JP2012002888A - Optical member - Google Patents

Optical member Download PDF

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JP2012002888A
JP2012002888A JP2010135677A JP2010135677A JP2012002888A JP 2012002888 A JP2012002888 A JP 2012002888A JP 2010135677 A JP2010135677 A JP 2010135677A JP 2010135677 A JP2010135677 A JP 2010135677A JP 2012002888 A JP2012002888 A JP 2012002888A
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lens
end side
cemented lens
holding member
cemented
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Tomohiko Yamahiro
知彦 山広
Toshiki Yasokawa
利樹 八十川
Takeshi Shirai
健 白井
Kenji Yoneyama
健司 米山
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Nikon Corp
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Nikon Corp
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Abstract

PROBLEM TO BE SOLVED: To provide an optical member that prevents cement used for a cemented lens from dissolving to deteriorate optical performance when forming an optical thin film by a wet type film formation method.SOLUTION: An optical member 1 includes: a cemented lens 5 composed by cementing two lenses; an optical thin film 15 formed on a lens surface 6a that is the outer surface side of a convex lens 6 located at one end of the cemented lens 5 by a wet type film formation method; and a holding member 10 that is attached so as to hold the cemented lens 5 by being joined with the periphery of a concave lens 7 located at the other end of the cemented lens 5 and is integrally used with the cemented lens 5. The holding member 10 is cylindrically formed so as to surround the periphery of the concave lens 7. A boundary 8 between the concave lens 7 and the convex lens 6 on the outer peripheral surface of the cemented lens 5 is exposed outside.

Description

本発明は、反射防止膜等の光学薄膜が塗布された光学部材に関する。   The present invention relates to an optical member coated with an optical thin film such as an antireflection film.

一般に、カメラレンズや顕微鏡対物レンズ等の光学系を構成する個々のレンズの表面には、光の反射を低減させるために反射防止膜がコーティング(塗布)されている。このような光学薄膜は、例えば、湿式成膜法を用いてレンズの表面に形成される。湿式成膜法では、コーティング液がレンズの曲面に追従して流れる性質を利用して光学薄膜を成膜できるため、比較的容易に均一な膜厚の光学薄膜を形成することができる。また、このような湿式成膜法の中でも、スピンコート法は、レンズに塗布したコーティング液を回転による遠心力で薄く均一に広げて成膜するため、より均一な膜厚の光学薄膜を形成することが可能である。   In general, the surface of each lens constituting an optical system such as a camera lens or a microscope objective lens is coated (applied) with an antireflection film in order to reduce light reflection. Such an optical thin film is formed on the surface of the lens using, for example, a wet film forming method. In the wet film formation method, an optical thin film can be formed using the property that the coating liquid flows following the curved surface of the lens, and therefore an optical thin film having a uniform film thickness can be formed relatively easily. Among these wet film forming methods, the spin coating method forms a thin and uniform optical thin film by spreading the coating solution applied to the lens thinly and uniformly by the centrifugal force of rotation. It is possible.

ところが、スピンコート法を用いて光学薄膜を形成する場合、レンズの形状によっては塗布したコーティング液が塗布面と反対の面(裏面)に回り込むことがあり、特にレンズを吸引チャックしていると、レンズ固定治具とレンズの隙間からコーティング液が吸い込まれてレンズの裏面を汚してしまう場合があった。そこで、レンズと、当該レンズを保持するように取り付けられて一体化された保持部材と、レンズおよび保持部材の表面に形成された光学薄膜を備えた光学部材が提案されている(例えば、特許文献1を参照)。このような光学部材によれば、レンズに保持部材が一体的に取り付けられているため、スピンコート法を用いて光学薄膜を形成する際、余分なコーティング液が回転によって保持部材の端部まで流れた後、周囲に飛び散るため、コーティング液がレンズの裏面に回り込んで汚れるのを防止することができる。   However, when an optical thin film is formed using the spin coating method, depending on the shape of the lens, the applied coating liquid may wrap around the surface opposite to the application surface (back surface), especially when the lens is suction chucked, In some cases, the coating liquid is sucked from the gap between the lens fixing jig and the lens, and the back surface of the lens is stained. Accordingly, an optical member including a lens, a holding member that is attached and integrated so as to hold the lens, and an optical thin film formed on the surface of the lens and the holding member has been proposed (for example, Patent Documents). 1). According to such an optical member, since the holding member is integrally attached to the lens, when forming the optical thin film using the spin coating method, an excess coating liquid flows to the end of the holding member by rotation. After that, the coating liquid scatters around, so that it is possible to prevent the coating liquid from flowing around the lens back surface and becoming dirty.

国際公開第2008/062817号パンフレットInternational Publication No. 2008/062817 Pamphlet

このような光学部材において接合レンズを使用した場合、コーティング液が接合レンズに用いられる接合剤を溶かす成分を含有することがあるため、湿式成膜法により光学薄膜を形成する際、接合レンズを構成する各レンズの境界部にコーティング液が硬化しないまま長時間にわたり接触すると、接合レンズに用いられている接合剤が溶解して光学性能が低下するおそれがあった。   When a cemented lens is used in such an optical member, the coating liquid may contain a component that dissolves the binder used in the cemented lens. Therefore, when an optical thin film is formed by a wet film formation method, the cemented lens is configured. If the coating solution is brought into contact with the boundary portion of each lens for a long time without being cured, the bonding agent used in the cemented lens may be dissolved to deteriorate the optical performance.

本発明は、このような問題に鑑みてなされたものであり、湿式成膜法により光学薄膜を形成する際、接合レンズに用いられている接合剤が溶解して光学性能が低下するのを防止した光学部材を提供することを目的とする。   The present invention has been made in view of such problems, and prevents the optical performance from being deteriorated due to the dissolution of the bonding agent used in the cemented lens when forming an optical thin film by a wet film forming method. An object of the present invention is to provide an optical member.

このような目的達成のため、第1の発明に係る光学部材は、複数のレンズを接合して構成された接合レンズと、前記接合レンズにおける一端に位置する一端側レンズの外面側のレンズ面に湿式成膜法により形成された光学薄膜と、前記接合レンズにおける他端に位置する他端側レンズの外周部と結合して前記接合レンズを保持するように取り付けられ、前記接合レンズと一体的に使用される保持部材とを備え、前記保持部材が前記他端側レンズの外周部を囲む筒状に形成され、前記接合レンズの外周面における前記他端側レンズと前記他端側レンズに隣接するレンズとの境界部が外部に露出している。   In order to achieve such an object, an optical member according to a first aspect of the present invention is provided on a lens surface on the outer surface side of a cemented lens configured by cementing a plurality of lenses and one end side lens located at one end of the cemented lens. An optical thin film formed by a wet film formation method and an outer peripheral portion of the other end side lens located at the other end of the cemented lens are attached so as to hold the cemented lens, and integrated with the cemented lens A holding member to be used, and the holding member is formed in a cylindrical shape surrounding the outer peripheral portion of the other end side lens, and is adjacent to the other end side lens and the other end side lens on the outer peripheral surface of the cemented lens. The boundary with the lens is exposed to the outside.

なお、上述の光学部材において、前記接合レンズの一端側を向く前記保持部材の端部が前記境界部よりも前記接合レンズの他端側に位置することが好ましい。   In the above-described optical member, it is preferable that the end portion of the holding member facing the one end side of the cemented lens is positioned on the other end side of the cemented lens with respect to the boundary portion.

また、第2の発明に係る光学部材は、複数のレンズを接合して構成された接合レンズと、前記接合レンズにおける一端に位置する一端側レンズの外面側のレンズ面に湿式成膜法により形成された光学薄膜と、前記一端側レンズの外周部と結合して前記接合レンズを保持するように取り付けられ、前記接合レンズと一体的に使用される保持部材とを備え、前記保持部材が前記一端側レンズの外周部を囲む筒状に形成され、前記接合レンズの外周面における前記一端側レンズと前記一端側レンズに隣接するレンズとの境界部が外部に露出している。   The optical member according to the second invention is formed by a wet film-forming method on a cemented lens configured by cementing a plurality of lenses and an outer lens surface of the one-end lens located at one end of the cemented lens. An optical thin film, and a holding member that is attached to the outer peripheral portion of the one end side lens so as to hold the cemented lens and is used integrally with the cemented lens. It is formed in a cylindrical shape surrounding the outer peripheral portion of the side lens, and a boundary portion between the one end side lens and the lens adjacent to the one end side lens on the outer peripheral surface of the cemented lens is exposed to the outside.

なお、上述の光学部材において、前記接合レンズの他端側を向く前記保持部材の端部が前記境界部よりも前記接合レンズの一端側に位置しており、前記保持部材の端部の内周部にテーパ面が形成され、前記一端側レンズの外周面と前記テーパ面とに跨って、前記一端側レンズと前記保持部材とを結合させる接着剤が塗布されていることが好ましい。   In the above-described optical member, the end of the holding member facing the other end of the cemented lens is positioned closer to one end of the cemented lens than the boundary, and the inner periphery of the end of the holding member It is preferable that a taper surface is formed in the portion, and an adhesive that bonds the one end side lens and the holding member is applied across the outer peripheral surface of the one end side lens and the tapered surface.

また、上述の光学部材において、前記保持部材が絞り部材であることが好ましい。   In the optical member described above, it is preferable that the holding member is a diaphragm member.

また、上述の光学部材において、前記一端側レンズの直径をDとし、前記一端側レンズの外面側のレンズ面の曲率半径をRとしたとき、次式
0.9≦D/R≦2.0
の条件を満足することが好ましい。
Further, in the above-described optical member, when the diameter of the one end side lens is D and the radius of curvature of the lens surface on the outer surface side of the one end side lens is R, the following formula 0.9 ≦ D / R ≦ 2.0
It is preferable to satisfy the following conditions.

本発明によれば、湿式成膜法により光学薄膜を形成する際、接合レンズに用いられている接合剤が溶解して光学性能が低下するのを防止することができる。   According to the present invention, when an optical thin film is formed by a wet film formation method, it is possible to prevent the bonding agent used for the cemented lens from being dissolved and the optical performance from being deteriorated.

第1実施形態の光学部材を示す断面図である。It is sectional drawing which shows the optical member of 1st Embodiment. 第1実施形態の光学部材におけるテーパ面の近傍を示す拡大図である。It is an enlarged view which shows the vicinity of the taper surface in the optical member of 1st Embodiment. 第2実施形態の光学部材を示す断面図である。It is sectional drawing which shows the optical member of 2nd Embodiment. 第3実施形態の光学部材を示す断面図である。It is sectional drawing which shows the optical member of 3rd Embodiment. 第3実施形態の光学部材におけるテーパ面の近傍を示す拡大図である。It is an enlarged view which shows the vicinity of the taper surface in the optical member of 3rd Embodiment.

以下、図面を参照して本発明の好ましい実施形態について説明する。第1実施形態の光学部材を図1に示しており、この光学部材1は、2枚のレンズを接合して構成された接合レンズ5と、接合レンズ5を保持するように取り付けられた保持部材10と、接合レンズ5のレンズ面に形成された光学薄膜15とを備えて構成される。接合レンズ5は、接合レンズ5の一端側に位置する凸レンズ6と、接合レンズ5の他端側に位置する凹レンズ7とを有して構成され、凸レンズ6と凹レンズ7とが所定の接合剤を用いて互いに接合されている。   Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings. An optical member according to the first embodiment is shown in FIG. 1. This optical member 1 includes a cemented lens 5 configured by cementing two lenses, and a holding member attached so as to hold the cemented lens 5. 10 and an optical thin film 15 formed on the lens surface of the cemented lens 5. The cemented lens 5 includes a convex lens 6 positioned on one end side of the cemented lens 5 and a concave lens 7 positioned on the other end side of the cemented lens 5, and the convex lens 6 and the concave lens 7 have a predetermined cementing agent. Are joined together.

凸レンズ6の外面側(一端側)のレンズ面6aには、湿式成膜法により光学薄膜15が形成される。この光学薄膜15は、例えば、反射防止膜等である。なお、本実施形態では、凸レンズ6の直径をDとし、凸レンズ6の外面側のレンズ面6aの曲率半径をRとしたとき、次の条件式(1)で表される条件を満足することが好ましい。   An optical thin film 15 is formed on the lens surface 6a on the outer surface side (one end side) of the convex lens 6 by a wet film forming method. The optical thin film 15 is, for example, an antireflection film. In the present embodiment, when the diameter of the convex lens 6 is D and the radius of curvature of the lens surface 6a on the outer surface side of the convex lens 6 is R, the condition represented by the following conditional expression (1) may be satisfied. preferable.

0.9≦D/R≦2.0 …(1)   0.9 ≦ D / R ≦ 2.0 (1)

保持部材10は、凹レンズ7の外周部を囲む筒状に形成され、保持部材10の一端側の内周部には、凹レンズ7と嵌合するレンズ収容部11が形成されている。図2に示すように、接合レンズ5の一端側を向く保持部材10の端面12の内周部にテーパ面13が形成されており、保持部材10の一端側からレンズ収容部11と嵌合した凹レンズ7の外周面とテーパ面13とに跨って、凹レンズ7と保持部材10とを結合させる接着剤17が塗布されている。これにより、保持部材10は、凹レンズ7の外周部と結合して接合レンズ5を保持するように取り付けられ、当該接合レンズ5と一体的に使用される。   The holding member 10 is formed in a cylindrical shape surrounding the outer peripheral portion of the concave lens 7, and a lens housing portion 11 that fits the concave lens 7 is formed on the inner peripheral portion on one end side of the holding member 10. As shown in FIG. 2, a tapered surface 13 is formed on the inner peripheral portion of the end surface 12 of the holding member 10 facing the one end side of the cemented lens 5, and is fitted to the lens housing portion 11 from one end side of the holding member 10. An adhesive 17 that bonds the concave lens 7 and the holding member 10 is applied across the outer peripheral surface of the concave lens 7 and the tapered surface 13. As a result, the holding member 10 is attached to the outer peripheral portion of the concave lens 7 so as to hold the cemented lens 5 and is used integrally with the cemented lens 5.

また、図1および図2に示すように、接合レンズ5の外周面5aにおける凹レンズ7と当該凹レンズ7に隣接する凸レンズ6との境界部8が外部に露出している。すなわち、接合レンズ5の一端側を向く保持部材10の端面12は、リング形の平面状に形成されるとともに、凹レンズ7と凸レンズ6との境界部8よりも接合レンズ5の他端側に位置している。なお、保持部材10の一端側の端面12は、凹レンズ7と凸レンズ6との境界部8よりも接合レンズ5の他端側に(中心軸に沿った方向に)0.5mm以上離れて位置することが好ましい。   As shown in FIGS. 1 and 2, a boundary portion 8 between the concave lens 7 and the convex lens 6 adjacent to the concave lens 7 on the outer peripheral surface 5 a of the cemented lens 5 is exposed to the outside. That is, the end surface 12 of the holding member 10 facing the one end side of the cemented lens 5 is formed in a ring-shaped plane, and is positioned on the other end side of the cemented lens 5 with respect to the boundary portion 8 between the concave lens 7 and the convex lens 6. is doing. Note that the end surface 12 on one end side of the holding member 10 is located at a distance of 0.5 mm or more (in the direction along the central axis) on the other end side of the cemented lens 5 with respect to the boundary portion 8 between the concave lens 7 and the convex lens 6. It is preferable.

以上のように構成される光学部材1において、例えば、湿式成膜法であるスピンコート法により光学薄膜15を形成する場合、接合レンズ5(凹レンズ7)と結合させた保持部材10を図示しないスピンコーターの支持部に取り付けた状態で、凸レンズ6の外面側のレンズ面6a(中心近傍)にコーティング液を滴下しつつ、接合レンズ5および保持部材10を中心軸回りに回転させる。そうすると、回転による遠心力により、コーティング液が凸レンズ6のレンズ面6a(および接合レンズ5の外周面5a)を流れていき、余分なコーティング液は保持部材10の一端側の端面12を流れてその外周部から周囲に飛び散る。これにより、塗布したコーティング液が凸レンズ6のレンズ面6a(塗布面)と反対の面(裏面)に回り込むのを防止できるとともに、接合レンズ5の辺縁部にコーティング液が溜まるのを防止することができ、膜厚の均一性が高い光学薄膜15を形成することができる。   In the optical member 1 configured as described above, for example, when the optical thin film 15 is formed by a spin coating method which is a wet film forming method, the holding member 10 coupled to the cemented lens 5 (concave lens 7) is not illustrated. While being attached to the support portion of the coater, the cemented lens 5 and the holding member 10 are rotated around the central axis while dropping the coating liquid onto the lens surface 6a (near the center) on the outer surface side of the convex lens 6. Then, due to the centrifugal force due to rotation, the coating liquid flows on the lens surface 6a of the convex lens 6 (and the outer peripheral surface 5a of the cemented lens 5), and the excess coating liquid flows on the end surface 12 on one end side of the holding member 10 Spatter from the outer periphery to the surroundings. Thereby, the applied coating liquid can be prevented from wrapping around the surface (back surface) opposite to the lens surface 6 a (application surface) of the convex lens 6, and the coating liquid can be prevented from accumulating at the edge of the cemented lens 5. Thus, the optical thin film 15 having high film thickness uniformity can be formed.

また、凹レンズ7と凸レンズ6との境界部8が外部に露出しているため、この境界部8近傍にコーティング液が溜まることがなく、コーティング液が硬化しないまま長時間にわたり境界部8に接触するのを防止することができ、接合レンズ5に用いられている接合剤が溶解して光学性能が低下するのを防止することが可能となる。このように、第1実施形態によれば、湿式成膜法により光学薄膜15を形成する際、接合レンズ5に用いられている接合剤が溶解して光学性能が低下するのを防止することができる。   Further, since the boundary portion 8 between the concave lens 7 and the convex lens 6 is exposed to the outside, the coating liquid does not accumulate in the vicinity of the boundary portion 8, and the boundary portion 8 contacts the boundary portion 8 for a long time without being cured. Therefore, it is possible to prevent the bonding agent used in the cemented lens 5 from being dissolved and the optical performance from being deteriorated. As described above, according to the first embodiment, when the optical thin film 15 is formed by the wet film forming method, it is possible to prevent the bonding agent used in the cemented lens 5 from being dissolved and the optical performance from being deteriorated. it can.

なお、接合レンズ5の一端側を向く保持部材10の端面12が凹レンズ7と凸レンズ6との境界部8よりも接合レンズ5の他端側に位置することで、境界部8近傍にコーティング液がより溜まりにくくなるので、接合レンズ5に用いられている接合剤が溶解して光学性能が低下するのを確実に防止することができる。   The end surface 12 of the holding member 10 facing one end side of the cemented lens 5 is positioned on the other end side of the cemented lens 5 with respect to the boundary portion 8 between the concave lens 7 and the convex lens 6, so that the coating liquid is present in the vicinity of the boundary portion 8. Since it is more difficult to accumulate, it is possible to reliably prevent the bonding agent used in the cemented lens 5 from being dissolved and the optical performance from being deteriorated.

また、前述の条件式(1)で表される条件を満足するレンズ面6a、すなわち、半球レンズもしくはこれに近いレンズのレンズ面に光学薄膜15を形成するようにすれば、膜厚の均一性に関してより高い効果を得ることができる。   Further, if the optical thin film 15 is formed on the lens surface 6a satisfying the condition expressed by the conditional expression (1), that is, the lens surface of a hemispherical lens or a lens close thereto, the film thickness uniformity. Higher effect can be obtained.

次に、光学部材の第2実施形態について説明する。図3に示すように、第2実施形態の光学部材21は、2枚のレンズを接合して構成された接合レンズ25と、接合レンズ25を保持するように取り付けられた保持部材30と、接合レンズ25のレンズ面に形成された光学薄膜35とを備えて構成される。接合レンズ25は、接合レンズ25の一端側に位置する凹レンズ26と、接合レンズ25の他端側に位置する凸レンズ27とを有して構成され、凹レンズ26と凸レンズ27とが所定の接合剤を用いて互いに接合されている。凹レンズ26の外面側(一端側)のレンズ面26aには、第1実施形態と同様の光学薄膜35が形成される。   Next, a second embodiment of the optical member will be described. As shown in FIG. 3, the optical member 21 according to the second embodiment includes a cemented lens 25 configured by cementing two lenses, a holding member 30 attached to hold the cemented lens 25, and a cemented lens. And an optical thin film 35 formed on the lens surface of the lens 25. The cemented lens 25 includes a concave lens 26 positioned on one end side of the cemented lens 25 and a convex lens 27 positioned on the other end side of the cemented lens 25. The concave lens 26 and the convex lens 27 are made of a predetermined cement. Are joined together. An optical thin film 35 similar to that of the first embodiment is formed on the lens surface 26a on the outer surface side (one end side) of the concave lens 26.

保持部材30は、凸レンズ27の外周部を囲む筒状に形成され、保持部材30の一端側の内周部には、凸レンズ27と嵌合するレンズ収容部31が形成されている。詳細な図示を省略するが、第1実施形態の場合と同様に、接合レンズ25の一端側を向く保持部材30の端面32の内周部にテーパ面(図示せず)が形成され、保持部材30の一端側からレンズ収容部31と嵌合した凸レンズ27の外周面とテーパ面とに跨って、凸レンズ27と保持部材30とを結合させる接着剤(図示せず)が塗布される。これにより、保持部材30は、凸レンズ27の外周部と結合して接合レンズ25を保持するように取り付けられ、当該接合レンズ25と一体的に使用される。   The holding member 30 is formed in a cylindrical shape that surrounds the outer peripheral portion of the convex lens 27, and a lens housing portion 31 that fits the convex lens 27 is formed on the inner peripheral portion on one end side of the holding member 30. Although not shown in detail, a tapered surface (not shown) is formed on the inner peripheral portion of the end surface 32 of the holding member 30 facing the one end side of the cemented lens 25 as in the case of the first embodiment, and the holding member An adhesive (not shown) for bonding the convex lens 27 and the holding member 30 is applied from one end side of 30 to the outer peripheral surface and the tapered surface of the convex lens 27 fitted to the lens housing portion 31. As a result, the holding member 30 is attached to the outer peripheral portion of the convex lens 27 so as to hold the cemented lens 25 and is used integrally with the cemented lens 25.

また、接合レンズ25の外周面25aにおける凸レンズ27と当該凸レンズ27に隣接する凹レンズ26との境界部28が外部に露出している。すなわち、接合レンズ25の一端側を向く保持部材30の端面32は、リング形の平面状に形成されるとともに、凸レンズ27と凹レンズ26との境界部28よりも接合レンズ25の他端側に位置している。   Further, a boundary portion 28 between the convex lens 27 and the concave lens 26 adjacent to the convex lens 27 on the outer peripheral surface 25a of the cemented lens 25 is exposed to the outside. That is, the end surface 32 of the holding member 30 facing one end side of the cemented lens 25 is formed in a ring-shaped plane, and is positioned on the other end side of the cemented lens 25 with respect to the boundary portion 28 between the convex lens 27 and the concave lens 26. is doing.

以上のように構成される光学部材21において、例えば、湿式成膜法であるスピンコート法により光学薄膜35を形成する場合、接合レンズ25(凸レンズ27)と結合させた保持部材30を図示しないスピンコーターの支持部に取り付けた状態で、凹レンズ26の外面側のレンズ面26a(中心近傍)にコーティング液を滴下しつつ、接合レンズ25および保持部材30を中心軸回りに回転させる。そうすると、第1実施形態の場合と同様に、塗布したコーティング液が凹レンズ26のレンズ面26a(塗布面)と反対の面(裏面)に回り込むのを防止できるとともに、接合レンズ25の辺縁部にコーティング液が溜まるのを防止することができ、膜厚の均一性が高い光学薄膜35を形成することができる。   In the optical member 21 configured as described above, for example, when the optical thin film 35 is formed by the spin coating method which is a wet film forming method, the holding member 30 coupled to the cemented lens 25 (convex lens 27) is not illustrated. While being attached to the support portion of the coater, the cemented lens 25 and the holding member 30 are rotated around the central axis while dropping the coating liquid onto the lens surface 26a (near the center) on the outer surface side of the concave lens 26. Then, as in the case of the first embodiment, the applied coating liquid can be prevented from wrapping around the surface (back surface) opposite to the lens surface 26a (application surface) of the concave lens 26, and at the edge of the cemented lens 25. Accumulation of the coating liquid can be prevented, and the optical thin film 35 with high film thickness uniformity can be formed.

また、第1実施形態の場合と同様に、凸レンズ27と凹レンズ26との境界部28が外部に露出している。そのため、第2実施形態によれば、第1実施形態の場合と同様の効果を得ることができる。   As in the case of the first embodiment, the boundary portion 28 between the convex lens 27 and the concave lens 26 is exposed to the outside. Therefore, according to the second embodiment, the same effect as that of the first embodiment can be obtained.

次に、光学部材の第3実施形態について説明する。図4に示すように、第3実施形態の光学部材41は、2枚のレンズを接合して構成された接合レンズ45と、接合レンズ45を保持するように取り付けられた保持部材50と、接合レンズ45のレンズ面に形成された光学薄膜55とを備えて構成される。接合レンズ45は、接合レンズ45の一端側に位置する凸レンズ46と、接合レンズ45の他端側に位置する凹レンズ47とを有して構成され、凸レンズ46と凹レンズ47とが所定の接合剤を用いて互いに接合されている。   Next, a third embodiment of the optical member will be described. As shown in FIG. 4, the optical member 41 of the third embodiment includes a cemented lens 45 configured by cementing two lenses, a holding member 50 attached to hold the cemented lens 45, and a cemented lens. And an optical thin film 55 formed on the lens surface of the lens 45. The cemented lens 45 includes a convex lens 46 positioned on one end side of the cemented lens 45 and a concave lens 47 positioned on the other end side of the cemented lens 45, and the convex lens 46 and the concave lens 47 have a predetermined cementing agent. Are joined together.

凸レンズ46の外面側(一端側)のレンズ面46aには、第1実施形態と同様の光学薄膜55が形成される。なお、本実施形態では、凸レンズ46の直径をDとし、凸レンズ46の外面側のレンズ面46aの曲率半径をRとしたとき、前述の条件式(1)で表される条件を満足することが好ましい。   An optical thin film 55 similar to that of the first embodiment is formed on the lens surface 46 a on the outer surface side (one end side) of the convex lens 46. In the present embodiment, when the diameter of the convex lens 46 is D and the radius of curvature of the lens surface 46a on the outer surface side of the convex lens 46 is R, the condition represented by the conditional expression (1) is satisfied. preferable.

保持部材50は、凸レンズ46の外周部を囲む筒状に形成され、保持部材50の他端側の内周部には、凸レンズ46と嵌合するレンズ収容部51が形成されている。図5に示すように、接合レンズ45の他端側を向く保持部材50の端面54の内周部にテーパ面53が形成されており、保持部材50の他端側からレンズ収容部51と嵌合した凸レンズ46の外周面とテーパ面53とに跨って、凸レンズ46と保持部材50とを結合させる接着剤57が塗布されている。これにより、保持部材50は、凸レンズ46の外周部と結合して接合レンズ45を保持するように取り付けられ、当該接合レンズ45と一体的に使用される。なお、保持部材50の一端側の内周面50aは、一端側で径が最大となる円錐形に形成されている。   The holding member 50 is formed in a cylindrical shape that surrounds the outer peripheral portion of the convex lens 46, and a lens housing portion 51 that fits the convex lens 46 is formed on the inner peripheral portion on the other end side of the holding member 50. As shown in FIG. 5, a tapered surface 53 is formed on the inner peripheral portion of the end surface 54 of the holding member 50 facing the other end side of the cemented lens 45, and the lens housing portion 51 is fitted from the other end side of the holding member 50. An adhesive 57 that bonds the convex lens 46 and the holding member 50 is applied across the outer peripheral surface of the combined convex lens 46 and the tapered surface 53. Accordingly, the holding member 50 is attached to the outer peripheral portion of the convex lens 46 so as to hold the cemented lens 45 and is used integrally with the cemented lens 45. The inner peripheral surface 50a on one end side of the holding member 50 is formed in a conical shape having a maximum diameter on one end side.

また、図4および図5に示すように、接合レンズ45の外周面45aにおける凸レンズ46と当該凸レンズ46に隣接する凹レンズ47との境界部48が外部に露出している。すなわち、接合レンズ45の他端側を向く保持部材50の端面54は、リング形の平面状に形成されるとともに、凸レンズ46と凹レンズ47との境界部48よりも接合レンズ45の一端側に位置している。   Further, as shown in FIGS. 4 and 5, a boundary portion 48 between the convex lens 46 and the concave lens 47 adjacent to the convex lens 46 is exposed to the outside on the outer peripheral surface 45 a of the cemented lens 45. That is, the end surface 54 of the holding member 50 facing the other end side of the cemented lens 45 is formed in a ring-shaped plane and is positioned closer to one end side of the cemented lens 45 than the boundary portion 48 between the convex lens 46 and the concave lens 47. is doing.

以上のように構成される光学部材41において、例えば、湿式成膜法であるスピンコート法により光学薄膜55を形成する場合、接合レンズ45(凸レンズ46)と結合させた保持部材50を図示しないスピンコーターの支持部に取り付けた状態で、凸レンズ46の外面側のレンズ面46a(中心近傍)にコーティング液を滴下しつつ、接合レンズ45および保持部材50を中心軸回りに回転させる。そうすると、回転による遠心力により、コーティング液が凸レンズ46のレンズ面46aを流れていき、余分なコーティング液は保持部材50の一端側の内周面50aおよび端面52を流れてその外周部から周囲に飛び散る。これにより、塗布したコーティング液が凸レンズ46のレンズ面46a(塗布面)と反対の面(裏面)に回り込むのを防止できるとともに、接合レンズ45の辺縁部にコーティング液が溜まるのを防止することができ、膜厚の均一性が高い光学薄膜55を形成することができる。   In the optical member 41 configured as described above, for example, when the optical thin film 55 is formed by a spin coating method that is a wet film forming method, the holding member 50 coupled to the cemented lens 45 (convex lens 46) is not illustrated. While being attached to the support portion of the coater, the cemented lens 45 and the holding member 50 are rotated around the central axis while dropping the coating liquid onto the lens surface 46a (near the center) on the outer surface side of the convex lens 46. Then, the coating liquid flows on the lens surface 46a of the convex lens 46 due to the centrifugal force caused by the rotation, and the excess coating liquid flows on the inner peripheral surface 50a and the end surface 52 on one end side of the holding member 50 and from the outer peripheral portion to the periphery. Scatter. Thereby, the applied coating liquid can be prevented from wrapping around the surface (back surface) opposite to the lens surface 46 a (application surface) of the convex lens 46, and the coating liquid can be prevented from accumulating at the edge of the cemented lens 45. Thus, the optical thin film 55 with high film thickness uniformity can be formed.

また、凸レンズ46と凹レンズ47との境界部48が外部に露出しているため、この境界部48近傍にコーティング液が溜まることがなく、コーティング液が硬化しないまま長時間にわたり境界部48に接触するのを防止することができ、接合レンズ45に用いられている接合剤が溶解して光学性能が低下するのを防止することが可能となる。このように、第3実施形態によれば、湿式成膜法により光学薄膜55を形成する際、接合レンズ45に用いられている接合剤が溶解して光学性能が低下するのを防止することができる。   In addition, since the boundary portion 48 between the convex lens 46 and the concave lens 47 is exposed to the outside, the coating liquid does not accumulate in the vicinity of the boundary portion 48 and contacts the boundary portion 48 for a long time without being cured. Therefore, it is possible to prevent the bonding agent used for the cemented lens 45 from being dissolved and the optical performance from being deteriorated. Thus, according to the third embodiment, when the optical thin film 55 is formed by the wet film forming method, it is possible to prevent the bonding agent used for the cemented lens 45 from being dissolved and the optical performance from being deteriorated. it can.

なお、第3実施形態では、接合レンズ45の他端側を向く保持部材50の端面54が凸レンズ46と凹レンズ47との境界部48よりも接合レンズ45の一端側に位置しており、凸レンズ46の外周面と保持部材50のテーパ面53とに跨って、凸レンズ46と保持部材50とを結合させる接着剤57が塗布されている。これにより、凸レンズ46と保持部材50との隙間にコーティング液が流れ込んだとしても、接着剤57が塗布された部分でコーティング液が接合レンズ45の他端側へ流れるのを防止することができるため、境界部48近傍にコーティング液がより溜まりにくくなるので、接合レンズ45に用いられている接合剤が溶解して光学性能が低下するのを確実に防止することができる。   In the third embodiment, the end surface 54 of the holding member 50 facing the other end side of the cemented lens 45 is located on one end side of the cemented lens 45 with respect to the boundary portion 48 between the convex lens 46 and the concave lens 47. The adhesive 57 that bonds the convex lens 46 and the holding member 50 is applied across the outer peripheral surface of the lens and the tapered surface 53 of the holding member 50. Thereby, even if the coating liquid flows into the gap between the convex lens 46 and the holding member 50, it is possible to prevent the coating liquid from flowing to the other end side of the cemented lens 45 at the portion where the adhesive 57 is applied. Since the coating liquid is less likely to accumulate in the vicinity of the boundary portion 48, it is possible to reliably prevent the bonding agent used in the cemented lens 45 from being dissolved and the optical performance from being deteriorated.

また、前述の条件式(1)で表される条件を満足するレンズ面46a、すなわち、半球レンズもしくはこれに近いレンズのレンズ面に光学薄膜55を形成するようにすれば、膜厚の均一性に関してより高い効果を得ることができる。   Further, if the optical thin film 55 is formed on the lens surface 46a satisfying the condition expressed by the conditional expression (1), that is, the lens surface of the hemispherical lens or a lens close thereto, the film thickness uniformity. Higher effect can be obtained.

なお、上述の第3実施形態において、光学部材41が図示しない光学装置等に組み込まれたときに、保持部材50が開口絞り等の絞り部材として機能するようにしてもよい。このようにすれば、光学部材41が組み込まれる光学装置等において、部品点数を低減させることができる。   In the third embodiment described above, when the optical member 41 is incorporated in an optical device (not shown) or the like, the holding member 50 may function as a diaphragm member such as an aperture diaphragm. If it does in this way, in an optical device etc. in which optical member 41 is incorporated, the number of parts can be reduced.

また、上述の各実施形態において、接合レンズが2枚のレンズ(ダブレット)を接合して構成されているが、これに限られるものではなく、例えば、3枚のレンズ(トリプレット)を接合して構成されるようにしてもよく、複数のレンズを接合して構成されていればよい。   In each of the above-described embodiments, the cemented lens is configured by cementing two lenses (doublets). However, the present invention is not limited to this, and for example, by cementing three lenses (triplets). You may make it comprise, and it should just be comprised by joining a some lens.

また、上述の各実施形態において、スピンコート法により光学薄膜を形成しているが、これに限られるものではなく、例えば、ディップコート法により光学薄膜を形成するようにしてもよく、湿式成膜法により光学薄膜を形成するようにすればよい。   In each of the embodiments described above, the optical thin film is formed by spin coating. However, the present invention is not limited to this. For example, the optical thin film may be formed by dip coating, or wet film formation. An optical thin film may be formed by a method.

1 光学部材(第1実施形態)
5 接合レンズ
6 凸レンズ(一端側レンズ) 7 凹レンズ(他端側レンズ)
8 境界部
10 保持部材 12 一端側の端面
15 光学薄膜
21 光学部材(第2実施形態)
25 接合レンズ25
26 凹レンズ(一端側レンズ) 27 凸レンズ(他端側レンズ)
28 境界部
30 保持部材 32 一端側の端面
35 光学薄膜
41 光学部材(第3実施形態)
45 接合レンズ
46 凸レンズ(一端側レンズ) 47 凹レンズ(他端側レンズ)
48 境界部
50 保持部材
53 テーパ面 54 他端側の端面
55 光学薄膜 57 接着剤
1 Optical member (first embodiment)
5 cemented lens 6 convex lens (lens on one end) 7 concave lens (lens on the other end)
8 boundary part 10 holding member 12 end face on one end side 15 optical thin film 21 optical member (second embodiment)
25 cemented lens 25
26 Concave lens (lens on one end) 27 Convex lens (lens on the other end)
28 boundary part 30 holding member 32 end face on one end side 35 optical thin film 41 optical member (third embodiment)
45 cemented lens 46 convex lens (lens on one end) 47 concave lens (lens on the other end)
48 boundary portion 50 holding member 53 taper surface 54 end surface on the other end side 55 optical thin film 57 adhesive

Claims (6)

複数のレンズを接合して構成された接合レンズと、
前記接合レンズにおける一端に位置する一端側レンズの外面側のレンズ面に湿式成膜法により形成された光学薄膜と、
前記接合レンズにおける他端に位置する他端側レンズの外周部と結合して前記接合レンズを保持するように取り付けられ、前記接合レンズと一体的に使用される保持部材とを備え、
前記保持部材が前記他端側レンズの外周部を囲む筒状に形成され、
前記接合レンズの外周面における前記他端側レンズと前記他端側レンズに隣接するレンズとの境界部が外部に露出していることを特徴とする光学部材。
A cemented lens formed by cementing a plurality of lenses;
An optical thin film formed by a wet film formation method on the lens surface on the outer surface side of the one end side lens located at one end of the cemented lens;
A holding member that is attached to an outer peripheral portion of the other end side lens located at the other end of the cemented lens and is attached to hold the cemented lens, and is used integrally with the cemented lens;
The holding member is formed in a cylindrical shape surrounding the outer peripheral portion of the other end side lens,
An optical member, wherein a boundary portion between the other end side lens and a lens adjacent to the other end side lens on the outer peripheral surface of the cemented lens is exposed to the outside.
前記接合レンズの一端側を向く前記保持部材の端部が前記境界部よりも前記接合レンズの他端側に位置することを特徴とする請求項1に記載の光学部材。   2. The optical member according to claim 1, wherein an end portion of the holding member facing the one end side of the cemented lens is positioned on the other end side of the cemented lens with respect to the boundary portion. 複数のレンズを接合して構成された接合レンズと、
前記接合レンズにおける一端に位置する一端側レンズの外面側のレンズ面に湿式成膜法により形成された光学薄膜と、
前記一端側レンズの外周部と結合して前記接合レンズを保持するように取り付けられ、前記接合レンズと一体的に使用される保持部材とを備え、
前記保持部材が前記一端側レンズの外周部を囲む筒状に形成され、
前記接合レンズの外周面における前記一端側レンズと前記一端側レンズに隣接するレンズとの境界部が外部に露出していることを特徴とする光学部材。
A cemented lens formed by cementing a plurality of lenses;
An optical thin film formed by a wet film formation method on the lens surface on the outer surface side of the one end side lens located at one end of the cemented lens;
A holding member that is attached to the outer peripheral portion of the one end side lens and is attached to hold the cemented lens, and is used integrally with the cemented lens;
The holding member is formed in a cylindrical shape surrounding the outer peripheral portion of the one end side lens,
An optical member, wherein a boundary portion between the one end side lens and the lens adjacent to the one end side lens on the outer peripheral surface of the cemented lens is exposed to the outside.
前記接合レンズの他端側を向く前記保持部材の端部が前記境界部よりも前記接合レンズの一端側に位置しており、
前記保持部材の端部の内周部にテーパ面が形成され、
前記一端側レンズの外周面と前記テーパ面とに跨って、前記一端側レンズと前記保持部材とを結合させる接着剤が塗布されていることを特徴とする請求項3に記載の光学部材。
The end of the holding member facing the other end of the cemented lens is located on one end of the cemented lens with respect to the boundary,
A tapered surface is formed on the inner peripheral portion of the end portion of the holding member,
The optical member according to claim 3, wherein an adhesive that bonds the one end side lens and the holding member is applied across an outer peripheral surface of the one end side lens and the tapered surface.
前記保持部材が絞り部材であることを特徴とする請求項3または4に記載の光学部材。   The optical member according to claim 3 or 4, wherein the holding member is a diaphragm member. 前記一端側レンズの直径をDとし、前記一端側レンズの外面側のレンズ面の曲率半径をRとしたとき、次式
0.9≦D/R≦2.0
の条件を満足することを特徴とする請求項1から5のいずれか一項に記載の光学部材。
When the diameter of the one end side lens is D and the radius of curvature of the lens surface on the outer surface side of the one end side lens is R, the following expression 0.9 ≦ D / R ≦ 2.0
The optical member according to claim 1, wherein the following condition is satisfied.
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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109655944A (en) * 2017-10-12 2019-04-19 佳能株式会社 Optical element, optical system and picture pick-up device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109655944A (en) * 2017-10-12 2019-04-19 佳能株式会社 Optical element, optical system and picture pick-up device
CN109655944B (en) * 2017-10-12 2021-09-07 佳能株式会社 Optical element, optical system, and image pickup apparatus
US11553120B2 (en) 2017-10-12 2023-01-10 Canon Kabushiki Kaisha Optical element, optical system, and image pickup apparatus

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