JP2011232610A5

JP2011232610A5 -

Info

Publication number: JP2011232610A5
Application number: JP2010103612A
Authority: JP
Filing date: 2010-04-28
Publication date: 2013-05-23
Anticipated expiration: 2030-04-28

Description

本発明の反射屈折光学系は、物体からの光束を集光して該物体の中間像を形成する反射屈折部と、前記中間像が形成される位置に配置されたフィールドレンズと、前記中間像を像面に結像する屈折部と、を有する反射屈折光学系であって、前記反射屈折部は物体側から順に、物体側の面が凸形状の反射面であり、光軸付近が正の屈折力の透過部である第１の光学素子と、物体側に凹面を向けたメニスカス形状であり、像側の面が反射面であり、光軸付近が負の屈折力の透過部である第２の光学素子と、を有し、前記第１の光学素子と前記第２の光学素子とは互いに前記反射面が対向するように配置されており、前記物体からの光束は、前記第１の光学素子の透過部、前記第２の光学素子の反射面、前記第１の光学素子の反射面、前記第２の光学素子の透過部、を順に介して、前記フィールドレンズ側へ出射しており、前記屈折部は複数の屈折光学素子を有し、前記第１及び第２の光学素子の材料のアッベ数のうち最も小さなアッベ数をνcat、前記複数の屈折光学素子の材料のアッベ数のうち最も小さなアッベ数をνdio、とするとき、
νdio＜νcat
なる条件を満足することを特徴としている。 Catadioptric system of the present invention comprises a catadioptric portion forming an intermediate image of the object with a light beam focused from the object, a field lens, wherein the intermediate image is placed in position to be formed, the intermediate image the a catadioptric optical system having a refraction section, the forming an image on an image plane, the catadioptric unit includes, in order from the object side, the object-side surface of a reflection surface of a convex shape, the vicinity of the optical axis is positive A first optical element that is a refractive power transmitting portion, a meniscus shape with a concave surface facing the object side, an image side surface is a reflecting surface, and a portion near the optical axis is a negative refractive power transmitting portion . It includes a second optical element, and said and said second optical element and the first optical element is disposed so that the reflecting surfaces mutually opposed, the light beam from the object is, the first transmitting portion of the optical element, the reflective surface of the second optical element, reflecting surfaces of the first optical element, the second light Transmission of the device, through successively a, and emitted to the field lens, the refracting unit includes a plurality of refractive optical elements, most of the Abbe number of the material of the first and second optical elements νcat small Abbe number, the plurality of refractive νdio the smallest Abbe number among the Abbe number of the material of the optical element, to time,
νdio <νcat
It is characterized by satisfying the following conditions.

本発明によれば、可視光全域に渡って諸収差を良好に補正した広い観察領域に渡って高い解像力を持つ反射屈折光学系及びそれを有する撮像装置が得られる。 According to the present invention, the imaging device is obtained having lifting one catadioptric system and it high resolution over a wide observation area favorably correcting aberrations over the entire visible light range.

Claims

A catadioptric portion forming an intermediate image of the object by focusing the light beam from the object, said a arranged a field lens to a position where the intermediate image is formed, the refractive portion for imaging the intermediate image on an image plane A catadioptric optical system comprising:
In order from the object side, the catadioptric unit has a convex reflecting surface on the object side , a first optical element having a positive refractive power transmitting portion near the optical axis, and a concave surface facing the object side . a meniscus shape, the image side surface is a reflective surface, and a second optical element near the optical axis is a transmission unit of negative refractive power, a,
The first of said reflecting surfaces to each other and the optical element and the second optical element is disposed so as to face,
The light beam from the object is, the transmissive portion of the first optical element, the reflective surface of the second optical element, reflecting surfaces of the first optical element, transmitting portion of said second optical element, sequentially through the Te, and emitted to the field lens,
The refractive portion comprises a plurality of refractive optical elements, said first and second νcat the smallest Abbe number among the Abbe number of the material of the optical element, most of the Abbe number of the material of the plurality of refractive optical elements When the small Abbe number is νdio,
νdio <νcat
A catadioptric optical system characterized by satisfying the following conditions:

The Abbe number νcat is 45 <νcat
The catadioptric optical system according to claim 1 , wherein the following condition is satisfied.

The Abbe number νdio is νdio <40
Catadioptric optical system according to claim 1 or 2, characterized by satisfying the following condition.

In the second optical element , the radius of curvature of the object side surface is RM2a, the radius of curvature of the image side surface is RM2b, the thickness on the optical axis is t, the refractive index of the material at a wavelength of 587.6 nm is Nd , age,

When
Rapl × 0.8 <| RM2a | <Rapl × 1.2
The catadioptric optical system according to any one of claims 1 to 3, wherein the following condition is satisfied.

When is L, the distance to the image plane distance along the optical axis between the reflection surface d, from the position where the object is located in the second optical element from the reflecting surface of the first optical element,
L / d <4.5
Catadioptric optical system according to any one of claims 1 to 4, characterized by satisfying the following condition.

Light source and an illumination optical system for illuminating the object by the light beam from the light source, a catadioptric optical system according to any one of claims 1 to 5 to form an image of said object, said catadioptric optical system imaging device comprising an image sensor for photoelectrically converting an image of more formed the object, an image processing system for generating image information from data from the image sensor, to have to.