JP2011128797A - Temperature control system - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a temperature control system that quickly changes a temperature of a control target while suppressing energy consumption. <P>SOLUTION: The temperature control system includes: a water passage 20 supplying normal-temperature tap water to a temperature control block 10; a tank 40 storing water therein; and a hot-water passage 30 supplying temperature-controlled hot water to the temperature control block 10. The temperature control system also includes: a mixing valve 80A adjusting a mixing ratio between the tap water and the hot water supplied to the temperature control block 10; a discharge passage 50 discharging the mixed hot water to a discharge port 52; a collection passage 60 collecting the mixed hot water to the tank 40; and a distribution valve 80B adjusting a distribution ratio between the mixed hot water discharged to the discharge port 52 and the mixed hot water collected to the tank 40. A controller 70 controls the mixing valve 80A such that the temperature of a work W becomes a target temperature, and controls the distribution valve 80B such that the ratio of the mixed hot water collected to the tank 40 becomes higher as the ratio of the hot water supplied to the temperature control block 10 is higher. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to a temperature control system that controls the temperature of a temperature control target by circulating a fluid through a heat exchange section.

  2. Description of the Related Art Conventionally, there is a temperature control system including a heating path for circulating a heated fluid, a cooling path for circulating a cooled fluid, and a bypass path for circulating a fluid that has not been heated and cooled (for example, Patent Documents). 1). The system described in Patent Document 1 mixes fluid flowing in from these paths, adjusts the temperature of the fluid, and distributes the temperature-adjusted fluid to the heat exchange unit. Specifically, the temperature of the fluid whose temperature has been adjusted is detected, and the ratio of the flow rate of the fluid flowing in from each path is controlled so that the detected temperature becomes the target temperature. And the temperature of a workpiece | work is adjusted suitably by performing heat exchange between the heat exchange part and the workpiece | work mounted on this.

  Moreover, in the system described in Patent Document 1, the fluid that has passed through the heat exchanging section is collected in a tank, and the fluid in the tank is pumped up by a pump and sent to a delivery passage. The delivery passage is branched in three directions, which are the heating path, the cooling path, and the bypass path, respectively. A heating device for heating the fluid is provided in the heating path, and a cooling device for cooling the fluid is provided in the cooling path.

JP 2009-15594 A

  By the way, in the system described in Patent Document 1, when the deviation between the target temperature of the fluid and the detected temperature is small, the ratio of the fluid circulated through the bypass path is increased. For this reason, in a system without a bypass path, compared with the case where the temperature of the fluid is adjusted by mixing the fluid circulated only through the heating path and the cooling path, the energy consumption is reduced in the system described in Patent Document 1. Can be suppressed.

  However, in the system described in Patent Document 1, the fluid that has passed through the heat exchange unit is collected in a tank, and the collected fluid is circulated by a pump. Therefore, when the temperature of the fluid is changed, the fluid is sent from the tank. The fluid is heated or cooled. For this reason, when the deviation between the target temperature of the fluid and the temperature of the fluid in the tank becomes large, the temperature of the fluid cannot be quickly changed to the target temperature, and thus the temperature of the workpiece is quickly changed. There is a risk that it will not be possible.

  The present invention has been made in view of such circumstances, and a main object of the present invention is to provide a temperature control system capable of quickly changing the temperature of a temperature control target while suppressing energy consumption. It is.

  The present invention employs the following means in order to solve the above problems.

  1st invention is a temperature control system which controls the temperature of temperature control object by circulating fluid to a heat exchange part, and is the 1st supply which supplies the normal temperature 1st fluid from a supply source to the heat exchange part Through the passage, the storage container for storing the fluid therein and adjusting the temperature thereof, the second supply passage for supplying the temperature-adjusted second fluid from the storage container to the heat exchange unit, and the first supply passage Mixing ratio adjusting means for adjusting a ratio of mixing the first fluid supplied to the heat exchanging part and the second fluid supplied to the heat exchanging part through the second supply passage, and passed through the heat exchanging part. Through the discharge passage for discharging the mixed fluid of the first fluid and the second fluid from the heat exchange unit to the discharge port, the recovery passage for recovering the mixed fluid from the heat exchange unit to the storage container, and the discharge passage The exhausted to the outlet A distribution ratio adjusting means for adjusting a ratio of distribution to the combined fluid and the mixed fluid recovered to the storage container through the recovery passage; and the mixing ratio adjusting means so that the temperature of the temperature control target becomes a target temperature. The distribution ratio adjusting means is controlled such that the higher the ratio of the first control means that controls the second fluid supplied to the heat exchange section, the higher the ratio of the mixed fluid recovered to the storage container. And a second control means.

  According to the above configuration, the first fluid at normal temperature is supplied from the supply source to the heat exchange unit through the first supply passage, while the second fluid whose temperature is adjusted in the storage container exchanges heat from the storage container through the second supply passage. Supplied to the department. The temperature control system includes mixing ratio adjusting means for adjusting a ratio of mixing the first fluid supplied to the heat exchange unit through the first supply passage and the second fluid supplied to the heat exchange unit through the second supply passage. ing. Then, the mixing ratio adjusting means is controlled so that the temperature to be controlled becomes the target temperature.

  At this time, the temperature of the mixed fluid supplied to the heat exchange unit is changed by adjusting the ratio of mixing the first fluid at normal temperature and the second fluid whose temperature has been adjusted. For this reason, compared with the case where the temperature of a fluid is changed by heating or cooling a fluid, the temperature of a fluid can be changed rapidly. Therefore, even when the deviation between the temperature control target temperature and the target temperature is large, the temperature control target temperature can be quickly changed.

  Further, the mixed fluid of the first fluid and the second fluid that has flowed through the heat exchange unit is discharged from the heat exchange unit to the discharge port through the discharge passage, while the mixed fluid is recovered from the heat exchange unit to the storage container through the recovery passage. . The temperature control system includes a distribution ratio adjusting unit that adjusts a ratio of the mixed fluid discharged to the discharge port through the discharge passage and the mixed fluid recovered to the storage container through the recovery passage.

  Here, the higher the ratio of the second fluid supplied to the heat exchanging section, that is, the more the second fluid whose energy is injected and temperature-adjusted is mixed with the mixed fluid, the more the mixed fluid that has flowed through the heat exchanging section The amount of remaining energy increases. Then, as the ratio of the second fluid supplied to the heat exchanging unit is higher, the distribution ratio adjusting means is controlled so that the ratio of the mixed fluid recovered to the storage container is higher, so that it remains in the mixed fluid. Energy can be recovered efficiently. On the other hand, the lower the ratio of the second fluid supplied to the heat exchange section, that is, the higher the ratio of the first fluid at room temperature supplied to the heat exchange section, the lower the ratio of the mixed fluid recovered to the storage container. . For this reason, the flow volume of the mixed fluid collect | recovered to a storage container can be reduced, so that the temperature of mixed fluid is near the temperature (normal temperature) of the 1st fluid. Therefore, the temperature of the fluid in the storage container can be suppressed from approaching the temperature of the first fluid from the temperature of the second fluid, and the amount of energy used to adjust the temperature of the fluid in the storage container can be suppressed. can do. As a result, energy consumption in the temperature control system can be suppressed.

  Note that the temperature of the second fluid may be higher than room temperature or lower than room temperature.

  In a second invention, in the first invention, a total flow rate of the first fluid supplied to the heat exchange unit through the first supply passage and the second fluid supplied to the heat exchange unit through the second supply passage. And the total flow rate of the mixed fluid discharged to the discharge port through the discharge passage and the mixed fluid recovered to the storage container through the recovery passage are made equal, and the second control means The distribution ratio adjusting means is controlled so that the ratio of the second fluid supplied to the exchange unit is equal to the ratio of the mixed fluid recovered to the storage container.

  According to the above configuration, since the ratio of the second fluid supplied to the heat exchange unit is equal to the ratio of the mixed fluid recovered to the storage container, the amount of energy injected into the mixed fluid by the second fluid The amount of energy recovered from the mixed fluid can be adjusted accordingly. For this reason, for example, when the ratio of the second fluid supplied to the heat exchange unit is 100%, the ratio of the mixed fluid recovered to the storage container is set to 100%, and the energy remaining in the mixed fluid is reduced. Maximum recovery is possible. Moreover, when the ratio of the 2nd fluid supplied to a heat exchange part is 0%, the ratio of the mixed fluid collect | recovered to a storage container shall be 0%. Therefore, when energy is not injected into the mixed fluid by the second fluid, the temperature of the fluid in the storage container can be suppressed to the maximum from the temperature of the second fluid to the temperature of the first fluid.

  Furthermore, the total flow rate of the fluid supplied to the heat exchange unit through the first supply passage and the second supply passage is made equal to the total flow rate of the fluid flowing out from the heat exchange unit through the discharge passage and the recovery passage. For this reason, by equalizing the ratio of the second fluid supplied to the heat exchange section and the ratio of the mixed fluid recovered to the storage container, the second fluid supplied to the heat exchange section through the second supply passage The flow rate and the flow rate of the mixed fluid recovered into the storage container through the recovery passage can be made equal. As a result, since the outflow amount of the fluid from the storage container and the inflow amount of the fluid into the storage container can be made equal, the amount of fluid in the storage container can be kept constant.

  In a third invention, in the first or second invention, the mixing ratio adjusting means and the distribution ratio adjusting means are each a three-way valve that can be controlled by a drive signal, and the three-way valve has a first flow path. The fluid that circulates and the fluid that circulates in the second flow path circulates in the third flow path, and the ratio of the fluid that circulates in the first flow path and the fluid that circulates in the second flow path can be adjusted. In the mixing ratio adjusting means, the first supply passage communicates from the first flow path to the third flow path, and the second supply passage communicates from the second flow path to the third flow path. In the distribution ratio adjusting means, the discharge passage communicates from the third flow path to the first flow path, and the recovery passage communicates from the third flow path to the second flow path. The first control means and the second control means are the mixing ratio adjusting means and the distribution ratio. Are those common in the section means, and controlling the mixing ratio adjusting means and the distribution ratio adjusting means of the same drive signal.

  According to the above configuration, the three-way valve is configured such that the fluid flowing through the first flow path and the fluid flowing through the second flow path flow through the third flow path, and the fluid flowing through the first flow path and the second flow path. The ratio with the circulating fluid can be adjusted. For this reason, a three-way valve can be used as a mixing valve that adjusts the mixing ratio of the fluid flowing in from the first flow path and the second flow path and causes the mixed fluid to flow out from the third flow path. In addition, a three-way valve can be used as a distribution valve that adjusts the distribution ratio of the fluid flowing into the first flow path and the second flow path by allowing the fluid to flow in from the third flow path.

  In this regard, according to the above configuration, in the mixing ratio adjusting means, the first supply passage communicates from the first flow path to the third flow path, and the second supply passage extends from the second flow path to the third flow path. Since it communicates, a three-way valve can be used as a mixing valve. Further, in the distribution ratio adjusting means, the discharge passage communicates from the third flow path to the first flow path, and the recovery passage communicates from the third flow path to the second flow path. Can be used as Further, these three-way valves (mixing ratio adjusting means and distribution ratio adjusting means) can be controlled by driving signals.

  Then, the distribution ratio adjusting means is controlled so that the ratio of the second fluid supplied to the heat exchange unit is equal to the ratio of the mixed fluid recovered to the storage container. For this reason, the first control means and the second control means can be shared, and the mixing ratio adjusting means and the distribution ratio adjusting means can be controlled by the same drive signal. As a result, the control system of the temperature control system can be shared, and the cost can be reduced.

  Further, in the fourth invention, in the third invention, the first control means and the second control means control the mixing ratio adjusting means and the distribution ratio adjusting means in synchronization with the same drive signal. The configuration is adopted. According to such a configuration, by simultaneously transmitting the same drive signal to both the mixing ratio adjusting means and the distribution ratio adjusting means, the process of changing the adjustment state of the mixing ratio adjusting means and the distribution ratio adjusting means can be matched. Can do. as a result. The ratio of the second fluid supplied to the heat exchange unit and the ratio of the mixed fluid recovered to the storage container can be matched with high responsiveness.

  According to a fifth aspect, in the third or fourth aspect, the three-way valve includes a first valve body that adjusts a communication state between the first flow path and the third flow path, and the second flow path. A second valve body that adjusts a communication state with the third flow path, and the first valve body and the second valve body are both formed in a conical shape, and one of them has an end on the apex side A male screw portion is provided on the other end, and a female screw portion is provided on the other end of the male screw portion, and the male screw portion and the female screw portion are screwed together.

  According to the above configuration, since the first valve body and the second valve body are both formed in a conical shape, the end portions on the apex side of the first valve body and the second valve body formed in the conical shape are It can be inserted into the fluid chamber (fluid passage) of the three-way valve. In the first valve body and the second valve body, one of them is provided with a male screw portion at the end on the apex side, and the other is provided with a female screw portion at the end on the apex side. For this reason, the first valve body and the second valve body can be integrated by screwing the male screw portion and the female screw portion, and the assembly of the first valve body and the second valve body is facilitated. be able to.

  Even if the distribution ratio adjusting means is controlled so that the ratio of the second fluid supplied to the heat exchange section and the ratio of the mixed fluid recovered to the storage container are equalized, the mixing ratio adjusting means and the distribution ratio adjusting means There is a possibility that the flow rate of the second fluid supplied to the heat exchanging unit and the flow rate of the mixed fluid recovered to the storage container are not equal due to individual differences of the above and evaporation of the fluid in the storage container. In this case, since the outflow amount of the fluid from the storage container and the inflow amount of the fluid into the storage container are different, there is a possibility that the amount of the fluid in the storage container cannot be kept constant.

  In this regard, as in the sixth aspect of the invention, in the second aspect of the invention, the apparatus further comprises detection means for detecting the amount of fluid stored in the storage container, and the second control means is detected by the detection means. When the amount of the fluid is smaller than a lower limit amount, the distribution ratio adjustment is performed so that the ratio of the mixed fluid recovered to the storage container is higher than the ratio of the second fluid supplied to the heat exchange unit. In the second aspect or the sixth aspect, as in the seventh aspect, the detection means for detecting the amount of fluid stored in the storage container is provided, and the second control When the amount of the fluid detected by the detection unit is larger than the upper limit amount, the means determines the ratio of the mixed fluid recovered to the storage container from the ratio of the second fluid supplied to the heat exchange unit. The distribution ratio adjusting means It is effective to employ a configuration such changes control.

  According to these configurations, when the amount of fluid in the storage container is smaller than the lower limit amount or larger than the upper limit amount, the ratio of the mixed fluid recovered into the storage container is changed. The amount of fluid can be returned to an appropriate amount. Therefore, the amount of fluid in the storage container can be maintained at an appropriate amount without separately performing operations such as replenishing the storage container with fluid or discharging the fluid from the storage container.

  In an eighth invention according to any one of the first to seventh inventions, the pressure of the first fluid supplied to the mixing ratio adjusting means through the first supply passage and the mixing ratio adjustment through the second supply passage. Pressure adjusting means for adjusting the pressure of the second fluid supplied to the means to be equal is provided.

  According to the above configuration, the mixture ratio of the first fluid supplied to the heat exchange unit through the first supply passage and the second fluid supplied to the heat exchange unit through the second supply passage is changed by the mixing ratio adjusting unit. Even so, the pressures of the first fluid and the second fluid supplied to the mixing ratio adjusting means are adjusted to be equal. For this reason, regardless of the change in the mixing ratio between the first fluid and the second fluid supplied to the heat exchange unit, the flow rate ratio between the first fluid and the second fluid supplied to the heat exchange unit is appropriately controlled. be able to.

  Further, as in the ninth invention, in any one of the first to eighth inventions, a configuration in which the supply source is water and the first fluid is tap water can be adopted. According to such a configuration, the cost of supplying the first fluid can be reduced.

The schematic diagram which shows the temperature control system of 1st Embodiment. The fragmentary sectional view which shows a three-way valve. The flowchart which shows the process sequence of the temperature control in the embodiment. The schematic diagram which shows the temperature control system of 2nd Embodiment. The flowchart which shows the process sequence of the temperature control in the embodiment.

(First embodiment)
The first embodiment will be described below with reference to the drawings. In the present embodiment, for example, in the manufacture of precision equipment, it is embodied as a temperature control system that controls the temperature of a workpiece on which precise grinding is performed.

  As shown in FIG. 1, this temperature control system basically adjusts the temperature of the fluid flowing through the temperature control block 10 (heat exchange unit), thereby allowing the workpiece W (temperature control target) held by the temperature control block 10 to be adjusted. Is controlled to a desired temperature. The temperature control system is configured to supply a fluid to the temperature control block 10, and a water passage 20 (first supply passage) that supplies normal temperature water (first fluid) from the supply port 21 to the temperature control block 10, and water A tank 40 (storage container) that adjusts its temperature by storing and heating inside, and a hot water passage 30 that supplies hot water (second fluid) adjusted in temperature in the tank 40 from the tank 40 to the temperature control block 10. (Second supply passage). Further, the temperature control system is configured to discharge and collect the fluid that has flowed through the temperature control block 10, and a discharge passage 50 that discharges mixed water (mixed fluid) of water and hot water from the temperature control block 10 to the discharge port 52. And a recovery passageway 60 for recovering the mixed hot water from the temperature control block 10 to the tank 40.

  In the water passage 20, the upstream end is connected to the tap water supply port 21, and the downstream end is connected to the temperature control block 10. Then, normal temperature water is supplied from the supply port 21 to the water passage 20. In addition, the water supply which supplies water may supply public city water, and may pump up and supply groundwater with a pump.

  The water passage 20 is provided with an on-off valve 22, a regulator 23, a pressure sensor 24, and a mixing valve 80A (mixing ratio adjusting means) in order from the upstream side of the water flow. The on-off valve 22 switches between supplying and shutting off water by opening and closing the flow path of the water passage 20. The regulator 23 adjusts the pressure of water flowing through the water passage 20 to a predetermined pressure (for example, 0.1 MPa). The pressure sensor 24 detects the water pressure P1 in the water passage 20. In the water passage 20, the downstream portion of the mixing valve 80 </ b> A serves as a common supply passage 26.

  In the hot water passage 30, the upstream end is inserted into the tank 40 to the vicinity of the bottom thereof, and the downstream end is connected to the temperature control block 10. The hot water passage 30 is provided with a pump 31, a pressure sensor 34, a temperature sensor 35, and the mixing valve 80A in this order from the upstream side of the hot water flow. The pump 31 pumps up the hot water in the tank 40 and delivers it to the downstream side. The pump 31 pumps up the hot water in the tank 40 and delivers it to the downstream side. The pump 31 is, for example, a diaphragm pump, a vortex pump, a cascade pump, or the like. The pressure sensor 34 detects the hot water pressure P <b> 2 in the hot water passage 30. The temperature sensor 35 detects the temperature T2 of the hot water in the hot water passage 30. In the hot water passage 30, a portion on the downstream side of the mixing valve 80 </ b> A serves as the common supply passage 26. That is, the water passage 20 and the hot water passage 30 share a downstream portion from the mixing valve 80A.

  The hot water passage 30 is provided with a return passage 32 for returning a part of the hot water flowing through the hot water passage 30 into the tank 40. One end of the return passage 32 is connected between the pump 31 and the mixing valve 80 </ b> A, and the other end of the return passage 32 is inserted into the tank 40. The return passage 32 is provided with an adjustment valve 33 (electromagnetic valve) for adjusting the flow passage area. Then, the opening of the adjustment valve 33 is adjusted by controlling the drive circuit, and the flow rate of hot water returned into the tank 40 through the return passage 32 is adjusted.

  The mixing valve 80A is an air-operated three-way valve and has an electropneumatic regulator 81A for applying an operating pressure. In the mixing valve 80A, the water passage 20 and the hot water passage 30 are respectively connected to the first and second flow paths on the primary side, and the common supply passage 26 is connected to the third flow path on the secondary side. The mixing valve 80 </ b> A adjusts the ratio of mixing the water supplied to the common supply passage 26 through the water passage 20 and the hot water supplied to the common supply passage 26 through the hot water passage 30. These water and hot water are mixed in the common supply passage 26, and the mixed hot water is supplied to the temperature control block 10 through the common supply passage 26. That is, the temperature of the mixed hot water supplied to the temperature control block 10 is adjusted by adjusting the mixing ratio (flow rate ratio) of water and hot water. The common supply passage 26 may be omitted, and the secondary-side flow path of the mixing valve 80A may be directly connected to the temperature control block 10.

  The temperature control block 10 is formed of a rectangular parallelepiped block capable of holding the workpiece W (processing object), and heat exchange is performed between the temperature control block 10 and the workpiece W to appropriately adjust the temperature of the workpiece W. That is, the temperature control block 10 and the workpiece W are in direct surface contact with each other, and a contact area capable of transmitting the amount of heat necessary for the workpiece W is secured. Specifically, a passage through which the mixed hot water supplied through the water passage 20 and the hot water passage 30 circulates is provided inside the temperature control block 10, and the heat of the mixed hot water flowing through the passage is supplied to the temperature control block 10. As a result, the temperature of the workpiece W is adjusted. The temperature control block 10 is formed of SiC or alumina having a high thermal conductivity, and is formed thin so as to reduce the heat capacity. For this reason, while being able to change the temperature of the temperature control block 10 rapidly, the heat of mixed hot water can be efficiently transmitted to the workpiece | work W.

  The temperature control system includes a temperature sensor 73 that detects the temperature Tw of the workpiece W. The temperature sensor 73 may be a contact type or a non-contact type. By employing the non-contact type temperature sensor 73, the temperature can be easily detected even when machining is performed while moving the workpiece W.

  In the discharge passage 50, the upstream end is connected to the temperature control block 10, and the downstream end is connected to the mixed hot water discharge port 52. Then, the mixed hot water is discharged from the discharge port 52 to the outside. In the discharge passage 50, a distribution valve 80B (distribution ratio adjusting means) and an on-off valve 51 are provided in order from the upstream side of the flow of the mixed hot water. The on-off valve 51 switches between discharging and shutting off the mixed hot water by opening and closing the flow path of the discharge passage 50. In the discharge passage 50, the upstream portion of the distribution valve 80 </ b> B serves as a common outflow passage 27.

  In the recovery passage 60, the upstream end is connected to the temperature control block 10, and the downstream end is inserted into the tank 40. Then, the mixed hot water is recovered into the tank 40 through the recovery passage 60. The collection passage 60 is provided with the distribution valve 80B. In the collection passage 60, the portion upstream of the distribution valve 80 </ b> B serves as the common outflow passage 27. That is, the discharge passage 50 and the collection passage 60 have a common portion upstream from the distribution valve 80B.

  The distribution valve 80B is the same three-way valve as the mixing valve 80A, and has an electropneumatic regulator 81B that applies operating pressure. In the distribution valve 80B, the common outflow passage 27 is connected to the third flow path on the primary side, and the discharge passage 50 and the recovery passage 60 are connected to the first flow path and the second flow path on the secondary side, respectively. The distribution valve 80 </ b> B adjusts the ratio of distributing the hot water flowing out through the common outflow passage 27 into the mixed hot water discharged to the discharge port 52 through the discharge passage 50 and the mixed hot water recovered into the tank 40 through the recovery passage 60. To do. That is, by adjusting the distribution ratio (flow rate ratio), the recovery rate of the mixed hot water flowing through the temperature control block 10 and the recovery amount of the mixed hot water are adjusted. The common outflow passage 27 may be omitted, and the flow path on the primary side of the distribution valve 80B may be directly connected to the temperature control block 10.

  The tank 40 has a heater 41 that heats the water stored therein (recovered mixed hot water) and whether or not the liquid level of the water in the tank 40 has reached a predetermined position, that is, the water in the tank 40. Level sensors 43A to 43C (detection means) for detecting whether or not the amount has reached a predetermined amount. The heater 41 is provided with a drive circuit 42 that adjusts the amount of heat generated by the heater 41 based on the drive signal. In the level sensors 43A to 43C, the level of water in the tank 40 is high (near the top of the tank 40), middle (near the center of the tank 40), and low (near the bottom of the tank 40). It is detected whether or not each has been reached. The level sensors 43 </ b> A to 43 </ b> C are, for example, electrode type level sensors in which current flows when water is present between electrodes and current does not flow when water is not present.

  The common supply passage 26 and the common outflow passage 27 are connected via the temperature control block 10, and all of the mixed hot water flowing into the temperature control block 10 through the common supply passage 26 flows out into the common outflow passage 27. ing. For this reason, the flow rate of the mixed hot water flowing through the common supply passage 26 and the flow rate of the mixed hot water flowing through the common outflow passage 27 are equal. That is, the total flow of water supplied to the temperature control block 10 through the water passage 20 and the hot water supplied to the temperature control block 10 through the hot water passage 30, and the mixed hot water and recovery passage discharged to the discharge port 52 through the discharge passage 50 The total flow rate of the mixed hot water recovered to the tank 40 through 60 is equal.

  The temperature control system includes a control device 70 (first control means and second control means) that executes various controls related to temperature control of the workpiece W. The control device 70 includes a microcomputer as a calculation unit having a CPU, various memories, and the like. The control device 70 includes pressures P1 and P2 detected by the pressure sensors 24 and 34, temperatures T2 and Tw detected by the temperature sensors 35 and 73, liquid level position information detected by the level sensors 43A to 43C, and the like. Input sequentially. The control device 70 controls the positions of the valve bodies of the mixing valve 80A and the distribution valve 80B by controlling the driving states of the electropneumatic regulators 81A and 81B based on these pieces of information. Specifically, the electropneumatic regulators 81A and 81B have control circuits that control the operation pressure applied to the mixing valve 80A and the distribution valve 80B based on the drive signal from the control device 70, respectively. Thereby, while the temperature of the workpiece | work W is controlled to desired temperature, the collection | recovery rate of the mixed hot water which distribute | circulated the temperature control block 10 is controlled.

  Next, the structure of the three-way valve constituting the mixing valve 80A and the distribution valve 80B will be described with reference to FIG. FIG. 2 is a partial cross-sectional view showing a three-way valve.

  This three-way valve has two housings 82 and 83 and two covers 84 and 99, which are laminated and integrated in the vertical direction in the figure. The housings 82 and 83 and the covers 84 and 99 have the same outer shape and the same size at the portion where they are overlapped (joined portions), and in the assembled state, the housings 82 and 83 have a rectangular parallelepiped shape as a whole. Both the housings 82 and 83 and the cover 84 have a hollow portion extending in the stacking direction, and a valve member 85 is provided in the hollow portion so as to be capable of reciprocating. In the following description, the housing 82 is also referred to as an upper housing 82, and the housing 83 is also referred to as a lower housing 83.

  The lower housing 83 is formed with a substantially cylindrical cylinder portion 86 that opens upward (upper housing 82 side) in the drawing, and the first flow path 87A and the second flow path 87B that communicate with the cylinder section 86. , A third flow path 87C is formed. These three flow paths 87A, 87B, 87C all have a circular opening cross section, and the first flow path 87A and the second flow path 87B are formed in parallel so as to extend from the cylinder portion 86 in the same direction, The third flow path 87C is formed so as to extend from the cylinder portion 86 in the opposite direction to the first flow path 87A and the second flow path 87B. With respect to the direction in which the cylinder portion 86 extends, the third flow path 87C is formed at the center between the first flow path 87A and the second flow path 87B.

  Valve support members 88 and 100 are provided at the upper and lower portions of the cylinder portion 86, respectively. These valve support members 88 and 100 have a hollow cylindrical shape, and valve support holes 88a and 100a are respectively formed in the central portions thereof. The valve support member 88 has concave grooves formed in the inner and outer peripheral portions thereof, and an annular seal member is accommodated in each concave groove. An annular concave groove is formed in the upper end surface of the valve support member 88, and a seal member is also accommodated in this concave groove. Further, the valve support member 100 is formed with a concave groove on the outer periphery thereof, and an annular seal member is accommodated in the concave groove. A cover 99 is in contact with the lower end surface of the valve support member 100, and the space between them is sealed by a seal member.

  A fluid chamber 89 is formed in the cylinder portion 86 by assembling the valve support member 88 to the cylinder portion 86. In the mixing valve 80A, as described above, the water passage 20 and the hot water passage 30 are connected to the first flow passage 87A and the second flow passage 87B, respectively, and the common supply passage 26 is connected to the third flow passage 87C. Then, water flows into the fluid chamber 89 from the first flow path 87A, hot water flows from the second flow path 87B, and the mixed hot water flows out from the third flow path 87C. In the distribution valve 80B, as described above, the common outflow passage 27 is connected to the third flow passage 87C, and the discharge passage 50 and the recovery passage 60 are connected to the first flow passage 87A and the second flow passage 87B, respectively. The Then, the mixed hot water flows into the fluid chamber 89 from the third flow path 87C, and the mixed hot water flows out from the first flow path 87A and the second flow path 87B.

  Further, the upper housing 82 is formed with a cylinder portion 90 that opens upward (the cover 84 side) in the figure, and the bottom portion 90b of the cylinder portion 90 is coaxial with the cylinder portion 90 (the center position is the same). A valve support hole 90a having a smaller diameter than the cylinder diameter is formed. The valve support hole 90a is a through hole that is coaxial with and has the same diameter as the valve support hole 88a of the valve support member 88 described above. A concave groove is formed in the inner peripheral portion of the valve support hole 90a, and an annular seal member is accommodated in the concave groove.

  The cover 84 has a valve support hole 84a formed at the center thereof. The valve support hole 84a is a through hole coaxial with the valve support hole 88a of the valve support member 88 and the valve support hole 90a of the upper housing 82 described above.

  For example, the lower housing 83 is made of a synthetic resin material such as fluorine resin, and the upper housing 82 and the cover 84 are made of a metal material such as stainless steel or aluminum. However, the lower housing 83 only needs to be made of a corrosion-resistant material that does not cause corrosion even when it comes into contact with the fluid (liquid) flowing through the three-way valve. It is also possible to use.

  The valve member 85 is configured by integrating two rods 91 and 92 and two valve bodies 93 and 94. The two rods 91 and 92 are formed in an elongated shape by connecting their end portions to each other. The two valve bodies 93 and 94 are formed in a substantially conical shape, and end portions on the apex side of each other are connected (screw-fastened). Specifically, a male threaded portion 93a is formed at the end of the valve body 93 (second valve body) on the apex side, and a female threaded portion 94a is formed at the end of the valve body 94 (first valve body) on the apex side. ing. The male screw portion 93a and the female screw portion 94a are formed so as to extend along the axes of the valve bodies 93 and 94, respectively. And the valve bodies 93 and 94 are integrated by screw-fastening these male screw parts 93a and female screw parts 94a. For this reason, the valve bodies 93 and 94 can be accurately integrated in a coaxial state.

  The valve bodies 93 and 94 integrated in this way have a substantially symmetrical shape with respect to the center in the axial direction. A valve element 94 is connected (screw-fastened) to one end (the lower end in the figure) of the rod 91. In the following description, the upper rod 92 is also called the upper rod 92 and the lower rod 91 is also called the lower rod 91.

  A substantially disc-shaped piston portion 95 having the same outer dimensions as the inner diameter of the cylinder portion 90 is provided on the upper portion of the lower rod 91, and the outer peripheral portion of the piston portion 95 contacts the inner surface of the cylinder portion 90. ing. A concave groove is formed in the outer peripheral portion of the piston portion 95, and a seal member is accommodated in the concave groove.

  The upper rod 92 is inserted into a valve support hole 84 a formed in the cover 84, and the lower rod 91 is connected to a valve support hole 90 a of the upper housing 82 and a valve support hole 88 a of a valve support member 88 provided in the lower housing 83. Is inserted.

  A pressure control chamber 96 is formed between the bottom portion 90 b of the cylinder portion 90 and the piston portion 95 of the lower rod 91. Operating air is introduced into the pressure control chamber 96 from the outside (electro-pneumatic regulators 81A and 81B) through an air introduction passage 82a formed in the upper housing 82, whereby the operating pressure in the pressure control chamber 96 is adjusted. On the other hand, a spring chamber 97 is formed between the cover 84 and the piston portion 95 of the lower rod 91, and a spiral coil-shaped spring 98 is disposed in the spring chamber 97. Therefore, the operating pressure in the pressure control chamber 96 and the biasing force of the spring 98 act on the rods 91 and 92 in opposite directions, and the positions of the rods 91 and 92 are adjusted by the balance of these forces.

  The valve bodies 93 and 94 are connected to the lower end portion of the lower rod 91 and reciprocate in the direction in which the fluid chamber 89 extends (the vertical direction in the figure) together with the rods 91 and 92. In the fluid chamber 89, valve seat members 101 and 102 that come into contact with the valve bodies 93 and 94, respectively, are provided as the valve bodies 93 and 94 reciprocate. With respect to the direction in which the fluid chamber 89 (cylinder portion 86) extends, the valve seat member 101 is provided between the second flow path 87B and the third flow path 87C, and the valve seat member 102 is connected to the first flow path 87A and the first flow path 87A. It is provided between the three flow paths 87C. These valve seat members 101 and 102 have a hollow cylindrical shape, and communication holes 101a and 102a are respectively formed in the central portions thereof. The valve seat members 101 and 102 are formed with a groove on the outer periphery thereof, and an annular seal member is accommodated in each groove.

  Valve bodies 93 and 94 are inserted into the communication holes 101a and 102a of the valve seat members 101 and 102, respectively. With respect to the direction in which the fluid chamber 89 extends, the diameter of the valve element 93 increases toward the second flow path 87B, and the diameter of the valve element 94 increases toward the first flow path 87A. And in the valve bodies 93 and 94, the diameter of the small diameter part is smaller than the internal diameter of each communicating hole 101a, 102a of the valve seat members 101, 102, and the diameter of the large diameter part is smaller than the internal diameter of each communicating hole 101a, 102a. Is also getting bigger.

  For this reason, when the valve bodies 93 and 94 move upward (on the first flow path 87A side), the fluid flow path formed by the gap between the outer peripheral surface of the valve body 93 and the inner peripheral surface of the communication hole 101a. As the area decreases, the area of the fluid flow path formed by the gap between the outer peripheral surface of the valve element 94 and the inner peripheral surface of the communication hole 102a increases. On the other hand, when the valve bodies 93 and 94 move downward (on the second flow path 87B side), the fluid flow path constituted by the gap between the outer peripheral surface of the valve body 93 and the inner peripheral surface of the communication hole 101a. As the area increases, the area of the fluid flow path formed by the gap between the outer peripheral surface of the valve element 94 and the inner peripheral surface of the communication hole 102a decreases. FIG. 2 shows a state in which the valve bodies 93 and 94 have moved most downward.

  Moreover, as mentioned above, the valve bodies 93 and 94 are integrated by screwing the male thread part 93a and female thread part 94a which they have. For this reason, after attaching the valve seat members 101 and 102 in the fluid chamber 89, the male screw portion 93a and the female screw portion 94a are respectively inserted into the respective communication holes 101a and 102a of the valve seat members 101 and 102 and screwed together. Thus, the valve bodies 93 and 94 can be integrated. Therefore, the assembly of the valve bodies 93 and 94 can be facilitated.

  When the outer peripheral surface of the valve body 94 comes into contact with the inner peripheral surface of the communication hole 102a, the fluid flow rate (first flow rate) between the first flow path 87A and the third flow path 87C is minimized (0). In addition, the fluid flow rate (second flow rate) between the second flow path 87B and the third flow path 87C is maximized. On the contrary, when the outer peripheral surface of the valve body 93 comes into contact with the inner peripheral surface of the communication hole 101a, the fluid flow rate (first flow rate) between the first flow path 87A and the third flow path 87C is maximized. The fluid flow rate (second flow rate) between the second flow path 87B and the third flow path 87C is minimized (0). In the present embodiment, the valve bodies 93 and 94 and the valve seat members 101 and 102 are configured so that the amount of decrease (increase amount) of the first flow rate is equal to the amount of increase (decrease amount) of the second flow rate. ing. That is, in this three-way valve, the sum of the first flow rate and the second flow rate is kept constant. A configuration in which the amount of decrease (increase) in the first flow rate is not equal to the amount of increase (decrease) in the second flow rate may be employed.

  In this way, according to the operating positions of the valve bodies 93 and 94, the area of the fluid channel that connects the first channel 87A and the third channel 87C, the second channel 87B, and the third channel 87C. Are continuously changed. As a result, in the mixing valve 80A, the mixing ratio of water flowing from the first flow path 87A to the third flow path 87C and hot water flowing from the second flow path 87B to the third flow path 87C is continuously adjusted. Is done. In the distribution valve 80B, the distribution ratio between the mixed hot water flowing from the third flow path 87C to the first flow path 87A and the mixed hot water flowing from the third flow path 87C to the second flow path 87B is continuously. Adjusted.

  Here, since the mixing valve 80A and the distribution valve 80B are the same three-way valve, when the operating positions of the valve bodies 93 and 94 are equal to each other, the flow rate ratio of the fluid flowing through the flow paths 87A to 87C is the mixing valve. It becomes equal in 80A and the distribution valve 80B. Therefore, the ratio of the hot water flowing from the second flow path 87B to the third flow path 87C in the mixing valve 80A (the ratio of the flow rate of hot water to the total flow rate of water and hot water) and the third flow path 87C in the distribution valve 80B. The ratio of the mixed hot water flowing from the first to the second flow path 87B (the ratio of the flow rate of the mixed hot water flowing to the second flow path 87B with respect to the total flow rate of the mixed hot water) becomes equal. Therefore, the higher the ratio of hot water flowing from the second flow path 87B to the third flow path 87C in the mixing valve 80A, the higher the ratio of mixed hot water flowing from the third flow path 87C to the second flow path 87B in the distribution valve 80B. Get higher. Further, since the flow rate ratio of the fluid flowing through each of the flow paths 87A to 87C is equal between the mixing valve 80A and the distribution valve 80B, how the pressure of the fluid flowing through these flow paths 87A to 87C is set. Even if it is a case, it can respond.

  Furthermore, the total flow rate of the water supplied to the temperature control block 10 through the water passage 20 and the hot water supplied to the temperature control block 10 through the hot water passage 30, and the mixed hot water and the recovery passage discharged to the discharge port 52 through the discharge passage 50 The total flow rate of the mixed hot water recovered to the tank 40 through 60 is equal. For this reason, by making the operating positions of the valve bodies 93 and 94 equal in the mixing valve 80A and the distribution valve 80B, the flow rate of hot water supplied to the temperature control block 10 through the hot water passage 30 and the tank 40 through the recovery passage 60. The flow rate of the mixed hot water recovered can be made equal.

  A position detector 105 for detecting the positions of the valve bodies 93 and 94 is provided on the side surfaces of the upper and lower housings 82 and 83. The position detector 105 includes a case 105a and a position sensor accommodated in the case 105a. The position sensor has a sensor main body and a movable rod 105b that can move in the entry / exit direction (vertical direction in the figure) with respect to the sensor main body. The movable rod 105b is urged in a direction protruding from the sensor main body by a spring 105c, and the amount of insertion / extraction is changed by pressing the tip.

  Specifically, the configuration relating to the position detection of the valve bodies 93 and 94 is such that the end of the valve member 85 opposite to the valve bodies 93 and 94 (upper end portion in the figure) protrudes from the cover 84, and the protruding portion is The arm 106 is connected. The arm 106 is provided so as to extend in a direction orthogonal to the axial direction of the valve member 85, and a position adjusting screw 107 is provided at a tip portion opposite to the connection side with the valve member 85. Note that a support member 108 is provided on the upper surface of the cover 84 so as to movably support an intermediate portion of the arm 106.

  The tip of the position adjusting screw 107 and the movable rod 105b of the position sensor are in contact with each other. When the valve member 85 moves, the arm 106 moves in the vertical direction in the drawing and the amount of movement of the movable rod 105b changes. Is done. Thereby, the positions of the valve bodies 93 and 94 are detected by the position detector 105. The detected positions of the valve bodies 93 and 94 are input to the corresponding electropneumatic regulators 81A and 81B, respectively.

  Next, the temperature control processing procedure will be described with reference to the flowchart of FIG. This process is repeatedly executed by the control device 70 with a predetermined period. Prior to the execution of this process, the on-off valve 22 of the water passage 20 and the on-off valve 51 of the discharge passage 50 are opened.

  In this series of processes, first, the pressure of the first fluid supplied to the mixing valve is adjusted to be equal to the pressure of the second fluid (S10). Specifically, in the water passage 20, the pressure of water (first fluid) supplied to the mixing valve 80 </ b> A is adjusted to a predetermined pressure by the regulator 23. The pressure P1 of water is detected by the pressure sensor 24 on the downstream side of the regulator 23, and the detected pressure P1 is sequentially input to the control device 70. In the hot water passage 30, hot water (second fluid) is sent to the mixing valve 80 </ b> A by the pump 31 at a predetermined flow rate, and the hot water pressure P <b> 2 is detected by the pressure sensor 34 on the downstream side of the pump 31. The detected pressure P2 is sequentially input to the control device 70.

  Then, the control device 70 adjusts the opening degree of the regulating valve 33 by controlling the drive circuit of the regulating valve 33 so as to make the hot water pressure P2 equal to the water pressure P1, and enters the tank 40 through the return passage 32. Adjust the flow rate of returned hot water. For example, the opening degree of the control valve 33 is feedback controlled by a PID (proportional integral derivative) calculation based on the deviation between the water pressure P1 and the hot water pressure P2. Thereby, the pressure P1 of the water supplied to the mixing valve 80A through the water passage 20 and the pressure P2 of the hot water supplied to the mixing valve 80A through the hot water passage 30 become equal. The process of S10 corresponds to a process as a pressure adjusting unit.

  Then, it adjusts so that the temperature of the 2nd fluid supplied to a mixing valve may become preset temperature (S11). Specifically, in the hot water passage 30, the hot water temperature T <b> 2 is detected by the temperature sensor 35 on the downstream side of the pump 31, and the detected temperature T <b> 2 is sequentially input to the control device 70. The control device 70 controls the drive circuit of the heater 41 so that the hot water temperature T2 is set to a set temperature Th (for example, 80 ° C.) higher than the normal temperature, thereby heating the water stored in the tank 40. Adjust the amount of heat generated. For example, the amount of heat generated by the heater 41 is feedback controlled by PID calculation based on the deviation between the set temperature Th and the hot water temperature T2. Thereby, the temperature T2 of the hot water supplied to the mixing valve 80A through the hot water passage 30 is adjusted to the set temperature Th.

  Subsequently, the target temperature of the workpiece is input (S12), and the temperature of the workpiece is detected (S13). Specifically, the target temperature Tt of the workpiece W is input to the control device 70 or input in advance by another control device or manual operation of the temperature control system. Further, the temperature Tw of the workpiece W is detected by the temperature sensor 73, and the detected temperature Tw is sequentially input to the control device 70.

  Based on the target temperature and detected temperature of these workpieces, the control amount of the mixing valve is calculated (S14). Specifically, the control device 70 calculates a control amount Fm for controlling the valve body position of the mixing valve 80A in order to control the detected temperature Tw of the workpiece W to the target temperature Tt. For example, the control amount Fm for feedback control of the valve body position of the mixing valve 80A is calculated by PID calculation based on the deviation between the target temperature Tt of the workpiece W and the detected temperature Tw.

  The control amount of the mixing valve calculated in this way is converted into the target valve body position of the mixing valve (distribution valve) (S15). Specifically, the control device 70 determines that the target positions of the valve bodies 93 and 94 are in the first flow path 87A in the extending direction of the fluid chamber 89 (cylinder portion 86) as the control amount Fm of the mixing valve 80A increases. It sets so that it may change to the 2nd flow path 87B side from the side. That is, as the control amount Fm of the mixing valve 80A increases, the ratio of hot water flowing from the second flow path 87B to the third flow path 87C increases and flows from the first flow path 87A to the third flow path 87C. The target positions of the valve bodies 93 and 94 are set so that the water ratio is low. Further, the target positions of the valve bodies 93 and 94 of the distribution valve 80B are set equal to the target positions of the valve bodies 93 and 94 of the mixing valve 80A.

  According to such processing, as the detected temperature Tw is lower than the target temperature Tt of the workpiece W, the ratio (flow rate) of hot water supplied from the hot water passage 30 to the temperature control block 10 via the mixing valve 80A is increased. The ratio (flow rate) of water supplied from the water passage 20 to the temperature control block 10 via the mixing valve 80A is reduced. At this time, the higher the ratio of hot water supplied to the temperature control block 10, that is, the more hot water whose temperature has been injected and temperature adjusted is mixed with the mixed hot water, the remaining hot water in the mixed hot water flowing through the temperature control block 10 remains. The amount of energy (energy that can be used for heating the workpiece W) increases. On the contrary, the lower the ratio of hot water supplied to the temperature control block 10, the closer the temperature of the mixed hot water flowing through the temperature control block 10 is to room temperature, and the smaller the amount of energy remaining in the mixed hot water.

  Subsequently, based on these target valve element positions, the electropneumatic regulators of the mixing valve and the distribution valve are driven (S16). Specifically, the control device 70 outputs the target valve body position as a drive signal to the electropneumatic regulator 81A of the mixing valve 80A and the electropneumatic regulator 81B of the distribution valve 80B. At this time, since the target positions of the valve bodies 93 and 94 are equal in the mixing valve 80A and the distribution valve 80B, the same drive signal is simultaneously output to the electropneumatic regulators 81A and 81B. That is, the control device 70 controls the mixing valve 80A and the distribution valve 80B in synchronization with the same drive signal via the electropneumatic regulators 81A and 81B, respectively.

  In the electropneumatic regulators 81A and 81B, the operation pressure applied to the mixing valve 80A and the distribution valve 80B is controlled so that the positions of the valve bodies 93 and 94 detected by the position detector 105 become the target positions. The control circuit of the electropneumatic regulators 81A and 81B performs feedback control on the positions of the valve bodies 93 and 94 by, for example, PID calculation based on the deviation between the target position and the detection position of the valve bodies 93 and 94. Thereby, the valve bodies 93 and 94 of the mixing valve 80A and the distribution valve 80B are controlled to the target positions, respectively. In the mixing valve 80A, water and hot water are mixed at a mixing ratio according to the positions of the valve bodies 93 and 94, In the distribution valve 80B, the hot water is distributed at a distribution ratio according to the position of the valve bodies 93 and 94. At this time, as described above, the flow rate of hot water supplied to the temperature control block 10 through the hot water passage 30 is equal to the flow rate of mixed hot water recovered to the tank 40 through the recovery passage 60.

  Subsequently, it is determined whether or not the amount of fluid in the tank is appropriate (S17). If it is determined that the amount of fluid is appropriate (S17: YES), a message indicating that the amount of fluid is appropriate is displayed. (S18) When it is determined that the fluid amount is not appropriate (S17: NO), a warning is given that the fluid amount is inappropriate (S19).

  Specifically, in the tank 40, whether or not the amount of water in the tank 40 has reached a predetermined amount is detected by the level sensors 43 </ b> A to 43 </ b> C, and the detection result is sequentially input to the control device 70. The control device 70 detects that the level of water in the tank 40 has not reached the high position by the level sensor 43A, and the level of water in the tank 40 is determined by the level sensor 43B or the level sensor 43C. When it is detected that the low position has been reached, it is determined that the amount of water in the tank 40 is appropriate. Further, when it is detected by the level sensors 43A, 43B, and 43C that the water level in the tank 40 has reached the high position, the middle position, and the low position, respectively, or the tank 40 is detected by the level sensors 43A, 43B, and 43C. When it is detected that the liquid level of the water in the tank does not reach the high position, the middle position, and the low position, respectively, it is determined that the amount of water in the tank 40 is inappropriate.

  Then, according to each determination result, for example, an indicator lamp indicating that the amount of water in the tank 40 is appropriate or a warning lamp indicating that the amount of water in the tank 40 is inappropriate is turned on. By lighting the warning or the like in this manner, the user can be prompted to adjust the amount of water in the tank 40 to an appropriate amount. In this way, this series of processing is once ended.

  The embodiment described above has the following advantages.

  -When controlling the mixing valve 80A so that the temperature Tw of the workpiece W becomes the target temperature Tt, the ratio of mixing the normal temperature tap water and the temperature-adjusted hot water is adjusted to supply to the temperature control block 10 The temperature of the mixed hot water is changed. For this reason, compared with the case where the temperature of water is changed by heating or cooling water, the temperature of the water supplied to the temperature control block 10 can be changed rapidly. Therefore, even if the deviation between the temperature Tw of the workpiece W and the target temperature Tt becomes large, the temperature Tw of the workpiece W can be quickly changed.

  The distribution valve 80B is controlled such that the higher the ratio of hot water supplied to the temperature control block 10 is, the higher the ratio of mixed hot water recovered to the tank 40 is. Can be recovered automatically. On the other hand, the lower the ratio of hot water supplied to the temperature control block 10, that is, the higher the ratio of room temperature tap water supplied to the temperature control block 10, the lower the ratio of mixed hot water recovered to the tank 40. For this reason, the flow volume of the mixed hot water collect | recovered to the tank 40 can be reduced, so that the temperature of mixed hot water is near the temperature (normal temperature) of tap water. Therefore, it is possible to suppress the temperature of the water in the tank 40 from approaching the set temperature of hot water (80 ° C.) to the temperature of the tap water, and the amount of energy used to adjust the temperature of the water in the tank 40. Can be suppressed. As a result, energy consumption in the temperature control system can be suppressed.

  -Since the ratio of the hot water supplied to the temperature control block 10 and the ratio of the mixed hot water recovered to the tank 40 are equalized, recovery from the mixed hot water is performed in accordance with the amount of energy injected into the mixed hot water by the hot water. The amount of energy to be adjusted can be adjusted. For this reason, for example, when the ratio of hot water supplied to the temperature control block 10 is 100%, the ratio of mixed hot water recovered to the tank 40 is 100%, and the energy remaining in the mixed hot water is maximized. Limited recovery is possible. When the ratio of hot water supplied to the temperature control block 10 is 0%, the ratio of mixed hot water recovered to the tank 40 is set to 0%. Therefore, when energy is not injected into the mixed hot water by hot water, the temperature of the water in the tank 40 can be suppressed to the maximum from the set temperature of the hot water to the temperature of the tap water.

  The total flow rate of tap water and hot water supplied to the temperature control block 10 through the water passage 20 and the hot water passage 30 and the total flow rate of mixed hot water flowing out of the temperature control block 10 through the discharge passage 50 and the recovery passage 60 are equalized. ing. For this reason, by equalizing the ratio of hot water supplied to the temperature control block 10 and the ratio of mixed hot water recovered to the tank 40, the flow rate of hot water supplied to the temperature control block 10 through the hot water passage 30; The flow rate of the mixed hot water recovered into the tank 40 through the recovery passage 60 can be made equal. As a result, since the outflow amount of water from the tank 40 and the inflow amount of mixed hot water into the tank 40 can be made equal, the amount of water in the tank 40 can be kept constant.

  The same three-way valve adjusts the mixing ratio of the fluid flowing in from the first flow path 87A and the second flow path 87B, and causes the mixed valve 80A to flow out the mixed fluid from the third flow path 87C, and the third flow path It is used as a distribution valve 80B that adjusts the distribution ratio of the fluid flowing in from 87C and flowing out to the first flow path 87A and the second flow path 87B. Then, the distribution valve 80B is controlled so that the ratio of hot water supplied to the temperature control block 10 and the ratio of mixed hot water recovered to the tank 40 are equal. For this reason, the control device 70 can be shared, and the mixing valve 80A and the distribution valve 80B can be controlled by the same drive signal via the electropneumatic regulators 81A and 81B. As a result, the control system of the temperature control system can be shared, and the cost can be reduced.

  The control device 70 controls the mixing valve 80A and the distribution valve 80B in synchronization with the same drive signal via the electropneumatic regulators 81A and 81B, respectively. For this reason, by simultaneously transmitting the same drive signal to both the electropneumatic regulators 81A and 81B, it is possible to match the processes in which the adjustment states of the mixing valve 80A and the distribution valve 80B are changed. as a result. The ratio of hot water supplied to the temperature control block 10 and the ratio of mixed hot water recovered to the tank 40 can be matched with high responsiveness.

  -Since the valve bodies 93 and 94 are both formed in a conical shape, the male screw portion 93a and the female screw portion 94a can be inserted into the communication holes 101a and 102a of the valve seat members 101 and 102, respectively. In the valve bodies 93 and 94, one of them (the valve body 93) is provided with a male threaded portion 93a at the end on the apex side, and the other (the valve body 94) is provided with an internal thread on the end on the apex side. A portion 94a is provided. For this reason, the valve bodies 93 and 94 can be integrated by screwing these male screw parts 93a and female screw parts 94a, and the assembly of the valve bodies 93 and 94 can be facilitated.

  Even if the mixing ratio of the tap water supplied to the temperature control block 10 through the water passage 20 and the hot water supplied to the temperature control block 10 through the hot water passage 30 is changed by the mixing valve 80A, the mixing valve 80A returns to the mixing valve 80A. The supplied tap water and hot water are adjusted to have the same pressure. For this reason, irrespective of the change of the mixing ratio of the tap water and hot water supplied to the temperature control block 10, the flow rate ratio of the tap water and hot water supplied to the temperature control block 10 can be controlled appropriately.

  -Since water supply is used as the supply source of normal temperature fluid, the cost of supplying normal temperature fluid can be reduced.

(Second Embodiment)
In the temperature control system of the present embodiment, the mixing ratio of water and hot water is adjusted by two flow rate control valves instead of the mixing valve 80A, and the distribution ratio of mixed hot water is determined by two flow rate control valves instead of the distribution valve 80B. It is set as the structure which adjusts. In addition, about the structure same as 1st Embodiment, description is abbreviate | omitted by attaching | subjecting the same code | symbol as 1st Embodiment.

  Specifically, as shown in FIG. 4, in the water passage 20, the upstream end is connected to the tap water supply port 21, and the downstream end is connected to the temperature control block 10. . The water passage 20 is provided with an on-off valve 22, a regulator 23, and a flow rate adjusting valve 182A in order from the upstream side of the water flow. The regulator 23 adjusts the pressure of the water flowing through the water passage 20 to a predetermined pressure. In the present embodiment, the pressure sensor 24 is not provided.

  In the hot water passage 30, the upstream end is inserted into the tank 40 to the vicinity of the bottom thereof, and the downstream end is connected to the temperature control block 10. The hot water passage 30 is provided with a pump 31, a regulator 133, a temperature sensor 35, and a flow rate adjusting valve 183A in order from the upstream side of the hot water flow. In this embodiment, the return passage 32 and the adjustment valve 33 are not provided, and a regulator 133 is provided instead. The regulator 133 adjusts the pressure of hot water flowing through the hot water passage 30 to a predetermined pressure. The regulator 23 of the water passage 20 and the regulator 133 of the hot water passage 30 are set to the same pressure (for example, 0.1 MPa). That is, the regulators 23 and 133 constitute a pressure adjusting means. In the present embodiment, the pressure sensor 34 is not provided.

  In the water passage 20, a hot water passage 30 is connected between the flow control valve 182 </ b> A and the temperature control block 10. In other words, in the hot water passage 30, the water passage 20 is connected between the flow control valve 183 </ b> A and the temperature control block 10. In the water passage 20 and the hot water passage 30, a portion on the downstream side of the connection portion is a common supply passage 126. The common supply passage 126 is connected to the temperature control block 10, and the mixed hot water of water and hot water is supplied to the temperature control block 10 through the common supply passage 126.

  In the discharge passage 50, the upstream end is connected to the temperature control block 10, and the downstream end is connected to the mixed hot water discharge port 52. In the discharge passage 50, a flow rate adjustment valve 182B and an on-off valve 51 are provided in order from the upstream side of the flow of the mixed hot water.

  In the recovery passageway 60, the upstream end is connected to the temperature control block 10, and the downstream end is inserted into the tank 40. The collection passage 60 is provided with a flow rate adjustment valve 183B.

  In the discharge passage 50, a recovery passage 60 is connected between the temperature control block 10 and the flow rate control valve 182B. In other words, in the recovery passage 60, the discharge passage 50 is connected between the temperature control block 10 and the flow rate control valve 183B. In the discharge passage 50 and the collection passage 60, a portion upstream of the connection portion is a common outflow passage 127. The common outflow passage 127 is connected to the temperature control block 10, and the mixed hot water flows out of the temperature control block 10 through the common outflow passage 127.

  The flow rate control valves 182A, 183A, 182B, and 183B are well-known air operated two-way valves and have electropneumatic regulators 184A, 185A, 184B, and 185B that apply operating pressure, respectively. The flow rate regulating valves 182A, 183A, 182B, 183B regulate the flow rate of the fluid flowing through the passages 20, 30, 50, 60 based on the operation pressure from the electropneumatic regulators 184A, 185A, 184B, 185B. To do. In this embodiment, the flow control valves 182A, 183A, 182B, 183B all have the same configuration, and the electropneumatic regulators 184A, 185A, 184B, 185B all have the same configuration.

  The flow rate control valves 182A and 183A adjust the flow rates of water and hot water supplied to the common supply passage 126 through the water passage 20 and the hot water passage 30, respectively. Thereby, the mixing ratio (flow rate ratio) of these water and hot water is adjusted, and the temperature of the mixed hot water supplied to the temperature control block 10 through the common supply passage 26 is adjusted. The flow rate adjusting valves 182A and 183A constitute a mixing ratio adjusting means.

  Further, the flow rate of the mixed hot water flowing out from the common outflow passage 127 to the discharge passage 50 and the recovery passage 60 is adjusted by the flow rate adjusting valves 182B and 183B, respectively. As a result, the distribution ratio (flow rate ratio) of the mixed hot water flowing through the temperature control block 10 and the recovery rate of the mixed hot water to the tank 40 are adjusted. The flow rate adjusting valves 182B and 183B constitute distribution ratio adjusting means.

  The common supply passage 126 and the common outflow passage 127 are connected via the temperature control block 10, and all the hot water flowing into the temperature control block 10 through the common supply passage 126 flows out into the common outflow passage 127. ing. For this reason, the flow rate of the mixed hot water flowing through the common supply passage 126 and the flow rate of the mixed hot water flowing through the common outflow passage 127 are equal. That is, the total flow of water supplied to the temperature control block 10 through the water passage 20 and the hot water supplied to the temperature control block 10 through the hot water passage 30, and the mixed hot water and recovery passage discharged to the discharge port 52 through the discharge passage 50 The total flow rate of the mixed hot water recovered to the tank 40 through 60 is equal.

  The temperature control system includes a control device 170 (first control means and second control means) that executes various controls related to temperature control of the workpiece W. The control device 170 includes a microcomputer as a calculation unit having a CPU, various memories, and the like. Temperatures T2 and Tw detected by the temperature sensors 35 and 73, liquid level position information detected by the level sensors 43A to 43C, and the like are sequentially input to the control device 170. Based on these pieces of information, the control device 170 controls the opening states of the flow rate control valves 182A, 183A, 182B, and 183B by controlling the driving states of the electropneumatic regulators 184A, 185A, 184B, and 185B. Thereby, while the temperature of the workpiece | work W is controlled to desired temperature, the collection | recovery rate of the mixed hot water which distribute | circulated the temperature control block 10 is controlled.

  Next, a temperature control processing procedure will be described with reference to the flowchart of FIG. This process is repeatedly executed by the control device 170 with a predetermined cycle. In the temperature control of the present embodiment, the process of S10 is omitted as compared with the temperature control of the first embodiment, the processes of S11 to S13, S17 to S19 are the same, and the processes of S14 to S16 are S24. The process is changed to S26. In addition, about the process same as the temperature control of 1st Embodiment, description is abbreviate | omitted by attaching | subjecting the same step number. Prior to the execution of this process, the on-off valve 22 of the water passage 20 and the on-off valve 51 of the discharge passage 50 are opened.

  In the present embodiment, the pressure of the water supplied to the common supply passage 126 and the pressure of the hot water are adjusted to be equal by the regulators 23 and 133 provided in the water passage 20 and the hot water passage 30, respectively. For this reason, in the temperature control of the first embodiment, the process (S10) for adjusting the pressure of the first fluid and the pressure of the second fluid supplied to the mixing valve to be equal is omitted in this embodiment. Yes.

  Then, the temperature of hot water supplied to the flow rate adjusting valve 183A is adjusted to be a set temperature (S11), the target temperature Tt of the workpiece W is input (S12), and the temperature Tw of the workpiece W is detected (S12). S13).

  Based on the target temperature and detected temperature of these workpieces, the control amount of the flow rate control valve is calculated (S24). Specifically, the control device 170 calculates a control amount Fm for controlling the opening degree of the flow rate adjusting valves 182A and 183A in order to control the detected temperature Tw of the workpiece W to the target temperature Tt. For example, the control amount Fm for feedback control of the opening degree of the flow rate control valves 182A and 183A is calculated by PID calculation based on the deviation between the target temperature Tt of the workpiece W and the detected temperature Tw.

  The control amount of the flow rate control valve calculated in this way is converted into the target opening of each flow rate control valve (S25). Specifically, the control device 170 increases the target opening degree of the flow rate adjustment valve 183A of the hot water passage 30 and decreases the target opening degree of the flow rate adjustment valve 182A of the water passage 20 as the control amount Fm increases. Set as follows. That is, as the control amount Fm increases, the flow rate of the hot water flowing through the hot water passage 30 to the common supply passage 126 increases and the proportion of water flowing through the water passage 20 to the common supply passage 126 decreases. The target opening degree of the control valves 183A and 182A is set.

  According to such processing, as the detected temperature Tw is lower than the target temperature Tt of the workpiece W, the ratio (flow rate) of hot water supplied from the hot water passage 30 to the temperature control block 10 via the flow rate control valve 183A is increased. The ratio (flow rate) of water supplied from the water passage 20 to the temperature control block 10 via the flow rate adjustment valve 182A is reduced.

  Further, the target opening degree of the flow rate adjustment valve 182B in the discharge passage 50 is set equal to the target opening degree of the flow rate adjustment valve 182A in the water passage 20, and the target opening degree of the flow rate adjustment valve 183B in the recovery passage 60 is set to the flow rate in the hot water passage 30. Set equal to the target opening of the control valve 183A. For this reason, the flow rate control valve 182B of the discharge passage 50 and the flow rate control valve of the recovery passage 60 so that the ratio of the mixed hot water recovered to the tank 40 increases as the ratio of hot water supplied to the temperature control block 10 increases. 183B is controlled. On the other hand, the lower the ratio of hot water supplied to the temperature control block 10, that is, the higher the ratio of normal temperature tap water supplied to the temperature control block 10, the lower the ratio of mixed hot water recovered to the tank 40. In addition, the flow rate adjustment valve 182B of the discharge passage 50 and the flow rate adjustment valve 183B of the recovery passage 60 are controlled.

  Subsequently, each corresponding electropneumatic regulator is driven based on the target valve body position of each flow rate control valve (S26). Specifically, the control device 170 outputs the target opening as a drive signal to the electropneumatic regulators 184A, 185A, 184B, 185B of the flow rate adjusting valves 182A, 183A, 182B, 183B. At this time, since the target opening is equal between the flow rate adjustment valve 182A of the water passage 20 and the flow rate adjustment valve 182B of the discharge passage 50, the same drive signal is simultaneously output to the electropneumatic regulators 184A and 184B. Further, since the target opening is equal between the flow rate adjustment valve 183A of the hot water passage 30 and the flow rate adjustment valve 183B of the recovery passage 60, the same drive signal is simultaneously output to the electropneumatic regulators 185A and 185B.

  In each of the electropneumatic regulators 184A, 185A, 184B, and 185B, an operation applied to the flow rate control valves 182A, 183A, 182B, and 183B so as to set the openings of the flow rate control valves 182A, 183A, 182B, and 183B to the target openings, respectively. Each pressure is controlled. The control circuit of the electropneumatic regulators 184A, 185A, 184B, and 185B feeds back the operation pressure applied to the flow rate control valves 182A, 183A, 182B, and 183B by, for example, PID calculation based on the deviation between the target opening and the detected opening. Control. As a result, the detected opening degrees of the flow rate control valves 182A, 183A, 182B, and 183B are controlled to be the target opening degrees, respectively, and the mixing ratio of water and hot water is adjusted by the flow rate control valves 182A and 183A. The distribution ratio of the mixed hot water is adjusted by 182B and 183B.

  Here, as described above, the total flow rate of the water supplied to the temperature control block 10 through the water passage 20 and the hot water supplied to the temperature control block 10 through the hot water passage 30 and the water is discharged to the discharge port 52 through the discharge passage 50. The total flow rate of the mixed hot water and the mixed hot water recovered to the tank 40 through the recovery passage 60 is equal. The flow rate control valves 182A, 183A, 182B, and 183B are all the same two-way valves so that the flow rate control valve 182A of the water passage 20 and the flow rate control valve 182B of the discharge passage 50 have the same target opening. Thus, the flow rate adjustment valve 183A in the hot water passage 30 and the flow rate adjustment valve 183B in the recovery passage 60 are controlled to have the same target opening. For this reason, the flow rate of hot water supplied to the temperature control block 10 through the hot water passage 30 is equal to the flow rate of mixed hot water recovered to the tank 40 through the recovery passage 60.

  Subsequently, it is determined whether or not the amount of fluid in the tank is appropriate (S17). If it is determined that the amount of fluid is appropriate (S17: YES), a message indicating that the amount of fluid is appropriate is displayed. (S18) When it is determined that the fluid amount is not appropriate (S17: NO), a warning is given that the fluid amount is inappropriate (S19). In this way, this series of processing is once ended.

  The embodiment described above has the following advantages. Only the advantages different from the first embodiment will be described below.

  The flow rate control valves 182B and 183B are controlled such that the higher the ratio of hot water supplied to the temperature control block 10, the higher the ratio of mixed hot water recovered to the tank 40. For this reason, while the energy remaining in the mixed hot water can be efficiently recovered, the amount of energy used for adjusting the temperature of the water in the tank 40 can be suppressed. As a result, energy consumption in the temperature control system can be suppressed.

  A flow control valve 182A for adjusting the flow rate of tap water flowing through the water passage 20 and a flow control valve for adjusting the flow rate of the mixed hot water flowing through the discharge passage 50 are the same two-way valves controlled by the drive signals. It is used as 182B. The flow rate control valves 182A and 182B are controlled to have the same target opening. For this reason, it is possible to control the flow control valves 182A and 182B with the same drive signal by sharing the control device 170. Similarly, the control device 170 can be shared, and the flow rate adjustment valve 183A of the hot water passage 30 and the flow rate adjustment valve 183B of the recovery passage 60 can be controlled by the same drive signal. As a result, the control system of the temperature control system can be shared, and the cost can be reduced.

  The present invention is not limited to the above embodiments, and can be implemented as follows, for example.

  -You may replace the structure and process adjusted so that the supply pressure of a 1st fluid (tap water) and the supply pressure of a 2nd fluid (hot water) may become equal by 1st Embodiment and 2nd Embodiment. Further, a variable displacement pump may be adopted as the pump 31, and the control device 70 may control the discharge amount of the variable displacement pump so that the hot water pressure P2 is equal to the water pressure P1. Specifically, an inverter for controlling the rotational speed of the pump is provided, and the rotational speed of the pump can be feedback-controlled by PID calculation based on the deviation between the water pressure P1 and the hot water pressure P2. In this case, the adjustment valve 33 in the return passage 32 may be set at a constant opening or fully closed.

  In the first embodiment, the control device 70 controls the mixing valve 80A and the distribution valve 80B in synchronization with the same drive signal via the electropneumatic regulators 81A and 81B. The valve 80B may not be controlled in complete synchronization. The same applies to the second embodiment.

  In the first embodiment, the mixing valve 80A and the distribution valve 80B are configured by the same three-way valve. However, they may not necessarily be the same three-way valve, for example, by the same drive signal although the valve structure is different. A controllable three-way valve may be used. Even in such a configuration, by controlling the distribution valve 80B so that the ratio of the hot water supplied to the temperature control block 10 and the ratio of the mixed hot water recovered to the tank 40 are made equal to those of the first embodiment. Similar advantages can be obtained.

  In the second embodiment, the flow rate control valves 182A, 183A, 182B, and 183B are all configured by the same two-way valve, but these do not necessarily have to be the same two-way valve. It may be a two-way valve that can be controlled by the same drive signal. Even in such a configuration, the second flow rate control valves 182B and 183B are controlled so that the ratio of the hot water supplied to the temperature control block 10 and the ratio of the mixed hot water recovered to the tank 40 are equal. Advantages similar to those of the embodiment can be obtained.

  When adjusting the temperature T2 of the hot water supplied to the mixing valve 80A to be the set temperature Th, the temperature control of FIG. 3 may be started after the hot water temperature T2 becomes the set temperature Th, You may adjust the temperature T2 of hot water to preset temperature Th, performing this temperature control.

  In each of the above embodiments, water is supplied from the tap water supply port 21, and the mixed hot water flowing through the temperature control block 10 is discharged from the discharge port 52. However, the hot water flowing through the temperature control block 10 may be cooled to normal temperature and supplied to the water passage 20 by a pump as normal temperature water. According to such a configuration, the amount of water used at room temperature can be suppressed. In such a configuration, only water at normal temperature that is circulated may be used without using water supplied from the water supply.

  Here, when the temperature control is started, or when the target temperature Tt of the workpiece W is set lower than the hot water temperature T2, the common supply passage 26, the temperature control block 10, and the common outflow passage 27 are disposed inside. There is water (mixed hot water) having a temperature lower than the hot water temperature T2. For this reason, even if the target temperature Tt of the workpiece W is set or changed to a temperature close to the hot water temperature T2, this low temperature water is supplied to the temperature control block 10 for a while. On the other hand, at the start of temperature control or when the target temperature Tt of the workpiece W is increased, the mixed hot water flowing through the temperature control block 10 is not recovered to the tank 40 but is circulated to the water passage 20 for a certain period. It may be. Thereby, it can suppress that low temperature water is collect | recovered by the tank 40. FIG.

  Note that the temperature of the mixed hot water flowing through the common supply passage 26 and the common outflow passage 27 may be detected, and such control may be performed based on the detected temperature. Alternatively, the flow rate of the mixed hot water flowing through the common supply passage 26 and the common outflow passage 27 may be detected, and the period for executing such control may be adjusted based on the detected flow rate and the integrated flow rate.

  Further, in the case where only the water that is circulated is used by supplying the mixed hot water circulated through the temperature control block 10 to the water passage 20 by a pump, a cooling device that cools the water is provided in the circulation path. It may be. For example, when there is a lot of heat generated in the grinding of the workpiece W, it is conceivable that the cooling capacity is insufficient even if the ratio of water at room temperature supplied to the temperature control block 10 is 100%. In such a case, it is good to operate a cooling device and to reduce the temperature of the circulated water.

  Even if the distribution valve 80B (flow rate control valves 182B, 183B) is controlled so that the ratio of hot water supplied to the temperature control block 10 and the ratio of mixed hot water recovered to the tank 40 are equalized, the mixing valve The flow rate of hot water supplied to the temperature control block 10 and the flow rate of mixed hot water recovered to the tank 40 may not be equal due to individual differences between 80A and the distribution valve 80B, evaporation of water in the tank 40, and the like. In this case, since the outflow amount of hot water from the tank 40 is different from the inflow amount of mixed hot water into the tank 40, the amount of water in the tank 40 may not be kept constant.

  In this regard, level sensors 43A to 43C (detection means) for detecting whether or not the liquid level of the water in the tank 40 has reached a predetermined position are provided. When it is detected that the surface has not reached the predetermined low position, the distribution valve 80B is set so that the ratio of the mixed hot water recovered to the tank 40 is higher than the ratio of the hot water supplied to the temperature control block 10. The configuration of changing the control of the (flow rate control valves 182B, 183B) and the control device 70 (170) can detect that the level of the water has reached a predetermined high position by the level sensor 43A. The control of the distribution valve 80B (flow rate control valves 182B, 183B) is changed so that the ratio of the mixed hot water recovered to the tank 40 is lower than the ratio of the hot water supplied to the temperature control block 10. It is effective to adopt.

  According to these configurations, when the amount of water in the tank 40 is smaller than the lower limit amount or larger than the upper limit amount, the ratio of the mixed hot water recovered to the tank 40 is changed. The amount of water in the tank 40 can be returned to an appropriate amount. Therefore, the amount of water in the tank 40 can be kept at an appropriate amount without separately performing operations such as replenishing the tank 40 with water and discharging water from the tank 40.

  The flow rate detection means (flow rate sensor) for detecting the flow rate of hot water flowing through the hot water passage 30 and the flow rate detection means (flow rate sensor) for detecting the flow rate of mixed hot water flowing through the recovery passage 60 are provided. Based on the detection value of the detection means, the distribution valve 80B (flow rate control valves 182B and 183B) is controlled so that the flow rate of hot water flowing through the hot water passage 30 and the flow rate of mixed hot water flowing through the recovery passage 60 are equal. It may be changed. Even with such a configuration, the distribution valve 80B (flow rate adjusting valves 182B, 183B) is controlled such that the higher the ratio of hot water supplied to the temperature control block 10, the higher the ratio of mixed hot water recovered to the tank 40. At the same time, the amount of water in the tank 40 can be kept constant.

  In each of the above embodiments, the distribution valve 80B (flow rate control valves 182B and 183B) is controlled so that the ratio of hot water supplied to the temperature control block 10 and the ratio of mixed hot water recovered to the tank 40 are equal. did. However, these ratios do not necessarily have to be equal, and the higher the ratio of hot water supplied to the temperature control block 10, the higher the ratio of mixed hot water recovered to the tank 40 becomes. 182B, 183B) may be used. For example, as the deviation between the target temperature Tt and the detected temperature Tw of the workpiece W increases, the ratio of hot water supplied to the temperature control block 10 and the ratio of mixed hot water recovered to the tank 40 are increased. The mode of increasing the height may be different from each other.

  -The mixing valve 80A (flow rate control valves 182A, 183A) and the distribution valve 80B (flow rate control valves 182B, 183B) are not limited to air operated valves but may be electric valves or electromagnetic valves. it can.

  In each of the above embodiments, normal temperature tap water and temperature-controlled hot water are mixed and controlled so that the temperature of the workpiece W becomes the target temperature. However, when the target temperature of the workpiece W is lower than the normal temperature, The normal temperature tap water and cooling water adjusted to a temperature lower than the normal temperature may be mixed to control the temperature of the workpiece W so as to be the target temperature. In this case, the higher the ratio of the cooling water supplied to the temperature control block 10 is, the higher the ratio of the mixed water of the tap water and the cooling water recovered to the tank 40 is. , 183B).

  Even with such a configuration, energy remaining in the mixed water (energy that can be used for cooling the workpiece W) can be efficiently recovered, and energy used for cooling the water in the tank 40 can be recovered. The amount of can be suppressed. As a result, energy consumption in the temperature control system can be suppressed.

  -Oil and other liquids can also be employed as fluid to be circulated through the temperature control block 10. For example, Galden or Florinart can be employed. According to such a liquid, water can be used to control the temperature of the workpiece W even at a temperature at which the state changes to a solid or gas.

  In each of the above embodiments, the temperature Tw of the workpiece W is detected and controlled so that the detected temperature Tw becomes the target temperature Tt. However, the temperature of the temperature control block 10 is detected, and this temperature is the target. You may control so that it may become temperature. In addition, the temperature of the member that contacts the temperature control block 10 and the workpiece W may be detected and controlled so that this temperature becomes the target temperature.

  DESCRIPTION OF SYMBOLS 10 ... Temperature control block (heat exchange part), 20 ... Water passage (1st supply passage), 30 ... Hot water passage (2nd supply passage), 40 ... Tank (storage container), 50 ... Discharge passage, 60 ... Recovery passage , 70 ... control device (first control means and second control means), 80A ... mixing valve (mixing ratio adjusting means), 80B ... distributing valve (distributing ratio adjusting means).

Claims (9)

A temperature control system that controls the temperature of a temperature control target by circulating a fluid through a heat exchange unit,
A first supply passage for supplying a normal temperature first fluid from a supply source to the heat exchange unit;
A storage container for storing fluid inside and adjusting its temperature;
A second supply passage for supplying the temperature-adjusted second fluid from the storage container to the heat exchange unit;
A mixing ratio adjusting means for adjusting a ratio of mixing the first fluid supplied to the heat exchange unit through the first supply passage and the second fluid supplied to the heat exchange unit through the second supply passage;
A discharge passage for discharging the mixed fluid of the first fluid and the second fluid that has passed through the heat exchange section from the heat exchange section to a discharge port;
A recovery passage for recovering the mixed fluid from the heat exchange section to the storage container;
A distribution ratio adjusting means for adjusting a ratio distributed between the mixed fluid discharged to the discharge port through the discharge passage and the mixed fluid recovered to the storage container through the recovery passage;
First control means for controlling the mixing ratio adjusting means so that the temperature of the temperature control target becomes a target temperature;
Second control means for controlling the distribution ratio adjusting means such that the higher the ratio of the second fluid supplied to the heat exchange unit, the higher the ratio of the mixed fluid recovered to the storage container;
A temperature control system comprising: A total flow rate of the first fluid supplied to the heat exchange unit through the first supply passage and the second fluid supplied to the heat exchange unit through the second supply passage, and discharged to the discharge port through the discharge passage. The mixed fluid and the total flow rate of the mixed fluid recovered to the storage container through the recovery passage are equalized,
The second control means controls the distribution ratio adjusting means so that a ratio of the second fluid supplied to the heat exchange unit is equal to a ratio of the mixed fluid recovered to the storage container. The temperature control system according to claim 1. The mixing ratio adjusting means and the distribution ratio adjusting means are each a three-way valve that can be controlled by a drive signal, and the three-way valve has a third fluid flowing through the first flow path and a third fluid flowing through the second flow path. The flow rate of the fluid flowing through the first flow channel and the fluid flowing through the second flow channel can be adjusted.
In the mixing ratio adjusting means, the first supply passage communicates from the first flow path to the third flow path, and the second supply passage communicates from the second flow path to the third flow path. And
In the distribution ratio adjusting means, the discharge passage communicates from the third flow path to the first flow path, and the recovery passage communicates from the third flow path to the second flow path,
The first control means and the second control means are common to the mixing ratio adjusting means and the distribution ratio adjusting means, and the mixing ratio adjusting means and the distribution ratio adjusting means are controlled by the same drive signal. The temperature control system according to claim 1, wherein the system is a temperature control system.   The temperature control system according to claim 3, wherein the first control unit and the second control unit control the mixing ratio adjusting unit and the distribution ratio adjusting unit in synchronization with the same drive signal. The three-way valve includes a first valve body for adjusting a communication state between the first flow path and the third flow path, and a second valve for adjusting a communication state between the second flow path and the third flow path. Having a body,
The first valve body and the second valve body are both formed in a conical shape, and one of them is provided with a male screw portion at the end on the apex side, and the other is a female screw portion at the end on the apex side. The temperature control system according to claim 3 or 4, wherein the male screw part and the female screw part are screwed together. Comprising detection means for detecting the amount of fluid stored in the storage container;
The second control means supplies the ratio of the mixed fluid recovered to the storage container to the heat exchange section when the amount of the fluid detected by the detection means is smaller than a lower limit amount. The temperature control system according to claim 2, wherein the control of the distribution ratio adjusting means is changed so as to be higher than the ratio of the fluid. Comprising detection means for detecting the amount of fluid stored in the storage container;
The second control means supplies the ratio of the mixed fluid recovered to the storage container to the heat exchange section when the amount of the fluid detected by the detection means is larger than an upper limit amount. The temperature control system according to claim 2 or 6, wherein the control of the distribution ratio adjusting means is changed so as to be lower than the ratio of the fluid.   The pressure of the first fluid supplied to the mixing ratio adjusting means through the first supply passage is adjusted to be equal to the pressure of the second fluid supplied to the mixing ratio adjusting means through the second supply passage. The temperature control system according to any one of claims 1 to 7, further comprising pressure adjusting means.   The temperature control system according to any one of claims 1 to 8, wherein the supply source is water and the first fluid is tap water.