JP2011109766A - Motor cooling unit and motor - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a motor cooling unit which cools a motor efficiently, improves maintainability and is suitable for recycle use, and to further provide the motor. <P>SOLUTION: A motor cooling unit 5 has a bracket 15 where a cooling jacket 12 attached in contact with the external surface of a motor body 8 to circulate a coolant, is formed. The cooling jacket 12 is formed between the outer surface of the motor body 8 and the inner surface of the bracket 15. The cooling efficiency can be improved by utilizing the outer surface of the motor body 8 as the wall face of the cooling jacket, and also the motor cooling unit 5 can be used repeatedly by attaching it to or detaching it from the motor 2. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

The present invention relates to a motor cooling unit and a motor used in a vacuum atmosphere, and in particular, a motor cooling unit that can be attached to an outer peripheral portion of a motor body in order to cool heat accumulated in the motor, and the motor cooling unit. The present invention relates to a motor provided.

A vacuum motor (hereinafter referred to as a motor) made of a material that does not generate outgas and gas that affects process performance may be used as a rotation drive mechanism in a vacuum film forming apparatus that performs a film forming process or the like. . A motor in a vacuum atmosphere has a large heat input due to internal heat generation due to the current flowing through the stator coil at all times, heat transfer or radiation due to heating of a chamber wall, a substrate, or a substrate support holder around the motor.

However, due to the vacuum atmosphere, natural cooling by convection cannot be performed and heat is accumulated in the motor. When the temperature of the motor rises above a certain temperature, there is a concern about the breakdown of the stator coil, the increase of outgas, or the occurrence of poor bearing lubrication. Therefore, measures are taken such as limiting the maximum current value with a motor driver to suppress heat generation, or providing a cooling unit in the motor body to prevent the motor temperature from rising.

Among them, the cooling unit has a cooling unit that can flow cooling brine (cooling medium) such as compressed air in a jacket (cooling jacket) formed as a hermetically sealed space in contact with the periphery of the motor body. The motor is cooled by arranging.

However, in the structure in which the cooling unit is in contact with the periphery of the motor body, a gap may be formed on the contact surface and the heat transfer area may be reduced. As a result, the motor current must be limited and the maximum operating torque is reduced. There was a problem to do. Patent Documents 1 and 2 disclose motors that attempt to solve such problems.

The technology described in Patent Document 1 increases the adhesion and improves heat conduction by pushing and fixing a cooling pipe in which a refrigerant for cooling the motor is circulated into a U-shaped groove formed in the motor body. And a structure for suppressing vibration. Moreover, the technique described in Patent Document 2 provides a space for allowing a coolant to flow between the inner side of the frame and an outer cylinder concentric with the inner side of the frame, and is tightly sealed with an annular plate via packings at both ends of the inner cylinder and the outer cylinder. It relates to a structure that closes.

Japanese Patent Laid-Open No. 09-285073 Japanese Patent Laid-Open No. 10-210702

However, the technique described in Patent Document 1 requires a high processing accuracy to satisfy the heat conduction between the cooling pipe and the U-shaped groove of the motor body, and therefore does not necessarily require vibration suppression. However, there is a problem that the structure is expensive when applied to a motor that rotates at a low speed.

Moreover, since the technique described in Patent Document 2 has a structure in which a bent water channel is formed between an inner cylinder and an outer cylinder that are integrally formed with a motor case, the motor is expensive as a result. was there. Further, since it is necessary to replace the cooling unit at the same time as replacing the motor, there is a problem that recyclability and maintenance are not always good.

In view of the above problems, the present invention provides a motor cooling unit and a motor that efficiently cool a motor, improve maintainability, and are suitable for recycling.

The motor cooling unit according to the present invention is a motor cooling unit having a bracket attached in a state of being in contact with the outer surface of the motor body, between the inner surface of the bracket and the outer surface of the motor body, A cooling jacket through which the cooling medium flows is formed. The motor according to the present invention includes such a motor cooling unit.

By using the motor cooling unit according to the present invention, the following effects can be obtained. That is, by utilizing the outer surface of the motor body as one wall surface of the cooling jacket through which the cooling medium flows, the cooling efficiency and the allowable current value of the motor can be improved, and the maximum usable torque can be improved. . In addition, the cooling jacket can be easily attached to and detached from the outer surface of the motor body, thereby simplifying maintenance and reducing costs. Furthermore, it is possible to reduce the parts replacement cost of the apparatus by repeatedly using the motor cooling unit itself.

It is a section schematic diagram of a vacuum device carrying a motor provided with a motor cooling unit concerning a 1st embodiment of the present invention. It is sectional drawing of the motor cooling unit and motor which concern on the 1st Embodiment of this invention. It is the schematic diagram showing the sealing surface of the motor body which concerns on the 1st Embodiment of this invention. It is sectional drawing of the motor cooling unit and motor which concern on the 2nd Embodiment of this invention. It is sectional drawing of the motor with which the bracket which concerns on the 3rd Embodiment of this invention was attached. It is a schematic diagram of the sealing surface of the motor body which concerns on the 3rd Embodiment of this invention.

(First embodiment)
1-3 is a figure explaining the 1st Embodiment of this invention. In order to prevent complication of the drawings, configurations that are not directly related to the present invention are omitted except for a part. In FIG. 1, the cross-sectional schematic of the vacuum apparatus 1 which mounts the vacuum motor provided with the motor cooling unit which concerns on this embodiment is shown. The vacuum apparatus 1 is an apparatus for performing a process (such as thin film formation) in a vacuum atmosphere. Inside the vacuum device 1 (vacuum atmosphere side), a motor (vacuum motor) 2 and a motor cooling unit 5 for cooling the motor 2 are provided.

2A and 2B are sectional views of the motor cooling unit and the motor according to this embodiment. A sectional view (longitudinal sectional view) in a direction parallel to the rotating shaft 6 of the motor 2 is FIG. 2 (a), and a sectional view perpendicular to the rotating shaft 6 (transverse sectional view) is FIG. 2 (b). The motor 2 is used as a drive mechanism unit in a vacuum atmosphere in a vacuum film forming apparatus that performs a process in a vacuum. The motor cooling unit 5 includes a bracket 15 for cooling the surface of the motor body 8 of the motor 2. The bracket 15 is connected to the introduction port 3 for introducing / extracting the cooling brine (cooling medium) from the outside of the vacuum apparatus 1, the relay joint 4, and the like via a pipe.

The cooling brine (cooling medium) introduced into the bracket 15 is configured to circulate in the cooling jacket 12 as a cooling medium passage formed between the inside of the bracket 15 and the surface of the motor body 8. ing. As the cooling medium, argon, helium gas, cooling water, or the like can be used in addition to air.

As described above, the motor cooling unit 5 is configured with the bracket 15 attached to the outer surface of the motor body 8 as a main member. The bracket 15 according to the present embodiment has a substantially circular tube shape, and a groove portion 15a for attaching the O-ring 14 is formed in advance on both ends of the bracket 15 arranged in contact with the outer surface of the motor body 8.

3A and 3B are schematic views showing the seal surface of the motor body according to the present embodiment. As shown in FIGS. 3 (a) and 3 (b), O-ring seal surfaces 16 are formed on the circumferences of the left and right ends of the outer peripheral portion of the motor body 8 having a cylindrical shape. The O-ring seal surface 16 is an outer surface of the motor body 8 at a portion in contact with the O-ring 14, and the surface is smoothly finished so as to be able to seal with the O-ring 14.

Thus, the cooling jacket 12 in which the cooling brine flows between the motor body 8 and the bracket 15 is formed by assembling the bracket 15 with the O-ring 14 sandwiched between the outer surface of the motor body 8. The cooling brine is introduced into the cooling jacket 12 through a piping mechanism including the introduction port 3 and the relay joint 4.

Here, a method of assembling the bracket 15 to the motor 2 will be described. The outer diameter of the motor body 8 is configured to be slightly smaller than the inner diameter of the bracket 15. The inner diameter of the O-ring 14 incorporated in the groove 15a formed on both ends of the inner diameter of the bracket 15 is slightly smaller than the outer diameter of the motor body 8 of the motor 2. Therefore, when the bracket 15 is assembled to the outer diameter of the motor 2, the O-ring 14 is deformed, and the cooling jacket 12 isolated from the vacuum atmosphere is formed.

In this embodiment, after assembling the bracket 15 to the motor body 8, both ends are directly fixed with screws (not shown). However, brackets (not shown) for fixing the motor 2 to the vacuum device 1 side. It is good also as a structure which determines the position of the bracket 15 via. As described above, since the bracket 15 can be easily detached from the motor 2, even when the motor 2 needs to be replaced, the bracket 15 and the piping are removed by removing the fixing portion between the motor 2 and the bracket 15. Can be used again.

(Second Embodiment)
FIG. 4 is a cross-sectional view of the motor cooling unit and the motor according to the second embodiment. In order to prevent complication of the drawings, configurations that are not directly related to the present invention are omitted except for a part. In the following embodiments, the same members and arrangements as those in the first embodiment are denoted by the same reference numerals, and detailed description thereof is omitted.

The bracket 25 constituting the motor cooling unit according to the present embodiment is different in the structure of the internal water channel compared to the bracket 15 of the first embodiment. The bracket 25 is provided with a partition wall 17 so as to divide the vicinity of the center of the cooling jacket 22 in a direction orthogonal to the rotation shaft 6. An opening 17 a for guiding the cooling medium in the cooling jacket 22 to the outlet side is formed at a position opposite to the cooling medium inlet of the partition wall 17. For this reason, in the bracket 25 in which the partition wall 17 is formed, the distance that the cooling medium moves in the cooling jacket 22 is longer than that in the bracket 15, and the cooling efficiency is improved.

(Third embodiment)
5 and 6 are cross-sectional views of the motor cooling unit according to the third embodiment, and FIG. 5 is a vertical cross-sectional view (FIG. 5A) and a cross-sectional view of the motor 32 with the bracket 35 attached thereto. (FIG. 5B) and FIG. 6 are schematic views showing the O-ring seal surface 36 of the motor body 38. In order to prevent complication of the drawings, configurations that are not directly related to the present invention are omitted except for a part. In the following embodiments, the same members and arrangements as those in the first embodiment are denoted by the same reference numerals, and detailed description thereof is omitted.

The bracket 35 constituting the motor cooling unit according to the present embodiment is configured to be flat so as to be attached to a flat surface of a motor body 38 having a rectangular cross section.

By using the motor cooling unit according to the present invention, the surface of the motor body 38 is utilized as one wall surface of the cooling jacket 42 through which the cooling medium flows to improve the cooling efficiency, the allowable current value of the motor, and the maximum usable torque. be able to. Further, the bracket 35 can be easily attached to and detached from the outer surface of the motor body 38, so that the maintenance can be simplified and the cost can be reduced. Furthermore, it is possible to reduce the parts replacement cost of the apparatus by repeatedly using the motor cooling unit itself.

P Exhaust pump 1 Vacuum device 2, 32 Motor 3 Introduction port 4 Piping relay joint 5 Motor cooling unit 6 Rotating shaft 8, 38 Motor body 9 Stator coil 10 Rotor 11 Bearing 12, 22, 42 Cooling jacket 14 O-ring 15, 25, 35 Bracket 15a Groove 16, 36 O-ring seal surface 17 Partition 17a Opening

Claims (4)

A motor cooling unit having a bracket attached in contact with the outer surface of the motor body,
A motor cooling unit, wherein a cooling jacket through which a cooling medium flows is formed between an inner surface of the bracket and an outer surface of the motor body. An end of the cooling jacket is hermetically held by an O-ring disposed between the outer surface of the motor body and the inner surface of the bracket,
The motor cooling unit according to claim 1, wherein the O-ring is attached to a groove on the bracket side. The motor cooling unit according to claim 1, wherein the bracket includes a partition wall that divides the cooling jacket. A motor comprising the motor cooling unit according to any one of claims 1 to 3.