JP2011257176A - Measurement device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a measurement device that carries out a high-precision shape measurement by performing temperature control over a body to be detected.SOLUTION: A measurement device that measures a shape of a body to be detected comprises: detection means of collecting shape information on the body to be detected, antifouling gas flow generation means of generating a gas flow for at least preventing the detection means from being contaminated, temperature measurement means of measuring the temperature of the body to be measured, gas flow generation means of generating a gas flow for adjusting the temperature of the body to be detected, and temperature control means of controlling the gas flow generation means based upon information from the temperature measurement means so as to hold the body to be detected within a predetermined temperature range.

Description

  The present invention relates to a measuring apparatus that performs temperature management and measures a three-dimensional shape of a test object.

  As a measuring device for measuring the three-dimensional shape of a test object, for example, a moving table comprising an X stage that moves in one horizontal direction on the base and a Y stage that moves in the other horizontal direction perpendicular thereto is provided. A sensor head is provided on the Z stage that moves in the vertical direction, and a reflected light image of the measurement light reflected from the light source and the light source that emits measurement light toward the test object placed on the moving table on the sensor head. An apparatus incorporating a TV camera that acquires the above has been proposed (Patent Document 1).

In the above apparatus, the test object is irradiated with the measurement light from the light source, the reflected light image of the measurement light reflected from the test object is observed with a television camera from a direction different from the direction in which the measurement light is irradiated, The three-dimensional shape of the test object is measured in a non-contact manner from the shape of the measurement light in the reflected light image, the position of the light source, and the position of the television camera.
JP 11-125508 A

  When measuring the three-dimensional shape of the test object with the measuring apparatus as described above, the temperature of the test object is usually controlled in order to avoid measurement errors due to thermal expansion of the test object. In this temperature management, for example, after machining of the test object, the test object that has become high temperature due to heat during the machining is left to stand at room temperature (room temperature).

  In the case of a specimen having a relatively small heat capacity, the standing time may be relatively short. However, if the specimen has a large heat capacity, the standing time may be one day or several days. It is not the case that the standing time is determined based on the measurement result, but the actual situation is that it is determined empirically.

  The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a measuring apparatus that can perform temperature management of a test object and perform highly accurate shape measurement.

  The measuring apparatus according to claim 1 of the present invention that achieves the above object is a measuring apparatus for measuring the shape of a test object, the detection means for collecting shape information of the test object, and at least the detection means Anti-contamination gas flow forming means for forming a gas flow for preventing contamination, temperature measuring means for measuring the temperature of the test object, and gas flow forming means for forming a gas flow for adjusting the temperature of the test object And a temperature control means for controlling the gas flow forming means based on information from the temperature measuring means to keep the temperature of the test object in a predetermined temperature range. .

  The measuring device according to claim 2 of the present invention is a measuring device for measuring the shape of the test object, and prevents contamination of the detection means for collecting the shape information of the test object and at least the detection means. A contamination-preventing gas flow forming means for forming a gas flow, a temperature measuring means for measuring the temperature of the test object, a holding means for holding the position and posture of the temperature measuring means in a changeable manner, and the test object A temperature at which the temperature of the test object is maintained within a predetermined temperature range by controlling the gas flow forming means based on information from the temperature measuring means and a gas flow forming means for forming a gas flow for adjusting the temperature. And a control means.

  The measuring device according to claim 3 of the present invention is a measuring device for measuring the shape of the test object, and detects at least the detection means for collecting the shape information of the test object and prevents contamination of at least the detection means. Contamination-preventing gas flow forming means for forming a gas flow, temperature measuring means for measuring the temperature of the test object, gas flow forming means for forming a gas flow for adjusting the temperature of the test object, and the gas flow Based on the information from the temperature measuring means and the holding means for holding the position and posture of the forming means in a changeable manner, the gas flow forming means and the holding means are controlled to set the temperature of the test object within a predetermined temperature range. And a temperature control means for holding.

  The measuring device according to claim 4 of the present invention is a measuring device for measuring the shape of the test object, and prevents contamination of the detection means for collecting shape information of the test object and at least the detection means. A contamination-preventing gas flow forming means for forming a gas flow, a temperature measuring means for measuring the temperature of the test object, a first holding means for holding the position and posture of the temperature measuring means in a changeable manner, and the test object Based on information from a gas flow forming means for forming a gas flow for adjusting the temperature of the object, a second holding means for holding the position and posture of the gas flow forming means in a changeable manner, and the temperature measurement means, And a temperature control means for controlling the gas flow forming means and the second holding means to keep the temperature of the test object in a predetermined temperature range.

  The measuring device according to claim 5 of the present invention is a measuring device for measuring the shape of the test object, and detects at least the detection means for collecting the shape information of the test object and prevents contamination of at least the detection means. A contamination-preventing gas flow forming means for forming a gas flow, a temperature measuring means for measuring the temperature of the test object, a first holding means for holding the position and posture of the temperature measuring means in a changeable manner, and the test object Based on information from a gas flow forming means for forming a gas flow for adjusting the temperature of the object, a second holding means for holding the position and posture of the gas flow forming means in a changeable manner, and the temperature measurement means, And a temperature control means for controlling the gas flow forming means, the first holding means, and the second holding means to keep the temperature of the test object in a predetermined temperature range.

  According to the present invention, it is possible to perform highly accurate shape measurement by controlling the temperature of the test object.

It is the schematic which shows one Embodiment of the measuring device of this invention. It is explanatory drawing which shows the display content of the monitor with which the measuring apparatus of FIG. 1 is equipped. It is a block diagram which shows the control circuit with which the measuring device of FIG. 1 was equipped. It is a flowchart which shows an example of operation | movement of the measuring device of FIG. It is a flowchart which shows another example of operation | movement of the measuring device of FIG. It is the schematic which shows different embodiment of the measuring device of this invention.

  Hereinafter, an embodiment of a measuring apparatus according to the present invention will be described with reference to FIGS.

  The measuring device of the present invention is a device that measures the three-dimensional shape of a test object, and is installed in an atmosphere in which the air temperature changes.

  FIG. 1 is a schematic view showing an embodiment of the measuring apparatus of the present invention.

  In the measurement apparatus of the present embodiment, the shape sensor 20 as a detection unit (detection means) for collecting shape information of the test object M, and the temperature of the test object M from which the shape sensor 20 collects shape information are measured. An infrared camera 30 that constitutes a temperature measurement unit (temperature measurement means) that performs the measurement, and a measurement apparatus body 10 that includes the shape sensor 20 and the infrared camera 30 are provided.

  Further, the measuring device includes at least a pollution-preventing gas flow forming unit that forms a gas flow that prevents contamination of the detection unit, a gas flow forming unit that forms a gas flow that adjusts the temperature of the test object M, and Temperature control means for controlling the gas flow forming means based on information from the temperature measuring means to keep the temperature of the test object M in a predetermined temperature range is provided.

  Alternatively, the measuring device includes at least a pollution-preventing gas flow forming unit that forms a gas flow that prevents contamination of the detection unit, a first holding unit that holds the position and posture of the temperature measuring unit in a changeable manner, and Based on information from a gas flow forming means for forming a gas flow for adjusting the temperature of the test object M, a second holding means for holding the position and posture of the gas flow forming means in a changeable manner, and the temperature measuring means. Temperature control means for controlling the gas flow forming means, the first holding means, and the second holding means to hold the temperature of the test object in a predetermined temperature range.

  The measurement apparatus of this embodiment is provided with a pollution prevention gas flow forming means that forms at least a gas flow that prevents contamination of the detection means, and the shape of dust and oil mist contained in the atmosphere in which the measurement apparatus is installed In order to prevent measurement errors from occurring due to adhesion to the lens surface of the sensor 20 and the infrared camera 30, clean air is supplied to the shape sensor 20 and infrared camera 30 to prevent adhesion of dust and oil mist. .

  In order to accurately control the temperature of various specimens M having different sizes and shapes, it is preferable that the positions and postures of the temperature measuring unit and the gas flow forming unit can be changed.

  Therefore, a first holding unit that holds the position and posture of the temperature measuring unit in a changeable manner and a second holding unit that holds the position and the posture of the gas flow forming unit in a changeable manner may be provided. As such a holding means, an articulated robot arm having a high degree of freedom of movement is preferable.

  By adjusting the positions and postures of the temperature measuring means and the gas flow forming means with an articulated robot arm having a large degree of freedom of movement, the temperature control of the object M can be performed with high accuracy.

  The infrared camera that constitutes the temperature measuring means detects the temperature from the object M in the wavelength range of 4 to 13 μm, and disturbing light from other wavelengths is detected as an error. It is preferable to dispose in front of the camera and pass through the high-pass filter so that extraneous wavelength disturbance light does not enter the infrared camera.

  The gas flow forming means for forming a gas flow for adjusting the temperature of the test object M is constituted by an air blower. In order to adjust the temperature of the test object M, air that is set to a predetermined temperature or a predetermined temperature range is used to spray the test object M.

  In addition, when cooling the test object M, the air is cooled to room temperature or lower, or compressed air (cooling by adiabatic expansion at the time of blower) is used, or all or a part of the test object. The air flow is sprayed toward

  Moreover, you may provide an infrared irradiation means as a supplementary means for adjusting the temperature of the to-be-tested object M. FIG. The infrared irradiation means has at least a halogen lamp and a reflecting mirror. Infrared rays from the infrared irradiation means irradiate the whole object M to be heated. Here, it is preferable to cut the long wavelength (for example, 8 μm or more) of the infrared rays from the halogen lamp with a low-pass filter because the specimen M can be efficiently heated.

  Alternatively, the infrared irradiation means has at least a halogen lamp, a reflecting mirror, and a condenser lens. Infrared rays from the infrared irradiation means irradiate a part of the object M to be heated. In this case, an irradiation area for the object M is formed by the condenser lens. Here, it is preferable to cut the long wavelength (for example, 8 μm or more) of the infrared rays from the halogen lamp with a low-pass filter because the specimen M can be efficiently heated.

  Further, it is preferable to provide a third holding means for holding the position and posture of the infrared irradiation means in a changeable manner. As such a holding means, an articulated robot arm having a high degree of freedom of movement is preferable.

  The temperature control means controls the gas flow forming means, the infrared irradiation means, the first holding means and the second holding means based on the information from the temperature measuring means, so that the temperature of the test object M is within a predetermined temperature range. Hold.

  Specifically, the temperature control means adjusts the position and posture of the temperature measurement means and the gas flow forming means, and further adjusts the flow rate, temperature, and spray range of the air from the gas flow forming means, or supplements. In particular, the temperature of the test object M is maintained within a predetermined temperature range by adjusting the intensity and irradiation range of infrared rays from the infrared irradiation means.

  The measurement device includes a CPU 40 (see FIG. 3) as a control unit that controls the entire measurement device main body 10 and outputs measurement results based on temperature information from the infrared camera 30 and contents output from the shape sensor 20. A console 50 is provided.

  In the measuring apparatus main body 10, a base 12 is disposed on a floor 11, and an X stage 14, a Y stage 15, and a Z stage 16 are disposed on the base 12.

  The X stage 14 is a mechanism for placing the specimen M, and translates the placed specimen M in the horizontal direction on the base 12 (see the arrow X direction in FIG. 1).

  The Y stage 15 includes a horizontal portion 15a that moves in a horizontal direction (see the arrow Y direction in FIG. 1) orthogonal to the X stage 14 on the base 12, and a vertical portion that is provided upright on the horizontal portion 15a. 15b. The Z stage 16 is movably supported by the vertical portion 15b, and moves the Z stage 16 in the arrow Y direction.

  The Z stage 16 extends along the vertical portion 15b of the Y stage 15 in a direction perpendicular to the base 13 (see the arrow Z direction in FIG. 1), and extends parallel to the base 13 from the base 16a. Arm portion 16b. The shape sensor 20 is attached to the arm portion 16b at the tip thereof so as to face the test object M, and the infrared camera described above so as to face the test object M apart from the shape sensor 20 as well. 30 is attached, and the arm portion 16b moves the shape sensor 20 and the infrared camera 30 in the arrow Z direction.

  In this example, the infrared camera 30 is attached to the arm portion 16b. However, as described above, the infrared camera 30 may be attached to another articulated robot arm.

  The shape sensor 20 is movable in the horizontal direction (arrow Y direction) and the vertical direction (arrow Z direction) with respect to the base 13 by the Y stage 15 and the Z stage 16. The shape sensor 20 is a device that measures the shape of the test object M by a light cutting method. The shape sensor 20 projects a measurement unit 21 that projects the measurement light onto the test object M, and an image that captures the test object M irradiated with the measurement light. Unit 22. The position of the shape sensor 20 is a combined position of the positions of the X stage 14, the Y stage 15, and the Z stage 16.

  The infrared camera 30 is a thermometer that detects an infrared ray emitted from the test object M with a two-dimensional image sensor having sensitivity to the infrared ray, and measures the surface temperature of the test object M according to the amount of the infrared ray.

  The console 50 includes a monitor 51 including a liquid crystal display device that displays the output (captured image) of the infrared camera 30 and the like, and a temperature designation unit for inputting a measurement start command, a temperature at which measurement starts (specified temperature), and the like Keyboard 52 is provided. The designated temperature may be a temperature range from several times to many times.

  FIG. 2 shows an example of the display content of the monitor 51 (monitor screen 51a). As shown in FIG. 2, the output of the infrared camera 30 is displayed as an image on the monitor 52. The temperature is converted into a color and displayed on the monitor 52. Further, the console 50 is provided with a joystick 53 (see FIG. 3) as a position designating unit for designating the position at which the temperature of the object M is measured, and a cursor displayed on the monitor screen 51a by the joystick 53. The position of 51b can be changed. The position indicated by the cursor 51b is a position at which the temperature is measured, and the temperature is displayed numerically on a temperature index 51c that displays the correspondence between color and temperature. In FIG. 2, the image 51d of the test object M placed on the X stage 14 is displayed together with the image 51e of the X stage 14, and the temperature of the part 51f in the image 51d corresponding to the upper surface Ma of the test object M is displayed. Is shown to be 18 ° C. The X stage 14 functions as a holding unit for the test object M, and the infrared camera 30 that captures an infrared image of the X stage 14 functions as a temperature measurement unit that measures the temperature of the test object M. It also functions as an ambient temperature measurement unit that measures the ambient temperature of the place where the test object M is installed. As shown in FIG. 3, the measurement apparatus body 10 is provided with a stage drive circuit 41 that controls the operation of the X stage 14, the operation of the Y stage 15, and the operation of the Z stage 16. This stage drive circuit 41 receives movement signals from the CPU 40 and outputs drive signals to the X, Y, and Z stages 14, 15, and 16, as well as positional information for the X, Y, and Z stages 14, 15, and 16. Is output to the shape measuring circuit 42.

  The shape measurement circuit 42 outputs a control signal to the laser light source 21 a of the projection unit 21 to control the laser light source 21 a on / off, while image data is input from the video camera 22 a of the imaging unit 22. The shape measuring circuit 42 obtains the shape of the test object M based on the image data input from the video camera 22 a and the positional information of the X, Y, Z stages 14, 15, 16 input from the stage drive circuit 41. The shape data is output to the CPU 40.

  Infrared image data representing the temperatures of the object M and the X stage 14 taken by the infrared camera 30 is output to the temperature measurement circuit 43, where the infrared image data is converted into temperature data. The temperature data output from the temperature measurement circuit 43 is the temperature of the entire screen of infrared image data.

  The CPU 40 inputs temperature data from the temperature measurement circuit 43 and outputs a temperature image to the monitor 51. The CPU 40 receives a specified temperature signal from the keyboard 52 and a temperature measurement position signal from the joystick 53.

  The CPU 40 controls the gas flow forming means, the infrared irradiation means, the first holding means, and the second holding means based on the information from the temperature measuring means so that the temperature of the test object M is within a predetermined temperature range. It has a function as a temperature control means to hold.

  Alternatively, the CPU 40 controls the gas flow forming means, the infrared irradiation means, the first holding means, the second holding means, and the third holding means based on information from the temperature measuring means to It has a function as temperature control means for keeping the temperature within a predetermined temperature range.

  Further, the CPU 40 drives the shape sensor 20 to start measuring the shape of the test object M when the temperature of the location on the test object M specified by the joystick 53 is within the range of the specified temperature input from the keyboard 52. To do.

  That is, as described above, the CPU 40 outputs a drive signal to the stage drive circuit 41 to drive the stage drive circuit 41. Thereby, the stage drive circuit 41 sends drive signals to the X, Y, and Z stages 14, 15, and 16, while the position measurement information of each of the driven X, Y, and Z stages 14, 15, and 16 is given to the shape measurement circuit 42. Send to. The shape measurement circuit 42 outputs a control signal to the laser 21a of the projection unit 21 to control ON / OFF of the laser 21a, while inputting image data from the video camera 22a of the imaging unit 22, and this image data and X , The shape of the test object M is obtained based on the position information of the Y, Z stages 14, 15, and 16.

  The CPU 40 has a function as temperature control means for maintaining the temperature of the object M within a predetermined temperature range. However, during the shape measurement by the shape sensor 20, the temperature control cannot be performed well, and the object designated by the joystick 53 is used. When the temperature at the location on the specimen M deviates from the range of the specified temperature input from the keyboard 52, the CPU 40 displays an alarm on the monitor 51 and stops the shape measurement of the specimen M by the shape sensor 20. In addition to displaying the image captured by the infrared camera 30, the monitor 51 also functions as an alarm unit for displaying that the temperature of the test object M is out of the specified temperature range.

  As described above, the CPU 40 changes the output content based on the temperature data input from the temperature measurement circuit 43. Changes include, for example, the presence or absence of shape measurement results (whether or not shape data is output, continuation or cancellation of shape measurement, etc.), or warnings for shape measurement results (shape changes due to thermal expansion / contraction due to temperature changes) Warning for the shape measurement result of the test object M).

  As a method of not outputting the shape measurement result by the CPU 40, for example, A: the shape sensor 20 is driven to acquire shape data, but the shape data transfer process is interrupted, and B: the shape sensor 20 itself is not driven. C: No output related to shape data, C: Image data is acquired by the shape sensor 20, and shape data of the test object M is created based on the image data. The display unit (display), print output unit (Printer), and a method of not outputting to a device such as CAD.

  Next, the operation of the CPU 40 of the measuring apparatus will be described with reference to the flowchart of FIG.

  When the operator places the test object on the X stage 14 and performs an operation to start measurement on the console 50, the contents shown in the flowchart of FIG. 4 start.

  In Step 1, the CPU 40 inputs temperature data of the object M captured by the infrared camera 30 from the temperature measurement circuit 43.

  In Step 2, the CPU 40 inputs the position of the cursor 51 b from the joystick 53 and the specified temperature from the keyboard 52.

  In Step 3, the CPU 40 determines whether or not the temperature at the position of the cursor 51b represented by the temperature data is at the specified temperature.

  In Step 4, if the temperature at the position represented by the cursor 51b is not the specified temperature, the CPU 40 controls the gas flow forming means, the first holding means, and the second holding means until the specified temperature is reached. Continue measuring.

  Alternatively, in Step 4, when the temperature at the position represented by the cursor 51b is not the specified temperature, the CPU 40 performs the gas flow forming means, the infrared irradiation means, the first holding means, and the second holding means until the temperature reaches the specified temperature. And the third holding means is controlled and the temperature is continuously measured.

  In Step 5, when the temperature is the designated temperature, the CPU 40 controls the shape sensor 20 while monitoring the temperature at the position of the cursor 51b represented by the temperature data, and measures the shape of the test object M.

  Thus, since the shape of the test object M is measured when the temperature of the part for measuring the shape of the test object M is a predetermined temperature, the amount of thermal expansion of the test object M is always constant. The shape of the size can be measured. Therefore, the shape of the test object M can be measured with high accuracy.

  In Step 6, the CPU 40 determines whether or not the temperature at the position represented by the cursor 51b has deviated from the specified temperature.

  In Step 7, when it deviates from the specified temperature, the CPU 40 displays an alarm on the monitor 51 and stops the measurement.

  Thus, since the measurement is stopped when the temperature of the test object M deviates from the specified temperature during the measurement of the shape of the test object M, the amount of thermal expansion of the test object M is from a certain level. Do not measure out of shape. That is, shape data that causes measurement errors is not acquired.

  In Step 8, if it is at the specified temperature, it is determined whether or not the measurement of the entire shape of the object M has been completed. If not completed, the process returns to Step 5 to continue shape measurement.

  FIG. 5 is a flowchart showing another operation of the measuring apparatus.

  When the operator places the test object M on the X stage 14 and performs an operation for starting measurement on the console 50, the flowchart of FIG. 5 starts.

  In Step 11, the CPU 40 inputs the temperature data of the test object M taken by the infrared camera 30 from the temperature measurement circuit 43 and the temperature data of the X stage 14 on which the test object M is placed. The temperature distribution of the object M and the temperature distribution of the X stage 14 are created.

  In Step 12, the CPU 40 compares the average value of the temperature distribution of the X stage 14 with the temperature distribution width of the temperature distribution of the test object M, and the temperature distribution width of the test object M is the average value of the temperature of the X stage 14. It is judged whether it is within the range of ± 1 ° C.

  It is not always necessary to determine whether or not the temperature distribution width of the test object M is within a range of ± 1 ° C. of the average value of the temperature of the X stage 14. It is sufficient that the difference from the temperature distribution is within a predetermined range. For example, the temperature of the X stage 14 around which the test object M is placed is equal to the temperature of the test object M near the X stage 14 and the predetermined temperature. You may judge whether it is in the difference.

  In Step 13, if the temperature distribution width of the test object M is not within the range of ± 1 ° C. of the average value of the temperature of the X stage 14, the CPU 40 determines that the gas flow forming means, the first While controlling the holding means and the second holding means, the temperature data of the test object M and the temperature data of the X stage 14 on which the test object M is placed are continuously input.

  Alternatively, in Step 13, if the temperature distribution width of the test object M is not within the range of ± 1 ° C. of the average value of the temperature of the X stage 14, until it falls, the CPU 40 performs the gas flow forming means, infrared irradiation means, While controlling said 1st holding | maintenance means, 2nd holding | maintenance means, and 3rd holding | maintenance means, the temperature data of the to-be-tested object M and the temperature data of the X stage 14 in which the to-be-tested object M is put are input continuously.

  In Step 14, when the temperature distribution width of the test object M falls within the range of ± 1 ° C. of the average value of the temperature of the X stage 14, the CPU 40 measures the shape of a predetermined region of the test object M.

  The region for measuring the shape may be designated from the joystick 53 or the like.

  As described above, since the measurement of the shape is started after the temperature of the X stage 14 and the temperature of the test object M are within a predetermined range, the temperature of the test object M is the temperature of the X stage 14 during the measurement of the shape. The shape of the test object M is measured in a state in which there is no temperature fluctuation of the test object M that approaches.

  Accordingly, in this case as well, as in the case described above (see FIG. 4), the shape of the specimen M can be measured with a constant amount of thermal expansion, so the shape of the specimen can be measured with high accuracy. Can do.

  As another embodiment of the present invention, for example, there is a measuring apparatus as shown in FIG. This is because the attenuation cover 17 (see the portion surrounded by a dotted line in FIG. 6) as an attenuation member that attenuates light having a wavelength corresponding to the light receiving wavelength region of the infrared camera 30 surrounds the object M and the infrared camera 30. It is an example arrange | positioned so that it may cover.

  In FIG. 6, the same members as those shown in FIG.

  Depending on the usage environment of this measuring apparatus, energy rays other than infrared rays radiated from the test object M may enter the infrared camera 30. In the case of metal, the reflection high rate of infrared rays is high. Therefore, when the test object M or the X stage 14 on which the test object M is placed has a glossy surface made of metal, the test object M is directly irradiated with sunlight or incandescent light. And the temperature of the surrounding itself cannot be measured accurately, and data indicating a higher temperature is obtained from the infrared camera 30. In addition, at the time of temperature measurement, gas flow spraying and infrared irradiation for temperature control of the test object M are not performed.

  Therefore, in the present embodiment, a plurality of (two in FIG. 6) damping cover support beams 18 extend in a direction perpendicular to the paper surface of FIG. 6 above the vertical portion 15b constituting the Y stage 15. Thus, the attenuation cover support beam 18 supports the attenuation cover 17 so as to cover the object M and the infrared camera 30 above and in the four lateral directions. The attenuation cover 17 uses a sheet-like panel such as polycarbonate resin for near-infrared absorption (for example, Gulliver (TM) 302-4 manufactured by Sumitomo Dow Co., Ltd.). A certain wavelength range of 4 to 13 micrometers can be efficiently attenuated. By attenuating energy rays in this wavelength range, temperature measurement by the infrared camera 30 is possible with little influence from outside light.

  The attenuation cover 17 is installed so as to cover the portion of the image acquisition range of the infrared camera 30 and the infrared camera 30 itself, close to the mounting position of the test object M such as the X stage 14 and the Y stage 15. Most of the energy rays sensed by the temperature measuring unit are radiated from the test object M and its surroundings.

  The present invention is not limited to that shown in the above embodiment. For example, in addition to the shape data and the temperature data, thermal characteristic data such as specific heat, thermal conductivity, temperature distribution (thermal gradient) of the specimen M is input to the CPU 40, and the CPU 40 performs temperature compensation on the shape measurement value. It may be.

  Further, the present invention may be configured with the following features.

  The measuring device of the present invention is a measuring device for measuring the shape of a test object, and includes a detection means for collecting shape information of the test object, at least preventing contamination of the detection means, and Based on the information from the gas flow forming means for forming the gas flow for adjusting the temperature, the temperature measuring means for measuring the temperature of the test object, and the temperature measuring means, the gas flow forming means is controlled, Temperature control means for maintaining the temperature of the test object in a predetermined temperature range.

  The measuring device of the present invention is a measuring device for measuring the shape of a test object, and includes a detection means for collecting shape information of the test object, at least preventing contamination of the detection means, and Gas flow forming means for forming a gas flow for adjusting temperature, temperature measuring means for measuring the temperature of the test object, holding means for holding the position and orientation of the temperature measuring means in a changeable manner, and the temperature measurement Temperature control means for controlling the gas flow forming means based on information from the means to keep the temperature of the test object in a predetermined temperature range.

  The measuring device of the present invention is a measuring device for measuring the shape of a test object, and includes a detection means for collecting shape information of the test object, at least preventing contamination of the detection means, and Gas flow forming means for forming a gas flow for adjusting temperature, temperature measuring means for measuring the temperature of the test object, holding means for holding the position and posture of the gas flow forming means in a changeable manner, and the temperature And a temperature control means for controlling the gas flow forming means and the holding means based on information from the measuring means to hold the temperature of the test object in a predetermined temperature range.

  The measuring device of the present invention is a measuring device for measuring the shape of a test object, and includes a detection means for collecting shape information of the test object, at least preventing contamination of the detection means, and A gas flow forming means for forming a gas flow for adjusting the temperature, a temperature measuring means for measuring the temperature of the test object, a first holding means for holding the position and posture of the temperature measuring means in a changeable manner, and A second holding means for holding the position and orientation of the gas flow forming means in a changeable manner; and the gas flow forming means and the second holding means based on information from the temperature measuring means to control the test object. Temperature control means for maintaining the temperature in a predetermined temperature range.

  The measuring device of the present invention is a measuring device for measuring the shape of a test object, and includes a detection means for collecting shape information of the test object, at least preventing contamination of the detection means, and A gas flow forming means for forming a gas flow for adjusting the temperature, a temperature measuring means for measuring the temperature of the test object, a first holding means for holding the position and posture of the temperature measuring means in a changeable manner, and Based on the information from the temperature measuring means, the second holding means that holds the position and posture of the gas flow forming means in a changeable manner, the gas flow forming means, the first holding means, and the second holding means are controlled. And a temperature control means for maintaining the temperature of the test object in a predetermined temperature range.

  The measuring device of the present invention is a measuring device that measures the shape of a test object, and includes a detection unit that collects shape information of the test object, and a contamination that forms a gas flow that at least prevents contamination of the detection unit. Based on information from the prevention gas flow forming means, temperature measuring means for measuring the temperature of the test object, gas flow forming means for forming a gas flow for adjusting the temperature of the test object, and the temperature measurement means Temperature control for maintaining the temperature of the test object in a predetermined temperature range by controlling the gas flow forming means and spraying the gas flow toward the whole or a part of the test object. And means.

  The measuring device of the present invention is a measuring device that measures the shape of a test object, and includes a detection unit that collects shape information of the test object, and a contamination that forms a gas flow that at least prevents contamination of the detection unit. Preventing gas flow forming means, temperature measuring means for measuring the temperature of the test object, holding means for holding the position and posture of the temperature measuring means in a changeable manner, and gas flow for adjusting the temperature of the test object Based on the information from the gas flow forming means and the temperature measuring means, the gas flow forming means is controlled to spray the gas flow toward the whole or a part of the test object. And a temperature control means for maintaining the temperature of the test object in a predetermined temperature range.

  The measuring device of the present invention is a measuring device that measures the shape of a test object, and includes a detection unit that collects shape information of the test object, and a contamination that forms a gas flow that at least prevents contamination of the detection unit. Preventing gas flow forming means, temperature measuring means for measuring the temperature of the test object, gas flow forming means for forming a gas flow for adjusting the temperature of the test object, and position and posture of the gas flow forming means Based on the information from the temperature measuring means and the holding means for holding the gas flow in a changeable manner, the gas flow forming means and the holding means are controlled toward the whole or a part of the test object. Temperature control means for maintaining the temperature of the test object in a predetermined temperature range by spraying.

  The measuring device of the present invention is a measuring device that measures the shape of a test object, and includes a detection unit that collects shape information of the test object, and a contamination that forms a gas flow that at least prevents contamination of the detection unit. Preventing gas flow forming means, temperature measuring means for measuring the temperature of the test object, first holding means for holding the position and posture of the temperature measuring means in a changeable manner, and adjusting the temperature of the test object Based on the information from the temperature measuring means, the gas flow forming means for forming the gas flow, the second holding means for holding the position and posture of the gas flow forming means in a changeable manner, the gas flow forming means and the first Temperature control means for holding the temperature of the test object in a predetermined temperature range by spraying the gas flow toward the whole or a part of the test object by controlling two holding means; It is characterized by comprising.

  The measuring device of the present invention is a measuring device that measures the shape of a test object, and includes a detection unit that collects shape information of the test object, and a contamination that forms a gas flow that at least prevents contamination of the detection unit. Preventing gas flow forming means, temperature measuring means for measuring the temperature of the test object, first holding means for holding the position and posture of the temperature measuring means in a changeable manner, and adjusting the temperature of the test object Based on the information from the temperature measuring means, the gas flow forming means for forming the gas flow, the second holding means for holding the position and posture of the gas flow forming means in a changeable manner, the gas flow forming means, By controlling the first holding means and the second holding means to spray the gas flow toward the whole or a part of the test object, the temperature of the test object is held in a predetermined temperature range. And a temperature control means. To.

  The measuring device of the present invention is a measuring device for measuring the shape of a test object, and includes a detection means for collecting shape information of the test object, at least preventing contamination of the detection means, and Based on the information from the gas flow forming means for forming the gas flow for adjusting the temperature, the temperature measuring means for measuring the temperature of the test object, and the temperature measuring means, the gas flow forming means is controlled to Temperature control means for maintaining the temperature of the test object in a predetermined temperature range by spraying the gas flow toward the whole or a part of the test object. .

  The measuring device of the present invention is a measuring device for measuring the shape of a test object, and includes a detection means for collecting shape information of the test object, at least preventing contamination of the detection means, and Gas flow forming means for forming a gas flow for adjusting temperature, temperature measuring means for measuring the temperature of the test object, holding means for holding the position and orientation of the temperature measuring means in a changeable manner, and the temperature measurement Based on the information from the means, the gas flow forming means is controlled to spray the gas flow toward the whole or a part of the test object, thereby setting the temperature of the test object to a predetermined temperature. And a temperature control means for keeping the temperature range.

  The measuring device of the present invention is a measuring device for measuring the shape of a test object, and includes a detection means for collecting shape information of the test object, at least preventing contamination of the detection means, and Gas flow forming means for forming a gas flow for adjusting temperature, temperature measuring means for measuring the temperature of the test object, holding means for holding the position and posture of the gas flow forming means in a changeable manner, and the temperature Based on the information from the measuring means, the gas flow forming means and the holding means are controlled, and the gas flow is sprayed toward the whole or a part of the test object. Temperature control means for maintaining the temperature in a predetermined temperature range.

  The measuring device of the present invention is a measuring device for measuring the shape of a test object, and includes a detection means for collecting shape information of the test object, at least preventing contamination of the detection means, and A gas flow forming means for forming a gas flow for adjusting the temperature, a temperature measuring means for measuring the temperature of the test object, a first holding means for holding the position and posture of the temperature measuring means in a changeable manner, and A second holding means for holding the position and orientation of the gas flow forming means in a changeable manner; and the gas flow forming means and the second holding means based on information from the temperature measuring means to control the test object. Temperature control means for maintaining the temperature of the test object in a predetermined temperature range by spraying the gas flow toward the whole or a part thereof.

  The measuring device of the present invention is a measuring device for measuring the shape of a test object, the detection means for collecting the shape information of the test object, and preventing contamination of at least the detection means, and the test object Gas flow forming means for forming a gas flow for adjusting the temperature of the gas, temperature measuring means for measuring the temperature of the test object, and first holding means for holding the position and posture of the temperature measuring means in a changeable manner, The gas flow forming means, the first holding means, and the second holding means are controlled on the basis of information from the second holding means that holds the position and posture of the gas flow forming means in a changeable manner and the temperature measuring means. And a temperature control means for maintaining the temperature of the test object in a predetermined temperature range by spraying the gas flow toward the whole or a part of the test object. It is characterized by.

10 Measurement Device Body 11 Floor 12 Base 14 X Stage 15 Y Stage 16 Z Stage 17 Attenuation Cover (Attenuation Member)
20 Shape sensor (detection means)
21 Projection unit 22 Imaging unit 30 Infrared camera (temperature measurement unit)
40 CPU (output unit)
41 Stage Drive Circuit 42 Shape Measurement Circuit 43 Temperature Measurement Circuit (Temperature Measurement Unit)
50 Console 51 Monitor 52 Keyboard (temperature specification part)
53 Joystick (position designation part)

Claims (5)

A measuring device for measuring the shape of a test object,
Detecting means for collecting shape information of the test object;
A contamination-preventing gas flow forming means for forming a gas flow for preventing at least contamination of the detection means;
Temperature measuring means for measuring the temperature of the test object;
Gas flow forming means for forming a gas flow for adjusting the temperature of the test object;
Temperature control means for controlling the gas flow forming means based on information from the temperature measuring means to maintain the temperature of the test object in a predetermined temperature range;
A measuring device comprising: A measuring device for measuring the shape of a test object,
Detecting means for collecting shape information of the test object;
A contamination-preventing gas flow forming means for forming a gas flow for preventing at least contamination of the detection means;
Temperature measuring means for measuring the temperature of the test object;
Holding means for holding the temperature measurement means in a changeable position and orientation;
Gas flow forming means for forming a gas flow for adjusting the temperature of the test object;
Temperature control means for controlling the gas flow forming means based on information from the temperature measuring means to maintain the temperature of the test object in a predetermined temperature range;
A measuring device comprising: A measuring device for measuring the shape of a test object,
Detecting means for collecting shape information of the test object;
A contamination-preventing gas flow forming means for forming a gas flow for preventing at least contamination of the detection means;
Temperature measuring means for measuring the temperature of the test object;
Gas flow forming means for forming a gas flow for adjusting the temperature of the test object;
Holding means for holding the cooling gas flow forming means in a changeable position and orientation;
Temperature control means for controlling the gas flow forming means and the holding means based on information from the temperature measuring means to hold the temperature of the test object in a predetermined temperature range;
A measuring device comprising: A measuring device for measuring the shape of a test object,
Detecting means for collecting shape information of the test object;
A contamination-preventing gas flow forming means for forming a gas flow for preventing at least contamination of the detection means;
Temperature measuring means for measuring the temperature of the test object;
First holding means for holding the temperature measuring means in a changeable position and orientation;
Gas flow forming means for forming a gas flow for adjusting the temperature of the test object;
Second holding means for holding the position and posture of the gas flow forming means in a changeable manner;
Based on information from the temperature measuring means, temperature control means for controlling the gas flow forming means and the second holding means to hold the temperature of the test object in a predetermined temperature range;
A measuring device comprising: A measuring device for measuring the shape of a test object,
Detecting means for collecting shape information of the test object;
A contamination-preventing gas flow forming means for forming a gas flow for preventing at least contamination of the detection means;
Temperature measuring means for measuring the temperature of the test object;
First holding means for holding the temperature measuring means in a changeable position and orientation;
Gas flow forming means for forming a gas flow for adjusting the temperature of the test object;
Second holding means for holding the position and posture of the gas flow forming means in a changeable manner;
Temperature control means for controlling the gas flow forming means, the first holding means, and the second holding means based on information from the temperature measuring means to hold the temperature of the test object in a predetermined temperature range; ,
A measuring device comprising: