JP2011214627A - Valve structure and method for manufacturing the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a valve structure preventing impairment of a valve function caused by the minute warpage of a valve element, and a method for manufacturing the valve structure.SOLUTION: This piezoelectric valve structure 1 includes a valve chamber top plate 2, an upper wall surface plate 3, a valve element plate 5, a lower wall surface plate 6, and a valve chamber bottom plate 7. The valve chamber top plate 2 composes the top surface of a valve chamber, and is formed with a flow passage port 16. The upper wall surface plate 3 and lower wall surface plate 6 compose valve chamber wall surfaces disposed upright from the top surface of the valve chamber. The valve element plate 5 is provided with a beam-like portion 11, and the beam-like portion 11 is supported by the upper wall surface plate 3 and lower wall surface plate 6. The valve element plate 5 closes the flow passage port 16 through a valve seat 4 when deformation force is not applied, and opens the flow passage port 16 when the deformation force is applied. Force in a direction where the beam-like portion 11 of the valve element plate 5 is deflected on the side of the top surface of the valve chamber is applied to the valve element plate 5 by the upper wall surface plate 3 and lower wall surface plate 6.

Description

  The present invention relates to a valve structure such as a check valve and a piezoelectric valve, and a method for manufacturing the valve structure.

  In a small electronic device such as a notebook personal computer, a fuel cell or a water cooling device that requires fluid control may be provided. With such an apparatus, a valve structure is provided in a part of the flow path (see, for example, Patent Document 1).

  FIG. 1 is a diagram illustrating a configuration example of a conventional valve structure. The piezoelectric valve structure 101 includes a valve body 102, a valve chamber 103, and a valve seat 104. The valve body 102 is configured to be able to bend and deform using a piezoelectric body. In the valve chamber 103, an introduction channel 105 and a discharge channel 106 are formed. The valve seat 104 has an opening communicating with the introduction flow path 105. In a flat state, the valve body 102 abuts on the valve seat 104 to close the introduction flow path 105, and in a state where the drive voltage is applied and deformed, the valve body 102 is separated from the valve seat 104 and opens the introduction flow path 105. As described above, a structure that blocks the flow path in a state where a driving voltage is not applied to the valve body is also referred to as normally closed.

  In the above structure, the piezoelectric valve structure 101 also functions as a check valve. If the forward fluid pressure from the introduction flow path 104 to the discharge flow path 105 is more than a certain level, the valve body 102 is bent and the introduction flow path 104 is opened. On the other hand, if the forward fluid pressure from the introduction flow path 104 to the discharge flow path 105 is less than a certain level or the reverse fluid pressure is applied, the valve body 102 closes the introduction flow path 104.

JP-A-62-285585

  In an apparatus having a normally closed piezoelectric valve structure as described above, if the valve structure is to be miniaturized, the valve function may be impaired due to temporal deformation of the constituent members. For example, there is a problem that a slight warp occurs in the valve body and a slight gap is formed in the valve structure even in a normally closed state.

  Then, an object of this invention is to provide the valve structure which prevented the valve function being impaired by the micro curvature of a valve body, and the manufacturing method of a valve structure.

The valve structure of the present invention includes a valve chamber top surface portion, a valve chamber bottom surface portion, a valve chamber upper wall portion, a valve chamber lower wall portion, a valve seat, and a valve body. The valve chamber top surface portion constitutes the top surface of the valve chamber, and at least one flow path opening is formed. The valve chamber bottom portion constitutes the bottom surface of the valve chamber. The upper wall portion of the valve chamber constitutes the wall surface of the valve chamber and is joined to the top surface portion of the valve chamber. The valve chamber lower wall portion constitutes the wall surface of the valve chamber and is joined to the valve chamber bottom surface portion. A valve body is provided with the valve body both ends supported by the valve chamber upper wall part and the valve chamber lower wall part, and the valve body center part between valve body both ends. The valve seat is located between the flow path port and the central part of the valve body. The valve body closes the flow path port via the valve seat when the deformation force is not applied, and opens the flow path port when the deformation force is applied. Such a valve structure is characterized in that a pressure structure is provided on the lower wall portion of the valve chamber. The pressurizing structure is a structure in which a force in a direction in which the central part of the valve body bends to the top surface side of the valve chamber is applied to both end parts of the valve body.
By applying a force from the valve body lower wall portion to both ends of the valve body in this way, in a state where the deformation force acting on the valve body from the fluid or piezoelectric body and the force acting on the valve body from the valve seat are unloaded The central part of the valve body is bent at a position closer to the top surface of the valve chamber than both end parts of the valve body. Then, compared with the case where a valve body wall part supports a valve body, without applying such a force, between a valve body center part and a valve chamber top surface part can be pressurized. Thereby, it can prevent that a clearance gap produces between a valve body and a valve seat by a time-dependent change.

  In the valve chamber lower wall portion of the present invention, the inner region in the vicinity of the valve chamber is located closer to the top surface side of the valve chamber than the outer region on the joint surface with the valve body. By comprising in this way, the force which a valve body center part bends to the top | upper surface side of a valve chamber rather than a valve body both ends can be made to act on a valve body from a valve chamber wall part. The valve chamber lower wall portion may include a wall surface expansion portion that protrudes into the valve chamber from the valve chamber upper wall portion and joins the valve body. Further, the joint surface with the valve body may be inclined with respect to the top surface of the valve chamber.

  The valve structure manufacturing method of the present invention includes an upper wall joining step of laminating and joining a valve chamber top surface portion and a valve chamber upper wall portion to the valve body, and a valve chamber lower wall portion and a valve chamber bottom surface portion on the valve body. It is preferable to perform a lower wall joining step of laminating and joining, and in the lower wall joining step, heat joining while pressurizing a region overlapping the valve chamber upper wall portion in the joint surface between the valve body and the valve chamber lower wall portion. According to such a method, the above-described configuration can be obtained without adding a special process from the conventional manufacturing method.

  According to the present invention, a force that the central part of the valve body bends on the top surface side of the valve chamber from the both end parts of the valve body is applied to the valve body from the valve body wall part, so that the central part of the valve body becomes flat. Compared to the case where the valve body is supported by the valve chamber wall, the space between the valve body central portion and the valve chamber top surface portion can be greatly pressurized via the valve seat. Thereby, it can prevent that a clearance gap produces between a valve body and a valve seat by a time-dependent change.

It is a figure explaining the structural example of the conventional piezoelectric valve structure. It is a disassembled perspective view explaining the structural example of the valve structure which concerns on the 1st Embodiment of this invention. It is a cross-sectional schematic diagram explaining operation | movement of the valve structure of FIG. It is a cross-sectional schematic diagram explaining the force concerning the valve body of the valve structure of FIG. It is a figure explaining the manufacturing method of the valve structure of FIG. It is a figure explaining the other manufacturing method of the valve structure of FIG. It is a cross-sectional schematic diagram explaining the valve structure which concerns on the 2nd Embodiment of this invention. It is a cross-sectional schematic diagram explaining the valve structure which concerns on the 3rd Embodiment of this invention.

<< First Embodiment >>
Hereinafter, the valve structure according to the first embodiment of the present invention will be described using a piezoelectric valve structure as an example. Here, a valve body that is bent and deformed by driving a piezoelectric body is used, but a simple check valve structure may be used without using a piezoelectric body. As the fluid, any of gas, liquid, gas-liquid mixed flow, solid-liquid mixed flow, solid-gas mixed flow, and the like may be used.

FIG. 2 is an exploded perspective view of the piezoelectric valve structure 1 according to the first embodiment.
The piezoelectric valve structure 1 includes a valve chamber top plate 2, a valve chamber upper wall plate 3, a valve seat 4, a valve body plate 5, a valve chamber lower wall plate 6, and a valve chamber as shown in an exploded perspective view in FIG. A bottom plate 7 is provided, which are sequentially laminated and joined from the top side to the bottom side.

  The valve body plate 5 has a substantially rectangular outer shape when viewed from the top, and is formed with two grooves parallel to the longitudinal direction. The inside of the groove is a side valve chamber 13 constituting a part of the valve chamber of the present invention. A portion sandwiched between the grooves is a beam-like portion 11 constituting a part of the valve body of the present invention. The frame-shaped part surrounding the beam-shaped part 11 is the frame-shaped part 12, and the part of the frame-shaped part 12 on the extension from the beam-shaped part 11 also constitutes a part of the valve body of the present invention. The portion of the valve body that does not contact the valve chamber upper wall plate 3 or the valve chamber lower wall plate 6 is the central portion of the valve body of the present invention, and the contact portions are both end portions of the valve body of the present invention.

  The valve chamber upper wall plate 3 is a frame body having a substantially rectangular outer shape and a rectangular inner shape when viewed from the top, and the shape of the frame portion 12 of the valve plate 5 coincides with the shape of the top surface, and the valve chamber of the present invention. Configure the upper wall. The inner side of the frame is an upper valve chamber 14 constituting a part of the valve chamber of the present invention.

  The valve chamber lower wall plate 6 is a frame body having a generally rectangular outer shape and a rectangular inner shape when viewed from the top, and constitutes the valve chamber lower wall portion of the present invention. The inner side of the frame is a lower valve chamber 15 constituting a part of the valve chamber of the present invention. Although the valve chamber lower wall plate 6 will be described in detail later, it is a characteristic configuration of the present embodiment, and the outer shape in the top view matches the frame-shaped portion 12 and the valve chamber upper wall plate 3, but the inner shape is the same. Unlikely, both ends of the lower valve chamber 15 in the longitudinal direction are located inside of both ends of the upper valve chamber 14 in the longitudinal direction.

  The valve seat 4 has an annular shape, and includes a large-diameter portion that is accommodated in the upper valve chamber 14 and a small-diameter portion that is fitted into the flow path port 16 with a gap. The height of the valve seat 4 is designed to be higher than the height of the upper valve chamber when the beam-like portion 11 is displaced maximum.

  The valve chamber top plate 2 is substantially rectangular when viewed from the top, and constitutes the valve chamber top surface portion of the present invention. Screw holes for external fixation are formed in the four corners of the valve chamber top plate 2. In addition, a flow path port 16 for fluid inflow (or fluid outflow) is formed in the center. Further, a flow passage port 17 for fluid outflow (or fluid inflow) is formed at a position that faces the aforementioned side valve chamber 13 and becomes a corner portion of the valve chamber. The valve chamber bottom plate 7 is substantially rectangular when viewed from the top, and constitutes the bottom surface of the valve chamber.

  Further, the valve body plate 5 includes an upper surface plate 5A, a piezoelectric body 5B, a side plate 5C, a lower surface plate 5D, and a connector portion 5E, as shown in an exploded perspective view in FIG. 2B. The upper surface plate 5A, the side plate 5C, and the lower surface plate 5D is laminated in order from the top surface side to the bottom surface side. The piezoelectric body 5B is rectangular when viewed from the top, and the side plate 5C is U-shaped with a notch when viewed from the top, and the piezoelectric body 5B is housed in the notch of the side plate 5C. One end of the piezoelectric body 5B protrudes from the notch, and a connector portion 5E is provided there. Electrodes are provided on both surfaces of the piezoelectric body 5B and are electrically connected to the connector portion 5E. The surface of the piezoelectric body 5B is coated with a coating material, thereby imparting water repellency. By applying a driving voltage to the piezoelectric body 5B via the connector portion 5E, the valve body plate 5 is bent convexly toward the bottom surface side.

  Further, the valve chamber bottom plate 7 includes a top plate 7A, an intermediate plate 7B, and a connector fixing plate 7C, as shown in an exploded perspective view of FIG. . The connector fixing plate 7C is provided with a screw hole for fixing the connector portion 5E.

Next, the operation by changing the application state of the drive voltage to the piezoelectric valve device 1 will be described. FIG. 3 is a schematic view of a cross section parallel to the longitudinal direction in the piezoelectric valve structure 1. Here, the flow path port 16 will be described as inflow, and the flow path port 17 will be described as outflow.
When the drive voltage is not applied, the beam-like portion 11 is substantially flat as shown in FIG. 3A, the central portion contacts the valve seat 4, and the flow passage port 16 is closed. When the drive voltage is applied, as shown in FIG. 3B, the beam-like portion 11 bends to the opposite side to the top surface of the valve chamber, and the central portion is separated from the valve seat 4 to open the flow path port 16. Therefore, when the drive voltage is applied, fluid flows between the flow path port 16 and the flow path port 17 regardless of forward flow or reverse flow. On the other hand, when the drive voltage is not applied, the reverse flow from the flow path port 17 to the flow path port 16 and the forward flow from the flow path port 16 to the flow path port 17 below a predetermined fluid pressure are blocked. If the forward flow from the flow path port 16 to the flow path port 17 is equal to or higher than a predetermined fluid pressure, the beam-like portion 11 is bent by the fluid pressure, and the forward flow flows at that time. The threshold value of the forward fluid pressure is mainly determined by the rigidity of the beam-like portion 11.

  Next, the structure of the lower wall surface plate 6 and the force acting on the beam-shaped portion 11 from the lower wall surface plate 6 will be described. FIG. 4 is a schematic diagram of a state in which a force is applied only to the valve body plate 5 from the upper wall surface plate 3 and the lower wall surface plate 6 when no driving voltage is applied in a state where the valve seat 4 is removed.

  As described above, the lower wall plate 6 has a shape in which both ends in the longitudinal direction of the lower valve chamber 15 are positioned on the inner side than both ends in the longitudinal direction of the upper valve chamber 14. Here, a portion of the lower wall surface plate 6 that protrudes further toward the valve chamber than the upper wall surface plate 3 is referred to as a wall surface expansion portion 8 for convenience. The wall surface extension portion 8 (inner region) is joined to the beam-like portion 11, and the region (outer region) excluding the wall surface extension portion 8 is joined to the frame-like portion 12. The end portion 9 on the valve chamber top surface side in the wall surface expansion portion 8 protrudes toward the top surface side of the valve chamber from the outer region joined to the frame-shaped portion 12. With this configuration, both end portions of the beam-shaped portion 11 that contacts the wall surface expansion portion 8 are pressurized from the end portion 9 to the top surface side of the valve chamber. Since both end portions of the beam-shaped portion 11 are fixed to the frame-shaped portion 12, the beam-shaped portion 11 is bent convexly toward the top surface by the pressure from the end portion 9, and the central portion is directed to the top surface side of the valve chamber. Will be located.

  When the valve seat 4 as shown in FIG. 3 (A) is applied to this configuration, the valve seat 4 is pressurized in the compression direction between the beam-shaped portion 11 and the valve chamber top plate 2. 4 and the valve chamber top plate 2 can be reduced in distance. Therefore, even if the structural member is deformed or deteriorates with time due to repeated use of the valve structure, the valve can be kept closed.

  FIG. 5 is a diagram for explaining a method of manufacturing the piezoelectric valve structure 1.

  In the manufacturing flow of the piezoelectric valve structure 1, the laminated valve body plate 5 and the valve chamber bottom plate 7 are formed in advance. Then, the valve chamber top plate 2 is held by the holding glass 51 in a state where the valve body plate 5, the upper wall surface plate 3, and the valve chamber top plate 2 are stacked in this order on the arrangement stage 52. A coding film is formed on the upper and lower surfaces of the upper wall surface plate 3 with a material that absorbs laser light, and the upper wall surface plate 3 is irradiated with the laser light 53 through the holding glass 51. Thus, the coding material is heated to weld the valve body plate 5, the upper wall surface plate 3, and the valve chamber top plate 2 to form a joined body (S11). This process is the upper wall joining process of the present invention.

  Next, the holding glass 51 is removed, and the joined body is turned over so that the order of the valve body plate 5, the upper wall surface plate 3, and the valve chamber top plate 2 is reversed, and the lower wall surface plate 6 is placed on the valve body plate 5. The valve chamber bottom plate 7 is stacked in this order (S12).

  Next, the valve chamber bottom plate 7 is pressed down with the holding glass 51. A coating film is formed on the upper and lower surfaces of the lower wall surface plate 6 with a material that absorbs laser light, and the lower wall surface plate 6 is irradiated with the laser light 53 through the holding glass 51 to thereby perform local heating and local heating. In a pressed state, the coding material is heated to weld the valve body plate 5, the lower wall surface plate 6, and the valve chamber bottom plate 7 to form a joined body (S13). This process is the lower wall joining process of the present invention.

According to this manufacturing method, since the planar area of the upper wall surface plate 3 is smaller than the planar area of the lower wall surface plate 6, there is no member that partially supports the lower wall surface plate 6 when the lower wall surface plate 6 is heated and welded. For this reason, the lower wall surface plate 6 is deformed to the valve body plate 5 side by heat. As a result, as shown in FIG. 4 described above, the shape of the end portion 9 on the top surface side of the valve chamber in the wall surface expansion portion 8 protrudes toward the top surface side of the valve chamber from the other regions in the lower wall surface plate 6. It becomes.
With such a manufacturing method, the configuration of the piezoelectric valve structure 1 of the present embodiment can be manufactured without adding a special process.

  FIG. 6 is a diagram for explaining an example of another manufacturing method of the piezoelectric valve structure 1.

  In the manufacturing flow of the piezoelectric valve structure 1, the laminated valve body plate 5 and the valve chamber bottom plate 7 are formed in advance. And in the state where the valve plate 5, the lower wall plate 6, and the valve chamber bottom plate 7 are stacked in this order on the arrangement stage 55 including the pressurizing unit 55 </ b> A whose top surface shape matches the frame shape portion of the upper wall plate 3. The valve chamber bottom plate 7 is held by the holding glass 51. On the upper and lower surfaces of the lower wall surface plate 6, a coding film is formed with a material that absorbs laser light, and the lower wall surface plate 6 is irradiated with the laser light 53 through the holding glass 51. As a result, the coding material is heated in a state of being locally heated and locally pressurized, and the valve body plate 5, the lower wall surface plate 6 and the valve chamber bottom plate 7 are welded to form a joined body (S21). This process is the lower wall joining process of the present invention.

  According to this process, since the planar area of the pressurizing portion 55A of the arrangement stage 55 is smaller than the planar area of the lower wall surface plate 6, there is a member that partially supports the lower wall surface plate 6 when the lower wall surface plate 6 is heated and welded. Therefore, the lower wall surface portion 6 is deformed to the valve body plate 5 side by heat. As a result, the end portion 9 on the top surface side of the valve chamber in the wall surface expansion portion 8 has a shape protruding toward the top surface side of the valve chamber from other regions in the lower wall surface plate 6.

  Next, the holding glass 51 is removed, and the joined body is turned over so that the order of the valve plate 5, the lower wall plate 6, and the valve chamber bottom plate 7 is reversed, and the upper wall plate 3, the valve is placed on the valve plate 5. It is set as the state piled up in order of the room top plate 2 (S22).

Next, the valve chamber top plate 2 is pressed down with the holding glass 51. A coding film is formed on the upper and lower surfaces of the upper wall surface plate 3 with a material that absorbs laser light, and the upper wall surface plate 3 is irradiated with the laser light 53 through the holding glass 51 to thereby perform local heating and local heating. In a pressed state, the coding material is heated to weld the valve body plate 5, the upper wall surface plate 3, and the valve chamber top plate 2 to form a joined body (S23). This process is the upper wall joining process of the present invention.
By such a manufacturing method, the configuration of the piezoelectric valve structure 1 of the present embodiment can be manufactured by merely preparing the stage 55 provided with the pressurizing unit 55A without adding a special process.

<< Second Embodiment >>
Next, a piezoelectric valve structure according to the second embodiment will be described. FIG. 7A is a schematic cross-sectional view when the drive voltage is not applied in a state where the valve seat 7 is provided. FIG. 7B is a schematic cross-sectional view when the drive voltage is not applied, with the valve seat 4 removed.

  The lower wall surface plate 26 of the present embodiment has a top view shape that matches the upper wall surface plate 23 and the frame-shaped portion 12 of the valve body plate 5. On the other hand, the cross-sectional shapes of the lower wall surface plate 26 and the upper wall surface plate 23 are different from those of the first embodiment described above, and the joint surfaces with both the valve body plates 5 are inclined, so The inner region near the valve chamber is located on the top side of the valve chamber as compared to the region. Even in such a configuration, in the no-load state shown in FIG. 7B, the central portion of the beam-shaped portion 11 is located closer to the top surface side of the valve chamber than the both end portions and bends to the top surface side. It will be. Accordingly, when the valve seat 4 as shown in FIG. 7A is applied, the valve seat 4 is pressurized in the compression direction between the beam-shaped portion 11 and the valve chamber top plate 2. The distance at the boundary between the seat 4 and the valve chamber top plate 2 can be reduced. Therefore, even if the structural member is deformed or deteriorates with time due to repeated use of the valve structure, the valve can be kept closed.

<< Third Embodiment >>
Next, a piezoelectric valve structure according to the third embodiment will be described. FIG. 8A is a schematic cross-sectional view when the drive voltage is not applied in a state where the valve seat 4 is provided. FIG. 8B is a schematic cross-sectional view when the drive voltage is not applied, with the valve seat 4 removed.

  The lower wall surface plate 36 of the present embodiment has a shape in which the wall surface expanding portions 8 are provided such that both ends in the longitudinal direction of the lower valve chamber 15 are located inside the both ends in the longitudinal direction of the upper valve chamber 14. Moreover, the cross-sectional shape of the lower wall surface plate 36 and the upper wall surface plate 23 is a structure where the joint surface with the valve body plate 5 inclines like the above-mentioned 2nd Embodiment. In addition, the joint surface with the valve body board 5 of the wall surface expansion site | part 8 is a shape which protrudes sharply compared with an outer side area | region. Even in such a configuration, the inner region in the vicinity of the valve chamber is located on the top surface side of the valve chamber as compared with the outer region in the joint surface between the upper wall plate 23 and the lower wall plate 36 with the valve body plate 5. In the no-load state shown in B), the central portion of the beam-like portion 11 is located closer to the top surface side of the valve chamber than the both end portions and bends to the top surface side.

  Thus, in the state of FIG. 8A in which the valve seat 4 is provided, the central portion of the beam-shaped portion 11 is in contact with the valve seat 4 so that the force acting from the valve seat 4 is balanced with the beam elasticity. The part 11 is deformed. For this reason, the beam-shaped part 11 will be planarized from the state at the time of no load shown to FIG. 8 (B). Further, the valve seat 4 is pressurized in the compression direction between the beam-shaped portion 11 and the valve chamber top plate 2, and a boundary portion between the valve seat 4 and the valve chamber top plate 2, or the valve seat 4 and the beam-shaped portion 11. It becomes difficult to make a gap at the boundary part.

  As shown in each of the above embodiments, the present invention provides a clearance between the normally-closed valve structure by supporting the valve body by applying a force in the direction in which the valve body bends on the top surface side of the valve chamber. Can be prevented.

DESCRIPTION OF SYMBOLS 1, 21, 31 ... Piezoelectric valve structure 2 ... Valve chamber top plate 3,23 ... Valve chamber upper wall plate 4 ... Valve seat 5 ... Valve body plate 5A ... Upper surface plate 5B ... Piezoelectric material 5C ... Side plate 5D ... Lower surface plate 5E ... Connector portion 6, 26, 36 ... Valve chamber lower wall plate 7 ... Valve chamber bottom plate 7A ... Top plate 7B ... Intermediate plate 7C ... Connector fixing plate 11 ... Beam-shaped portion 12 ... Frame-shaped portion 13 ... Side valve chamber 14 ... Upper Valve chamber 15 ... Lower valve chamber 16, 17 ... Flow path port

Claims (6)

Constituting the top surface of the valve chamber, and at least one flow passage port is formed;
A valve chamber bottom surface portion constituting the bottom surface of the valve chamber;
Constituting the wall surface of the valve chamber, and an upper wall portion of the valve chamber joined to the top surface of the valve chamber;
Constituting the wall surface of the valve chamber, and a valve chamber lower wall portion joined to the bottom surface portion of the valve body;
A valve body having both ends of the valve body supported by the valve chamber upper wall part and the valve chamber lower wall part, and a valve body central part between the valve body both ends,
A valve seat located between the flow passage opening and the central part of the valve body,
A valve structure in which the valve body closes the flow path port via the valve seat when the deformation force does not act on the valve body, and the valve body opens the flow path port when the deformation force acts on the valve body Because
The valve structure according to claim 1, wherein a pressure structure for applying a force in a direction in which the central part of the valve body is deflected to both ends of the valve body is provided on the top surface side of the valve chamber.   2. The valve structure according to claim 1, wherein an inner region in the vicinity of the valve chamber is located closer to a top surface side of the valve chamber than an outer region in a joint surface with the valve body.   The valve structure according to claim 2, wherein the valve chamber lower wall portion includes a wall surface expansion portion that protrudes into the valve chamber from the valve chamber upper wall portion and joins the valve body.   The valve structure according to claim 2 or 3, wherein the valve chamber lower wall portion has a joint surface with the valve body that is inclined with respect to a top surface of the valve chamber. It is a manufacturing method of the valve structure according to claim 3,
An upper wall joining step of sequentially laminating and joining the valve chamber top surface portion, the valve chamber upper wall portion, and the valve body, and
The valve chamber lower wall portion and the valve chamber bottom surface portion are sequentially laminated on the valve body of the joined body obtained in the upper wall joining step, and the lower wall joining step of joining is sequentially performed.
In the lower wall joining step, a method for manufacturing a valve structure, in which the joint surface between the valve body and the valve chamber lower wall portion is heated and joined while being pressurized. It is a manufacturing method of the valve structure according to claim 3,
A lower wall joining step of sequentially laminating and joining the valve chamber bottom surface portion, the valve chamber lower wall portion, and the valve body, and
The valve chamber upper wall portion and the valve chamber top surface portion are sequentially laminated on the valve body of the joined body obtained in the upper wall joining step, and the upper wall joining step for joining is sequentially performed.
In the lower wall joining step, a valve that is joined by heating using a pressurizing jig that locally pressurizes a region of the joint surface between the valve body and the valve chamber lower wall portion that overlaps the valve chamber upper wall portion. Structure manufacturing method.

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