JP2011211233A5 - - Google Patents
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- JP2011211233A5 JP2011211233A5 JP2011140045A JP2011140045A JP2011211233A5 JP 2011211233 A5 JP2011211233 A5 JP 2011211233A5 JP 2011140045 A JP2011140045 A JP 2011140045A JP 2011140045 A JP2011140045 A JP 2011140045A JP 2011211233 A5 JP2011211233 A5 JP 2011211233A5
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- laser
- gas pressure
- cross
- flow fan
- rotational speed
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Description
上記問題点を解決するために、請求項１に係る発明は、レーザガスを封入するレーザチャンバと、該レーザチャンバ内に配置されレーザ光の発振を可能とする放電を得るための一対の主放電電極と、前記一対の主放電電極間にレーザガス流を作り出す貫流ファンと、該貫流ファンに対して回転動力を与えるモータと、からなる放電励起エキシマレーザ装置において、該モータの回転数とトルクの積により定義される出力は、該モータの出力限界内であり、かつ、該レーザチャンバ内のレーザガス圧力に応じて該貫流ファンの回転数を変化させることを特徴とする。
In order to solve the above-described problems, the invention according to claim 1 includes a laser chamber in which a laser gas is enclosed, and a pair of main discharge electrodes for obtaining a discharge that is disposed in the laser chamber and that can oscillate laser light. When the cross-flow fan to create a laser gas flow between the pair of main discharge electrodes, a motor for providing rotational power with respect to the through-flow fan, the discharge-pumped excimer laser device comprising a by product of the rotational speed and the torque of the motor The defined output is within the output limit of the motor, and the number of revolutions of the cross-flow fan is changed according to the laser gas pressure in the laser chamber.
また、請求項２に係る発明は、請求項１に記載の放電励起エキシマレーザ装置において、レーザガス圧力が高いほど、貫流ファンの回転数を低下させることを特徴とする。
According to a second aspect of the present invention, in the discharge-excited excimer laser device according to the first aspect, the higher the laser gas pressure, the lower the rotational speed of the cross-flow fan.
以上のような設定を行うために、本発明の放電励起エキシマレーザ装置では、レーザチャンバ１０１内のガス圧力センサ１２１によってレーザガス圧を検出する。そして、ガス圧力センサ１２１から出力されるレーザガス圧力検出信号はコントローラー１３０に入力される。コントローラー１３０は、入力されたレーザガス圧力検出信号によって、レーザチャンバ１０１内のガス圧力を判別し、これに応じて、モータ１１２を所定の回転数で回転させるための駆動用交流電圧をインバータ１３１に発生させる速度指令信号を発信する。すなわち、図４（Ｂ）の例においては、（ガス圧力Ｐ0）と（ガス圧力Ｐ1）との間のガス圧力が検出されると、コントローラー１３０かからは、モータ１１２を回転数Ｒa［ｒｐｍ］から、回転数Ｒ3［ｒｐｍ］とするような速度指令信号がインバータ１３１に入力される。
In order to perform the setting as described above, in the discharge excitation excimer laser device of the present invention, the laser gas pressure is detected by the gas pressure sensor 121 in the laser chamber 101. The laser gas pressure detection signal output from the gas pressure sensor 121 is input to the controller 130. The controller 130 discriminates the gas pressure in the laser chamber 101 based on the input laser gas pressure detection signal, and generates an AC voltage for driving in the inverter 131 for rotating the motor 112 at a predetermined rotational speed accordingly. A speed command signal to be transmitted is transmitted. That is, in the example of FIG. 4 (B), the gas pressure between the (gas pressure P 0) and (gas pressure P 1) is detected, from either the controller 130, rotational speed R a motor 112 From [rpm], a speed command signal such as the rotational speed R 3 [rpm] is input to the inverter 131.
また、図４（Ｃ）の例においては、（ガス圧力Ｐ0）から（ガス圧力Ｐ3）までの変化が検出されるに応じて、コントローラー１３０からは、モータ１１２を回転数Ｒa［ｒｐｍ］から、回転数Ｒ3［ｒｐｍ］まで漸減するような速度指令信号がインバータ１３１に入力される。
Further, in the example of FIG. 4 (C), the according to the change from (the gas pressure P 0) to (gas pressure P 3) is detected, the controller 130, rotational speed R a [rpm motor 112 ], A speed command signal that gradually decreases to the rotational speed R 3 [rpm] is input to the inverter 131.
Claims (2)
該レーザチャンバ内に配置されレーザ光の発振を可能とする放電を得るための一対の主放電電極と、
前記一対の主放電電極間にレーザガス流を作り出す貫流ファンと、
該貫流ファンに対して回転動力を与えるモータと、
からなる放電励起エキシマレーザ装置において、
該モータの回転数とトルクの積により定義される出力は、該モータの出力限界内であり、かつ、該レーザチャンバ内のレーザガス圧力に応じて該貫流ファンの回転数を変化させることを特徴とする放電励起エキシマレーザ装置。 A laser chamber enclosing a laser gas;
A pair of main discharge electrodes disposed in the laser chamber for obtaining a discharge capable of oscillating laser light;
A cross-flow fan that creates a laser gas flow between the pair of main discharge electrodes;
A motor that provides rotational power to the cross-flow fan;
In a discharge excitation excimer laser device comprising:
The output defined by the product of the rotational speed of the motor and the torque is within the output limit of the motor, and the rotational speed of the cross-flow fan is changed according to the laser gas pressure in the laser chamber. Discharge excitation excimer laser device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011140045A JP5393730B2 (en) | 2011-06-24 | 2011-06-24 | Discharge excitation excimer laser equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011140045A JP5393730B2 (en) | 2011-06-24 | 2011-06-24 | Discharge excitation excimer laser equipment |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007074305A Division JP4789266B2 (en) | 2007-03-22 | 2007-03-22 | Discharge excitation excimer laser equipment |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2011211233A JP2011211233A (en) | 2011-10-20 |
| JP2011211233A5 true JP2011211233A5 (en) | 2012-01-19 |
| JP5393730B2 JP5393730B2 (en) | 2014-01-22 |
Family
ID=44941891
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011140045A Active JP5393730B2 (en) | 2011-06-24 | 2011-06-24 | Discharge excitation excimer laser equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5393730B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6364476B2 (en) * | 2014-03-18 | 2018-07-25 | ギガフォトン株式会社 | Gas laser apparatus and control method thereof |
| JP6068390B2 (en) * | 2014-05-23 | 2017-01-25 | ファナック株式会社 | Laser oscillator with blower |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6260061U (en) * | 1985-10-04 | 1987-04-14 | ||
| JPS639187A (en) * | 1986-06-30 | 1988-01-14 | Komatsu Ltd | Output controller for excimer laser |
| JP4367886B2 (en) * | 2000-03-15 | 2009-11-18 | 株式会社小松製作所 | Gas laser device |
| JP2002217475A (en) * | 2001-01-17 | 2002-08-02 | Ntn Corp | Gas-circulating fan for excimer laser |
| JP4104935B2 (en) * | 2001-08-27 | 2008-06-18 | 株式会社小松製作所 | Main discharge electrode and method of manufacturing main discharge electrode |
-
2011
- 2011-06-24 JP JP2011140045A patent/JP5393730B2/en active Active
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