JP2011235292A - Drilling machine - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a drilling machine inhibiting deposition of dust on a workpiece.SOLUTION: The drilling machine includes a workpiece support member 13 having an aperture 15 on a top surface and supporting a workpiece 66 on the rotary shaft 28 of a workpiece rotating mechanism 12, a lid section 16 prepared liftably to the workpiece support member 13 so as to cover the aperture 15, an irradiation chamber 63 where the lid section 16 covers the aperture 15, a gas supply means 45 connected to the irradiation chamber 63 for supplying compressed gas, a bracket 81 extending through outside of the workpiece support member 13 from the workpiece rotating mechanism 12, and a connecting means 83 connecting the upper part of the bracket 81 and the lid section 16 detachably.

Description

  The present invention relates to a drilling device that forms a through hole in a wall portion of a workpiece by irradiating a laser beam.

  When manufacturing the fuel injection nozzle, a through hole is formed in the wall portion of the fuel injection nozzle body. The through hole is formed by irradiating the wall with laser light using a drilling device. (For example, refer to Patent Document 1 (FIG. 1).)

Patent document 1 is demonstrated based on the following figure.
As shown in FIG. 14A, a drilling device 100 includes a vacuum pump 102 that keeps the inside of a fuel injection nozzle 101 as a work in a vacuum, a tank 103 that is connected to the vacuum pump 102 and is filled with fluid, The fluid supply pump 104 that supplies the fluid in the fuel injection nozzle 101 to the fuel injection nozzle 101, the flow rate regulator 105 that adjusts the amount of fluid supplied from the fluid supply pump 104, and the fuel injection nozzle 101 from the flow rate regulator 105 A fluid supply pipe 106 that extends toward the tip 101a and flows a fluid therein, a fluid recovery pipe 107 that sends the fluid supplied from the fluid supply pipe 106 to the fuel injection nozzle 101 toward the tank 103, and a fuel injection nozzle An irradiator 110 that opens a hole in the fuel injection nozzle 101 by irradiating the laser beam to 101.

  As shown in (b) in FIG. 2 (b), which is an enlarged view of part b, the irradiator 110 irradiates the tip 101a of the fuel injection nozzle 101 with laser light 112. While the laser beam 112 is irradiated, the fluid is continuously supplied from the fluid supply pipe 106 toward the inside of the tip 101a of the fuel injection nozzle 101 (see arrow). When the tip 101a has a hole, the laser beam 112 that has reached the inside of the fuel injection nozzle 101 is diffused by the fluid. By diffusing, it is possible to prevent the laser beam 112 from being irradiated to the portion 101b facing the tip 101a having a hole.

  By the way, when the laser beam 112 is irradiated, dust called fume melted by the laser beam 112 is scattered in the vicinity of the tip 101a irradiated with the laser beam 112. Some of the scattered dust may adhere to the vicinity of the tip 101a. From the viewpoint of improving the appearance, it is desired to prevent dust from adhering to the workpiece.

Special Table 2001-526916

  This invention makes it a subject to provide the drilling apparatus which can prevent adhesion of the dust to a workpiece | work.

The invention according to claim 1 is a drilling device that forms a through hole in a wall portion of a workpiece by irradiating a laser beam toward the hollow portion from the outside of the hollow workpiece,
This drilling device
A workpiece rotation mechanism that is supported by the base and rotates the workpiece;
A workpiece support member supported by the workpiece rotation mechanism, supporting the workpiece on the rotation axis of the workpiece rotation mechanism, and having an opening on the upper surface;
A lid that is provided so as to be movable up and down with respect to the work support member, and covers the opening of the work support member;
An irradiation chamber that introduces laser light toward the irradiated portion of the workpiece that is irradiated with laser light, in the region where the lid is covered with the opening,
Gas supply means connected to the irradiation chamber for supplying compressed gas into the irradiation chamber;
A discharge means for discharging the gas in the irradiation chamber to the outside of the irradiation chamber including the dust generated by irradiation of the laser beam with the tip portion extended into the irradiation chamber;
A bracket extending from the work rotation mechanism through the outside of the work support member;
A connecting means for detachably connecting the upper portion of the bracket and the lid portion is provided.

  In the invention according to claim 2, the connecting means engages the lid portion before the compressed gas is supplied to the irradiation chamber by the gas supply means, and the lid portion after the compressed gas is discharged from the irradiation chamber by the discharge means. It is a cylinder unit that releases the engagement.

  In the invention according to claim 3, the connecting means is engaged with the lid portion before the compressed gas is supplied to the irradiation chamber by the gas supply means, and after the compressed gas is discharged from the irradiation chamber by the discharge means, It is a pin that releases the engagement.

In the invention according to claim 4, the workpiece is filled in the hollow portion with a filler that is not melted by the laser beam,
A vibration mechanism for vibrating the filler is arranged so as to come into contact with the filler.

The invention according to claim 5 is the drilling device according to claim 1 or 4, wherein
This drilling device comprises a control mechanism for controlling the vibration mechanism, the gas supply means and the discharge means,
This control mechanism is characterized in that until the through hole is formed, the pressure in the irradiation chamber is controlled to be higher than the pressure in the hollow portion and lower than the atmospheric pressure.

The invention according to claim 6 is the drilling device according to claim 5,
The control mechanism is characterized in that the discharge function of the discharge means is stopped after the through hole is formed.

The invention according to claim 7 is the drilling device according to claim 4, 5 or 6,
The size of the filler is 30 μm to 20 mm, the vibration frequency at which the vibration mechanism oscillates is 30 kHz to 100 kHz, and the amplitude at the time of oscillation is 5 μm to 30 μm.

  The invention according to claim 1 comprises a gas supply means and a discharge means. When irradiating the laser beam, the gas is discharged by the discharge means while the compressed gas is supplied by the gas supply means. An air flow is generated in the irradiation chamber by causing a difference in atmospheric pressure. Dust is efficiently discharged to the outside by this airflow.

  In addition, a connecting means for connecting the bracket and the lid is provided. The bracket is supported by the rotation mechanism together with the work support member. That is, the work supporting member can be fixed to the lid portion by connecting the bracket and the lid portion by the connecting means. By fixing the workpiece support member, the workpiece is also fixed, and a hole can be made at an accurate position.

  Further, the work is supported by the work support member so as to be rotatable on the rotation shaft. By rotating the workpiece rotation mechanism, the angle of the workpiece with respect to the laser beam can be changed. It is beneficial to drill at various angles with a single device.

In the invention according to claim 2, the connecting means engages the lid portion before the compressed gas is supplied to the irradiation chamber by the gas supply means, and the lid portion after the compressed gas is discharged from the irradiation chamber by the discharge means. Release the engagement. Supplying the compressed gas into the irradiation chamber increases the gas pressure in the irradiation chamber. The compressed gas acts in a direction to push down the work support member. That is, the workpiece support member is most likely to move while the compressed gas is supplied into the irradiation chamber. By using the connecting means while the pressure in the irradiation chamber is high, the workpiece support member can be effectively prevented from moving.

  In addition, a cylinder unit is used as the connecting means. By using the cylinder unit, it is possible to quickly connect / release the bracket and the lid.

In the invention according to claim 3, the connecting means is engaged with the lid portion before the compressed gas is supplied to the irradiation chamber by the gas supply means, and after the compressed gas is discharged from the irradiation chamber by the discharge means, Release the engagement. Supplying the compressed gas into the irradiation chamber increases the gas pressure in the irradiation chamber. The compressed gas acts in a direction to push down the work support member. That is, the workpiece support member is most likely to move while the compressed gas is supplied into the irradiation chamber. By using the connecting means while the pressure in the irradiation chamber is high, the workpiece support member can be effectively prevented from moving.

  In addition, a pin is used as the connecting means. If it is a pin, it can be procured inexpensively and the procurement cost of parts can be reduced.

  In the invention which concerns on Claim 4, the hollow body is filled with the filler which is not fuse | melted with a laser beam. For this reason, the laser beam having a hole in the wall collides with the filling body filled in the hollow portion. By this collision, the filler absorbs the energy of the laser beam. When the filler absorbs energy, the laser beam can be prevented from being irradiated onto the inner peripheral surface.

  In the invention according to claim 5, the control mechanism controls the atmospheric pressure in the irradiation chamber to be higher than the atmospheric pressure and lower than the atmospheric pressure until the through hole is formed. An air flow is generated in the irradiation chamber by causing a difference in atmospheric pressure. Dust is efficiently discharged to the outside by this airflow.

  In the invention which concerns on Claim 6, after the through-hole is formed, the discharge function of the discharge means is stopped. By narrowing the airflow for discharging the dust to one, the dust can be efficiently discharged to the outside.

  In the invention which concerns on Claim 7, the magnitude | size of a filler is 30 micrometers-20 mm, The vibration frequency which a vibration mechanism oscillates is 30 kHz-100 kHz, The amplitude at the time of oscillation is 5 micrometers-30 micrometers. The size of the filler is 30 μm to 20 mm. If it is this magnitude | size, a suitable space will be vacated in order to vibrate a filler in a hollow part. In addition, since the filler can be vibrated well by vibrating under the above-described vibration conditions, the life of the filler can be extended.

It is a perspective view of the drilling apparatus which concerns on a reference example. It is principal part sectional drawing of the drilling apparatus which concerns on a reference example. It is a figure explaining the set of a workpiece | work. It is a figure explaining the movement to the work position of a workpiece | work support part. It is a figure explaining the movement of a working part. FIG. 6 is a sectional view taken along line 6-6 of FIG. It is a figure explaining the irradiation angle of a laser. It is a comparison figure of the Example of this invention, and the past comparative example. It is a figure explaining the example of a change of a clamp mechanism. It is a figure explaining a connection means. It is a side view of the drilling apparatus which concerns on an Example. It is a figure explaining the effect | action of a connection means. It is a figure explaining the example of a change of a connection means. It is a figure explaining the basic principle of a prior art.

  Embodiments of the present invention will be described below with reference to the accompanying drawings. The drawings are viewed in the direction of the reference numerals.

  As shown in FIG. 1, the drilling device 10 is supported by a base 11, a work rotating mechanism 12 that is supported by the base 11 and rotates a work (reference numeral 66 in FIG. 3), and can be rotated by the work rotating mechanism 12. The workpiece support member 13 supported by the workpiece, the workpiece clamping mechanism 14 provided on the side surface of the workpiece support member 13 for clamping the workpiece, and the workpiece support member 13 provided above the workpiece support member 13 so as to be rotatable and movable up and down. A lid 16 that covers the opening 15 of the member 13, a work table 17 provided on the base 11, a lid rotation mechanism 18 that is supported by the work table 17 and rotates the lid 16, and the rotation of the lid An elevating mechanism 19 connected to the mechanism 18 and elevating the lid 16 and a positioning block 2 provided below the elevating mechanism 19 for positioning the lid 16 when elevating the lid 16 When, and a control mechanism 22 for controlling these tethered to work rotating mechanism 12 and the workpiece clamping mechanism 14.

  The work clamp mechanism 14 has a plate body 24 connected to the tip of the clamp cylinder 23 and operates the clamp cylinder 23 to raise and lower the plate body 24 as indicated by an arrow (1). Thus, the workpiece clamping and unclamping are operated.

  Although details will be described later, in a state as shown in the figure, the workpiece disposed in the workpiece support member 13 is clamped. The clamp state is released by operating the clamp cylinder 23 from here to raise the plate 24.

The workpiece rotation mechanism 12 includes an L-shaped rotation mechanism support portion 26 provided on the base 11, and an L-shaped workpiece rotation table 27 that is rotatably supported by the rotation mechanism support portion 26 and supports the workpiece support member 13. Consists of.
The work rotation table 27 is rotated around the rotation shaft 28 as indicated by an arrow (2). Although details will be described later, the rotating shaft 28 contacts the workpiece in the workpiece support member 13. That is, the work is disposed on the rotation shaft 28 of the work rotation table 27.

  The elevating mechanism 19 is configured such that the lid raising / lowering cylinder 32 operates upward and downward as indicated by an arrow (3), whereby the lid 16, the lid support 33 that supports the lid 16, and the lid support. The positioning pin 34 disposed on the bottom surface of the body 33 is moved up and down integrally.

  The lid raising / lowering cylinder 32 is operated from the state shown in the figure, and the lid 16, the lid support 33, and the positioning pins 34 are lowered. The lid portion 16 is put on the work support member 13, and the positioning pins 34 are inserted into the positioning block 21.

The lid rotation mechanism 18 includes a lid rotation motor 36 for turning the lid 16 in the horizontal direction, and a support column 37 for supporting the lid lifting cylinder 32 disposed on the upper surface of the lid rotation motor 36. Consists of.
By operating the lid rotation motor 36, the support column 37 rotates around the rotation shaft 38 as shown by the arrow (4). As a result, the lid lifting cylinder 32, the lid support 33, the lid 16, and the positioning pin 34 supported by the support pillar 37 are integrally rotated.

When the work rotary table 27 is rotated around the rotary shaft 28 (arrow (2)), it is necessary to prevent the clamp cylinder 23 from coming into contact with the lid portion 16. Contact is prevented by moving the lid 16 and the like to a standby position 39 indicated by an imaginary line.
The main part of the present invention will be described with reference to the following figure.

  As shown in FIG. 2, the lid portion 16 includes a transmission plate 43 that is supported by an upper support frame 42 and transmits laser light, and a passage 44 through which the laser light that has passed through the transmission plate 43 passes. The passage 44 is opened in the partition wall 41 that forms the space of the irradiation chamber 63 that accommodates the workpiece irradiated with the laser light that has passed through the passage 44. Further, the lid portion 16 is connected to the passage 44, and a compressed gas supply path 46 through which the compressed gas supplied from the gas supply means 45 passes, and is always directed in the direction of being formed in a nozzle shape and irradiated with laser light. A tip portion 48 arranged in this manner, discharge means 49 for sucking dust generated by laser light irradiation from the tip portion 48, and a seal that contacts the work support member 13 when the work support member 13 is covered with the lid portion 16. The material 51 is provided.

Note that dust generated by laser light irradiation is a metal vapor called a plume, which is a metal vapor formed by evaporation of metal on the surface of a workpiece by heat during laser processing, or an ionized mixed gas.
The arrows (1) and (3) are the same as the arrows (1) and (3) in FIG.

The lid portion 16 is composed of an upper base 52 and a lower base 53, and the sealing material 51 is disposed so as to be sandwiched between the upper base 52 and the lower base 53.
As the gas supplied from the gas supply means 45, an inert gas such as nitrogen can be used in addition to air, and the type of compressed gas is not limited.

  On the other hand, the workpiece support member 13 includes an outer wall portion 47 that contacts the sealing material 51, a concave portion 62 having an inner wall portion 54 that forms a space of the irradiation chamber 63 at a position facing the partition wall 41, and a workpiece at the bottom of the concave portion 62. Is placed on the first work pocket 55, the vibration mechanism 56 using an ultrasonic vibrator whose tip extends toward the first work pocket 55, and the first work pocket connected to the vicinity of the tip of the vibration mechanism 56. It comprises low pressure means (details will be described later) for lowering the lower side of the pocket 55.

  By lowering the plate body 24, the support plate 57, the support columns 58 and 58, and the clamp plate 59 connected to the plate body 24 are integrally lowered. The work is clamped by the second work pocket 61 and the first work pocket 55 formed on the lower surface of the clamp plate 59 as indicated by an imaginary line.

Thereafter, as shown by the arrow (3), the lid portion 16 is lowered and placed on the work support member 13. At this time, a region surrounded by the lid 16 and the work support member 13 is an irradiation chamber 63 that performs laser light irradiation. That is, it can be said that the gas supply means 45 is connected to the irradiation chamber 63 and supplies the compressed gas into the irradiation chamber 63. Further, it can be said that the discharge means 49 has a tip 48 formed in a nozzle shape extended into the irradiation chamber 63.
The work set will be explained with the following figure.

As shown in FIG. 3 (a), the workpiece rotary table (FIG. 1, reference numeral 27) is operated from the state where the tip of the vibration mechanism 56 faces upward, and the tip of the vibration mechanism 56 faces downward. The work support member 13 is rotated in the state shown in b).
In FIG. 3, the work support member 13 is viewed from the direction in which the rotary shaft 28 extends from the front and back of the drawing.

  Next, in the state shown in (b), the low pressure means 64 that operates the low pressure on the vibration mechanism 56 side in the first work pocket 55 is operated. Then, a zirconia ball that is not melted by the laser beam is filled in the hollow portion 67 of the work 66 as the filling body 65 and disposed in the first work pocket 55.

  At this time, due to the action of the low pressure means 64, a force to be pulled upward is applied to the work 66. Therefore, even if the hand is released from the work 66 before clamping with the clamp plate 59, the work 66 does not fall.

  The zirconia balls as the filler 65 are made of zirconia, which is an oxide ceramic. As is well known, zirconia has an extremely high melting point, so that it does not melt even when laser light is incident. It should be noted that the location where the laser beam is incident on the filler 65 causes collapse. As a result, fine powder is generated.

In addition to the zirconia balls, powder can be used for the filler. That is, the diameter of the filler 65 containing zirconia powder is set based on the irradiation time and the oscillation frequency of the laser light. In other words, the volume of the filling body 65 made of zirconia before irradiation with the laser beam is V ₀ , the volume that collapses for each pulse is Z, the oscillation frequency of the laser beam is f, and the irradiation time of the laser beam is t. At this time, the minimum required radius R of the filler is as represented by the following formula (1).
R = {3V ₀ -tfZ / 4π} ^1/3 (1)

  In other words, the filler 65 having a larger radius than the radius R obtained by the equation (1) is selected. In addition, the volume Z that collapses for each pulse of the formula (1) is a volume that is obtained in advance by experiments, so that it is other than a packing containing powder made of zirconia, for example, a packing made of zirconia. Also, if the volume Z that collapses for each pulse can be obtained in advance by experiment, it can be selected.

  While the workpiece is irradiated with the laser beam, a through hole is formed in the wall portion of the workpiece, and the laser beam passing through the through hole passes through the wall portion in which the through hole is formed. In order to avoid reaching the peripheral surface, the filler 65 is provided and does not melt when irradiated with laser light, and the diameter of the through hole formed in the workpiece, and the above formula ( The material and shape of the filler are not particularly limited as long as the radius is larger than R obtained in 1).

  The diameter of the through hole is 3 μm to 200 μm, and it is necessary to use a powder that is at least larger than the through hole. When a zirconia ball is used, the diameter of the zirconia ball is preferably 30 μm to 20 mm.

Next, as shown by arrow (1) in (c), the clamp plate 59 is raised to clamp the workpiece 66. This completes the setting of the workpiece 66.
As shown in this figure, the low pressure means 64 is connected to the hollow portion 67, and makes the air pressure of the hollow portion 67 lower than the outside of the wall portion 68.

The air pressure in the hollow portion 67 is made lower than the outside of the wall portion 68 by the low pressure means 64. Thereby, the force which pulls the workpiece | work 66 to the low voltage | pressure side act | operates. Prior to drilling, this force holds the workpiece 66 firmly.
Next, the movement of the work support part to the work position will be described.

As shown in FIG. 4A, after clamping the work 66, the work rotation table (FIG. 1, reference numeral 27) is operated, and the tip of the vibration mechanism 56 is again directed upward as shown in FIG. 4B. The workpiece support member 13 is moved to such a position.
Next, the operation when the work support member 13 is covered with the lid 16 will be described.

  As shown in FIG. 5, the lid portion 16 is moved onto the workpiece support member 13 from the standby position (FIG. 1, reference numeral 39), and then the lid portion 16 is lowered as indicated by an arrow (3). By this operation, an irradiation chamber 63 is formed by the partition wall 41 and the sealing material 51 of the lid portion 16 and the upper surfaces of the inner wall portion 54 and the clamp plate 59 of the work support member 13. That is, the irradiation chamber 63 can be said to be an area formed by covering the opening 15 of the work support member 13 with the lid portion 16. After the irradiation chamber 63 is formed, the workpiece is irradiated with laser light.

As shown in FIG. 6, when the laser beam 70 is irradiated, dust generated by irradiating the laser beam 70 is discharged by the discharge unit 49 while the compressed gas is supplied by the gas supply unit 45. By supplying the compressed gas with the gas supply means 45, the atmospheric pressure in the irradiation chamber 63 increases. For this reason, by operating the discharge means 49, the inside of the irradiation chamber 63 can be maintained at the same atmospheric pressure as the atmospheric pressure.
The vibration mechanism 56, the low pressure means 64, the gas supply means 45, and the discharge means 49 are controlled and operated by the control mechanism 22 to which each is connected.

  As the laser light, nanosecond laser light or picosecond laser light can be used. Further, the laser processing head can support both the nanosecond laser light irradiation device and the picosecond laser light irradiation device. In this case, after performing rough drilling with nanosecond laser light, finishing with picosecond laser light enables highly accurate drilling operations to be performed in a short time.

As shown in FIG. 7A, the angle θ formed by the axis L1 of the vibration mechanism 56 with respect to the laser beam 70 can be changed by rotating the work rotation table (reference numeral 27 in FIG. 1). For example, θ1 in the case of (a) is 27 °, and by rotating this, θ2 can be set to 45 ° as shown in (b).
Thereby, the irradiation angle at which the laser beam 70 strikes the workpiece 66 can be changed.

  A workpiece 66 is disposed on a rotary shaft 28 extending in the front and back direction of the drawing. Thereby, the angle of the workpiece 66 with respect to the irradiated laser beam 70 can be changed by rotating the workpiece rotary table. That is, it is only necessary to actuate the rotation mechanism in order to make holes from various angles. It is beneficial to drill at various angles with a single device.

  If the workpiece 66 is arranged away from the rotary shaft 28, the workpiece 66 moves greatly by rotating the workpiece support member 13, and the workpiece 66 moves to a position where the laser beam 70 is not irradiated. . The workpiece 66 is supported on the rotating shaft 28 by the workpiece support member 13. Since the workpiece 66 is supported on the rotary shaft 28, the workpiece 66 is rotated at the same position. Since it rotates in the same position, it is not necessary to adjust the height of the workpiece | work 66 separately after rotating. That is, it is not necessary to provide a device for adjusting the height or the like of the workpiece 66, which contributes to a reduction in the number of parts.

As shown in FIG. 8A, the dust 72 generated in the irradiated portion 71 can be quickly recovered by irradiating the workpiece 66 with the laser beam 70 while operating the discharge means 49.
Until the through hole ((c), symbol 75) is formed, the control mechanism controls the atmospheric pressure in the irradiation chamber 63 to be higher than the atmospheric pressure of the hollow portion 67 and lower than the atmospheric pressure. .

That is, the discharge means 49 sucks more gas than the gas supply means 45 supplies per unit time. In addition, the suction means 49 sucks more than the suction amount per unit time and is sucked by the low pressure means 64.
An air flow is generated in the irradiation chamber 63 by causing a difference in atmospheric pressure. Dust is efficiently discharged to the outside by this airflow.

On the other hand, as shown in (b), in the comparative example having no discharging means, the evaporation trap 72 may be reattached to the hole by stopping in place. Therefore, it takes time to perform the drilling while re-attaching the adhesive 73 again.
That is, as shown in (a), by irradiating the workpiece 66 with the laser beam 70 while operating the discharge means 49, the reattachment of the dust 72 can be prevented and the hole can be penetrated quickly.

  In other words, the drilling device includes a control mechanism (not shown), and the irradiation chamber 63 can be kept at atmospheric pressure or a state slightly lower than atmospheric pressure. In any of the above states, a laser beam 70 is emitted from a laser processing head (not shown), and is irradiated on the outer surface of the hollow workpiece 66. Dust (plume) 72 is generated by processing.

  In the case where there is no gas escape in the irradiation chamber 63 until the through hole 75 is formed, the processing places a load on the transmission plate 43 or the sealing member if the pressure is excessively increased (b). Further, if the pressure is excessively applied, the air may suppress the dust 72, and the dust 72 may be blocked from the laser light 70 without being removed from the portion to be processed. In other words, the process proceeds when the pressure is not excessively increased.

  When the through hole 75 is formed as shown in (c), the laser beam 70 collides with the filler 65. Due to this collision, the filler 65 absorbs the energy of the laser beam 70. Since the filler 65 absorbs energy, the inner circumferential surface 76 can be prevented from being irradiated with the laser beam 70.

  Further, the filling body 65 irradiated with the laser beam 70 is given vibration by the vibration mechanism 56. For example, the vibration frequency at this time is 30 kHz to 100 kHz, and the amplitude is 5 μm to 30 μm. The filler 65 is moved by this vibration, and the place where the laser beam 70 is irradiated can be changed little by little.

  Specifically, under such vibration conditions, the rotating operation can be performed while moving upward or downward by about 0.1 mm along the vertical direction in FIG. That is, by preventing the laser beam 70 from being focused on one place of the filling body 65, damage caused by the laser light 70 can be dispersed, and the life of the filling body 65 can be extended. it can.

  When processing with the laser beam 70 proceeds, a through hole 75 is formed as shown in FIG. 3C, and thereafter, the valve 77 is closed and the discharge means 49 is stopped. After the hole penetrates, the dust 72 is collected by the low pressure means 64. After the drilling, the dust 72 generated by the irradiation of the laser beam 70 is recovered by the low pressure means 64, and the dust 72 does not stay near the through hole 75.

  In the state (a), the air pressure in the hollow portion of the workpiece formed by the inner peripheral surface 76 is controlled to be lower than the outside of the wall portion 68 of the workpiece. When the through hole 75 is formed as shown in (c), air flows in the hollow portion of the work as indicated by the arrow due to the pressure difference, and the dust 72 is pushed away by the low pressure means along with this flow.

When the valve 77 is switched, the pressure in the irradiation chamber 63 becomes higher than that in the state (a), and the pressure difference between the pressure in the irradiation chamber 63 and the pressure in the hollow portion of the workpiece is further increased, and FIG. The air flow in the hollow portion of the work indicated by the arrow of FIG.
Reattachment of the dust 72 to the vicinity of the through hole 75 can be prevented, and work efficiency can be improved.

  After the through hole 75 is formed, the discharge function of the discharge means 49 is stopped. As a result, the airflow is only the airflow from the gas supply means 45 toward the low pressure means 64. By restricting the airflow for discharging the dust 72 to one, the dust 72 can be efficiently discharged to the outside.

  The size of the filler 65 is 30 μm to 20 mm, the vibration frequency oscillated by the vibration mechanism 56 is 30 kHz to 100 kHz, and the amplitude at the time of oscillation is 5 μm to 30 μm. The size of the filler 65 is 30 μm to 20 mm. With this size, when a fuel injection nozzle is used for the workpiece 66, a suitable space for vibrating the filler in the hollow portion 67 is vacated. In addition, since the filling body 65 can be vibrated well by vibrating under the above-described vibration conditions, the life of the filling body 65 can be extended.

As shown in the comparative example of (d), when the filler is not filled, the laser beam 70 comes into contact with the inner peripheral surface 76 of the workpiece 66 and the portion is removed.
By the way, the clamp mechanism (FIG. 1, code | symbol 11) which clamps a workpiece | work can also be set as the structure demonstrated by the following figure. Details are described in the following figure.

As shown in FIG. 9, butterfly bolts 78 and 78 were used for the clamping mechanism. When the butterfly bolts 78 and 78 are used, the clamp mechanism can be simply configured.
Even when such a clamp mechanism is used, it is possible to obtain the effect of the present invention that it is possible to prevent the laser beam from being irradiated onto the inner peripheral surface by the filler absorbing energy. .

By the way, when the present inventors used the drilling apparatus 10, the following thing was understood. Returning to FIG.
As shown in FIG. 5, when performing a drilling operation, first, compressed gas is sent into the irradiation chamber 63 as indicated by an arrow (5). By sending the compressed gas, the inside of the irradiation chamber 63 becomes a high pressure. When the pressure becomes high, as indicated by the white arrow, a force that floats upward acts on the lid portion 16, and a force that sinks downward acts on the work support portion 13.

  It can be seen that the force indicated by the hollow arrow can bend the lid support body (FIG. 1, reference numeral 33) supporting the lid section 16 and the work rotation table (FIG. 1, reference numeral 27) supporting the work support section 13. It was. If it is bent, the position of the workpiece 66 is shifted, and the position where the hole is opened is also shifted. That is, it has been found that a function that can further prevent the movement of the workpiece 66 is added to the drilling device 10. The measures for preventing the movement of the workpiece will be described in detail with the following figure.

  As shown in FIG. 10, the drilling device 80 is inserted into a bracket 81 supported by the work rotation table 27 of the rotation mechanism (FIG. 1, reference numeral 12) and insertion holes 82 and 82 provided on the upper portion of the bracket 81. Cylinder units 83 and 83 are provided as connecting means supported by being inserted.

  The bracket 81 includes support portions 84 and 84 that are erected on the upper surface of the work rotation table 27, and a beam portion 85 that is spanned between the support portions 84 and 84 and supports the main body 13a of the work support member 13 on the upper surface. A hole 86 for passing the vibration mechanism 56 is provided at the center of the beam 85.

  The cylinder unit 83 is formed on a side opposite to the main body portion 88 inserted into the insertion hole 82, a stopper portion 89 that contacts the support column portion 84 to restrict the movement of the main body portion 88, and the stopper portion 89. And a nut 92 that is screwed into the male screw portion 91 and restricts the movement of the main body portion 88.

  In the cylinder unit 83, the rod 93 is provided along the rotation shaft 28 of the rotating mechanism (FIG. 1, reference numeral 12), and the tip of the rod 93 is provided in the engagement hole 94 of the lid portion 16 in a detachable manner. The forward / backward movement of the rod 93 is controlled by the control unit 22.

  As shown in FIG. 11, the positions where the elevating mechanism 19 and the lid rotating mechanism 18 are provided are changed compared to the drilling device of FIG. 1 in order to secure the arrangement space of the bracket 81. Except for the position where each mechanism is provided, the function of each mechanism is the same as that of the drilling device (FIG. 1, reference numeral 10) shown in FIG.

The support column 84 of the bracket 81 has a trapezoidal shape. By using the trapezoidal shape, the area of the lower part can be widened and the workpiece rotating table 27 is reliably supported. On the other hand, by reducing the area of the upper portion, it is possible to prevent interference with the lid 16 when the lid 16 is moved.
The operation of the cylinder unit 83 as the connecting means will be described in detail with reference to the next drawing.

  As shown in FIG. 12, the cylinder unit 83 (connecting means) engages with the lid 16 before compressed gas is supplied to the irradiation chamber 63 by the gas supply means 45, and discharge means (49 in FIG. 10). Thus, after the compressed gas is discharged from the irradiation chamber 63, the engagement with the lid portion 16 is released.

  Supplying the compressed gas into the irradiation chamber 63 increases the gas pressure in the irradiation chamber 63. The compressed gas acts in the direction of pushing down the work support member 13 and the direction of pushing up the lid 16 as indicated by the white arrow.

  The cylinder unit 83 supported by the work rotation table 27 (rotation mechanism) is engaged with the lid portion 16 by engaging the rod 93 with an engagement hole 94 provided in the lid portion 16. By engaging with the lid part 16, the force to move downward of the work support member 13 is canceled by the force by which the lid part 16 is pushed up. By canceling, the downward movement of the work support member 13 can be prevented, and the movement of the work 66 can also be prevented.

  While the compressed gas is being supplied into the irradiation chamber 63, the workpiece support member 13 is most likely to move. By using the cylinder unit 83 while the pressure in the irradiation chamber 63 is high, the movement of the workpiece support member 13 and the workpiece 66 can be effectively prevented. By preventing the workpiece 66 from moving, it is possible to make a hole at an accurate position.

By using the cylinder unit 83, the bracket 81 and the lid portion 16 can be quickly connected and released.
Further, the bracket 81 includes a beam portion 85 between the two support portions 84 and 84. By providing the beam portion 85, the rigidity of the bracket 81 can be increased, and the movement of the workpiece support member 13 and the workpiece 66 can be prevented more reliably.

  As shown in FIG. 13, pins 96 and 96 were used as connecting means. The operator holds the ring-shaped handle portion 97 and inserts the rod 99 into the engagement hole 94 until the stopper portion 98 comes into contact with the column portion 84. The effect of the present invention can also be obtained by engaging the lid portion 16 with the pins 96 and 96.

  That is, the work supporting member 13 can be fixed to the lid portion 16 by connecting the bracket 81 and the lid portion 16 with the pins 96 and 96 (connection means). By fixing the workpiece support member 13, the workpiece 66 is also fixed, and a hole can be formed at an accurate position.

  In addition, pins 96 and 96 are used as the connecting means. The pins 96 and 96 can be procured at low cost, and the procurement cost of parts can be reduced.

  Although the drilling device according to the present invention is applied to the fuel injection nozzle in the embodiment, it can be applied to other mechanical parts as long as it is a member capable of drilling a thin through hole. It is not something that can be done.

  The drilling device according to the present invention is suitable for drilling a fuel injection nozzle.

  DESCRIPTION OF SYMBOLS 11 ... Base, 12 ... Work rotation mechanism, 13 ... Work support member, 15 ... Opening, 16 ... Cover part, 22 ... Control mechanism, 28 ... Rotating shaft, 45 ... Gas supply means, 48 ... Tip part, 49 ... Discharge Means 56: Vibration mechanism 63 ... Irradiation chamber 64 ... Low pressure means 65 ... Filling body 66 ... Workpiece 67 ... Hollow part 68 ... Wall part 70 ... Laser light 71 ... Irradiated part 72 ... Dust , 75 ... through holes, 80 ... drilling device, 81 ... bracket, 83 ... cylinder unit (connecting means), 96 ... pins (connecting means).

Claims (7)

A drilling device that forms a through hole in the wall portion of the workpiece by irradiating a laser beam toward the hollow portion from the outside of the hollow workpiece,
This drilling device
A workpiece rotation mechanism that is supported by a base and rotates the workpiece;
A workpiece support member supported by the workpiece rotation mechanism, supporting the workpiece on the rotation axis of the workpiece rotation mechanism, and having an opening on the upper surface;
A lid that is provided so as to be movable up and down with respect to the workpiece support member, and covers the opening of the workpiece support member;
An irradiation chamber that introduces the laser light toward the irradiated portion of the work that is irradiated with the laser light, in the region where the lid is covered with the opening,
Gas supply means connected to the irradiation chamber for supplying compressed gas into the irradiation chamber;
A discharge means for discharging a gas in the irradiation chamber to the outside of the irradiation chamber, including a dust generated by irradiation of the laser beam with a tip portion extended into the irradiation chamber;
A bracket extending from the work rotation mechanism through the outside of the work support member;
A drilling device comprising a connecting means for detachably connecting the upper portion of the bracket and the lid portion.   The connecting means engages with the lid before the compressed gas is supplied to the irradiation chamber by the gas supply means, and the lid after the compressed gas is discharged from the irradiation chamber by the discharge means. 2. The drilling device according to claim 1, wherein the drilling device is a cylinder unit that disengages from the cylinder unit.   The connecting means engages with the lid before the compressed gas is supplied to the irradiation chamber by the gas supply means, and the lid after the compressed gas is discharged from the irradiation chamber by the discharge means. 2. The drilling device according to claim 1, wherein the pin is a pin for releasing engagement with the pin. The workpiece is filled in the hollow portion with a filler that is not melted by the laser beam,
The drilling device according to claim 1, wherein a vibration mechanism for vibrating the filler is disposed so as to come into contact with the filler. The drilling device according to claim 1 or 4, wherein
This drilling device comprises a control mechanism for controlling the vibration mechanism, the gas supply means and the discharge means,
This control mechanism controls the air pressure in the irradiation chamber to be higher than the air pressure in the hollow portion and lower than the atmospheric pressure until the through hole is formed. The drilling device according to claim 5,
The control mechanism stops the discharge function of the discharge means after the through hole is formed. A drilling device according to claim 4, claim 5 or claim 6,
The size of the said filling body is 30 micrometers-20 mm, The vibration frequency which the said vibration mechanism oscillates is 30 kHz-100 kHz, The amplitude in the case of the said oscillation is 5 micrometers-30 micrometers, The drilling apparatus characterized by the above-mentioned.

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