JP2011129546A - Methods of manufacturing and inspecting optical module - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a method of manufacturing an optical module for eliminating the need of an active centering process that has been required conventionally and manufacturing an optical module easily, and also to provide a method of inspecting the optical module easily during manufacture of the optical module. <P>SOLUTION: A reference module is manufactured, a form 14 fitted to an outer shape of the reference module is manufactured, a stem 21 to which a light element is mounted and a cap 23 for holding a lens are fitted to the form 14, and the stem 21 and the cap 23 are bonded, thus assembling the optical module 20. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to a manufacturing method and an inspection method of an optical module such as a TO-CAN type optical receiver module.

  In recent years, due to the development of the Internet, there has been a strong demand for speeding up and cost reduction of optical communication systems. It has become. Conventionally, when manufacturing an optical module, a method of optically coupling a lens and an optical device by active alignment is used (for example, see Non-Patent Document 1).

Here, with reference to FIG. 16, the outline of the active alignment of the TO-CAN type package which is one of the optical modules will be described.
The TO-CAN type package includes a stem 11 to which wiring pins 19 and a photodiode 12 are attached, and a cap 13 with a lens 13b that covers and seals the stem 11, and the lens 13b is operated while the photodiode 12 is operated. An active alignment process is performed in which the optical axis is aligned with the photodiode 12 and, in this state, the cap 13 is fixed to the stem 11 by YAG laser welding or the like.

J. Guo et al., "Fast Active Alignment in Photo Device Packaging", 2004 Electronic Components and Technology Conference, 2004, pp. 813-817

  When an optical module is to be manufactured at low cost, that is, in a mass production process, an operator uses an extensive YAG laser welding apparatus to perform the above-described optical adjustment (active alignment) on each optical module. ) Had to be done. For this reason, the production of the optical module has become inefficient, which has been one of the factors for increasing the cost of the optical module.

  The present invention has been made in view of the above problems, and in the case of manufacturing an optical module at a low cost, it eliminates the need for an active alignment process that has been necessary in the past, and an optical module manufacturing method that can easily manufacture an optical module, It is an object of the present invention to provide a simple optical module inspection method during manufacturing of an optical module.

An optical module manufacturing method according to the first invention for solving the above-described problems is as follows.
An optical element mounting substrate on which an optical element is mounted, and a first optical component holding member that holds a first optical component that is optically coupled to the optical element, are optically coupled to the optical element and the first optical component. The first reference optical module is manufactured by joining in a state of alignment.
The first assembly outer jig that fits into the outer shape of the first reference optical module simultaneously with the manufacturing of the first reference optical module or after the first reference optical module is manufactured. Make
Fit another optical element mounting substrate equivalent to the optical element mounting substrate and another first optical component holding member equivalent to the first optical component holding member into the first assembly outer jig. The optical module is assembled by simply joining the other optical element mounting substrate and the other first optical component holding member.

An optical module manufacturing method according to a second invention for solving the above-mentioned problem is as follows.
After the optical module manufacturing method according to the first invention,
The first reference light module includes: the first reference light module; and a second optical component holding member that holds a second optical component that is optically coupled to an optical element of the first reference light module. Bonding in a state where optical alignment of the optical element of the module and the second optical component is performed, to produce a second reference optical module,
A second outer jig for assembly that fits into the outer shape of the second reference optical module simultaneously with the production of the second reference optical module or after the production of the second reference optical module. Make
The produced optical module and another second optical component holding member equivalent to the second optical component holding member are fitted into the second outer jig for assembly, and the produced optical module The optical module is assembled only by joining the other second optical component holding member.

An optical module manufacturing method according to a third invention for solving the above-mentioned problem is as follows.
In the optical module manufacturing method according to the second invention,
The second optical component and the second optical component holding member are an arbitrary optical component and an arbitrary optical component holding member, and an arbitrary reference optical module and an arbitrary assembly corresponding to the arbitrary optical component holding member. Make an external jig for
The produced optical module and another arbitrary optical component holding member equivalent to the arbitrary optical component holding member are fitted into the arbitrary outer jig for assembly, and the produced optical module and the other optical component holding member are fitted. Join any optical component holding member,
By repeating the above procedure for a plurality of arbitrary optical component holding members, the plurality of arbitrary optical component holding members are joined in multiple stages to the manufactured optical module, and an optical module is assembled. To do.

An optical module manufacturing method according to a fourth invention for solving the above-mentioned problem is as follows.
In the optical module manufacturing method according to any one of the first to third inventions,
The optical element mounting substrate, the first optical component holding member, the second optical component holding member, or the arbitrary optical component holding member has a protrusion for positioning in the rotation direction, and the protrusion is used. Optical alignment,
The first assembling outer jig, the second assembling outer jig, or the arbitrary assembling outer jig has a groove corresponding to the protrusion, and the protrusion is fitted into the groove. It is characterized by.

An optical module manufacturing method according to a fifth invention for solving the above-described problem is
In the optical module manufacturing method according to any one of the first to fourth inventions,
Bonding of the optical element mounting substrate and the first optical component holding member, bonding of the manufactured optical module and the second optical component holding member, or the prepared optical module and the arbitrary optical component holding member The joining is performed by resistance welding or seam welding while being fitted to the first assembly outer jig, the second assembly outer jig, or the arbitrary assembly outer jig. To do.

An optical module manufacturing method according to a sixth invention for solving the above-mentioned problems is as follows.
In the optical module manufacturing method according to any one of the first to fourth inventions,
The first assembly outer jig, the second assembly outer jig, or the arbitrary assembly outer jig has a plurality of windows through which the inside can be seen,
Laser light is irradiated from the plurality of windows to bond the optical element mounting substrate and the first optical component holding member, and to bond or manufacture the manufactured optical module and the second optical component holding member. The optical module and the arbitrary optical component holding member are joined to the first assembly outer jig, the second assembly outer jig, or the arbitrary assembly outer jig. It is characterized by performing by laser welding.

An optical module manufacturing method according to a seventh invention for solving the above-mentioned problems is as follows.
In the optical module manufacturing method according to any one of the first to fourth inventions,
The first assembly outer jig, the second assembly outer jig, or the arbitrary assembly outer jig has a plurality of windows through which the inside can be seen,
One of the optical element mounting substrate and the first optical component holding member, one of the produced optical module and the second optical component holding member, or the produced optical module and the arbitrary optical Either one of the component holding members has an injection hole into which an adhesive is injected and a groove communicated with the injection hole.
The optical module produced by injecting an adhesive into the injection hole from the plurality of windows, filling the groove with the injected adhesive, and joining the optical element mounting substrate and the first optical component holding member. And the second optical component holding member or the optical module thus produced and the optional optical component holding member are bonded to each other by the first assembling outer jig and the second assembling outer jig. Alternatively, the adhesive is used while being fitted to the arbitrary assembly outer jig.

An optical module manufacturing method according to an eighth invention for solving the above-mentioned problems is as follows.
In the optical module manufacturing method according to any one of the first to seventh inventions,
The optical element mounting substrate, the first optical component holding member, the second optical component holding member, or the arbitrary optical component holding member is formed using a die press process or a metal injection mold. To do.

An optical module inspection method according to a ninth invention for solving the above-mentioned problems is as follows.
In the case of the optical module manufacturing method according to any one of the first to eighth inventions,
An optical system and a light detection device for optical coupling with an optical module being manufactured are attached to the first assembly outer jig, the second assembly outer jig, or the arbitrary assembly outer jig. ,
Attach an electrical detection device that detects electrical input / output of the optical module to the optical module being manufactured,
The quality of the operation of the optical element mounted on the optical module being manufactured is determined.

  According to the first invention, the optical module can be assembled without performing optical alignment, and the optical module can be mass-produced and manufactured at low cost.

  According to the second invention, it is possible to take a degree of freedom in optical design of the optical module.

  According to the third invention, a more complicated optical module can be manufactured at low cost.

  According to the fourth aspect of the invention, it is possible to mass-produce and manufacture an optical module at low cost with little variation in optical coupling with the optical element.

  According to the fifth aspect, the optical module can be mass-produced and manufactured at low cost without deteriorating the optical coupling with the optical element.

  According to the sixth invention, an optical module can be manufactured without deteriorating optical coupling with the optical element.

  According to the seventh invention, it is possible to manufacture an optical module at a low cost without requiring an expensive welding apparatus.

  According to the eighth invention, it is possible to manufacture an optical module with small manufacturing variation.

  According to the ninth aspect, the optical module can be inspected in a short time and at a low cost.

It is a figure explaining the optical module manufacturing method (process 1) of Example 1. FIG. It is a figure explaining the optical module manufacturing method (process 2) of Example 1. FIG. It is a figure explaining the optical module manufacturing method (process 3) of Example 1. FIG. It is a figure explaining the optical module manufacturing method (process 4) of Example 1. FIG. It is a figure explaining the 1st modification of the optical module manufacturing method of Example 1. FIG. It is a figure explaining the 2nd modification of the optical module manufacturing method of Example 1. FIG. It is a figure explaining the 3rd modification of the optical module manufacturing method of Example 1. FIG. It is a figure explaining the inspection method in the optical module manufacturing method of Example 1. FIG. It is a figure explaining the optical module manufacturing method (process 1) of Example 2. FIG. It is a figure explaining the optical module manufacturing method (process 2) of Example 2. FIG. It is a figure explaining the optical module manufacturing method (process 3) of Example 2. FIG. It is a figure explaining the optical module manufacturing method (process 4) of Example 2. FIG. It is a figure explaining the optical module manufacturing method (process 1) of Example 3. FIG. It is a figure explaining the optical module manufacturing method (process 2) of Example 3. FIG. It is a figure explaining the optical module manufacturing method (process 3) of Example 3. FIG. It is a figure explaining the conventional optical module manufacturing method.

  Hereinafter, embodiments of an optical module manufacturing method and an inspection method according to the present invention will be described with reference to FIGS.

Example 1
1-4 is a figure explaining the optical module manufacturing method of a present Example. 5-7 is a figure explaining the 1st-3rd modification of the optical module manufacturing method of a present Example. 1 to 7, reference numeral 10 is a reference module (first reference optical module), 11 is a stem (optical element mounting substrate), 12 is a photodiode (optical element), and 13 is a cap (first optical module). Optical component holding member), 13b is a lens (first optical component), 14 and 15 are molds (first assembly outline jig), 16 and 17 are electrodes, 18 is a metal marker, 19 is a wiring pin, Reference numeral 20 denotes an optical module, 21 denotes a stem (another optical element mounting substrate), and 23 denotes a cap with a lens (another first optical component holding member).

<Process 1 (passive alignment)>
In step 1, as shown in FIG. 1, four positioning metal markers 18 are formed on the stem 11, and the center of the metal marker 18 and the corner of the photodiode 12 are aligned. A photodiode 12 is mounted on the stem 11. The positioning metal marker 18 is formed by a photolithography technique and a metal vapor deposition technique. The stem 11 is provided with a protrusion 11a as a rotation direction marker so as not to cause a rotation shift in the optical axis direction. Further, as shown in FIG. 2 described later, the cap 13 is similarly provided with a rotation direction marker 13a so as not to cause a rotational deviation in the optical axis direction.

<Process 2 (active alignment)>
In step 2, as shown in FIG. 2, the photodiode 12 on the stem 11 and the cap 13 holding the lens 13b are aligned by an active alignment method. At this time, the photodiode 12 and the lens 13b of the cap 13 are mounted on the same optical axis. In this state, the stem 11 and the cap 13 are bonded using an adhesive means such as YAG laser welding technique, resistance welding (for example, seam welding) or epoxy solder. The completed optical module is referred to as a “reference module” (reference numeral 10) in which the optical axes of the photodiode 12 and the lens 13b of the cap 13 are aligned on the same line.

<Step 3 (Formwork production)>
In step 3, as shown in FIG. 3, the mold 14 is made by, for example, metal cutting so as to be fitted to the outer shape of the reference module 10. The mold 14 is shaped like the outer shape of the reference module 10. Since the reference module 10 has a substantially cylindrical shape, a substantially cylindrical cavity portion 14a is formed at the center of the mold 14 and grooves 14b and 14c corresponding to the protrusions 11a and 13a are formed. (Refer to FIG. 4 described later).

<Process 4 (mass production process)>
In step 4, that is, in the mass production step, as shown in FIG. 4, the cap 23 is first fitted into the manufactured mold 14, and then the stem 21 is fitted. At this time, the cap 23 body is fitted into the cavity portion 14a, the projection 23a is fitted into the groove 14b, and then the stem 21 body is fitted into the cavity portion 14a, and the projection 21a is fitted into the groove 14c. As a result, the photodiode on the stem 21 and the optical axis of the lens of the cap 13 automatically coincide with each other without active alignment. The cap 23 and the stem 21 have the same specifications as the cap 13 and the stem 11 of the reference module 10.

  In this state, the optical module 20 having the same optical performance as the reference module 10 is completed by joining the stem 21 and the cap 23 by resistance welding, YAG laser welding, or an adhesive.

  In Step 3, it is possible to assemble a plurality of optical modules with high accuracy and at the same time in Step 4, simply by producing a plurality of molds 14 in Step 3.

  In addition, it is desirable to produce the formwork produced using the reference module 10 according to the joining method.

  For example, when performing resistance welding, it is preferable to use an insulator such as ceramic as the material of the mold in order to prevent current from flowing through the mold itself. When the ceramic mold 15 is used, resistance welding between the stem 21 and the cap 23 is possible by using the resistance welding electrode 16 and the electrode 17 as shown in FIG. Note that the mold 15 is only different in material and has the same shape as the mold 14.

  When YAG laser welding is performed, it is preferable to provide a plurality of welding windows 14d on the mold 14 as shown in FIG. By using these windows 14d, YAG laser welding of the stem 21 and the cap 23 becomes possible. For example, joining is performed at black circles in the figure.

  When joining with an adhesive or an epoxy resin, as shown in FIG. 7, an injection hole for injecting an adhesive or the like into the cap 23 (or the stem 21) itself corresponding to the position of the window 14d. 23b and a groove 23c communicating with the injection hole 23b and filled with an adhesive or the like may be provided. By providing such a structure, the cap 23 and the stem 21 are joined by injecting an adhesive or the like from the injection hole 23b using the window 14d in a state where the cap 23 and the stem 21 are fitted. Can be performed.

  In addition, although cutting was mentioned as an example of the preparation means of a mold mentioned above, you may produce a mold by pouring gypsum, silicone, etc. into the frame containing the reference module 10. FIG.

  In addition, the stems 11 and 21, the caps 13 and 23, and the like may be manufactured by applying a die press process, a metal injection mold, and other highly accurate forming methods.

  Next, a simple inspection method when manufacturing an optical module by the optical module manufacturing method described in this embodiment will be described.

  In the optical module inspection method according to the present embodiment, as shown in FIG. 8, the optical fiber 31 and the collimating optical system 32 are attached to the mold 14 (or the mold 15), and the DC probe 33 is used for the optical module 20. An electrical inspection system such as an RF probe 34 is provided.

  During the manufacture of the optical module 20, first, inspection light is introduced from the optical fiber 31, so that light is irradiated from the collimating optical system 32 to the photodiode of the optical module 20 (stem 21) and optically coupled. The received photocurrent signal is detected by the RF probe 34 connected to the wiring pin 29 of the stem 21, for example, a signal such as a received waveform, whereby the characteristics of the photodiode can be known, and the photodiode is normal. It can be confirmed whether or not the optical receiving operation is performed.

  By the above method, it is possible to use the optical module as an inspection method for determining the quality of the operation of the optical module. Introducing such an inspection method into the above manufacturing method leads to simplification of the manufacturing and inspection processes, and further cost reduction of the optical module is possible.

(Example 2)
9-12 is a figure explaining the optical module manufacturing method of a present Example. The steps from Step 1 to Step 3 are different from those in Example 1. In addition, about a code | symbol, the same code | symbol as Example 1 is used about an equivalent structure.

<Process 1 (passive alignment)>
In step 1, as shown in FIG. 9, a recess 11b having a diameter of 50 microns is formed on the stem 11 instead of the metal marker 18 shown in FIG. The photodiodes 12 are mounted on the stem 11 after the positions of the recess 11b formed on the stem 11 and the light receiving surface of the photodiode 12 are aligned, so that the mounting is performed with high accuracy.

<Process 2 (active alignment)>
A frame 41 fitted to the stem 11 and the cap 13 and a frame 42 fitted only to the cap 13 are prepared in advance. At this time, the frame 41 is formed with a groove 41a fitted to the protrusion 13a and the groove 41b fitted to the protrusion 11a, and the frame 42 is formed with a groove 42a fitted to the protrusion 13a.

  Then, in step 2 of the present embodiment, as shown in FIG. 10, at the time of alignment, the light from the photodiode 12 and the lens of the cap 13 is also used by using the prepared frame 41 and the frame 42 together with the stem 11 and the cap 13. About the axis, active alignment is performed in the rotational direction and the vertical direction, and the photodiode 12 and the lens of the cap 13 are mounted on the same optical axis. In this state, the stem 11 and the cap 13 are bonded using a bonding method such as YAG laser welding technology, resistance welding, or epoxy solder, and the completed optical module is referred to as a “reference module” (as in the first embodiment). Reference numeral 10).

<Step 3 (Formwork production)>
In step 3, as shown in FIGS. 11A and 11B, the frame 41 and the frame 42 are joined by performing YAG laser welding of the frame 41 and the frame 42 in the state of active alignment in step 2. The formed mold 40 (first assembling outer jig) is produced. For example, joining is performed at black circles in the figure. Thereafter, the reference module 10 is removed. The mold 40 produced in this process is used as a mold for a mass production process. This mold 40 is equivalent to the mold 14 shown in the first embodiment.

<Process 4 (mass production process)>
In the process 4, that is, the mass production process, as shown in FIG. 12, the cap 23 is first fitted into the mold 40, and then the stem 21 is fitted. In this state, the stem 21 and the cap 23 are fitted. Are joined by resistance welding, YAG laser welding, an adhesive, or the like, so that the optical module 20 having the same optical performance as the reference module 10 can be mass-produced.

  In addition, although description and illustration were abbreviate | omitted in the present Example, it is desirable to produce a formwork etc. according to the joining method similarly to Example 1. FIG. For example, a window for YAG laser welding or bonding (see the window 14d shown in FIGS. 6 and 7) is provided on the mold side, or an injection hole and a groove (see FIG. 7) for the adhesive on the optical module side. An optical module may be manufactured by providing an injection hole 23b and a groove 23c). In addition, the optical module inspection method shown in the first embodiment (FIG. 8) can be applied.

(Example 3)
13 to 15 are views for explaining an optical module manufacturing method according to the present embodiment. The present embodiment is applied to a more complex optical module (for example, a basic optical module in which a plurality of optical components are incorporated in multiple stages) using the first and second embodiments. In this way, there is a point in producing molds for mass production. 13 to 15, the same reference numerals as those in the first and second embodiments are used for the equivalent configurations.

<Step 1>
Metal mold 14 (or mold 40) fitted to the reference module 10 and metal frame fitted to the fiber module 51 (second optical component holding member) holding the fiber (second optical component). 52 is prepared in advance. The fiber module 51 has a protrusion 51a, and the metal frame 52 has a groove 52a that fits into the protrusion 51a.

  In step 1, as shown in FIG. 13, active alignment is performed using the produced mold 14 (or mold 40) and metal frame 52 together with the reference module 10 and the fiber module 51 at the time of alignment. Optical coupling between the photodiode mounted on the reference module 10 and the fiber module 51 is performed.

<Step 2>
In step 2, as shown in FIG. 14, the reference module 10 and the fiber module 51 are joined using a YAG laser welding technique, resistance welding, epoxy solder, or the like in an aligned state. Optically coupled. For example, joining is performed at black circles in the figure. By taking out the joined optical module from the mold 53, a new “reference module” (reference numeral 50; second reference optical module) is completed. At the same time as the above joining, in a state where the alignment is achieved, the mold 14 (or the mold 40) and the metal frame 52 are further joined by using an adhesive means such as YAG laser welding technology or epoxy solder, and a new The mold 53 (second assembly outer jig) is completed. For example, joining is performed at a white circle in the figure.

<Step 3>
In step 3, as shown in FIG. 15, the optical module 20 mass-produced in Example 1 and Example 2 and the fiber module 61 (the same as the fiber module 51) are used, using the mass production mold 53 produced in Step 2. The optical module having the same optical characteristics as that of the reference module 50 completed in the step 2 can be mass-produced by performing YAG laser welding, for example, at the black circles in the drawing and joining them.

  Although description and illustration are omitted also in this embodiment, a mold or the like may be manufactured according to the joining method as in the first embodiment. For example, for YAG laser welding or adhesion on the mold side. Window (see window 14d shown in FIGS. 6 and 7) or an adhesive injection hole and groove (injection hole 23b and groove 23c shown in FIG. 7) on the optical module side. An optical module may be manufactured. In addition, the optical module inspection method shown in the first embodiment (FIG. 8) can be applied.

  In addition, the fiber module 51 and the like may be manufactured by applying a die press process, a metal injection mold, and other highly accurate forming methods.

  Further, the configuration or structure of the present invention is not limited to the above-described configuration or structure, and various modifications can be made without departing from the scope and spirit of the present invention. It is obvious to those with common sense knowledge. Therefore, the scope of the present invention should not be limited to the above-described embodiments, but should be defined within the scope of the appended claims and their equivalents.

  For example, the fiber module 51 is an arbitrary optical component holding member that holds an arbitrary optical component, and an arbitrary reference module and an arbitrary formwork corresponding to the arbitrary optical component holding member are manufactured. And any other optical component holding member equivalent to any optical component holding member are fitted into any formwork, and the manufactured optical module 20 and the like are joined to any other optical component holding member. By repeating these procedures for a plurality of arbitrary optical component holding members, the plurality of arbitrary optical component holding members are joined to the manufactured optical module 20 or the like in multiple stages, and the optical module is assembled. Also good.

  The present invention is applied to an optical module that requires optical coupling between an optical element and an optical component (lens, fiber, etc.). In particular, as a manufacturing method and an inspection method of an optical module using a TO-CAN type package, Is preferred.

10, 50 Reference module 11, 21 Stem 11a, 21a Protrusion 11b Depression 12 Photodiode 13, 23 Cap 13a, 23a Protrusion 13b Lens 14, 15, 40, 53 Mold 14a Cavity 14b, 14c Groove 14d Window 16, 17 Electrode 18 Metal marker 19, 29 Wiring pin 20 Optical module 23b Injection hole 23c Groove 31 Optical fiber 32 Collimating optical system 33 DC probe 34 RF probe 41, 42 Frame 41a, 41b, 42a Groove 51 Fiber module 51a Protrusion 52 Metal frame 52a Groove

Claims (9)

An optical element mounting substrate on which an optical element is mounted, and a first optical component holding member that holds a first optical component that is optically coupled to the optical element, are optically coupled to the optical element and the first optical component. The first reference optical module is manufactured by joining in a state of alignment.
The first assembly outer jig that fits into the outer shape of the first reference optical module simultaneously with the manufacturing of the first reference optical module or after the first reference optical module is manufactured. Make
Fit another optical element mounting substrate equivalent to the optical element mounting substrate and another first optical component holding member equivalent to the first optical component holding member into the first assembly outer jig. An optical module manufacturing method comprising assembling an optical module only by joining the other optical element mounting substrate and the other first optical component holding member. After the optical module manufacturing method according to claim 1,
The first reference light module includes: the first reference light module; and a second optical component holding member that holds a second optical component that is optically coupled to an optical element of the first reference light module. Bonding in a state where optical alignment of the optical element of the module and the second optical component is performed, to produce a second reference optical module,
A second outer jig for assembly that fits into the outer shape of the second reference optical module simultaneously with the production of the second reference optical module or after the production of the second reference optical module. Make
The produced optical module and another second optical component holding member equivalent to the second optical component holding member are fitted into the second outer jig for assembly, and the produced optical module An optical module manufacturing method comprising assembling an optical module only by joining the other second optical component holding member. In the optical module manufacturing method according to claim 2,
The second optical component and the second optical component holding member are an arbitrary optical component and an arbitrary optical component holding member, and an arbitrary reference optical module and an arbitrary assembly corresponding to the arbitrary optical component holding member. Make an external jig for
The produced optical module and another arbitrary optical component holding member equivalent to the arbitrary optical component holding member are fitted into the arbitrary outer jig for assembly, and the produced optical module and the other optical component holding member are fitted. Join any optical component holding member,
By repeating the above procedure for a plurality of arbitrary optical component holding members, the plurality of arbitrary optical component holding members are joined in multiple stages to the manufactured optical module, and an optical module is assembled. An optical module manufacturing method. In the optical module manufacturing method according to any one of claims 1 to 3,
The optical element mounting substrate, the first optical component holding member, the second optical component holding member, or the arbitrary optical component holding member has a protrusion for positioning in the rotation direction, and the protrusion is used. Optical alignment,
The first assembling outer jig, the second assembling outer jig, or the arbitrary assembling outer jig has a groove corresponding to the protrusion, and the protrusion is fitted into the groove. An optical module manufacturing method characterized by the above. In the optical module manufacturing method according to any one of claims 1 to 4,
Bonding of the optical element mounting substrate and the first optical component holding member, bonding of the manufactured optical module and the second optical component holding member, or the prepared optical module and the arbitrary optical component holding member The joining is performed by resistance welding or seam welding while being fitted to the first assembly outer jig, the second assembly outer jig, or the arbitrary assembly outer jig. An optical module manufacturing method. In the optical module manufacturing method according to any one of claims 1 to 4,
The first assembly outer jig, the second assembly outer jig, or the arbitrary assembly outer jig has a plurality of windows through which the inside can be seen,
Laser light is irradiated from the plurality of windows to bond the optical element mounting substrate and the first optical component holding member, and to bond or manufacture the manufactured optical module and the second optical component holding member. The optical module and the arbitrary optical component holding member are joined to the first assembly outer jig, the second assembly outer jig, or the arbitrary assembly outer jig. An optical module manufacturing method, which is performed by laser welding. In the optical module manufacturing method according to any one of claims 1 to 4,
The first assembly outer jig, the second assembly outer jig, or the arbitrary assembly outer jig has a plurality of windows through which the inside can be seen,
One of the optical element mounting substrate and the first optical component holding member, one of the produced optical module and the second optical component holding member, or the produced optical module and the arbitrary optical Either one of the component holding members has an injection hole into which an adhesive is injected and a groove communicated with the injection hole.
The optical module produced by injecting an adhesive into the injection hole from the plurality of windows, filling the groove with the injected adhesive, and joining the optical element mounting substrate and the first optical component holding member. And the second optical component holding member or the optical module thus produced and the optional optical component holding member are bonded to each other by the first assembling outer jig and the second assembling outer jig. Or the optical module manufacturing method characterized by performing with the said adhesive agent, with the said external jig | tool for arbitrary assembly | attachment being fitted. In the optical module manufacturing method according to any one of claims 1 to 7,
The optical element mounting substrate, the first optical component holding member, the second optical component holding member, or the arbitrary optical component holding member is formed using a die press process or a metal injection mold. An optical module manufacturing method. In the case of the optical module manufacturing method according to any one of claims 1 to 8,
An optical system and a light detection device for optical coupling with an optical module being manufactured are attached to the first assembly outer jig, the second assembly outer jig, or the arbitrary assembly outer jig. ,
Attach an electrical detection device that detects electrical input / output of the optical module to the optical module being manufactured,
A method for inspecting an optical module, comprising: determining whether an optical element mounted on an optical module being manufactured is operating properly.

Images