JP2011066368A5 - - Google Patents

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Publication number
JP2011066368A5
JP2011066368A5 JP2009218244A JP2009218244A JP2011066368A5 JP 2011066368 A5 JP2011066368 A5 JP 2011066368A5 JP 2009218244 A JP2009218244 A JP 2009218244A JP 2009218244 A JP2009218244 A JP 2009218244A JP 2011066368 A5 JP2011066368 A5 JP 2011066368A5
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JP
Japan
Prior art keywords
cassette
wafers
wafer
load port
loader
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JP2009218244A
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Japanese (ja)
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JP5384270B2 (en
JP2011066368A (en
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Publication date
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Priority to JP2009218244A priority Critical patent/JP5384270B2/en
Priority claimed from JP2009218244A external-priority patent/JP5384270B2/en
Priority to KR1020100089380A priority patent/KR101250135B1/en
Priority to CN2010102875090A priority patent/CN102024727B/en
Priority to TW099131854A priority patent/TWI487054B/en
Publication of JP2011066368A publication Critical patent/JP2011066368A/en
Publication of JP2011066368A5 publication Critical patent/JP2011066368A5/ja
Application granted granted Critical
Publication of JP5384270B2 publication Critical patent/JP5384270B2/en
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本発明の請求項１に記載のローダは、複数のウエハが収納された第１のカセットと複数のダイシングフレーム付きウエハが収納された第２のカセットの双方を載置し得るロードポートと、上記第１のカセット内のウエハと上記第２のカセット内のダイシングフレーム付きウエハの双方を搬送し得る搬送機構と、を備え、上記各ウエハの電気的特性検査を行う検査装置に用いられるローダであって、上記ロードポートは、上記第１、第２のカセットの双方を載置し得る移動体と、上記第１のカセットが載置された時に上記移動体を初期位置から上記搬送機構の上記ウエハの受け渡し位置へ移動させる駆動機構と、を有することを特徴とするものである。 A loader according to a first aspect of the present invention is a load port on which both a first cassette containing a plurality of wafers and a second cassette containing a plurality of wafers with dicing frames may be placed; A loader for use in an inspection apparatus for carrying out an inspection of the electrical characteristics of each wafer, comprising a transport mechanism capable of transporting both the wafer in the first cassette and the wafer with dicing frame in the second cassette. Te, the load port, the first, and the moving body capable of placing both the second cassette, the above said conveyor structure of the moving object from the initial position when said first cassette is placed And a drive mechanism for moving the wafer to a delivery position of the wafer.

Claims (1)

複数のウエハが収納された第１のカセットと複数のダイシングフレーム付きウエハが収納された第２のカセットの双方を載置し得るロードポートと、上記第１のカセット内のウエハと上記第２のカセット内のダイシングフレーム付きウエハの双方を搬送し得る搬送機構と、を備え、上記各ウエハの電気的特性検査を行う検査装置に用いられるローダであって、上記ロードポートは、上記第１、第２のカセットの双方を載置し得る移動体と、上記第１のカセットが載置された時に上記移動体を初期位置から上記搬送機構の上記ウエハの受け渡し位置へ移動させる駆動機構と、を有することを特徴とするローダ機構。 A load port on which both a first cassette containing a plurality of wafers and a second cassette containing a plurality of wafers with dicing frames can be placed; a wafer in the first cassette and the second And a transfer mechanism capable of transferring both of the dicing frame-attached wafers in the cassette, wherein the load port is a loader used in an inspection apparatus for performing an electrical property inspection of each of the wafers. a movable body capable of placing both the second cassette, and a driving mechanism for moving the moving body from an initial position to a delivery position of the wafer in the conveying Organization when said first cassette is placed A loader mechanism characterized by having.
JP2009218244A 2009-09-21 2009-09-21 loader Active JP5384270B2 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2009218244A JP5384270B2 (en) 2009-09-21 2009-09-21 loader
KR1020100089380A KR101250135B1 (en) 2009-09-21 2010-09-13 Loader
CN2010102875090A CN102024727B (en) 2009-09-21 2010-09-17 Loader
TW099131854A TWI487054B (en) 2009-09-21 2010-09-20 Loader

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009218244A JP5384270B2 (en) 2009-09-21 2009-09-21 loader

Publications (3)

Publication Number Publication Date
JP2011066368A JP2011066368A (en) 2011-03-31
JP2011066368A5 true JP2011066368A5 (en) 2012-09-13
JP5384270B2 JP5384270B2 (en) 2014-01-08

Family

ID=43865868

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009218244A Active JP5384270B2 (en) 2009-09-21 2009-09-21 loader

Country Status (4)

Country Link
JP (1) JP5384270B2 (en)
KR (1) KR101250135B1 (en)
CN (1) CN102024727B (en)
TW (1) TWI487054B (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101923531B1 (en) 2011-12-23 2018-11-30 삼성전자주식회사 Apparatus of bonding semiconductor chip
JP6689539B2 (en) * 2016-08-12 2020-04-28 株式会社ディスコ Judgment device
JP7082274B2 (en) * 2017-11-06 2022-06-08 シンフォニアテクノロジー株式会社 Load port and mapping processing method at load port
JP7184620B2 (en) * 2018-12-11 2022-12-06 株式会社ディスコ cutting equipment

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1064972A (en) * 1996-08-14 1998-03-06 Miyazaki Oki Electric Co Ltd Wafer carrier
JP4134289B2 (en) * 2002-05-29 2008-08-20 東京エレクトロン株式会社 Probe card transport device and adapter
JP4300003B2 (en) * 2002-08-07 2009-07-22 東京エレクトロン株式会社 Mounting table driving apparatus and probe method
JP4091380B2 (en) * 2002-08-29 2008-05-28 東京エレクトロン株式会社 Load port compatible with multiple types of cassettes containing substrates to be processed
JP2006120766A (en) * 2004-10-20 2006-05-11 Olympus Corp Wafer transfer apparatus and adapter for setting cassette
JP4767896B2 (en) * 2007-03-29 2011-09-07 東京エレクトロン株式会社 Inspected object transport device and inspection device
JP2009170726A (en) * 2008-01-17 2009-07-30 Rorze Corp Load port and method for adjusting cassette position
JP5381118B2 (en) * 2009-01-21 2014-01-08 東京エレクトロン株式会社 Probe device

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