JP2011135719A - Piezoelectric oscillator, piezoelectric actuator, electronic device, and manufacturing method for the piezoelectric oscillator - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a piezoelectric oscillator having excellent oscillation characteristics, a piezoelectric actuator, an electronic device, and a manufacturing method for the piezoelectric oscillator. <P>SOLUTION: The piezoelectric oscillator 30 has piezoelectric elements 31, 32 and a reinforcing plate 33 on which the piezoelectric elements 31, 32 are laminated. The reinforcing plate 33 has a reinforcing-plate body 331 having the substantially same shape in a plane view as that of the piezoelectric elements 31, 32 and on which the piezoelectric elements 31, 32 are laminated and a fixing part 333 for fixing the reinforcing plate 33 at a prescribed position. The reinforcing-plate body 331 and the piezoelectric elements 31, 32 are formed so as to have the substantially rectangular shape in a plane view, and respectively have first side faces 311, 321, and 3311 and second side faces 312, 322, and 3312 along each long side, and third side faces 313, 323, and 3313 and fourth side faces 314, 324, and 3314 along each short side. The fixing part 333 protrudes to the outside from the piezoelectric elements 31, 32 only from the first side face 3311 while each of the second side faces 312, 322, and 3312 is aligned in a plane view. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to a piezoelectric vibrating body, a piezoelectric actuator including the piezoelectric vibrating body, an electronic device including the piezoelectric actuator, and a method of manufacturing the piezoelectric vibrating body.

Conventionally, a piezoelectric vibrator in which a piezoelectric element is laminated on a reinforcing plate which is a plate-like body such as stainless steel is known. In this piezoelectric vibrating body, in the longitudinal direction of the piezoelectric element, depending on the positions of the electrodes formed on the front and back surfaces of the piezoelectric element, the state of voltage application to the electrodes, and the shape and dimensions of the piezoelectric element and the reinforcing plate A longitudinal vibration (longitudinal primary vibration) that expands and contracts along and a bending vibration (bending secondary vibration) that bends in a direction orthogonal to the longitudinal vibration can be generated in the piezoelectric vibrator.
A piezoelectric vibrating body is known in which a fixing portion for fixing the piezoelectric vibrating body to a predetermined position is provided on such a reinforcing plate (see, for example, Patent Document 1).

  In the piezoelectric vibrating body described in Patent Document 1, when the reinforcing plate is viewed along the stacking direction of the piezoelectric elements, it protrudes from the approximate center of both side surfaces along the longitudinal direction of the reinforcing plate to the outside of the piezoelectric element. In addition, a fixing part is provided respectively. As a method for manufacturing such a piezoelectric vibrating body, Patent Document 1 includes a so-called side-by-side method. In this side-by-side system, the piezoelectric element and the reinforcing plate are connected to one of the side surfaces along the longitudinal direction of the piezoelectric element and the reinforcing plate and the side surface along the short direction, which is a direction orthogonal to the longitudinal direction in plan view. A plurality of positioning members are arranged along one of them. After positioning the piezoelectric element and the reinforcing plate with respect to each positioning member, the piezoelectric element is manufactured by pressurizing or heating the piezoelectric element and the reinforcing plate to cure the adhesive layer.

International Publication No. WO2004 / 043617

In recent years, in order to efficiently vibrate the piezoelectric vibrating body, a piezoelectric vibrating body in which the above-described fixing portion is provided only on one side surface has been proposed.
Here, as in the piezoelectric vibrator described in Patent Document 1 described above, in the case where the fixing portions are formed so as to protrude from both side surfaces of the piezoelectric vibrator, the piezoelectric portions are supported on both side surfaces supported by the respective fixing portions. The vibration of the vibrating body is suppressed. On the other hand, when the fixed part protrudes from one side surface (side surface along the long side in plan view) of the piezoelectric vibrating body, the side surface (long side) side opposite to the fixed portion is This vibration is not suppressed by the fixed portion, so that the piezoelectric vibrating body vibrates efficiently. Therefore, the driven body can be reliably driven.

  However, when the piezoelectric vibrating body is manufactured by the above-mentioned side-by-side method, the vibration characteristics of the piezoelectric vibrating body vary depending on the position of the piezoelectric elements and the side surfaces of the reinforcing plate that are aligned with each other. Specifically, when the dimensions of the piezoelectric element and the reinforcing plate do not match, the positions of the side surfaces positioned by the positioning member are the same in the piezoelectric element and the reinforcing plate, but the positions of the opposite side surfaces are piezoelectric. The element and the reinforcing plate do not match. As described above, when one of the piezoelectric element and the reinforcing plate protrudes from the other, the unbalance of each manufactured piezoelectric vibrator increases, and the vibration characteristics vary among the individual piezoelectric vibrators. Occurs. Due to such a problem, there has been a demand for a configuration of a piezoelectric vibrator that hardly causes variations in vibration characteristics and a method for manufacturing the piezoelectric vibrator.

  An object of the present invention is to provide a piezoelectric vibrator, a piezoelectric actuator, an electronic device, and a method for manufacturing the piezoelectric vibrator having good vibration characteristics.

  In order to achieve the above-described object, a piezoelectric vibrating body of the present invention includes a piezoelectric element and a reinforcing plate on which the piezoelectric element is laminated, and a piezoelectric element that vibrates in response to application of a driving voltage to the piezoelectric element. A vibrating body, wherein the reinforcing plate has substantially the same shape as the piezoelectric element in plan view, and includes a reinforcing plate body on which the piezoelectric element is laminated, and a fixing portion that fixes the reinforcing plate in a predetermined position. The reinforcing plate body and the piezoelectric element are formed in a substantially rectangular shape in plan view, and have a first side surface and a second side surface along each long side, and a third side surface and a fourth side surface along each short side. The fixing portion protrudes outward from the piezoelectric element only in a plan view from only the first side surface of the reinforcing plate body, and the second side surface of the reinforcing plate body and the second side surface of the piezoelectric element are aligned in a plan view. It is characterized by.

Here, the plan view means a state in which the reinforcing plate body and the piezoelectric elements are viewed along the stacking direction of the piezoelectric elements with respect to the reinforcing plate body.
In addition, the second side surface of the reinforcing plate body and the second side surface of the piezoelectric element are aligned in a plan view. This means that the amount of positional deviation on each of the two side surfaces is small, or that the planar view positions of both on the second side surface are the same. Although the second side surface of the reinforcing plate body and the second side surface of the piezoelectric element are aligned in plan view, some errors may occur if the second side surface positions are aligned. It is included in this invention even if it has shifted | deviated by.

  According to the present invention, the second side surface of the reinforcing plate body opposite to the first side surface where the fixing portion is located and the second side surface of the piezoelectric element corresponding to the second side surface are aligned in a plan view. Become. According to this, although the vibration of the reinforcing plate body on the first side surface side is somewhat suppressed by the fixing portion protruding from the first side surface, the vibration of the reinforcing plate body on the second side surface where the fixing portion is not formed. Is hardly suppressed. For this reason, on the second side surface side, vibration of a large amplitude is excited by the piezoelectric element, so that the vibration of the reinforcing plate body on the first side surface side is reduced and the vibration of the reinforcing plate body on the second side surface side is increased. .

  Here, when the planar view positions of the reinforcing plate main body and the piezoelectric elements stacked on the reinforcing plate main body are deviated, the vibration of the piezoelectric element due to the drive signal can change the vibration transmission state of vibrating the diaphragm. Of these, when the side surface on which the displacement of the plan view position is a long side surface where the fixing portion is located is compared with the long side surface where the fixing portion is not located, each side surface is compared. Assuming that the amount of shift at the same is the same, the influence on the vibration of the piezoelectric vibrating body is on the long side surface where the fixed part is located when the fixed part is not located on the long side surface. It becomes larger than the case.

  That is, the vibration in the vicinity of the long side where the fixing portion is located is suppressed by the fixing portion, so that the vibration energy is also reduced. As a result, the amount of deviation between the piezoelectric element and the reinforcing plate body contributes to the vibration energy. Get smaller. On the other hand, the vibration near the long side where the fixed part is not located is increased because the fixed part is not suppressed, and the vibration energy is also increased. For this reason, the degree to which the amount of deviation contributes to vibration energy also increases. Thus, a large change in vibration energy due to the deviation amount also causes a large change in the vibration of the reinforcing plate body.

  Therefore, in the present invention, there is no long side displacement that greatly affects the vibration of the reinforcing plate body, i.e., there is no positional displacement between the piezoelectric element and the reinforcing plate body on the long side surface where the fixing portion is not located. It is slightly decreased. According to this, the dispersion | variation in the vibration of each piezoelectric vibrating body can be suppressed. Therefore, when the piezoelectric vibrating body is mass-produced, variation in the vibration state of each manufactured piezoelectric vibrating body can be reduced, and the vibration state can be stabilized. As a result, the driven body driven by the piezoelectric vibrating body can be driven stably and reliably.

  In the piezoelectric vibrating body of the present invention, the reinforcing plate has a contact portion that contacts the driven body when the piezoelectric vibrating body vibrates and drives the driven body, and the contact portion is formed on the reinforcing plate main body. It is preferable that the third side surface of the reinforcing plate body and the third side surface of the piezoelectric element are provided on the third side surface in a plan view.

Here, the third side surface of the reinforcing plate main body and the third side surface of the piezoelectric element are aligned in a plan view. This means that the amount of positional deviation on each of the third side surfaces is small, or the planar view positions of both on the third side surface are the same.
According to the present invention, the third side surface of the reinforcing plate main body provided with the contact portion that contacts the driven body and the third side surface of the piezoelectric element are aligned in plan view. According to this, since the respective positions of the reinforcing plate main body and the piezoelectric element substantially coincide with each other on the third side surface, variation in the vibration state in the vicinity of the contact portion that drives the driven body is reduced in each piezoelectric vibrating body.
More specifically, in general, the vibration of the piezoelectric element due to the application of the drive voltage is transmitted to a portion of the reinforcing plate body where the piezoelectric element overlaps in plan view. For this reason, also on the third side surface side, the contact portion vibrates due to the portion where the piezoelectric element and the reinforcing plate main body overlap in a plan view. Therefore, since the respective positions of the reinforcing plate body and the piezoelectric element substantially coincide with each other on the third side surface, variation in the vibration state in the vicinity of the contact portion that drives the driven body is reduced in each piezoelectric vibrating body. . Therefore, according to the present invention, in addition to the fact that the second side surfaces are aligned, it is possible to further suppress variation in vibration characteristics among the individual piezoelectric vibrators to be manufactured, and to stabilize the driven body. It can be driven reliably.

  In the piezoelectric vibrating body of the present invention, the reinforcing plate protrudes outward from the piezoelectric element at an end portion of the third side surface close to the fixing portion and an end portion of the fourth side surface away from the fixing portion. Preferably, the contact portion is formed on the protrusion protruding from the third side surface.

Here, when protrusions are provided on the third side surface and the fourth side surface located on the short side, the protrusion portion close to the fixing portion is used as a contact portion that makes contact with the driven body. Compared with the case where the contact portion is formed on the protruding portion away from the distance, the variation in the operation range when the piezoelectric vibrating body is driven can be reduced. Therefore, the driven body can be driven stably. This is due to the following circumstances.
First, the reinforcing plate main body hardly vibrates in the vicinity of the connection portion with the fixing portion, and greatly vibrates in a portion away from the fixing portion. On the other hand, the shape of the protruding portion on which the contact portion to be brought into contact with the driven body is increased or decreased due to variations in processing, or the center of gravity of the protruding portion varies. Therefore, when the contact portion is formed on the protruding portion of the fourth side surface that is separated from the fixed portion (the distance between the contact portion and the fixed portion is long), it is not relatively separated from the fixed portion (the fixed contact portion and the fixed portion). Compared to the case where the protrusion is formed on the third side surface (which is short in distance from the portion), assuming that the size of the protrusion and the position of the center of gravity vary in the same state, the contact formed on the fourth side surface Since the vibration of the portion is large, the variation due to the above-described variation is large, and since the vibration of the contact portion formed on the third side surface is small, the variation due to the variation is small.
Therefore, the driven body can be stably driven by vibration with little variation due to the contact portion formed on the third side surface.
On the other hand, when the third side surface of the reinforcing plate main body where the protrusion is located and the third side surface of the piezoelectric element are not aligned in plan view, the side surface of the piezoelectric element is driven during vibration of the piezoelectric vibrating body. There is a possibility of touching the body. On the other hand, in the present invention, since the third side surfaces are aligned in a plan view, the piezoelectric element can be prevented from contacting the driven body. Therefore, the driven body can be reliably driven.

In the piezoelectric vibrating body of the present invention, it is preferable that the dimension of the piezoelectric element in the direction along the short side is larger than the dimension of the reinforcing plate body in the direction.
Here, in order to align the second side surfaces of the piezoelectric element and the reinforcing plate, for example, it is conceivable to bring the second side surfaces into contact with a flat positioning member. In such a case, it is conceivable to press the piezoelectric element toward the positioning member. However, when a pair of piezoelectric elements are stacked so as to sandwich the reinforcing plate body, if the dimension of the reinforcing plate body in the same direction is larger than the dimension of each piezoelectric element along the short side, It becomes necessary to press individually, and the positioning process of each piezoelectric element becomes complicated.
On the other hand, according to the present invention, the size of the piezoelectric element in the direction along the short side is larger than the size of the reinforcing plate body in the same direction, so that the piezoelectric elements sandwiching the reinforcing plate can be simultaneously pressed and positioned. . Therefore, the positioning process of the reinforcing plate body and the piezoelectric element can be simplified.

Also, by pressing each piezoelectric element with one pressing member, it is easy to press each piezoelectric element, and it is not necessary to press the piezoelectric element avoiding the reinforcing plate body, so that the piezoelectric element floats from the reinforcing plate body. It is possible to prevent the piezoelectric element from being chipped at the pressing stage. Accordingly, it is possible to further suppress variation in vibration characteristics of the manufactured piezoelectric vibrator, and to improve the yield of the piezoelectric vibrator.
Furthermore, when the dimension of the piezoelectric element in the direction along the short side is smaller than the dimension of the reinforcing plate body, the contact area becomes small, and the vibration of the piezoelectric element may not be sufficiently transmitted to the reinforcing plate body. . On the other hand, in the present invention, since the dimension of the piezoelectric element in the same direction is larger than the dimension of the reinforcing plate body, the contact area can be increased and the vibration of the piezoelectric element can be efficiently transmitted to the reinforcing plate. .

Alternatively, in the piezoelectric vibrating body of the present invention, it is preferable that the dimension of the piezoelectric element in the direction along the short side is smaller than the dimension of the reinforcing plate body in the direction.
Here, when the dimension of the piezoelectric element in the direction along the short side is larger than the dimension of the reinforcing plate body, when the piezoelectric vibrating body is incorporated into an electronic device or the like, pressure is applied to the protruding portion of the piezoelectric element from the reinforcing plate body. If an impact is applied, the protruding portion may be lost.
On the other hand, according to the present invention, since the piezoelectric element does not protrude from the reinforcing plate body in the direction along the short side, it is possible to suppress the occurrence of chipping in the piezoelectric element after manufacture, and the reliability of the piezoelectric vibrator Can be improved.

In the piezoelectric vibrating body of the present invention, it is preferable that a concave portion that is recessed from the first side surface of the piezoelectric element to the inside of the reinforcing plate body is formed on the first side surface of the reinforcing plate body.
According to the present invention, when a pair of piezoelectric elements are provided so as to sandwich the reinforcing plate body, the piezoelectric elements are pressed by a single pressing member by pressing the pair of piezoelectric elements at the position where the recess is formed. These piezoelectric elements can be positioned at a time with respect to the reinforcing plate body. At this time, even if the dimensional difference between each piezoelectric element and the reinforcing plate body varies, in the recess, the first side surface of each piezoelectric element reliably protrudes from the first side surface of the reinforcing plate body. Each piezoelectric element can be reliably pressed. Therefore, the positioning process between the piezoelectric element and the reinforcing plate body can be simplified.
Even when an adhesive is applied to the contact surface of the reinforcing plate body with the piezoelectric element, the adhesive is not applied to the recess. For this reason, even when the position corresponding to the concave portion is pressed by the pressing member and the positions of the piezoelectric element and the reinforcing plate are aligned, the adhesive does not leak to the side surface of the piezoelectric vibrator, and the adhesive is pressed. It does not adhere to the member. Therefore, it is possible to prevent unnecessary adhesive from adhering to the side surface of the manufactured piezoelectric vibrator.

According to another aspect of the present invention, there is provided a piezoelectric actuator comprising the above-described piezoelectric vibrating body and a driven body driven by the vibration of the piezoelectric vibrating body.
According to the present invention, the same effects as those of the piezoelectric vibrator described above can be obtained, so that it is possible to configure and manufacture a piezoelectric actuator that can suppress variations in vibration characteristics and have high driving reliability.

In addition, an electronic apparatus according to the present invention includes the above-described piezoelectric actuator.
Examples of such electronic devices include watches such as watches and cameras.
According to the present invention, it is possible to achieve the same effect as the above-described piezoelectric actuator, and thereby it is possible to configure and manufacture an electronic device with high operation reliability.

  The method for manufacturing a piezoelectric vibrating body according to the present invention includes a piezoelectric element and a reinforcing plate on which the piezoelectric element is laminated, and a method for manufacturing a piezoelectric vibrating body that vibrates in response to application of a driving voltage to the piezoelectric element. The reinforcing plate has substantially the same shape as the piezoelectric element in plan view, and includes a reinforcing plate body on which the piezoelectric element is stacked, and a fixing portion that fixes the reinforcing plate in a predetermined position. The reinforcing plate body and the piezoelectric element are formed in a substantially rectangular shape in plan view, and have a first side surface and a second side surface along each long side, and a third side surface and a fourth side surface along each short side, The fixing portion protrudes outward from the piezoelectric element only in a plan view from only the first side surface of the reinforcing plate body, and the method for manufacturing the piezoelectric vibrating body includes a first positioning member disposed outside the piezoelectric vibrating body, The second side surface of the reinforcing plate body and the second side surface of the piezoelectric element are respectively A positioning step for positioning the piezoelectric element and the reinforcing plate main body so that these second side surfaces are aligned in plan view, and a joining step for bonding the piezoelectric element and the reinforcing plate main body. It is characterized by having.

Here, as described above, the plan view means a state in which the reinforcing plate body and the piezoelectric elements are viewed along the stacking direction of the piezoelectric elements with respect to the reinforcing plate body.
In addition, the second side surface of the reinforcing plate body and the second side surface of the piezoelectric element are aligned in a plan view. In a plan view, the second side surface is second with respect to each shift amount on the first side surface side. This means that the amount of shift on the side surface side is small, or that the two side views on the second side surface side coincide with each other. The second side surface of the reinforcing plate body and the second side surface of the piezoelectric element are aligned in plan view. However, if these second side surfaces are manufactured to be aligned, there is some error. Any deviation is included in the present invention.

According to the present invention, the piezoelectric vibrating body having the above-described good vibration characteristics can be efficiently manufactured.
That is, the amount of deviation between the piezoelectric element and the reinforcing plate body on the long side that has a large influence on the vibration of the reinforcing plate body, that is, the amount of deviation between the piezoelectric element and the reinforcing plate body on the long side where the fixing portion is not located Therefore, when the piezoelectric vibrators are mass-produced, variation in the vibration state of each manufactured piezoelectric vibrator can be reduced, and the vibration state can be stabilized. As a result, the driven body driven by the piezoelectric vibrating body can be driven stably and reliably.

  In the method for manufacturing a piezoelectric vibrating body according to the aspect of the invention, the reinforcing plate has a contact portion that contacts the driven body when the piezoelectric vibrating body vibrates and drives the driven body, and the contact section includes the reinforcing member. The positioning step is provided on a third side surface of the plate main body, and the positioning step includes bringing the second side surfaces of the reinforcing plate main body and the piezoelectric element into contact with the first positioning member, and the reinforcing plate main body and the piezoelectric element. It is preferable to have a positioning procedure for positioning each of the third side surfaces of the element so as to contact the second positioning member.

  According to the present invention, each second side surface opposite to the fixed portion is aligned by the first positioning member, and each third side on the side where the contact portion that contacts the driven body is positioned by the second positioning member. Each side is aligned. According to this, since the two side surfaces of the piezoelectric vibrating body are aligned, it is possible to suppress variations in the vibration characteristics of each manufactured piezoelectric vibrating body and to suppress variations in the driving range of the contact portion. Can do. Further, since the third side surfaces are aligned, it is possible to prevent the piezoelectric element from coming into contact with the driven body. Therefore, the piezoelectric vibrating body can be appropriately vibrated, and the driven body can be reliably driven.

  In the piezoelectric vibrating body manufacturing method of the present invention, the positioning procedure is performed with respect to a corner opposite to the corner sandwiched between the second side surface and the third side surface with the center of the reinforcing plate body as the center. It is preferable that the piezoelectric element and the reinforcing plate main body are positioned so as to contact the first positioning member and the second positioning member while applying vibration.

Here, when the step of pressing the piezoelectric element and the reinforcing plate main body toward the first positioning member and the step of pressing the piezoelectric element and the reinforcing plate main body toward the second positioning member are performed individually, The manufacturing process of the piezoelectric vibrator is increased.
On the other hand, in the positioning procedure, the piezoelectric element and the reinforcing plate main body are pressed in one positioning procedure by pressing the piezoelectric element and the reinforcing plate main body toward the corner portion sandwiched between the second side surface and the third side surface. Can be positioned with respect to the first positioning member and the second positioning member. Therefore, the positioning procedure can be simplified.

Further, when the piezoelectric element and the reinforcing plate main body come into contact with the first positioning member and the second positioning member, due to the frictional resistance between the respective positioning members and the piezoelectric element and the reinforcing plate main body, There may be a case where the contact of each side surface is not properly performed.
On the other hand, in the present invention, the piezoelectric element and the reinforcing plate body are pressed against the first positioning member and the second positioning member while applying vibration to the piezoelectric element and the reinforcing plate body. Even if there is resistance between the reinforcing plate body and each positioning member, the piezoelectric element and the reinforcing plate body can be reliably brought into contact with each positioning member. Therefore, the piezoelectric element and the reinforcing plate can be appropriately positioned with respect to each positioning member.

In the piezoelectric vibrating body manufacturing method of the present invention, when positioning the piezoelectric element and the reinforcing plate main body in the positioning step, a pressing member that presses at least one of the piezoelectric element and the reinforcing plate main body, It is preferable to have an abutting portion that has elasticity and abuts against at least one of the piezoelectric element and the reinforcing plate body.
According to the present invention, since the dimensional difference between the piezoelectric element and the reinforcing plate body can be absorbed by the elastic contact portion, at least one of the piezoelectric element and the reinforcing plate body can be absorbed by one pressing member. It can be surely pressed.

In the method for manufacturing a piezoelectric vibrating body of the present invention, in the positioning step, the surface of the piezoelectric element opposite to the surface facing the reinforcing plate main body is sucked, and the piezoelectric element is attracted to the reinforcing plate main body. It is preferable to position.
Here, when the piezoelectric element and the reinforcing plate main body are fixed to each other, an adhesive layer is formed on the surface of the piezoelectric element and the reinforcing plate main body facing the other, and the adhesive layer is cured. Thus, a method of fixing (adhering) these piezoelectric elements and the reinforcing plate main body is common. In this case, an adhesive that forms the adhesive layer when the piezoelectric element and the reinforcing plate main body are pressed by the pressing member toward the positioning member and pressed along the stacking direction of the piezoelectric elements with respect to the reinforcing plate main body. May leak to the outside and adhere to the pressing member. When the adhesive adheres to the pressing member in this way, the pressing member is peeled off from the piezoelectric vibrator, and the adhesive needs to be removed from the pressing member, which complicates the manufacturing process of the piezoelectric vibrator. .

  On the other hand, in the present invention, the surface of the piezoelectric element opposite to the surface facing the reinforcing plate body is sucked to position the piezoelectric element with respect to the reinforcing plate body. According to this, even when the adhesive leaks from the side surface of the piezoelectric vibrating body, it is not necessary to use the pressing member, and therefore it is not necessary to remove the adhesive from the pressing member. Therefore, the manufacturing process of the piezoelectric vibrator can be simplified.

The top view which shows the timepiece which concerns on 1st Embodiment of this invention. The schematic diagram which shows the piezoelectric actuator and reduction gear train in the said embodiment. FIG. 3 is a schematic perspective view showing the piezoelectric vibrating body in the embodiment. FIG. 3 is a schematic perspective view showing the piezoelectric vibrating body in the embodiment. Sectional drawing which shows the piezoelectric vibrating body in the said embodiment. The top view which shows the position of the piezoelectric vibrating body and the positioning member in the said embodiment. The figure which shows the process of positioning the piezoelectric element and reinforcement board in the said embodiment. The figure which shows the press state of the piezoelectric element by the press member in the said embodiment. The figure which shows the deformation | transformation of the press member in the said embodiment. The figure which shows distribution of the vibration characteristic of the piezoelectric vibrating body in the said embodiment. The figure explaining the positioning process of the piezoelectric element which concerns on 2nd Embodiment of this invention, and a reinforcement board. The figure explaining the positioning process of the piezoelectric element which concerns on 3rd Embodiment of this invention, and a reinforcement board. The figure explaining the positioning process of the piezoelectric element which concerns on 4th Embodiment of this invention, and a reinforcement board. The figure explaining the positioning process of the piezoelectric element and reinforcement board in the said embodiment. The figure which shows the deformation | transformation of each said embodiment.

[First Embodiment]
Hereinafter, a first embodiment of the present invention will be described based on the drawings.
In the second embodiment, the third embodiment, and the fourth embodiment, which will be described later, the same reference numerals are given to the same constituent members and the same functions as the constituent members in the first embodiment described below. The description will be simplified or omitted.

[Schematic configuration of the watch]
FIG. 1 is a plan view showing a timepiece 10 according to the present embodiment.
An electronic timepiece (hereinafter sometimes abbreviated as “timepiece”) 10 as an electronic apparatus according to the present embodiment includes a movement 1 as a time measuring means, a dial 2 for displaying a normal time, an hour hand 3, a minute hand 4, and a second hand 5. In addition, a second chronograph hand 6 and a minute chronograph hand 7 are provided.
The hour hand 3, the minute hand 4 and the second hand 5 are similar to general analog quartz, and detailed illustration is omitted. However, a circuit board in which a crystal unit is incorporated, a stepping motor having a coil, a stator and a rotor, It is driven by a driving wheel train and a battery.
The second chronograph hand 6 is driven by a piezoelectric actuator 20 and a reduction gear train 50 described later, and the minute chronograph hand 7 is driven by a mechanism similar to that of the second chronograph hand 6 although not shown. .

[Configuration of piezoelectric actuator and reduction gear train]
FIG. 2 is a schematic diagram showing the piezoelectric actuator 20 and the reduction wheel train 50.
As shown in FIG. 2, the piezoelectric actuator 20 includes a piezoelectric vibrating body 30 that vibrates in response to voltage application, and a rotor 40 that rotates by the vibration of the piezoelectric vibrating body 30.
Among these, the rotor 40 as a driven body is urged toward the piezoelectric vibrating body 30 by the leaf spring 41, and an appropriate frictional force is generated between the piezoelectric vibrating body 30 and the outer periphery of the rotor 40. The vibration of the piezoelectric vibrating body 30 is efficiently transmitted to the rotor 40. The configuration of the piezoelectric vibrating body 30 will be described in detail later.

The reduction wheel train 50 transmits the rotation of the rotor 40 to the second chronograph hand 6. The reduction gear train 50 is composed of gears 51 and 52.
The gear 51 is disposed coaxially with the rotor 40 and rotates integrally with the rotor 40. The gear 52 is fixed to the rotation shaft of the second chronograph hand 6 (see FIG. 1) and meshes with the gear 51. For this reason, the rotation of the rotor 40 caused by the driving of the piezoelectric vibrating body 30 is transmitted to the decelerated second chronograph hand 6 via the gears 51 and 52, and the second chronograph hand 6 is driven.

[Configuration of piezoelectric vibrator]
3 and 4 are schematic perspective views showing the piezoelectric vibrating body 30. FIG. More specifically, FIG. 3 is a perspective view of the piezoelectric vibrating body 30 viewed from the fixed portion 333 side, and FIG. 4 is a perspective view of the piezoelectric vibrating body 30 viewed from the side opposite to the fixed portion 333 side. In the following drawings, the X, Y, and Z axes are orthogonal to each other. Among these, the X axis and the Y axis are axes along the short side and the long side of the piezoelectric elements 31 and 32 and the reinforcing plate 33 when viewed along the stacking direction of the piezoelectric elements 31 and 32 with respect to the reinforcing plate 33. Indicates. Further, the + X direction and the −X direction are directions along the X axis and facing each other. The same applies to the + Y direction and the −Y direction, and the + Z direction and the −Z direction.
As shown in FIGS. 3 and 4, the piezoelectric vibrating body 30 includes a pair of piezoelectric elements 31 and 32 (for convenience of explanation, the piezoelectric element 31 located above (+ Z direction) in FIGS. The piezoelectric element positioned in the −Z direction) is 32), and a flat reinforcing plate 33 interposed between the piezoelectric elements 31 and 32 is provided. In this embodiment, the piezoelectric elements 31 and 32 and the reinforcing plate 33 are joined to each other by an adhesive.

[Configuration of piezoelectric element]
The piezoelectric elements 31 and 32 are stacked on a reinforcing plate body 331 (described later) of the reinforcing plate 33, respectively. These piezoelectric elements 31 and 32 have a flat plate shape when viewed in plan (when viewed along the stacking direction of the piezoelectric elements 31 and 32 on the reinforcing plate 33, in other words, in the + Z direction or the −Z direction. (When viewed along), it is formed in a substantially rectangular shape.
Among these, the piezoelectric element 31 has a first side surface 311 and a second side surface 312 along the long side and a third side surface 313 and a fourth side surface 314 along the short side when the piezoelectric element 31 is viewed in plan.
Similarly, the piezoelectric element 32 has a first side surface 321 and a second side surface 322 along the long side and a third side surface 323 and a fourth side surface 324 along the short side when the piezoelectric element 32 is viewed in plan.

  Electrodes (not shown) for applying an alternating voltage as a drive signal to the piezoelectric elements 31 and 32 are provided on the surfaces of the piezoelectric elements 31 and 32 (surfaces opposite to the surfaces facing the reinforcing plate 33 respectively). Each is formed. These electrodes are formed by a method such as plating with nickel or gold, sputtering, or vapor deposition. In addition, electrodes similar to those on the front surface side are formed on the back surfaces of the piezoelectric elements 31 and 32 (surfaces facing the reinforcing plate 33 respectively), and these electrodes are overlapped with the reinforcing plate 33 and are electrically connected.

Examples of the material of the piezoelectric elements 31 and 32 include lead zirconate titanate (PZT (registered trademark)), crystal, lithium niobate, barium titanate, lead titanate, lead metaniobate, polyvinylidene fluoride, and zinc niobium. Examples thereof include lead oxide and scandium lead niobate.
The dimensions of the piezoelectric elements 31 and 32 and the frequency (drive frequency) of the alternating voltage applied to the piezoelectric elements 31 and 32 via the electrodes described above are applied repeatedly to the piezoelectric elements 31 and 32. In this case, the piezoelectric elements 31 and 32 are appropriately set so that longitudinal vibration (longitudinal primary vibration) and bending vibration (bending secondary vibration) appear simultaneously.

[Configuration of reinforcing plate]
The reinforcing plate 33 is formed of a conductive metal material such as stainless steel. The reinforcing plate 33 includes a reinforcing plate main body 331 on which the piezoelectric elements 31 and 32 are stacked, and a pair of projecting portions 332 and a fixing portion 333 formed integrally with the reinforcing plate main body 331.
The reinforcing plate body 331 is formed in a substantially rectangular shape in plan view. Such a reinforcing plate main body 331 has a first side surface 3311 and a second side surface 3312 along the long side of the reinforcing plate main body 331, and a third side surface 3313 and a fourth side surface 3314 along the short side when viewed in plan. Have. The size of the reinforcing plate body 331 in plan view is set to be substantially the same as that of the piezoelectric elements 31 and 32.

  The pair of projecting portions 332 are formed so as to project outward in a substantially arc shape from one end of each of the third side surface 3313 and the fourth side surface 3314. Specifically, the pair of projecting portions 332 are positioned in the vicinity of a corner on one diagonal line when the reinforcing plate main body 331 is viewed in plan, and are formed point-symmetrically around the center of the reinforcing plate main body 331. . In other words, the protruding portion 332 is formed at the end portion of the third side surface 3313 near the fixing portion 333, and the protruding portion 332 is formed at the end portion of the fourth side surface 3314 away from the fixing portion 333. Of these protrusions 332, a protrusion 332 (protrusion 332 formed on the third side surface 3313) close to the fixed part 333 contacts the rotor 40 (see FIG. 2). That is, the portion of the protruding portion 332 that contacts the rotor 40 corresponds to the contact portion of the present invention.

  The fixing portion 333 protrudes from the approximate center of the first side surface 3311 to the outside of the piezoelectric elements 31 and 32 along a surface (opposing surface) facing the piezoelectric elements 31 and 32 of the reinforcing plate body 331. Is formed. The fixing portion 333 includes an arm portion 3331 extending in the −X direction from the first side surface 3311, and a fixing portion main body 3332 having a substantially rectangular shape in plan view formed at the distal end in the extending direction of the arm portion 3331. A hole 3333 is formed in the fixing portion main body 3332, and a screw (not shown) inserted through the hole 3333 is fixed to the ground plate constituting the movement 1, so that the piezoelectric vibrating body 30 is attached to the ground plate. Fixed.

FIG. 5 is a vertical cross-sectional view (cross-sectional view along the Z-axis) showing the piezoelectric vibrating body 30.
Here, the dimensions of the piezoelectric elements 31 and 32 and the reinforcing plate main body 331 are manufactured so as to be substantially the same, but the dimensions do not necessarily match due to an error (dimensional tolerance) at the time of manufacturing. When the positions of the second side surfaces 312, 322, 3312 of the piezoelectric elements 31, 32 and the reinforcing plate main body 331 are not aligned due to such a dimensional mismatch, the piezoelectric vibrators 30 to be manufactured are unbalanced. The variation increases, which causes a variation in the vibration characteristics of the piezoelectric vibrators 30.

For this reason, in the piezoelectric vibrating body 30 according to the present embodiment, as shown in FIG. 5, even when the dimensions of the piezoelectric elements 31 and 32 and the reinforcing plate main body 331 in the + X direction are different from each other, The piezoelectric elements 31 and 32 and the reinforcing plate body 331 are positioned and fixed so that the second side surfaces 312, 322 and 3312 on the opposite side are aligned in a plan view.
Further, in the piezoelectric vibrating body 30 according to the present embodiment, the third side surface 3313 of the reinforcing plate main body 331 where the projecting portion 332 close to the fixed portion 333 is located, and the third side surfaces 313 and 323 of the piezoelectric elements 31 and 32, The piezoelectric elements 31 and 32 and the reinforcing plate body 331 are positioned and fixed so as to be aligned in a plan view.

For example, in the present embodiment, as shown in FIG. 5A, even if the dimension in the + X direction of the piezoelectric elements 31 and 32 is larger than the dimension in the same direction of the reinforcing plate body 331, the second side surfaces 312, 322 and 3312. The piezoelectric elements 31 and 32 and the reinforcing plate body 331 are fixed so that they are aligned in plan view.
Further, as shown in FIG. 5B, the piezoelectric elements 31 and 32 and the reinforcing plate main body 331 have piezoelectric elements so that the second side surfaces 312, 322 and 3312 are aligned in a plan view even when the dimensions in the + X direction are different. The elements 31 and 32 and the reinforcing plate body 331 are fixed.
Further, as shown in FIG. 5C, even when the dimension in the + X direction of the piezoelectric elements 31 and 32 is smaller than the dimension in the same direction of the reinforcing plate body 331, the second side surfaces 312, 322, and 3312 are aligned in a plan view. As described above, the piezoelectric elements 31 and 32 and the reinforcing plate body 331 are fixed.

[Piezoelectric vibrator manufacturing process]
FIG. 6 is a plan view showing the positions of the piezoelectric vibrating body 30 and the positioning members P1 and P2.
The piezoelectric vibrating body 30 as described above includes an adhesive placement step in which an adhesive is placed on each joint surface between the piezoelectric elements 31 and 32 and the reinforcing plate main body 331, and the piezoelectric elements 31 and 32 and the reinforcing plate main body 331. It is manufactured by performing the joining process which joins the said piezoelectric elements 31 and 32 and the reinforcement board main body 331 through the positioning process which positions this.
In this adhesive placement step, an adhesive is placed on each joint surface between the piezoelectric elements 31 and 32 and the reinforcing plate body 331 by application or the like. As this adhesive, it is preferable to use a thermosetting adhesive or an anaerobic adhesive. As the thermosetting adhesive, for example, an epoxy resin adhesive is preferable. This is because the epoxy resin adhesive is a liquid having an appropriate viscosity and can be applied to the adhesive surface. As the anaerobic adhesive, for example, an acrylic anaerobic adhesive or a cyanoacrylic anaerobic adhesive is preferable. This is because the acrylic anaerobic adhesive and the cyanoacrylic anaerobic adhesive are liquid and can be applied to the adhesive surface.

  Such an adhesive (for example, an epoxy resin adhesive) is applied to the surface of the piezoelectric elements 31 and 32 that contacts the reinforcing plate body 331 by printing or a dispenser, and the adhesive is disposed. Thus, the adhesive applied to each surface also has viscosity. Therefore, in a state where the piezoelectric elements 31 and 32 and the reinforcing plate main body 331 are positioned at predetermined positions by the positioning step described later, the piezoelectric elements 31 and 32 and the reinforcing plate main body 331 are set to the predetermined due to the viscosity of the adhesive. Temporarily held in position.

  In the positioning step, as shown in FIG. 6, a cylindrical positioning member P <b> 1 as a first positioning member that aligns the positions of the second side surfaces 312, 322, and 3312 is changed according to the size of the piezoelectric vibrator 30 to be manufactured. The cylindrical positioning member P2 serving as a second positioning member that aligns the positions of the third side surfaces 313, 323, and 3313 is disposed at a predetermined position according to the size and the like. Among these, the positioning member P1 is disposed at a plurality of locations. Note that the positions of the positioning members P1 and P2 do not need to be changed if they are set once when manufacturing the piezoelectric vibrator 30 of the same size.

Here, when the piezoelectric vibrating body 30 vibrates, as described above, longitudinal vibration and bending vibration are generated.
Among these, the longitudinal vibration is generated by applying a drive signal to the electrodes on the front and back surfaces of the piezoelectric elements 31 and 32, and along the Y axis with the center when the piezoelectric vibrating body 30 is viewed in plan as a center. It is a vibration that expands and contracts. That is, the piezoelectric vibrating body 30 extends outward with the center at the time of expansion, and contracts inward with the center at the time of contraction. Therefore, a region passing through the center and on the X axis of the piezoelectric vibrating body 30 is a region in which displacement is difficult to occur when the piezoelectric vibrating body 30 vibrates longitudinally, and the position of the center is the node D1 at the time of the vertical vibration. Become.

  In addition, the bending vibration is caused by the fact that each protrusion 332 is displaced from the center position in the width direction (X axis) and is unbalanced when the above-described longitudinal vibration is caused. This bending vibration is a vibration in which one end side and the other end side of the Y axis are displaced in directions opposite to each other along the X axis in a point symmetry with respect to the plane center of the piezoelectric elements 31 and 32. . The direction of this displacement is reversed in one cycle of vibration on one end side and the other end side. For this reason, at the time of bending vibration, the center line in the ± X direction of the piezoelectric vibrating body 30 is a curve indicated by a one-dot chain line in FIG. The intersection of these curves, passing through nodes D1 and D2 at the time of bending vibration (the center node D1 also serves as a node at the time of longitudinal vibration), and the region on the ± X direction of the piezoelectric vibrator 30 is bending vibration. Sometimes, the piezoelectric vibrating body 30 is a region where displacement is unlikely to occur.

On the other hand, the pair of protrusions 332 are portions where the amount of displacement increases when the piezoelectric vibrating body 30 vibrates. By causing the piezoelectric vibrating body 30 to generate bending vibration and longitudinal vibration, a substantially elliptic orbit R (see FIG. 2). Draw a vibration. And one protrusion part 332 vibrates as mentioned above, and rotates the above-mentioned rotor 40 (refer FIG. 2).
The bending vibration is generated when the projecting portion 332 is unbalanced on the reinforcing plate 33 and vibrates by being induced by the longitudinal vibration, or a drive signal is applied to a plurality of electrodes disposed on the reinforcing plate 33. It can occur when induced by selective pulling. However, in the present embodiment, the bending vibration is induced by the former. However, bending vibration may be induced by the latter. In the latter case, it is preferable that the positions of the protrusions 332 be arranged near the center position of the third side surface 3313 and the fourth side surface 3314 of the reinforcing plate 33 in the ± X direction. However, the present invention is not limited to this and may be unbalanced as described above.

The positioning members P1 and P2 are respectively arranged according to the positions of the nodes D1 and D2.
Specifically, in the present embodiment, when each of the side surfaces 311, 321, 3311 contacts the positioning member P 1, the position of the positioning member P 1 corresponds to the position corresponding to each node D 2 (on the + X direction passing through the node D 2. The positioning member P1 is disposed so as to be (position). In the present embodiment, these positioning members P1 are arranged so as to be positioned one by one on the left and right in FIG. 6 so as to sandwich the fixing portion 333. By disposing the positioning member P1 in this way, even if the adhesive leaks outside the piezoelectric elements 31, 32 and the reinforcing plate 33 in the joining process, the adhesive is caused around the positioning member P1 by capillary action. Can be collected. For this reason, since the adhesive is collected in a region where displacement is difficult to occur when the piezoelectric vibrating body 30 vibrates, it is possible to suppress the adhesive from adversely affecting the vibration characteristics of the piezoelectric vibrating body 30.
Further, when the side surfaces 313, 323, and 3313 come into contact with the positioning member P2, the position of the positioning member P2 is a position corresponding to the node D2 (a position on the −Y direction passing through the node D2). The positioning member P2 is disposed. For this reason, the positioning member P2 is arrange | positioned in the approximate center of each side surface 313,323,3313 in +/- X direction.

FIG. 7 is a diagram illustrating a process of positioning the piezoelectric elements 31 and 32 and the reinforcing plate 33 along the positioning members P1 and P2.
The piezoelectric elements 31, 32 and the reinforcing plate 33 are pressed by the pressing members 9 (9A to 9D) toward the positioning members P1, P2 arranged as described above, and these are positioned with respect to the positioning members P1, P2. To do. As a result, the first side surfaces 311, 321, 3311 are aligned in plan view, and the third side surfaces 313, 323, 3313 are aligned in plan view (positioning procedure).

Specifically, as shown in FIG. 7, the two pressing members 9 </ b> A that press the piezoelectric elements 31 and 32 toward the positioning members P <b> 1 are different from the positioning members P <b> 1 in the piezoelectric elements 31 and 32 and the reinforcing plate body 331. Arranged at opposite positions. The pressing member 9B that presses the reinforcing plate 33 toward the positioning member P1 is disposed at a position that presses the end of the fixing portion 333 opposite to the reinforcing plate main body 331 toward the positioning member P1.
On the other hand, the pressing members 9C that press the piezoelectric elements 31 and 32 toward the positioning member P2 are disposed at positions opposite to the positioning members P2 in the piezoelectric elements 31 and 32 and the reinforcing plate body 331, respectively. Further, the pressing member 9D that presses the reinforcing plate 33 toward the positioning member P2 is disposed at a position that presses the protruding portion 332 protruding from the fourth side surface 3314 toward the positioning member P2.

  Such a pressing member 9 (9A to 9D) includes a contact portion 91 that contacts the piezoelectric elements 31 and 32 or the reinforcing plate 33 to be pressed, an elastic portion 92 such as a compression spring, and a moving portion 93. . And when the moving part 93 moves in the direction close | similar to a press target, the urging | biasing force shown with a dotted line in FIG. 7 acts on the press target via the elastic part 92 and the contact part 91, and the said press target is positioning member P1, Pressed toward P2.

FIG. 8 is a diagram illustrating a pressing state of the piezoelectric elements 31 and 32 by the pressing member 9A.
Here, as described above, the dimensions of the piezoelectric elements 31 and 32 and the reinforcing plate main body 331 are manufactured so as to coincide with each other, but a dimensional difference may occur due to an error in manufacturing.
For example, as shown in FIG. 8A, the dimension along the X axis of the piezoelectric elements 31 and 32 may be larger than the dimension along the coaxial axis of the reinforcing plate body 331. In this case, the piezoelectric elements 31 and 32 are pressed toward the positioning member P1 by the pressing member 9A having the contact portion 91 that can press the first side surfaces 311 and 321 simultaneously. Thereby, the piezoelectric elements 31 and 32 are positioned such that the second side surfaces 312 and 322 are along the positioning member P1. Even when there is a dimensional difference between the piezoelectric elements 31 and 32, in order to press them with one pressing member 9A, the abutting portion 91 is formed of an elastic member like an abutting portion 91E described later. Alternatively, the contact portion 91 may be tiltable around the horizontal direction.
On the other hand, as shown in FIG. 8B, the dimension along the X axis of the piezoelectric elements 31 and 32 may be smaller than the dimension along the coaxial axis of the reinforcing plate body 331. In this case, the piezoelectric elements 31 and 32 are pressed toward the positioning member P1 by the pressing members 9A that individually press the first side surfaces 311 and 321. Thereby, the piezoelectric elements 31 and 32 are positioned such that the second side surfaces 312 and 322 are along the positioning member P1.

  Although not shown, when the dimension along the Y-axis of the piezoelectric elements 31 and 32 is larger than the dimension along the coaxial axis of the reinforcing plate body 331, the abutment that can press the fourth side surfaces 314 and 324 simultaneously. The piezoelectric elements 31 and 32 are pressed toward the positioning member P2 by the pressing member 9C having the portion 91. On the other hand, when the dimension along the Y-axis of the piezoelectric elements 31 and 32 is smaller than the dimension along the coaxial axis of the reinforcing plate main body 331, the piezoelectric elements are pressed by the pressing members 9C that individually press the fourth side surfaces 314 and 324. 31 and 32 are pressed toward the positioning member P2. Accordingly, the piezoelectric elements 31 and 32 are positioned so that the third side surfaces 313 and 323 are along the positioning member P2.

Regardless of the dimensions of the piezoelectric elements 31 and 32, the reinforcing plate 33 is configured such that the second side surface 3312 follows the positioning member P1 when the fixing portion 333 is pressed toward the positioning member P1 by the pressing member 9B. Is positioned.
Further, the protruding portion 332 protruding from the fourth side surface 3314 by the pressing member 9D is pressed toward the positioning member P2, so that the reinforcing plate 33 is positioned so that the third side surface 3313 is along the positioning member P2. Is done.

FIG. 9 is a view showing a pressing member 9E which is a modification of the pressing members 9A and 9C.
In place of the pressing members 9A and 9C, the pressing elements 9E shown in FIG. 9 may be used to press the piezoelectric elements 31 and 32 and the reinforcing plate 33 against the positioning members P1 and P2.
The pressing member 9E has the same configuration as the pressing members 9A and 9C except that the pressing member 9E includes an abutting portion 91E instead of the abutting portion 91.

The contact portion 91E is made of an elastic member such as rubber, and is configured to be able to absorb the dimensional difference between the piezoelectric elements 31 and 32 and the reinforcing plate 33. For this reason, the contact portion 91E can simultaneously contact the piezoelectric elements 31 and 32 and the reinforcing plate body 331, respectively. Therefore, by adopting such a pressing member 9E instead of the pressing members 9A and 9C, the piezoelectric elements 31 and 32 and the reinforcing plate 33 can be simultaneously pressed toward the positioning members P1 and P2. Accordingly, the second side surfaces 312, 322, and 3312 can be aligned in plan view, and the third side surfaces 313, 323, and 3313 can be aligned in plan view.
When such a pressing member 9E is used instead of the pressing members 9A and 9C, the reinforcing plate 33 can be pressed together with the piezoelectric elements 31 and 32 toward the positioning members P1 and P2, and therefore the pressing member 9B. , 9D can be omitted.

  In the joining step, the piezoelectric elements 31, 32 and the second side surfaces 312, 322, 3312 are aligned and the third side surfaces 313, 323, 3313 are aligned by the positioning members P 1, P 2 and the pressing member 9. The reinforcing plate 33 is pressurized in the −Z direction. Then, by curing the adhesive layer (adhesive) between the piezoelectric elements 31 and 32 and the reinforcing plate 33, the piezoelectric elements 31 and 32 and the reinforcing plate 33 are joined. Thereby, the piezoelectric vibrating body 30 is manufactured.

  Specifically, the curing of the adhesive is performed by heating when the adhesive is a thermosetting adhesive. For example, when an epoxy resin adhesive is used as the thermosetting adhesive, the piezoelectric vibrating body 30 is heated by a heater while being in the above-mentioned pressurized state. Then, after the adhesive has hardened after a predetermined time, the joining process is completed by releasing the pressure state. When the adhesive is an anaerobic adhesive, the adhesive is left for a predetermined time in the above pressurized state. Then, since there is almost no oxygen in the adhesive, the adhesive is cured and the piezoelectric elements 31 and 32 and the reinforcing plate main body 331 can be joined to each other.

[Effect of the first embodiment]
According to the timepiece 10 according to the present embodiment described above, the following effects can be obtained.
(1) In the piezoelectric vibrating body 30, the second side surface 3312 of the reinforcing plate main body 331 opposite to the fixing portion 333 and the second side surfaces 312 and 322 of the piezoelectric elements 31 and 32 are aligned in plan view.
Here, since the vibration in the vicinity of the first side surfaces 311, 321, 3311 is suppressed by the fixing portion 333, the degree to which the deviation amount between the piezoelectric elements 31, 32 and the reinforcing plate body 331 contributes to the vibration energy becomes small. On the other hand, the vibration in the vicinity of the second side surfaces 312, 322, and 3312 is not suppressed by the fixed portion 333, so that the degree of contribution of the deviation amount to the vibration energy increases. In other words, when the side surface where the displacement between the piezoelectric elements 31 and 32 and the reinforcing plate body 331 is large is on the second side surface 312, 322, 3312 side compared to the side surface on the first side surface 311, 321, 3311 side. The degree of contribution to the vibration energy also increases, and the vibration characteristics of the piezoelectric vibrating body 30 greatly change depending on the magnitude of the deviation.
On the other hand, in the present embodiment, the second side surfaces 312 and 322 of the piezoelectric elements 31 and 32 and the second side surface 3312 of the reinforcing plate body 331 are aligned in a plan view. According to this, variation in the vibration characteristics of each piezoelectric vibrating body 30 can be suppressed. Accordingly, variations in the vibration state of each manufactured piezoelectric vibration body 30 can be reduced, the vibration state can be stabilized, and the rotor 40 as the driven body can be driven stably and reliably.

  FIG. 10 shows vibration characteristics of the piezoelectric vibrator manufactured so that the first side surfaces of the piezoelectric element and the reinforcing plate body are aligned, and the piezoelectric vibrator 30 manufactured so that the second side faces 312, 322, and 3312 are aligned. FIG. Δf shown on the horizontal axis in FIG. 10 indicates the difference between the resonance frequency of the longitudinal vibration and the resonance frequency of the bending vibration in the manufactured piezoelectric vibrating body. If this Δf is within a predetermined range (a range sandwiched between a pair of one-dot chain lines in FIG. 10), the piezoelectric vibrator having the Δf has a balance between longitudinal vibration and bending vibration, and the protruding portion of the third side surface 3313 It is evaluated that 332 has good vibration characteristics that draw an appropriate elliptical vibration. The vertical axis in FIG. 10 indicates the number of piezoelectric vibrators having the Δf.

  Specifically, as shown by the broken line in FIG. 10, the first side surfaces of the piezoelectric element and the reinforcing plate body are aligned in a plan view, and Δf is wide for each piezoelectric vibrating body in which the second side surfaces are not aligned. Few piezoelectric vibrators have good vibration characteristics. Thus, in the said structure, the manufacturing efficiency of the piezoelectric vibrating body which has a favorable vibration characteristic is not high.

On the other hand, as indicated by a solid line in FIG. 10, the range of Δf is narrowed in each piezoelectric vibrating body 30 in which at least the second side surfaces 312, 322, and 3312 are aligned in plan view, and each Δf is within the predetermined range described above. Easy to fit. That is, since there is little variation in vibration characteristics among the piezoelectric vibrators 30 to be manufactured, in this configuration, the manufacturing efficiency of the piezoelectric vibrator 30 having good vibration characteristics is high. Therefore, even if the piezoelectric vibrators are mass-produced, the variation in vibration of each piezoelectric vibrator is small, so that the variation in the driven amount of the driven body can be reduced, and stable driving of the driven body can be realized. Can do.
Thus, by aligning the second side surfaces 312, 322, and 3312 in plan view, the piezoelectric vibrator 30 and the piezoelectric actuator 20 with high driving reliability can be manufactured. Moreover, the yield of the manufactured piezoelectric vibrating body 30 can be improved.

(2) In the piezoelectric vibrating body 30, not only the second side surfaces 312, 322, and 3312 but also the third side surfaces 313, 323, and 3313 are aligned in a plan view. According to this, the respective positions of the reinforcing plate main body 331 and the piezoelectric elements 31 and 32 substantially coincide with each other on the third side surfaces 313, 323, and 3313, so that the vicinity of the protruding portion 332 that drives the rotor 40 that is the driven body. Variations in the vibration state can be suppressed. Therefore, variation in vibration characteristics among the individual piezoelectric vibrators 30 to be manufactured can be further suppressed. Therefore, even if the piezoelectric vibrating bodies 30 are mass-produced, variations in the vibrations of the piezoelectric vibrating bodies 30 can be reduced. As a result, the driven amount of the driven body (rotor 40) driven by the piezoelectric vibrating bodies 30 can be reduced. Since variation can be reduced, the driven body can be driven stably.

(3) The third side surfaces 313, 323, 3313 are aligned in plan view. Here, the protruding portion 332 formed on the third side surface 3313 and close to the fixed portion 333 has a small variation in the operation range when the piezoelectric vibrating body 30 is driven. For this reason, by arranging the third side surfaces 313, 323, and 3313, variations in the operating range of the protrusion 332 can be further suppressed, and the driving of the rotor 40 that is the driven body can be further stabilized. Further, in the third side surfaces 313, 323, and 3313, since the piezoelectric elements 31 and 32 do not protrude from the reinforcing plate body 331, the piezoelectric elements 31 and 32 contact the rotor 40 when the piezoelectric vibrating body 30 vibrates. Can be prevented. Therefore, the piezoelectric vibrating body 30 can be vibrated appropriately, and the rotor 40 can be reliably driven.

(4) When the dimension along the X axis of the piezoelectric elements 31 and 32 is larger than the dimension along the coaxial axis of the reinforcing plate body 331, the first side surfaces 311 and 321 protrude from the first side surface 3311. 31 and 32 can be simultaneously pressed and positioned by one pressing member 9A. Therefore, the positioning process of the piezoelectric elements 31 and 32 and the reinforcing plate body 331 can be simplified as compared with the case where the piezoelectric elements 31 and 32 are individually pressed.

(5) By pressing the first side surfaces 311 and 321 toward the positioning member P1 with one pressing member 9A, the piezoelectric elements 31 are arranged along the opposing surfaces of the piezoelectric elements 31 and 32 and the reinforcing plate body 331. , 32 can be easily pressed.
Further, since it is not necessary to press the piezoelectric elements 31 and 32 while avoiding the reinforcing plate body 331, the piezoelectric elements 31 and 32 float from the reinforcing plate body 331, or the piezoelectric elements 31 and 32 are missing at the pressing stage. Can be suppressed. Therefore, variation in vibration characteristics of the manufactured piezoelectric vibrating body 30 can be further suppressed, and the yield of the piezoelectric vibrating body 30 can be improved.

  Here, when the dimension along the X-axis of the piezoelectric elements 31 and 32 is larger than the dimension along the coaxial axis of the reinforcing plate main body 331, the contact area between the piezoelectric elements 31 and 32 and the reinforcing plate main body 331 becomes small. There is a possibility that vibrations of the piezoelectric elements 31 and 32 are not sufficiently transmitted to the reinforcing plate body 331. On the other hand, by making the dimension along the X axis of the piezoelectric elements 31 and 32 larger than the dimension along the coaxial axis of the reinforcing plate main body 331, the contact area can be increased, and the vibration of the piezoelectric elements 31 and 32 is reinforced. It can be efficiently transmitted to the plate body 331.

(6) On the other hand, when the dimension along the X-axis of the piezoelectric elements 31 and 32 is larger than the dimension along the coaxial axis of the reinforcing plate main body 331, the piezoelectric vibrator 30 is incorporated into an electronic device such as the timepiece 10 when the piezoelectric element 30 is assembled. When pressure or impact is applied to the protruding portion from the reinforcing plate body 331 in the elements 31 and 32, the protruding portion may be lost.
On the other hand, since the dimension along the X axis of the piezoelectric elements 31 and 32 is smaller than the dimension along the coaxial axis of the reinforcing plate body 331, the piezoelectric elements 31 and 32 do not protrude from the reinforcing plate body 331 in the -X direction. Therefore, it is possible to suppress the occurrence of chipping in the piezoelectric elements 31 and 32 after manufacture, and the reliability of the piezoelectric vibrating body 30 can be improved.

(7) When positioning the piezoelectric elements 31 and 32 and the reinforcing plate 33 by the pressing member 9E, the piezoelectric elements 31 and 32 and the reinforcing plate main body 331 are pressed by the elastic contact portion 91E. And the dimensional difference can be absorbed. Therefore, the piezoelectric elements 31 and 32 and the reinforcing plate main body 331 can be reliably pressed toward the positioning member P1 or the positioning member P2 by the single pressing member 9E. In addition, the number of pressing members 9 required for positioning the piezoelectric elements 31 and 32 and the reinforcing plate body 331 can be reduced.

[Second Embodiment]
Next, a piezoelectric vibrating body 30A in a timepiece according to a second embodiment of the present invention will be described with reference to FIG. FIG. 11 is a diagram for explaining a positioning process of the piezoelectric elements 31 and 32 and the reinforcing plate 33A constituting the piezoelectric vibrating body 30A according to the present embodiment. Among these, FIG. 11A is a plan view showing the piezoelectric vibrating body 30A. FIG. 11B is a cross-sectional view showing the piezoelectric vibrating body 30 </ b> A as viewed in a cross-section along the stacking direction (± Z direction) of the piezoelectric elements 31 and 32 at a concave portion 3315 described later. In FIG. 11A, illustration of the pressing members 9C and 9D is omitted.

In the first embodiment, according to the dimensional difference along the X axis between the piezoelectric elements 31 and 32 and the reinforcing plate main body 331, the piezoelectric elements 31 and 32 sandwiching the reinforcing plate main body 331 are pressed by one pressing member 9A, It has been determined whether the piezoelectric elements 31 and 32 are individually pressed by the pressing member 9A.
On the other hand, in 2nd Embodiment, the recessed part 3315 is formed in the reinforcement board main body 331, and the piezoelectric elements 31 and 32 are pressed toward the positioning member P1 in the position according to the said recessed part 3315 by one press member 9F. .

The timepiece according to the present embodiment has the same configuration as the timepiece 10 of the first embodiment except that the piezoelectric vibration body 30A is provided instead of the piezoelectric vibration body 30. The piezoelectric vibrating body 30 </ b> A has the same configuration as the piezoelectric vibrating body 30 except that the reinforcing plate 33 </ b> A is provided instead of the reinforcing plate 33.
As shown in FIG. 11, the reinforcing plate 33 </ b> A has the same configuration as the reinforcing plate 33. However, the reinforcing plate 33A is located at the position where the pressing member 9 (9F) is disposed on the first side surface 3311 of the reinforcing plate main body 331 (in other words, the position opposite to the side where the positioning member P1 is located). A recess 3315 is provided to be immersed inside the main body 331.

  These recesses 3315 are formed in a substantially arc shape in plan view (more specifically, a substantially semicircular shape). For this reason, at the position where the recess 3315 is formed, the first side surfaces 311 and 321 protrude from the first side surface 3311. Accordingly, at the position where the concave portion 3315 is formed, the piezoelectric elements 31 and 32 can be pressed toward the positioning member P1 by the single pressing member 9F regardless of the size of the reinforcing plate 33A.

The pressing member 9 (9F) includes an elastic portion 92 and a moving portion 93 in the same manner as the pressing member 9A and the like described above, except that the contacting portion 91F is provided instead of the contacting portion 91.
The end surfaces of the contact portion 91F that contact the piezoelectric elements 31 and 32 are formed in a substantially arc shape (substantially semicircular shape) that matches the shape of the recess 3315 when viewed in plan. For this reason, since the contact area between the contact portion 91F and the piezoelectric elements 31 and 32 can be reduced, the contact portion 91F is provided on the first side surfaces 311 and 321 protruding from the first side surface 3311 in the recess 3315. It can be made to contact reliably. Therefore, it is possible to reliably press only the piezoelectric elements 31 and 32 toward the positioning member P1 using the pressing member 9F.
Even when there is a dimensional difference between the piezoelectric elements 31 and 32, in order to make it possible to press them with one pressing member 9F, the abutting portion 91 is made of an elastic member like the abutting portion 91E described above. Alternatively, the contact portion 91 may be tiltable around the horizontal direction.

The piezoelectric vibrating body 30A according to the present embodiment is manufactured in the same manufacturing process as the manufacturing process shown in the first embodiment.
That is, in the positioning step, the reinforcing plate 33A is pressed and positioned toward the positioning member P1 by the above-described pressing member 9B. Although not shown, the piezoelectric elements 31 and 32 and the reinforcing plate 33A are pressed and positioned toward the positioning member P2 by the pressing members 9C and 9D. As a result, in the piezoelectric vibrating body 30A, the second side surfaces 312, 322, and 3312 are aligned in a plan view, and the third side surfaces 313, 323, and 3313 are aligned in a plan view. Thereafter, the piezoelectric elements 31 and 32 and the reinforcing plate 33A are joined in a joining step.
Such a recess 3315 is also formed on the fourth side surface 3314, and the piezoelectric elements 31 and 32 are pressed toward the positioning member P2 by the pressing member 9F at a position corresponding to the recess 3315 so as to be positioned. It may be. Moreover, the shape of the recessed part 3315 and the contact part 91F is not restricted to circular arc shape (semicircle shape), and polygonal shape may be sufficient as it. Further, when the concave portion 3315 is formed at a position corresponding to the longitudinal vibration or bending vibration node of the piezoelectric vibrating body 30A or the reinforcing plate 33A, the vibration system of the piezoelectric vibrating body 30A is hardly adversely affected. .

According to the timepiece according to the present embodiment described above, the same effects as those of the timepiece 10 described above can be obtained, and the following effects can be obtained.
(8) The reinforcing plate 33A has a recess 3315 at a position corresponding to the pressing member 9F and the positioning member P1. According to this, in the concave portion 3315, the first side surfaces 311, 321 of the piezoelectric elements 31, 32 protrude from the first side surface 3311 of the reinforcing plate body 331. Therefore, the piezoelectric elements 31 and 32 can be pressed toward the positioning member P1 by the single pressing member 9F, and the piezoelectric elements 31 and 32 can be positioned at a time with respect to the reinforcing plate body 331. Therefore, the positioning process of the piezoelectric elements 31 and 32 and the reinforcing plate body 331 can be simplified.

[Third Embodiment]
Next, the manufacturing process of the piezoelectric vibrating body 30 according to the third embodiment of the present invention will be described with reference to FIG. FIG. 12 is a diagram illustrating a positioning process of the piezoelectric elements 31 and 32 and the reinforcing plate 33 in the piezoelectric vibrating body 30 according to this embodiment.
In the first embodiment, the piezoelectric elements 31 and 32 are positioned by the pressing members 9A and 9C so that the second side surfaces 312 and 322 and the third side surfaces 313 and 323 are along the positioning members P1 and P2.
In contrast, in the third embodiment, the second side surfaces 312 and 322 and the third side surfaces 313 and 323 are positioned by the positioning member P1 by the pressing members 9G that abut on the first side surfaces 311 and 321 and the fourth side surfaces 314 and 324, respectively. , P2 are positioned so as to extend along P2.

FIG. 12 shows a pressing member 9 (9G) for positioning the piezoelectric elements 31 and 32 and the reinforcing plate 33 along the positioning members P1 and P2 in the positioning step of the manufacturing process of the piezoelectric vibrating body 30 according to this embodiment. As described above, the contact portion 91G, the elastic portion 92, and the moving portion 93G are provided.
The contact portion 91G is made of a member having elasticity similarly to the above-described contact portion 91E. The abutting portion 91G sandwiches a corner opposite to the corner sandwiched between the first side surfaces 311, 321, 3311 and the third side surfaces 313, 323, 3313 with the center of the reinforcing plate body 331 as the center. The first side surfaces 311, 321, 3311 and the fourth side surfaces 314, 324, 3314 are in contact with each other.

The moving part 93G moves in the direction of approaching the piezoelectric vibrating body 30 and presses the contact part 91G in the direction toward the positioning members P1 and P2 via the elastic part 92 in the positioning step. At this time, as shown by broken arrows in FIG. 12, the moving portion 93G is moved from the corner portion C1 sandwiched between the first side surfaces 311, 321, 3311 and the fourth side surfaces 314, 324, 3314 to the second side surface 312, Vibration in the direction along the opposing surface (XY plane) between the piezoelectric elements 31, 32 and the reinforcing plate body 331 in the direction toward the corner C2 between the 322, 3312 and the third side surfaces 313, 323, 3313 ), The contact portion 91G is pressed through the elastic portion 92. In other words, the moving part 93G applies vibrations in the direction along the opposing surfaces of the piezoelectric elements 31 and 32 and the reinforcing plate body 331 along the diagonal line connecting the corner part C1 and the corner part C2, and the contact part 91G. Press.
Accordingly, the second side surfaces 312, 322, and 3312 are aligned in a plan view, and the third side surfaces 313, 323, and 3313 are aligned in a plan view.
Thereafter, the piezoelectric elements 31 and 32 and the reinforcing plate 33 are joined in a joining step.

According to the manufacturing process of the piezoelectric vibrating body 30 according to the present embodiment described above, the same effects as the effects shown in the first embodiment can be obtained, and the following effects can be obtained.
(9) With the pressing member 9G, the piezoelectric elements 31 and 32 and the reinforcement are strengthened with respect to the positioning members P1 and P2 so that the second side surfaces 312, 322, and 3312 and the third side surfaces 313, 323, and 3313 are aligned in a plan view. The plate 33 (reinforcing plate body 331) can be positioned. For this reason, as shown in the first embodiment, the piezoelectric elements 31, 32 and the reinforcing plate 33 are positioned with respect to the positioning member P1, and the positioning with respect to the positioning member P2 is compared with the case where they are performed in separate processes. Positioning can be performed at once. Therefore, the positioning procedure can be simplified.

  In the present embodiment, the contact portion 91G is formed of an elastic member, and the contact portion 91G includes not only the first side surfaces 311 and 321 and the fourth side surfaces 314 and 324 but also the first side surface 3311 and the first side surfaces. The four side surfaces 3314 are in contact with each other. However, the present invention is not limited to this, and the piezoelectric elements 31 and 32 and the reinforcing plate 33 may be positioned by separate pressing members. For example, the pressing member 9G may position the piezoelectric elements 31 and 32, and the pressing members 9B and 9D may position the reinforcing plate 33. Further, the contact part 91G may not have elasticity.

[Fourth Embodiment]
Next, the manufacturing process of the piezoelectric vibrating body 30 according to the fourth embodiment of the present invention will be described with reference to FIGS. FIGS. 13 and 14 are diagrams illustrating a positioning process of the piezoelectric elements 31 and 32 and the reinforcing plate 33 in the piezoelectric vibrating body 30 according to the present embodiment. FIGS. 13 and 14 illustrate the piezoelectric vibrating body 30. It is the top view and sectional drawing which show.
In the first embodiment, using the pressing members 9A to 9E, the piezoelectric elements 31 and 32 are arranged such that the second side surfaces 312, 322, and 3312 and the third side surfaces 313, 323, and 3313 are aligned in plan view, respectively. And the reinforcing plate 33 was positioned.
On the other hand, in 4th Embodiment, the piezoelectric element 32, the reinforcement board 33, and the piezoelectric element 31 are each attracted | sucked by the suction device 9H in order, and are positioned with respect to the positioning members P1 and P2.

In the manufacturing process of the piezoelectric vibrating body 30 according to this embodiment, first, an adhesive is applied to the surface 3316 to which the piezoelectric element 32 is bonded in the reinforcing plate body 331 and the surface 315 to be bonded to the reinforcing plate body 331 in the piezoelectric element 31. Apply. About this adhesive agent and the coating method of the said adhesive agent, it is the same as that of 1st Embodiment.
Next, in the positioning procedure in the manufacturing process, first, the lowermost piezoelectric element 32 is sucked by the nozzle 9H1 of the suction device 9H disposed above the piezoelectric element 32, and the piezoelectric element 32 is installed. The piezoelectric element 32 is positioned so that the side surfaces 312 and 313 are along the positioning members P1 and P2 previously disposed in the positioning device 9J. At this time, the nozzle 9H1 moves the nozzle 9H1 while the piezoelectric element 32 is held by the nozzle 9H1 while the opposing surface 325 (FIG. 14) that contacts the reinforcing plate body 331 of the piezoelectric element 32 is sucked. By doing so, the piezoelectric element 32 is positioned. In this state, the lower surface (surface opposite to the facing surface 325) of the piezoelectric element 32 is moved by the suction portion 9J1 (FIG. 14) of the positioning device 9J disposed on the lower side of the piezoelectric element 32. Suction. Thereby, even if the nozzle 9H1 leaves | separates from the said piezoelectric element 32, the piezoelectric element 32 is hold | maintained with positioning with respect to the positioning members P1 and P2 by the positioning device 9J.

Next, as in the case of the piezoelectric element 32, the surface of the reinforcing plate main body 331 facing the piezoelectric element 31 is sucked by the nozzle 9H1, and the nozzle 9H1 is moved while the reinforcing plate 33 is held by the nozzle 9H1. The reinforcing plate 33 is positioned so that the side surfaces 3312 and 3313 are along the positioning members P1 and P2, respectively.
When the reinforcing plate 33 is positioned in this manner, the reinforcing plate 33 and the piezoelectric element 32 come into contact with the adhesive applied to the surface 3316 of the reinforcing plate main body 331. And the said reinforcement board 33 and the piezoelectric element 32 are temporarily hold | maintained without moving to a plane direction by the viscosity of an adhesive agent, and the attraction | suction of the suction part 9J1.

Thereafter, as shown in FIG. 13, the surface of the piezoelectric element 31 opposite to the surface facing the reinforcing plate body 331 is sucked by the nozzle 9H1, and the piezoelectric element 31 is held by the nozzle 9H1. 9H1 is moved to position the piezoelectric element 31 so that the side surfaces 312 and 313 are along the positioning members P1 and P2, respectively.
When the piezoelectric element 31 is positioned on the upper surface of the reinforcing plate 33 (surface opposite to the piezoelectric element 32), the reinforcing plate 33 is a surface 315 that is the lower surface of the piezoelectric element 31 (surface facing the reinforcing plate 33). Contact the adhesive applied to. The piezoelectric element 31, the reinforcing plate 33, and the piezoelectric element 32 are temporarily held without moving in the plane direction due to the viscosity of the adhesive and the suction of the suction portion 9J1.
Then, in a state where the second side surfaces 312, 322, 3312 and the third side surfaces 313, 323, 3313 are aligned in plan view, the laminated body of the piezoelectric elements 31, 32 and the reinforcing plate 33 is along the −Z direction. While pressurizing, the laminated body is heated. Thereby, the adhesive is cured, and the piezoelectric elements 31 and 32 and the reinforcing plate 33 are joined (joining step).

According to the manufacturing process of the piezoelectric vibrating body 30 according to the present embodiment described above, the same effects as the effects shown in the first embodiment can be obtained, and the following effects can be obtained.
(10) When the piezoelectric elements 31 and 32 and the reinforcing plate 33 are pressed with the pressing members 9 </ b> A to 9 </ b> G, the adhesive may leak to the outside and adhere to the pressing member 9. In this case, peeling of the pressing members 9A to 9G from the piezoelectric vibrating body 30 becomes complicated, and it becomes necessary to remove the adhesive from the pressing members 9A to 9G, so that the manufacturing process of the piezoelectric vibrating body 30 becomes complicated. .
On the other hand, in the present embodiment, the piezoelectric elements 31 and 32 and the reinforcing plate 33 are sucked by the nozzle 9H1 and the suction portion 9J1 of the suction device 9H, and these are individually positioned with respect to the positioning members P1 and P2. According to this, even when the adhesive leaks from the side surface of the piezoelectric vibrating body 30, since the pressing members 9A to 9G are not used, it is not necessary to remove the adhesive from the pressing members 9A to 9G. Therefore, the manufacturing process of the piezoelectric vibrating body 30 can be simplified.

[Modification of Embodiment]
FIG. 15 is a diagram showing a modification of each of the embodiments.
In each said embodiment, although each 2nd side surface 312,322,3312 and each 3rd side surface 313,323,3313 were each arrange | positioned by planar view, this invention is not limited to this. That is, only the second side surfaces 312, 322, and 3312 may be aligned, or only the third side surfaces 313, 323, and 3313 may be aligned.
For example, as shown in FIG. 15, using the positioning member P2 and the pressing members 9C and 9D, the piezoelectric elements 31 and 32 and the reinforcing plate so that only the third side surfaces 313, 323, and 3313 are aligned in a plan view. 33 may be positioned and fixed. The piezoelectric elements 31 and 32 and the reinforcing plate 33 may be positioned by other methods (for example, a method using the suction device 9H).

  In each said embodiment, although the piezoelectric elements 31 and 32 were arrange | positioned so that the reinforcement board main body 331 may be pinched | interposed, this invention is not limited to this. In other words, one piezoelectric element may be provided for the reinforcing plate body 331.

  In the above-described embodiments, the positions of the positioning members P1 and P2 are set according to the nodes D1 and D2 when the piezoelectric vibrating bodies 30 and 30A to be manufactured are vibrated. However, the present invention is not limited to this. That is, the position of the positioning member P1 is not limited as long as the piezoelectric elements 31, 32 and the reinforcing plate 33 can be positioned so that the second side surfaces 312, 322, 3312 are aligned in a plan view. Similarly, the position of the positioning member P2 is not limited as long as the piezoelectric elements 31, 32 and the reinforcing plate 33 can be positioned so that the third side surfaces 313, 323, 3313 are aligned in plan view.

  Further, the number, position, shape, and configuration of the positioning members and the pressing members are not limited as long as the piezoelectric elements 31 and 32 and the reinforcing plate 33 can be positioned so that the respective side surfaces are aligned in plan view. For this reason, the position of the recessed part 3315 should just be formed according to the position of the positioning member, and the shape of the positioning member is not limited to the cylindrical shape but may be a prismatic shape.

  In each said embodiment, although the protrusion part 332 as a contact part was protrudingly provided by the 3rd side surface 3313, this invention is not limited to this. That is, the end of the third side surface 3313 may be configured to be in contact with the rotor 40 that is a driven body to drive the rotor 40. Moreover, the shape of the protrusion can be set as appropriate. Further, the protruding portion 332 protruding from the fourth side surface 3314 may be used as the contact portion.

  In the fourth embodiment, the piezoelectric elements 31 and 32 and the reinforcing plate 33 are positioned with respect to the positioning members P1 and P2 by the suction device 9H, respectively, but the present invention is not limited to this. Only one of the piezoelectric elements 31 and 32 and the reinforcing plate 33 (for example, the uppermost piezoelectric element 31) may be positioned by the suction device 9H using the pressing member 9 described above.

  In each of the embodiments described above, the piezoelectric vibrating bodies 30 and 30A and the piezoelectric actuator 20 including the piezoelectric vibrating bodies 30 and 30A have been described as being used in the timepiece 10 as an electronic device, but the present invention is not limited thereto. That is, you may employ | adopt the piezoelectric vibrating body and piezoelectric actuator which have the said structure for other electronic devices, such as a printer.

In addition, the best configuration, method and the like for carrying out the present invention have been disclosed above, but the present invention is not limited to this. That is, the invention has been illustrated and described with particular reference to certain specific embodiments, but without departing from the spirit and scope of the invention, Various modifications can be made by those skilled in the art in terms of material, quantity, and other detailed configurations.
Therefore, the description limited to the shape, material, etc. disclosed above is an example for easy understanding of the present invention, and does not limit the present invention. The description by the name of the member which remove | excluded the limitation of one part or all of such is included in this invention.

  DESCRIPTION OF SYMBOLS 10 ... Clock (electronic device), 20 ... Piezoelectric actuator, 30, 30A ... Piezoelectric vibrator, 31, 32 ... Piezoelectric element, 33, 33A ... Reinforcement plate, 311, 321, 3311 ... First side surface, 312, 322, 3312 ... 2nd side surface, 313, 323, 3313 ... 3rd side surface, 314, 324, 3314 ... 4th side surface, 331 ... Reinforcement plate main body, 332 ... Projection part (contact part), 333 ... Fixing part, 3315 ... Recessed part, 40 ... rotor (driven body), 9 (9A to 9G) ... pressing member, 91E ... contact portion, P1 ... positioning member (first positioning member), P2 ... positioning member (second positioning member).

Claims (13)

A piezoelectric vibrator having a piezoelectric element and a reinforcing plate on which the piezoelectric element is laminated, and vibrating in response to application of a driving voltage to the piezoelectric element;
The reinforcing plate is
Reinforcing plate body that is substantially the same shape as the piezoelectric element in plan view, and on which the piezoelectric element is laminated;
A fixing portion for fixing the reinforcing plate in place;
The reinforcing plate body and the piezoelectric element are formed in a substantially rectangular shape in plan view, and have a first side surface and a second side surface along each long side, and a third side surface and a fourth side surface along each short side,
The fixing portion protrudes outward in plan view from the piezoelectric element only from the first side surface of the reinforcing plate body,
The piezoelectric vibrating body, wherein the second side surface of the reinforcing plate body and the second side surface of the piezoelectric element are aligned in a plan view. The piezoelectric vibrating body according to claim 1,
The reinforcing plate has a contact portion that contacts the driven body when the piezoelectric vibrating body vibrates and drives the driven body,
The contact portion is provided on a third side surface of the reinforcing plate body,
The piezoelectric vibrating body, wherein a third side surface of the reinforcing plate body and a third side surface of the piezoelectric element are aligned in a plan view. The piezoelectric vibrating body according to claim 2,
The reinforcing plate has a protruding portion that protrudes outward from the piezoelectric element at an end portion close to the fixing portion on the third side surface and an end portion separated from the fixing portion on the fourth side surface,
The piezoelectric vibrating body according to claim 1, wherein the contact portion is formed on the protruding portion protruding from the third side surface. In the piezoelectric vibrating body according to any one of claims 1 to 3,
The piezoelectric vibrator according to claim 1, wherein a dimension of the piezoelectric element in a direction along the short side is larger than a dimension of the reinforcing plate body in the direction. In the piezoelectric vibrating body according to any one of claims 1 to 3,
The piezoelectric vibrator according to claim 1, wherein a dimension of the piezoelectric element in a direction along the short side is smaller than a dimension of the reinforcing plate body in the direction. In the piezoelectric vibrating body according to any one of claims 1 to 5,
The piezoelectric vibrating body according to claim 1, wherein a concave portion is formed on the first side surface of the reinforcing plate body so as to be recessed from the first side surface of the piezoelectric element to the inside of the reinforcing plate body.   A piezoelectric actuator comprising: the piezoelectric vibrating body according to any one of claims 1 to 6; and a driven body driven by vibration of the piezoelectric vibrating body.   An electronic apparatus comprising the piezoelectric actuator according to claim 7. A method of manufacturing a piezoelectric vibrating body comprising a piezoelectric element and a reinforcing plate on which the piezoelectric element is laminated, and vibrating in response to application of a driving voltage to the piezoelectric element,
The reinforcing plate is
Reinforcing plate body that is substantially the same shape as the piezoelectric element in plan view, and on which the piezoelectric element is laminated;
A fixing portion for fixing the reinforcing plate in place;
The reinforcing plate body and the piezoelectric element are formed in a substantially rectangular shape in plan view, and have a first side surface and a second side surface along each long side, and a third side surface and a fourth side surface along each short side,
The fixing portion protrudes outward in plan view from the piezoelectric element only from the first side surface of the reinforcing plate body,
The method of manufacturing the piezoelectric vibrator is as follows:
The second side surface of the reinforcing plate main body and the second side surface of the piezoelectric element are brought into contact with the first positioning member disposed outside the piezoelectric vibrating body, and each of the second side surfaces is seen in a plan view. A positioning step for positioning the piezoelectric element and the reinforcing plate main body so as to be aligned;
A bonding step of bonding the piezoelectric element and the reinforcing plate body;
A method of manufacturing a piezoelectric vibrating body comprising: In the manufacturing method of the piezoelectric vibrating body according to claim 9,
The reinforcing plate has a contact portion that contacts the driven body when the piezoelectric vibrating body vibrates and drives the driven body,
The contact portion is provided on a third side surface of the reinforcing plate body,
In the positioning step, the second side surfaces of the reinforcing plate main body and the piezoelectric element are brought into contact with the first positioning member, and the third side surfaces of the reinforcing plate main body and the piezoelectric element are changed to the first side surfaces. (2) A method of manufacturing a piezoelectric vibrating body, comprising a positioning procedure for positioning so as to contact with a positioning member. In the manufacturing method of the piezoelectric vibrating body according to claim 10,
The positioning procedure includes the piezoelectric element and the reinforcement while applying vibration to a corner opposite to the corner sandwiched between the second side and the third side with the center of the reinforcing plate body as the center. A method of manufacturing a piezoelectric vibrator, comprising: positioning a plate main body so as to contact the first positioning member and the second positioning member. In the manufacturing method of the piezoelectric vibrating body according to any one of claims 9 to 11,
When positioning the piezoelectric element and the reinforcing plate main body in the positioning step, a pressing member that presses at least one of the piezoelectric element and the reinforcing plate main body has elasticity, and the piezoelectric element and A method of manufacturing a piezoelectric vibrator, comprising a contact portion that contacts at least one of the reinforcing plate bodies. In the manufacturing method of the piezoelectric vibrating body according to claim 9,
The positioning step includes sucking a surface of the piezoelectric element opposite to the surface facing the reinforcing plate body to position the piezoelectric element with respect to the reinforcing plate body. Production method.

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