JP2011075409A - Scoring test device and scoring test method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a scoring test device and a scoring test method capable of testing whether a screw scores in a vacuum environment. <P>SOLUTION: This scoring test device 1 includes a vacuum chamber 2, and a plate 26 having each bolt 60 screwed is stored in an internal space G of the vacuum chamber 2. The plate 26 having each bolt 60 screwed into each tap hole 26A is placed under a prescribed environment (a vacuum environment, a high-temperature vacuum environment or the like) in the vacuum chamber 2. Then, it is tested whether the bolt 60 can be removed from the plate 26. It is evaluated whether scoring occurs easily between the bolt 60 and the plate 26, based on the test result. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to a galling test apparatus and a galling test method for testing whether or not a screw such as a bolt is galvanized in a vacuum or at a high temperature under vacuum.

  Conventionally, a large number of bolts, nuts and the like are used for assembling a vacuum processing apparatus. Bolts and the like that are exposed to a vacuum environment inside the vacuum processing apparatus are preliminarily degreased or electropolished to prevent contamination of the vacuum environment due to gas release (see, for example, Patent Document 1). ).

Japanese Patent Laying-Open No. 2008-202101 (paragraphs [0002] [0008] [0027], FIG. 1)

  However, for example, during maintenance of the vacuum processing apparatus, it is necessary to remove components such as a deposition prevention plate and a shower plate from the internal space of the chamber. At this time, the bolt may bite depending on the place and environment where the bolt is used. For example, since the bolts exposed to the vacuum environment inside the vacuum processing apparatus are subjected to the above-described degreasing and the like, the oils and fats that act as lubricants are eliminated. For this reason, it is known that it is easy to bite when removing the bolt. In particular, when the bolt and the part with the tapped hole into which the bolt is screwed are formed of the same kind of material (for example, made of stainless steel), the bolt may not be removed due to galling.

  When the bolts are gnawed, drilling holes in the bolts to remove the bolts, re-tapping the tapped holes, and time-consuming work are required. In addition, these operations inevitably generate dust and may cause contamination.

  Therefore, if the degree of galling of a bolt can be tested in advance by selecting the type of bolt and the part to which the bolt is screwed in under vacuum or the like, the type of bolt or the like can be selected based on the test result. Occurrence of the selection crease can be reduced.

  In view of the circumstances as described above, an object of the present invention is to provide a galling test apparatus and a galling test method capable of performing a test of whether or not a screw is galvanized in a vacuum environment.

In order to achieve the above object, a galling test apparatus according to an aspect of the present invention is a galling test apparatus for a test object having a first threaded portion, and includes a chamber, a jig, and a support base. It has.
The chamber has an internal space capable of maintaining a vacuum state. The jig has a plurality of second screwing parts that can be screwed with the first screwing part, and the first screwing part is fastened to the second screwing part to test the test object. It is possible to hold a plurality of objects. The said support stand is installed in the internal space of the said chamber, and supports the said jig so that attachment or detachment is possible.

It is a block diagram which shows the structure of the scoring test apparatus which concerns on one Embodiment of this invention. It is AA sectional drawing of the vacuum chamber of the scoring test apparatus shown in FIG. It is a top view which shows an example of the plate arrange | positioned in the vacuum chamber shown in FIG. It is sectional drawing which shows the state in which the volt | bolt screwed together to the plate shown in FIG. It is a figure which shows the tap hole of the predetermined position of the plate shown in FIG. It is a figure which shows the time-dependent change of the temperature in each position of a plate at the time of the heating of a plate by the heating apparatus shown in FIG. It is a figure which shows the test result when tightening various bolts and removing various bolts after heating the inside of a vacuum chamber at 200 ° C. for 1 hour. It is a figure which shows a test result when various bolts are clamp | tightened and removed at atmospheric pressure room temperature. It is a figure which shows the mass pattern by a mass spectrometer when a gold plating bolt is heated at 100 degreeC. It is a figure which shows the mass pattern by a mass spectrometer when a gold plating bolt is heated at 300 degreeC. It is a figure which shows the mass pattern by a mass spectrometer when a polyimide coat bolt is heated at 100 degreeC. It is a figure which shows the mass pattern by a mass spectrometer when a polyimide coat bolt is heated at 300 degreeC.

A galling test apparatus according to an embodiment of the present invention is a galling test apparatus for a test object having a first threaded portion, and includes a chamber, a jig, and a support base.
The chamber has an internal space capable of maintaining a vacuum state. The jig has a plurality of second screwing parts that can be screwed with the first screwing part, and the first screwing part is fastened to the second screwing part to test the test object. It is possible to hold a plurality of objects. The said support stand is installed in the internal space of the said chamber, and supports the said jig so that attachment or detachment is possible.

  According to the test apparatus, the presence or absence of galling in a vacuum environment can be evaluated. In addition, a plurality of test objects can be evaluated in a single test.

The galling test apparatus may further include heating means for heating the jig supported by the support base.
Thereby, the galling evaluation can be performed on the test object placed in a vacuum high temperature environment.

The scoring test apparatus may further include means for measuring the type of gas released into the internal space of the chamber.
Thereby, the gas release characteristic of the test object in a vacuum high temperature environment can be evaluated.

The galling test apparatus may further include gas introduction means for introducing gas into the chamber.
Thereby, the galling evaluation of the test object under a specific atmosphere can be performed.

  The scoring test method according to an embodiment of the present invention includes a jig test method in which a plurality of test objects having a first screwing part are provided with a plurality of second screwing parts that can be screwed with the first screwing part. Tightening the tool with a predetermined torque. Together with the plurality of test objects, the jig is installed in the internal space of the chamber. By exhausting the internal space of the chamber, the first threaded portion is exposed to a vacuum. By measuring the removal torque of the test object from the jig, the galling between the first screwed portion and the second screwed portion is evaluated.

    According to the test method described above, the presence or absence of galling in a vacuum environment can be evaluated. In addition, a plurality of test objects can be evaluated in a single test.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

<Configuration of galling test equipment>
FIG. 1 is a block diagram showing a configuration of a scoring test apparatus according to an embodiment of the present invention.
The galling test apparatus 1 includes a vacuum chamber 2, an exhaust system 3, a gas analyzer 4, and a gas introduction system 5.

  The vacuum chamber 2 includes an outer wall portion 21 that constitutes an outer wall of the vacuum chamber 2, and a reflector 22 provided inside the outer wall portion 21. An internal space G is formed inside the reflector 22. The internal space G is a space that can be in an atmospheric pressure room temperature state, a vacuum state, or a vacuum high temperature state. The reflector 22 is made of metal, for example, and has a substantially cylindrical peripheral surface. A pressure gauge 23 for measuring the pressure in the internal space G is connected to the vacuum chamber 2. A more detailed configuration of the vacuum chamber 2 will be described later.

  The exhaust system 3 includes pipes 31, 32, 33, a variable flow valve 34, a pump 35, and a pump 36. The pipe 31 connects the vacuum chamber 2 and the variable flow valve 34. The pipe 32 connects the variable flow valve 34 and the pump 35. The pipe 33 connects the pump 35 and the pump 36. The pipes 31, 32, and 33 serve as gas exhaust passages in the vacuum chamber 2. The variable flow valve 34 is a valve for adjusting the flow rate of the gas flowing through the pipes 31 and 32. The pumps 35 and 36 exhaust the gas in the vacuum chamber 2 through the pipes 31 and 32 and the like. For example, a turbo molecular pump is used as the pump 35. For example, a rotary pump is used as the pump 36.

  The gas analyzer 4 is a vacuum gauge capable of measuring a mass pattern of each gas of a mixed gas generated in the vacuum chamber 2 as described later. The gas analyzer 4 includes pipes 4A, 4B, 4C, 4D, 4E, 4F, 4G, a mass spectrometer 41, an aperture 42, flow rate valves 43, 44, a pump 45, and a pump 46.

  The pipe 4 </ b> A connects the pipe 31 and the aperture 42. The pipe 4 </ b> B connects the aperture 42 and the mass spectrometer 41. The pipe 4 </ b> C connects the pipe 4 </ b> A and the flow rate valve 43. The pipe 4D connects the flow valve 43 and the pipe 4B. The pipe 4 </ b> E connects the pipe 4 </ b> B and the flow rate valve 44. The pipe 4 </ b> F connects the flow rate valve 44 and the pump 45. The pipe 4G connects the pump 45 and the pump 46.

  The mass spectrometer 41 is a vacuum gauge capable of measuring the gas type of the mixed gas that has flowed from the vacuum chamber 2 through the pipes 31 and 4A, the aperture 42, and the pipe 4B. For the mass spectrometer 41, for example, a QMS (Quadrupole Mass Spectrometer) which is one of mass spectrometers is used.

The aperture 42 has a function of adjusting the flow rate of the gas flowing into the aperture 42 from the vacuum chamber 2 via the pipes 31 and 4A and flowing out into the pipe 4B, and the internal pressure of the gas analyzer 4 (for example, the internal pressure of the pipe 4B). Is kept below a predetermined value (for example, 10 ⁻² Pa). The flow valve 43 is provided in parallel to the aperture 42.

  The pump 45 exhausts gas through the pipes 4B, 4E, and 4F with the aperture 42 and the flow valve 43 closed and the flow valve 44 opened. A turbo molecular pump is used as the pump 45. The pump 46 exhausts gas through the pipes 4B, 4E, 4F, and 4G with the aperture 42 and the flow valve 43 closed and the flow valve 44 opened. Thereby, the internal pressure of piping 4B, 4D, 4E, 4F, 4G can be made smaller than the internal pressure of piping 31, 4A, 4C. A turbo molecular pump is used as the pump 45, and a rotary pump is used as the pump 46.

  The gas introduction system 5 introduces a predetermined gas into the vacuum chamber 2. The predetermined gas includes, for example, an inert gas or a reactive gas such as nitrogen, argon, helium, or oxygen. The gas introduction system 5 includes a gas storage tank (not shown), a flow valve 51 connected to a pipe (not shown) connected to the gas storage tank, a pipe 52 that connects the flow valve 51 and the vacuum chamber 2, and the like.

  2 is a cross-sectional view of the vacuum chamber 2 of the scoring test apparatus 1 shown in FIG.

  Between the outer wall 21 of the vacuum chamber 2 and the reflector 22, a plurality of columns 24 having heat insulation properties are arranged. Each column 24 supports the reflector 22. A base 25 for supporting a plate 26 as a jig is disposed in the internal space G of the vacuum chamber 2. A plurality of heating devices 27 are disposed in the internal space G. The arrangement positions of the respective heating devices 27 are uniform so that the entire main surface of the plate 26 arranged on the table 25 is heated substantially uniformly. That is, the three heating devices 27 are provided at substantially equal intervals in the circumferential direction so as to follow the inner peripheral surface of the reflector 22. As the heating device 27, for example, a lamp heater can be used. The number of heating devices 27, the arrangement positions, and the like are not particularly limited, and can be appropriately changed according to the size of the vacuum chamber 2, the size of the heating device 27, the size of the plate 26, and the like. The heating device 27 is not limited to a lamp heater, and other heating devices can be used.

FIG. 3 is a plan view showing an example of the plate 26 arranged in the vacuum chamber 2 shown in FIG.
As shown in the figure, the plate 26 is a substantially rectangular plate, and has a plurality of tap holes 26A (screw holes, second screwing portions). The plurality of tap holes 26 </ b> A are formed at substantially equal intervals in the direction along the short side and the long side perpendicular to the plate 26. The diameter of each tap hole 26A is substantially the same. The plate 26 is obtained by electrolytic polishing of stainless steel (SUS304), for example.

4 is a cross-sectional view showing a state where bolts are screwed onto the plate 26 shown in FIG.
As shown in the figure, each tapped hole 26A of the plate 26 is engraved with a helical screw groove. A bolt 60 as a test object is screwed into each tap hole 26A. Thereby, a plurality of bolts are held on the common plate 26.

  The bolt 60 includes a head 60A and a screw shaft portion 60B (first screwing portion). The head 60A has a polygonal shape such as a quadrangle or a hexagon. The screw shaft portion 60B has a screw groove spirally formed on the side peripheral surface thereof. The length of the screw shaft portion 60 </ b> B is substantially the same as the thickness of the plate 26.

  Hereinafter, the heating characteristics of the plate 26 by the heating device 27 of the galling test apparatus 1 will be described.

FIG. 5 is a view showing the tapped holes 26A at predetermined positions of the plate 26 shown in FIG.
As shown in the figure, the position of the tap hole 26A formed at a position near the short side 26B of the plate 26 is indicated by (1). The position of the tap hole 26A formed at a position close to the long side 26C of the plate 26 is indicated by (2). The position of the tap hole 26A formed at a position close to the approximate center of the plate 26 is indicated by (3).

  FIG. 6 is a diagram showing the change over time of the temperature at each position (1), (2), and (3) of the plate 26 when the plate 26 is heated by the heating device 27.

  In the figure, each position (1) of the plate 26 when the plate 26 is set on the table 25 in the vacuum chamber 2 and heated to a predetermined temperature (200, 300, 400, 500 and 600 ° C.) by the heating device 27. , (2) and (3) show changes with time in temperature. The measurement result at position (1) is indicated by a solid line, the measurement result at position (2) is indicated by a solid line thinner than the solid line at position (1), and the measurement result at position (3) is indicated by a solid line at position (1). Shown in bold solid line.

As shown in the figure, when the plate 26 is heated to 200 ° C., it can be seen that there is almost no difference in measured temperature at positions (1), (2) and (3). Moreover, when heating temperature is 300,400,500,600 degreeC, a difference is seen by the measurement temperature of a position (1) and a position (2), (3). Specifically, when the plate 26 is heated to 600 ° C., the temperature difference between the position (1) and the positions (2) and (3) is about 20 ° C. or less.
Thus, it can be seen that the galling test apparatus 1 has substantially the same temperature at each position of the plate 26 when the inside of the vacuum chamber 2 is heated to 200 ° C.

<Method of galling test>
Next, a method for a galling test using the galling test apparatus 1 of the present embodiment will be described.

As shown in FIG. 4, a preselected bolt 60 is screwed into a plurality of tap holes 26 </ b> A of the preselected plate 26 with a predetermined torque, and is arranged on the table 25 in the vacuum chamber 2.
Next, the internal space G of the vacuum chamber 2 is maintained for a predetermined time in a predetermined environment (vacuum environment, high temperature vacuum environment, specific gas environment, etc.).
After a predetermined time has elapsed, the internal space G is vented to the atmosphere, the plate 26 is removed from the internal space G, and the bolts 60 are removed from the plate 26.
Then, when the bolt 60 is removed from the plate 26, it is checked whether or not the bolt 60 is gnawed. If the bolt 60 is not gnawed, the torque is measured when the bolt 60 is removed.

  The test environment is set according to the usage environment of the bolt 60 that is the test target. For example, a test object that is exposed to a high temperature forms a predetermined high-temperature environment by the heating device 27. At the same time, the amount of gas released from the bolt 60 may be measured by the mass spectrometer 41. Thereby, in addition to the presence or absence of galling of the bolt 60, the heat resistance of the bolt 60 can be evaluated. In addition, for a test object exposed to a specific gas atmosphere (inert gas atmosphere, reactive gas atmosphere or the like), a target gas is introduced from the gas introduction system 5 into the internal space G. If necessary, a predetermined high temperature environment may be formed by the heating device 27, or the emitted gas may be analyzed by the gas analysis unit 4.

<Action etc.>
As described above, according to the present embodiment, the plate 26 in which each bolt 60 is screwed into each tap hole 26 </ b> A is used for a predetermined environment (vacuum environment, high-temperature vacuum environment, specific gas environment) in the vacuum chamber 2 of the galling test apparatus 1. Etc) Can be put down. It can then be tested whether the bolt 60 can be removed from the plate 26. Based on this test result, it can be evaluated whether galling is likely to occur between the bolt 60 and the plate 26. As a result, it is possible to prevent the occurrence of galling in advance by selecting the bolts 60 and the plate 26 that are less likely to galling.

  The plate 26 has a plate shape and is formed with a plurality of tap holes 26A. Bolts 60 can be screwed into the plurality of tap holes 26A, respectively. For this reason, it is possible to test whether galling occurs at a plurality of locations in a single galling test. As a result, since the number of samples can be increased, variation in test results can be suppressed.

  The plate 26 is plate-shaped, and a plurality of tap holes 26A are formed at substantially equal intervals in the direction along the short side and the long side perpendicular to the plate 26, and the diameters of the tap holes 26A are substantially the same. ing. Moreover, the some heating apparatus 27 is arrange | positioned substantially equally. For this reason, when the inside of the vacuum chamber 2 is heated, each bolt 60 can be heated substantially uniformly. As a result, a galling test with little variation in heating temperature can be performed.

<Example of galling test>
Next, a galling test between Example 1 and Comparative Example 1 using the galling test apparatus 1 will be described.

Example 1
Three bolts of the following four types (1) to (4) were prepared as the bolt 60, respectively.
(1) A bolt made of stainless steel (SUS304: M6 × 20 mm) subjected to degreasing and cleaning treatment.
(2) A bolt made of stainless steel (SUS304: M8 × 20 mm) subjected to degreasing and cleaning treatment.
(3) A bolt made of stainless steel (SUS304: M6 × 20 mm) subjected to gold plating with a thickness of 1 μm.
(4) A bolt made of stainless steel (SUS304: M8 × 20 mm) subjected to gold plating with a thickness of 1 μm.
Here, “◇” in “M ◇ × ΔΔmm” represents the nominal diameter (diameter) [mm] of the screw, and “ΔΔ” represents the nominal length (L) [mm] of the screw. .

Next, three bolts (3) were respectively screwed into the tap holes 26A of the plate 26 with a predetermined torque (12 N · m).
Next, the inside of the vacuum chamber 2 was heated in a vacuum high temperature state (10 ⁻³ Pa level, 200 ° C.) for 1 hour.
Thereafter, the bolt (3) was removed from the plate 26, and the presence or absence of galling was examined. When the bolt (3) did not bite, the torque when removing the bolt (3) was measured (first removal test).

  The bolt (3) that was able to be removed in the first removal test is screwed again into the tap hole 26A with a predetermined torque (12 N · m), and the inside of the vacuum chamber 2 is kept in a vacuum high temperature (200 ° C.) state for 1 hour. It was heated to check whether the bolt (3) could be removed from the plate 26. When the bolt (3) did not bite, the torque when removing the bolt (3) was measured (second removal test). When the bolt (3) could be removed in the second removal test, the third removal test was performed in the same manner as the second removal test. In addition, when galling occurred in each removal test, the test was terminated there. Further, the same test as described above was performed for the bolt (1).

  For the bolts (2) and (4), a plate 26 having a plurality of tap holes 26A corresponding to the size (M8) of the screw shaft portion 60B of these bolts is prepared, and the bolts (2) and (4) A test similar to the test on the bolts (1) and (3) was performed except that the torque when tightening or removing the tap holes 26A was 20 N · m.

(Comparative Example 1)
As Comparative Example 1, tests were performed in the same manner as in Example 1 except that the bolts (1) to (4) were fastened to the tap holes 26A of the plate 26 at atmospheric pressure and room temperature and then removed.

(Caving test results)
FIG. 7 is a diagram showing the test results of Example 1, and shows the value of the removal torque (N · m) for each of the bolts (1) to (4). In addition, "x" in a figure shows that the galling occurred in the volt | bolt (same also about FIG. 8).
As shown in the figure, the bolt (1) and the bolt (2) were all galling. On the other hand, no galling occurred in the bolt (3) and the bolt (4).

FIG. 8 is a diagram showing test results of Comparative Example 1.
As shown in the figure, galling occurred in four of the six bolts (1) and (2). On the other hand, no galling occurred in the bolt (3) and the bolt (4).

  From the above test results, it can be seen that bolts exposed to a vacuum high temperature environment are easier to bite than bolts fastened in an atmospheric pressure room temperature environment. Thus, the bolt used in a vacuum high temperature environment can know whether the said bolt is easy to bite by performing the above-mentioned biting test beforehand. As a result, it is possible to prevent the occurrence of galling in advance by selecting the bolts (3) and (4) (gold plated bolts) and the plate 26 (electropolished stainless steel plate) as parts that are difficult to galling. it can.

<Heat resistance test>
Next, a heat resistance test using the galling test apparatus 1 will be described.
Similar to the above-described galling test, the bolt 60 was screwed into the tap hole 26A of the plate 26 and placed in a vacuum environment at room temperature.
Here, the aperture 42 and the flow valve 43 were closed, the flow valve 44 was opened, the pumps 45 and 46 were driven, and the pressure on the piping 4B side was reduced from the piping 31 side. As a result, when gases are generated in the vacuum chamber 2, these gases are allowed to flow into the gas analyzer 4 via the pipe 31 or the like (differential exhaust).

Next, the inside of the vacuum chamber 2 was evacuated to the 10 ⁻⁵ Pa level, and then heated to 300 ° C.
In this temperature raising process, when the inside of the vacuum chamber 2 reached a predetermined temperature (100 ° C., 300 ° C.), the mass pattern in the vacuum chamber 2 was measured using the mass spectrometer 41.

  Depending on the type of each bolt 60 used in the heat resistance test, different combinations of gases are generated from the respective bolts 60 in the internal space G of the vacuum chamber 2 at different partial pressures. Based on the measurement result of the mass spectrometer 41 at each temperature (100 ° C., 300 ° C.), the heat resistance of the bolt 60 can be evaluated. Specifically, when the temperature in the vacuum chamber 2 is 300 ° C., the mass pattern measured by the mass spectrometer 41 can be used as one reference for evaluating the heat resistance of the bolt 60.

(Example 2)
Six bolts (d) described above were prepared, and these were screwed into the tap holes 26A of the plate 26 with a predetermined torque. Next, the plate 26 holding the bolt (d) is placed on the base 25 in the vacuum chamber 2, and the temperature inside the vacuum chamber 2 is raised to 300 ° C. by the heating device 27. The mass pattern of gas generated in the vacuum chamber 2 from the bolt 60 was measured by the mass spectrometer 41.

(Results of heat resistance test)
FIG. 9 shows a mass pattern by the mass spectrometer 41 when the bolt (d) is heated to 100 ° C., and FIG. 10 shows a mass pattern by the mass spectrometer 41 when the bolt (d) is heated to 300 ° C. FIG. In both FIG. 9 and FIG. 10, the horizontal axis is Mass Number (mass number), and the vertical axis is the detection intensity corresponding to the partial pressure (ion current I (A) detected by the mass spectrometer 41).

Comparing these figures, it can be seen that the bolt (d) generates more H ₂ (m / e = 2) at 300 ° C. than at 100 ° C. That is, it was confirmed that the bolt plated with gold releases hydrogen under a high temperature vacuum.

(Example 3)
Six polyimide coated bolts (hereinafter referred to as bolts (e)) made of polyimide coated stainless steel (SUS304: M8 × 20 mm) are prepared and screwed into the tap holes 26A of the plate 26 with a predetermined torque. did. Next, the plate 26 holding the bolt (e) was placed on the table 25 in the vacuum chamber 2, and the inside of the vacuum chamber 2 was heated to 300 ° C. by the heating device 27. The mass pattern of gas generated in the vacuum chamber 2 from the bolt (e) at 100 ° C. and 300 ° C. was measured by the mass spectrometer 41.

(Results of heat resistance test)
FIG. 11 shows a mass pattern by the gas analyzer 4 when the bolt (e) is heated to 100 ° C., and FIG. 12 shows a mass pattern by the mass spectrometer 41 when the bolt (e) is heated to 300 ° C. FIG. In both FIG. 11 and FIG. 12, the horizontal axis is Mass Number (mass number), and the vertical axis is the detection intensity (ion current I (A)) corresponding to the partial pressure.

Comparing these figures, it can be seen that more CO ₂ (m / e = 44) is generated at 300 ° C. than at 100 ° C. in the bolt (e). That is, it was confirmed that the polyimide-coated bolt released carbon dioxide under high temperature vacuum.

<Action etc.>
As described above, by using the galling test apparatus 1, the gas species generated from the bolt 60 during heating in the vacuum chamber 2 can be measured by the mass spectrometer 41. As a result, for example, when the temperature in the vacuum chamber 2 is 300 ° C., the mass pattern of hydrogen and carbon dioxide generated in the internal space G of the vacuum chamber 2 according to these bolts is used to evaluate the heat resistance temperature of the bolts. It can be one standard. Thus, the heat resistance temperature of the plate 26 and the bolt can be evaluated in a vacuum high temperature environment.

  In addition, a galling test can be performed using the galling test apparatus 1 and a heat resistance test using the gas analysis unit 4 can be performed. That is, the cost of the galling test apparatus 1 can be reduced.

  Further, the galling test apparatus 1 of the present embodiment includes a gas introduction system 5 as shown in FIG. For this reason, for example, a gas such as nitrogen, argon, or helium can be introduced into the vacuum chamber 2. Therefore, the above-described galling test and heat resistance test can be performed while the inside of the vacuum chamber 2 is placed in any one of these gases. As a result, each of these tests can be performed in various environments.

  The present invention is not limited to the embodiment described above, and various modifications can be made within the scope of the technical idea of the present invention.

  In the said embodiment, the example in which the tap hole 26A of the same diameter was formed in multiple numbers in the plate 26 was shown. However, a plurality of tap holes (M6 and M8) having different diameters may be formed on a single plate. As a result, a plurality of bolts having different diameters can be screwed onto a single plate, and the galling test can be performed more efficiently.

  Moreover, in the said embodiment, the example which uses the volt | bolt 60 in the galling test etc. was shown. However, the present invention is not limited to this, and for example, a plurality of general screws (screws) (not shown) and a plate to which these screws (screws) are screwed may be used. Further, a plurality of bolts 60 and nuts (not shown) in which screw holes into which the respective bolts 60 can be screwed are accommodated in the vacuum chamber 2 so that the above-described caulking test and heat resistance test are performed. Also good.

  Moreover, as an example of the bolt 60, a gold-plated bolt, a polyimide-coated bolt, or the like is illustrated. However, the bolt 60 is not limited to these, and the bolt may be plated with platinum, silver, palladium, rhodium, or the like.

  Further, by changing the material of the plate 26, more various galling tests and the like can be performed. For example, in the said embodiment, the example which uses what carried out the electrolytic polishing process of the stainless steel (SUS304) for the plate 26 was shown. However, the present invention is not limited to this. For example, the base material of the plate may be used after being subjected to a treatment such as chemical plating, hot dipping, or vacuum deposition.

  Further, the thickness of the plate 26 (the depth of the tapped hole) is changed, and a galling test is performed using a screw (bolt) having a screw shaft portion having a length corresponding to the changed thickness (the depth of the tapped hole). Etc. may be performed. Thereby, the test using various screws (bolts) can be performed.

  In the above embodiment and the like, the number of the tap holes 26A of the plate 26 is several tens, but is not limited to this, and can be changed as appropriate. By increasing the number of tap holes 26A, it is possible to eliminate variation in the galling test. A plurality of tap holes having different hole diameters may be formed on the same plate 26.

  In the first embodiment and the like, the example in which the temperature in the vacuum chamber 2 is set to 200 ° C. has been shown in order to ensure the uniformity of the temperature at the position of each bolt 60 in the vacuum chamber 2. However, it is known that when the inside of the vacuum chamber 2 is heated to 600 ° C. as shown in FIG. 6, the temperature difference between the position (1) and (2) and (3) is about 20 ° C. Therefore, based on this temperature result, a galling test can be performed when the bolt at the position (1) is heated to 600 ° C., and the bolt at the position (2) and (3) is 620 ° C. It is possible to perform a galling test or the like when heated.

  Further, by adjusting the arrangement position and heating temperature of each heating device 27, each bolt 60 screwed to the plate 26 may be heated to a different temperature to perform a galling test. Specifically, for example, each heating device 27 is disposed at a position equidistant from the plate 26 in a direction orthogonal to the main surface of the plate 26 (X direction shown in FIG. 2). At this time, the respective heating devices 27 are arranged at substantially equal intervals in a direction along the main surface of the plate 26 (Y direction shown in FIG. 2). And each heating device 27 should just be heated at 200 degreeC, 300 degreeC, and 400 degreeC, respectively. Thereby, each volt | bolt 60 provided in the position corresponding to each heating apparatus 27 can be heated to a different temperature, and a galling test can be performed. As a result, the galling test can be performed efficiently.

  In the above-described embodiment, the bolt 60 that is screwed onto the plate 26 having the above-described configuration is the test target. However, the test target may be a nut component having a screw hole (first screwing portion). In this case, as a jig for holding the nut part, it is possible to use a member in which a plurality of screw shafts (second screwing portions) that can be screwed into the screw holes are erected. Also in this case, a galling test and a heat resistance test can be performed.

  In addition, the said scoring test apparatus 1 showed the example provided with the gas analysis part 4 and the gas introduction system 5 as shown in FIG. However, in the case where only the galling test is performed, the gas analyzer 4 and the gas introduction system 5 may not be provided.

DESCRIPTION OF SYMBOLS 1 ... Test apparatus 2 ... Vacuum chamber 3 ... Exhaust system 4 ... Gas analysis part 5 ... Gas introduction system 26 ... Plate (jig)
26A ... Tap hole 27 ... Heating device 35, 36, 45, 46 ... Pump 42 ... Aperture 60 ... Bolt 60B ... Screw shaft part G ... Internal space

Claims (9)

A scoring test apparatus for a test object having a first threaded portion,
A chamber having an internal space capable of maintaining a vacuum state;
There are a plurality of second screwing portions that can be screwed with the first screwing portion, and the plurality of the test objects are held by tightening the first screwing portion to the second screwing portion. Jigs that can do,
A scoring test apparatus comprising: a support base installed in an internal space of the chamber and detachably supporting the jig. The scoring test device according to claim 1,
The jig is a plate-like member in which a plurality of the second screwing portions are formed. The scoring test device according to claim 2,
A scoring test apparatus further comprising a heating means for heating the jig supported by the support base. The scoring test device according to claim 3,
A galling test apparatus further comprising means for measuring the type of gas released into the internal space of the chamber. The scoring test device according to claim 2,
A scoring test apparatus further comprising gas introduction means for introducing a test gas into the chamber. Fastening a plurality of test objects having a first screwing portion to a jig having a plurality of second screwing portions that can be screwed to the first screwing portion with a predetermined torque,
The jig is installed in the internal space of the chamber together with the plurality of test objects,
Exhausting the internal space of the chamber exposes the first threaded portion to a vacuum,
A galling test method for evaluating galling between the first screwing portion and the second screwing portion by measuring a removal torque of the test object from the jig. The scoring test method according to claim 6, further comprising:
A galling test method in which the jig is heated to a predetermined temperature in the internal space of the chamber. The scoring test method according to claim 7, further comprising:
A galling test method for measuring the type of gas released from the first threaded portion into the internal space of the chamber. The scoring test method according to claim 6, further comprising:
A scoring test method for introducing a test gas into the internal space of the chamber.

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