JP2011185641A - Temperature sensor and temperature measuring device using the same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To obtain a temperature sensor and a temperature measuring device using the same by which contact stability to an object of temperature measurement is maintained and the responsiveness to the temperature change of the object of temperature measurement is excellent. <P>SOLUTION: A sheathed thermocouple 1 includes a sheath part 1a and a compensating lead part 1b and is composed so that the thermocouple contact point is positioned at some distance from the tip of the sheath. The positive electrode side 1c and the negative electrode side 1d of the thermocouple are solidified with an insulating material 1e, and the thermocouple contact point positioned at some distance from the tip of the sheath composes a temperature detection part 1f. The temperature sensor 3 is composed by fixing near the tip of the sheath part of the sheathed thermocouple 1 and the position at some distance from the tip with a first fixing part 2a and a second fixing part 2b of a sheathed thermocouple supporting means 2. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to a temperature sensor that measures the temperature of an object using a thermocouple, and a temperature measurement device using the temperature sensor.

  When measuring the temperature of an object, when using the contact method, a method using a thermocouple is generally used. The most basic structure of a temperature sensor using a thermocouple is to make a contact point connecting two wires of dissimilar metals to the temperature measurement site, but to give the temperature sensor insulation, heat resistance, etc. Therefore, a sheathed thermocouple having a structure in which a thermocouple is coated as shown in FIGS. 8A and 8B is often used. FIG. 8A shows a sheath thermocouple that is generally used, and FIG. 8B shows its tip. The sheath thermocouple 1 is composed of only the sheath portion 1a or a sheath portion 1a and a compensating conductor portion 1b as shown in FIG. A contact point is provided near the tip of the part 1a to constitute the temperature detection part 1f.

  As a method of bringing the sheath thermocouple 1 into contact with the solid temperature measurement object, the method of pressing the temperature detection portion 1f of the sheath thermocouple 1 is the simplest. When the diameter is small, the force that keeps pressing between the sheath thermocouple 1 and the temperature measurement object is extremely weak and can easily be separated by vibration or the like.

  For the purpose of eliminating such contact instability, for example, in order to make a non-destructive and stable contact without brazing a thin wire thermocouple that measures a minute region in a semiconductor chip, A metal plate is attached to the tip of the thermocouple to improve the contact stability with the temperature measurement object (see, for example, Patent Document 1).

JP 2001-159568 A (summary column, FIG. 4)

  However, as in the technique disclosed in Patent Document 1, in the case where a metal plate is attached to the tip of the thermocouple, the heat capacity near the tip of the thermocouple, which is a temperature measurement unit, is greatly increased by attaching the metal plate. When the temperature of the temperature measurement object fluctuates, the responsiveness to the fluctuating temperature may be significantly reduced.

  In addition, some rigidity can be obtained at the part where the metal plate is attached, but in the part without the metal plate, it is a thin wire thermocouple that measures a micro area, so it can be easily buckled with little force. As a result, the contact stability between the thermocouple tip having the metal plate and the temperature measurement object is impaired, and fixing the metal plate with another member to avoid it further increases the heat capacity. There is a problem that responsiveness decreases.

  The present invention has been made in order to solve the above-described problems. A temperature sensor that maintains contact stability with a temperature measurement object and has good responsiveness to a fluctuating temperature of the temperature measurement object and the temperature sensor. An object of the present invention is to provide a temperature measuring device using a temperature sensor.

  The temperature sensor according to the present invention has a sheath thermocouple provided at a position where the thermocouple contact is separated from the sheath tip inside the sheath, and a fixing portion for fixing two points of the sheath thermocouple so as to sandwich the thermocouple contact. And a sheath thermocouple support means.

  According to another aspect of the present invention, there is provided a temperature measurement apparatus, wherein the temperature sensor, a temperature measurement object holding means for holding the temperature measurement object, and a moving means for moving at least one of the temperature sensor and the temperature measurement object holding means. The temperature sensor and the temperature measurement part of the temperature measurement object are brought into contact with each other at an arbitrary timing.

  According to the temperature sensor of the present invention, the thermocouple contact is provided inside the sheath at a position away from the distal end of the sheath, and the fixing portion that fixes the two points of the sheath thermocouple so as to sandwich the thermocouple contact. The sheath thermocouple supporting means, and even if the sheath thermocouple is pressed against the temperature measurement object with a certain amount of force, the sheath thermocouple is not deformed and can be stably maintained in contact. Even in the case of a thin-wire sheathed thermocouple, it is not necessary to attach a member that increases the heat capacity in the vicinity of the thermocouple contact, so that a highly responsive state can be maintained.

  According to another embodiment of the temperature measuring apparatus, at least one of the temperature sensor, the temperature measuring object holding means for holding the temperature measuring object, and the temperature sensor and the temperature measuring object holding means is moved. Moving means, and the temperature sensor and the temperature measurement part of the temperature measurement object are brought into contact with each other at an arbitrary timing. Therefore, when the same point of the temperature measurement object is repeatedly measured repeatedly, the temperature sensor Positioning accuracy is good and reproducibility is very good.

It is a block diagram of the sheath thermocouple used for the temperature sensor by Embodiment 1 of this invention. It is a block diagram of the temperature sensor by Embodiment 1 of this invention. It is a figure explaining the temperature measuring method of the temperature measuring object using the temperature sensor by Embodiment 1 of this invention. It is a block diagram of the temperature sensor by Embodiment 2 of this invention. It is a figure explaining the temperature measuring method of the temperature measuring object using the temperature sensor by Embodiment 2 of this invention. It is a block diagram of the temperature sensor by Embodiment 3 of this invention. It is a block diagram of the temperature measurement apparatus by Embodiment 4 of this invention. It is a block diagram of a general sheathed thermocouple.

  Preferred embodiments of a temperature sensor according to the present invention and a temperature measuring device using the temperature sensor will be described below with reference to the accompanying drawings. It should be noted that the present invention is not limited to this embodiment, and includes various design changes.

Embodiment 1 FIG.
1A and 1B are diagrams for explaining the configuration of a sheath thermocouple used in the temperature sensor according to the first embodiment, in which FIG. 1A shows the whole and FIG. 1B shows the tip. In FIG. 1, a sheath thermocouple 1 is composed of a sheath portion 1a and a compensating lead wire portion 1b. ing. As shown in FIG. 1B, the positive electrode side 1c and the negative electrode side 1d of the thermocouple are hardened with an insulator 1e, and a contact point 10 mm from the sheath tip constitutes the temperature detection unit 1f.

  As shown in FIG. 2, the sheath thermocouple 1 shown in FIG. 1 is fixed at the distal end of the sheath portion and around 20 mm from the distal end by the first fixing portion 2a and the second fixing portion 2b of the sheath thermocouple support means 2. Becomes the temperature sensor 3. The temperature sensor 3 is connected to a data collector (see FIG. 3), which will be described later, and is configured to record temperature data. In FIG. 2, reference numeral 2 c indicates a handle portion of the sheath thermocouple support means 2.

The temperature sensor according to Embodiment 1 is configured as described above. Next, a temperature measurement method for a temperature measurement object will be described with reference to FIG.
The temperature measurement object 4 is a round bar having a diameter of 10 mm. Now, let the temperature measurement part 4a of the temperature measurement object 4 be a part 50 mm above the temperature measurement object 4. When performing the temperature measurement, the handle portion 2c of the sheath thermocouple support means 2 is grasped with, for example, the hand 5 and the temperature detection unit 1f is pressed against the temperature measurement portion 4a. It is recorded in the data collector 6 connected to the sheath thermocouple 1.

  As described above, according to the temperature sensor 3 according to the first embodiment, the temperature detection portion 1f of the sheath thermocouple 1 is positioned exactly in the middle between the first fixing portion 2a and the second fixing portion 2b of the sheath thermocouple support means 2. Even if the temperature detection unit 1f is pressed against the surface temperature measurement portion 4a of the temperature measurement object 4 made of a curved object such as a round bar, the contact state can be stably maintained without deviation. Good temperature measurement.

Embodiment 2. FIG.
Next, a second embodiment of the present invention will be described. FIG. 4 is a diagram illustrating a temperature sensor according to the second embodiment. The temperature sensor 3 according to the second embodiment is the same as the first embodiment in that the sheath thermocouple 1 is attached to the sheath thermocouple support means 2, but the sheath thermocouple support means 2 is attached to the sheath thermocouple support means 2 as shown in FIG. A push-up portion 2d is provided. The sheath push-up portion 2d protrudes so as to push up the sheath portion 1a of the sheath thermocouple 1 from the line connecting the first fixing portion 2a and the second fixing portion 2b of the sheath thermocouple support means 2.

  As described above, according to the temperature sensor 3 according to the second embodiment, even if the temperature measurement object 4 is located in a place where the temperature measurement portion 4a is recessed or flat as shown in FIG. Since the temperature detection part 1f of the temperature sensor 3 protrudes from the other part of the temperature sensor 3, the temperature detection part 1f can be brought into contact with the temperature measurement part 4a, and the temperature can be measured with high accuracy.

Embodiment 3 FIG.
Next, a third embodiment of the present invention will be described. FIG. 6 is a diagram for explaining a temperature sensor according to the third embodiment. The temperature sensor 3 according to the third embodiment is the same as the first embodiment in that the sheath thermocouple 1 is attached to the sheath thermocouple support means 2, but as shown in FIG. 6, the temperature detection portion 1f of the sheath portion 1a. In the vicinity, a marker 1g indicating a temperature measurement appropriate site is provided. The marker 1g is colored by printing or the like in a color different from the sheath itself. It is desirable that the marker 1g is difficult to disappear due to repeated contact with the temperature measurement object 4 during temperature measurement. The temperature measurement appropriate range may be a mark based on other means besides the marker 1g.

  When measuring the temperature with the temperature sensor 3, the temperature measurement part 4a of the temperature measurement object 4 is placed between the first fixing part 2a and the second fixing part 2b of the sheath part 1a attached to the sheath thermocouple support means 2. It is necessary to make it contact with the part close | similar to a contact among the sheath parts 1a instead of making it contact at arbitrary places. This is because the temperature is detected only by the contact point, and the correct temperature cannot be detected even if the temperature measurement part 4a is brought into contact with the part away from the contact point of the sheath portion 1a.

  Therefore, like the temperature sensor 3 according to the third embodiment, the temperature detection unit 1f in which the contacts are embedded is clearly indicated by the marker 1g as the appropriate temperature measurement range, so that the temperature detection unit 1f is correctly detected by just visual inspection. It can be confirmed that it is in contact with the measurement site 4a, and the temperature can be measured with extremely high accuracy and excellent reproducibility.

Embodiment 4 FIG.
Next, a fourth embodiment of the present invention will be described. FIG. 7 is a diagram for explaining an embodiment of a temperature measuring device for measuring the surface temperature of a temperature measuring object made of a round bar using the temperature sensor described in the first embodiment. The same parts are denoted by the same reference numerals.

  In FIG. 7, the temperature measurement object 4 is a round bar having a diameter of 10 mm, and the temperature measurement part 4a is a part 30 mm from the top of the round bar. The temperature measurement object 4 is held by the temperature measurement object holding means 7. The temperature sensor 3 is fixed to the temperature sensor holding means 8, and the temperature sensor holding means 8 is attached to a temperature sensor moving means 11 including a rail 9 and an air cylinder 10. The temperature sensor moving means 11 can contact the temperature detection part 1f of the temperature sensor 3 and the temperature measurement part 4a of the temperature measurement object 4 at any timing, manually or automatically. The data collector 6, the temperature measurement object holding means 7, and the temperature sensor moving means 11 are placed on the bottom plate 12.

  In the above, the temperature measurement object holding means 7 is fixed and the temperature sensor holding means 8 can be moved. On the contrary, the temperature sensor holding means 8 is fixed and the temperature measurement object holding means 8 is held. The means 7 may be configured to be movable, or both the temperature sensor holding means 8 and the temperature measurement object holding means 7 may be configured to be movable.

  The temperature measurement device according to the fourth embodiment is configured as described above. With this configuration, even when there are a plurality of round bars of the temperature measurement object 4, the temperature measurement object holding means 7 always determines the temperature measurement device. The temperature detection unit 1f of the temperature sensor 3 can also be in contact with a predetermined part of the temperature measurement object 4, so that the temperature can be measured with extremely high accuracy and reproducibility.

  Furthermore, when the temperature sensor moving means 11 is driven by the air cylinder 10 which is a contact load applying means, the contact load between the temperature sensor 3 and the temperature measurement object 4 can be set to a predetermined value, and the contact can be made by changing the air pressure. The load can be adjusted.

  Temperature measurement using a thermocouple changes the contact heat transfer coefficient depending on the contact load between the thermocouple and the temperature measurement object, so that the equal load can be guaranteed as in the temperature measurement device according to the fourth embodiment, which is excellent in reproducibility. The effect that the temperature can be measured is obtained. Further, even when a plurality of temperature measurement objects 4 have different shapes, for example, a round bar having a diameter of 10 mm actually has a slightly different diameter for each round bar, a temperature with reproducibility is ensured by ensuring equal load. Can measure.

DESCRIPTION OF SYMBOLS 1 Sheath thermocouple 1a Sheath part 1b Compensation lead part 1c The positive side 1d of a thermocouple The negative side 1e of a thermocouple Insulator 1f Temperature detection part (contact)
1g Marker 2 Sheath thermocouple support means 2a First fixing portion 2b Second fixing portion 2c Handle portion 2d of sheath thermocouple support means Sheath push-up portion 3 Temperature sensor 4 Temperature measurement object 4a Temperature measurement portion 5 Hand 6 Data collector 7 Temperature measurement object holding means 8 Temperature sensor holding means 9 Rail 10 Air cylinder 11 Temperature sensor moving means 12 Bottom plate

Claims (6)

A sheath thermocouple in which a thermocouple contact is provided in a portion away from the sheath tip inside the sheath;
Sheath thermocouple support means having a fixing portion for fixing two points of the sheath thermocouple so as to sandwich the thermocouple contact;
A temperature sensor comprising:   2. The temperature sensor according to claim 1, wherein the sheath thermocouple support means includes a sheath push-up portion that protrudes from a line connecting the two fixing portions between the two sheath thermocouple fixing portions. .   The temperature sensor according to claim 1, wherein the sheath thermocouple is provided with a mark at an appropriate temperature measurement site. A temperature sensor according to claim 1;
Temperature measurement object holding means for holding the temperature measurement object;
Moving means for moving at least one of the temperature sensor and the temperature measurement object holding means,
A temperature measurement apparatus, wherein the temperature sensor and a temperature measurement unit of the temperature measurement object are brought into contact at an arbitrary timing.   The temperature measuring apparatus according to claim 4, further comprising a contact load applying unit that sets a contact load between the temperature sensor and the temperature measurement object as a predetermined value.   The temperature measuring device according to claim 5, wherein the contact load applying means is capable of adjusting a contact load.

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