JP2011171316A - Charged particle sorting device and charged particle irradiation device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a charged particle sorting device for sorting gas clusters at every ionized valence. <P>SOLUTION: The charged particle sorting device for sorting ionized gas clusters has three or more of electric field applying sections for applying electric fields arranged in an incident direction of the ionized gas clusters, and slits for sorting the gas clusters. The electric field applying sections, consisting of two electrodes, are to deflect the ionized gas clusters by applying AC voltages to the electrodes. AC voltages with different phases are applied in the adjoined electric field applying sections and each slit has an opening for passing the gas clusters deflected by the electric field applying sections, so that the AC voltage is of a frequency at which only the gas cluster with the designated valence in the gas clusters with the same atomic number passes the opening of the slit. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to a charged particle sorting device and a charged particle irradiation device.

  A gas cluster formed by agglomeration of a plurality of atoms exhibits a unique physicochemical behavior, and its use in a wide range of fields is being studied. That is, the cluster ion beam composed of gas clusters is suitable for processes in which ion implantation, surface processing, and thin film formation are performed at a depth of several nanometers from a solid surface, which has been difficult in the past.

  In the gas cluster generator, it is possible to generate a cluster whose number of atoms is several hundred to several thousand by being supplied with pressurized gas. In a gas cluster generator, the number of atoms in the generated cluster stochastically exists, and the mass of the gas cluster has a range, and in practice it is necessary to sort based on the mass of the gas cluster .

  For this reason, there is a method of ionizing generated clusters and sorting them based on mass.

JP 2005-71642 A

  However, ionized clusters are desired not only to be sorted by mass but also to be sorted according to the ionized valence. This is because the use and the like vary greatly depending on the valence of the ionized gas cluster. By selecting and using only the gas cluster having the desired valence, higher efficiency and finer processing can be achieved. Can be done. That is, based on the results of experiments and the like, traces of ions are confirmed in a deeper part than a limited area of the surface, and as a result of examination, it is confirmed that this is due to the mixing of multivalent ions. It was. Therefore, in order to stably perform the processes of ion implantation, surface processing, and thin film formation in a region several nanometers deep from the solid surface, it is necessary to remove gas clusters of multiply charged ions. On the other hand, in applications, it may be preferable to use a gas cluster of multiply charged ions from the viewpoint of throughput. Furthermore, it is more preferable if the high-speed neutral beam generated when generating the gas cluster can also be removed.

  The present invention has been made in view of the above, and an object of the present invention is to provide a charged particle sorting apparatus and a charged particle irradiation apparatus capable of sorting ionized clusters according to valence.

  In the charged particle sorting apparatus for sorting ionized gas clusters, the present invention sorts the gas clusters by three or more electric field applying units for applying an electric field arranged in the traveling direction of the gas clusters. And the electric field application unit is composed of two electrodes, and deflects ionized gas clusters by applying an alternating voltage to the electrodes, In the electric field applying unit, alternating voltages of different phases are applied, and the slit has an opening that passes through the gas cluster deflected by the electric field applying unit, and the alternating voltage is the gas In a gas cluster having the same number of atoms constituting the cluster, only the gas cluster having a predetermined valence passes through the opening of the slit. Characterized in that an over frequency.

  Further, the present invention provides a charged particle sorting apparatus for sorting ionized gas clusters, an electric field applying unit for applying an electric field arranged in the traveling direction of the gas clusters, and a method for sorting the gas clusters. And the electric field application unit includes two electrodes, and the electric field application unit includes an AC electric field application unit and a DC electric field application unit, and the DC electric field application is applied to the electrodes. By applying a voltage obtained by superimposing the AC voltage generated in the AC electric field application unit on the DC voltage generated in the unit, the ionized gas cluster is deflected. In the adjacent electric field application unit, AC voltages having different phases are applied, and the slit has an opening that passes through the gas cluster deflected by the electric field applying unit. In the gas cluster having the same number of atoms constituting the gas cluster, the AC voltage is a frequency at which only the gas cluster having a predetermined valence passes through the opening of the slit. To do.

  Further, in the present invention, the AC voltage is a frequency at which only the gas cluster having a predetermined valence passes through the opening of the slit in the gas cluster having the same number of atoms constituting the gas cluster. And

  Further, the present invention is characterized in that the predetermined valence is monovalent.

  Further, the present invention is characterized in that voltages at phases different from each other by 180 ° are applied to the electrodes in the adjacent electric field applying units.

  In the invention, it is preferable that the number of the electric field applying units is 3 or 4.

  Further, the present invention provides a gas cluster generation unit for generating a gas cluster, an ionization electrode for ionizing the gas cluster, an acceleration electrode for accelerating the ionized gas cluster, and the accelerated ionized gas cluster, A charged particle sorting device as described above for sorting ionized gas clusters having a predetermined valence, and irradiating a member with ionized gas clusters ejected from the charged particle sorting device. .

  ADVANTAGE OF THE INVENTION According to this invention, the charged particle sorting apparatus and charged particle irradiation apparatus which can sort out the ionized cluster according to a valence can be provided.

Configuration diagram of charged particle irradiation apparatus in the present invention Configuration diagram of charged particle sorting apparatus according to the first embodiment Correlation diagram between θ _l and deflection angle of ionized cluster when there is one electric field application unit Correlation diagram between θ _l and deflection angle of ionized cluster when there are two electric field application units Correlation diagram between θ _l and deflection angle of ionized cluster when there are three electric field application sections Configuration diagram of charged particle sorting apparatus according to second embodiment Configuration diagram of charged particle sorting apparatus in third embodiment Correlation diagram between θ _l and deflection angle of ionized cluster when there are four electric field application units Configuration diagram of charged particle sorting apparatus in fourth embodiment Configuration diagram of charged particle sorting apparatus according to fifth embodiment Configuration diagram of charged particle sorting apparatus according to sixth embodiment Configuration diagram of charged particle sorting apparatus according to seventh embodiment Configuration diagram of charged particle sorting apparatus according to eighth embodiment

  The form for implementing this invention is demonstrated below.

[First Embodiment]
(Charged particle sorting device and charged particle irradiation device)
A first embodiment will be described. The present embodiment relates to a charged particle sorting apparatus that sorts generated gas clusters and a charged particle irradiation apparatus that irradiates a substrate or the like with charged particles sorted by the charged particle sorting apparatus.

  Based on FIG. 1, the charged particle irradiation apparatus in this Embodiment is demonstrated.

  The charged particle irradiation apparatus in the present embodiment includes a nozzle unit 11 that generates a gas cluster, an ionization electrode 12, an acceleration electrode 13, and a cluster selection unit 14. The cluster sorting unit 14 corresponds to the charged particle sorting apparatus of the present embodiment.

  In the nozzle unit 11, a gas cluster is generated by the compressed gas. Specifically, a gas cluster is generated when the gas supplied to the nozzle unit 11 in a high pressure state is ejected from the nozzle unit 11. The gas used at this time is a gas such as oxygen or argon, and preferably shows a gas state at room temperature.

  Thus, by supplying argon or the like, an argon gas cluster is generated, but the number of atoms of the generated gas cluster is not constant, and gas clusters of various numbers of atoms are generated.

  The ionized electrode 12 ionizes the generated gas cluster. Thereby, although the produced | generated gas cluster is ionized, the valence to be ionized is not constant, and the gas cluster ionized by monovalent, bivalent, trivalent, etc. is produced | generated.

  Next, the ionized gas cluster is accelerated by the acceleration electrode 13. At this time, the gas cluster is accelerated at a speed inversely proportional to the square root of the number of atoms constituting the gas cluster, that is, the square root of the mass. It is also accelerated at a rate proportional to the square root of the valence being ionized.

  Next, the cluster sorting unit 14 sorts the gas clusters according to the ionized valence. In the present embodiment, only the monovalent ionized gas clusters 15 can be selected.

  The cluster selection unit 14 will be described with reference to FIG. FIG. 2 is a configuration diagram of the cluster selection unit 14 in the present embodiment.

  The cluster selection unit 14 in the present embodiment has three sets of electric field application units 21, 22 and 23, a slit 24 and a power supply 25.

  The electric field applying unit 21 includes electrodes 21a and 21b, and generates an electric field by applying a voltage between the electrode 21a and the electrode 21b. The electric field applying unit 22 includes electrodes 22a and 22b, and generates an electric field by applying a voltage between the electrodes 22a and 22b. The electric field application unit 23 includes electrodes 23a and 23b, and generates an electric field by applying a voltage between the electrodes 23a and 23b.

  The voltage is applied by the power source 25, and an AC voltage is applied to each electrode. The electrodes 21a, 22b and 23a are electrically connected, and the electrodes 21b, 22a and 23b are electrically connected. In contrast to the electrodes 21a, 22b and 23a, a so-called reverse phase voltage whose phase is inverted by 180 ° is applied to the electrodes 21b, 22a and 23b. The frequency and voltage value of the applied voltage can be adjusted by the power supply 25.

  In addition, the slit 24 has an opening 24a through which particles traveling in the straight direction among the particles that have passed through the three sets of electric field applying units 21, 22, and 23 can pass. The particles deflected in the portions 21, 22 and 23 cannot be passed through the opening 24a of the slit 24, as shown by the broken arrows, and can be blocked. Therefore, the cluster sorting unit 14 can sort only the gas cluster that proceeds in the straight direction as indicated by the solid arrow.

  Thus, in this embodiment, a gas cluster having a desired valence is selected by applying a voltage of a predetermined frequency between the electrodes 21a, 22b and 23a and the electrodes 21b, 22a and 23b. It is.

(Gas cluster deflection)
Next, the deflection of the ionized gas cluster will be described.

In particular,
θ _l = ωl / v ₀ (1)
In this case, θ _l and the deflection angle of the gas cluster will be described. Is the angular frequency of the voltage applied from the power supply 25, and the frequency f of the applied voltage is
f = ω / 2π (2)
It becomes.

Further, l is the length of the deflection system, that is, the length of the electrode, and is the sum of the lengths of the respective electrodes in the direction along the traveling direction of the gas cluster. V ₀ is the velocity of the gas cluster.

FIGS. 3 to 5 show the relationship between θ ₁ and the deflection angle of the gas cluster when the electric field application unit is one set, two sets, and three sets. Here, l is 0.1 m, the cluster size of the gas cluster is 1000 atoms / cluster, and the gas cluster is accelerated at 10 kV. Moreover, the atom which comprises a gas cluster is argon.

FIG. 3 shows the relationship between θ _l and the deflection angle of the gas cluster when the electric field applying unit is one set, that is, one set of electrodes. As shown in the figure, the deflection angles of the monovalent, divalent, and trivalent gas clusters are different. However, in the case of a single electric field application unit, the θ _l width in which the deflection angle of the gas cluster at each valence is stable is narrow, and even if the applied frequency is changed, the deflection angle is utilized to make the monovalent, bivalent It is difficult to completely separate trivalent gas clusters.

Next, FIG. 4 shows the relationship between θ _l and the deflection angle of the gas cluster when there are two sets of electric field application units, that is, two sets of electrodes. The two sets of electric field applying units are applied with voltages having opposite phases with a phase difference of 180 ° by a power source or the like. In the case where there are two sets of electric field application parts, there is a θ _l width in which the deflection angle of the gas cluster at each valence is stable, but each is a non-overlapping region. It is difficult to separate monovalent, divalent and trivalent gas clusters for practical use.

When θ _l is around 12 to 13, that is, a frequency of about 130 to 140 kHz, the deflection angle of the monovalent gas cluster is substantially 0, but the bivalent and trivalent gas cluster has a stable deflection angle. There is a region with little difference from monovalent. Thus, in the case where there are two sets of electric field application units, the decomposition performance for each valence of the ionized cluster is improved as compared with the case where there is one set of electric field application units, but it is difficult to use practically.

Next, FIG. 5 shows the relationship between θ _l and the deflection angle of the gas cluster when the electric field application section has three sets, that is, three sets of electrodes. This configuration is a configuration in the gas cluster selection unit 14 in the present embodiment, and so-called reverse phase voltages whose phases are mutually different by 180 ° are applied to electric field application units adjacent to each other by a power source or the like. . When there are three sets of electric field applying portions, there is a region where the θ _l width where the deflection angle of the gas cluster at each valence is stable is wide and each overlaps.

For example, when θ _l is around 16, that is, a frequency of about 170 kHz, the deflection angle of the monovalent gas cluster is substantially 0, but the bivalent and trivalent gas clusters are deflected, so Gas clusters can be separated using the deflection angle. The deflection angle of the bivalent and trivalent gas clusters is relatively large. In addition, the θ _l width is wide and it is possible to almost completely separate monovalent gas clusters. Thus, in the case where there are three sets of electric field application units, the decomposition performance for each valence of the ionized cluster is significantly improved in the case of one set of electric field application units than in the case of two sets, and practicality is increased. .

As described above, in the present embodiment, the power source 25 applies a voltage having a frequency such that θ _l is around 16, thereby causing the monovalent gas cluster to travel straight and deflecting the divalent and trivalent gas clusters. Can be made. Accordingly, the divalent and trivalent gas clusters that allow only the particles in the straight direction to pass through the slit 24 and are deflected can shield the slit 24. Therefore, only monovalent gas clusters can be selected and obtained.

  In this embodiment, the case of selecting a monovalent gas cluster has been described. However, by changing the frequency of the applied voltage in the power supply 25, a divalent gas cluster or a trivalent gas cluster is used depending on the application. It is also possible to sort gas clusters.

[Second Embodiment]
Next, a second embodiment will be described. The present embodiment has three sets of electric field applying units as in the first embodiment. In the present embodiment, the charged particle sorting apparatus is capable of sorting only monovalent ionized gas clusters.

  The cluster selection part in this Embodiment is demonstrated based on FIG.

  The cluster selection unit in the present embodiment has three sets of electric field application units 31, 32 and 33, a slit 34 and a power supply 35.

  The electric field applying unit 31 includes electrodes 31a and 31b, and generates an electric field by applying a voltage between the electrode 31a and the electrode 31b. The electric field applying unit 32 includes electrodes 32a and 32b, and generates an electric field by applying a voltage between the electrode 32a and the electrode 32b. The electric field application unit 33 includes electrodes 33a and 33b, and generates an electric field by applying a voltage between the electrodes 33a and 33b.

  The voltage is applied by the power source 35, and an AC voltage is applied to each electrode. The electrodes 31a, 32b and 33a are electrically connected, and the electrodes 31b, 32a and 33b are electrically connected. With respect to the electrodes 31a, 32b and 33a, so-called reverse phase voltages whose phases are inverted by 180 ° are applied to the electrodes 31b, 32a and 33b. The frequency and voltage value of the applied voltage can be adjusted by the power source 35.

  Further, the slit 34 has an opening 34a through which particles deflected at a predetermined deflection angle among the particles that have passed through the three sets of electric field applying units 31, 32, and 33 can pass. Particles that are not deflected at a predetermined deflection angle in the pair of electric field application units 31, 32, and 33 are blocked because they cannot pass through the opening 34 a of the slit 34. Therefore, the cluster sorting unit can sort only gas clusters deflected at a predetermined deflection angle.

That is, in the present embodiment, as shown in FIG. 5, by applying a voltage having a frequency such that θ ₁ is about 8 by the power source 35, the monovalent gas cluster is deflected at a large angle, 2 The trivalent gas cluster can be prevented from being deflected as much as possible. As a result, the slit 34 is disposed at a position where only the particles deflected at a predetermined angle can pass, and the monovalent gas cluster having a large deflection angle indicated by the solid arrow passes through the slit 34. In addition, the divalent and trivalent gas clusters having a small deflection angle indicated by the broken-line arrows can be shielded without passing through the slit 34. Thereby, only monovalent gas clusters can be selected. Further, in the present embodiment, since all particles traveling straight cannot pass through the slit 34, neutral particles that are not ionized can also be blocked by the slit 34. Thereby, mixing of neutral particles can be prevented, and only ionized monovalent gas clusters that do not contain neutral particles can be obtained.

  In this embodiment, the case of selecting a monovalent gas cluster has been described. However, by changing the frequency of the voltage to be applied in the power source 35, the divalent gas cluster or the trivalent gas cluster is selected according to the application. It is also possible to sort gas clusters.

  The contents other than the above in the present embodiment are the same as those in the first embodiment, and the charged particles shown in the first embodiment are obtained by using the charged particle sorting apparatus of the present embodiment. A charged particle irradiation apparatus similar to the irradiation apparatus can be obtained.

[Third Embodiment]
Next, a third embodiment will be described. The present embodiment has four sets of electric field application units. In the present embodiment, the charged particle sorting apparatus is capable of sorting only monovalent ionized gas clusters.

  The cluster selection part in this Embodiment is demonstrated based on FIG. The cluster selection unit in the present embodiment has four sets of electric field application units 41, 42, 43 and 44, a slit 45 and a power supply 46.

  The electric field applying unit 41 includes electrodes 41a and 41b, and generates an electric field by applying a voltage between the electrode 41a and the electrode 41b. The electric field applying unit 42 includes electrodes 42a and 42b, and generates an electric field by applying a voltage between the electrode 42a and the electrode 42b. The electric field applying unit 43 includes electrodes 43a and 43b, and generates an electric field by applying a voltage between the electrode 43a and the electrode 43b. The electric field applying unit 44 includes electrodes 44a and 44b, and generates an electric field by applying a voltage between the electrode 44a and the electrode 44b.

  The voltage is applied by a power source 46, and an AC voltage is applied to each electrode. The electrodes 41a, 42b, 43a and 44b are electrically connected, and the electrodes 41b, 42a, 43b and 44a are electrically connected. In contrast to the electrodes 41a, 42b, 43a, and 44b, a so-called reverse phase voltage whose phase is inverted by 180 ° is applied to the electrodes 41b, 42a, 43b, and 44a. The frequency and voltage value of the applied voltage can be adjusted by the power supply 46.

FIG. 8 shows the relationship between θ ₁ and the deflection angle of the gas cluster when the electric field application unit has four sets. Here, l is 0.1 m, the cluster size of the gas cluster is 1000 atoms / cluster, and the gas cluster is accelerated at 10 kV. Moreover, the atom which comprises a gas cluster is argon. This configuration is a configuration in the gas cluster selection unit in the present embodiment, and voltages having opposite phases are applied to the electric field application units adjacent to each other by a power source or the like.

In the case where there are four sets of electric field applying portions, when θ _l is around 18.5, that is, at a frequency of about 200 kHz, the deflection angle of the monovalent gas cluster is substantially 0, and the divalent and trivalent gas clusters are Since they are deflected, monovalent gas clusters can be separated using the deflection angle. Thus, in the case where there are four sets of electric field application units, the decomposition performance for each valence of the ionized cluster is improved compared to the case where there are three sets of electric field application units.

The present embodiment is based on the above result, and by applying a voltage having a frequency such that θ _l is around 18.5 by the power supply 45, the monovalent gas cluster travels straight, A trivalent gas cluster is deflected.

  The slit 45 has an opening 45a through which particles traveling in the straight direction among the particles that have passed through the four sets of electric field application units 41, 42, 43, and 44 can pass. Particles deflected in the portions 41, 42, 43 and 44 are blocked because they cannot pass through the opening 45 a of the slit 45. As a result, only the particles in the straight direction as indicated by the solid arrows pass through the slit 45, and the deflected divalent and trivalent gas clusters as indicated by the dashed arrows can be shielded. Therefore, only monovalent gas clusters can be selected and obtained.

  In the present embodiment, the case of selecting a monovalent gas cluster has been described. However, by changing the frequency of the voltage to be applied in the power supply 46, a divalent gas cluster or a trivalent gas cluster is used depending on the application. It is also possible to sort gas clusters.

  The contents other than the above in the present embodiment are the same as those in the first embodiment, and the charged particles shown in the first embodiment are obtained by using the charged particle sorting apparatus of the present embodiment. A charged particle irradiation apparatus similar to the irradiation apparatus can be obtained.

[Fourth Embodiment]
Next, a fourth embodiment will be described. The present embodiment has four sets of electric field application units as in the third embodiment. In the present embodiment, the charged particle sorting apparatus is capable of sorting only monovalent ionized gas clusters.

  The cluster selection part in this Embodiment is demonstrated based on FIG. The cluster selection unit in the present embodiment has four sets of electric field application units 51, 52, 53 and 54, a slit 55 and a power supply 56.

  The electric field applying unit 51 includes electrodes 51a and 51b, and generates an electric field by applying a voltage between the electrode 51a and the electrode 51b. The electric field application unit 52 includes electrodes 52a and 52b, and generates an electric field by applying a voltage between the electrodes 52a and 52b. The electric field applying unit 53 includes electrodes 53a and 53b, and generates an electric field by applying a voltage between the electrode 53a and the electrode 53b. The electric field applying unit 54 includes electrodes 54a and 54b, and generates an electric field by applying a voltage between the electrode 54a and the electrode 54b.

  The voltage is applied by a power source 56, and an AC voltage is applied to each electrode. The electrodes 51a, 52b, 53a and 54b are electrically connected, and the electrodes 51b, 52a, 53b and 54a are electrically connected. In contrast to the electrodes 51a, 52b, 53a and 54b, so-called reverse phase voltages whose phases are inverted by 180 ° are applied to the electrodes 51b, 52a, 53b and 54a. The frequency and voltage value of the applied voltage can be adjusted by the power source 56.

  The slit 55 has an opening 55a through which particles deflected at a predetermined deflection angle among the particles that have passed through the four sets of electric field applying portions 51, 52, 53, and 54 can pass. Particles that are not deflected at a predetermined deflection angle in the four sets of electric field application units 51, 52, 53, and 54 cannot pass through the opening 55a of the slit 55 and are blocked. Therefore, the cluster sorting unit can sort only gas clusters deflected at a predetermined deflection angle.

In other words, in the present embodiment, as shown in FIG. 8, a monovalent gas cluster is deflected at a large angle by applying a voltage with a frequency such that θ ₁ is around 11.5 by a power source 56. In this configuration, the bivalent and trivalent gas clusters are prevented from being deflected as much as possible. As a result, the slit 55 is arranged at a position where only the particles deflected at a predetermined angle can pass, and the monovalent gas cluster having a large deflection angle indicated by the solid line arrow passes through the slit 55. Thus, the divalent and trivalent gas clusters having a small deflection angle indicated by the broken-line arrows can be shielded without passing through the slit 55. Thereby, only a monovalent gas cluster can be selected and obtained. Further, in the present embodiment, since all particles traveling straight cannot pass through the slit 55, neutral particles that are not ionized can also be blocked by the slit 55. Thereby, mixing of neutral particles can be prevented, and only an ionized monovalent gas cluster containing no neutral particles can be obtained.

  In this embodiment, the case of selecting a monovalent gas cluster has been described. However, by changing the frequency of the applied voltage in the power source 56, a divalent gas cluster or a trivalent gas cluster is used depending on the application. It is also possible to sort gas clusters.

  Further, the contents other than the above in the present embodiment are the same as those in the first or third embodiment, and are shown in the first embodiment by using the charged particle sorting apparatus of the present embodiment. A charged particle irradiation device similar to the charged particle irradiation device to be obtained can be obtained.

  As described above, by providing three or more electric field application units, ionized gas clusters can be efficiently sorted for each valence. Moreover, the decomposition performance for every valence can be improved about the ionized gas cluster by increasing the number of electric field application parts.

[Fifth Embodiment]
Next, a fifth embodiment will be described. The present embodiment is a charged particle sorting apparatus having a configuration in which a DC bias power source is further added to a power source. The cluster selection part in this Embodiment is demonstrated based on FIG.

  The cluster selection unit in the present embodiment has a set of electric field application unit 61, slit 65, AC power supply 66 and DC power supply 67.

  The electric field application unit 61 includes electrodes 61a and 61b, and generates an electric field by applying a voltage between the electrodes 61a and 61b.

  The voltage is applied by an AC power source 66 and a DC power source 67, and an AC voltage biased by the DC power source 67 is applied to each electrode. A so-called reverse phase voltage whose phase is inverted by 180 ° is applied to the electrode 61b with respect to the electrode 61a. The frequency and voltage value of the applied voltage can be adjusted by the AC power supply 66 and the DC power supply 67.

  The slit 65 has an opening 65a through which particles deflected at a predetermined deflection angle among particles that have passed through the set of electric field application units 61 can pass. Particles that are not deflected at a predetermined deflection angle in the portion 61 are blocked because they cannot pass through the opening 65 a of the slit 65. Therefore, the cluster sorting unit can sort only gas clusters deflected at a predetermined deflection angle.

In other words, in the present embodiment, as shown in FIG. 3, a voltage having a frequency at which θ _l is around 6.3, that is, about 70 kHz is applied by an AC power source 66, and a predetermined bias voltage is applied to the DC power source 67. By applying, the monovalent gas cluster can be deflected at a desired angle, and neutral particles that are not ionized can be blocked by the slit 65. Thereby, mixing of neutral particles can be prevented, and only ionized monovalent gas clusters that do not contain neutral particles can be obtained.

  In this embodiment, the case of selecting a monovalent gas cluster has been described. However, in the AC power source 66 and the DC power source 67, the frequency of the voltage to be applied is changed to change the divalent gas cluster according to the application. Alternatively, trivalent gas clusters can be selected.

  The contents other than the above in the present embodiment are the same as those in the first embodiment, and the charge shown in the first embodiment is obtained by using the charged particle sorting apparatus of the present embodiment. A charged particle irradiation device similar to the particle irradiation device can be obtained.

[Sixth Embodiment]
Next, a sixth embodiment will be described. The present embodiment is a charged particle sorting apparatus having a configuration in which a DC bias power source is further added to a power source. The cluster selection part in this Embodiment is demonstrated based on FIG.

  The cluster selection unit in the present embodiment includes two sets of electric field application units 71 and 73, a slit 75, an AC power source 76, and a DC power source 77.

  The electric field applying unit 71 includes electrodes 71a and 71b, and generates an electric field by applying a voltage between the electrode 71a and the electrode 71b. The electric field applying unit 72 includes electrodes 72a and 72b, and generates an electric field by applying a voltage between the electrodes 72a and 72b.

  The voltage is applied by an AC power source 76 and a DC power source 77, and an AC voltage biased by the DC power source 77 is applied to each electrode. The electrodes 71a and 72b are electrically connected, and the electrodes 71b and 72a are electrically connected. In contrast to the electrodes 71a and 72b, a so-called reverse phase voltage whose phase is inverted by 180 ° is applied to the electrodes 71b and 72a. The frequency and voltage value of the applied voltage can be adjusted by the AC power supply 76 and the DC power supply 77.

  The slit 75 has an opening 75a through which particles deflected at a predetermined deflection angle among the particles that have passed through the two sets of electric field applying units 71 and 72 can pass. Particles that are not deflected at a predetermined deflection angle in the electric field applying units 71 and 72 are blocked because they cannot pass through the opening 75a of the slit 75. Therefore, the cluster sorting unit can sort only gas clusters deflected at a predetermined deflection angle.

In other words, in the present embodiment, as shown in FIG. 4, a voltage having a frequency at which θ ₁ is around 12 to 13, that is, about 130 to 140 kHz is applied by the AC power source 76, and a predetermined bias is applied to the DC power source 87. By applying a voltage, the monovalent gas cluster can be deflected at a desired angle, and neutral particles that are not ionized can be blocked by the slit 75. Thereby, mixing of neutral particles can be prevented, and only ionized monovalent gas clusters that do not contain neutral particles can be obtained.

  In the present embodiment, the case of selecting a monovalent gas cluster has been described. However, in the AC power source 76 and the DC power source 77, the frequency of the voltage to be applied is changed to change the divalent gas cluster according to the application. Alternatively, trivalent gas clusters can be selected.

  The contents other than the above in the present embodiment are the same as those in the first embodiment, and the charge shown in the first embodiment is obtained by using the charged particle sorting apparatus of the present embodiment. A charged particle irradiation device similar to the particle irradiation device can be obtained.

[Seventh Embodiment]
Next, a seventh embodiment will be described. The present embodiment is a charged particle sorting apparatus having a configuration in which a DC bias power source is further added to a power source. The cluster selection part in this Embodiment is demonstrated based on FIG.

  The cluster selection unit in the present embodiment has three sets of electric field application units 81, 82 and 83, a slit 85, an AC power source 86 and a DC power source 87.

  The electric field applying unit 81 includes electrodes 81a and 81b, and generates an electric field by applying a voltage between the electrode 81a and the electrode 81b. The electric field application unit 82 includes electrodes 82a and 82b, and generates an electric field by applying a voltage between the electrode 82a and the electrode 82b. The electric field applying unit 83 includes electrodes 83a and 83b, and generates an electric field by applying a voltage between the electrode 83a and the electrode 83b.

  The voltage is applied by an AC power source 86 and a DC power source 87, and an AC voltage biased by the DC power source 87 is applied to each electrode. The electrodes 81a, 82b and 83a are electrically connected, and the electrodes 81b, 82a and 83b are electrically connected. In contrast to the electrodes 81a, 82b, and 83a, a so-called reverse phase voltage whose phase is inverted by 180 ° is applied to the electrodes 81b, 82a, and 83b. The frequency and voltage value of the applied voltage can be adjusted by the AC power supply 86 and the DC power supply 87.

  The slit 85 has an opening 85a through which particles deflected at a predetermined deflection angle among the particles that have passed through the three sets of electric field applying portions 81, 82, and 83 can pass. Particles that are not deflected at a predetermined deflection angle in the pair of electric field application units 81, 82, and 83 are blocked because they cannot pass through the opening 85 a of the slit 85. Therefore, the cluster sorting unit can sort only gas clusters deflected at a predetermined deflection angle.

That is, in the present embodiment, as shown in FIG. 5, a voltage having a frequency at which θ ₁ is around 16 or about 170 kHz is applied by an AC power source 86 and a predetermined bias voltage is applied to the DC power source 87. Thus, the monovalent gas cluster can be deflected at a desired angle, and neutral particles that are not ionized can be blocked by the slit 85. Thereby, mixing of neutral particles can be prevented, and only ionized monovalent gas clusters that do not contain neutral particles can be obtained.

  In the present embodiment, the case where the monovalent gas cluster is selected has been described. However, in the AC power supply 86 and the DC power supply 87, the frequency of the applied voltage is changed to change the divalent gas cluster according to the application. Alternatively, trivalent gas clusters can be selected.

  The contents other than the above in the present embodiment are the same as those in the first embodiment, and the charge shown in the first embodiment is obtained by using the charged particle sorting apparatus of the present embodiment. A charged particle irradiation device similar to the particle irradiation device can be obtained.

[Eighth Embodiment]
Next, an eighth embodiment will be described. The present embodiment is a charged particle sorting apparatus having a configuration in which a DC bias power source is further added to a power source. The cluster selection part in this Embodiment is demonstrated based on FIG.

  The cluster selection unit in the present embodiment includes four sets of electric field application units 91, 92, 93, and 94, a slit 95, an AC power source 96, and a DC power source 97.

  The electric field applying unit 91 includes electrodes 91a and 91b, and generates an electric field by applying a voltage between the electrode 91a and the electrode 91b. The electric field applying unit 92 includes electrodes 92a and 92b, and generates an electric field by applying a voltage between the electrodes 92a and 92b. The electric field application unit 93 includes electrodes 93a and 93b, and generates an electric field by applying a voltage between the electrodes 93a and 93b. The electric field applying unit 94 includes electrodes 94a and 94b, and generates an electric field by applying a voltage between the electrode 94a and the electrode 94b.

  The voltage is applied by an AC power source 96 and a DC power source 97, and an AC voltage biased by the DC power source 97 is applied to each electrode. The electrodes 91a, 92b, 93a and 94b are electrically connected, and the electrodes 91b, 92a, 93b and 94a are electrically connected. In contrast to the electrodes 91a, 92b, 93a, and 94b, a so-called reverse phase voltage whose phase is inverted by 180 ° is applied to the electrodes 91b, 92a, 93b, and 94a. The frequency and voltage value of the applied voltage can be adjusted by the AC power supply 96 and the DC power supply 97.

  The slit 95 has an opening 85a through which particles deflected at a predetermined deflection angle among the particles that have passed through the four sets of electric field applying portions 91, 92, 93, and 94 can pass. Particles that are not deflected at a predetermined deflection angle in the four sets of electric field applying units 91, 92, 93, and 94 are blocked because they cannot pass through the opening 95 a of the slit 95. Therefore, the cluster sorting unit can sort only gas clusters deflected at a predetermined deflection angle.

That is, in the present embodiment, as shown in FIG. 8, a voltage having a frequency at which θ ₁ is around 18.5, that is, about 200 kHz is applied by an AC power source 96, and a predetermined bias voltage is applied to the DC power source 97. By applying, the monovalent gas cluster can be deflected at a desired angle, and neutral particles that are not ionized can be blocked by the slit 95. Thereby, mixing of neutral particles can be prevented, and only ionized monovalent gas clusters that do not contain neutral particles can be obtained.

  In the present embodiment, the case of selecting a monovalent gas cluster has been described. However, in the AC power source 96 and the DC power source 97, the frequency of the voltage to be applied is changed to change the divalent gas cluster according to the application. Alternatively, trivalent gas clusters can be selected.

  The contents other than the above in the present embodiment are the same as those in the first embodiment, and the charge shown in the first embodiment is obtained by using the charged particle sorting apparatus of the present embodiment. A charged particle irradiation device similar to the particle irradiation device can be obtained.

  As mentioned above, although the form which concerns on implementation of this invention was demonstrated, the said content does not limit the content of invention.

DESCRIPTION OF SYMBOLS 11 Nozzle part 12 Ionization electrode 13 Acceleration electrode 14 Cluster selection part 21 Electric field application part 21a Electrode 21b Electrode 22 Electric field application part 22a Electrode 22b Electrode 23 Electric field application part 23a Electrode 23b Electrode 24 Slit 25 Power supply

Claims (6)

In a charged particle sorting device for sorting ionized gas clusters,
Three or more electric field application units for applying electric fields arranged in the traveling direction of the gas cluster;
A slit for selecting the gas cluster,
The electric field application unit is composed of two electrodes, and deflects ionized gas clusters by applying an alternating voltage to the electrodes,
In the adjacent electric field application unit, alternating voltages of different phases are applied,
The slit has an opening that passes through the gas cluster deflected by the electric field application unit,
The charged particle sorting apparatus, wherein the AC voltage is a frequency at which only the gas cluster having a predetermined valence passes through the opening of the slit in the gas cluster having the same number of atoms constituting the gas cluster. . In a charged particle sorting device for sorting ionized gas clusters,
An electric field applying unit for applying an electric field arranged in the traveling direction of the gas cluster;
A slit for selecting the gas cluster,
The electric field applying unit includes two electrodes, the electric field applying unit includes an AC electric field applying unit and a DC electric field applying unit, and a DC voltage generated in the DC electric field applying unit is applied to the electrode. By applying a voltage in which an alternating voltage generated in the alternating electric field application unit is superimposed on the ionized gas cluster,
In the adjacent electric field application unit, alternating voltages of different phases are applied,
The slit has an opening that passes through the gas cluster deflected by the electric field application unit,
The charged particle sorting apparatus, wherein the AC voltage is a frequency at which only the gas cluster having a predetermined valence passes through the opening of the slit in the gas cluster having the same number of atoms constituting the gas cluster. .   The charged particle sorting apparatus according to claim 1, wherein the predetermined valence is monovalent.   4. The charged particle sorting apparatus according to claim 1, wherein voltages at phases different from each other by 180 ° are applied to the electrodes in the adjacent electric field applying units. 5.   The charged particle sorting apparatus according to claim 1, wherein the number of the electric field applying units is three or four. A gas cluster generation unit for generating a gas cluster;
An ionization electrode for ionizing the gas cluster;
An acceleration electrode for accelerating the ionized gas cluster;
The charged particle sorting device according to any one of claims 1 to 5, for sorting ionized gas clusters having a predetermined valence in the accelerated ionized gas clusters,
A charged particle irradiation apparatus characterized by irradiating a member with ionized gas clusters ejected from the charged particle sorting apparatus.

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