JP2011106576A - Fluid control valve - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a fluid control valve suppressing oscillation of fluid pressure, while suppressing degradation in pressure controllability. <P>SOLUTION: The fluid control valve 10 includes a bottom plate 12, a body 14, and a cover 16. An inlet port 18 and an outlet port 20 can communicate with the body 14 through an upstream fluid chamber 22 and a downstream fluid chamber 24, and a valve element 26 communicates/shuts off between the fluid chambers 22, 24. The valve element 26 has a shaft 30 and a flexible film part 28, and a spring receiving member 39 is disposed to an end of the shaft 30. A diameter expanded part 51 which can be displaced on a restriction part 12a side is disposed to a small diameter part 39b of the spring receiving member 39, and an O-ring 57 is disposed to an outer periphery of the diameter expanded part 51. An adjustment screw 55 is fastened into an adjustment hole of the spring receiving member 39 to displace the diameter expanded part 51 on the restriction part 12a side and press a restriction part 12a through the O-ring 57. Further, by adjusting a fastening amount of the adjustment screw 55, a displacement of the diameter expanded part 51 is adjusted. <P>COPYRIGHT: (C)2011,JPO&amp;INPIT

Description

  According to the present invention, a fluid flow path is partitioned into an upstream fluid chamber and a downstream fluid chamber by a valve body including a shaft portion and a flexible membrane portion connected to the shaft portion, and the displacement of the valve body is The present invention relates to a fluid control valve that causes the fluid flowing into the upstream fluid chamber to flow out through the downstream fluid chamber.

  FIG. 6 shows a cross-sectional configuration of a conventional fluid control valve.

  As illustrated, the fluid control valve 110 includes a bottom plate 112, a body 114, and a cover 116. The body 114 is provided with an inflow port 118 and an outflow port 120. The inflow port 118 and the outflow port 120 are communicated and blocked by a valve body 126. That is, when the tapered portion 126a of the valve body 126 is seated on the seat portion 132 formed by the inner wall of the body 114, the gap between the inlet 118 and the outlet 120 is blocked, and the tapered portion 126a is separated from the seat portion 132. Thus, the inlet 118 and the outlet 120 are communicated with each other.

  An elastic force of a coil spring 136 is applied to the valve body 126 in the valve closing direction via a spring receiving member 134. In contrast, a force in the valve opening direction is applied to the valve body 126 by the pressure application member 138.

  In such a configuration, when a predetermined liquid chemical is supplied to the inlet 118 and a predetermined pressure is applied to the pressure applying member 138, the tapered portion 126a of the valve body 126 is separated from the seat portion 132 and flows into the inlet 118. The chemical solution flows out to the outlet 120. At this time, the pressure of the chemical solution flowing out from the outlet 120 can be controlled by the pressure of the pressure applying member 138.

  By the way, in such a fluid control valve 110, the force that acts on the valve body 126 by the flow of the chemical liquid and the force that acts on the valve body 126 by the coil spring 136 and the like due to fluctuations in the flow of chemical liquid (pressure, flow rate, etc.) When the force balance is lost, the valve body 126 may vibrate. When the vibration of the valve body 126 occurs, an oscillation phenomenon occurs in which the pressure of the chemical solution flowing out from the outlet 120 (that is, the secondary pressure) oscillates, and as a result, the pressure accuracy may be reduced (other problems such as a decrease in life). There is also.)

  In order to solve this problem, for example, in Patent Document 1, a valve-shaped damping member made of a rubber elastic body is attached to the valve body, and the damping member is disposed in the sliding hole, thereby providing a valve body. The structure which slides a damping member on the inner surface of a sliding hole with the displacement of is disclosed. According to this, a predetermined frictional force can be applied to the vibration damping member, and consequently a resistance force can be applied to the valve body, so that the oscillation of the valve body can be suppressed and, as a result, the pressure oscillation Can be expected to be suppressed.

JP 2007-24070 A

  However, in the technique of the above-mentioned Patent Document 1, if a variation in size occurs when forming the damping member or the sliding hole, it is considered that the magnitude of the frictional force applied to the damping member also varies accordingly. . For example, when the outer diameter dimension of the damping member is larger than the target dimension, or when the inner diameter dimension of the sliding hole is smaller than the target dimension, the frictional force is increased, and as a result, the movement of the valve body becomes dull and the pressure is reduced. There is a risk that controllability will be reduced. Further, when the outer diameter dimension of the vibration damping member is smaller than the target dimension or when the inner diameter dimension of the sliding hole is larger than the target dimension, the frictional force is reduced, and as a result, the oscillation of the fluid pressure may not be suppressed. . In other words, it can be said that there is still room for improvement in the above technique in terms of achieving both suppression of oscillation of the fluid pressure and ensuring of pressure controllability.

  The present invention has been made in view of the above circumstances, and a main object of the present invention is to provide a fluid control valve capable of suppressing oscillation of fluid pressure while suppressing a decrease in pressure controllability.

  In order to solve the above-described problem, the fluid control valve according to the first aspect of the present invention is configured such that a fluid flow path is formed by a valve body including a shaft portion and a flexible film portion connected to the shaft portion. A fluid control valve that is partitioned by a fluid chamber and that causes the fluid flowing into the upstream fluid chamber to flow out to the outside through the downstream fluid chamber due to the displacement of the valve body, and is displaced in conjunction with the shaft portion. A movable portion that is provided on the outer peripheral side of the movable portion, restricts the displacement direction of the movable portion in the displacement direction of the valve body, and has at least one side of the movable portion and the restriction portion. A pressing means for pressing the other and a pressing amount adjusting means for adjusting a pressing amount by the pressing means.

  According to the present invention, since the restricting portion is provided on the outer peripheral side of the movable portion, the displacement direction of the movable portion is restricted to the displacement direction of the valve body. Moreover, since at least one of the movable part and the restricting part has the pressing means, the other can be pressed by the pressing means. Thereby, since a predetermined frictional force can be applied to the movable part, vibration of the valve body can be suppressed, and as a result, the oscillation phenomenon of the fluid can be suppressed. Since the pressing amount by the pressing unit can be adjusted by the pressing amount adjusting unit, the magnitude of the frictional force applied to the movable part can be adjusted. Therefore, it is possible to suppress a situation in which the applied frictional force is too large and the valve body is slowed down, resulting in a decrease in pressure controllability, and a situation in which the applied frictional force is too small and the fluid pressure oscillates can be suppressed. . That is, in this case, the oscillation of the fluid pressure can be suppressed while suppressing a decrease in pressure controllability.

  In the fluid control valve according to a second aspect of the present invention, in the first aspect, the restricting portion is formed with a displacement restricting surface for restricting the displacement direction of the movable portion to the displacement direction of the valve body, and the pressing means Is provided on the movable part side and presses the displacement regulating surface of the regulating part.

  When the pressing means is provided on the regulating part side and the movable part is pressed by the pushing means, the pressing means is disposed on the outer peripheral side (for example, inside the regulating part) than the movable part. It is assumed that the configuration will be large. In that respect, in the present invention, the pressing means is provided on the movable part side, and the displacement restricting surface of the restricting part is pressed by the pressing means, so that the installation configuration such as incorporating the pressing means in the movable part can be simplified. . Thereby, the effect of the first invention can be realized with a relatively simple configuration.

  A fluid control valve according to a third aspect is the fluid control valve according to the second aspect, wherein the pressing means is a part of the movable part and is provided on a displacement part that can be displaced toward the restriction part, and on an outer surface of the displacement part. And an elastic member that contacts the displacement regulating surface of the regulating part, and a displacement means for displacing the displacement part toward the regulating part, wherein the pressing amount adjusting means is a displacement amount of the displacement part by the displacing means. It is a displacement amount adjusting means for adjusting.

  According to the present invention, when the displacement part which is a part of the movable part is displaced toward the restriction part by the displacement means, the elastic member provided on the outer surface of the displacement part becomes the displacement restriction surface between the displacement part and the restriction part. Compressed while sandwiched between the two. In this case, since the displacement restricting surface of the restricting portion is pressed by the repulsive force of the elastic member, a frictional force is applied to the elastic member, and thus a resistance force is applied to the valve body. And since the compression amount of an elastic member can be adjusted by adjusting the displacement amount of a displacement part by a displacement amount adjustment means, as a result, a press amount can be adjusted and a frictional force can be adjusted as a result. Here, when a hard member is used instead of the elastic member in such a configuration, even if the displacement portion is slightly displaced, the hard member is not compressed, so that the pressing amount is assumed to increase rapidly. Therefore, in this case, it is difficult to finely adjust the pressing amount, and there is a risk that it takes time to adjust the frictional force. In this respect, the present configuration using the elastic member can avoid such inconvenience, so that the frictional force can be adjusted suitably.

  The fluid control valve according to a fourth aspect is the fluid control valve according to the third aspect, wherein a plurality of the displacement portions are provided over the entire region in the same direction along the outer peripheral direction of the movable portion. Are simultaneously displaced toward the regulating portion, and the elastic member has an annular shape and is provided across the outer surface of each of the displacement portions.

  According to the present invention, a plurality of displacement portions are provided over the entire region in the same direction along the outer peripheral direction of the movable portion, and an annular elastic member is provided across the outer surface of each displacement portion. Since each of these displacement portions is simultaneously displaced toward the restriction portion by the displacement means, the displacement restriction surface of the restriction portion is pressed through the elastic member over the entire outer periphery of the movable portion (specifically, the portion corresponding to the displacement portion). It becomes possible. As a result, a resistance force can be applied to the entire outer periphery of the movable portion, so that it is possible to suppress the inconvenience that the movable portion is not balanced and tilted when the resistance force is locally applied.

  In a fluid control valve according to a fifth aspect based on the fourth aspect, the movable portion is a circumferential surface having an axis extending in a displacement direction of the movable portion, and the displacement restricting surface of the restricting portion is the movable portion. A circumferential surface that is substantially coaxial with the outer peripheral surface of the portion, wherein the elastic member has an annular shape, and the displacing means displaces the displacing portions simultaneously and at the same displacement amount toward the regulating portion. It is characterized by being.

  According to the present invention, the outer peripheral surface of the movable portion is a circumferential surface having an axis extending in the displacement direction of the movable portion, and the displacement restricting surface of the restricting portion is substantially coaxial with the outer peripheral surface of the movable portion. It is a surface. In other words, the outer peripheral surface of the movable portion and the displacement restricting surface of the restricting portion are opposed to each other inside and outside. And since a plurality of displacement parts provided over the entire area in the same direction along the outer peripheral direction of the movable part are displaced to the regulating part side by the displacement means at the same displacement amount, the part corresponding to the displacement part in the movable part is The diameter is expanded as a whole. In this case, since the displacement restricting surface of the restricting portion can be uniformly pressed over the entire outer periphery of the movable portion (specifically, the portion corresponding to the displacement portion), a resistance force can be uniformly applied to the entire outer periphery of the movable portion. As a result, it is possible to further suppress inconveniences such as the movable part being out of balance and tilting when the movable part is displaced.

  Further, it is desirable to use an O-ring as the elastic member. The O-ring is relatively easy to obtain, and can be attached relatively easily by fitting it to the outer periphery of each displacement portion, which is convenient for realizing the above effects.

  A fluid control valve according to a sixth aspect of the present invention is the fluid control valve according to the fourth or fifth aspect, wherein the elastic member has an open end.

  For example, in a configuration using a closed ring as the elastic member, the elastic member pulls itself along the circumferential direction when the displacement portion is displaced toward the restriction portion, so that the elastic member is pressed against the restriction portion. Be disturbed. In that respect, according to the present invention, since the elastic member has an open end, such inconvenience can be avoided. That is, the pressing amount for pressing the restricting portion in accordance with the displacement amount of the displacing portion can be adjusted (increased and lowered) relatively linearly, so that the frictional force can be easily adjusted.

  A fluid control valve according to a seventh aspect is the fluid control valve according to any one of the fourth to sixth aspects, wherein the movable portion has an opening formed at one end side in the displacement direction and formed along the displacement direction. And the wall part which divides the inside and outside of the hole part is divided into a plurality along the circumferential direction, and each divided piece can be tilted to the regulating part side. And the displacement means includes an adjustment screw that is inserted through the hole portion and is tightened to the back side of the hole portion to incline and displace the displacement portions toward the regulating portion, and the displacement amount adjustment means includes: The displacement amount of the displacement portion is adjusted by adjusting the tightening amount of the adjustment screw.

  According to the present invention, by inserting an adjustment screw into a hole formed on one end side in the displacement direction of the movable part and tightening the adjustment screw, a plurality of displacement parts that divide the inside and outside of the hole are arranged on the regulating part side. Can be tilted and displaced. And the displacement amount of a displacement part can be adjusted by adjusting the tightening amount of an adjustment screw. In this case, since the magnitude of the frictional force applied to the movable part can be adjusted by adjusting the tightening amount of the adjusting screw, the adjusting operation can be performed relatively easily.

The longitudinal cross-sectional view which shows the whole structure of a fluid control valve. The exploded view which shows the structure around a spring receiving member. (A) is a bottom view showing a spring receiving member, (b) is a plan view showing an O-ring. Explanatory drawing for demonstrating the adjustment procedure of frictional force. The longitudinal cross-sectional view which shows the structure of the spring receiving member periphery in another example. The longitudinal cross-sectional view which shows the structure of the conventional fluid control valve.

  Hereinafter, a first embodiment in which a fluid control valve according to the present invention is applied to a fluid control valve used in a semiconductor manufacturing process will be described with reference to the drawings. FIG. 1 is a cross-sectional view showing the overall configuration of the fluid control valve.

  As shown in FIG. 1, the fluid control valve 10 has a substantially rectangular parallelepiped shape by integrally assembling the bottom plate 12, the body 14, and the cover 16 in this order. Here, the bottom plate 12 and the cover 16 are made of, for example, polypropylene resin, and the body 14 is made of fluorine-based synthetic resin.

  The body 14 is provided with an inlet 18 and an outlet 20. And the fluid control valve 10 flows out the chemical | medical solution which flowed into the inflow port 18 through the outflow port 20 outside. Specifically, the inflow port 18 can communicate with the outflow port 20 via the upstream fluid chamber 22 and the downstream fluid chamber 24.

  The upstream fluid chamber 22 and the downstream fluid chamber 24 can communicate with each other at the center of the body 14. Specifically, the upstream fluid chamber 22 and the downstream fluid chamber 24 are communicated and blocked by the valve body 26. The valve body 26 includes a shaft portion 30 and a flexible film portion 28 that is connected to the lower portion of the shaft portion 30. The shaft portion 30 is configured to include an enlarged portion 30a whose cross-sectional area is enlarged at the central portion in the axial direction. The enlarged portion 30a has a tapered shape in which the cross-sectional area is reduced as it approaches the flexible film portion 28. The enlarged portion 30a has the largest cross-sectional area at the end portion farthest from the flexible film portion 28, and a planar portion that extends in the direction orthogonal to the axial direction is formed at the end portion. .

  The valve body 26 is accommodated across the upstream fluid chamber 22 and the downstream fluid chamber 24. The valve body 26 is accommodated so that the axial direction of the shaft portion 30 is the same as the direction from the bottom plate 12 side toward the cover 16 side. The valve body 26 can be displaced along the axial direction of the shaft portion 30 (vertical direction in FIG. 1). Here, when the valve body 26 is displaced toward the cover 16 along the axial direction of the shaft portion 30, the end portion (the portion having the largest cross-sectional area) of the enlarged portion 30 a is formed by the inner wall of the body 14. The valve seat 32 is seated. In this case, the upstream fluid chamber 22 and the downstream fluid chamber 24 are blocked. On the other hand, when the valve body 26 is displaced toward the bottom plate 12 along the axial direction of the shaft portion 30, the end portion on the cover 16 side of the enlarged portion 30 a is separated from the valve seat portion 32. In this case, the upstream fluid chamber 22 and the downstream fluid chamber 24 communicate with each other.

  The end portion of the flexible membrane portion 28 is fixed by being sandwiched between the bottom plate 12 and the body 14. As a result, the upstream fluid chamber 22 and the bottom plate 12 (specifically, a storage area 35 described later) are partitioned by the flexible film portion 28.

  The bottom plate 12 is formed with a substantially cylindrical accommodation region 35 opened to the cover 16 side. The accommodation area 35 is provided on the opposite side of the upstream fluid chamber 22 with the flexible membrane portion 28 interposed therebetween. The bottom plate 12 is provided with a restricting portion 12a so as to extend from the back side surface (bottom surface) of the accommodation region 35 to the cover 16 side. The restricting portion 12a is formed in an annular shape as a whole, and its inner side surface is a circumferential surface. Here, the inner surface of the restricting portion 12a corresponds to a displacement restricting surface. The accommodating region 35 is partitioned into two spaces by the restricting portion 12a, the spring accommodating chamber 37 is outside the restricting portion 12a, and the substantially cylindrical restricting region 41 is inside the restricting portion 12a. ing.

  A compression coil spring 38 is accommodated in the spring accommodating chamber 37. The end portion on the cover 16 side of the compression coil spring 38 is in contact with a spring receiving member 39 assembled to the end portion on the bottom plate 12 side of the shaft portion 30 of the valve body 26. The spring receiving member 39 is formed in a substantially cylindrical shape as a whole, and is made of, for example, polypropylene resin. Specifically, the spring receiving member 39 has a large-diameter portion 39a formed on the cover 16 side and a small-diameter portion 39b formed on the bottom plate 12 side, of which the large-diameter portion 39a is a compression coil spring. 38. As a result, the spring receiving member 39 and, consequently, the valve body 26 is constantly urged toward the cover 16 by the urging force of the compression coil spring 38. That is, the state where the enlarged portion 30a of the shaft portion 30 of the valve body 26 abuts (sits) on the valve seat portion 32 is maintained.

  The small-diameter portion 39b of the spring receiving member 39 is accommodated in the restriction region 41 so as to be able to reciprocate. Here, the outer diameter size of the small diameter portion 39b is substantially the same as the outer diameter size of the restriction region 41, that is, the inner diameter size of the restriction portion 12a (specifically, slightly smaller than the inner diameter size of the restriction portion 12a). The displacement direction of the member 39 is restricted by the restriction portion 12 a to the displacement direction of the valve body 26.

  Further, the bottom plate 12 is formed with a communication path 33 that communicates between the storage area 35 and the outside (of the fluid control valve 10). Thereby, the accommodation area 35 is opened to the atmosphere via the communication path 33.

  On the other hand, the end of the shaft portion 30 of the valve body 26 on the side away from the flexible membrane portion 28 is fitted in the central portion of the pressure application member 43. The pressure application member 43 includes a flexible film portion 43 a at an end thereof, and the flexible film portion 43 a is fixed by being sandwiched between the body 14 and the cover 16. Thereby, the space between the downstream fluid chamber 24 and the cover 16 is blocked. The cover 16 is formed with a pressure action chamber 45, and the pressure action chamber 45 is filled with air whose pressure is adjusted from the outside.

  Next, the operation of the fluid control valve 10 will be described.

  When the pressure-controlled chamber 45 is not filled with air whose pressure is adjusted, as shown in FIG. 1, the valve body 26 is caused by the elastic force of the compression coil spring 38 applied to the valve body 26 via the spring receiving member 39. The end portion on the cover 16 side of the enlarged portion 30 a is seated on the valve seat portion 32. Thereby, the space between the upstream fluid chamber 22 and the downstream fluid chamber 24 is blocked. For this reason, the chemical | medical solution which flowed in from the inflow port 18 does not flow out to the outflow port 20 side.

  On the other hand, when the pressure-controlled chamber 45 is filled with air whose pressure has been adjusted, the pressure application member 43 and the valve body 26 in the axial direction of the shaft portion 30 according to the pressure in the pressure-action chamber 45. Along the bottom plate 12 side. For this reason, the cover 16 side end portion of the enlarged portion 30 a is separated from the valve seat portion 32, and the upstream fluid chamber 22 and the downstream fluid chamber 24 communicate with each other. As a result, the chemical solution flowing in from the inflow port 18 flows out from the outflow port 20 through the upstream fluid chamber 22 and the downstream fluid chamber 24. At this time, the pressure of the chemical solution flowing out from the outlet 20 is adjusted to a constant pressure corresponding to the pressure in the pressure action chamber 45. This is because the force that displaces the valve element 26 toward the bottom plate 12 due to the pressure in the pressure acting chamber 45, the force that the elastic force of the compression coil spring 38 displaces the valve element 26 toward the cover 16, and the chemical liquid is the valve element 26. This is because the displacement of the valve body 26 is fixed where the force exerted on the balance is balanced. Thereby, the chemical solution having a substantially constant pressure supplied from the inflow port 18 side can be controlled to a desired pressure lower than this with high accuracy and allowed to flow out from the outflow port 20.

  By the way, in general, in the pressure control by the fluid control valve, there is a problem that an oscillation phenomenon occurs in which the pressure of the fluid flowing out to the outside is oscillated. Therefore, in this embodiment, an O-ring is provided on the outer periphery of the small-diameter portion 39b of the spring receiving member 39, and this O-ring is brought into contact with the inner surface of the restricting portion 12a to apply a frictional force when the valve body 26 is displaced. As a result, the oscillation phenomenon is suppressed. Further, if the frictional force to be applied is excessively increased, the displacement of the valve body 26 may be dulled, resulting in a decrease in pressure controllability. Therefore, in this embodiment, in addition to applying the frictional force, the frictional force to be applied is applied. By adjusting the magnitude of this, the frictional force is set to an appropriate magnitude, thereby suppressing the oscillation phenomenon while suppressing a decrease in pressure controllability. The details will be described below with reference to FIGS. 2 and 3 in addition to FIG. FIG. 2 is an exploded view showing a configuration around the spring receiving member 39. 3A is a bottom view showing the spring receiving member 39, and FIG. 3B is a plan view showing the O-ring.

  As shown in FIGS. 1 and 2, the small diameter portion 39b of the spring receiving member 39 is formed with a tapered hole 47 that opens to the opposite side of the cover 16 side (valve element 26 side) in the axial direction (displacement direction). Has been. The taper hole 47 is formed so that its cross-sectional area increases as it goes from the cover 16 side to the bottom plate 12 side. As shown in FIG. 3A, a plurality of (four in the present embodiment) slits 48 communicating with the inside and the outside of the tapered hole 47 are formed in the wall portion (thick portion) forming the tapered hole 47 in the small diameter portion 39b. Is formed. These slits 48 are provided at predetermined intervals along the outer peripheral direction of the small diameter portion 39b. Each slit 48 is formed so as to extend in the displacement direction of the valve body 26, and the side opposite to the cover 16 side (valve body 26 side) is opened. Thus, the wall portion of the small diameter portion 39b is divided into four so as to form a cross shape by the slit 48. In the following description, each of the divided portions is referred to as a diameter expansion portion 51.

  Returning to the description of FIG. 2, a groove 51 a is formed on the outer peripheral surface of each diameter expanding portion 51 along the circumferential direction. An O-ring 57 as an elastic member is disposed in each of the groove portions 51a of each diameter expanding portion 51 so as to straddle each groove portion 51a. As shown in detail in FIG. 3B, the O-ring 57 of the present embodiment is cut at one place, and therefore has an open end 57a.

  The spring receiving member 39 is provided with an adjustment hole 52 continuous with the tapered hole 47 on the cover 16 side of the tapered hole 47. The adjustment hole 52 is a hole coaxial with the taper hole 47, and a female screw is formed on the inner peripheral side thereof.

  A sleeve 54 made of polypropylene resin is accommodated in the tapered hole 47 of the small diameter portion 39b. The sleeve 54 is formed in a cylindrical shape as a whole, and has an outer surface tapered with a tapered surface of the tapered hole 47. The sleeve 54 is disposed in a state where the outer surface of the sleeve 54 abuts against the inner surface of the tapered hole 47 in the small diameter portion 39 b.

  An adjustment screw 55 is screwed into the adjustment hole 52 of the spring receiving member 39 while being inserted into the sleeve 54. The adjusting screw 55 is made of, for example, polypropylene resin. The adjustment screw 55 is screwed into the adjustment hole 52 with its head in contact with the end of the sleeve 54.

  Here, the diameter expanding portion 51, the adjusting screw 55, the O-ring 57, etc. constitute pressing means, and the adjusting screw 55, the sleeve 54, etc. constitute pressing amount adjusting means, displacement means, and displacement amount adjusting means. Yes.

  Here, in the above configuration, when the adjustment screw 55 is tightened, the sleeve 54 is displaced to the back side of the tapered hole 47, and accordingly, each diameter expansion portion 51 is pushed outward by the outer surface of the sleeve 54. In this case, each diameter expanding portion 51 is inclined (that is, displaced) toward the regulating portion 12a. In detail, each diameter expansion part 51 is displaced to the control part 12a side by the same displacement amount simultaneously. Therefore, the O-ring 57 sandwiched between the diameter expanding portion 51 and the restricting portion 12 a is compressed by the both 12 a and 51, and the restricting portion 12 a is pressed by the repulsive force of the compressed O-ring 57. When the spring receiving member 39 (and thus the valve body 26) is displaced in this pressed state, a predetermined frictional force is applied to the O-ring 57 by the restricting portion 12a, and thus a predetermined resistance force is applied to the valve body 26. .

  Moreover, in the said structure, the displacement amount to the control part 12a side of the diameter expansion part 51 can be adjusted by adjusting the position of the sleeve 54 by adjusting the tightening amount of the adjustment screw 55. As a result, the amount of pressure applied to the restricting portion 12a by the O-ring 57 can be adjusted, so that the magnitude of the frictional force applied to the O-ring 57 when the valve body 26 is displaced, and thus the resistance applied to the valve body 26. The magnitude of the force can be adjusted.

  A pin insertion hole 59 that communicates the inside and the outside of the adjustment hole 52 is formed on the cover 16 side of the small-diameter portion 39b on the cover 16 side. The pin insertion hole 59 is a hole for inserting a heated fixing pin 60 as will be described later. The small diameter portion 39b and the adjusting screw 55 are welded by inserting the fixing pin 60 into the pin insertion hole 59 and melting the small diameter portion 39b and the adjusting screw 55 by the heat of the fixing pin 60. Thereby, the adjustment screw 55 is fixed to the spring receiving member 39 so as not to loosen.

  The bottom plate 12 is provided with a gauge insertion port 62 that communicates between the outside (of the fluid control valve 10) and the restriction region 41. The gauge insertion port 62 is provided with a removable lid 63.

  Next, an adjustment operation for adjusting the magnitude of the frictional force applied to the O-ring 57 when the valve body 26 is displaced will be described with reference to FIG. 4A and 4B are explanatory diagrams for explaining the frictional force adjusting procedure. FIG. 4A is a diagram showing how the frictional force is measured, and FIG. 4B is a diagram showing the fixing pin 60 inserted into the adjusting screw 55. It is a figure which shows a mode.

  This adjustment operation is performed before the fluid control valve 10 is assembled. Here, it is assumed that adjustment work is performed before the spring receiving member 39 is assembled to the valve body 26.

  First, an operation of attaching the sleeve 54, the adjusting screw 55, and the O-ring 57 to the spring receiving member 39 is performed. In this operation, the sleeve 54 is inserted into the tapered hole 47 of the small diameter portion 39b, and the adjustment screw 55 is tightened into the adjustment hole 52 via the sleeve 54 in this state. Then, the O-ring 57 is disposed in the groove 51 a of the diameter expanding portion 51. In this attachment operation, the tightening amount of the adjusting screw 55 may be arbitrary. After attaching the members 54, 55, and 57 to the spring receiving member 39, the small diameter portion 39 b of the spring receiving member 39 is inserted into the restriction region 41 of the bottom plate 12 as shown in FIG.

  Next, adjustment work for adjusting the frictional force applied to the O-ring 57 when the spring receiving member 39 is displaced is performed. In this adjustment operation, first, an operation for measuring the frictional force applied to the O-ring 57 attached to the spring receiving member 39 in the attachment operation is performed. In this measurement operation, first, the rod 66a of the push-pull gauge 66 is inserted into the restriction region 41 through the gauge insertion port 62, and the tip of the rod 66a is brought into contact with the adjustment screw 55. Thereafter, the adjustment screw 55 is pressed toward the opposite side of the gauge insertion port 62 with the tip of the rod 66a, and the spring receiving member 39 is displaced to the same side. And the load added to the push pull gauge 66 at the time of this displacement is measured. Here, the measured load corresponds to the frictional force applied to the O-ring 57 by the restricting portion 12a. This measurement operation is performed in a state where the compression coil spring 38 is not provided in the spring accommodating chamber 37.

  In the above measurement operation, when the measured friction force coincides with the target set value, the adjustment operation is terminated. On the other hand, when the measured frictional force does not coincide with the target set value, the tightening amount of the adjusting screw 55 is adjusted. Specifically, when the measured frictional force is smaller than the target set value, the tightening amount of the adjusting screw 55 is increased. When the measured friction force is larger than the target set value, the tightening amount of the adjusting screw 55 is increased. Reduce. Then, after adjusting the tightening amount, the magnitude of the frictional force is measured again using the push-pull gauge 66. After measuring the frictional force, it is determined again whether or not the measured frictional force matches the target set value. If they match, the adjustment operation is terminated. Make adjustments. In this way, in this adjustment work, the above series of work is repeated until the measured frictional force matches the target set value.

  After the adjustment work is completed, the adjustment screw 55 is fixed as shown in FIG. In this fixing operation, the fixing pin 60 is heated using a burner or the like, and the heated fixing pin 60 is inserted into the pin insertion hole 59 of the spring receiving member 39 and the tip thereof is inserted into the adjustment screw 55. In this case, the spring receiving member 39 and the adjusting screw 55 are partially melted by the heat of the fixing pin 60, and the spring receiving member 39 and the adjusting screw 55 are welded. Thereby, since the adjustment screw 55 is fixed to the spring receiving member 39, the adjustment screw 55 can be prevented from being loosened. The fixing pin 60 is pulled out from the pin insertion hole 59 after the spring receiving member 39 and the adjusting screw 55 are melted. Thus, the frictional force adjustment operation is completed.

  As mentioned above, according to the structure of this embodiment explained in full detail, the following outstanding effects are acquired.

  The small diameter portion 39 b of the spring receiving member 39 is provided with a diameter expanding portion 51 that can be displaced (tilted) on the regulating portion 12 a side, and an O ring 57 is provided on the outer periphery of the diameter expanding portion 51. And the adjustment screw 55 etc. for displacing the diameter expansion part 51 to the regulation part 12a side are provided, the diameter expansion part 51 is displaced to the regulation part 12a side by tightening the adjustment screw 55, and the O-ring 57 is regulated. The inner surface of 12a was pressed. As a result, a predetermined frictional force can be applied to the O-ring 57 and a predetermined resistance force can be applied to the spring receiving member 39 (that is, the valve body 26). The oscillation of the fluid pressure can be suppressed as a result. Further, by adjusting the tightening amount by the adjusting screw 55, the displacement amount of the diameter expanding portion 51 can be adjusted, and thereby the pressing amount against the regulating portion 12a can be adjusted. In this case, since the pressing amount can be adjusted by the adjusting screw 55, the magnitude of the frictional force applied to the spring receiving member 39 can be adjusted. Therefore, it is possible to suppress a situation where the applied frictional force is too large and the movement of the valve body 26 is dulled, and as a result, the pressure controllability is reduced, and a situation where the applied frictional force is too small and the fluid pressure oscillates can be suppressed. it can. That is, in this case, the oscillation of the fluid pressure can be suppressed while suppressing a decrease in pressure controllability.

  An O-ring 57 is provided on the outer periphery of the diameter expanding part 51 of the spring receiving member 39, and the restricting part 12a is pressed by displacing the diameter expanding part 51 toward the restricting part 12a. That is, by providing the pressing means on the spring receiving member 39 side, the restricting portion 12a provided on the outer periphery thereof is pressed from the spring receiving member 39 side. In this case, since the pressing means can be disposed around the spring receiving member 39, the installation configuration of the pressing means can be simplified.

  An O-ring 57 as an elastic member is provided on the outer periphery of the diameter expanding portion 51 in the small diameter portion 39 b of the spring receiving member 39. In this case, when the diameter expanding portion 51 is displaced toward the restricting portion 12a by tightening the adjusting screw 55, the O-ring 57 is compressed while being sandwiched between the diameter expanding portion 51 and the inner surface of the restricting portion 12a. Then, the restricting portion 12 a is pressed by the compression repulsive force of the O-ring 57. And since the compression amount of the O-ring 57 can be adjusted by adjusting the displacement amount of the diameter expansion part 51 with the adjusting screw 55, the pressing amount can be adjusted as a result, and consequently the frictional force can be adjusted. Can do. Here, when a hard member is used in place of the O-ring 57 in such a configuration, even if the diameter expanding portion 51 is slightly displaced, the hard member is not compressed, so that it is assumed that the pressing amount increases rapidly. The Therefore, in this case, it is difficult to finely adjust the pressing amount, and it may take time to adjust the frictional force. In that respect, the above-described configuration using the O-ring 57 can avoid such inconvenience, so that the frictional force can be adjusted appropriately.

  The outer peripheral surface of the small diameter portion 39b of the spring receiving member 39 is a circumferential surface having an axis extending in the displacement direction of the small diameter portion 39b, and the inner surface of the restricting portion 12a is a circumferential surface substantially coaxial with the outer peripheral surface of the small diameter portion 39b. It was. A plurality of diameter expansion portions 51 are provided over the entire outer peripheral direction along the outer periphery of the small diameter portion 39b of the spring receiving member 39, and the diameter expansion portions 51 are simultaneously tightened with the adjusting screw 55 and simultaneously with the same amount of displacement. It was made to displace to 12a side. In this case, since the frictional force can be uniformly applied to the entire outer periphery of the O-ring 57 by displacing each diameter expanding portion 51 toward the restricting portion 12a, the resistance force is uniformly applied to the entire outer periphery of the spring receiving member 39. Can be granted. As a result, it is possible to suppress the inconvenience that the spring bearing member 39 is not balanced and tilted when the frictional force is locally applied.

  An open end 57a is provided on the O-ring 57 by cutting a part of the O-ring 57. Thereby, when the diameter expansion part 51 is displaced to the regulation part 12a side, it is avoided that the O-ring 57 is pulled by itself along the circumferential direction to prevent the O-ring 57 from being pressed against the regulation part 12a. it can. Therefore, since the pressing amount against the restricting portion 12a can be adjusted (increased and lowered) relatively linearly with the displacement amount of the diameter expanding portion 51, the frictional force can be easily adjusted.

  A tapered hole 47 that opens to one end side in the displacement direction is formed in the small diameter portion 39 b of the spring receiving member 39, and a portion that divides the inside and outside of the tapered hole 47 is defined as a diameter expanding portion 51. The diameter expanding portion 51 can be displaced (tilted) toward the restricting portion 12a, and an adjustment screw 55 for displacing the diameter expanding portion 51 toward the restricting portion 12a is inserted into the tapered hole 47. Further, the amount of displacement of the diameter expanding portion 51 can be adjusted by adjusting the tightening amount by the adjusting screw 55. In this case, since the magnitude of the frictional force applied to the spring receiving member 39 can be adjusted by adjusting the amount of displacement of the diameter expanding portion 51 by adjusting the tightening amount of the adjusting screw 55, this adjustment work is relatively easy. It can be easily performed.

  The small diameter portion 39b of the spring receiving member 39 and the adjusting screw 55 were welded. Thereby, since the adjustment screw 55 can be prevented from loosening, the above-described effect can be obtained over a long period of time.

  The small-diameter portion 39b of the spring receiving member 39 is provided in the accommodation region 35 (specifically, the spring accommodation chamber 37) formed on the opposite side of the upstream fluid chamber 22 with the flexible membrane portion 28 interposed therebetween. In this case, since the sliding between the O-ring 57 and the restricting portion 12a due to the displacement of the spring receiving member 39 is performed outside the fluid chambers 22 and 24, even if the O-ring 57 or the like is worn due to the sliding, It is possible to avoid the fragments generated by the wear from being mixed into the fluid.

  The present invention is not limited to the above embodiment, and may be implemented as follows, for example.

  (1) In the above embodiment, the diameter expanding portion 51 as the pressing means is provided on the small diameter portion 39b of the spring receiving member 39 as the movable portion, and the regulating portion 12a is displaced by displacing the same diameter expanding portion 51 toward the regulating portion 12a. However, it may be modified to provide a pressing means on the regulating portion side and press the movable portion side by the pressing means. As a specific example, a configuration as shown in FIG. 5 can be considered.

  As shown in FIG. 5, the bottom plate 81 is formed with a substantially cylindrical storage region 82 that is open to the cover 16 side. A spring receiving member 85 assembled to the end portion of the shaft portion 30 of the valve body 26 is provided in the accommodation region 82. The spring receiving member 85 includes a substantially cylindrical columnar portion 85a connected to the shaft portion 30 of the valve body 26, and a substantially cylindrical cylindrical portion 85b extending from the outer peripheral portion of the columnar portion 85a to the side opposite to the cover 16 side. have. A compression coil spring 38 is provided on the inner peripheral side of the cylindrical portion 85b, and the end portion on the cover 16 side of the compression coil spring 38 is in contact with the column portion 85a. Accordingly, the spring receiving member 85 is urged toward the cover 16 by the compression coil spring 38.

  The outer diameter of the cylindrical portion 85 b is slightly smaller than the inner diameter of the accommodation region 82. Thereby, the displacement direction of the spring receiving member 85 is regulated by the inner surface of the accommodation region 82 in the displacement direction of the valve body 26. In other words, in this example, the inner wall portion of the bottom plate 81 that forms the inner surface of the accommodation region 82 corresponds to the restricting portion instead of the restricting portion 12a of the above embodiment. The cylindrical portion 85b of the spring receiving member 85 corresponds to the movable portion. A hole 87 is formed in the bottom plate 81 so as to extend from the inner peripheral surface of the storage region 82 to the outside of the storage region 82 (in a direction orthogonal to the axial direction). A plurality of the hole portions 87 are formed at predetermined intervals along the inner periphery of the accommodation region 82. Each hole 87 is provided with a rubber rod 88, and a driving portion 89 (for example, a motor) that displaces the rod 88 along the axial direction is connected to the end of each rod 88. ing. Here, when the rod 88 is displaced toward the accommodation region 82 by the drive unit 89, the end of the rod 88 comes into contact with the outer peripheral surface of the cylindrical portion 85 b of the spring receiving member 85, and the cylindrical portion is supported by the end of the rod 88. The outer peripheral surface of 85b is pressed. And the amount of pressing with respect to the outer peripheral surface of the cylindrical part 85b can be adjusted by adjusting the displacement amount of the rod 88 by the drive part 89. FIG. In this case, since the magnitude of the frictional force applied to the cylindrical portion 85b of the spring receiving member 85 can be adjusted by adjusting the pressing amount, the oscillation of the fluid pressure is suppressed as in the above embodiment. However, it is possible to suppress a decrease in pressure controllability.

  In addition, you may make it provide a pressing means in each of a control part and a movable part, and may press a control part from the movable part side while pressing a movable part from the control part side.

  (2) In the above embodiment, the inner surface of the restricting portion 12a is pressed by expanding the small diameter portion 39b (specifically, the diameter expanding portion 51) of the spring receiving member 39, which is a movable portion. It is good also as a structure which presses the outer peripheral part of the small diameter part 39b by changing diameter and reducing the diameter of the control part 12a.

  (3) In the above embodiment, an annular O-ring 57 is used as an elastic member, so that the elastic member is provided in the entire outer periphery of the small-diameter portion 39b (specifically, the diameter expansion portion 51). It is not necessary to provide in the whole outer periphery of the small diameter part 39b, and you may provide only in a part of outer periphery of the small diameter part 39b. For example, a plurality of spherical rubber materials may be attached along the outer periphery of the small diameter portion 39b.

  (4) In the above embodiment, the O-ring 57 is used as the elastic member provided on the outer periphery of the diameter expanding portion 51, but an elastic member other than the O-ring 57 may be used. Further, it is not always necessary to use an elastic member, and a hard member such as a resin may be used.

  (5) In the above embodiment, the O-ring 57 is partially cut to have the open end 57a. However, the O-ring is not necessarily cut, and an O-ring that does not have the open end 57a may be used.

  (6) The fluid control valve 10 is not limited to the one that controls the pressure of the chemical solution, but may be one that controls the pressure of pure water used to adjust the concentration of the chemical solution, for example, in the semiconductor manufacturing process. . Furthermore, the fluid control valve 10 is not limited to that used in the semiconductor manufacturing process, but may be used in a chemical product manufacturing process, for example.

  DESCRIPTION OF SYMBOLS 10 ... Fluid control valve, 12 ... Bottom plate, 12a ... Restriction part, 22 ... Upstream fluid chamber, 24 ... Downstream fluid chamber, 26 ... Valve body, 28 ... Flexible membrane part, 30 ... Shaft part, 39 ... Spring receiving member, 39b ... small diameter portion as movable portion, 47 ... tapered hole as hole portion, 51 ... diameter expanding portion as displacement portion, 55 ... pressing amount adjusting means, displacement means and adjusting screw as displacement amount adjusting means 57: O-ring as an elastic member, 57a: Open end.

Claims (7)

A fluid passage is partitioned into an upstream fluid chamber and a downstream fluid chamber by a valve body including a shaft portion and a flexible membrane portion connected to the shaft portion, and the upstream side is displaced by displacement of the valve body. In the fluid control valve that causes the fluid flowing into the fluid chamber to flow out to the outside through the downstream fluid chamber,
A movable part that is displaced in conjunction with the shaft part;
A restricting portion that is provided on the outer peripheral side of the movable portion and restricts the displacement direction of the movable portion to the displacement direction of the valve body;
A pressing means that has at least one of the movable portion and the regulating portion and presses the other; and
A pressing amount adjusting means for adjusting a pressing amount by the pressing means;
A fluid control valve comprising: The restricting portion is formed with a displacement restricting surface for restricting the displacement direction of the movable portion to the displacement direction of the valve body,
The fluid control valve according to claim 1, wherein the pressing unit is provided on the movable portion side and presses a displacement regulating surface of the regulating portion. The pressing means is
A displacement part that is a part of the movable part and is displaceable toward the regulating part;
An elastic member provided on an outer surface of the displacement portion and abutting against a displacement restriction surface of the restriction portion;
Displacement means for displacing the displacement portion toward the regulating portion;
With
The fluid control valve according to claim 2, wherein the pressing amount adjusting means is a displacement amount adjusting means for adjusting a displacement amount of the displacement portion by the displacement means. A plurality of the displacement parts are provided over the entire region in the same direction along the outer peripheral direction of the movable part,
The displacement means is for displacing the displacement portions to the restriction portion side simultaneously.
The fluid control valve according to claim 3, wherein the elastic member has an annular shape and is provided across the outer surface of each of the displacement portions. The movable part is a circumferential surface having an axis extending in the displacement direction of the movable part,
The displacement restricting surface of the restricting portion is a circumferential surface substantially coaxial with the outer peripheral surface of the movable portion,
The elastic member has an annular shape,
5. The fluid control valve according to claim 4, wherein the displacing unit is configured to displace the displacing portions simultaneously and with the same displacement amount toward the regulating portion.   The fluid control valve according to claim 4, wherein the elastic member has an open end. The movable part is open to one end side in the displacement direction, and has a hole formed along the displacement direction.
The wall portion that divides the inside and the outside of the hole portion is divided into a plurality along the circumferential direction, and each divided piece can be tilted to the regulating portion side, and each of these divided pieces is the displacement portion, respectively.
The displacement means includes an adjusting screw that is inserted through the hole and is tilted to the restricting portion side to be displaced by tightening to the back side of the hole.
The fluid according to any one of claims 4 to 6, wherein the displacement amount adjusting means adjusts a displacement amount of the displacement portion by adjusting a tightening amount of the adjusting screw. Control valve.

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