JP2011132098A - Ozone gas concentrator - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an ozone gas concentrator which can prevent the unstabilization of the vaporized ozone gas when a vaporized ozone gas is diluted with a dilution gas. <P>SOLUTION: In the concentrator 30, by cooling a dilution gas for diluting a vaporized ozone gas by a heat exchanger 36, the phenomenon that the vaporized ozone gas at low temperature is warmed with an oxygen gas for dilution and is made unstable is prevented, and the unstabilization of the vaporized ozone gas upon the dilution of the vaporized ozone gas with the oxygen gas for dilution is prevented. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to an ozone gas concentrator that concentrates ozone in an ozone-containing gas generated by an ozonizer by gas-liquid separation.

  Conventionally, an ozone gas concentrator that cools an ozone-containing gas generated by an ozonizer to a temperature below the boiling point of ozone and separates it into liquid ozone and non-condensable gas is known. In such an ozone gas concentrator, high-concentration ozone gas is obtained by heating and vaporizing liquid ozone in a vaporizer. Further, the high-concentration ozone gas obtained in this way is diluted with a dilution gas and adjusted to a desired ozone concentration.

  For example, in the apparatus described in Patent Document 1, liquid ozone is vaporized using heat generated by discharge power in an ozonizer, and high-concentration ozone gas obtained by vaporization is mixed with air and diluted to obtain desired ozone. Concentration ozone gas is generated.

Japanese Patent Publication No. 52-40638

  By the way, high-concentration ozone gas (hereinafter referred to as “vaporized ozone gas”) generated by the vaporization of liquid ozone tends to be unstable. For example, when some kind of decomposition trigger enters the vaporized ozone gas, the vaporized ozone gas is self-decomposed and the self-decomposition reaction is chained by the reaction heat, which may cause a rapid pressure increase. In the apparatus described in Patent Document 1, no countermeasure against such destabilization of the vaporized ozone gas has been clarified. Therefore, in diluting the vaporized ozone gas with air, it may be difficult to prevent the vaporized ozone gas from becoming unstable.

  Then, this invention is made | formed in view of such a situation, and it aims at providing the ozone concentrating apparatus which can prevent destabilization of vaporized ozone gas at the time of diluting vaporized ozone gas with dilution gas.

  The present invention relates to an ozone concentrator equipped with a liquefaction separation unit that cools an ozone-containing gas generated by an ozonizer to a temperature below the boiling point of ozone and separates it into liquid ozone and non-condensable gas. A vaporizing unit that heats ozone to vaporize and obtains vaporized ozone gas, and a cooling unit that cools a dilution gas for diluting the vaporized ozone gas obtained by the vaporizing unit are provided.

  Usually, the vaporized ozone gas vaporized by the vaporization part is in a low-temperature state that slightly exceeds the ozone boiling point. According to the above configuration, since the dilution gas for diluting the vaporized ozone gas is cooled by the cooling unit, the low temperature vaporized ozone gas can be prevented from being destabilized by being heated by the dilution gas. Therefore, the vaporized ozone gas can be prevented from becoming unstable when the vaporized ozone gas is diluted with the diluent gas.

  Furthermore, it is preferable that the vaporizing unit has a dilution gas introduction unit that receives the dilution gas cooled by the cooling unit. According to this configuration, the cooled dilution gas is introduced into the vaporization section through the dilution gas introduction section. Therefore, the vaporized ozone gas is quickly diluted in the vaporization section. Usually, the higher the ozone concentration of the ozone gas, the easier it is to destabilize. Since the high-concentration vaporized ozone gas is quickly diluted in the vaporization section, it is possible to suitably prevent the vaporized ozone gas from becoming unstable.

  Moreover, it is suitable for a dilution gas introduction part that it is a nozzle which has a blower outlet directed to the gas-liquid interface which liquid ozone vaporizes. According to this configuration, since the nozzle outlet serving as the dilution gas introduction section is directed to the gas-liquid interface where the liquid ozone is vaporized, the above-described rapid dilution of the vaporized ozone gas is preferably realized. As a result, the area occupied by the high-concentration vaporized ozone gas in the vaporization part is reduced, and the vaporized ozone gas can be more preferably prevented from becoming unstable.

  In addition, it is preferable that the vaporizing portion has a cylindrical outer wall, the nozzle is provided on the outer wall, and the blowing direction from the blowing port is inclined in the circumferential direction of the outer wall with respect to the axial direction of the outer wall. According to this configuration, the dilution gas is blown out from the outlet in a direction inclined in the circumferential direction of the outer wall with respect to the axial direction of the outer wall, and a swirling flow is generated in the vaporizing section. Thereby, the vaporization ozone gas can be diluted efficiently.

  In addition, it is preferable that a reticulate body is disposed in the vaporization portion in the vicinity of the upper part of the gas-liquid interface where liquid ozone is vaporized. According to this configuration, even when self-decomposition of vaporized ozone gas occurs near the upper part of the gas-liquid interface where liquid ozone vaporizes, the reaction heat is absorbed by heat exchange with the mesh body arranged near the upper part of the gas-liquid interface. And can prevent the chain of self-decomposing reaction.

  According to the present invention, it is possible to prevent the vaporized ozone gas from becoming unstable when the vaporized ozone gas is diluted with the diluent gas.

It is a block diagram which shows an electronic component washing | cleaning apparatus schematically. It is a figure showing roughly the ozone concentrating device concerning the embodiment of the present invention. It is a sectional side view of the vaporizer of an ozone concentrator. It is the IX-IX sectional view taken on the line of FIG. It is the VV sectional view taken on the line of FIG. It is a sectional side view of the fire extinguishing layer arrange | positioned at the vaporizer | carburetor.

  Hereinafter, preferred embodiments of an ozone concentrator according to the present invention will be described with reference to the drawings. In the following description, a case where the ozone concentrating device is applied to an electronic component cleaning device will be described as an example. In the description of the drawings, the same elements are denoted by the same reference numerals, and redundant descriptions are omitted.

  As shown in FIG. 1, the electronic component cleaning apparatus 1 generates high-concentration ozone gas using an ozone gas generation device 73, and uses high-concentration ozone water generated from the high-concentration ozone gas as a semiconductor wafer, liquid crystal, and solar cell. It is a device that sprays and cleans the surface of electronic components such as organic EL and printed circuit boards. The ozone water generation device 71 of the electronic component cleaning device 1 includes an ozone gas generation device 73 that generates concentrated ozone gas, and a dissolution unit 50 that generates high-concentration ozone water by dissolving the ozone gas in ultrapure water. . The electronic component cleaning apparatus 1 includes the ozone water generating device 71 and a cleaning unit 70 that cleans the surface of the electronic component with the high-concentration ozone water obtained by the ozone water generating device 71.

  The ozone gas generation device 73 further includes an ozonizer 10 that generates ozone gas, and a concentration device (ozone concentration device) 30 that concentrates the ozone-containing gas generated by the ozonizer 10 to a predetermined ozone concentration.

  The ozone gas generator 73 includes an oxygen tank 3 and a nitrogen tank 5. Oxygen is supplied to the ozonizer 10 from the oxygen tank 3 through the line L1. Further, a nitrogen gas supply line from the nitrogen tank 5 is joined to the line L1, and a small amount of nitrogen gas is mixed into the oxygen gas and introduced into the ozonizer 10. The ozonizer 10 generates ozone-containing gas by a discharge method using oxygen gas as a raw material. In the ozonizer 10, an ozone-containing gas having a relatively low concentration of about 10 vol% (a mixed gas of about 90 vol% oxygen gas and about 10 vol% ozone gas) is generated. Further, due to the nitrogen gas mixed in the raw material oxygen gas in a trace amount, the ozone-containing gas (non-concentrated ozone gas) generated by the ozonizer 10 contains a trace amount of nitrogen oxide (NOx) gas. The non-concentrated ozone gas delivered from the ozonizer 10 is introduced into the concentrator 30 through the line L2.

  The concentrating device 30 concentrates the non-concentrated ozone gas generated by the ozonizer 10 to a high concentration by liquefaction separation and vaporization, and further dilutes to generate a concentrated ozone gas having a predetermined ozone concentration. As shown in FIG. 2, the concentrator 30 includes a NOx removing unit 32, a gas cooling unit 33, a separation tank 34, a vaporizer (vaporizer) 35, And an exchanger (cooling unit) 36. Further, the concentrating device 30 includes a control device 20 provided outside the vacuum heat insulating chamber 31. The vacuum heat insulation chamber 31 is evacuated by the exhaust pump 37. The gas cooling unit 33 and the separation tank 34 constitute a liquefaction separation unit 42.

  The non-concentrated ozone gas from the line L2 is introduced into the NOx removal unit 32 of the concentrator 30. The NOx removal unit 32 cools the introduced non-concentrated ozone gas to below the freezing point of NOx, solidifies and captures NOx, and separates and removes it from the non-concentrated ozone gas. Oxygen and ozone having a freezing point lower than NOx pass through the NOx removing unit 32 in a gaseous state, and are introduced into the gas cooling unit 33 through the line L31. On the other hand, the NOx trapped by the NOx removal unit 32 is heated and vaporized again during the cleaning operation of the NOx removal unit 32, and is purged to a purge gas (for example, oxygen, nitrogen or non-concentrated ozone gas) as necessary. Then, the gas is discharged from the line L21 to the exhaust gas line L20. In addition, switching of the flow path of the line L31 and the line L21 is performed suitably according to a driving | running state.

  In the gas cooling unit 33, the non-concentrated ozone gas after NOx removal is cooled to a temperature not higher than the boiling point of ozone to condense and liquefy the ozone. The liquid ozone is introduced into the separation tank 34 through the line L32 and accumulates in the lower part of the separation tank 34. On the other hand, oxygen having a boiling point lower than that of ozone passes through the gas cooling unit 33 and the line L32 in a gas state without being condensed, and accumulates in the upper portion of the separation tank 34 as a non-condensed gas. The non-condensable gas that accumulates in the upper part of the separation tank 34 is mainly oxygen, and is sent out of the separation tank 34 through the line L33. By such a gas cooling unit 33 and the separation tank 34, the non-concentrated ozone gas is separated into liquefied ozone and non-condensed gas.

  As described above, the NOx removing unit 32 and the gas cooling unit 33 require a low heat source for cooling the non-concentrated ozone gas. The concentrator 30 includes a cryopump 38 as a cryogenic low heat source. The cryohead 38a of the cryopump 38 is inserted into the vacuum heat insulation chamber 31, and the cryohead 38a and the NOx removal unit 32 are connected by a heat transfer copper plate 39a. The cryohead 38a and the gas cooling unit 33 are connected by a heat transfer copper plate 39b. With this configuration, the NOx removing unit 32 and the gas cooling unit 33 can be cooled to an extremely low temperature, and the above-described NOx removal and ozone liquefaction are realized.

  One end of a U-shaped tube 41 is connected to the bottom of the separation tank 34. The other end of the U-shaped tube 41 is connected to the inlet 35 a at the bottom of the vaporizer 35. The liquid ozone accumulated in the separation tank 34 is also filled in the U-shaped tube 41. The U-shaped tube 41 is for guiding the liquid ozone in the separation tank 34 to the vaporizer 35, and for sealing the oxygen gas accumulated in the upper part of the separation tank 34 and the vaporizer 35 side by the liquid ozone. is there. The separation tank 34 and the vaporizer 35 are connected to each other by a U-shaped tube (pipe) 41 so as to be liquid-sealed.

  The U-shaped tube 41 is filled with a filler 41 a that develops capillary force and guides liquid ozone in the U-shaped tube 41 into the vaporizer 35. As the filler 41a, for example, a glass fiber in which a large number of fine silica gels and porous silicas are arranged is used. The filler 41a is densely configured to develop a capillary force, and passes through the inlet 35a at the bottom of the vaporizer 35. It is configured to enter. With this configuration, the liquid ozone in the U-shaped tube 41 is gradually introduced into the vaporizer 35 through the inlet 35a. The filler 41a is not limited to a glass fiber, and may be, for example, a thin metal material or a wire mesh filler that is closely arranged. Any material can be used.

  The vaporizer 35 is for heating and vaporizing the liquid ozone from the U-shaped tube 41. The carburetor 35 has a cylindrical outer cylinder (outer wall) 81, the lower part of which is closed by a bottom plate portion 82 that has a narrow bowl shape, and an inlet 35 a is provided at the lowermost end of the bottom plate portion 82. In addition, a concentrated ozone gas outlet 35 b is provided at the upper part of the outer cylinder 81. The inlet 35 a of the vaporizer 35 is located at a height higher than the liquid ozone level in the separation tank 34. The filler 41a that enters the inside through the inlet 35a is arranged so as to spread along the inner surface of the bottom of the vaporizer 35 so as to send liquid ozone into the vaporizer 35 by capillary force.

  A heater 35 c for heating is provided above the filler 41 a that has entered the vaporizer 35. The heater 35c heats and vaporizes liquid ozone provided to the bottom of the vaporizer 35 to a predetermined temperature (for example, about 160K). As described above, since liquid ozone from which oxygen has been separated and removed is introduced into the vaporizer 35, the vaporized ozone gas vaporized by heating has a concentration of approximately 100 vol%.

  Oxygen from the oxygen tank 3 is introduced into the vaporizer 35 via a line L12 as a dilution oxygen gas (dilution gas) for diluting the vaporized ozone gas. The vaporized ozone gas having a concentration of approximately 100 vol% obtained by vaporizing liquid ozone is diluted with the oxygen gas for dilution from the line L12 so as to have a predetermined ozone concentration (for example, 20 to 90 vol%) in the vaporizer 35 and concentrated. It is sent out as concentrated ozone gas through the ozone gas outlet 35b and the line L3.

  Here, in the concentrating device 30 according to the present embodiment, the dilution oxygen gas is cooled in advance to the vaporization temperature in the vaporizer 35. The line L12 through which the oxygen gas for dilution passes passes through the heat exchanger 36 on the upstream side of the vaporizer 35. In the heat exchanger 36, heat exchange is performed between the exhaust oxygen gas discharged from the separation tank 34 through the line L33 and the oxygen gas for dilution in the line L12. Thereby, the oxygen gas for dilution is introduced into the vaporizer 35 after being cooled to a predetermined temperature (for example, about 160 K) by the heat exchanger 36. The exhaust oxygen gas is discharged from the heat exchanger 36 to the exhaust gas line L20 through the line L23.

  Further, in the dilution of the vaporized ozone gas, the concentration control by the control device 20 is performed. The line L12 is provided with a valve 45 that opens and closes the flow path of the dilution oxygen gas outside the vacuum heat insulation chamber 31, and the line L3 also opens and closes the flow path of the concentrated ozone gas outside the vacuum heat insulation chamber 31. And a ozone concentration meter 47 for measuring the concentration of the concentrated ozone gas. The control device 20 is connected to the valves 45 and 46 and the ozone concentration meter 47 by wire or wireless so that control signals can be transmitted and received. The control device 20 receives a signal indicating the ozone concentration of the concentrated ozone gas from the ozone concentration meter 47, and appropriately controls the opening and closing of the valves 45 and 46 so that the ozone concentration becomes a desired concentration.

  The concentrated ozone gas delivered from the line L3 is introduced into the melting part 50. A part of the concentrated ozone gas is discharged to the exhaust gas line L20 through the line L25 branched from the line L3. Moreover, the line L13 from the oxygen tank 3 is also joined to the line L3, and the concentrated ozone gas in the line L3 is diluted with oxygen gas from the line L13 as necessary, and is introduced into the melting part 50. . In the present embodiment, since the vaporized ozone gas is mainly diluted in the vaporizer 35 by the dilution oxygen gas from the line L12, the line L13 can be omitted.

  As shown in FIG. 1, the dissolution unit 50 includes a dissolution module that brings concentrated ozone gas introduced from the line L3 into contact with ultrapure water introduced from the line L11. The dissolution module refers to a device that dissolves ozone gas in water, such as a polymer film, an ejector, and a microreactor. In this melting module, concentrated ozone gas is dissolved in ultrapure water, and high-concentration ozone water is generated. The surplus concentrated ozone gas that has not been dissolved in the ultrapure water is discharged to the exhaust gas line L20 through the gas line L27. On the other hand, the ozone water is introduced into the cleaning unit 70 through the line L4.

  The cleaning unit 70 sprays ozone water introduced from the line L4 from the nozzle toward the surface of the electronic component. By such injection of ozone water, the resist formed on the surface of the electronic component is cleaned and removed. That is, the cleaning unit 70 is used for resist removal of electronic components.

  As described above, all unnecessary gases (exhaust NOx gas in the line L21, exhausted oxygen gas in the line L23, exhausted ozone gas in the line L25, and exhausted ozone gas in the L27) generated in each part of the electronic component cleaning apparatus 1 are all Merge and pass through the exhaust gas line L20. Unnecessary gas in the line L20 passes through the catalyst decomposition device 7 and the exhaust gas cooler 8, and is discharged out of the system by the exhaust pump 9. The catalyst decomposition apparatus 7 decomposes the ozone gas in the unnecessary gas into a relatively harmless oxygen gas by bringing the unnecessary gas into contact with a catalyst such as activated carbon. The exhaust gas cooler 8 cools the unnecessary gas before discharging the unnecessary gas to the atmosphere.

  Next, the detail of the vaporizer | carburetor 35 of the concentration apparatus 30 is demonstrated, referring FIGS. 3-6. As shown in FIG. 3, the vaporizer 35 has a double tube structure including an outer cylinder (outer cylinder) 81 and an inner cylinder (inner cylinder) 85. The outer cylinder 81 is installed so that the axis A is along the vertical direction, and a bottom plate portion 82 that supports the filler 41a is provided at the lower part. The inner cylinder 85 is inserted into the outer cylinder 81 so as to be concentric with the outer cylinder 81. The outer cylinder 81 and the inner cylinder 85 are fixed by overlapping flanges 83 and 84 provided at the respective upper end portions via a seal member 95 and fastening with a fastening member (not shown). A lower end portion of the inner cylinder 85 is closed by a heat transfer plate portion 86. A space (substantially U-shaped in FIG. 3) sandwiched between the outer cylinder 81 and the inner cylinder 85 is formed as an inner space 35 d of the vaporizer 35.

  As described above, the filler 41a that guides liquid ozone into the vaporizer 35 is disposed below the internal space 35d, that is, between the bottom plate portion 82 and the heat transfer plate portion 86. An annular punching plate 87 having an outer diameter that is slightly smaller than the inner diameter of the outer cylinder 81 is welded to the outer peripheral surface of the lower end of the inner cylinder 85. The filler 41 a is pressed by a heat transfer plate portion 86 provided at the lower end of the inner cylinder 85 and a punching plate 87 provided around the heat transfer plate portion 86. A gas-liquid interface 41b, which is a boundary surface where liquefied ozone is vaporized, is formed along the upper end surface of the filler 41a pressed by the punching plate 87 or the like. The heater 35 c is installed on the heat transfer plate portion 86 and heats liquid ozone through the heat transfer plate portion 86 and the punching plate 87. A plurality of holes 87 a are formed in the punching plate 87.

  Further, in the outer cylinder 81, above the punching plate 87, there are provided dilution oxygen gas inlets 35e and 35f for introducing the dilution oxygen gas into the internal space 35d. The dilution oxygen gas inlets 35e and 35f are disposed at opposite positions with respect to the circumferential direction of the outer cylinder 81 as a reference. A line L12 (see FIGS. 1 and 2) from the oxygen tank 3 is branched into two paths. One line L12a is connected to the dilution oxygen gas inlet 35e, and the other line L12b is connected to the dilution oxygen gas inlet 35f. Has been.

  The vaporizer 35 has nozzles (dilution gas introduction portions) 88 and 89 connected to the lines L12a and L12b, respectively, inside the outer cylinder 81. Each of the nozzles 88 and 89 is an L-shaped pipe for receiving the dilution oxygen gas cooled by the heat exchanger 36 into the vaporizer 35, and the outlets 88 a and 89 a that are the tips of the pipes are disposed below the nozzles 88 and 89. It is directed to the formed gas-liquid interface 41b. More specifically, as shown in FIG. 4, the blowing direction D2 from the blowing ports 88a and 89a is inclined in the circumferential direction B of the outer cylinder 81 with respect to the axial direction D1 parallel to the axis A of the outer cylinder 81. It is tilted by an angle θ. The circumferential direction B here is a clockwise direction in a plan view of the outer cylinder 81. Further, the blowing direction D2 from the blowing ports 88a and 89a is the direction in which the tips of the nozzles 88 and 89 extend, that is, the direction of the center line of the piping. The inclination angle θ is preferably 20 to 45 °.

  As shown in FIG. 3, an annular fire extinguishing layer (net-like body) 90 having an outer diameter slightly smaller than the punching plate 87 is provided near the upper portion of the gas-liquid interface 41b, that is, on the punching plate 87. 88 and 89 are arranged to face each other. This fire extinguishing layer 90 is for absorbing the reaction heat by heat exchange when the vaporized ozone gas vaporized from the gas-liquid interface 41b self-decomposes. As shown in FIG. 6, the fire extinguishing layer 90 has a multi-layer structure in which a large number of annular metal meshes 91 having a mesh width d are vertically stacked. The mesh width d of the fire extinguishing layer 90 is preferably set to 0.2 to 1.0 mm from the viewpoint of preventing detonation due to self-decomposition of the vaporized ozone gas. In the present embodiment, the mesh width d of the fire extinguishing layer 90 is uniform in each layer. The fire extinguishing layer 90 may have a structure in which the mesh width d of the lower wire mesh is small and the mesh width d is increased toward the upper layer. The fire extinguishing layer 90 is not limited to a multilayer structure, and may be an integral structure.

  Next, the operation of the vaporizer 35 having the above configuration will be described. The liquefied ozone introduced into the lower part of the vaporizer 35 by the filler 41a is heated by the heater 35c and is vaporized from the gas-liquid interface 41b to become vaporized ozone gas. The vaporized ozone gas rises through the hole 87 a of the punching plate 87 and the gap between the punching plate 87 and the outer cylinder 81. Here, the dilution oxygen gas cooled by the heat exchanger 36 and introduced into the vaporizer 35 via the lines L12a and L12b generates a swirling flow in the internal space 35d, and rapidly dilutes the vaporized ozone gas. Since the flow rate of the oxygen gas for dilution is controlled by the control device 20, the concentrated ozone gas adjusted to a predetermined ozone concentration is sent to the dissolving part 50 through the concentrated ozone gas outlet 35 b and the line L 3.

  According to the concentrating device 30 according to the present embodiment described above, since the dilution gas for diluting the vaporized ozone gas is cooled by the heat exchanger 36, the low-temperature vaporized ozone gas is heated by the dilution oxygen gas and is not used. Stabilization can be prevented. Therefore, instability of the vaporized ozone gas when the vaporized ozone gas is diluted with the oxygen gas for dilution can be prevented.

  Further, since the cooled dilution oxygen gas is introduced into the vaporizer 35 through the nozzles 88 and 89, the vaporized ozone gas is quickly diluted in the vaporizer 35. Usually, the higher the ozone concentration of the ozone gas, the more likely it is to destabilize, but the high concentration of vaporized ozone gas is quickly diluted in the vaporizer 35, so that the destabilization of the vaporized ozone gas can be suitably prevented.

  Further, since the outlets 88a and 89a of the nozzles 88 and 89 are directed to the gas-liquid interface 41b where the liquid ozone is vaporized, the above-described rapid dilution of the vaporized ozone gas is suitably realized. As a result, the area occupied by the high-concentration vaporized ozone gas in the vaporizer 35 is reduced, and the vaporized ozone gas can be more preferably prevented from becoming unstable.

  Further, the oxygen gas for dilution is blown out from the blowing ports 88a and 89a in the direction inclined by the inclination angle θ in the circumferential direction B of the outer cylinder 81 with respect to the axial direction D1 of the outer cylinder 81, and swirls in the vaporizer 35. Create a flow. Thereby, the vaporization ozone gas can be diluted efficiently.

  Further, even when the self-decomposition of the vaporized ozone gas occurs near the gas-liquid interface 41b where the liquid ozone vaporizes, the reaction heat is absorbed by heat exchange with the fire extinguishing layer 90 disposed near the gas-liquid interface 41b. The chain of self-decomposition reaction can be prevented.

  In the prior art, when the vaporized ozone gas whose ozone concentration is close to 100 vol% is diluted with oxygen gas for dilution at about room temperature, there is a possibility that it becomes heatsick and becomes an ozone decomposition trigger and induces self-decomposition of the vaporized ozone gas. According to the concentrating device 30 according to the present embodiment, since the vaporized ozone gas is quickly diluted with the cooled dilution oxygen gas, such self-decomposition of the vaporized ozone gas can be prevented.

  Further, since the dilution oxygen gas is cooled by exchanging heat with the exhaust oxygen gas (non-condensed gas) from the separation tank 34, the cooling energy of the cryopump 38 is not required, and the cryopump 38 is downsized. It is possible to save energy. Furthermore, since the heat exchanger 36 is provided in the vacuum heat insulation chamber 31, a heat insulating material for cold insulation is not required, and the size reduction can be achieved.

  Furthermore, since the fire extinguishing layer 90 is disposed so as to face the nozzles 88 and 89, the vaporized ozone gas is rapidly diluted while rising in the fire extinguishing layer 90, and in a region exiting the fire extinguishing layer 90, a predetermined ozone concentration is obtained. It has dropped to. Therefore, the self-decomposition reaction of the vaporized ozone gas can be prevented. Even if an abrupt self-decomposition reaction occurs, since the mesh width d of the fire extinguishing layer 90 is small and smaller than the cell width of the triple point formed by the detonation wave, the detonation wave does not propagate and can be extinguished.

  The preferred embodiment of the present invention has been described above, but the present invention is not limited to the above embodiment. For example, in the above embodiment, the case where the oxygen gas from the oxygen tank 3 is used as the dilution gas has been described, but the exhausted oxygen gas from the separation tank 34 may be used as the dilution gas. In this case, oxygen gas in the oxygen tank 3 can be saved, and cooling by the heat exchanger 36 can be omitted, and the gas cooling unit 33 can also function as a cooling unit. Further, the dilution gas is not limited to the case where oxygen gas is used, and for example, nitrogen gas may be used, or other inert gas may be used.

  Moreover, although the said embodiment demonstrated the structure which the liquefaction separation part and the vaporization part (vaporizer) isolate | separated, it is applicable also when the liquefaction separation part and the vaporization part are comprised by the same chamber. Furthermore, in the above-described embodiment, the case where ozone concentration is performed in a continuous manner has been described. However, the present invention can also be applied to a so-called batch-type ozone concentrator that repeats liquefaction and vaporization in a single chamber.

  In the above embodiment, the case where the dilution gas is introduced into the vaporizer 35 has been described. However, the dilution gas may be introduced into the line L3 exiting the vaporizer 35, and is provided in a subsequent stage separately from the vaporizer 35. It may be introduced into the buffer tank. Moreover, although the said embodiment demonstrated the case where the dilution gas introduction part was the two nozzles 88 and 89, 1 or 3 or more may be provided.

  DESCRIPTION OF SYMBOLS 10 ... Ozonizer, 30 ... Concentrator (ozone concentrator), 35 ... Vaporizer (vaporizer), 36 ... Heat exchanger (cooler), 41b ... Gas-liquid interface, 42 ... Liquefaction separation part, 81 ... Outer cylinder ( Outer wall), 88, 89 ... Nozzle (dilution gas introduction part), 88a, 89a ... Outlet, 90 ... Fire extinguishing layer (net-like body), B ... Circumferential direction, D1 ... Axial direction, D2 ... Outlet direction.

Claims (5)

In an ozone concentrator equipped with a liquefaction separation unit that cools an ozone-containing gas generated by an ozonizer to a temperature below the boiling point of ozone and separates it into liquid ozone and non-condensable gas,
A vaporization unit that heats and vaporizes the liquid ozone separated by the liquefaction separation unit to obtain vaporized ozone gas;
A cooling unit for cooling a dilution gas for diluting the vaporized ozone gas obtained by the vaporization unit;
An ozone concentrating device comprising:   The ozone concentrator according to claim 1, wherein the vaporization unit includes a dilution gas introduction unit that receives the dilution gas cooled by the cooling unit.   3. The ozone concentrator according to claim 2, wherein the dilution gas introduction part is a nozzle having a blowout port directed to a gas-liquid interface where the liquid ozone is vaporized.   The vaporizing section has a cylindrical outer wall, the nozzle is provided on the outer wall, and the blowing direction from the blowing port is inclined in the circumferential direction of the outer wall with respect to the axial direction of the outer wall. The ozone concentrator according to claim 3, wherein   The ozone concentrating device according to any one of claims 1 to 4, wherein a net-like body is disposed in the vaporization section in the vicinity of the upper part of the gas-liquid interface where the liquid ozone is vaporized.

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