JP2011254295A - Vibrator and ultrasonic probe - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a vibrator that can be manufactured more simply.SOLUTION: A vibrator is a laminate in which a plurality of piezoelectric substances 22 having an electrode provided on an upper-surface and under-surface are laminated in a state where these are shifted in a plane direction, and the vibrator comprises: a laminate with an electrode layer 24 formed on the upper surface and the under-surface of the laminate and between piezoelectric substances by the electrode; a ground electrode 30 arranged on the upper-surface of the laminate; a signal electrode 32 arranged on the under-surface of the laminate; and a plurality of anisotropic conductive substances 28 arranged in a posture in which conductivity is exerted only in a laminating direction. The anisotropic conductive substance 28 is arranged between an exposed portion of the electrode layer 24 exposed outside due to being laminated with the piezoelectric substance 22 shifted and any one of exposed portions of the ground electrode 30, signal electrode 32 and other electrode layers 24, and thereby, electrically connects integrally both the even-numbered electrode layers 24-2 and 24-2, and both the odd-numbered electrode layers 24-1 and 24-3.

Description

  The present invention relates to a vibrator including a laminate formed by laminating a plurality of piezoelectric bodies, and an ultrasonic probe including the vibrator.

  In recent years, medical diagnosis using ultrasonic images has been put into practical use in the medical field. An ultrasonic image is formed based on an echo signal obtained by transmitting an ultrasonic wave from an ultrasonic probe having a built-in ultrasonic transducer to a site to be examined in a subject.

  The vibrator built in this ultrasonic probe has a piezoelectric body that can convert sound and voltage mutually. In recent years, a vibrator in which a piezoelectric material is laminated has been known in order to make this vibrator electrically low in impedance (for example, Patent Documents 1-11). Such a laminated vibrator is formed by laminating a plurality of piezoelectric bodies, and electrodes are formed between the top and bottom surfaces of the laminated body and between the laminated piezoelectric bodies. Of the plurality of electrodes, the odd-numbered electrodes and the even-numbered electrodes are electrically connected to each other and then connected to the ground electrode and the signal electrode. With such a configuration, a plurality of piezoelectric bodies are electrically connected in parallel and acoustically connected in series, and electrical matching between the vibrator and the transmission line, transmitter, and receiver is performed. The transmission / reception sensitivity characteristics of high sensitivity and wide band can be obtained.

  Here, in order to manufacture such a laminated vibrator, it is necessary to electrically connect odd-numbered electrodes and even-numbered electrodes, as described above. Many techniques for connecting the electrodes have been proposed. For example, in the conventional vibrator as shown in FIG. 18, an insulator that insulates the even-numbered electrode 24-2 on one side surface of the laminated body in which the piezoelectric bodies 22-1, 22-2, and 22-3 are laminated. After forming 52, the electrode 50 was formed on the one side surface by plating or the like, and the odd-numbered electrode layers 24-1 and 24-3 were electrically connected to each other. Similarly, after forming an insulator that insulates the odd-numbered electrode layer 24-3 on the other side of the laminate, the electrode 50 is formed on the other side by plating or the like, and the even-numbered electrode layer 24- 2, 24-4 were electrically connected to each other.

  Further, in the conventional vibrator as shown in FIG. 19, the electrode layers 24 and 54 are formed on the upper surface, the lower surface, and both side surfaces of each piezoelectric body 22-1, 22-2 and 22-3. A gap 56 for partially separating the electrode layer 24 is formed on the lower surface. Then, the even-numbered electrode layers 24-2 and 24-4 and the odd-numbered electrode layers 24-1 and 24-3 are electrically connected by alternately stacking the piezoelectric bodies 22 having such a configuration. It was.

JP 2004-80193 A JP 61-8100 A JP 2008-302044 A JP 2003-61193 A JP 2004-56352 A JP 2007-201901 A JP 2007-215730 A JP 2007-273484 A JP-A 63-175761 JP-A-8-173416 JP 2007-173309 A

  However, such a conventional technique has a problem that the manufacturing process of the vibrator tends to be complicated and the manufacturing cost tends to increase. For example, the vibrator shown in FIG. 18 requires a process of forming the insulator 52 and the electrode 50 on the side surface of the laminate, which is very laborious. Further, in the vibrator shown in FIG. 19, after each piezoelectric body is cut out to a predetermined size, it is necessary to form electrodes 54 on the side surfaces and to form gaps 56 for separating the upper and lower electrodes. . Further, the positioning accuracy of each piezoelectric body 22 needs to be narrower than the electrode separation width (gap width), which is very laborious.

  Therefore, an object of the present invention is to provide a transducer that can be manufactured more easily and an ultrasonic probe including the transducer.

  The vibrator according to the present invention is a laminated body in which a plurality of piezoelectric bodies each provided with an electrode on the upper surface and the lower surface are stacked in a state shifted in the plane direction, and the electrodes are interposed between the upper surface, the lower surface, and the piezoelectric body. A layered body having an electrode layer formed thereon, a first horizontal electrode disposed on the top surface of the layered body, a second horizontal electrode disposed on the bottom surface of the layered body, and exhibiting conductivity only in the stacking direction. A plurality of anisotropic conductors arranged in a posture, and the electrode layer exposed to the outside by being laminated in a shifted manner, and any one of the exposed portions of the first horizontal electrode, the second horizontal electrode, and the other electrode layer And a plurality of anisotropic conductors that electrically connect even-numbered electrode layers and odd-numbered electrode layers together.

  In another preferred embodiment, the stacked body is exposed with at least a part of each of the odd-numbered electrode layers facing the exposed portion of the first horizontal electrode or the other odd-numbered electrode layers, and the even-numbered electrodes. A plurality of piezoelectric bodies are laminated so that at least a part of each layer is exposed in a state of facing the exposed portion of the second horizontal electrode or other even-numbered electrode layer. In this case, in the laminated body, two sizes of piezoelectric bodies having different widths by the width of the anisotropic conductor are alternately shifted in the plane direction so that the aligned end portions are alternately changed. The direction conductor is shifted between the odd-numbered electrode layers and stacked between the exposed portion exposed to the outside and the first horizontal electrode, and is shifted and stacked among the even-numbered electrode layers. It is desirable to be disposed between the exposed portion exposed to the outside and the first horizontal electrode.

  In another preferred aspect, the plurality of piezoelectric bodies is an odd number, and an even number of electrode layers are formed. In another preferred embodiment, at least one of the plurality of electrode layers is electrically connected to the first horizontal electrode or the second horizontal electrode via the other electrode layer.

  Another ultrasonic probe according to the present invention is an ultrasonic probe in which a backing material, a vibrator, a matching layer, and an acoustic lens are housed inside a case, and the vibrator includes: A laminated body in which a plurality of piezoelectric bodies having electrodes provided on the upper surface and the lower surface are stacked in a state shifted in the plane direction, and an electrode layer is formed between the upper surface, the lower surface, and the piezoelectric body of the laminated body by the electrodes. A laminated body, a first horizontal electrode disposed on the upper surface of the laminated body, a second horizontal electrode disposed on the lower surface of the laminated body, and a plurality of layers arranged in a posture that exhibits conductivity only in the laminating direction. An anisotropic conductor, which is disposed between any one of the electrode layer exposed to the outside by being laminated while being shifted, and the exposed portion of the first horizontal electrode, the second horizontal electrode, and the other electrode layer. Electrically connect even-numbered electrode layers and odd-numbered electrode layers together. Characterized in that it comprises a plurality of anisotropic conductor to be connected to.

  According to the present invention, since the electrode layer can be electrically connected with the anisotropic conductor, and it is not necessary to separately form an electrode or an insulator, the vibrator, and thus the ultrasonic probe can be more easily formed. Can be manufactured.

It is a schematic block diagram of the ultrasonic probe which is embodiment of this invention. It is a schematic perspective view of a vibrator. It is a schematic front view of a vibrator. It is a figure which shows the structure of an anisotropic conductor. It is a figure which shows the flow of manufacture of a vibrator | oscillator. It is a figure which shows the flow of manufacture of a vibrator | oscillator. It is a figure which shows the flow of manufacture of a vibrator | oscillator. It is a figure which shows the flow of manufacture of a vibrator | oscillator. It is a figure which shows the flow of manufacture of a vibrator | oscillator. It is a figure which shows the flow of manufacture of a vibrator | oscillator. It is a figure which shows the flow of manufacture of a vibrator | oscillator. It is a figure which shows the flow of manufacture of a vibrator | oscillator. It is a figure which shows the flow of manufacture of a vibrator | oscillator. It is a schematic front view of another vibrator. It is a schematic front view of another vibrator. It is a schematic front view of another vibrator. It is a schematic front view of another vibrator. It is a schematic perspective view of the conventional vibrator. It is a schematic perspective view of another conventional vibrator.

  Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a schematic view of the internal structure of an ultrasonic probe according to an embodiment of the present invention.

  As shown in FIG. 1, a backing material 10, a plurality of transducers 12 divided into strips, matching layers 13 and 14, and an acoustic lens 16 are disposed inside the ultrasonic probe. Yes. The backing material 10 is a member that is provided on the back surface of the vibrator 12 and absorbs backward sound. By providing such a backing material 10, excessive vibration can be suppressed and the pulse width can be shortened. The vibrator 12 converts sound into voltage and voltage into sound. In the present embodiment, the vibrator 12 is a laminated vibrator 12 in which a plurality of piezoelectric bodies are laminated. This will be described in detail later.

  The matching layers 13 and 14 are made of a material having an intermediate acoustic impedance between the vibrator 12 and the living body, and are members that reduce reflection due to a difference in acoustic impedance. In the present embodiment, the first matching layer 13 and the second matching layer 14 are provided in order from the vibrator 12 side, and the second matching layer 14 has an acoustic impedance closer to a living body than the first matching layer 13. have. The acoustic lens 16 is a lens made of a material having a sound velocity slower than that of a living body, such as silicon, and converges the ultrasonic beam in the slice direction.

  Next, the vibrator 12 used in the present embodiment will be described in detail. FIG. 2 is a schematic perspective view of the vibrator 12 used in the present embodiment, and FIG. 3 is a schematic front view. In the following drawings, in order to clarify the configuration of the vibrator 12, each member is illustrated on a different scale from the actual scale. For example, in the drawings, the electrodes are shown as being thick, but in actuality, these electrodes are formed as thin films and are actually thinner.

  The vibrator 12 according to the present embodiment includes a plurality of piezoelectric bodies 22-1 2-2 and 22-3 (hereinafter simply referred to as “piezoelectric bodies 22” when the three piezoelectric bodies are not distinguished from each other, and the hyphens and the following are omitted. Hereinafter, the laminated body 20 in which the other members are laminated), the ground electrode 30 connected to the upper surface of the laminated body 20 (that is, the upper surface of the piezoelectric body 22-1 positioned at the uppermost stage), and the laminated body 20 From the signal electrode 32 connected to the lower surface (that is, the lower surface of the piezoelectric body 22-3 positioned at the lowermost layer), the anisotropic conductor 28 that electrically connects the electrodes formed on the surface of each piezoelectric body 22, and the like It is configured.

  As is well known, the piezoelectric body 22 converts sound into voltage and voltage into sound. In the present embodiment, three piezoelectric bodies 22 are stacked to form a stacked body 20 in order to obtain an electrically low impedance.

As the piezoelectric body 22, piezoelectric ceramics such as PZT and barium titanate, PZT (Pb (Zn _1/3 Nb _2/3 ) O ₃ —PbTiO ₃ ), PMNT (Pb (Mg _1/3 Nb _{2). / 3} ) Piezoelectric single crystals such as O ₃ -PbTiO ₃ ) are used, and each is completely polarized in the direction indicated by the arrow in the figure. When laminating, the layers are laminated vertically so that the directions of polarization are alternately arranged.

  Electrodes are formed on the upper and lower surfaces of each piezoelectric body 22 so that the electrodes are interposed between the piezoelectric bodies 22 when stacked. And this electrode has an upper surface electrode layer 24-1 positioned on the uppermost surface of the multilayer body 20, a lower surface electrode layer 24-4 positioned on the lower surface of the multilayer body 20, and an interior positioned between two adjacent piezoelectric bodies 22. The electrode layers 24-2 and 24-3 are configured. Of the plurality of electrode layers 24, the odd-numbered electrode layers 24-1 and 24-3 counted from the ground electrode 30 are electrically connected to the ground electrode 30, and the even-numbered electrode layers 24-2 and 24-24. -4 is electrically connected to the signal electrode 32. In the present embodiment, in order to easily and surely make this electrical connection, the three piezoelectric bodies 22 are laminated in a special manner and the widths of the piezoelectric bodies 22 are made different. This will be described in detail later. .

  A ground electrode 30 is disposed on the upper surface of the stacked body 20. The ground electrode 30 is a horizontal electrode that physically contacts the electrode of the upper electrode layer 24-1 (first electrode layer) located on the upper surface of the stacked body 20, and the upper electrode layer 24- 1 is electrically connected.

  A signal electrode 32 is disposed on the lower surface of the stacked body 20. The signal electrode 32 is a horizontal electrode that physically contacts the electrode of the lower electrode layer 24-4 (fourth electrode layer) located on the lower surface of the multilayer body 20, and the lower electrode layer 24- 4 is electrically connected.

  The anisotropic conductor 28 electrically connects the odd-numbered electrode layers 24-1 and 24-3 to the ground electrode 30 and the even-numbered electrode layers 24-2 and 24-4 to the signal electrode 32, respectively. It is a member arrange | positioned. As the name suggests, the anisotropic conductor 28 is a member that exhibits conductivity only in a specific direction. As the anisotropic conductor 28, those having various configurations can be adopted. For example, as shown in FIG. 4A, a fiber-like conductive filler 42 is oriented on the base material of the insulator 40, What was filled may be used. Further, as shown in FIG. 4B, the anisotropic conductor 28 has a groove or a hole vertically penetrating the insulator 40 filled with the conductor 42, and the periphery of the conductor 42 excluding the upper and lower surfaces. May be used that is covered with an insulator 40. Further, as the anisotropic conductor 28, as shown in FIG. 4 (C), the electrode film 42 is formed on the top and bottom and one side of the base material of the insulator 40, or as shown in FIG. The conductive film 42 may be formed on one side of the insulator 40 having a certain shape and then bent.

  Here, in the present embodiment, in order to easily connect each electrode layer 24 using the anisotropic conductor 28, the widths of the plurality of piezoelectric bodies 22 are made different, and the plurality of piezoelectric bodies are used. The layers 22 are stacked while being shifted in the surface direction. That is, as shown in FIGS. 2 and 3, in the present embodiment, the first piezoelectric body 22-1 and the third piezoelectric body 22-3 have the same width, and the second piezoelectric body 22-2 has The width is made smaller by the width of the anisotropic conductor 28 than the width of the first and second piezoelectric bodies 22-1 and 22-3. In other words, in the present embodiment, two sizes of piezoelectric bodies 22 having different widths by the width of the anisotropic conductor 28 are alternately stacked on the upper and lower sides.

  At the time of this lamination, one end (right end of the drawing) of the first piezoelectric body 22-1 is aligned with one end of the second piezoelectric body 22-2, and the other end of the first piezoelectric body 22-1 (left end of the drawing). ) Is shifted from the other end of the second piezoelectric body 22-2. Also, the other end of the third piezoelectric body 22-3 is aligned with the other end of the second piezoelectric body 22-2, and one end of the third piezoelectric body 22-3 is the second piezoelectric body 22-2. To be offset from one end. In other words, in the present embodiment, the two sizes of the piezoelectric bodies 22 are alternately stacked so that the aligned end portions are alternately changed. Furthermore, in other words, in the present embodiment, at least a part of each of the odd-numbered electrode layers is exposed while facing the ground electrode 30, and at least a part of each of the even-numbered electrode layers 24-2 is exposed. The piezoelectric bodies are stacked while being shifted in the surface direction so as to be exposed in a state of facing the signal electrode 32.

  The anisotropic conductor 28 is disposed between the exposed portion of the electrode layer 24 and the signal electrode 32 or the ground electrode 30 so as to exhibit conductivity in the stacking direction. More specifically, in the present embodiment, one of the anisotropic conductors 28 is disposed between the exposed portion of the second electrode layer 24-2 and the signal electrode 32. Another anisotropic conductor 28 is disposed between the exposed portion of the third electrode layer 24-3 and the ground electrode 30. With this arrangement, the odd-numbered electrode layers 24-1 and 24-3 are electrically connected to the ground electrode 30 and the even-numbered electrode layer 24-2 is electrically connected to the signal electrode 32 through the anisotropic conductor 28. Will be connected to.

  Here, as is apparent from the above description, in the vibrator 12 of this embodiment, electrodes and insulating portions are formed on the side surfaces of the multilayer body 20, and insulating portions (gap) are formed on the surface of each piezoelectric body 22. There is no need to do. Further, since the anisotropic conductor 28 is merely disposed in the gap formed by shifting the piezoelectric body 22, fine positioning is not necessary. As a result, it is possible to greatly simplify the manufacturing process of the transducer 12, and thus the ultrasonic probe.

  Next, the flow of manufacturing the ultrasonic probe of this embodiment will be described with reference to FIGS. 5 to 13 are schematic views showing a process of manufacturing the ultrasonic probe.

  When manufacturing an ultrasonic probe, first, as shown in FIG. 5, the matching layers 13 and 14 are positioned. Specifically, the matching layer positioning jig 62 is installed on the surface plate 60. Thereafter, an adhesive is applied to the first matching layer 13 and the second matching layer 14, and the second matching layer 14 and the first matching layer 13 are sequentially stacked in the pocket of the matching layer positioning jig 62. Next, as shown in FIG. 6, an adhesive is applied to both surfaces of the ground electrode 30, and the ground electrode 30 is disposed on the first matching layer 13.

  If the ground electrode 30 can be arranged, as shown in FIG. 7, a laminated body positioning jig 64 is arranged to position the piezoelectric body 22 and the anisotropic conductor 28. Specifically, the laminated body positioning jig 64 is installed on the ground electrode 30. Further, an adhesive is applied to the piezoelectric body 22 and the anisotropic conductor 28. Then, the piezoelectric body 22 and the anisotropic conductor 28 are put in the positioning pocket so as to be arranged as shown in FIG.

  That is, first, the first piezoelectric body 22-1 is placed in the positioning pocket. At this time, the side surface of the first piezoelectric body 22-1 is positioned against the inner surface of the positioning pocket. With this arrangement, the first electrode layer 24-1 is electrically connected to the ground electrode 30. Subsequently, the first anisotropic conductor 28 is disposed in the gap between the first piezoelectric body 22-1 and the inner surface of the positioning pocket. With this arrangement, the first anisotropic conductor 28 is electrically connected to the ground electrode 30. Next, the second piezoelectric body 22-2 is disposed on the first piezoelectric body 22-1. At this time, the second piezoelectric body 22-2 is positioned by contacting the side surface of the anisotropic conductor 28 with the side surface. Next, the second anisotropic conductor 28 is disposed in the gap between the second piezoelectric body 22-2 and the inner surface of the positioning pocket. With this arrangement, the second electrode layer 24-2 and the second anisotropic conductor 28 are electrically connected. Next, the third piezoelectric body 22-3 is disposed on the second piezoelectric body 22-2. At this time, the electrode on the upper surface (the surface on the ground electrode 30 side) of the third piezoelectric body 22-3, that is, the third electrode layer 24-3 is in contact with the end surface of the first anisotropic conductor 28. Then, it is electrically connected to the ground electrode 30 through the anisotropic conductor 28.

  As described above, when the piezoelectric body 22 and the anisotropic conductor 28 are stacked, as shown in FIG. 8, an adhesive is applied to a necessary portion of the signal electrode 32, and the signal electrode 32 is attached to the stacked body 20. put on top. At this time, since the signal electrode 32 contacts the electrode formed on the lower surface of the third piezoelectric body 22-3, that is, the fourth electrode layer 24-4, the electrode layer and the signal electrode 32 are electrically connected. Connected to. Further, the second anisotropic conductor 28 is also electrically connected to the signal electrode 32, and as a result, the second electrode layer 24-2 and the signal electrode 32 are interposed via the anisotropic conductor 28. Will be electrically connected. That is, the odd-numbered electrode layers 24-1 and 24-3 are all electrically connected to the ground electrode 30, and the even-numbered electrode layers 24-2 are all electrically connected to the signal electrode 32.

  When these operations are completed, subsequently, a backing positioning jig 66 is installed on the signal electrode 32 as shown in FIG. And after apply | coating an adhesive agent to the required location of the backing material 10, the said backing material 10 is put into a positioning pocket.

  Next, as shown in FIG. 10, each member is pressurized and brought into close contact with the pressurizer 68. Subsequently, as shown in FIG. 11, the backing positioning jig 66 is removed, and the signal electrode 32 is bent along the backing material 10. In addition, as shown in FIG. 12, the laminate positioning jig 64 is also removed, and the ground electrode 30 is bent along the signal electrode 32. Further, as shown in FIG. 13, the alignment layer positioning jig 62 is removed, and these components are heated to cure the adhesive.

  When the members are joined by the curing of the adhesive, the component is removed from the jig, and the vibrator 12 is separated into strips. Then, after filling the separated grooves with a reinforcing agent, the acoustic lens 16 is attached to the surfaces of the matching layers 13 and 14, thereby forming an ultrasonic probe as shown in FIG.

  As is clear from the above description, according to the present embodiment, an ultrasonic probe in which electrodes are appropriately connected can be obtained by appropriately stacking the constituent elements of the ultrasonic probe. . In other words, unlike the prior art, there is no need to separately provide a step of forming an insulating portion or an electrode in the laminate 20, and it is not necessary to achieve fine positioning. As a result, it is possible to easily manufacture an ultrasonic probe as compared with the conventional case.

  In addition, the manufacturing process demonstrated here is an example, The order etc. which arrange | position each piezoelectric material 22 and the anisotropic conductor 28 may be changed suitably. In the present embodiment, the case where there are three piezoelectric bodies 22 is described as an example, but the number of stacked piezoelectric bodies 22 may be larger.

  For example, five piezoelectric bodies 22 may be stacked as shown in FIG. Also in this case, two sizes of piezoelectric bodies 22 having different widths by the width of the anisotropic conductor 28 are alternately laminated. In the illustrated example, the widths of the first, third, and fifth piezoelectric bodies 22-1, 22-3, and 22-5 are set in order from the ground side to the second and fourth piezoelectric bodies 22-2 and 22-4. The width of the anisotropic conductor 28 is made larger than the width of the anisotropic conductor 28. Further, when the piezoelectric bodies 22 are stacked, the two sizes of piezoelectric bodies 22 are alternately turned up and down so that the aligned end portions are alternately changed (in other words, the shifted end portions are alternately changed). Laminated. As a result, at least a part of each of the odd-numbered electrode layers 24-1, 24-3, and 24-5 is exposed in a state of facing the ground electrode 30, and the even-numbered electrode layers 24-2 and 24-4 are exposed. At least a part of each is exposed in a state facing the signal electrode 32. Then, the anisotropic conductor 28 is disposed between the exposed portion and the ground electrode 30 or the signal electrode 32. As a result, the odd-numbered electrode layers 24-1, 24-3 and 24-5 are connected to the ground electrode 30, and the even-numbered electrode layers 24-2 and 24-4 are connected to the signal electrode 32.

  As another form, five piezoelectric bodies 22 may be laminated as shown in FIG. In this case, piezoelectric bodies 22 having a plurality of sizes having different widths are used. In the illustrated example, the second piezoelectric body 22-2 has the smallest width, and the first, third, and fourth piezoelectric bodies 22-1, 22-3, and 22-4 are different from the second piezoelectric body 22-2. The width is wide by the width of the direction conductor 28. The fifth piezoelectric body 22-5 is wider than the first, third, and fourth piezoelectric bodies 22-1, 22-3, and 22-4 by the width of the anisotropic conductor 28.

  When the layers are stacked, the piezoelectric bodies 22 are stacked while being shifted in the plane direction as in the above-described example. However, unlike the above-described embodiment, the ground electrode 30 or the signal electrode 32 is used for some of the electrode layers 24. Instead, it is exposed in a state facing the exposed portion of the other electrode layer 24.

  That is, in this embodiment, the second electrode layer 24-2 is exposed in a state of facing the exposed portion of the fourth electrode layer 24-4. Then, by disposing the anisotropic conductor 28 between the two exposed portions, the second electrode layer 24-2 and the fourth electrode layer 24-4 are electrically connected. The fourth electrode layer 24-4 is also provided with an exposed portion at the left end of the drawing, and this exposed portion faces the signal electrode 32. The fourth electrode layer 24-4 and the signal electrode 32 are electrically connected by disposing the anisotropic conductor 28 between the exposed portion and the signal electrode 32. As a result, the second electrode layer 24-2 electrically connected to the fourth electrode layer 24-4 is also electrically connected to the signal electrode 32.

  In other words, in this embodiment, at least a part of each even-numbered electrode layer 24-2, 24-4, 24-6 is in a state facing the exposed portion of the signal electrode 32 or the other even-numbered electrode layer. Each piezoelectric body 22 to be exposed is laminated. Then, by arranging the anisotropic conductor 28 so that one end is in contact with the exposed portion, all the electrode layers of the even-numbered electrode layers 24-2, 24-4, and 24-6 are connected to the signal electrode 32. Can be electrically connected. Here, even-numbered electrode layers 24-2, 24-4, and 24-6 are opposed to each other, but odd-numbered electrode layers 24-1, 24-3, and 24-5 are naturally opposed to each other. You may let them.

  Further, an example in which seven piezoelectric bodies are stacked will be described with reference to FIGS. In the illustrated example of FIG. 16, similarly to the case of FIGS. 2 and 14, two sizes of piezoelectric bodies 22 having different lengths by the width of the anisotropic conductor 28 are alternately stacked. Specifically, the odd-numbered piezoelectric bodies 22-1, 22-3, 22-5, and 22-7 are more anisotropically conductive than the even-numbered piezoelectric bodies 22-2, 22-4, and 22-6. It is enlarged by the width of. At least a part of each of the odd-numbered electrode layers 24-1, 24-3, 24-5, and 24-7 is connected to the ground electrode 30, and the even-numbered electrode layers 24-2, 24-4, and 24-6 are provided. Each piezoelectric body 22 is laminated while being shifted in the surface direction so that at least a part of each of 24-8 is exposed in a state of facing the signal electrode 32. Then, by arranging the anisotropic conductor 28 between the exposed portion and the ground electrode 30 or the signal electrode 32, the odd-numbered electrode layers 24-1, 24-3, 24-5 and 24-7 are formed. The even-numbered electrode layers 24-2, 24-4, 24-6, and 24-8 are electrically connected to the ground electrode 30 and the signal electrode 32.

  In the illustrated example of FIG. 17, the piezoelectric bodies 22 having various widths are stacked while being shifted in the surface direction. At this time, the odd-numbered electrode layers 24-1, 24-3, 24-5, and 24-7 are exposed so that at least a part thereof is opposed to the ground electrode 30 or the odd-numbered other electrode layers 24. To do. The even-numbered electrode layers 24-2, 24-4, 24-6 and 24-8 are at least partially exposed in a state of facing the signal electrode 32 or the other even-numbered electrode layer 24. Like that. Then, the anisotropic conductor 28 is disposed between the exposed portion of each electrode layer 24 and the other exposed portion or the signal electrode 32 or the ground electrode 30. As a result, the odd-numbered electrode layers 24-1, 24-3, 24-5, and 24-7 are electrically connected to the ground electrode 30 via the anisotropic conductor 28 and the other odd-numbered electrode layers. The Similarly, the even-numbered electrode layers 24-2, 24-4, 24-6, and 24-8 are electrically connected to the signal electrode 32 through the anisotropic conductor 28 and other even-numbered electrode layers. The

  Thus, even when the number of the piezoelectric bodies 22 is increased, at least a part of each odd-numbered electrode layer is exposed in a state of facing the ground electrode 30 or another odd-numbered electrode layer, and The piezoelectric bodies 22 are stacked while being shifted in the surface direction so that at least a part of each of the even-numbered electrode layers is exposed in a state of facing the signal electrode 32 or other even-numbered electrode layers. A direction conductor 28 may be disposed.

  10 backing material, 12 vibrator, 13 first matching layer, 14 second matching layer, 16 acoustic lens, 20 laminate, 22 piezoelectric body, 24 electrode layer, 28 anisotropic conductor, 30 ground electrode, 32 signal electrode, 40 insulator, 42 conductor, 60 surface plate, 62, 64, 66 positioning jig, 68 pressurizer.

Claims (6)

A laminated body in which a plurality of piezoelectric bodies having electrodes provided on the upper surface and the lower surface are stacked in a state shifted in the plane direction, and an electrode layer is formed between the upper surface, the lower surface, and the piezoelectric body of the laminated body by the electrodes. A laminate,
A first horizontal electrode disposed on the top surface of the laminate;
A second horizontal electrode disposed on the lower surface of the laminate,
A plurality of anisotropic conductors arranged in an orientation that exhibits conductivity only in the laminating direction, the electrode layer exposed to the outside by being laminated in a shifted manner, the first horizontal electrode, the second horizontal electrode, A plurality of anisotropic conductors that electrically connect even-numbered electrode layers and odd-numbered electrode layers together by being disposed between any one of the exposed portions of the other electrode layers;
A vibrator comprising: The vibrator according to claim 1,
The stacked body is exposed in a state in which at least a part of each of the odd-numbered electrode layers is opposed to an exposed part of the first horizontal electrode or another odd-numbered electrode layer, and at least a part of each of the even-numbered electrode layers is exposed. A vibrator, wherein a plurality of piezoelectric bodies are laminated so as to be exposed in a state of being opposed to an exposed portion of the second horizontal electrode or another even-numbered electrode layer. The vibrator according to claim 2,
In the laminated body, two sizes of piezoelectric bodies having different widths by the width of the anisotropic conductor are alternately shifted and laminated in the plane direction so that the aligned end portions are alternately changed.
The anisotropic conductor is laminated between the exposed portion exposed to the outside by laminating the odd-numbered electrode layers and laminating and out of the even-numbered electrode layers. The vibrator is disposed between the exposed portion exposed to the outside and the first horizontal electrode. The vibrator according to any one of claims 1 to 3,
The plurality of piezoelectric bodies is an odd number, and an even number of electrode layers are formed. The vibrator according to claim 1 or 2,
At least one of the plurality of electrode layers is electrically connected to the first horizontal electrode or the second horizontal electrode through another electrode layer. An ultrasonic probe in which a backing material, a vibrator, a matching layer, and an acoustic lens are housed in a case,
The vibrator is
A laminated body in which a plurality of piezoelectric bodies having electrodes provided on the upper surface and the lower surface are stacked in a state shifted in the plane direction, and an electrode layer is formed between the upper surface, the lower surface, and the piezoelectric body of the laminated body by the electrodes. A laminate,
A first horizontal electrode disposed on the top surface of the laminate;
A second horizontal electrode disposed on the lower surface of the laminate,
A plurality of anisotropic conductors arranged in an orientation that exhibits conductivity only in the laminating direction, the electrode layer exposed to the outside by being laminated in a shifted manner, the first horizontal electrode, the second horizontal electrode, A plurality of anisotropic conductors that electrically connect even-numbered electrode layers and odd-numbered electrode layers together by being disposed between any one of the exposed portions of the other electrode layers;
An ultrasonic probe comprising: