JP2011094679A - Valve and coating apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a coating apparatus that can prevent coating liquids from mixing together by employing a valve capable of preventing the coating liquids from remaining in quantity on an outflow port side. <P>SOLUTION: A first valve element 53 closes a first passage 35 to connect a second passage 36 to a third passage 37. In the state of closing the first passage 35, the first valve element 53 serves as a part of the inner wall of a valve passage where a coating liquid flows from the second passage 36 to the third passage 37. A second valve element 54 closes the second passage 36 to connect the first passage 35 to the third passage 37. In the state of closing the second passage 36, the second valve element 54 serves as a part of the inner wall of a valve passage where a coating liquid flows from the first passage 35 to the third passage 37. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to a valve and a coating apparatus that includes the valve and applies a coating liquid to a substrate.

For flat panel displays such as liquid crystal displays and plasma displays, a coated substrate in which a resist solution (coating solution) is coated on a glass substrate is used. As an apparatus for manufacturing this coated substrate, for example, a coating apparatus described in Patent Document 1 is used.
The coating apparatus includes a coating unit having a base for discharging a coating liquid to a substrate on a stage, a liquid unit having a tank for storing the coating liquid, and a pump for feeding the coating liquid in the tank to the base. Yes.

JP 2008-238144 A (see FIG. 1)

In such a coating apparatus, it has been proposed to perform the coating operation by changing the type of the coating liquid in one coating unit. For this purpose, the direction in which the coating liquid flows between the tank and the base is proposed. It is necessary to switch in the middle, and it is conceivable to use a valve.
Conventionally, there is a valve shown in FIG. 13 used in such a coating apparatus. This valve has two inlet ports 91 and 92 and one outlet port 93, and two valve bodies 95 and 96 are provided in a housing 94. When one valve body 95 is open, the other valve body 96 is closed, and the first coating liquid supplied to the first inlet port 91 passes through the valve chamber 97 and then flows through the flow path 99. The flow is discharged from the outlet port 93. In order to change the coating liquid discharged from the outlet port 93, the one valve body 95 is closed and the other valve body 96 is opened. Thus, the second coating liquid supplied to the second inlet port 92 is discharged from the outlet port 93 after passing through the valve chamber 98.

  However, in the case of the valve shown in FIG. 13, a large amount of the first coating liquid remains in the flow path 99 in a state before the other valve body 96 is opened and changed to the second coating liquid. It may become in a state of being. For this reason, even if it changes to a 2nd coating liquid, there exists a possibility that the 1st coating liquid which remained in the flow path 99 may be mixed with the 2nd coating liquid discharged from the exit port 93, and the mixed coating liquid is There is a case where it is discharged from the base.

  Therefore, the present invention can prevent the liquid from remaining on the outlet port side, and can prevent the coating liquid (the liquid) from being mixed by providing such a valve. An object is to provide a coating apparatus.

  The present invention has a first flow path having a first inlet port, a second flow path having a second inlet port, and an outlet port connected to either the first flow path or the second flow path. A first valve body having a third flow path that is in a state, wherein the second flow path and the third flow path are connected by closing the first flow path, A second valve body in which the first flow path and the third flow path are connected by closing the second flow path, and the first valve body is in a state of closing the first flow path Thus, the second valve element also serves as a part of the inner wall of the valve flow path through which the liquid flows from the second flow path to the third flow path, and the second valve body closes the second flow path, It also serves as a part of the inner wall of the in-valve channel through which liquid flows from one channel to the third channel.

  According to the present invention, the first valve body also serves as a part of the inner wall of the in-valve channel through which the liquid flows from the second channel to the third channel with the first channel closed. The liquid flowing through the inner channel does not flow out of the valve inner channel and flow into the first channel. For this reason, it is possible to prevent a large amount of liquid from remaining on the first flow path side. This also applies to the second valve body side.

Further, in the valve, a first opening for connecting to the first flow path is formed in the flow path in the valve through which liquid flows from the second flow path to the third flow path, and the first valve The body becomes a part of the inner wall of the flow path in the valve, closes the first opening, closes the first flow path, and liquid flows from the first flow path to the third flow path. A second opening for connecting to the second flow path is formed in the path, and the second valve body becomes a part of the inner wall of the valve internal flow path to close the second opening, thereby The second channel is preferably closed.
In this case, in order to close the first flow path, the first valve body becomes a part of the inner wall of the flow path in the valve and closes the first opening. In addition, a large amount of liquid can be prevented. This also applies to the second valve body side.

In the valve, the closing surface of the first valve body that closes the first flow path and the closing surface of the second valve body that closes the second flow path are opposed to each other. The first valve body and the second valve body are arranged, and each of the closed surfaces in a closed state is preferably located on a substantially extended portion of the inner peripheral surface of the third flow path.
With this configuration, the first valve body and the second valve body are arranged close to each other, and the closed surfaces of the first valve body and the second valve body can also serve as a part of the inner wall of the valve flow path.

In addition, a first valve chamber that houses the first valve body is formed in the first flow path, and a second valve chamber that houses the second valve body is formed in the second flow path. The flow path leading from the first inlet port to the first valve chamber opens at a position biased to the top side of the first valve chamber, and flows from the second inlet port to the second valve chamber. The passage is preferably open at a position biased toward the top side of the second valve chamber.
If bubbles exist in the first valve chamber, the bubbles collect on the top side of the first valve chamber. Therefore, since the flow path leading from the first inlet port to the first valve chamber is opened at a position biased to the top side of the first valve chamber, the bubbles are entrained by the liquid flowing through the flow path. It is possible to flow downstream. The same applies to the second valve chamber.

Further, the coating apparatus of the present invention includes a base for discharging a coating liquid, a plurality of pumps provided for each type of the coating liquid in order to send each of the different types of the coating liquid to the base side, Provided between the pump and the base, and having a plurality of inlet ports connected to each of the pumps through a flow path, the plurality of inlet ports can be switched to a state in which they are alternatively connected to an outlet port. A valve and a cap channel for flowing the coating liquid from the outlet port to the cap, wherein the valve is the valve of the present invention.
According to the coating apparatus of the present invention, the valve can be switched to a state in which a plurality of inlet ports are selectively connected to the outlet port, so that different types of coating liquids flowing into the plurality of inlet ports can be used. This valve can be changed. And as this valve | bulb can prevent that many coating liquids (liquid) remain | survive as mentioned above, when changing the kind of coating liquid, the coating liquid which flowed previously differs in another after a change. Mixing with the coating liquid can be prevented, and the replacement of the coating liquid can be improved.

  According to the valve of the present invention, it is possible to prevent a large amount of coating liquid (liquid) from remaining in the valve. And since the coating device of this invention is equipped with this valve | bulb, when changing the kind of coating liquid in a valve | bulb, the coating liquid which flowed previously will mix with another coating liquid after a change. Can be prevented, and the replacement property of the coating liquid can be improved.

It is explanatory drawing which shows schematic structure of a coating device. It is a piping diagram explaining piping of each part with which a coating device is provided. It is a piping diagram explaining the method (method 1) of a liquid change. It is a piping diagram explaining the method (method 1) of a liquid change. It is a piping diagram explaining the method (method 1) of a liquid change. It is a piping diagram explaining the method (method 2) of a liquid change. It is a piping diagram explaining the method (method 2) of a liquid change. It is a piping diagram explaining the method (method 2) of a liquid change. It is the front view which showed the switching valve in the partial cross section. It is sectional drawing of a switching valve. It is explanatory drawing which shows a common flow path and its periphery, and is sectional drawing seen from the top. It is explanatory drawing which shows a common flow path and its periphery, and is sectional drawing seen from the side surface. It is sectional drawing of the conventional valve | bulb.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
[Configuration of coating device]
FIG. 1 is an explanatory view showing a schematic configuration of a coating apparatus of the present invention. The coating apparatus stores a coating liquid by an apparatus main body including a stage 18 on which a substrate W to which a coating liquid is applied and a coating unit 1 having a base 3 for discharging the coating liquid to the substrate W is provided. A liquid unit 2 having tanks 11 and 12 and installed separately from the apparatus main body is provided. The substrate W is a glass substrate, and the coating liquid is a photoresist liquid or the like. The liquid unit 2 and the coating unit 1 are connected via pipes 4 and 5. Further, as will be described later, the coating apparatus includes a cleaning unit 10 for cleaning each part such as a pipe with a cleaning fluid during a liquid changing operation for replacing the coating liquid with a different type.

  In FIG. 1, the liquid unit 2 of this embodiment has a first tank 11 in which a first coating liquid 11A is stored and a second tank 12 in which a second coating liquid 12A is stored. There are two types. In addition to the base 3, the coating unit 1 has the same number of pumps 21 and 22 as the type of coating liquid (that is, two) and one switching valve 7. The pumps 21 and 22 are provided on the base 3 side of the liquid unit 2, and the switching valve 7 is provided between the pumps 21 and 22 and the base 3. The pumps 21 and 22 of the present embodiment are syringe pumps that hardly cause pressure pulsation in the applied liquid to be delivered.

  The configuration of the piping of this coating apparatus will be described. The switching valve 7 is a three-way valve having two inlet ports 31 and 32 and one outlet port 33, and the outlet port 33 and the base 3 are connected via a single base passage (pipe) 6. Yes. The first inlet port 31 is connected to the first pump 21 via a pipe (flow path) 8, and the second inlet port 32 is connected to the second pump 22 via a pipe (flow path) 9.

  By driving the first pump 21, the first coating liquid 11 </ b> A in the first tank 11 flows through the pipe 4 and reaches the first pump 21, and further, the first coating liquid 11 </ b> A is switched through the pipe 8. 7 to the first inlet port 31. Further, by driving the second pump 22, the second coating liquid 12 </ b> A in the second tank 12 flows through the pipe 5 and reaches the second pump 22, and the second coating liquid 12 </ b> A passes through the pipe 9. It flows to the second inlet port 32 of the switching valve 7. That is, in order to send two different types of coating liquids 11A and 12A to the switching valve 7 on the base 3 side, the first pump 21 and the second pump 22 are dedicated pumps for each type of the coating liquids 11A and 12A. It is provided as.

  Although the configuration of the switching valve 7 will be described later, it can be switched so that the two inlet ports 31 and 32 are alternatively connected to the outlet port 33. For this reason, when the first coating liquid 11A flows from the first inlet port 31 to the outlet port 33 in the switching valve 7, the second coating liquid 12A cannot pass through the switching valve 7. On the other hand, when the second coating liquid 12A is flowing from the second inlet port 32 to the outlet port 33, the first coating liquid 11A cannot pass through the switching valve 7.

  In addition, inlets 23 and 24 are provided between the pumps 21 and 22 and the switching valve 7, and the cleaning fluid is supplied from the inlets 23 and 24 to the switching valve 7 and the piping by the cleaning unit 10. 6 to the base 3 and discharged from the base 3. The cleaning unit 10 has a supply device (for example, a pump 10a) for supplying cleaning liquid or air as a cleaning fluid to the switching valve 7 side.

  FIG. 2 is a piping diagram illustrating a piping system of each part provided in the coating apparatus. In addition to the switching valve 7, the coating apparatus further includes cleaning valves 13 and 14, waste liquid valves 15 and 16, and a plurality of opening / closing valves 17 </ b> A and 17 </ b> B. By controlling the opening / closing operation of these valves, the operation of discharging and applying the first coating liquid 11A from the base 3 or the operation of discharging and applying the second coating liquid 12A from the base 3 is selected and performed. In addition, the operation of the cleaning unit 10 to perform the cleaning of the flow path is performed in a different time zone from the coating operation. In addition, these valves are switched between opening and closing operations by a control signal output from a control device 80 (see FIG. 1) provided in the coating device and a function of a drive source 81 operated by this control signal. The operation control of starting and stopping the operation of the pump 10a of the cleaning unit 10 and the pumps 21 and 22 for the coating liquid is performed based on control signals from the control device 80.

An outline of the cleaning valves 13 and 14 will be described. The cleaning valve 13 is attached to the flow path between the first pump 21 and the switching valve 7 and has two inlet ports 131 and 132 and one outlet port 133. The washing valve 13 can be switched so that the two inlet ports 131 and 132 are selectively connected to the outlet port 133. The function of the washing valve 13 is a three-way valve. The same as the switching valve 7.
In the present invention, the inlet 23 to which the cleaning fluid is supplied by the cleaning unit 10 is provided in the middle of the flow path of the first coating liquid 11A between the first pump 21 and the outlet port 33 of the switching valve 7. In this embodiment, however, one inlet port 131 of the cleaning valve 13 is used as the cleaning fluid inlet 23. The other inlet port 132 is an inlet for the first coating liquid 11A.
As described above, the cleaning fluid inlet 23 (inlet port 131) is provided between the first pump 21 and the switching valve 7, and the cleaning fluid flows from the inlet 23 to the outlet port 133 in the cleaning valve 13. When the cleaning fluid flows from the first inlet port 31 to the outlet port 33 in the switching valve 7, the cleaning fluid supplied to the inlet 23 by the cleaning unit 10 is 23 is supplied to the base 3 through the waste liquid valve 15, the switching valve 7 and the pipe 6, and is discharged from the base 3.
As a result, the downstream side from the cleaning valve 13, that is, the flow path from the inlet 23 to the base 3 through the waste liquid valve 15, the switching valve 7 and the pipe 6 is cleaned.

Similarly, on the second coating liquid 12A side, the cleaning valve 14 is attached to the flow path between the second pump 22 and the switching valve 7, and includes two inlet ports 231 and 232, one And an outlet port 233. The cleaning valve 14 can be switched so that the two inlet ports 231 and 232 are alternatively connected to the outlet port 233 in the same manner as the switching valve 7 and the cleaning valve 13. . Therefore, in the present embodiment, the switching valve 7 and the cleaning valves 13 and 14 have the same structure.
In the present invention, the inlet 24 to which the cleaning fluid is supplied by the cleaning unit 10 is placed in the middle of the flow path through which the second coating liquid 12A flows from the second pump 22 to the outlet port 33 of the switching valve 7. In this embodiment, one inlet port 231 of the cleaning valve 14 is used as the cleaning fluid inlet 24. The other inlet port 232 is an inlet for the second coating liquid 12A.
In this manner, the cleaning fluid inlet 24 (inlet port 231) is provided between the second pump 22 and the switching valve 7, and the cleaning fluid flows from the inlet 24 to the outlet port 233 in the cleaning valve 14. When the cleaning fluid flows into the second inlet port 32 and the outlet port 33 in the switching valve 7, the cleaning fluid supplied to the inlet 24 by the cleaning unit 10 is transferred to the inlet 24. 24 is supplied to the base 3 through the waste liquid valve 16, the switching valve 7 and the pipe 6, and is discharged from the base 3. As a result, the downstream side from the cleaning valve 14, that is, the flow path from the inlet 24 to the base 3 through the waste liquid valve 16, the switching valve 7 and the pipe 6 is cleaned.
In this way, the inlets 23 and 24 are not configured by one of the simple branching channels without valves, but instead of the inlet ports 131 and 231 of the cleaning valves 13 and 14 formed of three-way valves. By doing so, it is possible to prevent the cleaning fluid from flowing to the pump side at the cleaning valves 13 and 14 and to clean the flow path downstream of the inlets 23 and 24 of the cleaning valves 13 and 14. The manual cleaning work can be omitted.

An outline of the waste liquid valves 15 and 16 will be described. The waste liquid valve 15 is attached in the middle of the flow path between the cleaning valve 13 and the switching valve 7. The waste liquid valve 15 has a main flow path having an inflow port 41 and a first outflow port 42 at its end, and a sub-flow path that branches from the middle of the main flow path and connects to the second outflow port 43. The first state where the two outflow ports 43 are closed and the fluid in the main channel does not flow to the sub-channel, and the second outflow port 43 is opened and the fluid in the main channel flows to the sub-channel It is possible to switch to either one of the second states that can be performed.
In the present invention, an outlet 25 for discharging the first coating liquid 11A as a waste liquid may be provided between the inlet 23 for the cleaning fluid and the outlet port 33 of the switching valve 7. In the embodiment, the second outlet port 43 on the side of the auxiliary flow path of the waste liquid valve 15 is used as the outlet 25. For this reason, since the outflow port 25 is provided on the downstream side of the inflow port 23, it is possible to perform cleaning by simply flowing the cleaning fluid supplied from the inflow port 23.

  In the waste liquid valve 15, in order to discharge the first coating liquid 11 </ b> A from the base 3, the second outflow port 43 (outflow port 25) is closed and the first coating liquid 11 </ b> A flows out from the inflow port 41. Although it flows to the port 42, during the operation of discharging the second coating liquid 12 </ b> A from the base 3, the second outflow port 43 (outflow port 25) is in an open state and is periodically pumped by the first pump 21. Further, the first coating liquid 11A can be flowed from the inflow port 41 to the second outflow port 43 (outflow port 25) (bleeding operation). The first coating liquid 11A that has flowed out of the second outflow port 43 (outlet 25) is discharged as a waste liquid. During this bleed operation, the first inlet port 31 side of the switching valve 7 is closed, so that the first coating liquid 11A does not flow to the outflow port 42 on the switching valve 7 side.

Similarly, on the second coating liquid 12 </ b> A side, the waste liquid valve 16 is attached in the middle of the flow path between the cleaning valve 14 and the switching valve 7. The waste liquid valves 15 and 16 have the same configuration.
And in this invention, what is necessary is just to provide the outflow port 26 for discharging | emitting the 2nd coating liquid 12A as a waste liquid between the said other inflow ports 24 of the cleaning fluid, and the exit port 33 of the switching valve 7. In this embodiment, the second outflow port 143 on the sub-flow path side of the waste liquid valve 16 is used as the outflow port 26. For this reason, since the outflow port 26 is provided on the downstream side of the inflow port 24, it is possible to perform cleaning by simply flowing the cleaning fluid supplied from the inflow port 24.
In the waste liquid valve 16, in order to discharge the second coating liquid 12 </ b> A from the base 3, the second outflow port 143 (outflow port 26) is closed and the second coating liquid 12 </ b> A flows out from the inflow port 141. Although it flows to the port 142, during the operation of discharging the first coating liquid 11A from the base 3, the second outflow port 143 (outflow port 26) is in an open state and is periodically pumped by the second pump 22. The second coating liquid 12A can be flowed from the inflow port 141 to the second outflow port 143 (outflow port 26) (bleeding operation). The 2nd coating liquid 12A which flowed out from the 2nd outflow port 143 (outflow port 26) is discharged | emitted as a waste liquid. During this bleed operation, the second inlet port 32 side of the switching valve 7 is closed, so that the second coating liquid 12A does not flow to the outflow port 142 on the switching valve 7 side.

[Liquid change work to change the coating liquid to a different type (Method 1)]
In the coating apparatus configured as described above, the operation of replacing the first coating liquid 11A from the base 3 and applying to the substrate W (see FIG. 1) to the second coating liquid 12A will be described. . FIG. 2 shows a state in which the first coating liquid 11A is applied and the bleed operation can be performed on the second coating liquid 12A. With respect to each open / close valve, those shown in black are in a closed state, and those shown in white are in an open state. Regarding the switching valve 7, the cleaning valves 13 and 14, and the waste liquid valves 15 and 16, the port side in the closed state is shown in black, and the port side in the open state is shown in white. Moreover, the piping through which the coating liquid and the cleaning fluid flow is indicated by a thick line.
In the state where the first coating liquid 11A shown in FIG. 2 is applied, the inlet port 131 is closed in the cleaning valve 13 and the inlet port 132 and the outlet port 133 are connected. The port 43 is closed and the inflow port 41 and the outflow port 42 are connected. In the switching valve 7, the inlet port 32 is closed and the inlet port 31 and the outlet port 33 are connected.
With respect to the second coating liquid 12A side, the cleaning valve 14 closes the inlet port 231 and the inlet port 232 and outlet port 233 are connected, and the waste liquid valve 16 has the second outlet port 143 open and inflow The fluid can flow from the port 141 to the second outflow port 143.

  The operation | work which replaces | exchanges the coating liquid to apply | coat to the 2nd coating liquid 12A from the state of this FIG. 2 is performed in the following orders. First, the cleaning process of the first coating liquid 11A is performed. As shown in FIG. 3, the pumps 21 and 22 are stopped, and in the cleaning valve 13, the closed inlet port 131 is opened instead of the opened inlet port 132 being closed. The inlet port 131 and the outlet port 133 are connected to each other. The opening / closing valve 17 </ b> A is opened, and air is supplied to the inlet port 131 of the cleaning valve 13 by the cleaning unit 10. With this air, each pipe through which the first coating liquid 11A has flowed, the main flow path in the waste liquid valve 15, the flow path in the switching valve 7, the pipe 6, and the first coating liquid 11A in the base 3 are connected to the base. 3 to the waste liquid reservoir 82.

Thereafter, as shown in FIG. 4, the opening / closing valve 17 </ b> A is closed and, instead, the opening / closing valve 17 </ b> B is opened, and the cleaning unit 10 supplies the cleaning liquid to the inlet port 131 of the cleaning valve 13. With this cleaning liquid, each pipe, the main flow path in the waste liquid valve 15, the flow path in the switching valve 7, the pipe 6, and the inside of the base 3 where the first coating liquid 11 </ b> A flowed are washed, and the cleaning liquid is discharged from the base 3. It is discharged to the waste liquid reservoir 82.
As shown in FIG. 3 again, the opening / closing valve 17A is opened, the opening / closing valve 17B is closed, and air is supplied to the inlet port 131 of the cleaning valve 13 by the cleaning unit 10. With this air, the cleaning liquid that may remain in the cleaned flow path is extracted from the base 3. Then, as shown in FIG. 5, the on-off valves 17A and 17B are closed.
Thereby, the flow path from the inlet 23 to the base 3 through the waste liquid valve 15, the switching valve 7 and the pipe 6 is washed, and the first coating liquid 11 </ b> A is prevented from remaining in the flow path from the switching valve 7 to the base 3. be able to.

  Next, as shown in FIG. 5, in the switching valve 7, instead of closing the opened inlet port 31, the closed inlet port 32 is switched to the opened state. The outlet port 33 is connected, and the second outlet port 143 of the waste liquid valve 16 is switched to a closed state so that fluid cannot flow from the inlet port 141 to the second outlet port 143. Thereby, the second pump 22 can pressure-feed the second coating liquid 12A in the second tank 12 to the inlet port 32 of the switching valve 7, and the second coating liquid 12A passes through the pipe 6 and the base 3 And discharged from the base 3. Thereby, the application | coating operation | work by the 2nd coating liquid 12A is started, and the liquid change from the 1st coating liquid 11A to the 2nd coating liquid 12A is completed.

When the application operation with the second application liquid 12A is performed, the cleaning valve 13 switches the closed inlet port 132 to an opened state instead of closing the opened inlet port 131, and the inlet A state in which the port 132 and the outlet port 133 are connected, and the second outflow port 43 of the waste liquid valve 15 is opened, and the first coating liquid 11A can flow from the inflow port 41 to the second outflow port 43. To do. As a result, the first coating liquid 11A periodically pumped by the first pump 21 can flow from the inflow port 41 to the second outflow port 43 (bleed operation). During the bleed operation, the first application liquid 11A does not flow to the outflow port 42 on the switching valve 7 side because the inlet port 31 side of the switching valve 7 is closed.
This bleed operation is executed under the control of the control device 80 (see FIG. 1). The bleed operation is performed when the state where the first coating liquid 11A does not flow for a long time continues. This is because the state / characteristics of the first coating solution 11A may be slightly hardened in the pipe, which may change the state / characteristics. This can be prevented by this bleed operation. .

[Liquid change work to change the coating liquid to a different type (Method 2)]
Another embodiment of the liquid change operation will be described. The liquid changing operation (method 1) is a method of changing the liquid to a coating liquid to be applied next after finishing washing of a flow path or the like in which the coating liquid has flowed to perform the applying operation. The replacement work (method 2) is performed after the cleaning of the flow path for flowing the coating liquid to be applied next, not the flow path in which the coating liquid has flowed for performing the coating work. Next, the liquid is changed to a coating liquid for performing a coating operation.

FIG. 2 shows a state in which the first coating liquid 11A is applied and the bleed operation can be performed on the second coating liquid 12A as described above. From this state, the coating liquid to be applied is applied. The operation (method 2) for exchanging with the second coating liquid 12A is performed in the following order. As shown in FIG. 6, the pumps 21 and 22 are stopped, and in the cleaning valve 14, the closed inlet port 231 is opened instead of the opened inlet port 232 being closed. And the inlet port 231 and the outlet port 233 are connected. In the switching valve 7, the closed inlet port 32 is switched to the opened state instead of the opened inlet port 31 being closed, and the inlet port 32 and the outlet port 33 are connected. . Further, the second outflow port 143 of the waste liquid valve 16 is closed.
Then, the opening / closing valve 17 </ b> A is opened, and air is supplied to the inlet port 231 of the cleaning valve 14 by the cleaning unit 10. With this air, each pipe from which the second coating liquid 12A is to flow, the flow path in the switching valve 7, the pipe 6, and the base 3 are washed. At this time, the first coating liquid 11 A remaining in the outlet port 33 side of the switching valve 7, the pipe 6, and the base 3 is discharged from the base 3 to the waste liquid reservoir 82.

Thereafter, as shown in FIG. 7, the opening / closing valve 17 </ b> A is closed, and instead, the opening / closing valve 17 </ b> B is opened, and the cleaning liquid is supplied to the inlet port 231 of the cleaning valve 14 by the cleaning unit 10. With this cleaning liquid, each pipe from which the second coating liquid 12A is going to flow, the flow path in the waste liquid valve 16, the flow path in the switching valve 7, the pipe 6 and the base 3 are washed, and the cleaning liquid is supplied to the base 3 To the waste liquid reservoir 82.
Again, as shown in FIG. 6, the opening / closing valve 17 </ b> A is opened, and instead, the opening / closing valve 17 </ b> B is closed, and the cleaning unit 10 supplies air to the inlet port 231 of the cleaning valve 14. With this air, the cleaning liquid remaining in the cleaned flow path is extracted from the base 3.
Thereby, the flow path from the inlet 23 to the base 3 through the waste liquid valve 15, the switching valve 7 and the pipe 6 is washed, and the first coating liquid 11 </ b> A is prevented from remaining in the flow path from the switching valve 7 to the base 3. be able to.

Then, as shown in FIG. 8, the second outflow port 43 where the waste liquid valve 15 is closed is opened, and the fluid can flow from the inflow port 41 to the second outflow port 43. Thereby, it will be in the state which can perform the said bleed operation | movement regarding 11 A of 1st coating liquids. Then, the open / close valve 17A is closed. In the waste liquid valve 16, the second outflow port 143 is in a closed state, and the fluid cannot flow from the inflow port 141 to the second outflow port 143.
In the cleaning valve 14, instead of closing the opened inlet port 231, the closed inlet port 232 is switched to an opened state, and the inlet port 232 and the outlet port 233 are connected.
Therefore, the second pump 22 is operated, the second coating liquid 12A in the second tank 12 is pumped to the base 3, and the coating operation with the second coating liquid 12A is started. From the above, the liquid change from the first coating liquid 11A to the second coating liquid 12A is completed.

  Here, in the state of FIG. 2 before the liquid change operation, the second coating liquid 12A may enter the flow path 60 between the waste liquid valve 16 and the switching valve 7 and stay due to the bleed operation. However, according to the liquid change operation by this method 2, as shown in FIG. 7, the flow path 60 between the waste liquid valve 16 and the switching valve 7 can also be cleaned, and the second coating liquid 12A can be effectively prevented from remaining.

According to the coating apparatus having the above-described configuration, the two kinds of coating liquids 11A and 12A are provided with two dedicated pumps 21 and 22 that send the switching liquid 7 to the single switching valve 7, respectively. Since the inlet port 31 connected to the pump 21 via the pipe 8 and the inlet port 32 connected to the second pump 22 via the pipe 9 are provided, the first coating liquid is provided in one inlet port 31. 11A is supplied, and the second coating liquid 12A of a different type is supplied to the other inlet port 32.
Since this switching valve 7 can be switched so that the two inlet ports 31 and 32 are selectively connected to the outlet port 33, the type of coating liquid to be discharged from the base 3 is, for example, In order to change from the first coating solution 11A to the second coating solution 12A, the position of the valve body (to be described later) of the switching valve 7 may be switched, and the joint (flange) is changed by the operator. No work is required, and the change of the coating solution is simplified.

Furthermore, in order to change to the second coating liquid 12A, the cleaning unit 10 sends air and cleaning liquid as cleaning fluid into the flow path in which the first coating liquid 11A has flowed. 23 is provided not on the upstream side of the first pump 21 but on the downstream side (the base 3 side) of the first pump 21. For this reason, when changing to the 2nd coating liquid 12A, it is not necessary to wash | clean the inside of the 1st pump 21, and it is not necessary to discharge | emit the coating liquid 11A in the 1st pump 21. FIG. For this reason, the amount of liquid replacement for changing the coating solution, that is, the amount of wasting the first coating solution 11A can be reduced. Further, since the cleaning valve 13 is provided on the upstream side of the outlet port 33 of the switching valve 7, the downstream side including the outlet port 33 can be cleaned without performing manual cleaning work. Therefore, even when different types of coating liquids are switched, mixing of different types of coating liquids in the flow path can be suppressed. Moreover, since the area | region for washing | cleaning may be narrow, the shortening of the washing | cleaning time required for a liquid change is attained. As a result, the application work with the changed second application liquid 12A can be started quickly, and the efficiency of the application work can be improved.
In addition, since the bleed operation is executed by the first pump 21, the first coating liquid 11A is periodically supplied in the flow path to the switching valve 7 for the first pump 21 and the first coating liquid 11A. Therefore, even if the liquid is changed again from the second coating liquid 12A to the first coating liquid 11A, the coating operation with the first coating liquid 11A is started immediately. can do.

[Specific Configuration of Switching Valve 7 and Cleaning Valves 13 and 14]
Since the switching valve 7 and the cleaning valves 13 and 14 shown in FIG. 2 have the same configuration, the switching valve 7 will be described as a representative. FIG. 9 is a front view showing the switching valve 7 in a partial cross section, and FIG. 10 is a cross-sectional view of the switching valve 7 shown in FIG. It is sectional drawing.
The switching valve 7 is in the posture shown in FIG. 9 attached to the coating device, the first inlet port 31 and the second inlet port 32 are arranged on a straight line in the horizontal direction, and the outlet port 33 is up and down. The valve 7 is mounted so as to be arranged on a straight line in the direction and open downward.

A flow path is formed in the housing 34 of the valve 7, and as shown in FIG. 10, two valve chambers 51 and 52 are provided in the middle of the flow path. A tip portion 53 b of the one valve body 53 is housed, and a tip portion 54 b of the second valve body 54 is housed in the second valve chamber 52.
That is, in the housing 34, a first flow path 35 having a first inlet port 31, a second flow path 36 having a second inlet port 32, and a third flow path 37 having an outlet port 33 ( 9 and FIG. 11), a common flow path 38 is formed. A first valve chamber 51 is provided on the downstream side of the first flow path 35, and a second valve chamber 52 is provided on the downstream side of the second flow path 36. The sealing surface 51a on the side surface of the first valve chamber 51 has a first opening 51b connected to one side of the common flow path 38, and the sealing surface 52a on the side surface of the second valve chamber 52 has A second opening 52b connected to the other of the common flow path 38 is formed. The common flow path 38 is a straight short flow path, the first flow path 35 and the second flow path 36 are merged, and the center of the common flow path 38 is opened to form a third flow path 37 (see FIG. 9). Connected to.

  The closing surface 53 a at the tip of the first valve body 53 closes the first opening 51 b by contacting the sealing surface 51 a of the first valve chamber 51, and the first flow path 35 is formed by the first valve body 53. Blocked. The closing surface 54a at the tip of the second valve body 54 closes the second opening 52b by contacting the second valve chamber 52 and the sealing surface 52a, and the second flow path 36 is closed by the second valve body 54. Blocked. As described above, the closing surfaces 53a and 54a are configured to close the openings 51b and 52b located at both ends of the linear common flow path 38, and the first valve so that these closing surfaces 53a and 54a face each other. The body 53 and the second valve body 54 are disposed in the housing 34.

Since the first valve body 53 and the second valve body 54 have the same configuration, and the first valve chamber 51 and the second valve chamber 52 have the same configuration, the first valve body 53 side will be described as a representative. The valve body 53 has a substantially cylindrical shape, and at least the tip 53b is made of resin. The housing 34 is made of resin or metal. A sealing diaphragm 53d is provided between the front portion 53b and the peripheral surface of the valve chamber 51. A first space 34a in the housing 34 is partitioned by the diaphragm 53d, and the first valve is provided on one side. A chamber (diaphragm chamber) 51 is formed, and the coating liquid is sealed to the outside.
A second space 34b is formed in the housing 34, and a driving diaphragm 53e is provided between the base 53c of the first valve body 53 and the peripheral surface of the space 34b.

  A spring 39 is interposed between the end surface of the base portion 53c of the first valve body 53 and the end surface of the housing 34, and the spring 39 presses the closing surface 53a of the first valve body 53 against the opening 51b. That is, in this state, the first valve body 53 is closed. The second space 34b is connected to an air pump (drive source 81 in FIG. 1) via an air pipe (not shown). When air is supplied to the space 34b, the driving diaphragm 53e is deformed. Thus, the blocking surface 53a of the valve element 53 can be separated from the opening 51b against the spring force of the spring 39. That is, in this state, the first valve body 53 is opened. As described above, the valve 7 is opened and closed when the valve bodies 53 and 54 linearly reciprocate along the center line direction of the common flow path 38, and the opening and closing operation is switched by air. is there.

  In the first flow path 35, the first coating liquid 11A flowing from the first inlet port 31 enters the first valve chamber 51, and in the second flow path 36, the second coating liquid 12A flowing from the second inlet port 32 is the first. Enter the double valve chamber 52. The valve 7 is configured such that when one of the first valve body 53 and the second valve body 54 is opened, the other is closed. If the first valve body 53 is open, The second valve body 54 is in a closed state. In this case, the second valve body 54 closes the second flow path 36 with the second valve chamber 52, thereby causing the first flow path 35 and the third flow path 37 to be closed. The first coating liquid 11A supplied to the inlet port 31 can flow out from the outlet port 33. On the contrary, if the second valve body 54 is in the open state, the first valve body 53 is in a closed state. In this case, the first valve body 53 closes the first flow path 35 with the first valve chamber 51. As a result, an in-valve channel in which the second channel 36 and the third channel 37 are connected to each other, and the second coating liquid 11 </ b> B supplied to the inlet port 32 can flow out from the outlet port 33. That is, the outlet port 33 is connected to either the first inlet port 31 or the second inlet port 32.

  The arrangement of the valve bodies 53 and 54 will be further described. 11 and 12 are explanatory views showing the common flow path 38 and its periphery, FIG. 11 is a cross-sectional view seen from above, and FIG. 12 is a cross-sectional view seen from the side. In FIG. 12, an opening 38a connected to the third flow path 37 having a circular cross section is formed on the inner wall of the common flow path 38 having a circular cross section, and the center line C1 of the common flow path 38 and the center of the opening 38a are formed. It is orthogonal to the line C2. The center line of the third flow path 37 is common with the center line C2 of the opening 38a, and the center lines of the valve bodies 53 and 54 and the valve chambers 51 and 52 are on an extension line of the center line C1 of the common flow path 38. It is in.

  With the closed surface 53a of the first valve body 53 closing the first flow path 35 at the first opening 51b of the first valve chamber 51, the closed surface 53a passes through the common flow path 38 from the second flow path 36. It also serves as a part of the inner wall of the in-valve channel through which the second coating liquid 12A flows to the third channel 37. That is, the common flow path 38 from the second flow path 36 to the third flow path 37 through the common flow path 38 to the third flow path 37 is connected to the first flow path 35 in the common flow path 38. The first valve body 53 (the closed surface 53a) is the first inner wall (wall surface) at one end of the common flow path 38 in the direction of the center line C1. The first flow path 35 is closed by closing the opening 51b.

  Furthermore, as shown in FIGS. 11 and 12, the length L1 of the common flow path 38 in the direction of the center line C1 is substantially the same as the diameter D1 of the third flow path 37 (opening 38a). Therefore, the opening 51b that closes the closing surface 53a of the first valve body 53 and the opening 52b that closes the closing surface 54a of the second valve body 54 are close to each other. That is, as shown in FIG. 12, when the closed surface 53a of the first valve body 53 is in a state of closing the first flow path 35 at the opening 51b of the first valve chamber 51, the closed surface 53a A part of the inner peripheral surface of the three flow paths 37 (on the left side of the inner peripheral surface in FIG. 12) is positioned substantially on the extension, and the blocking surface 53 a is one side in the center line C1 direction of the common flow path 38 (see FIG. 12 constitutes the wall surface at the end of the left side.

  Thus, when the first valve body 53 is closed and the second valve body 54 is opened, the second flow path 36 and the third flow path 37 are connected via the common flow path 38. In the switching valve 7, the second coating liquid 12A can flow. And as above-mentioned, since the obstruction | occlusion surface 53a of the 1st valve body 53 serves also as a part of inner wall of the valve internal flow path through which the 2nd coating liquid 12A flows in the bubble 7, this flow path in valve | bulb The second coating liquid 12 </ b> A that flows through the common channel 38 does not flow into the first channel 35 side. For this reason, it is possible to prevent the second coating liquid 12A from remaining on the first flow path 35 side.

  Similarly, the closed surface 54 a of the second valve body 54 closes the second flow path 36 at the second opening 52 b of the second valve chamber 52, and the closed surface 54 a is shared by the first flow path 35. It also serves as a part of the inner wall of the in-valve channel through which the first coating liquid 11A flows to the third channel 37 through the channel 38. That is, the common flow path 38 in the valve flow path from the first flow path 35 through the common flow path 38 to the third flow path 37 is connected to the second flow path 36. The second valve body 54 (the closing surface 54a) is the inner wall (wall surface) of the other end of the common flow path 38 in the center line C1 direction. The second flow path 36 is closed by closing the two openings 52b.

  Further, when the closing surface 54 a of the second valve body 54 is in a state where the second flow path 36 is closed at the opening 52 b of the second valve chamber 52, the closing surface 54 a is the inner peripheral surface of the third flow path 37. 12 (the right side of the inner peripheral surface in FIG. 12) is located on an extension, and the blocking surface 54a is the center of the common flow path 38 connecting the first flow path 35 and the third flow path 37. The wall surface of the edge part of the line C1 direction other side (right side in FIG. 12) is comprised.

  In this way, when the second valve body 54 is closed, the first flow path 35 and the third flow path 37 are connected via the common flow path 38. One coating solution 11A can flow. And as above-mentioned, since the obstruction | occlusion surface 54a of the 2nd valve body 54 serves as a part of inner wall of the flow path in the valve through which the 1st coating liquid 11A flows in the bubble 7, this flow path in the valve The first coating liquid 11 </ b> A that flows through the common channel 38 does not flow into the second channel 36 side. For this reason, it is possible to prevent the first coating liquid 11A from remaining on the second flow path 36 side.

  As described above, when the first coating liquid 11A flows through the valve 7, a part of the first coating liquid 11A does not remain on the second flow path 36 side, and similarly, the second coating liquid 11A flows through the valve 7 in the second direction. When the coating liquid 12A is flowing, a part of the second coating liquid 12A does not remain on the first flow path 35 side. Accordingly, the coating liquid 11A (12A) does not remain in the valve 7 during the liquid changing operation performed using the valve 7, and the coating liquid can be replaced quickly.

  In FIG. 12, it has been described that the length L1 of the common flow path 38 in the direction of the center line C1 is substantially the same as the diameter D1 of the third flow path 37 (opening 38a). There is a portion where the thickness of the wall 55 between the third flow path 37 and the valve chamber 51 (52) is theoretically zero. However, in reality, the wall 55 needs to be thick in order to function as a valve and the coating liquid has pressure, and is designed in consideration of a workable viewpoint and pressure resistance. From the point of view, a thickness of less than a few millimeters is required. As an example, the wall 55 can be 0.5 mm at the thinnest portion. Therefore, it can be said that the difference between the length L1 and the diameter D1 is approximately 4 mm or less. Thus, in the present invention, from the viewpoint of eliminating the portion where the coating liquid remains, the length L1 of the common flow path 38 in the center line C1 direction and the diameter D1 of the third flow path 37 (opening 38a) are completely the same. However, in fact, it is impossible to make completely the same, and it is almost the same.

  In the valve 7, the first inlet port 31 is provided on the upstream side of the first flow path 35, the first valve chamber 51 is provided on the downstream side, and the second inlet is provided on the upstream side of the second flow path 36. A port 32 is provided, and a second valve chamber 52 is provided on the downstream side. Although the first flow path 35 side and the second flow path side 36 have the same configuration, the second flow path side 36 side will be described as a representative. As shown in FIG. 9 and FIG. A flow path main body 36 a that is a straight line of the second flow path 36 connected to the second valve chamber 52 from the opening 32 opens at a position biased toward the top 52 c of the second valve chamber 52. That is, the center of the second valve chamber 52 does not exist on a straight line obtained by extending the center line of the flow channel main body 36 a of the second flow channel 36. In particular, as shown in FIG. 9, a hypothesis obtained by connecting the top of the inner peripheral surface of the flow path body 36 a to the tangent line at the top 52 c of the inner peripheral surface of the second valve chamber 52 having a circular cross section. In this configuration, a straight line L2 exists.

In addition, the same applies to the first valve chamber 51 side, and the flow channel main body 35 a that is on the straight line of the first flow channel 35 connected from the first inlet port 31 to the first valve chamber 51 is the first valve chamber. An opening 35b is formed at a position biased toward the top 51c of 51.
With this configuration, it is possible to prevent the bubbles 70 from remaining in the valve 7. That is, for example, as shown in FIG. 9, if bubbles 70 exist in the second coating liquid 12 </ b> A of the second valve chamber 52, the bubbles 70 gather on the top 52 c side. Therefore, the flow path main body 36a connected from the second inlet port 32 to the second valve chamber 52 has an opening 36b at a position biased toward the top 52c of the second valve chamber 52. With the second coating liquid 12A flowing through 36a, the bubbles 70 can be entrained and flowed to the third flow path 37 on the downstream side. This also applies to the first valve chamber 51, and the bubbles 70 can be prevented from remaining in the valve 7.
If there are many bubbles 70 in the coating liquid up to the base 3 (see FIG. 2), when the coating liquid is pumped out, the bubbles 70 act as an elastic body and the coating liquid The pressure fluctuates, and the discharge amount of the coating liquid from the base 3 is not constant, and there is a possibility that the coating liquid applied to the substrate W may be uneven (thickness unevenness).
Furthermore, as described above, since the flow path main body portions 35a and 36a are opened at positions deviated to the top sides of the valve chambers 51 and 52, when the coating liquid flows into the valve chambers 51 and 52, the valve body portions 35a and 36a A vortex is generated in the chambers 51 and 52, and the replacement performance of the coating liquid can be enhanced. Furthermore, the discharge performance of the bubbles 70 can be enhanced by this vortex.

As described above, in the coating apparatus (see FIG. 2) of the above embodiment, the two types of coating liquids 11A and 12A are changed by switching the open / closed state of the valve 7 by adopting the valve 7. be able to. And since this valve | bulb 7 is equipped with the structure which can prevent that many coating liquids remain | survive as mentioned above, it changes from the 1st coating liquid 11A to the 2nd coating liquid 12A as the said liquid change operation | work, for example. In this case, the first coating liquid 11A that has previously passed through the valve 7 does not remain and can be prevented from being mixed with the changed second coating liquid 12A, thereby improving the replacement performance of the coating liquid. It becomes possible.
Further, in the valve 7 having the posture of the above-described embodiment, for example, the flow path main body portion 36 a connected from the second inlet port 32 to the second valve chamber 52 is shifted to the top 52 c side of the second valve chamber 52. , The second coating liquid 12A that has flowed through the flow channel main body portion 36a allows the bubbles 70 to be entrained and flowed to the third flow channel 37 on the downstream side. It is possible to prevent bubbles 70 from remaining on the surface. Thus, it becomes convenient in the coating apparatus which dislikes that the bubble 70 mixes in a coating liquid by becoming the valve | bulb 7 with high bubble discharge | emission performance.

Although the coating apparatus has been described with the embodiment as described above, the valve and the coating apparatus of the present invention are not limited to the illustrated forms, and may be in other forms within the scope of the present invention. For example, methods other than those described above may be used for the liquid change operation for changing the coating liquid to a different type.
Moreover, although the said embodiment demonstrated the coating device used for manufacture of a color filter, the coating device used for manufacture of a flat panel display, an organic battery, etc. containing organic EL may be sufficient.

  3: base, 6: piping (channel for base), 7: switching valve, 11A: first coating liquid, 12A: second coating liquid, 21: first pump, 22: second pump, 31: inlet port ( First inlet port), 32: Inlet port (second inlet port), 33: Outlet port, 35: First flow path, 36: Second flow path, 37: Third flow path, 51: First valve chamber, 51b : First opening, 51c: Top, 52: Second valve chamber, 52b: Second opening, 52c: Top, 53: First valve body, 53a: Blocking surface, 54: Second valve body, 54a: Blocking surface

Claims (5)

A first flow path having a first inlet port, a second flow path having a second inlet port, a second flow path having an outlet port and being connected to one of the first flow path and the second flow path. A valve having three flow paths,
A first valve body in which the second flow path and the third flow path are connected by closing the first flow path;
A second valve body in which the first channel and the third channel are connected by closing the second channel;
The first valve body also serves as a part of an inner wall of a valve internal flow path in which liquid flows from the second flow path to the third flow path in a state where the first flow path is closed,
The second valve body also serves as a part of an inner wall of a valve internal flow path through which liquid flows from the first flow path to the third flow path in a state where the second flow path is closed. Valve to do. A first opening for connection to the first flow path is formed in the flow path in the valve through which liquid flows from the second flow path to the third flow path, and the first valve body Closing the first flow path by closing the first opening as part of the inner wall of the flow path,
A second opening for connecting to the second flow path is formed in the flow path in the valve through which the liquid flows from the first flow path to the third flow path, and the second valve body The valve according to claim 1, wherein the second flow path is closed by becoming a part of an inner wall of the path and closing the second opening. The first valve so that the closing surface of the first valve body that closes the first flow path faces the closing surface of the second valve body that closes the second flow path. The body and the second valve body are arranged,
3. The valve according to claim 1, wherein each of the closed surfaces in a closed state is positioned on a substantially extension of a part of an inner peripheral surface of the third flow path. A first valve chamber that houses the first valve body is formed in the first flow path,
A second valve chamber that houses the second valve body is formed in the second flow path,
The flow path leading from the first inlet port to the first valve chamber opens at a position biased to the top side of the first valve chamber,
The valve according to any one of claims 1 to 3, wherein a flow path connected from the second inlet port to the second valve chamber is opened at a position biased toward the top side of the second valve chamber. A base for discharging the coating liquid;
A plurality of pumps provided for each type of the coating liquid in order to send each of the different types of the coating liquid to the base side;
A plurality of inlet ports provided between the plurality of pumps and the base and connected to each of the pumps through a flow path, wherein the plurality of inlet ports are alternatively connected to an outlet port. A switchable valve;
A die channel for flowing the coating liquid from the outlet port to the die;
With
The said valve | bulb is a valve | bulb as described in any one of Claims 1-4, The coating device characterized by the above-mentioned.

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