JP2011122069A5 - - Google Patents
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- Publication number
- JP2011122069A5 JP2011122069A5 JP2009281168A JP2009281168A JP2011122069A5 JP 2011122069 A5 JP2011122069 A5 JP 2011122069A5 JP 2009281168 A JP2009281168 A JP 2009281168A JP 2009281168 A JP2009281168 A JP 2009281168A JP 2011122069 A5 JP2011122069 A5 JP 2011122069A5
- Authority
- JP
- Japan
- Prior art keywords
- fixing
- weight
- parts
- polishing pad
- pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Claims (1)
このベース樹脂100重量部に対し、50〜200重量部の石油系粘着付与樹脂と、10〜60重量部のクマロン系粘着付与樹脂とを含むことを特徴とする研磨パッド固定用両面テープ A polishing pad fixing double-sided surface in which a pressure-sensitive adhesive layer for fixing a surface plate is laminated and integrated on one surface of a base material made of a resin film, and an adhesive layer for fixing a polishing pad is stacked and integrated on the other surface of the base material A base resin containing a styrene-isoprene-styrene elastomer, wherein the pressure-sensitive adhesive constituting the pressure-sensitive adhesive layer for fixing the platen is an adhesive tape;
A double-sided tape for fixing a polishing pad comprising 50 to 200 parts by weight of a petroleum-based tackifying resin and 10 to 60 parts by weight of a coumarone-based tackifying resin with respect to 100 parts by weight of the base resin.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009281168A JP5520026B2 (en) | 2009-12-11 | 2009-12-11 | Double-sided tape for fixing polishing pad |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009281168A JP5520026B2 (en) | 2009-12-11 | 2009-12-11 | Double-sided tape for fixing polishing pad |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2011122069A JP2011122069A (en) | 2011-06-23 |
JP2011122069A5 true JP2011122069A5 (en) | 2012-11-01 |
JP5520026B2 JP5520026B2 (en) | 2014-06-11 |
Family
ID=44286268
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2009281168A Active JP5520026B2 (en) | 2009-12-11 | 2009-12-11 | Double-sided tape for fixing polishing pad |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP5520026B2 (en) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5858576B2 (en) * | 2011-04-21 | 2016-02-10 | 東洋ゴム工業株式会社 | Hot melt adhesive sheet for laminated polishing pad and support layer with adhesive layer for laminated polishing pad |
KR101746270B1 (en) * | 2011-10-31 | 2017-06-12 | 도오꾜오까고오교 가부시끼가이샤 | Adhesive composition for bonding wafer and supporting body for said wafer, and use thereof |
JP6594606B2 (en) * | 2013-01-31 | 2019-10-23 | 日東電工株式会社 | Adhesive composition and adhesive sheet |
JP2015048430A (en) * | 2013-09-03 | 2015-03-16 | 日東電工株式会社 | Double-sided adhesive tape |
JP6202958B2 (en) * | 2013-09-13 | 2017-09-27 | 日東電工株式会社 | Adhesive sheet |
JP6513356B2 (en) * | 2013-09-13 | 2019-05-15 | 日東電工株式会社 | Adhesive sheet for fixing polishing pad |
JP7318510B2 (en) * | 2019-12-02 | 2023-08-01 | 東洋インキScホールディングス株式会社 | Adhesive and Adhesive Sheet for Fixing Abrasive Member |
KR102460711B1 (en) * | 2020-08-21 | 2022-10-27 | 한국타이어앤테크놀로지 주식회사 | Foam tape for sound-absorbing tire and sound-absorbing tire comprising the same |
JP7415888B2 (en) | 2020-11-17 | 2024-01-17 | 信越半導体株式会社 | Polishing pad, double-sided polishing device, and wafer double-sided polishing method |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007245276A (en) * | 2006-03-15 | 2007-09-27 | Sekisui Chem Co Ltd | Double-side tape for fixing polishing pad |
US20090098376A1 (en) * | 2006-05-17 | 2009-04-16 | Yoshiyuki Fukuoka | Double-Sided Adhesive Tape for Securing Polishing-Pad |
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2009
- 2009-12-11 JP JP2009281168A patent/JP5520026B2/en active Active
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