JP2011184186A5 - - Google Patents

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Publication number
JP2011184186A5
JP2011184186A5 JP2010054502A JP2010054502A JP2011184186A5 JP 2011184186 A5 JP2011184186 A5 JP 2011184186A5 JP 2010054502 A JP2010054502 A JP 2010054502A JP 2010054502 A JP2010054502 A JP 2010054502A JP 2011184186 A5 JP2011184186 A5 JP 2011184186A5
Authority
JP
Japan
Prior art keywords
provided integrally
conveying
roller
driven
transmitting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2010054502A
Other languages
Japanese (ja)
Other versions
JP5707713B2 (en
JP2011184186A (en
Filing date
Publication date
Application filed filed Critical
Priority to JP2010054502A priority Critical patent/JP5707713B2/en
Priority claimed from JP2010054502A external-priority patent/JP5707713B2/en
Publication of JP2011184186A publication Critical patent/JP2011184186A/en
Publication of JP2011184186A5 publication Critical patent/JP2011184186A5/ja
Application granted granted Critical
Publication of JP5707713B2 publication Critical patent/JP5707713B2/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Claims (1)

各ローラ駆動ユニットは、
前記搬送ローラに一体的に設けられた従動車と、
前記搬送モータの出力軸に一体的に設けられ、前記従動車に回転力を伝達する主動車と、を備えたことを特徴とする請求項１に記載の浮上搬送装置。 Each roller drive unit
A driven vehicle provided integrally with the conveying roller;
The provided integrally with an output shaft of the conveying motor, levitation transportation device according to claim 1, characterized in that and a main driving wheel for transmitting a rotational force to the driven wheel.
JP2010054502A 2010-03-11 2010-03-11 Floating transport device and roller drive unit Active JP5707713B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2010054502A JP5707713B2 (en) 2010-03-11 2010-03-11 Floating transport device and roller drive unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010054502A JP5707713B2 (en) 2010-03-11 2010-03-11 Floating transport device and roller drive unit

Publications (3)

Publication Number Publication Date
JP2011184186A JP2011184186A (en) 2011-09-22
JP2011184186A5 true JP2011184186A5 (en) 2012-11-15
JP5707713B2 JP5707713B2 (en) 2015-04-30

Family

ID=44790942

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010054502A Active JP5707713B2 (en) 2010-03-11 2010-03-11 Floating transport device and roller drive unit

Country Status (1)

Country Link
JP (1) JP5707713B2 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013161376A1 (en) * 2012-04-26 2013-10-31 株式会社Ihi Conveyance device
JP5915358B2 (en) * 2012-04-26 2016-05-11 株式会社Ihi Transport device
JP7166817B2 (en) * 2018-07-12 2022-11-08 株式会社荏原製作所 SUBSTRATE TRANSPORTER AND SUBSTRATE PROCESSING APPARATUS INCLUDING SUBSTRATE TRANSPORTER
TWI692432B (en) * 2019-05-15 2020-05-01 晶彩科技股份有限公司 Sheet conveying device and method thereof

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06127095A (en) * 1992-10-16 1994-05-10 Nec Corp Noncontact ribbon feeding mechanism
JP3518612B2 (en) * 1993-01-26 2004-04-12 株式会社リコー Power transmission mechanism
JP4613800B2 (en) * 2004-12-01 2011-01-19 株式会社Ｉｈｉ Levitation device and transfer device
JP4344755B2 (en) * 2007-04-09 2009-10-14 株式会社日本設計工業 Roller unit for thin plate material conveyance and thin plate material conveyance device

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