JP2011243812A - Substrate transfer method of substrate processing apparatus, scheduler, and operation control device of substrate processing apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a substrate transfer method of a substrate processing apparatus, a scheduler, and an operation control device of a substrate processing apparatus which perform a new substrate introduction schedule control by a linear programming schedule because the operation control in the maximum throughput is done as long as the normal operation continues from the apparatus operation starting point, and which can control by switching to a simulation method scheduler which can flexibly make such a substrate transfer schedule as substrate recovery while satisfying a process constraint condition when such events happen as production restarting after an accident occurs in a processing tank and the apparatus stops working, unit use/disuse dynamic switching, and process NG generation.SOLUTION: A substrate transfer method of a substrate processing apparatus, a scheduler, and an operation control device of a substrate processing apparatus comprises a linear programming scheduler 45, a simulation method scheduler 46, and a scheduler switching process 41, in order to perform substrate transfer scheduling by switching between linear programming and simulation method.

Description

  The present invention includes a substrate processing method and a control unit of a substrate processing apparatus which includes a plurality of processing units and a plurality of substrate transporters, and sequentially transports substrates loaded by the substrate transporter to the plurality of processing units. And an operation control apparatus for a substrate processing apparatus using the scheduler.

  The substrate processing apparatus has various configurations, but in general, a plurality of substrates are sequentially put into the apparatus from a substrate storage container, and are transferred between a plurality of processing devices (processing units) by a plurality of transfer machines. In many cases, a substrate that is processed in parallel and that is configured to collect all the processed substrates in a substrate storage container is used. In addition, some substrate storage containers can be mounted / replaceable, and in such a substrate processing apparatus, substrate processing can be performed continuously by appropriately replacing the substrate storage container loaded with unprocessed substrates. The device can be operated.

  In the above-mentioned substrate processing apparatus, for example, a substrate plating processing apparatus that performs bump formation, TSV formation, rewiring plating, etc., severe process constraint conditions (predetermined process time interval from the end of the process to the start of the next process) While satisfying the above, it may be required to realize a high production amount (substrate processing amount per unit time including a recovery time from a failure). In order to satisfy this strict requirement, there are various scheduling methods for making an optimal substrate transfer plan for substrate transfer control of the substrate plating apparatus, such as a linear programming scheduler and a simulation method scheduler.

  The linear programming scheduler that uses linear programming is a technology that was developed with the primary aim of always demonstrating maximum throughput in normal equipment operation control. Use.

  The simulation method scheduler using the simulation method is not a technique that can guarantee the maximum throughput as the linear programming scheduler. However, there is an advantage that a substrate transfer schedule such as substrate recovery can be flexibly created while satisfying the process constraint conditions for events such as production resumption, unit use / non-use dynamic switching, and process NG occurrence.

JP 2001-319842 A Japanese Patent No. 399478

  However, the linear programming scheduler is difficult to formulate in linear programming when a non-stationary event such as the occurrence of a failure occurs. It is necessary to collect in the storage container and start the substrate transfer process. Naturally, during this substrate recovery, a new substrate cannot be put in, so the production amount is greatly reduced. For example, in a plating processing apparatus such as a bump forming plating processing apparatus in which many substrates are present at the same time, it takes a long time (for example, 2 hours) to recover the substrate.

  Further, in the above plating processing apparatus, when a rectifier abnormality or the like occurs in the plating processing section during the substrate process, in order to rescue the substrate, the process is interrupted and immediately transferred to another plating processing section of the same type. It is necessary to continue or to collect the substrate in a substrate collection container. However, since the current scheduler does not have a scheduling means for this purpose, in order not to generate a defective substrate, the processing start of the continuous new substrate is temporarily stopped and the defective substrate and the substrate being processed are controlled by the apparatus controller. Thus, it is necessary to recover the substrate into the substrate recovery container and to introduce a subsequent new substrate from the state in which the substrate is no longer in the apparatus. Therefore, the production volume is greatly reduced.

  In addition, when a failure occurs in the plating processing unit during the substrate process and the plating processing unit becomes unusable after that, the current scheduler dynamically changes the setting of the plating processing unit. Subsequent substrates cannot be processed continuously. As a result, in order to change the setting of the plating processing section, it is necessary to temporarily stop the introduction of a new substrate into the apparatus and stop the apparatus, and the production amount (substrate plating processing amount) is greatly reduced.

  The present invention has been made in view of the above points, and as long as the normal operation continues after the start of the apparatus operation, the new substrate loading schedule control is performed by the linear programming scheduler in order to perform the operation control at the maximum throughput. When the production is restarted after a failure occurs in the processing tank and the system stops, such as when the unit is used / not used dynamically, and when the process NG occurs It is an object of the present invention to provide a substrate transfer method and a scheduler that can be controlled by switching to a simulation method scheduler that can flexibly create a substrate transfer schedule.

  In addition, in the unsteady state until the substrate to be collected in the apparatus returns to the substrate storage container, operation control is performed by the simulation method scheduler including the subsequent introduction of the new substrate, and the apparatus operation returns to the steady state only by the introduction of the new substrate. It is an object to provide an operation control device for a substrate processing apparatus that returns control to a linear programming schedule at a time.

  In order to solve the above-described problems, the present invention controls a plurality of substrate processing units that process a substrate, a transfer unit that transfers a substrate, substrate transfer in the transfer unit, and substrate processing in the substrate processing unit. A substrate transport method for a substrate processing apparatus including a control unit for performing substrate transport scheduling by switching between a linear programming method and a simulation method.

  Further, the present invention provides a substrate transfer method for the substrate processing apparatus described above, wherein a substrate transfer schedule for introducing a new substrate is created by linear programming to transfer the substrate, and when an abnormality of the apparatus is detected, the substrate by the simulation method is used. Switching to transfer scheduling is performed, and a substrate transfer schedule including transfer for recovery of a target substrate or continuation of a process and transfer of a loaded substrate is created and substrate transfer is performed.

  According to the present invention, in the substrate transfer method of the substrate processing apparatus, when it is detected that the apparatus has returned from the abnormal state to the normal state after the substrate transfer process in the substrate transfer scheduling by the simulation method after the abnormality of the apparatus is detected. Returning to the substrate transfer processing by the substrate transfer scheduling by the linear programming method.

  In the substrate transport method of the substrate processing apparatus according to the present invention, the abnormality of the apparatus is that production restarts from the apparatus stop state, unit use / non-use dynamic switching, and process NG occurs. And

  In the substrate transfer method of the substrate processing apparatus according to the present invention, the state in which the apparatus is returned to the normal state means that the processing of the collection target substrate in the apparatus is completed, the process returns to the substrate storage container, and the substrate is placed in the apparatus. This is characterized in that there is a situation where there is no existing or only a new input substrate being processed exists.

  Further, according to the present invention, in the substrate transfer method of the substrate processing apparatus, when switching from the linear programming method to the simulation method, or from the simulation method to the linear programming method, the scheduled substrate transfer schedule and substrate process condition data at the time of switching are provided. Is delivered to the scheduler of the switching destination.

  In the substrate transfer method of the substrate processing apparatus, the substrate process condition data includes substrate number data of a scheduled substrate, process time setting in the substrate processing unit, and transfer order setting information in the transfer unit. It is characterized by that.

  The present invention also includes a plurality of substrate processing units for processing a substrate, a transport unit for transporting the substrate, and a control unit for transporting the substrate in the transport unit and controlling the substrate processing in the substrate processing unit. A scheduler built in a control unit of a substrate processing apparatus for calculating a substrate transfer schedule, wherein the substrate transfer scheduling is switched between a linear programming method and a simulation method.

  Further, the present invention creates a substrate transfer schedule for loading a new substrate by linear programming in the scheduler, and creates a substrate transfer schedule for recovery of the target substrate or process continuation when the apparatus is abnormal by a simulation method. It is characterized by doing.

  Further, the present invention is characterized in that, in the above scheduler, after the substrate is scheduled by the simulation method after the abnormality of the apparatus, when the apparatus returns from the abnormal state to the normal state, the scheduling is returned to the substrate conveyance scheduling by the linear programming method.

  Further, the present invention is characterized in that, in the scheduler, the abnormality of the apparatus is that production restarts from the apparatus stop state, unit use / non-use dynamic switching, and process NG occurs.

  Further, according to the present invention, in the scheduler, the state in which the apparatus is returned to the normal state means that the processing of the substrate to be collected in the apparatus is completed, the process returns to the substrate storage container, and no substrate exists in the apparatus. Alternatively, only a new input substrate being processed exists.

  Further, according to the present invention, when switching from the linear programming method to the simulation method or from the simulation method to the linear programming method in the above scheduler, the scheduled substrate transfer schedule and the substrate process condition data at the time of switching are transferred to the switching destination scheduler. It is characterized by being delivered to.

  In the scheduler, the substrate process condition data includes substrate number data of a scheduled substrate, process time setting in a substrate processing unit, and transfer order setting information in a transfer unit.

  In addition, the present invention provides a substrate including a plurality of substrate processing units that process a substrate, a transfer unit that transfers a substrate, and a control unit that controls the transfer of the substrate in the transfer unit and the substrate processing in the substrate processing unit. An operation control apparatus for a processing apparatus, wherein the control unit includes a scheduling switching unit that switches a substrate transfer scheduling between a linear programming method and a simulation method.

  Further, in the operation control apparatus of the substrate processing apparatus, the present invention creates a substrate transport schedule for loading a new substrate by a linear programming method, transports the substrate, and detects an abnormality of the device. Switching to the substrate transfer scheduling, the substrate transfer is performed by creating a substrate transfer schedule including transfer of the target substrate or transfer for continuing the process and transfer of the loaded substrate.

  In addition, the present invention provides an operation control apparatus for a substrate processing apparatus as described above, wherein after the abnormality of the apparatus is detected, it is detected that the apparatus has returned from the abnormal state to the normal state after the substrate transfer process in the substrate transfer scheduling by the simulation method. Returning to the substrate transfer processing by the substrate transfer scheduling by the linear programming method.

  In the operation control apparatus for a substrate processing apparatus according to the present invention, the abnormality of the apparatus is that production restarts from the apparatus stop state, unit use / non-use dynamic switching, and process NG occurs. And

  In the operation control apparatus for a substrate processing apparatus according to the present invention, the state in which the apparatus is returned to the normal state means that the processing of the collection target substrate in the apparatus is completed, the process returns to the substrate storage container, and the substrate is placed in the apparatus. This is characterized in that there is a situation where there is no existing or only a new input substrate being processed exists.

  Further, in the operation control apparatus for a substrate processing apparatus according to the present invention, when switching from the linear programming method to the simulation method, or from the simulation method to the linear programming method, the scheduled substrate transfer schedule and substrate process condition data at the time of switching are provided. Is delivered to the scheduler of the switching destination.

  In the operation control apparatus for a substrate processing apparatus according to the present invention, the substrate process condition data includes substrate number data of a scheduled substrate, process time setting in the substrate processing unit, and transfer order setting information in the transfer unit. It is characterized by that.

  The present invention switches the substrate transfer scheduling between the linear programming method and the simulation method, creates a substrate transfer schedule for loading a new substrate by the linear programming method, transfers the substrate, and detects an abnormality in the apparatus. Switching to the substrate transfer scheduling by the method, it is possible to create a substrate transfer schedule that includes the transfer of the target substrate for recovery or process continuation and the transfer of the loaded substrate, so that the substrate can be transferred. As long as the operation continues, operation control at maximum throughput is possible, and if a processing process failure such as equipment failure occurs in the substrate processing unit during substrate processing, the processing process constraints on other substrates in the apparatus Satisfy the conditions (allowable value of the process time interval from the end of the process to the start of the next process) However, if the substrate is moved to another substrate processing unit of the same type that can continue the processing process preferentially, or scheduled for recovery to the substrate storage container, damage to the substrate processing process will occur. As much as possible, the generation of defective substrates can be suppressed, and a decrease in production amount (substrate processing amount) can be suppressed as much as possible.

It is a schematic diagram which shows the structural example of the plating apparatus which concerns on Example 1 of this invention. It is a figure which shows an example of the hardware constitutions of the control part of a plating apparatus. It is a figure for demonstrating the definition of a process constraint condition. It is a figure for demonstrating the definition of a production amount. It is a figure which shows the architecture of a scheduler. It is a figure which shows the module structure of a board | substrate conveyance scheduler. It is a block diagram which shows the structural example of a linear programming scheduler. It is a block diagram which shows the other structural example of a linear programming scheduler. It is a figure which shows the flow of the main process of the scheduling process of the scheduler which concerns on this invention. It is a figure which shows the flow of a new board | substrate insertion process linear programming (step ST21 of FIG. 9). It is a figure which shows the flow of the new board | substrate insertion process simulation method (step ST22 of FIG. 9). It is a figure which shows the flow of the production resumption process (step ST23 of FIG. 9) after an apparatus stop. It is a figure which shows the flow of a unit unusable setting change process (step ST24 of FIG. 9). It is a figure which shows the flow of process NG board | substrate collection | recovery processing (step ST25 of FIG. 9). It is a figure which shows the flow of a new board | substrate insertion conveyance simulation process (step ST22-3 of FIG. 11, ST22-6). It is a figure which shows the flow of the board | substrate container new input board | substrate of FIG. It is a figure which shows the conveyance simulation time-counting process flow of step ST102 of FIG. It is a figure which shows the flow of the board | substrate container new input board | substrate of FIG. It is a figure which shows the flow of the unit status update process of step ST104 of FIG. It is a figure which shows the conveyance machine status update process flow of step ST105 of FIG. FIG. 16 is a diagram showing a new input substrate transfer start determination process flow in step ST106 of FIG. 15; It is a figure which shows the flow of the conveyance start determination process of the thrown-in board | substrate of step ST107 of FIG. It is a figure which shows the flow of the newly input board | substrate of FIG. It is a figure which shows the conveyance simulation conveyance error processing flow of step ST109 of FIG. It is a figure which shows the processing flow which copies the conveyance simulation information designation | designated state of step ST110 of FIG. 15 to a storage area. It is a figure which shows the conveyance simulation completion | finish process flow of step ST112 of FIG. It is a conceptual diagram for demonstrating the production restart from an apparatus stop state. Recovery designated residual substrate recovery conveyance simulation (FIG. 13 is a diagram showing a flow of step ST23-6 in FIG. 12). It is a figure which shows the conveyance simulation initialization process flow of step ST201 of FIG. It is a figure which shows the conveyance simulation time-measurement flow of step ST202 of FIG. It is a figure which shows the process unit status update process flow of step ST203 of FIG. It is a figure which shows the conveyance machine status update process flow of step ST204 of FIG. FIG. 29 is a diagram showing a processing flow for determining a start of transporting a residual new collection designated substrate in the apparatus in step ST205 of FIG. FIG. 29 is a diagram showing a processing flow for determining whether to start substrate transfer in the apparatus in step ST206 in FIG. 28. FIG. 29 is a diagram showing a new recovery designated substrate or recovery scheduled substrate transfer start processing flow in step ST207 of FIG. 28; It is a figure which shows the residual substrate collection simulation conveyance error processing flow of step ST208 of FIG. It is a figure which shows the conveyance simulation completion | finish process flow of step ST210 of FIG.

The main points of the present invention are the following (1) to (3).
(1) As long as normal operation continues after the operation of the substrate processing apparatus is started, operation control at the maximum throughput is performed, so that new substrate input scheduling is performed by the linear programming scheduler.

(2) Control from the linear programming scheduler to the simulation method scheduler when resuming production after a failure occurs in the processing tank, when process NG occurs, when process NG occurs, when unit NG occurs, or when unit use / nonuse setting is changed Switch.

(3) In a non-steady state until the collection target substrate in the substrate processing apparatus returns to the substrate storage container, operation control is performed by a simulation method scheduler including subsequent loading of a new substrate. When the substrate processing apparatus operation returns to a steady state by only loading a new substrate, the control is returned to the linear programming scheduler.

  Hereinafter, embodiments of the present invention will be described in detail. In the present embodiment, a plating apparatus that performs a plating process on a semiconductor substrate will be described as an example of the substrate processing apparatus. However, the substrate processing apparatus according to the present invention is not limited to this, for example, for manufacturing a LCD on a glass substrate. The present invention can be applied to various substrate processing apparatuses such as a substrate processing apparatus that performs processing.

  FIG. 1 is a schematic diagram showing a configuration example of a plating apparatus according to an embodiment of the present invention. The plating apparatus 10 includes a load port 11, a load robot 12, a substrate positioning table 13, a cleaning / drying machine 14, clamping stages 15 a and 15 b, a substrate holder storage area 25 including a plurality of stockers 16, pre-water washing. A configuration in which a tank 17, a pretreatment tank 18, a water washing tank 19, a coarse drying tank (blow tank) 20, a water washing tank 21, a plating area 26 provided with a plurality of plating tanks 22, and two conveyors 23 and 24 are arranged. It is. In FIG. 1, an arrow A indicates a substrate load transfer process, and an arrow B indicates a substrate unload transfer process. A substrate storage container that stores a plurality of unprocessed substrates and a substrate storage container that stores a plurality of processed substrates are placed on the load port 11.

  In the plating apparatus 10 having the above-described configuration, the load robot 12 takes out an unprocessed substrate from the substrate storage container placed on the load port 11, places it on the substrate positioning table 13, and sets the substrate on the basis of notches, orientation flats, and the like. Perform positioning. Next, the load robot 12 transfers the substrate to the clamping stages 15a and 15b, and attaches the substrate to the substrate holder taken out from the stocker 16 in the substrate holder storage area 25 by the clamping stages 15a and 15b. Here, a substrate is mounted on each substrate holder by two clamping stages 15a and 15b, and the two substrate holders are transported as one set. The substrate mounted on the substrate holder is transferred to the pre-water washing tank 17 by the transfer device 23 and pre-washed in the pre-water washing tank 17, then transferred to the pre-treatment tank 18, and pretreated in the pre-treatment tank 18. After that, it is further transferred to a water rinsing tank 19 where it is washed with water.

  The substrate that has been subjected to the water washing treatment in the water washing tank 19 is transferred to one of the plating tanks 22 in the plating region 26 by the transporter 24 and immersed in the plating solution. Here, a plating process is performed to form a metal film on the substrate. The substrate on which the metal film is formed is transferred to the washing tank 21 by the transporter 24, and the substrate washed in the washing tank 21 is transferred to the coarse drying tank (blow tank) 20, and the coarse drying tank 20 After being dried, the substrate is transferred to the clamping stages 15a and 15b by the transfer device 23, where the substrate is removed from the substrate holder. The substrate removed from the substrate holder is transferred to the cleaning / drying machine 14 by the load robot 12 and subjected to cleaning / drying processing, and then a predetermined position (substrate storage) of the predetermined substrate storage container placed on the load port 11. The container is stored in a position where the unprocessed substrate is taken out, or in a predetermined position of a substrate storage container that stores a substrate (processed substrate) that has been separately placed and has been processed.

  Control of the substrate load transfer process indicated by arrow A and transfer control of the substrate unload transfer process indicated by arrow B by the load robot 12, the transfer machine 23, and the transfer machine 24 are controlled by a control unit described later. To do. FIG. 2 is a diagram illustrating an example of a hardware configuration of the control unit. As illustrated, the control unit 30 includes a central processing unit (CPU) 31, a pointing device such as a keyboard and a mouse, an input device 32 such as a communication device for reading data stored in another computer, and a shared storage. A device 33 is provided. The shared storage device 33 includes a ROM 33-1, a memory 33-2, and a hard disk 33-3. The control unit 30 is connected to the load robot 12 of the plating apparatus 10, the transfer machine 23, the transfer machine 24, and the apparatus control controller 35 via the input / output interface 34, and the signal from the CPU 31 is an input / output interface. By being sent to the apparatus control controller 35 via 34, the load robot 12, the transport machine 23, and the transport machine 24 are controlled.

In this example, the solutions shown in (1) to (3) below were executed in order to realize a high production volume while switching between the linear programming method and the simulation method and satisfying severe process constraint conditions. Here, the strict process constraint condition is a process time interval from the end of the process to the start of the next process. As shown in FIG. 3, the process shifts from the L unit recipe process to the M unit recipe process. The process time interval _TP is
T _P = Post-processing time T ₁ + Removal waiting time T ₂ + Transfer time T ₃ + Pre-processing time T ₄
It is. Usually, in the plating process, the post-processing time T ₁ and the pre-processing time T ₄ are 0 (T ₄ = 0, T ₁ = 0), and the transfer time T ₃ is different depending on which column of the plating tank 22 is taken out. Therefore, scheduling by adjusting the take-out waiting time T ₂ so as not to exceed the processing time interval T _P.

  Further, the production amount is, in a narrow sense, the number of substrates that can be processed per unit time during normal transportation, and is called throughput. Here, as shown in FIG. This is a substrate processing amount per unit time in a broad sense including failure cause investigation time + failure repair time + substrate recovery time).

(1) By reducing the time required for substrate recovery by reducing the time required for substrate recovery by carrying out a transfer schedule that allows the introduction of a new substrate while recovering the substrate remaining in the plating processing equipment after failure recovery. Improve.

(2) When a failure occurs during the plating process of the substrate and the processing unit (plating tank 22) during the plating process of the substrate becomes unusable thereafter, the processing unit is dynamically disabled. Then, the transfer scheduling that enables the subsequent substrate to be continuously plated is performed. Thereby, the plating processing apparatus is stopped and the time for collecting the substrate is reduced, and the production amount of the substrate is improved.

(3) If a plating process failure occurs, the corresponding substrate can be preferentially continued to the same type processing unit that can continue the process while satisfying the plating process constraint condition of the other substrate in the plating processing apparatus. By moving or carrying out a transfer schedule for collection into the substrate storage container, process damage to the substrate is reduced as much as possible to suppress the occurrence of defects.

  As will be described in detail later, the control unit 30 performs “new substrate loading processing”, “production restart processing from apparatus stop”, “unit (substrate processing unit) unusable setting change processing (unit non-use dynamic switching processing)” ”And“ process NG substrate recovery process ”, and a substrate transfer schedule is created by switching between linear programming and simulation.

  FIG. 5 is a diagram showing an architecture of a scheduler for creating the substrate transfer schedule. As shown, the scheduler 40 includes a scheduler switching process 41, a linear programming scheduler 45, a simulation scheduler 46, and an input / output interface 44. The scheduler switching process 41 switches control designation for the linear programming scheduler 45 and the simulation method scheduler 46. Only the designated scheduler performs transfer control scheduling, and transmits / receives data to / from the apparatus control controller 51. The linear programming scheduler 45 is used to control loading of a new substrate in the steady operation state of the plating apparatus. In addition, the simulation method scheduler 46 is used for substrate collection when a non-stationary event is received, and subsequent new substrate loading scheduling until control is returned to the simulation method scheduler 46 or the plating apparatus is stopped.

  The contents of data transferred via the shared storage device 33 between the linear programming scheduler 45 and the simulation method scheduler 46 are mainly scheduled substrate transfer schedule and substrate process condition data. An input / output interface 44 for transmitting and receiving data between the device control controller 51 of the device control unit system 50 and the linear programming scheduler 45 and the simulation method scheduler 46 is common to both schedulers. Communication with the apparatus control unit system 50 including the above, event notification to the scheduler switching process 41, and transmission / reception of the substrate transfer schedule. The shared storage device 33 passes various data such as parameter settings, recipe settings, and substrate transfer schedules through the input / output interface 44 and the scheduler switching process 41.

FIG. 6 is a diagram showing a module configuration of the substrate transfer scheduler. The substrate transfer scheduler performs a substrate transfer simulation according to an event in the apparatus and realizes the following functions a) to d).
a) New board loading scheduling function (function to create a board transfer schedule corresponding to the process recipe conditions of a new board)
b) Production resumption scheduling function (function of creating a substrate transfer schedule for collecting all the substrates remaining in the apparatus after the apparatus has stopped due to failure)
c) Unit use / non-use dynamic switching function (unit (substrate processing unit) setting switching, board transfer to change the used unit of the loaded substrate and unprocessed substrate for which the unit whose setting has been changed is scheduled) A function to create a schedule)
d) Process NG substrate recovery scheduling function (whether the (plating) process is judged to be defective or whether it is moved to the same type of unit capable of continuing another process quickly while continuing another normal substrate process) Or, a substrate transfer schedule creation function that collects the substrate into the substrate storage container after washing and drying)))
Here, the unit unusable setting process and the unit non-use dynamic switching process are synonymous, and the unit unusable setting process is included in the unit use / non-use dynamic switching process.

  Hereinafter, the procedure of substrate conveyance control in the plating apparatus 10 will be described. FIG. 7 is a block diagram illustrating a configuration example of the linear programming scheduler 45. The linear programming scheduler 45 includes a schedule calculation unit 45-1, a solution determination unit 45-2, a substrate transfer schedule creation unit 45-3, an operation command unit 45-6, and a retry unit 45-5.

  First, prior to the start of operation of the plating apparatus 10, each operation of the load robot 12, the transfer machine 23, and the transfer machine 24 (which may be referred to as “transfer apparatus” in this specification) of the plating apparatus 10. Required for the time (hereinafter referred to as “scheduled operation time”), for example, the time required for the load robot 12 and the transfer machines 23 and 24 to receive the substrate from the processing equipment, the load robot 12 and the transfer machine. The input device 32 is operated to input an estimated time required for moving from one processing device position to another processing device position.

  Further, the substrate positioning table 13, the cleaning dryer 14, the clamping stage 15, the stocker 16, the pre-water washing tank 17, the pre-treatment tank 18, the water washing tank 19, the rough drying tank 20, the water washing tank 21, and the plating tank 22 (this specification) Then, these may be referred to as “processing equipment”), and the time (hereinafter referred to as “scheduled processing time”) scheduled for processing the substrate in each processing equipment is input. This scheduled processing time is also input by operating the input device 32.

  The input device for inputting the scheduled operation time and the scheduled processing time is not limited to a keyboard, a pointing device, or the like. For example, the scheduled operation time or the scheduled processing time is stored in advance in the memory 33-2, The file may be stored as a file on the hard disk 33-3, and the scheduled operation time and the scheduled processing time may be input by reading the file, or such a file may be stored in another computer, It is good also as inputting operation scheduled time and process scheduled time by reading this via a communication apparatus. When the scheduled operation time is stored in a file, for example, the time actually required for each operation of the transfer device is measured by a computer connected to each transfer device such as the load robot 12 and the transfer machines 23 and 24. The measured time may be stored in the file as the scheduled operation time. Further, in this case, the time required for each operation of the transfer device during the operation of the plating apparatus 10 is measured, and what processing is performed for averaging to update the scheduled operation time stored in the file. For example, it is possible to improve the accuracy of the scheduled operation time and cope with a change with time.

  Next, the schedule calculation unit 45-1 of the linear programming scheduler 45 loads the last target substrate (final substrate) so that the time when all the processing is completed and recovered from the plating apparatus 10 is earliest. The operation time (hereinafter referred to as “execution time”) of each operation of the transfer devices of the robot 12 and the transfer machines 23 and 24 is derived. The derivation of the execution time is performed by calculating a solution that satisfies a predetermined condition, and details thereof will be described later.

  Here, a solution satisfying the conditional expression does not necessarily exist, and it is determined whether or not a solution satisfying the above condition is obtained after the calculation in the schedule calculation unit 45-1 of the linear programming scheduler 45. This is determined by the unit 45-2. If it is determined that the solution has been obtained, the substrate transfer schedule creation unit 45-3 based on the execution time performs the substrate transfer schedule, that is, the load robot 12 that is executed when the execution time obtained and the execution time are reached. Then, a table in which the operations of the transfer machines 23 and 24 are associated with each other is created (updated), and the board transfer schedule is stored in the hard disk 33-3 of the shared storage device 33.

  When the plating apparatus 10 is in operation, the load robot 12 and the transfer devices 23 and 24 are controlled with reference to the substrate transfer schedule stored in the hard disk 33-3. That is, when the execution time stored in the substrate transfer schedule of the hard disk 33-3 is reached, the operation of the corresponding transfer device is commanded to the device control controller 51 of the device control unit system 50 via the input / output interface 44. To do. Thereby, the time when the last board | substrate of the object board | substrate is collect | recovered from the plating processing apparatus 10 which completed all the processing becomes the earliest. Note that when the controller 51 for controlling the apparatus instructs the transfer robots 12 and the transfer devices of the transfer machines 23 and 24 to operate, the transfer device is not moving, and the substrate processing in the transfer source processing device is performed. The command is transmitted after confirming that it has been completed and that there is no substrate preceding the processing apparatus at the transfer destination and that the reset has been completed. If these conditions are not satisfied, the operation command unit 45-6 waits until the above conditions are satisfied before transmitting the command.

  On the other hand, if the solution determination unit 45-2 determines that a solution satisfying the above conditional expression cannot be obtained, the average number of substrates simultaneously existing on the transfer device and the processing device in the plating apparatus 10 is reduced. That is, by adjusting the substrate loading interval, the conditional expression is corrected, and a process for deriving the execution time based on the predetermined condition is performed to obtain a solution for the execution time. The correction of this condition is performed by inserting a virtual substrate (hereinafter referred to as “empty substrate”) with the scheduled operation time of the transfer device and the estimated processing time of the processing device being zero between the substrates. . At this time, if the number of substrates simultaneously present in the apparatus is reduced, the frequency of operation of the transfer device is reduced and a margin is generated in the transfer device, thereby increasing the probability of obtaining a solution. If no solution can be obtained even after retrying, the above conditional expression is corrected so as to further reduce the average number of substrates simultaneously present in the above-described plating apparatus 10, and in extreme cases, the preceding equation is corrected. After the entire processing of the substrate is completed and collected in the substrate storage container, the next substrate is loaded into the plating apparatus 10.

  Next, setting of conditional expressions and derivation of execution times in the schedule calculation unit 45-1 of the linear programming scheduler 45 will be described together with specific examples. The setting of the conditional expression and the calculation of the execution time described below are examples, and can be performed using any other method.

  First, the operation numbers (operation numbers) k of the transfer devices of the load robot 12 and the transfer machines 23 and 24 are sequentially set to 1, 2.3 along the path from when the substrate is put into the plating apparatus 10 until it is recovered. . ..., defined as K. Assuming a state in which the substrate is sufficiently in the plating processing apparatus 10 that has sufficiently passed since the start of the operation of the plating processing apparatus 10 and is steadily operated, The number of the operation to be executed is expressed as kp (k). Further, it is assumed that there is an appropriate number of the above-mentioned empty substrates before the first substrate at the start of the operation of the plating apparatus 10 and after the final substrate at the end of the operation. The substrate number n is determined in the order of loading from the substrate storage container to the plating apparatus 10, and the increment of the substrate number of the substrate to be operated when moving from the operation k to the next operation kp (k) is np (k). It expresses. For example, the plating apparatus 10 shown in FIG. 1 is defined as follows.

  The load robot 12 takes out an unprocessed substrate from the substrate storage container placed on the load port 11 and conveys it to the substrate positioning table 13, k = 1, and the substrate positioned from the substrate positioning table 13 on the clamping stage 15a. , 15b, k = 2, the operation of taking out the stocker 16 of the substrate holder storage area 25 and transporting it to the clamping stages 15a, 15b, k = 3, and pre-washing the substrate mounted on the substrate holder by the conveyor 23 The operation of transporting to the tank 17 is k = 4, the operation of transporting from the pre-washing tank 17 to the pretreatment tank 18 is k-5, the operation of transporting from the pretreatment tank 18 to the washing tank 19 is k = 5, and the transporter 24 The operation of conveying the substrate washed in the rinsing tank 19 to any of the plating tanks 22 in the plating region 26 is k = 6, the operation of conveying the substrate from the plating tank 22 to the rinsing tank 21 is k = 7, and the rinsing tank 21 The operation of transporting the substrate subjected to the water washing treatment to the coarse drying bath (blow bath) 20 is k = 8, and the operation of carrying the substrate subjected to the coarse drying treatment in the coarse drying bath 20 to the clamping stages 15a and 15b is k = 9. And so on.

Furthermore, assuming that a sufficient amount of time has elapsed from the start of the operation of the plating apparatus 10 and that the substrate is sufficiently operated in the plating apparatus 10 and is operating steadily, the load robot 12 and the transfer machine 23. , 24, the operation order of the conveying devices is determined. For example, the operation order of the conveyor 24 is periodically defined so that the operation numbers are 3 → 5 → 4 → 6 → 7 → 3 →. In this case,
kp (3) = 5
kp (4) = 6
kp (5) = 4
kp (6) = 7
kp (7) = 3
It can be expressed as. Further, the increment np of the substrate number when moving from the operation k to the next operation kp (k) is determined as follows. In addition, this np is the substrate positioning table 13, the washing / drying machine 14, the clamping stage 15, the stocker 16, the pre-water washing tank 17, the pretreatment tank 18, the water washing tank 19, the coarse drying tank 20, the water washing tank 21, and the plating tank 22. It is determined in consideration of the number of processing devices for each type of processing device.
np = (3) =-2
np = (4) =-2
np = (5) = + 2
np = (6) =-3
np = (7) = + 6

At this time, if each substrate is assigned to each processing device within the same type (for example, each plating tank 22 in the plating region) in the order of loading, the scheduled operation time shown below is uniquely determined. These scheduled operation times are input by the above-described input device 32, or can be obtained by calculation in consideration of the position and route of the transporter based on the input values.
M1 (k, n): time for the transfer device to move from the position immediately before the operation k before receiving the substrate n G1 (k, n): time for the transfer device to receive the substrate n from the processing device in the operation k M (k, n) n): Time during which the transfer device holds and moves the substrate n in operation k G2 (k, n): Time during which the transfer device delivers the substrate n to the processing device in operation k M2 (k, n): Operation of the transfer device Time to move after delivering the substrate n at k Note that the scheduled operation time may be zero.
Further, the sum of these is defined as Tg (k, n). That is,
Tg (k, n) = M1 (k, n) + G1 (k, n) + M (k, n) + G2 (k, n) + M2 (k, n)
It is defined as

Also define the following non-negative variables:
xr (k, n): pause time of transfer device immediately before operation k for substrate n xw (k, n): waiting time on processing device immediately before operation k for substrate n xf (k, n): substrate Free time of the processing equipment immediately before the substrate is delivered to the processing equipment by the operation k for n

  Note that xw (k, n) is defined only for operations including substrate reception from processing equipment. In addition, xf (k, n) is defined only for the operation including the delivery of the substrate to the processing equipment, but is practically limited to the operation of delivering the substrate to the repeater used for delivery of the substrate between the transfer devices. May be.

Here, when the start time of the operation k for the substrate n is represented by t (k, n), the following three formulas are established.
t (kp (k), n + np (k))
= T (k, n) + Tg (kn)
+ Xr (kp (k), n + np (k)) (Formula 1)
t (k + 1, n)
= T (k, n) + Tg (kn) -M2 (k, n) + P (k, n)
−M1 (k + 1, n) + xw (k + 1, n) + xw (k + 1, n) (Expression 2)
t (k, n)
= T (k + 1, n-U (k))
+ M1 (k + 1, n-U (k) + G1 (k + 1, n-U (k))
-M1 (k, n) -G1 (k, n) -M (k, n) + xf (k, n)
... (Formula 3)

  Here, P (k, n) in (Equation 2) is the scheduled processing time of the substrate number n after the operation represented by the operation number k, and is input by the input device 32 or input. In addition to the scheduled processing time for plating, cleaning, etc., usually specified for each substrate, shutter closing and liquid filling that are performed prior to processing on the processing equipment, etc. This includes the time required for the pre-operation and the post-operation such as liquid draining and shutter opening executed after the processing is completed. Further, U (k) in (Expression 3) represents the number of devices in the type for the processing device that delivers the substrate in operation k.

  The above (Equation 1) is the start time of the operation performed by the same transporter next to the operation k for the substrate n, and (Equation 2) is the start of the operation k + 1 to be performed next after the processing in the processing apparatus is completed for the substrate n. Time (Equation 3) represents the start time of the operation in which the transport device receives the processed substrate from the processing device and then delivers the next substrate n.

In the equations (Equation 1) to (Equation 3), T, Xr, Xw, and Xf are changed to t (k, n), xr (k, n), xw (k, n), and xf (k, n), respectively. Can be modified as follows, with Rm, Wm, Fm as an appropriate matrix and Rv, Wv, Fv as appropriate column vectors.
T = RmXr + Rv (Formula 1a)
Xw = WmXr + Wv (Formula 2a)
Xf = FmXr + Fv (Formula 3a)

Here, in the above (Formula 1a), the vector T on the left side has an element corresponding to t (K, N) indicating the start time of the recovery operation for the final substrate N (excluding the empty substrate), and the vector RmXr on the right side. If the number of elements corresponding to this is minimized, the time at which the final substrate of the target substrate is recovered from the plating apparatus 10 after completing the entire processing can be made earliest. The condition for increasing the collection time can be expressed as follows with c as an appropriate vector.
cXr → Minimum (Formula 4)

By the way, the conditions for physically satisfying the transport operations represented by the above (formula 1a) to formula (3a) are usually Xr ≧ 0, Xw ≧ 0, and Xf ≧ 0. The following inequalities can be derived from Equations 1a) to (Equation 3a).
Xr ≧ 0 (Formula 1b)
WmXr ≧ −Wv (Formula 2b)
FmXr ≧ −Fv (Formula 3b)

  Here, in a certain processing device, when a certain time is required from when the transport device receives the preceding substrate to the start of delivery of the next substrate, this time is set in the corresponding element on the right side of (Equation 3b). Add. For example, in the above-described clamping stages 15a and 15b, after the load robot 12 receives the substrate removed from the holder, the holder is returned to the substrate holder storage area, and then the transfer machine 23 delivers the next substrate. Can do. In this case, the holder return time is added to the corresponding element on the right side.

Further, as expressed in (Equation 1a), since all the operation start times are expressed by a linear expression of Xr, a primary constraint condition regarding an arbitrary operation time can be expressed by a primary inequality regarding Xr. For example, as a constraint condition, in the operation k0, if an arbitrary substrate after the end of the immediately preceding process is immediately received, that is, if xw (k0, n) = 0 is satisfied, the above (formula 2a) The row corresponding to k0 can be taken out and expressed by the following linear inequality.
−Wm0Xr0 ≧ Wv0 (Formula 5)

  Note that the same type of inequality is also applied to the substrate n0 when an upper limit constraint is provided for the time from when a substrate is received from the immediately preceding processing device at operation k0 to when it is delivered to the next processing device at operation k0 + 1. Can guide you. Similarly, a lower limit constraint condition can be provided between the start times of any two operations, thereby making it possible to perform a schedule with a certain margin in the transport device. Further, it is defined as a waiting time xww (k, n) before the processing is actually started after the substrate n is delivered to the processing device by the operation k, and is formulated so as to be included in the above-described variable vector Xr. Is also possible. In this case, the probability that the upper limit constraint condition regarding xw (k + 1, n) is satisfied can be increased.

Thus, (Equation 1b) to (Equation 3b) and (Equation 5) can be expressed by the following equations, where A is an appropriate matrix and b is an appropriate column vector.
AXr ≧ b (Formula 6)
Therefore, in order to make the final substrate collection time the earliest, it is necessary to obtain the minimum value of (Expression 4) under (Expression 6). However, such a solution of Xr is a problem of linear programming. Can be solved as If this solution Xr is obtained, it can be obtained from the execution time (Equation 1a) of each operation that makes the final substrate collection time the earliest, and based on this, the above-described substrate transfer schedule can be created (updated).

  FIG. 8 is a block diagram showing another configuration example of the linear programming scheduler 45. When the plating apparatus 10 is operated continuously for a long time, it is not limited to the case where the scheduled processing time for each substrate is given in advance. For example, a new substrate storage container is loaded into the load port during operation. It is conceivable that control is performed by giving a scheduled processing time for an unprocessed substrate in the substrate storage container each time the substrate is placed (set). The plating apparatus 10 of this embodiment can also cope with such a case.

  That is, the plating apparatus 10 according to the present embodiment performs control by repeating the sequential scheduling while moving the scheduling target time region backward during the operation of the plating apparatus 10 and adding the results of the schedules consistently. It is. As shown in FIG. 8, the plating apparatus 10 according to the present embodiment has a schedule determination unit 45-11 in cooperation with a computer program stored in the hard disk 33-3 of the shared storage device 33 and the CPU 31 (see FIG. 2). , A calculation condition determination unit 45-12, a schedule calculation unit 45-13, a solution determination unit 45-14, a substrate transfer schedule creation unit 45-15, an operation command unit 45-16, and a retry unit 45-17. .

  First, as in the case of FIG. 7, the scheduled operation time is input by the input device 32. Further, the scheduled processing time is input by the input device 32. When the scheduled operation time and processing time are input, the schedule determination unit 45-11 determines whether new scheduling is necessary. That is, it is checked whether there is any board that has been scheduled for processing but has not yet been scheduled. When it is determined by the schedule determination unit 45-11 that there is no board that has not been scheduled, that is, a new schedule is not required, the calculation condition determination unit 45-12 sets one estimated time and the subsequent estimated time. The final board (excluding the empty board) to be subjected to the scheduling operation is determined. The final board is a final board added as a target of a new scheduling operation in addition to the already scheduled board, and is not an empty board.

  The estimated time and the final substrate are based on the scheduling results derived in the past, and the substrate containing the empty substrate is the first substrate storage container after the final non-empty substrate (which is not an empty substrate) is put into the plating apparatus 10. The estimated number of additional boards is estimated within the range in which the scheduling operation can be completed with a margin between the current time and the assumed time, and the final board is determined. The estimation of the number of additional boards is performed within the range of the number of boards that have not yet been scheduled but have been scheduled to be processed. If the number of positive additional substrates cannot be obtained, the estimated time is obtained by shifting the estimated time to the collection time of the next scheduled substrate. In this way, the period from the estimated time to the time when the final substrate is collected becomes a rough scheduling target time region.

  Here, the average value of the time required for the scheduling calculation with respect to the number of added boards is stored as a calculation time table in the hard disk 33-3 of the shared storage device 33, and the calculation condition determination unit 45-12 The appropriate number of substrates is estimated in consideration of the calculation time stored in the calculation time table. The collection time of the final substrate by this new scheduling is usually slower than the true earliest value (earliest time) that is realized when the scheduled processing times for all substrates are given in advance, but each time scheduling If the number of added substrates is increased to a certain extent, it can be approximated to a true earliest value.

  When the calculation condition determination unit 45-12 determines the estimated time and the final board to be subjected to the scheduling calculation, the schedule calculation unit 45-13 next executes the conditional expression after the additional board is added. The execution time of each operation | movement of the conveyance apparatus in the said scheduling object time area | region is derived | led-out.

  In this case, among the scheduling results derived in the past, the lower limit of the board number of interest is obtained for each action k by referring to the combination of the action number and the board number whose execution time is later than the expected time. Alternatively, the lower limit of the substrate number may be obtained by obtaining an operation that can occur after the estimated time according to the scheduled processing time or the scheduled operation time from the operation sequence of the transfer device. In this case, an operation in which the estimated time is not held may occur in the past scheduling result. In addition, the upper limit of the substrate number is determined by obtaining an operation that can occur before the start time of the operation of collecting the final substrate to be subjected to the scheduling operation described above into the substrate storage container. Here, with respect to the substrates after the last substrate, it is assumed that there is an empty substrate whose operation time and processing time are zero.

  Based on the lower limit and the upper limit of the board number determined in this way, the above-described unknown column vectors T, Xr, etc. are constructed, and a scheduling operation is performed. Then, in each scheduling calculation, the average value of the time required for the calculation stored in the calculation time table is updated based on the time actually required for the calculation.

  Note that since the responsiveness of scheduling is particularly emphasized at the start of continuous operation, k = 1, 2,... As the minimum value for which (Equation 1) to (Equation 3) are satisfied for the first substrate. The operation time is obtained in the order of K. When the number of substrates to be processed in the plating apparatus 10 is one, the substrate recovery time becomes the earliest in this way. In addition, as long as the scheduled processing time and the scheduled operation time do not take extreme values, the substrate is transferred to the next processing device immediately after being processed by each processing device by the transfer robot 12 and the transfer devices 23 and 24. Is done. Therefore, an optimal solution that satisfies the given constraint conditions is obtained.

  After the processing by the schedule calculation unit 45-13, as in the embodiment of FIG. 7, when the solution determination unit 45-14 determines whether or not the solution of the execution time is obtained, and the solution of the execution time is obtained The board transfer schedule is created (updated) by the board transfer schedule creation unit 45-15. After the substrate transfer schedule is created (updated), the above process is repeated. Similar to the case of FIG. 7, the operation command unit 45-16 controls the transfer devices of the load robot 12 and the transfer machines 23 and 24 by referring to the substrate transfer schedule stored in the hard disk 33-3.

  On the other hand, if it is determined by the solution determining unit 45-14 that the solution of the execution time cannot be obtained, the empty substrate is inserted between the substrates by the retry unit 45-17 as in the case of FIG. In such a case, the calculation condition determination unit 45-12 also considers the inserted empty board, and the expected time and the final board to be subjected to the schedule calculation so that a non-empty additional board exists. To decide.

  In the present embodiment, since the execution time of the operation of the transfer equipment of the load robot 12 and the transfer machines 23 and 24 newly obtained by scheduling may be earlier than the assumed time, the number of additional substrates described above In the estimation, it is necessary to set a large safety factor so that the scheduling operation is completed earlier than the assumed time and the operation command unit 45-16 can issue an operation command to the transfer devices of the load robot 12, the transfer machines 23 and 24. .

  FIG. 9 is a diagram showing a flow of main processing of the schedule ring process. In step ST1, a scheduler command is received from the device control controller 51 (see FIG. 5) of the device control unit system 50, and the process proceeds to step ST2. In step ST2, it is determined whether there is a device start request. If yes (Y), the process proceeds to step ST3. If not (N), the process returns to step ST1. In step ST3, an apparatus start-up process (operation scheduled time, unit use / non-use setting, process constraint time is input) is performed, and in step ST4, the scheduler selection initial setting is shifted to step ST5 as linear programming.

  In step ST5, a scheduler command is received from the apparatus control controller 51 (here, the scheduled processing time in each process is input simultaneously with the reception of the scheduler command), and the process proceeds to step ST6. In step ST6, the type of the device command is determined, and depending on whether the device command is “load new substrate”, “resume device production”, “unit use / non-use dynamic switching”, or “process NG generation”, step ST11, The process proceeds to step ST12, step ST13, and step ST14. In step ST11, it is determined whether the scheduler selection is a linear programming method or a simulation method. If it is a linear programming method, the new substrate loading processing linear programming method in step ST21 is used. If it is a simulation method, a new substrate loading processing simulation in step ST22 is performed. Transition to law. In step ST12, the scheduler control switching is changed from the linear programming method to the simulation method, and the process proceeds to step ST23. In step ST23, the production restart process from the apparatus stop is performed, and the process proceeds to step ST30. In step ST13, the scheduler control switching is changed from the linear programming method to the simulation method, and the process proceeds to step ST24. In step ST24, a unit unusable setting change process (unit unusable dynamic switching process) is performed, and the process proceeds to step ST30. In step ST14, the scheduler control switching is changed from the linear programming method to the simulation method, and the process proceeds to step 25. In step 25, the process NG substrate recovery process is performed, and the process proceeds to step ST30.

  In step ST30, it is determined whether there is a substrate being processed or a substrate to be processed in the apparatus. If yes (Y), the process proceeds to step ST31, and the substrate transfer schedule of the apparatus control controller 51 is updated ( This is the device control controller of the device controller system 50 via the input / output interface 44 when the execution time stored in the substrate transfer schedule of the hard disk 33-3 is reached in paragraph 0057. In the embodiment of the present invention, “update substrate transfer schedule” is synonymous.), The process proceeds to step ST32. In step ST32, it is determined whether there is a device stop request. If yes (Y), the schedule calculation unit stop process is performed in step ST33, and if no (N), the process proceeds to step ST40. In step ST40, the scheduler control is determined to be linear programming switching from the simulation method, and it is determined whether the operation state of the apparatus is steady switching or non-stationary switching. If steady switching is possible, the process proceeds to step ST41, where scheduler control switching is performed. Is changed from the simulation method to the linear programming method, and the process returns to step ST5. If unsteady switching is impossible, the process returns to step ST5.

  -Since the linear programming scheduler is a technique developed mainly for the purpose of always exhibiting the maximum throughput in normal apparatus operation control, the linear programming scheduler is steadily used as an apparatus operation control means utilizing its advantages.

  ・ Simulation method scheduler is not a technology that can guarantee maximum throughput. However, there is an advantage that a substrate transfer schedule such as substrate recovery can be flexibly created while satisfying the process constraint conditions for events such as production restart, unit use / non-use dynamic switching, and process NG occurrence. Therefore, the present technology is used as a control means for such unsteady apparatus operation.

  When the operation control means is returned to the linear programming scheduler in a state in which a non-stationary substrate transfer schedule such as substrate recovery is included after the transfer schedule is created by the simulation method, an extremely complicated calculation is required in the scheduling. Therefore, in this embodiment, the operation control means is returned from the simulation method to the linear programming method after the apparatus operation returns to the steady state of only the newly loaded substrate.

  FIG. 10 is a diagram showing a flow of the new substrate loading process linear programming (step ST21 in FIG. 9). First, in step ST21-1, it is checked whether there is a board that needs to be scheduled. If yes (Y), the process proceeds to step ST21-2. In step ST21-2, the estimated time and final substrate are determined, and the process proceeds to step ST21-3. In this step ST21-3, the respective conditional expressions for transfer conditions and process constraint conditions are set, and the process proceeds to step ST21-4. In step ST21-4, a substrate transfer schedule is calculated by linear programming based on a predetermined conditional expression, and the process proceeds to step ST21-5.

  In step ST21-5, it is checked whether there is a substrate transfer schedule that satisfies the conditions. If none (N), the process proceeds to step ST21-6, readjustment of the substrate loading interval is performed, and the process returns to step ST21-2. . If yes (Y), the board transfer schedule is updated, and the process proceeds to step ST21-8. In step ST21-8, it is checked whether the scheduling of all newly loaded substrates has been completed. If not completed (N), the process returns to step ST21-1, and the above processing is repeated.

  FIG. 11 is a diagram showing a flow of a new substrate loading process simulation method (step ST22 in FIG. 9). First, in step ST22-1, it is checked whether or not there is a pre-processing substrate in the apparatus. If not (N), the process proceeds to step ST22-2, and if present (Y), the process proceeds to step ST22-4. In step ST22-2, the conveyance simulation data is initialized, and the process proceeds to step ST22-3. In step ST22-3, a leading new substrate loading / transporting simulation is performed, and the process proceeds to step ST22-4.

  In step ST22-4, it is determined whether the same recipe is input to the subsequent substrate. If yes (Y), the process proceeds to step ST22-5, and if no (N), the process proceeds to step ST22-6. In step ST22-5, throughput verification is performed, the maximum throughput parameter is selected, and the process proceeds to step ST22-6. In step ST22-6, a subsequent new substrate loading / transferring simulation is performed, and the process proceeds to step ST22-7. In step ST22-7, the substrate transfer schedule is updated.

  FIG. 12 is a diagram showing a flow of the production resumption process (step ST23 in FIG. 9) after the apparatus is stopped. In the production resumption process from the stop of the apparatus, first, in step ST23-1, the in-device residual substrate position data of the device control controller is read, and the process proceeds to step ST23-2. In step ST23-2, the conveyance simulation data is initialized, and the process proceeds to step ST23-3. In step ST23-3, the unrecovered residual substrate on the most downstream side of the apparatus is searched, and the process proceeds to step ST23-4. In step ST23-4, it is determined whether there is an unrecovered residual substrate. If yes (Y), the process proceeds to step ST23-5, and if not (N), the process proceeds to step ST23-7. In step ST23-5, a new collection target substrate is designated, and the process proceeds to step ST23-6. In step ST23-6, a recovery designated residual substrate recovery transfer simulation is performed, and the process returns to step ST23-3. In step ST23-7, the board transfer schedule is updated.

  FIG. 13 is a diagram showing a flow of unit unusable setting change processing (unit unusable setting dynamic switching processing) (step ST24 in FIG. 9). In the unit unusable setting changing process, first, in step ST24-1, the use / nonuse setting of the target unit is switched, and the process proceeds to step ST24-2. In step ST24-2, it is determined whether the setting after unit change is used or not used. If not, the process proceeds to step ST24-3. In step ST24-3, the unit use planned board upstream side search is performed. If there is a use planned board, the process proceeds to step ST24-4, and if there is no use planned board, the process proceeds to step ST24-7. In step ST24-4, the presence / absence of an alternative unit of the same type is searched. If “no”, the process proceeds to step ST24-5, and if “present”, the process proceeds to step ST24-6.

  In step ST24-5, a recovery conveyance simulation of the unit use-scheduled substrate is performed, and the process proceeds to step ST24-7. In step ST24-6, the transfer schedule of the unit use scheduled upstream substrate is changed to use of an alternative unit, and the process proceeds to step ST24-7. In step ST24-7, the board search before starting the unit use scheduled substrate processing is performed. If there is a substrate before starting processing, the process proceeds to step ST24-8. If there is no substrate before starting processing, the process proceeds to step ST24-10. To do. In step ST24-8, the substrate transfer schedule for the substrate before the start of processing is deleted, and the process proceeds to step ST24-9. In step ST24-9, a substrate re-insertion simulation before starting processing is performed, and the process proceeds to step ST24-10. In step ST24-10, the substrate transfer schedule is updated.

  FIG. 14 is a diagram showing a flow of process NG substrate recovery processing (step ST25 in FIG. 9). In the process NG substrate recovery process, first, in step ST25-1, the substrate transfer schedule of the NG target substrate is deleted, and the process proceeds to step ST25-2. In step ST25-2, an available alternative unit of the same type is searched. If there is an available alternative unit of the same type, the process proceeds to step ST25-3, and if there is not, the process proceeds to step ST25-5. Whether or not there is a substitute unit of the same type as this process abnormality occurrence unit is determined whether there is no normal substrate that is scheduled to use the substitute unit on the upstream side or the substrate storage container, or if there is a substitute unit, If the process in the alternative unit of the process NG board is completed before the board to be used arrives there, it is regarded as “present”.

  In step ST25-3, an alternative unit process continuation conveyance simulation of the process NG substrate is performed, and the process proceeds to step ST25-4. The process NG substrate is transferred from the abnormal unit to the alternative unit within the process restriction time and the process is continued, and all the substrates including the process NG substrate are properly transferred to the substrate storage container while observing the process restriction conditions of other normal substrates. Carry out a transfer simulation to return. The details of the transfer simulation method are the same as the “recovery designated residual substrate recovery transfer simulation” (step ST23-6) in the resumption of production.

  In step ST25-4, it is determined whether or not the process continuation conveyance simulation is successful. If yes (Y), the process proceeds to step ST25-6, and if no (N), the process proceeds to step ST25-5. In this determination, it is determined whether or not all the substrates including the process NG substrate have returned to the substrate storage container normally in accordance with the process constraint conditions in the transfer simulation.

  In step ST25-5, a process NG substrate recovery / transport simulation is performed, and the process proceeds to step ST25-6. A transport simulation for removing the process NG substrate from the abnormality occurrence unit and returning it to the substrate storage container through water washing and drying processing is performed. Other normal substrates continue the process. The details of the transfer simulation method are the same as the “residual substrate recovery transfer simulation” in the resumption of production. In step ST25-6, the substrate transfer schedule is updated.

  Hereafter, each said process is demonstrated. FIG. 15 is a diagram showing a flow of a new substrate loading / carrying simulation process (ST22-3 and ST22-6 in FIG. 11). In FIG. 15, N is the number of substrate storage containers (load port 11), UNIT_NUM is the total number of units (plating tanks 22), and TRF_NUM is the number of transfer machines. First, in step ST101, at the beginning of the transfer simulation, unit (plating tank 22) information, transfer machine (load robot 12, transfer machine 23, 24) information, and a pointer referring to the loaded substrate transfer schedule are initialized, and transfer simulation is started. Then, the process proceeds to the conveyance simulation time counting process in step ST102. In the transport simulation timekeeping process in step ST102, the minimum remaining time until the next status transition event of the transporter or unit process is searched and the timekeeping process is performed, and the process proceeds to steps ST103 and 104.

  In step ST103, a process for starting the loading of a newly loaded substrate or a loaded substrate in the substrate storage container is performed. In step ST104, a status update process is performed in all the process units, and the process proceeds to step ST105. In step ST105, the transfer device status is updated in all the transfer machines, and the process proceeds to step ST106. In step ST106, a determination process for starting transfer is performed for a newly loaded substrate existing in the process unit or the transfer machine, and the process proceeds to step ST107. In step ST107, a determination process for starting the next transfer is performed on the loaded substrate referred to by the reference pointer of the substrate transfer schedule, and the process proceeds to step ST108.

  In step ST108, a transfer device start process is performed for a substrate that has been requested to start transfer by a transfer device start determination process for a newly input substrate or a loaded substrate, and the process proceeds to step S109. In step ST109, when an error deviating from the process constraint condition occurs in the status update process in step ST104 or the transporter status update process in step ST105, the transfer simulation data is restored to the initial state and the load start time is delayed. The transfer error process is performed, and the process proceeds to step ST110. In step ST110, when a pre-load state storage request for transfer simulation occurs after turning on the processing start request signal in the load port 11, a process of copying the current transfer simulation data to the storage area of the pre-load state is performed. The process proceeds to step ST111.

  In step ST111, a search is made as to whether there is a newly inserted or in-processed substrate in the process in the transfer simulation apparatus. If yes (Y), the process returns to step ST102, and if not (N), that is, a new substrate and When it has been confirmed that the transfer of all the loaded substrates satisfies the process constraints and has been normally processed and returned to the designated substrate storage container, the process proceeds to step ST112, and a transfer simulation end process is performed. In this transfer simulation end process, the newly created substrate transfer schedule is overwritten and copied in the loaded substrate transfer schedule variable area.

  FIG. 16 is a diagram showing a flow of the transport simulation initialization process in step ST101 of FIG. First, in step ST101-1, the transfer simulation state is initialized to the state before loading the previously loaded substrate, and the process proceeds to step ST101-2. This transfer simulation state includes all unit information data, transfer machine information data, and other data necessary for transfer simulation. In the initialization, the data set copied to the storage area at the start of the previous board transfer simulation (step ST101-7) is overwritten and copied to the transfer simulation variable area.

  In step ST101-2, the reference pointer of the loaded substrate transfer schedule is initialized to the state before loading a new loaded substrate, and the process proceeds to step ST101-3. The reference pointer is used to sequentially refer to an existing substrate transfer schedule for starting transfer of loaded substrates. In step ST101-3, the load waiting time of the newly loaded substrate with respect to the previously loaded substrate is calculated, and the process proceeds to step ST101-4. The lower limit of the load waiting time is set as the default value or the throughput verification result value. When all the units are in use in a type consisting of a plurality of units, the unit that is emptied as soon as possible is searched, and the load waiting time is calculated so that the corresponding newly inserted board can be smoothly stored in that unit. The calculated time is not less than the above lower limit value.

  In step ST101-4, the loading start time of the newly loaded substrate is set by adding the load waiting time to the starting time of the previously loaded substrate, and the process proceeds to step ST101-5. In step ST101-5, it is determined whether the apparatus current time> new input substrate loading start time. If yes (Y), the process proceeds to step ST101-6, and if no (N), the process proceeds to step ST101-7. In step ST101-6, the newly loaded substrate loading start time is reset by adding the margin time to the apparatus current time, and the process proceeds to step ST101-7. The margin time used here is a constant time set in advance as a required time from the start to the end of scheduling at the current device time. The device current time is read from the device control controller 51. In step ST101-7, all the transfer simulation state variable data are copied to the storage area before loading.

  FIG. 17 is a diagram showing a conveyance simulation timekeeping process flow of step ST102 of FIG. In step ST102-1, the minimum value of the remaining time until the unit next status transition is searched, set to the interval time, and the routine proceeds to step ST102-2. In step ST102-2, it is determined whether or not the remaining time until the newly loaded substrate transfer start time is smaller than the interval time (remaining time <interval time). If yes (Y), the process proceeds to step ST102-3, and no ( In the case of N), the process proceeds to step ST102-4. In step ST102-3, the remaining time until the newly loaded substrate transfer start time is set as the interval time, and the process proceeds to step ST102-4.

  In step ST102-4, the minimum value of the remaining time until the next status transition of the transporter is searched, and the process proceeds to step ST102-5. In step ST102-5, it is determined whether the minimum remaining time until the next status of the transporter is smaller than the interval time (remaining time minimum value <interval time). If yes (Y), the process proceeds to step ST102-6, and no. In the case of (N), the process proceeds to step ST102-7. In step ST102-6, the minimum remaining time until the next status of the transporter is set as the interval time, and the process proceeds to step ST102-7. In step ST102-7, the minimum remaining time until the loaded substrate transfer start time is searched, and the process proceeds to step ST102-8.

  In step ST102-8, it is determined whether the remaining time minimum value until the loaded substrate transfer start time is smaller than the interval time (remaining time minimum value <interval time). If yes (Y), the process proceeds to step ST102-9. If NO (N), the process proceeds to step ST102-10. In step ST102-9, the minimum remaining time until the loaded substrate transfer start time is set as the interval time. In step ST102-10, a conveyance jam error is monitored, and the process proceeds to step ST102-11. Here, the conveyance jam error monitoring monitors a situation where the interval time becomes zero over a certain number of times. If such a situation occurs, a new substrate loading time is set to a constant value as a transport error. In step ST102-11, an interval time is added to the conveyance simulation time.

  FIG. 18 is a diagram showing a flow of the substrate storage container new input substrate or input substrate input start processing in step ST103 of FIG. First, in step ST103-1, the next load designation input board is searched, and the process proceeds to step ST103-2. In the next load designation input board search, the next load board is searched for and specified in the order of the process boards already put in the schedule, and the new load board is specified for the next load at the end. In step ST103-2, it is determined whether the next load designated input substrate loading start time has elapsed. If yes (Y), the process proceeds to step ST103-3, and if no (N), the process proceeds to step ST103-11. In step ST103-3, substrate storage container unit information designation input substrate data is registered, and the process proceeds to step ST103-4. In step ST103-4, it is determined whether the substrate is a new substrate or a substrate that has been input. If it is a new substrate, the process proceeds to step ST103-5, and if it has been input, the process proceeds to step ST103-12.

  In step ST103-5, all process use units of the newly loaded substrate are searched, and the process proceeds to step ST103-6. A unit to be used in advance is searched for all processes from the start of input of a new input base to the return to the substrate storage container. If there are a plurality of process target type units and all of them are in use, the load start time is adjusted according to the unit that ends the earliest. In step ST103-6, it is determined whether or not a search for empty units that can be used in all processes has succeeded for a newly loaded substrate. If the search is successful (Y), the process proceeds to step ST103-7, and no search is performed. In the case of success (N), the process proceeds to step ST103-13. In step ST103-7, the transfer start request signal of the substrate storage container unit is turned ON, and the process proceeds to step ST103-8. In step ST103-8, the conveyance simulation information pre-load state storage request signal is turned ON. Here, when the pre-load state storage request signal is turned ON, the transfer simulation information is copied to the designated storage area behind the transfer simulation loop.

  In step ST103-11, the remaining time until the load start time is set. In step ST103-12, the substrate storage container unit transfer start request signal is turned ON. In step ST103-13, the load start time is delayed to the startable time, the process proceeds to step ST103-14, and the remaining time until the load start time is set in step ST103-14.

  FIG. 19 is a diagram showing a unit status update process flow of step ST104 of FIG. In step ST104-1, the conveyance simulation interval time is added to the unit processing elapsed time, and the process proceeds to step ST104-2. In step ST104-2, it is determined whether the unit processing elapsed time has passed the next status transition time (unit processing elapsed time ≧ next status transition time). If yes (Y), the process proceeds to step ST104-3. If no (N), the process proceeds to step ST104-40. In step ST104-3, the unit processing status is determined. If “processing”, the process proceeds to step ST104-11. If “processing is completed”, the process proceeds to step ST104-21. If “reset”, the process proceeds to step ST104-31. Migrate each.

  In step ST104-11, the unit processing status is changed to “processing completed”, and in step ST104-12, the substrate transfer request signal is turned ON. In step ST104-21, it is determined whether the unit processing status “reset” transition request signal is ON. If yes (Y), the process proceeds to step ST104-22, and the unit information board data is deleted in step ST104-22. Then, the process proceeds to step ST104-23. In step ST104-23, the unit processing status is changed to “reset”, and the process proceeds to step ST104-24. In step ST104-24, the reset time is added to the next status transition time, and the process proceeds to step ST104-25. In ST104-25, the remaining time until the next status transition time is set. In step ST104-31, the unit processing status is changed to “processing stop”, and in step ST104-32, all unit information data is erased.

  FIG. 20 is a diagram showing a transporter status update process flow in step ST105 of FIG. In the previous step ST105-1, the transport simulation interval time is added to the transporter transport processing elapsed time, and the process proceeds to step ST105-2. In step ST105-2, it is determined whether or not the transport processing elapsed time has passed the next status transition time (transport processing elapsed time ≧ next status transition time). If yes (Y), the process proceeds to step ST105-3, and no ( In the case of N), the process proceeds to step ST105-50. In step ST105-3, the conveyance status is determined. In step ST105-11 in "moving", step ST105-21 in "removing", step ST105-31 in "retracting", step ST105-41 in "retracting". Respectively.

  In step ST105-11, it is determined whether or not the carrier non-interference condition is satisfied. If yes (Y), the process proceeds to step ST105-12, and if no, the process proceeds to step ST105-16. In step ST105-12, the transfer type of the transfer machine is determined. If “take out”, the process proceeds to step ST105-13, the transfer status is changed to “being taken out”, and if “stored”, the process proceeds to step ST105-14. The transfer status is changed to “in storage”. In step ST105-16, the next status transition time is delayed and updated.

  In step ST105-21, it is determined whether the in-unit substrate transfer request signal is ON. If yes (Y), the process proceeds to step ST105-22, and if no (N), the process proceeds to step ST105-25. In step ST105-22, the unit processing status is requested to change to “reset”, and in step ST105-23, the transfer status is changed to “stopped” (transfer ends), and in step ST105-24, the post-process leaving time upper / lower limit transfer is performed. Monitor for errors. In step ST105-25, the unit processing remaining time is delayed and added to the next status transition time.

  In step ST105-31, the transport board data is copied to the unit information, and in the subsequent step ST105-32, a transition process is started to the storage unit status “processing”, and the process proceeds to step ST105-33. In step ST105-33, it is determined whether or not it is outside the conveyor position interference area. If yes (Y), the process proceeds to step ST105-34, and if no (N), the process proceeds to step ST105-36. In step ST105-34, the conveyance status is changed to “stopped” (conveyance is completed). In subsequent step ST105-35, all the conveyance machine information data is erased, and the process proceeds to step ST105-37. In step ST105-36, the conveyance status is changed to “retracting”, and the process proceeds to step ST105-37. In step ST105-37, a process time interval upper and lower limit transport error is monitored, and in subsequent step ST105-38, a transporter holding time upper limit transport error is monitored.

  In step ST105-41, the current position data of the transfer machine is changed to the standby position, and the process proceeds to the subsequent step ST105-42. In step ST105-42, the transfer status is changed to "stopped" (transfer ends), and step ST105- 43. In step ST105-43, all the transporter information data is erased. In step ST105-50, the remaining time until the next status transition time is set.

  FIG. 21 is a diagram showing a new input substrate transfer start determination processing flow in step ST106 of FIG. First, in step ST106-1, it is confirmed whether the designated transfer machine is stopped and the transfer start request signal is OFF. If yes (Y), the process proceeds to step ST106-2. In step ST106-2, it is determined whether the current simulation time has passed the conveyance start time (current simulation time ≧ conveyance start time). If yes (Y), the process proceeds to step ST106-3, and no (N). If there is, the process proceeds to step ST106-11. Here, the transfer start time indicates a time set by subtracting a predetermined time for reaching the transfer device from the process recipe setting time for unit information in the case of extraction. In the case of storage, the current simulation time itself is used.

  In step ST106-3, a transporter non-interference condition determination process is performed, and in subsequent step ST106-4, a transporter condition determination and an extraction source / storage destination unit condition determination are performed, and the process proceeds to step ST106-5. In this determination, it is determined whether the transporter hand does not have a substrate when it is taken out as a transporter condition, or whether it has a substrate when stored. Further, it is determined as a take-out source / storage destination unit condition whether a board exists at the take-out source and there is no other board at the storage destination.

  In step ST106-5, it is determined whether all of the above-described carrier non-interference conditions, carrier conditions, take-out source / storage destination unit conditions are satisfied, and if yes (Y), the process proceeds to step ST106-6. In step ST106-6, priority is given to start of newly loaded substrate transfer, and the process proceeds to step ST106-7. In this determination, if the start time delay time of the loaded substrate transfer exceeds the set allowable value immediately after the transfer is started, it is determined by the priority parameter whether priority is given to the new substrate transfer over the loaded substrate.

  In step ST106-7, it is determined whether the transfer delay time of the newly loaded substrate is equal to 0 (= 0) or a positive value (> 0). If it is 0, the process proceeds to step ST106-8, and the transfer machine is checked. To turn on the transfer start request signal. If the number is positive, the process proceeds to step ST106-12, and the remaining time is set by adding the delay time to the conveyance start time. This remaining time is used for interval time calculation for the conveyance simulation timekeeping.

  FIG. 22 is a diagram showing a flow of the transfer start determination process for the loaded substrate in step ST107 of FIG. First, in step ST107-1, it is determined whether or not the transfer start request signal is OFF while the designated transfer machine is stopped. If yes (Y), the process proceeds to step ST107-2. In step ST107-2, it is determined whether or not the current simulation time has passed the scheduled transfer start time of the transfer execution time table (current simulation time ≧ transfer scheduled start time of the transfer execution time table). If yes (Y), step ST107 is determined. -3, if no (N), the process proceeds to step ST107-11. Here, the scheduled transfer start time indicates the time in the row referred to by the pointer of the substrate transfer schedule.

  In Step ST107-3, the carrier non-interference condition is determined, and the process proceeds to Step ST107-4. This determination is made when the designated transporter enters the interference area with the adjacent transport machine, or the designated transport machine reserves the interference area if the adjacent transport machine does not access or intends to access the interference area. It is determined whether or not. In step ST107-4, transporter condition determination and take-out / storage destination unit condition determination are performed, and the process proceeds to step ST107-5. In this transporter condition determination and take-out / storage destination unit condition determination, it is determined whether the transporter hand does not have a substrate when taking out as the transporter condition, or whether it has a substrate when storing. . Further, it is determined whether there is another substrate at the take-out source as the take-out source / storage destination unit condition. In step ST107-5, it is determined whether all of the above-mentioned carrier non-interference conditions, carrier conditions, and take-out / storage destination unit conditions are satisfied. If yes (Y), the process proceeds to step ST107-6.

  In step ST107-6, priority is given to the transfer start of the loaded substrate, and the process proceeds to step ST107-7. In step ST107-7, it is determined whether the input substrate transfer start delay time is equal to 0 (= 0) or a positive value (> 0). If 0, the transfer is performed to the transfer device in step ST107-8. The start request signal is turned ON. If the value is a positive value, the remaining time is set by adding a delay time to the scheduled transfer start time in step ST107-12. Here, the remaining time is used for interval time calculation for conveyance simulation timekeeping.

  FIG. 23 is a diagram showing a flow of a newly input substrate or a substrate already input and a transfer device start process in step ST108 of FIG. First, in step ST108-1, it is determined whether the designated transfer machine is stopped and the transfer start request signal is ON. If yes (Y), the process proceeds to step ST108-2. In step ST108-2, transfer board information is transferred to the transfer machine information data. Data and transport operations are set, and the process proceeds to step ST108-3. In step ST108-3, the conveyance status is set to “moving”, and in step ST108-4, the movement time is set to the remaining time until the transfer to the next status of the transfer device, and the process proceeds to step ST108-5. In ST108-5, the transfer data is registered in the substrate transfer schedule, and the process proceeds to step ST108-6. In step ST108-6, it is determined whether the substrate has been newly input or has been input. If “input”, the process proceeds to step ST108-7, the input substrate transfer schedule reference point is updated, and if “new input”, Then, the process proceeds to step ST108-8, and the transfer start request signal is turned OFF.

  FIG. 24 is a diagram showing a transport error processing flow in step ST109 of FIG. First, in step ST109-1, it is determined whether the new substrate loading delay time is a positive value (new substrate loading delay time> 0). If yes (Y), the flow proceeds to step ST109-2, and the transfer simulation state is newly set. The state is restored to the initial state before loading the loaded substrate, and the process proceeds to step ST109-3. Here, the restoration of the transfer simulation state is performed by overwriting and copying the data set that has been copied to the storage area at the start of the transfer simulation of the previously loaded substrate to the transfer simulation variable area. In step ST109-3, the reference pointer of the loaded substrate transfer schedule is restored to the initial state before loading the newly loaded substrate, and in step ST109-4, the loading start time of the newly loaded substrate is postponed by the delay time.

  FIG. 25 is a diagram showing a processing flow for copying the conveyance simulation information designation state in step ST110 of FIG. 15 to the storage area. First, in step ST110-1, it is determined whether the transport simulation information storage request signal is ON. If yes (Y), the process proceeds to step ST110-2, and the transport simulation information designation state is copied to the storage area, followed by step ST110. -3 and the conveyance simulation information storage request signal is turned OFF.

  FIG. 26 is a diagram showing a conveyance simulation end process flow in step ST112 of FIG. In step ST112-1, the created substrate transfer schedule is overwritten and copied to the input base transfer schedule conversion area.

[Throughput verification]
The throughput verification process in step ST22-5 of FIG. 11 is performed as follows.
1) When a plurality of new substrates having the same process recipe conditions are simultaneously loaded, after a transfer simulation (step ST22-3 in FIG. 11) of the leading new substrate from a state where no substrate exists in the apparatus, and subsequent subsequent substrate loading Before the transfer simulation (step ST22-6 in FIG. 11), verification (step ST22-5 in FIG. 11) is performed to select the transfer control parameter setting that provides the maximum throughput. Here, in the transfer simulation for loading the first new substrate (step ST22-3 in FIG. 11), when the throughput verification maximum throughput parameter selection process (step ST22-5 in FIG. 11) takes time, the first substrate is loaded first. Is a treatment for.

  2) In the throughput verification function 1) (step ST22-5 in FIG. 11), a plurality of parameter settings that are assumed to be optimum are prepared, and a new substrate is loaded and transferred for each of the number of throughput evaluation targets. Perform a simulation and measure the throughput evaluation value. Among them, the parameter having the maximum throughput value is selected and used for the simulation of loading and transferring a plurality of remaining new substrates.

  3) The parameter setting of 2) includes a newly input substrate and a transfer start delay allowable time of the already-inserted substrate, a priority parameter, and a substrate input time lower limit interval.

  4) The plurality of parameter settings assumed to be optimal in 2) are prepared in advance by searching for parameter settings that maximize the throughput value with respect to the process recipe conditions considered at the design time.

5) The throughput evaluation value measured in the above 2) is the following lot index value from when the first new substrate is inserted into the substrate storage container to when the last substrate returns to the substrate storage container, or when the first new substrate is the substrate storage container. Any one of the tact base values from when the last substrate is returned to when the last substrate returns to the substrate storage container is selected and used. Which one is used depends on the device.
Lot index value WPH _{lot index}
= Number of substrates processed N / Total substrate processing time T _N
Tact base value WPH _{takt base}
= (Number of processed substrates N-1) / (Total processing required time T _N -Starting substrate processing required time T ₁ )

[Production restart function]
When a request for resuming production is received from the equipment control unit after manual maintenance after the equipment has stopped, a new board is put into the equipment while collecting the board remaining in the equipment into the specified board storage container. Scheduling is performed as in 1) to 3) below.
1) A transport simulation method is used for production resumption scheduling.
2) The substrate remaining in the apparatus is collected into the designated substrate storage container while satisfying the process constraint conditions.
3) Scheduling to collect the substrate remaining in the apparatus is performed, and then scheduling for introducing a subsequent new substrate is performed.

  FIG. 27 is a conceptual diagram for explaining the resumption of production from an apparatus stop state. FIG. 27 (a) shows a conventional example, and FIG. 27 (b) shows this embodiment. As shown in FIG. 27, in the conventional example, as shown in FIG. 27A, the substrates 1 to 4 remaining in the apparatus are collected, and then production resumption preparation is performed. 5-8 were charged. On the other hand, in this embodiment, as shown in FIG. 27B, new substrates 5 to 8 are loaded in parallel with the recovery of the substrates 1 to 4 remaining in the apparatus. This improves the production volume.

[Rescheduling scheduling of the substrate remaining in the equipment]
The outline of the collection schedule of the substrate remaining in the apparatus is as follows 1) to 4).
1) A transfer simulation is performed to designate one or a plurality of substrates remaining in the apparatus one by one (in the present embodiment, one set is designated) and to collect them in the substrate storage container.

  2) In the transfer simulation, a virtual device model is generated in the control unit (see FIG. 5), and the substrate with the recovery schedule is transferred according to the substrate transfer schedule created in the previous residual substrate recovery simulation, and a new recovery is specified. The substrate performs a transport simulation that satisfies the unit processing end condition and the transport condition, and creates a new substrate transport schedule.

  3) In the transfer simulation, it is assumed that the newly collected designated substrate returns to the designated substrate storage container after the end of the process.

  4) In the transfer simulation, transfer processing is performed on each collected substrate according to the process recipe conditions set in advance on the apparatus control unit side. Also included is a process of skipping over a unit whose recipe time setting is 0.

[Restart production simulation of substrate collection and transfer]
FIG. 28 is a diagram showing a flow of a recovery designated residual substrate recovery transfer simulation (step ST23-6 in FIG. 12). In FIG. 28, N represents the number of substrate storage containers (load ports), UNT_NUM represents the total number of units, and TRF_NUM represents the number of transporting units. First, in step ST201, the conveyance simulation is initialized, and the process proceeds to step ST202. In step ST202, the minimum remaining time until the next status transition event of the transporter or unit processing is searched to perform time processing of the transport simulation time, and the process proceeds to step ST203. In step ST203, status update processing is performed in all process units, and the process proceeds to step ST204. In step ST204, status update processing is performed in all the transporters, and the process proceeds to step ST205.

  In step ST205, a transfer start determination process for the in-apparatus residual new collection designated substrate is performed, and the process proceeds to step ST206. In step ST206, in-apparatus residual collection scheduling (hereinafter referred to as "SCH") completed substrate transfer start determination processing is performed, and the process proceeds to step ST207. In step ST207, a transfer device start determination process is performed for a new recovery designated substrate or a recovery SCH completed substrate, and the process proceeds to step ST208.

  In step ST208, residual substrate recovery simulation transport error processing is performed, and the process proceeds to step ST209. In step ST209, it is determined whether or not there is a collection substrate in the transfer simulation apparatus. If yes (Y), the process proceeds to step ST202. If no (N), the process proceeds to step ST210, and the transfer simulation is completed. Process.

  FIG. 29 is a diagram showing a transport simulation initialization process flow in step ST201 of FIG. First, in step ST201-1, the transport simulation state is initialized to the state before the start of the previous recovery SCH (scheduled) substrate recovery, and the process proceeds to step ST201-2 or step ST201-3. The transfer simulation state includes all unit information data, transfer information data, and other data necessary for transfer simulation. For initialization, the data set copied to the storage area when the transport simulation of the previously collected SCH substrate is started is overwritten and copied to the transport simulation variable area. In step ST201-2, the reference pointer of the loaded substrate transfer schedule is initialized to the state before starting the collection of the new collection designated substrate, and in step ST201-3, the collection start time of the new collection designated substrate is set to the current simulation time. The reference pointer is used to sequentially refer to the existing substrate transfer schedule in order to start transfer of the loaded substrates in accordance with the order of the existing substrate transfer schedule.

  FIG. 30 is a diagram showing a flow of conveyance simulation time passage (step ST202) in FIG. First, in step ST202-1, the minimum value of the remaining time until the unit next status transition is searched, set to the interval time, and the process proceeds to step ST202-2. In step ST202-2, it is determined whether the remaining time until the new collection designated substrate transfer start time is smaller than the interval time (remaining time <interval time). If yes (Y), the process proceeds to step ST202-3, and no ( In the case of N), the process proceeds to step ST202-4. In step ST202-3, the remaining time until the new collection designated substrate transfer start time is set as the interval time, and in step ST202-4, the minimum remaining time until the next status shift of the transfer device is searched, and the process proceeds to step ST202-5. Transition.

  In step ST202-5, it is determined whether or not the minimum remaining time until the next status of the conveyor is smaller than the interval time (remaining time minimum value <interval time). If yes (Y), the process proceeds to step ST202-6. If not (N), the process proceeds to step ST202-7. In step ST202-6, the minimum remaining time until the next status of the transfer machine is set as the interval time, and in step ST202-7, the minimum remaining time until the collection SCH-completed substrate transfer start time is searched. In subsequent step ST202-8, it is determined whether the remaining time minimum value until the collection SCH-completed substrate transfer start time is smaller than the interval time (remaining time minimum value <interval time). If yes (Y), the process proceeds to step ST202-9. If no (N), the process proceeds to step ST202-10.

  In step ST202-9, the remaining time until the recovery SCH-completed substrate transfer start time is set to the inverter time as the minimum value. In step ST202-10, the transfer clogging error is monitored, and in step ST202-11, the interval is set at the transfer simulation time. Add time. Here, the conveyance jam error monitoring monitors a situation where the interval time becomes zero over a certain number of times. If such a situation occurs, the recovery delay time of the new recovery designated substrate is set to a constant value as a transport error.

  FIG. 31 is a diagram showing a process unit status update process (step ST203) flow of FIG. First, in step ST203-1, the conveyance simulation interval time is added to the unit processing elapsed time, and the process proceeds to step ST203-2. In step ST203-2, it is determined whether the unit processing elapsed time has passed the next status transition time (unit processing elapsed time ≧ next status transition time). If yes (Y), the process proceeds to step ST203-3, and no. In the case of (N), the process proceeds to step ST203-40. In step ST203-3, the unit processing status is determined. If “processing”, the process proceeds to step ST203-11. If “processing is completed”, the process proceeds to step ST203-21. If “reset”, the process proceeds to step ST203-31. Transition.

  In step ST203-11, the unit processing status is changed to “processing completed”, and in step ST203-12, the substrate transfer request signal is turned ON. In step ST203-21, it is determined whether the unit processing status “reset” transition request signal is ON. If yes (Y), the process proceeds to step ST203-22. In step ST203-22, the unit information board data is deleted. The process proceeds to step ST203-23. In step ST203-23, the unit processing status is changed to “reset”, and the process proceeds to step ST203-24. In step ST203-24, the reset time is added to the next status transition time, and in the subsequent step ST203-25, the remaining time until the next status transition time is set. In step ST203-31, the unit processing status is changed to “processing stopped”, and in step ST203-32, all unit information data is erased. In step ST203-40, the remaining time until the next status transition time is set.

  FIG. 32 is a diagram showing a flow of the conveyor status update process (step ST204) in FIG. First, in step ST204-1, the conveyance simulation interval time is added to the conveyance machine conveyance process elapsed time, and in step ST204-2, the conveyance process elapsed time has passed the next status transition time (conveyance process elapsed time ≧ next status transition). If yes (Y), the process proceeds to step ST204-3, and if no (N), the process proceeds to step ST204-50. In step ST204-3, it is determined whether the transport status is “moving”, “removing”, “retracting”, or “retracting”, and “moving”, “removing”, “retracting”, If it is “evacuating”, the process proceeds to step ST204-11, step ST204-21, step ST204-31, and step ST204-41, respectively. In step ST204-50, the remaining time until the next status transition time is set.

  In step ST204-11, it is determined whether or not the carrier non-interference condition is satisfied. If yes (Y), the process proceeds to step ST204-12. If no (N), the process proceeds to step ST204-15. In step ST204-12, the transfer type of the transfer device is determined. If “takeout”, the process proceeds to step ST204-13, and the transfer status is changed to “being taken out”. In the case of “storage”, the transport status is changed to “storage” in step ST204-14. In Step ST204-15, the next status transition time is delayed and updated. In step ST204-21, it is determined whether the in-unit substrate transfer request signal is ON. If yes (Y), the process proceeds to step ST204-22, and if no (N), the process proceeds to step 204-25. In step ST204-22, the unit processing status is requested to shift to “reset”, and the process proceeds to step ST204-23. In step ST204-23, the conveyance stator is changed to "stopped" (conveyance is completed), and in the subsequent step ST204-24, a post-process leaving time upper / lower limit conveyance error is monitored. In step ST204-25, the remaining unit processing time is added to the next status transition time.

  In step ST204-31, the transport board data is copied to the unit information, and in the subsequent step ST204-32, the storage unit status is shifted to “processing”, the process is started, and the process proceeds to step ST204-33. In step ST204-33, it is determined whether or not the position of the conveyor is outside the interference region. If yes (Y), the process proceeds to step ST204-34, and if no (N), the process proceeds to step ST204-36. In step ST204-34, the conveyance status is changed to “stopped” (conveyance is completed), and in subsequent step ST204-35, all the conveyance machine information data is erased, and the process proceeds to step ST204-37. In step ST204-36, the conveyance status is changed to “evacuating”, and the process proceeds to step ST204-37. In step ST204-37, a process time interval upper and lower limit transport error is monitored, and in subsequent step ST204-38, a transporter holding time upper limit transport error is monitored. In step ST204-41, the current position data of the transfer machine is changed to the standby position, and the process proceeds to subsequent step ST204-42. In step ST204-42, the conveyance status is changed to “stopped” (conveyance is completed), and in step ST204-43, all the conveyance machine information data is erased.

  FIG. 33 is a diagram showing the flow of the apparatus residual new designated substrate transfer start determination process (step ST205) in FIG. First, in step ST205-1, it is determined whether the designated transfer machine is stopped and the transfer start request signal is OFF. If yes (Y), the process proceeds to step ST205-2. In step ST205-2, the current simulation time is the transfer start. It is determined whether the time has passed (current simulation time ≧ conveyance start time). If yes (Y), the process proceeds to step ST205-3, and if no (N), the process proceeds to step ST205-11. In the case of extraction, the transfer start time here refers to a time set by subtracting the time required to reach the transfer device from the process recipe setting time for the unit information. In the case of storage, the current simulation time itself is used.

  In step ST205-3, the transporter non-interference condition is determined. In subsequent step ST205-4, the transporter condition determination extraction source / storage destination unit condition is determined, and the process proceeds to step ST205-5. In step ST205-5, it is determined whether all of the transporter non-interference condition, the transporter condition, the take-out source / storage destination unit condition are satisfied, and if yes (Y), the process proceeds to step ST205-6. At -6, priority is given to the start of new collection designated substrate transfer. In this determination, if the start time delay of the collection SCH completed substrate transfer exceeds the set allowable value immediately after the transfer is started, it is determined by the priority parameter whether the new collection designated substrate transfer is given priority over the collection SCH completed substrate. To do.

  In subsequent step ST205-7, it is determined whether the new collection designated substrate transfer start delay time is equal to 0 (= 0) or a positive value (> 0). If 0, the transfer start request is sent to the transfer device in step ST205-8. Turn on the signal. If the value is positive, the process proceeds to step ST205-12, and the remaining time is set by adding the delay time to the conveyance start time. In step ST205-11, the remaining time until the conveyance start time is set.

  FIG. 34 is a flowchart showing the in-apparatus residual recovery SCH-completed substrate transfer start determination process (step ST206) in FIG. First, in step ST206-1, it is determined whether the designated transfer machine is stopped and the transfer start request signal is OFF. If yes (Y), the process proceeds to step ST206-2. In step ST206-2, it is determined whether the current simulation time has passed the scheduled transfer start time of the transfer execution time table (current simulation time ≧ transfer scheduled start time of transfer table). If yes (Y), step ST206 is determined. -3, if no (N), the process proceeds to step ST206-11. Here, the scheduled transfer start time indicates the time in the row referred to by the pointer of the loaded substrate schedule. In step ST206-3, the transporter non-interference condition is determined, and in subsequent step ST206-4, the transporter condition determination extraction source / storage destination unit condition is determined, and the process proceeds to step ST206-5. In this determination, it is determined whether the transporter hand does not have a substrate when it is taken out as a transporter condition, or whether it has a substrate when stored. Further, it is determined as a take-out source / storage destination unit condition whether there is a board at the take-out source and no other board at the storage destination. In Step ST206-11, the remaining time until the scheduled start time of conveyance is set.

  In step ST206-5, it is determined whether all of the non-interference conditions for the transfer device, the transfer device conditions, the take-out source / storage destination unit conditions are satisfied, and if yes (Y), the process proceeds to step ST206-6 and the recovery SCH A priority determination is made on the finished substrate transfer start, and the process proceeds to step ST206-7. In this determination, if the transfer immediately starts and the delay time exceeds the set allowable value after the scheduled transfer time, it is determined by the priority parameter whether the recovery SCH-completed substrate transfer has priority over the new recovery designated substrate. In step ST206-7, it is determined whether the recovered SCH-completed substrate transfer start delay time is equal to 0 (= 0) or a positive value (> 0). If 0, transfer to the transfer device is started in step ST206-8. Turn on the request signal. For a positive value, the remaining time is set by adding a delay time to the scheduled transfer start time in step ST206-12. Here, the remaining time is used for the inverter time calculation for the conveyance simulation time.

  FIG. 35 is a diagram showing a flow of a new recovery designated substrate or recovery SCH-completed substrate transporter start determination process (step ST207) in FIG. First, it is determined whether the designated transfer device is stopped and the transfer start request signal is ON. If yes (Y), the transfer substrate data and transfer operation are set in the transfer device information data in step ST207-2, and then step ST207-3. Set the transfer status to “Moving”. The transport status is included as a property in the transport information data. In step ST207-4, the moving time is set to the remaining time until the next status of the transfer device. In step ST207-5, the corresponding transfer data is registered in the substrate transfer schedule. In step ST207-6, it is determined whether the substrate is a new recovery designated substrate or a recovery SCH completed substrate. If the recovery SCH has been completed, the process proceeds to step ST207-7. The loaded substrate transfer schedule reference pointer is updated. In the case of new collection designation, the process proceeds to step ST207-8, and the conveyance machine conveyance start request signal is turned OFF.

  FIG. 36 is a diagram showing the residual substrate recovery simulation transport error processing flow (step ST208) of FIG. First, in step ST208-1, it is determined whether the new collection designated substrate collection start delay time is a positive value (new collection designated substrate collection start delay time> 0). If yes (Y), the process proceeds to step ST208-2. , No (N) Step ST208-4 is entered. In step ST208-2, the transfer simulation state is restored to the initial state before the collection of the new collection designated substrate, and the process proceeds to step ST208-3. In step ST208-3, the reference pointer of the loaded substrate transfer schedule is restored to the state before the start of the new collection designated substrate collection, the process proceeds to step ST208-4, and the collection start time of the new collection designated substrate is postponed by the delay time. Let

  FIG. 37 is a diagram showing a conveyance simulation end process flow of step ST210 of FIG. The substrate transfer schedule created in step ST210-1 is overwritten and copied to the loaded substrate transfer schedule area.

  The embodiments of the present invention have been described above. However, the present invention is not limited to the above-described embodiments, and various modifications can be made within the scope of the technical idea described in the claims and the specification and drawings. Can be modified. In the above embodiment, the plating apparatus for forming a metal film such as a bump electrode on the semiconductor substrate in the plating tank 22 has been described as an example. However, the present invention is not limited to this, and more strict management of the substrate transfer schedule is performed. Is suitable for an apparatus that requires For example, in electroplating, it is possible to stop the progress of plating by shutting off the power supply that supplies the electrolysis current. Therefore, the electroless plating apparatus does not require substrate transport scheduling under strict constraints as in the electroless plating apparatus. Then, since the plating process inevitably progresses, it is necessary to manage the substrate transport schedule more strictly. Therefore, the present invention is suitable.

  In the present invention, since the substrate transfer scheduling is performed by switching between the linear programming method and the simulation method, not only the substrate transfer schedule that always exhibits the maximum throughput in the normal apparatus operation control for the newly loaded substrate is created. After the failure has occurred and the failure has been recovered, the substrate transport scheduling that allows the introduction of a new substrate while collecting the substrate remaining in the equipment is performed, thereby reducing the time required for substrate recovery and the production volume. Can be used as a scheduler, a substrate transport method of a substrate processing apparatus using the scheduler, and an operation control apparatus of the substrate processing apparatus.

DESCRIPTION OF SYMBOLS 10 Plating processing apparatus 11 Load port 12 Road robot 13 Substrate positioning stand 14 Washing dryer 15 Tightening stage 16 Stocker 17 Pre-washing tank 18 Pretreatment tank 19 Washing tank 20 Rough drying tank (blow tank)
DESCRIPTION OF SYMBOLS 21 Washing tank 22 Plating tank 23 Conveyor 24 Conveyor 25 Substrate holder storage area 26 Plating area 30 Control unit 31 Central processing unit (CPU)
32 Input device 33 Shared storage device 34 Input / output interface 40 Scheduler 41 Scheduler switching process 42 Initialization process 43 Scheduling process 44 Input / output interface 50 Device controller system 51 Controller for device control

Claims (21)

A substrate processing apparatus comprising: a plurality of substrate processing units that process a substrate; a transfer unit that transfers the substrate; and a control unit that controls transfer of the substrate in the transfer unit and substrate processing in the substrate processing unit A substrate transport method of
A substrate transport method for a substrate processing apparatus, wherein the scheduling of the substrate transport is performed by switching between a linear programming method and a simulation method. The substrate transport method for a substrate processing apparatus according to claim 1,
Create a substrate transfer schedule for loading a new substrate by the linear programming method and transfer the substrate. When an abnormality of the apparatus is detected, switch to the substrate transfer scheduling by the simulation method to recover the target substrate or continue the process. A substrate transport method for a substrate processing apparatus, wherein the substrate transport is performed by creating a substrate transport schedule including transport for feeding and transport of loaded substrates. In the substrate conveyance method of the substrate processing apparatus of Claim 2,
After detecting the abnormality of the apparatus, after the substrate transfer processing in the substrate transfer scheduling by the simulation method, if it is detected that the apparatus has returned from the abnormal state to the normal state, the substrate transfer by the substrate transfer scheduling by the linear programming method is performed. A substrate transfer method for a substrate processing apparatus, characterized by returning to processing. In the substrate conveyance method of the substrate processing apparatus of Claim 2,
A substrate transport method for a substrate processing apparatus according to claim 1, wherein the abnormality of the apparatus is production restart from an apparatus stop state, dynamic switching of unit use / non-use, and process NG. In the substrate conveyance method of the substrate processing apparatus of Claim 3,
The state in which the apparatus is returned to the normal state means that the processing of the substrate to be collected in the apparatus is completed and the substrate is returned to the substrate storage container, and there is no substrate in the apparatus, or a new one being processed A substrate transfer method for a substrate processing apparatus, characterized in that only the input substrate exists. In the substrate conveyance method of the substrate processing apparatus of Claim 1 or 2 or 3,
When switching from the linear programming method to the simulation method or from the simulation method to the linear programming method, the scheduled substrate transfer schedule and substrate process condition data at the time of switching are delivered to the switching destination scheduler. A substrate transport method for a substrate processing apparatus. In the substrate conveyance method of the substrate processing apparatus of Claim 6,
The substrate processing method of a substrate processing apparatus, wherein the substrate process condition data includes substrate number data of a scheduled substrate, process time setting in the substrate processing unit, and transfer order setting information in the transfer unit. Substrate processing comprising a plurality of substrate processing units for processing a substrate, a transport unit for transporting the substrate, and a control unit for transporting the substrate at the transport unit and controlling substrate processing at the substrate processing unit A scheduler built in the control unit of the apparatus for calculating a substrate transfer schedule,
A scheduler characterized in that scheduling of the substrate transfer is performed by switching between a linear programming method and a simulation method. The scheduler of claim 8,
A scheduler that creates a substrate transfer schedule for loading a new substrate by the linear programming method, and creates a substrate transfer schedule for recovery of a target substrate or process continuation when the apparatus is abnormal by a simulation method. The scheduler according to claim 8, wherein
After the abnormality of the apparatus, after scheduling the substrate conveyance by the simulation method, when the apparatus returns from the abnormal state to the normal state, the scheduler returns to the substrate conveyance scheduling by the linear programming method. The scheduler according to claim 8, wherein
The scheduler is characterized in that the abnormality of the apparatus is production restart from the apparatus stop state, dynamic switching of unit use / non-use, and process NG. The scheduler according to claim 9, wherein
The state in which the apparatus is returned to the normal state means that the processing of the substrate to be collected in the apparatus is completed and the substrate is returned to the substrate storage container, and there is no substrate in the apparatus, or a new one being processed A scheduler characterized in that only the input substrate exists. The scheduler according to claim 8, 9 or 10,
When switching from the linear programming method to the simulation method or from the simulation method to the linear programming method, the scheduled substrate transfer schedule and substrate process condition data at the time of switching are delivered to the switching destination scheduler. To scheduler. The scheduler according to claim 13, wherein
The substrate process condition data includes substrate number data of a scheduled substrate, process time setting in the substrate processing unit, and transfer order setting information in the transfer unit. A substrate processing apparatus comprising: a plurality of substrate processing units that process a substrate; a transfer unit that transfers the substrate; and a control unit that controls transfer of the substrate in the transfer unit and substrate processing in the substrate processing unit The operation control device of
An operation control apparatus for a substrate processing apparatus, wherein the control unit includes scheduling switching means for switching a substrate transfer scheduling between a linear programming method and a simulation method. The operation control apparatus for a substrate processing apparatus according to claim 15,
Create a substrate transfer schedule for loading a new substrate by the linear programming method and transfer the substrate. When an abnormality of the apparatus is detected, switch to the substrate transfer scheduling by the simulation method to recover the target substrate or continue the process. And a substrate processing apparatus operation control device for transporting a substrate by creating a substrate transport schedule including transport for loading and transport of loaded substrates. The operation control apparatus for a substrate processing apparatus according to claim 16,
After detecting the abnormality of the apparatus, after the substrate transfer processing in the substrate transfer scheduling by the simulation method, if it is detected that the apparatus has returned from the abnormal state to the normal state, the substrate transfer by the substrate transfer scheduling by the linear programming method is performed. An operation control apparatus for a substrate processing apparatus, wherein the operation control apparatus returns to the processing. The operation control apparatus for a substrate processing apparatus according to claim 17,
The apparatus abnormality control means an operation control apparatus for a substrate processing apparatus, wherein production is resumed from the apparatus stop state, unit use / non-use dynamic switching, and process NG occurs. The operation control apparatus for a substrate processing apparatus according to claim 17,
The state in which the apparatus has returned to the normal state means that the processing of the substrate to be collected in the apparatus is completed and the substrate is returned to the substrate storage container, and there is no substrate in the apparatus, or a new input during processing An operation control apparatus for a substrate processing apparatus, wherein only a substrate exists. In the operation control device for a substrate processing apparatus according to claim 15, 16 or 17,
When switching from the linear programming method to the simulation method or from the simulation method to the linear programming method, the scheduled substrate transfer schedule and the substrate process condition data at the time of switching are delivered to the switching destination scheduler. An operation control device for a substrate processing apparatus. The operation control apparatus for a substrate processing apparatus according to claim 20,
The substrate process condition data includes substrate number data of a scheduled substrate, process time setting in the substrate processing unit, and transfer order setting information in the transfer unit.

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