JP2011164000A5 - - Google Patents

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Publication number
JP2011164000A5
JP2011164000A5 JP2010028588A JP2010028588A JP2011164000A5 JP 2011164000 A5 JP2011164000 A5 JP 2011164000A5 JP 2010028588 A JP2010028588 A JP 2010028588A JP 2010028588 A JP2010028588 A JP 2010028588A JP 2011164000 A5 JP2011164000 A5 JP 2011164000A5
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JP
Japan
Prior art keywords
wave signal
sine wave
circuit
signal
outputs
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JP2010028588A
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Japanese (ja)
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JP2011164000A (en
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Priority to JP2010028588A priority Critical patent/JP2011164000A/en
Priority claimed from JP2010028588A external-priority patent/JP2011164000A/en
Publication of JP2011164000A publication Critical patent/JP2011164000A/en
Publication of JP2011164000A5 publication Critical patent/JP2011164000A5/ja
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Description

しかしながら、従来のCIメーター法、π回路位相法、特許文献1に記載のCI測定方法は、等価定数の測定精度は良好であるものの、等価定数の測定に調整時間を要し、加速度センサー等の慣性センサーに用いられるセンサー素子の等価抵抗値を高速で測定するには、不向きであるという問題があった。
本発明は上記問題を解決するためになされたもので、センサー素子の等価抵抗値を容易に高速測定するセンサー回路を提供することにある。
However, although the conventional CI meter method, the π circuit phase method, and the CI measurement method described in Patent Document 1 have good measurement accuracy of the equivalent constant, adjustment time is required for the measurement of the equivalent constant. the equivalent resistance of Rousset Nsa element used in an inertial sensor to measure at a high speed, there is a problem that it is unsuitable.
The present invention has been made to solve the above problems, and it is an object of the present invention to provide a sensor circuit that easily measures the equivalent resistance value of a sensor element at high speed.

Claims (3)

検出すべき被測定対象の変化に応じて振幅の値が変化する正弦波の信号を出力するセンサー素子と、
前記センサー素子が出力した前記正弦波の信号が入力され、前記正弦波の信号に基づき矩形波の信号を出力する増幅回路と、
前記正弦波の信号又は前記正弦波の信号のレベルを調整した正弦波の信号と前記矩形波の信号とを同期検波する同期検波回路と、
前記同期検波回路から出力された信号を積分する積分回路と、
を備えていることを特徴とするセンサー回路。
A sensor element that outputs a sine wave signal whose amplitude value changes in accordance with a change in the measurement target to be detected;
The sine wave signal output from the sensor element is input, and an amplification circuit that outputs a rectangular wave signal based on the sine wave signal ;
A sine wave signal to adjust the level of the sine wave signal or said sinusoidal signal, and a signal of the rectangular wave, a synchronous detection circuit for synchronously detecting,
An integrating circuit for integrating the signal output from the synchronous detection circuit;
Sensor circuit, characterized in that the Bei Eteiru.
検出すべき被測定対象の変化に応じて振幅の値が変化する正弦波の信号を出力するセンサー素子と、
前記センサー素子が出力した前記正弦波の信号が入力され、前記正弦波の信号に基づき矩形波の信号を出力する増幅回路と、
前記正弦波の信号又は前記正弦波の信号のレベルを調整した正弦波の信号と前記矩形波の信号との差に基づく信号を出力する差動増幅回路と、
前記差動増幅回路の出力信号と前記矩形波の信号とを同期検波する同期検波回路と、前記同期検波回路から出力された信号を積分する積分回路と、
を備えていることを特徴とするセンサー回路。
A sensor element that outputs a sine wave signal whose amplitude value changes in accordance with a change in the measurement target to be detected;
The sine wave signal output from the sensor element is input, and an amplification circuit that outputs a rectangular wave signal based on the sine wave signal ;
A differential amplifier circuit that outputs a signal based on a difference between the sine wave signal or a sine wave signal in which a level of the sine wave signal is adjusted and the rectangular wave signal;
A synchronous detection circuit that synchronously detects the output signal of the differential amplifier circuit and the rectangular wave signal, an integration circuit that integrates the signal output from the synchronous detection circuit, and
Sensor circuit, characterized in that the Bei Eteiru.
前記積分回路は、抵抗と容量とを含むローパスフィルタを用いることを特徴とする請求項1又は2に記載のセンサー回路。 The sensor circuit according to claim 1, wherein the integration circuit uses a low-pass filter including a resistor and a capacitor.
JP2010028588A 2010-02-12 2010-02-12 Sensor circuit Withdrawn JP2011164000A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2010028588A JP2011164000A (en) 2010-02-12 2010-02-12 Sensor circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010028588A JP2011164000A (en) 2010-02-12 2010-02-12 Sensor circuit

Publications (2)

Publication Number Publication Date
JP2011164000A JP2011164000A (en) 2011-08-25
JP2011164000A5 true JP2011164000A5 (en) 2013-03-14

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ID=44594842

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010028588A Withdrawn JP2011164000A (en) 2010-02-12 2010-02-12 Sensor circuit

Country Status (1)

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JP (1) JP2011164000A (en)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2648966B2 (en) * 1989-06-30 1997-09-03 日本電波工業株式会社 Vacuum pressure gauge
JP3135867B2 (en) * 1997-06-09 2001-02-19 スワ電子株式会社 Method for measuring CI of crystal unit and crystal oscillation circuit
JP4610012B2 (en) * 2004-01-20 2011-01-12 セイコーエプソン株式会社 Physical quantity measuring device
JP2007057340A (en) * 2005-08-24 2007-03-08 Citizen Watch Co Ltd Oscillation circuit and angular velocity sensor
JP2008160510A (en) * 2006-12-25 2008-07-10 Epson Toyocom Corp Two-output type crystal oscillator

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