JP2011077435A5 - - Google Patents
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- JP2011077435A5 JP2011077435A5 JP2009229541A JP2009229541A JP2011077435A5 JP 2011077435 A5 JP2011077435 A5 JP 2011077435A5 JP 2009229541 A JP2009229541 A JP 2009229541A JP 2009229541 A JP2009229541 A JP 2009229541A JP 2011077435 A5 JP2011077435 A5 JP 2011077435A5
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- 239000000758 substrate Substances 0.000 claims 13
- 238000000034 method Methods 0.000 claims 2
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009229541A JP5546195B2 (ja) | 2009-10-01 | 2009-10-01 | 基板処理装置、基板処理装置の表示方法及び半導体装置の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009229541A JP5546195B2 (ja) | 2009-10-01 | 2009-10-01 | 基板処理装置、基板処理装置の表示方法及び半導体装置の製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2011077435A JP2011077435A (ja) | 2011-04-14 |
| JP2011077435A5 true JP2011077435A5 (enExample) | 2012-11-08 |
| JP5546195B2 JP5546195B2 (ja) | 2014-07-09 |
Family
ID=44021068
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2009229541A Active JP5546195B2 (ja) | 2009-10-01 | 2009-10-01 | 基板処理装置、基板処理装置の表示方法及び半導体装置の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5546195B2 (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2023043716A (ja) * | 2021-09-16 | 2023-03-29 | 株式会社Ｓｃｒｅｅｎホールディングス | 処理装置群管理システム、処理装置群管理方法およびプログラム |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008306088A (ja) * | 2007-06-11 | 2008-12-18 | Ulvac Japan Ltd | プロセス管理システム |
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2009
- 2009-10-01 JP JP2009229541A patent/JP5546195B2/ja active Active