JP2011209283A5 - - Google Patents
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- JP2011209283A5 JP2011209283A5 JP2011053761A JP2011053761A JP2011209283A5 JP 2011209283 A5 JP2011209283 A5 JP 2011209283A5 JP 2011053761 A JP2011053761 A JP 2011053761A JP 2011053761 A JP2011053761 A JP 2011053761A JP 2011209283 A5 JP2011209283 A5 JP 2011209283A5
- Authority
- JP
- Japan
- Prior art keywords
- fixed
- electrode
- contacts
- external force
- movable electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Claims (1)
前記固定部から離間して配置された固定電極と、A fixed electrode disposed apart from the fixed part;
前記固定部に一端部が支持され、前記固定部及び前記固定電極に対して変位可能な可動電極と、を備え、One end portion is supported by the fixed portion, and includes a movable electrode that is displaceable with respect to the fixed portion and the fixed electrode,
前記可動電極は印加される外力により変形されて前記固定電極の一部と接触し、The movable electrode is deformed by an applied external force and contacts a part of the fixed electrode;
前記可動電極が前記固定電極に接触した際の前記固定部と前記固定電極との間の電気抵抗値の変化に基づいて前記外力の大きさを検出することを特徴とする力学量センサ。A mechanical quantity sensor that detects the magnitude of the external force based on a change in electric resistance value between the fixed portion and the fixed electrode when the movable electrode contacts the fixed electrode.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011053761A JP5505340B2 (en) | 2011-03-11 | 2011-03-11 | Mechanical quantity sensor and manufacturing method thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011053761A JP5505340B2 (en) | 2011-03-11 | 2011-03-11 | Mechanical quantity sensor and manufacturing method thereof |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2010071318A Division JP4707763B1 (en) | 2010-03-26 | 2010-03-26 | Mechanical quantity sensor and manufacturing method thereof |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2011209283A JP2011209283A (en) | 2011-10-20 |
JP2011209283A5 true JP2011209283A5 (en) | 2013-04-04 |
JP5505340B2 JP5505340B2 (en) | 2014-05-28 |
Family
ID=44940473
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011053761A Active JP5505340B2 (en) | 2011-03-11 | 2011-03-11 | Mechanical quantity sensor and manufacturing method thereof |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP5505340B2 (en) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2014173955A (en) * | 2013-03-07 | 2014-09-22 | Seiko Instruments Inc | Displacement detection device and method of manufacturing displacement detection device |
JP6085757B2 (en) * | 2013-03-13 | 2017-03-01 | 国立研究開発法人産業技術総合研究所 | Fabrication method of microstructure |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH069499Y2 (en) * | 1987-06-23 | 1994-03-09 | 黒谷 信子 | Draining device for semiconductor materials |
US5786553A (en) * | 1996-11-01 | 1998-07-28 | Zakutin; David | Inertial switch |
JPH11230984A (en) * | 1998-02-17 | 1999-08-27 | Denso Corp | Acceleration sensor |
JPH11242052A (en) * | 1998-02-26 | 1999-09-07 | Denso Corp | Semiconductor acceleration sensor |
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2011
- 2011-03-11 JP JP2011053761A patent/JP5505340B2/en active Active
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