfaces 156A and 156C in which the thickness of the lift plate 156 is partially constant. By providing this, the vertical movement is also substantially intermittent. These intermittent operations are linked so that the rotational transmission force is transmitted only during the period when the sample stage 33 is in the raised position. As a result, the movement of the sample stage 33 is repeated ascending, rotating, and descending, and each operation does not overlap, so that the eucentric rotational movement can be realized reliably and accurately. Regardless of the position of the sample stage 33 in the X and Y directions, by realizing eucentric rotation, the R axis serving as the rotation axis exists in the observation field of view, and the amount of change in the field of view is reduced by reducing the amount of field change due to rotation. Easy to grasp. In addition, the R axis is preferably arranged in the vicinity of the center of the observation visual field, so that the state of rotation can be transmitted to the user most easily. Preferably, as shown in FIG. 32, the optical means is arranged so as to coincide with the lifting shaft 157 in a state where the observation means is held in a vertical posture.

  In these drawings, the contact surfaces of the gears are illustrated as smooth surfaces for the sake of simplicity of explanation, but in actuality, they are the meshing surfaces of the spur gears so that the gears mesh with each other. However, the present invention is not limited to this example, and it goes without saying that a known mechanism capable of transmitting a rotational motion, such as adopting a different mating surface or belt driving, can be used as appropriate.

As described above, as the R-axis rotation mechanism, the sample table rotation mechanism for rotating the sample table in the R-axis direction, the connection state connecting the sample table and the sample table rotation mechanism, and the non-connected state Rotating mechanism connecting means that can be switched to a connected state, and when the sample stage is moved in the XY direction by the XY moving mechanism, the connection between the sample stage and the sample stage rotating mechanism is not connected by the rotating mechanism connecting means. Therefore, when the sample stage is rotated in the R-axis direction by the sample stage rotation mechanism, the sample stage and the sample stage rotation mechanism are connected by the rotation mechanism connecting means. Therefore, if the movement of the sample stage in the XY direction is prohibited, the movement of the sample stage in the XY direction and the rotation in the R axis direction can be separated. Even if it is in such a position, always focus on rotation The eucentric type rotation about can be achieved.
(Second embodiment)

  In the above example, the vertical movement and rotational movement of the lifting plate are realized by a single operation, but these can also be realized by an independent operation system. In particular, in the above example, in order to perform the vertical movement and rotation of the lifting plate individually, the sample table is repeatedly moved up and down and finely rotated by intermittent operation using the Geneva gear. The mechanism for separating the motion and the rotational motion is complicated. There is also a problem that the amount of one operation is small because of the intermittent operation in which the vertical motion and the rotational motion are alternately performed. For example, if the sample stage is to be rotated greatly, a large amount of rotational operation is required, and it is also unsuitable when it is desired to rotate the sample quickly. Furthermore, from the viewpoint of the user who performs the operation, there is an advantage that the sample table can be moved up and down and rotated by one operation. There is also a problem that it is difficult to grasp sensuously whether or not the target is a target, and it is impossible to determine whether or not the next motion is a rotational motion.

  Therefore, the operation system is further simplified, and the vertical movement mechanism for moving the lifting plate up and down and the rotational movement mechanism for rotating in the R-axis direction can be separated so that each can be operated individually. it can. Such an example is shown in FIGS. 67 to 69 as a second embodiment. In these drawings, FIG. 67 is a schematic cross-sectional view showing a non-connected state in which the vertical movement operating portion 174 is in the non-connected position, and FIG. Reference numeral 69 is a schematic diagram showing the configuration of the vertical movement mechanism 175 and the rotary movement mechanism 176, respectively. In this example, the rotation mechanism connecting means is a vertical movement mechanism 175 for moving the lifting plate 160F up and down toward the lifting hole 161F opened on the back surface of the sample mounting surface of the sample stage 33F. The rotation mechanism 176 of the sample table 33F is a rotation mechanism for rotating the lifting plate 160F in the R-axis direction in a state where the lifting hole 161F of the sample table 33F is pushed up by the vertical movement mechanism 175 by the lifting plate 160F. is there. In this example, a vertically moving mechanism 175 for moving the lifting plate 160F up and down and a rotating mechanism 176 for rotating the lifting plate 160F in the R-axis direction are individually provided. Also, these operation means are not shared, and an R-axis operation means 74RF for operating the rotation mechanism 176 and a vertical movement operation unit 174 for operating the vertical movement mechanism 175 are individually provided.

  The vertical movement operation unit 174 switches the connection between the rotation mechanism 176 and the lifting plate 160F between a connected state and a disconnected state in which the connection is released. In the coupled state, the rotary movement mechanism 176 can be operated to rotate the lifting plate 160F. When the vertical movement operation unit 174 is operated to release the connection state between the rotation mechanism 176 and the lift plate 160F, the rotation operation of the lift plate 160F becomes impossible. First, as shown in FIG. 67, the user moves the sample stage 33F in the XY direction by operating the XY moving mechanism 75F while the rotary mechanism 176 and the lifting plate 160F are disconnected from each other with the up / down operation unit 174. Determine the position. When the position in the X direction is determined, as shown in FIG. 68, the vertical movement operation unit 174 connects the rotary mechanism 176 and the lift plate 160F, and operates the rotary mechanism 176 to rotate the lift plate 160F. The rotation angle can be adjusted.

  In the example of FIGS. 67 to 68, a lever-like vertical movement operation lever is provided as the vertical movement operation unit 174. This vertical movement operation lever can be switched between a connected position and a non-connected position by rotating around a rotation axis. Further, the rotational movement of the vertical movement operation lever is transmitted to the intermediate rotation unit 177 via a transmission means such as a belt. The intermediate rotation unit 177 further transmits the rotation operation to the cam-like switching unit 178 via a plurality of transmission mechanisms such as a gear and a rotation shaft. The cam-shaped switching portion 178 has a rotating side surface partially protruding into a cam shape, and pushes one end of the seesaw portion 179 to swing the seesaw portion 179. The other end of the seesaw portion 179 is fixed so as to be swingable around the rotation axis in a posture in contact with the bottom surface of the lift plate 156F. A lift shaft 157F is fixed to the upper surface of the lift plate 156F, and as shown in FIG. 68, when the bottom surface of the lift plate 156F is pushed up by the seesaw portion 179, the lift shaft 157F is raised and the lift plate 160F is pushed up. The sample stage 33F is lifted upward from the lifting hole 161F. As a result, the connection state with the XY movement mechanism 75F is released, so that the XY movement cannot be performed, while the connection state with the R-axis rotation mechanism is established, and the sample stage 33F can be rotated.

In addition, when the user sets the up / down movement operation lever to the non-connected position as shown in FIG. 67, the elevating plate 160F is in the lowered position, so that the rotation mechanism 176 is not connected to the sample stage 33F. On the other hand, since the XY placement surface 162F of the sample stage 33F is placed on the XY substage 78F, the sample stage 33F can be linearly moved in the XY direction by the XY moving mechanism 75F. Then, after the user performs the X-axis operation knob and the Y-axis operation knob to position in the X and Y directions, the vertical movement operation lever 174, which is the vertical movement operation unit 174, is switched to the coupling position as shown in FIG. In accordance with the operation of the lever, the intermediate rotating portion 177 rotates, the cam-like switching portion 178 is further rotated, one end of the seesaw portion 179 is pushed out by the cam-like switching portion 178, and the other end of the seesaw portion 179 is lifted by the reaction. Push up the bottom of 156F. As a result, the elevating shaft 157F fixed to the upper surface of the lift plate 156F is pushed up, the elevating plate 160F fixed to the upper end of the elevating shaft 157F is raised, and the bottom surface of the sample stage 33F is pushed up through the elevating hole 161F. In this state, the rotation mechanism 176 is connected to the sample table 33F, and the sample table 33F can be rotated by rotating the R-axis operation unit 74RF constituting the rotation adjustment unit, here, the R-axis operation knob. . On the other hand, since the XY placement surface 162F of the sample stage 33F is separated from the XY substage 78F, the connection between the sample stage 33F and the XY moving mechanism 75F is released. Even if operated, the sample stage 33F cannot be linearly moved in the XY directions by the XY moving mechanism 75F. In this way, in the second embodiment, the vertical movement of the sample stage 33F and the rotation around the R axis are separated, so that the movement of the sample stage 33F in the X and Y directions and the rotational movement can be made compatible and eucentric. Rotation is realized.
(Height adjustment mechanism 80)

  The sample stage 33 can be adjusted in the vertical Z-axis direction to adjust the distance (working distance) between the objective lens 59 and the sample as a height adjustment mechanism 80 for adjusting the horizontal position. It is said. Further, by including the focus variable range of the electron beam imaging unit 11 and the optical system imaging unit 12 in the movement locus of the height adjusting mechanism 80, the focus adjustment of the electron beam imaging unit 11 and the optical system imaging unit 12 can be performed. In this case, the height adjustment mechanism 80 is also used as the microscope focus adjustment unit 37 for adjusting the focal length of the electron beam imaging unit 11 and the optical focus adjustment unit 38 for adjusting the focal length of the optical system imaging unit 12. Alternatively, when each observation means 10 has a focus adjustment means, these can be used together. Needless to say, when either one of the observation means 10 is a fixed focus type that does not have a focus adjustment means, it functions as the focus adjustment means. For example, when the electron beam imaging unit 11 includes the microscope focus adjustment unit 37 and the optical system imaging unit 12 is a fixed focus type, the height adjustment mechanism 80 can be used as the optical focus adjustment unit 38.

The positioning of the observation image and the movement of the observation field of view are not limited to the method of physically moving the sample stage, and for example, a method of shifting the scanning position of the electron beam irradiated from the electron gun (image shift) can also be used. Alternatively, such virtual movement may be used in combination with physical movement. Alternatively, a method of once capturing image data over a wide range and processing the data in software can be used. In this method, since the data is once captured and processed in the data, the observation position can be moved by software, and there is no hardware movement such as movement of the sample stage or scanning of the electron beam. There are benefits. As a method of capturing large image data in advance, for example, there is a method of acquiring a plurality of image data at various positions and acquiring image data of a wide area by connecting these image data. Alternatively, the acquisition area can be increased by acquiring image data at a low magnification.
(Optical system imaging means 12)

  Next, the optical imaging unit 12 will be described. First, an example of the configuration of the optical lens system of the optical system imaging means 12 is shown in FIG. 42A. This optical lens includes an optical imaging element 92 disposed in an optical lens barrel, and an optical zoom lens 93 and an objective lens 94 that constitute an optical lens group 98. Each lens can be composed of a plurality of optical lenses. The magnification is adjusted by driving the optical zoom lens 93 manually or electrically to adjust the distance between the lenses. In the case of electric driving, a motor for moving the position of the optical zoom lens 93 is provided, and the optical zoom magnification is adjusted by the rotation of the motor. In order to adjust such optical magnification, the optical system imaging unit 12 includes an optical magnification adjusting unit 95. Further, when the focal position is variable, an optical focus adjusting means 38 for adjusting the focal position may be provided. When the focus position is fixed, the optical focus adjustment means can be omitted. Furthermore, an illumination unit 96 for illuminating the sample SA3 placed on the sample stage 33 is arranged.

As the optical imaging element 92, a CCD, a CMOS, or the like can be used. The optical imaging element 92 forms an optical image by electrically reading reflected or transmitted light of light incident on the sample SA3 via the optical system for each pixel arranged two-dimensionally. . Image data electrically read by the optical imaging element 92 is sent to the information processing means 101 for processing.
(Optical imaging system)

  In the configuration of the magnification observation system 1000 shown in FIG. 1, a controller for controlling the optical imaging unit 12 and the electron beam imaging unit 11 is provided separately. Here, the electron microscope image means is controlled by the controller 1, and the optical imaging means 12 is controlled by the information processing means 101 incorporated in the display means. In the present embodiment, the controller 1 is configured to perform image processing such as image composition. However, in addition to a configuration in which a separate controller for controlling each observation unit is provided, a plurality of observation units may be controlled by a single controller. By using a common controller, necessary members can be reduced, and a user can control a plurality of observation means by operating only one controller. Furthermore, the operation of each observation means is further improved by providing a unified environment and user interface.

  FIG. 42B shows a block diagram of an optical imaging system in which the optical system imaging unit 12 is controlled by the information processing unit 101 of the display unit 2. The optical system imaging means 12 shown in this figure is mounted on the sample stage 33 from the light receiving element such as a CCD as an optical imaging element for imaging the sample SA3, a CCD control circuit 91 for driving and controlling the CCD, and the illumination unit 96. And an optical lens group 98 that forms an image of transmitted light and reflected light of the light irradiated on the sample SA3 on the CCD. The configuration shown in FIG. 42A can be used for the optical lens group 98. Further, as described with reference to FIG. 4 and the like, the sample table driving means 34 for driving the sample table 33 on which the sample SA3 is mounted includes a horizontal plane moving mechanism 74 and a height adjusting mechanism 80. Further, as the optical focus adjusting means, a mechanism for moving the optical lens group 98 in the optical axis direction is provided, or the height adjusting mechanism is also used as an optical focus adjusting means for adjusting the focal point by changing the relative distance in the optical axis direction. May be.

  On the other hand, the display means 2 is electrically read by a second storage means 103 (corresponding to the second storage means 132 in FIG. 59) such as a memory for storing image data electrically read by the image pickup element, and the image pickup element. A display unit 102 for displaying an image based on the image data, an operation unit 105 for performing input and other operations based on a screen displayed on the display unit 102 (corresponding to the operation unit 105c in FIG. 59, etc.), An information processing unit 101 that performs image processing and other various processes based on information input by the unit 105 and an interface 104 through which the information processing unit 101 exchanges information from the optical imaging unit 12 are provided. The display unit 102 is a monitor capable of high-resolution display, and a CRT, a liquid crystal panel, or the like is used.

  The second storage unit 103 stores focal length information regarding the relative distance in the optical axis direction between the sample stage 33 and the optical lens group 98 when the focal point is adjusted by, for example, the optical focal point adjusting unit in a plane substantially perpendicular to the optical axis direction. It is stored together with the two-dimensional position information of the sample SA3. Further, when an arbitrary point or region on the image displayed by the display unit 102 is set by the operation unit 105, the focal length stored in the second storage unit 103 relating to a part or all of the sample SA3 corresponding to the set region. Based on the information, the information processing unit 101 calculates the average height in the optical axis direction of the sample SA3 corresponding to the region. In this way, the magnifying observation apparatus electrically reads the reflected light or transmitted light from the sample SA3 placed on the sample stage 33 entering through the optical lens group 98 with the image sensor, and puts it in the designated region. The average height or depth of the corresponding sample SA3 in the optical axis direction can be calculated. Further, the information processing unit 101 can also function as an image synthesis unit 116 that synthesizes an electron microscope image and an optical image, which will be described later.

  The operation means 105 is connected to the computer by wire or wirelessly, or is fixed to the computer. Examples of the general operation unit 105 include various pointing devices such as a mouse, a keyboard, a slide pad, a track point, a tablet, a joystick, a console, a jog dial, a digitizer, a light pen, a numeric keypad, a touch pad, and an accu point. These operation means 105 can be used not only for the operation of the magnification observation program but also for the operation of the magnification observation apparatus itself and its peripheral devices. Furthermore, using a touch screen or touch panel on the display itself that displays the interface screen, the user can directly input and operate the screen by hand, or use voice input or other existing input means, Or these can also be used together. In the example of FIG. 42B, the operation means 105 is configured by a pointing device such as a mouse.

Further, a computer 70 can be connected to the display means 2, and a magnified observation program can be separately installed in the computer 70 and the magnified observation apparatus can be operated from the computer 70 side. Alternatively, the display means itself can be realized by a computer. In this case, a monitor connected to the computer functions as a display unit of the display means.
(Pixel shifting means 99)

  Furthermore, the optical system imaging means 12 can be provided with a pixel shifting means 99 for obtaining a higher resolution than the resolution of the CCD by shifting the pixels. Pixel shift is to increase the resolution by combining an image taken by shifting the subject by half the pixel pitch and an image before shifting. As a typical image shifting mechanism, there are a CCD driving method for moving an image sensor, an LPF tilting method for tilting an LPF, a lens moving method for moving a lens, and the like. In FIG. 42B, the incident light path of reflected light or transmitted light that enters the CCD from the sample SA3 fixed to the sample stage 33 via the optical lens group 98 is set to at least one direction, and one pixel of the CCD in that direction. The optical path shift unit 14 that optically shifts by a distance smaller than the interval is provided. The mechanism and method for realizing pixel shifting are not limited to the above configuration, and a known method or a method developed in the future can be used as appropriate.

  The CCD can electrically read the amount of received light for each pixel arranged two-dimensionally in the x and y directions. The image of the sample SA3 formed on the CCD is converted into an electric signal according to the amount of received light at each pixel of the CCD, and further converted into digital data in the CCD control circuit 91. The information processing means 101 uses the digital data converted by the CCD control circuit 91 as light reception data, and the sample in a plane (x and y directions in FIG. 42B) substantially perpendicular to the optical axis direction (z direction in FIG. 42B). The pixel storage information (x, y) as the two-dimensional position information of SA3 is stored in the second storage means 103. Here, the in-plane substantially perpendicular to the optical axis direction does not need to be a plane that is exactly 90 ° with respect to the optical axis, and is such that the shape of the sample can be recognized in the resolution of the optical system and the image sensor. Any observation surface that is within the range of the inclination may be used.

As described above, in the configuration of the magnification observation system 1000 in FIG. 1, the optical imaging unit 12 is controlled by the information processing unit 101 incorporated in the display unit 2, while the electron beam imaging unit 11 is controlled by the controller. In other words, a controller is provided separately for each observation means. However, the present invention is not limited to this configuration, and a plurality of observation means may be controlled by a single controller.
(Lighting part 96)

  The illumination unit 96 illustrated in FIG. 42B illustrates epi-illumination for irradiating the sample SA3 with epi-illumination light. In particular, when observing from the front without tilting the observation means 10, the viewpoint, that is, the optical axis of the observation means and the illumination can be substantially matched, and the brightest screen can be obtained. However, the present invention is not limited to this, and transmissive illumination for irradiating transmitted light can also be used. The illumination unit 96 is connected to the display unit 2 through the optical fiber 106. The display means 2 includes a connector for connecting the optical fiber 106 and incorporates a light source 107 for sending light to the optical fiber 106 via the connector. As the light source 107, a halogen lamp, a xenon lamp, an LED, or the like is used.

  The illumination part 96 is installed in the light source port 97 in the sample chamber 21, as shown in FIGS. The illumination unit 96 connected to the light source port 97 is set with the optical axis of the illumination light so that the illumination light is directed to the sample stage 33. The optical axis of the illumination light is set in a posture toward the rotation axis as in the case of each observation means 10. Thereby, even if each observation means 10 is tilted while fixing the sample stage 33 during tilt observation, the situation where the illumination light is hidden behind the shadow of the sample stage 33 can be reduced. More preferably, as shown in FIG. 4, the illumination unit 96 is positioned on a surface different from the rotation surface provided with each observation means 10 and is set at an angle at which the optical axis intersects the rotation surface. By tilting the illumination light in this way, the direction in which the shadow is generated on the sample by the illumination light does not become parallel to the rotation surface, but intersects, so that an effect of reducing dark portions in tilt observation can be expected.

  Furthermore, the inner surface of the sample chamber 21 is preferably reflective. Thereby, the illumination light can be reflected as much as possible inside the sample chamber 21, and the effect of reducing the shadow of illumination by irregular reflection can be obtained. For example, the inner surface of the sample chamber 21 is covered with a highly reflective metal such as an Ag coat.

The light source port 97 is provided on the rotating part side. Accordingly, since the illumination unit 96 also rotates along with the rotation of the body unit 24, the positional relationship between the optical system imaging unit 12 and the illumination unit 96 can be maintained constant, and the radial direction can be maintained regardless of the position of the optical system imaging unit 12. As a result of continuing to irradiate the illumination at the same angle, an advantage that the illumination state does not change due to the rotation of the optical imaging means 12 can be obtained.
(Sample chamber observation means 13)

  Further, in the present embodiment, the sample chamber observation means 13 for observing the environment in the sample chamber 21 is provided as the third observation means. The sample chamber observation means 13 is an additional optical system imaging means, and at least a sample stage 33, an optical image including the sample placed on the sample stage 33 and the tip of the electron beam imaging means 11 in the field of view as a sample room image. It can be acquired. Thereby, the positional relationship among the sample, the optical system imaging unit 12 and the electron beam imaging unit 11 in the sample chamber 21 can be easily grasped. In particular, it is advantageous for confirming the sample placement position. For example, in the configuration in which the sample stage 33 is pulled out from the sample chamber 21, the placement operation itself is easy. However, as shown in FIG. . On the other hand, by providing the sample chamber observation means 13, as shown in FIG. 43, the user confirms the sample chamber image, which is an optical image of the sample chamber observation means 13, in real time, and before evacuating the sample. Can be placed at a desired position on the sample stage 33. That is, there is an advantage that the sample can be placed while checking the placement place. Such a sample room observation means 13 can be constituted by an image sensor such as a CCD or a CMOS, and is also referred to as a chamber view camera (CVC) or the like.

  FIG. 43 is a schematic cross-sectional view showing a state in which the sample is positioned in the open state of the closing plate 28. As shown in FIG. 43, the sample stage 33 is not moved as the closing plate 28 is opened and closed. By making the opening / closing operation of the plate 28 and the movement of the sample stage 33 independent, the mounting position of the sample on the sample stage 33 does not change before and after the closing plate 28 is opened and closed. For this reason, the sample stage 33 can be observed by the sample chamber observation means 13 while the sample chamber 21 is released, and the sample chamber image indicating the position and display state of the sample can be confirmed on the display means or optimally placed. The great advantage is that the position can be manually fine tuned. Thus, using the sample chamber observing means 13 to confirm the mounting state in advance before closing the sample chamber 21 has the advantage that the sample positioning work can be greatly saved. That is, conventionally, the observation image cannot be confirmed unless the sample is set on the sample stage and the sample chamber is evacuated. After displaying the observation image, in order to further adjust the position, return the sample chamber to atmospheric pressure, open the sample chamber again, correct the position, and perform evacuation again for observation. Positioning was performed repeatedly, which was an extremely complicated operation. On the other hand, in the above configuration, the sample placement can be executed while confirming the optical image before evacuation. That is, since the optical image can be displayed with the sample chamber open, the position of the sample can be finely adjusted while checking the appearance on the optical image, so that the sample can be easily positioned at the intended position. In this way, it is possible to greatly save the work of positioning the sample, and it is possible to obtain an excellent advantage that the pretreatment time can be shortened by minimizing the number of times of evacuation. The observation in the sample chamber is not limited to the sample chamber observation means, and an optical system imaging means can also be used.

  The sample chamber observation means 13 preferably has its optical axis substantially parallel to the rotation axis. Thereby, the rotational movement of the trunk | drum 24 can be grasped | ascertained from upper direction, and it can become easy to grasp | ascertain a rotation state as an arc-shaped locus | trajectory. Further, the offset arrangement in which the optical axis is decentered so as to be parallel to the rotation axis makes it possible to include the rotation axis in the optical image, making it easier to grasp the rotation. The amount of eccentricity of the optical axis of the sample chamber observation means 13 is preferably about ± 10% of the cylindrical radius with the rotation axis of the body portion 24 as a reference. In the present specification, the term “sample stage 33 substantially coincides with the rotation axis” is used to include such an offset position. In addition, the term “parallel” is used in a sense including an angle difference up to about 20 ° with respect to the rotation axis. Further, when the sample chamber observation means 13 is eccentrically arranged, the optical axis is more preferably positioned above the rotation axis. As a result, the observation surface of the sample aligned with the rotation axis can also be included below the image in the sample chamber, and the positional relationship between the sample and the electron gun can be reliably grasped.

  When the electron beam imaging means 11 is rotated together with the body part 24, the sample chamber observation means 13 is fixed while checking the presence or absence of interference with the sample stage 33 and the sample on the sample stage 33. For this purpose, it is desirable that the fixed part is not rotated.

  However, it is also possible to provide the sample chamber observation means 13 on the rotating part side. In this case, a still image in which the rotational motion is canceled can be obtained by acquiring the rotation angle information of the body portion 24 with an angle sensor or the like and performing control for correcting the rotation of the image. For example, the controller 1 calculates the rotation amount of the rotation unit and the movement amount of the visual field, and performs image processing so that the display portion of the observation visual field is moved in the reverse direction by the movement of the visual field. As a result, the sample room image can be displayed as a rotation-corrected image corrected so as to cancel the tilt caused by the rotation of the body portion, so that the field of view of the image displayed on the display means 2 can be kept constant regardless of the rotation position.

  44A and 44B are schematic cross-sectional views showing the relative movement of the sample stage 33 and the observation means 10 in the sample chamber 21. FIG. As described above, the sample stage 33 is only moved up and down by the height adjusting mechanism 80 while maintaining a horizontal posture, and is not allowed to tilt or swing to tilt the mounting surface of the sample stage 33. In order to realize tilt observation with this structure, the observation means 10 side is tilted. In this way, by fixing the sample side and inclining the observation means 10 side, the user can easily grasp the positional relationship of the inclination posture in the observation image captured by the observation means 10 and displayed on the display means 2. Benefits are gained. In other words, in the conventional structure in which the camera side is fixed and the sample stage 33 is tilted, that is, the eucentric structure as shown in FIGS. 45A and 45B, the tilt angle of tilted observation in the image currently being observed. When changing the angle, it is not easy to grasp the positional relationship in which direction the inclination is adjusted to obtain a desired image. On the other hand, by fixing the sample side to be observed and moving the observation means 10 side as the observation viewpoint, that is, the line of sight itself, the same line of sight as when the user actually observes the sample is obtained. The positional relationship can be grasped as if it were moved, and as a result, the advantage that the direction in which the angle should be adjusted can be grasped quickly is obtained.

  Further, by not tilting the sample stage 33, there is no possibility that the sample slides from the sample stage 33, a structure for fixing the sample to the sample stage 33, for example, fixing work using an adhesive tape is unnecessary, and the adhesive tape is peeled off. Thus, the workability and safety can be improved so that the possibility of damaging the sample during the process can be eliminated.

  Furthermore, in the conventional eucentric structure, if the height (Z axis) of the sample stage 33 is changed while the sample stage 33 is tilted, the sample stage 33 moves from the black-colored position shown in FIG. 45B to the position shown by hatching. As a result, the optical axis of the optical imaging means 12 fixed in an inclined posture relatively moves on the sample stage 33, and there is a problem that the observation visual field moves unintentionally. In particular, in the case of a fixed focus type in which the optical image pickup means 12 is not provided with an optical focus adjustment means for adjusting the focus position, it is necessary to change the working distance only by adjusting the height of the sample stage 33, depending on the focus position. May not match the observation field of view with the electron microscope.

  Further, when the angle between the observation unit 10 and the sample is changed, the focal distance between the observation unit 10 and the sample changes every time the angle is changed, and thus the focal position must be corrected. In addition, when it is desired to obtain tilt observation images with the same tilt angle with respect to the same sample by the two observation means 10, the angle used by one observation means 10 is stored and the other observation means 10 is stored. After moving the sample stage 33 to the side, it was necessary to reproduce the previous angle and to adjust the focal position.

  On the other hand, in this embodiment, as shown in FIGS. 44A and 44B, the observation field of view can be kept constant regardless of the height of the sample stage 33 by rotating the observation means 10 to the vertical position. Benefits are gained. In the present embodiment, the observation means 10 to be used is set in a vertical posture, in other words, the optical axis of the selected observation means 10 is substantially matched with the moving direction (Z axis) of the height adjustment means. The movement of the observation field by adjusting the height can be avoided. As a result, there is only one eucentric working distance. Thus, when the observation means 10 is observed in a vertical posture, the optical axis of the observation means 10 and the axis of vertical movement of the sample stage 33 coincide with each other, and the visual field does not move even if the working distance is adjusted. The advantage that it is easy to adjust is obtained.

  However, it goes without saying that the sample can be observed even when the observation means 10 is in an inclined posture. In this case, the observation field of view is moved by adjusting the height of the sample stage 33. However, this movement can be offset by image processing. For example, the controller 1 calculates the change in height and the amount of movement of the visual field by the controller 1, and the controller 1 moves the display part of the observation visual field (optical image or electron microscope image being displayed) in the reverse direction by the amount of movement of the visual field. Image processing. Thereby, the visual field of the image displayed on the display means 2 can be kept constant regardless of the movement of the height. As a result, it is possible to realize a magnification observation apparatus in which the observation field of view does not change even when the observation means 10 is switched regardless of the angle of the sample stage 33 and the observation position.

  In particular, in order to prioritize observation with an electron microscope, the design philosophy of limiting tilt observation has been adopted as a result of giving priority to the resolution (maximum magnification) of the electron microscope at the expense of observation with the optical imaging means 12. As a result, even if both the folding electron beam imaging unit 11 and the optical system imaging unit 12 are provided, an environment in which both can be used to the maximum and the user can use optical images and tilt observation without limitation is realized. It was hard to say.

  Specifically, the resolution of the electron microscope improves as the working distance, which is the distance from the tip of the objective lens of the electron beam imaging means 11 to the sample, is shorter. However, when the sample is observed from an inclined angle, there is a problem that the sample comes into contact with the objective lens of the electron beam imaging means 11 if the working distance is too short. Therefore, conventionally, the working distance is set to the shortest distance that does not collide with the objective lens, which is determined by the sample size and the desired tilt angle. As a result, in a conventional electron microscope, observation is performed with a working distance determined by the size of the sample and the desired tilt angle. Thus, in order to observe comfortably in various working distances, it is desirable that the observation visual field does not change when the tilt angle of the sample stage 33 is changed in any working distance. From such a background, the conventional electron microscope has a configuration in which the visual field does not move even if the sample stage 33 is tilted at any working distance, that is, on the optical axis of the electron microscope as shown in FIG. Thus, a tilting mechanism of the sample stage 33 that is a eucentric type that does not shift the visual field regardless of the position of the Z axis of the sample stage 33 has been adopted.

  According to this structure, the optical system imaging means 12 and the electron beam can be obtained by performing only one operation of tilting and rotating the sample stage 33 by adjusting the sample surface in advance so that the sample surface is positioned at the blackened position in FIGS. 45A and 45B. Observation with the same visual field and the same inclination angle is possible with the imaging means 11. However, although the visual field search and the position adjustment need to be performed by the optical system imaging unit 12 having a shallow depth of field, the field of view is shifted from the electron beam imaging unit 11 when the position adjustment is performed. There was a problem.

  In view of such a situation, as described above, the present embodiment employs a structure in which the sample stage 33 side is fixed and the observation means 10 side is inclined as shown in FIGS. 44A and 44B. As a result, since it is not the sample stage 33 but the observation means 10 side that is tilted, it is possible to easily switch to an image at the same observation position and tilt angle regardless of the height of the sample stage 33. As a result, it is possible to realize magnified observation that is more convenient than the prior art, in which both the electron microscope observation and the optical microscope observation are emphasized and the tilt observation is also emphasized.

  Further, in a conventional electron microscope, a Z stage is configured as a height adjustment mechanism 80 on a member to which an electron lens and an optical lens are attached, and a mechanism for tilting and rotating the sample stage 33 is configured on the Z stage. It was. Furthermore, the electronic lens and the optical lens were attached to the fixed side.

On the other hand, in the magnifying observation apparatus according to the present embodiment, a mechanism for rotating the sample stage 33 is configured on the member to which the electronic lens and the optical lens are attached, and further, the height adjusting mechanism 80 is provided thereon. It is configured. In other words, the rotating shaft mechanism and the Z-axis moving mechanism are opposite to the conventional one. Moreover, the electronic lens and the optical lens are attached to the rotation side.
(Matching of optical axis and moving direction of sample stage 33)

  In the magnifying observation apparatus according to the present embodiment, both the observation means 10 can be switched and arranged at one observation position by rotating the electron beam imaging means 11 and the optical system imaging means 12 by the rotation means 30. That is, by such switching, it is possible to perform imaging with the optical axes of the two observation means 10 matched. On the other hand, the sample stage 33 can be moved up and down, that is, in the vertical direction by the height adjusting mechanism 80 while maintaining the horizontal posture. As a result, it is possible to make the optical axis coincide with the moving direction of the sample stage 33 by positioning the observation means 10 in the vertical posture.

Accordingly, the electron beam imaging unit 11 and the optical system imaging unit 12 rotated along the cylindrical side surface can be tilted, and placed on the rotation axis and the height direction of the sample stage 33, that is, on the sample stage 33. By making the height of the observation surface of the obtained sample coincide with each other, it is possible to observe without changing the visual field. In addition, observation images with substantially the same field of view, approximately the same inclination angle, and approximately the same magnification, in which the optical axes of the respective observation means 10 are matched, can be acquired, and the two acquired observation images can be compared and observed.
(Rotation axis within the variable range of focus)

  The height adjusting means is set so that the rotation axis of the rotating means 30 is included in the height movable range in which the height can be adjusted. Thereby, even if the sample stage 33 is positioned at the center of the rotation axis and the observation unit 10 is rotated along the rotation axis, the distance from the observation unit 10 to the sample stage 33 at each position can be maintained constant. Once the focal length is adjusted, the in-focus distance can be maintained even if the observation means 10 is moved, and the viewing angle can be always changed in the in-focus state, which is extremely advantageous for tilt observation.

  More precisely, as shown in the schematic cross-sectional view of FIG. 46 showing such a setback, the height of the sample is adjusted so that the observation position on the surface of the sample, that is, the observation surface that is the upper surface of the sample coincides with the rotation axis. The holding state of the working distance can be achieved by lowering the sample stage 33 from the rotation axis by that amount. For this reason, the height adjustment mechanism 80 can be lowered below a desired range from the position where the sample stage 33 is aligned with the rotation axis. As a result, the sample stage 33 can be lowered according to the height of the observation surface, and the observation surface can be accurately aligned with the rotation axis.

For this reason, in the movement of the sample stage 33 in the Z-axis direction, the upper end stroke position of the sample stage 33 can be raised to a position including at least the rotation axis, and is further set to be movable at least from the rotation axis to a lower position. .
(Adjustment of setback)

To align the sample surface with the rotation axis, an optical lens having a shallower depth of field than the electron lens is used. The mounting position of the optical lens is adjusted in advance so that the focal position coincides with the rotation axis. The body 24 is rotated so that the optical axis of the optical lens and the sample placement surface of the sample stage 33 are vertical, and the Z-axis position of the sample stage 33 is adjusted so that the image of the optical lens is in focus. . At this time, only the distance between the optical lens and the sample changes, and the field of view does not move, so that adjustment is easy. Next, focus adjustment of the electron lens is performed in the same procedure as described above. Thereby, no matter how the body portion 24 is rotated and inclined, the fields of view of the electron microscope and the optical microscope are not shifted.
(With or without focus adjustment means Fixed focus type)

Further, when the focal length of the observation means 10 is fixed, the working distance can be accurately adjusted to the focal position by adjusting the height of the sample stage 33 with this configuration. Or when the observation means 10 is provided with a focus adjustment means, it sets so that the rotating shaft of the rotation means 30 may be included in the focal distance range which can be adjusted by this. For example, the electron beam imaging means 11 is often provided with a microscope focus adjustment means 37 that can adjust the focal length along the optical axis. In this case, as shown in FIG. The axis is set so as to include the axis, and the focal length is adjusted by the microscope focus adjustment means 37 so that the focal position of the electron lens coincides with the position of the rotation axis. Similarly, when the optical system imaging unit 12 includes the optical focus adjustment unit 38 that can adjust the focal length along the optical axis, the rotation range is included in the variable range of the focus position as shown in FIG. Thus, the optical focus adjusting means 38 is adjusted so that the focal position coincides with the rotation axis.
(Embodiment 2)

In the above-described example, the example in which the optical system imaging unit 12 and the electron beam imaging unit 11 are combined has been described. However, not only the configuration in which these are always used together, but also the configuration in which they are added as necessary can be used. Not too long. For example, as described above, by adopting a configuration in which the optical system imaging unit 12 is attached and detached via the mount 39, a magnified observation system as shown in the block diagram of FIG. 27 can be configured. In this way, it is possible to add and remove options according to the observation application, and it is possible to add and remove options according to the observation purpose, by using the electron microscope imaging and adding the optical system imaging means 12 as necessary. The advantage is that a magnified observation system with excellent characteristics can be constructed.
(Magnification conversion function)

  Further, the magnification observation apparatus has a magnification conversion function for displaying the magnifications at a unified magnification or automatically adjusting the magnifications when different determination means have different magnification criteria. Generally, when observing with a magnifying observation apparatus, the degree of magnification is often indicated by a magnification. However, since the definition of the magnification changes depending on the size of the display range, the magnification is often different for each observation means. In general, the magnification is defined or calculated by the following equation.

  Magnification = Display range of observation image / Viewing field range

In the above equation, the display range is a parameter determined by the designer of the observation means and is not determined by the user. On the other hand, the observation visual field range is to arbitrarily select the visual field range desired by the user from the settable visual field ranges determined by the ability of the observation means. Hereinafter, the magnification determination method will be described based on FIG. 49 showing the visual field range and display range of the electron beam imaging means 11 and FIG. 50 showing the visual field range and display range of the optical system imaging means 12.
(Electron microscope magnification)

For example, in the electron beam imaging means 11 constituting the scanning electron microscope, the display range is generally the size of the photograph PH (for example, 124 mm × 94 mm) as shown in FIG. The observation visual field range is an actual dimension in a range in which an electron beam irradiated on the sample from an electron gun or an electron lens scans on the sample.
(Optical magnification)

  On the other hand, in the optical system imaging means 12 such as a digital microscope, as shown in FIG. 50, the reflected light from the sample SA illuminated by the illumination light passes through the optical lens and the optical imaging such as CCD or CMOS. The structure forms an image on the element. The display range is generally the monitor size of the display unit 102 (for example, a 15-inch monitor screen size). The monitor size also changes depending on whether the display unit 102 is an LCD or a CRT. Furthermore, the observation visual field range is (effective imaging range of the optical imaging device) / (optical magnification of the optical lens). Thus, the optical magnification is an enlargement ratio with respect to the size of the object.

  The method for determining the magnification is not limited to the above. As a special example, for example, it is conceivable to display a part of the image data acquired from the observation visual field range instead of displaying all of the image data in the display range. In such a method, for example, when blurring or distortion is seen around the image, it is conceivable to cut and display these portions. Alternatively, although the resolution is coarse, the apparent magnification may be increased by so-called digital zoom. In such a case, the magnification increases.

  On the other hand, the observation visual field range may be moved in the vertical and horizontal directions or the XY directions to acquire a plurality of image data, and these may be connected to display a wide visual field range in the display range. For example, an image that is lower than the lowest observable magnification may be obtained, or a high-resolution image may be obtained for later digital zooming. In such a case, the magnification decreases.

  As described above, when it is desired to acquire an observation image in the same observation visual field range with two or more types of observation means, if the definition of the magnification of each observation means is different, images are acquired with the same “magnification”. However, it was inconvenient because it was impossible to obtain observation images in the same observation visual field range as desired. That is, even if the same visual field range is magnified, the magnification of the magnification observation apparatus displaying on a large screen is high, and the magnification of the magnification observation apparatus displaying on a small display screen is low. As a result, when only the magnification is used as a reference, the size actually displayed by the observation means is not constant, which is not preferable when performing comparative observation or the like.

  Because of this situation, conventionally, as a countermeasure, a method of performing a calibration work in advance to confirm the magnification definition of each observation means by observing a sample whose dimensions are known in advance or a difference in the magnification definition Considering this, the method by which the user manually calculates the magnification at which the same observation field range can be observed, and the method using a separate electron microscope and optical digital microscope, not within the same magnification observation device, etc. However, all of them have the problem of taking time and effort.

  On the other hand, in this embodiment, a uniform magnification is defined so that both observation means have the same display size for the same observation visual field range. In other words, a value obtained by dividing the same display range by the observation visual field range is defined as a magnification. In this way, even with different observation means, the designer defines the same display range and has a magnification conversion function, so that the user can use the same defined magnification even with different observation means. Available. Thus, when the magnification is set by any one of the observation means, a value converted into the magnification of the other observation means is displayed together with the magnification. Alternatively, the magnification display of the other observation means may be changed and converted to the magnification of one observation means for display or writing together.

In addition, the reference | standard of magnification can also be converted into the magnification of the 3rd reference | standard different from the magnification of any observation means other than converting the conversion magnification converted into any one observation means with a magnification conversion means. In this case, the optical image and the electron microscope image are displayed at the same standard magnification.
(Magnification conversion function)

  FIG. 51 shows a block diagram of a magnification observation apparatus having a magnification conversion function. The magnification observation apparatus shown in this figure includes an optical imaging unit 12, an electron beam imaging unit 11, a controller 1, a display unit 2, and an operation unit 105B. The controller 1 includes an operation unit such as an MPU, and functions as a magnification conversion unit 111 that converts the magnification of another observation unit according to a standard defined by one observation unit, and a mode selection unit 110 that selects an observation mode. . In this example, the display mode 2 includes a comparison mode in which the electron microscope image and the optical image can be compared and observed, and a composite mode in which a composite image obtained by combining the electron microscope image and the optical image can be displayed. The mode is selected by the mode selection means 110. Note that the synthesis mode is not always essential, and only the comparison mode can be implemented. In this case, mode selection means for selecting a mode is not essential.

The operation means 105B is composed of an input device, and the user operates this to set the electron microscope magnification. Thereby, the operation of the electron microscope magnification adjusting means 68 for setting and adjusting the electron microscope magnification can be performed. The operation means 105B is connected to the controller 1 in the example of FIG. 51, but can be shared with the operation means 105 and the console CS connected to the display means 2.
(Magnification conversion means 111)

The display unit 102 of the display unit 2 includes a conversion magnification display unit 123, a magnification range display unit 126, a scheduled magnification display unit 124, a determination notification unit 125, a status display unit 121, and a non-selection display as will be described later. It functions as the means 122. The conversion magnification display means 123 obtains the magnification of the image acquired by one observation means and displayed on the display means, and determines whether the other observation means can be set to the conversion magnification converted by the magnification conversion means. When the setting is possible, the conversion magnification is displayed on the display unit, and when the setting is impossible, the conversion magnification that is closest to the conversion magnification is displayed on the display means. The magnification range display unit 126 converts the electron microscope magnification range in which the electron microscope image can be adjusted and the optical magnification range in which the optical image can be adjusted into a one-dimensional display on the display unit by converting them into the same reference magnification. . The magnification range display means 126 can indicate an overlapping range between the optical microscope magnification range and the electron microscope magnification range. The scheduled magnification display unit 124 displays the conversion magnification for acquiring the image by the other observation unit with the same display size as the image acquired by the one observation unit. If it is determined that the magnification of the other observation unit cannot be set to the conversion magnification converted by the magnification conversion unit, the determination notification unit 125 displays that it cannot be set. The state display unit 121 performs state display for distinguishing between moving image display and still image display.
(Optical magnification adjusting means 95)

  51 includes an optical magnification adjusting unit 95 and an optical magnification reading unit 112. The optical imaging unit 12 shown in FIG. The optical magnification adjusting means 95 is provided in a ring shape that is rotatable on the side surface of the optical lens barrel, and adjusts the magnification by the amount of rotation of the ring. In the example of FIG. 51, an image of an optical lens barrel incorporating an optical zoom lens is shown, and an optical magnification adjustment means 95 provided on the outer periphery of the optical lens barrel and an optical magnification reading for reading the set magnification. Means 112 are provided. The optical magnification reading unit 112 is electrically connected to the calculation unit, and sends its output to the magnification conversion unit 111 of the calculation unit.

  With this configuration, the user adjusts the magnification of the electron beam imaging unit 11 from the operation unit 105 </ b> B, while adjusting the optical magnification of the optical microscope with the optical magnification adjustment unit 95. When the user operates the optical magnification adjustment unit 95 to adjust the optical magnification, the optical magnification is read by the optical magnification reading unit 112 and sent to the magnification conversion unit 111. The magnification conversion unit 111 converts the optical magnification into an electron microscope magnification corresponding to the optical magnification, and displays it on the display unit 2. The user operates the operating means 105B according to the conversion magnification, and sets conditions such as the electron beam polarization scanner 58 so that an electron microscope image at the conversion magnification can be obtained. In addition, the display of the conversion magnification converted by the magnification conversion unit 111 may be configured to be switched between display and non-display in addition to being always displayed on the display unit 2.

  On the other hand, the magnification conversion means 111 may send the conversion magnification to the electron beam imaging means 11 and set an electron beam scanning, a deflector or the like so as to automatically adjust the electron microscope magnification. In this case, the user does not need to manually adjust the electron microscope magnification adjusting means 68, and convenience is improved. For example, when the user switches the image to be displayed on the display unit 2 from the optical image to the electron microscope image, the optical magnification reading unit 112 automatically reads the optical magnification of the optical image being displayed, and the magnification conversion unit 111 performs the corresponding operation. Convert to the electron microscope magnification of the electron microscope image. Then, an electron microscope image of this electron microscope magnification is acquired and automatically displayed on the display means 2. For example, in order to enlarge / reduce an imaged electron microscope image to generate an electron microscope image at the electron microscope magnification, or to newly image an electron microscope image at the electron microscope magnification, the electron beam imaging means 11 It is also possible to send necessary setting information. In this way, an electron microscope image having the same size corresponding to the optical image can be displayed on the display means 2. Moreover, the automatic interlocking function of the magnification by switching the observation means can be switched on / off. For example, when the magnification interlock function is turned off, when switching from an optical image to an electron microscope image, the image is displayed at the magnification used in the previous observation with the electron beam imaging means, and when the magnification interlock function is turned on. When the optical image is switched to the electron microscope image, the electron microscope image at the corresponding magnification can be automatically displayed.

  In the example of FIG. 51, the electron microscope magnification adjusting means 68 is realized by the operation means 105B. However, as shown in FIG. 2A, the electron microscope magnification adjusting means 68 is configured in a ring shape that is rotatable on the side surface of the electron lens barrel. You can also. In this way, by providing the electron beam imaging unit 11 with the same magnification adjustment unit as the optical magnification adjustment unit 95, it is possible to obtain a uniform operation feeling and improve the usability of the user.

  The magnification of the optical zoom lens varies depending on the position of the lens group that determines the optical magnification in the optical lens system in the optical lens barrel. In order to move the lens group, the optical lens barrel is provided with a zoom ring that is rotatable along the side surface of the optical lens barrel as the optical magnification adjusting means 95. The user can adjust the optical magnification by rotating the zoom ring along the side surface of the optical lens barrel to move the optical lens inside the optical lens barrel. For this reason, it is preferable to display the magnification as a numerical value or a scale on the zoom ring so that the magnification determined by the rotational position can be grasped. For example, an arrow is displayed on the optical zoom lens side, and a magnification is displayed on the optical lens barrel side by marking or printing, and the user adjusts the rotation position so that the arrow matches the desired magnification. Needless to say, the arrangement of the arrows and the numerical values may be reversed between the optical zoom lens and the optical lens barrel.

Further, the optical magnification adjusting means 95 may be operated by being rotated manually by the user, or may be a mechanism that is rotated electrically. The adjusted magnification is detected by the optical magnification reading means 112. In addition, when a mechanism for automatically adjusting the optical magnification adjustment means by electric power or the like is provided instead of manually, the magnification of the electron microscope image is acquired by the electron microscope magnification reading means or the like, and the corresponding optical image is reversed. It is also possible to automatically adjust the imaging magnification of the optical imaging means by sending the information to the optical magnification adjusting means so as to obtain the converted magnification.
(Optical magnification reading means 112)

  The optical magnification reading means 112 can be constituted by an optical zoom magnification reading device or the like installed in the optical lens barrel. The optical magnification reading unit 112 electrically detects the rotational position of the zoom ring 113 and thereby recognizes the magnification. Accordingly, for example, the magnification of the optical zoom lens set manually by the user can be recognized on the magnification observation apparatus side, and processing such as magnification conversion corresponding to the magnification can be smoothly performed.

  An example of such an optical magnification reading means 112 is shown in the sectional view of FIG. This figure is a transverse sectional view of the optical lens barrel of the optical system imaging means 12, and a zoom ring 113 is rotatably mounted on the outer periphery of the optical lens barrel. A spherical protruding electrode 114 is provided on the outer periphery of the optical lens barrel so as to protrude elastically. A plurality of magnification output electrodes 115 for outputting an optical magnification corresponding to the position of the zoom ring 113 are provided on the inner peripheral side of the zoom ring 113 so as to be separated from each other along the circumference. Each magnification output electrode 115 comes into contact with the protruding electrode 114 and outputs information on the corresponding optical magnification as, for example, a voltage signal generated in a resistor. In this way, by operating each magnification output electrode 115 as a switch, it is detected that a magnification corresponding to the position of the magnification output electrode 115 has been selected. That is, the optical magnification reading unit 112 recognizes the current optical magnification by turning on / off the switch, and sends this to the calculation unit. Further, by forming a concave surface for receiving the protruding electrode 114 on the inner surface of the zoom ring 113, it is possible to achieve a positioning function for holding the zoom ring 113 at a predetermined magnification. Furthermore, by displaying the numerical value and scale of the magnification at the position of each electrode, the magnification adjustment work by the user can be easily performed. However, when a magnification display is performed on the display unit 2, such a physical magnification display is not always necessary.

  Further, the optical magnification reading unit 112 is not limited to position detection by such electrode contact. For example, non-contact can be performed by providing a photo interrupter at the interface between the zoom ring and the optical lens barrel. Alternatively, it goes without saying that in addition to discrete magnification detection at a fixed position, the magnification may be read continuously using a rotary encoder or the like.

  In the example of FIG. 51, the optical imaging unit 12 includes the optical magnification adjusting unit 95 and the optical magnification reading unit 112, but the optical magnification reading unit may not be provided. In this case, the user can know the rough optical magnification by reading the scale displayed on the zoom ring or the like. Further, it is possible to set a fixed magnification without providing the optical magnification adjusting means. In this case, the optical magnification can be changed by replacing the optical imaging device with a different magnification by making the optical imaging device detachable.

Note that the visual field range can be shown instead of or in addition to displaying the magnification as a numerical value on the display unit 102. For example, a display form such as “display field range 4 mm × 3 mm” can be used instead of “100 magnification”.
(Display of conversion magnification)

  The magnification conversion unit 111 recognizes the magnification of the image acquired by either the electron beam imaging unit 11 or the optical system imaging unit 12 as described above, and converts the image having the same display size as the other image. The magnification for obtaining by the observation means is converted into the magnification based on the reference of the other observation means.

  In general electron microscope observation, the optical field imaging unit 12 is used to determine the field of view of the sample at a low magnification, and then the electron beam imaging unit 11 acquires a high magnification image. For this reason, when the optical image acquired by the optical system imaging unit 12 is first displayed on the display unit 2, the optical magnification of the optical image is displayed, and the conversion magnification converted into the electron microscope magnification is also shown. Therefore, if a user operates the electron beam imaging means 11 and acquires the electron microscope image of conversion magnification, it can image an electron microscope image with the same display size. As a result, the optical image and the electron microscope image can be displayed on the display means 2 with the same display size, and comparative observation can be easily performed. In particular, it is possible to easily switch between the optical imaging unit 12 and the electron beam imaging unit 11 in the same field of view by using the configuration of the sample chamber 21 (FIG. 26) provided with the above-described rotational movement mechanism. In combination, there is an advantage that comparative observation can be performed more easily.

  The conversion magnification is not limited to the case where the optical magnification is converted into the electron microscope magnification, and conversely, the conversion magnification obtained by converting the electron microscope magnification into the optical magnification may be used. In particular, it is suitable when acquiring an optical image after acquiring an electron microscope image first. Or you may comprise so that the magnification display of an optical image and an electron microscope image may be performed according to the magnification unified by one standard, without using together the magnification of different standards.

In addition to simply displaying the conversion magnification on the display unit 2, it is possible to automate the magnification setting of the observation unit 10 according to the conversion magnification as described above. For example, the electron microscope magnification obtained by converting the magnification based on the optical magnification of the acquired optical image may be automatically set in the electron microscope magnification adjusting unit 68 of the electron beam imaging unit 11. Alternatively, the imaging condition parameters are automatically set so that an image with the electron microscope magnification can be acquired. According to this, an electron microscope image having the same display size as the image acquired by the optical system imaging unit 12 can be acquired almost automatically. In addition, the imaging condition parameter setting screen may be displayed on the display unit 2 without being performed until acquisition is performed, and the user may be able to make fine adjustments.
(Automatic change to proximity magnification)

In addition, when it is difficult or impossible to acquire an image at the conversion magnification, a magnification close to the conversion magnification can be selected to display the magnification on the display unit 2, or image acquisition, image display, or the like can be performed. That is, since the range of magnifications that can be set differs between the electron beam imaging unit 11 and the optical system imaging unit 12, there are magnifications that can be set by one observation unit but cannot be set by the other observation unit. Even in such a case, it is possible to select a magnification as close as possible from the settable range and display the magnification, acquire an image, or display an image.
(Magnification range display means 126)

  FIG. 53 shows a display example showing the overlapping range of the optical microscope magnification range and the electron microscope magnification range by the magnification range display means 126. By displaying such a magnification range display means 126 on the display means 2, it is possible to visually grasp the magnification range of each observation means, and if the current magnification is outside the overlapping range, how much and in what direction You can check if you need to zoom in and out. In particular, the electron microscope magnification range changes depending on conditions such as acceleration voltage and working distance.By enabling the user to visually grasp the overlapping range under the current observation conditions, the user can quickly determine the necessary magnification setting index. Obtainable.

  In this example, the magnification range of the electron beam imaging means 11 that can be adjusted by the electron microscope magnification adjustment means 68 and the magnification range of the optical imaging means 12 that can be adjusted by the optical magnification adjustment means 95 are the magnification conversion means 111. In the conversion magnification converted in (1), at least partly overlaps. Thereby, an electron microscope image and an optical image can be acquired with the same size, which is advantageous for comparative observation.

  Further, in the example of FIG. 53, the optical microscope magnification range and the electron microscope magnification range are arranged on the axis of the same reference conversion magnification and displayed in a one-dimensional overlapping gauge type. However, it is not necessary to determine the overlapping magnification range based only on the value of the observable magnification of each observation means, and the target magnification range that can be used for comparative observation and synthesis processing can also be regarded as the overlapping magnification.

  For example, when synthesizing images, it is preferable to synthesize images of the same size, but the present invention is not necessarily limited to this. For example, considering an example in which color information of an optical image is added to an electron microscope image and colorization is performed, if an optical image having the same magnification as that of the electron microscope image cannot be obtained by converting the magnification, the optical imaging unit 12 An optical image having the closest obtainable magnification can be acquired, and color information can be acquired from the optical image. As described above, the observable magnification of each observation unit also changes depending on the image observation conditions of each observation unit, and accordingly, the presence or absence of the overlapping magnification can be captured. For example, in SEM, the lower the acceleration voltage, the lower the magnification can be observed. In SEM, if the working distance, which is the distance between the lens and the sample, is long, it is possible to observe up to a lower magnification.

  When the magnifications do not overlap, the closest magnification is inevitably the maximum or minimum magnification that can be set, but it is not necessarily limited to only the maximum and minimum magnifications. Needless to say, similar effects can be obtained even at close magnifications. Therefore, the closest magnification in the present invention does not mean only a single magnification, but also includes a magnification (for example, an error range) substantially equal to the magnification.

  Furthermore, since the observable magnification of each observation means changes depending on the image observation conditions of each observation means, it is more preferable to change the overlap of magnification ranges accordingly. For example, with the electron beam imaging means 11, the lower the acceleration voltage, the lower the magnification can be observed. In the electron beam imaging means 11, if the working distance between the electron lens and the sample is long, it becomes possible to observe up to a lower magnification. On the other hand, the optical system imaging means 12 can be changed so that the settable range of the optical magnification can be changed.

When the observation means is switched under the condition that the magnification ranges do not overlap, the magnification conversion means 111 calculates the other closest magnification and sets it as the magnification after switching. Alternatively, it is also possible to store the last magnification that was observed before switching the observation means and set the magnification as the magnification after switching.
(Mode selection means 110)

In this magnification observation apparatus, a plurality of observation modes can be selected by the mode selection means 110. Examples of the observation mode include a comparison mode and a synthesis mode. When the electron microscope image acquired by the electron beam imaging unit 11 and the optical image acquired by the optical system imaging unit 12 are comparatively observed or synthesized, the images acquired by the two observation units 10 are the same observation. An image in the field of view is desirable. It is also desirable to approximate the display magnification.
(Composite mode)

In the combining mode, a combined image obtained by combining the electron microscope image and the optical image is generated and displayed on the display unit 102. For example, two images of an electron microscope image EI as shown in FIG. 54 and an optical image OI as shown in FIG. 55 are overlapped, and a single image obtained by calculating information of each pixel as shown in FIG. Composite to image data. In particular, a high-definition color image can be obtained by combining the luminance information of the electron microscope image EI and the color information of the optical image OI into the color composite image GI. In addition, when there is a lens aberration such as distortion or a positional deviation between two images in each image before synthesis, it is preferable to perform distortion correction, positional deviation correction, and the like before the synthesis process.
(Image composition means 116)

  Such image composition is performed by image composition means 116 shown in FIG. By synthesizing a color image by the image synthesizing unit 116 and displaying it on the display unit 2, the relationship between the form of the sample surface and the color becomes clear, and the recognition of the image is remarkably improved. Further, when various measurements are performed on the image displayed on the display means 2, the convenience is improved by using such a color image.

  As a method for generating a composite image, for example, a method of combining color information obtained from an optical image and luminance information obtained from an electron microscope image for each pixel of each coordinate can be mentioned. Alternatively, it is possible to use a method of extracting contour information of an image from an electron microscope image, superimposing optical images, extracting a representative color in the contour from the optical image, and filling a range in the contour with the representative color. This method cannot reproduce the color faithfully microscopically, but if the observation object does not completely match due to errors in the two original images, the color can be synthesized without protruding from the outline of the observation object.

  Also, a color image can be synthesized by a method in which a user manually or automatically colors an image based on an optical image on an electron microscope image that is a grayscale image as a reference. In this case, the color information of the part on the optical image corresponding to the part to be colored in the electron microscope image is obtained and colored in this color. In addition, when the user manually designates, for example, a position including a color in a dropper shape on the optical image can be designated to obtain the color information.

  As the image composition method, various methods existing or developed in the future can be used. For example, as described in Patent Document 3, an image synthesizing unit separates an electron microscope image into a contrast information image and a brightness information image, extracts only the contrast information image, and further converts the color optical image into a contrast information image. It is possible to extract only the color information image by separating into color information images, and to synthesize an electron microscope image composed of the extracted contrast information image and an optical image composed of the color information image. Alternatively, the method published on page 153 of the 52nd Annual Meeting of the Electron Microscopy Society of Japan can be used.

  In image synthesis, it is desirable to set the magnification of the electron microscope image and the magnification of two (or more) optical images to be the same. In this case, since the maximum magnification of the optical imaging unit 12 is generally lower than the maximum magnification of the electron beam imaging unit 11, the magnification range in which the composite image can be obtained is limited to the optical magnification range. However, image composition can be used even if the magnification is not necessarily the same. For example, by magnifying the optical image virtually at a high magnification by digital zoom or the like, or reducing the electron microscope image to the magnification of the optical image, both magnifications can be made substantially equal. In this way, from the viewpoint of adding color information to an electron microscope image, any optical image having such a clear degree that color information of a corresponding part on the electron microscope image can be acquired can be used. Of course, the closer the display size, the better for creating a clearer and higher-definition composite image, which is preferable.

  Here, the optical image is not limited to an image captured at the same time as the microscope image, and an image file of an optical image acquired in advance at different timings can be read and used for the coloring process.

The file formats of the comparison mode and the synthesis mode are the bitmap format, jpg, etc. for both the optical image file acquired by the optical system imaging means 12, the electron microscope image file acquired by the electron beam imaging means, and the image file after synthesis. A general-purpose image file format can be suitably used.
(Comparison mode)

  On the other hand, the comparison mode is an observation mode for comparative observation, and the display means 2 displays the electron microscope image and the optical image simultaneously or by switching. Therefore, the display unit 102 of the display unit 2 may be divided into two screens, and an electron microscope image display area 117 and an optical image display area 118 may be provided. FIG. 57 shows a display example of the display means 2. In this figure, the display means 2 is divided into left and right parts, an optical image is displayed on the left side, and an electron microscope image is displayed on the right side. In the upper left of each image, a unique magnification according to each criterion is displayed.

  In the present embodiment, an apparatus having two observation means, that is, an electron beam imaging means 11 such as an SEM and an optical imaging means 12 such as a digital microscope, it is easy to observe the same visual field range with both observation means. The magnification is defined so that both observation means have the same magnification and the same visual field range. For example, the display unit 2 displays a conversion magnification converted to the magnification of the other observation unit so that the user can set the magnification when the observation image of one observation unit is captured or stored by the other observation unit. . Alternatively, the observation means may be controlled to automatically set the magnification of the other observation means to the same reference magnification. Note that the unification of magnifications may be performed in accordance with any one of the observation means, or a magnification newly defined based on a different standard may be used.

  Next, the flow of operations for acquiring images in the same visual field range from the same position and the same inclination angle by the electron beam imaging means 11 and the optical system imaging means 12 will be described. First, in the optical system imaging means 12, an observation visual field range is set with an optical zoom lens. Specifically, the user adjusts the optical magnification by rotating the zoom ring 113 which is an optical zoom magnification adjusting mechanism mounted on the optical zoom lens. Next, an optical image is picked up by the optical imaging means 12.

  On the other hand, the optical magnification reading means 112 reads the rotational position of the zoom ring 113 of the optical zoom lens. By sending the read rotation position to the magnification conversion unit 111, the corresponding optical magnification is calculated by the magnification conversion unit 111.

  Here, the imaging unit is switched from the optical system imaging unit 12 to the electron beam imaging unit 11. Specifically, the rotating lens 30 moves the electron lens barrel of the electron beam imaging means 11 to the position of the optical zoom lens barrel of the optical imaging means 12. Further, the display switching means 36 is operated as necessary to switch the display contents and the operation system.

  Next, in an example in which the magnification observation apparatus internally recognizes the magnification of one observation means and automatically controls the magnification of the other observation means, the electron microscope magnification adjustment means 68 is an electron beam deflection scanning means control unit. The amount of deflection sent to 55 is automatically calculated. Further, the same visual field range as that of the optical imaging unit 12 is automatically observed with the electron lens barrel.

  On the other hand, a case where the user himself / herself sets the magnification of the other observation means by looking at the magnification of one observation means displayed on the display means 2 such as not including an optical magnification reading means will be described. First, the magnification of the optical system imaging unit 12 displayed on the display unit 2 is confirmed. Then, by looking at the displayed magnification, the electron microscope magnification adjusting means 68 sets the electron microscope magnification. The electron microscope magnification adjusting unit 68 calculates the deflection amount to be sent to the electron beam deflection scanning unit control unit 55. Thereby, the same visual field range as that of the optical imaging unit 12 can be observed by the electron beam imaging unit 11.

  As described above, an optical image and an electron microscope image having the same display size can be acquired. Note that in the above example, the electron microscope image is captured after the optical image is captured first. This is because the optical imaging unit 12 can obtain a color image, but since the maximum magnification is generally lower than that of the electron beam imaging unit 11, the observation field of view is first determined at a low magnification, and then the electron beam imaging unit 11 with a higher magnification is used. This is for switching to acquire an enlarged image. However, the order of use of the observation means is not limited to this, and it goes without saying that the present invention can also be used in a procedure for acquiring an electron microscope image first and then acquiring an optical image later. Next, an example of such a procedure will be described.

  First, an observation visual field range is set with an electron lens barrel. Specifically, the magnification is set by the electron microscope magnification adjusting means 68 and an electron microscope image is taken. On the other hand, the electron microscope magnification reading means calculates the electron microscope magnification of the captured electron microscope image.

  Next, the observation image is switched from the electron beam imaging unit 11 to the optical system imaging unit 12. Specifically, the optical zoom lens is moved by the rotating means 30 to the position of the electronic lens barrel.

  Here, when the magnification observation apparatus recognizes the magnification of one observation means internally and automatically controls the magnification of the other observation means, the magnification conversion means 111 of the controller 1 has the same display size. The conversion magnification of the optical image is calculated. For example, when the optical system imaging unit 12 includes an electric optical magnification reading unit 112, a rotation signal to be sent to the optical magnification adjustment unit 95 is calculated. Accordingly, the same visual field range as that of the electron beam imaging unit 11 can be observed by the optical imaging unit 12.

  On the other hand, in the example in which the user himself / herself sets the magnification of the other observation means by looking at the magnification of one observation means displayed on the display means 2, the electron microscope magnification displayed on the display means 2 is confirmed. To do. Next, the magnification of the optical zoom lens is set by the zoom ring 113 so as to obtain the displayed magnification. Further, the same visual field range as that of the optical imaging means 12 is observed with the electron lens barrel.

Note that only one of the optical magnification and the electron microscope magnification displayed on the display means may be displayed, or both magnifications may be displayed. In addition to always displaying these magnifications, they may be displayed only at a necessary timing such as when an image is taken or when the magnification is changed.
(Real time observation)

  Furthermore, this magnified observation device can easily acquire an image in real time by the observation means, and can perform real-time observation (also referred to as a live image or a moving image) in which the images displayed on the display means 2 are sequentially updated. It is possible to switch between imaging (also referred to as a still image) for capturing a fine image and displaying the obtained high-definition image.

The magnifying observation apparatus simply acquires an image in real time by the observation unit, and sequentially updates the image displayed on the display unit 2. In this state, the display content of the display means 2 changes according to changes in the field of view and image observation conditions, and is therefore referred to as moving image display for convenience. When the user picks up a high-definition image by adjusting to a desired field of view and image observation conditions, the obtained high-definition image is displayed on the display means 2. In this state, the display content of the display means 2 is a still image display that is not updated. The moving image display and the still image display can be switched as appropriate.
(Simple image)

In addition, when sequentially updating an image displayed on the display means in real-time observation, a simple image that is simply captured is acquired and displayed in order to shorten the time required for image acquisition. In order to obtain a simple image, for example, the frame rate at the time of imaging can be increased. Usually, in order to draw a high-definition image by the electron beam imaging means 11, it takes 30 seconds to 1 minute per image. Furthermore, since one image has a poor S / N ratio, at the time of normal imaging, 10 images or more are acquired at a frame rate of about 1/4 second per image, and the average is displayed. Therefore, it takes 2 seconds or more to obtain one image. A detailed observation image for printing may take 30 seconds or more. Therefore, in the present embodiment, the frame rate is increased by processing such as reducing the number of averages to 8 or 4, limiting the scanning range of the electron beam with respect to the sample, or thinning the scanning. Thus, the time until image acquisition is shortened.
(Status display means 121)

  Further, on the display unit 2, a state display unit 121 for distinguishing between the moving image display and the still image display may be provided. For example, when switching from moving image display to still image display, the user can easily visually distinguish whether the current state is moving image display or still image display by blinking the magnification. As shown in FIG. 58, “moving image”, “still image”, etc. may be displayed in text display. With this method, even a novice user who is not familiar with the operation of the magnification observation apparatus can determine the state without confusion.

  In addition, regardless of whether a high-definition image is captured, an image acquired by the currently selected observation unit can be displayed as a moving image, and a non-selected observation unit can be displayed as a still image. As an image displayed as a still image, an image acquired when the observation unit is turned off or switched, that is, an image acquired last by the observation unit or the like can be held and displayed in a memory. This configuration is suitable when a plurality of observation means cannot be used simultaneously and only one of the selected observation means can be operated. In particular, when displaying images acquired by a plurality of observation means simultaneously on one screen, the image displayed as a moving image is currently selected, and the image displayed as a still image is currently unselected, Can be grasped. For example, in the example of FIG. 57, the optical image displayed on the left side of the display unit 2 is displayed as a moving image, and the electron microscope image displayed on the right side is displayed as a still image. For this reason, it is possible to quickly grasp which observation means is currently operable.

In addition, you may display the image of both an optical system imaging means and an electron beam imaging means simultaneously as a moving image. In this case, when the magnification of either the optical system imaging unit or the electron beam imaging unit is changed, the magnification of the other electron beam imaging unit or the optical system imaging unit is changed in conjunction with the change in the magnification. You can also.
(Non-selection display means 122)

  As for the non-selection observation unit, a non-selection display unit 122 that indicates that the image displayed on the display unit 2 cannot be selected may be provided. For example, an image relating to the non-selected observation means is grayed out on the display means 2 or is displayed with shading, an icon or a mark such as a key is displayed, and the like is displayed to the user. Can be shown visually. Such non-selection display is automatically canceled by switching the observation means to the selected state. Thereby, in the aspect which can operate only any one observation means, since it can notify that a user is not confused by not being able to operate the image regarding a non-selection observation means, operativity improves.

In addition, when an image is captured by one observation unit and then switched to the other observation unit, the image captured by the original observation unit may be continuously displayed as a still image, or the display may be turned off. In the present embodiment, the screen of the display means 2 is divided into two, and when one is under observation (moving image), the other image is configured to display a still image at the time when the observation means is switched. Yes. Thereby, the observation means can be switched to reduce the load of image data processing and the like and to operate efficiently. However, it goes without saying that both images may be continuously displayed as moving images.
(Conversion magnification display means 123)

On the display means 2, the magnification of the currently displayed image is displayed. In the moving image display, the real-time magnification of the image currently displayed is displayed, and in the still image display, the magnification of the still image being displayed is displayed. Further, the converted magnification display means 123 can display a magnification converted into a magnification when an image is acquired by an observation means different from the observation means that acquired the image, in accordance with the magnification determination standard of the image being displayed. Further, the magnification may be converted according to the magnification determination standard of the other observation means, or the magnification may be determined using another standard. That is, images acquired by different observation means are displayed at a uniform magnification. The conversion magnification display means 123 can also display the specific magnification and the conversion magnification together. Further, when one observation unit cannot be set as the conversion magnification, the conversion magnification display unit 123 can display a magnification closest to the conversion magnification among the settable magnifications.
(Schedule magnification display means 124)

  Further, in addition to the magnification display of the image currently being displayed, planned magnification display means 124 for displaying a magnification to be applied in the future may be provided. For example, in comparative observation, it is necessary to acquire images having the same display size by different observation means. For this reason, on the display means 2, the target magnification for obtaining the image of the other observation means manually or automatically at the same conversion magnification as the magnification set for one image is set as the scheduled magnification. To display. This example will be described with reference to FIG.

In this figure, as in FIG. 57, the display means 2 is divided into left and right parts, an optical image is displayed as a moving image in the left optical image display region 118, and an electron microscope image is displayed as a still image in the right electron microscope image display region 117. Are displayed together with their own magnifications. In the example of FIG. 58, the planned magnification display means 124 is further added to the electron microscope image that is a still image. In other words, the magnification of the optical image displayed as a moving image (800 in FIG. 58) and the same conversion magnification (800) are set as the planned magnification and displayed on the planned magnification display means 124 provided at the upper right of the electron microscope image display area 117. is doing. After switching the observation unit 10 from the optical system imaging unit 12 to the electron beam imaging unit 11, the user sets the imaging condition of the electron microscope image and performs imaging so that the planned magnification is obtained. Alternatively, as described later, the imaging conditions can be automatically set, and further, imaging, display, storage, and the like can be automatically automated.
(Magnification determination means 119)

Furthermore, the magnification observation apparatus can include a magnification determination unit 119 that determines whether the optical system imaging unit 12 and the electron beam imaging unit 11 can be set to the same conversion magnification. The magnification determination unit 119 is realized by the magnification conversion unit 111, for example. In the present embodiment, the MPU constituting the magnification conversion unit 111 also functions as the magnification determination unit 119. For example, when the optical magnification range that can be adjusted by the optical magnification adjusting means 95 and the electron microscope magnification range that can be adjusted by the electron microscope magnification adjusting means 68 are overlapped in the conversion magnification, they can be displayed in the same display size. This is advantageous for comparative observation. In this case, the magnification determination means 119 determines whether the other observation means can be set with the conversion magnification to the magnification set for the currently observed image in the moving image display, and the determination result is notified by the determination notification means 125. To do.
(Judgment notification means 125)

  For example, when setting is possible with the other observation means, characters, symbols, etc. such as “OK” and “◯” are displayed in the display area of the other observation means, or the planned magnification display means 124 is shown in FIG. The frame is displayed with a thick line, the double frame, highlight, blinking display, etc. are used alone or in combination, or the magnification is displayed in blue in the display area of one movie, or the magnification background is blue Can be colored. As a result, the user can easily grasp that the observation with the same display size is possible, and thus the setting operation or the like can be advanced so that the observation with the magnification can be performed after switching the observation means.

Further, the determination notifying means 125 indicates that the setting cannot be made when it is determined that the magnification of the other observation means cannot be set to the conversion magnification having the same display size during observation by one observation means. A warning function to display can also be provided. Specifically, when the determination result by the magnification determination unit 119 indicates that the magnification cannot be set, the conversion magnification display unit 123 is displayed in red in the display area of the other observation unit, or “×” Characters and symbols such as “−” and “magnification cannot be set” are displayed, a warning sound is generated, the display area itself is displayed in grayout or shaded, and selection is impossible. In this way, even if the user changes the magnification, even if the overlapping range of the optical microscope magnification range and the electron microscope magnification range is deviated, it is impossible to observe with the same display size. Since it can be recognized, it is possible to take measures such as changing to another magnification so as to obtain a settable determination result. As described above, the determination notification unit 125 can appropriately use various decoration methods that can be distinguished from other displays according to the determination result of the magnification determination unit 119. Further, it is more preferable to use it together with the gauge-shaped magnification range display means 126 shown in FIG. 53 described above, since it is possible to visually grasp where the current magnification is with respect to the overlapping range.
(Guidance means 120)

  Furthermore, when it is determined that it is impossible to set the other observation means to the conversion magnification, a guidance means 120 that prompts the user to change to a settable magnification can be provided. For example, using a message display or voice guidance, the user is prompted to change the magnification to a magnification that can be set by both observation means. In addition, the contents to be guided can be instructed up to operations and parameter settings necessary for setting the magnification in addition to simply displaying the magnification. This method is particularly effective for a novice user who is unfamiliar with the operation for setting the magnification.

  In addition, when it is determined by the magnification determination unit 119 that the magnification cannot be set, a magnification closest to the conversion magnification among the settable magnifications can be displayed on the conversion magnification display unit 123. In this case, the conversion magnification display unit 123 displays the conversion magnification as it is when it is determined that it can be set, and displays the closest magnification that can be set when it is determined that it cannot be set. Furthermore, it is configured not only to simply display the magnification, but also to set the magnification adjustment means of the observation means to the conversion magnification displayed by the conversion magnification display means 123, or to automatically acquire, save, etc. the image. Also good. For example, magnification setting is executed using this as a trigger at the timing of switching the observation means. By such automation, it is possible to realize an easy-to-use magnifying observation apparatus that saves the user's setting work during comparative observation and image synthesis.

  In the above example, the conversion magnification display means displays the conversion magnification on the display means. However, the conversion magnification display can be switched between ON / OFF, that is, a display state and a non-display state. Even when the conversion magnification is not displayed, it can be automatically displayed as the closest magnification that can be set.

  The planned magnification display means 124 always displays a magnification that is applied or should be applied when the observation means is switched. In the example of FIG. 58, the planned magnification display means 124 is provided only in the display area where still images are displayed. . In this case, the same magnification as the conversion magnification display means is displayed on the scheduled magnification display means.

It is preferable to use the standard of the observation means used previously to determine which magnification standard to match. In general, as described above, in many cases, first, a target is set from a wide field of view using an optical image, and fine information is obtained with an electron microscope image. For this reason, by uniformly displaying the magnification according to the reference of the optical image, the user can acquire an image of the same display size with a unified magnification display without any confusion. Of course, it goes without saying that it is possible to use the standard of the observation means designated by the user or other standards.
(Timing when the judgment notification means 125 issues a warning)

  Further, the timing at which the determination notification unit 125 issues a warning or confirmation to the user is not limited to being performed at all times during observation, that is, when the image magnification is out of the overlapping range, and can also be issued at a necessary timing.

For example, if you change the magnification during observation and are out of the overlapping range, not only immediately notify, but also warn you with the meaning of confirmation only in important situations such as when acquiring or saving images Can be configured. Alternatively, the timing may be changed when the observation unit is switched or when the magnification is set by the magnification adjustment unit. Moreover, it is not restricted to any one timing, The determination notification means 125 may be configured to issue a notification at a plurality of timings.
(Content of warning by judgment notification means 125)

  Further, as an example of the warning issued by the determination notification means 125, for example, the magnification is out of the overlapping range, so that the other observation means cannot be observed with the same conversion magnification, or the current magnification is Displaying a dialog that prompts the user to decide whether to continue or cancel the process, although the overlap magnification is not satisfied. Alternatively, the currently set magnification is out of the overlapping range, but the magnification when switching to the other observation means is set to (A) the closest possible magnification, or (B) the previous time A dialog prompting selection of whether to use the magnification set in the observation of (C) or to cancel the processing may be displayed. Alternatively, although the current magnification is out of the overlapping range, the magnification at the time of switching to the other observation means is set to (A) the closest settable magnification, or (B) the processing is stopped, A dialog for selecting may be displayed. Furthermore, although the current magnification is out of the overlapping range, it is confirmed whether the magnification when switching to the other observation means is set to (A) the previous observation magnification or (B) the processing is stopped. A dialog to be selected can also be displayed.

  On the other hand, as a method of giving such a warning, for example, a dialog screen is displayed on a magnification observation apparatus operation program that is installed in the computer of FIG. A method for prompting, a method in which a dedicated message area or comment area is provided in advance as the determination notification means 125 on the program displayed on the display means 2, and a message corresponding to this part is displayed and notified. Is available.

  Further, even when the magnification under observation is within the overlapping range as a result of the user changing the magnification according to the above notification, the determination notification means 125 can notify the fact. As the notification timing, for example, the notification is promptly made when the magnification is switched from outside the overlapping range to within the range. Further, as described above, the notification may be made at the timing such as when one image is captured, stored, or when the observation means is switched. As a notification method, for example, the format of the conversion magnification display means 123 is changed when the magnification is within the overlapping range. Specifically, the magnification display color or background color is changed from red to blue, or shading or grayout is canceled. Alternatively, the shooting button and the save button on the program are returned to an active state in which an operation such as selection or pressing can be performed by canceling the selection prohibited state or grayout. Alternatively, a message indicating that it is possible to capture images at the same magnification within the overlapping range is displayed in a dialog or a dedicated comment area. In this way, the determination notifying unit 125 can notify the user that the image has been switched to a state where imaging with the same display size is possible, so that the user can quickly grasp whether comparative observation is possible. An excellent operating environment can be obtained.

  As described above, the magnification observation apparatus is acquired by the sample chamber that can be decompressed in the internal space, the electron beam imaging unit for acquiring the electron microscope image in the sample chamber, and the electron beam imaging unit as the first observation unit. Electron microscope magnification adjusting means for adjusting the electron microscope magnification of the electron microscope image, optical system imaging means capable of acquiring an optical image in the sample chamber, and optical acquired by the optical system imaging means as the second observation means The magnification of the image, the optical magnification adjustment means for adjusting the optical magnification determined by a different standard from the electron microscope magnification, the electron microscope image obtained by the electron beam imaging means, and the optical system imaging means Display means for switching or simultaneously displaying the optical image, and as an observation mode, a comparison mode in which the electron microscope image and the optical image can be compared and observed with the display means, and an electron microscope image A mode selection unit 110 capable of selecting a synthesis mode capable of displaying a synthesized image obtained by synthesizing the academic image, and a magnification of the image acquired by either the electron beam imaging unit or the optical system imaging unit; And a magnification conversion means 111 for converting a magnification for acquiring an image having the same display size by the other observation means into a magnification based on the reference of the other observation means, in comparison mode or composition mode, The image acquired by either the electron beam imaging means or the optical imaging means is displayed on the display means, and the magnification for acquiring the image with the other observation means having the same size as the image is converted into a magnification. If the conversion is performed by the means 111 and the conversion magnification or the conversion magnification cannot be set, the display means can display the magnification closest to the conversion magnification among the settable magnifications. As a result, images can be displayed at a uniform magnification regardless of the observation means used, so that images with the same display size can be acquired for comparative observations that compare images with the same display size and for a composite mode that combines images. Easy to do.

In the comparison mode, it is preferable to match the magnifications of the electron microscope image and the optical image to the same. For this reason, the magnification of the image acquired by either the electron beam imaging unit or the optical system imaging unit by the magnification conversion unit. Is converted into a magnification when acquired by the other observation means. However, the contrast observation does not necessarily have to be completely matched to the same magnification and field of view, and is appropriately selected by the user according to the purpose and purpose of observation. Similarly, in the synthesis mode, it is not always essential to match the magnifications of the electron microscope image and the optical image, and image synthesis is possible even at different magnifications. Especially when the electron microscope image has a high magnification and the optical image has a low magnification, the color information of the corresponding region is extracted from the optical image with a wide field of view to the luminance information and contour information of the electron microscope image with a narrow field of view, When combined by enlarging or stretching, the color information is slightly blurred, but it can be used practically without any problem. As described above, even if the image quality to be synthesized does not match and some image quality degradation occurs, it is possible to perform image synthesis at a level that can be used without any problem. For this reason, not only determines whether or not the optical system imaging means can be set to the conversion magnification corresponding to the magnification of the electron microscope image converted by the magnification conversion means, but also the magnification determination means performs synthesis based on the conversion magnification. It can also be determined whether or not the optical imaging means can be set to a predetermined range of magnification. Here, the magnification within a predetermined range that can be combined depends on the accuracy of the required composite image. For example, if the difference in magnification is 20 times or less, a composite image having no problem in practice can be obtained. In contrast to the above, it is theoretically possible to synthesize a high-magnification optical image and a low-magnification electron microscope image. However, in this case, the quality of the synthesized image is reduced, and as described above. It is preferable to apply image synthesis between images whose magnifications do not match when the electron microscope image has a higher magnification than the optical image.
(Measurement function)

  Further, the magnifying observation apparatus has a measurement function capable of measuring a distance between two designated points, an area in a designated region, and the like on an image displayed on the display unit 2. In the measurement function, either an electron microscope image, an optical image, or a composite image is displayed on the display unit 2, and an arbitrary point on the image is instructed by a pointing device such as a mouse to perform measurement. For the point specification, the snap function that uses the position specified by the user as a measurement point as it is, and detects edge information close to the specified position from the image, and uses the edge position as the measurement point can be suitably used. .

  Any image can be used for the measurement function, but an electron microscope image or a composite image is preferably used. The optical image has color information and luminance information for each pixel, but the boundary line between the color information and luminance information tends to be unclear. In particular, when measuring at a high magnification, the resolution tends to be insufficient in an optical image, and the contour and edge of the sample that is the object to be measured become blurred. This is because it becomes difficult. On the other hand, the electron microscope image has luminance information for each pixel, but does not have color information. On the other hand, the boundary line of luminance information is clear, and the edge of the structure can be observed relatively clearly even at high magnification. However, there is a problem that it is difficult to intuitively recognize the measurement object to be obtained because it is not a natural appearance with color information but a black and white contrast image depending on the electron generation efficiency of the sample. Therefore, a composite image having high definition and color information is most easily used.

  For example, the combined image combines the color information of the optical image and the luminance information of the electron microscope image. However, since the two original images before composition have their own coordinate systems, the reference position and reference length as shown in FIG. 55 do not exactly match. Even if these are corrected by some method, the error cannot be completely eliminated. For this reason, the two original images do not have exactly the same magnification and observation position, and both the magnification and the observation position include some errors. When measurement is performed using such a composite image, there is a problem in that measurement accuracy decreases due to errors in coordinate positions and magnification. For example, when measuring the distance between two points, an error occurs when designating each position. Therefore, the error is accumulated in the measurement designating two points.

  In contrast, in the present embodiment, when measurement is performed from a composite image, measurement is performed using position information of an electron microscope image that is an original image. That is, to accurately specify the boundary line of the measurement object by eliminating errors caused by synthesis such as the positional information of the optical image that is the original image, the magnification that occurs during image synthesis, and the cumulative error of the observation position Is possible.

  FIG. 59 shows a block diagram of a magnification observation apparatus having a measurement function for such a composite image. The magnification observation apparatus shown in this figure includes an electron beam imaging unit 11 for acquiring an electron microscope image, an optical system imaging unit 12 for acquiring an optical image, an operation unit 105C, a controller 1, and a display unit 2. With.

  The operation means 105C includes an electron microscope magnification adjustment means 68 for setting the display magnification of the electron microscope image, an optical magnification adjustment means 95 for setting the display magnification of the optical image, and a composite image displayed on the display means. It functions as a measurement point designating unit 130 for designating a measurement point on the screen of the display unit.

  The controller 1 also includes a first storage unit 131 that holds an electron microscope image, a second storage unit 132 that holds an optical image, a third storage unit 133 that stores position information related to a composite image, and a display switching unit 36 that switches between image displays. , An image composition unit 116 for generating a composite image, a magnification conversion unit 111, a mode selection unit 110, a magnification determination unit 119, a guidance unit 120, and a measurement unit 134. The display switching unit 36 switches the image display on the display unit 2 from the display by the optical imaging unit 12 to the display by the electron beam imaging unit 11. Such a controller 1 can be composed of a computer, a CPU, an LSI, or the like. However, you may comprise so that each function may be implement | achieved by an individual member. For example, an observation condition setting unit and an optical magnification reading unit can be provided separately from the operation unit. Further, the display means functions as the conversion magnification display means 123, the magnification range display means 126, the scheduled magnification display means 124, the determination notification means 125, and the status display means 121 as described above.

  The operation unit 105C functions as an observation condition setting unit for setting the image observation condition of the electron beam imaging unit 11. The user operates the observation condition setting unit to set the image observation condition when the electron beam imaging unit 11 captures an electron microscope image. In the case of an electron microscope, the image observation conditions include an acceleration voltage, a spot size (diameter of incident electron beam bundle), a detector type, a degree of vacuum, and the like. The conditions according to the electron beam imaging means 11 to be used are the observation conditions. Set by setting means. The image observation conditions set by the observation condition setting means are sent to the electron beam imaging means via the controller 1. Similarly, the imaging conditions of the optical system imaging means are also set. The controller 1 acquires an electron microscope image from the electron beam imaging unit 11 and an optical image from the optical system imaging unit 12, and holds them in the first storage unit 131 and the second storage unit 132, respectively. When the synthesis mode is selected by the mode selection unit 110, the image synthesis unit 116, based on the information stored in the first storage unit 131 and the second storage unit 132, the position information of the electron microscope image and the optical image. A synthesized image is generated by combining the color information and displayed on the display means. Further, the third storage unit 133 holds the position information of the synthesized image or the correspondence information indicating the correspondence relationship between the position information of the synthesized image and the position information of the electron microscope image before the synthesis.

  In order to perform measurement based on the composite image in this state, the user first operates the measurement point specifying unit 130 to specify the measurement point on the screen for the composite image displayed on the display unit. In addition, the measuring unit 134 performs designated measurement. For example, a distance between two points, an altitude difference, an inclination angle, or an area calculation of a designated closed region. Here, in the measurement, the positional information of the electron microscope image that is the source of the composite image is used. For this reason, the first storage means 131 stores the position information of the electron microscope image when the electron microscope image is held in advance. The position information is information indicating the structure of the sample to be observed, such as a coordinate position and a contour of the shape. By using this information, it is possible to acquire an accurate position corresponding to the measurement point designated on the image.

When the shape of the composite image exactly matches the original electron microscope image, the position information on the composite image can be used for measurement as it is. On the other hand, if the shape of the composite image does not exactly match the original electron microscope image, the coordinate position on the electron microscope image corresponding to the coordinate position on the composite image is acquired with reference to the third storage unit 133. Then, measurement using the electron microscope image coordinates is performed. As a result, even when there is a deviation in shape or coordinate position due to image synthesis with an optical image, highly accurate measurement is performed by converting the coordinate position on an electron microscope image having more accurate coordinate position information. It becomes possible.
(Operating means 105C)

  Further, both the optical system imaging unit 12 and the electron beam imaging unit 11 are controlled by a common operation unit 105C, and information necessary for measuring images obtained by both observation units, for example, magnification, the optical axis of the observation unit, and the like. By collectively processing information such as the positional relationship of the sample by the control means, the measurement work of the color composite image can be greatly improved in convenience. For example, the common operation unit 105C can be operated by switching the optical imaging unit 12 and the electron beam imaging unit 11 with a single controller 1 by sharing the external controller 1. In addition, a configuration in which the optical system imaging unit 12 and the electron beam imaging unit 11 can be switched and operated by an operation program for a magnification observation apparatus installed in a computer is also preferable. In addition, by switching the observation means as described above, both observation means can be easily switched and moved so that the same position of the sample can be observed. The advantage of simpler operation is also obtained.

  In the above example, the configuration of the sample chamber provided with the rotational movement mechanism as shown in FIGS. 26 and 60 has been described. However, the present invention is not limited to the above configuration, and a plurality of observation means are provided in one sample chamber. Various configurations with can be used. Modification examples of the configuration of the sample chamber 21 having the optical system imaging unit 12 and the electron beam imaging unit 11 are shown in FIGS. In each example, the optical system imaging unit 12 and the electron beam imaging unit 11 are arranged so that each can image the same sample SA.

  In the example of FIG. 61, the observation means 10 is switched by a revolving revolver. In the example of FIG. 62, the observation means 10 is switched by parallel movement. Moreover, although the above is a structure which fixes the sample stand 33 and moves the observation means 10 side, it is good also as a structure which moves not only this but the observation means 10 side. For example, FIG. 63 shows a configuration for moving the sample stage 33 in parallel, and FIG. 64 shows a configuration for tilting the sample stage 33. Furthermore, in the example of FIG. 65, the optical axis of the observation means 10 is selected by a half mirror. As described above, the present embodiment can be appropriately used in various forms including the plurality of observation units 10.

  In the example of FIG. 65, the optical axes of the optical system imaging unit 12 and the electron beam imaging unit 11 are arranged coaxially, FIG. 63 is arranged in parallel, and FIG. 64 is arranged in a V shape. In particular, in the configuration of FIG. 65, the optical axis of the optical imaging unit 12 and the optical axis of the electron beam imaging unit 11 are arranged so as to coincide with each other. Further, in this configuration, when the image signal of the optical system imaging unit 12 and the image signal of the electron beam imaging unit 11 are switched, it is not necessary to move the sample stage 33, so that switching can be performed quickly. Real-time observation and moving image observation can also be realized. In addition, since the optical system imaging unit 12 is installed in the sample chamber 21, the reduced pressure or vacuum state in the sample chamber 21 is maintained, so that a depressurization step is not required when the imaging system is switched by the display switching unit 36 or the like. And smooth switching can be realized. Such smooth switching of the imaging system realizes seamless display switching and can be an extremely convenient electron microscope. However, in the configuration of FIG. 65, in order to make the optical axes of the optical system imaging unit 12 and the electron beam imaging unit 11 coaxial, the optical axis of the optical system imaging unit 12 is placed on the optical axis of the electron beam imaging unit 11. There is a problem that it is necessary to arrange a mirror or the like for folding, and the configuration becomes complicated and expensive. Further, the complication of the apparatus due to the coaxial configuration reduces the degree of freedom in optical design of the optical imaging unit 12 and the electron beam imaging unit 11 and may affect the image performance.

On the other hand, in the configurations of FIGS. 62 to 64, such a mirror is unnecessary and can be realized at a relatively low cost. However, in the configuration of FIG. 63, it is necessary to move the sample stage 33 in parallel at the time of switching, to install the optical imaging means 12, etc., and it is necessary to make adjustments such as upper alignment that takes time, and obstructs real-time observation. Is done. Further, when the optical system imaging unit 12 is installed in the atmosphere, it is necessary to depressurize the sample chamber 21 in which the electron beam imaging unit 11 is arranged to a vacuum, which takes time and labor. On the other hand, in the configuration of FIG. 64, since one optical axis is inclined, it is necessary to incline the sample stage 33 from the horizontal plane in order to obtain the same field of view. Also in this case, adjustment such as alignment is necessary, and real-time observation is impossible. As described above, it is difficult to switch between the optical system imaging unit 12 and the electron beam imaging unit 11 in real time in either configuration of FIGS. In order to solve this, an optical image is acquired as data by the optical imaging unit 12 in advance, and then the sample SA is moved to a position where it can be observed by the electron beam imaging unit 11 so that an electron microscope image can be displayed. It can be considered. When the optical image is displayed on the display unit 2 in this state and the field of view is searched for, the display switching unit 36 can quickly switch to the electron beam imaging unit 11, so the optical image can be detected in real time without changing the hardware configuration. Switching to an electron microscope image can be realized. Therefore, in this configuration, a memory unit for holding the optical image acquired by the optical system imaging unit 12 is used. As the memory unit, a semiconductor memory such as a RAM can be used.
(Configuration example with 2 heads attached to 1 controller)

  Furthermore, in the above example, an example in which a plurality of observation units are provided in the same sample chamber 21 or sample stage 33 has been described. However, the present embodiment can also be applied to a magnification observation apparatus that observes different samples. For example, in the example of FIG. 66, the controller 1B that controls these is shared by the optical microscope 12B and the electron microscope 11B that are separately configured. Thereby, on the controller 1B side, the magnification display of the optical image and the electron microscope image displayed on the display means is converted into a uniform magnification and displayed, or the magnification of one image is changed to the conversion magnification and the other is converted into the other magnification. When the observation means is set or when the conversion magnification cannot be set, it is possible to set the magnification closest to the conversion magnification among the settable magnifications. In this case, different samples are observed: the sample SA4 placed on the sample stage 33D of the electron microscope 11B and the sample SA5 placed on the sample stage 33E of the optical microscope 12B. In the above example, two optical imaging means and electron beam imaging means are used as observation means, but it is needless to say that three or more observation means can be provided to be switchable.

  The magnifying observation apparatus and the magnifying observation method of the present invention use, for example, an electron beam or ion beam, which is a charged particle, to evaluate the characteristics of a semiconductor element, an electron beam appearance inspection apparatus and an electron beam length measuring apparatus used in a measurement process In a particle beam inspection apparatus or the like, the present invention can be suitably applied to a function of performing enlarged / reduced display of a captured observation image. In addition to SEM, as a lens for electron beam imaging means, it can be used for scanning probe microscopes (SPM) such as TEM, scanning tunneling microscope (STM) and atomic force microscope (AFM), laser microscope and X-ray microscope. It is.

1000 ... magnifying observation system 100 ... magnifying observation apparatus 1, 1B ... controller 2 ... display means 10, 10X ... observing means 11 ... electron beam imaging means 12 ... optical system imaging means 11B ... electron microscope 12B ... optical microscope 13 ... observation in sample room Means 14 ... Chamber unit 15 ... Decompression unit 16 ... Decompression unit operation panel 17 ... Indicator lamps 21, 21B, 21C, 21F ... Sample chamber 22 ... Base part 23 ... Fixing plates 24, 24D, 24E, 24F ... Body part 24x ... Vacuum Chamber 25 ... Suction port 26 ... Legs 27, 27B, 27C, 27E ... Lid 28 ... Closure plate 28x, 28y ... Lid 29 ... Lid opening / closing arm 30 ... Turning means 31 ... Cross roller bearings 32, 32x ... O-ring 33 33C, 33D, 33E, 33F, 33X, 33Y, 33y ... Sample stage 34 ... Sample stage drive means 35, 35B ... Handle 35b ... handle part 36 ... display switching means 37 ... microscope focus adjustment means 38 ... optical focus adjustment means 39 ... mount 40 ... electron microscope control part 40A ... electrostatic lens control part 40B ... electromagnetic lens control part 41 ... first Position 42 ... Second position 43, 43A, 43B ... Electron gun high voltage power supply 44, 44A, 44B ... Filament 45, 45A, 45B ... Wehnelt 46, 46A, 46B ... Anode 47, 47A, 47B ... Electron gun 49 ... Gun aligner 50 ... optical axis adjuster 51 ... focusing lens controller 52 ... focusing lenses 51A and 51B ... first lens controllers 52A and 52B ... first condenser lens 53 ... objective aperture 54 ... astigmatism corrector controllers 54A and 54B ... Two-lens control unit 55 ... Electron beam deflection scanning means control unit 55A ... Scanning electrode control unit 55B ... Scanning coil control units 56, 56A 56B ... Objective lens controller 57 ... Astigmatism correctors 57A, 57B ... Second condenser lens 58 ... Electron beam deflection scanning means 58A ... Scan electrode 58B ... Scanning coils 59, 59A, 59B ... Objective lens 60 ... Central processing unit 61, 61A, 61B ... secondary electron detector 62 ... backscattered electron detector 63 ... secondary electron detection amplification unit 64 ... backscattered electron detection amplification unit 65 ... A / D converter 66 ... A / D converter 67 ... image data Generation unit 68 ... Electron microscope magnification adjusting means 69 ... Printer 70 ... Exhaust system pump 72 ... Exhaust control unit 74 ... Horizontal plane moving mechanism 74X, 74X2 ... X-axis operation knob; 74Y, 74Y2 ... Y-axis operation knob; 74R, 74R2 ... R Axis operation knob 74RF ... R-axis operation means 75, 75F ... XY movement mechanism 76 ... R-axis rotation mechanism 77 ... R-axis maintenance mechanism 78, 78F ... XY substage 79 ... Distribution Mechanism 80 ... Height adjustment mechanism 80Z, 80Z2 ... Z-axis operation knob 91 ... CCD control circuit 92 ... Optical imaging device 93 ... Optical zoom lens 94 ... Objective lens 95 ... Optical magnification adjustment means 96 ... Illumination unit 97 ... Light source port 98 ... Optical lens group 99 ... Pixel shifting means 101 ... Information processing means 102 ... Display unit 103 ... Memory 104 ... Interface 105, 105B, 105C ... Operation means 106 ... Optical fiber 107 ... Light source 110 ... Mode selection means 111 ... Magnification conversion means 112 ... Optical magnification reading means 113 ... zoom ring 114 ... projecting electrode 115 ... magnification output electrode 116 ... image composition means 117 ... electron microscope image display area 118 ... optical image display area 119 ... magnification determination means 120 ... guidance means 121 ... state display means 122 ... Non-selection display means 123 ... Conversion magnification display means 124 Schedule magnification display means 125 ... Determination notification means 126 ... Magnification range display means 130 ... Measurement point designation means 131 ... First storage means 132 ... Second storage means 133 ... Third storage means 134 ... Measurement means 135 ... Tension springs 136, 136x ... Insertion groove 137 ... Tapered wall surface 138 ... Hinge part 138x ... Hinge part 139x ... Handle 140 ... Holding mechanism 142 ... Cover rotating shaft 143 ... Bearing recess 144 ... Inclined surface 145 ... Stopper 146 ... Coil spring 147 ... Tapered surface 151 ... Horizontal bulk Gear 152 ... Vertical bevel gear 153 ... First gear 153A ... First gear shaft 154 ... First idle gear 154A ... First idle gear shaft 154B ... Geneva pin 155 ... Second idle gear 155A ... Second idle gear shaft 156, 156F ... Lift plate 156A ... flat surface 156B ... inclined surface 156C ... first Flat surface 157, 157F ... Elevating shaft 158 ... Elevating cylinder 159 ... Sphere 160, 160F ... Elevating plate 161, 161F ... Elevating hole 162, 162F ... XY placement surface 163 ... Internal space 164 ... Inner ring plate 164B ... Arc-shaped surface 165 ... Geneva gear 165A ... Geneva gear shaft 165B ... Slot 165C ... Abutment surface 166 ... Bearing 167 ... Pressing wheel 168 ... Third idle gear 168A ... Third idle gear shaft 169 ... Fourth idle gear 170 ... Stage rotation gear 171 ... First reduction gear 172 ... Second reduction gear 173 ... Spring 174 ... Vertical movement operation section 175 ... Vertical movement mechanism 176 ... Rotation mechanism 177 ... Intermediate rotation section 178 ... Cam-like switching section 179 ... Seesaw section 220 ... Tilt lever 238 ... Tilt stopper 239 ... Stopper handle PU ... Power supply unit VP ... Pressure reduction pump CS ... Console HU ... High acceleration voltage unit ST ... Digital microscope stand SA, SA1-5, SAx ... Samples SE1, SE2 ... Secondary electrons EB, EB1, EB2 ... Electron beam PH ... Photo EI ... Electron microscope image OI ... Optical image GI ... Color composite image UJ ... Universal joint

Claims (12)

A magnifying observation device comprising a plurality of observation means,
The body part that constitutes the sample chamber that can be decompressed with the internal space hollow,
A lid capable of opening and closing the open end of the body so as to be freely opened and closed, and maintaining the sample chamber in an airtight state;
An electron beam imaging means for obtaining an electron microscope image in the sample chamber;
Rotation means for rotating the body part;
A sample stage installed in the sample chamber and having a sample mounting surface for mounting a sample to be observed;
An XY movement mechanism for linearly moving the sample stage in the XY direction;
An R-axis rotation mechanism for rotating the sample stage around an R axis perpendicular to the XY plane;
With
The R-axis rotating mechanism includes an R-axis maintaining mechanism that sets the R-axis, which is the center of rotation, to a predetermined position in the observation field of view by the electron beam imaging means, regardless of the position of the sample stage by the XY moving mechanism. Magnifying observation apparatus characterized by that. The magnification observation device according to claim 1,
The R-axis maintaining mechanism is in an unconnected state in which the connection with the sample stage is released while the sample stage is linearly moved by the XY moving mechanism.
A magnification observation apparatus configured to be connected to the sample stage when the sample stage is rotated by the R-axis maintaining mechanism. The magnification observation apparatus according to claim 2,
The XY moving mechanism is connected to the sample stage while linearly moving the sample stage,
A magnification observation apparatus characterized by being in a non-connected state with the sample stage while the sample stage is rotated. The magnification observation apparatus according to claim 2 or 3,
The R-axis rotation mechanism includes a rotation transmission shaft serving as a rotation center,
The magnification observation apparatus, wherein the R-axis maintaining mechanism is connected to the sample stage by the rotation transmission shaft. The magnification observation apparatus according to claim 4,
The rotation transmission shaft is
Extendable toward the back side, which is the opposite side of the sample mounting surface of the sample stage,
In the connected state, it protrudes toward the back side of the sample stage and supports it, making the sample stage rotatable,
A magnification observation apparatus that is a lifting shaft that descends away from the back side of the sample stage in the unconnected state. A magnification observation device according to any one of claims 1 to 5,
On the back side of the sample table,
An elevating hole for inserting an upper end of the elevating shaft, which is opened substantially at the center of the sample stage;
An XY placement surface for placing on the upper surface of the XY movement mechanism around the elevating hole;
A magnifying observation device characterized in that is formed. The magnification observation apparatus according to any one of claims 1 to 6,
The R-axis rotation mechanism is
A sample stage rotation mechanism for rotating the sample stage in the R-axis direction;
Rotating mechanism connecting means capable of switching between a connected state for connecting the sample stage and the sample stage rotating mechanism and a non-connected state for releasing the connection;
With
When the sample stage is moved in the XY direction by the XY movement mechanism, the rotation of the sample stage is rotated by connecting the sample stage and the sample stage rotation mechanism by the rotation mechanism connecting means. Ban
On the other hand, when the sample stage is rotated in the R-axis direction by the sample stage rotation mechanism, the sample stage and the sample stage rotation mechanism are connected by the rotation mechanism connecting means, so that the XY of the sample stage is set. A magnifying observation apparatus configured to prohibit movement in a direction. The magnification observation apparatus according to claim 7,
The rotating mechanism connecting means includes a vertical movement mechanism for moving up and down a lifting plate positioned on the back side of the sample mounting surface of the sample stage,
The sample table rotation mechanism includes a rotation mechanism for rotating the lifting plate in the R-axis direction in a state where the back surface of the sample table is pushed up by the lifting mechanism by the lifting plate. Magnifying observation device. The magnification observation apparatus according to claim 8, further comprising:
A common operation means for operating the vertical movement mechanism and the rotation mechanism;
A magnification observation apparatus configured to be able to operate the R-axis rotation of the sample stage by interlocking the vertical movement and rotation movement of the lifting plate by operation of the common operation means. The magnification observation apparatus according to claim 8, further comprising:
R-axis operating means for operating the rotation mechanism;
A vertical motion operating unit that is provided separately from the R-axis operating means and operates the vertical motion mechanism;
A magnifying observation device characterized by comprising: The magnification observation device according to claim 10,
By operating the vertical movement operation unit,
In the non-connection position where the lifting plate is lowered by the vertical movement mechanism, the connection state between the lifting plate and the sample table is released, and the sample by the rotation mechanism is operated even if the R-axis operation means is operated. Rotation of the stage is not made, while movement of the sample stage by the XY movement mechanism in the XY direction is allowed,
At the connecting position where the elevating plate is raised by the vertical movement mechanism, the sample base is pushed up by the elevating plate to be connected, and the R axis operating means is operated to rotate the sample base by the rotary mechanism. A magnifying observation apparatus characterized in that, while allowing rotation, movement of the sample stage in the XY direction by the XY movement mechanism is released. The magnification observation apparatus according to any one of claims 1 to 11, further comprising:
The magnification observation apparatus, wherein the R-axis maintaining mechanism has the R-axis positioned substantially at the center of the observation field.