JP2011209283A5 - - Google Patents

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Publication number
JP2011209283A5
JP2011209283A5 JP2011053761A JP2011053761A JP2011209283A5 JP 2011209283 A5 JP2011209283 A5 JP 2011209283A5 JP 2011053761 A JP2011053761 A JP 2011053761A JP 2011053761 A JP2011053761 A JP 2011053761A JP 2011209283 A5 JP2011209283 A5 JP 2011209283A5
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JP
Japan
Prior art keywords
fixed
electrode
contacts
external force
movable electrode
Prior art date
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Application number
JP2011053761A
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Japanese (ja)
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JP5505340B2 (en
JP2011209283A (en
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Priority to JP2011053761A priority Critical patent/JP5505340B2/en
Priority claimed from JP2011053761A external-priority patent/JP5505340B2/en
Publication of JP2011209283A publication Critical patent/JP2011209283A/en
Publication of JP2011209283A5 publication Critical patent/JP2011209283A5/ja
Application granted granted Critical
Publication of JP5505340B2 publication Critical patent/JP5505340B2/en
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Claims (1)

固定部と、A fixed part;
前記固定部から離間して配置された固定電極と、A fixed electrode disposed apart from the fixed part;
前記固定部に一端部が支持され、前記固定部及び前記固定電極に対して変位可能な可動電極と、を備え、One end portion is supported by the fixed portion, and includes a movable electrode that is displaceable with respect to the fixed portion and the fixed electrode,
前記可動電極は印加される外力により変形されて前記固定電極の一部と接触し、The movable electrode is deformed by an applied external force and contacts a part of the fixed electrode;
前記可動電極が前記固定電極に接触した際の前記固定部と前記固定電極との間の電気抵抗値の変化に基づいて前記外力の大きさを検出することを特徴とする力学量センサ。A mechanical quantity sensor that detects the magnitude of the external force based on a change in electric resistance value between the fixed portion and the fixed electrode when the movable electrode contacts the fixed electrode.
JP2011053761A 2011-03-11 2011-03-11 Mechanical quantity sensor and manufacturing method thereof Active JP5505340B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2011053761A JP5505340B2 (en) 2011-03-11 2011-03-11 Mechanical quantity sensor and manufacturing method thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011053761A JP5505340B2 (en) 2011-03-11 2011-03-11 Mechanical quantity sensor and manufacturing method thereof

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2010071318A Division JP4707763B1 (en) 2010-03-26 2010-03-26 Mechanical quantity sensor and manufacturing method thereof

Publications (3)

Publication Number Publication Date
JP2011209283A JP2011209283A (en) 2011-10-20
JP2011209283A5 true JP2011209283A5 (en) 2013-04-04
JP5505340B2 JP5505340B2 (en) 2014-05-28

Family

ID=44940473

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011053761A Active JP5505340B2 (en) 2011-03-11 2011-03-11 Mechanical quantity sensor and manufacturing method thereof

Country Status (1)

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JP (1) JP5505340B2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014173955A (en) * 2013-03-07 2014-09-22 Seiko Instruments Inc Displacement detection device and method of manufacturing displacement detection device
JP6085757B2 (en) * 2013-03-13 2017-03-01 国立研究開発法人産業技術総合研究所 Fabrication method of microstructure

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH069499Y2 (en) * 1987-06-23 1994-03-09 黒谷 信子 Draining device for semiconductor materials
US5786553A (en) * 1996-11-01 1998-07-28 Zakutin; David Inertial switch
JPH11230984A (en) * 1998-02-17 1999-08-27 Denso Corp Acceleration sensor
JPH11242052A (en) * 1998-02-26 1999-09-07 Denso Corp Semiconductor acceleration sensor

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