JP2011133140A - Air cleaning device and air cleaning system for clean room using visible light responsive catalyst - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an air cleaning device for a clean room capable of introducing a part of illumination light from the outside into a ventilation flue in which a visible light responsive catalyst is disposed. <P>SOLUTION: In this air cleaning device for the clean room, a dust removing filter 20 is disposed at a downstream side of a case body 6 for air distribution, a transparent daylighting section 14 for introducing the illumination light b from the external, is formed on a case body part at an upstream side with respect to the dust removing filter, and the visible light responsive catalyst 22 is disposed on a proper part in the case body communicated with the daylighting section. The visible light responsive catalyst is activated by utilizing the illumination light introduced from the daylighting section to decompose contaminant in the air. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to an air purification device and an air purification equipment for a clean room using a visible light responsive catalyst. The present invention relates to an air conditioning system for a clean room that removes chemical contaminants that affect product yield, particularly in the manufacture of electronic devices such as semiconductor and liquid crystal panels.

  In the manufacturing environment of electronic devices such as semiconductors and liquid crystal panels, air pollution enters through the air conditioner, polluting the clean room air by diffusing the gas generated from the components of the clean room and the small amount of chemicals and gases leaking from the manufacturing equipment. There are things to do. These chemical contaminants adsorb on the surface of the product and cause defects due to chemical reactions. Therefore, in a clean room, a chemical filter is installed in a part of the circulating air conditioner in order to remove chemical contaminants (Patent Document 1).

  It is also known that the chemical filter is used for a fan filter unit (FFU) in a locally clean area (mini-environment) in a clean room (Patent Document 2).

  On the other hand, a filter using a photocatalyst such as titanium oxide decomposes the contacted organic component. Since the photocatalyst does not decompose unless irradiated with ultraviolet rays, a UV lamp must be turned on in the vicinity thereof. It is also known that an ultraviolet responsive catalyst and a UV lamp are arranged in a ceiling FFU above a semiconductor manufacturing apparatus in a clean room (Patent Document 3).

  In air conditioning other than in a clean room, an air conditioning apparatus is known in which a visible light responsive catalyst is supported on the inner surface of a transparent duct having an illumination light source (Patent Document 4).

JP 2006-292290 A JP 2006-054361 A JP 2006-322659 A JP 2006-145183 A JP 2006-112755 A

  The chemical filters of Patent Documents 1 and 2 use activated carbon, redox agents, ion exchange resins, etc. depending on the components to be removed, and remove the contaminants by physical adsorption or chemical adsorption, so the adsorption capacity gradually decreases. However, if the capacity is exceeded, it must be replaced.

  The air purification device using the ultraviolet-responsive catalyst of Patent Document 3 surrounds the UV lamp provided on the ceiling with a vertical cylindrical duct carrying the catalyst (paragraph 0019), but when ultraviolet rays leak from the duct. There is a possibility that the processing accuracy may be hindered in an exposure process for manufacturing a semiconductor.

  The technology of installing a light source in a transparent duct carrying a visible light responsive catalyst as in Patent Document 4 is that light passes through the duct carrying the catalyst, and the illuminance decreases due to dirt in the air attached to the light source. Therefore, it is difficult to apply to an air purification device for a clean room.

  The first object of the present invention is to propose an air purification apparatus for a clean room that can introduce a part of illumination light from the outside into a ventilation path in which a visible light responsive catalyst is installed.

  A second object of the present invention is to propose an air purification device for a clean room that can guide external light to a place where a visible light responsive catalyst is installed without disturbing the flow of air.

  A third object of the present invention is to propose an air purification facility that includes an air purification device and an illumination device, and uses a part of illumination light to cause a catalytic reaction for air purification.

The first means is an air purification device for a clean room,
A dust removing filter is provided on the downstream side of the air blowing case body, and a transparent daylighting portion for introducing illumination light from the outside to the case body portion upstream of the dust removing filter is formed,
A visible light responsive catalyst is installed at the appropriate place in the case body connected to the daylighting unit.
The visible light responsive catalyst is activated using illumination light introduced from the daylighting unit, and is configured to decompose pollutants in the air.

  This means proposes that a transparent daylighting unit for introducing the illumination light b from the outside is provided on the upstream side of the dust removal filter in the case body of the air purification device as shown in FIG. Since ultraviolet rays that adversely affect the production line are not used, it is suitable for application to a clean room, and light energy can be exchanged between the lighting device and the air purification device with a simple configuration.

  The “lighting unit” may have any structure as long as light can pass through a part of the case body. In addition, in order to secure sufficient illuminance on the light receiving surface, light entering from a plurality of daylighting portions may be overlapped on the same surface by reflection / refraction to have a condensing function. The “appropriate place in the case body connected to the daylighting part” means a place where light reaches directly from the daylighting part or via a mirror surface. The “clean room air purifier” purifies all or part of a clean room.

The second means includes the first means, and air blowing means is provided on the upstream side of the case body, the daylighting portion is disposed in the case body portion between the air blowing means and the dust removal filter, and The visible light responsive catalyst is disposed on or near the upstream surface of the dust removal filter, and the reflecting means for reflecting the illumination light from the daylighting portion to the position where the visible light responsive catalyst is disposed includes a blower means and a dust remover. It is provided between the filters.

This means has proposed reflecting the light taken in from the lighting part between a ventilation means and a dust removal filter to the dust removal filter side. The “reflecting means” can be formed of one or a plurality of reflecting plates. The reflecting plate can be formed in a concave curved surface having a function of diffusing the illumination lights b _U and b _L incident from the daylighting unit as shown by a solid line in FIG. This is because the dust filter having a certain width W is widely irradiated with light. As in the illustrated example, light beams introduced from a plurality of daylighting units can be condensed on the same light receiving surface.

  The third means includes the second means, and the reflecting means also serves as an airflow control baffle plate.

  Conventionally, a baffle plate is provided on a clean room FFU to adjust the direction of airflow (see, for example, Patent Document 5). In this means, the baffle plate for airflow control is also used as a means for reflecting illumination light. Propose that. Thereby, the number of members can be reduced.

  The fourth means includes the second means or the third means, and the filter medium of the dust removal filter is made of a material not containing an organic binder, and is visible on the upstream surface of the dust removal filter. A photoresponsive catalyst is provided.

  In this means, a visible light responsive catalyst is provided on the surface of the dustproof filter shown in FIG. This is to reduce the adhesion of dirt to the filter. The reason for forming the filter medium from a material that does not contain an organic binder is to prevent the photocatalyst from decomposing the binder.

  The fifth means includes the fourth means, and the visible light responsive catalyst is adhered to the surface of the dust removing filter by being dispersed in the liquid and sprayed.

  According to this means, since the visible light responsive catalyst slurry is sprayed onto the dust removal filter as shown in FIG. 7, the catalyst layer is not as thick as the chemical filter and pressure loss does not occur.

  The sixth means includes the second means or the third means, and the dust removal filter is formed in a corrugated shape, and the stationary plate carrying the visible light responsive catalyst is used for dust removal between the adjacent waves. Installed so as not to touch the filter.

  In this means, as shown in FIG. 8, it is proposed to install a fixed plate carrying a visible light responsive catalyst so as not to touch the dust filter. Thereby, an organic binder can be used for the filter medium, and the dust removal filter can be kept clean.

  The seventh means is an air purification facility including a lighting device, and includes an air purification device and a lighting device that are any of the first to sixth means, and the lighting device includes a visible light source, A light projecting unit formed on a side of the lighting device, and the air purification device and the lighting device are positioned and juxtaposed so that a part of the illumination light can be projected from the light projecting unit to the daylighting unit of the air purification device. I am letting.

  This means proposes to project a part of the illumination light from the light projecting unit of the illumination device to the daylighting unit of the air purification device. “Light projection” means emitting light into space. The visible light source refers to a light source that mainly emits only visible light, and more preferably a visible light source that does not include ultraviolet rays of 400 nm or less. With such a visible light source, it is possible to provide a part of the illumination light to the air purification device simply by providing a light projecting portion and a daylighting portion at the opposing height of each device and correctly aligning both. A positioning mechanism for determining the positional relationship between the air purification device and the lighting device may be provided on the installation surface of both devices. The “part of the illumination light” is preferably light emitted from the light source in the horizontal direction as shown in FIG.

  According to the first aspect of the invention, since the illumination light is introduced through the case body portion upstream of the dust removal filter, a part of the illumination light can be used to keep the dust removal filter clean.

  According to the invention relating to the second means, since the reflecting means for reflecting the illumination light from the daylighting portion to the arrangement location of the visible light responsive catalyst is provided, light can be reliably supplied to the visible light responsive catalyst.

  According to the invention relating to the third means, since the airflow control baffle plate is also used as the illumination light reflecting means, the number of members can be reduced.

  According to the fourth aspect of the invention, since the catalyst is provided in the dust removal filter itself, the purification ability of the catalyst can be fully utilized.

  According to the fifth aspect of the invention, since the visible light responsive catalyst is sprayed on the dust removal filter, it is not laminated like a conventional chemical filter, and the pressure loss does not increase.

  According to the sixth aspect of the invention, since the fixed plate carrying the visible light responsive catalyst is installed between the waves of the corrugated dust removal filter, the contaminants can be effectively removed.

  According to the seventh aspect of the invention, the air purification device and the lighting device are arranged in parallel on the ceiling of the clean room, and a part of the illumination light of the lighting device is taken into the air purification device. Any function of the device is not impaired.

It is a figure showing an example of application of air purification equipment concerning a 1st embodiment of the present invention. It is the longitudinal cross-sectional view which looked at the installation of FIG. 1 from the front direction. It is the longitudinal cross-sectional view which looked at the air purification apparatus of the installation of FIG. 1 from the front direction. It is a side view of the air purification apparatus of FIG. It is the cross-sectional view seen in the VV direction of the air purification apparatus of FIG. It is a perspective view of the filter for dust removal of the air purification apparatus of FIG. It is a figure which shows the manufacturing process of the filter for dust removal of FIG. It is a longitudinal cross-sectional view of the modification of the filter for dust removal of FIG. FIG. 4 is a principle diagram of the air purification device of FIG. 3. It is the longitudinal cross-sectional view seen from the front of the illuminating device of the air purification equipment of FIG. It is a side view of the illuminating device of FIG. It is the cross-sectional view which looked at the illuminating device of FIG. 10 in the XII-XII direction. It is a longitudinal cross-sectional view of the modification of the illuminating device of FIG. It is a figure which shows the example of application of the air purification equipment which concerns on 2nd Embodiment of this invention.

  FIGS. 1 to 13 show an air purification device and an air purification facility using a visible light responsive catalyst according to a first embodiment of the present invention. This air purification equipment is applied to the ceiling T of the clean room CR.

  As shown in FIG. 1, the air purification facility 2 includes an air purification device 4, a lighting device 28, and a positioning mechanism 50 formed on the ceiling T. The air purifying device 4 and the lighting device 28 are alternately arranged at predetermined positions with a certain interval.

  As shown in FIGS. 2 and 3, the air purification device 4 includes a case body 6, an air blowing means 16, a dust removing filter 20, and a reflecting plate 26 that is a reflecting means.

  The case body 6 is formed by closing the upper surface of the peripheral wall 8 at the lower end opening with the top wall 10. In a preferred illustrated example, as shown in FIG. 5, the lower surface of the case body 6 is a rectangle that is long in the front-rear direction. The lower end portion of the peripheral wall 8 of the case body is fixed to the ceiling T. The fixing method will be described later. A ventilation hole 12 is opened at an appropriate position (in the illustrated example, the center portion) of the top wall 10 of the case body.

  The case body 6 has a daylighting portion 14 in the upstream half thereof. In the present embodiment, a pair of left and right daylighting portions 14 may be formed on the left and right side walls 8a and 8b of the peripheral wall. It is particularly preferable that the daylighting unit 14 has a simple configuration such as a daylighting window in which a transparent material such as glass is fitted. This is because it is desirable to manufacture inexpensively because it is necessary to install a large number of devices in one clean room, and since there is no particular problem even if light leaks because visible light is used as a light source. This will be described later. As shown by a solid line in FIG. 4, the daylighting unit 14 in the illustrated example has a rectangular shape that extends over almost the entire length in the lateral direction of the side wall, and is disposed in the middle in the vertical direction.

  The blower means 16 is a blower fan, and is fixed directly below the vent hole 12. The blower fan is supplied with power from a power source (not shown) through the power transmission line 18. When operating one ventilation fan, you may comprise so that the electric power feeding with respect to a ventilation fan and an illuminating device may be controlled so that the adjacent illuminating device may be set to ON.

  The dust removal filter 20 is a high-performance filter such as a ULPA filter, and is fitted into the lower portion of the case body 6. The dust removing filter 20 is formed on a corrugated plate as shown in FIG. The ridgeline of this wave is oriented in the front-rear direction (the direction of the center line L of the reflector described later). The filter medium of the dust removal filter is formed without using an organic binder, and specifically, inorganic fibers (glass fibers, silica fibers, etc.) and inorganic binders (water glass, silica, bentonite, etc.) are used. Formed. A frame 21 for fixing to the case body is formed on the side of the dust removal filter.

  In order to sufficiently incorporate light into the surface of the dust removal filter, as an appropriate example, the inner surface of the housing (case body) of the fan filter unit can be mirrored with SUS (stainless steel for special applications) or the like. . Thereby, it is possible to ensure illuminance by reflecting light irregularly. Further, in order to make light easily reach the depth of the waveform dust removal filter, R of the waveform may be increased.

  A visible light responsive catalyst 22 is carried on the surface of the dust removal filter 20 as shown in FIG. In the drawing, the visible light responsive catalyst is exaggerated and represented by white circles. In order to carry the visible light responsive catalyst on the dust removal filter, fine particles of several tens of nanometers as the photocatalyst may be sprayed from the upstream side of the dust removal filter. The visible light responsive catalyst is selected so that a sufficient catalytic reaction can be obtained at an illuminance of about 300 lx. Examples of suitable catalysts are those obtained by introducing metal ions and nitrogen into titanium oxide, such as zinc oxide and tungsten oxide.

  FIG. 7 shows a manufacturing process of the dust removal filter of the present invention. The visible light responsive catalyst is made into a slurry dispersed in water and sprayed on the upstream surface of the ULPA filter from the spray nozzle N to be uniformly attached. As the water in the slurry evaporates, only the photocatalyst fine particles remain on the filter medium surface of the ULPA filter.

  FIG. 8 shows a modification of the present embodiment, in which a visible light responsive catalyst is supported on the surface of a fixed plate 24 arranged in the vicinity of the upstream side of the dust removal filter instead of the surface of the dust removal filter 20. is there. The fixing plate may be inserted between the waves of the corrugated dustproof filter 20 and provided so that both ends of the fixing plate are connected to the peripheral wall 8 or the frame 21 of the case body.

  The reflection plate 26 is disposed at substantially the same height as the daylighting unit 14 between the air blowing means 16 and the dustproof filter 20. The reflection plate 26 is an inclined plate that is inclined upward with the back surface facing the daylighting portion 14 provided on the side wall of the case body. The back surface is mirror-finished so that the illumination light incident from the daylighting unit 14 can be reflected downward. In a preferred example of illustration, the center line L in the front-rear direction shown in FIG. 5 is symmetric with respect to the axis of symmetry, and incident light from the daylighting portions 14 on both the left and right sides can be projected downward.

  The reflection plate 26 also serves as a baffle plate for airflow control, and a ventilation path P is formed between the left and right ends of the reflection plate and the inner surface of the case body 6. Even if it also functions as an air flow control function, the main function is a reflection action, and therefore it is preferable to avoid a structure that impairs this action (such as a vent hole for air flow control). The higher the reflectivity of the reflector, the better, but it is desirable that the illuminance on the upstream surface of the dust removal filter is about 300 lx.

  In the present embodiment, the reflection plate 26 is formed in a rectangular shape that is long in the direction of the center line L as shown in FIG. Over the entire length of the central axis L, the cross-sectional shape of the reflector perpendicular to the axis is constant, so that the distribution of light in the longitudinal direction (direction of the central axis) of the dust removal filter becomes uniform.

  Although various shapes of the reflection plate 26 are conceivable, in the illustrated example, as shown in FIG.

FIG. 9 shows an example of the action of the reflector 26 having a cross-sectional arc shape. For convenience of explanation, the cross-sectional shape of each of the half portions 26a and 26b of the reflector 26 is an arc shape centered on the points O1 and O2. Illumination light b _U incident through the upper edge of one of the lighting unit 14 is reflected at point A1, B1 on the back surface of the half portion 26a of the reflector 26, and reaches the C1 of the upper surface of the dust removing filter 20. The illumination light b _L light incident through the lower edge of one of the daylighting portions 14 is reflected at the point D1 and reaches E1 on the upper surface of the dust removal filter 20. Accordingly, the half portion 26a of the reflecting plate projects illumination light at least in the range from the point C1 to the point E1 in the filter. Similarly, the other half portion 26b of the reflecting plate projects illumination light at least in the range from the point C2 to the point E2 in the filter. Therefore, it is possible to irradiate light to almost the entire short direction of the dust removal filter.

  In addition, unlike the example of illustration, it is good also considering the folding direction of the filter 20 for dust removal as the direction rotated 90 degrees with respect to FIG. By doing so, it is possible to evenly irradiate the dust filter with light.

  In FIG. 9, only parallel light rays are drawn as light passing through the daylighting section. However, since light that is inclined with respect to the horizontal line is actually incident, various incident angles are further applied to the upper surface of the dust removal filter 20. Light enters. As a result, the visible light responsive catalyst carried by the dust removal filter 20 can be made to work sufficiently.

  As shown in FIGS. 10 and 11, the illuminating device 28 has a box-shaped body 30 that has a cylindrical shape with an opening at the lower end. This box is arranged so that its left and right side walls are substantially parallel to the left and right side walls of the case body, and its lower end is fixed to the opening of the ceiling T. A transparent plate 34 such as a glass plate is fitted in the illumination port 32. Further, a pair of left and right light sources (visible light sources) 36 are preferably arranged inside the box 30. This light source can be a rod-shaped light source (such as a fluorescent lamp) that is long in the front-rear direction. Note that the visible light source is not limited to a light source that does not emit ultraviolet light at all, and a visible light source that does not include ultraviolet light of 400 nm or less is acceptable. This is because in recent photolithography techniques, the wavelength of irradiated ultraviolet rays has been shortened, and it is common to use ultraviolet rays having a wavelength of 400 nm or less.

  The box 30 has a light projecting unit 38 at a location different from the illumination port 32. The light projecting unit 38 is disposed at such a height that a light beam emitted from the light source 36 through the light projecting unit 38 reaches the daylighting unit 14. As shown in FIG. 2, in the illustrated example, the light source 36, the light projecting unit 38, the daylighting unit 14, and the reflection plate 26 are substantially at the same height. As shown in FIG. 11, the light projecting unit 38 has a rectangular shape elongated in the horizontal direction, and has the same horizontal length as the rod-shaped light source 36 and the daylighting unit 14. This is because the illumination light emitted from the entire length of the light source 36 to the side is taken into the air purification device. The vertical width of the light projecting unit 38 and the daylighting unit 14 is preferably larger than the diameter D of the light source 36.

  One of the features of the lighting device 28 and the air purification device 4 is that when both devices are arranged at a certain position, the direction is changed by the reflector 26 through the light projecting unit 38 and the daylighting unit 14 from the light source 36 to remove dust. The optical path to the filter 20 for use. Moreover, the optical path does not require special light guiding means such as an optical duct. The illumination light that has deviated from the optical path may slightly leak to the outside. This is because the illumination light does not contain ultraviolet rays and does not adversely affect the semiconductor manufacturing process. What should be introduced in order to introduce illumination light is to provide the light projecting unit 38 and the daylighting unit 14, and to make the rear surface of the existing baffle plate a mirror-finished and easy-to-reflect shape. Is not necessary. Therefore, the manufacturing cost can be reduced.

  Another feature of the illuminating device 28 and the air purification device 4 is that light that travels outward in the horizontal direction out of the illuminating light emitted from the light source 36 is used for the photocatalytic reaction. In the ceiling-type illumination system, the light directed downward from the light source is direct light that directly illuminates the room, so that the illuminance in the room is large. Also, the upward light from the light source hits the top wall of the box and is reflected indoors. Therefore, in the present invention, illumination light directed to the side from the light source is taken out, and the photocatalyst can be activated without substantially reducing the illumination capability of the illumination device.

  The positioning mechanism 50 is configured as a plurality of fitting holes 52 opened in the ceiling T of the clean room as shown in FIG. The lower ends of the case body 6 and the box 30 can be fitted into the fitting holes 52. In this fitted state, the light projecting portion 38 of the box 30 and the daylighting portion 14 of the case body 6 are opposed to each other as shown in the figure. In a preferred illustrated example, the upper edge of each fitting hole 52 is an upward stepped portion 54 on which the box and case body can be placed.

  In the illustrated example, the structures of the daylighting unit 14, the reflection plate 26, and the lighting device 28 are a preferred example, and can be appropriately changed. For example, in this example, on the assumption that the light source of the lighting device is a rod-shaped fluorescent lamp, a pair of left and right lighting units are provided corresponding to the light sources of the lighting devices adjacent to the left and right, and left and right symmetrical corresponding to the lighting unit A reflective plate is provided. However, if the light source emits light in all four directions in the horizontal direction, a daylighting unit is formed on all four sides of the rectangular case body, and the reflecting means (reflection) reflects light from the daylighting unit to the catalyst installation surface side. It is also possible to provide a plate or the like for each daylighting unit.

  FIG. 13 shows a modification of the lighting device 28. In the illustrated example of FIG. 10 described above, light rays traveling inward in the horizontal direction from the two light sources do not contribute to the photocatalytic reaction and are not sufficiently utilized for illumination. Therefore, as shown in FIG. 13, auxiliary reflection means 42 </ b> A and 42 </ b> B are provided that return the light rays traveling inward in the horizontal direction from the respective light sources to the light projecting unit side.

  With the above configuration, when power is supplied from the power source (not shown) to the blower unit 16 and the illumination device 28, the light source 36 first emits light and is reflected by the light beam projected downward in the illumination light and the top wall of the box. Most of the light rays pass through the transparent plate 34 and illuminate the clean room CR. On the other hand, the light beam projected from the light source 36 to the side passes through the light projecting unit 38 and the daylighting unit 14, is reflected by the back surface of the reflecting plate, and reaches the surface of the dust removal filter 20. As a result, the visible light responsive catalyst 22 is activated, and a catalytic reaction is possible.

  Further, air is sucked into the case body 6 from the back of the ceiling of the clean room CR by the action of the air blowing means 16, and the air passes through the air passages P on both sides of the reflector and reaches the surface of the dust removal filter 20. Here, pollutants contained in the air are decomposed. Also, dust in the air is removed by a dust removal filter and blown into the clean room CR.

  In the present invention, the visible light responsive catalyst is selected based on the subject of utilizing a part of the illumination light for decomposing the pollutant. Chemical contaminants such as organic components contained in the air are decomposed into substances that do not affect the product by contacting the visible light responsive catalyst. When a visible light responsive catalyst is used, an organic component having a relatively high boiling point is an object of decomposition, but this is sufficient in the production of a semiconductor.

  Hereinafter, other embodiments of the present invention will be described. In these descriptions, the same components as those in the first embodiment are denoted by the same reference numerals and the description thereof is omitted.

  FIG. 14 shows an air purification device according to the second embodiment of the present invention. In the present embodiment, the FFU 60 equipped with a filter (chemical filter or the like) 62 and the lighting device 28 are installed on the ceiling T of the clean room CR as in the conventional case. The air purification device 4 of the present invention is applied. It is standard that the chemical filter is arranged upstream of the fan as shown in view of ease of replacement.

  The mini-environment M is an area that is distinguished from other parts of the clean room in order to maintain a particularly clean state in the clean room. The casing itself of the mini environment M is a case body 6. The upper end portion and the remaining portion of the inside of the case body 6 are divided by a dust removal filter 20 fixed to the inner surface of the peripheral wall 8 of the case body. A vent hole 12 is opened at a part of the top wall 10 of the case body 6, preferably at the center, and a blower means 16 is provided below the vent hole.

  In this embodiment, in order to introduce light from the illumination device 28 in the clean room into the mini-environment M, a sufficiently large daylighting unit 14 is provided on at least the top wall 10 of the case body 6. As a preferred example, the loop-shaped daylighting portion 14 may be formed so as to surround the vent hole 12, and the entire top wall 10 may be formed of a transparent synthetic resin or the like.

Moreover, in this embodiment, it is desirable to make the space | interval of the illuminating devices 28 of the ceiling T of a clean room comparatively narrow, and this can introduce illumination light just under the ventilation means 16, as shown in the example of illustration.

The advantages of the present invention disclosed in the detailed description of the invention are summarized as follows.
(1) In a manufacturing environment such as a semiconductor, organic components having a relatively high boiling point such as phthalate ester and siloxane are components that have a high contamination effect because they are easily adsorbed on the surface of a wafer or the like. In addition, various chemical substances such as solvents diffuse from the manufacturing apparatus into the clean room, causing fogging of the lens and the like. Since these components are decomposed by the visible light responsive catalyst, the influence of adsorption contamination is reduced.
(2) The fine particles of the visible light responsive catalyst having a particle size of 100 nm or less sprayed on the dust-proof ULPA filter firmly adhere to the fibers of the filter medium and do not fall off. Moreover, since it is not laminated | stacked on FFU like the conventional chemical filter, a pressure loss does not increase.
(3) The illuminance necessary for increasing the decomposition action is only visible light of 300 lx or more, and it can be used as general illumination in a clean room. Avoided.
(4) Moreover, in the clean room in which the manufacturing apparatus is installed, the lighting fixture replacement work can be performed independently of the filter replacement within the system ceiling.
(5) The clean room is originally an environment with little dust and the like, and the surface of the visible light responsive catalyst is hardly contaminated, and the decomposition performance is maintained for a long time.
(6) A dust removal filter using a visible light responsive catalyst does not need to be replaced / discarded unlike a conventional chemical filter, and is therefore a material with a low environmental load.

DESCRIPTION OF SYMBOLS 2 ... Air purification equipment 4 ... Air purification apparatus 6 ... Case body 8 ... Peripheral wall 8a, 8b ... Side wall 10 ... Top wall 12 ... Vent hole 14 ... Daylighting part 16 ... Air blower 18 ... Power transmission line 20 ... Dust removal filter 21 ... Frame DESCRIPTION OF SYMBOLS 22 ... Visible light response catalyst 24 ... Fixed plate 26 ... Reflecting means (reflecting plate) 26a, 26b ... One half part and other half part of a reflecting plate 28 ... Illuminating device 30 ... Box 32 ... Illumination port 34 ... Transparent plate 36 ... Light source 38 ... Projection part 42A, 42B ... Auxiliary reflection means 50 ... Positioning mechanism 52 ... Fitting hole 54 ... Upward step part 60 ... FFU 62 ... Chemical filter CR ... Clean room T ... Ceiling P ... Ventilation path M ... Mini environment
N ... Spray nozzle L ... center line _b, b _U, b L _... illumination light A1, B1, D1, A2, B2, D2 ... light reflection points C1, E1, C2, E2 ... arrival point of the light

Claims (7)

An air purification device for a clean room,
A dust removing filter is provided on the downstream side of the air blowing case body, and a transparent daylighting portion for introducing illumination light from the outside to the case body portion upstream of the dust removing filter is formed,
A visible light responsive catalyst is installed at the appropriate place in the case body connected to the daylighting unit.
This visible light responsive catalyst is activated using the illumination light introduced from the daylighting unit, and is configured to decompose pollutants in the air, and is used for clean room air using a visible light responsive catalyst. Purification equipment. An air blowing means is provided on the upstream side of the case body, the daylighting portion is disposed in a case body portion between the air blowing means and the dust removal filter, and the visible light responsive catalyst is disposed on the upstream surface of the dust removal filter. Alternatively, a reflection unit that is disposed near the surface and reflects the illumination light from the daylighting unit to a position where the visible light responsive catalyst is disposed is provided between the blower unit and the dust removal filter. An air purification apparatus for a clean room using the visible light responsive catalyst according to Item 1.   3. The clean room air purifier using a visible light responsive catalyst according to claim 2, wherein the reflecting means also serves as an air flow control baffle plate. The filter medium for the dust filter is a material that does not contain an organic binder,
4. A clean room air purifier using a visible light responsive catalyst according to claim 2, wherein a visible light responsive catalyst is provided on the upstream surface of the dust removal filter.   5. The clean room air purification apparatus using a visible light responsive catalyst according to claim 4, wherein the visible light responsive catalyst is dispersed in a liquid and sprayed to adhere to the surface of a dust removal filter. .   The dust removal filter is formed in a corrugated shape, and a fixing plate carrying a visible light responsive catalyst is installed between adjacent waves so as not to touch the dust removal filter. 4. An air purification apparatus for a clean room using the visible light responsive catalyst according to 3.   The air purification device according to any one of claims 1 to 6 and an illumination device, the illumination device including a visible light source and a light projecting portion formed on a side portion of the illumination device. An air purifying facility including an illuminating device, wherein the air purifying device and the illuminating device are positioned and juxtaposed so that a part of the illuminating light can be projected from the light part to the daylighting part of the air purifying apparatus.