JP2011202963A - Energization test device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an energization test device that can suppress breakage of a terminal of an inspection object by making a probe body pressed on the terminal, while the terminal is reliably brought into contact with a contact member.SOLUTION: The energization test device 10 includes the probe bodies 18 which come into contact with terminal plates 118 of first to third terminals 104a, 104b and 104c projecting outward of a test object body 102, first to third probes 12a, 12b and 12c which have elastic members 34 for pressing the probe bodies 18 downward, first contact members 44 which come into contact with terminal bodies 114 positioned below the terminal plates 118, and first to third terminal support members 40a, 40b and 40c which have first elastic members 50 biasing the first contact members 44 upward in a movable state.

Description

  The present invention relates to an energization inspection apparatus that performs an energization inspection on an object to be inspected.

  Conventionally, as a current inspecting device, a probe body is pressed against a terminal of an object to be inspected such as a printed circuit board (see Patent Document 1), or a spherical electrode of an object to be inspected such as an integrated circuit element is pressed against a probe pin. A device that inspects the electrical characteristics of the object to be inspected by energization (see Patent Document 2) is known.

JP 2009-42090 A Japanese Patent No. 4045687

  Since the diameter of the probe main body is small and the electrical resistance between the probe main body and the terminal (device terminal) of the device under test is as large as several [mΩ] to several tens [mΩ], In an inspection in which a large current (several hundred [A] to several thousand [A]) is passed, the probe body itself generates heat and breaks, or the contact portion between the probe body and the device terminal generates heat and breaks (melts). There is a possibility.

  Therefore, in the electric current inspection apparatus for large currents, by increasing the diameter of the probe body, the electrical resistance of the probe body itself is lowered, or by forming a plane on the probe body and pressing the plane against the device terminal The contact area between the probe body and the device terminal may be increased to lower the electrical resistance.

  And in order to make the said probe main body contact the said apparatus terminal reliably, it is possible to tighten the said probe main body and the said apparatus terminal with a screw | thread etc. However, in this case, the screw tightening time is required, the inspection process becomes complicated, and the cycle time is prolonged.

  If the method of pressing the probe main body against the device terminal is adopted as in Patent Document 1 (Patent Document 2) described above, the cycle time can be prevented from being prolonged, but the current-inspection device is configured for a small current. Therefore, the pressing force of the probe body is low, and a sufficient contact area may not be ensured.

  That is, in order to ensure a sufficient contact area, the pressing force of the probe body may be increased. For example, if the device terminal is formed so as to protrude from the body to be inspected, the probe body Since the pressing force is received at the connection portion between the device terminal and the body to be inspected, the connection portion may be damaged.

  As a measure for preventing the connection portion from being damaged, for example, a contact member that receives the pressing force of the probe body may be arranged on the opposite side of the probe body across the device terminal.

  However, the inspection object is usually configured as an assembly of a plurality of parts, and a stacking tolerance (the sum of the tolerances of each part) is generated at the device terminal. Therefore, the inspection object is arranged at the inspection position. At this time, the device terminal and the contact member are not in contact with each other, and the connection portion (device terminal) may be damaged as described above.

  The present invention has been made in consideration of such problems, and by pressing the probe main body against the terminal in a state where the terminal of the device under test and the contact member are securely in contact with each other, the terminal is damaged. An object of the present invention is to provide an energization inspection apparatus capable of suppressing the above-described problem.

  An energization inspection apparatus according to the present invention is an energization inspection apparatus that performs an energization inspection on an inspected body having an inspected body and a terminal protruding outward from the inspected body. A conductive probe body that contacts the terminal, a pressing means that presses the probe body against the terminal, a first contact member that is located on the opposite side of the probe body across the terminal and that can contact the terminal; The first contact member is movably supported, and includes first biasing support means for biasing the first contact member in a direction toward the terminal.

  According to such a configuration, even if the connection position of the terminal with respect to the body to be inspected varies due to the stacking tolerance of the body to be inspected, the variation can be absorbed by moving the first contact member. Thereby, the first contact member can be reliably brought into contact with the terminal. In addition, since the 1st contact member is urged | biased in the direction which goes to the said terminal, the pressing force of a probe main body can be received suitably with the urging | biasing force. Therefore, it can suppress that the connection part of this terminal and the said to-be-inspected object main body is damaged.

  Further, the first biasing support means may include a first elastic member that biases the first contact member in a direction toward the terminal. In this case, since the first contact member can be urged by using the elastic force of the first elastic member, the first urging support means can be configured simply.

  By the way, the current-inspection of the object to be inspected may be performed in a state where the object to be inspected is mounted on a mounting table or the like (support means). However, since the inspected body has a stacking tolerance, the contact of the inspected body with the mounting table tends to be unstable. Therefore, when the probe body is pressed against the terminal, the body to be inspected fluctuates (fluctuates), and the contact position between the probe body and the terminal may shift.

  Therefore, in the present invention, a support means for supporting the body to be inspected is provided, and the support means supports a second contact member that can contact the body to be inspected and the second contact member to be movable. In addition, a second urging support unit that urges the second contact member in a direction toward the body to be inspected may be included.

  According to such a configuration, even if there is a stacking tolerance in the inspected body, the stacking tolerance can be absorbed by moving the second contact member. Thereby, the contact with respect to the support means of this to-be-inspected body is stabilized. Therefore, when the probe main body is pressed against the terminal, it can be suppressed that the main body to be inspected fluctuates. In addition, since the 2nd contact member is urged | biased in the direction which goes to the said to-be-inspected body, the weight of this to-be-inspected body can be supported suitably with the urging | biasing force.

  Further, the second urging support means may include a second elastic member that urges the second contact member in a direction toward the body to be inspected. In this case, since the second contact member can be urged using the elastic force of the second elastic member, the second urging support means can be simplified.

  Furthermore, the spring coefficient of the first elastic member may be set larger than the spring constant of the second elastic member.

  In this case, the elastic force of the first elastic member can be adjusted by compressing the first elastic member and the second elastic member according to the pressing force of the probe body. That is, since the spring constant of the first elastic member is larger than the spring constant of the second elastic member, the second elastic member functions as an elastic member for adjusting the position of the object to be inspected, and the first elastic member is used as the probe body. It can be made to function as an elastic member for receiving the pressing force. Accordingly, the pressing force of the probe main body can be received not by the elastic force of the second elastic member but by the elastic force of the first elastic member, so that the connection portion between the terminal and the body to be inspected can be obtained. Can be more reliably suppressed.

  Moreover, the said to-be-inspected object has two or more said terminals, The said probe main body, the said press means, and the said 1st urging | biasing support means may be provided corresponding to each terminal.

  This makes it possible to conduct energization inspection of a plurality of terminals at a time, so that the energization inspection of the object to be inspected can be performed efficiently.

  According to the present invention, even if the connection position of the terminal with respect to the body to be inspected varies due to the tolerance of the body to be inspected, the variation can be absorbed by moving the first contact member. Thereby, since the first contact member can be reliably brought into contact with the terminal, the connection portion between the terminal and the body to be inspected can be prevented from being damaged.

It is a partial cross section side view of the electricity supply inspection device concerning this embodiment in the state where the object to be inspected has been arranged in the support mechanism. It is a partial cross section front view of the electricity supply inspection device concerning this embodiment in the state where the to-be-inspected object is arranged in the support mechanism. It is a figure for demonstrating the stacking tolerance of a to-be-inspected body. It is the flowchart which showed the procedure of the electricity supply test | inspection of the to-be-inspected object using the electricity supply inspection apparatus which concerns on this embodiment. It is a partial cross section front view of the electricity supply inspection apparatus which shows the state which the contact part of the 1st and 2nd probe contacted the terminal board of the 1st and 2nd terminal. It is a partial cross section front view of the electricity supply inspection apparatus which shows the state which the contact part of the 3rd probe contacted the terminal board of the 3rd terminal. It is a partial cross section front view of the electricity supply inspection apparatus which shows the state which the 1st-3rd probe is pressing the 1st-3rd terminal. It is a partial cross section front view of the electricity supply inspection apparatus which shows the state which the pressing force of the 1st-3rd probe reached | attained within the preset predetermined range.

  DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, preferred embodiments of an electric current inspection apparatus according to the present invention will be exemplified and described in detail with reference to the accompanying drawings.

  The current-carrying inspection apparatus 10 according to the present embodiment is used for inspecting the electrical characteristics of the device under test 100 (see FIGS. 1 and 2). As the device under test 100, for example, an inverter that energizes a large current can be used.

  In the following description, members relating to the current inspecting apparatus 10 will be described with reference numeral 10 or later, and members relating to the device under test 100 will be described with reference numeral 100 or later.

  As shown in FIGS. 1 and 2, the device under test 100 includes a device under test main body 102 and first to third terminals 104 a, 104 b, 104 c that protrude outward from the sides of the device under test body 102. (See FIG. 2).

  The body to be inspected 102 includes an inverter 106 and a heat sink 108 in which a power module and the like are provided in a housing.

  The heat sink 108 includes a top plate portion 110 provided on the lower surface of the inverter 106 and a fin portion 112 extending downward from the lower surface of the top plate portion 110. As can be understood from FIG. 2, the top plate portion 110 is formed such that both end portions thereof protrude outward from the fin portions 112. The heat sink 108 is not limited to a shape having fins, but may be any one as long as the top plate portion 110 projects.

  The first to third terminals 104a, 104b, 104c are arranged at equal intervals (see FIG. 2). The first terminal 104a is disposed on the upper surface of the terminal body 114, the terminal body 114 provided integrally with the housing and having a through hole formed in the center thereof, the nut 116 embedded in the upper surface of the terminal body 114, and the nut 116. And a terminal plate 118 electrically connected to the power module of the inverter 106.

  Since the second terminal 104b and the third terminal 104c have the same configuration as the first terminal 104a, description of the configuration is omitted.

  As described above, the device under test 100 is configured as an assembly in which a plurality of parts are combined. Therefore, a stacking tolerance is generated in the inspected object 100. As a result, as shown in FIG. 2, the third terminal 104c is shifted downward by a distance A from the second terminal 104b, and as shown in FIG. 110a, 110b), the lower surface of one of the overhanging portions 110a is shifted downward by a distance B from the lower surface of the other overhanging portion 110b.

  Note that the distance A and the distance B are within the tolerance range of the object 100 to be inspected. Further, in FIG. 2, as an example, the first terminal 104a and the second terminal 104b show a state in which the positions in the thickness direction of the first terminal 104a are aligned.

  As shown in FIGS. 1 and 2, the energization inspection apparatus 10 includes a first probe 12a located above the first terminal 104a, a second probe 12b located above the second terminal 104b, and a third terminal 104c. A third probe 12c positioned above the first probe 12a, a second probe 12b, a connecting member 14 for connecting the third probe 12c, and a support mechanism 16 as a support means for supporting the device under test 100. ing. The first to third probes 12a, 12b, and 12c are arranged so that their positions in the ascending / descending direction are aligned.

  Next, the configuration of the first probe 12a will be described. Since the second probe 12b and the third probe 12c have the same configuration as the first probe 12a, description of the configuration is omitted.

  As shown in FIGS. 1 and 2, the first probe 12 a includes a probe body 18 extending in one direction (X direction) and a probe body support member 20 that supports the probe body 18.

  The probe body 18 is made of metal. Specifically, the probe main body 18 is configured by subjecting a base material such as stainless steel or brass to a plating process such as nickel (Ni) or gold (Au).

  The probe main body 18 includes a first small diameter portion 22 located on the front end side, a second small diameter portion 24 located on the rear end side and having substantially the same diameter as the first small diameter portion 22, and a first A large-diameter portion 26 located between the small-diameter portion 22 and the second small-diameter portion 24 is included.

  Each of the first small diameter portion 22 and the second small diameter portion 24 is formed in a rod shape. A contact portion 28 that contacts the terminal plate 118 of the first terminal 104a is provided at the tip of the first small-diameter portion 22, and the contact portion 28 is formed in a flat surface. Thereby, the contact area of the contact part 28 with respect to the terminal board 118 of the 1st terminal 104a can be enlarged compared with the case where a contact part is formed in hemispherical. Therefore, the electrical resistance between the terminal plate 118 of the first terminal 104a and the contact portion 28 can be lowered.

  The surface roughness (Ra) of the contact portion 28 is set to 10 [μm] or less. Thereby, the electrical resistance between the contact part 28 and the terminal board 118 can be made still lower.

  At the rear end of the large-diameter portion 26, a pressing elastic member 34 is provided as pressing means sandwiched between a pair of washers 30 and 32. In addition, each washer 30 and 32 is comprised with material with high electrical insulation, such as resin, for example. As the pressing elastic member 34, for example, a compression coil spring is used.

  The spring constant of the pressing elastic member 34 is set such that a predetermined pressing force (for example, 500 [N] or more) can be applied to the terminal plate 118.

  A current supply unit (not shown) is connected to the second small diameter portion 24, and a current of several hundred [A] to several thousand [A] is supplied from the current supply unit.

  The probe body support member 20 contacts the large-diameter portion 26 to restrict the downward movement of the probe body 18 and contacts the washer 32 to move the probe body 18 upward. And a second movement restriction member 38 for restricting the movement.

  Note that the washer 32 and the second movement restriction member 38 are separated in a state where the large-diameter portion 26 and the first movement restriction member 36 are in contact with each other, and the separation interval is a tolerance of stacking of the inspected object 100. Is set larger than.

  As shown in FIG. 2, the connecting member 14 is connected to the probe main body support member 20 of the first to third probes 12a, 12b, and 12c, and is attached to a fixed base (not shown) placed on the floor surface or the like. On the other hand, it is configured to be movable up and down. Thereby, the 1st-3rd probes 12a, 12b, and 12c can be moved up and down integrally.

  The support mechanism 16 includes a first terminal support member 40a that supports the first terminal 104a, a second terminal support member 40b that supports the second terminal 104b, a third terminal support member 40c that supports the third terminal 104c, The first and second stages 42a and 42b that support the body to be inspected 102 are provided.

  As shown in FIGS. 1 and 2, the first terminal support member 40a includes a first contact member 44 that can contact the lower surface of the terminal body 114 of the first terminal 104a, and the first contact member 44 is movable in the X direction. The first insertion hole 46 to be inserted in such a state is formed, and the first fixing portion 48 placed on the floor surface, the first fixing hole 48 is disposed in the first insertion hole 46, and in the direction (upward) toward the terminal body 114 And a first elastic member 50 that urges the first contact member 44.

  The first contact member 44 is made of a material having high electrical insulation, such as PEEK (polyether ether ketone) and PES (polyether sulfone). Further, the movable distance (stroke) of the first contact member 44 is set to be larger than the stacking tolerance of the device under test 100. For example, when the stacking tolerance is set to ± 0.5 [mm], the stroke of the first contact member 44 is set to a range of about 4.5 [mm] to 5.5 [mm]. The

  The spring constant of the first elastic member 50 is set based on the pressing force of the probe body 18 and the stroke of the first contact member 44. Specifically, the spring constant of the first elastic member 50 is set to such an extent that the pressing force of the probe body 18 can be received, and is set to about 100 [N / mm], for example.

  For example, a compression spring is used as the first elastic member 50. However, rubber or the like may be used as the first elastic member 50.

  In addition, since the 2nd terminal support member 40b and the 3rd terminal support member 40c have the structure same as the 1st terminal support member 40a, description of the structure is abbreviate | omitted.

  The first and second stages 42a and 42b are located between the projecting portions 110a and 110b of the top plate portion 110 and the floor surface. Specifically, the first and second stages 42a and 42b are offset from the center of the body to be inspected 102 to the side opposite to the side where the first to third terminals 104a, 104b, and 104c are located (see FIG. 1). Thereby, when the device under test 100 is arranged on the support mechanism 16, the reaction force generated on the device under test 100 from the first to third terminal support members 40a, 40b, 40c is caused by the first and second stages 42a, 42b. Since it can receive (cancel), the to-be-inspected object 100 can be supported with good balance.

  The first stage 42a has a second contact member 52 that can contact the lower surface of the overhanging portion 110a, and a second insertion hole 54 that is inserted in a state in which the second contact member 52 is movable in the X direction, and A second fixing portion 56 placed on the floor, a second elastic member 58 disposed in the second insertion hole 54 and biasing the second contact member 52 in a direction (upward) toward the overhanging portion 110a; including.

  The second contact member 52 is made of the same material as the first contact member 44. Further, the movable distance (stroke) of the second contact member 52 is set substantially equal to the stroke of the first contact member 44.

  The spring constant of the second elastic member 58 is set sufficiently smaller than the spring constant of the first elastic member 50. For example, a compression spring is used as the second elastic member 58. However, rubber or the like may be used as the second elastic member 58.

  Since the second stage 42b has the same configuration as the first stage 42a, description of the configuration is omitted.

  In this embodiment, if the spring constant of the pressing elastic member 34 is k1, the spring constant of the first elastic member 50 is k2, and the spring constant of the second elastic member 58 is k3, the relationship k2 ≧ k1> k3 is established. ing.

  The procedure of the current inspection of the object to be inspected using the current inspection apparatus configured as described above will be described with reference to FIGS. 2 and 4 to 8.

  First, as shown in FIG. 2, the device under test 100 is arranged on the support mechanism 16 (step S1 in FIG. 4). Specifically, the operator (or robot) carries the device under test 100 from a predetermined location to above the support mechanism 16 and descends while maintaining the device under test 100 horizontal.

  Then, first, the third terminal 104c comes into contact with the first contact member 44 of the third terminal support member 40c, and the one overhanging portion 110a comes into contact with the second contact member 52 of the first stage 42a. At this time, the first terminal 104 a, the second terminal 104 b, and the other overhang portion 110 b are in a non-contact state with respect to the device under test 100. As described above, the third terminal 104c is positioned below the first terminal 104a and the second terminal 104b by a distance A, and the lower surface of one overhanging portion 110a is lower than the lower surface of the other overhanging portion 110b. This is because it is located below the distance B.

  When the device under test 100 comes into contact with the support mechanism 16, the weight of the device under test 100 acts on the support mechanism 16, so that the first contact member 44 of the third terminal support member 40 c compresses the first elastic member 50. While moving downward, the second contact member 52 of the first stage 42 a moves downward while compressing the second elastic member 58.

  When the first contact member 44 of the third terminal support member 40c moves downward by the distance A, the first terminal 104a contacts the first contact member 44 of the first terminal support member 40a and the second terminal When 104b contacts the first contact member 44 of the second terminal support member 40b and the second contact member 52 of the first stage 42a moves downward by a distance B, the other overhanging portion 110b becomes the second stage 42b. The second contact member 52 is contacted. At this time, the arrangement of the device under test 100 on the support mechanism 16 is completed.

  Thus, even when the third terminal 104c is shifted downward from the first terminal 104a and the second terminal 104b due to the stacking tolerance of the device under test 100, the first contact member 44 of the third terminal support member 40c. Since the shift can be absorbed by moving the first to third terminals 104a, 104b, and 104c, the first to third terminal support members 40a, 40b, and 40c can be reliably brought into contact with each other.

  Further, even when one of the overhanging portions 110a is shifted downward from the other overhanging portion 110b due to the stacking tolerance of the inspected body 102, the second contact member 52 of the first stage 42a is moved. Thus, since the shift can be absorbed, both the overhanging portions 110a and 110b can be reliably brought into contact with the first stage 42a and the second stage 42b.

  Note that the distance A and the distance B are within the stacking tolerance range of the device 100 to be inspected, and are sufficiently smaller than the strokes of the first and second contact members 44 and 52. The subject 100 is not tilted by the elastic force of the first elastic member 50 and the elastic force of the second elastic member 58 of the first stage 42a. That is, the device under test 100 is maintained substantially horizontal while being placed on the support mechanism 16.

  Next, when the connecting member 14 is lowered (step S2), as shown in FIG. 5, the contact portion 28 of the first probe 12a contacts the terminal plate 118 of the first terminal 104a and the contact of the second probe 12b. The part 28 contacts the terminal plate 118 of the second terminal 104b (step S3). At this time, the contact portion 28 of the third probe 12c is not in contact with the device under test 100.

  Subsequently, when the connecting member 14 is further lowered, the probe body support member 20 of the first and second probes 12a and 12b moves downward relative to the probe body 18 as shown in FIG. The portion 26 and the first movement restriction member 36 are separated from each other, and the contact portion 28 of the third probe 12c contacts the terminal plate 118 of the third terminal 104c (step S4).

  When the connecting member 14 is further lowered, as shown in FIG. 7, the washer 32 of the first to third probes 12a, 12b, 12c comes into contact with the second movement restricting member 38, and the pressing elastic member 34 is compressed. A pressing force corresponding to the elastic force of the pressing elastic member 34 acts on the first to third terminals 104a, 104b, and 104c.

  At this time, since the first contact members 44 of the first to third terminal support members 40a, 40b, and 40c are in contact with the first to third terminals 104a, 104b, and 104c, the first to third probes 12a and 12b. , 12c can be suitably received by the first to third terminal support members 40a, 40b, and 40c from the first to third terminals 104a, 104b, and 104c.

  Further, as described above, since the overhang portions 110a and 110b are reliably brought into contact with the second contact members 52 of the first and second stages 42a and 42b, when the pressing force of the probe main body 18 acts, It can suppress that the to-be-inspected object 100 shakes (fluctuates).

  After that, when the total elastic force of the pressing elastic member 34 becomes larger than the total elastic force of the first and second elastic members 50 and 58, as shown in FIG. The first and second elastic members 50 and 58 are moved downward while being compressed.

  At this time, since the spring constant k2 of the first elastic member 50 is set sufficiently larger than the spring constant k3 of the second elastic member 58, the second elastic member 58 is an elastic member for adjusting the height of the device under test 100. And the first elastic member 50 can function as an elastic member for receiving the pressing force of the probe main body 18.

  Thus, the pressing force of the probe main body 18 of the first to third probes 12a, 12b, 12c is not received by the elastic force of the second elastic member 58 of the first and second stages 42a, 42b. Since it can receive with the elastic force of the 1st elastic member 50 of the 3rd terminal support members 40a, 40b, and 40c, the breakage of the connection part of the 1st-3rd terminals 104a, 104b, and 104c and inverter 106 is more It can be surely suppressed.

  Then, when the pressing force of the probe body 18 reaches a predetermined range set in advance, the descent of the connecting member 14 is stopped (step S5). At this time, the pressing force of the probe main body 18 is, for example, 500 [N] or more, and the contact area between the probe main body 18 and the terminal plate 118 is increased. The electrical resistance of is 1 [mΩ] or less.

  Next, the current supply unit supplies a current to the inverter 106 via the probe body 18 and the terminal board 118 (step S6). Then, after obtaining the electrical characteristic result of the inverter 106 (step S7), the connecting member 14 is raised (step S8).

  When the connecting member 14 is raised, the compressive force acting on the pressing elastic member 34, the first elastic member 50, and the second elastic member 58 is released, and the washer 32 and the second movement restricting member 38 are separated from each other. When the connecting member 14 is further raised, the large diameter portion 26 comes into contact with the first movement restricting member 36 and the contact portion 28 is separated from the terminal plate 118.

  Thereafter, when the connecting member 14 reaches a predetermined position, the rising of the connecting member 14 is stopped (step S9). At this stage, the energization inspection procedure for the device under test 100 using the energization inspection apparatus 10 according to the present embodiment ends.

  According to the current-carrying inspection apparatus 10 according to the present embodiment, since the pressing force of the probe body 18 is received using the elastic force of the first elastic member 50, the first to third terminal support members 40a, 40b, 40c can be made into a simple structure.

  Similarly, since the weight of the device under test 100 is received by using the elastic force of the second elastic member 58, the first and second stages 42a and 42b can be configured simply.

  According to the present embodiment, the first to third probes 12a, 12b, 12c and the first to third terminal support members 40a, 40b, 40c are provided for the first to third terminals 104a, 104b, 104c. As a result, it is possible to inspect the energization of the three terminals at a time, and to efficiently perform the energization inspection of the device under test 100.

  The present invention is not limited to the above-described embodiment, and it is naturally possible to adopt various configurations without departing from the gist of the present invention.

  In the said embodiment, although the 1st-3rd terminal support member demonstrated the example which urged | biased the 1st contact member upwards using the elastic force of a 1st elastic member, Alternatively, by supplying a fluid to a cylinder into which the piston is movably inserted, the piston may be pressed to bias the first contact member upward. The same applies to the first and second stages described above.

DESCRIPTION OF SYMBOLS 10 ... Current supply inspection apparatus 12a ... 1st probe 12b ... 2nd probe 12c ... 3rd probe 18 ... Probe main body 34 ... Elastic member for pressing (pressing means)
40a ... 1st terminal support member 40b ... 2nd terminal support member 40c ... 3rd terminal support member 42a ... 1st stage 42b ... 2nd stage 44 ... 1st contact member 50 ... 1st elastic member (1st biasing support means) 52 ... second contact member 58 ... second elastic member (second biasing support means) 100 ... inspected body 102 ... inspected body 104a ... first terminal 104b ... second terminal 104c ... third terminal 114 ... terminal Body 118 ... Terminal board

Claims (6)

An inspected body,
A current-carrying inspection device that conducts a current-carrying inspection on a device to be inspected having a terminal protruding outward from the body to be inspected,
A conductive probe body in contact with the terminal;
A pressing means for pressing the probe body against the terminal;
A first contact member located on the opposite side of the probe body across the terminal and capable of contacting the terminal;
An energization inspection apparatus comprising: a first urging support unit that movably supports the first contact member and urges the first contact member in a direction toward the terminal. In the electricity supply inspection device according to claim 1,
The first urging support means includes a first elastic member that urges the first contact member in a direction toward the terminal. In the electricity supply inspection device according to claim 1 or 2,
A support means for supporting the inspected body,
The support means includes a second contact member that contacts the body to be inspected;
And a second urging support means for urging the second contact member in a direction toward the body to be inspected while movably supporting the second contact member. In the electricity supply inspection device according to claim 3,
The current-carrying inspection apparatus, wherein the second urging support means includes a second elastic member that urges the second contact member in a direction toward the body to be inspected. In the electricity inspection device according to claim 4,
The spring constant of the first elastic member is set to be larger than the spring constant of the second elastic member. In the electricity supply inspection device according to any one of claims 1 to 5,
The object to be inspected has a plurality of the terminals,
The energization inspection apparatus, wherein the probe main body, the pressing means, and the first urging support means are provided corresponding to each terminal.

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