JP2011131152A - Liquid dropping device and liquid sagging preventing method in liquid dropping device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a liquid dropping device that can prevent liquid sagging and a liquid sagging preventing method in a liquid dropping device dispensing with a complicated mechanism nor control. <P>SOLUTION: The liquid dropping device 10 including a flexible tube 11 having channels for the liquid that drops inside, a nozzle 12 that is connected to an end 11a of the tube 11 and has a dropping port 12a of the liquid at a lower end, and liquid sending means 21A, 21B that send the liquid to the nozzle 12 through the tube 11. The liquid dropping device 10 drops the liquid to a workpiece 30 positioned under the dropping port 12a from the dropping port 12a. The dropping port 12a is comparted into a plurality of channels in plane view. The nozzle 12 is movably disposed with the tube 11 connected thereto, and the channels in the inside are designed to be blocked by allowing the tube 11 to be bent as the nozzle 12 moves. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to a liquid dripping device for dripping liquid onto a workpiece, and more particularly to a dripping prevention technique for preventing unnecessary dripping in the liquid dripping device.

  In various fields, various liquids are dropped on the work piece from the dropping port at the lower end of the nozzle so that the work piece is impregnated with liquid, the liquid is applied to the work piece, or the work piece is processed. There is a machining process that cleans the workpiece and causes a predetermined reaction to occur on the workpiece. In such a processing process, when the operation of the entire processing line including dripping of the liquid is stopped for a relatively long time due to the end of the machining process or an unexpected trouble, etc., or for a relatively short time in intermittent dripping of the liquid When the dripping is stopped, the liquid remaining in the nozzle or the tube connected to the nozzle may dripping unnecessarily from the dripping port at the lower end of the nozzle due to gravity, vibration, or the like. The dripping causes inconveniences such as deterioration of product quality, contamination of the apparatus, and obstruction of quantitative dropping in the next process.

  With regard to the liquid dripping prevention technology, for example, Patent Document 1 discloses that a liquid feed pipe connected to one end of a liquid feed pipe is caused to flow in a state where a predetermined liquid is filled in the liquid feed pipe. In the liquid discharge device that discharges from the nozzle provided at the other end of the liquid, at least a portion of the liquid supply pipe that is close to the nozzle is a flexible elastic pipe, and the elastic pipe is connected to the outside. Describes a liquid discharge device that can be pressed by a pressing means to block the flow of liquid at the pressed position. In the liquid ejection device described in Patent Document 1, after the liquid ejection operation is performed, the elastic tube has its own by performing pressing of the elastic tube in the vicinity of the nozzle by the pressing unit and release of the pressing. It returns to a steady state by flexibility, and its internal volume is expanded more than that during the discharge operation. As a result, negative pressure is generated in a relatively short path from the pressed point to the nozzle, and the liquid located near the nozzle is sucked inward by the negative pressure, thus preventing unnecessary dripping. Is done.

  Further, in Patent Document 2, a liquid dripping prevention part formed by winding the nozzle in a loop shape around the tip of the nozzle, a supply control valve that is provided in the nozzle and controls the supply of the processing liquid to the nozzle, A drainage pipe branched from the nozzle, and a drainage provided in the drainage pipe, which is opened when the supply control valve is closed to stop the supply of the treatment liquid and discharges the treatment liquid remaining in the nozzle A treatment liquid supply device having a control valve is described. According to the supply device described in Patent Document 2, a liquid dripping prevention unit is provided, and when the supply of the processing liquid is stopped, the processing liquid in the nozzle is discharged from the drainage pipe. It is said that sagging can be prevented.

Japanese Patent Laid-Open No. 8-166075 JP 2003-218081 A

  The liquid dripping prevention technology described in Patent Documents 1 and 2 is not only necessary for dripping liquid, but also includes liquid dripping means such as an elastic tube pressing means, a liquid supply control valve, and a drainage control valve. Since a relatively large-scale configuration for the purpose of prevention is required, the configuration and control of the apparatus and the apparatus are complicated and large, which may lead to an increase in processing cost.

  Accordingly, an object of the present invention is to provide a liquid dripping apparatus and a liquid dripping prevention method in the liquid dripping apparatus that can prevent liquid dripping without requiring a complicated mechanism or control.

  The present invention provides a flexible tube having a liquid flow path to be dropped inside, a nozzle connected to one end of the tube and having a liquid dropping port at a lower end, and the nozzle via the tube. A liquid dropping device for dropping the liquid from the dropping port to a workpiece positioned below the dropping port, the number of the dropping ports being large in plan view. The nozzle is movably arranged in a state where the tube is connected, and the movement of the nozzle causes the tube to bend and block the flow path inside the tube. By providing a liquid dropping apparatus configured as described above, the above-described problems are solved.

  The present invention also provides a flexible tube having a liquid flow path to be dropped therein, a nozzle connected to one end of the tube and having a liquid dropping port at a lower end, and the nozzle via the tube. A liquid dripping prevention method in a liquid dripping device, wherein the nozzle is dripped from the dripping port to a workpiece located below the dripping port. The problem was solved by providing a liquid dripping prevention method in a liquid dripping device, in which the tube is moved in a connected state to bend the tube and close the flow path inside the tube. Is.

  According to the present invention, dripping can be prevented without requiring a complicated mechanism or control.

FIG. 1 is a diagram showing an overall configuration of a liquid dropping apparatus according to the present invention. 2A is a longitudinal sectional view along the flow path direction of the nozzle in the apparatus shown in FIG. 1, and FIG. 2B is a plan view of the dropping port of the nozzle. FIG. 3 is a side view showing a state in which the tube is bent as the nozzle rises in the liquid dropping apparatus shown in FIG.

  Hereinafter, the present invention will be described based on preferred embodiments with reference to the drawings. As shown in FIG. 1, the liquid dropping apparatus 10 of the present embodiment includes a flexible tube 11 having a flow path of a liquid to be dropped (hereinafter also referred to as a processing liquid), and a length direction of the tube 11. A nozzle 12 having a processing liquid dropping port 12a at the lower end, and pumps 21A and 21B as liquid feeding means for feeding the processing liquid to the nozzle 12 via the tube 11.

  More specifically, the liquid dropping device 10 drops liquid from the dropping port 12a of the nozzle 12 to the workpiece 30 positioned below the dropping port 12a. The liquid dropping apparatus 10 includes a self-propelled conveying belt 13 as conveying means for conveying the workpiece 30 in the X direction (MD) in FIG. In the present embodiment, as shown in FIG. 1, a plurality of single-piece workpieces 30 are arranged on a conveyor belt 13 so as to be arranged at predetermined intervals in the conveyance direction X and conveyed.

  The liquid dropping apparatus 10 includes a plurality of (two in the present embodiment) nozzles 12 and the same number of tubes 11 as the nozzles 12, and each tube 11 has its one end 11a and its vicinity (one end) at each end. It covers the upper end 12 b of the nozzle 12 and its vicinity (upper end) and is connected to each nozzle 12. The upper ends 12b of the plurality of nozzles 12 are in the same position in the up-down direction (the direction in which the machining liquid is dropped). As shown in FIG. 1, the tube 11 is curved in a substantially U shape from the vicinity of the upper end 12 b of the nozzle 12, extends further downward beyond the dropping port 12 a of the nozzle 12, and extends in the length direction. The other end 11b is located below the dropping port 12a. In the present embodiment, the other end 11b of the tube 11 is located further below the conveyor belt 13 located below the dropping port 12a.

  Each of the plurality of tubes 11 is fixed at a position below the dropping port 12a of the nozzle 12 (the lower end of the nozzle 12). As will be described later, the nozzle 12 is arranged so as to be movable up and down. Here, “below the dropping port” means that the position when the dropping port 12a is located at the lowest position (working fluid). This means below the dropping position. Therefore, the fixing position on the other end 11b side of the tube 11 is always located below the dropping port 12a. In the present embodiment, as shown in FIG. 1, the other end 11b of each of the plurality of tubes 11 and the vicinity thereof (the other end portion) are fixed to the fixing member 14 at a position below the dropping port 12a. Such a fixed position of each of the plurality of tubes 11 is at the same position in the vertical direction (the dropping direction of the processing liquid). The fixing member 14 is a separate member from the tube 11 and is fixedly disposed at a predetermined location, and does not move even when the tube 11 is pulled.

  The nozzle 12 is arranged to be movable in a state where the tube 11 is connected. More specifically, the plurality of nozzles 12 are supported by the support member 15 at a position spaced above the conveyor belt 13 above the conveyor belt 13 and arranged at a predetermined interval in the conveyance direction X of the workpiece 30. The support member 15 is attached to the lower end of the shaft 16 attached to the drive source 17 so as to be slidable in the vertical direction. In such a configuration, when the drive source 17 is operated to move the shaft 16 upward (in the Y1 direction in FIG. 1), the support member 15 rises away from the transport belt 13 (workpiece 30), thereby The plurality of nozzles 12 rise integrally with the tube 11 connected. Further, when the drive source 17 is operated and the shaft 16 is moved downward (Y2 direction in FIG. 1), the support member 15 is lowered so as to approach the transport belt 13 (workpiece 30). The nozzle 12 is integrally lowered with the tube 11 connected thereto. As described above, the movement of the nozzle 12 is ascending or descending and is automatically performed by the driving source 17. The drive source 17 is not particularly limited as long as the operation of the shaft 16 can be controlled, and an air cylinder, a hydraulic cylinder, a servo motor, or the like can be used.

  The dropping port 12a of the nozzle 12 is partitioned into a large number of ultrafine channels 25 in a plan view, and as shown in FIG. A large number of partition walls 26 are provided. As shown in FIG. 2, the nozzle 12 in the present embodiment is a so-called honeycomb structure nozzle in which not only the dropping port 12 a but also the entire inside thereof is partitioned into a large number of ultrafine channels 25 by partition walls 26. A number of ultrathin channels 25 that penetrate in the flow direction of the machining fluid (the vertical direction in FIG. 2) are provided. The shape of the ultrafine channel 25 in plan view is not particularly limited, and can be a polygonal shape or the like in addition to the circular shape shown in FIG.

  The workpiece 30 to which the machining liquid is dropped by the liquid dropping device 10 is a sheet-like material containing an oxidizable metal and fibers, and generates heat due to an oxidation reaction between oxygen in the air and the oxidizable metal. This is an intermediate of the heating element used. A heating element is formed by dropping a processing liquid having a specific composition onto the workpiece 30. This heating element is suitably used for promoting blood circulation throughout the body by being worn on the waist or shoulders of a human body.

  The working fluid used in the present embodiment contains the components of the heating element, and is prepared by mixing a plurality of types of fluids having different hydrophilicity. More specifically, the working fluid used in this embodiment is prepared by mixing two types of fluids having different hydrophilicity, one of the two types is an aqueous electrolyte solution, and the other contains menthol. It is a solvent (menthol oil). The aqueous electrolyte solution is a catalyst for the oxidation reaction between oxygen in the air and the oxidizable metal in the heating element, and includes an electrolyte such as sodium chloride and water. Menthol is mainly used to obtain a refreshing sensation when the heating element is attached to a human body. Since menthol is a solid slightly soluble in water at room temperature, it has low hydrophilicity (high lipophilicity). Used by dispersing or dissolving in a solvent. Therefore, the processing liquid used in the present embodiment is an emulsion obtained by mixing (emulsifying) two kinds of fluids that are not mixed with each other.

  The liquid dropping device 10 includes equipment for mixing two kinds of fluids to prepare a machining liquid. Specifically, as shown in FIG. 1, two kinds of fluids that are raw materials for the machining liquid are provided. The storage tanks 20A and 20B stored independently, the processing liquid preparation means 22 for preparing the processing liquid by mixing the fluid stored in the storage tanks 20A and 20B, and a plurality of processing liquids prepared by the processing liquid preparation means 22 A substantially Y-shaped distribution pipe 23 that distributes to the tube 11, and between the storage tanks 20 </ b> A and 20 </ b> B and the processing liquid preparation means 22, the processing liquid is supplied to the nozzle 12 via the tube 11. Pumps 21A and 21B as liquid means are arranged. These parts are connected by a liquid feeding pipe 24. The electrolyte solution is stored in the storage tank 20A, and the menthol oil agent is stored in the storage tank 20B.

  As the pumps 21A and 21B, those usually used in an apparatus for handling this type of liquid can be used without particular limitation. For example, a plunger-type metering pump can be used. The name is “Hicera Pump”. Further, as the processing liquid preparation means 22, various means capable of mixing two or more kinds of fluids can be used, for example, a static mixer can be used. The static mixer is one of the static fluid mixing devices and is a known mixing device. The static mixer has a structure in which a number of fixed split blades that mix multiple types of fluid are connected in the axial direction inside the mixing tube. Mixing and emulsifying fluid without a power source such as a motor. It can be performed. In addition, the distribution pipe 23 and the liquid supply pipe 24 may be any pipes that can form a liquid flow path, and may be flexible pipes as in the case of the tubes 11 or pipes having no flexibility. May be.

  In the liquid dropping apparatus 10 having such a configuration, the pump 21A is operated to supply the electrolyte solution in the storage tank 20A to the processing liquid preparation means 22, and the pump 21B is operated to process the menthol oil in the storage tank 20B. Supply to the liquid preparation means 22. When the processing liquid preparation means 22 is, for example, a static mixer, the mixing (emulsification) proceeds while the two kinds of fluids are passed through the fixed dividing blades while passing through the processing liquid preparation means 22. Is quickly prepared. The prepared processing liquid is supplied to the distribution pipe 23 through the liquid supply pipe 24, distributed to the flow paths of the two tubes 11 by the distribution pipe 23, and then quickly supplied to the nozzle 12. It is dripped toward the workpiece 30 from the mouth 12a.

  In the present embodiment, as shown in FIG. 1, the processing liquid is dropped from a plurality of nozzles 12 to each of a plurality of single-piece workpieces 30 arranged at a predetermined interval in the conveyance direction X, Since the machining liquid is not dropped between the two workpieces 30 and 30 adjacent to each other in the transport direction X, the machining liquid is intermittently dropped from the nozzle 12 by the operation control of the pumps 21A and 21B. The dropping stop time in such intermittent dropping of the working fluid varies depending on the type of processing, etc., but is often a relatively short time of 1 second or less or several seconds, and the liquid dropping device 10 stops dropping and dropping. The processing liquid is dropped on the workpiece 30 while repeating alternately.

  When such intermittent dropping of the working fluid is performed, when the dropping is stopped for a relatively short time, the working fluid remaining in the nozzle 12 or the tube 11 connected to the nozzle 12 is dropped by the nozzle 12 due to gravity or vibration. Where there is a concern about the occurrence of so-called liquid dripping from the mouth 12a unnecessarily, the nozzle 12 is a honeycomb-structure nozzle composed of an assembly of a large number of ultrafine channels 25, and the dripping mouth 12a is viewed in plan view. , The liquid droplets are prevented from being generated. A nozzle having a dripping port divided into a large number of flow paths in plan view, preferably a nozzle having a honeycomb structure such as the nozzle 12, can maintain the negative pressure in the nozzle within a certain range by capillary action. Since the liquid located in the vicinity of the dropping port can be sucked into the inside by the negative pressure, the liquid runs out well and is effective in preventing dripping. Especially, it is a relatively short time of about 5 seconds or less, especially about 1 second or less. It is effective for preventing dripping when dripping is stopped.

  As described above, the liquid dripping prevention effect due to the structure of the dripping port 12a is more reliably exhibited, and the processing liquid is reliably supplied to each of the plurality of single-piece workpieces 30 arranged at predetermined intervals in the transport direction X. Therefore, the inner diameter of the ultrafine channel 25 is preferably 2 to 3 mm, more preferably 0.2 to 1 mm. Further, the aperture ratio in the nozzle 12 is preferably 36.5% or more, more preferably 71% or more. Here, the aperture ratio is extremely fine in the area S1 of the dropping port 12a of the nozzle 12 calculated from the inner diameter R1 (see FIG. 2B) of the dropping port 12a of the nozzle 12, and in the plan view of the dropping port 12a. This is the ratio (S2 / S1) to the area S2 obtained by excluding the total area of the partition walls 26 that define the flow path 25 from S1.

  In addition, the occurrence of liquid dripping compares the operation of the entire processing line (liquid dropping device 10) including dripping of the processing liquid over several minutes to several hours due to the end of predetermined processing or unexpected device troubles, etc. Concerns are also raised when stopping for a long time. In order to prevent such dripping when the dripping is stopped for a relatively long time, in this embodiment, the nozzle 12 is moved in a state where the tube 11 is connected, the tube 11 is bent, and the flow path inside the tube 11 is bent. Occlude. That is, by moving the plurality of nozzles 12 at the position below the predetermined processing droplet as shown in FIG. 1 upward (in the Y2 direction in the drawing) of the shaft 16 by the operation of the drive source 17, the predetermined nozzle as shown in FIG. To the standby position, the tubes 11 are raised together with the ends 11a of the plurality of tubes 11 and the vicinity thereof. As described above, since the tube 11 is fixed to the fixing member 14 at a position lower than the dropping port 12a at the processing droplet lower position, the tube 11 is connected to the nozzle 12 by the rise of the nozzle 12. The part from the one end 11a on the side to the fixing position of the fixing member 14 is pulled upward. Then, as shown in FIG. 3, the tube 11 is partially bent above the fixing position due to its own weight or tension when pulled upward, and the tube 11 is bent in the bent portion 11c. Is blocked. The standby position (lift stop position) of the nozzle 12 is set to a position where the tube 11 is bent and the internal flow path is closed. Thus, the flow of the machining liquid is blocked by the bent portion 11c, thereby preventing the occurrence of liquid dripping.

  As shown in FIG. 3, the bent portion 11 c of the tube 11 is formed in the vicinity of the upper end 12 b of the nozzle 12 to which the tube 11 is connected, particularly within 30 mm, particularly within 10 mm, from the upper end 12 b along the tube 11. Is preferred. When the bent portion 11c is formed at such a position, the flow path in the bent portion 11c is more reliably blocked, and the processing liquid remaining in the tube 11 located on the dripping port 12a side than the bent portion 11c. Since the amount of liquid droplets is relatively small, liquid dripping is less likely to occur. Further, when resuming dripping, the inside of the tube 11 located on the opposite side (pump 21A, 21B side) from the dripping port 12a with respect to the bent portion 11c. Since the amount of the processing liquid remaining in the substrate is relatively large, the processing liquid is smoothly dropped from the dropping port 12a. As in the present embodiment, raising the nozzle 12 with the other end 11b of the tube 11 fixed at a position below the dropping port 12a is advantageous in that the bent portion 11c is formed in the vicinity of the upper end 12b. is there.

  In addition, when the tube 11 is bent, the liquid may move to the dripping port 12a side and hang from the dripping port 12a. However, as described above, the dripping port 12a is partitioned into a number of flow paths in plan view. If so, the liquid is sucked into the tube 11 by capillary action, so that the occurrence of dripping due to such bending of the tube is effectively suppressed.

  The movement (rise) of the nozzle 12 for bending the tube 11 is preferably started before the operation stop (power off) of the pumps 21A and 21B for feeding the processing liquid to the nozzle 12. In particular, during the operation of the pumps 21A and 21B, it is preferable that the rise of the nozzle 12 from the predetermined processing droplet lower position to the predetermined standby position is completed, and the bent portion 11c is formed in the tube 11. The rise of the nozzle 12 is controlled in this way, and the tube 11 is bent before the pumps 21A and 21B are stopped. 1) Influence of inertia when the pump is stopped (liquid flow, pump rotation, 2) Nozzle It is possible to prevent the influence of liquid flow due to vertical movement. When the nozzle 12 starts to rise while the pumps 21A and 21B are in operation, the machining liquid cannot be properly dropped from the start of the nozzle rise until the pump stops operating, and the machining liquid is dropped during that time. The workpiece 30 may be an NG product.

  When releasing the stop of the entire processing line (liquid dropping device 10) for a relatively long time and restarting the processing, the nozzle 12 that rises from the processing droplet lower position and is in a predetermined standby position (see FIG. 3), It is lowered toward a predetermined processing droplet lower position (see FIG. 1) at a position lower than the standby position. By the lowering of the nozzle 12, the bent state of the tube 11 is eliminated, the blockage of the flow path is eliminated, and the working fluid can be circulated.

  The lowering of the nozzle 12 is preferably started after the operation start (power on) of the pumps 21A and 21B. By controlling the lowering of the nozzle 12 in this way, it becomes possible to replenish the machining liquid corresponding to the volume reduction when the flow path is closed due to the bending of the tube 11, and the air is vented, so that the machining liquid can be dripped smoothly. To be done. In addition, when the lowering of the nozzle 12 is started after the pumps 21A and 21B are operated, the appropriate dropping of the processing liquid is performed between the start of the pump operation and the completion of the lowering of the nozzle (the movement to the predetermined processing liquid drop position). Since it is not possible, the workpiece 30 to which the machining liquid is dropped during that time is an NG product.

From the viewpoint of more surely exhibiting the effect of preventing dripping due to the bending of the tube 11 described above, it is preferable that each part of the apparatus is configured as follows.
A distance L1 in the vertical direction between the dropping port 12a of the nozzle 12 at a position below the predetermined processing droplet as shown in FIG. 1 and the fixing position (fixed portion of the fixing member 14) of the tube 11 at a position below it. (Refer FIG. 1) becomes like this. Preferably it is 100-500 mm, More preferably, it is 200-300 mm.
The length (the liquid discharge side length) of the tube 11 from one end 11a (the end on the connection side with the nozzle 12) to the fixing position of the tube 11 is preferably 200 to 800 mm, more preferably 400 to 500 mm. It is. When the length of the liquid discharge side of the tube 11 is increased, the tube 11 is easily bent, which is advantageous in terms of an effect of preventing dripping. Moreover, the inner diameter of the tube 1 is preferably 6 to 10 mm, more preferably 8 to 9 mm, and the thickness of the tube 1 is preferably 0.5 to 5 mm, more preferably 2 to 3 mm.

  Further, it is preferable that at least a part of the tube 11, particularly a part extending from the one end 11 a connected to the nozzle 12 to 30 mm, particularly 10 mm, is made of silicon or fluororesin. The entire tube 11 may be formed of silicon or fluororesin. High flexibility of the tube 11 makes it easy to bend and block the flow path. However, if the flexibility is too high, the tube 11 is deformed by a positive pressure or the like when the processing liquid is dropped, and the accuracy of dropping is lowered. There is a risk of causing. Silicon and fluororesin are excellent in the balance between bendability and dropping accuracy, and are preferably used in the present invention.

  According to the liquid dripping device 10 of the present embodiment, dripping that is a concern in a relatively short time (1 second or less or several seconds) such as when dripping is stopped during intermittent dripping of the processing liquid is mainly caused in a plan view. It is prevented by the action of the nozzle 12 having the dripping port 12a partitioned into the ultrafine channel 25, and is relatively long (several minutes to several times) when the operation of the entire processing line (liquid dripping device 10) is stopped. The dripping that is concerned about time) is mainly prevented by the blockage of the flow path accompanying the bending of the tube 11 due to the movement of the nozzle 12. In addition, the nozzle 12 having the dripping ports 12a partitioned into a large number of ultrafine channels 25 in a plan view is acting not a little about the expression of the dripping prevention effect which is a concern for a relatively long time. Thus, according to the liquid dripping device 10, dripping can be prevented by effectively utilizing the basic configuration of the existing liquid dripping device without requiring a complicated mechanism or control.

  The liquid to be dropped (processing liquid) according to the present invention is not particularly limited, and the present invention can be applied to various liquids, but is particularly effective for liquids that are liable to cause dripping. Specifically, the present invention is particularly effective for a liquid having a surface tension of 72 mN / m or less, particularly 10 to 35 mN / m. The surface tension is measured using a known hanging drop method (pendant drop method). In the hanging drop method, the liquid is extruded from the tip of a narrow tube oriented in the vertical direction, and the shape, amount, density, surface / interface tension, etc. of the hanging drop hanging from the tip of the thin tube are analyzed. This is a method of calculating the surface tension.

  The working fluid used in the above embodiment is a mixed solution (emulsified solution) of an electrolytic aqueous solution and a menthol oil agent, and is a liquid containing menthol. When the menthol concentration increases, the surface tension of the liquid decreases. Tend. According to the present invention, dripping can be prevented even in a liquid having a high menthol concentration and a surface tension lower than the original. Specifically, the present invention is particularly effective for a liquid having a menthol concentration of 10% by mass or more, particularly 16% by mass or more.

  As mentioned above, although this invention was demonstrated based on the preferable embodiment, this invention is not restrict | limited to the said embodiment. For example, the nozzle 12 in the above embodiment is a honeycomb-structured nozzle whose entire interior is partitioned into a large number of flow paths in plan view, but the nozzle according to the present invention has a large number of discharge ports in plan view. What is necessary is just to be divided into the flow path, for example, the dripping port of a normal nozzle (nozzle with only one flow path) is covered with a plate-like or sheet-like member (for example, a net) having many through holes Are also preferably used in the present invention. In that case, the inner diameter of each through-hole in the sheet-like member and the opening ratio of the dropping port of the nozzle covered with the sheet-like member can be the same as those in the nozzle 12 described above.

  Further, in the above embodiment, the movement of the nozzle 12 was a rise that is a movement from a relatively low position to a high position or vice versa, but the main point is that the internal flow path is blocked by the bending of the tube 11. The movement of the nozzle 12 may be rotation or the like. Moreover, in the said embodiment, 2 liquids were mixed and the dripping liquid was prepared, However, 1 liquid may be used as a dripping liquid as it is, and 3 or more liquids may be mixed and a dripping liquid may be prepared. Further, the number of nozzles 12, the arrangement form, and the like are not limited to the above embodiment.

DESCRIPTION OF SYMBOLS 10 Liquid dripping apparatus 11 Flexible tube 12 Nozzle 12a Nozzle dripping port 13 Conveying belt 14 Fixing member 15 Support member 16 Shaft 17 Drive source 20A, 20B Storage tank 21A, 21B Pump (liquid feeding means)
22 Working fluid preparation means 23 Distribution pipe 24 Liquid feeding pipe 25 Ultra-thin channel 26 Bulkhead 30 Workpiece

Claims (6)

A flexible tube having a flow path for the liquid to be dripped inside, a nozzle connected to one end of the tube and having a liquid dripping port at the lower end, and the liquid is sent to the nozzle through the tube. A liquid dropping device for dropping the liquid from the dropping port to a workpiece positioned below the dropping port,
The dropping port is partitioned into a large number of flow paths in plan view,
The liquid dropping device, wherein the nozzle is arranged so as to be movable in a state where the tube is connected, and the tube is bent by the movement of the nozzle so that the flow path inside the tube is closed.   The movement of the nozzle is ascending or descending, and the tube is fixed at a position below the dripping port, and the rising of the nozzle causes the tube to bend and block the flow path therein. The liquid dropping apparatus according to claim 1, which is configured as described above.   The liquid dropping apparatus according to claim 1, wherein at least a part of the tube is made of silicon or fluororesin. A flexible tube having a flow path for the liquid to be dripped inside, a nozzle connected to one end of the tube and having a liquid dripping port at the lower end, and the liquid is sent to the nozzle through the tube. A liquid dripping prevention method in a liquid dripping device, comprising: a liquid feeding means for liquid dripping, and dripping the liquid from the dripping port onto a workpiece positioned below the dripping port,
A liquid dripping prevention method in a liquid dripping device, wherein the nozzle is moved in a state where the tube is connected to bend the tube and close the flow path inside the tube.   The liquid dripping prevention method in the liquid dripping device according to claim 4, wherein the movement of the nozzle is started before the operation of the liquid feeding unit is stopped.   The liquid dripping prevention method in the liquid dripping device according to claim 4 or 5, wherein the liquid has a surface tension of 35 mN / m or less.

Images